TWI689093B - Light emitting element and display device - Google Patents

Light emitting element and display device Download PDF

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TWI689093B
TWI689093B TW107124386A TW107124386A TWI689093B TW I689093 B TWI689093 B TW I689093B TW 107124386 A TW107124386 A TW 107124386A TW 107124386 A TW107124386 A TW 107124386A TW I689093 B TWI689093 B TW I689093B
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light
electrode
emitting
emitting portion
emitting element
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TW201911559A (en
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栗棲崇
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日商夏普股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages

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Abstract

本發明之課題在於實現一種發光元件,其即便將發光部細微化,也容易製造,可增大發光部的發光強度,且可提高發光部的散熱性。解決上述課題的手段為:第一分離槽(12)之至少一部分於俯視時,形成為將中心(12c)保持於第二發光部(2)側的圓弧狀。 An object of the present invention is to realize a light-emitting element that is easy to manufacture even if the light-emitting portion is miniaturized, can increase the light-emitting intensity of the light-emitting portion, and can improve the heat dissipation of the light-emitting portion. The means for solving the above-mentioned problem is that at least a part of the first separation groove (12) is formed in a circular arc shape that holds the center (12c) on the side of the second light emitting portion (2) when viewed from above.

Description

發光元件以及顯示裝置 Light emitting element and display device

本發明係關於發光元件以及顯示裝置。 The present invention relates to a light-emitting element and a display device.

先前,已知具備有複數個發光部之發光元件以及顯示裝置。作為先前的發光元件,於專利文獻1之Fig.1C,揭示有複數個發光部被配置為陣列狀的發光元件陣列(發光元件)。再者,專利文獻1之Fig.1C的符號120之構件為接點(電連接)用的金屬化層。 Previously, a light-emitting element and a display device including a plurality of light-emitting parts have been known. As a conventional light-emitting element, Fig. 1C of Patent Document 1 discloses a light-emitting element array (light-emitting element) in which a plurality of light-emitting parts are arranged in an array. Furthermore, the symbol 120 in Fig. 1C of Patent Document 1 is a metallization layer for contacts (electrical connection).

又,於專利文獻1之Fig.16,揭示有於接受側基板400搭載有複數個微型LED(Light Emitting Diode)135之顯示裝置。複數個微型LED135分別為搭載於上述發光元件陣列之複數個發光部被個別化者,且搭載於接受側基板400。再者,專利文獻1之Fig.16中,符號410的構件為螺絲起子接點(driver contact),符號420之構件為共通接點線。 Furthermore, Fig. 16 of Patent Document 1 discloses a display device in which a plurality of micro LEDs (Light Emitting Diode) 135 are mounted on the receiving side substrate 400. The plurality of micro LEDs 135 are individually mounted on the light-emitting element array, and are mounted on the receiving-side substrate 400. Furthermore, in Fig. 16 of Patent Document 1, the member 410 is a driver contact, and the member 420 is a common contact line.

專利文獻1:美國專利公開2013/0126827號公報(2013年5月23日公開) Patent Document 1: US Patent Publication No. 2013/0126827 (published on May 23, 2013)

專利文獻1中,將發光元件陣列暫且個別化而搭載於接受側基板400。因此,專利文獻1之顯示裝置不適合高像素之顯示裝置、或像素節距小的顯示裝置等。因此,正在研究實現一種顯示裝置,其不將發光元件陣列個別化,而具備複數個發光部。 In Patent Document 1, the light-emitting element array is temporarily individualized and mounted on the receiving-side substrate 400. Therefore, the display device of Patent Document 1 is not suitable for a high-pixel display device, a display device with a small pixel pitch, or the like. Therefore, research is being carried out to realize a display device that does not individualize the light-emitting element array but includes a plurality of light-emitting parts.

此處,為了實現小型、高精細且高像素之顯示裝置,各發光部之進一步的細微化是必須的。然而,將各發光部進行細微化之情形時,產生各種課題。 Here, in order to realize a small, high-definition, and high-pixel display device, further miniaturization of each light-emitting portion is necessary. However, when the light-emitting parts are miniaturized, various problems arise.

作為第一課題,由於相對於金屬化層120的位置錯位之邊限(margin)極小,故製造困難。作為第二課題,難以增大金屬化層120。若無法增大金屬化層120,則難以增大發光部的發光強度,或難以提高發光部的散熱性。 As a first problem, since the margin of positional displacement with respect to the metallization layer 120 is extremely small, manufacturing is difficult. As a second problem, it is difficult to enlarge the metallization layer 120. If the metallization layer 120 cannot be enlarged, it is difficult to increase the luminous intensity of the light emitting portion, or it is difficult to improve the heat dissipation of the light emitting portion.

本發明之一態樣的目的在於實現一種發光元件,其即便將發光部細微化,也容易製造,可增大發光部的發光強度,可提高發光部的散熱性。又,本發明之一態樣的目的在於實現一種具備該發光元件的顯示裝置。 An object of one aspect of the present invention is to realize a light-emitting element that is easy to manufacture even if the light-emitting portion is miniaturized, can increase the light-emitting intensity of the light-emitting portion, and can improve the heat dissipation of the light-emitting portion. Moreover, an object of one aspect of the present invention is to realize a display device provided with the light-emitting element.

為了解決上述課題,本發明之一態樣的發光元件之特徵在於,具備:第一發光部,具有於俯視時為大致圓形狀的第一電極;第二發光部,具有於俯視時為大致圓形狀的第二電極;以及第三發光部,具有於俯視時為大致圓形狀的第三電極;該第一發光部、該第二發光部以及該第三發光部以構成將該第一發光部作為頂點的角的方式配置,形成有將該第一發光部與該第二發光部分離的第一分離槽,該第一分離槽的至少一部分形成為於俯視時將中心保持於該第二發光部側的圓弧狀。 In order to solve the above-mentioned problems, a light-emitting element of one aspect of the present invention is characterized by comprising: a first light-emitting portion having a first electrode that is substantially circular in plan view; and a second light-emitting portion that is substantially circular in plan view A second electrode having a shape; and a third light emitting portion having a third electrode that is substantially circular in plan view; the first light emitting portion, the second light emitting portion, and the third light emitting portion constitute the first light emitting portion Arranged as a corner of the apex, there is formed a first separation groove that separates the first light-emitting portion from the second light-emitting portion, and at least a portion of the first separation groove is formed to hold the center at the second light emission in a plan view The arc on the side.

又,為了解決上述課題,本發明之一態樣的顯示裝置的特徵在於,具備上述發光元件。 In order to solve the above-mentioned problems, a display device according to an aspect of the present invention is characterized by including the above-mentioned light-emitting element.

根據本發明之一態樣,即便將發光部細微化,也容易製造,可增大發光部的發光強度,且可提高發光部的散熱性。 According to one aspect of the present invention, even if the light emitting portion is miniaturized, it is easy to manufacture, the light emitting intensity of the light emitting portion can be increased, and the heat dissipation of the light emitting portion can be improved.

1:第一發光部 1: the first light emitting part

2:第二發光部 2: Second light-emitting part

3:第三發光部 3: The third light-emitting part

4:共通電極部 4: Common electrode part

5:第一發光區域 5: The first light-emitting area

6:第二發光區域 6: Second light-emitting area

7:第三發光區域 7: third light emitting area

8:第一電極 8: first electrode

9:第二電極 9: Second electrode

10:第三電極 10: third electrode

11:共通電極 11: Common electrode

12:第一分離槽 12: The first separation tank

13:第二分離槽 13: Second separation tank

51、52:發光元件 51, 52: light emitting element

201:半導體模組 201: Semiconductor module

12a、13a:圓弧 12a, 13a: arc

12c、13c:中心 12c, 13c: center

12w:第一分離槽之寬度 12w: the width of the first separation groove

13w:第二分離槽之寬度 13w: the width of the second separation tank

1t:第一發光部與共通電極部之邊界的長度 1t: Length of the boundary between the first light-emitting part and the common electrode part

2t:第二發光部與共通電極部之邊界的長度 2t: Length of the boundary between the second light-emitting part and the common electrode part

3t:第三發光部與共通電極部之邊界的長度 3t: the length of the boundary between the third light-emitting part and the common electrode part

圖1係表示本發明之實施形態1~6的發光元件之概略構成的俯視圖。 FIG. 1 is a plan view showing a schematic configuration of light-emitting elements according to Embodiments 1 to 6 of the present invention.

