TWI478864B - Hydrogen recycling system and power generating system - Google Patents

Hydrogen recycling system and power generating system Download PDF

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TWI478864B
TWI478864B TW101141676A TW101141676A TWI478864B TW I478864 B TWI478864 B TW I478864B TW 101141676 A TW101141676 A TW 101141676A TW 101141676 A TW101141676 A TW 101141676A TW I478864 B TWI478864 B TW I478864B
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hydrogen
ammonia
gas
oxide
power generation
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TW101141676A
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Chinese (zh)
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TW201418151A (en
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Yu Li Lin
Hui Ya Shih
ting wei Huang
Hong Ping Lin
Shou Nan Li
Min Yu Yen
Yen Hsun Chi
meng chang Lin
Wen An Hsieh
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Ind Tech Res Inst
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Priority to CN201210579017.8A priority patent/CN103803493B/en
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Description

氫氣回收系統與發電系統Hydrogen recovery system and power generation system

本發明是有關於一種氫氣回收系統與發電系統。The invention relates to a hydrogen recovery system and a power generation system.

在一般的半導製程體與光電製程結束後，剩餘的製程氣體(即廢氣)中通常含有氨氣(NH3 )、矽甲烷(SiH4 )、二矽甲烷(Si2 H6 )、磷化氫(PH3 )、砷化氫(AsH3 )、三甲基鎵(Ga(CH3 )3 )與高濃度的氫氣，其中氨氣、矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵皆為環境污染物。After the general semi-conducting process and the photoelectric process, the remaining process gas (ie, exhaust gas) usually contains ammonia (NH 3 ), methane (SiH 4 ), dimethane (Si 2 H 6 ), and phosphating. Hydrogen (PH 3 ), arsine (AsH 3 ), trimethylgallium (Ga(CH 3 ) 3 ) and high concentrations of hydrogen, among which ammonia, methane, methane, phosphine, arsine Trimethylgallium is an environmental pollutant.

目前，對於上述環境污染物的處理方式通常是將廢氣經過硫酸或次氯酸水洗之後直接排放至大氣中。然而，此處理方式具有許多缺點。例如，經處理後的廢水中的氮濃度達數萬ppm，遠高於法規標準。此外，氫氣被直接排放至大氣中具有爆炸的風險，且造成氫能的浪費。At present, the treatment of the above environmental pollutants is usually carried out by directly discharging the exhaust gas to the atmosphere after being washed with sulfuric acid or hypochlorous acid. However, this approach has a number of disadvantages. For example, the concentration of nitrogen in the treated wastewater is tens of thousands of ppm, which is much higher than regulatory standards. In addition, the direct release of hydrogen into the atmosphere has the risk of explosion and waste of hydrogen energy.

本發明實施例提供一種氫氣回收系統，其可自含有氫氣、氨氣與其他氣體的廢氣中回收氫氣。Embodiments of the present invention provide a hydrogen recovery system that recovers hydrogen from an exhaust gas containing hydrogen, ammonia, and other gases.

本發明實施例另提供一種發電系統，其可利用含有氫氣、氨氣與其他氣體的廢氣中的氫氣發電。Another embodiment of the present invention provides a power generation system that can generate electricity using hydrogen in an exhaust gas containing hydrogen, ammonia, and other gases.

本發明實施例提出一種氫氣回收系統，其適於自含有氫氣、氨氣與其他氣體的廢氣中回收氫氣，此氫氣回收系統包括吸附裝置、氨氣分解裝置以及濾氫裝置。吸附裝置用以吸附廢氣中的上述其他氣體。氨氣分解裝置與吸附裝 置連接，用以將氨氣分解為氮氣與氫氣。濾氫裝置與氨氣分解裝置連接，用以分離氮氣與氫氣。Embodiments of the present invention provide a hydrogen recovery system suitable for recovering hydrogen from an exhaust gas containing hydrogen, ammonia, and other gases, the hydrogen recovery system including an adsorption device, an ammonia gas decomposition device, and a hydrogen filtration device. The adsorption device is configured to adsorb the other gases in the exhaust gas. Ammonia gas decomposition device and adsorption device Connected to decompose ammonia into nitrogen and hydrogen. The hydrogen filtering unit is connected to the ammonia gas decomposition unit for separating nitrogen and hydrogen.

