TWI662366B - Photosensitive composition - Google Patents

Photosensitive composition Download PDF

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TWI662366B
TWI662366B TW104117777A TW104117777A TWI662366B TW I662366 B TWI662366 B TW I662366B TW 104117777 A TW104117777 A TW 104117777A TW 104117777 A TW104117777 A TW 104117777A TW I662366 B TWI662366 B TW I662366B
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meth
acrylate
photosensitive composition
group
formula
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TW201612641A (en
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田所恵典
塩田大
須賀英太
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日商東京應化工業股份有限公司
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Abstract

本發明係提供一種可形成高感度,且直線度(straightness)及對基板之密著性優異之圖型,即使感光性組成物含有遮光劑,或曝光量不足的狀況,也可抑制顯影後之圖型產生底切(undercut)的感光性組成物、及使用該組成物之彩色濾光片及顯示裝置。 The present invention provides a pattern that can form a high sensitivity, and has excellent straightness and adhesion to a substrate. Even if the photosensitive composition contains a light-shielding agent or an insufficient exposure amount, it can suppress the development after development. A photosensitive composition having an undercut pattern, and a color filter and a display device using the composition.

在含有光聚合性化合物及光聚合起始劑的感光性組成物中,咔唑環上之6位具有特定之取代基的咔唑-3-基羰基與特定之結構之環烷基烷基鍵結於肟碳的肟系化合物作為光聚合起始劑使用。 In a photosensitive composition containing a photopolymerizable compound and a photopolymerization initiator, a carbazole-3-ylcarbonyl group having a specific substituent at the 6-position on the carbazole ring and a cycloalkylalkyl bond having a specific structure An oxime-based compound bound to an oxime carbon is used as a photopolymerization initiator.

Description

感光性組成物 Photosensitive composition

本發明係有關感光性組成物、使用其之彩色濾光片及顯示裝置。 The present invention relates to a photosensitive composition, a color filter using the same, and a display device.

液晶顯示器等之顯示裝置係在形成有相互對向成對之電極之兩片基板之間,夾持液晶層的構造。而且,於其一之基板的內側形成有由紅色(R)、綠色(G)、藍色(B)等各色之像素區域所構成的彩色濾光片。此彩色濾光片,通常為了區分紅色、綠色、藍色等之各像素區域而形成黑色矩陣。 A display device such as a liquid crystal display has a structure in which a liquid crystal layer is sandwiched between two substrates formed with electrodes facing each other in pairs. A color filter composed of pixel regions of each color, such as red (R), green (G), and blue (B), is formed inside one of the substrates. This color filter generally forms a black matrix in order to distinguish each pixel region such as red, green, and blue.

一般,彩色濾光片係以微影法來製造。亦即,首先,將黑色感光性組成物塗佈於基板上,經乾燥後,曝光、顯影,形成黑色矩陣。接著,對於紅色、綠色、藍色等各色之感光性組成物,重複塗佈、乾燥、曝光及顯影,在特定位置上形成各色之像素區域,製造彩色濾光片。 Generally, a color filter is manufactured by a lithography method. That is, first, a black photosensitive composition is coated on a substrate, dried, and then exposed and developed to form a black matrix. Next, the photosensitive composition of each color, such as red, green, and blue, is repeatedly coated, dried, exposed, and developed to form a pixel region of each color at a specific position to produce a color filter.

黑色矩陣係由含有遮光劑之感光性組成物製作的圖型,藉由抑制來自各像素區域之漏光,有助於獲得 顯示裝置之對比提高或良好的發色。又,如上述,於彩色濾光片製作之最初階段形成的黑色矩陣,也擔任形成其後將各像素區域著色之感光性組成物埋入用的凹部,並在特定位置形成各色像素區域的角色。 The black matrix is a pattern made of a photosensitive composition containing a light-shielding agent. It helps to obtain light by suppressing light leakage from each pixel region. The contrast of the display device is improved or the color development is good. In addition, as described above, the black matrix formed in the initial stage of color filter production also plays the role of forming recesses for embedding the photosensitive composition for coloring each pixel region thereafter, and forming each color pixel region at a specific position. .

近年,液晶顯示器之製造時,已嘗試藉由黑色矩陣提高遮光性,進一步提高液晶顯示器所顯示之圖像的對比。因此,形成黑色矩陣用之感光性組成物必須含有大量遮光劑。然而,如此,使感光性組成物含大量遮光劑時,將塗佈於基板上所成之感光性組成物之膜進行曝光時,使感光性組成物硬化用的光,很難到達膜之底部,導致隨著感光性組成物之感度顯著下降之硬化不良。 In recent years, in the manufacture of liquid crystal displays, attempts have been made to improve the light-shielding properties through the black matrix, and to further improve the contrast of the images displayed by the liquid crystal displays. Therefore, the photosensitive composition for forming a black matrix must contain a large amount of a light-shielding agent. However, when the photosensitive composition contains a large amount of a light-shielding agent as described above, when the film of the photosensitive composition formed on the substrate is exposed, the light for curing the photosensitive composition hardly reaches the bottom of the film. Leading to poor hardening as the sensitivity of the photosensitive composition decreases significantly.

感光性組成物係作為其成分之一部份所含有之光聚合起始劑藉由曝光,使產生自由基,此自由基使感光性組成物所含之聚合性化合物聚合而硬化。因此,感光性組成物之感度,已知因該感光性組成物所含之光聚合起始劑之種類而受到影響。又,近年,配合液晶顯示器之生產台數增加,彩色濾光片之生產量亦增加,從進一步提高生產性的觀點,期望可在低曝光量下形成圖型之高感度的感光性組成物。這種情況下,可使感光性組成物之感度良好的光聚合起始劑,在專利文獻1中提案有具有環烷基之肟酯化合物。專利文獻1中所記載之實施例中具體揭示以下述化學式(a)及(b)表示的化合物。 The photopolymerization initiator contained in the photosensitive composition as a part of the composition causes radicals to be generated by exposure, and this radical polymerizes and hardens the polymerizable compound contained in the photosensitive composition. Therefore, it is known that the sensitivity of the photosensitive composition is affected by the type of the photopolymerization initiator contained in the photosensitive composition. In addition, in recent years, the number of liquid crystal displays has increased, and the production volume of color filters has also increased. From the viewpoint of further improving productivity, it is expected that a photosensitive composition with high sensitivity can be formed at a low exposure. In this case, a photopolymerization initiator which can make the sensitivity of the photosensitive composition good is proposed in Patent Document 1 as an oxime ester compound having a cycloalkyl group. The examples described in Patent Document 1 specifically disclose compounds represented by the following chemical formulae (a) and (b).

[先前技術文獻] [Prior technical literature]

[專利文獻] [Patent Literature]

[專利文獻1]中華人民共和國公開專利公報第101508744號 [Patent Document 1] Japanese Patent Publication No. 101508744

[發明概要] [Invention Summary]

藉由將以上述化學式(a)及(b)表示之化合物作為光聚合起始劑使用,可製作高感度之感光性組成物。然而,含有以上述化學式(a)及(b)表示之化合物作為光聚合起始劑之感光性組成物的感度,不一定能夠對應於顯示器等生產時之圖型形成中之低曝光量化的影響,感光性組成物需要進一步提高感度。 By using the compounds represented by the chemical formulae (a) and (b) as a photopolymerization initiator, a highly sensitive photosensitive composition can be produced. However, the sensitivity of a photosensitive composition containing a compound represented by the above-mentioned chemical formulae (a) and (b) as a photopolymerization initiator may not necessarily correspond to the effect of low exposure quantification in pattern formation during production of a display or the like. The photosensitive composition needs to be further improved in sensitivity.

又,此等化合物作為光聚合起始劑使用,形成黑色矩陣時,感度良好,但相反地所形成之黑色矩陣之 圖型形狀產生如下述的問題。 In addition, these compounds are used as photopolymerization initiators. When forming a black matrix, the sensitivity is good, but on the contrary, The pattern shape causes the following problems.

通常,使用感光性組成物形成液晶顯示器用之彩色濾光片之圖型的情形,如圖1(a)所示,一般而言,該圖型之寬度方向之剖面的剖面1越接近底邊1a,變得越寬廣,越接近頂邊1b,變得越狹窄的梯形形狀。此時,圖型之剖面1與彩色濾光片基板(無圖示)間所成的角度θ成為銳角。 Generally, when a pattern of a color filter for a liquid crystal display is formed using a photosensitive composition, as shown in FIG. 1 (a), generally, the closer the cross section 1 of the cross section of the pattern in the width direction is to the bottom 1a, the wider it becomes, the closer it is to the top edge 1b, the narrower the trapezoidal shape becomes. At this time, the angle θ formed between the patterned section 1 and the color filter substrate (not shown) becomes an acute angle.

然而,使用含有以上述化學式(a)或(b)表示之化合物作為光聚合起始劑的感光性組成物來形成黑色矩陣時,如圖1(b)所示,顯影時伴隨著圖型底部之一部份溶解,成為該圖型寬度方向之剖面之剖面2中之底邊2a的兩端有產生底切21的情形。此時,圖型之剖面2與彩色濾光片基板(無圖示)間所成之角度θ為鈍角。如此,角度θ成為鈍角時,形成鄰接於黑色矩陣之紅色、綠色、藍色等之各色像素區域時,於底切21部分產生氣泡。亦即,鄰接於黑色矩陣形成像素區域形成用之感光性組成物之膜的情形,感光性組成物不會進入以底切21形態存在的空間中,該空間以氣泡形態殘留。這種氣泡存在於彩色濾光片時,由於大幅損及液晶顯示裝置之畫質,故有問題。在黑色矩陣之圖型形成時之顯影,在稍過量之過度顯影的情形,特別明顯產生這種問題。 However, when a black matrix is formed using a photosensitive composition containing a compound represented by the above chemical formula (a) or (b) as a photopolymerization initiator, as shown in FIG. 1 (b), the bottom of the pattern is accompanied by development. Some of them are dissolved, and undercuts 21 may be generated at both ends of the bottom edge 2a in the cross section 2 which is the cross section in the pattern width direction. At this time, an angle θ formed between the cross section 2 of the pattern and a color filter substrate (not shown) is an obtuse angle. As described above, when the angle θ becomes an obtuse angle, when the pixel regions of red, green, blue, and the like adjacent to the black matrix are formed, bubbles are generated in the undercut 21 portion. That is, in the case of a film adjacent to the photosensitive composition for forming a black matrix-forming pixel region, the photosensitive composition does not enter the space existing in the form of undercut 21, and the space remains as a bubble. When such bubbles exist in a color filter, there is a problem because the image quality of the liquid crystal display device is greatly impaired. This problem is particularly noticeable in the case of development when the black matrix pattern is formed, and in the case of a slight excessive overdevelopment.

此外,使用含有上述化學式(a)及(b)表示之化合物作為光聚合起始劑之感光性組成物,形成圖型的情形,有不易形成直線度優異之圖型,或顯影後容易產生圖 型自基板剝離的問題。 In addition, when a photosensitive composition containing a compound represented by the above-mentioned chemical formulae (a) and (b) as a photopolymerization initiator is used to form a pattern, it may be difficult to form a pattern having excellent straightness, or a pattern may be easily generated after development. Type peeling from the substrate.

本發明有鑑於以上狀況而完成者,本發明之目的係提供一種可形成高感度,且直線度及對基板之密著性優異的圖型,即使感光性組成物含有遮光劑,或曝光量不足的狀況,也可抑制顯影後之圖型產生底切的感光性組成物、及使用該組成物之彩色濾光片及顯示裝置。 The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a pattern that can form a high sensitivity, and has excellent straightness and adhesion to a substrate, even if the photosensitive composition contains a light-shielding agent or an insufficient exposure amount. In this case, it is also possible to suppress a photosensitive composition that undercuts the pattern after development, a color filter and a display device using the composition.

本發明人等,為了解決上述課題而精心檢討的結果,發現在含有光聚合性化合物及光聚合起始劑的感光性組成物中,咔唑環上之6位具有特定之取代基的咔唑-3-基羰基與特定之結構之環烷基烷基鍵結於肟碳的肟系化合物作為光聚合起始劑使用,可解決上述課題,遂完成本發明。 As a result of careful review in order to solve the above problems, the present inventors have found that in a photosensitive composition containing a photopolymerizable compound and a photopolymerization initiator, a carbazole having a specific substituent at the 6-position on the carbazole ring An oxime-based compound in which a -3-ylcarbonyl group and a cycloalkylalkyl group having a specific structure are bonded to an oxime carbon is used as a photopolymerization initiator, which can solve the above-mentioned problems and complete the present invention.

本發明之第一態樣係含有(A)光聚合性化合物、及(B)下述式(1)表示之肟系光聚合起始劑的感光性組成物。 A first aspect of the present invention is a photosensitive composition containing (A) a photopolymerizable compound and (B) an oxime-based photopolymerization initiator represented by the following formula (1).

(上述式(1)中,l為1~5之整數,m為0~(l+3)之整數,n為1~8之整數,R1為碳原子數1~11之烷基、或可 具有取代基之芳基,R2為下述式(2)~(5)表示之取代基之任一,R3為烷基,R4為氫原子或碳原子數1~10之烷基。) (In the above formula (1), l is an integer of 1 to 5, m is an integer of 0 to (l + 3), n is an integer of 1 to 8, R 1 is an alkyl group of 1 to 11 carbon atoms, or An aryl group which may have a substituent, R 2 is any of the substituents represented by the following formulae (2) to (5), R 3 is an alkyl group, and R 4 is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms .)

本發明之第2態樣係第1態樣的感光性組成物,使用含有著色劑(C)之感光性組成物形成的彩色濾光片。 The second aspect of the present invention is the photosensitive composition of the first aspect, and a color filter formed using the photosensitive composition containing a colorant (C).

本發明之第3態樣係使用本發明之第2態樣之彩色濾光片的顯示裝置。 A third aspect of the present invention is a display device using the color filter of the second aspect of the present invention.

依據本發明時,可提供一種可形成高感度,且直線度及對基板之密著性優異的圖型,即使感光性組成物含有遮光劑,或曝光量不足的狀況,也可抑制顯影後之圖型產生底切的感光性組成物、及使用該組成物之彩色濾光片及顯示裝置。 According to the present invention, it is possible to provide a pattern that can form a high sensitivity, and has excellent straightness and adhesion to a substrate. Even if the photosensitive composition contains a light-shielding agent or an insufficient exposure amount, it can suppress the development after development. A photosensitive composition with an undercut pattern, a color filter and a display device using the composition.

1‧‧‧底切不存在之圖型中之寬方向的剖面 1‧‧‧ Wide cross-section in an undercut pattern

2‧‧‧底切存在之圖型中之寬方向的剖面 2‧‧‧ undercut in wide direction

[圖1]表示由感光性組成物形成之圖型之寬方向之剖面形狀的示意圖,(a)表示通常之圖型之剖面形狀的圖,(b)表示產生底切21之圖型之剖面形狀的圖。 [Fig. 1] A schematic diagram showing a cross-sectional shape in the width direction of a pattern formed from a photosensitive composition, (a) a diagram showing a cross-sectional shape of a normal pattern, and (b) a cross-section of a pattern generating undercut 21. Shaped figure.

