TWI689677B - Valve device - Google Patents

Abstract

[Problem] To provide a gas-driven valve device with power generation function, which can be equipped with various electronic devices and eliminate the problem of wiring or battery exchange. [Solution] It has: a piston member (13) that drives a diaphragm (15); an actuator portion (10) that is supplied with driving gas to drive the piston member (13); a coil spring (30) that springs and pushes A piston member (13); and a power generating unit (100), which include: a coil (130) provided in a movable part that moves according to the action of the actuator part (10), and an unrelated actuator part (10) ) The permanent magnet (120) provided in the fixed part that does not move.

Description

Valve device

The invention relates to a valve device.

In the field of valve devices, electronic devices such as pressure sensors and wireless modules are mounted to increase the efficiency of the device (see Patent Documents 1, 2, and 3). As a means of supplying power used by such electronic devices, Patent Document 2 discloses a method of driving various sensors using a button battery. In addition, Patent Document 3 discloses a system in which a high frequency is superimposed on a control input sent from a controller to a solenoid valve, and a high-frequency component is taken out on the valve side to receive power. Prior Art Literature Patent Literature

Patent Document 1: Japanese Patent Publication No. 2011-513832 　　 Patent Document 2: Japanese Patent Publication No. 2016-513228 　　 Patent Document 3: Japanese Patent Publication No. 2017-020530

Problems to be solved by the invention

Air-driven valve devices using air pressure used in semiconductor manufacturing equipment need to secure power supplies for operation of various electronic devices. As a means, it is considered to introduce the wiring for power supply from the outside to the valve device, but in the fluid control device provided with a plurality of valves, not only will the wiring become complicated, but also the problem of explosion resistance, you must pay careful attention to the wiring the design of. In addition, as a means, if a battery is used as a power source, the problem of wiring can be eliminated, but it is necessary to use a large-capacity primary battery that can match the life of the valve, or periodically perform battery exchange operations. In addition, Patent Document 3 does not apply to air-driven valves for high-frequency overlapping power transmission of solenoid valves.

An object of the present invention is to provide a valve device with generator capability, which can be equipped with various electronic devices and eliminates the problem of wiring or battery exchange. Means to solve the problem

The valve device of the present invention is characterized in that it has a movable portion that receives the supply of driving gas to drive the valve body; a 　　 fixed portion that does not move regardless of the movement of the movable portion; and a power generating unit that includes: A coil connected to one of the movable part and the driving part, and a permanent magnet connected to the other of the movable part and the driving part.

Preferably, the following structure may be adopted: the coil is provided in the movable portion, and the permanent magnet is provided in the fixed portion.

Instead of adopting the following structure, it further has a spring member that urges the movable portion in one direction, and the power generation unit generates electricity by using a part of the energy stored in the spring member. In this case, a configuration may be adopted that has a circuit that takes out only the current in the direction of power generation by the power generation unit when the driving gas supplied to the valve device is released to the outside. Effect of invention

According to the present invention, the shock associated with the opening and closing operation of the valve body can be buffered and the power generated by the power generation unit, so that the life of the valve device can be extended and the valve device can be highly efficient.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in this specification and the drawings, the constituent elements having substantially the same functions are denoted by the same symbols, and redundant descriptions are omitted. 1 to 3B are diagrams showing the structure of a valve device according to an embodiment of the present invention. FIG. 1 is an external perspective view, FIG. 2A is a longitudinal sectional view in a closed state, and FIG. 2B is taken along the chain line A of FIG. 2A. 3A is an enlarged cross-sectional view of the valve device of FIG. 1 in an open state, and FIG. 3B is an enlarged cross-sectional view of the area surrounded by the chain line B of FIG. 3A. In the figure, arrows A1 and A2 indicate the up-down direction, A1 indicates the upward direction, and A2 indicates the downward direction.

The valve device 1 includes a piping connection portion 3, an actuator portion 10, and a valve body 20. The piping connection portion 3 is connected to piping not shown, and supplies compressed air as driving gas to the actuator portion 10 or releases the air released from the actuator portion 10 to the outside.

