TWI651142B - Mixed gas electrochemical micro-jet processing method and device thereof - Google Patents

Abstract

The invention relates to a gas-mixed electrochemical micro-jet processing method and a device thereof. This air-mixed electrochemical micro-jet processing method and device is to mix an electrolyte and a gas as a gas-mixed electrolyte, and provide a gas-mixed electrolyte to a nozzle electrode, to micro-jet the gas-mixed electrolyte to a processed part, To perform electrochemical micro-jet processing. The invention mixes gas into the electrolyte, which can increase the compressibility, flow uniformity and flow ability of the electrolyte, and reduce the conductive area in contact with the electrolyte and the processed parts, thereby increasing the current density, which will increase the material removal rate. .

Description

Gas-mixed electrochemical micro-jet processing method and device

The invention relates to an electrochemical spraying process, in particular to a gas-mixed electrochemical micro-jet processing method and a device thereof.

With the development of various types of components, the microfabrication technology and system have been proposed successively at home and abroad. Among them, the processing technology that can produce microstructures such as micropores, microchannels, 3D microstructures has attracted much attention Electrochemical Jet Machining (ECJM) is one of them.

In recent years, there have been related studies. For example, X.Lu and others published "Electrochemical micromachining of titanium surfaces for biomedical applications" in the Journal of Materials Processing Technology, Vol.169, pp.173-178 in 2005. Technology Blind hole processing of titanium metal for aerospace medical use. W. Natsu et al. Published "Generating complicated surface with electrolyte jet machining" in 2007, Precision Engineering, Vol. 31, 1, pp. 33-39, which uses micro-nozzle electrodes and stainless steel in electrochemical machining experiments. As a machined part, from the experimental results, it is known that, by increasing the current density, electrochemical spray processing can not only increase the processing speed, but also obtain a shiny surface and a better surface roughness.

For research related to assisted electrochemical spray processing, such as AKM De Silva and others published the "Modelling and Experimental Investigation of Laser Assisted Jet Electrochemical Machining" in CIRP Annals-Manufacturing Technology, Vol. 55, 1, pp. 179-182 in 2004. ", It uses laser-assisted processing to dissolve processed parts as the positioning effect of electrochemical spray processing. Z. Liu et al. Published the "Abrasive enhanced electrochemical slurry jet micro-machining: Comparative experiments and synergistic effects" in the Journal of Materials Processing Technology Vol. 214, pp. 1886-1894 in 2014, which proposed the jet processing of abrasive slurry ( ASJM) in combination with electrochemical spray processing.

Although there have been quite a lot of researches on electrochemical spray processing mentioned above, how to make electrochemical spray processing achieve better processing accuracy is still one of the topics to be studied at present. The main factor is that during electrochemical spray processing, the processing The processing conditions between the component and the electrode are extremely small liquid beam (electrolyte) processing, which has a variety of physical and chemical impact effects, such as high current density, high voltage, resistance heat, reaction heat, high pressure and intense current, etc., will cause The liquid beam is damaged, water accumulates or vortex is generated. Therefore, in this environment, how to strengthen the compressibility, uniformity and flow ability of the processing fluid, and improve the accuracy of the processing shape, has become the research direction of those skilled in the art. . The invention proposes a new gas-mixed electrochemical micro-jet processing method and its device in response to this demand.

The main object of the present invention is to provide a gas-mixed electrochemical micro-jet processing method and a device thereof, which can increase the compressibility and flow uniformity of the processing fluid by mixing the electrolyte into the gas as a processing fluid. With the ability to flow and reduce the conductive area in contact with the processing fluid and the workpiece, that is, the current density is relatively increased, so that the material removal rate is increased.

The invention discloses a gas-mixed electrochemical micro-jet processing method. The steps include mixing an electrolyte and a gas as a gas-mixed electrolyte; providing the gas-mixed electrolyte to a nozzle electrode, and the nozzle electrode micro-jets the gas-mixed electrolyte To a machining part; and applying a machining power to the machining part and the nozzle electrode to perform electrochemical micro-jet processing.