[感光性組成物] [Photosensitive composition]

感光性組成物至少含有(A)光聚合性化合物、及(B)以上述式(1)表示之肟系光聚合起始劑。以下詳細說明本發明之感光性組成物所含有的各成分。 The photosensitive composition contains at least (A) a photopolymerizable compound and (B) an oxime-based photopolymerization initiator represented by the above formula (1). Hereinafter, each component contained in the photosensitive composition of this invention is demonstrated in detail.

<(A)光聚合性化合物> <(A) Photopolymerizable compound>

本發明之感光性組成物所含有之(A)光聚合性化合物並無特別限制,可使用以往習知之光聚合性化合物。其中,較佳為具有乙烯性不飽和基的樹脂或單體,更佳為組合此等者。藉由組合具有乙烯性不飽和基之樹脂與具有乙烯性不飽和基之單體,可提高感光性組成物之硬化性,容易形成圖型。 The (A) photopolymerizable compound contained in the photosensitive composition of the present invention is not particularly limited, and conventionally known photopolymerizable compounds can be used. Among them, a resin or monomer having an ethylenically unsaturated group is preferred, and a combination of these is more preferred. By combining a resin having an ethylenically unsaturated group and a monomer having an ethylenically unsaturated group, the curability of the photosensitive composition can be improved and a pattern can be easily formed.

[具有乙烯性不飽和基之樹脂] [Resin with ethylenically unsaturated group]

具有乙烯性不飽和基之樹脂,可列舉例如使(甲基)丙烯酸、富馬酸、馬來酸、富馬酸單甲酯、富馬酸單乙酯、(甲基)丙烯酸2-羥基乙酯、乙二醇單甲醚(甲基)丙烯酸酯、乙二醇單乙醚(甲基)丙烯酸酯、丙三醇(甲基)丙烯酸酯、(甲基)丙烯醯胺、丙烯腈、甲基丙烯腈、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸苄酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二 (甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、四羥甲基丙烷四(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、cardo環氧基二丙烯酸酯等聚合而成的寡聚物類;使多元醇類與單元酸或多元酸縮合獲得之聚酯預聚物,再與(甲基)丙烯酸反應獲得之聚酯(甲基)丙烯酸酯;使多元醇與具有兩個異氰酸酯基之化合物反應後,再與(甲基)丙烯酸反應獲得之聚胺基甲酸酯(甲基)丙烯酸酯;使雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、苯酚或甲酚酚醛清漆型環氧樹脂、甲階型環氧樹脂、三酚甲烷型環氧樹脂、聚碳酸聚環氧丙酯、多元醇聚環氧丙酯、脂肪族或脂環式環氧樹脂、胺環氧樹脂、二羥基苯型環氧樹脂等之環氧樹脂,與(甲基)丙烯酸反應獲得之環氧(甲基)丙烯酸酯樹脂等。另外,可使用使環氧(甲基)丙烯酸酯樹脂與多元酸酐反應而成的樹脂。又,本說明書中之「(甲基)丙烯酸」意指「丙烯酸或甲基丙烯酸」。 Examples of the resin having an ethylenically unsaturated group include (meth) acrylic acid, fumaric acid, maleic acid, monomethyl fumarate, monoethyl fumarate, and 2-hydroxyethyl (meth) acrylate. Ester, ethylene glycol monomethyl ether (meth) acrylate, ethylene glycol monoethyl ether (meth) acrylate, glycerol (meth) acrylate, (meth) acrylamide, acrylonitrile, methyl Acrylonitrile, methyl (meth) acrylate, ethyl (meth) acrylate, isobutyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, benzyl (meth) acrylate, ethylenedi Alcohol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (Meth) acrylate, tetraethylene glycol di (meth) acrylate, butanediol di (meth) acrylate, propylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate Ester, tetramethylolpropane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (methyl) Oligomers obtained by polymerizing acrylate, 1,6-hexanediol di (meth) acrylate, cardo epoxy diacrylate, etc .; polyesters obtained by condensing polyhydric alcohols with monobasic acid or polybasic acid Prepolymer, polyester (meth) acrylate obtained by reacting with (meth) acrylic acid; polyamine group obtained by reacting polyol with a compound having two isocyanate groups and then reacting with (meth) acrylic acid Formate (meth) acrylate; make bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, phenol or cresol novolac epoxy resin, resol type ring Oxygen resin, trisphenol methane epoxy resin, polypropylene carbonate, polyol polypropylene oxide, fat Epoxy or alicyclic epoxy resin, amine epoxy resin, dihydroxybenzene type epoxy resin, the obtained reacted with the epoxy (meth) acrylate, (meth) acrylate resin and the like. In addition, a resin obtained by reacting an epoxy (meth) acrylate resin with a polybasic acid anhydride can be used. The "(meth) acrylic acid" in this specification means "acrylic or methacrylic acid".

另外,具有乙烯性不飽和基之樹脂,較適合使用藉由使環氧化合物與含有不飽和基之羧酸化合物之反應物再與多元酸酐反應而得的樹脂。 In addition, the resin having an ethylenically unsaturated group is more preferably a resin obtained by reacting an epoxy compound with a reactant of an unsaturated group-containing carboxylic acid compound with a polybasic acid anhydride.

其中,較佳為以下述式(a1)表示之化合物。以該式(a1)表示之化合物,其本身由於光硬化性高,故較 佳。 Among them, a compound represented by the following formula (a1) is preferred. The compound represented by the formula (a1) is more stable than good.

上述式(a1)中,X表示下述式(a2)表示之基。 In the formula (a1), X represents a group represented by the following formula (a2).

上述式(a2)中,R1a各自獨立表示氫原子、碳原子數1~6之烴基、或鹵素原子,R2a各自獨立表示氫原子或甲基,W表示單鍵或下述式(a3)表示之基。 In the formula (a2), R 1a each independently represents a hydrogen atom, a hydrocarbon group having 1 to 6 carbon atoms, or a halogen atom, R 2a each independently represents a hydrogen atom or a methyl group, and W represents a single bond or the following formula (a3) The base of representation.

又,上述式(a1)中,Y表示由二羧酸酐去除酸酐基(-CO-O-CO-)的殘基。二羧酸酐之例,可列舉例如馬來酸酐、琥珀酸酐、衣康酸酐、苯二甲酸酐、四氫苯二甲酸酐、六氫苯二甲酸酐、甲基內亞甲基四氫苯二甲酸酐(methyl endo-methylene-tetrahydrophthalic anhydride)、氯菌酸酐(chlorendic anhydride)、甲基四氫苯二甲酸酐、戊二酸酐等。 In the formula (a1), Y represents a residue in which an acid anhydride group (-CO-O-CO-) is removed from a dicarboxylic anhydride. Examples of the dicarboxylic anhydride include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methylmethylenetetrahydroxylylene. Acid anhydride (methyl endo-methylene-tetrahydrophthalic anhydride), chlorendic anhydride, methyltetrahydrophthalic anhydride, glutaric anhydride and the like.

又,上述式(a1)中,Z表示自四羧酸二酐去除兩個酸酐基的殘基。四羧酸二酐之例,可列舉例如均苯四酸酐、二苯甲酮四羧酸二酐、聯苯四羧酸二酐、聯苯醚四羧酸二酐等。 In the formula (a1), Z represents a residue obtained by removing two acid anhydride groups from a tetracarboxylic dianhydride. Examples of the tetracarboxylic dianhydride include pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, and diphenyl ether tetracarboxylic dianhydride.

又,上述式(a1)中,m表示0~20之整數。 In the formula (a1), m represents an integer of 0 to 20.

具有乙烯性不飽和基之樹脂之酸價,以樹脂固體成分計,較佳為10~150mgKOH/g,更佳為70~110mgKOH/g。藉由使酸價成為10mgKOH/g以上,可獲得對顯影液充分的溶解性,故較佳。又,藉由使酸價為150mgKOH/g以下,可獲得充分硬化性,可使表面性良好,故較佳。 The acid value of the resin having an ethylenically unsaturated group is preferably 10 to 150 mgKOH / g, and more preferably 70 to 110 mgKOH / g based on the solid content of the resin. When the acid value is 10 mgKOH / g or more, sufficient solubility in a developing solution can be obtained, which is preferable. In addition, when the acid value is 150 mgKOH / g or less, sufficient hardenability can be obtained, and surface properties can be improved, which is preferable.

又,具有乙烯性不飽和基之樹脂之質量平均分子量,較佳為1000~40000,更佳為2000~30000。藉由使質量平均分子量為1000以上,可獲得良好之耐熱性、膜強度,故較佳。又,藉由使質量平均分子量為40000以下,可獲得良好顯影性,故較佳。 The mass average molecular weight of the resin having an ethylenically unsaturated group is preferably 1,000 to 40,000, and more preferably 2,000 to 30,000. When the mass average molecular weight is 1,000 or more, it is preferable because good heat resistance and film strength can be obtained. Moreover, it is preferable to set a mass average molecular weight to 40,000 or less in order to obtain favorable developability.

[具有乙烯性不飽和基之單體] [Monomer with ethylenically unsaturated group]

具有乙烯性不飽和基之單體,有單官能單體與多官能單體。 Monoethylenically unsaturated monomers include monofunctional monomers and polyfunctional monomers.

單官能單體可列舉例如(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N- 羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、衣康酸、衣康酸酐、檸康酸、檸康酸酐、巴豆酸、2-丙烯醯胺-2-甲基丙烷磺酸、第三丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-(甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、甘油單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、二甲胺基(甲基)丙烯酸酯、環氧丙基(甲基)丙烯酸酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、苯二甲酸衍生物之半(甲基)丙烯酸酯等。此等單官能單體可單獨使用,亦可組合兩種以上使用。 Examples of the monofunctional monomer include (meth) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, and ethoxymethyl (meth) acrylamine Amine, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N- Hydroxymethyl (meth) acrylamide, (meth) acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2- Acrylamido-2-methylpropanesulfonic acid, tertiary butylacrylamidosulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, (meth) 2-ethylhexyl acrylate, cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-phenoxy-2-hydroxypropyl (meth) acrylate, 2- (meth) acryloxy-2-hydroxypropyl phthalate, glycerol mono (meth) acrylate, (formaldehyde) Tetrahydrofurfuryl acrylate, dimethylamino (meth) acrylate, epoxypropyl (meth) acrylate, 2,2,2-trifluoroethyl (meth) acrylate, (meth) 2,2,3,3-tetrafluoropropyl acrylic acid, semi- (meth) acrylic acid esters of phthalic acid derivatives, etc. These monofunctional monomers may be used alone or in combination of two or more kinds.

另外,多官能單體可列舉例如乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、甘油二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基) 丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二環氧丙基醚二(甲基)丙烯酸酯、二乙二醇二環氧丙基醚二(甲基)丙烯酸酯、苯二甲酸二環氧丙酯二(甲基)丙烯酸酯、甘油三丙烯酸酯、甘油聚環氧丙基醚聚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯(亦即,甲苯二異氰酸酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯與(甲基)丙烯酸2-羥基乙酯之反應物、亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等之多官能單體,或三丙烯酸甲縮醛等。此等多官能單體可單獨使用,亦可組合兩種以上使用。 Examples of the polyfunctional monomer include ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, and propylene glycol di (methyl). Acrylate, polypropylene glycol di (meth) acrylate, butanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate , Trimethylolpropane tri (meth) acrylate, glycerol di (meth) acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di (methyl) ) Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2,2-bis (4- ((Meth) acryloxydiethoxyphenyl) Propane, 2,2-bis (4- (meth) acryloxypolyethoxyphenyl) propane, 2-hydroxy-3- (meth) acryloxypropyl (meth) acrylate, Diethylene glycol diglycidyl ether di (meth) acrylate, diethylene glycol diglycidyl ether di (meth) acrylate, diglycidyl phthalate di (meth) acrylate , Glycerol triacrylate, glycerol polyglycidyl ether poly (meth) acrylate, urethane (meth) acrylate (i.e., toluene diisocyanate), trimethylhexamethylene diisocyanate Reactant with hexamethylene diisocyanate and 2-hydroxyethyl (meth) acrylate, methylene bis (meth) acrylamide, (meth) acrylamide methylene ether, polyol and N -A polyfunctional monomer such as a condensate of hydroxymethyl (meth) acrylamide, or methylal triacrylate. These polyfunctional monomers may be used alone or in combination of two or more.

(A)成分之光聚合性化合物的含量係相對於感光性組成物之固體成分之合計100質量份,較佳為10~99.9質量份。藉由使(A)成分之含量相對於固體成分之合計100質量份為10質量份以上,可期待形成之圖型之充分的耐熱性及耐藥品性。 The content of the photopolymerizable compound of the component (A) is 100 parts by mass with respect to the total of the solid content of the photosensitive composition, and preferably 10 to 99.9 parts by mass. When the content of the component (A) is 10 parts by mass or more with respect to 100 parts by mass of the total solid content, sufficient heat resistance and chemical resistance of the pattern to be formed can be expected.

<(B)肟系光聚合起始劑> <(B) oxime-based photopolymerization initiator>

本發明之感光性組成物所含有的肟系光聚合起始劑係以下述式(1)表示之化合物。 The oxime-based photopolymerization initiator contained in the photosensitive composition of the present invention is a compound represented by the following formula (1).

(上述式(1)中,l為1~5之整數,m為0~(l+3)之整數,n為1~8之整數,R1為碳原子數1~11之烷基、或可具有取代基之芳基,R2為下述式(2)~(5)表示之取代基之任一,R3為烷基,R4為氫原子或碳原子數1~10之烷基。) (In the above formula (1), l is an integer of 1 to 5, m is an integer of 0 to (l + 3), n is an integer of 1 to 8, R 1 is an alkyl group of 1 to 11 carbon atoms, or An aryl group which may have a substituent, R 2 is any of the substituents represented by the following formulae (2) to (5), R 3 is an alkyl group, and R 4 is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms .)

上述式(1)中,R1較佳例示為甲基、乙基、丙基、異丙基、丁基、苯基、甲基苯基、萘基等,此等之中,更佳為甲基或苯基。 In the above formula (1), R 1 is preferably exemplified by methyl, ethyl, propyl, isopropyl, butyl, phenyl, methylphenyl, naphthyl, and the like. Among them, methyl is more preferable. Or phenyl.

又,上述式(1)中,R3為烷基。烷基之碳原子數,較佳為1~10,更佳為1~5,特佳為1~3。R3較佳例示為甲基、乙基、丙基、異丙基、丁基等,此等之中,更佳為甲基。 In the formula (1), R 3 is an alkyl group. The number of carbon atoms of the alkyl group is preferably 1 to 10, more preferably 1 to 5, and particularly preferably 1 to 3. R 3 is preferably exemplified by methyl, ethyl, propyl, isopropyl, butyl and the like, and among these, methyl is more preferable.

上述式(1)中,R4為氫原子或碳原子數1~10之烷基。上述式(1)中,R4較佳例示為氫原子、甲基、乙基、n-丙基、異丙基、n-丁基、異丁基、sec-丁基、tert-丁基、n-戊基、n-己基、3-甲基丁基等,此等之中,更佳 為乙基。 In the formula (1), R 4 is a hydrogen atom or an alkyl group having 1 to 10 carbon atoms. In the above formula (1), R 4 is preferably exemplified by a hydrogen atom, methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, Among these, n-pentyl, n-hexyl, 3-methylbutyl, and the like are more preferably ethyl.