The actuator unit 10 includes a cylindrical actuator cover 11, an actuator body 12, a piston member 13, a diaphragm holder 14, and a power generation unit 100. The actuator cover 11 has a cylindrical portion 11a extending from the top toward the downward direction A2. The inner circumferential surface of the cylindrical portion 11 a is a flow path 11 b that defines air, and the flow path 11 b is in communication with the pipe connection portion 3. The actuator body 12 has a guide hole 12a for guiding the diaphragm holder 14 in the up-down directions A1 and A2 on its lower side, and communicates with the upper side of the guide hole 12a to form a through hole 12b. On the upper side of the actuator body 12, a pneumatic cylinder chamber 12c is formed, which guides the piston portion 13b of the piston member 13 to slide freely in the up-down directions A1, A2 through the O-ring OR. The piston member 13 has a flow path 13a communicating with the pneumatic cylinder chamber 12c at the center. The flow path 13a communicates with the pipe connection portion 3. The piston member 13 allows the piston portion 13b and the tip shaft portion 13c to move freely in the pneumatic cylinder chamber 13c and the through hole 12b in the vertical directions A1 and A2 through the O-ring OR. The diaphragm pressing member 14 is movable in the vertical directions A1 and A2 by the guide hole 12a of the actuator body 12.

The valve body 20 has an upper side screwed to the lower side of the actuator body 12, and has openings 21a, 22a on its bottom surface to define flow paths 21, 22 for gas or the like. The flow channels 21 and 22 are connected to a sealing member (not shown) through other flow channel members. The valve seal 16 is provided around the flow path 21 of the valve body 20. The valve seal 16 is formed of resins such as PFA and PTFE to be elastically deformable. The diaphragm 15 functions as a valve body, has a diameter larger than that of the valve seal 16, and is formed into a spherical shell shape that can be elastically deformed by metal such as stainless steel, NiCo-based alloy, or fluorine-based resin. The diaphragm 15 is pushed by the lower end surface of the actuator body 12 toward the valve body 20 through the pressing adapter 18, whereby the valve seal 16 can be supported by the valve body 20 in abutment and isolation. In FIG. 2A, the diaphragm 15 is pressed by the diaphragm pressing member 14 to be elastically deformed, and is pressed to the valve seal 16. If the pressure caused by the diaphragm pressing member 14 is released, it will return to a spherical shell shape. When the diaphragm 15 is pressed to the valve seal 16, the flow path 21 is closed. As shown in FIG. 3A, if the diaphragm 15 is separated from the valve seal 16, the flow path 21 will open and communicate with the flow path 22 . The coil spring 30 is interposed between the top of the actuator cover 11 and the piston portion 13b of the piston member 13 and urges the piston member 13 toward the downward direction A2 at any time by the restoring force. As a result, the upper end surface of the diaphragm pressing member 14 is pushed by the piston member 13 in the downward direction A2, and the diaphragm 15 is pressed toward the valve seal 16.

