TWI649545B - Smart sensing device and smart sensing method for hydrostatic bearing - Google Patents

Smart sensing device and smart sensing method for hydrostatic bearing Download PDF

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TWI649545B
TWI649545B TW106113291A TW106113291A TWI649545B TW I649545 B TWI649545 B TW I649545B TW 106113291 A TW106113291 A TW 106113291A TW 106113291 A TW106113291 A TW 106113291A TW I649545 B TWI649545 B TW I649545B
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pressure
hydrostatic bearing
bearing
control unit
hydrostatic
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TW201839370A (en
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陳明飛
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國立彰化師範大學
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Abstract

本發明提供一種靜壓軸承之智慧感測裝置,靜壓軸承包含有至少一流體腔室,而感測裝置包含有至少一壓力感測器、至少一流量感測器及一控制單元。壓力感測器用以設於流體腔室內並感測對應流體腔室內的壓力值。流量感測器感測流經靜壓軸承的流量值。而控制單元耦接壓力感測器,控制單元依據壓力值得出靜壓軸承內的一壓力分佈,控制單元並依據壓力分佈得出靜壓軸承的靜態、動態等運作性能。而為了因應工業4.0及智慧機械技術,將靜壓軸承及智慧感測裝置組成液/氣靜壓主軸、旋轉平台、止推及導軌等,即可即時監控並適時修正而不影響正常運作。The invention provides a smart sensing device for a hydrostatic bearing. The hydrostatic bearing comprises at least one fluid chamber, and the sensing device comprises at least one pressure sensor, at least one flow sensor and a control unit. The pressure sensor is disposed in the fluid chamber and senses a pressure value in the corresponding fluid chamber. The flow sensor senses the flow rate through the hydrostatic bearing. The control unit is coupled to the pressure sensor, and the control unit derives a pressure distribution in the hydrostatic bearing according to the pressure, and the control unit obtains the static and dynamic working performance of the hydrostatic bearing according to the pressure distribution. In order to respond to the industrial 4.0 and intelligent mechanical technology, the hydrostatic bearing and the smart sensing device are composed of a liquid/air static pressure spindle, a rotating platform, a thrust stop and a guide rail, etc., and can be immediately monitored and corrected in time without affecting normal operation.

Description

靜壓軸承之智慧感測裝置及智慧感測方法Smart sensing device and smart sensing method for hydrostatic bearing

本發明係關於一種靜壓軸承,特別係一種靜壓軸承之智慧感測裝置及智慧感測方法。 The invention relates to a hydrostatic bearing, in particular to a smart sensing device and a smart sensing method for a hydrostatic bearing.

靜壓軸承的運作主要係將加壓的氣/液體送入軸承與承載面(例如,主軸、導軌面等)之間以形成氣/油膜,並透過該氣/油膜間隙的改變來抵抗壓力或作用力的變化,使心軸能在摩擦力極小的狀態下運動。而由於靜壓軸承所具備低摩擦阻力、高剛性及高定位精度等優點,使靜壓軸承被廣泛應用於精密工具機中。 The operation of the hydrostatic bearing is mainly to feed the pressurized gas/liquid into the bearing and the bearing surface (for example, the main shaft, the guide surface, etc.) to form a gas/oil film, and to resist the pressure or the change of the gas/oil film gap. The change in force allows the mandrel to move in a state where the friction is extremely small. Due to the low frictional resistance, high rigidity and high positioning accuracy of hydrostatic bearings, hydrostatic bearings are widely used in precision machine tools.

