TWI688063B - Copper foil and components for heat dissipation - Google Patents

Copper foil and components for heat dissipation Download PDF

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TWI688063B
TWI688063B TW107146224A TW107146224A TWI688063B TW I688063 B TWI688063 B TW I688063B TW 107146224 A TW107146224 A TW 107146224A TW 107146224 A TW107146224 A TW 107146224A TW I688063 B TWI688063 B TW I688063B
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copper foil
heat dissipation
layer
patent application
thickness
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TW107146224A
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TW201929165A (en
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笹尾一將
三木敦史
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日商Jx金屬股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating

Abstract

本發明係提供一種具有優異散熱特性之散熱用銅箔。一種散熱用銅箔,其特徵係具有:銅箔基材;及前述銅箔基材之至少任一主表面上之聚合物膜。 The invention provides a copper foil for heat dissipation with excellent heat dissipation characteristics. A copper foil for heat dissipation, characterized by having: a copper foil base material; and a polymer film on at least any one main surface of the copper foil base material.

Description

散熱用銅箔及散熱部件 Copper foil and components for heat dissipation

本發明係關於一種散熱用銅箔及散熱部件。 The invention relates to a copper foil for heat dissipation and a heat dissipation component.

近年來,伴隨著電子設備之小型化、高精密化,所使用之電子元件的發熱所造成的故障等成為問題。傳統上,已有各種為放出如此之電子設備中元件之熱之手段的研究.開發(專利文獻1等)。 In recent years, with the miniaturization and high precision of electronic equipment, malfunctions caused by heat generation of electronic components used have become a problem. Traditionally, there have been various researches to release the heat of such components in electronic equipment. Development (Patent Literature 1 etc.).

【先前技術文獻】【Prior Technical Literature】 【專利文獻】【Patent Literature】

【專利文獻1】日本特開平08-078461號公報 [Patent Document 1] Japanese Patent Laid-Open No. 08-078461

電子設備之安裝基板,通常,具有因使用而發熱之元件,惟若無法良好地將該元件之熱放出,則會有故障之虞。 The mounting substrate of an electronic device usually has a component that generates heat due to use, but if the heat of the component cannot be properly released, there is a risk of failure.

在此,本發明之實施型態,課題在於提供一種具有優異散 熱特性之散熱用銅箔及散熱部件。 Here, in an embodiment of the present invention, an object is to provide a copper foil for heat dissipation and a heat dissipation member having excellent heat dissipation characteristics.

亦即,本發明之散熱用銅箔之一實施形態,其特徵係具有:銅箔基材;及前述銅箔基材之至少任一主表面上之聚合物膜。 That is, one embodiment of the copper foil for heat dissipation of the present invention is characterized by having: a copper foil base material; and a polymer film on at least any one main surface of the copper foil base material.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物膜之厚度,係0.1μm~10μm。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the thickness of the polymer film is 0.1 μm to 10 μm.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物膜之厚度,係0.5μm~8μm。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the thickness of the polymer film is 0.5 μm to 8 μm.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物膜之厚度,係1μm~5μm。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the thickness of the polymer film is 1 μm to 5 μm.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物膜,係包含在重複單元中至少具有1種雜原子之聚合物。 According to an embodiment of the copper foil for heat dissipation of the present invention, the polymer film includes a polymer having at least one kind of hetero atom in the repeating unit.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物,係在前述重複單元中包含選自羰基、羧基、醚基、環氧基、羥基、及鹵素所成群中至少1種。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the polymer includes at least one selected from the group consisting of carbonyl group, carboxyl group, ether group, epoxy group, hydroxyl group, and halogen in the repeating unit .

本發明之散熱用銅箔之一實施型態,其中,前述聚合物,係包含選自聚酯樹脂、聚碳酸酯樹脂、聚乙烯醇樹脂、纖維素樹脂、環氧樹脂、尼龍樹脂、聚醚樹脂、及氟樹脂所成群中至少1種。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the aforementioned polymer includes a resin selected from the group consisting of polyester resin, polycarbonate resin, polyvinyl alcohol resin, cellulose resin, epoxy resin, nylon resin, and polyether At least one kind of resin and fluororesin group.

本發明之散熱用銅箔之一實施型態,其中,前述聚合物,係包含選自聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚對苯二甲酸丙 二酯、乙酸纖維素、三乙酸纖維素、玻璃紙、雙酚A型環氧樹脂、聚己內醯胺、聚十二烷醯胺、聚環氧乙烷、聚環氧丙烷、聚偏二氟乙烯、及聚四氟乙烯所成群中至少1種。 According to one embodiment of the copper foil for heat dissipation of the present invention, the aforementioned polymer comprises selected from polyethylene terephthalate, polybutylene terephthalate, polytrimethylene terephthalate, Cellulose acetate, cellulose triacetate, cellophane, bisphenol A epoxy resin, polycaprolactam, polydodecylamide, polyethylene oxide, polypropylene oxide, polyvinylidene fluoride, and At least one of the polytetrafluoroethylene groups.

本發明之散熱用銅箔之一實施型態,其中,前述銅箔基材之至少任一主表面上,係具有鍍處理層;且前述鍍處理層上,係具有前述聚合物膜。 According to an embodiment of the copper foil for heat dissipation of the present invention, at least any one main surface of the copper foil base material has a plating treatment layer; and the plating treatment layer has the polymer film.

本發明之散熱用銅箔之一實施型態,其中,前述鍍處理層之鍍處理面之表面粗度Ra係0.30~1.50。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the surface roughness Ra of the plating surface of the plating layer is 0.30 to 1.50.

本發明之散熱用銅箔之一實施型態,其中,前述鍍處理層之鍍處理面之表面粗度Rz係2.50~9.50。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the surface roughness Rz of the plating treatment surface of the plating treatment layer is 2.50 to 9.50.

本發明之散熱用銅箔之一實施型態,其中,前述鍍處理層,係具有粗化粒子層。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the plating layer has a roughened particle layer.

本發明之散熱用銅箔之一實施型態,其中,前述鍍處理層,在前述粗化粒子層上係具有被覆層。 According to an embodiment of the copper foil for heat dissipation of the present invention, the plating layer has a coating layer on the roughened particle layer.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層,係含有選自Cu、Zn、Ni、Co、Cr、W、及Fe所成群中至少1種。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the coating layer contains at least one selected from the group consisting of Cu, Zn, Ni, Co, Cr, W, and Fe.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層,係含有Co及Ni。 In one embodiment of the copper foil for heat dissipation of the present invention, the coating layer contains Co and Ni.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層,係具有:被覆下層、及在該被覆下層上之被覆上層;前述被覆下層,係含有Cu、Co、及Ni;前述被覆上層,係含有Co及Ni。 An embodiment of the copper foil for heat dissipation of the present invention, wherein the coating layer includes: a coating lower layer and a coating upper layer on the coating lower layer; the coating lower layer contains Cu, Co, and Ni; the coating The upper layer contains Co and Ni.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層之 厚度,係0.001μm~1.0μm。 According to an embodiment of the copper foil for heat dissipation of the present invention, the thickness of the coating layer is 0.001 to 1.0 μm.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層之厚度,係0.002μm~0.5μm。 According to an embodiment of the copper foil for heat dissipation of the present invention, the thickness of the coating layer is 0.002 μm to 0.5 μm.

本發明之散熱用銅箔之一實施型態,其中,前述被覆層之厚度,係0.005μm~0.3μm。 According to an embodiment of the copper foil for heat dissipation of the present invention, the thickness of the coating layer is 0.005 μm to 0.3 μm.

此外,本發明之散熱部件之一實施型態,其特徵係具備上述之散熱用銅箔。 In addition, one embodiment of the heat dissipation member of the present invention is characterized by including the above-mentioned copper foil for heat dissipation.

藉由本發明之實施型態,可提供一種具有優異散熱特性之散熱用銅箔。 The embodiment of the present invention can provide a copper foil for heat dissipation with excellent heat dissipation characteristics.

1‧‧‧積層體 1‧‧‧Layered body

10‧‧‧隔熱材 10‧‧‧Insulation

20‧‧‧加熱器 20‧‧‧heater

30‧‧‧接著劑 30‧‧‧ Adhesive

40‧‧‧SUS板 40‧‧‧SUS board

50‧‧‧散熱用油脂 50‧‧‧ Grease for heat dissipation

60‧‧‧散熱用銅箔 60‧‧‧Copper foil for heat dissipation

70‧‧‧黑體膠帶 70‧‧‧Body tape

100‧‧‧紅外線熱成像儀 100‧‧‧Infrared thermal imager

【圖1】表示實施例1~11及比較例1~3中熱成像表示溫度之評估方法之剖面模式圖。 [Fig. 1] A cross-sectional schematic diagram showing the evaluation method of the thermographic representation temperature in Examples 1 to 11 and Comparative Examples 1 to 3.

以下,本發明並未限定為各實施型態,只要在不脫離其要旨之範圍內即可將構成要件變形具體化。此外,藉由將各實施型態所記載之複數之構成要件進行適當組合,從而可形成各種之發明。例如,可刪除實施型態所示全構成要件中之某些構成要件。進一步,亦可將不同實施型 態之構成要件進行適當組合。 In the following, the present invention is not limited to each embodiment type, and the constituent elements can be modified and embodied as long as they do not deviate from the gist thereof. In addition, various inventions can be formed by appropriately combining the plural constituent elements described in each embodiment. For example, some constituent elements of all constituent elements shown in the embodiment may be deleted. Furthermore, the components of different implementation types can be combined appropriately.

近年來,智慧型手機或平板PC等之行動裝置已積極地開發,進一步高集成度且高輸出之基板搭載至小型化設備,導致散熱性之問題日漸受到矚目。在此,本發明者,經過深入研究檢討之結果,發現藉由在銅箔基材之至少任一主表面上具有聚合物膜,可提升銅箔之散熱特性。 In recent years, mobile devices such as smartphones and tablet PCs have been actively developed. Further, high-integration and high-output substrates are mounted on miniaturized devices, and the problem of heat dissipation is increasingly attracting attention. Here, as a result of intensive research and review, the inventors found that by having a polymer film on at least any one main surface of the copper foil substrate, the heat dissipation characteristics of the copper foil can be improved.

