JP2018071947A - Steam superheater and processing method using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve stable supply of superheated steam.SOLUTION: A steam superheater comprises: a first steam generation section 2 which generates steam from water through either induction heating or electrical heating; a superheated steam generation section 3 which generates superheated steam from the steam through either the induction heating or the electrical heating; a steam supply passage L2 which supplies the steam generated by the first steam generation section 2 to the superheated steam generation section 3; and an external steam introduction section CP which is connected to a second steam generation section 200 different from the first steam generation section 2 and introduces the steam generated by the second steam generation section 200 into the superheated steam generation section 3.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a superheated steam generator that generates superheated steam from water and a treatment method using the superheated steam generator.

  In recent years, a superheated steam treatment apparatus for cleaning, drying, or sterilizing an object to be treated using superheated steam has been considered.

  As shown in Patent Document 1, the superheated steam treatment device includes a steam boiler that generates steam, a superheated steam generation unit that generates superheated steam by superheating steam generated by the steam boiler, and the superheated steam generation unit. And a processing furnace to which the generated superheated steam is supplied, and is configured to wash, dry, or sterilize an object to be processed accommodated in the processing furnace.

  However, the conventional superheated steam treatment apparatus is provided so that the steam boiler and the superheated steam generation unit are in a one-to-one relationship, and when the steam boiler fails, the superheated steam is not supplied when the steam boiler is replaced or repaired. There is a problem that it cannot be generated. In addition, gas-fired or oil-fired boilers with low energy costs are often used as steam boilers. If gas or oil costs rise or supply becomes difficult, steam boilers are continued. And may be difficult to use.

  Furthermore, although the superheated steam generated by the superheated steam generation unit has an upper limit due to the capability of the superheated steam generation unit, it depends on the superheated steam temperature, and by lowering the temperature, the superheated steam generation unit has a higher temperature. Supply amount can be increased. However, the amount of steam (saturated steam) supplied to the superheated steam generator is limited by the saturated steam generation capacity of the steam boiler, and even if the temperature of the superheated steam is low, the superheat from the superheated steam generator is overheated. There is a problem that the supply amount of water vapor remains constant and cannot be increased.

JP 2004-209314 A

  Therefore, the present invention has been made to solve the above-described problems, and its main problem is to stably supply superheated steam.

  That is, the superheated steam generation apparatus according to the present invention includes a first steam generation unit that generates steam from water using an induction heating system or an electrical heating system, and an induction heating system or electrical heating system that generates superheated steam from steam. A second water vapor generation unit that is different from the first water vapor generation unit, and a second water vapor generation unit that is different from the first water vapor generation unit are connected to the second water vapor generation unit. And an external water vapor introducing unit for introducing water vapor from the water vapor generating unit into the superheated water vapor generating unit.

If it is such, since supply of the water vapor | steam to a superheated water vapor | steam production | generation part can be performed by a 1st water vapor | steam production | generation part and a 2nd water vapor | steam production | generation part, superheated water vapor | steam can be supplied stably.
For example, during normal times, when the second water vapor generation unit is not usable due to a failure or the like while using the second water vapor generation unit, the superheated water vapor is continued by switching to the first water vapor generation unit. Can be generated.
In addition, when one steam generation unit is used, the amount of superheated steam generated is limited by the steam generation capability of the steam generation unit, but in the present invention, the supply of steam to the superheated steam generation unit is the first. By performing from both the first steam generation unit and the second steam generation unit, the amount of steam supplied to the superheated steam generation unit can be increased, and as a result, the amount of superheated steam generation in the superheated steam generation unit can be increased. it can.
Furthermore, since the superheated steam generating device of the present invention has an external steam introducing section for introducing steam from the second steam generating section, it can be used by connecting a steam boiler owned by the user, Convenience can be improved.

  As a specific embodiment, water vapor from the first water vapor generation unit is supplied to the superheated water vapor generation unit via the water vapor supply channel, and water vapor from the second water vapor generation unit is It is desirable to be configured to be able to switch to both supply states supplied to the superheated steam generation unit via the steam introduction unit.

For example, consider a case of a superheated steam generator for a maximum temperature of 1200 ° C. in which steam at 130 ° C. is generated in a saturated steam generator, the steam is supplied to the superheated steam generator, and superheated steam with a generated weight A is generated.
Assuming that the electric power for generating A amount of 130 ° C. steam is B, the 1070 ° C. heating power for generating 1200 ° C. superheated steam is approximately B, and the operating capacity of the superheated steam generator is set to B + B = 2B It is normal to make it.
However, in the superheated steam generator of this superheated steam generator, even when superheated steam at 665 ° C., which is 535 ° C., whose temperature is half the temperature, is generated, the capacity of the saturated steam generator is B. Only A is generated as the amount of water vapor. In this case, the operating capacity of the superheated steam generator is 0.5B, and the operating capacity of the superheated steam generator is 1.5B.
In the present invention, if an A amount of 130 ° C. saturated water vapor is supplied from the external water vapor introducing section, it becomes possible to generate 2A amount and 665 ° C. superheated water vapor. Naturally, when generating superheated steam at a temperature of 267.5 ° C. and 397.5 ° C., if 3A amount of 130 ° C. water vapor is supplied from the external water vapor introduction section, the amount of 4A and 397.5 ° C. Of superheated steam.
If the amount of superheated steam obtained in the case of the superheated steam generator for the maximum temperature of 1200 ° C. is expressed by a formula, the output temperature of the superheated steam is Θ, and the amount of superheated steam to be obtained is Q, the following formula shows Can do.
Q = (1200-130) A / (Θ-130)
= 1070 A / (Θ-130)
Therefore, when the required water vapor amount to be supplied from the external water vapor introducing section is q, the following values are obtained.
q = {1070 / (Θ−130) −1} A

  A steam flow rate adjusting unit that adjusts the amount of steam supplied from the first steam generating unit to the superheated steam generating unit and / or the amount of steam supplied from the second steam generating unit to the superheated steam generating unit, and It is desirable that the steam flow rate adjusting unit adjusts the amount of steam supplied to the superheated steam generating unit in both supply states.