The invention further provides a gas-mixed electrochemical micro-jet processing device, which includes a nozzle electrode and an electrolyte gas-mixed device. The electrolyte gas mixing device has a liquid-gas mixing chamber, which mixes the electrolyte and the gas into a gas-mixed electrolyte, and injects it into the nozzle electrode to spray the gas-mixed electrolyte for electrochemical micro-jet processing.

The invention further provides a liquid-gas mixed electrode device for gas-mixed electrochemical micro-jet processing. The mixed electrolyte and gas are gas-mixed electrolytes, including a main body, a gas flow field adjusting member, and an electrolyte flow field adjusting member. And a nozzle electrode. The main body has a liquid-gas mixing cavity, at least one gas injection port and a liquid-gas mixing outlet, and the liquid-gas mixing outlet communicates with the liquid-gas mixing cavity to supply a gas-mixed electrolyte. The gas flow field adjusting member is accommodated in the liquid-gas mixing cavity, and has a plurality of air inlet holes. The air inlet holes are connected to the liquid-gas mixing cavity and the gas injection port, and the gas passes through the gas injection port and the air inlet holes. Injected into the liquid-gas mixing chamber. The electrolyte flow field adjusting member is accommodated in the liquid-gas mixing chamber and has a plurality of liquid inlet holes, which are connected to the liquid-gas mixing chamber to inject the electrolyte into the liquid-gas mixing chamber. The nozzle electrode is connected to the main body, and communicates with the liquid-gas mixing outlet, and sprays the gas-mixed electrolyte provided by the liquid-gas mixing outlet.

10‧‧‧Gas-mixed electrochemical micro-jet processing device

12‧‧‧ Nozzle electrode

121‧‧‧ Nozzle

13‧‧‧Mixed gas electrolyte

14‧‧‧ Electrolyte mixing device

140‧‧‧ main body

1401‧‧‧ upper split

14011‧‧‧ Positioning hole

1402‧‧‧ split

1403‧‧‧ lower split

1405‧‧‧liquid-gas mixing chamber

141‧‧‧Gas flow field adjustment

1411‧‧‧Air inlet

142‧‧‧ Electrolyte flow field adjustment piece

1421‧‧‧Inlet

143‧‧‧Gas injection port

144‧‧‧liquid-gas mixed outlet

146‧‧‧Gasket

147‧‧‧Gasket

148‧‧‧Gasket

149‧‧‧Adapter

16‧‧‧Workpiece loading platform

18‧‧‧machined parts

20‧‧‧ Power Supply

22‧‧‧Workpiece loading slot

24‧‧‧ Electrolyte supply device

241‧‧‧electrolyte tank

242‧‧‧Pu

243‧‧‧Filter Module

244‧‧‧Pressure gauge

26‧‧‧Gas supply module

27‧‧‧Fixed parts

28‧‧‧ Liquid-gas mixed electrode device

29‧‧‧Z-axis mover

30‧‧‧Gas Assisted Module

32‧‧‧ auxiliary gas

301‧‧‧ Ontology

3010‧‧‧Cavity

3011‧‧‧Opening

3012‧‧‧Export Department

3013‧‧‧Gas injection port

FIG. 1 is a flowchart of main steps of one embodiment of the gas-mixed electrochemical micro-jet processing method of the present invention; FIG. 2 is a schematic diagram of one embodiment of the gas-mixed electrochemical micro-jet processing apparatus of the present invention; Fig. 3a is an exploded schematic view of an embodiment of an electrolytic liquid gas mixing device of the present invention; Fig. 3b is a schematic view of an embodiment of a liquid-gas mixed electrode device of the present invention; and Fig. 4a is a gas flow field adjustment of the present invention FIG. 4b is an enlarged schematic view of the area A of FIG. 4a; FIG. 5a is a schematic view of an embodiment of the liquid inlet of the electrolyte flow field adjusting member of the present invention; Fig. 5b is an enlarged schematic view of area B in Fig. 5a; Fig. 6a is a schematic view of an embodiment of a gas-assisted module according to the present invention; and Fig. 6b is a perspective view of an embodiment of a gas-assisted module according to the present invention. .

