KR102580619B1 - Superheated steam generator and processing method using the superheated steam generator - Google Patents

Abstract

The present invention prevents condensation from forming on the object to be treated when treating the object using superheated steam, and includes a water vapor generator 2 of an induction heating or electric heating method that generates water vapor from water, and water vapor A superheated steam generator (3) of induction heating or electric heating type that generates superheated steam from the superheated steam generator (3), and a steam supply flow path (L2) that supplies the steam generated by the steam generator (2) to the superheated steam generator (3). ) and a gas supply flow path (L3) for supplying another gas to the superheated water vapor generating section (3), and a first state in which water vapor is supplied to the superheated water vapor generating section (3), or the superheated water vapor generating section (3) It is configured to be able to switch to a second state in which a different gas is supplied.

Description

SUPERHEATED STEAM GENERATOR AND PROCESSING METHOD USING THE SUPERHEATED STEAM GENERATOR}

The present invention relates to a superheated water vapor generating device that generates superheated water vapor from water and a processing method using the superheated water vapor generating device.

Recently, a superheated steam treatment device that uses superheated steam to clean, dry, or sterilize an object to be treated has been considered.

As shown in Patent Document 1, this superheated steam treatment device includes a superheated steam generator that generates superheated steam, and a treatment furnace to which the superheated steam generated by the superheated steam generator is supplied. It is configured to clean, dry, or sterilize the object to be treated contained in the treatment furnace.

However, for example, if the treatment pressure is 1 atm and the initial temperature of the object to be treated is less than 100°C, the superheated water vapor will liquefy and condensation will form on the object until the temperature of the object to be treated rises to 100°C or higher. . Some objects to be treated are susceptible to condensation, and it is undesirable for this situation to occur.

Patent Document 1: Japanese Patent Publication No. 2007-231367

Therefore, the present invention was made to solve the above problems, and its main task is to prevent condensation from forming on the object to be treated when treating the object using superheated steam.

That is, the superheated water vapor generating device according to the present invention includes a water vapor generator of the induction heating method or electric current heating method that generates water vapor from water, and an induction heating method or electric current heating method that generates superheated water vapor from water vapor. a superheated steam generator, a water vapor supply passage for supplying water vapor generated by the water vapor generator to the superheated water vapor generator, and a gas supply passage for supplying a gas different from the water vapor to the superheated water vapor generator. and capable of switching to a first state in which the water vapor is supplied to the superheated water vapor generating unit, or a second state in which the other gas is supplied to the superheated water vapor generating part and the superheated water vapor generating part functions as a gas heating unit. It is characterized by being

In this case, in the first state, superheated water vapor is generated by the superheated water vapor generating unit, and in the second state, the superheated water vapor generating part functions as a gas heating part to heat other gases, so that the object to be treated is treated using the superheated water vapor. By heating the object to be treated using another previously heated gas, it is possible to prevent overheated water vapor from liquefying and causing condensation to form on the object to be treated. In addition, since the superheated water vapor generating unit functions as a gas heating unit, another heating device for heating the object to be treated can be eliminated, and the system configuration for preventing condensation of the object to be treated can be simplified. It can be miniaturized.

a water vapor flow rate adjusting unit provided in the water vapor supply flow path to adjust a flow rate of the water vapor supplied to the overheated water vapor generating unit, and in the second state, the water vapor flow rate adjusting unit supplies the water vapor to the overheated water vapor generating part. It is desirable to stop. With this configuration, the transition from the second state to the first state can be quickly performed by generating water vapor in the second state by the water vapor generating unit.

It is preferable that a control device controls the supply of power to the water vapor generating unit, and that in the second state, the control device stops supplying power to the water vapor generating unit. With this configuration, the power consumed by the water vapor generating unit in the second state can be reduced.

In addition to the first state and the second state, the water vapor and the other gas are supplied to the superheated water vapor generating section to enable switching to a third state in which the superheated water vapor generating section functions as a mixed gas heating section. desirable. With this configuration, in addition to treating the object to be treated using superheated steam, other treatments can be performed. For example, when the other gas is air or nitrogen, oxidation treatment or nitridation treatment of the object to be treated becomes possible.

a water vapor flow rate adjuster provided in the water vapor supply flow path to adjust a flow rate of the water vapor supplied to the superheated water vapor generator; It is preferable that the mixing ratio of the water vapor and the other gas in the superheated water vapor generating section is adjusted by adjusting the flow rate of . With this configuration, the processing conditions of the object to be processed can be controlled. For example, when the other gas is air or nitrogen, the oxidation degree or nitridation degree of the object to be treated can be controlled.

As a specific configuration of the water vapor generating section and the superheated water vapor generating section, the water vapor generating section and the superheated water vapor generating section use a Scott connection transformer consisting of a main table transformer and a T table transformer. It is configured, wherein the water vapor generating section has a first heating metal body that is inductively heated or electrically heated by the output of the main transformer, and the superheated water vapor generating section has a first heating metal body that is heated by induction or electric current by the output of the T-left transformer. It is contemplated to have a second heating metal body that is electrically heated.