Here, the power generation unit 100 will be described. The power generating unit 100 includes: a permanent magnet 120 formed in a ring shape and fixed to the inner circumferential surface of the actuator cover 11; and a coil 130 wound around a holding groove 131a and held by the holding groove 131a formed in a circle The outer circumferential surface of the cylindrical resin holding member 131. The piston member 13 and the holding member 131 may constitute a movable portion. The holding member 131 is arranged outside the coil spring 30 when viewed from the movable direction, and is held by the piston member 13 and can hold the coil 130. As a result, the coil 130 is arranged outside the coil spring 30 when viewed from the movable direction. The fixed part, that is, the actuator cover 11, is in contact with: the other end of the coil spring 30 opposite to the end contacting the piston member 13, and the permanent magnet 120 can be held outside the coil 130 when viewed from the movable direction . The permanent magnet 120 is magnetized in the radial direction. That is, the permanent magnet 120 is magnetized so that the inner circumference side is N pole or S pole, and the outer circumference side is S pole or N pole. The holding member 131 is fixed to the piston member 13 and moves together with the movement of the piston member 13 in the vertical direction. When the holding member 131 moves up and down, the coil 130 moves up and down with respect to the permanent magnet 120. In response to the electrical load connected to the coil 130, an induction current flows through the coil 130 by electromagnetic induction to supply power. Here, the holding member 131 is an insulator, made of resin, for example, and suppresses unnecessary eddy current braking caused by reciprocating movement in the place where the strong magnetic field of the permanent magnet 120 is applied, without hindering the operation of the piston member 13 . In addition, the side of the coil that can be mounted lighter than the permanent magnet is fixed to the piston member 13 that is the movable portion, so that the weight increase of the piston member 13 is minimized. By this, the influence on the reaction speed of the valve is minimized. The induced current flowing in the coil 130 changes according to the moving direction or speed of the coil 130, and acts on the permanent magnet 120 to generate a force in the direction of applying a brake to the movement of the coil 130. As shown in FIG. 2B, when the coil 130 moves in the downward direction A2, the braking force FR1 that opposes the upward direction acts on the piston member 13 through the holding member 131. As shown in FIG. 3B, when the coil 130 moves in the upward direction A1, the braking force FR2 that opposes the downward force acts on the piston member 13 through the holding member 131.　　As shown in FIG. 2A, if the compressed air is released, the piston member 13 is pushed down in the direction A2 by the restoring force of the coil spring 30, causing the diaphragm pressing member 14 to collide with the valve seal 16 through the diaphragm 15. The upward braking force FR1 described above has the effect of easing the impact at this time. As shown in FIG. 3A, if compressed air is supplied, the elastic force of the coil spring 30 is resisted, so that the piston member 13 is pushed up by the upward direction A1, and the contact surface 13f of the piston member 13 collides with the actuator cover 11 'S abutment surface 11f. The above-mentioned downward braking force FR2 has a function of easing the impact at this time. The faster the moving speed of the coil 130 is, the larger the induced current is generated and a larger braking force is applied. Therefore, the braking force hardly occurs when the piston member 13 starts to move. Therefore, the force acting on the piston member 13 by the driving pressure and the elastic thrust of the coil spring 30 is reduced, and compared with the case where the valve is slowly opened and closed, the shock can be mitigated without adversely affecting the reaction speed. . Also, as another function, there is a function of increasing the pressure of the compressed air or the spring force of the coil spring 30 to add the braking force due to power generation, thereby suppressing the shock applied to the diaphragm 15 to the same extent to maintain it to the same extent Valve life, and improve the reaction speed of the valve.

FIG. 4A is an example of a system for operating the valve device 1 of the above structure. In FIG. 4A, the so-called valve operating part 500 is a part related to the flow of energy when the valve device 1 is operating, and represents the actuator part 10 or the coil spring 30. The gas supply source 300 has a function of supplying compressed air to the valve device 1 through an air line AL fluidly connected to the piping connection portion 3 of the valve device 1, for example, a pressure accumulator or a gas cylinder. A solenoid valve EV1 is provided in the middle of the air line AL, and a solenoid valve EV2 is provided in the air line AL diverged on the downstream side of the solenoid valve EV1. The control circuit 310 outputs control signals SG1 and SG2 to the solenoid valves EV1 and EV2 in order to control the opening and closing of the solenoid valves EV1 and EV2. The load circuit 600 is an electrical circuit that electrically connects the coil 130 of the power generation unit 100 as a load. The load circuit 600 is electrically connected to the power generating unit 100 through the electrical wiring EL.

FIG. 5A shows an example of the load circuit 600. In addition, the GND line is omitted in the figure. The load circuit 600 includes various sensors 604 such as a power IC 601, a secondary battery 602, a microcomputer 603, a pressure sensor, a temperature sensor, etc., and can send data detected by the various sensors 604 to the outside The wireless part 605, the AC-DC conversion circuit 606. The current generated by the coil 130 of the power generating unit 100 is reversed in positive and negative directions in accordance with the moving direction of the piston member 13, so the AC-DC conversion circuit 606 converts the current. The power supply IC 601 is a power management IC that boosts the power from the coil 130 and stores it in the secondary battery 602, and also serves to adjust the power sent to the power supply target such as the microcomputer 603, various sensors 604, and the wireless unit 605. Function. As the power IC 601, for example, a general distributor for energy collection can be used.　　 Secondary battery 602 stores DC power supplied from power supply IC601. It can also be replaced by a capacitor with a larger capacity. Other than the various sensors 604, they are housed in a circuit accommodating portion (not shown) (for example, provided on the upper surface of the actuator cover 11). The various sensors 604 are arranged in the valve device in order to detect pressure or temperature Near the flow path of 1, etc., it is electrically connected to the power IC 601 or the microcomputer 603 by wiring.

