TWI676627B - Photosensitive resin composition, photocurable pattern formed from the same and image display comprising the pattern - Google Patents

Photosensitive resin composition, photocurable pattern formed from the same and image display comprising the pattern Download PDF

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TWI676627B
TWI676627B TW105106105A TW105106105A TWI676627B TW I676627 B TWI676627 B TW I676627B TW 105106105 A TW105106105 A TW 105106105A TW 105106105 A TW105106105 A TW 105106105A TW I676627 B TWI676627 B TW I676627B
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meth
acrylate
pattern
resin composition
photosensitive resin
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TW201700476A (en
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金聖彬
Seong Been Kim
全吉敏
Ji Min Chun
趙庸桓
Yong Hwan Cho
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南韓商東友精細化工有限公司
Dongwoo Fine-Chem Co., Ltd.
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

本發明提供一種光敏樹脂組合物、由此形成之光硬化圖案、及備有該光硬化圖案之圖像顯示裝置。本發明係有關一種藉由含特定構造之化合物而可進行低溫硬化,化學耐受性優良的光敏樹脂組合物、由此形成之光硬化圖案、及備有該光硬化圖案之圖像顯示裝置。The present invention provides a photosensitive resin composition, a photocurable pattern formed thereby, and an image display device provided with the photocurable pattern. The present invention relates to a photosensitive resin composition which can be hardened at a low temperature by using a compound containing a specific structure and is excellent in chemical resistance, a photocurable pattern formed thereby, and an image display device provided with the photocurable pattern.

Description

光敏樹脂組合物、由此形成之光硬化圖案、及備有該光硬化圖案之圖像顯示裝置Photosensitive resin composition, photocurable pattern formed thereby, and image display device provided with the photocurable pattern

本發明係關於一種光敏樹脂組合物、由此形成之光硬化圖案、及備有該光硬化圖案之圖像顯示裝置。The present invention relates to a photosensitive resin composition, a photocurable pattern formed thereby, and an image display device provided with the photocurable pattern.

於顯示器領域,光敏樹脂組合物係為了形成光阻、絕緣膜、保護膜、黑矩陣、柱間隔物等各式各樣的光硬化圖案而使用。具體而言,藉由光蝕刻步驟,將光敏樹脂組合物選擇性地曝光及顯影,形成所需的光硬化圖案。於此過程中,為了使步驟上的良率提升,使適用對象的物性提升,要求高感度的光敏樹脂組合物。In the field of displays, photosensitive resin compositions are used to form various photo-curable patterns such as photoresist, insulating films, protective films, black matrices, and column spacers. Specifically, the photosensitive resin composition is selectively exposed and developed through a photo-etching step to form a desired photo-hardening pattern. In this process, in order to improve the yield in the step and to improve the physical properties of the application target, a highly sensitive photosensitive resin composition is required.

近年來,於LCD製造步驟,為了提升生產性,進行圖案製造時,以低溫燒成步驟比高溫燒成步驟製造更高可靠性的濾光片的研究。然而,以200℃以下使以往的光敏樹脂組合物硬化時,前述樹脂組合物的硬化未充分進行,發生與下部基板之密著性降低,發生圖案剝離,亦或為了形成薄膜,曝光量增加,感度降低的問體點等。因此,對於低溫燒成步驟中,可充分硬化的低溫硬化型之光敏樹脂組合物的需求升高。In recent years, in the LCD manufacturing process, in order to improve productivity, when performing pattern manufacturing, a low-temperature firing step is used to manufacture a more reliable filter than a high-temperature firing step. However, when the conventional photosensitive resin composition is cured at a temperature of 200 ° C or lower, the curing of the resin composition does not proceed sufficiently, the adhesion to the lower substrate decreases, pattern peeling occurs, or the amount of exposure increases to form a thin film. Question points with reduced sensitivity, etc. Therefore, the demand for a low-temperature-curable photosensitive resin composition that can be sufficiently hardened in the low-temperature firing step is increasing.

進而言之,要求可進行低溫硬化,並且有備於光敏樹脂組合物在步驟中,會處於鹼等嚴苛的環境下的情況,亦要求改善化學耐受性。In addition, it is required that low-temperature hardening is possible, and the photosensitive resin composition is required to be in a severe environment such as an alkali during the step, and chemical resistance is also required to be improved.

專利文獻1揭示有關一種光敏樹脂組合物,包含:含嵌段異氰酸酯基之單體;具有乙烯性不飽和雙鍵及酸基之單體;樹脂黏結劑,其以包含以1以上之乙烯性不飽和雙鍵之單體聚合之共聚物;具有乙烯性不飽和雙鍵之多官能性單體;起始劑;著色劑及溶劑;但未提示對於前述問題點的取代方案。 先行技術文獻 專利文獻Patent Document 1 discloses a photosensitive resin composition including: a monomer containing a block isocyanate group; a monomer having an ethylenically unsaturated double bond and an acid group; and a resin binder containing an ethylenic compound having an ethylene content of 1 or more. A copolymerized monomer of a saturated double bond; a polyfunctional monomer having an ethylenically unsaturated double bond; an initiator; a colorant and a solvent; but no substitution scheme for the aforementioned problems is suggested. Prior technical literature Patent literature

[專利文獻1]韓國公開專利第2014-0147056號公報[Patent Document 1] Korean Published Patent No. 2014-0147056

發明所欲解決之問題Problems to be solved by the invention

本發明之目的在於提供一種可進行低溫硬化,並且形成圖案之化學耐受性等耐久性優良的光敏樹脂組合物。An object of the present invention is to provide a photosensitive resin composition that can be cured at a low temperature and has excellent durability such as chemical resistance for pattern formation.

又,本發明之目的在於提供一種由前述光敏樹脂組合物形成之光硬化圖案。Another object of the present invention is to provide a photocurable pattern formed from the photosensitive resin composition.

進而言之,本發明之目的在於提供一種備有前述光硬化圖案之圖像顯示裝置。 解決問題之技術手段Furthermore, an object of the present invention is to provide an image display device including the aforementioned light-hardened pattern. Technical means to solve problems

1.一種光敏樹脂組成物,包含下述化學式1;1. A photosensitive resin composition comprising the following Chemical Formula 1;

[化1][化學式1][Chemical 1] [Chemical Formula 1]

(式中,R1 ~R6 、R8 及R9 分別獨自為氫或碳數1~6之直鏈或分支鏈之烷基,R7 為氫,前述X- 為有機酸鹽陰離子。)(Wherein R 1 to R 6 , R 8 and R 9 are each independently hydrogen or a linear or branched alkyl group having 1 to 6 carbon atoms, R 7 is hydrogen, and X - is an organic acid salt anion.)

2.如前述項目1所記載的光敏樹脂組成物,其中前述化學式1之化合物之R1 ~R9 全為氫。2. The photosensitive resin composition according to the item 1, wherein all of R 1 to R 9 of the compound of the chemical formula 1 are hydrogen.

3.如前述項目1所記載的光敏樹脂組成物,其中前述化學式1之化合物之陰離子係從包括對甲苯磺酸鹽陰離子、2-羧基苯甲酸鹽陰離子及辛酸鹽陰離子的群組中選擇之任一者。3. The photosensitive resin composition according to the item 1, wherein the anion of the compound of the chemical formula 1 is selected from the group consisting of a p-toluenesulfonate anion, a 2-carboxybenzoate anion, and an octanoate anion. Either.

4.如前述項目1所記載的光敏樹脂組成物,其中前述化學式1之化合物係相對於組成物之全體100重量部,含0.05~10重量部。4. The photosensitive resin composition according to the aforementioned item 1, wherein the compound of the chemical formula 1 contains 0.05 to 10 parts by weight based on 100 parts by weight of the entire composition.

5.如前述項目1所記載的光敏樹脂組成物,其中進一步包含鹼可溶性樹脂、光聚合性化合物、光聚合起始劑及溶劑。5. The photosensitive resin composition according to the item 1, further comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent.

6.如前述項目5所記載的光敏樹脂組成物,其中前述鹼可溶性樹脂包含具有環氧基之鹼可溶性樹脂。6. The photosensitive resin composition according to the item 5, wherein the alkali-soluble resin includes an alkali-soluble resin having an epoxy group.

7.如前述項目5所記載的光敏樹脂組成物,其中前述鹼可溶性樹脂包含:第1樹脂,其具有下述化學式2所示之重複單位;及第2樹脂,其具有下述化學式3所示之重複單位;7. The photosensitive resin composition according to the item 5, wherein the alkali-soluble resin includes: a first resin having a repeating unit represented by the following chemical formula 2; and a second resin having a repeating unit represented by the following chemical formula 3 Repeating unit

[化2][化學式2][Chemical 2] [Chemical Formula 2]

(式中,R1 、R2 及R3 分別獨自為氫或甲基, R4 係來自從包括(甲基)丙烯酸、2‒(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl hexahydro phthalate)、2‒(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl phthalate)、及2‒(甲基)丙烯醯氧基丁二酸乙酯(2‒((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造; R5 係來自從包括下述式(1)~(9)的群組中選擇之單體的構造; R6 係來自從包括下述式(10)~(12)的群組中選擇之單體的構造; a=10~60mol%、b=20~50mol%、c=10~70mol%。)(In the formula, R 1 , R 2 and R 3 are each independently hydrogen or methyl, and R 4 is derived from (meth) acrylic acid, 2 甲基 (meth) acrylic acid, oxyethyl hexahydrophthalate) Esters (2 ‒ ((Metha) Acryloyloxy) ethyl hexahydro phthalate), 2 ‒ ((Metha) Acryloyloxy) ethyl phthalate), and 2‒ The structure of the monomer selected from the group of ((Metha) Acryloyloxy) ethyl succinate); R 5 is derived from the following formulas (1) to ( 9) the structure of the monomers selected in the group; R 6 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (12); a = 10 to 60 mol%, b = 20 to 50 mol%, and c = 10 to 70 mol%. )

[式3][化學式3][Formula 3] [Chemical Formula 3]