In order for your reviewers to have a better understanding and understanding of the features of the present invention and the effects achieved, I would like to provide a detailed description of the preferred embodiment and cooperation, as follows: First, please refer to FIG. 1, which is based on Flow chart of main steps of one embodiment of the invention of a gas-mixed electrochemical micro-jet processing method. As shown in step S1, an electrolytic solution and a gas are mixed to form a gas-mixed electrolytic solution as a processing liquid for performing electrochemical micro-jet processing. Subsequently, as shown in step S2, a gas-mixed electrolyte is provided to a nozzle electrode, so that the nozzle electrode micro-sprays the gas-mixed electrolyte to a processed part. In addition, as shown in step S3, each of the processed part and the nozzle electrode is used as an electrode end, and a processing power source is applied to the processed part and the nozzle electrode, so that electrochemical micro-jet processing can be performed. In one embodiment of the present invention, micro-grooves or micro-holes can be formed on the surface of the processed part, but it is not limited to only forming micro-grooves or micro-holes in the processed part. In one embodiment of the present invention, the gas may be a compressed gas.

In the present invention, after the electrolyte is mixed with gas, it is ejected from the nozzle electrode, so that the mixed electrolyte is sprayed on the surface of the workpiece to perform electrochemical micro-jet processing to form microstructures such as micropores or micropores. Slot or other miniature pattern. Because the gas-mixed electrolyte of the present invention There is a gas inside, and the gas has compressibility. In such an electrochemical micro-jet process, if the cross-sectional area of the flow channel changes suddenly and the pressure of the mixed electrolyte is changed, the volume of the gas can expand and compress, which can avoid mixing The phenomenon that the gas electrolyte is unstable in supply to improve the uniformity of the surface of the machined part. For example, in the low pressure region, the local pressure of the gas mixed electrolyte is relatively increased due to gas expansion, which is beneficial to improve the gas mixture electrolysis in the processing gap. The uniformity of liquid flow, that is, the uniformity of the flow field is improved, and the surface quality of the electrochemical micro-jet processing of the workpiece is improved. In addition, the gas in the gas-mixed electrolyte will expand in the area with a large cross-sectional area (large gap), so that the volume flow of the gas-mixed electrolyte is relatively increased and the flow rate is increased, which helps the gas-mixed electrolyte Take away processed products and heat.

From the above description, it can be known that the gas is compressible, so the present invention makes the electrolytic solution a gas-mixed electrolytic solution by mixing the electrolytic solution with the gas, so that the processing fluid (gas-mixed electrolytic solution) of electrochemical micro-jet processing can be increased. Compressibility, flow uniformity and flow ability, and because the gas mixture electrolyte has gas, the conductive area of the gas mixture electrolyte in contact with the workpiece can be reduced, so that the processing voltage of the processing power source is unchanged, which is relatively improved. The current density increases the material removal rate for electrochemical micro-jet processing and improves processing efficiency.

In the above step S2, the processing part is an anode and the nozzle electrode is a cathode, that is, the processing part is coupled to an anode of a source of processing power, such as an anode of a power supply, and the nozzle electrode is coupled to a cathode of a source of processing power. Furthermore, the processing method of the present invention further includes providing an auxiliary gas at the outer periphery of the nozzle electrode. The auxiliary gas surrounds the nozzle electrode and is sprayed in a direction of spraying the mixed electrolyte to the nozzle port of the nozzle electrode to avoid the mixed electrolyte. Because of the surface tension, the nozzle electrode is covered. In addition, the auxiliary gas can bunch the mixed electrolyte to prevent the mixed electrolyte from spreading, so as to improve the processing accuracy. In addition, the auxiliary gas is sprayed in the direction in which the mixed electrolyte is sprayed to the nozzle port, which can also prevent the mixed electrolyte from being sprayed back to the nozzle electrode after being sprayed on the surface of the workpiece.

