TWI677626B - Compressor unit and cryopump system for cryogenic refrigerator - Google Patents
Compressor unit and cryopump system for cryogenic refrigerator Download PDFInfo
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- TWI677626B TWI677626B TW107101984A TW107101984A TWI677626B TW I677626 B TWI677626 B TW I677626B TW 107101984 A TW107101984 A TW 107101984A TW 107101984 A TW107101984 A TW 107101984A TW I677626 B TWI677626 B TW I677626B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
- F04D27/0215—Arrangements therefor, e.g. bleed or by-pass valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/007—Conjoint control of two or more different functions
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
- F04D27/0223—Control schemes therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0261—Surge control by varying driving speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5846—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling by injection
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B1/00—Compression machines, plants or systems with non-reversible cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Computer Hardware Design (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
[課題] 本發明提供一種關於用於極低溫冷凍機的變頻器驅動的壓縮機單元之對振動進行處理之簡單的方法。 [解決手段] 壓縮機單元具備:依據閥指定訊號而控制旁通配管的流量之流量控制閥、壓縮機變頻器(170)、以及壓縮機控制器(168)。運轉頻率之可採用的值的範圍預先設定於從下限值至第1值為止的第1運轉頻率區間及從第2值至上限值為止的第2運轉頻率區間,從第1值至第2值為止的不使用頻率區間包括壓縮機構造部的自然頻率。目標流量在第1吐出流量與第2吐出流量的情況下,壓縮機控制器(168)決定變頻器指令訊號,使得運轉頻率設定於第2運轉頻率區間,並決定閥指定訊號,使得旁通配管的流量與從依據該變頻器指令訊號得到之壓縮機主體的吐出流量減去目標流量之差分流量一致。[Problem] The present invention provides a simple method for processing vibration in an inverter-driven compressor unit for a cryogenic refrigerator. [Solution] The compressor unit includes a flow control valve, a compressor inverter (170), and a compressor controller (168) that control the flow of the bypass pipe in accordance with a valve designation signal. The range of usable values of the operating frequency is set in advance in the first operating frequency range from the lower limit value to the first value, and in the second operating frequency range from the second value to the upper limit value, from the first value to the second value. The unused frequency range up to the value includes the natural frequency of the compressor structure. When the target flow rate is the first discharge flow rate and the second discharge flow rate, the compressor controller (168) determines the inverter command signal so that the operating frequency is set in the second operating frequency range, and determines the valve designated signal so that the bypass pipe is bypassed. The flow rate is the same as the differential flow rate minus the target flow rate from the discharge flow rate of the compressor body obtained according to the inverter's command signal.
Description
[0001] 本發明有關一種用於極低溫冷凍機的壓縮機單元及低溫泵系統。[0001] The present invention relates to a compressor unit and a cryopump system for a cryogenic refrigerator.
[0002] 以往,已知有如下振動抑制技術,其係在搭載變頻器並將運轉頻率設為可變之所謂變頻壓縮機中,在振動感測器的檢測輸出大的情況下,變更壓縮機的運轉頻率。 [先前技術文獻] [專利文獻] [0003] [專利文獻1] 日本特開2001-317470號專利公報[0002] Conventionally, a vibration suppression technology is known, which is a so-called variable frequency compressor equipped with an inverter and a variable operating frequency. When the detection output of the vibration sensor is large, the compressor is changed. Operating frequency. [Prior Art Document] [Patent Document] [0003] [Patent Document 1] Japanese Patent Laid-Open No. 2001-317470
[發明欲解決之課題] [0004] 已知有一種極低溫系統,其係具備極低溫冷凍機、以及用於供給作動氣體到該冷凍機的壓縮機單元。作為極低溫系統的一例,亦已知有一種具備將極低溫冷凍機作為冷卻源之極低溫裝置(例如低溫泵)之系統。 [0005] 在極低溫系統中,有時使用壓力目標值及壓力測定值來控制壓縮機單元的運轉頻率,以使例如冷凍機的作動氣體的高壓側和低壓側的差壓與設定值一致。由於能夠以最佳的(最小的)運轉頻率提供冷凍機所需目標的作動氣體流量,因此這樣的控制有助於減少系統的耗電量。 [0006] 假定在使用於變頻器中之運轉頻率範圍內包括壓縮機單元的配管等機械構造部的自然頻率。運轉中的壓縮機單元係本身成為振動源。若運轉頻率的值接近於自然頻率,則在壓縮機單元的機械構造部有可能引起共振。過度的振動和噪音、結構件的疲勞是不被期望的。 [0007] 為了避免這樣的問題,禁止採用運轉頻率接近於自然頻率的值者為佳。然而,這是意味在最佳的運轉頻率的值接近於自然頻率的情況下,不使用該值而代替使用遠離自然頻率的值。在將運轉頻率變更為更小的值之情況下,有來自壓縮機單元的供給流量相對於冷凍機所需的作動氣體流量不足之虞。在將運轉頻率變更為更大的值之情況下,壓縮機單元的耗電量增加,會導致如下不良結果,亦即,無法充份地獲得減少變頻器控制的耗電量之優點。 [0008] 作為根本之解決方案,亦可以考慮變更壓縮機單元的設計,以免機械構造部的自然頻率被包括在所使用之運轉頻率範圍內。然而,這樣的設計變更很費時間和工夫。 [0009] 本發明之一態樣的示例性目的之一,係提供一種有關使用於極低溫冷凍機的變頻器驅動的壓縮機單元對振動進行處理之簡單之方法。 [解決課題之手段] [0010] 根據本發明的某一態樣,提供一種用於極低溫冷凍機的壓縮機單元。壓縮機單元具備:壓縮機構造部,其係包括:把極低溫冷凍機的作動氣體進行壓縮並吐出之壓縮機主體、運轉頻率可變且使壓縮機主體進行動作之壓縮機馬達、連接於壓縮機主體使得作動氣體從壓縮機主體吐出之高壓配管、連接於壓縮機主體使得作動氣體吸入到壓縮機主體之低壓配管、繞過壓縮機主體並將高壓配管連接於低壓配管之旁通配管、及設置於旁通配管使得依據閥指定訊號而控制旁通配管的流量之流量控制閥;壓縮機變頻器,其係依據變頻器指令訊號而控制壓縮機馬達的運轉頻率;以及壓縮機控制器,其係構成決定閥指定訊號及變頻器指令訊號,使得作動氣體以目標流量從壓縮機單元供給到極低溫冷凍機。運轉頻率可採用的值之範圍預先限定於從大於零的下限值至第1值為止的第1運轉頻率區間、以及從第2值至上限值為止的第2運轉頻率區間,第2值大於第1值。第1值及第2值被決定為從第1值至第2值為止的不使用頻率區間包括關於壓縮機構造部的至少一部分的至少1個自然頻率。運轉頻率的下限值、第1值、第2值及上限值,分別對應於壓縮機主體的下限吐出流量、第1吐出流量、第2吐出流量及上限吐出流量。在目標流量在第1吐出流量與第2吐出流量之間的情況下,壓縮機控制器決定變頻器指令訊號,使得運轉頻率設定於第2運轉頻率區間,並決定閥指定訊號,使得旁通配管的流量與從依據前述變頻器指令訊號得到之壓縮機主體的吐出流量減去目標流量之差分流量一致。 [0011] 依該態樣,運轉頻率的不使用區間以包括壓縮機構造部的自然頻率之方式而被決定,因此不易產生基於壓縮機主體的動作之壓縮機構造部的共振。並且,變頻器指令訊號以運轉頻率設定於第2運轉頻率區間之方式而被決定,因此作動氣體以目標流量上附加了剩餘流量(上述差分流量)之總計流量,係從壓縮機主體吐出到高壓配管。閥指定訊號以旁通配管的流量相當於該剩餘流量之方式而被決定,因此作動氣體從高壓配管回收到低壓配管,壓縮機單元可以以目標流量供給作動氣體到極低溫冷凍機。 [0012] 目標流量在第1吐出流量與第2吐出流量之間之情況下,壓縮機控制器係可以以運轉頻率取第2值來決定變頻器指令訊號。 [0013] 目標流量在下限吐出流量與第1吐出流量之間之情況下,壓縮機控制器可以決定變頻器指令訊號,使得運轉頻率設定於第1運轉頻率區間,並且可以決定閥指定訊號,使得流量控制閥關閉。在目標流量在第2吐出流量與上限吐出流量之間之情況下,壓縮機控制器可以決定變頻器指令訊號,使得運轉頻率設定於第2運轉頻率區間,並且可以決定閥指定訊號,使得流量控制閥關閉。 [0014] 目標流量在零與下限吐出流量之間之情況下,壓縮機控制器可以以運轉頻率取下限值來決定變頻器指令訊號,並且可以以旁通配管的流量與差分流量一致,來決定閥指定訊號。 [0015] 當運轉頻率從第1值切換為第2值時,壓縮機控制器可以對閥指定訊號和/或變頻器指令訊號實施平滑化處理。 [0016] 依本發明的一態樣,低溫泵系統具備:低溫泵,其係具備低溫板和用於冷卻該低溫板的極低溫冷凍機;壓縮機單元,其係具備:把極低溫冷凍機的作動氣體進行壓縮並吐出之壓縮機主體、運轉頻率可變且使前述壓縮機主體進行動作之壓縮機馬達、連接於前述壓縮機主體使得作動氣體從前述壓縮機主體吐出之高壓配管、連接於前述壓縮機主體使得作動氣體吸入到前述壓縮機主體之低壓配管、繞過前述壓縮機主體並將前述高壓配管連接於前述低壓配管之旁通配管、及設置於前述旁通配管使得依據閥指定訊號而控制前述旁通配管的流量之流量控制閥;壓縮機變頻器,其係依據變頻器指令訊號而控制前述壓縮機馬達的前述運轉頻率;以及控制器,其係構成決定前述閥指定訊號及前述變頻器指令訊號,使得作動氣體以目標流量從前述壓縮機單元供給到前述極低溫冷凍機運轉頻率可採用的值之範圍預先限定於從大於零的下限值至第1值為止的第1運轉頻率區間、以及從第2值至上限值為止的第2運轉頻率區間,第2值大於第1值。第1值及第2值被決定為從第1值至第2值為止的不使用頻率區間包括關於壓縮機構造部的至少一部分的至少1個自然頻率。運轉頻率的下限值、第1值、第2值及上限值,分別對應於壓縮機主體的下限吐出流量、第1吐出流量、第2吐出流量及上限吐出流量。在目標流量在第1吐出流量與第2吐出流量之間的情況下,控制器決定變頻器指令訊號,使得運轉頻率設定於第2運轉頻率區間,並決定閥指定訊號,使得旁通配管的流量與從依據前述變頻器指令訊號得到之壓縮機主體的吐出流量減去目標流量之差分流量一致。 [0017] 另外,在方法、裝置、系統等之間,相互置換以上構成要件的任意組合或本發明的構成要件或表現形式之裝置,作為本發明的態樣是同樣有效。 [發明效果] [0018] 根據本發明,能夠提供一種有關使用於極低溫冷凍機的變頻器驅動的壓縮機單元之對振動進行處理之簡單的方法。[Problems to be Solved by the Invention] 0004 [0004] There is known an extremely low temperature system including an extremely low temperature refrigerator and a compressor unit for supplying an operating gas to the refrigerator. As an example of an extremely low temperature system, a system including an extremely low temperature device (for example, a cryopump) using an extremely low temperature refrigerator as a cooling source is also known. [0005] In an extremely low temperature system, a target pressure value and a pressure measurement value may be used to control the operating frequency of the compressor unit so that, for example, the differential pressure between the high-pressure side and the low-pressure side of the working gas of the refrigerator is consistent with the set value. Such control can help reduce the power consumption of the system because it can provide the target gas flow required by the refrigerator at the optimal (minimum) operating frequency. [0006] It is assumed that the natural frequency of the mechanical structure such as the piping of the compressor unit is included in the operating frequency range used in the inverter. The compressor unit in operation itself becomes a vibration source. If the value of the operating frequency is close to the natural frequency, resonance may occur in the mechanical structure of the compressor unit. Excessive vibration and noise, fatigue of structural parts are not expected. [0007] In order to avoid such problems, it is better to prohibit the use of a value close to the natural frequency. However, this means that when the value of the optimal operating frequency is close to the natural frequency, this value is not used instead of using a value far from the natural frequency. When the operating frequency is changed to a smaller value, the supply flow rate from the compressor unit may be insufficient relative to the flow rate of the operating gas required for the refrigerator. When the operating frequency is changed to a larger value, the power consumption of the compressor unit increases, leading to the disadvantage that the advantage of reducing the power consumption controlled by the inverter cannot be obtained sufficiently. [0008] As a fundamental solution, you can also consider changing the design of the compressor unit so that the natural frequency of the mechanical structure part is not included in the operating frequency range used. However, such design changes take time and effort. [0009] One of the exemplary objects of one aspect of the present invention is to provide a simple method for dealing with vibration of an inverter-driven compressor unit used in a cryogenic refrigerator. [Means for Solving the Problems] [0010] According to one aspect of the present invention, a compressor unit for a cryogenic refrigerator is provided. The compressor unit includes a compressor structure unit including a compressor main body that compresses and discharges an operating gas of a cryogenic refrigerator, a compressor motor that has a variable operating frequency and operates the compressor main body, and is connected to the compressor. High pressure piping from which the main body causes the operating gas to be discharged from the compressor main body, low pressure piping connected to the compressor main body so that the operating gas is sucked into the compressor main body, bypassing the compressor main body and connecting the high pressure piping to the low pressure pipe, A flow control valve provided in the bypass pipe so as to control the flow of the bypass pipe according to a valve designated signal; a compressor inverter, which controls the operating frequency of the compressor motor according to a frequency converter command signal; and a compressor controller, which It is composed of the designated signal of the decision valve and the command signal of the inverter, so that the operating gas is supplied from the compressor unit to the cryogenic refrigerator at the target flow rate. The range of values that can be used for the operating frequency is limited in advance to the first operating frequency interval from the lower limit value greater than zero to the first value, and the second operating frequency interval from the second value to the upper limit value. The second value is greater than The first value. The first value and the second value are determined so that the non-use frequency range from the first value to the second value includes at least one natural frequency with respect to at least a part of the compressor structure portion. The lower limit value, the first value, the second value, and the upper limit value of the operating frequency correspond to the lower limit discharge flow rate, the first discharge flow rate, the second discharge flow rate, and the upper limit discharge flow rate of the compressor body, respectively. When the target flow rate is between the first discharge flow rate and the second discharge flow rate, the compressor controller determines the frequency converter command signal so that the operating frequency is set in the second operating frequency range, and determines the valve designated signal so that the bypass pipe is bypassed. The flow rate is the same as the differential flow rate minus the target flow rate from the discharge flow rate of the compressor body obtained according to the aforementioned inverter command signal. [0011] According to this aspect, the non-use interval of the operating frequency is determined so as to include the natural frequency of the compressor structure portion, and therefore, it is difficult to generate resonance in the compressor structure portion due to the operation of the compressor body. In addition, the inverter command signal is determined so that the operating frequency is set in the second operating frequency range. Therefore, the total flow rate of the operating gas added with the remaining flow rate (the above-mentioned differential flow rate) to the target flow rate is discharged from the compressor body to a high pressure. Piping. The valve designation signal is determined so that the flow rate of the bypass pipe is equal to the remaining flow rate. Therefore, the operating gas is recovered from the high-pressure pipe to the low-pressure pipe, and the compressor unit can supply the operating gas to the cryogenic refrigerator at the target flow rate. [0012] When the target flow rate is between the first discharge flow rate and the second discharge flow rate, the compressor controller can take the second value of the operating frequency to determine the inverter command signal. [0013] When the target flow rate is between the lower limit discharge flow rate and the first discharge flow rate, the compressor controller may determine the frequency converter command signal so that the operation frequency is set in the first operation frequency interval, and may determine the valve designation signal so that The flow control valve is closed. In the case where the target flow rate is between the second discharge flow rate and the upper limit discharge flow rate, the compressor controller can determine the frequency converter command signal so that the operating frequency is set in the second operating frequency range, and can determine the valve designated signal to enable flow control The valve is closed. [0014] In the case where the target flow rate is between zero and the lower limit discharge flow rate, the compressor controller can determine the frequency converter command signal by using the lower limit value of the operating frequency, and the flow rate of the bypass pipe can be consistent with the differential flow rate. Determines the valve designation signal. [0015] When the operating frequency is switched from the first value to the second value, the compressor controller can smooth the valve designated signal and / or the inverter command signal. [0016] According to an aspect of the present invention, the cryopump system includes a cryopump including a cryogenic plate and an ultra-low temperature refrigerator for cooling the cryogenic plate, and a compressor unit including: an ultra-low temperature refrigerator The compressor main body that compresses and discharges the operating gas, a compressor motor that has a variable operating frequency and causes the compressor main body to operate, and a high-pressure pipe connected to the compressor main body so that the operating gas is discharged from the compressor main body and is connected to The compressor main body causes the actuating gas to be sucked into the low-pressure piping of the compressor main body, bypasses the compressor main body and connects the high-pressure piping to the low-pressure piping, and a bypass pipe is provided in the bypass piping so that a signal is designated according to a valve. A flow control valve that controls the flow of the bypass pipe; a compressor inverter that controls the aforementioned operating frequency of the compressor motor according to a command signal from the inverter; and a controller that determines the designated signal of the valve and the aforementioned Inverter command signal, so that the operating gas is supplied from the compressor unit at the target flow rate The range up to the value that the cryogenic freezer operating frequency can adopt is limited in advance to a first operating frequency range from a lower limit value greater than zero to a first value, and a second operating frequency from a second value to an upper limit value. Interval, the second value is greater than the first value. The first value and the second value are determined so that the non-use frequency range from the first value to the second value includes at least one natural frequency with respect to at least a part of the compressor structure portion. The lower limit value, the first value, the second value, and the upper limit value of the operating frequency correspond to the lower limit discharge flow rate, the first discharge flow rate, the second discharge flow rate, and the upper limit discharge flow rate of the compressor body, respectively. When the target flow rate is between the first discharge flow rate and the second discharge flow rate, the controller determines the frequency converter command signal so that the operating frequency is set in the second operating frequency range, and determines the valve designated signal so that the flow rate of the bypass pipe It is consistent with the differential flow rate minus the target flow rate from the discharge flow rate of the compressor body obtained according to the aforementioned inverter command signal. [0017] In addition, a method, an apparatus, a system, and the like, which replace any combination of the above constituent elements or the constituent elements or expressions of the present invention with each other, are equally effective as aspects of the present invention. [Effects of the Invention] [0018] According to the present invention, it is possible to provide a simple method for processing vibration in a compressor unit driven by an inverter used in a cryogenic refrigerator.