In this configuration, in order to separately control the temperature of the water vapor generated by the water vapor generating unit and the temperature of the superheated water vapor generated by the superheated water vapor generating part, a voltage or A first control device for controlling the current is provided, and a second control device for controlling the voltage or current is provided on one end of the primary coil, which is the input side of the T-left transformer, and the first control device and the second control device are provided. It is preferable to separately control the output voltage of the main transformer and the output voltage of the T-left transformer by a device.

In the primary output control of a Scott connection transformer, there are cases where the output of the main transformer cannot be set to zero because the primary current flowing through the primary coil of the T-left transformer flows into the primary coil of the main-left transformer. . For example, when only other gases are heated in the second heating metal body without water vapor output, the output of the first control device on the main left side is set to zero and the second control device on the T side is controlled to have a large output. However, since the current from the primary coil of the T-left transformer flows into the primary coil of the main-left transformer, the first heating metal body is heated. Then, there is a risk that the first heating metal body may be overheated, which is dangerous.

In order to solve this problem preferably, a first connection is made by Scott wiring by connecting the midpoint terminal connected to the midpoint of the primary coil of the main left transformer and one terminal of the primary coil of the T left transformer. state and a second connection state in which both terminals of the primary coil of the T-left transformer including the second control device are connected to a three-phase alternating current power supply by disconnecting the Scott connection. It is desirable to further provide a switching mechanism.

With this configuration, in the case of the first state for generating superheated water vapor and the third state for heating the mixed gas of superheated water vapor and other gases, the device is used in the first connection state (Scott connection state) and heats only the other gas. In the case of the second state, it can be used in the second connection state (a circuit state in which the T left circuit and the main left circuit are independent). In the second connection state, the water vapor generating unit can be kept on standby while heating another gas. Additionally, it is also possible to set the output of the first control device to zero and continue heating and operating only other gases.

이다. 그런데, 전환 기구에 의해 스콧 결선을 해선하여, 제2 제어 기기를 포함하는 T좌 변압기의 1차 코일의 양측 단자를 3상(相) 교류 전원에 접속하면, 인가 전압은 E가 된다. 즉, T좌 변압기의 1차 코일로의 인가 전압은,

배가 된다. 또, 제2 가열용 금속체가 목표 온도에 도달할 때까지는, 큰 출력이 되도록 제2 제어 기기가 작동하고, 회로 전류도 대략

배가 된다. In the case of Scott connection by the above switching mechanism, if the input voltage of the three-phase AC power supply is E, the voltage applied to the primary coil of the T-left transformer including the second control device is:

am. However, when the Scott connection is disconnected using a switching mechanism and both terminals of the primary coil of the T-left transformer including the second control device are connected to a three-phase alternating current power supply, the applied voltage becomes E. In other words, the voltage applied to the primary coil of the T left transformer is,

It doubles. In addition, until the second heating metal body reaches the target temperature, the second control device operates to produce a large output, and the circuit current is also approximately

It doubles.

At this time, if the second control device has a constant current control function, it is possible to prevent a large current exceeding a certain level from flowing through the primary coil of the T-left transformer, thereby providing a circuit protection function.

In addition, the treatment method using superheated water vapor according to the present invention includes a water vapor generator of an induction heating or electric heating method that generates water vapor from water, and a superheated water vapor of an induction heating or electric heating method that generates superheated water vapor from water vapor. A superheater comprising a generator, a water vapor supply passage for supplying water vapor generated by the water vapor generation to the superheated water vapor generation section, and a gas supply path for supplying a gas different from the water vapor to the superheated water vapor generation section. A processing method of treating an object to be treated using a water vapor generating device, wherein the other gas is supplied to the superheated steam generator to heat the other gas, and the object to be treated is heated by the heated other gas. After the pre-process and after the pre-process, the water vapor is supplied to the superheated steam generator to generate superheated steam, and the object heated in the pre-process is treated with the superheated steam. ) is characterized by having a process.

According to the present invention configured as described above, condensation of the object to be treated can be prevented by heating the object to be treated using another heated gas before treating the object to be treated using superheated water vapor.

1 is a diagram schematically showing the configuration of a superheated steam generating device of the present embodiment.
FIG. 2 is a diagram showing an example of a hollow conductor pipe of the present embodiment.
FIG. 3 is a diagram mainly showing the iron core configuration of each steam generating unit of the present embodiment.
FIG. 4 is a diagram showing a modified example of the iron core configuration of each water vapor generating unit of the present embodiment.
FIG. 5 is a diagram showing the connections of induction coils to each water vapor generating unit of the present embodiment.
Fig. 6 is a diagram schematically showing the configuration of the control device of this embodiment.
Fig. 7 is a diagram schematically showing the processing method of this embodiment.
Figure 8 is a diagram showing the wiring of the induction coil to each steam generating unit in the modified embodiment.

Below, an embodiment of a superheated steam generating device according to the present invention will be described with reference to the drawings.

The superheated water vapor generating device 100 according to the present embodiment generates superheated water vapor by heating water, and in addition to the superheated water vapor generating function, it has a gas heating superheating function for heating another gas different from water vapor. . Additionally, the other gases mentioned above include air, oxygen, nitrogen, argon, etc., and as long as they are gases other than water vapor, various gases can be considered depending on the application.