As another specific embodiment, the first steam supply state in which the steam from the first steam generation section is supplied to the superheated steam generation section through the steam supply flow path, or the second steam It is configured to be switchable to a second one-side supply state in which water vapor from the generation unit is supplied to the superheated steam generation unit via the external water vapor introduction unit.
For example, when the second steam generation unit is used as a gas-fired or oil-fired steam boiler with low energy costs, the steam boiler is normally used, but the steam boiler cannot be used due to a failure of the steam boiler. Moreover, superheated steam can be continuously generated by switching to the first steam generating section.

  A steam flow rate adjusting unit that is provided in the steam supply channel and adjusts a flow rate of the steam supplied to the superheated steam generating unit; and in the second one-side supply state, the steam flow rate adjusting unit is configured as the superheated steam. It is desirable that supply of the water vapor to the generation unit is stopped. If it is this structure, the switching from the 2nd one side supply state to the 1st one side supply state can be performed quickly by producing | generating water vapor | steam by a 1st water vapor | steam production | generation part in a 2nd one side supply state.

  It is desirable that a control device for controlling power supply to the first water vapor generation unit is provided, and that the control device stops power supply to the first water vapor generation unit in the second one-side supply state. With this configuration, it is possible to reduce the power consumed by the first water vapor generation unit in the second one-side supply state.

  In order to smoothly switch the steam supply to the superheated steam generator without interrupting the switching from the first one-side supply state to the second one-side supply state and from the second one-side supply state to the first one-side supply state. In the switching from the first one-side supply state to the second one-side supply state, the water vapor supply amount from the second water vapor generation unit is gradually decreased while the water vapor supply amount from the first water vapor generation unit is gradually decreased. In the switching from the second one-side supply state to the first one-side supply state, the water vapor supply from the first water vapor generation unit is gradually reduced while the water supply amount from the second water vapor generation unit is gradually decreased. Increase the amount gradually.

  As a specific configuration of the first steam generation unit and the superheated steam generation unit, the first steam generation unit and the superheated steam generation unit use a Scott connection transformer composed of a main transformer and a T seat transformer. The first steam generation unit includes a first heating metal body that is induction-heated or energized by the output of the main transformer, and the superheated steam generation unit includes the T It is conceivable to have a second heating metal body that is induction-heated or electrically heated by the output of the seat transformer.

  In this configuration, in order to individually control the temperature of the steam generated by the first steam generator and the temperature of the superheated steam generated by the superheated steam generator, two phases on the input side of the main transformer are used. A first control device for controlling the voltage or current is provided on one of them, and a second control device for controlling the voltage or current is provided on one end side of the primary coil that is the input side of the T-seat transformer. Preferably, the output voltage of the main transformer and the output voltage of the T-seat transformer are individually controlled by the first control device and the second control device.

The primary output control in the Scott connection transformer is such that the current flowing through the primary coil of the T-seat transformer flows into the primary coil of the main transformer in the primary current, so the output of the main transformer is zero. There are cases where it cannot be done. For example, when only the water vapor from the second water vapor generation unit is heated by the second heating metal body without outputting the first water vapor generation unit, the output of the first control device on the main seat side is set to zero. The second control device on the side is controlled so as to have a large output, but the current of the primary coil of the T seat transformer flows into the primary coil of the main transformer, so that the first heating metal body is heated. It will be. Then, there is a risk that the first heating metal body may be overheated.
In order to suitably solve this problem, a midpoint terminal connected to the midpoint of the primary coil of the main transformer and a terminal on one end side of the primary coil of the T transformer are connected. A first connection state for Scott connection, and a second connection state for disconnecting the Scott connection and connecting both terminals of the primary coil of the T-seat transformer including the second control device to a three-phase AC power source It is desirable to further include a switching mechanism for switching between.
If it is this structure, in the case of the 1st one-side supply state which produces | generates superheated steam by a 1st steam generation part and a superheated steam generation part, it uses in a 1st connection state (Scott connection state), and a 2nd steam generation part In the case of the second one-side supply state in which the superheated steam is generated by the superheated steam generation section, the steam from the second connection state (circuit state in which the T seat side circuit and the main seat side circuit are independent) may be used. it can. In the second connection state, the first water vapor generation unit can be kept warm while the superheated water vapor is generated using the second water vapor generation unit. It is also possible to continue generating superheated steam using the second steam generation unit with the output of the first control device set to zero.

In the Scott connection state by the switching mechanism, when the input voltage of the three-phase AC power source is E, the voltage applied to the primary coil of the T-seat transformer including the second control device is E × (√3) / 2. However, if the Scott connection is disconnected by the switching mechanism and both terminals of the primary coil of the T-seat transformer including the second control device are connected to the three-phase AC power source, the applied voltage becomes E. That is, the voltage applied to the primary coil of the T-seat transformer is 2 / (√3) times. Further, until the second heating metal body reaches the target temperature, the second control device operates so as to obtain a large output, and the circuit current is also approximately 2 / (√3) times.
At this time, if the second control device has a constant current control function, it is possible to prevent a large current exceeding a certain value from flowing through the primary coil of the T-seat transformer and to provide a circuit protection function. it can.