[0020] 以下,一邊參閱圖面,一邊詳細說明有關用以實施本發明之型態。另外,在說明中對同一元件標註同一符號,並適當省略重複說明。並且,以下所述之構成為例示,並非係限定任何本發明的範圍者。並且,以下說明中,在所參閱之圖式中,各構成構件的大小和厚度係為了便於說明者,未必一定表示實際尺寸和比例者。 [0021] 圖1為示意性表示有關本發明的一實施形態之低溫泵系統1000的整體構成之圖。低溫泵系統1000係為了真空裝置300的真空排氣而使用。真空裝置300是在真空環境下對物體進行處理之真空處理裝置,例如是離子植入裝置和濺射裝置等在半導體製造製程中使用之裝置。 [0022] 低溫泵系統1000包括複數台低溫泵10。這些低溫泵10安裝於真空裝置300的1個或複數個真空腔室(未圖示),為了將真空腔室內部的真空度提高至所希望的製程所要求之等級而使用。低溫泵10依據低溫泵控制器(以下,亦稱為CP控制器)100所決定之控制量而運轉。例如在真空腔室中可實現10-5Pa至10-8Pa程度的高真空度。在圖示例中,低溫泵系統1000中包括11台低溫泵10。複數個低溫泵10可以是均具有同一排氣性能之低溫泵,亦可以是具有不同之排氣性能之低溫泵。 [0023] 低溫泵系統1000具備CP控制器100。CP控制器100控制低溫泵10及壓縮機單元102、104。CP控制器100具備:執行各種運算處理之CPU、儲存各種控制程式之ROM、作為用於儲存資料和執行程式的工作區域而利用之RAM、輸出入介面、以及記憶裝置(memory)等。並且,CP控制器100構成為亦能夠與用於控制真空裝置300的主控制器(未圖示)進行通訊。真空裝置300的主控制器亦可稱為把包括低溫泵系統1000之真空裝置300的各構成要件予以統括之上位的控制器。 [0024] CP控制器100係構成與低溫泵10及壓縮機單元102、104為異體。CP控制器100係與低溫泵10及壓縮機單元102、104連接成可以相互通訊。低溫泵10係分別具備與CP控制器100進行通訊之用於處理輸出入的IO模組50(參閱圖4)。CP控制器100與各IO模組50藉由控制通訊線而連接。圖1中用虛線來表示低溫泵10與CP控制器100的控制通訊線及壓縮機單元102、104與CP控制器100的控制通訊線。另外,CP控制器100可以與任一個低溫泵10或壓縮機單元102、104構成為一體。 [0025] CP控制器100可以由單一的控制器構成,亦可以包括各自發揮相同或不同功能之複數個控制器。例如CP控制器100可以具備設置於各壓縮機單元,並決定各壓縮機單元的控制量之壓縮機控制器、以及統括低溫泵系統之低溫泵控制器。 [0026] 低溫泵系統1000具備至少包括第1壓縮機單元102及第2壓縮機單元104之複數個壓縮機單元。壓縮機單元係為了使作動氣體在包括低溫泵10之閉合之流體迴路中循環而設置。壓縮機單元從低溫泵10回收作動氣體並進行壓縮,然後,再次向低溫泵10送出。壓縮機單元遠離真空裝置300或者設置於真空裝置300的附近。壓縮機單元依據壓縮機控制器168(參閱圖4)所決定之控制量而運轉。或者,依據CP控制器100所決定之控制量而運轉。 [0027] 以下,作為代表例對具有2台壓縮機單元102、104之低溫泵系統1000進行說明,但本發明並不限定於此。亦可以構成3台以上的壓縮機單元以與這些壓縮機單元102、104相同的方式與複數個低溫泵10並聯連接之低溫泵系統1000。另外,圖1所示之低溫泵系統1000分別具備複數個低溫泵10及壓縮機單元102、104,但亦可以將低溫泵10或壓縮機單元102、104設為1台。 [0028] 複數個低溫泵10和複數個壓縮機單元102、104藉由作動氣體配管系統106而連接。配管系統106係構成與複數個低溫泵10和複數個壓縮機單元102、104彼此並聯連接,以使作動氣體在複數個低溫泵10與複數個壓縮機單元102、104之間流通。藉由配管系統106,複數個壓縮機單元的各壓縮機單元與1台低溫泵10並聯連接,複數個低溫泵10之各低溫泵與1台壓縮機單元並聯連接。 [0029] 配管系統106包括內部配管108和外部配管110而構成。內部配管108形成於真空裝置300的內部,並包括內部供給管路112及內部返回管路114。外部配管110設置於真空裝置300的外部,並包括外部供給管路120及外部返回管路122。外部配管110連接真空裝置300和複數個壓縮機單元102、104。 [0030] 內部供給管路112連接於各低溫泵10的供氣口42(參閱圖2)、內部返回管路114連接於各低溫泵10的排氣口44(參閱圖2)。並且,內部供給管路112在真空裝置300的供氣埠116連接於外部配管110的外部供給管路120的一端,內部返回管路114在真空裝置300的排氣埠118連接於外部配管110的外部返回管路122的一端。 [0031] 外部供給管路120的另一端連接於第1歧管124,外部返回管路122的另一端連接於第2歧管126。於第1歧管124,連接有第1壓縮機單元102的第1吐出配管128及第2壓縮機單元104的第2吐出配管130的一端。第1吐出配管128及第2吐出配管130的另一端分別連接於所對應之各壓縮機單元102、104的吐出埠148(參閱圖3)。於第2歧管126,連接有第1壓縮機單元102的第1吸入配管132及第2壓縮機單元104的第2吸入配管134的一端。第1吸入配管132及第2吸入配管134的另一端分別連接於所對應之各壓縮機單元102、104的吸入埠146(參閱圖3)。 [0032] 藉此,用於將從複數個壓縮機單元102、104的各壓縮機單元送出之作動氣體進行匯集並供給到複數個低溫泵10的通用的供給管路由內部供給管路112及外部供給管路120構成。並且,用於將從複數個低溫泵10排出之作動氣體進行匯集並使其返回到複數個壓縮機單元102、104的通用的返回管路由內部返回管路114及外部返回管路122構成。並且,複數個壓縮機單元的各壓縮機單元藉由各壓縮機單元所附帶之單獨配管而連接於共通管路。在單獨配管與共通管路的連接部,設置有用於使單獨配管合流的歧管。第1歧管124在供給側使單獨配管合流,第2歧管126在回收側使單獨配管合流。 [0033] 依據使用低溫泵系統1000之場所(例如半導體製造工廠)中之各種裝置的配置,上述共通管路亦有可能(不同於圖示)成為相當長的長度。藉由將作動氣體匯集於共通管路,與將複數個壓縮機的各個壓縮機分別連接於真空裝置之情況相比,能夠縮短總體的配管長度。並且,採用在每一個作動氣體的供給對象(例如低溫泵系統1000中為各低溫泵10)上連接有複數個壓縮機之配管結構,因此亦具有冗餘度。將複數個壓縮機並聯配置於各個對象(例如低溫泵)並進行運轉,藉此分擔對複數個壓縮機的負載。 [0034] 圖2係示意性表示本發明的一實施形態之低溫泵10之剖視圖。低溫泵10具備冷卻至第1冷卻溫階之第1低溫板、及冷卻至比第1冷卻溫階更低溫度的第2冷卻溫階之第2低溫板。於第1低溫板,在第1冷卻溫階中蒸氣壓低的氣體經由凝結而被捕獲並排出。例如排出蒸氣壓比基準蒸氣壓(例如10-8Pa)低的氣體。於第2低溫板,在第2冷卻溫階中蒸氣壓低的氣體經由凝結而被捕獲並排出。於第2低溫板,表面形成有吸附區域,以便捕獲即使在第2溫階中亦因蒸氣壓高而不會凝結之非凝結性氣體。吸附區域例如藉由在板表面設置吸附劑而形成。非凝結性氣體被吸附到冷卻至第2溫階之吸附區域而排出。 [0035] 圖2所示之低溫泵10具備冷凍機12、板構造體14及熱遮蔽件16。冷凍機12藉由吸入作動氣體並使其在內部膨脹而吐出之熱循環而產生寒冷。板構造體14包括複數個低溫板,這些板藉由冷凍機12而被冷卻。於板表面,形成有藉由將氣體進行凝結或吸附而用於捕獲並排出的極低溫面。在低溫板的表面(例如背面),通常,設置有用於吸附氣體的活性碳等吸附劑。熱遮蔽件16為了從周圍的輻射熱中保護板構造體14而設置。 [0036] 低溫泵10係所謂縱型的低溫泵。縱型的低溫泵係指冷凍機12沿熱遮蔽件16的軸方向插入而配置之低溫泵。另外,本發明同樣能夠應用於所謂橫型的低溫泵中。橫型的低溫泵係指冷凍機的第2級冷卻台沿與熱遮蔽件16的軸方向交叉之方向(通常為正交方向)插入而配置之低溫泵。另外,圖1中示意性表示橫型的低溫泵10。 [0037] 冷凍機12乃是吉福德-麥克馬洪式冷凍機(所謂之GM冷凍機)。並且,冷凍機12為2級式冷凍機,具有第1級缸18、第2級缸20、第1冷卻台22、第2冷卻台24及冷凍機馬達26。第1級缸18和第2級缸20串聯連接,並分別內置有彼此連接之第1級置換器及第2級置換器(未圖示)。第1級置換器及第2級置換器的內部組裝有蓄冷材料。另外,冷凍機12可以係除了2級GM冷凍機以外的冷凍機,可以使用例如單級GM冷凍機,亦可以使用脈管冷凍機(pulse tube refrigerator)或索耳未冷凍機(Solvay refrigerator)。 [0038] 冷凍機12包括為了週期性地反覆進行作動氣體的吸入和吐出而週期性地切換作動氣體的流路之流路切換機構。流路切換機構包括例如閥門部和驅動閥門部之驅動部。閥門部例如是旋轉閥,驅動部係用於使旋轉閥旋轉的馬達。馬達例如可以是AC馬達或DC馬達。並且,流路切換機構可以是藉由線型馬達而被驅動之直接傳動式(direct acting type)的機構。 [0039] 在第1級缸18的一端設置有冷凍機馬達26。冷凍機馬達26設置於在第1級缸18的端部形成之馬達用殼體27的內部。冷凍機馬達26以第1級置換器及第2級置換器能夠分別在第1級缸18及第2級缸20的內部可以進行往復移動之方式連接於第1級置換器及第2級置換器。並且,冷凍機馬達26以使設置於馬達用殼體27內部之可動閥(未圖示)能夠進行正反向旋轉之方式連接於該閥。 [0040] 第1冷卻台22設置於第1級缸18的第2級缸20側的端部,亦即,第1級缸18與第2級缸20的連接部。並且,第2冷卻台24設置於第2級缸20的末端。第1冷卻台22及第2冷卻台24例如藉由焊接而分別固定於第1級缸18及第2級缸20。 [0041] 冷凍機12係通過設置於馬達用殼體27的外側之供氣口42及排氣口44而連接於壓縮機單元102或104。關於低溫泵10與壓縮機單元102、104的連接關係,如參閱圖1所進行之說明。 [0042] 冷凍機12使從壓縮機單元102、104供給之高壓作動氣體(例如氦氣等)在內部膨脹,從而,在第1冷卻台22及第2冷卻台24產生寒冷。壓縮機單元102、104回收藉由冷凍機12而膨脹之作動氣體,並再次進行加壓而供給到冷凍機12。 [0043] 具體而言,首先,高壓作動氣體從壓縮機單元102、104供給到冷凍機12。此時,冷凍機馬達26在連通供氣口42和冷凍機12的內部空間之狀態下,驅動馬達用殼體27內部的可動閥。若冷凍機12的內部空間被高壓作動氣體所填滿,則可動閥藉由冷凍機馬達26而被切換,冷凍機12的內部空間與排氣口44連通。藉此,作動氣體進行膨脹而回收至壓縮機單元102、104。與可動閥的動作同步,第1級置換器及第2級置換器分別在第1級缸18及第2級缸20的內部進行往復移動。藉由反覆進行該種熱循環,冷凍機12使第1冷卻台22及第2冷卻台24產生寒冷。 [0044] 第2冷卻台24冷卻至比第1冷卻台22更低的溫度。第2冷卻台24冷卻至例如10K至20K左右,第1冷卻台22冷卻至例如80K至100K左右。第1冷卻台22上安裝有用於測定第1冷卻台22的溫度的第1溫度感測器23,第2冷卻台24上安裝有用於測定第2冷卻台24的溫度的第2溫度感測器25。 [0045] 在冷凍機12的第1冷卻台22上,熱遮蔽件16以熱連接之狀態被固定,在冷凍機12的第2冷卻台24上,板構造體14以熱連接之狀態被固定。因此,熱遮蔽件16冷卻至與第1冷卻台22相同程度的溫度,板構造體14冷卻至與第2冷卻台24相同程度的溫度。熱遮蔽件16形成為一端具有開口部31之圓筒狀的形狀。開口部31藉由熱遮蔽件16的筒狀側面的端部內面而被分隔。 [0046] 另一方面,在與熱遮蔽件16的開口部31相反的一側,亦即,在泵底部側的另一端形成有閉塞部28。閉塞部28藉由在熱遮蔽件16的圓筒狀側面的泵底部側的端部向徑向內側延伸之凸緣部形成。圖2所示之低溫泵10為縱型的低溫泵,因此該凸緣部安裝於冷凍機12的第1冷卻台22。經此,在熱遮蔽件16的內部形成有圓柱狀的內部空間30。冷凍機12沿熱遮蔽件16的中心軸向內部空間30突出,第2冷卻台24成為插入到內部空間30之狀態。 [0047] 另外,在橫型的低溫泵的情況下,閉塞部28通常完全被閉塞。冷凍機12從形成於熱遮蔽件16的側面之冷凍機安裝用開口部,沿與熱遮蔽件16的中心軸正交之方向,向內部空間30突出配置。冷凍機12的第1冷卻台22安裝於熱遮蔽件16的冷凍機安裝用開口部,冷凍機12的第2冷卻台24配置於內部空間30。在第2冷卻台24上安裝有板構造體14。藉此,板構造體14配置於熱遮蔽件16的內部空間30。板構造體14可以經由適當之形狀的板安裝構件而安裝於第2冷卻台24。 [0048] 並且,在熱遮蔽件16的開口部31安裝有阻擋體32。阻擋體32在熱遮蔽件16的中心軸方向上與板構造體14隔著間隔而設置。阻擋體32安裝於熱遮蔽件16的開口部31側的端部,並冷卻至與熱遮蔽件16相同程度的溫度。當從真空腔室80側觀察時,阻擋體32可以形成為例如同心圓狀,或者亦可以形成為格子狀等其他的形狀。另外,在阻擋體32與真空腔室80之間設置有閘閥(未圖示)。該閘閥例如在使低溫泵10作動時關閉,在藉由低溫泵10使真空腔室80排氣時開啟。真空腔室80設置於例如圖1所示之真空裝置300。 [0049] 熱遮蔽件16、阻擋體32、板構造體14及冷凍機12的第1冷卻台22及第2冷卻台24收納於泵殼34的內部。泵殼34串聯連接直徑不同之2個圓筒而形成。開放泵殼34的大直徑的圓筒側端部,與真空腔室80的連接用凸緣部36向徑向外側延伸而形成。並且泵殼34的小直徑的圓筒側端部固定於冷凍機12的馬達用殼體27。低溫泵10經由泵殼34的凸緣部36氣密地固定於真空腔室80的排氣用開口,並形成與真空腔室80的內部空間成為一體的氣密空間。泵殼34及熱遮蔽件16均形成為圓筒狀,並配設於同軸上。泵殼34的內徑稍微大於熱遮蔽件16的外徑,因此熱遮蔽件16與泵殼34的內面之間保持若干間隔地配置。 [0050] 當低溫泵10作動時,首先,在其作動之前,使用其他適當之粗抽泵將真空腔室80的內部粗抽至1Pa~10Pa左右。之後,使低溫泵10作動。第1冷卻台22及第2冷卻台24藉由冷凍機12的驅動而被冷卻,與這些熱連接之熱遮蔽件16、阻擋體32、板構造體14亦被冷卻。 [0051] 被冷卻之阻擋體32冷卻從真空腔室80向低溫泵10的內部飛來之氣體分子,並使在該冷卻溫度下蒸氣壓充份變低之氣體(例如水分等)凝結於表面並排出。在阻擋體32的冷卻溫度下蒸氣壓未充份變低之氣體通過阻擋體32之後,進入到熱遮蔽件16的內部。在已進入之氣體分子中,在板構造體14的冷卻溫度下蒸氣壓充份變低之氣體(例如氬氣等)凝結於板構造體14的表面並排出。在該冷卻溫度下蒸氣壓亦未充份變低之氣體(例如氫氣等)藉由接著於板構造體14的表面並冷卻之吸附劑而被吸附並排出。藉此,低溫泵10能夠使真空腔室80內部的真空度達到所希望的等級。 [0052] 圖3為示意性表示本發明的一實施形態之第1壓縮機單元102之圖。在本實施例中第2壓縮機單元104亦具有與第1壓縮機單元102相同的構成。壓縮機單元102包括使氣體升壓之壓縮機主體140、用於將從外部供給之低壓氣體供給到壓縮機主體140的低壓配管142、及用於將藉由壓縮機主體140而被壓縮之高壓氣體向外部送出的高壓配管144而構成。 [0053] 如圖1所示,低壓氣體在藉由第1吸入配管132而被供給到第1壓縮機單元102。第1壓縮機單元102藉由吸入埠146而接收來自低溫泵10的返回氣體,作動氣體被送至低壓配管142。吸入埠146被設置於低壓配管142的末端,在第1壓縮機單元102的壓縮機框體138。低壓配管142連接吸入埠146和壓縮機主體140的吸入口。 [0054] 低壓配管142在中途具備作為用於去除返回氣體中所包含之脈動的容積的儲槽150。儲槽150設置於吸入埠146與朝向後述旁通機構152的分叉之間。用儲槽150中去除了脈動之作動氣體,係藉由低壓配管142被供給到壓縮機主體140。在儲槽150的內部,可以設置有用於從氣體中去除不需要之微粒等的過濾器。在儲槽150與吸入埠146之間,可以連接有用於從外部補充作動氣體的接收埠及配管。 [0055] 壓縮機主體140例如是渦旋式或旋轉式泵,為發揮使所吸入之氣體升壓之功能者。於壓縮機主體140,設置有壓縮機馬達172,壓縮機主體140藉由壓縮機馬達172而被驅動。壓縮機主體140將已被升壓之作動氣體送出到高壓配管144。壓縮機主體140做成使用油進行冷卻之構成,使油循環之油冷卻配管附帶設置於壓縮機主體140。因此,已被升壓之作動氣體在混入了若干該油之狀態下送出到高壓配管144。 [0056] 因此,於高壓配管144,在其中途設置有油分離器154。藉由油分離器154從作動氣體分離之油返回到低壓配管142,並可以藉由低壓配管142而返回到壓縮機主體140。油分離器154中可以設置有用於釋放過大的高壓的釋放閥。 [0057] 在連接壓縮機主體140和油分離器154之高壓配管144的中途,可以設置有用於冷卻從壓縮機主體140送出之高壓作動氣體的熱交換器(未圖示)。熱交換器例如藉由冷卻水冷卻作動氣體。並且,該冷卻水亦可以利用在為了冷卻將壓縮機主體140進行冷卻的油。在高壓配管144上亦可以設置有在熱交換器的上游及下游中的至少一方測定作動氣體的溫度之溫度感測器。 [0058] 已經由油分離器154之作動氣體,係藉由高壓配管144被送至吸附器156。吸附器156係例如為了從作動氣體中去除藉由儲槽150內的過濾器或油分離器154等流路上的污染物去除機構未被去除之污染成分而設置。吸附器156例如藉由吸附而去除氣化的油成分。 [0059] 吐出埠148被設置於高壓配管144的末端,在第1壓縮機單元102的壓縮機框體138。亦即,高壓配管144連接壓縮機主體140和吐出埠148,在其中途設置有油分離器154及吸附器156。經由吸附器156之作動氣體通過吐出埠148向低溫泵10送出。 [0060] 第1壓縮機單元102具備旁通機構152,該旁通機構具有將低壓配管142和高壓配管144相連之旁通配管158。在圖示的實施例中,旁通配管158在儲槽150與壓縮機主體140之間,從低壓配管142分叉。並且,旁通配管158在油分離器154與吸附器156之間從高壓配管144分叉。 [0061] 旁通機構152具備控制閥,該控制閥用於對不會向低溫泵10送出,而從高壓配管144向低壓配管142繞過之作動氣體流量進行控制。在圖示的實施例中,在旁通配管158的中途並聯設置有第1控制閥(亦稱為均壓閥)160及第2控制閥(亦稱為釋放閥)162。均壓閥160例如是常開型電磁閥。藉此,第1壓縮機單元102的運轉停止(亦即,對第1壓縮機單元102的供電停止的話)的話,則均壓閥160打開,低壓配管142和高壓配管144的壓力變得相等。釋放閥162例如是常閉型電磁閥。在本實施例中,釋放閥162在第1壓縮機單元102的運轉中使用作為旁通配管158的流量控制閥。 [0062] 第1壓縮機單元102具備:用於測定來自低溫泵10的返回氣體的壓力的第1壓力感測器164、以及用於測定對低溫泵10的送出氣體的壓力的第2壓力感測器166。在第1壓縮機單元102的動作中,送出氣體比返回氣體更為高壓,因此以下將第1壓力感測器164及第2壓力感測器166亦分別稱為低壓感測器及高壓感測器。 [0063] 第1壓力感測器164為了測定低壓配管142的壓力而設置,第2壓力感測器166為了測定高壓配管144的壓力而設置。第1壓力感測器164係例如設置於儲槽150,在儲槽150中測定去除了脈動的返回氣體的壓力。第1壓力感測器164亦可以設置於低壓配管142之任意的位置。第2壓力感測器166設置於油分離器154與吸附器156之間。第2壓力感測器166亦可以設置於高壓配管144之任意的位置。 [0064] 另外,第1壓力感測器164及第2壓力感測器166可以設置於第1壓縮機單元102的外部,例如亦可以設置於第1吸入配管132及第1吐出配管128。並且,旁通機構152亦可以設置於第1壓縮機單元102的外部,例如亦可以由旁通配管158來連接第1吸入配管132和第1吐出配管128。 [0065] 圖3中示出之壓縮機構造部136包括:壓縮機主體140、低壓配管142、高壓配管144、吸入埠146、吐出埠148、儲槽150、旁通機構152、油分離器154、吸附器156、旁通配管158、均壓閥160、釋放閥162、第1壓力感測器164、第2壓力感測器166、以及壓縮機馬達172。這些構成要件收納於壓縮機框體138中。 [0066] 圖4為與本實施形態之低溫泵系統1000有關之控制方塊圖。圖4表示與本發明的一實施形態相關之低溫泵系統1000的主要部分。就複數個低溫泵10中的1個,示出內部的詳細情況,關於其他低溫泵10,因相同故而省略圖示。同樣地,關於第1壓縮機單元102示出詳細的情況,第2壓縮機單元104與其相同的緣故,所以省略內部的圖示。 [0067] CP控制器100係如上述般,與各低溫泵10的IO模組50連接成可以通訊。IO模組50包括:冷凍機變頻器52、以及訊號處理部54。冷凍機變頻器52將從外部電源例如商用電源所供給之規定的電壓及頻率的電力進行調整,並供給到冷凍機馬達26。應供給到冷凍機馬達26之電壓及頻率藉由CP控制器100而被控制。 [0068] CP控制器100依據感測器輸出訊號來決定指令控制量。訊號處理部54,係把從CP控制器100發送之指令控制量,向冷凍機變頻器52進行中繼。例如訊號處理部54將來自CP控制器100的指令訊號變換成能夠用冷凍機變頻器52而進行處理之訊號,並發送到冷凍機變頻器52。指令訊號包括表示冷凍機馬達26的運轉頻率之訊號。並且,訊號處理部54,係把低溫泵10的各種感測器的輸出,向CP控制器100進行中繼。例如,訊號處理部54,係把感測器輸出訊號變換成能夠用CP控制器100進行處理之訊號,並發送到CP控制器100。 [0069] 於IO模組50的訊號處理部54,連接有包括第1溫度感測器23及第2溫度感測器25之各種感測器。如上述,第1溫度感測器23測定冷凍機12的第1冷卻台22的溫度,第2溫度感測器25測定冷凍機12的第2冷卻台24的溫度。第1溫度感測器23及第2溫度感測器25分別週期性地測定第1冷卻台22及第2冷卻台24的溫度,並輸出表示測定溫度之訊號。第1溫度感測器23及第2溫度感測器25的測定值每隔規定時間輸入到CP控制器100,並儲存和保持於CP控制器100的規定的記憶區域中。 [0070] CP控制器100依據低溫板的溫度而控制冷凍機12。CP控制器100對冷凍機12賦予指令訊號,以使低溫板的實際溫度追隨目標溫度。例如CP控制器100藉由回饋控制而生成冷凍機變頻器指令訊號,以使第1級低溫板的目標溫度與第1溫度感測器23的測定溫度的偏差最小。冷凍機變頻器指令訊號從CP控制器100經由IO模組50賦予到冷凍機變頻器52。冷凍機變頻器52依據冷凍機變頻器指令訊號而控制冷凍機馬達26的運轉頻率。冷凍機馬達26的轉速亦即冷凍機12的熱循環的頻率,係根據冷凍機馬達26的運轉頻率而定。第1級低溫板的目標溫度根據例如在真空腔室80中進行之程序而被定為規格。該情況下,冷凍機12的第2冷卻台24及板構造體14冷卻至依據冷凍機12的規格及來自外部的熱負載而定之溫度。 [0071] 在第1溫度感測器23的測定溫度比目標溫度更為高溫之情況下,CP控制器100為了增加冷凍機馬達26的運轉頻率而對IO模組50輸出冷凍機變頻器指令訊號。與馬達運轉頻率的增加連動,冷凍機12中之熱循環的頻率亦增加,冷凍機12的第1冷卻台22朝目標溫度而被冷卻。相反地,在第1溫度感測器23的測定溫度比目標溫度更為低溫之情況下,冷凍機馬達26的運轉頻率減少,冷凍機12的第1冷卻台22朝目標溫度而被升溫。 [0072] 通常,第1冷卻台22的目標溫度被設定為定值。藉此,在對低溫泵10的熱負載增加時,CP控制器100輸出冷凍機變頻器指令訊號使得冷凍機馬達26的運轉頻率增加,在對低溫泵10的熱負載減少時,輸出冷凍機變頻器指令訊號使得冷凍機馬達26的運轉頻率減少。另外,目標溫度也可以適當地變動,例如可以依次設定低溫板的目標溫度使得作為目標的環境壓力實現於排氣對象容積。並且,CP控制器100亦可以控制冷凍機馬達26的運轉頻率,使得第2級低溫板的實際溫度與目標溫度一致。 [0073] 在典型的低溫泵中,熱循環的頻率始終設為恆定。以較大的頻率進行運轉之方式設定,以便能夠從常溫向泵動作溫度急劇冷卻,在來自外部的熱負載小的情況下,由加熱器進行加熱來調整低溫板的溫度。因此,耗電量變大。相對於此,在本實施形態中,因為配合低溫泵10的熱負載而控制熱循環頻率,所以能夠實現節能性優異之低溫泵。並且,未必一定設置加熱器,這亦有助於耗電量的減少。 [0074] CP控制器100係與壓縮機控制器168連接成可以通訊。本發明的一實施形態之低溫泵系統1000的控制部,係以包括CP控制器100及壓縮機控制器168之複數個控制器所構成。在其他一實施例中,低溫泵系統1000的控制部可以藉由單一的CP控制器100而構成,於壓縮機單元102、104可以設置有IO模組來代替壓縮機控制器168。該情況下,IO模組在CP控制器100與壓縮機單元102、104的各構成要件之間,中繼控制訊號。並且,壓縮機控制器168可以構成CP控制器100的一部分。 [0075] 壓縮機控制器168,係依據來自CP控制器100的控制訊號,或者與CP控制器100獨立地,控制第1壓縮機單元102。在一實施例中,壓縮機控制器168從CP控制器100接收表示各種設定值之訊號,並使用該設定值來控制第1壓縮機單元102。壓縮機控制器168依據感測器輸出訊號來決定指令控制量。與CP控制器100同樣地,壓縮機控制器168具備:執行各種運算處理之CPU、儲存各種控制程式之ROM、作為用於儲存資料或執行程式的工作區域而被利用之RAM、輸出入介面、以及記憶裝置等。 [0076] 並且,壓縮機控制器168,係把表示第1壓縮機單元102的運轉狀態之訊號,發送到CP控制器100。表示運轉狀態之訊號,係例如包括:第1壓力感測器164及第2壓力感測器166的測定壓力、釋放閥162的開度或控制電流、壓縮機馬達172的運轉頻率等。 [0077] 第1壓縮機單元102包括:壓縮機變頻器170、以及壓縮機馬達172。壓縮機馬達172乃是使壓縮機主體140動作且運轉頻率可變之馬達,並設置於壓縮機主體140。與冷凍機馬達26同樣地,作為壓縮機馬達172,可以採用各種馬達。壓縮機控制器168,係生成壓縮機變頻器指令訊號,並輸出到壓縮機變頻器170。壓縮機變頻器170依據壓縮機變頻器指令訊號而控制壓縮機馬達172的運轉頻率。配合壓縮機馬達172的運轉頻率而控制壓縮機馬達53的轉速。壓縮機變頻器170,係依據壓縮機變頻器指令訊號而調整從外部電源例如商用電源所供給之規定的電壓及頻率的電力,並供給到壓縮機馬達172。應供給到壓縮機馬達172之電壓及頻率依據壓縮機變頻器指令訊號而被決定。 [0078] 於壓縮機控制器168,連接有包括第1壓力感測器164及第2壓力感測器166之各種感測器。如上述,第1壓力感測器164係週期性地測定壓縮機主體140吸入側的壓力,第2壓力感測器166係週期性地測定壓縮機主體140的吐出側的壓力。第1壓力感測器164及第2壓力感測器166的測定值每隔規定時間輸入到壓縮機控制器168,並儲存和保持於壓縮機控制器168的規定的記憶區域。 [0079] 於壓縮機控制器168,連接有上述的釋放閥162。用於驅動釋放閥162的釋放閥驅動器174附帶設置於釋放閥162,釋放閥驅動器174連接於壓縮機控制器168。壓縮機控制器168生成釋放閥指令訊號,並輸出到釋放閥驅動器174。釋放閥指令訊號為確定釋放閥162的開度者,釋放閥驅動器174係把釋放閥162控制在該開度。經此,釋放閥162係設置於旁通配管158,依據釋放閥指令訊號控制旁通配管158的流量。釋放閥驅動器174可以組裝到壓縮機控制器168。 [0080] 壓縮機控制器168係控制壓縮機主體140,使得壓縮機單元102的輸入輸出口之間的差壓(以下,有時亦稱為壓縮機差壓)維持在目標差壓。例如,壓縮機控制器168執行回饋控制,使得把壓縮機單元102的輸入輸出口之間的差壓設為定值。在一實施例中,壓縮機控制器168係由第1壓力感測器164及第2壓力感測器166的測定值,求出壓縮機差壓。壓縮機控制器168係決定壓縮機馬達172的運轉頻率,使得壓縮機差壓與目標值一致。壓縮機控制器168係控制壓縮機變頻器170,以實現前述運轉頻率。另外,差壓的目標值在執行差壓恆定控制中可以變更。 [0081] 藉由這樣的差壓恆定控制,可實現耗電量更進一步的減少。在對低溫泵10及冷凍機12的熱負載小的情況下,冷凍機12中的熱循環頻率藉由上述低溫板溫度調整控制而變小。 藉此,在冷凍機12中所需作動氣體量變小。此時,超過需要量之氣體量能夠從壓縮機單元102送出。藉此,壓縮機單元102的輸入輸出口間差壓增大。然而,在本實施形態中,控制壓縮機馬達172的運轉頻率被使得壓縮機差壓為恆定。該情況下,壓縮機馬達172的運轉頻率變小,以使差壓朝目標值減小。從而,如典型的低溫泵般,與始終以恆定的運轉頻率使壓縮機運轉之情況相比,能夠減少耗電量。 [0082] 另一方面,在對低溫泵10的熱負載變大時,增加壓縮機馬達172的運轉頻率,使得壓縮機差壓為恆定。因此,因為可以充份地確保供給到冷凍機12之氣體量,所以可以把起因於熱負載的增加所致之低溫板溫度之從目標溫度的背離,抑制在最小限度。 [0083] 特別是,為了吸入作動氣體而在高壓側打開閥門之時序在複數個冷凍機12中重疊或極其接近時,所需氣體的總量變大。例如,使壓縮機僅以恆定的吐出流量運轉之情況下,或者在壓縮機的吐出壓力不充份之情況下,與先打開閥門而吸氣之冷凍機相比,後打開閥門的冷凍機之被供給的氣體量變小。在複數個冷凍機12之間的供給氣體量的差異導致產生冷凍機12之間的冷凍能力的偏差。與這樣的情況相比,藉由執行差壓控制而能夠充份地確保對冷凍機12的作動氣體流量。差壓控制不僅有助於節能性,而且亦能夠抑制複數個冷凍機12之間的冷凍能力的偏差。 [0084] 圖5為用於說明本發明的一實施形態之壓縮機單元運轉控制的控制流程的圖。圖5中示出之控制處理,係在低溫泵10的運轉中,經由壓縮機控制器168以規定的週期反覆執行。該處理係在各壓縮機單元102、104各自的壓縮機控制器168中,從其他壓縮機單元102、104獨立出來執行。圖5中用虛線來區隔表示壓縮機控制器168中之運算處理之部分,用單點鏈線來區隔表示壓縮機單元102、104的硬體的動作之部分。 [0085] 壓縮機控制器168具備:控制量運算部176。控制量運算部176係構成例如,運算至少用於差壓恆定控制的指令控制量。該實施例中,運算出的指令控制量被分配於壓縮機馬達172的運轉頻率和釋放閥162的開度而執行差壓恆定控制。於其他一實施例中,可以僅將壓縮機馬達172的運轉頻率及釋放閥162的開度中的一個作為指令控制量而執行差壓恆定控制。控制量運算部176係如後述,可以構成運算用於差壓恆定控制、吐出壓力控制及吸入壓力的控制中的至少任一種控制的指令控制量。 [0086] 如圖5所示,壓縮機控制器168中預先設定並輸入有目標差壓ΔP0 。目標差壓例如設定於CP控制器100中,並賦予到壓縮機控制器168。由第1壓力感測器164測定吸入側的測定壓力PL,由第2壓力感測器166測定吐出側的測定壓力PH,並從各感測器賦予到壓縮機控制器168。