TWI690691B - Surface measurement system - Google Patents

Abstract

A surface measurement system is located at an open space, includes a conveyer, at least one condensation device, and a measurement device. The condensation device is optionally located above and below the conveyer to form a liquid layer on a surface of a to-be tested object. The condensation device includes a flow channel, an air-returning channel, a temperature-humidity control assembly, and a blower. The flow channel has an air outlet facing the conveyer. The air-returning channel has at least one air inlet facing the conveyer. An air inlet of the temperature-humidity control assembly is communicated with the air-returning channel. An air inlet and an air outlet of the blower are respectively communicated with an air outlet of the temperature-humidity control assembly and the flow channel. The measurement device is located above the conveyer, and includes a light source and an image capturing module electrically connected to the light source. The light source is used to illuminate the to-be tested object having the liquid layer.

Description

Surface measurement system

This case is about a surface measurement system, especially a surface measurement system for measuring transparent components.

With the advancement of technology, more and more electronic products use transparent materials (such as glass or acrylic) as product components (such as mobile phone panels, mobile phone cases, lenses). In order to ensure quality, the transparent component can be measured by a measuring device to obtain its surface morphology. However, transparent materials have the problem of low reflectivity. To measure a sufficiently accurate image of a transparent component, it is necessary to increase the exposure time and/or light source intensity of the transparent component. If the inside or surface of the transparent component is flawed, it may also be measured by the measuring device, resulting in a false signal judgment. In addition, if the surface of the transparent component is a curved surface, multiple reflections are likely to occur during measurement, which increases the difficulty of measurement.

In addition, if the transparent component is first placed in a low-temperature cavity to cool down, and then moved into a high-temperature and high-humidity cavity for dew condensation, and then measured by a measuring device, there will be high equipment cost and long process time. Problems such as insufficient support of the cavity.

One technical aspect of the present invention is a surface measurement system.

According to an embodiment of the invention, a surface measurement system is located in an open space. The surface measurement system includes a mobile platform, at least one condensation device and a measurement device. The mobile platform is used to transfer the test object in one direction. The dew condensation device is selectively located above and below the mobile platform to form a liquid layer on the surface of the object to be measured. Condensation devices include flow channels, return air channels, temperature and humidity control components and fans. The flow channel has an air outlet toward the mobile platform. The return air passage has at least one air inlet toward the mobile platform. The temperature and humidity control assembly has an air inlet and an air outlet. The air inlet of the temperature and humidity control module communicates with the return air channel. The fan has an air inlet and an air outlet, which respectively connect the air outlet and the flow channel of the temperature and humidity control component. The measurement device is located above the mobile platform and includes a light source and an image capture module. The light source is used to irradiate the test object with a liquid layer on the mobile platform. The image capture module is electrically connected to the light source, and is used to detect the light scattered from the test object with the liquid layer.

In an embodiment of the invention, the temperature and humidity control assembly includes a humidifier, an evaporator, and a heater. The humidifier is adjacent to the air inlet of the temperature and humidity control assembly. The evaporator is located above the humidifier. The heater is located above the evaporator.

In an embodiment of the invention, the temperature and humidity control assembly further includes a compressor. The compressor communicates with the evaporator.

In an embodiment of the present invention, the temperature and humidity control assembly has an air inlet communicating with the return air passage, and the airflow entering from the air inlet of the temperature and humidity control assembly passes through a humidifier and an evaporator and has a range of 40% to 95% Relative humidity.

In an embodiment of the present invention, the airflow entering from the air inlet of the temperature and humidity control assembly passes through the heater and has a range between 0°C and 90°C. Ambient temperature.

In an embodiment of the present invention, the airflow entering from the air inlet of the temperature and humidity control module has a flow velocity greater than 0 m/s and less than or equal to 5 m/s after passing through the fan.

In an embodiment of the invention, the dew condensation device further includes a rectifying plate. The rectifying plate is located in the flow channel and adjacent to the air outlet of the flow channel, and the rectifying plate has a plurality of perforations.

In an embodiment of the present invention, the air inlet of the return air channel is located beside the air outlet of the flow channel.

In an embodiment of the invention, the return air channel has two air inlets, and the air outlet of the flow channel is located between the two air inlets of the return air channel.