4B and 4C, the schematic flow of energy of the system of FIG. 4A and the power generation operation by the power generation unit 100 will be described. When the valve is opened, it is necessary to drive the actuator portion 10, so as shown in FIG. 4B, the solenoid valve EV1 is opened and the solenoid valve EV2 is closed. Thereby, the driving gas is supplied from the gas supply source 300 to the valve device 1. The driving gas here means a gas higher than atmospheric pressure and having a sufficiently high pressure capable of driving the valve device 1. In this embodiment, compressed air is used as the driving gas.　　 By supplying compressed air to the valve device 1, as shown in FIGS. 3A and 3B, the piston member 13 is pushed upward in the direction A1. At this time, the coil 130 of the power generation unit 100 moves upward A1, thereby supplying power to the load circuit 600. The supplied electric power is consumed by various sensors 604 and charged to the secondary battery 602. The coil spring 30 is compressed to store energy in the coil spring 30. At this time, as shown in FIG. 3A, the contact surface 13 f of the piston member 13 is inelastically colliding with the contact surface 11 f of the actuator cover 11, so part of the energy supplied to the valve device 1 by the gas supply source 300 , Is changed into heat or vibration and released.

When the valve is closed, the compressed air stored in the valve device 1 is released, and the energy stored in the coil spring 30 is released. As shown in FIG. 4C, the solenoid valve EV1 is closed, and the solenoid valve EV2 is opened. When the compressed air is released from the valve device 1 through the air line AL and the solenoid valve EV2 to the outside, the coil 130 of the power generation unit 100 moves downward A2, thereby supplying power to the load circuit 600. The supplied electric power is consumed by various sensors 604 and charged to the secondary battery 602. Since the secondary battery 602 is charged while using the valve, the secondary battery 602 with a smaller capacity can be operated for a long period of time compared to the case of using the primary battery. Since the energy stored in the battery can be reduced, safety can be improved.

According to the present embodiment, the power generating unit 100 provided in the valve device 1 generates force in a direction that relieves the shock associated with the opening and closing operation of the diaphragm 15, so that the problem of power wiring or battery exchange can be eliminated, and the diaphragm 15 can be eliminated. The load of the valve body is reduced to make the valve device 1 longer in life. Also, in the valve device 1 of the present embodiment, a part of the energy stored in the coil spring 30 is used to generate electricity, so that a part of the energy that would otherwise be released as heat or vibration can be effectively used.　　 In addition, since the induced current is generated in the coil 130 only during the opening and closing operation of the valve device 1, this is monitored, and can also function as a sensor for measuring the number of opening and closing of the valve device 1 or the opening and closing speed. Adding such data to other data of various sensors 604 for analysis can improve the accuracy of fault determination or fault prediction.

In the above-mentioned embodiment, it is exemplified that the power generation unit 100 generates power when both the actuator unit 10 is driven and the compressed air is released. FIG. 5B is an example of a load circuit 600B to which another embodiment of the present invention is applied. The power generated only during either the driving of the actuator unit 10 or the liberation of compressed air is charged to a battery or the like through the power IC 601 for consumption. The diode D1 of the load circuit 600B is connected to supply power generated by the coil 130 to the load circuit 600B only when a part of the energy stored in the coil spring 30 is used to generate electricity. Thereby, the braking force due to the induced current is not generated when the valve is opened, the reaction speed of the valve opening is maintained, and the braking force due to the power generation is obtained when the valve 15 is closed with a large impact on the diaphragm 15. This makes it unnecessary to increase the pressure of the compressed air supplied for power generation even under the condition that the reaction speed as a valve is maintained, and energy can be used without waste. Moreover, the operating specifications such as the pressure of the supplied compressed air or the reaction speed of the valve will not change substantially, and it is also useful when replacing the valve device of the existing fluid control device. In addition, the direction of the diode D1 may be reversed, thereby being mounted so as to supply only the electric power generated when the compressed air is introduced to the load circuit 600B.

Although the so-called normally-closed valve is exemplified in the above embodiment, it is not limited to this, and may be applied to the so-called normally-open valve.

In the above-mentioned embodiment, although the case where the valve device 1 is driven by compressed air is exemplified, other gases than air may be used.