(式中,R1 、R2 、R3 及R4 分別獨自為氫或甲基, R5 係來自從包括(甲基)丙烯酸、2‒(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl hexahydro phthalate)、2‒(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl phthalate)、及2‒(甲基)丙烯醯氧基丁二酸乙酯(2‒((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造; R6 係來自從包括(甲基)丙烯酸苄酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯、(2‒苯基)苯氧基乙氧基(甲基)丙烯酸酯、2‒羥基‒(2‒苯基)苯酚丙基(甲基)丙烯酸酯、2‒羥基‒(3‒苯基)苯氧基丙基(甲基)丙烯酸酯、(甲基)丙烯酸四氫呋喃甲酯、(甲基)苯乙烯、乙烯基甲苯、乙烯基萘、N‒苄基順丁烯二醯亞胺、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、甲氧基乙二醇(甲基)丙烯酸酯、甲氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基四乙二醇(甲基)丙烯酸酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯及(甲基)丙烯酸四氫呋喃甲酯的群組中選擇之單體的構造; R7 係來自從包括前述式(1)~(9)的群組中選擇之單體的構造; R8 係來自從包括下述式(10)~(16)的群組中選擇之單體的構造; d=10~30mol%、e=10~20mol%、f=30~60mol%、g=10~30mol%。)(In the formula, R 1 , R 2 , R 3 and R 4 are each independently hydrogen or methyl. R 5 is derived from (meth) acrylic acid, 2‒ (meth) acrylic acid, oxyethyl hexahydro ortho) Phthalate (2) ((Metha) Acryloyloxy) ethyl hexahydro phthalate), 2 ‒ ((meth) acryloyloxy) ethyl phthalate), And 2‒ (meth) acryloxy succinate (2 丁 ((Metha) Acryloyloxy) ethyl succinate) selected from the group of monomer structure; R 6 series from (meth) acrylic acid Benzyl ester, phenoxyethylene glycol (meth) acrylate, phenoxy diethylene glycol (meth) acrylate, (2'phenyl) phenoxyethoxy (meth) acrylate, 2 ‒Hydroxy‒ (2‒phenyl) phenolpropyl (meth) acrylate, 2‒hydroxy‒ (3‒phenyl) phenoxypropyl (meth) acrylate, tetrahydrofuran methyl (meth) acrylate, (Meth) styrene, vinyltoluene, vinylnaphthalene, N-benzyl cis-butenediimine, methyl (meth) acrylate, ethyl (meth) acrylate, methoxyethylene glycol ( (Meth) acrylate, methoxydiethylene glycol (meth) acrylate Acid ester, methoxytriethylene glycol (meth) acrylate, methoxytetraethylene glycol (meth) acrylate, phenoxyethylene glycol (meth) acrylate, phenoxydiethylene glycol Structure of monomers selected from the group of alcohol (meth) acrylate and tetrahydrofuran methyl (meth) acrylate; R 7 is derived from monomers selected from the group including the aforementioned formulae (1) to (9) The structure of R 8 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (16); d = 10-30 mol%, e = 10-20 mol%, f = 30-60 mol%, and g = 10-30 mol%. )

8.如前述項目5所記載的光敏樹脂組成物,其中進一步包含多官能硫醇基。8. The photosensitive resin composition according to the item 5, further comprising a polyfunctional thiol group.

9.如前述項目1所記載的光敏樹脂組成物,其可於70~100℃硬化。9. The photosensitive resin composition according to the aforementioned item 1, which can be cured at 70 to 100 ° C.

10.一種光硬化圖案,由如前述項目1至9中任一項所記載的光敏樹脂組成物所製造。10. A light-hardening pattern manufactured from the photosensitive resin composition as described in any one of said items 1-9.

11.如前述項目10所記載的光硬化圖案,其中前述光硬化圖案係從包括接著劑層、陣列平坦化膜圖案、保護膜圖案、絕緣膜圖案、光阻圖案、彩色濾光片圖案、黑矩陣圖案及柱間隔物圖案的群組中選擇。11. The light-hardening pattern according to the item 10, wherein the light-hardening pattern includes an adhesive layer, an array flattening film pattern, a protective film pattern, an insulating film pattern, a photoresist pattern, a color filter pattern, and black Select from a matrix pattern and a column spacer pattern.

12.一種圖案顯示裝置,包含如前述項目10所記載的光硬化圖案。 發明之效果12. A pattern display device including the photocurable pattern according to the item 10 above. Effect of the invention

本發明之光敏樹脂組成物由於可於低溫進行硬化,因此顯示優良的反應性。Since the photosensitive resin composition of the present invention can be cured at a low temperature, it exhibits excellent reactivity.

又,由本發明之光敏樹脂組成物製造之圖案顯示優良的化學耐受性等高耐久性。In addition, the pattern produced from the photosensitive resin composition of the present invention exhibits high durability such as excellent chemical resistance.

本發明尤其可適用於負型光敏樹脂。The present invention is particularly applicable to a negative photosensitive resin.

用以實施發明之形態Forms used to implement the invention

本發明係有關一種藉由含特定構造之化合物,可於低溫進行硬化,化學耐受性優良的光敏樹脂組合物、由此形成之光硬化圖案、及備有該光硬化圖案之圖像顯示裝置。The present invention relates to a photosensitive resin composition which can be hardened at a low temperature by using a compound containing a specific structure and has excellent chemical resistance, a photocurable pattern formed thereby, and an image display device provided with the photocurable pattern. .

以下詳細說明本發明。The present invention is explained in detail below.

光敏樹脂 組成物 本發明之光敏樹脂組成物包含下述化學式1之化合物。 Photosensitive resin composition The photosensitive resin composition of the present invention includes a compound of the following Chemical Formula 1.

[化1][化學式1][Chemical 1] [Chemical Formula 1]

式中,R1 ~R6 、R8 及R9 分別獨自為氫或碳數1~6之直鏈或分支鏈之烷基,R7 為氫,前述X- 為有機酸鹽陰離子。In the formula, R 1 to R 6 , R 8 and R 9 are each independently hydrogen or a linear or branched alkyl group having 1 to 6 carbon atoms, R 7 is hydrogen, and X - is an organic acid salt anion.

前述化學式1之化合物之R7位的氫為酸性(acidic),可容易脫離,因此即使於100℃以下的低溫,仍可進行光敏樹脂組成物之硬化。尤其於鹼可溶性樹脂包含環氧構造時,藉由前述酸性(acidic)氫使前述環氧基開環,可進一步提升低溫下的硬化度。The hydrogen at the R7 position of the compound of the aforementioned Chemical Formula 1 is acidic and can be easily detached. Therefore, the photosensitive resin composition can be hardened even at a low temperature of 100 ° C or lower. In particular, when the alkali-soluble resin contains an epoxy structure, the epoxy group can be ring-opened by the acidic hydrogen to further improve the degree of hardening at a low temperature.

作為本發明一實施形態,前述化學式1之化合物之R1 ~R9 亦可全為氫。As an embodiment of the present invention, all of R 1 to R 9 of the compound of the aforementioned Chemical Formula 1 may be hydrogen.

前述化學式1之化合物之陰離子(X- )若是不易與從R7 脫離的氫結合,離子化程度高,且不脫離本發明之目的者均可,其種類未特別限制。具體而言,從包括對甲苯磺酸鹽陰離子、2-羧基苯甲酸鹽陰離子及辛酸鹽陰離子的群組中選擇之任一者亦可。The chemical formula of the anionic compound 1 (X -) is not easy if combined with hydrogen desorbed from R 7, a high degree of ionization, and without departing from the object of the present invention may be those, which are not particularly restricted species. Specifically, any one may be selected from the group consisting of p-toluenesulfonate anion, 2-carboxybenzoate anion, and octanoate anion.

如本發明之光敏樹脂組合物,前述化學式1所示化合物的含量並未特別限制,具體而言,相對於組成物之全體100重量部,可含0.05~5重量部,更宜含0.1~5重量部。前述化學式1所示化合物的含量若在前述範圍內,光敏樹脂組合物之低溫硬化能力更加提升。According to the photosensitive resin composition of the present invention, the content of the compound represented by the aforementioned Chemical Formula 1 is not particularly limited. Specifically, it may contain 0.05 to 5 parts by weight, and more preferably 0.1 to 5 parts with respect to 100 parts by weight of the entire composition. Weight department. If the content of the compound represented by the aforementioned Chemical Formula 1 is within the aforementioned range, the low-temperature curing ability of the photosensitive resin composition is further enhanced.

本發明之光敏樹脂組合物除了化學式1之化合物以外,可進一步包含該領域習知的成分。可進一步包含例如鹼可溶性樹脂、光聚合性化合物、光聚合起始劑及溶劑。The photosensitive resin composition of the present invention may further include components known in the art in addition to the compound of Chemical Formula 1. For example, it may further contain an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent.

鹼可溶性樹脂 於本發明,鹼可溶性樹脂對於形成圖案時之顯影處理步驟所用之鹼顯影液,賦予可溶性的成分,若於不脫離本發明之目的的範圍內,可不特別限制其種類而使用。Alkali-soluble resin In the present invention, the alkali-soluble resin provides soluble components to the alkali developing solution used in the development processing step during pattern formation, as long as it does not deviate from the object of the present invention, the type thereof can be used without particular limitation.

作為具體例,丙烯酸系共聚物可舉出含羧基單體及可與前述單體共聚之其他單體之共聚物等。Specific examples of the acrylic copolymer include a copolymer of a carboxyl group-containing monomer and other monomers copolymerizable with the monomer.

含羧基單體之具體例可舉出不飽和單羧酸,或於不飽和二羧酸、不飽和三羧酸等分子中,具有1以上之羧基之不飽和多價羧酸等不飽和羧酸等。Specific examples of the carboxyl group-containing monomer include unsaturated monocarboxylic acids, and unsaturated polycarboxylic acids such as unsaturated dicarboxylic acids having 1 or more carboxyl groups in molecules such as unsaturated dicarboxylic acids and unsaturated tricarboxylic acids. Wait.

該等含羧基單體可分別單獨使用,或混合兩種以上使用。These carboxyl group-containing monomers can be used individually or in combination of two or more kinds.