上述式(1)中,l為1~5之整數,較佳為1~3之整數,更佳為1或2。上述式(1)中,m為0~(l+3),較佳為0~3之整數,更佳為0~2之整數,特佳為0。上述式(1)中,n為1~8之整數,較佳為1~5之整數,更佳為1~3之整數,特佳為1或2。 In the above formula (1), l is an integer of 1 to 5, preferably an integer of 1 to 3, and more preferably 1 or 2. In the above formula (1), m is 0 to (l + 3), preferably an integer of 0 to 3, more preferably an integer of 0 to 2, and particularly preferably 0. In the above formula (1), n is an integer of 1 to 8, preferably an integer of 1 to 5, more preferably an integer of 1 to 3, and particularly preferably 1 or 2.

式(1)表示之化合物之中,較佳的化合物,可列舉以下的化合物。 Among the compounds represented by formula (1), preferable compounds include the following compounds.

式(1)表示之化合物之合成方法,無特別限定。式(1)表示之化合物,例如可依據下述之合成圖示(Scheme)來合成。 The method for synthesizing the compound represented by the formula (1) is not particularly limited. The compound represented by the formula (1) can be synthesized according to the following Scheme ( Scheme ) , for example.

<合成圖示> <Composite icon>

具體而言,首先,將式(i)表示之咔唑化合物依據常法,進行硝基化或佛瑞德-克來福特醯化(Friedel-Crafts Acylation),得到式(ii)表示之咔唑化合物。接著,將式(ii)表示之咔唑化合物,使用式(iii)表示之羧酸鹵化物,進行佛瑞德-克來福特醯化,得到式(iv)表示之酮化合物。 Specifically, first, a carbazole compound represented by the formula (i) is subjected to nitration or Friedel-Crafts Acylation according to a conventional method to obtain a carbazole represented by the formula (ii). Compound. Next, the carbazole compound represented by the formula (ii) is subjected to Friedel-Crafts aberration using the carboxylic acid halide represented by the formula (iii) to obtain a ketone compound represented by the formula (iv).

接著,將式(iv)表示之酮化合物在鹽酸之存在下,使亞硝酸酯反應,得到式(v)表示之肟化合物。所得之肟化合物(v)藉由酸鹵化物(R1COHal)、或酸酐((R1CO)2O)等進行醯化,得到式(1)表示之化合物。 Next, a ketone compound represented by the formula (iv) is reacted with a nitrite in the presence of hydrochloric acid to obtain an oxime compound represented by the formula (v). The obtained oxime compound (v) is tritiated with an acid halide (R 1 COHal), an acid anhydride ((R 1 CO) 2 O), or the like to obtain a compound represented by the formula (1).

又,上述式(i)~(v)中,R1、R2、R3、R4、m、n、及l係與式(1)中之定義同樣。又,上述合成圖示中,Hal表示鹵素原子。鹵素可列舉例如氯、溴、碘等,較佳為氯。 In the above formulae (i) to (v), R 1 , R 2 , R 3 , R 4 , m, n, and l are the same as defined in the formula (1). In the above synthesis scheme, Hal represents a halogen atom. Examples of the halogen include chlorine, bromine, and iodine, and chlorine is preferred.

上述式(1)表示之肟系光聚合起始劑,在提供可形成高感度且直線度及對基板之密著性優異之圖型,即使感光性組成物含有遮光劑,曝光量不足的狀況,也可抑制顯影後之圖型產生底切之感光性組成物,故較佳。 The oxime-based photopolymerization initiator represented by the above formula (1) provides a pattern capable of forming a high sensitivity, excellent straightness, and excellent adhesion to a substrate. Even if the photosensitive composition contains a light-shielding agent, the exposure amount is insufficient. It is also preferable to suppress the photosensitive composition that undercuts the pattern after development.

又,上述式(1)表示之肟系光聚合起始劑,在容易溶解於丙二醇單甲基醚乙酸酯(PM)方面,也較佳。PM為安全且使用無限定,作為製造彩色濾光片,或LCD之製造步驟中,為了形成各種構造物所使用之材料的溶劑而被廣泛使用。因此,良好溶解於PM的光聚合起始劑,可作為添加於感光性組成物(光阻材料)之添加劑使用。 The oxime-based photopolymerization initiator represented by the formula (1) is also preferable in that it is easily soluble in propylene glycol monomethyl ether acetate (PM). PM is safe and unlimited in use. It is widely used as a solvent for materials used to form various structures in the process of manufacturing color filters or LCDs. Therefore, a photopolymerization initiator that is well soluble in PM can be used as an additive added to a photosensitive composition (photoresist material).

(B)成分之肟系光聚合起始劑之含量係相對於感光性組成物之固體成分之合計100質量份,較佳為0.1~50質量份,更佳為1~45質量份。藉由在上述範圍內,可得到充分之耐熱性、耐藥品性,同時可提高塗膜形成能,可抑制光硬化不良。 The content of the oxime-based photopolymerization initiator of the component (B) is 100 parts by mass with respect to the total solid content of the photosensitive composition, preferably 0.1 to 50 parts by mass, and more preferably 1 to 45 parts by mass. Within the above range, sufficient heat resistance and chemical resistance can be obtained, and at the same time, the coating film forming energy can be improved, and photohardening defects can be suppressed.

感光性組成物僅含有(B)成分之上述式(1)表示之肟系光聚合起始劑作為光聚合起始劑較佳。但是(B)成分之上述式(1)表示之肟系光聚合起始劑,在不阻礙本發明之目的之範圍內,可與式(1)以外之結構的光聚合起始劑併用。此的情形,相對於感光性組成物所含之光聚合起 始劑之總質量時,(B)成分之肟系光聚合起始劑之質量,較佳為50質量%以上,更佳為70質量%以上,特佳為80質量%以上,最佳為90質量%以上。 The oxime-based photopolymerization initiator represented by the above formula (1), in which the photosensitive composition contains only the component (B), is preferably used as the photopolymerization initiator. However, the oxime-based photopolymerization initiator represented by the above formula (1) as the component (B) can be used in combination with a photopolymerization initiator having a structure other than the formula (1) as long as the object of the present invention is not hindered. In this case, compared with the photopolymerization contained in the photosensitive composition, When the total mass of the initiator is, the mass of the oxime-based photopolymerization initiator of the component (B) is preferably 50% by mass or more, more preferably 70% by mass or more, particularly preferably 80% by mass or more, and most preferably 90% by mass. Above mass%.

式(1)以外之結構之光聚合起始劑的具體例,可列舉例如1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、雙(4-二甲基胺基苯基)酮、2,4,6-三甲基苯甲醯基二苯基膦氧化物、4-苯甲醯基-4’-甲基二甲基硫化物、4-二甲基胺基安息香酸、4-二甲基胺基安息香酸甲酯、4-二甲基胺基安息香酸乙酯、4-二甲基胺基安息香酸丁酯、4-二甲基胺基-2-乙基己基安息香酸、4-二甲基胺基-2-異戊基安息香酸、苄基-β-甲氧基乙基縮醛、苄基二甲基縮酮、1-苯基-1,2-丙二酮-2-(o-乙氧基羰基)肟、o-苯甲醯基安息香酸甲酯、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二甲基噻噸酮、1-氯-4-丙氧基噻噸酮、噻噸、2-氯噻噸、2,4-二乙基噻噸、2-甲基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、過氧化苯甲醯(Benzoyl Peroxide)、過氧化異丙苯、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑、2-(o-氯苯基)-4,5-二苯基咪唑二聚物、2-(o-氯苯基)-4,5-二(甲氧基苯基)咪唑二聚物、2-(o-氟苯基)-4,5-二苯基咪唑二聚物、2-(o-甲氧基苯基)-4,5-二苯基咪唑二聚物、2-(p-甲氧基苯基)-4,5-二苯 基咪唑二聚物、2,4,5-三芳基咪唑二聚物、二苯甲酮、2-氯二苯甲酮、4,4’-雙二甲基胺基二苯甲酮(即,米其勒酮)、4,4’-雙二乙基胺基二苯甲酮(即,乙基米其勒酮)、4,4’-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、二苯基乙二酮(Benzil)、安息香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香-n-丁基醚、安息香異丁基醚、安息香丁基醚、苯乙酮、2,2-二乙氧基苯乙酮、p-二甲基苯乙酮、p-二甲基胺基丙醯苯、二氯苯乙酮、三氯苯乙酮、p-tert-丁基苯乙酮、p-二甲基胺基苯乙酮、p-tert-丁基三氯苯乙酮、p-tert-丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、二苯并環庚酮、戊基-4-二甲基胺基苯甲酸酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、p-甲氧基三嗪、2,4,6-參(三氯甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(3,4-二甲氧基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-n-丁氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s- 三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、「IRGACURE OXE02」、「IRGACURE OXE01」、「IRGACURE 369」、「IRGACURE 651」、「IRGACURE 907」(商品名:BASF製)、「NCI-831」(商品名:ADEKA製)等。此等之光聚合起始劑可單獨或組合2種以上使用。 Specific examples of the photopolymerization initiator having a structure other than the formula (1) include, for example, 1-hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-phenylpropane-1-one, 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2-methyl-1-propane-1-one, 1- (4-isopropylphenyl) -2-hydroxy-2- Methylpropane-1-one, 1- (4-dodecylphenyl) -2-hydroxy-2-methylpropane-1-one, bis (4-dimethylaminophenyl) ketone, 2 , 4,6-trimethylbenzylidene diphenylphosphine oxide, 4-benzylidene-4'-methyldimethylsulfide, 4-dimethylaminobenzoic acid, 4-di Methyl methylaminobenzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexylbenzoate, 4 -Dimethylamino-2-isopentylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyl dimethyl ketal, 1-phenyl-1,2-propanedione-2 -(o-ethoxycarbonyl) oxime, o-benzylidene benzoate methyl ester, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone , 1-chloro-4-propoxythioxanthone, thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthine, 2-methylthioxanthone, 2-isopropyl Thiothan, 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3-diphenylanthraquinone, azobisisobutyronitrile, Benzoyl Peroxide ), Cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2- (o-chlorophenyl) -4,5-diphenylimidazole dimerization Compounds, 2- (o-chlorophenyl) -4,5-bis (methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer , 2- (o-methoxyphenyl) -4,5-diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,5-diphenyl Diimidazole dimer, 2,4,5-triarylimidazole dimer, benzophenone, 2-chlorobenzophenone, 4,4'-bisdimethylaminobenzophenone (i.e., Michelin), 4,4'-bisdiethylaminobenzophenone (i.e., ethyl Michelin), 4,4'-dichlorobenzophenone, 3,3-dimethyl 4-Methoxybenzophenone, Benzil, Benzoin, Benzoin Methyl Ether, Benzoin Ether, Benzoin Isopropyl Ether, Benzoin-n-Butyl Ether, Benzoin Butyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropylacetophenone, dichloroacetophenone , Trichloroacetophenone, p-tert-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichloroacetophenone, p-tert-butyldichloroacetophenone Ketone, α, α-dichloro-4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzocycloheptanone, pentyl-4 -Dimethylaminobenzoate, 9-phenylacridine, 1,7-bis- (9-acridyl) heptane, 1,5-bis- (9-acridyl) pentane, 1,3-bis- (9-acridyl) propane, p-methoxytriazine, 2,4,6-ginseng (trichloromethyl) ) -S-triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) vinyl]- 4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) vinyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) vinyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (3, 4-dimethoxyphenyl) vinyl] -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloro (Methyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-n-butoxybenzene ) -4,6-bis (trichloromethyl) -s-triazine, 2,4-bis-trichloromethyl-6- (3-bromo-4-methoxy) phenyl-s-tri Hydrazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (3- Bromo-4-methoxy) styrylphenyl-s- Triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) styrylphenyl-s-triazine, "IRGACURE OXE02", "IRGACURE OXE01", "IRGACURE "369", "IRGACURE 651", "IRGACURE 907" (trade name: made by BASF), "NCI-831" (trade name: made by ADEKA), etc. These photopolymerization initiators can be used alone or in combination of two or more.

<(C)著色劑> <(C) Colorant>

本發明之感光性組成物亦可進一步含有(C)著色劑。感光性組成物藉由含有(C)成分的著色劑,可適合作為例如液晶顯示器之彩色濾光片形成用途使用。又,本發明之感光性組成物,藉由含遮光劑作為著色劑,可適合作為例如顯示裝置之彩色濾光片中之黑色矩陣形成用途使用。 The photosensitive composition of the present invention may further contain (C) a colorant. The photosensitive composition contains a (C) component, and can be used suitably as a color filter formation application of a liquid crystal display, for example. The photosensitive composition of the present invention can be suitably used as a black matrix forming application in a color filter of a display device, for example, by containing a light-shielding agent as a colorant.

本發明之感光性組成物中所含有之(C)著色劑並無特別限制,但較佳使用例如色彩指數(C.I.;The Society of Dyers and Colourists公司發行)中歸類為顏料(pigment)的化合物,具體而言,如下述附色彩指數(C.I.)編號者。 The (C) colorant contained in the photosensitive composition of the present invention is not particularly limited, but it is preferable to use a compound classified as a pigment in, for example, the CI (issued by The Society of Dyers and Colourists). , Specifically, as shown below with a color index (CI) number.

C.I.色素(pigment)黃1(以下,「C.I.色素黃」同樣,僅記載編號)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73、74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、 151、152、153、154、155、156、166、167、168、175、180、185;C.I.色素橘1(以下,「C.I.色素橘」同樣,僅記載編號)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、73;C.I.色素紫1(以下,「C.I.色素紫」同樣,僅記載編號)、19、23、29、30、32、36、37、38、39、40、50;C.I.色素紅1(以下,「C.I.色素紅」同樣,僅記載編號)、2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、265;C.I.色素藍1(以下,「C.I.色素藍」同樣,僅記載編號)、2、15、15:3、15:4、15:6、16、22、60、64、66;C.I.色素綠7、C.I.色素綠36、C.I.色素綠37; C.I.色素棕23、C.I.色素棕25、C.I.色素棕26、C.I.色素棕28;C.I.色素黑1、C.I.色素黑7。 CI Pigment Yellow 1 (hereinafter, "CI Pigment Yellow" is the same, only the number is described), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, 185; CI Pigment Orange 1 (hereinafter, "CI Pigment Orange" is the same, only the number is described), 5, 13, 14, 16 , 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, 73; CI Pigment Violet 1 (hereinafter, "CI Pigment Violet" is the same, only Description number), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, 50; CI Pigment Red 1 (hereinafter, "CI Pigment Red" is the same, only the number is described), 2, 3, 4 , 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 15, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42 , 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 53: 1, 57, 57: 1, 57: 2, 58: 2 , 58: 4, 60: 1, 63: 1, 63: 2, 64: 1, 81: 1, 83, 88, 90: 1, 97, 101, 102, 104, 105, 106, 108, 112, 113 , 114, 122, 123, 144, 146, 149, 150, 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190 , 192, 193, 194, 202, 206, 207 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, 265; CI Pigment Blue 1 (hereinafter, "CI Pigment Blue" Similarly, only the numbers are described), 2, 15, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64, 66; CI Pigment Green 7, CI Pigment Green 36, CI Pigment Green 37; C.I.Pigment Brown 23, C.I.Pigment Brown 25, C.I.Pigment Brown 26, C.I.Pigment Brown 28; C.I.Pigment Black 1, C.I.Pigment Black 7.