Although the diaphragm type valve has been exemplified in the above embodiment, the present invention is not limited to this, and other types of valves may be applied.

1‧‧‧Valve device 3‧‧‧Piping connection part 10‧‧‧Actuator part (actuator) 11‧‧‧Actuator cover (fixed part) 12‧‧‧Actuator body (fixed part) 13‧‧‧ Piston member (movable part) 14‧‧‧ Diaphragm pressing member 15‧‧‧ Diaphragm 16‧‧‧ Valve seal 18‧‧‧ Pressing coupling 20‧‧‧Valve body (fixed part) 30‧‧ ‧Coil spring (spring member) 100‧‧‧Generating unit 120‧‧‧ Permanent magnet 130‧‧‧Coil 131‧‧‧Coil holding member (movable part) 300‧‧‧Gas supply source 310‧‧‧Control circuit 500‧ ‧‧ Valve operation part 600, 600B ‧‧‧ Load circuit

FIG. 1 is an external perspective view of a valve device according to an embodiment of the present invention. FIG. 2A is a longitudinal sectional view of the valve device of FIG. 1 in a closed state. FIG. 2B is an enlarged cross-sectional view of the area surrounded by the chain line A of FIG. 2A. FIG. 3A is a longitudinal sectional view of the valve device of FIG. 1 in an open state. FIG. 3B is an enlarged cross-sectional view of the area surrounded by the chain line B of FIG. 3A. FIG. 4A is a schematic structural diagram of a valve system including the valve device of FIG. 1. FIG. 4B is a diagram for explaining the energy flow when the actuator is driven in the system of FIG. 4A.　　 FIG. 4C is a diagram for explaining the energy flow when the pressure is relieved in the system of FIG. 4A. FIG. 5A is a functional block diagram showing an example of a load circuit. FIG. 5B is a functional block diagram showing another example of the load circuit.

10‧‧‧Actuator (actuator)

11‧‧‧Actuator cover (fixed part)

12‧‧‧Actuator body (fixed part)

13‧‧‧ Piston member (movable part)

30‧‧‧coil spring (spring member)

120‧‧‧Permanent magnet

130‧‧‧coil

131‧‧‧ coil holding member (movable part)

131a‧‧‧maintain ditch

A‧‧‧Chain

A1‧‧‧ up

A2‧‧‧down direction

FR1‧‧‧ upward braking force

OR‧‧‧O-ring

Claims (12)

A valve device comprising: a movable part which is supplied with driving gas to drive a valve body; a fixed part which does not move regardless of the movement of the movable part; and a power generating unit comprising: the movable part and The coil on one side of the drive unit and the permanent magnet provided on the other side of the movable unit and the drive unit, and the power generation unit are provided to generate a force in a direction that relaxes the impact accompanying the opening and closing operation of the valve body. The valve device according to claim 1, wherein the coil is provided in the movable portion, and the permanent magnet is provided in the fixed portion. The valve device according to claim 1, further comprising a spring member that urges the movable portion in one direction, and the power generation unit generates power using a part of energy stored in the spring member. The valve device according to claim 1, which has a circuit that takes only the current in the direction generated by the power generation unit when the driving gas supplied to the valve device is released to the outside Out. The valve device according to claim 1, further comprising: a power supply circuit that boosts the voltage generated by the generator, and a load that is operated by the power supplied by the power supply circuit. The valve device according to claim 5, which has a secondary battery or a capacitor that receives power supply from the power supply circuit. The valve device according to claim 3, wherein the coil is disposed outside the spring member when viewed from the movable direction. The valve device according to claim 3, wherein the movable portion has: a piston member; and a holding member, which is disposed outside the spring member when viewed from the movable direction, and is held and held by the piston member The aforementioned coil. The valve device according to claim 3, wherein the fixed portion is in contact with the other end of the spring member opposite to the end contacting the movable portion, and the permanent magnet is viewed from the movable direction Keep outside the aforementioned coil. The valve device according to claim 1, wherein the permanent magnet is formed in a ring shape and is magnetized in the radial direction. The valve device according to claim 1, further comprising: a pressure sensor or a temperature sensor operated by the electric power generated by the power generation unit. The valve device according to claim 11, which has a wireless part that operates by the electric power generated by the power generation unit and wirelessly generates data detected by the pressure sensor or the temperature sensor Send a message.

Images