TWI682894B - Hydrogen recovery and reuse system - Google Patents

Abstract

A hydrogen recovery and reuse system includes a processing device, an electrochemical hydrogen purification device, and a water removal device. The processing device is used to receive and process a mixed gas and remove harmful substances. The processing device is connected and used to remove non-hydrogen gas and impurities in the mixed gas. The water removal device is connected to the electrochemical hydrogen purification device and used to remove moisture in the purified hydrogen.

Description

Hydrogen recovery and reuse system

The invention relates to a hydrogen recovery and reuse system, in particular to a hydrogen recovery and reuse system that can effectively recover and reuse hydrogen and can purify hydrogen with high purity.

After the general semiconducting process body and the photoelectric process are completed, the remaining process gas (i.e., exhaust gas) usually contains ammonia (NH ₃ ), silicon methane (SiH ₄ ), disilyl methane (Si ₂ H ₆ ), phosphating Hydrogen (PH ₃ ), arsine (AsH ₃ ), trimethylgallium (Ga(CH ₃ ) ₃ ) and high-concentration hydrogen, including ammonia, silane, methane, phosphine, arsenide And trimethylgallium are environmental pollutants.

At present, the treatment method for the above environmental pollutants is usually to directly discharge the exhaust gas into the atmosphere after being washed with sulfuric acid or hypochlorous acid. However, this approach has many disadvantages. For example, the nitrogen concentration in the treated wastewater reaches tens of thousands of ppm, which is far higher than the legal standards. In addition, hydrogen is directly discharged into the atmosphere with the risk of explosion and waste of hydrogen.

In addition, in the semiconductor process, the photoelectric process or the chemical plant process, the relevant industry players usually treat the remaining process waste gas (such as the aforementioned various gases) through combustion, so the process is more complicated and the equipment and processing costs are relatively relatively high. expensive.

So, in order to effectively solve the above problems, the main purpose of the present invention is to provide A hydrogen recovery and reuse system that efficiently recovers and reuses hydrogen.

The secondary object of the present invention is to provide a hydrogen recovery and reuse system that can purify hydrogen with high purity.

The secondary objective of the present invention is to provide a hydrogen recovery and reuse system with a relatively low recovery process cost.

To achieve the above object, the present invention provides a hydrogen recovery and reuse system, which includes a processing device, an electrochemical hydrogen purification device and a water removal device, the processing device is used to receive and process a mixed gas and to remove harmful Substances in the electrochemical treatment unit. The electrochemical hydrogen purification device is connected to the treatment device and used to remove non-hydrogen gas in the mixed gas. The water removal device is connected to the electrochemical hydrogen purification device and used To remove the water in the purified hydrogen.

Through the design of the system of the present invention, the processing device first receives and processes the mixed gas discharged in a process, and removes harmful substances such as nitrides, sulfides, etc. in the mixed gas, and then uses the The electrochemical hydrogen purification device removes non-hydrogen gas and impurities in the mixed gas, and then uses the pump device to provide pressure to push the hydrogen in the electrochemical hydrogen purification device to the water removal device, and finally uses the The water removal device removes the water in the purified hydrogen, so that the hydrogen with higher purity can be separated, so that the hydrogen can be recovered and reused effectively.

2‧‧‧Hydrogen recovery and reuse system

20‧‧‧Processing device

21‧‧‧Electrochemical hydrogen purification device

22‧‧‧Pump device

23‧‧‧water removal device

24‧‧‧Adsorption components

3‧‧‧ Mixed gas

4‧‧‧hydrogen

40‧‧‧ hydrogen ion

41‧‧‧Electronics

5‧‧‧Pipeline

6‧‧‧ Nitrogen

7‧‧‧ Proton exchange membrane

70‧‧‧Anode catalyst reaction layer

71‧‧‧ Cathode catalyst reaction layer

8‧‧‧External power supply

90‧‧‧ Intake channel

91‧‧‧ Outlet channel

Figure 1 is a block schematic diagram of a preferred embodiment of the hydrogen recovery and reuse system of the present invention; Figure 2 is a electrochemical hydrogen purification of a preferred embodiment of the hydrogen recovery and reuse system of the present invention 3 is a block diagram of another embodiment of the hydrogen recovery and reuse system of the present invention.