通常,第1壓力感測器164的測定壓力PL比第2壓力感測器166的測定壓力PH更為低壓。 [0087] 壓縮機控制器168具備偏差運算部178,該偏差運算部從吐出側測定壓力PH減去吸入側測定壓力PL而求出測定差壓ΔP,進而,從設定差壓ΔP0 減去測定差壓ΔP而求出差壓偏差e。壓縮機控制器168的控制量運算部176係例如藉由包括PD運算或PID運算之規定的控制量運算處理,從差壓偏差e算出指令控制量D。 [0088] 另外,如圖示,壓縮機控制器168可以別於控制量運算部176而另外具備偏差運算部178,控制量運算部176也可以具備偏差運算部178。並且,在控制量運算部176的後段可以設置有用於把指令控制量D予以進行規定時間乘法運算並賦予到輸出分配處理部180之積分運算部。 [0089] 壓縮機控制器168具備把指令控制量D分配於第1指令輸出值D1和第2指令輸出值D2之輸出分配處理部180。輸出分配處理部180,係配合指令控制量D值的大小,來決定第1指令輸出值D1和第2指令輸出值D2。輸出分配處理部180參閱輸出分配表181,藉此,從指令控制量D決定第1指令輸出值D1和第2指令輸出值D2。輸出分配表181係預先準備並保存於輸出分配處理部180或壓縮機控制器168中。 [0090] 指令控制量D乃是相當於壓縮機單元的目標流量之參數。指令控制量D係表示為了實現目標差壓ΔP0 等目標壓力而壓縮機單元所應送出的作動氣體流量。另外,指令控制量D無需直接表示壓縮機單元的目標流量本身。指令控制量D係可以依據函數或表格而與壓縮機單元的目標流量關聯之參數,或者與壓縮機單元的目標流量相關之任意的參數。 [0091] 第1指令輸出值D1乃是相當於壓縮機馬達172的運轉頻率指令值之參數。第1指令輸出值D1可以是依據函數或表格而與運轉頻率指令值關聯之參數,或者與運轉頻率指令值相關之任意的參數。第2指令輸出值D2乃是相當於釋放閥162的開度指令值之參數。第2指令輸出值D2可以是依據函數或表格與開度指令值關聯之參數,或者與開度指令值相關之任意的參數。 [0092] 壓縮機控制器168具備:從第1輸出指令值D1生成壓縮機變頻器指令訊號E之變頻器指令部182、以及從第2輸出指令值D2生成釋放閥指令訊號R之釋放閥指令部184。壓縮機變頻器指令訊號E賦予到壓縮機變頻器170,並依據其指令而控制壓縮機主體140亦即壓縮機馬達172的運轉頻率。壓縮機變頻器指令訊號E乃是表示例如運轉頻率指令值之電壓訊號或其他電訊號。並且,釋放閥指令訊號R賦予到釋放閥驅動器174,並依據其指令而控制釋放閥162的開度。釋放閥指令訊號R乃是表示釋放閥162的開度指令值之電訊號,例如是用於驅動螺線管線圈的脈衝輸出訊號。 [0093] 藉此,壓縮機控制器168係決定釋放閥指令訊號R及壓縮機變頻器指令訊號E,使得作動氣體以目標流量從壓縮機單元102、104供給到低溫泵10(亦即,冷凍機12)。壓縮機控制器168係依據已決定之釋放閥指令訊號R而控制釋放閥162的開度。壓縮機控制器168係輸出釋放閥指令訊號R到釋放閥驅動器174,藉此,依據釋放閥指令訊號R而打開釋放閥162。並且,壓縮機控制器168係依據已決定之壓縮機變頻器指令訊號E而控制壓縮機主體140的運轉頻率。壓縮機控制器168係輸出壓縮機變頻器指令訊號E到壓縮機變頻器170,藉此,依據壓縮機變頻器指令訊號E而控制壓縮機馬達172的運轉頻率。 [0094] 依據壓縮機主體140及釋放閥162的動作狀態、以及相關之配管或槽等的特性來決定作為作動氣體之氦氣的壓力。藉此決定之氦氣壓力係藉由第1壓力感測器164及第2壓力感測器166而測定。 [0095] 如上述,在各壓縮機單元102、104中,藉由各壓縮機控制器168而獨立地執行差壓恆定控制。壓縮機控制器168執行回饋控制,使得差壓偏差e最小化(為零者較佳)。 [0096] 然而,圖5所示之偏差e並不限定於差壓的偏差。在一實施例中,壓縮機控制器168可以執行從吐出側測定壓力PH與設定壓力的偏差來運算指令控制量之吐出壓力控制。該情況下,設定壓力亦可以是壓縮機的吐出側壓力的上限值。當吐出側測定壓力PH大於該上限值時,壓縮機控制器168可以從與吐出側測定壓力PH的偏差來運算指令控制量。上限值係例如可以依據保證低溫泵10的排氣能力之壓縮機的最高吐出壓力適當地以經驗性地或實驗性地進行設定。 [0097] 藉此,能夠抑制吐出壓力過度上升,並能夠進一步提高安全性。因此,吐出壓力控制為用於壓縮機單元的保護控制的一例。 [0098] 並且,在一實施例中,壓縮機控制器168可以執行從吸入側測定壓力PL與設定壓力的偏差來運算指令控制量之吸入壓力控制。該情況下,設定壓力亦可以是壓縮機的吸入側壓力的下限值。當吸入側測定壓力PL小於該下限值時,壓縮機控制器168可以由與吸入側測定壓力PL的偏差來運算指令控制量。下限值係例如可以依據保證低溫泵10的排氣能力之壓縮機的最低吸入壓力適當地以經驗性地或實驗性地進行設定。 [0099] 藉此,能夠抑制起因於隨吸入壓力的降低而作動氣體流量的降低所致之壓縮機主體的過度的溫度上升。並且,在從作動氣體的配管系統產生氣體的洩漏之情況下,無需立即停止運轉,而亦能夠防止過度的壓力降低,而且持續一定程度的期間的運轉。因此,吸入壓力的控制為用於壓縮機單元的保護控制的一例。 [0100] 圖6為示意性例示本發明的一實施形態之輸出分配表181之圖。縱軸表示第1輸出指令值D1(實線)及第2輸出指令值D2(虛線),橫軸表示指令控制量D。第1輸出指令值D1用實線表示,第2輸出指令值D2用虛線表示。如上述,第1輸出指令值D1及第2輸出指令值D2係分別相當於運轉頻率指令值及開度指令值或與其相關,指令控制量D係相當於壓縮機單元的目標流量或與其相關。藉此,輸出分配表181表示壓縮機馬達172的運轉頻率指令值與壓縮機單元的目標流量的關係、以及釋放閥162的開度指令值與壓縮機單元的目標流量的關係。 [0101] 第1輸出指令值D1的可採用的值的範圍預先限定於第1區間及第2區間。第1區間係下限值D1L至第1值D11的範圍,第2區間係第2值D12至上限值D1U的範圍。第1輸出指令值D1與運轉頻率指令值相關,因此所圖示之下限值D1L、第1值D11、第2值D12、上限值D1U分別對應於運轉頻率的下限值、第1值、第2值及上限值。 [0102] 藉此,依據輸出分配表181,運轉頻率的可採用的值的範圍預先限定在從下限值至第1值為止的第1運轉頻率區間、及從第2值至上限值為止的第2運轉頻率區間。運轉頻率的下限值大於零,例如在20Hz至40Hz,或者在25Hz至35Hz之間,例如可以是30Hz。運轉頻率的上限值例如從70Hz至90Hz為止,或者從75Hz至85Hz為止之間,例如可以是78Hz。運轉頻率的上限值及下限值例如作為壓縮機的規格預先被決定。 [0103] 從第1值D11至第2值D12為止的區間不被使用。對應於該區間之運轉頻率之從第1值至第2值為止之不使用頻率區間被決定為包括關於壓縮機構造部136的至少一部分(例如低壓配管142、高壓配管144、旁通配管158等配管)的至少1個自然頻率ω0。運轉頻率的第1值及第2值在下限值與上限值之間,第2值大於第1值。自然頻率ω0依據設計者的經驗性見解、實驗或模擬而為已知。第1值被決定為小於自然頻率ω0的值,第2值被決定為大於自然頻率ω0的值。 [0104] 輸出分配表181中,指令控制量D的第1值d1、第2值d2、第3值d3、第4值d4,與第1輸出指令值D1的下限值D1L、第1值D11、第2值D12、上限值D1U對應關聯。如此,被指定之指令控制量D與第1輸出指令值D1的組(亦即(d1、D1L)、(d2、D11)、(d3、D12)、(d4、D1U))彼此之間藉由線性內插而被決定為指令控制量D與第1輸出指令值D1的關係。 [0105] 如圖6所示,指令控制量D在最小值d0至第1值d1之間的情況下,第1輸出指令值D1取下限值D1L。指令控制量D在第1值d1至第2值d2之間的情況下,第1輸出指令值D1在下限值D1L與第1值D11之間,第1輸出指令值D1與指令控制量D之間存在線性或比例關係。指令控制量D在第2值d2至第3值d3之間的情況下,第1輸出指令值D1取第2值D12。指令控制量D在第3值d3至第4值d4之間的情況下,第1輸出指令值D1在第2值D12與上限值D1U之間,第1輸出指令值D1與指令控制量D之間存在線性或比例關係。 [0106] 依據該種指令控制量D與第1輸出指令值D1的關係,輸出分配表181中,壓縮機主體140的下限吐出流量、第1吐出流量、第2吐出流量及上限吐出流量,與運轉頻率的下限值、第1值、第2值、上限值對應關聯。壓縮機單元的目標流量小於下限吐出流量的情況下,運轉頻率固定於下限值。在目標流量從下限吐出流量向第1吐出流量增加時,運轉頻率從下限值向第1值線性增加。若目標流量達到第1吐出流量,則運轉頻率從第1值切換為第2值,並不連續地增加。在目標流量從第1吐出流量向第2吐出流量增加時,運轉頻率固定於第2值。目標流量從第2吐出流量向上限值增加時,運轉頻率從第2值向上限值線性增加。在目標流量減少時,運轉頻率以與其相反的形式發生變化。 [0107] 並且,輸出分配表181中,指令控制量D的最小值d0、第1值d1、第2值d2、第3值d3、第4值d4,與第2輸出指令值D2的最大值D22、最小值D20、中間值D21、最小值D20、最小值D20對應關聯。第2輸出指令值D2的最大值D22可以對應於釋放閥162的最大開度。第2輸出指令值D2的最小值D20可以對應於釋放閥162的關閉。第2輸出指令值D2的中間值D21可以對應於釋放閥162的某一中間開度。指令控制量D與第2輸出指令值D2的組彼此之間藉由線性內插而被決定為指令控制量D與第2輸出指令值D2的關係。 [0108] 如圖6所示,指令控制量D在最小值d0至第1值d1之間之情況下,第2輸出指令值D2在最大值D22與最小值D20之間,第2輸出指令值D2與指令控制量D之間存在線性或比例關係。指令控制量D在第1值d1至第2值d2之間的情況下,第2輸出指令值D2取最小值D20。指令控制量D在第2值d2至第3值d3之間的情況下,第2輸出指令值D2在中間值D21與最小值D20之間,第2輸出指令值D2與指令控制量D之間存在線性或比例關係。指令控制量D在第3值d3至第4值d4之間的情況下,第2輸出指令值D2取最小值D20。 [0109] 依據這樣的指令控制量D與第2輸出指令值D2的關係,輸出分配表181中,壓縮機主體140的吐出流量與釋放閥162的開度(亦即,旁通配管158的流量)對應關聯。當壓縮機單元的目標流量為零時,釋放閥162被設為最大開度,當目標流量從零向下限吐出流量增加時,釋放閥162的開度逐漸變小。當目標流量從下限吐出流量向第1吐出流量增加時,釋放閥162關閉。若目標流量達到第1吐出流量,則釋放閥162以中間開度打開。當目標流量從第1吐出流量向第2吐出流量增加時,釋放閥162的開度逐漸變小。當目標流量從第2吐出流量向上限值增加時,釋放閥162關閉。當目標流量減少時,開度以與其相反的形式發生變化。 [0110] 藉由參閱這樣的輸出分配表181,目標流量在第1吐出流量與第2吐出流量之間的情況下,壓縮機控制器168係以運轉頻率取第2值,來決定變頻器指令訊號E。與此同時,壓縮機控制器168決定釋放閥指令訊號R,使得旁通配管158的流量與從依據前述變頻器指令訊號得到之壓縮機主體140的吐出流量減去目標流量之差分流量一致。 [0111] 依據實施形態之壓縮機單元,以包括壓縮機構造部136的自然頻率ω0之方式決定運轉頻率的不使用區間,因此不易產生基於壓縮機主體140的動作之壓縮機構造部136的共振。並且,以運轉頻率取第2值來決定變頻器指令訊號E,因此作動氣體以對目標流量附加剩餘流量(相當於上述差分流量)之總計流量,係從壓縮機主體140吐出到高壓配管144。由於以旁通配管158的流量相當於其剩餘流量之方式決定釋放閥指令訊號R,因此作動氣體以剩餘流量從高壓配管144回收到低壓配管142。藉此,壓縮機單元102、104能夠以目標流量向冷凍機12供給作動氣體。無需結構的設計變更,便能夠防止或緩和有可能在極低溫冷凍機用變頻器驅動的壓縮機單元中產生之共振,並且能夠確保所需吐出流量。 [0112] 另外,目標流量在第1吐出流量與第2吐出流量之間的情況下,決定變頻器指令訊號E,使得運轉頻率設定於第2運轉頻率區間,以此來代替將運轉頻率固定於第2值。該情況下,運轉頻率取大於第2值的值,因此壓縮機主體140的吐出流量增加。藉由增大釋放閥162的開度並增加旁通配管158的流量而能夠抵消剩餘流量。然而,若運轉頻率小則能夠減少耗電量,因此如上所述,將運轉頻率設為第2值為較佳。 [0113] 並且,藉由參閱輸出分配表181,目標流量在下限吐出流量與第1吐出流量之間的情況下,壓縮機控制器168決定變頻器指令訊號E,使得運轉頻率設定於第1運轉頻率區間。與此同時,壓縮機控制器168決定釋放閥指令訊號R,使得釋放閥162關閉。該情況下,僅藉由壓縮機變頻器170而控制壓縮機單元的吐出流量。釋放閥162不使用於吐出流量控制中。 [0114] 目標流量在第2吐出流量與上限吐出流量之間的情況下,壓縮機控制器168決定變頻器指令訊號E,使得運轉頻率設定於第2運轉頻率區間。與此同時,壓縮機控制器168決定釋放閥指令訊號R,使得釋放閥162關閉。該情況下,僅藉由壓縮機變頻器170而控制壓縮機單元的吐出流量。釋放閥162不使用於吐出流量控制中。 [0115] 目標流量在零與下限吐出流量之間的情況下,壓縮機控制器168係以運轉頻率取下限值,來決定變頻器指令訊號E。與此同時,壓縮機控制器168決定釋放閥指令訊號R,使得旁通配管158的流量與上述差分流量一致。該情況下,僅藉由釋放閥162而控制壓縮機單元的吐出流量。 [0116] 在運轉頻率從第1值切換為第2值時,壓縮機控制器可以對釋放閥指令訊號R和/或變頻器指令訊號E實施平滑化處理。平滑化處理可以採用例如低通濾波器或平均移動等的時間平滑化處理、其他任意的公知的平滑化處理。藉此,能夠防止或緩和由釋放閥指令訊號R和/或變頻器指令訊號E的不連續之變化引起之對氦氣體流量的不良影響。 [0117] 以上,依據實施例對本發明進行了說明。本發明並不限於上述實施形態,可以進行各種設計變更且存在各種變形例、及該種變形例同樣屬於本發明的範圍之事實被本領域技術人員所認同。 [0118] 在一實施形態中,CP控制器100可以控制壓縮機單元102、104。CP控制器100可以具備壓縮機控制器168。CP控制器100可以具備壓縮機變頻器170。CP控制器100可以具備下列中的至少其中1個:釋放閥驅動器174、控制量運算部176、偏差運算部178、輸出分配處理部180、輸出分配表181、變頻器指令部182、以及釋放閥指令部184。[0020] Hereinafter, referring to the drawings, a detailed description of the mode for implementing the present invention will be given. In addition, in the description, the same elements are denoted by the same reference numerals, and repeated description is appropriately omitted. In addition, the structures described below are examples, and are not intended to limit the scope of the present invention. In the following description, in the drawings to be referred to, the sizes and thicknesses of the respective constituent members are for convenience of explanation, and the actual dimensions and proportions are not necessarily shown. [0021] FIG. 1 is a diagram schematically showing an overall configuration of a cryopump system 1000 according to an embodiment of the present invention. The cryopump system 1000 is used for vacuum evacuation of the vacuum device 300. The vacuum device 300 is a vacuum processing device that processes an object in a vacuum environment, and is, for example, an ion implantation device or a sputtering device used in a semiconductor manufacturing process. [0022] The cryopump system 1000 includes a plurality of cryopumps 10. These cryopumps 10 are installed in one or a plurality of vacuum chambers (not shown) of the vacuum device 300, and are used to increase the degree of vacuum inside the vacuum chamber to a level required by a desired process. The cryopump 10 operates according to a control amount determined by a cryopump controller (hereinafter, also referred to as a CP controller) 100. For example, a high vacuum degree of about 10-5Pa to 10-8Pa can be achieved in a vacuum chamber. In the example shown in the figure, the cryopump system 1000 includes 11 cryopumps 10. The plurality of cryopumps 10 may be cryopumps having the same exhaust performance, or cryopumps having different exhaust performances. [0023] The cryopump system 1000 includes a CP controller 100. The CP controller 100 controls the cryopump 10 and the compressor units 102 and 104. The CP controller 100 includes a CPU that executes various arithmetic processes, a ROM that stores various control programs, a RAM that is used as a work area for storing data and executing programs, an input / output interface, and a memory device. The CP controller 100 is also configured to be able to communicate with a main controller (not shown) for controlling the vacuum device 300. The main controller of the vacuum device 300 may also be referred to as a controller that integrates various constituent elements of the vacuum device 300 including the cryopump system 1000. [0024] The CP controller 100 is configured differently from the cryopump 10 and the compressor units 102 and 104. The CP controller 100 is connected to the cryopump 10 and the compressor units 102 and 104 so that they can communicate with each other. The cryopump 10 is provided with an IO module 50 (see FIG. 4) for communicating with the CP controller 100 for processing input and output. The CP controller 100 and each IO module 50 are connected by a control communication line. The control communication line between the cryopump 10 and the CP controller 100 and the control communication line between the compressor units 102 and 104 and the CP controller 100 are shown by dotted lines in FIG. 1. The CP controller 100 may be integrated with any of the cryopump 10 or the compressor units 102 and 104. [0025] The CP controller 100 may be composed of a single controller, or may include a plurality of controllers each performing the same or different functions. For example, the CP controller 100 may include a compressor controller which is installed in each compressor unit and determines the control amount of each compressor unit, and a cryopump controller which integrates a cryopump system. [0026] The cryopump system 1000 includes a plurality of compressor units including at least a first compressor unit 102 and a second compressor unit 104. The compressor unit is provided to circulate the operating gas in a closed fluid circuit including the cryopump 10. The compressor unit recovers the working gas from the cryopump 10 and compresses it, and then sends it to the cryopump 10 again. The compressor unit is far from the vacuum device 300 or is provided near the vacuum device 300. The compressor unit operates according to a control amount determined by the compressor controller 168 (see FIG. 4). Alternatively, it operates in accordance with a control amount determined by the CP controller 100. [0027] Hereinafter, a cryopump system 1000 having two compressor units 102 and 104 will be described as a representative example, but the present invention is not limited to this. A cryopump system 1000 in which three or more compressor units are connected in parallel with a plurality of cryopumps 10 in the same manner as those of the compressor units 102 and 104 may also be configured. In addition, the cryopump system 1000 shown in FIG. 1 includes a plurality of cryopumps 10 and compressor units 102 and 104, but the cryopump 10 or the compressor units 102 and 104 may be provided as a single unit. [0028] The plurality of cryopumps 10 and the plurality of compressor units 102 and 104 are connected by operating a gas piping system 106. The piping system 106 is configured to be connected in parallel with the plurality of cryopumps 10 and the plurality of compressor units 102 and 104 so that the operating gas flows between the plurality of cryopump 10 and the compressor units 102 and 104. Through the piping system 106, each compressor unit of the plurality of compressor units is connected in parallel to one cryopump 10, and each cryopump of the plurality of cryopumps 10 is connected in parallel to one compressor unit. [0029] The piping system 106 includes an internal piping 108 and an external piping 110. The internal piping 108 is formed inside the vacuum device 300 and includes an internal supply pipe 112 and an internal return pipe 114. The external pipe 110 is provided outside the vacuum device 300 and includes an external supply pipe 120 and an external return pipe 122. The external piping 110 connects the vacuum device 300 and the plurality of compressor units 102 and 104. [0030] The internal supply line 112 is connected to the air supply port 42 (see FIG. 2) of each cryopump 10, and the internal return line 114 is connected to the exhaust port 44 (see FIG. 2) of each cryopump 10. In addition, the internal supply pipe 112 is connected to one end of the external supply pipe 120 of the external pipe 110 at the air supply port 116 of the vacuum device 300, and the internal return pipe 114 is connected to the external pipe 110 at the exhaust port 118 of the vacuum device 300 One end of the external return pipe 122. [0031] The other end of the external supply line 120 is connected to the first manifold 124, and the other end of the external return line 122 is connected to the second manifold 126. One end of the first discharge pipe 128 of the first compressor unit 102 and the second discharge pipe 130 of the second compressor unit 104 are connected to the first manifold 124. The other ends of the first discharge pipe 128 and the second discharge pipe 130 are respectively connected to the