In an embodiment of the invention, the surface measurement system includes two dew condensation devices. The two condensation devices are located above and below the mobile platform, respectively, and are substantially aligned with each other.

In an embodiment of the invention, the dew condensation device is located below the mobile platform. The mobile platform also has a hollow area. The hollow area is located above the condensation device.

In an embodiment of the present invention, the temperature of the airflow flowing out of the air outlet of the flow channel is greater than the temperature of the object to be measured.

In the above embodiments of the present invention, since the dew condensation device includes the flow channel, the return air channel, the temperature and humidity control component and the fan, and the air inlet and the air outlet of the fan are respectively connected to the air outlet and the flow channel of the temperature and humidity control component, the fan When starting, the airflow can enter the dew device through the air inlet of the return air channel, and pass the temperature and humidity control component, so that the airflow has the characteristics of high temperature and high humidity, and then the air outlet of the flow channel is blown by the fan. The air flow from the air outlet of the flow channel can make the mobile platform A liquid layer is formed on the surface of the object to be measured to increase the amount of light scattered by the light source of the measurement device irradiating the surface of the object to be measured The surface of the object can be accurately measured. In addition, the surface measurement system is located in an open space, with simple installation, low equipment cost, low strength requirements for the support structure, and short process time.

100‧‧‧Surface measurement system

102‧‧‧Open space

110‧‧‧Mobile platform

111‧‧‧ Hollow area

112‧‧‧wheel

113‧‧‧spindle

120a, 120b ‧‧‧ condensation device

121‧‧‧Stream

122‧‧‧Outlet

123‧‧‧ return air channel

124‧‧‧Air inlet

127‧‧‧Fan

128‧‧‧Air inlet

129‧‧‧Outlet

130‧‧‧Temperature and humidity control components

131‧‧‧Outlet

132‧‧‧Humidifier

133‧‧‧Air inlet

134‧‧‧Evaporator

135‧‧‧rectifier board

136‧‧‧heater

137‧‧‧Perforation

138‧‧‧Compressor

140‧‧‧Measuring device

142‧‧‧Light source

144‧‧‧Image capture module

210‧‧‧Object to be tested

212‧‧‧Upper surface

214‧‧‧Lower surface

216‧‧‧ liquid layer

D1, D2, D3, D4, D5 ‧‧‧ direction

F1, F2‧‧‧ Airflow

L1, L2‧‧‧Light

FIG. 1 is a side view of a surface measurement system and a test object according to an embodiment of the invention.

FIG. 2 is a schematic diagram of the internal structure of the dew condensation device of FIG. 1.

FIG. 3 illustrates a top view of the surface measurement system of FIG. 1 with the upper dew condensation device omitted.

FIG. 4 shows a side view of the test object of FIG. 1 after passing through the dew condensation device and the measuring device measuring the test object.

In the following, a plurality of embodiments of the present invention will be disclosed in the form of diagrams. For clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is to say, in some embodiments of the present invention, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventional structures and elements will be shown in a simple schematic manner in the drawings.

FIG. 1 illustrates a surface measurement system according to an embodiment of the invention Side view of the system 100 and the object under test 210. As shown, the surface measurement system 100 is located in the open space 102. The surface measurement system 100 includes a mobile platform 110, dew condensation devices 120a, 120b, and a measurement device 140. The mobile platform 110 is used to transmit the object to be measured 210 along the direction D1. The condensation devices 120a and 120b are selectively located above and below the mobile platform 110. Although FIG. 1 shows the dew devices 120a and 120b that are located above and below the mobile platform 110 and are substantially aligned with each other, in other embodiments, the surface measurement system 100 may have only a single dew device 120a or dew device 120b. It is not intended to limit the invention. The dew condensation device 120a can generate a high-temperature and high-humidity airflow in the direction D2, and has a function of recovering the airflow, for example, the airflow is drawn back in the direction D3. The dew condensation device 120b can generate a high-temperature and high-humidity airflow in the direction D4, and has a recovery function, for example, to extract the airflow in the direction D5. When the mobile platform 110 drives the object 210 to move in the direction D1 and passes through the area between the dew devices 120a and 120b, the dew devices 120a and 120b can generate airflows in the directions D2 and D4 on the upper surface 212 of the object 210 A liquid layer is formed on the lower surface 214.