圖2係係表示本發明之實施形態1~6的發光元件之概略構成圖,且為於第一方向觀察發光元件的圖。 FIG. 2 is a schematic configuration diagram showing light-emitting elements according to Embodiments 1 to 6 of the present invention, and is a view of the light-emitting element viewed in the first direction.

圖3係表示本發明之實施形態1~6的發光元件之變形例之概略構成的圖,且為於第一方向觀察發光元件的圖。 3 is a diagram showing a schematic configuration of a modified example of the light-emitting element according to Embodiments 1 to 6 of the present invention, and is a view of the light-emitting element viewed in the first direction.

圖4的(a)係於第二方向觀察圖2所示之發光元件的圖,(b)係於第二方向觀察圖3所示之發光元件的圖。 4 (a) is a view of the light-emitting element shown in FIG. 2 viewed in the second direction, and (b) is a view of the light-emitting element shown in FIG. 3 viewed in the second direction.

圖5係表示本發明之實施形態8的發光元件之製造方法的流程圖。 5 is a flowchart showing a method of manufacturing a light-emitting element according to Embodiment 8 of the present invention.

圖6的(a)~(c)係說明圖5所示之步驟的一部分的圖。 6 (a) to (c) are diagrams illustrating a part of the steps shown in FIG. 5.

圖7的(a)~(d)係說明使用本發明之實施形態8的發光元件而構成之半導體模組的製造方法的一例之圖。 7(a) to (d) are diagrams illustrating an example of a method of manufacturing a semiconductor module configured using the light-emitting element of Embodiment 8 of the present invention.

針對用於實施本發明之形態,參照圖式進行說明。再者,為了便於說明,有針對先前已說明的構件與具有相同功能的構件,標註相同符號,省略其說明的情形。 The form for implementing the present invention will be described with reference to the drawings. In addition, in order to facilitate the explanation, the components that have been previously explained and the components having the same function may be marked with the same symbols, and the description thereof may be omitted.

〔實施形態1〕 [Embodiment 1]

圖1係表示本發明之實施形態1~6的發光元件51之概略構成的俯視圖。發光元件51具備第一發光部1、第二發光部2、第三發光部3以及共通電極部4。 FIG. 1 is a plan view showing a schematic configuration of a light-emitting element 51 according to Embodiments 1 to 6 of the present invention. The light-emitting element 51 includes a first light-emitting portion 1, a second light-emitting portion 2, a third light-emitting portion 3, and a common electrode portion 4.

第一發光部1具有由LED構成之第一發光區域5。第二發光部2具有由LED構成之第二發光區域6。第三發光部3具有由LED構成之第三發光區域7。 The first light emitting section 1 has a first light emitting region 5 composed of LEDs. The second light-emitting portion 2 has a second light-emitting area 6 composed of LEDs. The third light-emitting portion 3 has a third light-emitting area 7 composed of LEDs.

第一發光部1、第二發光部2以及第三發光部3以構成將第一發光部1作為頂點的角的方式配置。也就是,將第一發光部1理解為點1p,將第二發光部2理解為點2p,將第三發光部3理解為點3p之情形時,成為如下情形:點1p不位於連結點2p與點3p之線段1s上,於點1p、點2p與點3p之間,形成將點1p作為頂點的角θ。作為該配置的一例,可列舉L字型的配置、V字型的配置(均為字的彎折部分對應於點1p)。 The first light-emitting portion 1, the second light-emitting portion 2, and the third light-emitting portion 3 are arranged so as to form an angle with the first light-emitting portion 1 as a vertex. That is, when the first light-emitting part 1 is understood as the point 1p, the second light-emitting part 2 is understood as the point 2p, and the third light-emitting part 3 is understood as the point 3p, the situation becomes as follows: the point 1p is not located at the connection point 2p On the line segment 1s with the point 3p, an angle θ with the point 1p as the vertex is formed between the point 1p, the point 2p and the point 3p. As an example of this arrangement, an L-shaped arrangement and a V-shaped arrangement can be cited (both portions where the word is bent correspond to point 1p).

第一發光部1具有第一電極8。第二發光部2具有第二電極9。第三發光部3具有第三電極10。共通電極部4具有共通電極11。第一電極8、第二電極9、第三電極10以及共通電極11分別於俯視時為大致圓形狀。此處所謂大致圓形狀,係圓形狀或易於近似圓形狀之正n角形狀(6≦n)。發光元件51中,第一電極8、第二電極9、第三電極10以及共通電極11分別於俯視時為圓形狀。第一電極8、第二電極9、第三電極10分別作為正極及負極之一者而發揮功能,共通電極11作為正極及負極之另一者而發揮功能。而且,第一電極8、第二電極9及第三電極10與共通電極11電連接。 The first light emitting section 1 has a first electrode 8. The second light emitting section 2 has a second electrode 9. The third light emitting section 3 has a third electrode 10. The common electrode portion 4 has a common electrode 11. The first electrode 8, the second electrode 9, the third electrode 10, and the common electrode 11 each have a substantially circular shape in plan view. The so-called substantially round shape here means a round shape or a positive n-angle shape (6≦n) that is easy to approximate a round shape. In the light-emitting element 51, the first electrode 8, the second electrode 9, the third electrode 10, and the common electrode 11 each have a circular shape in plan view. The first electrode 8, the second electrode 9, and the third electrode 10 each function as one of the positive electrode and the negative electrode, and the common electrode 11 functions as the other of the positive electrode and the negative electrode. Furthermore, the first electrode 8, the second electrode 9 and the third electrode 10 are electrically connected to the common electrode 11.

又,於發光元件51形成有第一分離槽12及第二分離槽13。第一分離槽12介於第一發光部1與第二發光部2之間。第一分離槽12,與第一發光部1及第二發光部2電性絕緣,並且為用於防止第一發光部1所發出的光與第二發光部2所發出的光的混色之槽。第二分離槽13介於第一發光部1與第三發光部3之間。第二分離槽13,與第一發光部1及第三發光部3電性絕緣,並且為用於防止第一發光部1所發出的光與第三發光部3所發出的光的混色之槽。 In addition, the first separation groove 12 and the second separation groove 13 are formed in the light emitting element 51. The first separation groove 12 is interposed between the first light-emitting portion 1 and the second light-emitting portion 2. The first separation groove 12 is electrically insulated from the first light-emitting portion 1 and the second light-emitting portion 2, and is a groove for preventing the color mixture of the light emitted by the first light-emitting portion 1 and the light emitted by the second light-emitting portion 2 . The second separation groove 13 is interposed between the first light-emitting portion 1 and the third light-emitting portion 3. The second separation groove 13 is electrically insulated from the first light-emitting portion 1 and the third light-emitting portion 3, and is a groove for preventing the color mixture of the light emitted by the first light-emitting portion 1 and the light emitted by the third light-emitting portion 3 .

第一分離槽12之至少一部分於俯視時,形成為將中心12c保持於第二發光部2側的圓弧狀。也就是,第一分離槽12包含沿著將中心12c作為中心的圓弧12a之部分。 At least a part of the first separation groove 12 is formed in an arc shape that holds the center 12c on the side of the second light-emitting portion 2 in a plan view. That is, the first separation groove 12 includes a portion along the arc 12a centered on the center 12c.

根據發光元件51,可防止第一電極8與第一分離槽12之間的區域14、以及第二電極9與第一分離槽12之間的區域15局部地變狹窄。藉此,由於可充分大地確保相對於第一電極8的位置錯位之邊限、以及相對於第二電極9的位置錯位之邊限,故發光元件51之製造變得容易。又,藉此,可增大第一電極8及第二電極9。藉由增大第一電極8,可增大第一發光部1之發光 強度與提高第一發光部1之散熱性。藉由增大第二電極9,可增大第二發光部2之發光強度與提高第二發光部2之散熱性。 According to the light emitting element 51, the region 14 between the first electrode 8 and the first separation groove 12 and the region 15 between the second electrode 9 and the first separation groove 12 can be prevented from locally narrowing. With this, the margin of the positional displacement with respect to the first electrode 8 and the margin of the positional displacement with respect to the second electrode 9 can be sufficiently secured, so the manufacture of the light-emitting element 51 becomes easy. Furthermore, by this, the first electrode 8 and the second electrode 9 can be enlarged. By increasing the first electrode 8, the light emission of the first light emitting portion 1 can be increased Strength and improve the heat dissipation of the first light-emitting portion 1. By increasing the second electrode 9, the luminous intensity of the second light-emitting portion 2 can be increased and the heat dissipation of the second light-emitting portion 2 can be improved.