以下,說明本發明之一實施型態之散熱用銅箔。 Hereinafter, a copper foil for heat dissipation according to an embodiment of the present invention will be described.

本發明之一實施型態之散熱用銅箔,係具有:銅箔基材、及銅箔基材之至少任一主表面上之聚合物膜。根據本實施型態,藉由具有聚合物膜,從而可具有優異之散熱特性。 A copper foil for heat dissipation according to an embodiment of the present invention includes a copper foil substrate and a polymer film on at least any one main surface of the copper foil substrate. According to the present embodiment, by having a polymer film, it can have excellent heat dissipation characteristics.

(銅箔基材) (Copper foil substrate)

本實施型態可使用之銅箔基材之型態並無特別限制。此外,典型之本實施型態所使用之銅箔基材,係電解銅箔或壓延銅箔任一者皆可。一般而言,電解銅箔係在鈦或不銹鋼之滾筒上藉由硫酸銅鍍浴將銅電解析出而製造,壓延銅箔係藉由重複以壓延輥進行塑性加工及熱處理而製造。壓延銅箔適用於要求可撓性之用途之情形較多。又,本說明書中之用語「銅箔基材」在單獨使用時係亦包含銅合金箔基材者。銅箔基材之厚度,係製造時例如不會產生皺摺等之1μm以上為佳。惟,考慮到智慧型手機或平板PC等薄型.小型化之規格,係20μm以下為佳。 The type of copper foil substrate that can be used in this embodiment is not particularly limited. In addition, the copper foil base material typically used in this embodiment may be either electrolytic copper foil or rolled copper foil. In general, electrolytic copper foil is manufactured by electrolysis of copper on a drum of titanium or stainless steel by a copper sulfate plating bath, and rolled copper foil is manufactured by repeatedly performing plastic processing and heat treatment with a calender roll. Rolled copper foil is often suitable for applications requiring flexibility. In addition, the term "copper foil base material" in this specification also includes a copper alloy foil base material when used alone. The thickness of the copper foil base material is preferably 1 μm or more that does not cause wrinkles or the like during manufacturing. However, considering the thinness of smart phones or tablet PCs. The size of the miniaturization is preferably less than 20μm.

(聚合物膜) (Polymer film)

本實施型態,為了提升熱輻射性,聚合物膜,係包含在重複單元中具有至少1種之雜原子之聚合物為佳。理由係,熱輻射特性與塗膜中之樹脂之化學構造有密切關係,可推論顯示寬譜強紅外線吸收峰越多之聚合物, 其發射率越高。 In this embodiment, in order to improve the heat radiation, the polymer film is preferably a polymer containing at least one kind of hetero atoms in the repeating unit. The reason is that the heat radiation characteristic is closely related to the chemical structure of the resin in the coating film, and it can be deduced that the polymer with more infrared absorption peaks showing a broad spectrum of strong, the higher the emissivity.

聚合物,顯示多數寬譜強紅外線吸收峰者,係在重複單元中包含選自羰基、羧基、醚基、環氧基、羥基、及鹵素所成群中至少1種為佳。此聚合物,只要係具有顯示多數寬譜強紅外線吸收峰之化學構造之聚合物即可,並無特別限定,可列舉例如:聚酯樹脂、聚碳酸酯樹脂、聚乙烯醇樹脂(PVA)、纖維素樹脂、環氧樹脂、尼龍樹脂、聚醚樹脂、及氟樹脂。 The polymer, which shows most broad-spectrum strong infrared absorption peaks, preferably contains at least one selected from the group consisting of carbonyl group, carboxyl group, ether group, epoxy group, hydroxyl group, and halogen in the repeating unit. This polymer is not particularly limited as long as it has a chemical structure that exhibits a broad spectrum of strong infrared absorption peaks, and examples include polyester resin, polycarbonate resin, polyvinyl alcohol resin (PVA), and fiber Plain resin, epoxy resin, nylon resin, polyether resin, and fluorine resin.

聚酯樹脂並無特別限定,可列舉例如:聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚對苯二甲酸丙二酯等。 The polyester resin is not particularly limited, and examples thereof include polyethylene terephthalate, polybutylene terephthalate, and polytrimethylene terephthalate.

聚碳酸酯樹脂並無特別限定,可列舉例如:由2,2-雙(4-羥苯)丙烷(雙酚A)所製造者。 The polycarbonate resin is not particularly limited, and examples thereof include those produced from 2,2-bis(4-hydroxybenzene)propane (bisphenol A).

聚乙烯醇樹脂,係指聚醋酸乙烯酯之皂化物。 Polyvinyl alcohol resin refers to the saponification of polyvinyl acetate.

纖維素樹脂並無特別限定,可列舉例如:乙酸纖維素、三乙酸纖維素、玻璃紙等。 The cellulose resin is not particularly limited, and examples thereof include cellulose acetate, cellulose triacetate, and cellophane.

環氧樹脂並無特別限定,可列舉例如:雙酚A型環氧樹脂等。 The epoxy resin is not particularly limited, and examples thereof include bisphenol A epoxy resin.

尼龍樹脂並無特別限定,可列舉例如:聚己內醯胺(尼龍6)、聚十二烷醯胺(尼龍12)等。 The nylon resin is not particularly limited, and examples thereof include polycaprolactam (nylon 6) and polydodecylamide (nylon 12).

聚醚樹脂並無特別限定,可列舉例如:聚環氧乙烷、聚環氧丙烷等。 The polyether resin is not particularly limited, and examples thereof include polyethylene oxide and polypropylene oxide.

氟樹脂並無特別限定,可列舉例如:聚偏二氟乙烯、聚四氟乙烯等。 The fluororesin is not particularly limited, and examples thereof include polyvinylidene fluoride and polytetrafluoroethylene.

聚合物膜之厚度,為了提升熱輻射性,係0.1μm以上為佳,0.5μm以上較佳,1μm以上進一步較佳,2μm以上進一步更佳。惟,考慮到智慧型手機或平板PC等薄型.小型化之規格,係10μm以下為佳,8μm 以下較佳,5μm以下進一步較佳,3μm以下進一步更佳。又,聚合物膜之厚度,係指聚合物膜之平均厚度。 The thickness of the polymer film is preferably 0.1 μm or more, preferably 0.5 μm or more, more preferably 1 μm or more, and even more preferably 2 μm or more in order to improve heat radiation. However, considering the thinness of smart phones or tablet PCs. The specification for miniaturization is preferably 10 μm or less, preferably 8 μm or less, more preferably 5 μm or less, and even more preferably 3 μm or less. In addition, the thickness of the polymer film refers to the average thickness of the polymer film.

聚合物膜之厚度之計測方法,以下說明測定器之方法之一例。 For the method of measuring the thickness of the polymer film, an example of the method of the measuring device will be described below.

首先,藉由儀表測厚儀對於銅箔基材之厚度進行3點以上測定,算出其3點以上之平均值。接著,準備前述銅箔基材上具有聚合物膜之散熱用銅箔。並且,藉由儀表測厚儀對於散熱用銅箔之厚度進行3點以上測定,算出其3點以上之平均值。由散熱用銅箔之厚度之平均值,扣除前述之銅箔基材之厚度之平均值,從而算出聚合物膜之厚度(平均厚度)。 First, the thickness of the copper foil base material is measured at 3 points or more with an instrument thickness gauge to calculate the average value of 3 or more points. Next, the copper foil for heat dissipation which has a polymer film on the said copper foil base material is prepared. In addition, the thickness of the copper foil for heat dissipation is measured at 3 points or more with an instrument thickness gauge to calculate the average value of 3 or more points. The average thickness of the copper foil substrate is subtracted from the average thickness of the copper foil for heat dissipation to calculate the thickness of the polymer film (average thickness).

此外,散熱用銅箔,在銅箔基材之主表面上具有粗化粒子層及聚合物膜、或具有粗化粒子層、被覆層、及聚合物膜之情形,如下述。首先,藉由儀表測厚儀對於銅箔基材之主表面上形成粗化粒子層、或形成粗化粒子層及被覆層之銅箔之厚度進行3點以上測定,算出其3點以上之平均值。接著,準備銅箔基材之主表面上具有粗化粒子層及聚合物膜、或具有粗化粒子層、被覆層、及聚合物膜之散熱用銅箔。並且,藉由儀表測厚儀對於散熱用銅箔之厚度進行3點以上測定,算出其3點以上之平均值。由散熱用銅箔之厚度之平均值,扣除前述之銅箔之厚度之平均值,從而算出聚合物膜之厚度(平均厚度)。 In addition, the case where the copper foil for heat dissipation has a roughened particle layer and a polymer film or a roughened particle layer, a coating layer, and a polymer film on the main surface of the copper foil base material is as follows. First, the thickness of the copper foil on which the roughened particle layer is formed on the main surface of the copper foil base material, or the roughened particle layer and the coating layer is formed is measured by 3 or more points by an instrument thickness gauge, and the average of 3 or more points is calculated value. Next, a copper foil for heat dissipation having a roughened particle layer and a polymer film or a roughened particle layer, a coating layer, and a polymer film on the main surface of the copper foil base material is prepared. In addition, the thickness of the copper foil for heat dissipation is measured at 3 points or more with an instrument thickness gauge to calculate the average value of 3 or more points. The thickness of the polymer film (average thickness) is calculated from the average value of the thickness of the copper foil for heat dissipation, subtracting the average value of the thickness of the aforementioned copper foil.

此外,本實施型態,為了提升銅箔基材與聚合物膜之密著性,在銅箔基材上,亦可形成防鏽層,進一步亦可在其表面上施予鉻酸鹽處理,矽烷偶聯處理等之處理。防鏽層、矽烷偶聯處理可使用習知者。 In addition, in this embodiment, in order to improve the adhesion between the copper foil substrate and the polymer film, a rust prevention layer may be formed on the copper foil substrate, and chromate treatment may be further applied to the surface. Silane coupling treatment, etc. Known ones can be used for the antirust layer and the silane coupling treatment.

(鍍處理層) (Plating layer)

本實施型態,係在銅箔基材之至少任一主表面上,進一步具有鍍處理層,並在鍍處理層上,具有聚合物膜為佳。 In this embodiment, the copper foil substrate is further provided with a plating layer on at least any one main surface, and it is preferable to have a polymer film on the plating layer.