另一方面,為了得知工具機的運作性能,工具機通常會裝設切削動力計等感測裝置。然而,在該工具機對物件加工的過程中,由於切削動力計等感測裝置係直接設於該工具機的主軸上,該等感測裝置可能會影響加工作業,故無法同時監控及加正,更無法即時修正主軸等軸承的運動行為。而靜壓軸承可以提供一種智慧感測方式但能使加工作業正常運作係相關領域所欲達成的目標之一。 On the other hand, in order to know the operational performance of the machine tool, the machine tool usually has a sensing device such as a cutting dynamometer. However, in the process of processing the object by the machine tool, since the sensing device such as the cutting dynamometer is directly disposed on the main shaft of the machine tool, the sensing devices may affect the processing operation, so the monitoring and correction cannot be simultaneously performed. It is even more difficult to correct the motion behavior of bearings such as the spindle. The hydrostatic bearing can provide a kind of smart sensing method, but it can make the normal operation of the processing operation one of the goals that the related fields want to achieve.

有鑑於此,本發明的目的在於提供一種靜壓軸承之智慧感測裝置及智慧感測方法,在不影響裝載該靜壓軸承之設備運作的前提下,能即時監控該靜壓軸承的運作性能。 In view of the above, the object of the present invention is to provide a smart sensing device and a smart sensing method for a hydrostatic bearing, which can monitor the operation performance of the hydrostatic bearing in real time without affecting the operation of the device for loading the hydrostatic bearing. .

為達上述目的,本發明提供一種靜壓軸承之智慧感測裝置,該靜壓軸承包含有至少一流體腔室,而該感測裝置包含有至少一壓力感測器及一控制單元。該壓力感測器用以設於該流體腔室內並感測對應流體腔室內的壓力值。而該控制單元耦接該壓力感測器,該控制單元依據該壓力值得出該靜壓軸承內的一壓力分佈,該控制單元並依據該壓力分佈得出該靜壓軸承的一運作性能。 To achieve the above object, the present invention provides a smart sensing device for a hydrostatic bearing, the hydrostatic bearing comprising at least one fluid chamber, and the sensing device comprises at least one pressure sensor and a control unit. The pressure sensor is configured to be disposed in the fluid chamber and sense a pressure value in a corresponding fluid chamber. The control unit is coupled to the pressure sensor, and the control unit derives a pressure distribution in the hydrostatic bearing according to the pressure, and the control unit obtains an operational performance of the hydrostatic bearing according to the pressure distribution.

另一方面,本發明另提供一種智慧感測方法,適用於一靜壓軸承,該靜壓軸承包含有至少一流體腔室,而該感測方法包含有下列步驟。感測該流體腔室內的壓力值。依據該壓力值得出該靜壓軸承內的一壓力分佈。依據該壓力分佈得出該靜壓軸承的一運作性能。 In another aspect, the present invention further provides a smart sensing method suitable for a hydrostatic bearing, the hydrostatic bearing comprising at least one fluid chamber, and the sensing method comprises the following steps. The pressure value within the fluid chamber is sensed. Based on this pressure, a pressure distribution within the hydrostatic bearing is derived. According to the pressure distribution, an operational performance of the hydrostatic bearing is obtained.

該感測裝置係位於該流體腔室內而未設於一心軸/導軌面上,該感測裝置不會影響該心軸/導軌面的運作,故可達到即時監控加工/運作情況的功能,從而達成工業4.0所提出智慧感測、分析並自主修正的目標。 The sensing device is located in the fluid chamber and is not disposed on a mandrel/rail surface. The sensing device does not affect the operation of the mandrel/rail surface, so that the function of real-time monitoring processing/operation can be realized, thereby Achieved the goal of wisdom sensing, analysis and self-correction proposed by Industry 4.0.

1‧‧‧智慧感測裝置 1‧‧‧Smart sensor

10‧‧‧壓力感測器 10‧‧‧ Pressure Sensor

20‧‧‧流量感測器 20‧‧‧Flow sensor

30‧‧‧溫度感測器 30‧‧‧temperature sensor

40‧‧‧控制單元 40‧‧‧Control unit

50‧‧‧液靜壓主軸系統 50‧‧‧Hydraulic pressure spindle system

51‧‧‧軸承 51‧‧‧ bearing

52‧‧‧內部空間 52‧‧‧Internal space

53‧‧‧進油孔 53‧‧‧ oil inlet

55‧‧‧流體腔室 55‧‧‧ fluid chamber

57‧‧‧節流器 57‧‧‧ throttle

59‧‧‧心軸 59‧‧‧ mandrel

S31~S37‧‧‧步驟 S31~S37‧‧‧Steps

e‧‧‧位移量 e ‧‧‧displacement

第1圖係依據本發明第一較佳實施例之智慧感測裝置的元件方塊圖。 1 is a block diagram of components of a smart sensing device in accordance with a first preferred embodiment of the present invention.