同樣地,第二分離槽13的至少一部分於俯視時,形成為將中心13c保持於第三發光部3側的圓弧狀。也就是,第二分離槽13包含沿著將中心13c作為中心的圓弧13a之部分。 Similarly, at least a part of the second separation groove 13 is formed in an arc shape that holds the center 13c on the side of the third light-emitting portion 3 in a plan view. That is, the second separation groove 13 includes a portion along the arc 13a centered on the center 13c.

根據發光元件51,可防止第一電極8與第二分離槽13之間的區域16、以及第三電極10與第二分離槽13之間的區域17局部地變狹窄。藉此,由於可充分大地確保相對於第一電極8的位置錯位之邊限、以及相對於第三電極10的位置錯位之邊限,故發光元件51之製造變得容易。又,藉此,可增大第一電極8及第三電極10。藉由增大第三電極10,可增大第三發光部3之發光強度與提高第三發光部3之散熱性。 According to the light emitting element 51, the region 16 between the first electrode 8 and the second separation groove 13 and the region 17 between the third electrode 10 and the second separation groove 13 can be prevented from locally narrowing. Thereby, the margin of the positional displacement with respect to the first electrode 8 and the margin of the positional displacement with respect to the third electrode 10 can be sufficiently secured, so that the manufacture of the light-emitting element 51 becomes easy. Furthermore, by this, the first electrode 8 and the third electrode 10 can be enlarged. By increasing the third electrode 10, the luminous intensity of the third light emitting portion 3 can be increased and the heat dissipation of the third light emitting portion 3 can be improved.

〔實施形態2〕 [Embodiment 2]

發光元件51中,第一電極8、第二電極9、第三電極10與共通電極11被配置成格子狀。 In the light-emitting element 51, the first electrode 8, the second electrode 9, the third electrode 10, and the common electrode 11 are arranged in a lattice shape.

藉此,於從第一發光部1獲得之發光的顏色、從第二發光部2獲得之發光的顏色以及從第三發光部3獲得之發光的顏色的組合為紅色、綠色及藍色之情形時,可將發光元件51以良好之發光顏色的平衡,搭載於顯示裝置。再者,所謂從第一發光部1獲得之發光,可為第一發光部1所發出的光,也可為第一發光部1所發出的光通過濾色器(color filter)、螢光體等光轉換層而得之光。關於從第二發光部2獲得之發光以及從第三發光部3獲得之發光,亦為相同。 By this, when the combination of the color of light emitted from the first light-emitting part 1, the color of light emitted from the second light-emitting part 2 and the color of light emitted from the third light-emitting part 3 is red, green and blue At this time, the light emitting element 51 can be mounted on the display device with a good balance of light emission colors. In addition, the light emitted from the first light-emitting part 1 may be the light emitted by the first light-emitting part 1 or the light emitted by the first light-emitting part 1 through a color filter or a phosphor Wait for the light from the light conversion layer. The light emission obtained from the second light emitting section 2 and the light emission obtained from the third light emitting section 3 are also the same.

又,由於可使發光元件51構成為單純之形狀,故可簡化將發光元件51進行複數排列時的配置,容易實現高像素且視覺上高品質之顯示裝置。 In addition, since the light-emitting element 51 can be formed into a simple shape, the arrangement when the light-emitting element 51 is arranged in plural can be simplified, and it is easy to realize a high-pixel and visually high-quality display device.

〔實施形態3〕 [Embodiment 3]

發光元件51中,第一分離槽12之寬度12w未達10μm。為了使寬度12w未達10μm,考慮藉由蝕刻,於第一發光部1與第二發光部2之間形成第一分離槽12。 In the light-emitting element 51, the width 12w of the first separation groove 12 does not reach 10 μm. In order to make the width 12w less than 10 μm, it is considered to form the first separation groove 12 between the first light-emitting portion 1 and the second light-emitting portion 2 by etching.

藉此,由於可使第一發光部1與第二發光部2之節距充分地小,故可實現更為高精細之發光元件51。 Thereby, since the pitch between the first light-emitting portion 1 and the second light-emitting portion 2 can be sufficiently reduced, a more high-definition light-emitting element 51 can be realized.

同樣地,發光元件51中,第二分離槽13之寬度13w未達10μm。為了使寬度13w未達10μm,考慮藉由蝕刻,於第一發光部1與第三發光部3之間形成第二分離槽13。 Similarly, in the light-emitting element 51, the width 13w of the second separation groove 13 does not reach 10 μm. In order to make the width 13w less than 10 μm, it is considered to form the second separation groove 13 between the first light-emitting portion 1 and the third light-emitting portion 3 by etching.

藉此,由於可使第一發光部1與第三發光部3之節距充分地小,故可實現更為高精細之發光元件51。 Thereby, since the pitch between the first light-emitting portion 1 and the third light-emitting portion 3 can be sufficiently small, a more high-definition light-emitting element 51 can be realized.

〔實施形態4〕 [Embodiment 4]

發光元件51中,第一電極8與第一分離槽12被分隔,且第二電極9與第一分離槽12被分隔。藉此,確實地成為第一電極8及第二電極9與第一分離槽12電性絕緣。因此,可更為提高由第一分離槽12產生的絕緣性能。 In the light emitting element 51, the first electrode 8 and the first separation groove 12 are separated, and the second electrode 9 and the first separation groove 12 are separated. Thereby, the first electrode 8 and the second electrode 9 are surely electrically insulated from the first separation groove 12. Therefore, the insulation performance generated by the first separation groove 12 can be more improved.

同樣地,發光元件51中,第一電極8與第二分離槽13被分隔,且第三電極10與第二分離槽13被分隔。藉此,確實地成為第一電極8及第三電極10與第二分離槽13電性絕緣。因此,可更為提高由第二分離槽13產生的絕緣性能。 Similarly, in the light emitting element 51, the first electrode 8 and the second separation groove 13 are separated, and the third electrode 10 and the second separation groove 13 are separated. Thereby, the first electrode 8 and the third electrode 10 are surely electrically insulated from the second separation groove 13. Therefore, the insulation performance generated by the second separation groove 13 can be more improved.

〔實施形態5〕 [Embodiment 5]

於俯視發光元件51時,第一分離槽12及第二分離槽13形成為第一發光部1與共通電極部4的邊界之長度1t、第二發光部2與共通電極部4的邊界之長度2t和第三發光部3與共通電極部4的邊界之長度3t互為相等。 When the light emitting element 51 is viewed from above, the first separation groove 12 and the second separation groove 13 are formed to have a length 1t of the boundary between the first light emitting portion 1 and the common electrode portion 4 and a length of the boundary between the second light emitting portion 2 and the common electrode portion 4 2t and the length 3t of the boundary between the third light emitting section 3 and the common electrode section 4 are equal to each other.

藉此,可使流動於第一電極8與共通電極11之間的電流的路徑之寬度、流動於第二電極9與共通電極11之間的電流的路徑之寬度和流動於第三 電極10與共通電極11之間的電流的路徑之寬度互為相等。藉此,變得容易使供給至第一發光部1的電流量、供給至第二發光部2的電流量與供給至第三發光部3的電流量互為相同。 Thereby, the width of the path of the current flowing between the first electrode 8 and the common electrode 11 and the width of the path of the current flowing between the second electrode 9 and the common electrode 11 and the third The width of the current path between the electrode 10 and the common electrode 11 is equal to each other. Thereby, it becomes easy to make the amount of current supplied to the first light-emitting section 1, the amount of current supplied to the second light-emitting section 2 and the amount of current supplied to the third light-emitting section 3 mutually the same.

又,於俯視發光元件51時,第一發光部1的面積大於第二發光部2的面積,且大於第三發光部3的面積。而且,發光元件51中,以滿足此種大小關係的方式,形成第一分離槽12及第二分離槽13。此時,若從第一發光部1獲得之發光的顏色為紅色,且從第二發光部2獲得之發光的顏色及從第三發光部3獲得之發光的顏色的組合為綠色及藍色,則可配合人類的視覺感度,而為有效。 In addition, in a plan view of the light-emitting element 51, the area of the first light-emitting portion 1 is larger than the area of the second light-emitting portion 2 and larger than the area of the third light-emitting portion 3. Furthermore, in the light emitting element 51, the first separation groove 12 and the second separation groove 13 are formed so as to satisfy such a size relationship. At this time, if the color of the light emitted from the first light emitting unit 1 is red, and the combination of the color of the light emitted from the second light emitting unit 2 and the color of the light emitted from the third light emitting unit 3 is green and blue, It can be matched with human visual acuity and is effective.