本實施型態,鍍處理層之鍍處理面之表面粗度Ra,為了將發熱體所生之熱良好地進行散熱,係0.30以上為佳,0.40以上較佳,0.45以上進一步更佳。惟,為了使粗化粒子不易因外力導致脫落,係1.50以下為佳,1.30以下較佳,1.20以下進一步更佳。又,表面粗度Ra,係表示JIS B 0601:2013所記載之算術平均粗度。 In the present embodiment, the surface roughness Ra of the plating surface of the plating layer is preferably 0.30 or more, preferably 0.40 or more, and more preferably 0.45 or more in order to dissipate the heat generated by the heating element. However, in order to prevent coarse particles from falling off due to external force, it is preferably 1.50 or less, preferably 1.30 or less, and more preferably 1.20 or less. In addition, the surface roughness Ra represents the arithmetic average roughness described in JIS B 0601:2013.

此外,本實施型態中,鍍處理面之表面粗度Rz,為了良好地將發熱體所生之熱進行散熱,係2.50以上為佳,3.00以上較佳,3.72以上進一步更佳。惟,為了使粗化粒子不易因外力導致脫落,係9.50以下為佳,8.00以下較佳,7.74以下進一步更佳。又,表面粗度Rz,係表示JIS B 0601:2013所記載之最大高度粗度。 In addition, in the present embodiment, the surface roughness Rz of the plating surface is preferably 2.50 or more, preferably 3.00 or more, and more preferably 3.72 or more in order to dissipate the heat generated by the heating element. However, in order to prevent coarse particles from falling off due to external force, it is preferably 9.50 or less, 8.00 or less, and 7.74 or less. The surface roughness Rz represents the maximum height roughness described in JIS B 0601:2013.

本實施型態中,鍍處理層之鍍處理面,使用雷射顯微鏡測定時,鍍處理面之表面積B相對於鍍處理面之投影面積A之表面積比B/A,並無特別限制。例如,為了進一步提升鍍處理層之熱輻射性,表面積比B/A,係1.42以上為佳,1.60以上較佳,1.81以上進一步較佳,2.18以上進一步更佳,2.35以上更進一步更佳。惟,即使表面積比B/A越高,鍍處理層之熱輻射性越優異,但有粗化粒子容易因外力而脫落之情形,故表面積比B/A,係3.42以下為佳,3.25以下較佳,3.10以下進一步較佳,2.98以下進一步更佳,2.88以下更進一步更佳。 In this embodiment, when the plating surface of the plating layer is measured using a laser microscope, the surface area ratio B/A of the surface area B of the plating surface relative to the projected area A of the plating surface is not particularly limited. For example, in order to further improve the heat radiation of the plating layer, the surface area ratio B/A is preferably 1.42 or more, preferably 1.60 or more, more preferably 1.81 or more, even more preferably 2.18 or more, and even more preferably 2.35 or more. However, even if the surface area ratio B/A is higher, the heat radiation of the plating layer is more excellent, but the roughened particles are likely to fall off due to external force, so the surface area ratio B/A is preferably 3.42 or less, and 3.25 or less. Good, 3.10 or less is even better, 2.98 or less is even better, and 2.88 or less is even better.

(粗化粒子層) (Coarse particle layer)

本實施型態中,鍍處理層,為了提升熱輻射性,係具有粗化粒子層為 佳。亦即,本實施型態中,銅箔基材之至少任一主表面上,係依序形成粗化粒子層、聚合物膜。又,粗化粒子層中,粗化處理,例如,可藉由以銅或銅合金形成粗化粒子而進行。粗化處理亦可係微細者。 In this embodiment, the plating layer is preferably provided with a coarsened particle layer in order to improve the heat radiation. That is, in this embodiment, the roughened particle layer and the polymer film are sequentially formed on at least any one main surface of the copper foil substrate. In addition, in the roughened particle layer, the roughening treatment can be performed, for example, by forming roughened particles with copper or a copper alloy. The roughening treatment can also be fine.

具有粗化粒子層及該粗化粒子層上之聚合物膜之情形,此聚合物膜,係被覆在粗化粒子之表面。據此,藉由聚合物膜被覆在粗化粒子之表面,而增加聚合物膜之表面積,從而可進一步提升熱輻射性。 In the case of the roughened particle layer and the polymer film on the roughened particle layer, the polymer film is coated on the surface of the roughened particle. According to this, by coating the surface of the roughened particles with the polymer film, the surface area of the polymer film is increased, thereby further improving the heat radiation.

此外,有粗化粒子之前端部分折損、或粗化粒子從基礎剝落等,一般稱為塵化現象之問題產生之情形。此塵化現象,儘管經粗化鍍處理之粗化粒子層具有優異熱輻射性,但粗化粒子容易因外力而脫落,製作或使用銅箔時會因「摩擦」而發生剝離。在此,本實施型態,為了抑制塵化,係以聚合物膜將此粗化粒子之表面被覆。藉此,粗化粒子之前端部分因聚合物膜而增厚,粗化粒子之基礎因被覆層及聚合物膜而增粗。如此地,藉由在粗化粒子層上形成聚合物膜,可使粗化粒子不易因外力導致脫落,從而可抑制塵化。 In addition, there are cases where the roughened particles are broken at the front end, or the coarsened particles are peeled off from the foundation, which is generally called the dusting phenomenon. In this dusting phenomenon, although the roughened particle layer subjected to roughening plating has excellent heat radiation, the roughened particles are liable to fall off due to external force, and peeling may occur due to "friction" when making or using copper foil. Here, in this embodiment, in order to suppress dusting, the surface of the roughened particles is covered with a polymer film. By this, the front end portion of the roughened particles is thickened by the polymer film, and the basis of the roughened particles is thickened by the coating layer and the polymer film. In this way, by forming a polymer film on the roughened particle layer, the roughened particles are less likely to fall off due to external force, and dusting can be suppressed.

(被覆層) (Coating)

本實施型態中,鍍處理層,係具有粗化粒子層及該粗化粒子層上之被覆層為佳。亦即,本實施型態中,銅箔基材之至少任一主表面上,係依序形成:粗化粒子層、被覆層、聚合物膜。此被覆層,係被覆在粗化粒子之樹枝之表面。進一步,此被覆層上,係形成有聚合物膜。因此,本實施型態中,由於被覆層上具有聚合物膜,故藉由被覆層與聚合物膜之協同效應,從而進一步提升熱輻射性,且亦提升塵化特性。 In this embodiment, the plating layer preferably has a roughened particle layer and a coating layer on the roughened particle layer. That is, in this embodiment, at least any one main surface of the copper foil substrate is formed in this order: a roughened particle layer, a coating layer, and a polymer film. This coating layer is coated on the surface of the branch of coarsened particles. Further, on this coating layer, a polymer film is formed. Therefore, in the present embodiment, since the coating layer has a polymer film, the synergistic effect of the coating layer and the polymer film further improves the heat radiation and also improves the dusting characteristics.

粗化粒子層,在以銅或銅合金形成粗化粒子後,根據熱輻 射性、塵化、及密著性等之觀點,可進一步進行設置含有選自Cu、Zn、Ni、Co、Cr、W、及Fe所成群中至少1種之被覆層之光滑鍍處理。例如,在粗化粒子層上,具有被覆下層及該被覆下層上之被覆上層,被覆下層,係含有Cu、Co、及Ni,被覆上層,係含有Co及Ni為佳。又,此等金屬,係含在被覆層之全部或一部分(例如,上部)為佳。 The roughened particle layer, after the roughened particles are formed of copper or a copper alloy, can be further provided to contain a material selected from the group consisting of Cu, Zn, Ni, Co, Cr, etc. from the viewpoint of heat radiation, dusting, and adhesion. Smooth plating of at least one coating layer in the group consisting of W and Fe. For example, on the roughened particle layer, there is a coating lower layer and a coating upper layer on the coating lower layer. The coating lower layer contains Cu, Co, and Ni, and the coating upper layer preferably contains Co and Ni. In addition, these metals are preferably contained in all or part of the coating layer (for example, the upper part).

被覆層之厚度,為了提升熱輻射性,係0.001μm以上為佳,0.002μm以上較佳,0.005μm以上進一步較佳,0.01μm以上進一步更佳。惟,考慮到智慧型手機或平板PC等薄型.小型化之規格,係1.0μm以下為佳,0.5μm以下較佳,0.3μm以下進一步較佳,0.1μm以下進一步更佳。又,被覆層之厚度,係指被覆層之平均厚度。 The thickness of the coating layer is preferably 0.001 μm or more, preferably 0.002 μm or more, more preferably 0.005 μm or more, and even more preferably 0.01 μm or more in order to improve the heat radiation. However, considering the thinness of smart phones or tablet PCs. The specification for miniaturization is preferably 1.0 μm or less, preferably 0.5 μm or less, more preferably 0.3 μm or less, and even more preferably 0.1 μm or less. The thickness of the coating layer refers to the average thickness of the coating layer.

被覆層之厚度之計測方法,以下說明重量計測之方法之一例。 For the method of measuring the thickness of the coating layer, an example of the method of measuring the weight will be described below.

首先,準備形成有粗化粒子層及被覆層之散熱用銅箔。從前述散熱用銅箔採取2cm×2cm之試料,以20體積%硝酸水溶液溶解前述試料得到溶液。接著,使用原子吸收分光光度計以原子吸收光譜法對於此溶液進行定量分析,從而測定前述試料中之被覆層所含各金屬之濃度,使用此各金屬濃度對前述試料中之被覆層中各金屬之重量進行定量。藉由所得之各金屬之重量、及金屬之密度算出被覆層之體積。並且,將所得之被覆層之體積,除以試料之面積(4cm2)與測定之表面積比之乘值,從而算出被覆層之厚度(平均厚度)。 First, a copper foil for heat dissipation in which a roughened particle layer and a coating layer are formed is prepared. A sample of 2 cm×2 cm was taken from the copper foil for heat dissipation, and the sample was dissolved in a 20% by volume nitric acid aqueous solution to obtain a solution. Next, this solution was quantitatively analyzed by atomic absorption spectroscopy using an atomic absorption spectrophotometer to determine the concentration of each metal contained in the coating layer in the aforementioned sample, and the metal concentration in each metal in the coating layer in the aforementioned sample was measured using this metal concentration The weight is quantified. The volume of the coating layer is calculated from the weight of each metal obtained and the density of the metal. Then, the volume of the obtained coating layer is divided by the product of the area of the sample (4 cm 2 ) and the measured surface area ratio to calculate the thickness of the coating layer (average thickness).