As shown in FIG. 1, this superheated water vapor generating device 100 includes a water vapor generating section 2 (hereinafter referred to as 'saturated water vapor generating section 2') that heats water to generate saturated water vapor, and a saturated water vapor generating device 100. A superheated steam generator (3) that heats water vapor to generate superheated water vapor, and a water vapor supply flow path (L2) that supplies the saturated water vapor generated by the saturated water vapor generator (2) to the superheated water vapor generator (3) (hereinafter referred to as , referred to as the 'saturated water vapor supply flow path (L2)') and a gas supply flow path (L3) for supplying a different gas different from the saturated water vapor to the superheated water vapor generating unit (3).

The saturated water vapor generating unit 2 is, for example, of an induction heating method or an electric current heating method, and has a water introduction port 21 through which water is introduced, and a water introduction port 21 through which saturated water vapor is extracted. It has a saturated water vapor outlet port (22). Additionally, a water supply passage L1 is connected to the water introduction port for supplying water to the saturated water vapor generation unit 2 from a tank or the like, not shown.

The induction heating type saturated water vapor generating unit 2 is a hollow conductive tube 2T formed, for example, in a spiral shape, having a water introduction port 21 and a saturated water vapor output port 22 (see FIG. 2). and an induction coil (not shown) disposed inside or outside the hollow conductor tube (2T) for inductively heating the hollow conductor tube (2T), and an AC power source (not shown) for applying an alternating voltage to the induction coil. It is provided, and by applying an alternating voltage to the induction coil, Joule heat is generated by flowing an induced current through the hollow conductor pipe (2T), and the water introduced into the hollow conductor pipe (2T) is converted into saturated water vapor. It is thought that it can be done by changing the state.

In addition, the saturated water vapor generating unit 2 of the electric heating method includes a hollow conductor tube 2T formed in a spiral shape, for example, having a water introduction port 21 and a saturated water vapor output port 22, and the hollow conductor tube 2T. It is equipped with a direct current or alternating current power source (not shown) that applies voltage to (2T), and generates joule heat by flowing current through the hollow conductor pipe, changing the state of water introduced into the hollow conductor pipe (2T) into saturated water vapor. I think you do what you are told. Additionally, in the case of the electric heating method, the hollow conductor tube is not limited to a spiral shape, and may be, for example, in the shape of a straight pipe.

In either case, the temperature of the saturated water vapor derived from the saturated water vapor output port 22 of the hollow conductor tube 2T is detected, and the voltage applied to the induction coil, the voltage applied to the hollow conductor tube 2T, or the hollow By feedback controlling the current flowing through the conductor tube 2T, the temperature of the saturated water vapor derived from the saturated water vapor output port 22 of the hollow conductor tube 2T is controlled. In addition, the temperature of saturated water vapor can be detected in a method that directly detects the temperature of the saturated water vapor, and a method that indirectly detects the temperature of the saturated water vapor by detecting the temperature of the hollow conductive tube 2T.

The superheated steam generator 3, like the saturated steam generator 2, is, for example, of an induction heating type or an electric heating type, and has a saturated steam introduction port 31 through which saturated steam is introduced and superheated steam is derived. It has a superheated water vapor outlet port (32).

The induction heating type superheated steam generation unit 3 includes, for example, a spiral-shaped hollow conductor tube 3T (see FIG. 2) having a saturated water vapor introduction port 31 and a superheated water vapor output port 32, and the above-mentioned It is provided with an induction coil (not shown) disposed inside or outside the hollow conductor tube (3T) to inductively heat the hollow conductor tube (3T), and an AC power source (not shown) to apply an alternating voltage to the induction coil. By applying an alternating voltage to the induction coil, Joule heat is generated by flowing an inductive current through the hollow conductor tube 3T, and the state of the saturated water vapor introduced into the hollow conductor tube 3T is changed to superheated water vapor. It is thought that

In addition, the superheated water vapor generating unit 3 of the electric heating method includes a hollow conductor tube 3T formed in a spiral shape, for example, having a saturated water vapor introduction port 31 and a superheated water vapor output port 32, and the hollow conductor It is equipped with a direct current or alternating current power source (not shown) that applies voltage to the tube 3T, and generates joule heat by passing current through the hollow conductor tube 3T, thereby dissipating the saturated water vapor introduced into the hollow conductor tube 3T. It is thought that the state is changed to superheated steam. In either case, by controlling the voltage applied to the hollow conductor tube 3T or the current flowing through the hollow conductor tube 3T, the superheated water vapor derived from the outlet port 32 of the hollow conductor tube 3T is controlled. Control the temperature. In addition, in the case of the electric heating method, the hollow conductive tube 3T is not limited to a spiral shape, and may have a straight tube shape, for example.

