TWI669177B - Wheel-to-wheel rolling welding equipment - Google Patents

Wheel-to-wheel rolling welding equipment Download PDF

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TWI669177B
TWI669177B TW107106024A TW107106024A TWI669177B TW I669177 B TWI669177 B TW I669177B TW 107106024 A TW107106024 A TW 107106024A TW 107106024 A TW107106024 A TW 107106024A TW I669177 B TWI669177 B TW I669177B
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pads
wheel
micro
rolling
welding
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TW107106024A
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TW201936307A (en
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陳贊仁
鄭博文
偉宗 黃
蔡志豪
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東捷科技股份有限公司
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Abstract

本發明的輪對輪的滾動焊接設備包括輸送載台、滾動輸送裝置及曝光加熱裝置。輸送載台用以設置及輸送目標基板。目標基板具有多個焊墊。滾動輸送裝置透過滾動程序輸送多個微型元件至多個焊墊上,以與多個焊墊形成電性連接。曝光加熱裝置透過光束對目標基板的多個焊墊加熱。其中,在多個微型元件接近對應多個焊墊,對應的多個焊墊被曝光加熱裝置加熱,使對應的多個焊墊表面呈現熔融狀態,並在多個微型元件接觸對應的多個焊墊時,將多個微型元件自滾動輸送裝置上取下,且焊接在對應的多個焊墊上。如此,輪對輪的滾動焊接設備可完成巨量轉移及焊接的目的。 The rolling welding apparatus of the wheel-to-wheel of the present invention includes a conveying stage, a rolling conveying device, and an exposure heating device. The transport stage is used to set and transport the target substrate. The target substrate has a plurality of pads. The rolling conveyor conveys a plurality of micro components to the plurality of pads through a rolling program to form an electrical connection with the plurality of pads. The exposure heating device heats the plurality of pads of the target substrate through the light beam. Wherein, the plurality of micro-components are close to the corresponding plurality of pads, and the corresponding plurality of pads are heated by the exposure heating device, so that the corresponding plurality of pad surfaces are in a molten state, and the plurality of micro-components are in contact with the corresponding plurality of pads. In the case of the pad, the plurality of micro-elements are removed from the rolling conveyor and welded to the corresponding plurality of pads. In this way, the rolling welding equipment of the wheel-to-wheel can accomplish the purpose of massive transfer and welding.

Description

輪對輪的滾動焊接設備 Wheel-to-wheel rolling welding equipment

本發明係與電子電路製造方法有關,特別是指一種輪對輪的滾動焊接設備。 The present invention relates to an electronic circuit manufacturing method, and more particularly to a rolling welding apparatus for a wheel-to-wheel.

傳統電子元件的焊接方式通常是透過點對點或是面對面的焊接方式,但隨著微型半導體元件的應用越來越普及,傳統的焊接方式已經無法滿足有效率的生產製程。 Conventional electronic components are usually soldered by point-to-point or face-to-face soldering. However, with the increasing popularity of micro-semiconductor components, traditional soldering methods have been unable to meet efficient production processes.

因為,點對點是指一個微型半導體元件對應一個焊墊的焊接方式,表示,微型半導體元件需要一個一個焊接在電路板的焊墊上,如此,當面臨矩陣式(巨量)的焊墊時,往往需要花費大量的時間才能完成一片電路板的焊接作業。 Because point-to-point refers to the soldering method of a micro-semiconductor component corresponding to a solder pad, indicating that the micro-semiconductor component needs to be soldered to the solder pad of the circuit board, so when faced with a matrix (large amount) of solder pads, it is often required It takes a lot of time to complete the soldering of a board.

此外,面對面是指先將微型半導體元件排列成對應電路板的焊墊圖案後,以批次方式完成將微型半導體元件焊接至電路板上。但這種方式,雖然較點對點的方式節省時間,但前製的排列作業通常會花費不少時間,且需要對應的設備。再者,批次轉移焊接除了批次對焊墊加熱難度較高外,同時維持巨量焊墊保持在熔融狀態也是不容易的技術。 In addition, face-to-face refers to the process of soldering micro-semiconductor components to a circuit board in a batch manner after first arranging the micro-semiconductor components in a pad pattern corresponding to the circuit board. However, in this way, although the point-to-point method saves time, the pre-arranged arrangement usually takes a lot of time and requires corresponding equipment. Furthermore, batch transfer welding is not an easy technique to maintain a large amount of pads in a molten state, except that the batch is difficult to heat the pads.