The measuring device 140 is located above the mobile platform 110. The measurement device 140 includes a light source 142 and an image capture module 144. After the liquid layer is formed on the object to be measured 210, the moving platform 110 can drive the object to be measured 210 to move in the direction D1 to below the measuring device 140. The light source 142 of the measuring device 140 can be used to illuminate the object to be measured 210 having a liquid layer on the mobile platform 110. The image capture module 144 is electrically connected to the light source 142, and can be used to detect light scattered from the object 210 with a liquid layer. The state of the object to be measured 210 of the liquid layer of the measuring tool of the surface measurement system 100 will be described in detail in FIG. 4.

In the following description, the dew devices 120a, 120b will be explained structure. Since the structures of the dew condensation devices 120a and 120b are similar, the dew condensation device 120a will be taken as an example for description below.

FIG. 2 is a schematic diagram of the internal structure of the condensation device 120a of FIG. 1. The dew condensation device 120a includes a flow channel 121, a return air channel 123, a temperature and humidity control assembly 130, and a fan 127. The flow channel 121 has an air outlet 122 that faces the mobile platform 110 (see FIG. 1 ). The return air channel 123 has at least one air inlet 124 facing the mobile platform 110. The air intake 124 of the return air channel 123 is located beside the air outlet 122 of the flow channel 121. In this embodiment, the return air channel 123 has two air inlets 124, and the air outlet 122 of the flow channel 121 is located between the two air inlets 124 of the return air channel 123, but the number of air inlets 124 is not used to limit the present invention. In addition, the temperature and humidity control assembly 130 has an air inlet 133 and an air outlet 131, and the air inlet 133 of the temperature and humidity control assembly 130 communicates with the return air passage 123. The fan 127 has an air inlet 128 and an air outlet 129, and the air inlet 128 of the fan 127 communicates with the air outlet 131 of the temperature and humidity control assembly 130, and the air outlet 129 of the fan 127 communicates with the flow channel 121. When the fan 127 is started, air flows F1, F2 can be formed.

Since the condensation device 120a includes a flow channel 121, a return air channel 123, a temperature and humidity control assembly 130 and a fan 127, and the air inlet 128 and the air outlet 129 of the fan 127 communicate with the air outlet 131 and the flow channel 121 of the temperature and humidity control assembly 130, Therefore, when the fan 127 is started, the airflow F2 may enter the airflow passage 123 through the air inlet 124 of the airflow passage 123, and pass the temperature and humidity control assembly 130, so that the airflow F2 has the characteristics of high temperature and high humidity. Next, the airflow F2 is sucked in by the fan 127 and the airflow F1 is blown out to the flow path 121. As a result, the air flow F1 flows along the flow path 121 and is blown out from the air outlet 122.

Referring to Figures 1 and 2 at the same time, when the object to be measured 210 is moved flat When the stage 110 is conveyed below the condensation device 120a, the airflow F1 with the direction D2 is blown out from the air outlet 122 of the flow channel 121 to form a liquid layer on the upper surface 212 of the object to be measured 210 on the mobile platform 110, and the airflow F1 is in contact with the test After the object 210, the return air passage 123 can draw back the high-temperature and high-humidity airflow in the direction D3 to save the power and water consumption of the temperature and humidity control component 130. The condensation device 120b may be regarded as an inverted state of the condensation device 120a. Similarly, when the object to be measured 210 is transported by the mobile platform 110 to the dew device 120b, the airflow in the direction D4 is blown from the air outlet 122 of the flow channel 121 of the dew device 120b to allow the object to be tested 210 on the mobile platform 110 to be lowered A liquid layer is formed on the surface 214, and after the airflow contacts the object to be measured 210, the return air passage 123 can draw back the high-temperature and high-humidity airflow in the direction D5. By forming a liquid layer on the upper surface 212 and the lower surface 214 of the object to be measured 210, the measuring device 140 can accurately measure the shape of the object to be measured 210.