The step of mixing the electrolyte and the gas into the gas-mixed electrolyte can drive the electrolyte and the gas to flow in a spiral manner to perform mixing, so that the uniformity of mixing can be improved. In one embodiment of the present invention, an electrolyte solution having a pressure of 0.2 MPa (million Pascals) to 1 MPa is mixed with a compressed gas having a pressure of 0.1 MPa to 0.9 MPa. Electrolyte is 5wt.% (By weight) to 30wt.% Of sodium nitrate (NaNO ₃₎ solution. The orifice diameter of the nozzle electrode of the nozzle electrode is 0.1 mm (mm) to 0.5 mm. The processing power is 50V (volt) to 300V. The initial distance between the workpiece and the nozzle electrode is 0.4 mm to 1 mm.

In addition, the workpiece can be cleaned in advance. For example, the workpiece can be soaked with an acetone solution, and the surface of the workpiece can be cleaned with ultrasonic vibration.

Next, the architecture of the gas-mixed electrochemical micro-jet processing device of the present invention is described as follows. Please refer to FIG. 2, which is a schematic diagram of an embodiment of a gas-mixed electrochemical micro-jet processing device according to the present invention. As shown in the figure, the gas-mixed electrochemical micro-jet processing device 10 of the present invention mainly includes a nozzle electrode 12 and an electrolyte gas-mixed device 14. The nozzle electrode 12 is disposed on the bottom of the electrolytic solution mixing device 14. The electrolyte gas mixing device 14 mixes an electrolyte and a gas into a gaseous electrolyte 13 and injects the gaseous electrolyte 13 into the nozzle electrode 12. The nozzle electrode 12 sprays the gaseous electrolyte 13 as a processing liquid for performing electrochemical micro-jet processing. A workpiece carrier 16 is provided corresponding to the nozzle electrode 12 to set a processing part 18. In one embodiment of the present invention, the workpiece carrier 16 can be moved laterally (X direction) and longitudinally (Y direction). A power supply 20 having a cathode coupled to the nozzle electrode 12 and an anode coupled to the processing member 18 to provide processing power to the nozzle electrode 12 and the processing member 18 to cooperate with the mixed electrolyte 13 sprayed from the nozzle electrode 12 , And the workpiece 18 is subjected to electrochemical micro-jet processing, such as surface processing of micro-grooves or micro-holes.

In addition, the above-mentioned workpiece carrying platform 16 may be disposed in a workpiece carrying groove 22. Furthermore, in order to provide the electrolyte required by the electrolytic solution mixing device 14 and to make the electrolytic solution of the sprayed mixed electrolytic solution reusable and recyclable, a space is provided between the workpiece bearing tank 22 and the electrolytic solution mixing device 14 The electrolytic solution supplying device 24 is configured to supply the electrolytic solution to the electrolytic solution mixing device 14 and the mixed gas solution 13 ejected from the recovery nozzle electrode 12, and is filtered and purified to recycle the electrolytic solution. The electrolytic solution supply device 24 shown in the figure may include an electrolytic solution tank 241 which is in communication with the workpiece supporting tank 22 to recover the electrolytic solution ejected from the nozzle electrode 12 in the workpiece supporting tank 22. A pump 242 is in communication with the electrolyte tank 241 to extract the electrolyte in the electrolyte tank 241. A filter module 243 is in communication with the pump 242 to filter the electrolyte extracted by the pump 242 from the electrolyte tank 241 to be injected into the electrolyte mixing device 14. Furthermore, a pressure gauge 244 may be provided on the pipeline for injecting the electrolyte into the electrolyte mixing device 14 to monitor the pressure of the electrolyte being injected into the electrolyte mixing device 14. In addition, the electrolyte supply device 24 may further include a constant temperature controller (not shown) to maintain the temperature of the electrolyte when it is injected into the electrolyte mixing device 14.