本發明實施例另提出一種發電系統，其適於利用含有氫氣、氨氣與其他氣體的廢氣中的氫氣發電。此發電系統包括吸附裝置、氨氣分解裝置以及燃料電池。吸附裝置用以吸附廢氣中的上述其他氣體。氨氣分解裝置與吸附裝置連接，用以將氨氣分解為氮氣與氫氣。燃料電池與氨氣分解裝置連接。Embodiments of the present invention further provide a power generation system adapted to generate electricity using hydrogen in an exhaust gas containing hydrogen, ammonia, and other gases. The power generation system includes an adsorption device, an ammonia gas decomposition device, and a fuel cell. The adsorption device is configured to adsorb the other gases in the exhaust gas. The ammonia gas decomposition device is connected to the adsorption device for decomposing the ammonia gas into nitrogen gas and hydrogen gas. The fuel cell is connected to an ammonia gas decomposition device.

為讓本發明實施例之上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。The above features and advantages of the embodiments of the present invention will become more apparent and understood.

圖1為依照本發明實施例所繪示的氫氣回收系統的方塊示意圖。請參照圖1，在本實施例中，氫氣回收系統10自含有氫氣、氨氣與其他氣體的廢氣100中回收氫氣。廢氣100例如是半導體製程或光電製程進行完成之後所剩餘的廢氣，其含有氫氣、氨氣以及其他製程氣體(例如矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵或這些氣體的組合)。由於氨氣、矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵皆會對環境造污染，且氫氣可再回收利用而具有經濟價值，因此本實施例的氫氣回收系統10即用以自廢氣100中回收氫氣且避免剩餘的氣體對環境造成污染。FIG. 1 is a block diagram of a hydrogen recovery system according to an embodiment of the invention. Referring to FIG. 1, in the present embodiment, the hydrogen recovery system 10 recovers hydrogen from the exhaust gas 100 containing hydrogen, ammonia, and other gases. The exhaust gas 100 is, for example, an exhaust gas remaining after the semiconductor process or the photoelectric process is completed, and contains hydrogen, ammonia, and other process gases (for example, methane, methane, phosphine, arsine, trimethylgal or these). Combination of gases). Since ammonia gas, methane methane, methane methane, phosphine, arsine, and trimethyl gallium all pollute the environment, and hydrogen can be recycled and has economic value, the hydrogen recovery system 10 of the present embodiment. That is, it is used to recover hydrogen from the exhaust gas 100 and to prevent the remaining gas from polluting the environment.

氫氣回收系統10包括吸附裝置102、氨氣分解裝置104以及濾氫裝置106。吸附裝置102與氨氣分解裝置104藉由管路108彼此連接，而氨氣分解裝置104與濾氫裝置 106則藉由管路110彼此連接。The hydrogen recovery system 10 includes an adsorption device 102, an ammonia decomposition device 104, and a hydrogen filtration device 106. The adsorption device 102 and the ammonia decomposition device 104 are connected to each other by a line 108, and the ammonia decomposition device 104 and the hydrogen filtration device 106 is connected to each other by a line 110.

吸附裝置102用以吸附廢氣100中除氫氣與氨氣以外的其他氣體。詳細地說，當使用氫氣回收系統10來回收廢氣100中的氫氣時，廢氣100先進入吸附裝置102中。吸附裝置102中具有可吸附廢氣100中除氫氣與氨氣以外的其他氣體的吸附材料。吸附材料可以是金屬氧化物(例如氧化銅、氧化鋅、氧化鐵、氧化鋁或氧化鎂)、沸石、活性碳或其組合。吸附材料的選擇可視廢氣100中的氣體種類而定，本發明實施例並未對此作限定。如此一來，當廢氣100進入吸附裝置102之後，除氫氣與氨氣以外的氣體可在此被吸附，而未被吸附的氫氣與氨氣則經由管路108進入氨氣分解裝置104。The adsorption device 102 is configured to adsorb gases other than hydrogen and ammonia in the exhaust gas 100. In detail, when the hydrogen recovery system 10 is used to recover the hydrogen in the exhaust gas 100, the exhaust gas 100 first enters the adsorption device 102. The adsorption device 102 has an adsorbent material that can adsorb other gases than the hydrogen gas and the ammonia gas in the exhaust gas 100. The adsorbent material can be a metal oxide (such as copper oxide, zinc oxide, iron oxide, aluminum oxide or magnesium oxide), zeolite, activated carbon or a combination thereof. The selection of the adsorbent material may be determined by the type of gas in the exhaust gas 100, which is not limited by the embodiment of the present invention. As a result, after the exhaust gas 100 enters the adsorption device 102, gases other than hydrogen and ammonia can be adsorbed therein, and the unadsorbed hydrogen and ammonia gas enter the ammonia decomposition device 104 via the line 108.