可與前述含羧基單體共聚之其他單體之具體例,可舉出:芳族乙烯基化合物; 不飽和羧酸酯類; 不飽和羧酸胺基烷基酯類; 不飽和羧酸縮水甘油基酯類; 羧酸乙烯基酯類; 不飽和醚類; 氰化乙烯基化合物; 不飽和醯胺類; 不飽和醯亞胺類; 脂肪族共軛二烯類; 於聚苯乙烯、聚丙烯酸甲酯、聚甲基丙烯酸甲酯、聚正丙烯酸丁酯、聚正甲基丙烯酸丁酯、聚矽氧烷之聚合物分子鏈末端,具有單丙烯醯基或單甲基丙烯醯基之巨單體類等。Specific examples of other monomers that can be copolymerized with the carboxyl group-containing monomer include: aromatic vinyl compounds; unsaturated carboxylic acid esters; unsaturated carboxylic acid amino alkyl esters; unsaturated carboxylic acid glycidol Base esters; vinyl carboxylic acid esters; unsaturated ethers; vinyl cyanide compounds; unsaturated amidines; unsaturated amidines; aliphatic conjugated diene; polystyrene, polyacrylic acid Methyl ester, polymethyl methacrylate, poly n-butyl acrylate, poly n-butyl methacrylate, and polysiloxane polymer molecular chain ends, with a mono-acryl group or mono-methacryl group Body class, etc.

該等單體可分別單獨使用,或混合兩種以上使用。These monomers can be used individually or in combination of two or more.

鹼可溶性樹脂之含羧基單體單位之含量一般為10~50質量%,較宜為15~40質量%,更宜為25~40質量%。含羧基單體單位之含量為10~50質量%時,對於顯影液之溶解性良好,顯影時趨向正確形成圖案,故較適宜。The content of the carboxyl-containing monomer unit of the alkali-soluble resin is generally 10 to 50% by mass, more preferably 15 to 40% by mass, and even more preferably 25 to 40% by mass. When the content of the carboxyl group-containing monomer unit is 10 to 50% by mass, the solubility in the developing solution is good, and the pattern tends to be formed correctly during development, so it is more suitable.

前述丙烯酸系共聚物可舉出例如(甲基)丙烯酸/(甲基)丙烯酸甲酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/2‒羥基(甲基)丙烯酸乙酯/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚苯乙烯巨單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚(甲基)丙烯酸甲酯巨單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯聚(甲基)丙烯酸甲酯巨單體共聚物、(甲基)丙烯酸/2‒羥基(甲基)丙烯酸乙酯/(甲基)丙烯酸苄酯/聚苯乙烯巨單體共聚物、(甲基)丙烯酸/2‒羥基(甲基)丙烯酸乙酯/(甲基)丙烯酸苄酯/聚(甲基)丙烯酸甲酯巨單體共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸苄酯/N‒苯基順丁烯二醯亞胺共聚物、(甲基)丙烯酸/丁二酸單(2‒丙烯醯氧)/苯乙烯/(甲基)丙烯酸苄酯/N‒苯基順丁烯二醯亞胺共聚物、(甲基)丙烯酸/丁二酸單(2‒丙烯醯氧乙基)/苯乙烯/(甲基)丙烯酸芳酯/N‒苯基順丁烯二醯亞胺共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯/N‒苯基順丁烯二醯亞胺/苯乙烯/丙三醇單(甲基)丙烯酸酯共聚物等。在此,(甲基)丙烯酸酯意味丙烯酸酯或甲基丙烯酸酯。Examples of the acrylic copolymer include a (meth) acrylic acid / (meth) acrylic acid copolymer, a (meth) acrylic acid / (meth) acrylic acid benzyl ester copolymer, and a (meth) acrylic acid / 2 hydroxy group. Ethyl (meth) acrylate / benzyl (meth) acrylate copolymer, (meth) acrylic acid / methyl (meth) acrylate / polystyrene macromonomer copolymer, (meth) acrylic acid / (meth) ) Methyl acrylate / poly (meth) acrylate macromonomer copolymer, (meth) acrylic acid / benzyl (meth) acrylate poly (meth) acrylate macromonomer copolymer, (meth) Acrylic acid / 2 hydroxy ethyl (meth) acrylate / benzyl (meth) acrylate / polystyrene macromonomer copolymer, (meth) acrylic acid / 2 hydroxy ethyl (meth) acrylate / (methyl) ) Benzyl acrylate / poly (meth) acrylic acid macromonomer copolymer, (meth) acrylic acid / styrene / benzyl (meth) acrylate / N-phenyl cis butylene diimide copolymer, (Meth) acrylic acid / succinic acid mono (2‒acrylic acid) / styrene / (meth) acrylic acid benzyl ester / N‒phenylcis butylene diimide copolymer, (meth) acrylic acid / butyl Diacid mono (2‒propylene 醯 oxyethyl) / benzene Ene / (meth) acrylic acid ester / N-phenyl cis butene difluorene imine copolymer, (meth) acrylic acid / benzyl (meth) acrylate / N phenyl cis butylene diimide / Styrene / glycerol mono (meth) acrylate copolymer and the like. Here, (meth) acrylate means acrylate or methacrylate.

其中尤宜使用(甲基)丙烯酸/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯/苯乙烯共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/苯乙烯共聚物。Among them, (meth) acrylic acid / benzyl (meth) acrylate copolymer, (meth) acrylic acid / benzyl (meth) acrylate / styrene copolymer, and (meth) acrylic acid / (meth) acrylic acid are particularly suitable. Methyl ester copolymer, (meth) acrylic acid / methyl (meth) acrylate / styrene copolymer.

前述鹼可溶性樹脂宜可包含具有環氧基之鹼可溶性樹脂。The aforementioned alkali-soluble resin may preferably contain an alkali-soluble resin having an epoxy group.

作為前述具有環氧基之鹼可溶性樹脂之一實施形態,本發明之鹼可溶性樹脂可包含:第1樹脂,其具有下述化學式2所示之重複單位;及第2樹脂,其具有下述化學式3所示之重複單位。As one embodiment of the aforementioned alkali-soluble resin having an epoxy group, the alkali-soluble resin of the present invention may include: a first resin having a repeating unit represented by the following chemical formula 2; and a second resin having the following chemical formula Repeating unit shown in 3.

[化2][化學式2][Chemical 2] [Chemical Formula 2]

式中,R1 、R2 及R3 分別獨自為氫或甲基, R4 係來自從包括(甲基)丙烯酸、2‒(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl hexahydro phthalate)、2‒(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl phthalate)、及2‒(甲基)丙烯醯氧基丁二酸乙酯(2‒((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造; R5 係來自從包括下述式(1)~(9)的群組中選擇之單體的構造; R6 係來自從包括下述式(10)~(12)的群組中選擇之單體的構造; a=10~60mol%、b=20~50mol%、c=10~70mol%。In the formula, R 1 , R 2, and R 3 are each independently hydrogen or methyl, and R 4 is derived from (meth) acrylic acid, 2 甲基 (meth) acryl 醯 oxyethyl hexahydrophthalic acid Esters (2 ‒ ((Metha) Acryloyloxy) ethyl hexahydro phthalate), 2 ‒ ((Metha) Acryloyloxy) ethyl phthalate), 2 ‒ ((Metha) Acryloyloxy) ethyl phthalate), and 2‒ ( The structure of monomers selected from the group consisting of (meth) acryloyloxy ethyl succinate; (R 5) is derived from the following formulae (1) to (9) The structure of the monomer selected in the group of); R 6 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (12); a = 10 to 60 mol%, b = 20 to 50 mol%, and c = 10 to 70 mol%.

[化3][化學式3][Chemical 3] [Chemical Formula 3]

式中,R1、R2、R3及R4分別獨自為氫或甲基, R5 係來自從包括(甲基)丙烯酸、2‒(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl hexahydro phthalate)、2‒(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2‒((Metha)Acryloyloxy)ethyl phthalate)、及2‒(甲基)丙烯醯氧基丁二酸乙酯(2‒((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造; R6 係來自從包括(甲基)丙烯酸苄酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯、(2‒苯基)苯氧基乙氧基(甲基)丙烯酸酯、2‒羥基‒(2‒苯基)苯酚丙基(甲基)丙烯酸酯、2‒羥基‒(3‒苯基)苯氧基丙基(甲基)丙烯酸酯、(甲基)丙烯酸四氫呋喃甲酯、(甲基)苯乙烯、乙烯基甲苯、乙烯基萘、N‒苄基順丁烯二醯亞胺、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、甲氧基乙二醇(甲基)丙烯酸酯、甲氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基四乙二醇(甲基)丙烯酸酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯及(甲基)丙烯酸四氫呋喃甲酯的群組中選擇之單體的構造; R7 係來自從包括前述式(1)~(9)的群組中選擇之單體的構造; R8 係來自從包括下述式(10)~(16)的群組中選擇之單體的構造; d=10~30mol%、e=10~20mol%、f=30~60mol%、g=10~30mol%。In the formula, R1, R2, R3, and R4 are each independently hydrogen or methyl, and R 5 is derived from (meth) acrylic acid, 2‒ (meth) acryl 醯 oxyethyl hexahydrophthalate. (2 ‒ ((Metha) Acryloyloxy) ethyl hexahydro phthalate), 2 ‒ ((Metha) Acryloyloxy) ethyl phthalate), and 2 ‒ ((Metha) Acryloyloxy) ethyl phthalate), and The structure of the monomers selected from the group of (meth) acryloyloxy ethyl succinate; R 6 is derived from the group consisting of benzyl (meth) acrylate, phenoxy Ethylene glycol (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, (2‒phenyl) phenoxyethoxy (meth) acrylate, 2‒hydroxy‒ (2 (Phenyl) phenolpropyl (meth) acrylate, 2‒hydroxy‒ (3‒phenyl) phenoxypropyl (meth) acrylate, tetrahydrofuran methyl (meth) acrylate, (meth) benzene Ethylene, vinyl toluene, vinyl naphthalene, N-benzyl cis-butene diimide, methyl (meth) acrylate, ethyl (meth) acrylate, methoxyethylene glycol (meth) acrylate Methoxydiethylene glycol (meth) acrylate , Methoxytriethylene glycol (meth) acrylate, methoxytetraethylene glycol (meth) acrylate, phenoxyethylene glycol (meth) acrylate, phenoxydiethylene glycol ( Structures of monomers selected from the group consisting of meth) acrylates and tetrahydrofuran methyl (meth) acrylate; R 7 is a structure derived from monomers selected from the group consisting of the aforementioned formulae (1) to (9) ; R 8 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (16); d = 10-30 mol%, e = 10-20 mol%, f = 30-60 mol%, and g = 10-30 mol%.