In either case, the temperature of the superheated water vapor derived from the superheated water vapor outlet port 32 of the hollow conductor tube 3T is detected, and the voltage applied to the induction coil, the voltage applied to the hollow conductor tube 3T, or the hollow By feedback controlling the current flowing through the conductor tube 3T, the temperature of the superheated water vapor derived from the superheated water vapor output port 32 of the hollow conductor tube 3T is controlled. In addition, the temperature of the superheated steam can be detected in a method that directly detects the temperature of the superheated water vapor, and a method that indirectly detects the temperature of the superheated water vapor by detecting the temperature of the hollow conductive tube 3T.

In addition, in the case of the induction heating method, if the frequency of the applied alternating voltage is set to the commercial frequency of 50 Hz or 60 Hz, the current penetration is deep, so the inner temperature is detected from the outer surface temperature of the hollow conductor tubes 2T and 3T. Since the same value as is obtained, high-precision steam temperature detection is possible even with indirect detection.

In this embodiment, as shown in FIGS. 3 and 4, a magnetic path is provided at the center of the induction coil 2C of the saturated water vapor generating section 2 and the induction coil 3C of the superheated water vapor generating section 3. ) Iron cores 101 and 102 are provided, which efficiently circulates the magnetic flux generated by the induction coils 2C and 3C, thereby efficiently introducing the magnetic flux into each hollow conductor tube 2T and 3T. I am ordering it. In addition, in addition to the magnetic flux core 101 of the saturated steam generator 2 and the magnetic flux core 102 of the superheated steam generator 3, the magnetic flux generated in the two magnetic flux cores 101 and 102 is common. A common iron core 103 serving as a passage is provided, and joint cores 104 and 105 connect the common iron core 103 and the upper and lower sides of the two magnetic iron cores 101 and 102, respectively. With this configuration, the overall dimensions of the iron core can be reduced, and further, the entire device can be made more compact. 3 and 4, each iron core is arranged so as to be located at the apex of a triangle when viewed from the top, and the joint cores 104 and 105 point to the common iron core 103 at the point of inflection when viewed from the top. It is bent in a straight line. As a result, the distance between the two magnetic iron cores 101 and 102 can be reduced, the dimension of the entire iron core in the width direction can be reduced, and space saving can be achieved.

In addition, the induction coil 2C of the saturated steam generation unit 2 and the induction coil 3C of the superheated steam generation unit 3 are Scott connected (see FIG. 5). That is, the saturated water vapor generating section 2 and the superheated water vapor generating section 3 are configured using a Scott connection transformer composed of a main transformer and a T transformer.

The hollow conductor tube 2T (first heating metal body) of the saturated steam generation unit 2 is inductively or electrically heated by the output of the pedestal transformer, and the hollow conductor tube of the superheated steam generation unit 3 ( 3T) (the second heating metal body) is inductively or electrically heated by the output of the T left transformer.

In addition, a first control device 81 that controls the voltage or current in one of the two phases on the input side of the main transformer (in FIG. 5, the V phase of the three-phase AC power supply 10) is provided. It is provided. A second control device 82 that controls the voltage or current on one end of the primary coil (induction coil 3C) on the input side of the T left transformer (in FIG. 5, the U phase of the three-phase AC power supply 10) ) is provided. Here, the first control device 81 and the second control device 82 are configured using a semiconductor control element such as a thyristor. And, the first control device 81 and the second control device 82 are configured to separately control the output voltage of the main transformer and the output voltage of the T-left transformer.

The saturated water vapor supply flow path L2 has one end connected to the saturated water vapor output port 22 of the saturated water vapor generating section 2, and the other end connected to the superheated water vapor introduction port 31 of the superheated water vapor generating section 3. It is composed of, for example, a connecting pipe. In addition, by integrally providing the function as the connection pipe in any of the hollow conductor pipes 2T and 3T, the saturated water vapor output port 22 of the saturated water vapor generating section 2 and the superheated water vapor generating section ( The superheated water vapor introduction port 31 of 3) may be connected via, for example, an insulating coupling.

In addition, in the saturated water vapor supply flow path L2, there is a water vapor flow rate adjusting unit 4 (hereinafter referred to as 'saturated water vapor flow rate adjusting part 4') that adjusts the flow rate of saturated water vapor supplied to the superheated water vapor generating section 3. It is provided. The saturated water vapor flow rate adjusting unit 4 of this embodiment is a first flow rate adjusting valve. In addition, a control signal is input to the first flow rate adjustment valve 4 by a control device 7 described later, and the valve opening is controlled. In addition, a flow meter may be provided in the saturated water vapor supply flow path L2.

The gas supply flow path L3 has one end connected to a supply source of another gas (for example, air or nitrogen, etc.), and the other end is downstream of the first flow rate adjustment valve 4 in the saturated water vapor supply flow path L2 ( It is connected to the superheated steam generating unit (3) side) or to the superheated steam generating unit (3). When the gas supply flow path L3 is connected to the saturated water vapor supply flow path L2, a gas introduction port is formed in the connection pipe constituting the gas supply flow path L3. In addition, when the gas supply passage L3 is connected to the superheated water vapor generating section 3 (see FIG. 1), a gas introduction port 33 is formed in the superheated water vapor generating section 3 (not shown in FIG. 2). not). In addition, when forming the gas introduction port 33 in the superheated water vapor generating section 3, taking the heating efficiency of other gases into consideration, the upstream side of the hollow conductor pipe 3T (the saturated water vapor introduction port 31 side) It is desirable to form in .