第2、3圖係依據本發明第二較佳實施例之智慧感測裝置應用於一液靜壓主軸系統徑向軸承的示意圖。 2 and 3 are schematic views showing the application of the smart sensing device according to the second preferred embodiment of the present invention to a radial bearing of a hydrostatic spindle system.

第4圖係依據本發明第二較佳實施例之智慧感測方法的流程圖。 Figure 4 is a flow chart of a smart sensing method in accordance with a second preferred embodiment of the present invention.

第5圖係壓力分佈情形的範例。 Figure 5 is an example of a pressure distribution scenario.

請參照第1圖係本發明一第一較佳實施例之智慧感測裝置1的元件方塊圖,該智慧感測裝置1包含有至少一壓力感測器10、至少一流量感測器20、一溫度感測器30及一控制單元40。 1 is a block diagram of a smart sensing device 1 according to a first preferred embodiment of the present invention, the smart sensing device 1 includes at least one pressure sensor 10, at least one flow sensor 20, A temperature sensor 30 and a control unit 40.

該壓力感測器10可以係壓電、電容、電磁、光學等類型而用於感測壓力的感測器。該流量感測器20可以係電磁、渦流、葉輪、壓力、超音波等類型而用於感測流量的感測器。該溫度感測器30可以係熱敏電阻、熱電偶、電阻等類型而用於感測溫度的感測器。該控制單元40可以係微控制器、晶片或其他可程式化之一般用途或特殊用途的控制器等類似元件或上述元件的組合。該控制單元40耦接該壓力感測器10、該流量感測器20及該溫度感測器30,該控制單元40並可進行資料擷取(例如,取得該等感測器10,20,30的感測值(即壓力值、流量值、溫度值)及數據分析(例如,分析該等感測值)。 The pressure sensor 10 can be a piezoelectric, capacitive, electromagnetic, optical, etc. type of sensor for sensing pressure. The flow sensor 20 can be a type of sensor that senses flow, such as electromagnetic, eddy current, impeller, pressure, ultrasonic, and the like. The temperature sensor 30 can be a type of sensor for sensing temperature, such as a thermistor, a thermocouple, a resistor, or the like. The control unit 40 can be a microcontroller, a chip or other programmable general purpose or special purpose controller or the like or a combination of the above. The control unit 40 is coupled to the pressure sensor 10, the flow sensor 20, and the temperature sensor 30. The control unit 40 can perform data capture (for example, obtaining the sensors 10, 20, The sensed values of 30 (ie, pressure values, flow values, temperature values) and data analysis (eg, analysis of the sensed values).

該智慧感測裝置1係用於感測一靜壓軸承的運作性能,該靜壓軸承可以係利用液靜壓、氣靜壓或其他流體靜壓的主軸、徑向、止推、導軌、旋轉平台、導軌或平面墊等類型的軸承。該壓力感測器10、該流量感測器20、該溫度感測器30的數量及位置端視該靜壓軸承的類型而調整。為了方便說明,下文將以液靜壓的徑向軸承為範例,而其餘類型的靜壓軸承可依此類推。 The smart sensing device 1 is used for sensing the operational performance of a hydrostatic bearing, which may be a hydrostatic, hydrostatic or other hydrostatic spindle, radial, thrust, guide, rotation Types of bearings such as platforms, rails or flat pads. The pressure sensor 10, the flow sensor 20, the number and position of the temperature sensor 30 are adjusted depending on the type of the hydrostatic bearing. For convenience of explanation, a hydrostatic radial bearing will be exemplified below, and the remaining types of hydrostatic bearings can be deduced by analogy.