於本發明,化學式2及化學式3所示之各個重複單位不得限定於化學式2及化學式3所示而解釋,括弧內之子重複單位可於設定之莫耳%範圍內,自由位於鏈之任一位置。亦即,化學式2及化學式3之各括弧是為了表現莫耳%而以1個嵌段來表現,但各子重複單位若在該樹脂內,其所在即可不受限制,作為嵌段或各自分離均可。In the present invention, each repeating unit shown in Chemical Formula 2 and Chemical Formula 3 must not be interpreted as being limited to that shown in Chemical Formula 2 or Chemical Formula 3. The child repeating units in parentheses can be freely located at any position in the chain within the set Mohr% range . That is, each parenthesis of Chemical Formula 2 and Chemical Formula 3 is expressed as one block in order to express mole%. However, if each sub-repeating unit is in the resin, it can be located without restriction, and can be separated as a block or separately. Both.

本發明之化學式2之化合物的較佳例可舉出下述化學式2-1之化合物。Preferable examples of the compound of Chemical Formula 2 of the present invention include compounds of the following Chemical Formula 2-1.

[化2-1][化學式2-1][Chemical 2-1] [Chemical Formula 2-1]

式中,R1 、R2 及R3 分別獨自為氫或甲基,a=10~60mol%、b=20~50mol%、c=10~70mol%。In the formula, R 1 , R 2, and R 3 are each independently hydrogen or methyl, a = 10 to 60 mol%, b = 20 to 50 mol%, and c = 10 to 70 mol%.

本發明之化學式3之化合物的較佳例可舉出下述化學式3-1之化合物。Preferable examples of the compound of Chemical Formula 3 of the present invention include the following compounds of Chemical Formula 3-1.

[化3-1][化學式3-1][Chem. 3-1] [Chemical Formula 3-1]

式中,R1 、R2 、R3 及R4 分別獨自為氫或甲基,d=10~30mol%、e=10~20mol%、f=30~60mol%、g=10~30mol%。In the formula, R 1 , R 2 , R 3, and R 4 are each independently hydrogen or methyl, d = 10-30 mol%, e = 10-20 mol%, f = 30-60 mol%, and g = 10-30 mol%.

本發明之第1樹脂發揮改善光敏樹脂組成物之化學耐受性及反應性的功能。從該觀點考量,第1樹脂之重量平均分子量宜為6,000~12,000。若於前述分子量範圍,可顯示出最優良的反應性及化學耐受性。The first resin of the present invention functions to improve the chemical resistance and reactivity of the photosensitive resin composition. From this viewpoint, the weight average molecular weight of the first resin is preferably 6,000 to 12,000. When it is in the aforementioned molecular weight range, the most excellent reactivity and chemical resistance can be exhibited.

本發明之第2樹脂發揮改善光敏樹脂組成物之圖案形成性及耐熱性等耐久性的功能。從該觀點考量,第2樹脂之重量平均分子量宜為20,000~30,000。若於前述分子量範圍,可顯示出最優良的圖案形成性及耐熱性等。The second resin of the present invention has a function of improving the durability of the photosensitive resin composition, such as pattern formation properties and heat resistance. From this viewpoint, the weight average molecular weight of the second resin is preferably 20,000 to 30,000. When it is in the aforementioned molecular weight range, the most excellent pattern-forming property, heat resistance, and the like can be exhibited.

本發明之第1樹脂與前述第2樹脂之混合重量比可為50:50~90:10,較宜為70~30~80:20。若第1樹脂之含量少於第2樹脂,則低溫硬化性降低,發生顯影後殘渣。若第1樹脂之含量超過第2樹脂重量之9倍,則圖案形成性降低。The mixing weight ratio of the first resin and the second resin of the present invention may be 50:50 to 90:10, and more preferably 70 to 30 to 80:20. When the content of the first resin is less than that of the second resin, the low-temperature curability is reduced, and residues after development occur. When the content of the first resin exceeds 9 times the weight of the second resin, the pattern formability is reduced.

本發明之第1樹脂及第2樹脂除了互相獨自包含化學式2及化學式3之重複單位以外,亦可進一步包含以該領域習知的其他單體形成之重複單位,或僅以化學式2之重複單位形成均可。The first resin and the second resin of the present invention may include, in addition to each other, repeating units of Chemical Formula 2 and Chemical Formula 3 alone, and may further include repeating units formed of other monomers known in the art, or only repeating units of Chemical Formula 2. Can be formed.

鹼可溶性樹脂之聚苯乙烯換算之重量平均分子量一般為5,000~50,000,宜為8,000~40,000,更宜為10,000~35,000,最宜為10,000~30,000。若鹼可溶性樹脂之分子量為5,000~50,000,由於導膜硬度提升,殘膜率亦升高,未曝光部對於顯影液之溶解性良好,解像度趨向提升,故較適宜。The polystyrene-equivalent weight average molecular weight of the alkali-soluble resin is generally 5,000 to 50,000, preferably 8,000 to 40,000, more preferably 10,000 to 35,000, and most preferably 10,000 to 30,000. If the molecular weight of the alkali-soluble resin is 5,000 to 50,000, the hardness of the guide film is increased, and the residual film ratio is also increased. The unexposed portion has good solubility for the developer, and the resolution tends to increase, so it is more suitable.

鹼可溶性樹脂之酸價一般為50~150,宜為60~140,更宜為80~135,最宜為80~130。若酸價為50~150,由於對於顯影液之溶解性提升,未曝光性容易溶解而高感度化,於顯影時,曝光部之圖案殘留,殘膜率趨向提升,故較適宜。在此,酸價係指作為中和丙烯酸系聚合物1g所需之氫氧化鉀的量(mg)而測量的值,一般使用氫氧化鉀水溶液進行滴定以求出。The acid value of the alkali-soluble resin is generally 50 to 150, preferably 60 to 140, more preferably 80 to 135, and most preferably 80 to 130. If the acid value is 50 to 150, the solubility in the developing solution is improved, and the non-exposure property is easy to dissolve and the sensitivity is increased. During development, the pattern of the exposed portion remains and the residual film rate tends to increase, so it is more suitable. Here, the acid value refers to a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of the acrylic polymer, and is generally determined by titration with an aqueous potassium hydroxide solution.

鹼可溶性樹脂之含量並未特別限定,具體而言,相對於本發明之光敏樹脂組合物之全體100重量部,可含10~90重量部,更宜含25~80重量部。包含如前述之含量時,由於對顯影液之溶解性充分,於非像素部分之基板上,不易發生顯影殘渣,於顯影時,不易發生曝光部之像素部分的膜減少,因此非像素部分的脫落性趨向良好。進而言之,可形成具有優良的機械物性之光硬化圖案,故較適宜。The content of the alkali-soluble resin is not particularly limited. Specifically, it may contain 10 to 90 parts by weight, and more preferably 25 to 80 parts by weight based on 100 parts by weight of the entire photosensitive resin composition of the present invention. When the content is included as described above, since the developer has sufficient solubility in the developing solution, development residues are unlikely to occur on the substrate of the non-pixel portion, and during development, it is difficult to reduce the film of the pixel portion of the exposed portion, so the non-pixel portion falls off. Sex tends to be good. In addition, a photo-hardening pattern having excellent mechanical properties can be formed, which is preferable.

光聚合性化合物 本發明之光敏樹脂組成物所用的聚合性化合物,可於製造步驟中增加架橋密度,強化光硬化圖案之機械特性。Photopolymerizable compound The polymerizable compound used in the photosensitive resin composition of the present invention can increase the bridging density in the manufacturing step and strengthen the mechanical properties of the photocurable pattern.

光聚合性化合物可無特別限制地使用該領域所用之物,例如單官能單體、二官能單體及其他多官能單體。其種類並未特別限定,可舉出下述化合物作為其例。The photopolymerizable compound can be used in the field without particular limitation, such as a monofunctional monomer, a difunctional monomer, and other polyfunctional monomers. The type is not particularly limited, and the following compounds are exemplified.

單官能單體之具體例可舉出壬基苯基丙烯酸卡必酯、2-羥基-3-苯氧丙烯酸丙酯、2-乙基己基丙烯酸卡必酯、2-羥基丙烯酸乙酯、N-乙烯基砒喀烷酮等。二官能單體之具體例可舉出1,6–己二醯二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、雙酚A之雙(丙烯醯氧乙基)醚、3-甲基戊烷二醇(甲基)丙烯酸酯等。其他多官能單體之具體例可舉出三羥甲基丙烷三(甲基)丙烯酸酯、乙氧基化(乙氧化)三羥甲基丙烷三(甲基)丙烯酸酯、丙氧基化(丙氧化)三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、乙氧基化(乙氧化)二季戊四醇六(甲基)丙烯酸酯、丙氧基化(丙氧化)二季戊四醇六(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等。其中尤宜使用二官能以上之多官能單體。Specific examples of the monofunctional monomer include carbyl nonylphenyl acrylate, propyl 2-hydroxy-3-phenoxyacrylate, carbitol 2-ethylhexyl acrylate, ethyl 2-hydroxyacrylate, and N- Vinyl benzalkanone and the like. Specific examples of the difunctional monomer include 1,6-hexamethylene di (meth) acrylate, ethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, and triethyl Glycol di (meth) acrylate, bis (acryloxyethyl) ether of bisphenol A, 3-methylpentanediol (meth) acrylate, and the like. Specific examples of other polyfunctional monomers include trimethylolpropane tri (meth) acrylate, ethoxylated (ethoxylated) trimethylolpropane tri (meth) acrylate, and propoxylated ( (Propoxy) trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, ethoxylated (ethyl Oxidation) dipentaerythritol hexa (meth) acrylate, propoxylated (propoxylated) dipentaerythritol hexa (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like. Among them, it is particularly preferable to use a difunctional or more polyfunctional monomer.