discharge ports 148 of the corresponding compressor units 102 and 104 (see FIG. 3). One end of the first suction pipe 132 of the first compressor unit 102 and the second suction pipe 134 of the second compressor unit 104 are connected to the second manifold 126. The other ends of the first suction pipe 132 and the second suction pipe 134 are respectively connected to suction ports 146 (see FIG. 3) of the corresponding compressor units 102 and 104. [0032] Thereby, a general-purpose supply pipe for collecting and supplying the operating gas sent from each of the compressor units 102 and 104 to the plurality of cryopumps 10 is routed to the internal supply pipe 112 and the outside. The supply line 120 is configured. In addition, a common return pipe for collecting the working gases discharged from the plurality of cryopumps 10 and returning them to the plurality of compressor units 102 and 104 is constituted by an internal return pipe 114 and an external return pipe 122. In addition, each compressor unit of the plurality of compressor units is connected to a common pipeline by a separate pipe attached to each compressor unit. A manifold for connecting the individual pipes to each other is provided at a connection portion between the individual pipes and the common pipe. The first manifold 124 merges individual pipes on the supply side, and the second manifold 126 merges individual pipes on the recovery side. [0033] Depending on the configuration of various devices in the place where the cryopump system 1000 is used (such as a semiconductor manufacturing plant), the above-mentioned common pipeline may also (different from the illustration) become a considerable length. By collecting the operating gas in the common line, the overall piping length can be shortened as compared with a case where each of the plurality of compressors is connected to a vacuum device. In addition, a piping structure in which a plurality of compressors are connected to each supply target of the actuating gas (for example, each of the cryopump 10 in the cryopump system 1000) is redundant, so it also has redundancy. A plurality of compressors are arranged in parallel to each object (for example, a cryopump) and operated, thereby sharing the load on the plurality of compressors. [0034] FIG. 2 is a cross-sectional view schematically showing a cryopump 10 according to an embodiment of the present invention. The cryopump 10 includes a first cryopanel cooled to a first cooling temperature step, and a second cryopanel cooled to a second cooling temperature step lower than the first cooling temperature step. In the first low-temperature plate, the gas having a low vapor pressure in the first cooling temperature step is captured and discharged through condensation. For example, the gas whose vapor pressure is lower than the reference vapor pressure (for example, 10-8Pa) is discharged. In the second low-temperature plate, the gas having a low vapor pressure in the second cooling temperature step is captured and discharged through condensation. An adsorption region is formed on the surface of the second low-temperature plate so as to capture non-condensable gas that does not condense due to the high vapor pressure even in the second temperature step. The adsorption area is formed, for example, by providing an adsorbent on the surface of the plate. The non-condensable gas is adsorbed into the adsorption region cooled to the second temperature stage and discharged. [0035] The cryopump 10 shown in FIG. 2 includes a refrigerator 12, a plate structure 14, and a heat shield 16. The refrigerator 12 generates cold by a heat cycle in which an operating gas is sucked in and expanded to be discharged inside. The plate structure 14 includes a plurality of low-temperature plates, and these plates are cooled by the refrigerator 12. On the surface of the plate, an extremely low-temperature surface for trapping and exhausting the gas by condensing or adsorbing the gas is formed. An adsorbent such as activated carbon for adsorbing a gas is usually provided on the surface (for example, the back surface) of the cryopanel. The heat shield 16 is provided in order to protect the board structure 14 from the surrounding radiant heat. [0036] The cryopump 10 is a so-called vertical cryopump. The vertical-type cryopump means a cryopump which is arranged by inserting the refrigerator 12 in the axial direction of the heat shield 16. The present invention can also be applied to a so-called horizontal cryopump. A horizontal cryopump is a cryopump that is arranged by inserting the second stage cooling stage of the refrigerator in a direction (usually an orthogonal direction) that intersects with the axial direction of the heat shield 16. The horizontal cryopump 10 is schematically shown in FIG. 1. [0037] The refrigerator 12 is a Gifford-McMahon refrigerator (so-called GM refrigerator). The refrigerator 12 is a two-stage refrigerator, and includes a first-stage cylinder 18, a second-stage cylinder 20, a first cooling stage 22, a second cooling stage 24, and a refrigerator motor 26. The first-stage cylinder 18 and the second-stage cylinder 20 are connected in series, and each has a first-stage displacer and a second-stage displacer (not shown) connected to each other. Inside the first-stage displacer and the second-stage displacer, a cold storage material is incorporated. In addition, the freezer 12 may be a freezer other than a 2-stage GM freezer. For example, a single-stage GM freezer may be used. A pulse tube refrigerator or a Solvay refrigerator may also be used. [0038] The freezer 12 includes a flow path switching mechanism that periodically switches the flow path of the working gas in order to periodically suck and discharge the working gas. The flow path switching mechanism includes, for example, a valve portion and a driving portion that drives the valve portion. The valve portion is, for example, a rotary valve, and the drive portion is a motor for rotating the rotary valve. The motor may be, for example, an AC motor or a DC motor. The flow path switching mechanism may be a direct acting type mechanism driven by a linear motor. [0039] A refrigerator motor 26 is provided at one end of the first-stage cylinder 18. The refrigerator motor 26 is provided inside a motor case 27 formed at an end of the first-stage cylinder 18. The refrigerator motor 26 is connected to the first-stage displacer and the second-stage displacer so that the first-stage displacer and the second-stage displacer can reciprocate inside the first-stage cylinder 18 and the second-stage cylinder 20, respectively. Device. In addition, the refrigerator motor 26 is connected to a movable valve (not shown) provided inside the motor casing 27 so as to be able to rotate forward and backward. [0040] The first cooling stage 22 is provided at an end portion on the second-stage cylinder 20 side of the first-stage cylinder 18, that is, a connection portion between the first-stage cylinder 18 and the second-stage cylinder 20. The second cooling stage 24 is provided at the end of the second-stage cylinder 20. The first cooling stage 22 and the second cooling stage 24 are respectively fixed to the first-stage cylinder 18 and the second-stage cylinder 20 by welding, for example. [0041] The refrigerator 12 is connected to the compressor unit 102 or 104 through an air supply port 42 and an exhaust port 44 provided outside the motor casing 27. The connection relationship between the cryopump 10 and the compressor units 102 and 104 is as described with reference to FIG. 1. [0042] The freezer 12 expands the high-pressure operating gas (for example, helium gas) supplied from the compressor units 102 and 104 to generate cold in the first cooling stage 22 and the second cooling stage 24. The compressor units 102 and 104 recover the operating gas expanded by the refrigerator 12 and pressurize it again to supply it to the refrigerator 12. [0043] Specifically, first, high-pressure operating gas is supplied from the compressor units 102 and 104 to the refrigerator 12. At this time, the refrigerator motor 26 drives the movable valve inside the motor housing 27 in a state where the air supply port 42 and the internal space of the refrigerator 12 are communicated. When the internal space of the refrigerator 12 is filled with the high-pressure operating gas, the movable valve is switched by the refrigerator motor 26, and the internal space of the refrigerator 12 communicates with the exhaust port 44. Thereby, the operating gas is expanded and recovered to the compressor units 102 and 104. In synchronization with the operation of the movable valve, the first-stage displacer and the second-stage displacer reciprocate inside the first-stage cylinder 18 and the second-stage cylinder 20, respectively. By performing such a heat cycle repeatedly, the refrigerator 12 causes the first cooling stage 22 and the second cooling stage 24 to cold. [0044] The second cooling stage 24 cools to a lower temperature than the first cooling stage 22. The second cooling stage 24 is cooled to, for example, about 10K to 20K, and the first cooling stage 22 is cooled to, for example, about 80K to 100K. A first temperature sensor 23 for measuring the temperature of the first cooling stage 22 is mounted on the first cooling stage 22, and a second temperature sensor for measuring the temperature of the second cooling stage 24 is mounted on the second cooling stage 24. 25. [0045] On the first cooling stage 22 of the refrigerator 12, the heat shield 16 is fixed in a thermally connected state, and on the second cooling stage 24 of the refrigerator 12, the plate structure 14 is fixed in a thermally connected state. . Therefore, the heat shield 16 is cooled to the same temperature as the first cooling stage 22, and the plate structure 14 is cooled to the same temperature as the second cooling stage 24. The heat shield 16 is formed in a cylindrical shape having an opening 31 at one end. The opening portion 31 is partitioned by the inner surface of the end portion of the cylindrical side surface of the heat shield 16. [0046] On the other hand, a blocking portion 28 is formed on the opposite side of the opening portion 31 of the heat shield 16, that is, on the other end of the pump bottom side. The closing portion 28 is formed by a flange portion extending radially inward at an end portion on the pump bottom side of the cylindrical side surface of the heat shield 16. Since the cryopump 10 shown in FIG. 2 is a vertical cryopump, the flange portion is attached to the first cooling stage 22 of the refrigerator 12. As a result, a cylindrical inner space 30 is formed inside the heat shield 16. The refrigerator 12 protrudes along the center axis of the heat shield 16 toward the internal space 30, and the second cooling stage 24 is inserted into the internal space 30. [0047] In the case of a horizontal cryopump, the occlusion portion 28 is usually completely occluded. The freezer 12 is protruded toward the internal space 30 from a freezer attachment opening formed in a side surface of the heat shield 16 in a direction orthogonal to the central axis of the heat shield 16. The first cooling stage 22 of the refrigerator 12 is attached to the refrigerator installation opening of the heat shield 16, and the second cooling stage 24 of the refrigerator 12 is disposed in the internal space 30. A plate structure 14 is attached to the second cooling stage 24. Accordingly, the plate structure 14 is disposed in the inner space 30 of the heat shield 16. The plate structure 14 can be mounted on the second cooling stage 24 via a plate mounting member having an appropriate shape. [0048] A blocking body 32 is attached to the opening 31 of the heat shield 16. The blocking body 32 is provided at a distance from the plate structure 14 in the central axis direction of the heat shield 16. The blocking body 32 is attached to an end portion on the opening 31 side of the heat shield 16 and is cooled to the same temperature as the heat shield 16. When viewed from the vacuum chamber 80 side, the blocking body 32 may be formed in, for example, a concentric circle shape, or may be formed in another shape such as a lattice shape. A gate valve (not shown) is provided between the blocking body 32 and the vacuum chamber 80. This gate valve is closed, for example, when the cryopump 10 is operated, and is opened when the vacuum chamber 80 is exhausted by the cryopump 10. The vacuum chamber 80 is provided in, for example, the vacuum device 300 shown in FIG. 1. [0049] The heat shield 16, the blocking body 32, the plate structure 14, and the first cooling stage 22 and the second cooling stage 24 of the refrigerator 12 are housed inside the pump casing 34. The pump casing 34 is formed by connecting two cylinders having different diameters in series. The large-diameter cylindrical side end portion of the open pump casing 34 is formed by extending the flange portion 36 for connection with the vacuum chamber 80 to the outside in the radial direction. The small-diameter cylindrical-side end of the pump casing 34 is fixed to the motor housing 27 of the refrigerator 12. The cryopump 10 is air-tightly fixed to the exhaust opening of the vacuum chamber 80 via the flange portion 36 of the pump casing 34, and forms an air-tight space integrated with the internal space of the vacuum chamber 80. Both the pump casing 34 and the heat shield 16 are formed in a cylindrical shape, and are disposed on the same axis. Since the inner diameter of the pump casing 34 is slightly larger than the outer diameter of the heat shield 16, the heat shield 16 and the inner surface of the pump casing 34 are arranged with a certain interval therebetween. [0050] When the cryopump 10 is operated, first, before the operation of the cryopump 10, the inside of the vacuum chamber 80 is roughly pumped to about 1 Pa to 10 Pa by using another appropriate rough pump. Thereafter, the cryopump 10 is operated. The first cooling stage 22 and the second cooling stage 24 are cooled by the drive of the refrigerator 12, and the heat shield 16, the blocking body 32, and the plate structure 14 which are connected to these heat are also cooled. [0051] The cooled barrier body 32 cools the gas molecules flying from the vacuum chamber 80 to the inside of the cryopump 10, and condenses a gas (for example, moisture) having a sufficiently low vapor pressure at the cooling temperature on the surface And drained. After the gas whose vapor pressure has not sufficiently decreased at the cooling temperature of the barrier body 32 passes through the barrier body 32, it enters the inside of the heat shield 16. Among the gas molecules that have entered, a gas (for example, argon) having a sufficiently low vapor pressure at the cooling temperature of the plate structure 14 is condensed on the surface of the plate structure 14 and discharged. At this cooling temperature, a gas (for example, hydrogen gas) that does not sufficiently decrease the vapor pressure is adsorbed and discharged by an adsorbent adhering to the surface of the plate structure 14 and cooling. Thereby, the cryopump 10 can make the degree of vacuum inside the vacuum chamber 80 reach a desired level. 