此外,本實施型態,為了提升鍍處理層與聚合物膜之密著性,在鍍處理層上,亦可形成防鏽層,進一步亦可在其表面施予鉻酸鹽處 理、矽烷偶聯處理等處理。防鏽層、矽烷偶聯處理可使用習知者。 In addition, in this embodiment, in order to improve the adhesion between the plating layer and the polymer film, an anti-rust layer may be formed on the plating layer, and chromate treatment or silane coupling may be further applied to the surface Processing and other processing. Known ones can be used for the antirust layer and the silane coupling treatment.

接著,以下表示形成上述之鍍處理層時之粗化粒子層、被覆層、防鏽層、聚合物膜之各形成條件(鍍浴組成及鍍條件、薄膜條件)之一例。 Next, an example of each formation condition (plating bath composition and plating conditions, thin film conditions) of the roughened particle layer, the coating layer, the rust prevention layer, and the polymer film when forming the above-mentioned plating treatment layer is shown below.

(A)粗化粒子層 (A) Coarse particle layer

粗化粒子層係在銅箔基材之任一側之主表面上藉由(A-1)粗化粒子層之形成1之條件形成粗化粒子為佳。此外,除了前述(A-1)粗化粒子層之形成1以外,較佳係形成藉由(A-2)粗化粒子層之形成2之條件使粗化粒子進一步成長之粗化粒子層。 The roughened particle layer is preferably formed on the main surface on either side of the copper foil substrate by (A-1) forming the roughened particle layer under the conditions of forming 1. Further, in addition to the aforementioned (A-1) formation of the roughened particle layer 1, it is preferable to form a roughened particle layer in which the roughened particles are further grown by the condition of (A-2) formation of the roughened particle layer 2.

(A-1)粗化粒子層之形成1(鍍Cu) (A-1) Formation of roughened particle layer 1 (Cu plating)

粗化粒子層之形成1之處理,係相當於粗化鍍(粗鍍)之處理。粗化鍍係將電流密度設定在極限電流密度以上所進行之鍍。 The process of forming the roughened particle layer 1 is equivalent to the process of roughening plating (coarse plating). The rough plating is a plating performed by setting the current density above the limit current density.

液體組成:銅10~20g/L;硫酸50~100g/L Liquid composition: copper 10~20g/L; sulfuric acid 50~100g/L

液溫:25~50℃ Liquid temperature: 25~50℃

電流密度:20~58A/dm2 Current density: 20~58A/dm 2

時間:0.5~5秒 Time: 0.5~5 seconds

(A-2)粗化粒子層之形成2(鍍Cu) (A-2) Formation of roughened particle layer 2 (Cu plating)

粗化粒子層之形成2之處理,係相當於粗化鍍(粗鍍)之處理。粗化鍍係將電流密度設定在未達極限電流密度所進行之鍍。 The process of forming the roughened particle layer 2 is equivalent to the process of roughening plating (coarse plating). The roughening plating is a plating performed by setting the current density to the limit current density.

液體組成:銅15~50g/L;硫酸60~100g/L Liquid composition: copper 15~50g/L; sulfuric acid 60~100g/L

液溫:25~50℃ Liquid temperature: 25~50℃

電流密度:20~58A/dm2 Current density: 20~58A/dm 2

時間:1~10秒 Time: 1~10 seconds

又,電流密度越低,及/或,庫侖量越多時有前述之表面粗度Ra之減低效果越大之情形。 In addition, the lower the current density, and/or the larger the Coulomb amount, the greater the effect of reducing the aforementioned surface roughness Ra may be.

此外,粗化粒子層亦可由進行1次或2次以上之處理而形成。 In addition, the roughened particle layer may be formed by performing the treatment once or twice or more.

(B)被覆層之形成 (B) Formation of coating

被覆層係在粗化粒子層上藉由(B-1)被覆下層之形成之條件形成被覆下層後,藉由(B-2)被覆上層之形成之條件形成被覆上層為佳。被覆下層及被覆上層之形成之處理,任一者皆係相當於光滑鍍之處理。光滑鍍係將電流密度設定在未達極限電流密度所進行之鍍。被覆下層可藉由以下之條件形成。又,亦可不形成被覆下層。 After the coating layer is formed on the roughened particle layer by (B-1) forming the coating lower layer, the coating upper layer is preferably formed by (B-2) forming the coating upper layer. The process of forming the lower coating layer and the upper coating layer is equivalent to the smooth plating process. Smooth plating is the plating that sets the current density at the limit current density. The coating lower layer can be formed under the following conditions. In addition, the coating lower layer may not be formed.

(B-1)被覆下層之形成條件 (B-1) Conditions for forming the underlayer

列舉被覆下層之形成條件之一例時,如下述。 An example of the formation conditions of the coating underlayer is as follows.

液體組成:Cu10~20g/L;所含選自Zn、Ni、Co、Cr、W、及Fe所成群中至少1種之元素個別為0.001~15g/L Liquid composition: Cu10~20g/L; at least one element selected from the group consisting of Zn, Ni, Co, Cr, W, and Fe is individually 0.001~15g/L

pH:2~3 pH: 2~3

液溫:30~50℃ Liquid temperature: 30~50℃

電流密度:10~50A/dm2 Current density: 10~50A/dm 2

時間:0.1~2秒 Time: 0.1~2 seconds

(B-2)被覆上層之形成條件 (B-2) Formation conditions of the coated upper layer

列舉被覆上層之形成條件之一例時,如下述。 An example of the formation conditions of the coating upper layer is as follows.

液體組成:Cu10~20g/L;所含選自Zn、Ni、Co、Cr、W、及Fe所成群中至少1種之元素個別為0.001~15g/L Liquid composition: Cu10~20g/L; at least one element selected from the group consisting of Zn, Ni, Co, Cr, W, and Fe is individually 0.001~15g/L

pH:2~3 pH: 2~3

液溫:30~50℃ Liquid temperature: 30~50℃

電流密度:0.5~20A/dm2 Current density: 0.5~20A/dm 2

時間:0.1~300秒 Time: 0.1~300 seconds

又,被覆下層及被覆上層亦可藉由1次或2次以上之處理而形成。 In addition, the coating lower layer and the coating upper layer may be formed by one or more treatments.

(C)防鏽層 (C) Anti-rust layer

此外,前述銅箔基材、前述粗化粒子層、或前述被覆層上,亦可形成防鏽層,特別係鉻酸鹽層之防鏽層。本實施型態中較佳之防鏽處理,係鉻氧化物單獨之皮膜處理或鉻氧化物與鋅/鋅氧化物之混合物皮膜處理。鉻氧化物與鋅/鋅氧化物之混合物皮膜處理,係使用含有鋅鹽或氧化鋅與鉻酸鹽之鍍浴進行電鍍而被覆鋅或氧化鋅與鉻氧化物所成鋅-鉻基混合物之防鏽層之處理。 In addition, a rust prevention layer may be formed on the copper foil base material, the roughened particle layer, or the coating layer, especially a chromate layer. The preferred anti-rust treatment in this embodiment is the coating treatment of chromium oxide alone or the coating treatment of a mixture of chromium oxide and zinc/zinc oxide. The coating treatment of the mixture of chromium oxide and zinc/zinc oxide is to use a plating bath containing zinc salt or zinc oxide and chromate for electroplating to cover the zinc-chromium-based mixture formed by zinc or zinc oxide and chromium oxide. Treatment of rust layer.

鍍浴,具代表性的,係使用K2Cr2O7、Na2Cr2O7等之重鉻酸鹽或CrO3等之至少一種;及水溶性鋅鹽,例如ZnO、ZnSO4.7H2O等至少一種;及鹼金屬氫氧化物之混合水溶液。代表性之鍍浴組成及電解條件,係例如以下所述。下述中,雖係表示電解鉻酸鹽處理之條件,惟亦可係浸漬鉻酸鹽處理。 The plating bath, typically, uses at least one of dichromates such as K 2 Cr 2 O 7 and Na 2 Cr 2 O 7 or CrO3; and water-soluble zinc salts such as ZnO and ZnSO 4 . At least one such as 7H 2 O; and mixed aqueous solution of alkali metal hydroxide. Representative plating bath compositions and electrolysis conditions are as follows, for example. In the following, although it indicates the conditions of electrolytic chromate treatment, it may be immersion chromate treatment.

形成防鏽層之鍍條件 Plating conditions for forming anti-rust layer

液體組成:重鉻酸鉀1~10g/L;鋅0~5g/L Liquid composition: potassium dichromate 1~10g/L; zinc 0~5g/L

pH:3~4 pH: 3~4

液溫:50~60℃ Liquid temperature: 50~60℃

電流密度:0~2A/dm2(為了電解鉻酸鹽處理) Current density: 0~2A/dm 2 (for electrolytic chromate treatment)

時間:1~10秒 Time: 1~10 seconds

(D)聚合物膜之形成 (D) Formation of polymer film

聚合物膜,係形成在銅箔基材之任一側之主表面上。進一步,在鍍處理層上形成聚合物膜,抑或在防鏽層上形成聚合物膜為佳。 The polymer film is formed on the main surface on either side of the copper foil substrate. Further, it is preferable to form a polymer film on the plating treatment layer, or to form a polymer film on the rust prevention layer.

塗佈方法,係以含有聚合物之塗佈液之噴霧進行噴灑;塗佈機之塗佈、浸漬、流動床等任一者皆可。聚合物膜之厚度,係藉由調整固形分濃度或塗佈量而成為0.1~10μm。之後,因應必要,亦可為達到改善銅箔之延展性之目的而施予退火處理。 The coating method is spraying with a spray of a coating solution containing a polymer; any of coating, dipping, and fluidized bed of a coating machine can be used. The thickness of the polymer film is adjusted to 0.1 to 10 μm by adjusting the solid concentration or coating amount. After that, if necessary, annealing treatment may be applied for the purpose of improving the ductility of the copper foil.