In addition, the gas supply flow path L3 is provided with a gas flow rate adjusting section 5 that adjusts the flow rate of other gases supplied to the superheated water vapor generating section 3. The gas flow rate adjustment unit 5 of this embodiment is a second flow rate adjustment valve. In addition, a control signal is input to the second flow rate adjustment valve 5 by a control device 7 described later, and the valve opening degree is controlled. In addition, a flow meter may be provided in the gas supply passage L3.

And in this embodiment, the superheated water vapor generated by the superheated water vapor generating section 3 or other heated gas is supplied to the processing section 6 that processes the object W.

The processing unit 6 heat-treats the object W (e.g., washing, drying, firing, or sterilizing) using superheated steam or other gas, and accommodates the object W. In addition, an object receiving portion 61 forming a sealed space or a substantially sealed space, a superheated water vapor introduction port 62 provided in the object receiving portion 61 through which superheated water vapor is introduced, and A drain discharge port 63 for discharging drain water generated in the water receiving portion 61, and a discharge port 64 for discharging used steam or other gases that passed through the object receiving portion 61. has. The superheated water vapor introduction port 62 of the processing section 6 is connected to the superheated water vapor output port 32 of the superheated water vapor generating section 3 through the superheated water vapor supply flow path L4. Additionally, an opening/closing valve is provided in the flow path connected to the drain discharge port 63 and the discharge port 64.

The superheated steam generating device 100 of the above configuration has a first state in which only saturated water vapor is supplied to the superheated water vapor generating section 3, and a superheated water vapor generating section in which only other gases are supplied to the superheated water vapor generating section 3. A second state in which 3) functions as a gas heating section, and a third state in which both saturated water vapor and other gases are supplied to the superheated water vapor generating section 3 and the superheated water vapor generating section 3 functions as a mixed gas heating section. It is configured to transition to a state.

Here, it is configured to switch to any of the above-mentioned first state, second state, or third state by the control device 7 that controls each generator 2, 3 and each flow rate adjustment valve 4, 5. It is done.

This control device 7 is physically equipped with a CPU, memory, A/D converter, D/A converter, etc., and functionally, as shown in FIG. 6, heats the saturated water vapor generating unit 2. A first heating temperature control unit 71 that controls the temperature (hereinafter referred to as ‘first heating temperature’) and a heating temperature (hereinafter referred to as ‘second heating temperature’) of the superheated water vapor generating unit 3. a second heating temperature control unit 72 that controls the first flow rate adjustment valve 4, a first flow rate adjustment valve control section 73 that controls the first flow rate adjustment valve 4, and a second flow rate adjustment valve control section that controls the second flow rate adjustment valve 5. It has (74). In addition, the control device 7 has an object temperature acquisition unit 75 that acquires the temperature of the object W accommodated in the processing unit 6 or the temperature within the processing unit 6. In addition, the control device 7 and each part such as the saturated water vapor generating unit 2 and the superheated water vapor generating part 3 are connected, but in FIG. 1, description of the connection is omitted.

Hereinafter, the operation of the superheated steam generator 100 of the present embodiment will be described with reference to FIG. 7, along with explanation of each part.

First, when the user operates the superheated water vapor generating device 100, for example, water in a tank (not shown) is supplied to the saturated water vapor generating section 2 by a water pump or the like.

At this time, the first heating temperature control unit 71 controls the first heating temperature so that the saturated water vapor generated in the saturated water vapor generating part 2 is at a predetermined temperature. In this embodiment, the saturated water vapor generating part ( The temperature of the hollow conductor tube 2T in 2) is set to the first heating temperature.

Specifically, the first heating temperature control unit 71 acquires a measurement value from the first temperature sensor T1 provided in the hollow conductor pipe 2T or the saturated water vapor supply passage L2 of the saturated water vapor generating part 2, , Based on this measured value, the magnitude of the alternating voltage applied to the induction coil 2C of the saturated water vapor generating unit 2 is controlled, and the first heating temperature is controlled to, for example, 100 to 140°C.

In addition, the first temperature sensor T1 is installed on the downstream side of the hollow conductor pipe 2T of the saturated water vapor generating unit 2 or at the saturated water vapor output port 22 so that the measured value is closer to the temperature of saturated water vapor. It is desirable to have it provided or nearby.

And, in a state where the saturated water vapor generating unit 2 is generating saturated water vapor, the first flow rate adjustment valve control part 73 opens the first flow rate adjustment valve 4 in a state in which the valve opening is zero, that is, in a closed state. It is controlled by . As a result, the superheated steam generator 100 enters a standby state in which the saturated steam generator 2 is generating saturated steam and the supply of the saturated steam is stopped.

In this standby state, the second flow rate adjustment valve control unit 74 opens the second flow rate adjustment valve 5, and another gas is supplied to the superheated water vapor generating section 3 from the gas supply passage L3.

At this time, the second heating temperature control unit 72 controls the second heating temperature so that the other gas heated in the superheated steam generating unit 3 reaches a predetermined temperature. In this embodiment, the superheated steam generating unit ( The temperature of the hollow conductor tube 3T in 3) is set to the second heating temperature.