3 is a diagram schematically showing a first compressor unit 102 according to an embodiment of the present invention. The second compressor unit 104 also has the same configuration as the first compressor unit 102 in this embodiment. The compressor unit 102 includes a compressor main body 140 for boosting gas, a low-pressure piping 142 for supplying low-pressure gas supplied from the outside to the compressor main body 140, and a high pressure for compressing the compressor main body 140. It is constituted by a high-pressure pipe 144 through which gas is sent to the outside. [0053] As shown in FIG. 1, the low-pressure gas is supplied to the first compressor unit 102 through the first suction pipe 132. The first compressor unit 102 receives the return gas from the cryopump 10 through the suction port 146, and the operating gas is sent to the low-pressure pipe 142. The suction port 146 is provided at the end of the low-pressure pipe 142 and is in the compressor housing 138 of the first compressor unit 102. The low-pressure pipe 142 connects the suction port 146 and the suction port of the compressor body 140. [0054] The low-pressure pipe 142 is provided with a reservoir 150 as a volume for removing pulsation included in the return gas in the middle. The storage tank 150 is provided between the suction port 146 and a branch toward a bypass mechanism 152 described later. The pulsating operating gas is removed from the storage tank 150 and is supplied to the compressor main body 140 through a low-pressure pipe 142. A filter for removing unnecessary particles or the like from the gas may be provided inside the storage tank 150. Between the storage tank 150 and the suction port 146, a receiving port and a piping for supplementing an operating gas from the outside may be connected. [0055] The compressor main body 140 is, for example, a scroll-type or rotary-type pump, and has a function of increasing the pressure of the sucked gas. The compressor main body 140 is provided with a compressor motor 172, and the compressor main body 140 is driven by the compressor motor 172. The compressor main body 140 sends the boosted working gas to the high-pressure pipe 144. The compressor main body 140 is configured to use oil for cooling, and an oil cooling pipe for circulating oil is provided in the compressor main body 140 in addition. Therefore, the boosted operating gas is sent to the high-pressure pipe 144 in a state where some of the oil is mixed. [0056] Therefore, an oil separator 154 is provided in the middle of the high-pressure pipe 144. The oil separated from the operating gas by the oil separator 154 is returned to the low-pressure pipe 142, and may be returned to the compressor main body 140 by the low-pressure pipe 142. The oil separator 154 may be provided with a release valve for releasing an excessively high pressure. [0057] In the middle of the high-pressure pipe 144 connecting the compressor main body 140 and the oil separator 154, a heat exchanger (not shown) for cooling the high-pressure operating gas sent from the compressor main body 140 may be provided. The heat exchanger cools the working gas, for example, with cooling water. The cooling water can also be used as oil for cooling the compressor body 140 for cooling. The high-pressure pipe 144 may be provided with a temperature sensor that measures the temperature of the working gas in at least one of the upstream and downstream of the heat exchanger. [0058] The gas that has been moved by the oil separator 154 is sent to the adsorber 156 through the high-pressure pipe 144. The adsorber 156 is provided, for example, to remove contaminated components that have not been removed by a pollutant removal mechanism on a flow path such as a filter in the storage tank 150 or an oil separator 154 from the working gas. The adsorber 156 removes the vaporized oil component by, for example, adsorption. [0059] The discharge port 148 is provided at the end of the high-pressure pipe 144, and is located in the compressor housing 138 of the first compressor unit 102. That is, the high-pressure pipe 144 connects the compressor main body 140 and the discharge port 148, and an oil separator 154 and an adsorber 156 are provided in the middle. The operating gas passing through the adsorber 156 is sent to the cryopump 10 through the discharge port 148. [0060] The first compressor unit 102 includes a bypass mechanism 152 that includes a bypass pipe 158 that connects the low-pressure pipe 142 and the high-pressure pipe 144. In the illustrated embodiment, the bypass pipe 158 is branched from the low-pressure pipe 142 between the storage tank 150 and the compressor body 140. The bypass pipe 158 is branched from the high-pressure pipe 144 between the oil separator 154 and the adsorber 156. [0061] The bypass mechanism 152 is provided with a control valve for controlling the flow rate of the operating gas that is bypassed from the high-pressure pipe 144 to the low-pressure pipe 142 without being sent to the cryopump 10. In the illustrated embodiment, a first control valve (also referred to as a pressure equalizing valve) 160 and a second control valve (also referred to as a release valve) 162 are provided in parallel in the middle of the bypass pipe 158. The pressure equalizing valve 160 is, for example, a normally open solenoid valve. Thereby, when the operation of the first compressor unit 102 is stopped (that is, when the power supply to the first compressor unit 102 is stopped), the pressure equalizing valve 160 is opened, and the pressures of the low-pressure pipe 142 and the high-pressure pipe 144 become equal. The release valve 162 is, for example, a normally closed solenoid valve. In this embodiment, the release valve 162 is used as a flow control valve of the bypass pipe 158 during the operation of the first compressor unit 102. [0062] The first compressor unit 102 includes a first pressure sensor 164 for measuring the pressure of the return gas from the cryopump 10, and a second pressure sensor for measuring the pressure of the gas sent from the cryopump 10测 器 166。 166. In the operation of the first compressor unit 102, the sent gas is higher in pressure than the returned gas. Therefore, the first pressure sensor 164 and the second pressure sensor 166 are also referred to as a low pressure sensor and a high pressure sensor, respectively. Device. [0063] The first pressure sensor 164 is provided to measure the pressure of the low-pressure pipe 142, and the second pressure sensor 166 is provided to measure the pressure of the high-pressure pipe 144. The first pressure sensor 164 is provided, for example, in the storage tank 150, and measures the pressure of the return gas from which the pulsation is removed in the storage tank 150. The first pressure sensor 164 may be installed at any position of the low-pressure pipe 142. The second pressure sensor 166 is provided between the oil separator 154 and the adsorber 156. The second pressure sensor 166 may be installed at any position of the high-pressure pipe 144. [0064] The first pressure sensor 164 and the second pressure sensor 166 may be provided outside the first compressor unit 102. For example, the first pressure sensor 164 and the second pressure sensor 166 may be provided on the first suction pipe 132 and the first discharge pipe 128, for example. In addition, the bypass mechanism 152 may be provided outside the first compressor unit 102. For example, the first suction pipe 132 and the first discharge pipe 128 may be connected by a bypass pipe 158. [0065] The compressor structure section 136 shown in FIG. 3 includes a compressor body 140, a low-pressure pipe 142, a high-pressure pipe 144, a suction port 146, a discharge port 148, a storage tank 150, a bypass mechanism 152, and an oil separator 154. , An adsorber 156, a bypass pipe 158, a pressure equalizing valve 160, a release valve 162, a first pressure sensor 164, a second pressure sensor 166, and a compressor motor 172. These components are housed in the compressor housing 138. [0066] FIG. 4 is a control block diagram related to the cryopump system 1000 of this embodiment. FIG. 4 shows a main part of a cryopump system 1000 according to an embodiment of the present invention. The internal details of one of the plurality of cryopumps 10 are shown, and the other cryopumps 10 are not shown for the same reason. Similarly, the first compressor unit 102 is shown in detail, and the second compressor unit 104 is the same as the second compressor unit 104. Therefore, the internal illustration is omitted. [0067] As described above, the CP controller 100 is connected to the IO module 50 of each cryopump 10 so as to be communicable. The IO module 50 includes a refrigerator inverter 52 and a signal processing unit 54. The refrigerator inverter 52 adjusts power of a predetermined voltage and frequency supplied from an external power source, such as a commercial power source, and supplies it to the refrigerator motor 26. The voltage and frequency to be supplied to the refrigerator motor 26 are controlled by the CP controller 100. [0068] The CP controller 100 determines the command control amount according to the sensor output signal. The signal processing unit 54 relays the command control amount sent from the CP controller 100 to the refrigerator inverter 52. For example, the signal processing unit 54 converts a command signal from the CP controller 100 into a signal that can be processed by the refrigerator inverter 52 and sends the signal to the refrigerator inverter 52. The command signal includes a signal indicating the operating frequency of the refrigerator motor 26. The signal processing unit 54 relays the outputs of various sensors of the cryopump 10 to the CP controller 100. For example, the signal processing unit 54 converts the sensor output signal into a signal that can be processed by the CP controller 100 and sends it to the CP controller 100. [0069] Various sensors including a first temperature sensor 23 and a second temperature sensor 25 are connected to the signal processing unit 54 of the IO module 50. As described above, the first temperature sensor 23 measures the temperature of the first cooling stage 22 of the refrigerator 12, and the second temperature sensor 25 measures the temperature of the second cooling stage 24 of the refrigerator 12. The first temperature sensor 23 and the second temperature sensor 25 periodically measure the temperatures of the first cooling stage 22 and the second cooling stage 24, respectively, and output signals indicating the measured temperatures. The measured values of the first temperature sensor 23 and the second temperature sensor 25 are input to the CP controller 100 every predetermined time, and are stored and held in a predetermined memory area of the CP controller 100. [0070] The CP controller 100 controls the refrigerator 12 in accordance with the temperature of the cryopanel. The CP controller 100 gives a command signal to the refrigerator 12 so that the actual temperature of the cryopanel follows the target temperature. For example, the CP controller 100 generates a refrigerating machine inverter command signal through feedback control so as to minimize the deviation between the target temperature of the first-stage low-temperature board and the measurement temperature of the first temperature sensor 23. The refrigerator inverter instruction signal is given from the CP controller 100 to the refrigerator inverter 52 via the IO module 50. The freezer inverter 52 controls the operating frequency of the freezer motor 26 in accordance