又,以著色劑作為遮光劑的情形,遮光劑較佳為使用黑色顏料。黑色顏料可列舉例如碳黑、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等之金屬氧化物、複合氧化物、金屬硫化物、金屬硫酸鹽或金屬碳酸鹽等,不拘於有機物、無機物的各種顏料。此等之中,較佳為使用具有高遮光性的碳黑。藉由使用上述(B)成分,作為光聚合起始劑,即使使用高遮光性之黑色顏料,也可抑制顯影後之圖型發生底切。 When a colorant is used as a light-shielding agent, a black pigment is preferably used as the light-shielding agent. Examples of the black pigment include carbon black, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, silver and other metal oxides, composite oxides, metal sulfides, metal sulfates, and metal carbonates. , Not limited to organic, inorganic pigments. Among these, it is preferable to use carbon black having high light shielding properties. By using the component (B), as a photopolymerization initiator, even if a black pigment having a high light-shielding property is used, the undercut of the pattern after development can be suppressed.

碳黑可使用槽黑、爐黑、熱黑、燈黑等之眾所周知的碳黑,較佳為使用遮光性優異的槽黑。又,亦可使用樹脂被覆碳黑。 As the carbon black, well-known carbon blacks such as groove black, furnace black, heat black, and lamp black can be used, and it is preferable to use groove black having excellent light shielding properties. Alternatively, a resin-coated carbon black may be used.

樹脂被覆碳黑相較於無樹脂被覆碳黑,導電性較低,因此,作為如液晶顯示之顯示器之液晶顯示元件、黑色矩陣使用時,可製造漏電流少,信賴性高之低耗電之顯示器。 Compared with non-resin-coated carbon black, resin-coated carbon black has lower electrical conductivity. Therefore, when used as a liquid crystal display element such as a liquid crystal display or a black matrix, it can produce a low power consumption with low leakage current and high reliability. monitor.

又,為了調整碳黑之色調,可適宜添加上述有機顏料作為補助顏料。 Moreover, in order to adjust the hue of carbon black, the above-mentioned organic pigment can be suitably added as a supplementary pigment.

為了將上述著色劑均勻分散於感光性組成物中,也可進一步使用分散劑。這種分散劑,較佳為使用聚乙烯亞胺系、胺基甲酸酯樹脂系、丙烯酸樹脂系之高分子分散劑。特別是著色劑使用碳黑的情形,分散劑使用丙烯 酸樹脂系之分散劑較佳。 In order to uniformly disperse the colorant in the photosensitive composition, a dispersant may be further used. Such a dispersant is preferably a polymer dispersant of polyethyleneimine type, urethane resin type, or acrylic resin type. In particular, when carbon black is used as the colorant, and propylene is used as the dispersant. An acid resin-based dispersant is preferred.

又,無機顏料與有機顏料各自可單獨或併用2種以上,但是併用的情形,相對於無機顏料與有機顏料之總量100質量份,有機顏料較佳為在10~80質量份之範圍使用,更佳為在20~40質量份之範圍使用。 In addition, each of the inorganic pigment and the organic pigment may be used alone or in combination of two or more kinds. However, when used in combination, the organic pigment is preferably used in the range of 10 to 80 parts by mass relative to 100 parts by mass of the total amount of the inorganic pigment and the organic pigment. It is more preferably used in a range of 20 to 40 parts by mass.

感光性組成物中之著色劑之使用量係配合感光性組成物之用途適宜決定即可,但是舉一例,相對於感光性組成物之固體成分之合計100質量份,較佳為5~70質量份,更佳為25~60質量份。藉由設在上述之範圍內,可以目的之圖型形成黑色矩陣或各著色層,故較佳。 The use amount of the coloring agent in the photosensitive composition may be appropriately determined in accordance with the use of the photosensitive composition, but for example, it is preferably 5 to 70 masses with respect to 100 parts by mass of the total solid content of the photosensitive composition. Parts, more preferably 25 to 60 parts by mass. By setting it within the above range, a black matrix or each colored layer can be formed in a desired pattern, which is preferable.

特別是使用感光性組成物形成黑色矩陣的情形,較佳為調整感光性組成物中之遮光劑的量,使黑色矩陣之被膜1μm單位之OD值成為4以上。黑色矩陣中之被膜1μm單位之OD值為4以上時,使用於液晶顯示之顯示器的黑色矩陣的情形,可得到充分之顯示對比。 In particular, when a black matrix is formed using a photosensitive composition, it is preferable to adjust the amount of the light-shielding agent in the photosensitive composition so that the OD value of the film of the black matrix in units of 1 μm becomes 4 or more. When the OD value of the film in the black matrix is 1 or more in units of 4 μm, a sufficient display contrast can be obtained in the case of the black matrix used in a liquid crystal display.

著色劑係使用分散劑,形成以適當濃度使其分散之分散液後,添加於感光性組成物較佳。 The colorant is preferably added to the photosensitive composition using a dispersant to form a dispersion liquid dispersed at an appropriate concentration.

<(D)鹼可溶性樹脂> <(D) Alkali soluble resin>

本發明之感光性組成物可進一步含有(D)鹼可溶性樹脂。前述(A)光聚合性化合物有具有鹼可溶性之樹脂的情形,但是(D)鹼可溶性樹脂在不含有如乙烯性不飽和雙鍵之光聚合性之官能基的樹脂方面,與(A)光聚合性化合物不同。 The photosensitive composition of the present invention may further contain (D) an alkali-soluble resin. The (A) photopolymerizable compound may be an alkali-soluble resin, but the (D) alkali-soluble resin is similar to (A) light in a resin that does not contain a photopolymerizable functional group such as an ethylenically unsaturated double bond. The polymerizable compounds are different.

(D)鹼可溶性樹脂(以下也稱為「(D)成分」)係指藉由樹脂濃度20質量%之樹脂溶液(溶劑:丙二醇單甲基醚乙酸酯),在基板上形成膜厚1μm的樹脂膜,於濃度0.05質量%的KOH水溶液中浸漬1分鐘時,溶解膜厚0.01μm以上者。 (D) Alkali-soluble resin (hereinafter also referred to as "(D) component") means a resin solution (solvent: propylene glycol monomethyl ether acetate) having a resin concentration of 20% by mass to form a film thickness of 1 μm on a substrate When the resin film is immersed in a KOH aqueous solution having a concentration of 0.05% by mass for 1 minute, the thickness of the film is 0.01 μm or more.

(D)鹼可溶性樹脂只要是顯示上述鹼可溶性,且不具有如乙烯性不飽和雙鍵之光聚合性的官能基的樹脂時,即無特別限定,可適宜選擇使用以往公知的樹脂。(D)鹼可溶性樹脂較佳為具有乙烯性不飽和雙鍵之單體的聚合物,且係含有來自不飽和羧酸之單位的樹脂。以下,具有乙烯性不飽和雙鍵之單體的聚合物,且係含有來自不飽和羧酸之單位的樹脂也稱為(D1)共聚物。 (D) The alkali-soluble resin is not particularly limited as long as it is a resin that exhibits the above-mentioned alkali solubility and does not have a photopolymerizable functional group such as an ethylenically unsaturated double bond, and a conventionally known resin can be appropriately selected and used. (D) The alkali-soluble resin is preferably a polymer of a monomer having an ethylenically unsaturated double bond, and is a resin containing a unit derived from an unsaturated carboxylic acid. Hereinafter, a polymer of a monomer having an ethylenically unsaturated double bond and a resin containing a unit derived from an unsaturated carboxylic acid is also referred to as a (D1) copolymer.

不飽和羧酸之例,可列舉例如(甲基)丙烯酸;(甲基)丙烯酸醯胺;巴豆酸;馬來酸、富馬酸、檸康酸、中康酸、伊康酸、此等二羧酸之酸酐。作為鹼可溶性樹脂使用之具有乙烯性不飽和雙鍵之單體之聚合物所含之來自不飽和羧酸之單位的量,只要是樹脂具有所期望之鹼可溶性時,即無特別限定。作為鹼可溶性樹脂使用之樹脂中之來自不飽和羧酸之單位的量係相對於樹脂之質量,較佳為5~25質量%,更佳為8~16質量%。 Examples of unsaturated carboxylic acids include (meth) acrylic acid; ammonium (meth) acrylate; crotonic acid; maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, and the like. Anhydrides of carboxylic acids. The amount of the unit derived from an unsaturated carboxylic acid contained in the polymer of the monomer having an ethylenically unsaturated double bond used as the alkali-soluble resin is not particularly limited as long as the resin has desired alkali-solubility. The amount of the unit derived from an unsaturated carboxylic acid in the resin used as the alkali-soluble resin is preferably 5 to 25% by mass and more preferably 8 to 16% by mass relative to the mass of the resin.

(D1)共聚物之中,透明性、製膜性、形成之膜的硬度等之平衡佳,故較佳為含有(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上之單體的聚合物。以下說明含有(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上之單體的 聚合物。 Among (D1) copolymers, the balance of transparency, film-forming property, and hardness of the formed film is good. Therefore, it is preferable to contain (meth) acrylic acid and one or more kinds selected from (meth) acrylic acid esters. Body of polymer. In the following, a description is given of a composition containing (meth) acrylic acid and one or more monomers selected from (meth) acrylic acid esters. polymer.

含有(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上之單體的聚合物之調製用的(甲基)丙烯酸酯,在不阻礙本發明之目的之範圍內,即無特別限定,可適宜選擇公知的(甲基)丙烯酸酯。 The (meth) acrylate used for the preparation of a polymer containing (meth) acrylic acid and one or more monomers selected from (meth) acrylic acid esters is not particularly limited as long as it does not hinder the object of the present invention. It is limited, and a well-known (meth) acrylate can be selected suitably.

(甲基)丙烯酸酯類之較佳例,可列舉例如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸第三辛酯等之直鏈狀或支鏈狀的(甲基)丙烯酸烷酯;(甲基)丙烯酸氯乙酯、(甲基)丙烯酸2,2-二甲基羥基丙酯、(甲基)丙烯酸2-羥基乙酯、三羥甲基丙烷單(甲基)丙烯酸酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸糠酯;具有環氧基之基的(甲基)丙烯酸酯;具有脂環式骨架之基的(甲基)丙烯酸酯。具有環氧基之基的(甲基)丙烯酸酯及具有脂環式骨架之基的(甲基)丙烯酸酯之詳細如後述。 Preferable examples of the (meth) acrylates include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, amyl (meth) acrylate, and (meth) ) Alkyl (meth) acrylates, linear or branched, such as third octyl acrylate; chloroethyl (meth) acrylate, 2,2-dimethylhydroxypropyl (meth) acrylate, ( 2-hydroxyethyl methacrylate, trimethylolpropane mono (meth) acrylate, benzyl (meth) acrylate, furfuryl (meth) acrylate; (meth) with epoxy groups Acrylate; (meth) acrylate with alicyclic skeleton. The details of the (meth) acrylate having an epoxy group and the (meth) acrylate having an alicyclic skeleton group will be described later.

含有(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上之單體的聚合物之調製所使用的單體,也可包含(甲基)丙烯酸及(甲基)丙烯酸酯以外之具有其他乙烯性不飽和雙鍵的單體。 The monomer used for the preparation of the polymer containing (meth) acrylic acid and one or more monomers selected from (meth) acrylic acid esters may include other than (meth) acrylic acid and (meth) acrylic acid esters. Monomers having other ethylenically unsaturated double bonds.

(甲基)丙烯酸及(甲基)丙烯酸酯以外之具有其他乙烯性不飽和雙鍵的單體,可列舉例如(甲基)丙烯醯胺類、丙烯酸化合物、乙烯基醚類、乙烯基酯類、苯乙烯類等。此等之化合物可單獨或組合2種以上使用。 Monomers having other ethylenically unsaturated double bonds other than (meth) acrylic acid and (meth) acrylates include, for example, (meth) acrylamide, acrylic compounds, vinyl ethers, and vinyl esters , Styrenes, etc. These compounds can be used alone or in combination of two or more.

(甲基)丙烯醯胺類,可列舉例如(甲基)丙烯醯 胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。 Examples of (meth) acrylamide include (meth) acrylamine Amine, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dialkyl (meth) acrylamide, N, N-aryl (methyl) ) Acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N-methyl (meth) acrylamide, and the like.

作為烯丙基化合物,可列舉例如乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯乙酸烯丙酯、乳酸烯丙酯等之烯丙酯類;烯丙氧基乙醇;等。 Examples of the allyl compound include allyl acetate, allyl hexanoate, allyl octoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, Allyl acetate such as allyl acetate, allyl lactate; allyloxyethanol; etc.

乙烯基醚類,可列舉例如己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羥基乙基乙烯基醚、二乙二醇乙烯基醚、二甲基胺基乙基乙烯基醚、二乙基胺基乙基乙烯基醚、丁基胺基乙基乙烯基醚、苄基乙烯基醚、四氫糠基乙烯基醚等之烷基乙烯基醚;乙烯基苯基醚、乙烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等之乙烯基芳基醚;等。 Examples of vinyl ethers include hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, ethoxyethyl vinyl ether, Chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, Alkyl ethylene, such as dimethylamino ethyl vinyl ether, diethyl amino ethyl vinyl ether, butyl amino ethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether Ether; vinyl vinyl ether, vinyl tolyl ether, vinyl chlorophenyl ether, vinyl-2,4-dichlorophenyl ether, vinyl naphthyl ether, vinyl anthryl ether, etc. Aryl ethers; etc.

乙烯基酯類,可列舉例如丁酸乙烯酯、異丁酸乙烯酯、乙酸乙烯基三甲酯、乙酸乙烯基二乙酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、乙酸乙烯基甲氧酯、乙酸乙烯基丁氧酯、乙酸乙烯基苯酯、乙醯乙酸乙烯酯、乳酸乙烯酯、丁酸乙烯基-β-苯酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯苯甲酸乙烯酯、四 氯苯甲酸乙烯酯、萘甲酸乙烯酯等。 Examples of vinyl esters include vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valerate, vinyl hexanoate, vinyl chloroacetate, and dichloride. Vinyl acetate, vinyl methoxy acetate, vinyl butoxy acetate, vinyl phenyl acetate, ethyl acetate, vinyl lactate, vinyl-β-phenyl butyrate, vinyl benzoate, water Vinyl salicylate, vinyl chlorobenzoate, four Vinyl chlorobenzoate, vinyl naphthalate and the like.

苯乙烯類,可列舉例如苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等之烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等之鹵苯乙烯;等。 Examples of styrenes include styrene; methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, isopropylstyrene, butylstyrene, and hexyl Alkane of styrene, cyclohexylstyrene, decylstyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, ethoxymethylstyrene, etc. Styrene; alkoxystyrene such as methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene , Tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro- Halostyrene such as 3-trifluoromethylstyrene; etc.

含有(甲基)丙烯酸及選自(甲基)丙烯酸酯之1種以上之單體的聚合物之中,從使用感光性組成物形成之膜的透明性或機械性質的觀點,較佳為由(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上所構成之單體的聚合物。 Among polymers containing (meth) acrylic acid and one or more monomers selected from (meth) acrylic acid esters, from the viewpoint of transparency or mechanical properties of a film formed using a photosensitive composition, it is preferred that A polymer of (meth) acrylic acid and a monomer composed of one or more kinds selected from (meth) acrylic acid esters.