又,於俯視發光元件15時,可以以第一發光部1之面積、第二發光部2之面積和第三發光部3之面積互為相等的方式,形成第一分離槽12及第二分離槽13。藉此,變得容易使第一發光部1的發光量、第二發光部2的發光量與第三發光部3的發光量互為相同。 In addition, in a plan view of the light-emitting element 15, the first separation groove 12 and the second separation may be formed such that the area of the first light-emitting portion 1, the area of the second light-emitting portion 2, and the area of the third light-emitting portion 3 are equal to each other.槽13. 13. Slot 13. This makes it easy to make the light emission amount of the first light-emitting portion 1, the light emission amount of the second light-emitting portion 2 and the light emission amount of the third light-emitting portion 3 mutually the same.

〔實施形態6〕 [Embodiment 6]

圖2係表示發光元件51之概略構成的圖,且係於第一方向x’(參照圖1)觀察發光元件51的圖。圖3係表示發光元件51之變形例的概略構成之圖,且為於第一方向x’觀察發光元件51的圖。圖4的(a)係於第二方向y(參照圖1)觀察圖2所示之發光元件51的圖,圖4的(b)係於第二方向y觀察圖3所示之發光元件51的圖。 FIG. 2 is a diagram showing a schematic configuration of the light-emitting element 51, and is a view of the light-emitting element 51 viewed in the first direction x'(see FIG. 1). Fig. 3 is a diagram showing a schematic configuration of a modification of the light-emitting element 51, and is a view of the light-emitting element 51 viewed in the first direction x'. 4(a) is a view of the light-emitting element 51 shown in FIG. 2 viewed in the second direction y (see FIG. 1), and FIG. 4(b) is a view of the light-emitting element 51 shown in FIG. 3 viewed in the second direction y Figure.

所謂第一方向x’,為以共通電極11重疊於第一電極8而可觀察到的方式,自共通電極部4側觀察發光元件51的方向。所謂第二方向y,為共通電極11與第三電極10並列而可觀察到的方式,自共通電極部4及第三發光部3側觀察發光元件51的方向。 The first direction x'refers to a direction in which the light-emitting element 51 is viewed from the side of the common electrode portion 4 so that the common electrode 11 overlaps the first electrode 8 and can be observed. The second direction y is a direction in which the common electrode 11 and the third electrode 10 are juxtaposed, and the light-emitting element 51 is viewed from the side of the common electrode portion 4 and the third light-emitting portion 3.

發光元件51中,第二電極9的上面的高度、第三電極10的上面的高度與共通電極11的上面的高度互為相同。又,雖未示於圖2~圖4,但關於第一電極8的上面的高度,也與第二電極9的上面的高度、第三電極10的上面的高度以及共通電極11的上面的高度相同。 In the light-emitting element 51, the height of the upper surface of the second electrode 9, the height of the upper surface of the third electrode 10, and the height of the upper surface of the common electrode 11 are the same as each other. Although not shown in FIGS. 2 to 4, the height of the upper surface of the first electrode 8 also corresponds to the height of the upper surface of the second electrode 9, the height of the upper surface of the third electrode 10, and the height of the upper surface of the common electrode 11 the same.

藉此,於將第一電極8、第二電極9、第三電極10以及共通電極11搭載於同一平面時,可防止發光元件51傾斜。因此,於將發光元件51搭載於基板等時,可抑制相對於該基板的發光元件51的位置錯位產生。 Thereby, when the first electrode 8, the second electrode 9, the third electrode 10, and the common electrode 11 are mounted on the same plane, the light emitting element 51 can be prevented from tilting. Therefore, when the light-emitting element 51 is mounted on a substrate or the like, it is possible to suppress the positional displacement of the light-emitting element 51 with respect to the substrate.

發光元件51例如具備由氮化物半導體構成的成長基板18。第一發光部1、第二發光部2、第三發光部3及共通電極部4被設置於成長基板18上。又,共通電極4正下方的成長基板18的厚度,小於第一發光部1正下方的成長基板18的厚度,且,小於第二發光部2正下方的成長基板18的厚度,且,小於第三發光部3正下方的成長基板18的厚度。第一分離槽12及第二分離槽13分別以到達成長基板18的方式形成。 The light-emitting element 51 includes, for example, a growth substrate 18 made of a nitride semiconductor. The first light-emitting portion 1, the second light-emitting portion 2, the third light-emitting portion 3, and the common electrode portion 4 are provided on the growth substrate 18. In addition, the thickness of the growth substrate 18 directly under the common electrode 4 is smaller than the thickness of the growth substrate 18 directly under the first light-emitting portion 1, and is smaller than the thickness of the growth substrate 18 directly under the second light-emitting portion 2, and is smaller than the thickness of the first The thickness of the growth substrate 18 directly below the three light emitting sections 3. The first separation groove 12 and the second separation groove 13 are respectively formed so as to reach the growth substrate 18.

圖2所示的發光元件51中,於第一分離槽12的下方及第二分離槽13的下方分別幾乎未殘留有成長基板18。結果,第一分離槽12的底部12b及第二分離槽13的底部13b分別設置在低於共通電極11的下端的位置。 In the light-emitting element 51 shown in FIG. 2, almost no growth substrate 18 remains under the first separation groove 12 and under the second separation groove 13. As a result, the bottom portion 12b of the first separation groove 12 and the bottom portion 13b of the second separation groove 13 are provided at positions lower than the lower end of the common electrode 11, respectively.

另一方面,圖3所示的發光元件51中,於第一分離槽12的下方及第二分離槽13的下方分別殘留有某程度的成長基板18。結果,第一分離槽12的底部12b及第二分離槽13的底部13b分別設置在高於共通電極11的下端的位置。 On the other hand, in the light-emitting element 51 shown in FIG. 3, a growth substrate 18 to some extent remains below the first separation groove 12 and below the second separation groove 13. As a result, the bottom portion 12b of the first separation groove 12 and the bottom portion 13b of the second separation groove 13 are provided at positions higher than the lower end of the common electrode 11, respectively.

藉由調整殘留於第一分離槽12之下方的成長基板18之厚度、以及殘留於第二分離槽13之下方的成長基板18之厚度,可實現合適、所欲的發光元件51。 By adjusting the thickness of the growth substrate 18 remaining under the first separation groove 12 and the thickness of the growth substrate 18 remaining under the second separation groove 13, a suitable and desired light-emitting element 51 can be realized.

〔實施形態7〕 [Embodiment 7]

本發明的其他態樣的發光元件具備基板、積層於上述基板上的發光層與正、負之供電用的電極,上述發光層被電性絕緣,上述發光層可由至少兩個發光部區域構成。 A light-emitting element of another aspect of the present invention includes a substrate, a light-emitting layer stacked on the substrate, and positive and negative power-supply electrodes. The light-emitting layer is electrically insulated, and the light-emitting layer may be composed of at least two light-emitting regions.

又,本發明的又一其他態樣的發光元件中,上述發光部區域鄰接,上述發光部區域於俯視時,至少一個(例如,發出紅色的光之發光部區域)的面積可大於其他的面積(例如,發出藍或綠色的光之發光部區域面積)。 Moreover, in still another aspect of the present invention, the light-emitting portion regions are adjacent to each other, and when viewed from above, at least one of the light-emitting portion regions (for example, the light-emitting portion region that emits red light) may have a larger area than other areas. (For example, the area of the light-emitting portion area that emits blue or green light).

〔實施形態8〕 [Embodiment 8]

圖5係表示本發明的實施形態8之發光元件52的製造方法之流程圖。圖6的(a)~(c)係說明圖5所示的步驟的一部分之圖。發光元件52之製造方法可應用於發光元件51(參照圖1)之製造。 FIG. 5 is a flowchart showing a method of manufacturing the light-emitting element 52 of Embodiment 8 of the present invention. 6(a) to (c) are diagrams illustrating a part of the steps shown in FIG. 5. The manufacturing method of the light-emitting element 52 can be applied to the manufacture of the light-emitting element 51 (refer to FIG. 1 ).