有鑑於上述缺失,本發明的目的在於提供一種輪對輪的滾動焊接設備,以有效率地連續轉移及焊接微型元件至對應的焊接位置,以滿足巨量轉移及焊接微型元件的目的。 In view of the above-mentioned deficiencies, it is an object of the present invention to provide a rolling welding apparatus for wheel-to-wheels for efficiently transferring and welding micro-components to corresponding welding positions in an efficient manner to meet the purpose of massive transfer and welding of micro-components.

為達成上述目的,本發明的輪對輪的滾動焊接設備包括輸送載台、滾動輸送裝置及曝光加熱裝置。輸送載台用以設置及輸送目標基板。目標基板具有多個焊墊。滾動輸送裝置透過滾動程序輸送多個微型元件至多個焊墊上,以與多個焊墊形成電性連接。曝光加熱裝置透過光束對目標 基板的多個焊墊加熱。其中,在多個微型元件接近對應多個焊墊,對應的多個焊墊被曝光加熱裝置加熱,使對應的多個焊墊表面呈現熔融狀態,並在多個微型元件接觸對應的多個焊墊時,將多個微型元件自滾動輸送裝置上取下,且焊接在對應的多個焊墊上。 To achieve the above object, the rolling welding apparatus of the wheel-to-wheel of the present invention includes a conveying stage, a rolling conveying device, and an exposure heating device. The transport stage is used to set and transport the target substrate. The target substrate has a plurality of pads. The rolling conveyor conveys a plurality of micro components to the plurality of pads through a rolling program to form an electrical connection with the plurality of pads. Exposure heating device transmits light beam to target The plurality of pads of the substrate are heated. Wherein, the plurality of micro-components are close to the corresponding plurality of pads, and the corresponding plurality of pads are heated by the exposure heating device, so that the corresponding plurality of pad surfaces are in a molten state, and the plurality of micro-components are in contact with the corresponding plurality of pads. In the case of the pad, the plurality of micro-elements are removed from the rolling conveyor and welded to the corresponding plurality of pads.

本發明的輪對輪的滾動焊接設備用以透過連續地滾動程序輸送微型元件以將微型元件轉移至對應的焊接位置,並與焊墊形成焊接,如此,輪對輪的滾動焊接設備可完成巨量轉移及焊接的目的。 The rolling welding device of the wheel-to-wheel of the present invention is used for conveying a micro-component through a continuous rolling process to transfer the micro-component to a corresponding welding position and forming a welding with the welding pad, so that the rolling-welding device of the wheel-to-wheel can complete the giant The purpose of volume transfer and welding.

有關本發明所提供之輪對輪的滾動焊接設備的詳細構造、特點、組裝或使用方式,將於後續的實施方式詳細說明中予以描述。然而,在本發明領域中具有通常知識者應能瞭解,該等詳細說明以及實施本發明所列舉的特定實施例,僅係用於說明本發明,並非用以限制本發明之專利申請範圍。 The detailed construction, features, assembly or use of the rolling-welding apparatus for the wheel-to-wheel provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.

10‧‧‧滾動焊接設備 10‧‧‧Rolling welding equipment

11‧‧‧輸送載台 11‧‧‧Transporting platform

13‧‧‧滾動輸送裝置 13‧‧‧Rolling conveyor

131‧‧‧主動輪 131‧‧‧Drive wheel

133‧‧‧從動輪 133‧‧‧ driven wheel

135‧‧‧輸送帶 135‧‧‧ conveyor belt

15‧‧‧曝光加熱裝置 15‧‧‧Exposure heating device

151‧‧‧曝光模組 151‧‧‧Exposure module

153‧‧‧掃描模組 153‧‧‧ scan module

155、157‧‧‧光束 155, 157‧‧ ‧beam

30‧‧‧目標基板 30‧‧‧ Target substrate

31‧‧‧焊墊 31‧‧‧ solder pads

50‧‧‧微型元件 50‧‧‧Micro components

51‧‧‧承載基板 51‧‧‧Loading substrate

第1圖是本發明的輪對輪的滾動焊接設備的示意圖。 Figure 1 is a schematic view of a rolling welding apparatus for a wheel set wheel of the present invention.

第2a-2c圖是本發明的輪對輪的滾動焊接設備進行焊接的過程示意圖。 2a-2c is a schematic view showing the process of welding the rolling welding apparatus of the wheel-to-wheel of the present invention.