In this embodiment, the temperature and humidity control module 130 includes a humidifier 132, an evaporator 134, and a heater 136. The humidifier 132 is adjacent to the air inlet 133 of the temperature and humidity control assembly 130. The evaporator 134 is located above the humidifier 132. The heater 136 is located above the evaporator 134, and the evaporator 134 is located between the heater 136 and the humidifier 132. In addition, the temperature and humidity control assembly 130 may further include a compressor 138 communicating with the evaporator 134. The dew devices 120a and 120b can be electrically connected to a monitoring system. The monitoring system can adjust the humidity and temperature of the airflow by controlling the humidifier 132, the evaporator 134 and the heater 136, and adjust the flow rate of the airflow by controlling the fan 127, and monitor The humidity, temperature and flow rate of the airflow F1 flowing out of the air outlet 122 ensure that the fluid characteristics of the airflow F1 are maintained at a certain stability. When the object to be measured 210 moves through the mobile platform 110, uniform and equal thickness of dew can be generated on the upper surface 212 and the lower surface 214 of the object to be measured 210 respectively. Liquid layer.

The condensation phenomenon is that the temperature of the condensation tuberculosis is lower than the dew point temperature of the atmospheric environment, and the atmospheric water vapor will liquefy and adhere to the condensation tuberculosis, that is, liquid small water droplets will condense from the saturated air, so the temperature and humidity are condensation phenomena Factors to be controlled. In this embodiment, the temperature of the air flow F1 flowing out of the air outlet 122 of the flow channel 121 is greater than the temperature of the object to be measured 210. The airflow F2 entering from the air inlet 133 of the temperature and humidity control assembly 130 passes through the humidifier 132 and the evaporator 134 and has a relative humidity ranging from 40% to 95%. After passing through the heater 136, the air flow F2 has a temperature ranging from 0°C to 90°C. The airflow F1 generated after the airflow F2 passes through the fan 127 has a flow velocity greater than 0 m/s and less than or equal to 5 m/s.

In addition, the dew condensation device 120a may further include a rectifying plate 135. The rectifying plate 135 is located in the flow channel 121 and adjacent to the air outlet 122 of the flow channel 121, and the rectifying plate 135 has a plurality of perforations 137. The perforation 137 of the rectifying plate 135 allows the air flow F1 to pass through, and has the effect of rectifying and equalizing.

FIG. 3 illustrates a top view of the surface measurement system 100 of FIG. 1 omitting the upper dew condensation device 120a. Referring to FIGS. 1 and 3 at the same time, the mobile platform 110 can transmit the object to be measured 210 to the dew device 120b in the direction D1. The range between the two dotted lines in FIG. 3 can be regarded as the object to be measured 210. In this embodiment, the mobile platform 110 has a hollow area 111, and the hollow area 111 is located above the dew condensation device 120b. When the mobile platform 110 transmits the object to be measured 210 to the dew device 120b, the hollow area 111 is located between the dew device 120b and the object to be tested 210. In this way, the airflow in the directions D4 and D5 of the condensation device 120b can pass through the bottom of the moving platform 110.

In addition, in this embodiment, the mobile platform 110 may have a roller 112 and a rotating shaft 113. The roller 112 is fixed on the rotating shaft 113. When the shaft 113 turns When moving, the roller 112 can rotate the rotating shaft to drive the object to be measured 210 to move in the direction D1.

The surface measurement system 100 of the present invention is located in an open space 102. It is simple to set up, with low equipment cost, low strength requirements for the support structure, and short manufacturing time. It should be understood that the connection relationship of the components already described will not be repeated, and will be described first. In the following description, the state when the surface measuring system 100 measures the object to be measured 210 will be described.

FIG. 4 shows a side view of the test object 210 of FIG. 1 after passing through the condensation devices 120 a and 120 b and the measuring device 140 measuring the test object 210. Referring to FIGS. 1 and 4 at the same time, when the object to be measured 210 passes through the area between the dew devices 120 a and 120 b, the liquid layer 216 is formed on the upper surface 212 and the lower surface 214 of the object to be measured 210. At this time, the dew condensation devices 120a and 120b can be turned off to save power and water consumption, but it is not used to limit the present invention. In other embodiments, the dew condensation devices 120a and 120b can also remain on. After the liquid layer 216 is formed, the mobile platform 110 can drive the object to be measured 210 to continue to move in the direction D1 under the measuring device 140.