Specifically, the second heating temperature control unit 72 acquires measured values from the second temperature sensor T2 provided in the hollow conductor pipe 3T of the superheated steam generating unit 3 or the superheated steam supply flow path L4, , Based on this measurement value, the magnitude of the alternating voltage applied to the induction coil 3C of the superheated water vapor generation unit 3 is controlled, and the second heating temperature is controlled to, for example, 100°C or higher.

In addition, the second heating temperature in the case of heating another gas may be a temperature that can heat the object W to a degree that condensation does not form on the object W when superheated water vapor is supplied. In addition, the second temperature sensor T2 is located on the downstream side of the hollow conductor tube 3T of the superheated water vapor generating unit 3 or at the superheated water vapor output port 32 so that the measured value is closer to the temperature of the superheated water vapor. It is desirable to have it provided or nearby.

As a result, in the superheated water vapor generating device, the first flow rate control valve 4 is closed, the second flow rate control valve 5 is in an open state, and the superheated water vapor generating unit 3 is a gas that heats another gas. It enters a second state functioning as a heating unit. In this second state, a pre-process of heating (preheating) the object W accommodated in the processing unit 6 is performed.

The object temperature acquisition unit 75 of the control device 7 receives the temperature of the object W accommodated in the processing unit 6 or the measurement value from the third temperature sensor T3 that measures the temperature within the processing unit 6. acquire. Then, the object temperature acquisition unit 75 determines whether the measured value from the third temperature sensor T3 has reached a predetermined temperature (a temperature at which condensation does not form on the object W when superheated water vapor is supplied). judge.

When the process temperature acquisition unit 75 determines that the measured value from the third temperature sensor T3 is higher than the predetermined temperature, the second flow rate adjustment valve control section 74 operates the second flow rate adjustment valve 5. is controlled in a closed state, and the first flow rate adjustment valve control unit 73 opens the first flow rate adjustment valve 4 to supply saturated water vapor to the superheated water vapor generating section 3 from the saturated water vapor supply passage L2. do.

In addition, each flow rate adjustment valve control unit 73, 74 opens and closes each flow rate adjustment valve 4, 5 in accordance with a switching signal input from the user, independently of the judgment of the processing material temperature acquisition section 75. You can also switch . In addition, each flow rate adjustment valve control section 73, 74 uses a timer or the like to acquire a predetermined time elapsed signal indicating that a predetermined time has elapsed since entering the second state, and switches the opening and closing of each flow rate adjustment valve 4, 5. You may do so.

At this time, the second heating temperature control unit 72 acquires the measured value from the second temperature sensor T2 provided in the hollow conductor pipe 3T of the superheated steam generating unit 3 or the superheated steam supply passage L4, , Based on this measured value, the second heating temperature is controlled so that the superheated steam generated in the superheated steam generating unit 3 has a predetermined temperature. Specifically, the second heating temperature is controlled to be at or around the set temperature of the superheated steam generated in the superheated steam generator 3, and here, for example, it is controlled to be 200 to 1200°C.

As a result, in the superheated water vapor generating device 100, the first flow rate adjustment valve 4 is in an open state, the second flow rate adjustment valve 5 is in a closed state, and the superheated water vapor generating unit 3 generates superheated water vapor. It becomes the first state to be created. In this first state, a post-process of heat treating (for example, washing, drying, baking or sterilizing) the object W accommodated in the processing unit 6 is performed.

In addition, when switching from the second state in the gas supply state (standby state in the above) to the first state in the saturated water vapor supply state, the first flow rate adjustment valve control unit 73 adjusts the first flow rate as shown in FIG. 7. The control valve 4 is gradually opened and the valve opening is controlled to gradually increase from zero to a predetermined opening. As a result, the initial operation is such that the supply amount of saturated water vapor gradually increases from the time of switching from the standby state to the saturated water vapor supply state until the valve opening degree of the first flow rate adjustment valve 4 reaches the predetermined opening degree, From the point in time when the valve opening degree reaches the predetermined opening degree, normal operation occurs in which the supply amount of saturated water vapor is constant. Additionally, the post-process is performed for a predetermined processing time.

Next, the operation at the end of the post-process will be explained.

The superheated steam generator 100 of the present embodiment generates saturated steam into the superheated steam generator 3 after a predetermined time has elapsed from the time when an automatic or manual operation for switching from the saturated steam supply state to the standby state is performed. It is configured so that the supply of is stopped. In addition, the power supply to the induction coil of the superheated water vapor generating unit 3 is stopped when the operation for switching from the saturated water vapor supply state to the standby state is performed.

Here, the operation for switching from the saturated water vapor supply state to the standby state is, for example, the user inputting a switching signal from the outside using an input means or the like, or a predetermined time indicating that the saturated water vapor supply state has elapsed for a predetermined time. A timer, etc. outputs an elapsed signal.