前述聚合性化合物之含量並未特別限定,例如以光敏樹脂組成物中之固形物為基準,相對於鹼可溶性樹脂100重量部,以10~90質量部,更宜以30~80質量部的範圍來使用。聚合性化合物之含量若為前述範圍,可具有優良的耐久性,可提升組成物之顯影性。The content of the polymerizable compound is not particularly limited. For example, based on the solid content in the photosensitive resin composition, it is preferably in the range of 10 to 90 parts by mass, and more preferably in the range of 30 to 80 parts by mass based on 100 parts by weight of the alkali-soluble resin. To use. If the content of the polymerizable compound is within the aforementioned range, it can have excellent durability and can improve the developability of the composition.

光聚合起始劑 本發明之光聚合起始劑若是可聚合前述聚合性化合物之物,其種類並未特別限制,例如可使用從包括苯乙酮系化合物、二苯甲酮系化合物、三嗪系化合物、聯咪唑系化合物、噻吨酮系化合物、肟酯系化合物的群組中選擇之至少1種化合物,宜使用聯咪唑系化合物或肟酯系化合物。Photopolymerization initiator The type of the photopolymerization initiator of the present invention is not particularly limited as long as it can polymerize the aforementioned polymerizable compound, and examples thereof include acetophenone-based compounds, benzophenone-based compounds, and triazines. As the at least one compound selected from the group consisting of a series compound, a biimidazole compound, a thioxanthone compound, and an oxime ester compound, a biimidazole compound or an oxime ester compound is preferably used.

又,前述光聚合起始劑為了使本發明之光敏樹脂組成物的感度提升,亦可進一步包含光聚合起始助劑。本發明之光敏樹脂組成物藉由包含光聚合起始助劑,感度進一步升高,可提升生產性。In addition, the photopolymerization initiator may further include a photopolymerization initiator in order to improve the sensitivity of the photosensitive resin composition of the present invention. The photosensitive resin composition of the present invention contains a photopolymerization initiation aid to further increase sensitivity and improve productivity.

前述光聚合起始助劑可舉出從包括胺化合物、羧酸化合物、及具有硫醇基之有機硫化合物的群組中選擇之1種以上的化合物。Examples of the photopolymerization starting aid include one or more compounds selected from the group consisting of an amine compound, a carboxylic acid compound, and an organic sulfur compound having a thiol group.

前述光聚合起始劑之含量並未特別限定,例如以固形物為基準,相對於光敏樹脂組成物之全體100重量部,可含0.1~10重量部,更宜含0.1~5重量部。若符合前述範圍,由於光敏樹脂組成物會高感度化,曝光時間縮短,因此生產性提升,可維持高解像度,且形成像素部之強度及像素度表面之平滑性良好,故較適宜。The content of the photopolymerization initiator is not particularly limited. For example, based on the solid content, it may contain 0.1 to 10 parts by weight, and more preferably 0.1 to 5 parts by weight, based on 100 parts by weight of the entire photosensitive resin composition. If it falls within the aforementioned range, the photosensitive resin composition will be highly sensitive and the exposure time will be shortened. Therefore, productivity will be improved, high resolution can be maintained, and the strength of the formed pixel portion and the smoothness of the pixelized surface are good, which is suitable.

溶劑 溶劑若是該領域一般所用之物,可無限制地使用任何溶劑。Solvent If the solvent is generally used in the field, any solvent can be used without limitation.

前述溶劑之具體例可舉出乙二醇單烷醚類、二乙二醇二烷醚類、乙二醇烷醚乙酸酯類、亞烷基二醇烷醚乙酸酯類、丙二醇單烷醚類、丙二醇二烷醚類、丙二醇烷醚丙酸酯類、丁二醇單烷醚類、丁二醇單烷醚乙酸酯類、丁二醇單烷醚丙酸酯類、二丙二醇二烷醚類、芳族碳化氫類、酮類、醇類、酯類、及環狀酯類等。在此例示之溶劑可分別單獨使用,或混合兩種以上使用。從塗佈性及乾燥性的觀點考量,前述溶劑宜使用亞烷基二醇烷醚乙酸酯類、二乙二醇二烷醚類、亞烷基二醇烷醚乙酸酯類、酮類、丁二醇烷醚乙酸酯類、丁二醇單烷醚類、及酯類,進而宜使用丙二醇單甲醚乙酸酯、二乙二醇甲基乙醚、丙二醇單乙醚乙酸酯、環己酮、甲氧丁基乙酸酯、甲氧丁醇、3-乙氧丙酸乙基、3-甲氧丙酸甲基等。Specific examples of the solvent include ethylene glycol monoalkyl ethers, diethylene glycol dialkyl ethers, ethylene glycol alkyl ether acetates, alkylene glycol alkyl ether acetates, and propylene glycol monoalkyl ethers. , Propylene glycol dialkyl ethers, propylene glycol alkyl ether propionates, butanediol monoalkyl ethers, butanediol monoalkyl ether acetates, butanediol monoalkyl ether propionates, dipropylene glycol dialkyl ethers , Aromatic hydrocarbons, ketones, alcohols, esters, and cyclic esters. The solvents exemplified herein may be used alone or in combination of two or more. From the standpoint of coatability and drying properties, the aforementioned solvents are preferably alkylene glycol alkyl ether acetates, diethylene glycol dialkyl ethers, alkylene glycol alkyl ether acetates, ketones, butane. Glycol alkyl ether acetates, butanediol monoalkyl ethers, and esters, and further preferably propylene glycol monomethyl ether acetate, diethylene glycol methyl ether, propylene glycol monoethyl ether acetate, cyclohexanone, Methoxybutyl acetate, methoxybutanol, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, and the like.

前述溶劑之含量並未特別限定,具體而言,相對於光敏樹脂組成物之全體100重量部,可含40~95重量部,更宜含45~85重量部。若符合前述範圍,由於以旋轉塗佈機、狹縫與旋轉塗佈機、狹縫塗佈機(有時亦稱為模塗佈機、淋幕式塗佈機)、噴墨塗佈機等塗佈裝置塗佈時,塗佈性變佳,故較適宜。The content of the aforementioned solvent is not particularly limited. Specifically, it may contain 40 to 95 parts by weight, and more preferably 45 to 85 parts by weight, based on 100 parts by weight of the entire photosensitive resin composition. If the above range is met, spin coaters, slit and spin coaters, slit coaters (also sometimes referred to as die coaters, curtain coaters), inkjet coaters, etc. When the coating device is applied, the applicability is improved, so it is suitable.

添加劑 本發明之光敏樹脂組成物亦可因應需要,進一步包含填充劑、其他高分子化合物、硬化劑、均染劑、密著促進劑、抗氧化劑、紫外線吸收劑、凝集防止劑、鏈轉移劑等添加劑。Additives The photosensitive resin composition of the present invention may further include fillers, other polymer compounds, hardeners, leveling agents, adhesion promoters, antioxidants, ultraviolet absorbers, agglutination preventers, chain transfer agents, etc. as required. additive.

前述添加劑之含量並未特別限定,具體而言,相對於光敏樹脂組成物之全體100重量部,亦可含0.1~15重量部,更宜含0.1~10重量部。The content of the aforementioned additives is not particularly limited. Specifically, it may contain 0.1 to 15 parts by weight, and more preferably 0.1 to 10 parts by weight, based on 100 parts by weight of the entire photosensitive resin composition.

光硬化圖案及圖像顯示裝置 本發明之目的在於提供一種由前述光敏樹脂組合物製造之光硬化圖案、及包含前述光硬化圖案之圖像顯示裝置。 Photocurable pattern and image display device An object of the present invention is to provide a photocurable pattern produced from the photosensitive resin composition and an image display device including the photocurable pattern.

由前述光敏樹脂組成物製造之光硬化圖案係低溫硬化性優良,化學耐受性等優良。因此,可利用於圖像顯示裝置之各種圖案,例如接著劑層、陣列平坦化膜、保護膜、絕緣膜圖案等,亦可利用於光阻、黑矩陣、柱間隔物等,但不限制於此,尤其適宜作為光阻圖案。The photocurable pattern produced from the photosensitive resin composition is excellent in low-temperature curability and excellent in chemical resistance and the like. Therefore, it can be used in various patterns of image display devices, such as adhesive layers, array planarization films, protective films, and insulating film patterns. It can also be used in photoresist, black matrix, column spacers, etc., but it is not limited to This is particularly suitable as a photoresist pattern.

具備該類光硬化圖案,或於製造過程中使用前述圖案之圖像顯示裝置,可舉出液晶顯示裝置、OLED、可撓顯示器等,但不限定於該等裝置,可例示可適用之該領域中習知的所有圖像顯示裝置。Examples of the image display device having such a light-hardened pattern or using the aforementioned pattern in the manufacturing process include a liquid crystal display device, an OLED, and a flexible display. However, the image display device is not limited to these devices, and the applicable field is exemplified. All image display devices known in the art.

光硬化圖案可藉由於基材上,塗佈前述本發明之光敏樹脂組成物(依需要歷經曝光及顯影步驟後),形成光硬化圖案來製造。The light-hardening pattern can be produced by coating the photosensitive resin composition of the present invention (after exposing and exposing steps as necessary) on the substrate to form a light-hardening pattern.

以下,為了有助於理解本發明而提示較佳實施例,但該等實施例僅止於例示本發明,不限制所附的申請專利範圍,對同業者而言,顯然可於本發明之範疇及技術思想範圍內,對於實施例施以各種變更及修正,該類變更及修正當然亦屬於所附的申請專利範圍。In the following, preferred embodiments are suggested in order to help understand the present invention, but these embodiments are only for exemplifying the present invention, and do not limit the scope of the attached patent application. It is obvious to the industry that it is within the scope of the present invention. Within the scope of technical and technical ideas, various changes and amendments are applied to the embodiments, and such changes and amendments naturally belong to the scope of the attached patent application.