由(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上之單體所構成的聚合物之中,從使用感光性組成物形成之膜對基材之密著性或機械強度優異的觀點,較佳為含有來自含有具有環氧基之基之(甲基)丙烯酸酯之單位的樹脂。 Among polymers composed of (meth) acrylic acid and one or more monomers selected from (meth) acrylic acid esters, a film formed from a photosensitive composition is excellent in adhesion to a substrate or mechanical strength. From the viewpoint of a resin, it is preferable to contain a resin derived from a unit containing a (meth) acrylate having a group having an epoxy group.

含有具有環氧基之基之(甲基)丙烯酸酯,可為含有具有鏈狀脂肪族環氧基之基之(甲基)丙烯酸酯,也可為如後述之含有具有脂環式環氧基之基之(甲基)丙烯酸 酯。 The (meth) acrylate containing a group having an epoxy group may be a (meth) acrylate containing a group having a chain aliphatic epoxy group, or may contain an alicyclic epoxy group as described later (Meth) acrylic acid ester.

含有具有環氧基之基之(甲基)丙烯酸酯,也可含有芳香族基。構成芳香族基之芳香環之例,可列舉例如苯環、萘環。具有芳香族基,且含有具有環氧基之基之(甲基)丙烯酸酯之例,可列舉例如4-環氧丙氧基苯基(甲基)丙烯酸酯、3-環氧丙氧基苯基(甲基)丙烯酸酯、2-環氧丙氧基苯基(甲基)丙烯酸酯、4-環氧丙氧基苯基甲基(甲基)丙烯酸酯、3-環氧丙氧基苯基甲基(甲基)丙烯酸酯、及2-環氧丙氧基苯基甲基(甲基)丙烯酸酯等。 The (meth) acrylate containing an epoxy group may contain an aromatic group. Examples of the aromatic ring constituting the aromatic group include a benzene ring and a naphthalene ring. Examples of the (meth) acrylate having an aromatic group and containing a group having an epoxy group include, for example, 4-glycidoxyphenyl (meth) acrylate and 3-glycidoxybenzene (Meth) acrylate, 2-glycidoxyphenyl (meth) acrylate, 4-glycidoxyphenyl methyl (meth) acrylate, 3-glycidoxybenzene Methyl (meth) acrylate, 2-glycidoxyphenylmethyl (meth) acrylate, and the like.

由使用感光性組成物形成之膜之透明性的觀點,含有具有環氧基之基之(甲基)丙烯酸,較佳為不含芳香族基者。 From the viewpoint of transparency of a film formed using a photosensitive composition, the (meth) acrylic acid containing an epoxy group-containing group is preferably one which does not contain an aromatic group.

含有具有鏈狀脂肪族環氧基之基之(甲基)丙烯酸酯之例,可列舉例如環氧基烷基(甲基)丙烯酸酯、及環氧基烷氧基烷基(甲基)丙烯酸酯等之酯基(-O-CO-)中之氧基(-O-)鍵結鏈狀脂肪族環氧基之(甲基)丙烯酸酯。這種(甲基)丙烯酸酯所具有之鏈狀脂肪族環氧基可在鏈中含有1個或複數之氧基(-O-)。鏈狀脂肪族環氧基之碳原子數,無特別限定,較佳為3~20,更佳為3~15,特佳為3~10。 Examples of the (meth) acrylate containing a chain-like aliphatic epoxy group include epoxyalkyl (meth) acrylate and epoxyalkoxyalkyl (meth) acrylate A (meth) acrylate in which an oxy group (-O-) in an ester group (-O-CO-) of an ester is bonded to a chain aliphatic epoxy group. The (meth) acrylic acid ester may have one or more oxygen groups (-O-) in the chain of the aliphatic aliphatic epoxy group. The number of carbon atoms of the chain aliphatic epoxy group is not particularly limited, but is preferably 3 to 20, more preferably 3 to 15, and particularly preferably 3 to 10.

含有具有鏈狀脂肪族環氧基之基之(甲基)丙烯酸酯之具體例,可列舉例如環氧丙基(甲基)丙烯酸酯、2-甲基環氧丙基(甲基)丙烯酸酯、3,4-環氧基丁基(甲基)丙烯酸酯、6,7-環氧基庚基(甲基)丙烯酸酯等之環氧基烷基(甲基)丙烯酸酯;2-環氧丙氧基乙基(甲基)丙烯酸酯、3-環氧 丙氧基-n-丙基(甲基)丙烯酸酯、4-環氧丙氧基-n-丁基(甲基)丙烯酸酯、5-環氧丙氧基-n-己基(甲基)丙烯酸酯、6-環氧丙氧基-n-己基(甲基)丙烯酸酯等之環氧基烷氧基烷基(甲基)丙烯酸酯。 Specific examples of the (meth) acrylate containing a chain-like aliphatic epoxy group include, for example, glycidyl (meth) acrylate, 2-methylglycidyl (meth) acrylate , 3,4-epoxybutyl (meth) acrylate, 6,7-epoxyheptyl (meth) acrylate, etc. epoxy alkyl (meth) acrylate; 2-epoxy Propoxyethyl (meth) acrylate, 3-epoxy Propoxy-n-propyl (meth) acrylate, 4-glycidoxy-n-butyl (meth) acrylate, 5-glycidoxy-n-hexyl (meth) acrylic acid Ester, 6-glycidoxy-n-hexyl (meth) acrylate, and the like, epoxy alkoxyalkyl (meth) acrylate.

含有來自含有具有環氧基之基之(甲基)丙烯酸酯之單位之由(甲基)丙烯酸與、選自(甲基)丙烯酸酯之1種以上所構成之單體之聚合物中,來自含有具有環氧基之基之(甲基)丙烯酸酯之單位的含量係相對於樹脂之重量,較佳為1~95質量%,更佳為30~70質量%。 A polymer containing a unit derived from (meth) acrylic acid and one or more selected from (meth) acrylic acid ester-containing units derived from a unit containing a (meth) acrylate having an epoxy group, derived from The content of the unit containing the (meth) acrylate having an epoxy group is based on the weight of the resin, preferably 1 to 95% by mass, and more preferably 30 to 70% by mass.

又,由(甲基)丙烯酸與、選自(甲基)丙烯酸酯之1種以上所構成之單體之聚合物之中,使用感光性組成物容易形成透明性優異的絕緣膜,故含有來自含有具有脂環式骨架之基之(甲基)丙烯酸酯之單位的樹脂也佳。 In addition, a polymer composed of (meth) acrylic acid and a monomer selected from one or more kinds of (meth) acrylic acid esters can easily form an insulating film having excellent transparency using a photosensitive composition. A resin containing a unit of (meth) acrylate having a alicyclic skeleton group is also preferable.

含有具有脂環式骨架之基之(甲基)丙烯酸酯中,具有脂環式骨架之基可為具有脂環式烴基之基,也可為具有脂環式環氧基之基。構成脂環式骨架之脂環式基可為單環或多環。單環之脂環式基,可列舉例如環戊基、環己基等。又,多環之脂環式基,可列舉例如降莰基、異莰基、三環壬基、三環癸基、四環十二烷基等。 In the (meth) acrylic acid ester containing a group having an alicyclic skeleton, the group having an alicyclic skeleton may be a group having an alicyclic hydrocarbon group or a group having an alicyclic epoxy group. The alicyclic group constituting the alicyclic skeleton may be monocyclic or polycyclic. Examples of the monocyclic alicyclic group include cyclopentyl and cyclohexyl. Examples of the polycyclic alicyclic group include norbornyl, isofluorenyl, tricyclononyl, tricyclodecyl, and tetracyclododecyl.

含有具有脂環式骨架之基之(甲基)丙烯酸酯之中,含有具有脂環式烴基之基之(甲基)丙烯酸酯,可列舉例如下述式(d1-1)~(d1-8)表示之化合物。此等之中,較佳為下述式(d1-3)~(a1-8)表示之化合物,更佳為下述式(d1-3)或(d1-4)表示之化合物。 Among the (meth) acrylates having a group having an alicyclic skeleton, and the (meth) acrylates having a group having an alicyclic hydrocarbon group, examples thereof include the following formulae (d1-1) to (d1-8) ). Among these, compounds represented by the following formulae (d1-3) to (a1-8) are preferred, and compounds represented by the following formulae (d1-3) or (d1-4) are more preferred.

上述式中,Rd1表示氫原子或甲基,Rd2表示單鍵或碳原子數1~6之2價脂肪族飽和烴基,Rd3表示氫原子或碳原子數1~5之烷基。Rd2為單鍵、直鏈狀或分枝鏈狀之伸烷基,例如較佳為亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。Rd3較佳為甲基、乙基。 In the above formula, R d1 represents a hydrogen atom or a methyl group, R d2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R d3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R d2 is a single bond, straight chain or branched chain alkylene, for example, methylene, ethylene, propyl, tetramethylene, ethylethylene, pentamethylene, Hexamethylene. R d3 is preferably a methyl group or an ethyl group.

含有具有脂環式骨架之基之(甲基)丙烯酸酯之中,含有具有脂環式環氧基之基之(甲基)丙烯酸酯之具體例,可列舉例如下述式(d2-1)~(d2-15)表示之化合物。此 等之中,為了使感光性組成物之顯影性為適度者,較佳為下述式(d2-1)~(d2-5)表示之化合物,更佳為下述式(d2-1)~(d2-3)表示之化合物。 Specific examples of the (meth) acrylate containing a group having an alicyclic skeleton and the (meth) acrylate containing a group having an alicyclic epoxy group include the following formula (d2-1) The compound represented by ~ (d2-15). this Among others, in order to make the developability of the photosensitive composition moderate, the compounds represented by the following formulae (d2-1) to (d2-5) are preferred, and the following formulae (d2-1) to The compound represented by (d2-3).

上述式中,Rd4表示氫原子或甲基,Rd5表示碳原子數1~6之2價脂肪族飽和烴基,Rd6表示碳原子數1~10之2價烴基,p表示0~10之整數。Rd5為直鏈狀或分枝鏈狀之伸烷基,例如較佳為亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。Rd6例如較佳為亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、伸苯基、伸環己基、-CH2-Ph-CH2-(Ph表示伸苯基)。 In the above formula, R d4 represents a hydrogen atom or a methyl group, R d5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R d6 represents a divalent hydrocarbon group having 1 to 10 carbon atoms, and p represents 0 to 10 Integer. R d5 is a linear or branched alkylene group, for example, methylene, ethylidene, propylidene, tetramethylene, ethylidene, pentamethylene, and hexamethylene are preferred base. R d6 is preferably, for example, methylene, ethylidene, propylidene, tetramethylene, ethylidene, pentamethylene, hexamethylene, phenylene, cyclohexyl, -CH 2- Ph-CH 2- (Ph stands for phenylene).

由(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上所構成之單體的聚合物為含有來自含有具有脂環式骨架之基之(甲基)丙烯酸酯之單位的樹脂的情形,樹脂中來 自含有具有脂環式骨架之基之(甲基)丙烯酸酯之單位的量,較佳為5~95質量%,更佳為10~90質量%,又更佳為30~70質量%。 A polymer of (meth) acrylic acid and a monomer selected from one or more kinds of (meth) acrylic acid esters is a resin containing a unit derived from a (meth) acrylic acid ester having a group having an alicyclic skeleton. Case, resin The amount of the unit containing (meth) acrylate having a alicyclic skeleton-based group is preferably 5 to 95% by mass, more preferably 10 to 90% by mass, and still more preferably 30 to 70% by mass.

又,含有來自含有具有脂環式骨架之基之(甲基)丙烯酸酯的單位之由(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上所構成之單體的聚合物之中,較佳為含有來自(甲基)丙烯酸之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂。這種樹脂對基材之密著性優異。又,使用這種樹脂的情形,可使樹脂所含之羧基與脂環式環氧基產生自行反應。因此,使用含有這種樹脂之感光性組成物時,藉由使用將膜加熱之方法等,使羧基與脂環式環氧基產生自行反應,可提高形成之膜之如硬度之機械物性。 In addition, a polymer containing a unit derived from (meth) acrylic acid and a monomer selected from one or more kinds of (meth) acrylic acid esters containing units derived from a (meth) acrylic acid ester having a alicyclic skeleton Among them, a resin containing a unit derived from (meth) acrylic acid and a unit derived from a (meth) acrylate containing an alicyclic epoxy group is preferred. This resin has excellent adhesion to a substrate. When such a resin is used, the carboxyl group contained in the resin can react with the alicyclic epoxy group on its own. Therefore, when using a photosensitive composition containing such a resin, by using a method such as heating a film, a carboxyl group can react with an alicyclic epoxy group on its own, thereby improving mechanical properties such as hardness of the formed film.

含有來自(甲基)丙烯酸之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂中,樹脂中之來自(甲基)丙烯酸之單位的量,較佳為1~95質量%,更佳為10~50質量%。含有來自(甲基)丙烯酸之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂中,樹脂中之來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的量,較佳為1~95質量%,更佳為30~70質量%。 The amount of the unit derived from (meth) acrylic acid in the resin containing the unit derived from (meth) acrylic acid and the unit derived from (meth) acrylic acid ester having a cycloaliphatic epoxy group is preferable It is 1 to 95% by mass, and more preferably 10 to 50% by mass. Among resins containing units derived from (meth) acrylic acid and units derived from (meth) acrylic acid esters having a group having an alicyclic epoxy group, resins containing units derived from a group having an alicyclic epoxy group ( The amount of the unit of meth) acrylate is preferably 1 to 95% by mass, and more preferably 30 to 70% by mass.

含有來自(甲基)丙烯酸之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位之由(甲基)丙烯酸與選自(甲基)丙烯酸酯之1種以上所構成之單體之聚 合物之中,較佳為含有來自(甲基)丙烯酸之單位與來自具有脂環式烴基之(甲基)丙烯酸酯之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂。 A unit containing (meth) acrylic acid-derived units and a unit containing (meth) acrylic acid esters having an alicyclic epoxy group is composed of (meth) acrylic acid and one or more selected from (meth) acrylates Aggregate of monomers Among the compounds, a unit derived from (meth) acrylic acid and a unit derived from (meth) acrylate having an alicyclic hydrocarbon group and a unit derived from (meth) containing an alicyclic epoxy group are preferred. Resin in acrylate units.

含有來自(甲基)丙烯酸之單位與來自具有脂環式烴基之(甲基)丙烯酸酯之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂中,樹脂中之來自(甲基)丙烯酸之單位的量,較佳為1~95質量%,更佳為10~50質量%。含有來自(甲基)丙烯酸之單位與來自具有脂環式烴基之(甲基)丙烯酸酯之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂中,樹脂中之來自具有脂環式烴基之(甲基)丙烯酸酯之單位的量,較佳為1~95質量%,更佳為10~70質量%。含有來自(甲基)丙烯酸之單位與來自具有脂環式烴基之(甲基)丙烯酸酯之單位與來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的樹脂中,樹脂中之來自含有具有脂環式環氧基之基之(甲基)丙烯酸酯之單位的量,較佳為1~95質量%,更佳為30~70質量%。 In a resin containing a unit derived from (meth) acrylic acid and a unit derived from (meth) acrylate having an alicyclic hydrocarbon group and a unit derived from (meth) acrylate having an alicyclic epoxy group, The amount of the unit derived from (meth) acrylic acid in the resin is preferably 1 to 95% by mass, and more preferably 10 to 50% by mass. In a resin containing a unit derived from (meth) acrylic acid and a unit derived from (meth) acrylate having an alicyclic hydrocarbon group and a unit derived from (meth) acrylate having an alicyclic epoxy group, The amount of the unit derived from the (meth) acrylate having an alicyclic hydrocarbon group in the resin is preferably 1 to 95% by mass, and more preferably 10 to 70% by mass. In a resin containing a unit derived from (meth) acrylic acid and a unit derived from (meth) acrylate having an alicyclic hydrocarbon group and a unit derived from (meth) acrylate having an alicyclic epoxy group, The amount of the unit derived from the (meth) acrylic acid ester containing a group having an alicyclic epoxy group in the resin is preferably 1 to 95% by mass, and more preferably 30 to 70% by mass.