with the freezer inverter command signal. The rotation speed of the refrigerator motor 26, that is, the frequency of the thermal cycle of the refrigerator 12, is determined according to the operating frequency of the refrigerator motor 26. The target temperature of the first-stage cryopanel is set to a specification based on a procedure performed in the vacuum chamber 80, for example. In this case, the second cooling stage 24 and the plate structure 14 of the refrigerator 12 are cooled to a temperature determined in accordance with the specifications of the refrigerator 12 and a heat load from the outside. [0071] When the measured temperature of the first temperature sensor 23 is higher than the target temperature, the CP controller 100 outputs a refrigerator inverter instruction signal to the IO module 50 in order to increase the operating frequency of the refrigerator motor 26. . In conjunction with an increase in the motor operating frequency, the frequency of the thermal cycle in the refrigerator 12 also increases, and the first cooling stage 22 of the refrigerator 12 is cooled toward the target temperature. Conversely, when the measurement temperature of the first temperature sensor 23 is lower than the target temperature, the operating frequency of the refrigerator motor 26 decreases, and the first cooling stage 22 of the refrigerator 12 is heated toward the target temperature. [0072] Normally, the target temperature of the first cooling stage 22 is set to a fixed value. Thus, when the thermal load on the cryopump 10 is increased, the CP controller 100 outputs a refrigerating machine inverter command signal to increase the operating frequency of the refrigerator motor 26. When the thermal load on the cryopump 10 is reduced, the refrigerating machine frequency is output The freezer command signal reduces the operating frequency of the refrigerator motor 26. In addition, the target temperature may be appropriately changed. For example, the target temperature of the cryopanel may be sequentially set so that the target ambient pressure is achieved in the exhaust target volume. In addition, the CP controller 100 may also control the operating frequency of the refrigerator motor 26 so that the actual temperature of the second-stage cryopanel is consistent with the target temperature. [0073] In a typical cryopump, the frequency of the thermal cycle is always set constant. It is set to operate at a large frequency so that the pump can be rapidly cooled from normal temperature to the operating temperature of the pump. When the heat load from the outside is small, the heater is used to adjust the temperature of the cryopanel. Therefore, power consumption becomes large. In contrast, in this embodiment, since the thermal cycle frequency is controlled in accordance with the thermal load of the cryopump 10, a cryopump excellent in energy saving can be realized. In addition, a heater is not necessarily provided, which also contributes to reduction in power consumption. [0074] The CP controller 100 is connected to the compressor controller 168 so as to be communicable. The control unit of the cryopump system 1000 according to an embodiment of the present invention is configured by a plurality of controllers including a CP controller 100 and a compressor controller 168. In another embodiment, the control unit of the cryopump system 1000 may be constituted by a single CP controller 100, and the compressor units 102 and 104 may be provided with an IO module instead of the compressor controller 168. In this case, the IO module relays control signals between the CP controller 100 and the constituent elements of the compressor units 102 and 104. And, the compressor controller 168 may constitute a part of the CP controller 100. [0075] The compressor controller 168 controls the first compressor unit 102 according to a control signal from the CP controller 100 or independently of the CP controller 100. In one embodiment, the compressor controller 168 receives signals indicating various set values from the CP controller 100 and uses the set values to control the first compressor unit 102. The compressor controller 168 determines the command control amount according to the sensor output signal. Like the CP controller 100, the compressor controller 168 includes a CPU that executes various arithmetic processes, a ROM that stores various control programs, a RAM that is used as a work area for storing data or executing programs, an input / output interface, And memory devices. [0076] The compressor controller 168 sends a signal indicating the operation state of the first compressor unit 102 to the CP controller 100. The signal indicating the operation state includes, for example, measured pressures of the first pressure sensor 164 and the second pressure sensor 166, the opening degree or control current of the release valve 162, and the operating frequency of the compressor motor 172. [0077] The first compressor unit 102 includes a compressor inverter 170 and a compressor motor 172. The compressor motor 172 is a motor that operates the compressor main body 140 with a variable operating frequency, and is provided in the compressor main body 140. As the refrigerator motor 26, as the compressor motor 172, various motors can be used. The compressor controller 168 generates a compressor inverter command signal and outputs it to the compressor inverter 170. The compressor inverter 170 controls the operating frequency of the compressor motor 172 according to a compressor inverter command signal. The rotation speed of the compressor motor 53 is controlled in accordance with the operating frequency of the compressor motor 172. The compressor inverter 170 adjusts electric power of a predetermined voltage and frequency supplied from an external power source such as a commercial power source in accordance with a compressor inverter command signal, and supplies the electric power to the compressor motor 172. The voltage and frequency to be supplied to the compressor motor 172 are determined according to the compressor inverter command signal. [0078] Various sensors including a first pressure sensor 164 and a second pressure sensor 166 are connected to the compressor controller 168. As described above, the first pressure sensor 164 periodically measures the pressure on the suction side of the compressor body 140, and the second pressure sensor 166 periodically measures the pressure on the discharge side of the compressor body 140. The measured values of the first pressure sensor 164 and the second pressure sensor 166 are input to the compressor controller 168 every predetermined time, and are stored and held in a predetermined memory area of the compressor controller 168. [0079] The above-mentioned release valve 162 is connected to the compressor controller 168. A release valve driver 174 for driving the release valve 162 is attached to the release valve 162. The release valve driver 174 is connected to the compressor controller 168. The compressor controller 168 generates a release valve command signal and outputs it to the release valve driver 174. The release valve command signal is for determining the opening degree of the release valve 162, and the release valve driver 174 controls the release valve 162 at the opening degree. After this, the release valve 162 is installed in the bypass pipe 158 and controls the flow of the bypass pipe 158 according to the release valve command signal. The release valve driver 174 may be assembled to the compressor controller 168. [0080] The compressor controller 168 controls the compressor main body 140 so that a differential pressure (hereinafter, sometimes referred to as a compressor differential pressure) between the input and output ports of the compressor unit 102 is maintained at a target differential pressure. For example, the compressor controller 168 performs feedback control so that the differential pressure between the input and output ports of the compressor unit 102 is set to a constant value. In one embodiment, the compressor controller 168 obtains the differential pressure of the compressor from the measured values of the first pressure sensor 164 and the second pressure sensor 166. The compressor controller 168 determines the operating frequency of the compressor motor 172 so that the compressor differential pressure is consistent with the target value. The compressor controller 168 controls the compressor inverter 170 to achieve the aforementioned operating frequency. In addition, the target value of the differential pressure can be changed while performing the differential pressure constant control. [0081] With such constant differential pressure control, further reduction in power consumption can be achieved. When the heat load to the cryopump 10 and the refrigerator 12 is small, the thermal cycle frequency in the refrigerator 12 is reduced by the above-mentioned cryogenic plate temperature adjustment control. Thereby, the amount of operating gas required in the refrigerator 12 becomes small. At this time, an amount of gas exceeding the required amount can be sent from the compressor unit 102. This increases the differential pressure between the input and output ports of the compressor unit 102. However, in this embodiment, the operating frequency of the compressor motor 172 is controlled so that the differential pressure of the compressor is constant. In this case, the operating frequency of the compressor motor 172 is reduced so that the differential pressure decreases toward the target value. Therefore, like a typical cryopump, power consumption can be reduced compared to a case where the compressor is always operated at a constant operating frequency. [0082] On the other hand, when the thermal load on the cryopump 10 becomes large, the operating frequency of the compressor motor 172 is increased so that the differential pressure of the compressor becomes constant. Therefore, since the amount of gas supplied to the refrigerator 12 can be sufficiently ensured, it is possible to suppress the deviation of the low-temperature plate temperature from the target temperature due to an increase in the heat load to a minimum. [0083] In particular, when the timing of opening the valve on the high-pressure side for inhaling the operating gas overlaps or is extremely close to the plurality of refrigerators 12, the total amount of required gas becomes large. For example, when the compressor is operated only at a constant discharge flow rate, or when the discharge pressure of the compressor is insufficient, compared with a refrigerator in which the valve is opened first and the air is sucked in, The amount of gas supplied is reduced. The difference in the amount of supplied gas between the plurality of refrigerators 12 causes a deviation in the refrigerating capacity between the refrigerators 12. Compared with such a case, it is possible to sufficiently ensure the operating gas flow rate to the refrigerator 12 by performing differential pressure control. The differential pressure control not only contributes to energy saving performance, but also suppresses variations in the refrigeration capacity between the plurality of refrigerators 12. 5 is a diagram for explaining a control flow of operation control of a compressor unit according to an embodiment of the present invention. The control process shown in FIG. 5 is repeatedly executed at a predetermined cycle through the compressor controller 168 during the operation of the cryopump 10. This processing is performed in the compressor controller 168 of each compressor unit 102 and 104 independently from the other compressor units 102 and 104. In FIG. 5, the operation processing part of the compressor controller 168 is separated by a broken line, and the operation movement of the hardware of the compressor units 102 and 104 is separated by a single-dot chain line. [0085] The compressor controller 168 includes a control amount calculation unit 176. The control amount calculation unit 176 is configured to calculate, for example, a command control amount used for at least the differential pressure constant control. In this embodiment, the calculated command control amount is distributed to the operating frequency of the compressor motor 172 and the opening degree of the release valve 162 to perform constant differential pressure control. In another embodiment, the differential pressure constant control may be performed using only one of the operating frequency of the compressor motor 172 and the opening degree of the release valve 162 as a command control amount. The control amount calculation unit 176 may be configured to calculate a command control amount used for at least any one of the control of the differential pressure constant control, the discharge pressure control, and the control of the suction pressure, as described later. [0086] As shown in FIG. 5, the compressor controller 168 has a target differential pressure ΔP 0 set and input in advance. The target differential pressure is set, for example, in the CP controller 100 and is given to the compressor controller 168. The measurement pressure PL on the suction side is measured by the first pressure sensor 164, and the measurement pressure PH on the discharge side is measured by the second pressure sensor 166, and is supplied to the compressor controller 168 from each sensor. Generally, the