具備本實施型態之散熱用銅箔之散熱部件,例如,可用於使智慧型手機或平板PC等之行動裝置所內建之發熱部件進行散熱者。 The heat dissipation member provided with the copper foil for heat dissipation of the present embodiment can be used, for example, to dissipate heat generated by the heat generating parts built in mobile devices such as smartphones and tablet PCs.

【實施例】【Example】

以下,基於實施例及比較例進行說明。又,本實施例僅係代表其中一例,並非係限制在此例者。亦即,係包含本發明所含其他態樣或變形者。 Hereinafter, description will be made based on Examples and Comparative Examples. In addition, this embodiment is only representative of one example, and is not limited to this example. That is, it includes other aspects or modifications included in the present invention.

<實施例1> <Example 1>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,在下述所示條件範圍內,形成聚合物膜。塗佈條件,如以下所述。 A polymer film was formed on the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., TPC foil) with a thickness of 12 μm within the range of conditions shown below. The coating conditions are as follows.

(A)聚合物膜之形成(PVA) (A) Formation of polymer film (PVA)

溶劑:PVA6質量%水溶液 Solvent: PVA6 mass% aqueous solution

塗佈方法:金屬製塗佈器 Coating method: metal applicator

膜之厚度:1.5μm Film thickness: 1.5μm

首先,對於上述壓延銅箔,評估表面粗度Ra及Rz、表面積比。此外,對於所得之散熱用銅箔,評估聚合物膜之厚度、熱成像表示溫度及塵化。其結果,如表1所示。又,對於表面粗度Ra及Rz、表面積比、聚合物膜之厚度、熱成像表示溫度、塵化之評估方法進行個別說明。 First, for the rolled copper foil, the surface roughness Ra and Rz, and the surface area ratio were evaluated. In addition, with regard to the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging indicates temperature and dusting. The results are shown in Table 1. In addition, the evaluation methods of the surface roughness Ra and Rz, the surface area ratio, the thickness of the polymer film, the temperature indicated by the thermal imaging, and the dusting are individually described.

(表面粗度Ra、Rz) (Surface roughness Ra, Rz)

使用非接觸式粗度測定機(雷射顯微鏡,奧林巴斯製LEXT OLS 4000)測定各實施例及比較例之樣品之粗化粒子層側表面之表面粗度Ra(算術平均粗度)及表面粗度Rz(最大高度粗度)。同測定機之雷射波長係405nm,內建透鏡之倍率係20倍。在任意5處測定Ra及Rz,將該Ra及Rz之5處之平均值作為Ra及Rz之值。此外,對各實施例及比較例中所使用之粗化處理前之銅箔基材之預定施予粗化處理之側之表面,亦與前述相同測定Ra與Rz。又,Ra與Rz之測定係在TD方向(寬方向,亦即與銅箔基材之壓延方向垂直之方向)進行。測定條件及解析條件中主要項目之設定如以下所述。 The surface roughness Ra (arithmetic mean roughness) of the surface of the roughened particle layer side surface of the samples of each example and comparative example was measured using a non-contact roughness measuring machine (laser microscope, LEXT OLS 4000 manufactured by Olympus) Surface roughness Rz (maximum height roughness). The laser wavelength of the same measuring machine is 405nm, and the magnification of the built-in lens is 20 times. Ra and Rz are measured at arbitrary 5 points, and the average value of these 5 points of Ra and Rz is regarded as the value of Ra and Rz. In addition, Ra and Rz were also measured on the surface of the copper foil base material before roughening used in each of the Examples and Comparative Examples that was intended to be roughened. In addition, the measurement of Ra and Rz is performed in the TD direction (the width direction, that is, the direction perpendicular to the rolling direction of the copper foil base material). The setting of the main items in the measurement conditions and analysis conditions is as follows.

<測定條件> <Measurement conditions>

對物透鏡:MPLAPONLEXT 100(倍率:100倍;開口數:0.95) Object lens: MPLAPONLEXT 100 (magnification: 100 times; opening number: 0.95)

掃描模式:XYZ高精度(高解析度:10nm,捕獲數據之像素數:1024×1024) Scanning mode: XYZ high precision (high resolution: 10nm, pixel number of captured data: 1024×1024)

測定範圍:橫130μm×縱130μm Measuring range: horizontal 130μm × vertical 130μm

測定環境溫度:23~25℃ Measuring ambient temperature: 23~25℃

<解析條件> <Analysis conditions>

解析區域設定:無(測定範圍為全視野進行解析) Analysis area setting: none (the measurement range is full-field analysis)

分界:無(λc、λ s、λ f皆無) Boundary: none (none of λc, λs , λf )

雜音消除以及傾斜校正:無 Noise elimination and tilt correction: None

(表面積比) (Surface area ratio)

使用非接觸式粗度測定機(雷射顯微鏡,奧林巴斯製LEXT OLS 4000),測定鍍處理面之表面積。使用鍍處理面之表面積B相對於鍍處理面之投影面積A,作為表面積比B/A。又,對於鍍處理層上具有聚合物膜者,於塗佈前述聚合物膜前測定鍍處理層之表面積。測定條件及解析條件中主要項目之設定如以下所述。 The surface area of the plated surface was measured using a non-contact type roughness measuring machine (laser microscope, LEXT OLS 4000 manufactured by Olympus). As the surface area ratio B/A, the surface area B of the plated surface relative to the projected area A of the plated surface was used. In addition, for those having a polymer film on the plating layer, the surface area of the plating layer was measured before applying the polymer film. The setting of the main items in the measurement conditions and analysis conditions is as follows.

<測定條件> <Measurement conditions>

與上述之測定表面粗度Ra及Rz之條件相同。 The conditions for measuring the surface roughness Ra and Rz are the same as above.

又,由於測定範圍係橫130μm×縱130μm,故鍍處理面之投影面積A為:16923μm2In addition, since the measurement range is 130 μm in width×130 μm in length, the projected area A of the plated surface is: 16923 μm 2 .

測定環境溫度:23~25℃ Measuring ambient temperature: 23~25℃

<解析條件> <Analysis conditions>

與上述之解析表面粗度Ra及Rz之條件相同。 The conditions are the same as the analytical surface roughness Ra and Rz mentioned above.

惟,關於閾值設定,係直方圖;閾值1:0%;閾值2:100%。 However, regarding the threshold setting, it is a histogram; the threshold 1: 0%; the threshold 2: 100%.

(聚合物膜之厚度) (Thickness of polymer film)

藉由儀表測厚儀(小野測器股份有限公司,數位計數器DG-1270)測定實施例1所得之散熱用銅箔之厚度,由其3點之平均值,扣除壓延銅箔之厚度(12μm),從而算出聚合物膜之厚度。 The thickness of the copper foil for heat dissipation obtained in Example 1 was measured by an instrument thickness gauge (Ono Tester Co., Ltd., digital counter DG-1270), and the thickness of the rolled copper foil (12 μm) was deducted from the average value of 3 points To calculate the thickness of the polymer film.

(熱成像表示溫度) (Thermal image indicates temperature)

使用紅外線熱成像儀(奇諾(Chino)股份有限公司CPA-0150J),根據以下之測定條件進行測定。如圖1所示,製成由下方依序為:隔熱材10、加 熱器20、接著劑(東亞合成股份有限公司,ARON ALPHA(註冊商標))30、SUS板40、散熱用油脂50、散熱用銅箔60所成之積層體1,將此積層體1配置在隔熱部件所成之包殼(圖式未表示)。進一步,在該積層體之散熱用銅箔60上,配置發射率0.9之黑體膠帶70使其覆蓋散熱用銅箔60之略一半之面積。施加直流電流(電流:0.3A;電壓4.0V)將加熱器20加熱,加熱至紅外線熱成像儀100上積層體1之黑體膠帶70所覆蓋之區域之表示溫度顯示88.0℃之溫度。使用紅外線熱成像儀100,以黑體膠帶70所覆蓋之區域為基準(88.0℃),測定積層體1之散熱用銅箔60之部分之表示溫度。一般而言,紅外線熱成像儀100會檢測出從試料表面放出之紅外線能量,將其作為表示溫度。測定具有低發射率之最外表面之試料時,由於從前述試料放出之紅外線能量極小,實際之試料溫度與熱成像之表示溫度會產生偏差。在此,如上述係將發射率已知之黑體膠帶之熱成像之表示溫度作為基準,比較實施例1所得散熱用銅箔之熱成像之表示溫度,從而評估散熱用銅箔之熱輻射性。又,表1中,熱成像表示溫度越接近基準之88.0℃,表示發射率越高。亦即,表示放出紅外線之能力優異,散熱特性良好。 Using an infrared thermal imager (Chino Co., Ltd. CPA-0150J), the measurement was performed according to the following measurement conditions. As shown in FIG. 1, the following are made in order from the following: heat insulation material 10, heater 20, adhesive (ARON ALPHA (registered trademark) 30), SUS plate 40, heat dissipating grease 50, The laminated body 1 made of the copper foil 60 for heat dissipation is arranged in a cladding made of a heat insulating member (not shown). Further, on the copper foil 60 for heat dissipation of the laminated body, a black body tape 70 having an emissivity of 0.9 is arranged so as to cover a half of the area of the copper foil 60 for heat dissipation. A direct current (current: 0.3A; voltage 4.0V) is applied to heat the heater 20 to the area covered by the black body tape 70 of the laminate 1 on the infrared thermal imager 100, indicating that the temperature shows a temperature of 88.0°C. Using the infrared thermal imager 100, the indicated temperature of the portion of the copper foil 60 for heat dissipation of the laminate 1 was measured based on the area covered by the black body tape 70 (88.0°C). In general, the infrared thermal imager 100 detects the infrared energy emitted from the surface of the sample and uses it as the temperature. When measuring the sample with the outermost surface with a low emissivity, the infrared energy released from the sample is extremely small, and the actual sample temperature will deviate from the temperature indicated by the thermal imaging. Here, the thermal imaging performance of the copper foil for heat dissipation obtained in Example 1 is compared with the thermal imaging temperature of the black body tape with known emissivity as a reference, and the thermal radiation of the copper foil for heat dissipation is evaluated. In addition, in Table 1, thermography indicates that the temperature is closer to the reference 88.0°C, which indicates that the emissivity is higher. That is, it indicates that the ability to emit infrared rays is excellent, and the heat radiation characteristics are good.