  In addition, an induction heating method or current heating method first steam generation unit that generates steam from water, an induction heating method or current heating method superheated steam generation unit that generates superheated steam from steam, and the first steam generation unit And a second water vapor generation unit different from the first water vapor generation unit is connected, and the superheated water vapor is supplied from the second water vapor generation unit to the superheated water vapor generation unit. A processing method for processing an object to be processed using an overheated steam generating device provided with an external steam introducing unit for introduction into a steam generating unit, both of the first steam generating unit and the second steam generating unit From the first steam generation unit to the superheated steam generation unit and / or from the second steam generation unit By adjusting the supply amount of water vapor into serial superheated steam generation unit, and adjusting the supply amount of water vapor into the superheated steam generator.

  Furthermore, the processing method using superheated steam according to the present invention includes a first steam generation unit that generates steam from water or an induction heating system that generates steam from water, and an induction heating system or current heating system that generates superheated steam from steam. A superheated steam generating unit, a steam supply channel for supplying the steam generated by the first steam generating unit to the superheated steam generating unit, and a second steam generating unit different from the first steam generating unit are connected. A processing method of processing an object using a superheated steam generator having an external steam introduction unit for introducing the steam from the second steam generation unit into the superheated steam generation unit, (2) Steam supplied from the steam generating section is supplied to the superheated steam generating section through the external steam introducing section to generate superheated steam, and the object to be processed is heated by the superheated steam. When the main process and the main process are not performed, the steam from the first steam generation unit is supplied to the superheated steam generation unit via the steam supply channel to generate superheated steam, and the superheated steam And a sub-process for processing the object to be processed.

  According to the present invention configured as described above, the supply of steam to the superheated steam generation unit can be switched between the first steam generation unit and the second steam generation unit. It can be carried out.

It is a figure which shows typically the structure of the superheated steam generator of this embodiment. It is a figure which shows an example of the hollow conductor tube of the embodiment. It is a figure mainly showing the iron core composition of the 1st water vapor generating part and superheated water vapor generating part of the embodiment. It is a figure which shows the modification of the iron core structure of the 1st water vapor | steam production | generation part and superheated steam production | generation part of the embodiment. It is a figure which shows the connection of the induction coil to the 1st water vapor | steam production | generation part and superheated steam production | generation part of the embodiment. It is a figure which shows typically the structure of the control apparatus of the embodiment. It is a figure which shows the connection of the induction coil to the 1st water vapor | steam production | generation part and superheated steam production | generation part of deformation | transformation embodiment.

  Hereinafter, an embodiment of a superheated steam generator according to the present invention will be described with reference to the drawings.

  The superheated steam generation apparatus 100 according to the present embodiment generates superheated steam by heating the steam generated by the two steam generation units. As shown in FIG. The first steam generation unit 2 to be generated, the superheated steam generation unit 3 that heats the saturated steam to generate superheated steam, and the steam that supplies the saturated steam generated by the first steam generation unit 2 to the superheated steam generation unit 3 An external water vapor introducing section for connecting the supply flow path L2 and a second water vapor generating section 200 different from the first water vapor generating section 2 and introducing the water vapor from the second water vapor generating section 200 into the superheated steam generating section 3. CP.

  The 1st water vapor | steam production | generation part 2 is a thing of an induction heating system or an electrical heating system, for example, and has the water introduction port 21 into which water is introduce | transduced, and the water vapor | steam derivation port 22 which derives | emits water vapor | steam. In addition, the water supply flow path L1 which supplies water to the 1st water vapor | steam production | generation part 2 from the tank etc. which are not shown in figure is connected to the water introduction port.

  The first water vapor generation unit 2 of the induction heating system includes, for example, a hollow conductor tube 2T (see FIG. 2) that has a water introduction port 21 and a water vapor outlet port 22, and is formed inside or outside the hollow conductor tube 2T. And an induction coil (not shown) for induction heating the hollow conductor tube 2T, and an AC power supply (not shown) for applying an AC voltage to the induction coil. An AC voltage is applied to the induction coil. It is conceivable that, by applying this, Joule heat is generated by flowing an induced current through the hollow conductor tube 2T, and the state of the water introduced into the hollow conductor tube 2T is changed to saturated water vapor.

  Further, the first steam generation unit 2 of the energization heating method includes a hollow conductor tube 2T having a water introduction port 21 and a steam lead-out port 22, for example, and a direct current or a voltage applied to the hollow conductor tube 2T. An AC power source (not shown) is provided, and it is considered that Joule heat is generated by passing an electric current through the hollow conductor tube to change the state of water introduced into the hollow conductor tube 2T into saturated water vapor. It is done. In the case of the current heating method, the hollow conductor tube is not limited to a spiral shape, and may be, for example, a straight tube shape.

  In any case, the temperature of water vapor derived from the water vapor outlet port 22 of the hollow conductor tube 2T is detected, the voltage applied to the induction coil, the voltage applied to the hollow conductor tube 2T, or the hollow conductor tube By controlling Fordback of the current flowing through 2T, the temperature of water vapor derived from the water vapor deriving port 22 of the hollow conductor tube 2T is controlled. In addition, the temperature detection of water vapor | steam can consider the system which detects the temperature of water vapor directly, and the system which detects the temperature of water vapor indirectly by detecting the temperature of the hollow conductor pipe | tube 2T.