measurement pressure PL of the first pressure sensor 164 is lower than the measurement pressure PH of the second pressure sensor 166. [0087] The compressor controller 168 includes a deviation calculation unit 178 that subtracts the suction-side measurement pressure PL from the discharge-side measurement pressure PH to obtain the measurement differential pressure ΔP, and further subtracts the measurement from the set differential pressure ΔP 0. The differential pressure ΔP is used to determine the differential pressure deviation e. The control amount calculation unit 176 of the compressor controller 168 calculates the commanded control amount D from the differential pressure deviation e, for example, by a predetermined control amount calculation process including a PD calculation or a PID calculation. [0088] As shown in the figure, the compressor controller 168 may include a deviation calculation unit 178 in addition to the control amount calculation unit 176, and the control amount calculation unit 176 may include a deviation calculation unit 178. In addition, an integral calculation unit for multiplying the command control quantity D for a predetermined time and providing it to the output allocation processing unit 180 may be provided at a subsequent stage of the control quantity calculation unit 176. [0089] The compressor controller 168 includes an output allocation processing unit 180 that allocates the command control amount D to the first command output value D1 and the second command output value D2. The output allocation processing unit 180 determines the first command output value D1 and the second command output value D2 in accordance with the magnitude of the command control amount D value. The output allocation processing unit 180 refers to the output allocation table 181, and thereby determines the first command output value D1 and the second command output value D2 from the command control amount D. The output distribution table 181 is prepared in advance and stored in the output distribution processing unit 180 or the compressor controller 168. [0090] The command control amount D is a parameter corresponding to the target flow rate of the compressor unit. The command control amount D indicates an operating gas flow rate that the compressor unit should send in order to achieve a target pressure such as the target differential pressure ΔP 0 . In addition, the command control amount D need not directly indicate the target flow rate of the compressor unit itself. The command control amount D can be a parameter related to the target flow rate of the compressor unit or any parameter related to the target flow rate of the compressor unit according to a function or a table. [0091] The first command output value D1 is a parameter corresponding to the command value of the operating frequency of the compressor motor 172. The first command output value D1 may be a parameter related to the operation frequency command value according to a function or a table, or an arbitrary parameter related to the operation frequency command value. The second command output value D2 is a parameter corresponding to the opening degree command value of the release valve 162. The second command output value D2 may be a parameter related to the opening degree command value according to a function or table, or any parameter related to the opening degree command value. [0092] The compressor controller 168 includes an inverter instruction unit 182 that generates a compressor inverter instruction signal E from the first output instruction value D1, and a release valve instruction that generates a release valve instruction signal R from the second output instruction value D2.部 184. The compressor inverter instruction signal E is given to the compressor inverter 170, and the operating frequency of the compressor body 140, that is, the compressor motor 172 is controlled in accordance with the instruction. The compressor inverter command signal E is a voltage signal or other electric signal indicating, for example, a command value of the operating frequency. The release valve command signal R is given to the release valve driver 174, and the opening degree of the release valve 162 is controlled in accordance with the instruction. The release valve command signal R is an electric signal indicating an opening degree command value of the release valve 162, and is, for example, a pulse output signal for driving a solenoid coil. [0093] With this, the compressor controller 168 decides to release the valve command signal R and the compressor inverter command signal E, so that the actuating gas is supplied from the compressor units 102, 104 to the cryopump 10 (ie, refrigeration Machine 12). The compressor controller 168 controls the opening degree of the release valve 162 according to the determined release valve command signal R. The compressor controller 168 outputs the release valve command signal R to the release valve driver 174, thereby opening the release valve 162 according to the release valve command signal R. The compressor controller 168 controls the operating frequency of the compressor main body 140 in accordance with the determined compressor inverter command signal E. The compressor controller 168 outputs the compressor inverter command signal E to the compressor inverter 170, thereby controlling the operating frequency of the compressor motor 172 in accordance with the compressor inverter command signal E. [0094] The pressure of the helium gas as the actuating gas is determined according to the operating states of the compressor main body 140 and the release valve 162, and the characteristics of the related piping or tank. The helium pressure thus determined is measured by the first pressure sensor 164 and the second pressure sensor 166. [0095] As described above, in each of the compressor units 102 and 104, each of the compressor controllers 168 independently performs a constant differential pressure control. The compressor controller 168 performs feedback control so that the differential pressure deviation e is minimized (it is better to be zero). [0096] However, the deviation e shown in FIG. 5 is not limited to the deviation of the differential pressure. In one embodiment, the compressor controller 168 may perform a discharge pressure control that calculates a commanded control amount from a deviation between the discharge side measured pressure PH and a set pressure. In this case, the set pressure may be an upper limit value of the discharge-side pressure of the compressor. When the discharge-side measured pressure PH is greater than the upper limit, the compressor controller 168 may calculate a commanded control amount from a deviation from the discharge-side measured pressure PH. The upper limit value can be set empirically or experimentally, for example, in accordance with the maximum discharge pressure of the compressor that guarantees the exhaust capacity of the cryopump 10. [0097] With this, it is possible to suppress an excessive increase in the discharge pressure and further improve safety. Therefore, the discharge pressure control is an example of protection control for a compressor unit. [0098] Furthermore, in one embodiment, the compressor controller 168 may perform a suction pressure control that calculates a command control amount from a deviation between the measured pressure PL and the set pressure on the suction side. In this case, the set pressure may be a lower limit value of the pressure on the suction side of the compressor. When the suction-side measured pressure PL is less than the lower limit, the compressor controller 168 may calculate a commanded control amount based on a deviation from the suction-side measured pressure PL. The lower limit value can be set empirically or experimentally, for example, in accordance with the minimum suction pressure of the compressor that guarantees the exhaust capacity of the cryopump 10. [0099] Accordingly, it is possible to suppress an excessive temperature rise of the compressor main body caused by a decrease in the flow rate of the operating gas due to a decrease in the suction pressure. In addition, when a gas leak occurs from the piping system of the actuating gas, it is not necessary to stop the operation immediately, and it is possible to prevent an excessive pressure drop and continue the operation for a certain period of time. Therefore, the control of the suction pressure is an example of the protection control for the compressor unit. 6 is a diagram schematically illustrating an output allocation table 181 according to an embodiment of the present invention. The vertical axis indicates the first output command value D1 (solid line) and the second output command value D2 (dashed line), and the horizontal axis indicates the command control amount D. The first output command value D1 is indicated by a solid line, and the second output command value D2 is indicated by a dashed line. As described above, the first output command value D1 and the second output command value D2 are respectively equivalent to or related to the operating frequency command value and the opening degree command value, and the command control amount D is equivalent to or related to the target flow rate of the compressor unit. Thereby, the output distribution table 181 shows the relationship between the operating frequency command value of the compressor motor 172 and the target flow rate of the compressor unit, and the relationship between the opening degree command value of the release valve 162 and the target flow rate of the compressor unit. [0101] The range of possible values of the first output command value D1 is limited in advance to the first interval and the second interval. The first interval is a range from the lower limit value D1L to the first value D11, and the second interval is a range from the second value D12 to the upper limit value D1U. The first output command value D1 is related to the operating frequency command value, so the lower limit value D1L, the first value D11, the second value D12, and the upper limit value D1U shown in the figure correspond to the lower limit value and the first value of the operating frequency, respectively. , The second value and the upper limit. [0102] According to this, according to the output allocation table 181, the range of values that can be adopted for the operating frequency is limited in advance to the first operating frequency interval from the lower limit value to the first value, and the range from the second value to the upper limit value. The second operating frequency range. The lower limit of the operating frequency is greater than zero, for example between 20 Hz and 40 Hz, or between 25 Hz and 35 Hz, for example 30 Hz. The upper limit value of the operating frequency may be, for example, from 70 Hz to 90 Hz, or from 75 Hz to 85 Hz, and may be, for example, 78 Hz. The upper limit value and the lower limit value of the operating frequency are determined in advance as specifications of the compressor, for example. [0103] The section from the first value D11 to the second value D12 is not used. The unused frequency range from the first value to the second value of the operating frequency corresponding to the section is determined to include at least a part of the compressor structure portion 136 (for example, the low-pressure pipe 142, the high-pressure pipe 144, the bypass pipe 158, etc.) Piping) at least one natural frequency ω0. The first and second values of the operating frequency are between the lower limit and the upper limit, and the second value is greater than the first value. The natural frequency ω0 is known based on the designer's empirical insights, experiments, or simulations. The first value is determined to be smaller than the natural frequency ω0, and the second value is determined to be larger than the natural frequency ω0. [0104] In the output allocation table 181, the first value d1, the second value d2, the third value d3, and the fourth value d4 of the command control amount D, and the lower limit values D1L and the first value of the first output command value D1 D11, the second value D12, and the upper limit value D1U are associated with each other. In this way, the set of the designated command control amount D and the first output command value D1 (that is, (d1, D1L), (d2, D11), (d3, D12), (d4, D1U)) are mutually Linear interpolation is determined as the relationship between the command control amount D and the first output command value D1. [0105] As shown in FIG. 6, when the command control amount D is between the minimum value d0 and the first value d1, the first output command value D1 takes a lower limit value D1L. When the command control amount D is between the first value d1 and the second value d2, the first output command value D1 is between the lower limit value D1L and the first value D11, and the first output command value D1 and the command control amount D are between There is a linear or proportional relationship between them. When the command control amount D is between the second value d2 and the third value d3, the first output command value D1 takes the second value D12. When the command control amount D is between the third value d3 and the fourth value d4, the first output command value D1 is between the second value D12 and the upper limit value D1U, and the