(塵化評估) (Dust assessment)

塵化評估,係在實施例1所得之散熱用銅箔之處理面上貼附透明之隱形膠帶(物太郎(MonotaRO)股份有限公司,型號125076),藉由膠帶轉印法進行。 The dusting evaluation was performed by attaching a transparent invisible tape (MonotaRO Co., Ltd., model number 125076) on the treated surface of the copper foil for heat dissipation obtained in Example 1 by the tape transfer method.

<評估基準> <Evaluation criteria>

◎:膠帶完全沒有粗化粒子轉印之情形。 ◎: The tape is completely free of rough particle transfer.

○:局部存在輕微之粗化粒子轉印之情形。 ○: The transfer of slightly coarsened particles is partially present.

×:觀察到整面有粗化粒子轉印之情形(即使輕微仍整面皆有之情形)。 ×: A case where coarse particle transfer is observed on the entire surface (a case where the entire surface is observed even slightly) is observed.

<實施例2> <Example 2>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,除了(A)聚合物膜之形成所使用之溶劑係調製為PVA8質量%水溶液,且聚合物膜之厚度變更為2.5μm以外,其他皆與實施例1相同,形成聚合物膜。 On the main surface of either side of the rolled copper foil (JX Metal Co., Ltd., TPC foil) with a thickness of 12 μm, except for (A) the formation of the polymer film, the solvent used was prepared as a PVA 8% by mass aqueous solution, and the polymer film The thickness was changed to 2.5 μm, and the others were the same as in Example 1, and a polymer film was formed.

對於所得之散熱用銅箔,評估聚合物膜之厚度、熱成像表示溫度、塵化。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例1之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. The surface roughness Ra and Rz of the plated surface and the surface area ratio are the values of the copper foil for heat dissipation of Example 1.

<實施例3> <Example 3>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,除了(A)聚合物膜之形成所使用之溶劑係調製為PVA8質量%水溶液,且聚合物膜之厚度變更為3.5μm以外,其他皆與實施例1相同,形成聚合物膜。 On the main surface of either side of the rolled copper foil (JX Metal Co., Ltd., TPC foil) with a thickness of 12 μm, except for (A) the formation of the polymer film, the solvent used was prepared as a PVA 8% by mass aqueous solution, and the polymer film The thickness was changed to 3.5 μm, and the others were the same as in Example 1, and a polymer film was formed.

對於所得之散熱用銅箔,評估聚合物膜之厚度、熱成像表示溫度、塵化。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例1之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. The surface roughness Ra and Rz of the plated surface and the surface area ratio are the values of the copper foil for heat dissipation of Example 1.

<實施例4> <Example 4>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,除了(A)聚合物膜之形成所使用之溶劑係調製為PVA10質量%水溶液,且聚合物膜之厚度變更為5.0μm以外,其他皆與實施例1相同,形成聚合物膜。 On the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., TPC foil) with a thickness of 12 μm, except for (A) the formation of the polymer film, the solvent used was prepared as a PVA 10% by mass aqueous solution, and the polymer film The thickness was changed to 5.0 μm, and the others were the same as in Example 1 to form a polymer film.

對於所得之散熱用銅箔,評估聚合物膜之厚度、熱成像表示溫度、塵化。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例1之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. The surface roughness Ra and Rz of the plated surface and the surface area ratio are the values of the copper foil for heat dissipation of Example 1.

<實施例5> <Example 5>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,在下述所示條件範圍內,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、及聚合物膜(PVA)。使用之鍍浴組成及鍍條件、聚合物膜之形成條件,如以下所述。又,藉由儀表測厚儀對於形成聚合物膜前所得之銅箔(粗化粒子層及被覆層)與實施例5所得之散熱用銅箔之厚度分別進行3點測定,並分別算出其3點之平均值。接著,由前述散熱用銅箔之厚度之平均值,扣除前述銅箔之厚度之平均值,從而算出聚合物膜之厚度(平均厚度)。 A roughened particle layer (Cu) and a coating layer (Cu-Ni) are sequentially formed on the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., TPC foil) of 12 μm thickness within the range of conditions shown below -Co; Ni-Co), and polymer film (PVA). The composition of the plating bath used, the plating conditions, and the formation conditions of the polymer film are as follows. Furthermore, the thickness of the copper foil (roughened particle layer and coating layer) obtained before the formation of the polymer film and the thickness of the copper foil for heat dissipation obtained in Example 5 were measured by a meter thickness gauge at three points, and their values were calculated respectively. The average of the points. Next, the thickness of the polymer film (average thickness) is calculated by subtracting the average of the thickness of the copper foil from the average of the thickness of the copper foil for heat dissipation.

[鍍浴組成及鍍條件] [Composition of plating bath and plating conditions]

(A)粗化粒子層1之形成(鍍Cu) (A) Formation of roughened particle layer 1 (Cu plating)

液體組成:銅11g/L;硫酸50g/L Liquid composition: copper 11g/L; sulfuric acid 50g/L

電流密度:40A/dm2 Current density: 40A/dm 2

液溫:常溫 Liquid temperature: normal temperature

時間:1秒 Time: 1 second

次數:2次 Times: 2 times

(B)粗化粒子層2之形成(鍍Cu) (B) Formation of roughened particle layer 2 (Cu plating)

液體組成:銅20g/L;硫酸100g/L Liquid composition: copper 20g/L; sulfuric acid 100g/L

電流密度:19A/dm2 Current density: 19A/dm 2

液溫:50℃ Liquid temperature: 50℃

時間:4.5秒 Time: 4.5 seconds

次數:1次 Times: 1 time

(C)被覆下層之形成(鍍Cu-Ni-Co) (C) Formation of coating underlayer (Cu-Ni-Co plating)

液體組成:銅15.5g/L;鎳9.5g/L;鈷7.5g/L Liquid composition: copper 15.5g/L; nickel 9.5g/L; cobalt 7.5g/L

電流密度:15A/dm2 Current density: 15A/dm 2

pH:2.5 pH: 2.5

液溫:36℃ Liquid temperature: 36℃

時間:0.79秒 Time: 0.79 seconds

次數:2次 Times: 2 times

(D)被覆上層之形成(鍍Ni-Co) (D) Formation of overlying coating (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:11.9A/dm2 Current density: 11.9A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:1秒 Time: 1 second

次數:2次 Times: 2 times

(E)聚合物膜之形成(PVA) (E) Formation of polymer film (PVA)

溶劑:PVA6質量%水溶液 Solvent: PVA6 mass% aqueous solution

塗佈方法:金屬製塗佈器 Coating method: metal applicator

膜之厚度:1.0μm Film thickness: 1.0μm

首先,形成聚合物膜前,對於被覆層之鍍處理面,進行表 面積比之評估。對於所得之散熱用銅箔,評估聚合物膜之厚度、熱成像表示溫度、塵化。其結果,如表1所示。 First, before forming the polymer film, the surface area ratio of the coating layer was evaluated. For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1.

<實施例6> <Example 6>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,除了(E)聚合物膜之形成所使用之溶劑調製為PVA10質量%水溶液,且聚合物膜之厚度變更為5.0μm以外,其他皆與實施例5相同,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、及聚合物膜(PVA)。 On the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) with a thickness of 12 μm, except that (E) the solvent used for the formation of the polymer film is prepared as a PVA 10% by mass aqueous solution, and the polymer The thickness of the film was changed to 5.0 μm, and the others were the same as in Example 5. A roughened particle layer (Cu), a coating layer (Cu-Ni-Co; Ni-Co), and a polymer film (PVA) were formed in this order.

首先,對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面積比係實施例5之散熱用銅箔之值。 First, for the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. The surface area ratio of the plated surface is the value of the copper foil for heat dissipation of Example 5.

<實施例7> <Example 7>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,在下述所示條件範圍內,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、防鏽層、及聚合物膜(PVA)。所使用之鍍浴組成及鍍條件、聚合物膜之形成條件,如以下所述。又,藉由儀表測厚儀對於形成聚合物膜前所得之銅箔(粗化粒子層、被覆層、及防鏽層)與實施例7所得之散熱用銅箔之厚度分別進行3點測定,並分別算出其3點之平均值。接著,由前述散熱用銅箔之厚度之平均值,扣除前述銅箔之厚度之平均值,從而算出聚合物膜之厚度(平均厚度)。 A roughened particle layer (Cu) and a coating layer (Cu) are sequentially formed on the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) of 12 μm thickness within the range of conditions shown below -Ni-Co; Ni-Co), anti-rust layer, and polymer film (PVA). The composition of the plating bath used, the plating conditions, and the formation conditions of the polymer film are as follows. Furthermore, the thickness of the copper foil (roughened particle layer, coating layer, and rust prevention layer) obtained before the formation of the polymer film and the thickness of the copper foil for heat dissipation obtained in Example 7 were each measured by a meter thickness gauge at three points, And calculate the average of its 3 points respectively. Next, the thickness of the polymer film (average thickness) is calculated by subtracting the average of the thickness of the copper foil from the average of the thickness of the copper foil for heat dissipation.