以下,茲配合各圖式列舉對應之較佳實施例來對本發明的輪對輪的滾動焊接設備的組成構件及達成功效來作說明。然各圖式中輪對輪的滾動焊接設備的構件、尺寸及外觀僅用來說明本發明的技術特徵,而非對本發明構成限制。 Hereinafter, the constituent members of the rolling welding device for the wheel-to-wheel of the present invention and the achievement of the effect will be described with reference to the preferred embodiments of the drawings. However, the components, dimensions, and appearance of the rolling-welding apparatus of the wheel-to-wheel are used to illustrate the technical features of the present invention, and are not intended to limit the present invention.

其中,輪對輪是指透過至少兩個輪來進行運作,因此,輪的尺寸、性質、外觀、配置或數量是沒有特別限制。 Wherein, the wheel set wheel refers to operation through at least two wheels, and therefore, the size, nature, appearance, configuration or quantity of the wheel are not particularly limited.

如第1圖所示,該圖是本發明的輪對輪的滾動焊接設備10的示意圖。輪對輪的滾動焊接設備包括輸送載台11、滾動輸送裝置13及曝光加熱裝置15。 As shown in Fig. 1, this figure is a schematic view of the rolling welding apparatus 10 of the wheel-to-wheel of the present invention. The rolling welding device of the wheelset wheel includes a conveying stage 11, a rolling conveyor 13, and an exposure heating device 15.

輸送載台11用以設置及輸送目標基板30,目標基板30具有多個焊墊31形成的電路圖案。輸送載台11可以透過皮帶、滾輪或機械手臂等方式承載目標基板30,並將目標基板30輸送至工作位置。 The transport stage 11 is for arranging and transporting the target substrate 30, and the target substrate 30 has a circuit pattern formed by a plurality of pads 31. The transport stage 11 can carry the target substrate 30 through a belt, a roller or a robot arm, and transport the target substrate 30 to the working position.

目標基板30可以是玻璃基板或印刷電路板,印刷電路板可分成軟板、硬板或軟-硬結合板。目標基板30通常在內層或表面有電路圖案,焊墊31是電性連接電路圖案。其他實施例中,目標基板30也可以是其他材質或特性的電路板。 The target substrate 30 may be a glass substrate or a printed circuit board, and the printed circuit board may be divided into a soft board, a hard board, or a soft-hard bonding board. The target substrate 30 usually has a circuit pattern on the inner layer or surface, and the pad 31 is an electrical connection circuit pattern. In other embodiments, the target substrate 30 may also be a circuit board of other materials or characteristics.

滾動輸送裝置13透過滾動程序將多個微型元件50輸送至該些焊墊31上,以與該些焊墊31形成電性連接。滾動輸送裝置13包括大、小兩個滾輪及輸送帶135。輸送帶135連接大、小兩個滾輪,且被滾輪帶動,並允許暫時附接多個微型元件50。本實施例中,兩滾輪分別是主動輪131及從動輪133。主動輪131通常透過馬達直接或間接驅動,以使其轉動,並帶動輸送帶135及從動輪133運轉。本實施例中,小滾輪靠近承載基板51,大滾輪靠近目標基板30,輸送帶135從承載基板51上取下微型元件50,以使微型元件50被暫時附接在輸送帶135上。微型元件50是指本身的某一尺寸介於1微米(μm)到1毫米(mm)之間,其他實施例中,微型元件50的尺寸也可以更大或更小。 The rolling conveyor 13 transports the plurality of micro-elements 50 to the pads 31 through a rolling process to form electrical connections with the pads 31. The rolling conveyor 13 includes two large and small rollers and a conveyor belt 135. The conveyor belt 135 connects the two large and small rollers and is driven by the rollers and allows temporary attachment of the plurality of micro-components 50. In this embodiment, the two rollers are a driving wheel 131 and a driven wheel 133, respectively. The driving wheel 131 is normally driven directly or indirectly through a motor to rotate it, and drives the conveyor belt 135 and the driven wheel 133 to operate. In this embodiment, the small roller is close to the carrier substrate 51, the large roller is close to the target substrate 30, and the conveyor belt 135 removes the micro component 50 from the carrier substrate 51 so that the micro component 50 is temporarily attached to the conveyor belt 135. The micro-element 50 means that a certain size of itself is between 1 micrometer (μm) and 1 millimeter (mm). In other embodiments, the size of the micro-element 50 can also be larger or smaller.