  The superheated steam generation unit 3 is, for example, of the induction heating method or the current heating method, similar to the first steam generation unit 2, and includes a steam introduction port 31 through which steam is introduced and a superheated steam extraction port 32 through which superheated steam is derived. Have

  The induction heating type superheated steam generator 3 is disposed, for example, in a spiral hollow conductor tube 3T (see FIG. 2) having a steam inlet port 31 and a superheated steam outlet port 32, and inside or outside the hollow conductor tube 3T. An induction coil (not shown) for induction heating the hollow conductor tube 3T and an AC power source (not shown) for applying an AC voltage to the induction coil, and applying an AC voltage to the induction coil Thus, it is conceivable that Joule heat is generated by causing an induced current to flow through the hollow conductor tube 3T to change the state of the water vapor introduced into the hollow conductor tube 3T into superheated water vapor.

  Further, the superheated steam generation unit 3 of the energization heating method includes a hollow conductor tube 3T having a steam introduction port 31 and a superheated steam outlet port 32, for example, a spiral shape, and a direct current or a voltage applied to the hollow conductor tube 3T. An AC power source (not shown) is provided, and Joule heat is generated by flowing a current through the hollow conductor tube 3T to change the state of the steam introduced into the hollow conductor tube 3T into superheated steam. Conceivable. In any case, the temperature of the superheated steam led out from the lead-out port 32 of the hollow conductor tube 3T is controlled by controlling the voltage applied to the hollow conductor tube 3T or the current flowing through the hollow conductor tube 3T. To do. In the case of the energization heating method, the hollow conductor tube 3T is not limited to a spiral shape, and may be, for example, a straight tube shape.

  In any case, the temperature of the superheated steam led out from the superheated steam lead-out port 32 of the hollow conductor tube 3T is detected, the voltage applied to the induction coil, the voltage applied to the hollow conductor tube 3T, or the hollow The temperature of the superheated steam led out from the superheated steam lead-out port 32 of the hollow conductor pipe 3T is controlled by controlling the current flowing through the conductor pipe 3T by Ford back control. In addition, the temperature detection of superheated steam can be considered as a method of directly detecting the temperature of superheated steam or a method of detecting the temperature of superheated steam indirectly by detecting the temperature of the hollow conductor tube 3T.

  In addition, in the case of the induction heating method, if the frequency of the AC voltage to be applied is a commercial frequency of 50 Hz or 60 Hz, the current penetration is deep. Since the value is obtained, it is possible to detect the steam temperature with high accuracy even by indirect detection.

  In the present embodiment, as shown in FIGS. 3 and 4, magnetic path cores 101 and 102 are provided at the center of the induction coil 2 </ b> C of the first water vapor generation unit 2 and the induction coil 3 </ b> C of the superheated steam generation unit 3. Thus, the magnetic flux generated by the induction coils 2C and 3C is efficiently circulated, so that the magnetic flux is efficiently introduced into the hollow conductor tubes 2T and 3T. Further, in addition to the magnetic path core 101 of the first water vapor generating unit 2 and the magnetic path core 102 of the superheated steam generating unit 3, the common magnetic path is a common path for magnetic flux generated in the two magnetic path cores 101 and 102. An iron core 103 is provided, and yoke cores 104 and 105 are connected to the upper and lower sides of the common iron core 103 and the two magnetic path cores 101 and 102, respectively. With this configuration, it is possible to reduce the size of the entire iron core, and consequently to make the entire device compact. 3 and 4, the iron cores are disposed so as to be located at the vertices of the triangle in plan view, and the yoke cores 104 and 105 are bent with the common core 103 as a refracting point in plan view. Thereby, the distance between the two iron cores 101 and 102 for magnetic paths can be made small, the dimension of the whole iron core in the width direction can be made small, and space saving can be achieved.

  In addition, the induction coil 2C of the first steam generation unit 2 and the induction coil 3C of the superheated steam generation unit 3 are Scott-connected (see FIG. 5). That is, the 1st water vapor | steam production | generation part 2 and the superheated water vapor | steam production | generation part 3 are comprised using the Scott connection transformer which consists of a main seat transformer and a T seat transformer.

  The hollow conductor tube 2T (first heating metal body) of the first steam generating unit 2 is induction-heated or energized and heated by the output of the main transformer, and the hollow conductor tube 3T (second heating) of the superheated steam generating unit 3 is heated. The metal body is induction-heated or energized and heated by the output of the T seat transformer.

  Moreover, the 1st control apparatus 81 which controls a voltage or an electric current is provided in one (the V phase of the three-phase alternating current power supply 10 in FIG. 5) among the two phases of the input side of a main transformer. A second control device 82 for controlling voltage or current is provided on one end side of the primary coil (induction coil 3C) that is the input side of the T-seat transformer (the U phase of the three-phase AC power supply 10 in FIG. 5). . Here, the first control device 81 and the second control device 82 are configured using semiconductor control elements such as thyristors. The first control device 81 and the second control device 82 are configured to individually control the output voltage of the main transformer and the output voltage of the T seat transformer.

  One end of the steam supply flow path L2 is connected to the steam outlet port 22 of the first steam generating section 2, and the other end is connected to the superheated steam introducing port 31 of the superheated steam generating section 3. It is configured. In addition, by providing the function as the connecting pipe in any one of the hollow conductor pipes 2T and 3T, the steam outlet port 22 of the first steam generating section 2 and the superheated steam introducing port 31 of the superheated steam generating section 3 are provided. May be connected via, for example, a joint having insulating properties.

  Further, the water vapor supply flow path L2 is provided with a first water vapor flow rate adjusting unit 4 that adjusts the flow rate of the saturated water vapor supplied to the superheated water vapor generating unit 3. The first water vapor flow rate adjustment unit 4 of the present embodiment is a first flow rate adjustment valve. The first flow rate adjustment valve 4 is controlled by a control device 7 to be described later, and its valve opening is controlled. In addition, a flow meter may be provided in the water vapor supply channel L2.