請參照第2、3圖係本發明一第二較佳實施例之智慧感測裝置1應用於一液靜壓主軸系統50的示意圖。該液靜壓主軸系統50包含有一軸承51具有一內部空間52、四進油孔53徑向且兩兩相對地設於該軸承51並連通該內部空間 52與外界(代表該軸承51之外)、四流體腔室55設於該軸承51內壁且其位置對應該四進油孔53、四節流器57設於該四進油孔53並連通該四流體腔室55、以及一心軸59可旋轉地穿設於該軸承51。而該智慧感測裝置1包含有四該壓力感測器10設於該四流體腔室55內及該節流器57出口旁、四該流量感測器20設於該四流體腔室55內及該節流器57出口旁、該溫度感測器30設於該內空間52中、以及該控制單元40設於該軸承51。需說明的是,依據不同設計需求,在其他實施例中,該些進油孔53、該些流體腔室55、該些節流器57的數量、位置及形狀可對應調整。 Please refer to FIGS. 2 and 3 for a schematic diagram of a smart sensing device 1 according to a second preferred embodiment of the present invention applied to a hydrostatic spindle system 50. The hydrostatic spindle system 50 includes a bearing 51 having an inner space 52, and four oil inlet holes 53 radially disposed opposite to each other and communicating with the inner space. 52 and the outside (representing the bearing 51), a four-fluid chamber 55 is disposed on the inner wall of the bearing 51 and its position corresponds to the four-inlet oil hole 53, and the four-throttle 57 is disposed in the four-inlet oil hole 53 and communicates with The four-fluid chamber 55 and a mandrel 59 are rotatably passed through the bearing 51. The smart sensing device 1 includes four pressure sensors 10 disposed in the four-fluid chamber 55 and adjacent to the outlet of the restrictor 57. The flow sensor 20 is disposed in the four-fluid chamber 55. Next to the exit of the throttle 57, the temperature sensor 30 is disposed in the inner space 52, and the control unit 40 is disposed in the bearing 51. It should be noted that, according to different design requirements, in other embodiments, the number, position and shape of the oil inlet holes 53, the fluid chambers 55, and the throttle devices 57 can be adjusted correspondingly.

前述說明是相關於該智慧感測裝置1及該液靜壓主軸系統50的元件設計,以下將搭配第3~5圖進一步說明該智慧感測裝置1的智慧感測方法。 The foregoing description is related to the component design of the smart sensing device 1 and the hydrostatic spindle system 50. The smart sensing method of the smart sensing device 1 will be further described below with reference to FIGS.

透過一與該四進油孔53連通的供油裝置(圖未示)將加壓的液壓油供應至該四流體腔室55中以形成油膜。請參照第4圖,在步驟S31中,該四壓力感測器10在該軸承51及該心軸59旋轉運作的過程中即時感測該四流體腔室55內的壓力值,而該控制單元40取得該些壓力值。此時,該控制單元40亦可透過該四流量感測器20感測該四流體腔室55內的流量值。 The pressurized hydraulic oil is supplied into the four-fluid chamber 55 through an oil supply device (not shown) that communicates with the four-inlet oil hole 53 to form an oil film. Referring to FIG. 4, in step S31, the four-pressure sensor 10 senses the pressure value in the four-fluid chamber 55 during the rotation of the bearing 51 and the mandrel 59, and the control unit 40 obtain these pressure values. At this time, the control unit 40 can also sense the flow value in the four-fluid chamber 55 through the four-flow sensor 20 .