其他實施例中,滾輪也可以全部採用主動輪131,或者選用兩個以上主動輪131或兩個以上從動輪133的組合,當然也可以採取一個主動輪131搭配多個從動輪133的組合,因此,主動輪131或從動輪133的數量或配置不以本實施例所述為限。 In other embodiments, the roller may also adopt the driving wheel 131, or a combination of two or more driving wheels 131 or two or more driven wheels 133. Of course, a combination of a driving wheel 131 and a plurality of driven wheels 133 may be adopted. The number or configuration of the driving wheel 131 or the driven wheel 133 is not limited to the embodiment.

輸送帶135附接微型元件50的方式或抓取力可以透過凡德瓦力、磁力、真空吸力、吸盤或機械夾具等來抓取微型元件,因此,附接方式可以透過任何能對微型元件50產生抓取力量的元件或組件。 The manner in which the conveyor belt 135 attaches the micro-component 50 or the gripping force can capture the micro-component through van der Waals force, magnetic force, vacuum suction, suction cup or mechanical clamp, etc., therefore, the attachment method can pass through any of the micro-components 50 An element or component that produces a gripping force.

曝光加熱裝置15透過光束155、157對該些焊墊31加熱,且包括曝光模組151及掃描模組153。曝光模組151用以產生光束155、157。掃描模組153連接曝光模組151,且用以掃描焊墊31,並對焊墊31照射光束155、157。光束155、157可以是雷射光或高能量脈衝光(pulse light)等,高能量脈衝光例如高能量鹵素燈所產生的光。 The exposure heating device 15 heats the pads 31 through the light beams 155 and 157, and includes an exposure module 151 and a scanning module 153. The exposure module 151 is used to generate light beams 155, 157. The scanning module 153 is connected to the exposure module 151 and is used for scanning the bonding pads 31 and irradiating the bonding pads 31 with the light beams 155 and 157. The light beams 155, 157 may be laser light or high energy pulse light, etc., high energy pulsed light such as light produced by a high energy halogen lamp.

其中,光束155、157的照射角度相對於焊墊31可以是任意角度,照射角度隨著目標基板30的電路層或遮蔽層位置或配置而作調整,以使光束155、157能順利照射焊墊31。 The illumination angles of the light beams 155 and 157 can be any angle with respect to the pad 31, and the illumination angle is adjusted according to the position or arrangement of the circuit layer or the shielding layer of the target substrate 30, so that the light beams 155 and 157 can smoothly illuminate the pads. 31.

如第2a-2c圖所示,第2a-2c圖是焊接過程的示意圖,但省略預熱的步驟。第2a圖中,微型元件50接近對應焊墊31(或稱目標焊墊)前,目標焊墊31被曝光加熱裝置15加熱而使其表面呈現熔融狀態,接著,如第2b圖,在微型元件50接觸熔融狀態的目標焊墊31時,將微型元件50自滾動輸送裝置13上取下,這個時候可發現,微型元件50沒有完成定位,最後,如第2c圖,目標焊墊31與微型元件50形成焊接,且微型元件50透過熔融狀態完成自我定位。 As shown in Figures 2a-2c, Figures 2a-2c are schematic views of the welding process, but the steps of preheating are omitted. In Fig. 2a, before the micro-element 50 approaches the corresponding pad 31 (or the target pad), the target pad 31 is heated by the exposure heating device 15 to have its surface in a molten state, and then, as shown in Fig. 2b, in the micro-element When the target pad 31 is in contact with the molten state, the micro-element 50 is removed from the rolling conveyor 13, and it is found that the micro-element 50 is not positioned. Finally, as shown in Fig. 2c, the target pad 31 and the micro-element 50 is formed into a weld, and the micro-component 50 is self-aligned through the molten state.

其他實施例中,目標焊墊31也可以在與微型元件50接觸時才被加熱成熔融狀態,而不以本實施例為限。 In other embodiments, the target pad 31 may also be heated to a molten state when in contact with the micro-component 50, and is not limited to this embodiment.

特別地,在微型元件轉移至目標焊墊時透過熔融狀態的疏水或親水物理現象使微型元件自我對準於目標焊墊上,以避免微型元件沒有準確對位在目標焊墊。 In particular, the hydrophobic or hydrophilic physical phenomenon in the molten state when the microcomponent is transferred to the target pad causes the microcomponent to self-align on the target pad to prevent the microcomponent from being accurately aligned with the target pad.