The light source 142 of the measuring device 140 can generate light L1 to illuminate the object to be measured 210 having the liquid layer 216 on the mobile platform 110. The image capture module 144 is electrically connected to the light source 142, and can detect light scattered from the object 210 with the liquid layer 216 (for example, light L2). In this embodiment, the light source 142 may be a laser light source, and the image capturing module 144 may be a camera, but it is not intended to limit the present invention. The liquid layer 216 can increase the amount of light scattered by the light source 142 of the measuring device 140 irradiating the surface of the object to be measured 210, and improve the problem of insufficient reflectivity and reflection direction of the transparent object to be measured 210, thereby reducing image noise and enhancing the image Retrieved quality. and also That is to say, the image measured by the image capturing module 144 of the measuring device 140 has a high signal-to-noise ratio, so that the surface of the object to be measured 210 can be accurately measured.

Although the present invention has been disclosed as above in an embodiment, it is not intended to limit the present invention. Anyone who is familiar with this art can make various modifications and retouching without departing from the spirit and scope of the present invention, so the protection of the present invention The scope shall be as defined in the appended patent application scope.

100‧‧‧Surface measurement system

102‧‧‧Open space

110‧‧‧Mobile platform

120a, 120b ‧‧‧ condensation device

140‧‧‧Measuring device

142‧‧‧Light source

144‧‧‧Image capture module

210‧‧‧Object to be tested

212‧‧‧Upper surface

214‧‧‧Lower surface

D1, D2, D3, D4, D5 ‧‧‧ direction

Claims (10)

A surface measurement system includes: a mobile platform for transferring an object to be measured in one direction; at least one dew condensation device, selectively located above and below the mobile platform, to form a liquid layer on the object to be measured On the surface of the, the dew condensation device includes: a flow channel with an air outlet toward the moving platform; a rectifying plate located in the flow channel and having a plurality of perforations, the rectifying plate is perpendicular to the length direction of the flow channel, and the The opening directions of the perforations are parallel to the length direction of the flow channel; a return air channel has at least one air inlet toward the moving platform, wherein the air inlet of the return air channel is adjacent to the air outlet of the flow channel; a temperature The humidity control assembly has an air inlet, an air outlet, a humidifier, an evaporator, and a heater. The air inlet of the temperature and humidity control assembly is connected to the return air passage, and the return air passage is used for drawing back The airflow adjacent to the mobile platform and blown from the air outlet of the flow channel to the temperature and humidity control assembly, the humidifier is adjacent to the air inlet of the temperature and humidity control assembly, the evaporator is located above the humidifier, the A heater is located above the evaporator, the evaporator is located between the heater and the humidifier, and the evaporator, the heater, and the humidifier overlap each other, wherein the air inlet from the temperature and humidity control assembly The incoming airflow after passing through the heater has a temperature ranging from 0°C to 90°C; and a fan having an air inlet and an air outlet respectively connecting the air outlet and the flow channel of the temperature and humidity control assembly; and a The measuring device, located above the mobile platform, contains: A light source for illuminating the object to be tested with the liquid layer on the mobile platform; and an image capture module electrically connected to the light source for detecting scattering from the object to be tested with the liquid layer Light. The surface measurement system according to claim 1, wherein the temperature and humidity control assembly further comprises: a compressor connected to the evaporator. The surface measurement system according to claim 1, wherein the airflow entering from the air inlet of the temperature and humidity control assembly has a relative humidity ranging from 40% to 95% after passing through the humidifier and the evaporator. The surface measurement system according to claim 1, wherein the airflow entering from the air inlet of the temperature and humidity control assembly has a flow velocity greater than 0 m/s and less than or equal to 5 m/s after passing through the fan. The surface measurement system according to claim 1, wherein the rectifying plate is adjacent to the air outlet of the flow channel. The surface measurement system according to claim 1, wherein the air inlet of the return air duct is located beside the air outlet of the flow duct. The surface measurement system according to claim 1, wherein the return air channel has two air inlets, and the air outlet of the flow channel is located between the two air inlets. The surface measurement system according to claim 1, comprising two condensation devices, which are located above and below the mobile platform, respectively, and are substantially aligned with each other. The surface measurement system according to claim 1, wherein the dew condensation device is located below the mobile platform, the mobile platform further has a hollow area, and the hollow area is located above the dew condensation device. The surface measurement system according to claim 1, wherein the temperature of the airflow flowing out of the air outlet of the flow channel is greater than the temperature of the object to be measured.

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