氨氣分解裝置104用以將氨氣分解為氮氣與氫氣。當氫氣與氨氣經由管路108進入氨氣分解裝置104之後，氨氣分解裝置104將氨氣分解為氮氣與氫氣。氨氣分解裝置104中的氨分解觸媒可以是金屬(例如鉑、銥、銠、鈀、鐵、鎳、銅、鈷等)或金屬氧化物(例如氧化鎳、氧化鐵、氧化銠、氧化銥、氧化鉑、氧化鈀等)。至此，廢氣100中會對環境造成污染的氣體(氨氣、矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵)皆已被吸附或分解而不存在，而氫氣與氮氣則經由管路110進入濾氫裝置106。The ammonia gas decomposition unit 104 is for decomposing ammonia gas into nitrogen gas and hydrogen gas. After the hydrogen and ammonia enter the ammonia decomposition unit 104 via the line 108, the ammonia decomposition unit 104 decomposes the ammonia into nitrogen and hydrogen. The ammonia decomposition catalyst in the ammonia gas decomposition device 104 may be a metal (for example, platinum, rhodium, ruthenium, palladium, iron, nickel, copper, cobalt, etc.) or a metal oxide (for example, nickel oxide, iron oxide, ruthenium oxide, ruthenium oxide). , platinum oxide, palladium oxide, etc.). At this point, the gases (ammonia, methane, methane, phosphine, arsine, trimethylgallium) that are polluting the environment in the exhaust gas 100 have been adsorbed or decomposed without being present, and hydrogen and nitrogen are present. Then, the hydrogen filtering device 106 is entered via the line 110.

濾氫裝置106用以分離氮氣與氫氣。當氫氣與氮氣則經由管路110進入濾氫裝置106之後，濾氫裝置106將氫氣與氮氣分離開。因此，經過濾氫裝置106而得到的氫氣 112可被回收並再利用。濾氫裝置106可以是濾氫薄膜，其例如為純鈀膜、鈀/銀膜、鈀/銅膜、鈀/金膜或含釩、鉭、鈮等金屬薄膜。濾氫裝置106也可以是變壓吸附床，其含有沸石或活性炭等分子篩材料。或者，濾氫裝置106也可以是濾氫薄膜與變壓吸附床的組合。此外，與氫氣分離的氮氣亦可視實際需求而被回收並再利用。Hydrogen filtering unit 106 is used to separate nitrogen and hydrogen. After hydrogen and nitrogen enter the hydrogen evolution unit 106 via line 110, the hydrogen filtration unit 106 separates the hydrogen from the nitrogen. Therefore, the hydrogen obtained by filtering the hydrogen device 106 112 can be recycled and reused. The hydrogen filtering device 106 may be a hydrogen sulfide film such as a pure palladium film, a palladium/silver film, a palladium/copper film, a palladium/gold film, or a metal thin film containing vanadium, niobium or tantalum. The hydrogen absorbing device 106 may also be a pressure swing adsorption bed containing a molecular sieve material such as zeolite or activated carbon. Alternatively, the hydrogen absorbing device 106 may also be a combination of a hydrogen absorbing membrane and a pressure swing adsorption bed. In addition, nitrogen separated from hydrogen can be recovered and reused according to actual needs.