  The external steam introduction part CP is provided on the downstream side (superheated steam generation part 3 side) or the superheated steam generation part 3 of the first flow rate adjustment valve 4 in the steam supply flow path L2, and from the second steam generation part 200 An external water vapor supply channel for supplying water vapor is connected. The second steam generation unit 200 is, for example, a gas-fired or oil-fired steam boiler, but may be of an induction heating method or an electric heating method as with the first steam generation unit 2.

  Specifically, the external water vapor introduction part CP is a connection port to which a connection pipe constituting the external water vapor supply channel L3 is connected. In the case where the external water vapor introducing portion CP is provided in the water vapor supply channel L2, a connection port is formed in the connection pipe constituting the water vapor supply channel L2. Further, when the external steam introduction part CP is provided in the superheated steam generation part 3 (see FIG. 1), a connection port is formed in the superheated steam generation part 3. In the case where the external steam introduction part CP (connection port) is formed in the superheated steam generation part 3, considering the heating efficiency of the steam from the second steam generation part 200, the upstream side of the hollow conductor tube 3T (steam introduction port 31). Side).

  The external water vapor supply channel L3 is provided with a second water vapor flow rate adjusting unit 5 that adjusts the flow rate of water vapor supplied to the superheated water vapor generating unit 3. The second water vapor flow rate adjustment unit 5 of the present embodiment is a second flow rate adjustment valve. Note that the second flow rate adjusting valve 5 is controlled by a control device 7 to be described later, and the opening degree of the second flow rate adjusting valve 5 is controlled. In addition, a flow meter may be provided in the external water vapor supply channel L3. Further, when the external water vapor introduction part CP has an introduction pipe having the connection port at the tip, the second water vapor flow rate adjustment part 5 may be provided in the introduction pipe.

  In this embodiment, the superheated steam generated by the superheated steam generation unit 3 is supplied to the processing unit 6 that processes the workpiece W.

  The processing unit 6 heat-treats the processing object W with superheated steam (for example, washing, drying, firing or sterilization), and stores the processing object W and forms a sealed space or a substantially sealed space. A container 61; a superheated steam introduction port 62 for introducing superheated steam; a drain discharge port 63 for discharging drain water generated in the object to be treated 61; And a discharge port 64 for discharging the used steam that has passed through the processing object container 61. The superheated steam introducing port 62 of the processing unit 6 is connected to the superheated steam deriving port 32 of the superheated steam generating unit 3 through a superheated steam supply channel L4. An opening / closing valve is provided in the flow path connected to the drain discharge port 63 and the discharge port 64.

  The superheated steam generation device 100 having the above-described configuration is a first one-side supply state in which the steam from the first steam generation unit 2 is supplied to the superheated steam generation unit 3, or from the second steam generation unit 200 to the superheated steam generation unit 3. It is comprised so that it may switch to the 2nd one-side supply state to which the water vapor | steam is supplied.

  Here, the controller 7 that controls the generators 2 and 3 and the flow rate adjusting valves 4 and 5 is configured to switch to one of the first one-side supply state and the second one-side supply state.

  This control device 7 physically includes a CPU, a memory, an A / D converter, a D / A converter, and the like. Functionally, as shown in FIG. The 1st heating temperature control part 71 which controls heating temperature (henceforth 1st heating temperature), and the 2nd heating temperature control which controls the heating temperature (henceforth 2nd heating temperature) of the superheated steam generation part 3 A first flow rate adjustment valve control unit 73 that controls the first flow rate adjustment valve 4, and a second flow rate adjustment valve control unit 74 that controls the second flow rate adjustment valve 5. In addition, the control device 7 includes a processing object temperature acquisition unit 75 that acquires the temperature of the workpiece W accommodated in the processing unit 6 or the temperature in the processing unit 6. In addition, although the control apparatus 7 and each part, such as the 1st water vapor | steam production | generation part 2 and the superheated steam production | generation part 3, are connected, the description about the connection is abbreviate | omitted in FIG.

  Hereinafter, the operation of the superheated steam generator 100 of the present embodiment will be described with reference to FIG.

  During normal operation, the second flow rate adjustment valve control unit 74 of the control device 7 opens the second flow rate adjustment valve 5 and supplies water vapor to the superheated water vapor generation unit 3 from the external water vapor supply flow path L3. The second water flow generation unit 200 may be operated after the second flow rate adjustment valve 5 is opened, or the second flow rate adjustment valve 5 may be opened after the second water vapor generation unit 200 is operated. . Here, the first flow rate adjustment valve 4 may be in a closed state or in an open state. However, if the first flow rate adjustment valve 4 is in a closed state, the water vapor from the second water vapor generation unit is generated. Backflow into the first water vapor generation unit 2 can be prevented.

  And the 2nd heating temperature control part 72 acquires the measured value from 2nd temperature sensor T2 provided in the hollow conductor pipe | tube 3T of the superheated steam production | generation part 3, or the superheated steam supply flow path L4, and based on this measured value Thus, the second heating temperature is controlled so that the superheated steam generated by the superheated steam generation unit 3 has a predetermined temperature. Specifically, the second heating temperature is controlled to the set temperature of the superheated steam generated by the superheated steam generation unit 3 or the temperature before and after that, and is controlled to 200 to 1200 ° C., for example.