In more detail, in this embodiment, when an operation to switch from the saturated water vapor supply state to the standby state is performed, the first flow rate adjustment valve control unit 73 described above provides, for example, the switching signal or the predetermined time elapse signal, etc. is acquired, and the first flow rate adjustment valve 4 is left open for a predetermined period of time from the point of acquisition. At the predetermined time, saturated water vapor is supplied from the saturated water vapor generating section (2) to the superheated water vapor generating section (3). As a result, the superheated steam generation unit 3, which is at a high temperature at the end of the post-process, is cooled by the saturated steam. As a result, the superheated water vapor generating unit 3 can be cooled to the set temperature in the standby state, and damage to the superheated water vapor generating device 100 can be prevented.

The object W heat-treated through the pre-process and post-process as described above is taken out from the processing unit 6. Then, after the untreated object W is accommodated in the processing unit 6, pre-processes and post-processes are performed in the same manner as above.

In addition, in the superheated steam generation device 100 of the present embodiment, in a later process, the first flow rate adjustment valve control unit 73 opens the first flow rate adjustment valve 4, and the second flow rate adjustment valve control section ( By opening the second flow rate control valve 5, 74) can supply both saturated water vapor and other gases to the superheated water vapor generation unit 3. At this time, the mixing ratio of the mixed gas consisting of superheated water vapor and other gases can be adjusted by adjusting the flow rate of the saturated water vapor and other gases supplied to the superheated water vapor generating unit 3. In the case where saturated water vapor and other gases are mixed and heated in this way, it is preferable that the hollow conductive tube has a spiral shape from the viewpoint of uniform mixing by making the mixing passage as long as possible.

By supplying both saturated water vapor and other gases to the superheated water vapor generating unit 3 in a post-process, separate processing different from the processing using superheated water vapor can be performed. For example, when the other gas is air or nitrogen, oxidation or nitriding treatment of the object W becomes possible. Additionally, by adjusting the mixing ratio, the oxidation degree and nitridation degree of the object to be treated (W) can be controlled.

According to the superheated water vapor generating device 100 configured as described above, in the first state, superheated water vapor is generated by the superheated water vapor generating section 3, and in the second state, the superheated water vapor generating section 3 functions as a gas heating section. Since the other gas is heated, before treating the object W using the superheated steam, by heating the object W using the other heated gas, the superheated steam is liquefied and the object W is liquefied. W) can prevent condensation from forming. In addition, since the superheated water vapor generating unit 3 functions as a gas heating unit, a separate heating device for heating the object W can be eliminated, and a system for preventing condensation on the object W is provided. Not only can the configuration be simplified, but the system can also be miniaturized.

Additionally, the present invention is not limited to the above embodiments.

For example, in the above embodiment, the first flow rate adjustment valve control unit 73 is configured to enter the second state with the first flow rate adjustment valve 4 in the closed state, but the first heating temperature control unit 71 is configured to be in the second state. The power supply to the induction coil of the saturated water vapor generator 2 may be stopped to enter the second state. At this time, the first flow rate adjustment valve 4 may be in a closed state or an open state, but if the first flow rate adjustment valve 4 is closed, other gases will flow back into the saturated water vapor generating unit 2. It can be prevented.

In addition, in the above embodiment, the superheated water vapor generating section 3 is configured to receive saturated water vapor generated by the saturated water vapor generating section 2 provided at the front, but the saturated water vapor generating section 2 is In the case where superheated steam is generated by heating saturated steam to a higher level, it may be configured to receive superheated steam, further heat the received superheated steam, and generate superheated steam of a desired temperature to be supplied to the superheated steam utilization section. .

Furthermore, in addition to the configuration of the above-described embodiment, the superheated steam generating device 100 may have a return flow path for returning the used steam or other gas that has passed through the processing unit 6 to the superheated steam generating unit 3. . One end of this return flow path is connected to the processing unit 6 (e.g., discharge port of the object receiving part), and the other end is connected to the downstream side of the flow rate adjustment valve in the saturated water vapor supply flow path L2 (superheated water vapor generating section ( 3) side), it is connected to the gas supply flow path (L3) or the superheated steam generation unit (3). In this way, heat loss can be suppressed by reusing used steam or other gases.

In addition, as shown in FIG. 8, the superheated water vapor generating device 100 performs Scott connection between the primary coil of the main transformer (induction coil 2C) and the primary coil of the T-left transformer (induction coil 3C). A switching mechanism 9 that switches between the first connection state and the second connection state in which the induction coil 2C and the induction coil 3C are independent circuits may be provided.

The first connection state is the midpoint terminal (2M) connected to the midpoint of the primary coil (induction coil (2C)) of the main transformer and the primary coil (induction coil (3C)) of the T-left transformer. Scott wiring is performed by connecting the terminal (3E) on one side. Meanwhile, in the second connection state, the Scott connection is disconnected, and both terminals of the primary coil (induction coil 3C) of the T-left transformer including the second control device 82 are connected to a three-phase (phase) connection. ) is connected to the AC power supply 10 (U phase and V phase in FIG. 8). Additionally, in the second connection state, both terminals of the primary coil (induction coil 2C) of the main transformer remain connected to the V and W phases of the three-phase AC power supply 10.