特別一提的是，在氫氣回收系統10中，由於氨氣分解裝置104將氨氣分解為氫氣和氮氣，因此與廢氣100中的氫氣含量相比，經氫氣回收系統10回收的氫氣量可以增加，因而更具有經濟效益。In particular, in the hydrogen recovery system 10, since the ammonia gas decomposing device 104 decomposes the ammonia gas into hydrogen gas and nitrogen gas, the amount of hydrogen recovered by the hydrogen gas recovery system 10 can be increased as compared with the hydrogen gas content in the exhaust gas 100. Therefore, it is more economical.

上述的氫氣回收系統10可進一步與燃料電池作結合，以構成發電系統。以下將對此作進一步地說明。The hydrogen recovery system 10 described above can be further combined with a fuel cell to constitute a power generation system. This will be further explained below.

圖2為依照本發明實施例所繪示的發電系統的方塊示意圖。請參照圖2，氫氣回收系統10與燃料電池200藉由管路202連接而構成發電系統20。詳細地說，當廢氣100進入氫氣回收系統10之後，產生的氫氣112(如圖1所示)經由管路202進入燃料電池200並作為其燃料。也就是說，本發明實施例的發電系統20是利用製程廢氣中的氫氣來進行發電，且製程廢氣中對環境有害的氣體皆被吸附或分解，因此本發明實施例的發電系統20除了有效地利用製程廢氣中的氫氣來發電之外，亦解決了製程廢氣對環境造成污染的問題。2 is a block diagram of a power generation system according to an embodiment of the invention. Referring to FIG. 2, the hydrogen recovery system 10 and the fuel cell 200 are connected by a line 202 to constitute a power generation system 20. In detail, after the exhaust gas 100 enters the hydrogen recovery system 10, the generated hydrogen 112 (shown in FIG. 1) enters the fuel cell 200 via line 202 and acts as its fuel. That is to say, the power generation system 20 of the embodiment of the present invention utilizes hydrogen in the process exhaust gas to generate electricity, and the gases harmful to the environment in the process exhaust gas are adsorbed or decomposed, and thus the power generation system 20 of the embodiment of the present invention is effectively The use of hydrogen in the process exhaust gas to generate electricity also solves the problem of environmental pollution caused by process exhaust gas.

在發電系統20中，燃料電池200與氨氣分解裝置104之間配置有濾氫裝置106。在其他實施例中，也可以省略 濾氫裝置106。In the power generation system 20, a hydrogen filtering device 106 is disposed between the fuel cell 200 and the ammonia gas decomposition device 104. In other embodiments, it may also be omitted Hydrogen filtering device 106.

圖3為依照本發明另一實施例所繪示的發電系統的方塊示意圖。請參照圖3，在發電系統30中，省略了氫氣回收系統10中的管路110與濾氫裝置106，且燃料電池300直接藉由管路302與氨氣分解裝置104連接。詳細地說，當廢氣100進入吸附裝置102之後，氫氣與氨氣經由管路108進入氨氣分解裝置104。在氨氣分解裝置104將氨氣分解為氫氣與氮氣之後，氫氣與氮氣同時經由管路302進入燃料電池300。由於氮氣為惰性氣體，因此並不會影響燃料電池300的運作。也就是說，本發明實施例的發電系統30亦可有效地利用製程廢氣中的氫氣來發電以及解決製程廢氣對環境造成污染的問題。FIG. 3 is a block diagram of a power generation system according to another embodiment of the invention. Referring to FIG. 3, in the power generation system 30, the pipeline 110 and the hydrogen filtering device 106 in the hydrogen recovery system 10 are omitted, and the fuel cell 300 is directly connected to the ammonia decomposition device 104 via the conduit 302. In detail, after the exhaust gas 100 enters the adsorption device 102, hydrogen and ammonia enter the ammonia decomposition device 104 via the line 108. After the ammonia gas decomposition unit 104 decomposes the ammonia gas into hydrogen gas and nitrogen gas, the hydrogen gas and the nitrogen gas simultaneously enter the fuel cell 300 via the line 302. Since nitrogen is an inert gas, it does not affect the operation of the fuel cell 300. That is to say, the power generation system 30 of the embodiment of the present invention can also effectively utilize the hydrogen in the process exhaust gas to generate electricity and solve the problem that the process exhaust gas pollutes the environment.