  Specifically, the second heating temperature control unit 72 acquires a measured value from the second temperature sensor T2 provided in the hollow conductor tube 3T or the superheated steam supply channel L4 of the superheated steam generation unit 3, and this measured value. The second heating temperature is controlled by controlling the magnitude of the AC voltage applied to the induction coil 3C of the superheated steam generator 3 based on the above. The second temperature sensor T2 is provided on the downstream side of the hollow conductor tube 3T of the superheated steam generation unit 3, the superheated steam outlet port 32, or the vicinity thereof in order to bring the measured value closer to the temperature of the superheated steam. It is preferable.

  Thereby, the superheated steam generator 100 is in a second one-side supply state in which the steam from the second steam generator 200 is supplied to the superheated steam generator 3 and superheated steam is generated. In the second one-side supply state, a main process is performed in which the workpiece W accommodated in the processing unit 6 is heat-treated (for example, washed, dried, baked or sterilized).

  And when the 2nd steam generation part 200 cannot be operated like failure or maintenance of the 2nd steam generation part 200, or when it is necessary to switch to the 1st steam generation part 2 for other reasons, the 2nd flow rate The adjustment valve control unit 74 closes the second flow rate adjustment valve 5, and the first flow rate adjustment valve control unit 73 opens the first flow rate adjustment valve 4. In switching from the second one-side supply state to the first one-side supply state, the steam supply amount from the first steam generation unit 2 is gradually increased while the steam supply amount from the second steam generation unit 200 is gradually decreased. Let Specifically, the second flow rate adjustment valve control unit 74 gradually closes the second flow rate adjustment valve 5, and the first flow rate adjustment valve control unit 73 gradually opens the first flow rate adjustment valve 4 so that the valve opening is zero. To gradually increase from 1 to a predetermined opening. During this switching operation, it is desirable that the amount of steam supplied to the superheated steam generator 3 does not change before and after switching.

  Note that the control device 7 operates the second water vapor generation unit 200 to switch from the water vapor supply of the second water vapor generation unit 200 to the water vapor supply of the first water vapor generation unit, that is, switching between opening and closing of the flow rate adjusting valves 4 and 5. It may be performed automatically by detecting the presence or absence of the signal, or may be performed by the control device 7 acquiring a switching signal input from the user.

  The first heating temperature control unit 71 controls the first heating temperature so that the saturated water vapor generated by the first water vapor generation unit 2 has a predetermined temperature. In the present embodiment, the first water vapor generation unit 2 The temperature of the hollow conductor tube 2T is the first heating temperature.

  Specifically, the first heating temperature control unit 71 acquires a measurement value from the first temperature sensor T1 provided in the hollow conductor tube 2T or the water vapor supply channel L2 of the first water vapor generation unit 2, and the measurement value Based on this, the magnitude | size of the alternating voltage applied to the induction coil 2C of the 1st water vapor | steam production | generation part 2 is controlled, and 1st heating temperature is controlled to 100-140 degreeC, for example.

  The first temperature sensor T1 is provided on the downstream side of the hollow conductor tube 2T of the first water vapor generation unit 2, the water vapor outlet port 22 or in the vicinity thereof in order to bring the measured value closer to the temperature of the saturated water vapor. It is preferable.

  At this time, the second heating temperature control unit 72 obtains a measured value from the second temperature sensor T2 provided in the hollow conductor tube 3T of the superheated steam generation unit 3 or the superheated steam supply flow path L4, and uses this measured value. Based on this, the second heating temperature is controlled so that the superheated steam generated by the superheated steam generation unit 3 has a predetermined temperature. Specifically, the second heating temperature is controlled to the set temperature of the superheated steam generated by the superheated steam generation unit 3 or the temperature before and after that, and is controlled to 200 to 1200 ° C., for example.

  Thereby, the superheated steam generator 100 is in a first one-side supply state in which the steam from the first steam generator 2 is supplied to the superheated steam generator 3 and superheated steam is generated. In the first one-side supply state, a sub-process of heat-treating the workpiece W accommodated in the processing unit 6 is performed. In addition, while the sub-process is performed, replacement, repair, maintenance, or the like of the second water vapor generation unit 200 is performed.

  Thereafter, when the second water vapor generating unit 200 is ready for operation, the first flow rate adjustment valve control unit 73 closes the first flow rate adjustment valve 4 and the second flow rate adjustment valve control unit 74 sets the second flow rate adjustment. The valve 5 is opened to switch to the main process described above. In the switching from the first one-side supply state to the second one-side supply state, the water vapor supply amount from the second water vapor generation unit 200 is gradually increased while the water vapor supply amount from the first water vapor generation unit 2 is gradually decreased. Let Specifically, the first flow rate adjustment valve control unit 73 closes the first flow rate adjustment valve 4 gradually, and the second flow rate adjustment valve control unit 74 gradually opens the second flow rate adjustment valve 5 so that the valve opening is zero. To gradually increase from 1 to a predetermined opening. During this switching operation, it is desirable that the amount of steam supplied to the superheated steam generator 3 does not change before and after switching. This switching may be performed automatically by the control device detecting whether or not the second water vapor generation unit 200 is operating, or the control device 7 acquires a switching signal input from the user. You may make it carry out by.

  The standby state may be set while switching from the second one-side supply state to the first one-side supply state. This standby state is a state in which the first water vapor generating unit 2 is generating saturated water vapor, and is a state in which the supply of the saturated water vapor is stopped by closing the first flow rate adjusting valve 4. Similarly, the standby state may be set while switching from the first one-side supply state to the second one-side supply state. This standby state is a state in which the second water vapor generating unit 200 is generating saturated water vapor, and is a state in which the supply of the saturated water vapor is stopped by closing the second flow rate adjusting valve 5.