首先,準備後述之剝離用的基板218(例如藍寶石基板)(步驟S1)。接著,於基板218形成LED部215(步驟S2:參照圖6的(a))。基板218為用於使發光元件51形成(成長)的基板,於LED部215藉由後述之樹脂216保持後被剝離。LED部215成為發光元件51的第一發光區域5、第二發光區域6、第三發光區域7以及成長基板18之基礎。 First, a substrate 218 (for example, a sapphire substrate) for peeling described below is prepared (step S1). Next, the LED portion 215 is formed on the substrate 218 (step S2: see (a) of FIG. 6). The substrate 218 is a substrate for forming (growing) the light-emitting element 51 and is peeled off after the LED portion 215 is held by the resin 216 described later. The LED portion 215 forms the basis of the first light-emitting region 5, the second light-emitting region 6, the third light-emitting region 7, and the growth substrate 18 of the light-emitting element 51.

基板218係使LED部215的半導體層疊晶生長(epitaxial growth)的基板。作為氮化物半導體中的基板,有如下的基板:如將C面、R面及A面之任一者作為主面的藍寶石或尖晶石(MgAl2O4)的絕緣性基板、或與碳化矽(6H、4H、3C)、Si、ZnS、ZnO、GaAs、鑽石及氮化物半導體晶格接合之鈮酸鋰(lithium niobate)、釹鎵氧化物(neodymium gallate)等氧化物基板、GaN及AlN等氮化物半導體基板。 The substrate 218 is a substrate on which the semiconductor layer of the LED portion 215 is epitaxially grown. As the substrate in the nitride semiconductor, there are substrates such as an insulating substrate of sapphire or spinel (MgAl 2 O 4 ) having any one of the C surface, R surface, and A surface as the main surface, or carbonized Oxide substrates such as silicon (6H, 4H, 3C), Si, ZnS, ZnO, GaAs, diamond and nitride semiconductor lattice bonded lithium niobate, neodymium gallate, GaN and AlN And other nitride semiconductor substrates.

作為氮化物半導體,一般式為InxAlyGa1-x-yN(0≦x、0≦y、x+y≦1),也可將B及P、As進行混晶。LED部215之n型半導體及p型半導體並不 特別限定於單層、多層。於氮化物半導體層具有作為活性層之發光層,該活性層是設為單一(SQW)或多量子井構造(MQW)。 A nitride semiconductor, a general formula of In x Al y Ga 1-xy N (0 ≦ x, 0 ≦ y, x + y ≦ 1), but also B and P, As can be mixed crystal. The n-type semiconductor and p-type semiconductor of the LED portion 215 are not particularly limited to single-layer or multi-layer. The nitride semiconductor layer has a light-emitting layer as an active layer, and the active layer is configured as a single (SQW) or multiple quantum well structure (MQW).

於基板218上,使用如下構造:介隔緩衝層等氮化物半導體的下底層,例如低溫成長薄膜GaN與GaN層,作為n型氮化物半導體層,例如積層摻Si的GaN之n型接觸層與GaN/InGaN之n型多層膜層,接著積層InGaN/GaN之MQW的活性層,進而作為p型氮化物半導體層,例如積層了摻Mg之InGaN/AlGaN之p型多層膜層與摻Mg的GaN之p型接觸層。又,氮化物半導體之發光層(活性層)例如具有包含井層的、包含障壁層與井層之量子井構造。用於活性層之氮化物半導體,雖也可藉由p型雜質摻雜物、但較佳為藉由無摻雜物或n型雜質摻雜物而使發光元件52高輸出化。 On the substrate 218, the following structure is used: an underlayer of a nitride semiconductor such as a buffer layer, such as a low-temperature growth thin film GaN and a GaN layer, as an n-type nitride semiconductor layer, such as an n-type contact layer and a Si-doped GaN layer An n-type multilayer film layer of GaN/InGaN, followed by an active layer of MQW of InGaN/GaN, and then as a p-type nitride semiconductor layer, for example, a p-type multilayer film layer of Mg-doped InGaN/AlGaN and Mg-doped GaN P-type contact layer. In addition, the light emitting layer (active layer) of the nitride semiconductor has, for example, a quantum well structure including a barrier layer and a well layer. Although the nitride semiconductor used for the active layer may be doped with p-type impurities, it is preferable to increase the output of the light-emitting element 52 by undoped or n-type impurity dopants.

藉由使井層含有Al,可獲得作為GaN能帶隙(band gap)能量之較波長365nm更短的波長。自活性層釋出的光的波長,根據發光元件52的目的及用途等而設於360nm~650nm附近,較佳設為380nm~560nm之波長。井層的組成較佳為InGaN,適合被用於可見光、近紫外光域,該情形時之障壁層的組成,較佳為GaN、InGaN。作為障壁層與井層的膜厚的具體例,分別為1nm以上30nm以下、1nm以上20nm以下,且可設為一層井層的單一量子井、介隔有障壁層等的複數層井層之多量子井構造。 By including Al in the well layer, a wavelength shorter than the wavelength of 365 nm can be obtained as the band gap energy of GaN. The wavelength of the light emitted from the active layer is set in the vicinity of 360 nm to 650 nm according to the purpose and application of the light emitting element 52, and is preferably set to a wavelength of 380 nm to 560 nm. The composition of the well layer is preferably InGaN, which is suitable for use in the visible light and near ultraviolet light regions. In this case, the composition of the barrier layer is preferably GaN or InGaN. As specific examples of the film thickness of the barrier layer and the well layer, they are respectively 1 nm or more and 30 nm or less, and 1 nm or more and 20 nm or less, and there can be a single quantum well with a single well layer, and a plurality of well layers with barrier layers interposed therebetween Quantum well structure.

接著,於LED部215上,形成複數個LED側電極342(步驟S3:參照圖6的(b))。作為形成複數個LED側電極342之技術的一例,使用周知的一般之電極形成技術。各LED側電極342之代表性的材料,例如為Au。圖6的(b)所示的三個LED側電極342分別對應於第一電極8、第二電極9及第三電極10。 Next, a plurality of LED side electrodes 342 are formed on the LED portion 215 (step S3: refer to (b) of FIG. 6). As an example of a technique for forming a plurality of LED side electrodes 342, a well-known general electrode forming technique is used. A representative material of each LED side electrode 342 is Au, for example. The three LED-side electrodes 342 shown in (b) of FIG. 6 correspond to the first electrode 8, the second electrode 9, and the third electrode 10, respectively.

接著,藉由形成兩個分離槽219,將LED部215分為三個(步驟S4:參照圖6的(c))。作為形成各分離槽219之技術,使用標準的半導體選擇 蝕刻程序。兩個分離槽219分別對應於發光元件51的第一分離槽12及第二分離槽13。LED部215被分割而成的三個構件分別對應於發光元件51的第一發光部1、第二發光部2及第三發光部3。 Next, by forming two separation grooves 219, the LED portion 215 is divided into three (step S4: refer to (c) of FIG. 6). As a technique for forming each separation groove 219, a standard semiconductor selection is used Etching procedures. The two separation grooves 219 respectively correspond to the first separation groove 12 and the second separation groove 13 of the light emitting element 51. The three members into which the LED portion 215 is divided correspond to the first light-emitting portion 1, the second light-emitting portion 2, and the third light-emitting portion 3 of the light-emitting element 51, respectively.

最後,對於在步驟S4所形成者進行藍寶石研磨,完成發光元件52(步驟S5)。 Finally, the sapphire polished to the one formed in step S4 is completed to complete the light-emitting element 52 (step S5).

再者,關於對應於發光元件51之共通電極4的構件,於分離槽219形成之步驟S4的時間點形成。該構件與LED部215之絕緣可通過至少將對應於發光元件51之共通電極11的構件設為平台式結構(mesa-structure)而實現。 In addition, the member corresponding to the common electrode 4 of the light-emitting element 51 is formed at the time point of step S4 in which the separation groove 219 is formed. The insulation of this member from the LED portion 215 can be achieved by setting at least a member corresponding to the common electrode 11 of the light-emitting element 51 to a mesa-structure.