製造例 1. 可溶性樹脂 ( 1 樹脂 ) 之合成 於備有回流冷卻器、滴下漏斗及攪拌機之1L燒瓶內,放入甲基乙基二乙二醇300g(4.05莫耳),一面攪拌一面加熱至70℃。接著,將下述化學式8及化學式9之混合物(莫耳比50:50)300g(1.36莫耳)、甲基丙烯酸縮水甘油酯150g(1.06莫耳)及甲基丙烯酸50g(1.7莫耳),溶解於甲基乙基二乙二醇140g(0.94莫耳),調製成溶液。 Example 1. Synthesis of alkali-soluble resin (first resin) in the manufacture with a reflux condenser, dropping funnel and a stirrer within the 1L flask, diethylene glycol methyl ethyl placed 300g (4.05 mole), stirring and Heat to 70 ° C. Next, 300 g (1.36 mol) of a mixture of the following Chemical Formulas 8 and 9 (molar ratio 50:50), 150 g (1.06 mol) of glycidyl methacrylate, and 50 g (1.7 mol) of methacrylic acid, It was dissolved in 140 g (0.94 mole) of methyl ethyl diethylene glycol and prepared into a solution.

[化8][化學式8][Chemical 8] [Chemical Formula 8]

[化9][化學式9][Chemical 9] [Chemical Formula 9]

將製造之溶液,使用滴下漏斗,歷經4小時,於保溫於70℃之燒瓶內滴下。另,將聚合起始劑2,2'‒偶氮雙(2,4‒二甲基戊腈)30g(0.12莫耳),溶解於甲基乙基二乙二醇225g(1.5莫耳)之溶液,使用另外的滴下漏斗,歷經4小時滴下於燒瓶內。聚合起始劑之溶液的滴下結束後,4小時維持於70℃,其後冷卻至室溫,獲得固形物36.7mass%、酸價59mg-KOH/g(固形物換算)之共聚物(第1樹脂)的溶液。The prepared solution was dropped into a flask held at 70 ° C. using a dropping funnel over 4 hours. In addition, 30 g (0.12 mol) of a polymerization initiator 2,2 ′ azobis (2,4 dimethyl valeronitrile) was dissolved in 225 g (1.5 mol) of methyl ethyl diethylene glycol. The solution was dropped into the flask over 4 hours using another dropping funnel. After the dropping of the solution of the polymerization initiator was completed, it was maintained at 70 ° C for 4 hours, and then cooled to room temperature to obtain a copolymer having a solid content of 36.7 mass% and an acid value of 59 mg-KOH / g (in terms of solid content) (No. 1 Resin).

所獲得的第1樹脂之重量平均分子量Mw為8,200,分子量分布為1.85。The weight average molecular weight Mw of the obtained first resin was 8,200, and the molecular weight distribution was 1.85.

此時,前述分散樹脂之重量平均分子量(Mw)及數量平均分子量(Mn)的測定係使用HLC-8120GPC(TOSOH股份有限公司製)裝置,又管柱係將TSK-GELG4000HXL及TSK-GELG2000HXL予以串聯連接使用,管柱溫度為40℃,轉移相溶劑為四氫呋喃,流速為1.0mL/分,注入量為50mL,檢測器係使用RI,測定試料濃度為0.6mass%(溶劑=四氫呋喃),校正用標準物質採用TSK STANDARD POLYSTYRENE F-40、F-4、F-1、A-2500、A-500(TOSOH股份有限公司製)。At this time, the measurement of the weight average molecular weight (Mw) and the number average molecular weight (Mn) of the aforementioned dispersing resin is performed using an HLC-8120GPC (manufactured by TOSOH Co., Ltd.) device, and the column system is a series of TSK-GELG4000HXL and TSK-GELG2000HXL For connection use, the column temperature is 40 ° C, the transfer phase solvent is tetrahydrofuran, the flow rate is 1.0mL / min, the injection volume is 50mL, the detector uses RI, and the measurement sample concentration is 0.6mass% (solvent = tetrahydrofuran). The calibration standard The substance used was TSK STANDARD POLYSTYRENE F-40, F-4, F-1, A-2500, A-500 (made by TOSOH Co., Ltd.).

前述所獲得的重量平均分子量及數量平均分子量的比設為分子量分布(Mw/Mn)。The ratio of the weight-average molecular weight and the number-average molecular weight obtained above is referred to as a molecular weight distribution (Mw / Mn).

製造例 2. 可溶性樹脂 ( 2 樹脂 ) 之合成 除了單體使用苯乙烯30g(0.29莫耳)、甲基丙烯酸45g(0.5莫耳)、甲基丙烯酸縮水甘油酯135g(0.95莫耳)、2‒(八氫‒4,7‒甲橋‒1H‒茚‒5‒基)甲基‒2‒丙烯酸乙酯65g(0.3莫耳)以外,均採用與製造例1同樣的方法,獲得固形物32.4mass%、酸價31mg-KOH/g(固形物換算)之共聚物(第2樹脂)的溶液。 Example 2. Synthesis of alkali-soluble resin (second resin) in addition to the monomers for producing the styrene 30g (0.29 mole), methacrylic acid 45g (0.5 mole), glycidyl methacrylate 135g (0.95 mole), A solid material was obtained in the same manner as in Production Example 1 except that 2 g (octahydrofluorene 4,7 g bridge, 1H g, indene g, 5 gyl), methyl gland 2 g, ethyl acrylate, and 65 g (0.3 mol) were used. A solution of a copolymer (second resin) of 32.4 mass% and an acid value of 31 mg-KOH / g (in terms of solid content).

所獲得的第2樹脂之重量平均分子量Mw為28,000,分子量分布為3.20。The weight average molecular weight Mw of the obtained second resin was 28,000, and the molecular weight distribution was 3.20.

實施例 1 於藉由製造例1合成之鹼可溶性樹脂1 12.8重量部、藉由製造例2合成之鹼可溶性樹脂2 27.0重量部、作為光聚合性化合物之二季戊四醇六丙烯酸酯(KAYARAD DPHA,日本化藥股份有限公司製)9.7重量部、作為光聚合起始劑之肟酯系化合物OXE-01 0.7重量部、2,2'-雙(2-氯苯)-4,4',5,5'-四苯‒1,2'‒聯咪唑0.2重量部、及多官能硫醇基之(2,4,6‒三氧代‒1,3,5‒三嗪‒1,3,5‒三基)三(乙烷‒2,1-二基)三(3‒丁酸巰酯((2,4,6‒trioxo‒1,3,5‒triazinane‒1,3,5‒triyl)tris(ethane‒2,1‒diyl)tris(3‒mercaptobutanoate))7.3重量部,混合添加劑之SH-8400 0.1重量部,以硬化度提升為目的,混合U-CAT SA506(2,3,4,6,7,8,9,10‒八氫嘧啶并[1,2‒a]aqepin‒1‒ium(2,3,4,6,7,8,9,10‒octahydropyrimido[1,2‒a]aqepin‒1‒ium)、及對甲苯磺酸(p‒toluenesulfonate)的鹽類,San Apro製)0.2重量部、二乙二醇甲基乙醚:丙二醇單甲醚乙酸酯之混合比(重量比)4:6之溶劑,使得全體成為100重量部,攪拌3小時,製造光敏樹脂組成物。 Example 1 consists of 12.8 parts by weight of alkali-soluble resin 1 synthesized in Production Example 1, 27.0 parts by weight of alkali-soluble resin 2 synthesized in Production Example 2, and dipentaerythritol hexaacrylate (KAYARAD DPHA, Japan) as a photopolymerizable compound. (Made by Chemical Pharmaceutical Co., Ltd.) 9.7 parts by weight, oxime ester compound OXE-01 as a photopolymerization initiator 0.7 parts by weight, 2,2'-bis (2-chlorobenzene) -4,4 ', 5,5 0.2 parts by weight of '-tetraphenylpyrene 1, 2' and biimidazole, and (2,4,6, trioxo, 1,3,5, triazine, 1,3,5,3) of polyfunctional thiol groups Tris (ethane‒2,1-diyl) tris (3‒butyric acid thiol ((2,4,6‒trioxo‒1,3,5‒triazinane‒1,3,5‒triyl) tris ( ethane‒2,1‒diyl) tris (3‒mercaptobutanoate)) 7.3 parts by weight, and SH-8400 0.1 parts by weight of the additive. For the purpose of improving the hardening degree, U-CAT SA506 (2,3,4,6, 7,8,9,10‒octahydropyrimido [1,2‒a] aqepin‒1‒ium (2,3,4,6,7,8,9,10‒octahydropyrimido [1,2‒a] aqepin ‒1‒ium) and p-toluenesulfonate salts, manufactured by San Apro) 0.2 parts by weight, the mixing ratio of diethylene glycol methyl ether: propylene glycol monomethyl ether acetate ( Ratio) 4: 6 of the solvent, so that the whole became 100 parts by weight, was stirred for 3 hours to prepare a photosensitive resin composition.

實施例 2 除了使用U-CAT SA810(陰離子為2‒羧基苯甲酸鹽,San Apro製)以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Example 2 except that U-CAT SA810 (2-carboxy anions benzoate, San Apro Ltd.)., Are used in the same manner as in Example, for producing a photosensitive resin composition.

實施例 3 除了使用U-CAT SA102(陰離子為辛酸鹽,San Apro製)以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Example 3 except that U-CAT SA102 (octanoic acid salt anion, San Apro Ltd.)., Are used in the same manner as in Example 1, producing the photosensitive resin composition.

實施例 4 除了含U-CAT SA506 8重量部、溶劑34.2重量部以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Example 4 except for containing a U-CAT SA506 8 parts by weight, 34.2 parts by weight of solvent, are used in the same manner as in Example 1, producing the photosensitive resin composition.

實施例 5 除了含U-CAT SA506 12重量部、溶劑30.2重量部以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Example 5 except for containing SA506 12 weight portions, 30.2 parts by weight of the solvent U-CAT, 1 are used in the same manner as in Example, for producing the photosensitive resin composition.

比較例 1 除了不含U-CAT SA506以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。Except that U-CAT SA506 was not included in Comparative Example 1 , a photosensitive resin composition was produced in the same manner as in Example 1.