In addition, the gas mixed in the above-mentioned electrolytic solution mixing device 14 is supplied by a gas supply module 26, which is connected to the electrolytic solution mixing device 14. In addition, the nozzle electrode 12 and the electrolyte gas mixing device 14 may be integrated into a liquid-gas mixing electrode device 28. A fixing member 27 is provided on the top of the electrolyte gas mixing device 14 to fix the liquid-gas mixing electrode device 28 on a Z-axis mover 29. The Z-axis mover 29 can drive the liquid-gas mixing electrode device 28 in a vertical direction (Z direction ) To adjust the distance between the nozzle electrode 12 and the work piece 18.

Next, the above-mentioned electrolytic solution mixing device 14 will be further described. Please refer to FIG. 3a and FIG. 3b together, which are schematic diagrams of an exploded view of an embodiment of an electrolyte gas mixing device and a schematic diagram of an embodiment of a liquid-gas mixed electrode device of the present invention, respectively. The liquid-gas mixed electrode device 28 includes a nozzle electrode 12 and an electrolyte gas-mixed device 14. As shown in the figure, the electrolyte gas mixing device 14 of the present invention includes a main body 140, a gas flow field adjusting member 141, and an electrolyte flow field adjusting member 142. The main body 140 has at least one gas injection port 143 and a liquid-gas mixing outlet 144, and includes an upper split 1401, a middle split 1402, and a lower split 1403. The upper split 1401 and the lower split 1403 are respectively disposed on the top and bottom of the middle split 1402 to be assembled as the main body 140. In one embodiment of the present invention, the main The body 140 is cylindrical, but it is not limited to a cylindrical shape, and it can also have other shapes. A liquid-gas mixing cavity 1405 is provided in the main body 140. In addition, the spacer 146 is disposed between the upper split 1401 and the middle split 1402. The gasket 147 is disposed between the middle split 1402 and the lower split 1403.

Following the above, the gas flow field adjusting member 141 is accommodated in the liquid-gas mixing chamber 1405, and has a plurality of air inlet holes 1411, which are perforated and communicate with the liquid-gas mixing chamber 1405. In one embodiment of the present invention, the gas flow field adjusting member 141 has a cylindrical shape, and a peripheral edge thereof has an arc shape. The electrolyte flow field adjusting member 142 is inserted into one of the positioning holes 14011 of the upper body 1401 to be disposed on the upper body 1401. The positioning hole 14011 is a perforation, so the lower half of the electrolyte flow field adjusting member 142 is accommodated in the liquid. In the gas mixing cavity 1405, the lower half of the electrolyte flow field adjusting member 142 has a plurality of liquid inlet holes 1421, and the liquid inlet holes 1421 are perforated and communicate with the liquid-gas mixing cavity 1405. In one embodiment of the present invention, the electrolyte flow field adjusting member 142 is tubular. A gasket 148 is disposed between the electrolyte flow field adjusting member 142 and the upper body 1401. An adapter 149 is provided in the positioning hole 14011 of the upper split 1401 to connect with the electrolyte flow field adjusting member 142. The adapter 149 is connected to the pipeline of the electrolyte supply device 24. The electrolyte is injected into the electrolyte via the adapter 149. The electrolyte flow field adjusting member 142 injects the electrolyte into the liquid-gas mixing chamber 1405 through the liquid inlet holes 1421 of the electrolyte flow field adjusting member 142.

Referring again to FIGS. 3a and 3b, the gas injection port 143 is provided in the body 1402 in the main body 140, and is connected to the gas supply module 26 (as shown in FIG. 2), and communicates with the gas flow field adjusting member 141. These air inlet holes 1411, so that the gas supplied by the gas supply module 26 is injected into the liquid-gas mixing chamber 1405 through the gas injection port 143 and the air inlet holes 1411, so as to be mixed with the electrolyte to form a gas-mixed electrolyte. 13. The liquid-gas mixing outlet 144 is provided at the bottom of the sub-body 1403 under the main body 140 and communicates with the liquid-gas mixing chamber 1405. In this way, the liquid-gas mixing electrolyte 13 in the liquid-gas mixing chamber 1405 can be injected into the liquid-gas mixing outlet 144 to Nozzle electrode 12.