基於上述，本發明實施例的氫氣回收系統先以吸附裝置吸附製程廢氣中除了氫氣與氨氣以外的其他氣體，然後利用氨氣分解裝置將氨氣分解為氫氣與氮氣，再利用濾氫裝置將氫氣分離出來，因此可以有效回收氫氣並再利用，且解決製程廢氣對環境造成污染的問題。Based on the above, the hydrogen recovery system of the embodiment of the present invention first adsorbs a gas other than hydrogen and ammonia in the process exhaust gas by the adsorption device, and then decomposes the ammonia gas into hydrogen gas and nitrogen gas by using an ammonia gas decomposition device, and then uses a hydrogen filtering device. The hydrogen is separated, so that the hydrogen can be efficiently recovered and reused, and the problem of environmental pollution caused by the process exhaust gas is solved.

此外，在本發明實施例的發電系統中，將燃料電池與上述的氫氣回收系統結合，或將燃料電池與上述的吸附裝置以及氨氣分解裝置結合，因此可以有效地利用製程廢氣中的氫氣來發電，亦可解決製程廢氣對環境造成污染的問題。Further, in the power generation system of the embodiment of the present invention, the fuel cell is combined with the above-described hydrogen recovery system, or the fuel cell is combined with the above-described adsorption device and the ammonia gas decomposition device, so that hydrogen in the process exhaust gas can be effectively utilized. Power generation can also solve the problem of environmental pollution caused by process exhaust.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍內，當可作些許之更動與潤飾，故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art does not deviate. In the spirit and scope of the present invention, the scope of protection of the present invention is defined by the scope of the appended claims.

10‧‧‧氫氣回收系統10‧‧‧ Hydrogen recovery system

20、30‧‧‧發電系統20, 30‧‧‧ Power Generation System

100‧‧‧廢氣100‧‧‧Exhaust

102‧‧‧吸附裝置102‧‧‧Adsorption device

104‧‧‧氨氣分解裝置104‧‧‧Ammonia gas decomposition device

106‧‧‧濾氫裝置106‧‧‧Hydrogen filter

108、110、202、302‧‧‧管路108, 110, 202, 302‧‧‧ pipeline

112‧‧‧氫氣112‧‧‧ Hydrogen

200、300‧‧‧燃料電池200, 300‧‧‧ fuel cell

圖1為依照本發明實施例所繪示的氫氣回收系統的方塊示意圖。FIG. 1 is a block diagram of a hydrogen recovery system according to an embodiment of the invention.

圖2為依照本發明實施例所繪示的發電系統的方塊示意圖。2 is a block diagram of a power generation system according to an embodiment of the invention.

圖3為依照本發明另一實施例所繪示的發電系統的方塊示意圖。FIG. 3 is a block diagram of a power generation system according to another embodiment of the invention.

10‧‧‧氫氣回收系統10‧‧‧ Hydrogen recovery system

20‧‧‧發電系統20‧‧‧Power Generation System

100‧‧‧廢氣100‧‧‧Exhaust

102‧‧‧吸附裝置102‧‧‧Adsorption device

104‧‧‧氨氣分解裝置104‧‧‧Ammonia gas decomposition device

106‧‧‧濾氫裝置106‧‧‧Hydrogen filter

108、110、202‧‧‧管路108, 110, 202‧‧‧ pipeline

200‧‧‧燃料電池200‧‧‧ fuel cell

Claims (11)