比較例 2 除了含1,8‒二吖雙環[5,4,0]十一‒7‒烯(1,8-diazabicyclo[5,4,0]undec‒7‒ene)取代U-CAT SA506以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Comparative Example 2 except that U-CAT SA506 was substituted with 1,8-diazabicyclo [5,4,0] undec-7-ene (1,8-diazabicyclo [5,4,0] undec‒7‒ene) In the same manner as in Example 1, a photosensitive resin composition was produced.

比較例 3 除了含U-CAT 5002(San Apro製)取代U-CAT SA506以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 In Comparative Example 3 , a photosensitive resin composition was produced in the same manner as in Example 1 except that U-CAT 5002 (manufactured by San Apro) was used instead of U-CAT SA506.

比較例 4 除了使用1‒甲基‒2,3,4,6,7,8,9,10‒八氫嘧啶并[1,2‒a]aqepin‒1‒ium(2,3,4,6,7,8,9,10‒octahydropyrimido[1,2‒a]aqepin‒1‒ium)、及對甲苯磺酸(p‒toluenesulfonate)的鹽類以外,均採用與實施例1同樣的方法,製造光敏樹脂組合物。 Comparative Example 4 except for 1‒methyl‒2,3,4,6,7,8,9,10‒ octahydropyrimido [1,2‒a] aqepin‒1‒ium (2,3,4,6 , 7,8,9,10‒octahydropyrimido [1,2‒a] aqepin‒1‒ium) and salts of p‒toluenesulfonate were manufactured by the same method as in Example 1. Photosensitive resin composition.

試驗方法 以中性洗劑、水及乙醇,依序洗淨2英吋´2英吋之玻璃基板(EAGLE 2000,Corning製)後使其乾燥。於該玻璃基板上,分別旋轉塗佈以前述實施例及比較例製造的光敏樹脂組成物後,利用加熱板,以90℃進行預烤125秒鐘。將前述預烤之基板冷卻至25℃後,設定與石英玻璃製光罩之間隔為150mm,使用曝光機(UX-1100SM,Ushio股份有限公司製),以60mJ/cm2 之曝光量(365nm基準)照射光。在此,光罩採用下一圖案形成於同一平面上之光罩。 Test method A 2 inch by 2 inch glass substrate (EAGLE 2000, manufactured by Corning) was sequentially washed with a neutral detergent, water, and ethanol, and then dried. The photosensitive resin compositions produced in the foregoing Examples and Comparative Examples were spin-coated on the glass substrate, and then prebaked at 90 ° C. for 125 seconds using a hot plate. After cooling the pre-baked substrate to 25 ° C., the distance from the reticle made of quartz glass was set to 150 mm, and an exposure machine (UX-1100SM, manufactured by Ushio Co., Ltd.) was used at an exposure of 60 mJ / cm 2 (365 nm standard ) Irradiate light. Here, the photomask is a photomask formed on the same plane with the next pattern.

具有30mm square pattern(方形圖案)之正四角形開口部(Hole(孔)圖案),相互間隔為100mm,光照射後,於包含非離子系界面活性劑0.12%及氫氧化鉀0.04%之水系顯影劑,將前述導膜以25℃浸漬60秒鐘後顯影,水洗後於烤箱中,以80℃進行1小時後烤。針對如此獲得之圖案,進行如下物性評估,於下述表1表示其結果。Regular square openings (Hole patterns) with a 30mm square pattern, spaced at a distance of 100mm from each other, after light irradiation, an aqueous developer containing 0.12% non-ionic surfactant and 0.04% potassium hydroxide , The aforementioned guide film was immersed at 25 ° C. for 60 seconds, developed, washed in water in an oven, and then baked at 80 ° C. for 1 hour. For the pattern thus obtained, the following physical properties were evaluated, and the results are shown in Table 1 below.

(1) 耐熱殘膜率 ( 低溫硬化性能評估 ) 將圖案形成結束之顯影後的硬化物,以80℃加熱1小時予以最終硬化後,進一步以230℃加熱30分,觀察追加加熱所造成的膜收縮程度。 (1) Heat-resisting residual film rate ( evaluation of low-temperature hardening performance ) After the pattern-developed cured product is heated at 80 ° C for 1 hour and finally cured, it is further heated at 230 ° C for 30 minutes, and the film caused by additional heating is observed. Degree of contraction.

於低溫硬化條件下,硬化性能優良的材料,視為追加加熱之膜收縮小,追加加熱後之耐熱殘膜率高的材料,判斷為低溫硬化性能較優良。Under low-temperature hardening conditions, materials with excellent hardening properties are considered to be materials with small shrinkage of the film after additional heating and a high heat-resistance residual film rate after additional heating. It is judged that the low-temperature hardening performance is better.

(2) 耐酸性評估 將藉由前述方法製造的導膜,以45℃浸漬於HNO3 及HCl水溶液2分鐘。其後,於藉由切刀裁切的表面,黏貼膠帶,將撕下時導膜發生剝離的程度,根據標準試驗條件(ASTM D-3359-08),確認密著性,藉以評估耐酸性。 (2) Evaluation of acid resistance The conductive film manufactured by the aforementioned method was immersed in HNO 3 and HCl aqueous solution at 45 ° C for 2 minutes. After that, the surface cut by the cutter is affixed with an adhesive tape, and the degree of peeling of the guide film when peeled off is confirmed according to standard test conditions (ASTM D-3359-08) to evaluate the acid resistance.

<評估基準> 5B:剝離0% 4B:剝離超過0%、小於5% 3B:剝離5%以上、小於15% 2B:剝離15%以上、小於35% 1B:剝離35%以上、小於65% 0B:剝離65%以上<Evaluation criteria> 5B: 0% peeling 4B: More than 0% peeling, less than 5% 3B: More than 5% peeling, less than 15% 2B: More than 15% peeling, less than 35% 1B: More than 35% peeling, less than 65% 0B : 65% or more

(3) 鹼溶解性評估 於基板上,分別旋轉塗佈製造的組成物後,利用加熱板,以80℃進行預烤120秒鐘。將前述預烤之基板冷卻至25℃後,浸漬於0.04%KOH系水溶液後,以90秒鐘觀察導膜之溶解過程。依據下述基準評估鹼溶解性。 (3) Alkali solubility evaluation On the substrate, each of the manufactured components was spin-coated, and then pre-baked at 80 ° C for 120 seconds using a hot plate. After cooling the pre-baked substrate to 25 ° C., immerse it in a 0.04% KOH-based aqueous solution, and observe the dissolution process of the guide film for 90 seconds. The alkali solubility was evaluated according to the following criteria.

<評估基準> 5B:經過未達40秒後溶解 4B:經過40秒以上、未達60秒後溶解 3B:經過60秒以上、未達80秒後溶解 2B:經過80秒以上、未達100秒後溶解 1B:經過100秒以上後溶解 0B:剝離<Evaluation Criteria> 5B: Dissolved after 40 seconds elapsed 4B: Dissolved after 40 seconds elapsed and less than 60 seconds 3B: Dissolved after 60 seconds elapsed and less than 80 seconds 2B: Elapsed 80 seconds or more and less than 100 seconds Post-dissolution 1B: Dissolution 0B after 100 seconds or more: peeling

(4) 耐剝離性評估 將藉由前述方法製造的導膜,於SAM-19(DONGWOO FINE-CHEM stripper)浸漬2分鐘。其後,將剝離發生的程度,根據標準試驗條件(ASTM D-3359-08),確認密著性,藉以評估耐剝離液性。 (4) Evaluation of peel resistance The guide film produced by the aforementioned method was immersed in SAM-19 (DONGWOO FINE-CHEM stripper) for 2 minutes. Thereafter, the degree of occurrence of peeling was evaluated in accordance with standard test conditions (ASTM D-3359-08), and the resistance to peeling liquid was evaluated.

<評估基準> 5B:不剝離 4B:剝離超過0%、小於5% 3B:剝離5%以上、小於15% 2B:剝離15%以上、小於35% 1B:剝離35%以上、小於65% 0B:剝離65%以上<Evaluation criteria> 5B: Not peeled 4B: More than 0%, less than 5% 3B: More than 5%, less than 15% 2B: More than 15%, less than 35% 1B: More than 35%, less than 65% 0B: 65% or more

(5) 保存安定性評估 將製造之組成物,以23℃之恆溫箱保管48小時後,將黏度計(TVE-33L,Toki-SanGyo製)之溫度調到25℃,使用微量吸管滴下組成物1.2mL後,觀察黏度變化,依照下述評估基準。 (5) Evaluation of storage stability After the manufactured composition was stored in a 23 ° C incubator for 48 hours, the temperature of the viscometer (TVE-33L, manufactured by Toki-SanGyo) was adjusted to 25 ° C, and the composition was dropped using a micro pipette. After 1.2 mL, the change in viscosity was observed, and the following evaluation criteria were used.

<評估基準> ○:無2cp以上的變化 ×:有2cp以上的變化<Evaluation criteria> ○: No change over 2cp ×: Change over 2cp

[表1] [Table 1]

從前述表1,可知包含於本發明範圍之實施例,與比較例相較,由於耐熱殘膜率高,因此低溫硬化性能優良,並且由於耐酸性及耐剝離液性高,因此化學耐受性更加優良。進而言之,於鹼溶解性評估中,由於溶解越快,評估為鹼溶解性越優良,因此確認本發明可適用於負型光敏樹脂(尤其是負型光阻)。From the foregoing Table 1, it can be seen that the examples included in the scope of the present invention have higher heat resistance and residual film ratio, so they have better low-temperature hardening performance, and have higher acid resistance and resistance to peeling liquid, so they have chemical resistance. Better. In addition, in the evaluation of alkali solubility, since the faster the dissolution, the better the alkali solubility is evaluated, it is confirmed that the present invention is applicable to a negative photosensitive resin (especially a negative photoresist).