其他實施例中,曝光模組產生的光束包括預熱光束及焊接光束。預熱光束的能量低於焊接光束的能量。焊墊可先透過預熱光束來作預熱,使焊墊的溫度升高,然後,在微型元件接近時透過對目標焊墊照射焊接光束,以使目標焊墊的表面形成熔融狀態,以準備或進行焊接作業。 In other embodiments, the light beam generated by the exposure module includes a preheat beam and a welding beam. The energy of the preheating beam is lower than the energy of the welding beam. The solder pad can be preheated by the preheating beam to increase the temperature of the pad, and then, when the micro component approaches, the welding beam is irradiated to the target pad to form a molten state of the target pad to prepare. Or carry out welding operations.

附接在輸送帶上的微型元件可以透過熔融狀態的焊墊對微型元件產生抓取力,使得微型元件於輸送帶上被釋放,也就是與輸送帶分離。 The micro-components attached to the conveyor belt can grip the micro-components through the solder pads in the molten state, so that the micro-components are released on the conveyor belt, that is, separated from the conveyor belt.

本實施例中,輸送帶是透過靜電力來附接微型元件,當選用熔融狀態的焊墊產生的抓取力量大於微型元件附接在輸送帶上的靜電力時,微型元件就能與輸送帶分離。焊墊產生的抓取力量的大小是透過熔融狀態時本身的黏度,其與焊墊被加熱的溫度有關。此外,焊墊產生的抓取力量也可以是熔融狀態轉換為固態後對微型元件的抓取力,因此,抓取力量可以是熔融狀態的黏度或狀態轉換產生。其他實施例中,微型元件的釋放也可以選用其他程序,例如主動釋放程序,也就是透過設備或手段主動解除輸送帶對微型元件的抓取力。 In this embodiment, the conveyor belt is attached to the micro component by electrostatic force. When the welding force generated by the molten pad is greater than the electrostatic force of the micro component attached to the conveyor belt, the micro component can be combined with the conveyor belt. Separation. The amount of grabbing force generated by the pad is the viscosity of itself through the molten state, which is related to the temperature at which the pad is heated. In addition, the gripping force generated by the pad can also be the gripping force on the micro-component after the molten state is converted into a solid state, and therefore, the gripping force can be generated by the viscosity or state transition in the molten state. In other embodiments, the release of the micro-components may also be performed by other procedures, such as an active release procedure, that is, by the device or means to actively release the gripping force of the conveyor belt on the micro-components.

雖然,實施例的各圖中都顯示一個微型元件被焊接至目標焊墊,但其他實施例中,本發明可以同時轉移及焊接多個微型元件,而不 以一個為限。 Although each of the figures of the embodiment shows that one micro-component is soldered to the target pad, in other embodiments, the present invention can simultaneously transfer and solder a plurality of micro-components without One is limited to one.

如此,本發明的輪對輪的滾動焊接設備可以有效率地轉移微型元件至對應的焊接位置,並可連續地進行焊接,以滿足巨量轉移及焊接微型元件的目的。 Thus, the rolling welding apparatus of the wheel-to-wheel of the present invention can efficiently transfer the micro-components to the corresponding welding positions, and can be continuously welded to meet the purpose of massive transfer and welding of the micro-components.

最後,強調,本發明於前揭實施例中所揭露的構成元件,僅為舉例說明,並非用來限制本案之範圍,其他等效元件的替代或變化,亦應為本案之申請專利範圍所涵蓋。 Finally, it is emphasized that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention. The alternatives or variations of other equivalent elements are also covered by the scope of the patent application of the present application. .

Claims (4)