一種氫氣回收系統，適於自含有氫氣、氨氣與其他氣體的廢氣中回收氫氣，所述氫氣回收系統包括：吸附裝置，用以吸附所述廢氣中的所述其他氣體；氨氣分解裝置，與所述吸附裝置連接，用以將氨氣分解為氮氣與氫氣；以及濾氫裝置，與所述氨氣分解裝置連接，用以分離氮氣與氫氣。 A hydrogen recovery system adapted to recover hydrogen from an exhaust gas containing hydrogen, ammonia, and other gases, the hydrogen recovery system comprising: an adsorption device for adsorbing the other gas in the exhaust gas; an ammonia gas decomposition device, It is connected to the adsorption device for decomposing ammonia gas into nitrogen and hydrogen; and a hydrogen filtering device connected to the ammonia gas decomposition device for separating nitrogen and hydrogen. 如申請專利範圍第1項所述之氫氣回收系統，其中所述其他氣體包括矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵或其組合。 The hydrogen recovery system of claim 1, wherein the other gas comprises methane, dimethane, phosphine, arsine, trimethylgallium or a combination thereof. 如申請專利範圍第1項所述之氫氣回收系統，其中所述吸附裝置中的吸附材料包括金屬氧化物、沸石、活性碳或其組合。 The hydrogen recovery system of claim 1, wherein the adsorbent material in the adsorption device comprises a metal oxide, a zeolite, activated carbon, or a combination thereof. 如申請專利範圍第1項所述之氫氣回收系統，其中所述氨氣分解裝置中的氨分解觸媒包括鉑、銥、銠、鈀、鐵、鎳、銅、鈷、氧化鎳、氧化鐵、氧化銠、氧化銥、氧化鉑或氧化鈀。 The hydrogen recovery system according to claim 1, wherein the ammonia decomposition catalyst in the ammonia gas decomposition device comprises platinum, rhodium, ruthenium, palladium, iron, nickel, copper, cobalt, nickel oxide, iron oxide, Cerium oxide, cerium oxide, platinum oxide or palladium oxide. 如申請專利範圍第1項所述之氫氣回收系統，其中所述濾氫裝置包括濾氫薄膜、變壓吸附床或其組合。 The hydrogen recovery system of claim 1, wherein the hydrogen filtering device comprises a hydrogen absorbing membrane, a pressure swing adsorption bed, or a combination thereof. 一種發電系統，適於利用含有氫氣、氨氣與其他氣體的廢氣中的氫氣發電，所述發電系統包括：吸附裝置，用以吸附所述廢氣中的所述其他氣體；氨氣分解裝置，與所述吸附裝置連接，用以將氨氣分 解為氮氣與氫氣；以及燃料電池，與所述氨氣分解裝置連接。 A power generation system adapted to generate electricity using hydrogen in an exhaust gas containing hydrogen, ammonia, and other gases, the power generation system including: an adsorption device for adsorbing the other gas in the exhaust gas; an ammonia gas decomposition device, and The adsorption device is connected to separate ammonia gas The solution is nitrogen and hydrogen; and a fuel cell is connected to the ammonia gas decomposition device. 如申請專利範圍第6項所述之發電系統，其中所述其他氣體包括矽甲烷、二矽甲烷、磷化氫、砷化氫、三甲基鎵或其組合。 The power generation system of claim 6, wherein the other gas comprises methane, dimethane, phosphine, arsine, trimethylgallium or a combination thereof. 如申請專利範圍第6項所述之發電系統，其中所述吸附裝置中的吸附材料包括金屬氧化物、沸石、活性碳或其組合。 The power generation system of claim 6, wherein the adsorbent material in the adsorption device comprises a metal oxide, a zeolite, an activated carbon, or a combination thereof. 如申請專利範圍第6項所述之發電系統，其中所述氨氣分解裝置中的氨分解觸媒包括鉑、銥、銠、鈀、鐵、鎳、銅、鈷、氧化鎳、氧化鐵、氧化銠、氧化銥、氧化鉑或氧化鈀。 The power generation system according to claim 6, wherein the ammonia decomposition catalyst in the ammonia gas decomposition device comprises platinum, rhodium, ruthenium, palladium, iron, nickel, copper, cobalt, nickel oxide, iron oxide, and oxidation. Antimony, cerium oxide, platinum oxide or palladium oxide. 如申請專利範圍第6項所述之發電系統，更包括濾氫裝置，連接於所述氨氣分解裝置與所述燃料電池之間，所述濾氫裝置用以分離氮氣與氫氣。 The power generation system of claim 6, further comprising a hydrogen filtering device connected between the ammonia gas decomposition device and the fuel cell, wherein the hydrogen filtering device is configured to separate nitrogen and hydrogen. 如申請專利範圍第10項所述之發電系統，其中所述濾氫裝置包括濾氫薄膜、變壓吸附床或其組合。 The power generation system of claim 10, wherein the hydrogen filtering device comprises a hydrogen absorbing membrane, a pressure swing adsorption bed, or a combination thereof.
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