另外,也可以複數個發光元件52成為被配置成陣列狀的狀態之方式,進行步驟S1~步驟S5。此情形時,於步驟S5中,自配置成陣列狀的複數個發光元件52,追加切出一個發光元件52之步驟。 In addition, steps S1 to S5 may be performed so that a plurality of light-emitting elements 52 are arranged in an array. In this case, in step S5, a step of cutting out one light-emitting element 52 is added from the plurality of light-emitting elements 52 arranged in an array.

圖7的(a)~(d)係說明使用發光元件52而構成的半導體模組201之製造方法的一例的圖。 7( a) to (d) are diagrams illustrating an example of a method of manufacturing the semiconductor module 201 configured using the light-emitting element 52.

於製造發光元件52後,如圖7之(a)所示,準備預先形成了金屬配線212、絕緣層213及基板側電極341之配線基板211。在相對於配線基板211的基板側電極341之形成,使用周知的一般的電極形成技術。基板側電極341之代表性的材料例如為Au。與準備配線基板211一併進行,如圖7的(a)所示,使基板218反轉。於反轉後,以各基板側電極341與各LED側電極342對向的方式,使配線基板211與基板218進行位置對準。 After manufacturing the light-emitting element 52, as shown in FIG. 7(a), a wiring board 211 in which the metal wiring 212, the insulating layer 213, and the substrate-side electrode 341 are formed in advance is prepared. For the formation of the substrate-side electrode 341 with respect to the wiring substrate 211, a well-known general electrode formation technique is used. A typical material of the substrate-side electrode 341 is Au, for example. In conjunction with the preparation of the wiring substrate 211, the substrate 218 is inverted as shown in FIG. 7(a). After the inversion, the wiring board 211 and the board 218 are aligned so that the board-side electrodes 341 and the LED-side electrodes 342 face each other.

於位置對準結束後,如圖7的(b)所示,使配線基板211與基板218貼合。此時,使用既有的貼合技術,以對應的基板側電極341及LED側電極342接合的方式,將配線基板211及基板218藉由加壓而從上下壓制。藉此,對應的基板側電極341及LED側電極342被一體化,構成電極214。 After the alignment is completed, as shown in FIG. 7( b ), the wiring substrate 211 and the substrate 218 are bonded together. At this time, using the existing bonding technique, the wiring board 211 and the board 218 are pressed from above and below with the corresponding board-side electrode 341 and LED-side electrode 342 bonded. As a result, the corresponding substrate-side electrode 341 and LED-side electrode 342 are integrated to form the electrode 214.

貼合步驟結束後,於配線基板211與基板218之間形成的空隙內,填充液狀樹脂。於圖7的(c)表示填充後之狀態。此時,例如於充滿液狀樹脂的容器內,以貼合後之狀態浸泡即可。液狀樹脂的主材料並不特別限定,但例如較佳為環氧樹脂。再者,液狀樹脂的注入方法除了上述之外,也可為利用注射針,尤其是以配合在配線基板211與LED部215之間形成的空隙的尺寸之微針(microneedle)注入液狀樹脂的方法。作為此情形時之注射針的材料,使用金屬製或塑膠製等。 After the bonding step is completed, the gap formed between the wiring board 211 and the substrate 218 is filled with liquid resin. FIG. 7(c) shows the state after filling. In this case, for example, it may be immersed in a container filled with liquid resin in a state after being attached. The main material of the liquid resin is not particularly limited, but for example, epoxy resin is preferred. In addition, the injection method of the liquid resin may be an injection needle, in particular a microneedle that fits the size of the gap formed between the wiring board 211 and the LED portion 215. Methods. As the material of the injection needle in this case, metal or plastic is used.

填充步驟中,較佳於50℃~200℃之溫度範圍內的溫度下填充液狀樹脂。藉此,易於將液狀樹脂正常地填充於空隙內。進而,溫度範圍較佳為80℃~170℃。藉此,可減少損害樹脂216之特性(後述之硬化過程後的密接性、散熱性等)之虞。又,溫度範圍進而更佳為100℃~150℃。藉此,可減少產生於上述空隙之氣泡等,可不產生對流等而幾乎完全地進行填充,易於製造半導體模組201。 In the filling step, the liquid resin is preferably filled at a temperature within a temperature range of 50°C to 200°C. This makes it easy to fill the voids normally with liquid resin. Furthermore, the temperature range is preferably 80°C to 170°C. This can reduce the risk of impairing the characteristics of the resin 216 (adhesion, heat dissipation, etc. after a curing process described below). Furthermore, the temperature range is more preferably 100°C to 150°C. Thereby, bubbles and the like generated in the above-mentioned voids can be reduced, and convection or the like can be filled almost completely, making it easy to manufacture the semiconductor module 201.

尤其,於將各個LED部215之大小設為例如縱寬度及橫寬度為20μm以下,更佳為數μm~十幾μm,將LED部215的厚度設為數μm(2μm~10μm)左右之微小尺寸的情形時,於基板剝離及剝離後之步驟中液狀樹脂作為用於提升固著力的補強構件而有用地發揮功能。藉此,可使樹脂216之上述製品間的特性之不均更小,故可容易地製造半導體模組201。 In particular, when the size of each LED portion 215 is set to, for example, a vertical width and a horizontal width of 20 μm or less, more preferably several μm to several dozen μm, and the thickness of the LED portion 215 is set to a minute size of about several μm (2 μm to 10 μm). In this case, the liquid resin effectively functions as a reinforcing member for improving the fixing force in the step of peeling the substrate and after the peeling. As a result, the unevenness of the characteristics of the resin 216 between the above products can be reduced, so that the semiconductor module 201 can be easily manufactured.

被填充於空隙內之液狀樹脂如圖7的(c)所示,被完全埋入空隙內。藉此,液狀樹脂被埋入LED部215的側面、電極214的側面及階差面,以及配線基板211之上部。於液狀樹脂之填充結束後,使液狀樹脂固化。再者,關於使液狀樹脂固化的方法並不特別限定,例如可將液狀樹脂進行加熱,或對液狀樹脂照射紫外線,藉此使液狀樹脂固化。 The liquid resin filled in the void is completely buried in the void as shown in FIG. 7(c). As a result, the liquid resin is embedded in the side surface of the LED portion 215, the side surface of the electrode 214 and the level difference surface, and the upper portion of the wiring board 211. After the filling of the liquid resin is completed, the liquid resin is cured. The method for curing the liquid resin is not particularly limited. For example, the liquid resin can be cured by heating the liquid resin or irradiating the liquid resin with ultraviolet rays.

於填充步驟結束後,如圖7的(d)所示,使基板218剝離。於此步驟,使用既有的剝離技術。作為既有的剝離技術之一例,可利用使用了雷射光的照射之剝離技術。例如將藍寶石等透明基板用於LED之成長基板,將氮化物半導體作為發光元件層而進行晶體成長的情形時,藉由自透明基板側以一定條件照射雷射光,可減輕對成長基板與晶體成長層之界面施予的損傷。再者,作為其他手段,也可為使用了濕式蝕刻法、輪磨或研磨法等的基板218之剝離。 After the filling step is completed, as shown in (d) of FIG. 7, the substrate 218 is peeled off. For this step, the existing stripping technique is used. As an example of an existing peeling technique, a peeling technique using laser light irradiation can be used. For example, when a transparent substrate such as sapphire is used as an LED growth substrate, and a nitride semiconductor is used as a light-emitting element layer for crystal growth, by irradiating laser light from the transparent substrate side under certain conditions, growth of the growth substrate and crystal can be reduced Damage imparted by the interface of layers. In addition, as another means, peeling of the substrate 218 using a wet etching method, wheel grinding, or polishing method may be used.

由於樹脂216將電極214及LED部215密接固定於配線基板211,故可於剝離基板218時,防止LED部215及電極214被一起剝離。於剝離基板218後,LED部215的光出射面及樹脂216的表面露出。藉此,結束半導體模組201之製造。 Since the resin 216 tightly fixes the electrode 214 and the LED portion 215 to the wiring substrate 211, it is possible to prevent the LED portion 215 and the electrode 214 from being peeled together when the substrate 218 is peeled. After the substrate 218 is peeled off, the light exit surface of the LED portion 215 and the surface of the resin 216 are exposed. With this, the manufacturing of the semiconductor module 201 is ended.