(D1)共聚物之質量平均分子量(Mw:凝膠滲透層析(GPC)之聚苯乙烯換算的測量值。本說明書中相同),較佳為2000~200000,更佳為5000~30000。藉由設定在上述之範圍,而有容易取得感光性組成物之膜形成能、曝光後之顯影性之平衡的傾向。 (D1) The mass average molecular weight of the copolymer (Mw: measured value in terms of polystyrene in gel permeation chromatography (GPC). The same in this specification) is preferably 2000 to 200,000, and more preferably 5,000 to 30,000. By setting it in the said range, there exists a tendency for the balance of the film-forming ability of a photosensitive composition, and the developability after exposure to become easy easily.

(D)鹼可溶性樹脂之含量係相對於感光性組成物之固體成分,較佳為30~80質量%,更佳為50~60質量 %。藉由設在上述之範圍,而有容易取得顯影性之平衡的傾向。 (D) The content of the alkali-soluble resin is preferably 30 to 80% by mass, and more preferably 50 to 60% by mass relative to the solid content of the photosensitive composition. %. By setting it in the said range, there exists a tendency for the balance of developability to be easily achieved.

<其他的成分> <Other ingredients>

本發明之感光性組成物中,可視需要添加各種添加劑。具體例示為溶劑、增感劑、硬化促進劑、光交聯劑、光增感劑、分散助劑、填充劑、密著促進劑、抗氧化劑、紫外線吸收劑、抗凝聚劑、熱聚合抑制劑、消泡劑、界面活性劑等。 Various additives can be added to the photosensitive composition of the present invention as necessary. Specific examples are solvents, sensitizers, hardening accelerators, photocrosslinkers, photosensitizers, dispersing aids, fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anticoagulants, and thermal polymerization inhibitors. , Defoamer, surfactant, etc.

本發明之感光性組成物中使用之溶劑,可列舉例如乙二醇單甲醚、乙二醇單乙醚、乙二醇正丙醚、乙二醇單正丁醚、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等之(聚)烷二醇單烷醚類;乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等之(聚)烷二醇單烷醚乙酸酯類;二乙二醇二甲醚、二乙二醇甲基乙醚、二乙二醇二乙醚、四氫呋喃等之其他醚類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等之酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、 3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、乙酸3-甲基-3-甲氧基丁酯、丙酸3-甲基-3-甲氧基丁酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、2-側氧丁酸乙酯等之其他酯類;甲苯、二甲苯等之芳香族烴類;N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等之醯胺類等。此等溶劑可單獨使用,亦可組合兩種以上使用。 Examples of the solvent used in the photosensitive composition of the present invention include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, Diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol Mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether, etc. ) Alkanediol monoalkane ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol (Poly) alkanediol monoalkyl ether acetates such as monomethyl ether acetate, propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol diethyl ether , Tetrahydrofuran and other ethers; methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and other ketones; 2-hydroxypropionate methyl ester, 2- Propanoate group of lactic acid alkyl esters and the like; hydroxy-2-methylpropionate, methyl 3-methoxy propionate, Ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, 2-hydroxy-3-methyl Methyl butyrate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-acetate Butyl, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methylpyruvate Esters, ethyl pyruvate, n-propyl pyruvate, methyl acetate, ethyl acetate, 2-oxobutyrate and other esters; aromatic hydrocarbons such as toluene and xylene; N-methylpyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide and other amidines. These solvents may be used alone or in combination of two or more.

上述溶劑中,丙二醇單甲醚、乙二醇單甲醚乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯、二乙二醇二甲醚、二乙二醇甲基乙醚、環己酮、乙酸3-甲氧基丁酯對於上述之(A)成分、(B)成分及(D)成分顯示優異的溶解性,同時可使上述之(C)成分之分散性良好,故較佳,特佳為使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯。溶劑可依據感光性組成物之用途適當決定即可,其一例,可列舉例如相對於感光性組成物之固體成分之合計100質量份,為50~900質量份左右。 Among the above solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, diethylene glycol methyl ether, Cyclohexanone and 3-methoxybutyl acetate have excellent solubility in the above-mentioned (A) component, (B) component, and (D) component, and at the same time, the dispersibility of the above-mentioned (C) component is good, so Preferably, propylene glycol monomethyl ether acetate and 3-methoxybutyl acetate are particularly preferably used. The solvent may be appropriately determined depending on the use of the photosensitive composition, and an example of the solvent is about 50 to 900 parts by mass based on 100 parts by mass of the total solid content of the photosensitive composition.

本發明之感光性組成物中所使用之熱聚合抑制劑,可列舉例如氫醌、氫醌單乙醚等。另外,消泡劑例如有矽氧系、氟系等之化合物,界面活性劑例如有陰離子系、陽離子系、非離子系等之化合物。 Examples of the thermal polymerization inhibitor used in the photosensitive composition of the present invention include hydroquinone and hydroquinone monoethyl ether. Examples of the defoaming agent include compounds of the silicone type and fluorine type, and examples of the surfactant include compounds of the anionic type, cationic type, and nonionic type.

《感光性組成物之調製方法》 "Method for preparing photosensitive composition"

本發明之感光性組成物,可藉攪拌機混合上述各成分全部來調製。又,亦可使用過濾器過濾使經調製之感光性組成物成為均勻者。 The photosensitive composition of the present invention can be prepared by mixing all the above components with a blender. In addition, it is also possible to use a filter to make the prepared photosensitive composition uniform.

《圖型形成方法》 "Pattern Formation Method"

使用本發明之感光性組成物形成圖型時,首先使用輥塗佈器、反向塗佈器、棒塗佈器等之接觸轉印型塗佈裝置或旋轉塗佈器(旋轉式塗佈裝置)、簾流式塗佈器等非接觸型塗佈裝置,將感光性組成物塗佈於基板上。 When forming a pattern using the photosensitive composition of the present invention, first, a contact transfer type coating device such as a roll coater, a reverse coater, a bar coater, or a spin coater (a spin coater) is used. ), A non-contact coating device such as a curtain coater, etc., which coats a photosensitive composition on a substrate.

接著,使經塗佈後之感光性組成物乾燥形成塗膜。乾燥方法並無特別限制,可列舉例如(1)以加熱板在80~120℃,較佳為90~100℃之溫度下乾燥60~120秒的方法,(2)在室溫下,放置數小時至數天的方法,(3)在溫風加熱器或紅外線加熱器中放置數十分鐘至數小時,去除溶劑的方法等。 Next, the coated photosensitive composition is dried to form a coating film. The drying method is not particularly limited, and examples thereof include (1) a method of drying on a hot plate at a temperature of 80 to 120 ° C, preferably 90 to 100 ° C for 60 to 120 seconds, and (2) standing at room temperature for several seconds. A method from hours to several days, (3) a method of removing a solvent by leaving it in a warm air heater or an infrared heater for several tens of minutes to several hours.

接著,經由負型光罩,對此塗膜照射紫外線、準分子雷射光等之活性能量線進行局部曝光。照射之能量線量係因感光性組成物之組成而不同,但較佳為例如30~2000mJ/cm2左右。 Next, the coating film is irradiated with active energy rays such as ultraviolet rays, excimer laser light, and the like through a negative-type mask, and is partially exposed. The amount of energy ray to be irradiated varies depending on the composition of the photosensitive composition, but is preferably about 30 to 2000 mJ / cm 2 , for example.

接著,使曝光後之膜藉由顯影液顯影,圖型化成期望的形狀。顯影方法並無特別限制,可使用例如浸漬法、噴霧法等。顯影液可列舉例如單乙醇胺、二乙醇 胺、三乙醇胺等之有機系者,或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等之水溶液。如先前說明,藉由使用本發明之感光性組成物,可抑制顯影後形成之圖型中之底切。因此,若使用本發明之感光性組成物時,例如製作顯示裝置用之彩色濾光片的情形,可抑制氣泡進入到各像素邊界部附近,故較佳。 Next, the exposed film is developed with a developing solution and patterned into a desired shape. The developing method is not particularly limited, and for example, a dipping method, a spray method, or the like can be used. Examples of the developing solution include monoethanolamine and diethanol. Organic solvents such as amines and triethanolamine, or aqueous solutions of sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts. As described above, by using the photosensitive composition of the present invention, undercuts in a pattern formed after development can be suppressed. Therefore, if the photosensitive composition of the present invention is used, for example, when a color filter for a display device is manufactured, it is preferable to prevent bubbles from entering the vicinity of each pixel boundary portion.

接著,對於經顯影後之圖型,在200℃~250℃左右進行後烘烤為佳。 Next, for the developed pattern, post-baking is preferably performed at about 200 ° C to 250 ° C.

如此形成之圖型,可適當地作為例如液晶顯示器等之顯示裝置中之彩色濾光片之像素或黑色矩陣使用。這種彩色濾光片或使用該彩色濾光片之顯示裝置亦為本發明之一。 The pattern thus formed can be suitably used as a pixel or a black matrix of a color filter in a display device such as a liquid crystal display. Such a color filter or a display device using the same is also one of the present invention.

[實施例] [Example]

以下例舉實施例,更具體說明本發明,但本發明之範圍並不受限於此等實施例者。 The following examples illustrate the present invention in more detail, but the scope of the present invention is not limited to those examples.

實施例及比較例中,光聚合起始劑使用下述之PI-1~PI-12。PI~1~PI-6係具有前述式(1)表示之結構的化合物,P1-7~PI-12係不具有前述式(1)表示之結構的化合物。 In Examples and Comparative Examples, the following PI-1 to PI-12 were used as the photopolymerization initiator. PI ~ 1 ~ PI-6 are compounds having a structure represented by the aforementioned formula (1), and P1-7 ~ PI-12 are compounds without a structure represented by the aforementioned formula (1).

上述之PI-1~PI-6係依據下述合成例1~6來合成。 The aforementioned PI-1 to PI-6 were synthesized according to the following Synthesis Examples 1 to 6.

[合成例1] [Synthesis example 1]

(PI-1之合成) (Synthesis of PI-1)

使3-(噻吩-2-基羰基)-9-乙基咔唑5.00g(16.37mmol)與3-環己基丙酸氯化物3.14g(18.00mmol)在氯化鋁2.62g之存在下,於二氯甲烷溶劑50ml中,在冰冷下進行1小時反應。將反應混合物注入冰水中,將有機層進行分液 (separate)。回收的有機層以無水硫酸鎂乾燥後進行蒸發。將殘渣以乙酸乙酯/己烷=1/2之溶離液進行矽膠管柱純化,得到3-(噻吩-2-基羰基)-6-(3-環己基丙醯基)-9-乙基咔唑6.90g(15.55mmol)。使3-(噻吩-2-基羰基)-6-(3-環己基丙醯基)-9-乙基咔唑6.90g(15.55mmol)與濃鹽酸1.60g(15.55mmol)於亞硝酸異丁酯2.42g(23.33mmol)之存在下,在二甲基甲醯胺溶劑25ml中,於冰冷下反應3小時。使反應液蒸發,於殘渣中添加乙酸乙酯,使用飽和食鹽水洗凈,以無水硫酸鎂乾燥後進行蒸發,得到3-(噻吩-2-基羰基)-6-(3-環己基-2-羥基亞胺基丙醯基)-9-乙基咔唑5.51g(11.67mmol)。將3-(噻吩-2-基羰基)-6-(3-環己基-2-羥基亞胺基丙醯基)-9-乙基咔唑5.51g(11.67mmol)、乙酸酐1.43g(13.42mmol)、三乙胺1.36g(13.42mmol)及二甲基甲醯胺溶劑45.00ml進行混合,於35℃下攪拌3小時。冷卻至室溫後,於反應液中添加乙酸乙酯,使用水洗凈,以無水硫酸鎂乾燥後進行蒸發。將殘渣以乙酸乙酯/己烷=2/1之溶離液進行矽膠管柱純化,得到PI-1、5.40g(10.50mmol)。 5.00 g (16.37 mmol) of 3- (thien-2-ylcarbonyl) -9-ethylcarbazole and 3.14 g (18.00 mmol) of 3-cyclohexylpropanoic acid chloride in the presence of 2.62 g of aluminum chloride at In 50 ml of a dichloromethane solvent, the reaction was performed under ice-cooling for 1 hour. The reaction mixture was poured into ice water, and the organic layer was separated. (separate). The recovered organic layer was dried over anhydrous magnesium sulfate and evaporated. The residue was purified on a silica gel column with an eluent of ethyl acetate / hexane = 1/2 to obtain 3- (thien-2-ylcarbonyl) -6- (3-cyclohexylpropanyl) -9-ethyl. Carbazole 6.90 g (15.55 mmol). 6.90 g (15.55 mmol) of 3- (thien-2-ylcarbonyl) -6- (3-cyclohexylpropanyl) -9-ethylcarbazole and 1.60 g (15.55 mmol) of concentrated hydrochloric acid were added to isobutyl nitrite In the presence of 2.42 g (23.33 mmol) of the ester, 25 ml of a dimethylformamide solvent was reacted under ice-cooling for 3 hours. The reaction solution was evaporated, ethyl acetate was added to the residue, the mixture was washed with saturated brine, dried over anhydrous magnesium sulfate, and evaporated to obtain 3- (thien-2-ylcarbonyl) -6- (3-cyclohexyl-2- Hydroxyimidopropanyl) -9-ethylcarbazole 5.51 g (11.67 mmol). 5.51 g (11.67 mmol) of 3- (thien-2-ylcarbonyl) -6- (3-cyclohexyl-2-hydroxyiminopropionyl) -9-ethylcarbazole, 1.43 g of acetic anhydride (13.42 mmol), 1.36 g (13.42 mmol) of triethylamine, and 45.00 ml of dimethylformamide solvent, and stirred at 35 ° C. for 3 hours. After cooling to room temperature, ethyl acetate was added to the reaction solution, washed with water, dried over anhydrous magnesium sulfate, and evaporated. The residue was purified by a silica gel column with an eluent of ethyl acetate / hexane = 2/1 to obtain PI-1, 5.40 g (10.50 mmol).

[合成例2] [Synthesis example 2]

(PI-2之合成) (Synthesis of PI-2)

除了將3-(噻吩-2-基羰基)-9-乙基咔唑5.00g(16.37mmol)變更為3-(呋喃-3-基羰基)-9-乙基咔唑4.74g(16.37mmol)外,與合成例1同樣得到PI-2、 5.15g(10.32mmol)。 Except changing 5.00 g (16.37 mmol) of 3- (thien-2-ylcarbonyl) -9-ethylcarbazole to 4.74 g (16.37 mmol) of 3- (furan-3-ylcarbonyl) -9-ethylcarbazole In addition, PI-2 and PI-2 were obtained in the same manner as in Synthesis Example 1. 5.15 g (10.32 mmol).