Please refer to FIG. 4a and FIG. 4b, which are schematic diagrams of an embodiment of an air inlet of a gas flow field adjusting member of the present invention and enlarged schematic diagrams of an area A in FIG. 4a, respectively. As shown in the figure, the invention The air inlet hole 1411 of the gas flow field adjusting member 141 has an inclination and an exit angle. When gas is injected into the liquid-gas mixing chamber 1405 through the air inlet holes 1411, the gas is injected into the liquid-gas mixture at an angle. The cavity 1405, so that the gas will flow in the liquid-gas mixing cavity 1405 in a spiral manner, so that the uniformity of the mixing can be improved. As shown in FIG. 4b, an included angle between the air inlet holes 1411 and a radial line of the gas flow field adjusting member 141 is 30 degrees. In one embodiment of the present invention, the included angle may be 25 degrees to 60 degrees. In this embodiment, an air inlet hole 1411 is provided on the arc wall of the gas flow field adjusting member 141 every 20 degrees, so this embodiment has 18 air inlet holes 1411. The number of the air inlets 1411 can be determined according to the use requirements.

Please refer to FIGS. 5a and 5b, which are a schematic view of an embodiment of the liquid inlet of the electrolyte flow field adjusting member of the present invention and an enlarged schematic view of a region B of FIG. 5a, respectively. As shown in the figure, the liquid inlet hole 1421 of the electrolyte flow field adjusting member 142 of the present invention has an inclination and an exit angle. When the electrolyte is injected into the liquid-gas mixing chamber 1405 through the liquid inlet holes 1421, the electrolyte is electrolyzed. The liquid is injected into the liquid-gas mixing chamber 1405 at an angle, so that the electrolyte flows in a spiral manner in the liquid-gas mixing chamber 1405 like the above-mentioned gas, so that the uniformity of mixing can be improved.

As shown in FIG. 5b, the included angle between the liquid inlet holes 1421 and the radial line of the electrolyte flow field adjusting member 142 is 30 degrees. In one embodiment of the present invention, the included angle may be 25 degrees to 60 degrees. In this embodiment, a liquid inlet hole 1421 is provided on the arc wall of the electrolyte flow field adjusting member 142 every 45 degrees, so this embodiment has eight liquid inlet holes 1421. The number of liquid inlet holes 1421 can be determined according to the use requirements. From the above description, it can be known that the gas inlets 1411 and the liquid inlets 1421 of the present invention inject gas and electrolyte into the liquid-gas mixing cavity 1405 at an angle to drive the gas and electrolyte to flow spirally. , And increase the uniformity of mixing.

Furthermore, the liquid-gas mixed electrode device 28 of the present invention may further include a gas auxiliary module 30, which is arranged around the outer periphery of the nozzle electrode 12 of the liquid-gas mixed electrode device 28, as shown in Figs. 6a and 6b. As shown, the gas assist module 30 is provided with a vertical downward auxiliary gas 32 to avoid electrolysis. The liquid covers the nozzle opening 121 of the nozzle electrode 12 due to surface tension, and further avoids problems such as dispersion of processing current density, poor processing shapes, and stray phenomena on the surface of the workpiece due to the nozzle electrode 12 being coated.

The gas assist module 30 includes a body 301 which is hollow and has a cavity 3010, and the body 301 has an opening portion 3011, an outlet portion 3012, and at least one gas injection port 3013. The opening portion 3011 is located on the top of the body 301, that is, on one side of the body 301, and communicates with the cavity 3010. The opening portion 3011 is used to connect with the nozzle electrode 12 of the liquid-gas mixed electrode device 28, that is, the gas assist module 30 is set. The nozzle electrode 12 is located in the cavity 3010. The exit portion 3012 is located at the bottom of the body 301, that is, opposite to the opening portion 3011 of the body 301, and communicates with the cavity 3010. In an embodiment of the present invention, the inner diameter of the exit portion 3012 is tapered toward the exit of the exit portion 3012, so the inner wall of the exit portion 3012 has a slope. In addition, the outlet portion 3012 corresponds to the nozzle opening 121 of the nozzle electrode 12.