According to the superheated steam generation device 100 configured as described above, the supply of steam to the superheated steam generation unit 3 can be switched between the first steam generation unit 2 and the second steam generation unit 200, so Can be stably supplied.
For example, the second steam generation unit 200 is used as a gas-fired or oil-fired steam boiler with a low energy cost, and the steam boiler cannot be used due to a failure or the like of the steam boiler during normal use. In such a case, the superheated steam can be continuously generated by switching to the first steam generation unit 2.
Moreover, since the superheated steam generator 100 of this embodiment has the external steam introduction part CP for introducing the steam from the 2nd steam generation part 200, it can connect and use the steam boiler which a user holds. And user convenience can be improved.

The present invention is not limited to the above embodiment.
For example, in the embodiment, the first flow rate adjustment valve control unit 73 is configured to be in the second one-side supply state with the first flow rate adjustment valve 4 being closed, but the first heating temperature control unit 71 is You may comprise so that the electric power supply to the induction coil of the 1st water vapor | steam production | generation part 2 may be stopped and it may be in a 2nd one-side supply state. At this time, the first flow rate adjustment valve 4 may be in a closed state or in an open state, but if the first flow rate adjustment valve 4 is in a closed state, the water vapor from the second water vapor generation unit 200 Can be prevented from flowing back into the first water vapor generation unit 2.

  Moreover, in the said embodiment, although it is set as the structure which switches the 1st water vapor | steam production | generation part 2 and the 2nd water vapor | steam production | generation part 200, both the 1st water vapor | steam production | generation part 2 and the 2nd water vapor | steam production | generation part 200 operate | move, Water vapor from the generation unit 2 is supplied to the superheated steam generation unit 3 via the water vapor supply channel L2, and water vapor from the second water vapor generation unit 200 is supplied to the superheated steam generation unit via the external water vapor introduction unit. It is good also as a structure switched to both supply states. If both of these states are the supply state, the three states may be configured to be switchable together with the first one-side supply state and the second one-side supply state of the embodiment.

In both supply states, the first flow rate adjustment valve control unit 73 of the control device 7 controls the valve opening degree of the first flow rate adjustment valve 4, and the second flow rate adjustment valve control unit 74 controls the second flow rate adjustment valve 5. The amount of steam supplied to the superheated steam generator 3 is adjusted by controlling the valve opening. At this time, the supply amount Q of steam to be supplied to the superheated steam generator 3, it is more than the maximum production amount A ₂ of the maximum production amount A ₁ and the second steam generator 200 of the first steam generator 2 (Q > A ₁ or Q> A ₂ ). Even when the supply amount Q of steam to be supplied to the superheated steam generation unit 3 is smaller than the maximum production amount A ₂ of the maximum production amount A ₁ or the second steam generator 200 of the first steam generator 2 The supply amount Q may be distributed to the generation amount of the first steam generation unit 2 and the generation amount of the second steam generation unit 200, and each distribution amount may be supplied to the superheated steam generation unit 3.

  Furthermore, in addition to the configuration of the above embodiment, the superheated steam generation device 100 may have a return channel that returns the used steam that has passed through the processing unit 6 to the superheated steam generation unit 3. One end of the return flow path is connected to the processing unit 6 (for example, the discharge port of the workpiece storage unit), and the other end is downstream of the flow rate adjustment valve in the water vapor supply flow path L2 (superheated steam generation unit 3 side), It is connected to the external water vapor supply channel L3 or the superheated water vapor generating unit 3. Thus, heat loss can be suppressed by reusing used steam.

  In addition, as shown in FIG. 7, the superheated steam generator 100 is a first connection for Scott connection of the primary coil (induction coil 2C) of the main transformer and the primary coil (induction coil 3C) of the T seat transformer. A switching mechanism 9 may be provided that switches between a state and a second connection state in which the induction coil 2C and the induction coil 3C are independent circuits.

  The first connection state includes a midpoint terminal 2m connected to the midpoint of the primary coil (induction coil 2C) of the main transformer, and one end side terminal 3t of the primary coil (induction coil 3C) of the T seat transformer. Is connected to the Scott connection. On the other hand, in the second connection state, the Scott connection is disconnected, and both terminals of the primary coil (induction coil 3C) of the T-seat transformer including the second control device 82 are connected to the three-phase AC power supply 10 (in FIG. (U phase and V phase). In the second connection state, both side terminals of the primary coil (induction coil 2C) of the main transformer remain connected to the V phase and the W phase of the three-phase AC power source 10.

  The switching mechanism 9 is configured using, for example, an electromagnetic contactor or a semiconductor switch element, and is controlled by the control device 7. Moreover, in this structure, the 2nd control apparatus 82 has a constant current control function which controls the electric current which flows into the primary coil (induction coil 3C) of a T seat transformer to below a fixed value.