[合成例3] [Synthesis example 3]

(PI-3之合成) (Synthesis of PI-3)

除了將3-環己基丙酸氯化物3.14g(18.00mmol)變更為4-環戊基丁酸氯化物3.14g(18.00mmol)外,與合成例1同樣得到PI-3、5.28g(10.26mmol)。 Except changing 3.14 g (18.00 mmol) of 3-cyclohexylpropanoic acid chloride to 3.14 g (18.00 mmol) of 4-cyclopentylbutyric acid chloride, PI-3 and 5.28 g (10.26 mmol) were obtained in the same manner as in Synthesis Example 1. ).

[合成例4] [Synthesis example 4]

(PI-4之合成) (Synthesis of PI-4)

除了將3-(噻吩-2-基羰基)-9-乙基咔唑5.00g(16.37mmol)變更為3-(呋喃-3-基羰基)-9-乙基咔唑4.74g(16.37mmol),及將3-環己基丙酸氯化物3.14g(18.00mmol)變更為4-環戊基丁酸氯化物3.14g(18.00mmol)外,與合成例1同樣得到PI-4、5.17g(10.36mmol)。 Except changing 5.00 g (16.37 mmol) of 3- (thien-2-ylcarbonyl) -9-ethylcarbazole to 4.74 g (16.37 mmol) of 3- (furan-3-ylcarbonyl) -9-ethylcarbazole And except that 3.14 g (18.00 mmol) of 3-cyclohexylpropanoic acid chloride was changed to 3.14 g (18.00 mmol) of 4-cyclopentylbutyric acid chloride, PI-4 and 5.17 g (10.36) were obtained in the same manner as in Synthesis Example 1. mmol).

[合成例5] [Synthesis example 5]

(PI-5之合成) (Synthesis of PI-5)

除了將3-(噻吩-2-基羰基)-9-乙基咔唑5.00g(16.37mmol)變更為3-硝基-9-乙基咔唑3.93g(16.37mmol)外,與合成例1同樣得到PI-5、4.85g(10.80mmol)。 Except changing 5.00 g (16.37 mmol) of 3- (thien-2-ylcarbonyl) -9-ethylcarbazole to 3.93 g (16.37 mmol) of 3-nitro-9-ethylcarbazole, it was the same as in Synthesis Example 1 Similarly, PI-5 and 4.85 g (10.80 mmol) were obtained.

[合成例6] [Synthesis example 6]

(PI-6之合成) (Synthesis of PI-6)

除了將3-(噻吩-2-基羰基)-9-乙基咔唑5.00g(16.37mmol)變更為3-(萘-1-基羰基)-9-乙基咔唑5.72g(16.37mmol)外,與合成例1同樣得到PI-6、6.02g(10.78mmol)。 Except changing 5.00 g (16.37 mmol) of 3- (thien-2-ylcarbonyl) -9-ethylcarbazole to 5.72 g (16.37 mmol) of 3- (naphthalene-1-ylcarbonyl) -9-ethylcarbazole Except that, in the same manner as in Synthesis Example 1, PI-6 and 6.02 g (10.78 mmol) were obtained.

合成例1~6所得之PI-1~PI-6之1H NMR的測量結果如以下所示。 The measurement results of 1 H NMR of PI-1 to PI-6 obtained in Synthesis Examples 1 to 6 are shown below.

(PI-1) (PI-1)

1H NMR(CDCl3,600MHz,δ in ppm)8.9(s,1H);8.7(s,1H);8.3(d,1H);8.1(d,1H);7.7(dd,2H);7.5(dd,2H);7.2(t,1H);4.4(q,2H);2.8(d,2H);2.3(s,3H);1.6-1.8(m,6H);1.5(t,3H);1.0-1.2(m,5H). 1 H NMR (CDCl 3 , 600 MHz, δ in ppm) 8.9 (s, 1H); 8.7 (s, 1H); 8.3 (d, 1H); 8.1 (d, 1H); 7.7 (dd, 2H); 7.5 ( dd, 2H); 7.2 (t, 1H); 4.4 (q, 2H); 2.8 (d, 2H); 2.3 (s, 3H); 1.6-1.8 (m, 6H); 1.5 (t, 3H); 1.0 -1.2 (m, 5H).

(PI-2) (PI-2)

1H NMR(CDCL3,600MHz,δ in ppm)9.0(s,1H);8.9(a,1H);8.3(d,1H);8.2(d,1H);7.8(s,1H);7.4(dd,2H);7.3(d,1H);6.6(d,1H);4.4(q,2H);2.8(d,2H);2.3(s,3H);1.6-1.8(m,6H);1.5(t,3H);1.1-1.3(m,5H). 1 H NMR (CDCL 3 , 600 MHz, δ in ppm) 9.0 (s, 1H); 8.9 (a, 1H); 8.3 (d, 1H); 8.2 (d, 1H); 7.8 (s, 1H); 7.4 ( dd, 2H); 7.3 (d, 1H); 6.6 (d, 1H); 4.4 (q, 2H); 2.8 (d, 2H); 2.3 (s, 3H); 1.6-1.8 (m, 6H); 1.5 (t, 3H); 1.1-1.3 (m, 5H).

(PI-3) (PI-3)

1H NMR(CDCl3,600MHz,δ in ppm)8.9(s,1H);8.7(s,1H);8.3(d,1H);8.1(d,1H);7.7(dd,2H);7.5(dd,2H);7.2(t,1H);4.4(q,2H);3.0(t,2H);2.3(s, 3H);1.8-1.9(m,3H);1.5-1.6(m,9H);1.1(m,2H). 1 H NMR (CDCl 3 , 600 MHz, δ in ppm) 8.9 (s, 1H); 8.7 (s, 1H); 8.3 (d, 1H); 8.1 (d, 1H); 7.7 (dd, 2H); 7.5 ( dd, 2H); 7.2 (t, 1H); 4.4 (q, 2H); 3.0 (t, 2H); 2.3 (s, 3H); 1.8-1.9 (m, 3H); 1.5-1.6 (m, 9H) ; 1.1 (m, 2H).

(PI-4) (PI-4)

1H NMR(CDCl3,600MHz,δ in ppm)9.0(s,1H);8.9(s,1H);8.3(d,1H);8.2(d,1H);7.8(dd,2H);7.4(dd,2H);7.3(t,1H);6.6(d,1H);4.4(q,2H);3.0(t,2H);2.3(s,3H);1.8-1.9(m,3H);1.5-1.6(m,9H);1.1(m,2H). 1 H NMR (CDCl 3 , 600 MHz, δ in ppm) 9.0 (s, 1H); 8.9 (s, 1H); 8.3 (d, 1H); 8.2 (d, 1H); 7.8 (dd, 2H); 7.4 ( dd, 2H); 7.3 (t, 1H); 6.6 (d, 1H); 4.4 (q, 2H); 3.0 (t, 2H); 2.3 (s, 3H); 1.8-1.9 (m, 3H); 1.5 -1.6 (m, 9H); 1.1 (m, 2H).

(PI-5) (PI-5)

1H NMR(CDCl3,600MHz,δ in ppm)9.1(s,1H);8.6(s,1H);8.5(d,1H);8.2(d,1H);7.5(m,2H);4.4(q,2H);2.8(d,2H);2.3(s,3H);1.6-1.8(m,6H);1.5(t,3H);1.0-1.2(m,5H). 1 H NMR (CDCl 3 , 600 MHz, δ in ppm) 9.1 (s, 1H); 8.6 (s, 1H); 8.5 (d, 1H); 8.2 (d, 1H); 7.5 (m, 2H); 4.4 ( q, 2H); 2.8 (d, 2H); 2.3 (s, 3H); 1.6-1.8 (m, 6H); 1.5 (t, 3H); 1.0-1.2 (m, 5H).

(PI-6) (PI-6)

1H NMR(CDCl3,600MHz,δ in ppm)8.7(s,1H);8.5(s,1H);7.9-8.1(m,5H);7.4-7.7(m,6H);4.4(q,2H);2.8(d,2H);2.3(s,3H);1.6-1.8(m,6H);1.5(t,3H);1.0-1.2(m,5H). 1 H NMR (CDCl 3 , 600 MHz, δ in ppm) 8.7 (s, 1H); 8.5 (s, 1H); 7.9-8.1 (m, 5H); 7.4-7.7 (m, 6H); 4.4 (q, 2H ); 2.8 (d, 2H); 2.3 (s, 3H); 1.6-1.8 (m, 6H); 1.5 (t, 3H); 1.0-1.2 (m, 5H).

[實施例1~6、及比較例1~6] [Examples 1 to 6 and Comparative Examples 1 to 6]

對於不含著色劑之透明的感光性組成物,以下以實施例1~6、及比較例1~6進行評價。 About the transparent photosensitive composition which does not contain a coloring agent, it evaluates based on Examples 1-6 and Comparative Examples 1-6 below.

實施例1~6、及比較例1~6中,光聚合性化合物使用二季戊四醇六丙烯酸酯。又,實施例1~6、及比較例1~6中,鹼可溶性樹脂使用質量平均分子量為15,000之下述結構的樹脂。下述結構中,各構成單位中之括弧之右下的數值表示樹脂中之各構成單位的含量(質量%)。 In Examples 1 to 6 and Comparative Examples 1 to 6, dipentaerythritol hexaacrylate was used as the photopolymerizable compound. In Examples 1 to 6 and Comparative Examples 1 to 6, as the alkali-soluble resin, a resin having the following structure having a mass average molecular weight of 15,000 was used. In the following structure, the numerical value at the bottom right of the parentheses in each constituent unit represents the content (mass%) of each constituent unit in the resin.

使鹼可溶性樹脂59.3質量份、光聚合性化合物40質量份及表1所記載之種類的光聚合起始劑0.7質量份均勻溶解於由二乙二醇甲基醚60質量%與丙二醇單甲基醚乙酸酯40質量%所構成之混合溶劑中,使固體成分濃度成為15質量%,得到實施例1~6、及比較例1~6之感光性組成物。對於使用所得之感光性組成物形成的圖型,評價直線度、圖型剝離、圖型之剖面形狀(錐角)。又,各實施例及比較例之感光性組成物之調製用之光聚合起始劑對丙二醇單甲醚乙酸酯(PM)之溶解性進行評價。此等之評價結果如表1所示。 59.3 parts by mass of an alkali-soluble resin, 40 parts by mass of a photopolymerizable compound, and 0.7 parts by mass of a photopolymerization initiator of the kind described in Table 1 were uniformly dissolved in 60% by mass of diethylene glycol methyl ether and propylene glycol monomethyl In a mixed solvent composed of 40% by mass of ether acetate, the solid content concentration was 15% by mass, and the photosensitive compositions of Examples 1 to 6 and Comparative Examples 1 to 6 were obtained. The pattern formed using the obtained photosensitive composition was evaluated for straightness, pattern peeling, and cross-sectional shape (taper angle) of the pattern. In addition, the photopolymerization initiator used for the preparation of the photosensitive composition in each of Examples and Comparative Examples evaluated the solubility of propylene glycol monomethyl ether acetate (PM). The results of these evaluations are shown in Table 1.

<最佳曝光量> <Optimal exposure>

使用旋轉塗佈機,將各實施例及比較例之感光性組成物塗佈於玻璃基板(100mm×100mm)上,在90℃下預烘烤120秒鐘,形成膜厚1.0μm之塗膜。接著,使用鏡面投射曝光機(製品名:TME-150RTO,股份公司TOPCON製),曝光間隙為50μm,經由形成有10μm之線圖型之負型光罩,使曝光量變化為15、30、45、60mJ/cm2之4階段,對塗膜照射紫外線。將曝光後之塗膜,以26℃之0.04質量%KOH水溶液顯影40秒鐘後,在230℃下進行後烘烤30分鐘,形成線圖型。測量以各曝光量形成之線圖型的尺寸,由曝光量與形成之線寬的關係,求形成具有寬10μm之線之圖型所必要之最佳曝光量。 Using a spin coater, the photosensitive compositions of Examples and Comparative Examples were coated on a glass substrate (100 mm × 100 mm), and pre-baked at 90 ° C. for 120 seconds to form a coating film having a film thickness of 1.0 μm. Next, a mirror projection exposure machine (product name: TME-150RTO, manufactured by TOPCON Corporation) was used, and the exposure gap was 50 μm. The exposure amount was changed to 15, 30, 45 through a negative mask with a line pattern of 10 μm formed. 4 steps of 60 mJ / cm 2 , the coating film is irradiated with ultraviolet rays. The exposed coating film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C for 40 seconds, and then post-baked at 230 ° C for 30 minutes to form a line pattern. The size of the line pattern formed by each exposure amount is measured, and from the relationship between the exposure amount and the formed line width, the optimal exposure amount necessary to form a pattern having a line with a width of 10 μm is obtained.

<圖型直線度評價> <Pattern straightness evaluation>

使用旋轉塗佈機,將各實施例及比較例之感光性組成物塗佈於玻璃基板(100mm×100mm)上,在90℃下預烘烤120秒鐘,形成膜厚1.0μm之塗膜。接著,使用鏡面投射曝光機(製品名:TME-150RTO,股份公司TOPCON製),曝光間隙為50μm,經由形成有10μm之線圖型之負型光罩,曝光量為15、30、45、60mJ/cm2之4階段對塗膜照射紫外線。將曝光後之塗膜,以26℃之0.04質量%KOH水溶液顯影40秒鐘後,在230℃下進行後烘烤30分鐘,形成線圖型。 Using a spin coater, the photosensitive compositions of Examples and Comparative Examples were coated on a glass substrate (100 mm × 100 mm), and pre-baked at 90 ° C. for 120 seconds to form a coating film having a film thickness of 1.0 μm. Next, using a mirror projection exposure machine (product name: TME-150RTO, manufactured by TOPCON Corporation), the exposure gap was 50 μm, and a negative mask with a line pattern of 10 μm was formed, and the exposure was 15, 30, 45, 60 mJ The coating film was irradiated with ultraviolet rays at four stages per cm 2 . The exposed coating film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C for 40 seconds, and then post-baked at 230 ° C for 30 minutes to form a line pattern.

藉由光學顯微鏡觀察形成之線圖型,評價圖型直線度。圖型直線度係在線之邊緣無變形(wobble)者評 價為「○」,有變形者評價為「×」。 The formed line pattern was observed by an optical microscope, and the straightness of the pattern was evaluated. Graphic straightness is based on the evaluation of the line's edge without deformation (wobble) The price is "○" and those with deformation are evaluated as "×".

<圖型密著性評價> <Pattern adhesion evaluation>

圖型直性之評價中,藉由光學顯微鏡觀察形成之線圖型,評價圖型密著性。圖型密著性係不會自基板剝離,而形成線圖型者評價為「○」,而線圖型發生圖型缺損者評價為「×」。 In the evaluation of the pattern straightness, the formed line pattern was observed by an optical microscope to evaluate the pattern adhesion. The pattern adhesion is not peeled from the substrate, and a line pattern is evaluated as "○", and a line pattern defect is evaluated as "x".