Claims (10)

一種光敏樹脂組成物,包含下述化學式1及鹼可溶性樹脂;(式中,R1~R6、R8及R9分別獨自為氫或碳數1~6之直鏈或分支鏈之烷基,R7為氫,前述X-為有機酸鹽陰離子;)其中,前述鹼可溶性樹脂包含:第1樹脂,其具有下述化學式2所示之重複單位;及第2樹脂,其具有下述化學式3所示之重複單位;(式中,R1、R2及R3分別獨自為氫或甲基,R4 係來自從包括(甲基)丙烯酸、2-(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2-((Metha)Acryloyloxy)ethyl hexahydrophthalate)、2-(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2-((Metha)Acryloyloxy)ethyl phthalate)、及2-(甲基)丙烯醯氧基丁二酸乙酯(2-((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造;R5 係來自從包括下述式(1)~(9)的群組中選擇之單體的構造; R6 係來自從包括下述式(10)~(12)的群組中選擇之單體的構造; a=10~60mol%、b=20~50mol%、c=10~70mol%;)(式中,R1、R2、R3及R4分別獨自為氫或甲基,R5 係來自從包括(甲基)丙烯酸、2-(甲基)丙烯醯氧基乙基六氫化鄰苯二甲酸酯(2-((Metha)Acryloyloxy)ethyl hexahydrophthalate)、2-(甲基)丙烯醯氧基乙基鄰苯二甲酸酯(2-((Metha)Acryloyloxy)ethyl phthalate)、及2-(甲基)丙烯醯氧基丁二酸乙酯(2-((Metha)Acryloyloxy)ethyl succinate)的群組中選擇之單體的構造;R6 係來自從包括(甲基)丙烯酸苄酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯、(2-苯基)苯氧基乙氧基(甲基)丙烯酸酯、2-羥基-(2-苯基)苯酚丙基(甲基)丙烯酸酯、2-羥基-(3-苯基)苯氧基丙基(甲基)丙烯酸酯、(甲基)丙烯酸四氫呋喃甲酯、(甲基)苯乙烯、乙烯基甲苯、乙烯基萘、N-苄基順丁烯二醯亞胺、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、甲氧基乙二醇(甲基)丙烯酸酯、甲氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基四乙二醇(甲基)丙烯酸酯、苯氧基乙二醇(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯、及(甲基)丙烯酸四氫呋喃甲酯的群組中選擇之單體的構造;R7 係來自從包括前述式(1)~(9)的群組中選擇之單體的構造; R8 係來自從包括下述式(10)~(16)的群組中選擇之單體的構造; A photosensitive resin composition comprising the following chemical formula 1 and an alkali-soluble resin; (Wherein R 1 to R 6 , R 8 and R 9 are each independently hydrogen or a linear or branched alkyl group having 1 to 6 carbon atoms, R 7 is hydrogen, and X - is an organic acid salt anion;) The alkali-soluble resin includes: a first resin having a repeating unit represented by the following chemical formula 2; and a second resin having a repeating unit represented by the following chemical formula 3; (Wherein R 1 , R 2 and R 3 are independently hydrogen or methyl, and R 4 is derived from (meth) acrylic acid, 2- (meth) acryloxyethylhexahydrophthalate (2-((Metha) Acryloyloxy) ethyl hexahydrophthalate), 2-((Metha) Acryloyloxy) ethyl phthalate), and 2-((Metha) Acryloyloxy) ethyl phthalate), and 2- ( The structure of the monomers selected from the group of 2-((Metha) Acryloyloxy) ethyl succinate); R 5 is derived from the following formulae (1) ~ (9 The structure of the monomer selected in the group of); R 6 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (12); a = 10 ~ 60mol%, b = 20 ~ 50mol%, c = 10 ~ 70mol%;) (Wherein, R 1, R 2, R 3 and R 4 are independently hydrogen or methyl, R 5 include lines derived from a (meth) acrylic acid, 2- (meth) oxyethyl hexahydrophthalic Bing Xixi Phthalate (2-((Metha) Acryloyloxy) ethyl hexahydrophthalate), 2- (meth) acryloyloxy) ethyl phthalate, and The structure of the monomers selected from the group of 2-((Metha) Acryloyloxy) ethyl succinate; R 6 is derived from benzyl (meth) acrylate Ester, phenoxyethylene glycol (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, (2-phenyl) phenoxyethoxy (meth) acrylate, 2- Hydroxy- (2-phenyl) phenolpropyl (meth) acrylate, 2-hydroxy- (3-phenyl) phenoxypropyl (meth) acrylate, tetrahydrofuran methyl (meth) acrylate, ( (Meth) styrene, vinyltoluene, vinylnaphthalene, N-benzylcis-butenediimine, methyl (meth) acrylate, ethyl (meth) acrylate, methoxyethylene glycol Base) acrylate, methoxydiethylene glycol (meth) acrylate, methoxytriethylene glycol (Meth) acrylate, methoxytetraethylene glycol (meth) acrylate, phenoxyethylene glycol (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, and ( Structure of monomers selected from the group of tetrahydrofuran methyl methacrylate; R 7 is a structure derived from monomers selected from the group including the aforementioned formulae (1) to (9); R 8 is a structure derived from a monomer selected from the group consisting of the following formulae (10) to (16); d=10~30mol%、e=10~20mol%、f=30~60mol%、g=10~30mol%)。如申請專利範圍第1項之光敏樹脂組成物,其中前述化學式1之化合物之R1~R9全為氫。d = 10 ~ 30mol%, e = 10 ~ 20mol%, f = 30 ~ 60mol%, g = 10 ~ 30mol%). For example, the photosensitive resin composition of the first scope of the patent application, wherein all of R 1 to R 9 of the aforementioned chemical formula 1 compound are hydrogen. 如申請專利範圍第1項之光敏樹脂組成物,其中前述化學式1之化合物之陰離子係從包括對甲苯磺酸鹽陰離子、2-羧基苯甲酸鹽陰離子及辛酸鹽陰離子的群組中選擇之任一者。For example, the photosensitive resin composition of the first patent application range, wherein the anion of the aforementioned chemical formula 1 is any one selected from the group consisting of p-toluenesulfonate anion, 2-carboxybenzoate anion, and octanoate anion. One. 如申請專利範圍第1項之光敏樹脂組成物,其中前述化學式1之化合物係相對於組成物之全體100重量部,含0.05~10重量部。For example, the photosensitive resin composition of the first scope of the application for a patent, wherein the compound of the aforementioned chemical formula 1 is contained in an amount of 0.05 to 10 parts by weight relative to 100 parts by weight of the entire composition. 如申請專利範圍第1項之光敏樹脂組成物,其中進一步包含光聚合性化合物、光聚合起始劑及溶劑。For example, the photosensitive resin composition of the first patent application scope further includes a photopolymerizable compound, a photopolymerization initiator, and a solvent. 如申請專利範圍第5項之光敏樹脂組成物,其中進一步包含多官能硫醇基。For example, the photosensitive resin composition according to claim 5 of the application, further comprising a polyfunctional thiol group. 如申請專利範圍第1項之光敏樹脂組成物,其可於70~100℃硬化。For example, the photosensitive resin composition of the first patent application scope can be hardened at 70 ~ 100 ° C. 一種光硬化圖案,由如申請專利範圍第1至7項中任一項之光敏樹脂組成物所製造。A light-hardening pattern is manufactured from a photosensitive resin composition as claimed in any one of claims 1 to 7. 如申請專利範圍第8項之光硬化圖案,其中前述光硬化圖案係從包括接著劑層、陣列平坦化膜圖案、保護膜圖案、絕緣膜圖案、光阻圖案、彩色濾光片圖案、黑矩陣圖案及柱間隔物圖案的群組中選擇。For example, the light hardening pattern of the eighth patent application range, wherein the light hardening pattern includes an adhesive layer, an array flattening film pattern, a protective film pattern, an insulating film pattern, a photoresist pattern, a color filter pattern, and a black matrix. Pattern and column spacer pattern. 一種圖案顯示裝置,包含如申請專利範圍第8項之光硬化圖案。A pattern display device includes a light-hardened pattern as described in item 8 of the patent application.
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KR101986408B1 (en) * 2016-11-08 2019-06-05 동우 화인켐 주식회사 Colored Photosensitive Resin Composition, Color Filter and Display Device
KR101834209B1 (en) * 2016-11-25 2018-03-06 주식회사 삼양사 Photopolymerization initiators and photosensitive resin composition for light shield comprising the same
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200504461A (en) * 2003-06-26 2005-02-01 Clariant Int Ltd Photosensitive resin composition
TW200919086A (en) * 2007-08-10 2009-05-01 Wako Pure Chem Ind Ltd Negative photosensitive resin composition, spacer and liquid crystal display device
TW201329639A (en) * 2011-12-26 2013-07-16 Toray Industries Photosensitive resin composition and method of manufacturing semiconductor element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450281A (en) * 1990-06-15 1992-02-19 Sunstar Eng Inc Sealing agent composition
JP5338352B2 (en) * 2009-02-09 2013-11-13 日油株式会社 Positive photosensitive resin composition
JP5645743B2 (en) * 2010-04-30 2014-12-24 富士フイルム株式会社 Planographic printing plate precursor, plate making method thereof, and polyvalent isocyanate compound
KR20120082169A (en) * 2011-01-13 2012-07-23 삼성전자주식회사 Photosensitive adhesive composition having alkali soluble epoxy resin, and patternable adhesive film using the same
JP5820825B2 (en) * 2011-01-18 2015-11-24 旭化成イーマテリアルズ株式会社 Resin composition, cured product, resin film and wiring board
KR20140147056A (en) 2013-06-18 2014-12-29 주식회사 엘지화학 Photosensitive resin composition, photosensitive material manufactured by using the photosensitive resin composition and display device having the photosensitive material
JP5917602B2 (en) * 2014-06-03 2016-05-18 太陽ホールディングス株式会社 Photocurable resin composition, dry film and cured product thereof, and printed wiring board using them
JP6528421B2 (en) * 2015-01-28 2019-06-12 住友ベークライト株式会社 Photosensitive resin composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200504461A (en) * 2003-06-26 2005-02-01 Clariant Int Ltd Photosensitive resin composition
TW200919086A (en) * 2007-08-10 2009-05-01 Wako Pure Chem Ind Ltd Negative photosensitive resin composition, spacer and liquid crystal display device
TW201329639A (en) * 2011-12-26 2013-07-16 Toray Industries Photosensitive resin composition and method of manufacturing semiconductor element

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