The switching mechanism 9 is constructed using, for example, an electromagnetic contactor or a semiconductor switch element, and is controlled by the control device 7. In addition, in this configuration, the second control device 82 has a constant current control function that controls the current flowing in the primary coil (induction coil 3C) of the T-left transformer to below a certain value.

In the case of the first state for generating superheated water vapor and the third state for heating the mixed gas of superheated water vapor and other gases, the first connection state (Scott connection state) is set by the switching mechanism 9. On the other hand, in the case of the second state in which only the other gas is heated, the switching mechanism 9 sets the second connection state (circuit state in which the T left circuit and the main left circuit are independent). In addition, in the second connection state, the current flowing through the induction coil 3C is controlled by the second control device 82, and while operating to heat another gas, the first control device 81 controls the induction coil 2C. ) can be controlled to keep the saturated water vapor generator 2 warm and on standby.

In addition, the present invention is not limited to the above-described embodiments, and it goes without saying that various modifications are possible without departing from the spirit thereof.

100 - Superheated water vapor generating device
L1 - water supply flow path
L2 - Saturated water vapor supply flow path
L3 - Gas supply flow path
L4 - Superheated water vapor supply flow path
2 - Saturated water vapor generating unit (steam generating unit)
3 - Superheated steam generation unit
4 - Water vapor flow adjustment valve (water vapor flow rate adjustment unit)
5 - Gas flow adjustment valve (gas flow adjustment unit)
6 - Processing Department
7 - Control unit

Claims (9)

A water vapor generating unit using an induction heating method or an electric current heating method that generates water vapor from water,
A superheated steam generator of induction heating or electric heating type that generates superheated steam from water vapor,
a water vapor supply flow path that supplies water vapor generated by the water vapor generating section to the superheated water vapor generating section;
Provided with a gas supply flow path for supplying a gas different from the water vapor to the superheated water vapor generator,
Configured to be capable of switching to a first state in which the water vapor is supplied to the superheated water vapor generating unit, or a second state in which the other gas is supplied to the superheated water vapor generating part and the superheated water vapor generating part functions as a gas heating part,
In addition to the first state and the second state, superheated water vapor generation is configured to be switchable to a third state in which the water vapor and the other gas are supplied to the superheated water vapor generating section and the superheated water vapor generating section functions as a mixed gas heating section. Device. In claim 1,
A water vapor flow rate adjusting unit provided in the water vapor supply flow path to adjust the flow rate of the water vapor supplied to the superheated water vapor generating unit,
In the second state, the water vapor flow rate adjusting unit stops supplying the water vapor to the superheated water vapor generating unit. In claim 1,
Equipped with a control device that controls power supply to the water vapor generator,
In the second state, the superheated steam generator wherein the control device stops supplying power to the steam generator. In claim 1,
A water vapor flow rate adjusting unit provided in the water vapor supply flow path to adjust the flow rate of the water vapor supplied to the superheated water vapor generating unit,
In the third state, the water vapor flow rate adjusting unit adjusts the flow rate of the water vapor supplied to the superheated water vapor generating unit, thereby adjusting the mixing ratio of the water vapor and the other gas in the superheated water vapor generating unit. Device. In claim 1,
The water vapor generator and the superheated vapor generator are configured using a Scott connection transformer consisting of a main transformer and a T transformer,
The water vapor generating unit has a first heating metal body that is inductively heated or electrically heated by the output of the pedestal transformer,
The superheated steam generator has a second heating metal body that is inductively heated or electrically heated by the output of the T-left transformer,
A first control device for controlling voltage or current is provided on one of the two phases on the input side of the main transformer,
A second control device for controlling voltage or current is provided on one end of the primary coil, which is the input side of the T-left transformer,
A superheated water vapor generating device in which the output voltage of the main transformer and the output voltage of the T transformer are individually controlled by the first control device and the second control device. In claim 5,
A first connection state in which Scott wiring is performed by connecting the center terminal connected to the midpoint of the primary coil of the main transformer and one terminal of the primary coil of the T-left transformer, and the Scott wiring is disconnected ( Superheated water vapor further provided with a switching mechanism for switching a second connection state for connecting both terminals of the primary coil of the T-left transformer including the second control device to a three-phase alternating current power supply. Generating device. In claim 6,
The second control device is a superheated steam generator having a constant current control function. A water vapor generator using an induction heating or electric heating method that generates water vapor from water, a superheated water vapor generating section using an induction heating or electric heating method that generates superheated water vapor from water vapor, and water vapor generated by the water vapor generating section. A processing method of treating an object to be treated using a superheated steam generator having a water vapor supply flow path for supplying the superheated water vapor generating unit and a gas supply flow path for supplying a gas different from the water vapor to the superheated water vapor generating unit. As,
A pre-process of supplying the other gas to the superheated steam generator to heat the other gas, and heating the object to be treated by the heated other gas;
After the pre-process, the water vapor is supplied to the superheated water vapor generating unit to generate superheated water vapor, and a post-process is provided to treat the object heated in the pre-process with the superheated water vapor,
A processing method in which, in the post-process, the object to be treated is treated using a mixed gas consisting of the superheated water vapor and the other gas separately from the treatment of the object to be treated using the superheated steam. delete

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