<圖型之剖面形狀(錐角)評價> <Evaluation of the sectional shape (taper angle) of the pattern>

與圖型直線度評價同樣,於玻璃基板(10cm×10cm)上形成膜厚1.0μm之感光性組成物的塗膜。然後,使用鏡面投射曝光機(製品名:TME-150RTO,股份公司TOPCON製),經由形成有10μm之線圖型之負型光罩,以曝光量4045mJ/cm2使塗膜曝光。將曝光後之塗膜,以26℃之0.04質量%KOH水溶液顯影50秒鐘後,在230℃下進行燒成處理30分鐘,使用掃描型電子顯微鏡測量圖型與基板之間的接合角度(錐角)。 As in the pattern straightness evaluation, a coating film of a photosensitive composition having a film thickness of 1.0 μm was formed on a glass substrate (10 cm × 10 cm). Then, using a specular projection exposure machine (product name: TME-150RTO, manufactured by TOPCON Corporation), the coating film was exposed at an exposure amount of 4045 mJ / cm 2 through a negative mask formed with a line pattern of 10 μm. The exposed coating film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C for 50 seconds, and then subjected to a firing treatment at 230 ° C for 30 minutes. A scanning electron microscope was used to measure the bonding angle between the pattern and the substrate (cone angle).

此錐角係對應於圖1(a)及(b)中之角度θ。錐角為銳角時,意指圖型不存在底切,錐角為鈍角時,意指圖型存在底切。 This cone angle corresponds to the angle θ in Figs. 1 (a) and (b). When the cone angle is acute, it means that the pattern has no undercut, and when the cone angle is obtuse, it means that the pattern has undercut.

依據測量之錐角,遵循以下基準,評價圖型之剖面形狀。 Based on the measured cone angle, follow the following criteria to evaluate the cross-sectional shape of the pattern.

◎:70°以上、85°以下 ◎: Above 70 ° and below 85 °

○:超過85°、且90°以下 ○: More than 85 ° and less than 90 °

△:超過90°、且100°以下 △: More than 90 ° and less than 100 °

×:超過100° ×: more than 100 °

<丙二醇單甲基醚乙酸酯(PM)溶解性> <Propylene glycol monomethyl ether acetate (PM) solubility>

因安全且無使用限制,作為彩色濾光片製造用或LCD之製造步驟中,構造形成用之材料的溶劑,而廣泛使用PM。因此,添加於光阻材料之光聚合起始劑,期望對PM良好溶解者。 Because it is safe and has no restrictions on use, PM is widely used as a solvent for materials for structural formation in the manufacturing steps of color filters or LCDs. Therefore, a photopolymerization initiator added to a photoresist is expected to dissolve PM well.

因此,光聚合起始劑對PM之溶解性,依據以下方法進行評價。 Therefore, the solubility of the photopolymerization initiator in PM was evaluated according to the following method.

23℃條件下,對於光聚合起始劑之粉體1g,添加不會使光聚合起始劑完全溶解之範圍之任意量的PM溶劑,進行5分鐘攪拌。將攪拌後之液靜置後,對於上澄液,測量光聚合起始劑之濃度。依據測量之上澄液中之光聚合起始劑的濃度,並依據以下基準評價光聚合起始劑之PM溶解性。 At 23 ° C., 1 g of the powder of the photopolymerization initiator was added with any amount of a PM solvent in a range that would not completely dissolve the photopolymerization initiator, and stirred for 5 minutes. After the stirred liquid was allowed to stand, the concentration of the photopolymerization initiator was measured with respect to the upper liquid. The concentration of the photopolymerization initiator in the upper clear solution was measured, and the PM solubility of the photopolymerization initiator was evaluated according to the following criteria.

◎:超過6質量% ◎: More than 6% by mass

○:超過3質量%,且6質量%以下 ○: More than 3% by mass and less than 6% by mass

△:超過1質量%,且3質量%以下 △: More than 1% by mass and less than 3% by mass

×:1質量%以下 ×: 1% by mass or less

依據實施例1~6時,得知使用含有光聚合性化合物及前述式(1)表示之肟系光聚合起始劑之感光性組成物的情形,以低曝光量可形成直線度及對基板之密著性優異,且底切被抑制之圖型。 According to Examples 1 to 6, it was found that when a photosensitive composition containing a photopolymerizable compound and the oxime-based photopolymerization initiator represented by the formula (1) is used, a straightness can be formed with a low exposure and a substrate can be formed. A pattern with excellent adhesion and suppressed undercuts.

依據比較例1~6時,得知使用含有光聚合性化合物及前述式(1)以外之結構之光聚合起始劑之感光性組成物的情形,以低曝光量不易形成直線度及對基板之密著性優異的圖型,且形成之圖型中容易產生底切。 According to Comparative Examples 1 to 6, it was found that when a photosensitive composition containing a photopolymerizable compound and a photopolymerization initiator having a structure other than the aforementioned formula (1) was used, it was difficult to form a straightness and a substrate with a low exposure amount. Patterns with excellent adhesion, and undercuts easily occur in the formed patterns.

[實施例7~12、及比較例7~12] [Examples 7 to 12 and Comparative Examples 7 to 12]

對於含有著色劑之感光性組成物,以下以實施例7~12、及比較例7~12進行評價。 The photosensitive composition containing a coloring agent was evaluated below with Examples 7-12 and Comparative Examples 7-12.

實施例7~12、及比較例7~12中,光聚合性化 合物使用下述合成例7所得之樹脂A及二季戊四醇六丙烯酸酯。又,實施例7~12、及比較例7~12中,著色劑使用碳黑分散液(固體成分濃度50質量%、溶劑:3-甲氧基丁基乙酸酯)。 In Examples 7 to 12 and Comparative Examples 7 to 12, photopolymerization As the composition, Resin A and dipentaerythritol hexaacrylate obtained in Synthesis Example 7 described below were used. In Examples 7 to 12 and Comparative Examples 7 to 12, a carbon black dispersion liquid (solid content concentration: 50% by mass, solvent: 3-methoxybutyl acetate) was used as a coloring agent.

[合成例7] [Synthesis example 7]

首先,於500ml之四口燒瓶中投入雙酚茀型環氧樹脂(環氧當量235)235g、四甲基銨氯化物110mg、2,6-二-tert-丁基-4-甲基苯酚100mg、及丙烯酸72.0g,邊以25ml/分鐘之速度將空氣吹入其中,邊於90~100℃下加熱溶解。其次,溶液為白濁的狀態下徐徐昇溫,加熱至120℃使完全溶解。此時,溶液逐漸變成透明黏稠,但是該狀態下繼續攪拌。此時測量酸價,繼續加熱攪拌至未達1.0mgKOH/g為止。酸價達到目標值需要12小時。然後,冷卻至室溫,得到無色透明且固體狀之以下述式(a4)表示之雙酚茀型環氧丙烯酸酯。 First, in a 500 ml four-necked flask, 235 g of a bisphenol fluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, and 100 mg of 2,6-di-tert-butyl-4-methylphenol were charged. And 72.0 g of acrylic acid, while blowing air into it at a speed of 25 ml / minute, and heating and dissolving at 90 to 100 ° C. Next, the solution was gradually heated while the solution was cloudy, and heated to 120 ° C to completely dissolve. At this time, the solution gradually became transparent and thick, but stirring was continued in this state. At this time, the acid value was measured, and heating and stirring were continued until it reached 1.0 mgKOH / g. It takes 12 hours for the acid value to reach the target value. Then, it cooled to room temperature and obtained the colorless transparent solid bisphenol fluorene type epoxy acrylate represented by following formula (a4).

接著,於如此所得之上述雙酚茀型環氧丙烯 酸酯307.0g中加入3-甲氧基丁基乙酸酯600g,經溶解後,混合二苯甲酮四羧酸二酐80.5g及溴化四乙基銨1g,徐徐昇溫,在110~115℃下反應4小時。確認酸酐基消失後,混合1,2,3,6-四氫苯二甲酸酐38.0g,使於90℃下反應6小時得到樹脂A。藉由IR光譜確認酸酐基之消失。 Next, the above-mentioned bisphenol fluorene type epoxy propylene 600 g of 3-methoxybutyl acetate was added to 307.0 g of the acid ester, and after dissolving, 80.5 g of benzophenone tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were mixed, and the temperature was gradually raised to 110-115 The reaction was carried out at 4 ° C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C for 6 hours to obtain resin A. The disappearance of the acid anhydride group was confirmed by IR spectrum.

又,此樹脂A相當於上述式(a-1)表示之樹脂。 This resin A corresponds to a resin represented by the above formula (a-1).

使上述樹脂A30質量份、季戊四醇六丙烯酸酯17質量份、表1所記載之種類的光聚合起始劑3質量份及碳黑分散液50質量份,均勻溶解、分散於由3-甲氧基丁基乙酸酯60質量%、丙二醇單甲基醚乙酸酯20質量%及環己酮20質量%所構成之混合溶劑中,使固體成分濃度成為15質量%,得到實施例7~12、及比較例7~12之感光性組成物。對於使用所得之感光性組成物形成的圖型,與實施例1~6及比較例1~6同樣評價直線度、圖型剝離、圖型之剖面形狀(錐角)。此等之評價結果如表1所示。 30 parts by mass of the resin A, 17 parts by mass of pentaerythritol hexaacrylate, 3 parts by mass of a photopolymerization initiator of the type described in Table 1, and 50 parts by mass of a carbon black dispersion were uniformly dissolved and dispersed in a 3-methoxy group. In a mixed solvent consisting of 60% by mass of butyl acetate, 20% by mass of propylene glycol monomethyl ether acetate, and 20% by mass of cyclohexanone, the solid content concentration was 15% by mass. Examples 7 to 12, and And the photosensitive compositions of Comparative Examples 7 to 12. The pattern formed using the obtained photosensitive composition was evaluated for straightness, pattern peeling, and cross-sectional shape (taper angle) of the pattern in the same manner as in Examples 1 to 6 and Comparative Examples 1 to 6. The results of these evaluations are shown in Table 1.

依據實施例7~12時,得知使用含有光聚合性化合物、前述式(1)表示之肟系光聚合起始劑及著色劑之感光性組成物的情形,以低曝光量可形成直線度及對基板之密著性優異的圖型,且底切被抑制的圖型。 According to Examples 7 to 12, it was found that when a photosensitive composition containing a photopolymerizable compound, the oxime-based photopolymerization initiator represented by the formula (1), and a coloring agent was used, a straightness can be formed with a low exposure amount. Patterns with excellent adhesion to the substrate, and patterns with undercuts suppressed.

依據比較例7~12時,得知使用含有光聚合性化合物、前述式(1)以外之結構的光聚合起始劑及著色劑之感光性組成物的情形,以低曝光量不易形成直線度及對基板之密著性優異的圖型,且形成之圖型中也容易產生底切。 According to Comparative Examples 7 to 12, it was found that when a photosensitive composition containing a photopolymerizable compound, a photopolymerization initiator having a structure other than the formula (1), and a coloring agent was used, it was difficult to form a straightness at a low exposure. And patterns with excellent adhesion to the substrate, and undercuts are easily generated in the formed patterns.

Claims (6)

一種感光性組成物,其係含有(A)光聚合性化合物、及(B)下述式(1)表示之肟系光聚合起始劑,前述(A)光聚合性化合物包含下述式(a1)表示之化合物,(上述式(1)中,l為1~5之整數,m為0~(l+3)之整數,n為1~8之整數,R1為碳原子數1~11之烷基、或可具有取代基之芳基,R2為下述式(2)~(5)表示之取代基之任一者,R3為烷基,R4為氫原子或碳原子數1~10之烷基) (上述式(a1)中,X表示下述式(a2)表示之基,上述式(a1)中,Y表示自二羧酸酐去除酸酐基(-CO-O-CO-)的殘基,上述式(a1)中,Z表示自四羧酸二酐去除兩個酸酐基的殘基,上述式(a1)中,m表示0~20之整數)(上述式(a2)中,R1a各自獨立表示氫原子、碳原子數1~6之烴基、或鹵素原子,R2a各自獨立表示氫原子或甲基,W表示單鍵或下述式(a3)表示之基, A photosensitive composition containing (A) a photopolymerizable compound and (B) an oxime-based photopolymerization initiator represented by the following formula (1), wherein the (A) photopolymerizable compound includes the following formula ( a1), (In the above formula (1), l is an integer of 1 to 5, m is an integer of 0 to (l + 3), n is an integer of 1 to 8, R 1 is an alkyl group of 1 to 11 carbon atoms, or An aryl group which may have a substituent, R 2 is any of the substituents represented by the following formulae (2) to (5), R 3 is an alkyl group, and R 4 is a hydrogen atom or an alkane having 1 to 10 carbon atoms base) (In the above formula (a1), X represents a group represented by the following formula (a2), and in the above formula (a1), Y represents a residue from which the acid anhydride group (-CO-O-CO-) is removed from the dicarboxylic anhydride, and In the formula (a1), Z represents a residue in which two acid anhydride groups are removed from the tetracarboxylic dianhydride, and in the formula (a1), m represents an integer of 0 to 20) (In the above formula (a2), R 1a each independently represents a hydrogen atom, a hydrocarbon group having 1 to 6 carbon atoms, or a halogen atom, R 2a each independently represents a hydrogen atom or a methyl group, and W represents a single bond or the following formula (a3 ) Said the base, 一種感光性組成物,其係包含(A)光聚合性化合物、(B)下述式(1)表示之肟系光聚合起始劑、及(D)鹼可溶性樹脂,前述(D)鹼可溶性樹脂包含:含有選自由具有具環氧基之基的(甲基)丙烯酸酯及具有具脂環式骨架之基的(甲基)丙烯酸酯所成群組之至少一種單體的聚合物,(上述式(1)中,l為1~5之整數,m為0~(l+3)之整數,n為1~8之整數,R1為碳原子數1~11之烷基、或可具有取代基之芳基,R2為下述式(2)~(5)表示之取代基之任一者,R3為烷基,R4為氫原子或碳原子數1~10之烷基) A photosensitive composition comprising (A) a photopolymerizable compound, (B) an oxime-based photopolymerization initiator represented by the following formula (1), and (D) an alkali-soluble resin, (D) the alkali-soluble The resin includes a polymer containing at least one monomer selected from the group consisting of a (meth) acrylate having an epoxy group and a (meth) acrylate having an alicyclic skeleton, (In the above formula (1), l is an integer of 1 to 5, m is an integer of 0 to (l + 3), n is an integer of 1 to 8, R 1 is an alkyl group of 1 to 11 carbon atoms, or An aryl group which may have a substituent, R 2 is any of the substituents represented by the following formulae (2) to (5), R 3 is an alkyl group, and R 4 is a hydrogen atom or an alkane having 1 to 10 carbon atoms base) 如申請專利範圍第1或2項之感光性組成物,其係進一步含有著色劑(C)。For example, the photosensitive composition according to item 1 or 2 of the patent application scope further contains a colorant (C). 如申請專利範圍第3項之感光性組成物,其中前述著色劑為遮光劑。For example, the photosensitive composition of claim 3, wherein the colorant is a light-shielding agent. 一種彩色濾光片,其係使用如申請專利範圍第3或4項之感光性組成物而形成。A color filter is formed by using a photosensitive composition such as item 3 or 4 of the scope of patent application. 一種顯示裝置,其係使用如申請專利範圍第5項之彩色濾光片。A display device uses a color filter such as the fifth item in the patent application scope.
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