The gas injection port 3013 is located on the side wall of the body 301 and communicates with the cavity 3010. The gas supply module 26 can be connected to the gas injection port 3013 to supply the auxiliary gas 32 to the injection port 3013 to inject into the cavity 3010 and the auxiliary gas 32. It will surround the outer periphery of the nozzle electrode 12 located in the cavity 3010, and the cavity 3010 will flow the auxiliary gas 32 stably, so the cavity 3010 is equivalent to a steady flow chamber. After the steady flow, the ring-shaped auxiliary gas 32 is ejected in the direction of spraying the mixed electrolyte to the nozzle opening 121 of the nozzle electrode 12 through the outlet portion 3012, that is, the auxiliary gas 32 is sprayed vertically downward to the nozzle opening 121 of the nozzle electrode 12, so that Avoid mixing the gaseous electrolyte with the nozzle opening 121 due to surface tension, and bunching the gaseous mixed electrolyte to prevent the gaseous mixed electrolyte from spreading to improve processing accuracy. In addition, the auxiliary gas 32 is sprayed in the direction in which the mixed gas electrolyte is sprayed toward the nozzle opening 121, which can also prevent the mixed gas electrolyte from being sprayed back to the nozzle electrode 12 after being sprayed onto the surface of the workpiece.

In summary, the gas-mixed electrochemical micro-jet processing method and its device of the present invention are prepared by mixing an electrolyte into a gas as a working fluid and spraying the gas-mixed electrolyte with a nozzle electrode during processing. Pieces for electrochemical microjet processing. The use of gas-mixed electrolyte as the working fluid can increase the compressibility, flow uniformity, and flow capacity of the processing fluid, and reduce the conductive area of the processing fluid and the workpiece, thereby increasing the current density and increasing the material removal rate. .

However, the above are only preferred embodiments of the present invention, and are not intended to limit the scope of implementation of the present invention. For example, all changes and modifications of the shapes, structures, features, and spirits in accordance with the scope of the patent application for the present invention are made. Shall be included in the scope of patent application of the present invention.

The invention is truly a novel, progressive, and industrially available user, which should meet the patent application requirements stipulated by the Chinese Patent Law. No doubt, the invention patent application was submitted in accordance with the law. prayer.

Claims (8)