  In the case of the first one-side supply state in which superheated steam is generated using the steam of the first steam generation unit 2, the switching mechanism 9 sets the first connection state (Scott connection state). On the other hand, in the second one-side supply state in which superheated steam is generated using the steam of the second steam generation unit 200, the switching mechanism 9 causes the second connection state (the T seat side circuit and the main seat side circuit to be independent). Circuit state). In the second connection state, the second control device 82 controls the current flowing through the induction coil 3C to generate superheated steam using the second steam generation unit 200, while the first control device 81 uses the induction coil. By controlling the current flowing through 2C, the first water vapor generating unit 2 can be kept warm.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Superheated steam production | generation apparatus L1 ... Water supply flow path L2 ... 1st water vapor supply flow path L3 ... External water vapor supply flow path L4 ... Superheated steam supply flow path 2 ... 1st Steam generation unit 200 ... second steam generation unit 3 ... superheated steam generation unit 4 ... first flow rate adjustment valve (first steam flow rate adjustment unit)
5 ... 2nd flow regulating valve (2nd water vapor flow regulating part)
6 ... Processing unit 7 ... Control device

Claims (12)

A first water vapor generating part of an induction heating method or an electric heating method for generating water vapor from water;
An induction heating method or an electric heating method for generating superheated steam from water vapor;
A steam supply flow path for supplying the steam generated by the first steam generating section to the superheated steam generating section;
A superheated steam generation device comprising a second steam generation unit different from the first steam generation unit, and an external steam introduction unit for introducing the steam from the second steam generation unit into the superheated steam generation unit.   Water vapor from the first water vapor generating unit is supplied to the superheated water vapor generating unit via the water vapor supply channel, and water vapor from the second water vapor generating unit is supplied to the superheated water vapor via the external water vapor introducing unit. The superheated steam generator according to claim 1, configured to be switchable to both supply states supplied to the generator. A steam flow rate adjusting unit that adjusts the amount of steam supplied from the first steam generating unit to the superheated steam generating unit and / or the amount of steam supplied from the second steam generating unit to the superheated steam generating unit, and
The superheated steam generating device according to claim 2, wherein the steam flow rate adjusting unit adjusts a supply amount of steam to the superheated steam generating unit in the both supply states.   A first one-side supply state in which water vapor from the first water vapor generation unit is supplied to the superheated water vapor generation unit via the water vapor supply channel, or water vapor from the second water vapor generation unit is the external water vapor introduction unit The superheated steam generation device according to any one of claims 1 to 3, configured to be switchable to a second one-side supply state supplied to the superheated steam generation unit via a heat exchanger. A first water vapor flow rate adjustment unit that is provided in the water vapor supply channel and adjusts the flow rate of the water vapor supplied to the superheated steam generation unit;
The superheated steam generation device according to claim 4, wherein, in the second one-side supply state, the first steam flow rate adjustment unit stops supplying the steam to the superheated steam generation unit. A control device for controlling power supply to the first water vapor generation unit;
The superheated steam generation device according to claim 4 or 5, wherein the control device stops supplying power to the first steam generation unit in the second one-side supply state. In switching from the first one-side supply state to the second one-side supply state, the water vapor supply amount from the second water vapor generation unit is gradually decreased while the water vapor supply amount from the first water vapor generation unit is gradually decreased. Increase,
In switching from the second one-side supply state to the first one-side supply state, the water vapor supply amount from the first water vapor generation unit is gradually decreased while the water vapor supply amount from the second water vapor generation unit is gradually decreased. The superheated steam generator according to any one of claims 4 to 6, which is increased. The first steam generation unit and the superheated steam generation unit are configured using a Scott connection transformer composed of a main seat transformer and a T seat transformer,
The first water vapor generating unit has a first heating metal body that is induction-heated or energized by the output of the main transformer,
The superheated steam generator has a second heating metal body that is induction-heated or energized by the output of the T-seat transformer,
A first control device for controlling voltage or current is provided in one of the two phases on the input side of the main transformer,
A second control device for controlling voltage or current is provided on one end side of the primary coil which is the input side of the T-seat transformer,
The output voltage of the main transformer and the output voltage of the T seat transformer are individually controlled by the first control device and the second control device, respectively, according to any one of claims 1 to 7. Superheated steam generator.   A first connection state in which a midpoint terminal connected to a midpoint of the primary coil of the main transformer and a one end side terminal of the primary coil of the T seat transformer are connected by a Scott connection; and the Scott 9. A switching mechanism that further disconnects the connection and switches between a second connection state in which both terminals of the primary coil of the T-seat transformer including the second control device are connected to a three-phase AC power supply is provided. The superheated steam generator described.   The superheated steam generator according to claim 9, wherein the second control device has a constant current control function. Generated by an induction heating method or an electric heating method first steam generation unit that generates steam from water, an induction heating method or an electric heating method superheated steam generation unit that generates superheated steam from water vapor, and the first steam generation unit A steam supply channel for supplying the steam to the superheated steam generator and a second steam generator different from the first steam generator are connected, and steam from the second steam generator is generated as the superheated steam. A processing method of processing an object to be processed using a superheated steam generator having an external steam introduction part for introducing into the part,
While supplying the steam from both the first steam generation unit and the second steam generation unit to the superheated steam generation unit,
The superheated steam generator is adjusted by adjusting the amount of steam supplied from the first steam generator to the superheated steam generator and / or the amount of steam supplied from the second steam generator to the superheated steam generator. Method of adjusting the amount of water vapor supplied to the water. Generated by an induction heating method or an electric heating method first steam generation unit that generates steam from water, an induction heating method or an electric heating method superheated steam generation unit that generates superheated steam from water vapor, and the first steam generation unit A steam supply channel for supplying the steam to the superheated steam generator and a second steam generator different from the first steam generator are connected, and steam from the second steam generator is generated as the superheated steam. A processing method of processing an object to be processed using a superheated steam generator having an external steam introduction part for introducing into the part,
A main step of supplying the steam from the second steam generation unit to the superheated steam generation unit via the external steam introduction unit to generate superheated steam, and heating the object to be processed by the superheated steam;
When the main process is not performed, the steam from the first steam generation section is supplied to the superheated steam generation section through the steam supply flow path to generate superheated steam, and the to-be-processed is generated by the superheated steam. A processing method comprising a sub-process for processing an object.