The above objects, structural and functional characteristics of the present invention will be described based on the preferred embodiments of the accompanying drawings.

Please refer to Figures 1 and 2 for a block schematic diagram of a preferred embodiment of the hydrogen recovery and recycling system 2 of the present invention and an implementation schematic diagram of an electrochemical hydrogen purification device. It includes a processing device 20, a hydrogen purification device 21 and a water removal device 23. In the present invention, the hydrogen recovery and reuse system 2 is a mixed gas 3 that contains hydrogen 4, nitrogen 6, ammonia and other gases The hydrogen gas 4 is recovered and reused. The mixed gas 3 is, for example, the waste gas remaining after the semiconductor process or the photoelectric process is completed, which includes hydrogen gas 4, nitrogen gas 6, ammonia gas, silane, dimethan, phosphine, Arsenide, trimethylgallium, or a combination thereof; first, the aforementioned mixed gas 3 is first discharged through a pipeline 5 to the processing device 20, which is selected as a local scrubber, The mixed gas 3 is preliminarily preliminarily passed through the scrubber in this area, so as to remove the toxic gas or object particles (such as dust...) or harmful substances (such as nitrides, sulfides, etc.) in the mixed gas 3, Leaving harmless gas into the electrochemical hydrogen purification device 21, it should be noted that the area of the washing tower can be divided into electric hot water washing type, filled water washing type, dry adsorption type, etc. according to the principle, and the hydrogen recovery and reuse of the present invention In the system 2, the type of the mixed gas 3 needs to be processed depending on the user's needs. Therefore, the types of the aforementioned processing device 20 are included in the scope of the present invention, which will be described first; then, after cleaning The mixed gas 3 is sent to the electricity through the pipeline 5 Chemical hydrogen purification device 21, and use the electrochemical hydrogen purification device 21 to remove the non-hydrogen 4 gas and other impurities in the mixed gas 3, in particular, the electrochemical hydrogen purification device 21 chooses to use electrochemical In order to remove the non-hydrogen 4 gas and impurities in the mixed gas 3, in other words, the mixed gas 3 in the electrochemical hydrogen purification device 21 electrochemically removes gases other than hydrogen 4 (such as hydrogen 4. Nitrogen 6, ammonia...) and impurities are removed and separated to keep only hydrogen 4 in the electrochemical hydrogen purification device 21, so far, all gases except hydrogen 4 in the mixed gas 3 have been separated It does not exist, and hydrogen 4 enters the water removal device 23 through the pipeline 5; please refer to FIG. 2 for further explanation. The electrochemical hydrogen purification device further has an air inlet passage 90 and a proton The exchange membrane 7, an anode catalyst reaction layer 70, a cathode catalyst reaction layer 71, an outlet channel 91 and an external power source 8, the inlet channel 90 communicates with the aforementioned processing device 20 and is processed in the processing device 20 Afterwards, the mixed gas 3 will enter the electrochemical hydrogen purification device 21 through the air inlet channel 90, and then use the proton exchange membrane 7 to block the gas other than the hydrogen 4, and can transmit a plurality of hydrogen ions 40 through the proton exchange membrane 7 and isolate When a plurality of electrons 41 pass through, the anode catalyst reaction layer 70 and the cathode catalyst reaction layer 71 are disposed on opposite sides of the proton exchange membrane 7, and platinum is provided on the anode and cathode catalyst reaction layers 70 and 71 ( Pt) or ruthenium (Ru) or other precious metals are used as a catalyst to perform an electrochemical reaction and diffuse a product (the product refers to hydrogen 4) through the gas outlet channel 91 to complete the removal of the mixed gas Non-hydrogen 4 gas and impurities in 3; then, before the hydrogen 4 enters the water removal device 23, it first passes through a pump device 22, and uses the pump device 22 to provide pressure to the hydrogen 4 purification device 21 Hydrogen 4 is pushed to the water removal device 23, because the hydrogen 4 separated in the electrochemical hydrogen purification device 21 is still Part of the water will exist, so the water needs to be removed through the water removal device 23, and the water removal device 23 chooses to use the method of freezing and water removal to remove the water in the purified hydrogen 4, so that the higher purity can be separated Hydrogen 4; In addition, please refer to FIG. 3 together. It should be noted that, in the present invention, an adsorption element 24 may further be connected to the water removal device 23. The adsorption element 24 is used to adsorb and purify The moisture in the hydrogen gas 4, that is to say, the adsorption element 24 can be used as an auxiliary element of the water removal device 23, so that the moisture removal rate in the separated hydrogen gas 4 is faster and the purity of the hydrogen gas 4 is higher. For the effect of multiplication, the adsorption element 24 can be selected from the following materials: activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber; in this way, through The various functions of the aforementioned devices are used to separate high-purity hydrogen 4 to form a highly efficient system for recycling hydrogen 4 and reusing it, and the cost of the recovery process is compared with the conventional hydrogen recovery method. It is also relatively inexpensive, greatly reducing the cost of hydrogen 4 recovery.