first output command value D1 and the command control amount D There is a linear or proportional relationship between them. [0106] According to the relationship between the command control amount D and the first output command value D1, in the output allocation table 181, the lower limit discharge flow rate, the first discharge flow rate, the second discharge flow rate, and the upper limit discharge flow rate of the compressor main body 140, and The lower limit value, the first value, the second value, and the upper limit value of the operating frequency are associated with each other. When the target flow rate of the compressor unit is smaller than the lower limit discharge flow rate, the operating frequency is fixed at the lower limit value. When the target flow rate increases from the lower limit discharge flow rate to the first discharge flow rate, the operating frequency linearly increases from the lower limit value to the first value. When the target flow rate reaches the first discharge flow rate, the operating frequency is switched from the first value to the second value, and does not increase continuously. When the target flow rate increases from the first discharge flow rate to the second discharge flow rate, the operating frequency is fixed at the second value. When the target flow rate increases from the second discharge flow rate to the upper limit value, the operating frequency linearly increases from the second value to the upper limit value. When the target flow rate decreases, the operating frequency changes in the opposite manner. [0107] In the output allocation table 181, the minimum value d0, the first value d1, the second value d2, the third value d3, and the fourth value d4 of the command control amount D and the maximum value of the second output command value D2 D22, minimum value D20, intermediate value D21, minimum value D20, minimum value D20 are correspondingly associated. The maximum value D22 of the second output command value D2 may correspond to the maximum opening degree of the release valve 162. The minimum value D20 of the second output command value D2 may correspond to the closing of the release valve 162. The intermediate value D21 of the second output command value D2 may correspond to a certain intermediate opening degree of the release valve 162. The group of the command control amount D and the second output command value D2 is determined by the linear interpolation as the relationship between the command control amount D and the second output command value D2. [0108] As shown in FIG. 6, when the command control amount D is between the minimum value d0 and the first value d1, the second output command value D2 is between the maximum value D22 and the minimum value D20, and the second output command value is There is a linear or proportional relationship between D2 and the command control amount D. When the command control amount D is between the first value d1 and the second value d2, the second output command value D2 takes the minimum value D20. When the command control amount D is between the second value d2 and the third value d3, the second output command value D2 is between the intermediate value D21 and the minimum value D20, and between the second output command value D2 and the command control amount D There is a linear or proportional relationship. When the command control amount D is between the third value d3 and the fourth value d4, the second output command value D2 takes the minimum value D20. [0109] According to the relationship between the command control amount D and the second output command value D2, in the output distribution table 181, the discharge flow rate of the compressor main body 140 and the opening degree of the release valve 162 (that is, the flow rate of the bypass pipe 158) ) Correspondence. When the target flow rate of the compressor unit is zero, the release valve 162 is set to the maximum opening degree. When the target flow rate increases from zero to the lower limit, the opening degree of the release valve 162 gradually decreases. When the target flow rate increases from the lower limit discharge flow rate to the first discharge flow rate, the release valve 162 is closed. When the target flow rate reaches the first discharge flow rate, the release valve 162 is opened at an intermediate opening degree. When the target flow rate increases from the first discharge flow rate to the second discharge flow rate, the opening degree of the release valve 162 gradually decreases. When the target flow rate increases from the second discharge flow rate to the upper limit value, the release valve 162 is closed. When the target flow decreases, the opening degree changes in the opposite form. [0110] By referring to such an output distribution table 181, when the target flow rate is between the first discharge flow rate and the second discharge flow rate, the compressor controller 168 takes the second value at the operating frequency to determine the inverter command Signal E. At the same time, the compressor controller 168 decides to release the valve command signal R so that the flow rate of the bypass pipe 158 is consistent with the differential flow rate minus the target flow rate from the discharge flow rate of the compressor main body 140 obtained according to the aforementioned inverter command signal. [0111] According to the compressor unit of the embodiment, the non-use interval of the operating frequency is determined so as to include the natural frequency ω0 of the compressor structure portion 136. Therefore, resonance of the compressor structure portion 136 based on the operation of the compressor body 140 is unlikely to occur. . In addition, since the inverter command signal E is determined by taking the second value of the operating frequency, the total flow rate of the remaining gas (equivalent to the differential flow rate) added to the target flow rate by operating the gas is discharged from the compressor main body 140 to the high-pressure pipe 144. Since the release valve command signal R is determined such that the flow rate of the bypass pipe 158 is equivalent to its remaining flow rate, the operating gas is recovered from the high-pressure pipe 144 to the low-pressure pipe 142 at the remaining flow rate. Accordingly, the compressor units 102 and 104 can supply the working gas to the refrigerator 12 at a target flow rate. No structural design changes are required to prevent or mitigate resonance that may occur in compressor units driven by inverters for cryogenic refrigerators, and to ensure the required discharge flow rate. [0112] In addition, when the target flow rate is between the first discharge flow rate and the second discharge flow rate, the inverter command signal E is determined so that the operating frequency is set to the second operating frequency range, instead of fixing the operating frequency to The second value. In this case, since the operating frequency takes a value larger than the second value, the discharge flow rate of the compressor body 140 increases. The remaining flow rate can be offset by increasing the opening degree of the release valve 162 and increasing the flow rate of the bypass pipe 158. However, if the operating frequency is small, power consumption can be reduced. Therefore, as described above, it is preferable to set the operating frequency to the second value. [0113] Furthermore, by referring to the output distribution table 181, when the target flow rate is between the lower limit discharge flow rate and the first discharge flow rate, the compressor controller 168 determines the inverter command signal E so that the operation frequency is set to the first operation Frequency interval. At the same time, the compressor controller 168 decides the release valve command signal R, so that the release valve 162 is closed. In this case, only the compressor inverter 170 controls the discharge flow rate of the compressor unit. The release valve 162 is not used in the discharge flow rate control. [0114] When the target flow rate is between the second discharge flow rate and the upper limit discharge flow rate, the compressor controller 168 determines the inverter command signal E so that the operation frequency is set in the second operation frequency interval. At the same time, the compressor controller 168 decides the release valve command signal R, so that the release valve 162 is closed. In this case, only the compressor inverter 170 controls the discharge flow rate of the compressor unit. The release valve 162 is not used in the discharge flow rate control. [0115] In the case where the target flow rate is between zero and the lower limit discharge flow rate, the compressor controller 168 takes the lower limit value of the operating frequency to determine the frequency converter command signal E. At the same time, the compressor controller 168 decides to release the valve command signal R, so that the flow rate of the bypass pipe 158 is consistent with the differential flow rate. In this case, the discharge flow rate of the compressor unit is controlled only by the release valve 162. [0116] When the operating frequency is switched from the first value to the second value, the compressor controller may smooth the release valve command signal R and / or the inverter command signal E. The smoothing process may be, for example, a time-pass smoothing process such as a low-pass filter or an average moving process, or any other well-known smoothing process. Thereby, it is possible to prevent or mitigate the adverse effect on the helium gas flow rate caused by discontinuous changes in the release valve command signal R and / or the inverter command signal E. [0117] The present invention has been described based on the embodiments. The present invention is not limited to the above-mentioned embodiments, and various design changes can be made and various modifications exist, and the fact that such modifications also belong to the scope of the present invention is recognized by those skilled in the art. [0118] In one embodiment, the CP controller 100 can control the compressor units 102 and 104. The CP controller 100 may include a compressor controller 168. The CP controller 100 may include a compressor inverter 170. The CP controller 100 may include at least one of the following: a release valve driver 174, a control amount calculation unit 176, a deviation calculation unit 178, an output allocation processing unit 180, an output allocation table 181, an inverter instruction unit 182, and a release valve Command section 184.
[0119][0119]
12‧‧‧冷凍機12‧‧‧Freezer
136‧‧‧壓縮機構造部136‧‧‧Compressor Structure Department
140‧‧‧壓縮機主體140‧‧‧compressor body
142‧‧‧低壓配管142‧‧‧Low-pressure piping
144‧‧‧高壓配管144‧‧‧High-pressure piping
158‧‧‧旁通配管158‧‧‧Primary tube
168‧‧‧壓縮機控制器168‧‧‧compressor controller
170‧‧‧壓縮機變頻器170‧‧‧compressor inverter
172‧‧‧壓縮機馬達172‧‧‧Compressor motor
[0019] [圖1] 為示意性表示有關本發明的一實施形態之低溫泵系統的整體構成之圖。 [圖2] 為示意性表示有關本發明的一實施形態之低溫泵之剖視圖。 [圖3] 為示意性表示有關本發明的一實施形態之壓縮機單元之圖。 [圖4] 為與本實施形態之低溫泵系統有關之控制方塊圖。 [圖5] 為用於說明有關本發明的一實施形態之壓縮機單元運轉控制的控制流程的圖。 [圖6] 為示意性例示有關本發明的一實施形態之輸出分配表之圖。[0019] FIG. 1 is a diagram schematically showing an overall configuration of a cryopump system according to an embodiment of the present invention. [FIG. 2] A cross-sectional view schematically showing a cryopump according to an embodiment of the present invention. [FIG. 3] A diagram schematically showing a compressor unit according to an embodiment of the present invention. [Fig. 4] is a control block diagram related to the cryopump system of this embodiment. [Fig. 5] Fig. 5 is a diagram for explaining a control flow of operation control of a compressor unit according to an embodiment of the present invention. [FIG. 6] A diagram schematically illustrating an output allocation table according to an embodiment of the present invention.
Claims (5)
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JP2017020625A JP2018127929A (en) | 2017-02-07 | 2017-02-07 | Compressor unit for cryogenic refrigerator, and cryopump system |
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JP (1) | JP2018127929A (en) |
KR (1) | KR20190116263A (en) |
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CN111483294B (en) * | 2019-01-25 | 2022-04-29 | 宇通客车股份有限公司 | Compressor frequency calculation method and device of automobile air conditioning system |
KR102602814B1 (en) | 2021-06-04 | 2023-11-17 | 한국기계연구원 | Cryopump system and meothod of controlling the cryopump system |
DE102021118448A1 (en) * | 2021-07-16 | 2023-01-19 | Bayerische Motoren Werke Aktiengesellschaft | Control unit for reducing the operating noise of an electric refrigerant compressor |
CN113847048A (en) * | 2021-10-09 | 2021-12-28 | 浙江大学 | Multi-pump electric control cooperative tunneling machine cutter head driving servo control system and control method |
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- 2018-02-02 KR KR1020197020636A patent/KR20190116263A/en unknown
- 2018-02-02 WO PCT/JP2018/003571 patent/WO2018147179A1/en active Application Filing
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WO2018147179A1 (en) | 2018-08-16 |
US20190360496A1 (en) | 2019-11-28 |
TW201833438A (en) | 2018-09-16 |
JP2018127929A (en) | 2018-08-16 |
CN110234877B (en) | 2020-11-20 |
KR20190116263A (en) | 2019-10-14 |
CN110234877A (en) | 2019-09-13 |
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