[鍍浴組成及鍍條件] [Composition of plating bath and plating conditions]

(A)粗化粒子層1之形成(鍍Cu) (A) Formation of roughened particle layer 1 (Cu plating)

液體組成:銅11g/L;硫酸50g/L Liquid composition: copper 11g/L; sulfuric acid 50g/L

電流密度:45A/dm2 Current density: 45A/dm 2

液溫:常溫 Liquid temperature: normal temperature

時間:0.68秒 Time: 0.68 seconds

次數:2次 Times: 2 times

(B)粗化粒子層2之形成(鍍Cu) (B) Formation of roughened particle layer 2 (Cu plating)

液體組成:銅20g/L;硫酸100g/L Liquid composition: copper 20g/L; sulfuric acid 100g/L

電流密度:4.11A/dm2 Current density: 4.11A/dm 2

液溫:50℃ Liquid temperature: 50℃

時間:1.44秒 Time: 1.44 seconds

次數:2次 Times: 2 times

(C)被覆下層之形成(鍍Cu-Ni-Co) (C) Formation of coating underlayer (Cu-Ni-Co plating)

液體組成:銅15.5g/L;鎳9.5g/L;鈷7.5g/L Liquid composition: copper 15.5g/L; nickel 9.5g/L; cobalt 7.5g/L

電流密度:30.3A/dm2 Current density: 30.3A/dm 2

pH:2.5 pH: 2.5

液溫:36℃ Liquid temperature: 36℃

時間:0.5秒 Time: 0.5 seconds

次數:2次 Times: 2 times

(D)被覆上層1之形成(鍍Ni-Co) (D) Formation of coated upper layer 1 (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:13.7A/dm2 Current density: 13.7A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:0.34秒 Time: 0.34 seconds

次數:1次 Times: 1 time

(E)被覆上層2之形成(鍍Ni-Co) (E) Formation of coated upper layer 2 (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:14.9A/dm2 Current density: 14.9A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:0.34秒 Time: 0.34 seconds

次數:1次 Times: 1 time

(F)防鏽層之形成 (F) Formation of anti-rust layer

液體組成:重鉻酸鉀1~10g/L;鋅0~5g/L Liquid composition: potassium dichromate 1~10g/L; zinc 0~5g/L

pH:3~4 pH: 3~4

液溫:50~60℃ Liquid temperature: 50~60℃

電流密度:0~2A/dm2(為了電解鉻酸鹽處理) Current density: 0~2A/dm 2 (for electrolytic chromate treatment)

庫侖量:0~2As/dm2(為了電解鉻酸鹽處理) Coulomb volume: 0~2As/dm 2 (for electrolytic chromate treatment)

(G)聚合物膜之形成(PVA) (G) Formation of polymer film (PVA)

溶劑:PVA4質量%水溶液 Solvent: PVA4 mass% aqueous solution

塗佈方法:金屬製塗佈器 Coating method: metal applicator

膜之厚度:1.0μm Film thickness: 1.0μm

首先,形成防鏽層之前,對於被覆層之鍍處理面進行表面粗度Ra及Rz及表面積比之評估。此外,對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。 First, before forming the anti-rust layer, the surface roughness Ra and Rz of the coating layer and the surface area ratio were evaluated. In addition, the obtained copper foil for heat dissipation was evaluated for the thickness of the polymer film, thermal imaging temperature and dusting. The results are shown in Table 1.

<實施例8> <Example 8>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,除了(G)聚合物膜之形成所使用之溶劑係調製為PVA6質量%水溶液,且聚合物膜之厚度變更為1.5μm以外,其他皆與實施例7相同,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、防鏽層、及聚合物膜(PVA)。 On the main surface on either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) with a thickness of 12 μm, except for (G), the solvent used for the formation of the polymer film is prepared as a PVA 6% by mass aqueous solution and polymerized The thickness of the film was changed to 1.5 μm, and the others were the same as in Example 7. A coarse particle layer (Cu), a coating layer (Cu-Ni-Co; Ni-Co), a rust prevention layer, and a polymer were formed in this order. Membrane (PVA).

對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例7之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. In addition, the surface roughness Ra and Rz and the surface area ratio of the plated surface are the values of the copper foil for heat radiation of Example 7.

<實施例9> <Example 9>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,除了(G)聚合物膜之形成所使用之溶劑係調製為PVA8質量%水溶液,且聚合物膜之厚度變更為2.0μm以外,其他皆與實施例7相同,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、防鏽層、及聚合物膜(PVA)。 On the main surface on either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) with a thickness of 12 μm, except for (G), the solvent used for the formation of the polymer film is prepared as a PVA 8% by mass aqueous solution and polymerized The thickness of the film was changed to 2.0 μm, and the others were the same as in Example 7. A coarse particle layer (Cu), a coating layer (Cu-Ni-Co; Ni-Co), a rust prevention layer, and a polymer were formed in this order. Membrane (PVA).

對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例7之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. The surface roughness Ra and Rz of the plated surface and the surface area ratio are the values of the copper foil for heat dissipation of Example 7.

<實施例10> <Example 10>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,除了(G)聚合物膜之形成所使用之溶劑係調製為PVA8質量%水溶液,且聚合物膜之厚度變更為2.5μm以外,其他皆與實施例7相同,依序形 成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、防鏽層、及聚合物膜(PVA)。 On the main surface on either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) with a thickness of 12 μm, except for (G), the solvent used for the formation of the polymer film is prepared as a PVA 8% by mass aqueous solution and polymerized The thickness of the film was changed to 2.5 μm, and the others were the same as in Example 7. A coarse particle layer (Cu), a coating layer (Cu-Ni-Co; Ni-Co), a rust prevention layer, and a polymer were formed in this order. Membrane (PVA).

對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例7之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. In addition, the surface roughness Ra and Rz and the surface area ratio of the plated surface are the values of the copper foil for heat radiation of Example 7.

<實施例11> <Example 11>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,除了(G)聚合物膜之形成所使用之溶劑係調製為PVA10質量%水溶液,且聚合物膜之厚度變更為3.0μm以外,其他皆與實施例7相同,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、防鏽層、及聚合物膜(PVA)。 On the main surface on either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) with a thickness of 12 μm, the solvent used for the formation of (G) polymer film was prepared as a PVA 10% by mass aqueous solution and polymerized The thickness of the film was changed to 3.0 μm, and the others were the same as in Example 7. A coarse particle layer (Cu), a coating layer (Cu-Ni-Co; Ni-Co), a rust prevention layer, and a polymer were formed in this order. Membrane (PVA).

對於所得之散熱用銅箔,進行聚合物膜之厚度、熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例7之散熱用銅箔之值。 For the obtained copper foil for heat dissipation, the thickness of the polymer film, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1. In addition, the surface roughness Ra and Rz and the surface area ratio of the plated surface are the values of the copper foil for heat radiation of Example 7.

<比較例1> <Comparative Example 1>

對於實施例1所使用之壓延銅箔(JX金屬股份有限公司,TPC箔),進行表面粗度Ra及Rz、表面積比、熱成像表示溫度、塵化之評估。其結果,如表1所示。 The rolled copper foil (JX Metal Co., Ltd., TPC foil) used in Example 1 was evaluated for surface roughness Ra and Rz, surface area ratio, thermal imaging temperature, and dusting. The results are shown in Table 1.

<比較例2> <Comparative Example 2>

12μm厚度之壓延銅箔(JX金屬股份有限公司,TPC箔)之任一側之主表面上,在下述所示條件範圍內,依序形成粗化粒子層(Cu)及被覆層(Cu-Ni-Co;Ni-Co)。使用之鍍浴組成及鍍條件,如以下所述。 A roughened particle layer (Cu) and a coating layer (Cu-Ni) are sequentially formed on the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., TPC foil) of 12 μm thickness within the range of conditions shown below -Co; Ni-Co). The composition and plating conditions of the plating bath used are as follows.

[鍍浴組成及鍍條件] [Composition of plating bath and plating conditions]

(A)粗化粒子層1之形成(鍍Cu) (A) Formation of roughened particle layer 1 (Cu plating)

液體組成:銅11g/L;硫酸50g/L Liquid composition: copper 11g/L; sulfuric acid 50g/L

電流密度:40A/dm2 Current density: 40A/dm 2

液溫:常溫 Liquid temperature: normal temperature

時間:1秒 Time: 1 second

次數:2次 Times: 2 times

(B)粗化粒子層2之形成(鍍Cu) (B) Formation of roughened particle layer 2 (Cu plating)

液體組成:銅20g/L;硫酸100g/L Liquid composition: copper 20g/L; sulfuric acid 100g/L

電流密度:19A/dm2 Current density: 19A/dm 2

液溫:50℃ Liquid temperature: 50℃

時間:4.5秒 Time: 4.5 seconds

次數:1次 Times: 1 time

(C)被覆下層之形成(鍍Cu-Ni-Co) (C) Formation of coating underlayer (Cu-Ni-Co plating)

液體組成:銅15.5g/L;鎳9.5g/L;鈷7.5g/L Liquid composition: copper 15.5g/L; nickel 9.5g/L; cobalt 7.5g/L

電流密度:15A/dm2 Current density: 15A/dm 2

pH:2.5 pH: 2.5

液溫:36℃ Liquid temperature: 36℃

時間:0.79秒 Time: 0.79 seconds

次數:2次 Times: 2 times

(D)被覆上層之形成(鍍Ni-Co) (D) Formation of overlying coating (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:11.9A/dm2 Current density: 11.9A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:1秒 Time: 1 second

次數:2次 Times: 2 times

對於所得之散熱用銅箔,評估表面積比、熱成像表示溫度、及塵化。其結果,如表1所示。 For the obtained copper foil for heat dissipation, the surface area ratio, thermal imaging temperature and dusting were evaluated. The results are shown in Table 1.

<比較例3> <Comparative Example 3>

12μm厚度之壓延銅箔(JX金屬股份有限公司,HA-V2箔)之任一側之主表面上,在下述所示條件範圍內,依序形成粗化粒子層(Cu)、被覆層(Cu-Ni-Co;Ni-Co)、及防鏽層。使用之鍍浴組成及鍍條件,如以下所述。 A roughened particle layer (Cu) and a coating layer (Cu) are sequentially formed on the main surface of either side of a rolled copper foil (JX Metal Co., Ltd., HA-V2 foil) of 12 μm thickness within the range of conditions shown below -Ni-Co; Ni-Co), and anti-rust layer. The composition and plating conditions of the plating bath used are as follows.