一種輪對輪的滾動焊接設備,包括:一輸送載台,用以設置及輸送一目標基板,該目標基板具有多個焊墊;一滾動輸送裝置,係透過一滾動程序輸送多個微型元件至該多個焊墊上,以與該多個焊墊形成電性連接;及一曝光加熱裝置,係透過光束對該目標基板的該多個焊墊加熱,其中,在該多個微型元件接近對應的該多個焊墊,對應的該多個焊墊被該曝光加熱裝置加熱,使對應的該多個焊墊表面呈現熔融狀態,並在該多個微型元件接觸對應的該多個焊墊時,將該多個微型元件自該滾動輸送裝置上取下,且焊接在對應的該多個焊墊上,其中,該滾動輸送裝置包括多個滾輪及一輸送帶,該多個滾輪連接該輸送帶,且執行該滾動程序,以帶動該輸送帶,該多個滾輪包括一小滾輪及一大滾輪,該小滾輪接近一承載基板,該承載基板承載該多個微型元件,該大滾輪接近該目標基板,該輸送帶自該承載基板上取下該多個微型元件,以暫時附接該多個微型元件。 A rolling welding device for a wheel-to-wheel comprises: a conveying stage for arranging and conveying a target substrate, the target substrate having a plurality of pads; and a rolling conveying device for conveying a plurality of micro components through a rolling program The plurality of pads are electrically connected to the plurality of pads; and an exposure heating device is configured to heat the plurality of pads of the target substrate through the light beam, wherein the plurality of micro-components are adjacent to the corresponding ones The plurality of pads, the corresponding plurality of pads are heated by the exposure heating device, so that the corresponding plurality of pad surfaces are in a molten state, and when the plurality of micro-elements contact the corresponding plurality of pads, The plurality of micro-elements are removed from the rolling conveyor and soldered to the corresponding plurality of pads, wherein the rolling conveyor comprises a plurality of rollers and a conveyor belt, the plurality of rollers connecting the conveyor belt, And performing the rolling process to drive the conveyor belt, the plurality of rollers comprising a small roller and a large roller, the small roller is adjacent to a carrier substrate, and the carrier substrate carries the plurality of micro components, the large The target substrate closer to the wheel, the conveying belt is removed from the plurality of micro-elements on the carrier substrate, to temporarily attach the plurality of microelements. 如申請專利範圍第1項所述的輪對輪的滾動焊接設備,其中,該熔融狀態的焊墊對該微型元件的抓取力量大於該輸送帶附接該微型元件的抓取力量。 The rolling welding apparatus of the wheel-to-wheel according to claim 1, wherein the molten state of the soldering pad has a gripping force on the micro-component that is greater than a gripping force of the micro-component attached to the conveyor belt. 如申請專利範圍第1項所述的輪對輪的滾動焊接設備,其中,該曝光加熱裝置包括一曝光模組及一掃描模組,該曝光模組用以產生光束,該掃描模組連接該曝光模組,且用以掃描該多個焊墊並對該多個焊墊照射光束。 The roll-welding device of the wheel-to-wheel according to the first aspect of the invention, wherein the exposure heating device comprises an exposure module and a scanning module, wherein the exposure module is configured to generate a light beam, and the scanning module is connected to the An exposure module is configured to scan the plurality of pads and illuminate the plurality of pads. 如申請專利範圍第3項所述的輪對輪的滾動焊接設備,其中,該曝光模組產生的光束包括預熱光束及焊接光束,該預熱光束的能量低於該焊接光束的能量,且對該多個焊墊預熱,該焊接光束對對應的該多個焊墊加熱。 The rolling welding device of the wheel-to-wheel according to claim 3, wherein the beam generated by the exposure module comprises a preheating beam and a welding beam, the energy of the preheating beam being lower than the energy of the welding beam, and The plurality of pads are preheated, and the welding beam heats the corresponding plurality of pads.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005219070A (en) * 2004-02-03 2005-08-18 Seiko Epson Corp Connecting method, connecting structure, connecting device, method of producing droplet discharge head, droplet discharge head and droplet discharge device
JP2007157787A (en) * 2005-11-30 2007-06-21 Semiconductor Energy Lab Co Ltd Sheet having thin-film integrated circuit and method of manufacturing semiconductor device
KR20130120573A (en) * 2012-04-26 2013-11-05 하나 마이크론(주) Apparatus and method for transferring integrated circuit device
TWM563718U (en) * 2018-02-22 2018-07-11 東捷科技股份有限公司 Wheel-to-wheel rolling welding equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005219070A (en) * 2004-02-03 2005-08-18 Seiko Epson Corp Connecting method, connecting structure, connecting device, method of producing droplet discharge head, droplet discharge head and droplet discharge device
JP2007157787A (en) * 2005-11-30 2007-06-21 Semiconductor Energy Lab Co Ltd Sheet having thin-film integrated circuit and method of manufacturing semiconductor device
KR20130120573A (en) * 2012-04-26 2013-11-05 하나 마이크론(주) Apparatus and method for transferring integrated circuit device
TWM563718U (en) * 2018-02-22 2018-07-11 東捷科技股份有限公司 Wheel-to-wheel rolling welding equipment

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