上述之製造方法僅只不過是成為可製造半導體模組201之方法的一例。此處所說明的各步驟是用於容易製造半導體模組201,構成半導體模組201之製造方法的步驟並不限定於該等。 The manufacturing method described above is merely an example of a method by which the semiconductor module 201 can be manufactured. The steps described here are for easy manufacturing of the semiconductor module 201, and the steps constituting the manufacturing method of the semiconductor module 201 are not limited to these.

而且,本發明之一態樣的顯示裝置例如以半導體模組201之形態具備發光元件51。藉此,於該顯示裝置中,可獲得與發光元件51相同的效果。 Furthermore, the display device according to one aspect of the present invention includes the light emitting element 51 in the form of a semiconductor module 201, for example. Thereby, in the display device, the same effect as the light-emitting element 51 can be obtained.

〔總結〕 〔to sum up〕

本發明之態樣1的發光元件具備:第一發光部,具有於俯視時為大致圓形狀的第一電極;第二發光部,具有於俯視時為大致圓形狀的第二電極;以及第三發光部,具有於俯視時為大致圓形狀的第三電極;該第一發光部、該第二發光部以及該第三發光部以構成將該第一發光部作為頂點的角的方式配置,形成有將該第一發光部與該第二發光部分離的第一分離槽,該第一分離槽的至少一部分形成為於俯視時將中心保持於該第二發光部側的圓弧狀。 The light-emitting element of Aspect 1 of the present invention includes: a first light-emitting portion having a first electrode having a substantially circular shape in a plan view; a second light-emitting portion having a second electrode having a substantially circular shape in a plan view; and a third The light-emitting portion has a third electrode that is substantially circular in plan view; the first light-emitting portion, the second light-emitting portion, and the third light-emitting portion are arranged so as to form an angle with the first light-emitting portion as a vertex, and are formed There is a first separation groove that separates the first light-emitting portion from the second light-emitting portion, and at least a part of the first separation groove is formed in an arc shape that holds the center on the second light-emitting portion side in a plan view.

根據上述構成,可防止第一電極與第一分離槽之間的區域,以及第二電極與第一分離槽之間的區域局部地變狹窄。藉此,由於可充分大地確保相對於第一電極的位置錯位之邊限,以及相對於第二電極的位置錯位之邊限,故發光元件之製造變得容易。又,藉此,可增大第一電極及第二電極。藉由增大第一電極,可增大第一發光部之發光強度與提高第一發光部之散熱性。藉由增大第二電極,可增大第二發光部之發光強度與提高第二發光部之散熱性。 According to the above configuration, the area between the first electrode and the first separation groove and the area between the second electrode and the first separation groove can be prevented from locally narrowing. Thereby, since the margin of the positional displacement relative to the first electrode and the margin of the positional displacement relative to the second electrode can be sufficiently secured, the manufacture of the light-emitting element becomes easy. Furthermore, by this, the first electrode and the second electrode can be enlarged. By increasing the first electrode, the luminous intensity of the first light-emitting portion can be increased and the heat dissipation of the first light-emitting portion can be improved. By increasing the second electrode, the luminous intensity of the second light emitting portion can be increased and the heat dissipation of the second light emitting portion can be improved.

本發明之態樣2的發光元件,於上述態樣1中,具備共通電極部,該共通電極部具有與該第一電極、該第二電極以及該第三電極電連接的共通電極,該第一電極、該第二電極、該第三電極與該共通電極被配置成格子狀。 The light-emitting element of aspect 2 of the present invention in the above aspect 1 includes a common electrode portion having a common electrode electrically connected to the first electrode, the second electrode, and the third electrode. An electrode, the second electrode, the third electrode, and the common electrode are arranged in a lattice.

根據上述構成,於從第一發光部獲得之發光的顏色、從第二發光部獲得之發光的顏色以及從第三發光部獲得之發光的顏色的組合為紅色、綠色及藍色之情形時,可將發光元件以良好之發光顏色的平衡,搭載於顯示裝置。又,由於可使發光元件構成為單純之形狀,故可簡化將發光元件進行複數排列時的布置(layout),容易實現高像素且視覺上高品質之顯示裝置。 According to the above configuration, when the combination of the color of light emitted from the first light emitting portion, the color of light emitted from the second light emitting portion, and the color of light emitted from the third light emitting portion is red, green, and blue, The light-emitting element can be mounted on a display device with a good balance of light-emitting colors. In addition, since the light-emitting element can be formed into a simple shape, the layout when the light-emitting elements are arranged in plural can be simplified, and it is easy to realize a high-pixel and visually high-quality display device.

本發明之態樣3的發光元件,於上述態樣1或2中,該第一分離槽的寬度未達10μm。 In the light-emitting element of aspect 3 of the present invention, in the above aspect 1 or 2, the width of the first separation groove is less than 10 μm.

根據上述構成,由於可使第一發光部與第二發光部之節距充分地小,故可實現更為高精細之發光元件。 According to the above configuration, since the pitch between the first light-emitting portion and the second light-emitting portion can be sufficiently reduced, a more high-definition light-emitting element can be realized.

本發明之態樣4的發光元件,於上述態樣1~3之任一者中,該第一電極與該第一分離槽被分隔,且該第二電極與該第一分離槽被分隔。 In the light-emitting element of aspect 4 of the present invention, in any of the above aspects 1 to 3, the first electrode and the first separation groove are separated, and the second electrode and the first separation groove are separated.

根據上述構成,確實地成為第一電極及第二電極與第一分離槽電性絕緣。因此,可更為提高由第一分離槽產生的絕緣性能。 According to the above configuration, the first electrode and the second electrode are surely electrically insulated from the first separation groove. Therefore, the insulation performance generated by the first separation groove can be more improved.

本發明之態樣5的發光元件,於上述態樣2中,形成有分離該第一發光部與該第三發光部的第二分離槽,於俯視該發光元件時,該第一分離槽以及該第二分離槽形成為該第一發光部與該共通電極部的邊界之長度、該第二發光部與該共通電極部的邊界之長度和該第三發光部與該共通電極部的邊界之長度互為相等。 In the light-emitting element of aspect 5 of the present invention, in the above-mentioned aspect 2, a second separation groove separating the first light-emitting portion and the third light-emitting portion is formed. When the light-emitting element is viewed from above, the first separation groove and The second separation groove is formed as a length of a boundary of the first light emitting portion and the common electrode portion, a length of a boundary of the second light emitting portion and the common electrode portion, and a boundary of the third light emitting portion and the common electrode portion The lengths are equal to each other.

根據上述構成,可使流動於第一電極與共通電極之間的電流的路徑之寬度、流動於第二電極與共通電極之間的電流的路徑之寬度和流動於第三電極與共通電極之間的電流的路徑之寬度互為相等。藉此,變得容易使供給至第一發光部的電流量、供給至第二發光部的電流量與供給至第三發光部的電流量互為相同。 According to the above configuration, the width of the path of the current flowing between the first electrode and the common electrode, the width of the path of the current flowing between the second electrode and the common electrode, and the flow between the third electrode and the common electrode can be made The widths of the current paths are equal to each other. Thereby, it becomes easy to make the amount of current supplied to the first light-emitting portion, the amount of current supplied to the second light-emitting portion, and the amount of current supplied to the third light-emitting portion mutually the same.

本發明之態樣6的發光元件,於上述態樣1~5中,形成有分離該第一發光部與該第三發光部的第二分離槽,於俯視該發光元件時,該第一分離槽以及該第二分離槽形成為該第一發光部之面積、該第二發光部之面積和該第三發光部之面積互為相等。 In the light-emitting element of aspect 6 of the present invention, in the above-mentioned aspects 1 to 5, a second separation groove separating the first light-emitting portion and the third light-emitting portion is formed, and when the light-emitting element is viewed from above, the first separation The groove and the second separation groove are formed such that the area of the first light-emitting portion, the area of the second light-emitting portion, and the area of the third light-emitting portion are equal to each other.

根據上述構成,變得容易使第一發光部的發光量、第二發光部的發光量與第三發光部的發光量互為相同。 According to the above configuration, it becomes easy to make the light emission amount of the first light emitting section, the light emission amount of the second light emitting section, and the light emission amount of the third light emitting section mutually the same.

本發明之態樣7的發光元件,於上述態樣2或5中,該第一電極的上面之高度、該第二電極的上面之高度、該第三電極的上面之高度與該共通電極的上面之高度互為相同。 In the light-emitting element of aspect 7 of the present invention, in aspect 2 or 5 above, the height of the upper surface of the first electrode, the height of the upper surface of the second electrode, and the height of the upper surface of the third electrode are the same as those of the common electrode The heights above are the same as each other.