[鍍浴組成及鍍條件] [Composition of plating bath and plating conditions]

(A)粗化粒子層1之形成(鍍Cu) (A) Formation of roughened particle layer 1 (Cu plating)

液體組成:銅11g/L;硫酸50g/L Liquid composition: copper 11g/L; sulfuric acid 50g/L

電流密度:45A/dm2 Current density: 45A/dm 2

液溫:常溫 Liquid temperature: normal temperature

時間:0.68秒 Time: 0.68 seconds

次數:2次 Times: 2 times

(B)粗化粒子層2之形成(鍍Cu) (B) Formation of roughened particle layer 2 (Cu plating)

液體組成:銅20g/L;硫酸100g/L Liquid composition: copper 20g/L; sulfuric acid 100g/L

電流密度:4.11A/dm2 Current density: 4.11A/dm 2

液溫:50℃ Liquid temperature: 50℃

時間:1.44秒 Time: 1.44 seconds

次數:2次 Times: 2 times

(C)被覆下層之形成(鍍Cu-Ni-Co) (C) Formation of coating underlayer (Cu-Ni-Co plating)

液體組成:銅15.5g/L;鎳9.5g/L;鈷7.5g/L Liquid composition: copper 15.5g/L; nickel 9.5g/L; cobalt 7.5g/L

電流密度:30.3A/dm2 Current density: 30.3A/dm 2

pH:2.5 pH: 2.5

液溫:36℃ Liquid temperature: 36℃

時間:0.5秒 Time: 0.5 seconds

次數:2次 Times: 2 times

(D)被覆上層1之形成(鍍Ni-Co) (D) Formation of coated upper layer 1 (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:13.7A/dm2 Current density: 13.7A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:0.34秒 Time: 0.34 seconds

次數:1次 Times: 1 time

(E)被覆上層2之形成(鍍Ni-Co) (E) Formation of coated upper layer 2 (Ni-Co plating)

液體組成:鎳13g/L;鈷3g/L Liquid composition: nickel 13g/L; cobalt 3g/L

電流密度:14.9A/dm2 Current density: 14.9A/dm 2

pH:2.5 pH: 2.5

液溫:40℃ Liquid temperature: 40℃

時間:0.34秒 Time: 0.34 seconds

次數:1次 Times: 1 time

(F)防鏽層之形成 (F) Formation of anti-rust layer

液體組成:重鉻酸鉀1~10g/L;鋅0~5g/L Liquid composition: potassium dichromate 1~10g/L; zinc 0~5g/L

pH:3~4 pH: 3~4

液溫:50~60℃ Liquid temperature: 50~60℃

電流密度:0~2A/dm2(為了電解鉻酸鹽處理) Current density: 0~2A/dm 2 (for electrolytic chromate treatment)

庫侖量:0~2As/dm2(為了電解鉻酸鹽處理) Coulomb volume: 0~2As/dm 2 (for electrolytic chromate treatment)

對於所得之散熱用銅箔,進行熱成像表示溫度及塵化之評估。其結果,如表1所示。又,鍍處理面之表面粗度Ra及Rz及表面積比係實施例7之散熱用銅箔之值。 The obtained copper foil for heat dissipation was evaluated by thermal imaging to indicate the temperature and dusting. The results are shown in Table 1. The surface roughness Ra and Rz of the plated surface and the surface area ratio are the values of the copper foil for heat dissipation of Example 7.

Figure 107146224-A0202-12-0029-1
Figure 107146224-A0202-12-0029-1
Figure 107146224-A0202-12-0030-2
Figure 107146224-A0202-12-0030-2

實施例1~11,可確認到由於具有聚合物膜,故發熱體所生之熱可良好地散熱。此外,實施例2~4、6、9~11,可確認到由於聚合物膜之厚度係2.0μm以上,故發熱體所生之熱可進一步良好地散熱。進一步,實施例5~11,可確認到由於係在Ni-Co所成被覆層上具有聚合物膜,故發熱體所生之熱可更進一步良好地散熱,且塵化之評估亦良好。 In Examples 1 to 11, it can be confirmed that the heat generated by the heating element can be dissipated well due to the polymer film. In addition, in Examples 2 to 4, 6, and 9 to 11, it can be confirmed that the thickness of the polymer film is 2.0 μm or more, so that the heat generated by the heating element can be further dissipated. Further, in Examples 5 to 11, it can be confirmed that since the polymer film is formed on the coating layer formed by Ni-Co, the heat generated by the heating element can be further dissipated well, and the evaluation of dusting is also good.

【產業利用性】【Industrial Utilization】

使用本發明之一實施型態之散熱用銅箔之散熱部件中,散熱特性優異。藉此,本發明提供一種有用之技術,其在電子設備之開發推進的同時,因應小型化或高機能化等之要求,不會因所使用之電子部件之發熱而導致故障缺陷等。 The heat dissipation member using the copper foil for heat dissipation according to an embodiment of the present invention has excellent heat dissipation characteristics. In this way, the present invention provides a useful technology that, while advancing the development of electronic equipment, meets the requirements of miniaturization or high performance, and does not cause malfunctions and defects due to the heat generated by the electronic components used.

Claims (18)

一種散熱用銅箔,其特徵係具有:銅箔基材;及前述銅箔基材之至少任一主表面上之鍍處理層;前述鍍處理層上,係具有聚合物膜;前述鍍處理層之鍍處理面之表面粗度Ra係0.30~1.50。 A copper foil for heat dissipation, comprising: a copper foil substrate; and a plating treatment layer on at least any one main surface of the copper foil substrate; a polymer film on the plating treatment layer; and the plating treatment layer The surface roughness Ra of the plated surface is 0.30~1.50. 如申請專利範圍第1項所記載之散熱用銅箔,其中,前述聚合物膜之厚度,係0.1μm~10μm。 The copper foil for heat dissipation as described in item 1 of the patent application range, wherein the thickness of the polymer film is 0.1 μm to 10 μm. 如申請專利範圍第1項所記載之散熱用銅箔,其中,前述聚合物膜之厚度,係0.5μm~8μm。 The copper foil for heat dissipation as described in item 1 of the patent application range, wherein the thickness of the polymer film is 0.5 μm to 8 μm. 如申請專利範圍第1項所記載之散熱用銅箔,其中,前述聚合物膜之厚度,係1μm~5μm。 The copper foil for heat dissipation as described in item 1 of the patent application range, wherein the thickness of the polymer film is 1 μm to 5 μm. 如申請專利範圍第1~4項中任一項所記載之散熱用銅箔,其中,前述聚合物膜,係包含在重複單元中至少具有1種雜原子之聚合物。 The copper foil for heat dissipation as described in any one of items 1 to 4 of the patent application range, wherein the polymer film includes a polymer having at least one kind of hetero atom in the repeating unit. 如申請專利範圍第5項所記載之散熱用銅箔,其中,前述聚合物,係在前述重複單元中包含選自羰基、羧基、醚基、環氧基、羥基、及鹵素所成群中至少1種。 The copper foil for heat dissipation as described in item 5 of the patent application range, wherein the polymer contains at least one selected from the group consisting of carbonyl group, carboxyl group, ether group, epoxy group, hydroxyl group and halogen in the repeating unit 1 kind. 如申請專利範圍第5項所記載之散熱用銅箔,其中,前述聚合物,係包含選自聚酯樹脂、聚碳酸酯樹脂、聚乙烯醇樹脂、纖維素樹脂、 環氧樹脂、尼龍樹脂、聚醚樹脂、及氟樹脂所成群中至少1種。 The copper foil for heat dissipation as described in item 5 of the patent application scope, wherein the polymer includes a resin selected from polyester resin, polycarbonate resin, polyvinyl alcohol resin, cellulose resin, At least one member selected from the group consisting of epoxy resin, nylon resin, polyether resin, and fluorine resin. 如申請專利範圍第5項所記載之散熱用銅箔,其中,前述聚合物,係包含選自聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚對苯二甲酸丙二酯、乙酸纖維素、三乙酸纖維素、玻璃紙、雙酚A型環氧樹脂、聚己內醯胺、聚十二烷醯胺、聚環氧乙烷、聚環氧丙烷、聚偏二氟乙烯、及聚四氟乙烯所成群中至少1種。 The copper foil for heat dissipation as described in item 5 of the patent application range, wherein the polymer includes a group selected from polyethylene terephthalate, polybutylene terephthalate, and polypropylene terephthalate Ester, cellulose acetate, cellulose triacetate, cellophane, bisphenol A epoxy resin, polycaprolactam, polydodecylamide, polyethylene oxide, polypropylene oxide, polyvinylidene fluoride , And at least one of the polytetrafluoroethylene group. 如申請專利範圍第1項所記載之散熱用銅箔,其中,前述鍍處理層之鍍處理面之表面粗度Rz係2.50~9.50。 The copper foil for heat dissipation as described in item 1 of the patent application scope, wherein the surface roughness Rz of the plating surface of the plating layer is 2.50 to 9.50. 如申請專利範圍第1項所記載之散熱用銅箔,其中,前述鍍處理層,係具有粗化粒子層。 The copper foil for heat dissipation as described in item 1 of the patent application range, wherein the plating layer has a roughened particle layer. 如申請專利範圍第10項所記載之散熱用銅箔,其中,前述鍍處理層,在前述粗化粒子層上係具有被覆層。 The copper foil for heat dissipation as described in item 10 of the patent application range, wherein the plating layer has a coating layer on the roughened particle layer. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層,係含有選自Cu、Zn、Ni、Co、Cr、W、及Fe所成群中至少1種。 The copper foil for heat dissipation as described in item 11 of the patent application range, wherein the coating layer contains at least one selected from the group consisting of Cu, Zn, Ni, Co, Cr, W, and Fe. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層,係含有Co及Ni。 The copper foil for heat dissipation as described in item 11 of the patent application range, wherein the coating layer contains Co and Ni. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層,係具有:被覆下層、及在該被覆下層上之被覆上層;前述被覆下層,係含有Cu、Co、及Ni; 前述被覆上層,係含有Co及Ni。 The copper foil for heat dissipation as described in item 11 of the patent application scope, wherein the coating layer has: a coating lower layer and a coating upper layer on the coating lower layer; the coating lower layer contains Cu, Co, and Ni; The aforementioned coating upper layer contains Co and Ni. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層之厚度,係0.001μm~1.0μm。 The copper foil for heat dissipation as described in item 11 of the patent application range, wherein the thickness of the coating layer is 0.001 μm to 1.0 μm. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層之厚度,係0.002μm~0.5μm。 The copper foil for heat dissipation as described in item 11 of the patent application range, wherein the thickness of the coating layer is 0.002 μm to 0.5 μm. 如申請專利範圍第11項所記載之散熱用銅箔,其中,前述被覆層之厚度,係0.005μm~0.3μm。 The copper foil for heat dissipation as described in item 11 of the patent application range, wherein the thickness of the coating layer is 0.005 μm to 0.3 μm. 一種散熱部件,其特徵係具備申請專利範圍第1~17項中任一項所記載之散熱用銅箔。 A heat dissipation component characterized by having the copper foil for heat dissipation described in any one of the items 1 to 17 of the patent application range.
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