As described above, the present invention has the following advantages over conventional ones: 1. Effectively recover hydrogen and reuse it; 2. Can purify hydrogen with high purity; 3. Lower recovery process cost.

The present invention has been described in detail above, but the above is only one of the preferred embodiments of the present invention. When the scope of the present invention cannot be limited, that is, all changes and modifications made in accordance with the scope of the application of the present invention Etc., should still be covered by the patent of the present invention.

2‧‧‧Hydrogen recovery and reuse system

20‧‧‧Processing device

21‧‧‧Electrochemical hydrogen purification device

22‧‧‧Pump device

23‧‧‧water removal device

3‧‧‧ Mixed gas

4‧‧‧hydrogen

5‧‧‧Pipeline

Claims (5)

A hydrogen recycling system includes: a processing device for receiving and processing a mixed gas and for removing harmful substances; an electrochemical hydrogen purification device connected to the processing device for electrochemical hydrogen purification The device is used to remove the non-hydrogen gas in the mixed gas; a water removal device is connected to the electrochemical hydrogen purification device, the water removal device uses a frozen water removal method to remove the water in the purified hydrogen; A pumping device connected to the electrochemical hydrogen purification device, the pumping device is used to provide a pressure to push out the hydrogen in the electrochemical hydrogen purification device; and an adsorption element, and the pump The device is connected, and the adsorption element is used to adsorb the moisture in the purified hydrogen. The hydrogen recovery and reuse system according to claim 1, wherein the treatment device is selected as a local scrubber. The hydrogen recovery and reuse system according to claim 1, wherein the mixed gas includes but is not limited to hydrogen, nitrogen, ammonia, argon, silicon compound, phosphorus compound, arsenic compound, gallium compound, indium compound, or a combination thereof. The hydrogen recovery and reuse system according to claim 1, wherein the adsorption element is selected from activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene, or hollow fiber. The hydrogen recovery and reuse system according to claim 1, wherein the electrochemical hydrogen purification device further has an inlet channel, a proton exchange membrane, an anode catalyst reaction layer, a cathode catalyst reaction layer, and an outlet channel And an external power supply, the gas inlet channel communicates with the processing device, the proton exchange membrane is used to transmit a plurality of hydrogen ions and isolate the passage of a plurality of electrons, the anode catalyst reaction layer and the cathode catalyst reaction layer are located separately The relative two of the proton exchange membrane On the side, platinum (Pt) or ruthenium (Ru) or other precious metals are provided on the anode and cathode catalyst reaction layers as a catalyst to perform an electrochemical reaction and diffuse a product through the gas outlet channel.

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