根據上述構成,於將第一電極、第二電極、第三電極以及共通電極搭載於同一平面時,可防止發光元件傾斜。因此,於將發光元件搭載於基板等時,可抑制相對於該基板的發光元件的位置錯位產生。 According to the above configuration, when the first electrode, the second electrode, the third electrode, and the common electrode are mounted on the same plane, the light emitting element can be prevented from tilting. Therefore, when the light emitting element is mounted on a substrate or the like, it is possible to suppress the occurrence of positional displacement of the light emitting element relative to the substrate.

本發明的態樣8之顯示裝置具備上述態樣1~7項中任一項的發光元件。 The display device of Aspect 8 of the present invention includes the light-emitting element according to any one of Items 1 to 7 above.

根據上述構成,可於顯示裝置中獲得與發光元件相同的效果。 According to the above configuration, the same effect as the light-emitting element can be obtained in the display device.

本發明並不限定於上述的各實施形態,可在請求項所示的範圍內進行各種的變更,關於適宜地組合不同的實施形態中所分別揭示的技術性手段而獲得的實施形態也包含於本發明的技術性範圍中。進一步地,藉由組合各實施形態中所分別揭示的技術性手段,能夠形成新的技術性特徵。 The present invention is not limited to the above-mentioned embodiments, and various changes can be made within the scope shown in the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in Within the technical scope of the present invention. Further, by combining the technical means disclosed in each embodiment, new technical features can be formed.

1:第一發光部 1: the first light emitting part

2:第二發光部 2: Second light-emitting part

3:第三發光部 3: The third light-emitting part

4:共通電極部 4: Common electrode part

5:第一發光區域 5: The first light-emitting area

6:第二發光區域 6: Second light-emitting area

7:第三發光區域 7: third light emitting area

8:第一電極 8: first electrode

9:第二電極 9: Second electrode

10:第三電極 10: third electrode

11:共通電極 11: Common electrode

12:第一分離槽 12: The first separation tank

13:第二分離槽 13: Second separation tank

12a、13a:圓弧 12a, 13a: arc

12c、13c:中心 12c, 13c: center

12w:第一分離槽之寬度 12w: the width of the first separation groove

13w:第二分離槽之寬度 13w: the width of the second separation tank

14:第一電極與第一分離槽之間的區域 14: The area between the first electrode and the first separation groove

15:第二電極與第一分離槽之間的區域 15: The area between the second electrode and the first separation tank

16:第一電極與第二分離槽之間的區域 16: The area between the first electrode and the second separation tank

17:第三電極與第二分離槽之間的區域 17: The area between the third electrode and the second separation tank

51:發光元件 51: Light emitting element

1t:第一發光部與共通電極部之邊界的長度 1t: Length of the boundary between the first light-emitting part and the common electrode part

2t:第二發光部與共通電極部之邊界的長度 2t: Length of the boundary between the second light-emitting part and the common electrode part

3t:第三發光部與共通電極部之邊界的長度 3t: the length of the boundary between the third light-emitting part and the common electrode part

x’:第一方向 x’: the first direction

y:第二方向 y: second direction

1p、2p、3p:點 1p, 2p, 3p: points

1s:線段 1s: line segment

θ:角 θ: angle

Claims (10)

一種發光元件,其特徵在於,具備:第一發光部,具有於俯視時為大致圓形狀的第一電極;第二發光部,具有於俯視時為大致圓形狀的第二電極;以及第三發光部,具有於俯視時為大致圓形狀的第三電極,該第一發光部、該第二發光部以及該第三發光部以構成將該第一發光部作為頂點的角的方式配置,形成有將該第一發光部與該第二發光部分離的第一分離槽,該第一分離槽的至少一部分形成為於俯視時將中心保持於該第二發光部側的圓弧狀。 A light-emitting element characterized by comprising: a first light-emitting portion having a first electrode having a substantially circular shape when viewed from above; a second light-emitting portion having a second electrode having a substantially circular shape when viewed from above; and third light emission The portion includes a third electrode that is substantially circular in plan view. The first light-emitting portion, the second light-emitting portion, and the third light-emitting portion are arranged so as to form an angle with the first light-emitting portion as a vertex, and are formed A first separation groove separating the first light-emitting portion and the second light-emitting portion, at least a portion of the first separation groove is formed in an arc shape that holds the center on the second light-emitting portion side in a plan view. 如申請專利範圍第1項的發光元件,其具備共通電極部,該共通電極部具有與該第一電極、該第二電極以及該第三電極電連接的共通電極,該第一電極、該第二電極、該第三電極與該共通電極被配置成格子狀。 A light-emitting element as claimed in item 1 of the patent scope includes a common electrode part having a common electrode electrically connected to the first electrode, the second electrode and the third electrode, the first electrode and the third electrode The two electrodes, the third electrode, and the common electrode are arranged in a lattice shape. 如申請專利範圍第1項的發光元件,其中,該第一分離槽的寬度未達10μm。 A light-emitting element as claimed in item 1 of the patent application, wherein the width of the first separation groove is less than 10 μm. 如申請專利範圍第2項的發光元件,其中,該第一分離槽的寬度未達10μm。 A light-emitting element as claimed in item 2 of the patent application, wherein the width of the first separation groove is less than 10 μm. 如申請專利範圍第1至4項中任一項的發光元件,其中,該第一電極與該第一分離槽被分隔,且該第二電極與該第一分離槽被分隔。 The light-emitting element according to any one of claims 1 to 4, wherein the first electrode and the first separation groove are separated, and the second electrode and the first separation groove are separated. 如申請專利範圍第2項的發光元件,其中,形成有分離該第一發光部與該第三發光部的第二分離槽,於俯視該發光元件時,該第一分離槽以及該第二分離槽形成為該第一發光部與該共通電極部的邊界之長度、該第二發光部與該共通電極部的邊界之長度和該第三發光部與該共通電極部的邊界之長度互為相等。 A light-emitting element as claimed in item 2 of the patent application, wherein a second separation groove separating the first light-emitting portion and the third light-emitting portion is formed, and when the light-emitting element is viewed from above, the first separation groove and the second separation The groove is formed such that the length of the boundary between the first light emitting portion and the common electrode portion, the length of the boundary between the second light emitting portion and the common electrode portion, and the length of the boundary between the third light emitting portion and the common electrode portion are equal to each other . 如申請專利範圍第1至4項、第6項中任一項的發光元件,其中,形成有分離該第一發光部與該第三發光部的第二分離槽,於俯視該發光元件時,該第一分離槽以及該第二分離槽形成為該第一發光部之面積、該第二發光部之面積和該第三發光部之面積互為相等。 The light-emitting element according to any one of claims 1 to 4 and item 6, wherein a second separation groove separating the first light-emitting portion and the third light-emitting portion is formed, and when the light-emitting element is viewed from above, The first separation groove and the second separation groove are formed such that the area of the first light emitting portion, the area of the second light emitting portion, and the area of the third light emitting portion are equal to each other. 如申請專利範圍第5項的發光元件,其中,形成有分離該第一發光部與該第三發光部的第二分離槽,於俯視該發光元件時,該第一分離槽以及該第二分離槽形成為該第一發光部之面積、該第二發光部之面積和該第三發光部之面積互為相等。 A light-emitting element according to claim 5 of the patent application, wherein a second separation groove separating the first light-emitting portion and the third light-emitting portion is formed, and when the light-emitting element is viewed from above, the first separation groove and the second separation The groove is formed such that the area of the first light emitting portion, the area of the second light emitting portion, and the area of the third light emitting portion are equal to each other. 如申請專利範圍第2或6項的發光元件,其中,該第一電極的上面之高度、該第二電極的上面之高度、該第三電極的上面之高度與該共通電極的上面之高度互為相同。 A light-emitting element as claimed in claim 2 or 6, wherein the height of the upper surface of the first electrode, the height of the upper surface of the second electrode, the height of the upper surface of the third electrode and the height of the upper surface of the common electrode are mutually For the same. 一種顯示裝置,其具備申請專利範圍第1至9項中任一項的發光元件。 A display device provided with the light-emitting element according to any one of patent application items 1 to 9.
TW107124386A 2017-08-08 2018-07-13 Light emitting element and display device TWI689093B (en)

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