A gas-mixed electrochemical micro-jet processing method includes the following steps: injecting an electrolyte into a liquid-gas mixing cavity at an angle, driving the electrolyte to spirally flow through the liquid-gas mixing cavity, and injecting an electrolyte at an angle The gas flows to the liquid-gas mixing chamber, drives the gas to spirally flow in the liquid-gas mixing chamber, and mixes the electrolyte and the gas in a spiral flow to a gas-mixed electrolyte; providing the gas-mixed electrolyte to a nozzle electrode, The nozzle electrode micro-injects the gas-mixed electrolyte to a processed part; and a processing power is applied to the processed part and the nozzle electrode to perform electrochemical micro-jet processing. The processing method according to claim 1, wherein the pressure of the electrolytic solution is 0.2 MPa to 1 MPa, the gas is a compressed gas, and the pressure is 0.1 MPa to 0.9 MPa, and the electrolyte is A 5% to 30% by weight sodium nitrate aqueous solution, one of the nozzle electrodes has a nozzle hole diameter of 0.1 mm to 0.5 mm, an initial distance between the processed part and the nozzle electrode is 0.4 mm to 1 mm, and the processing power is 50 Volts to 300 volts. The processing method according to claim 1, further comprising providing an auxiliary gas at an outer periphery of the nozzle electrode, and the auxiliary gas is sprayed in a direction of a nozzle opening of the nozzle electrode. A gas-mixed electrochemical micro-jet processing device, comprising: a nozzle electrode; and an electrolyte gas-mixing device having a liquid-gas mixing chamber for mixing an electrolyte and a gas into a gas-mixed electrolyte, And injected into the nozzle electrode to spray the gas-mixed electrolyte for electrochemical micro-jet processing. The electrolyte gas-mixing device includes a main body, a gas flow field adjusting member, and an electrolyte flow field adjusting member, wherein the main body has The liquid-gas mixing chamber, at least one gas injection port, and a liquid-gas mixing outlet are connected to the liquid-gas mixing chamber to supply the gas-mixed electrolyte to the nozzle electrode. The gas flow field adjusting member is It is accommodated in the liquid-gas mixing cavity and has a plurality of air inlet holes. The air inlet holes communicate with the liquid-gas mixing cavity and the gas injection port and have an exit angle. The gas passes through the gas injection port and the gas injection port. A plurality of air inlet holes are injected into the liquid-gas mixing chamber, and the electrolyte flow field adjusting member is accommodated in the liquid-gas mixing chamber, and has a plurality of liquid inlet holes relative to the gas flow field adjusting member. These inlets are connected to Liquid-gas mixing chamber and having an exit angle, the electrolyte is injected through the plurality of holes to an inlet of the gas liquid mixing chamber. The processing device according to claim 4, further comprising: an electrolytic solution supply device connected to the electrolytic solution mixing device, and supplying the electrolytic solution to the electrolytic solution mixing device; and a gas supply module, which is connected The electrolytic solution mixing device supplies the gas to the electrolytic solution mixing device. The processing device according to claim 4, wherein the gas flow field adjusting member has a cylindrical shape, and an included angle between the air inlet holes and a radial line of the gas flow field adjusting member is 25 degrees to 60 degrees, and the electrolysis The liquid flow field adjusting member is tubular, and the included angle between the liquid inlet holes and the radial line of the electrolyte flow field adjusting member is 25 degrees to 60 degrees. Two adjacent inlet holes are relative to the gas flow. The included angle of the center of the field adjusting member is different from the included angle of two adjacent liquid inlet holes with respect to the center of the electrolyte flow field adjusting member. The processing device according to claim 4, further comprising a gas-assisted module, which is ring-connected to the nozzle electrode. The gas-assisted module includes a body having an opening portion, an outlet portion, and at least one gas injection. An inlet, and a cavity inside the body, the opening portion is located on one side of the body and communicates with the cavity, and through the opening portion, the gas assist module is sleeved on the nozzle electrode, and the nozzle electrode Located in the cavity, the outlet portion is located on the opposite side of the opening portion of the body and communicates with the cavity. The inner diameter of the outlet portion is tapered toward an outlet of the outlet portion, and the outlet portion corresponds to the nozzle. A nozzle port of an electrode, the gas injection port is located on a side wall of the body and communicates with the cavity. The gas injection port receives an auxiliary gas and injects the auxiliary gas into the cavity, and the exit portion is directed to the nozzle. The auxiliary gas is sprayed in the direction of the mouth. A liquid-gas mixed electrode device for gas-mixed electrochemical micro-jet processing, which mixes an electrolyte and a gas into a gas-mixed electrolyte, and includes: a main body having a liquid-gas mixing chamber and at least one gas injection port With a liquid-gas mixing outlet, the liquid-gas mixing outlet is connected to the liquid-gas mixing chamber to supply the gas-mixed electrolyte; a gas flow field adjusting member is accommodated in the liquid-gas mixing chamber, and has a plurality of inlets; Air holes, the air inlets communicating with the liquid-gas mixing chamber and the gas injection port and having an exit angle, the gas is injected into the liquid-gas mixing chamber through the gas injection port and the air intake holes; An electrolyte flow field adjusting member, which is contained in the liquid-gas mixing chamber and is opposite to the gas flow field adjusting member, and has a plurality of liquid inlet holes, which are connected to the liquid-gas mixing cavity and have An injection angle is used to inject the electrolyte into the liquid-gas mixing chamber; and a nozzle electrode is connected to the main body and communicates with the liquid-gas mixing outlet.