在步驟S33中,該控制單元40對軸承的類型及該壓力值進行分析,並透過一雷諾方程式得出該軸承51內的一壓力分佈。而該雷諾方程式如下: x定義為該軸承51的周向(如第3圖所示該軸承51圓周,並定義最上方為0°),z定義為該軸承51的軸向(即該軸承51之軸線方向,並定義該軸承51一端為起始 點),ρ係液壓油的密度,p係油膜中的壓力值,η係液壓油的運動黏度,h係油膜厚度,U a 係油膜在該軸承51內壁的x方向上的速度,U b 係油膜在該軸承51內壁相距h的x方向上的速度,V a 係油膜在該軸承51內壁的x方向上的法向速度,V b 係油膜在該軸承51內壁相距h的x方向上的法向速度。 In step S33, the control unit 40 analyzes the type of the bearing and the pressure value, and derives a pressure distribution in the bearing 51 through a Reynolds equation. The Renault equation is as follows: x is defined as the circumferential direction of the bearing 51 (as shown in Fig. 3, the circumference of the bearing 51, and defines the uppermost portion is 0°), z is defined as the axial direction of the bearing 51 (i.e., the axial direction of the bearing 51, and is defined The end of the bearing 51 is the starting point), the density of the ρ- based hydraulic oil, the pressure value of the p- based oil film, the kinematic viscosity of the η- based hydraulic oil, the h-type oil film thickness, and the U a-type oil film on the inner wall of the bearing 51. speed direction, U b speed based film distance h in the x direction in the inner wall of the bearing 51, V a film-based method in the x direction of the inner wall of the bearing 51 to the velocity, V b based on the oil film bearing 51 The inner wall is at a normal velocity in the x direction from h .

請參照第5圖係該心軸59與該軸承51軸線的位移量e(如第3圖所示)為零且該心軸59沒有轉速的壓力分佈情況,對應於各該流體腔室55內的壓力值大致相等。 Referring to FIG. 5, the pressure distribution of the spindle shaft 59 and the displacement amount e of the bearing 51 (as shown in FIG. 3) is zero and the spindle 59 has no rotation speed, corresponding to each of the fluid chambers 55. The pressure values are roughly equal.

值得注意的是,由該雷諾方程式更可得出諸如小孔節流、毛細管節流、薄膜節流器等的流量方程式,該控制單元40即可依據感測到的流量值及壓力值確定該壓力分佈。需說明的是,該流量值係用於驗證該壓力分佈,然於其他實施例中,若已確認該雷諾方程式的結果正確,則可忽略不設該等流量感測器20。除此之外,由於本實施例僅設置四該壓力感測器10,因此採用該雷諾方程式來估算該壓力分佈,然壓力分佈的計算方法還有很多種,例如可設置更多或更少壓力感測器10來利用一經驗公式、一內插法等相關公式推算該壓力分佈。 It is worth noting that the flow equation of small orifice throttling, capillary throttling, membrane restrictor, etc. can be derived from the Reynolds equation, and the control unit 40 can determine the flow value and the pressure value according to the sensed flow rate. Pressure distribution. It should be noted that the flow value is used to verify the pressure distribution. However, in other embodiments, if the result of the Reynolds equation has been confirmed to be correct, the flow sensor 20 may be omitted. In addition, since only four pressure sensors 10 are provided in this embodiment, the Renault equation is used to estimate the pressure distribution, and there are many calculation methods for the pressure distribution, for example, more or less pressure can be set. The sensor 10 uses a correlation formula such as an empirical formula, an interpolation method, etc. to estimate the pressure distribution.

在步驟S35中,該控制單元40依據該壓力分佈進行線上擷取(經由網際網路、雲端、伺服器等)並分析相關數據,以得出該液靜壓主軸系統50的一運作性能。該運作性能例如係該軸承51的承載力W,而該控制單元40可對該壓力分佈在對應各軸向的壓力值積分(即計算對應各軸向在該壓力分佈上的面積)即可得出該承載力W。當對應於特定角度區間的承載力W增加時,相對角度區間的承載力W便會減少,該控制單元40即可監測承載力W的變化來判斷該心軸59旋轉的穩定性。此外,該運作性能係可以係液靜壓主軸系統50的剛性C L , 而該控制單元40可計算該液靜壓主軸系統50的運動方程式以得出該位移量e,並依據該位移量e及該承載力W得出該剛性C L (即)(主軸頻域特性)。該控制單元40更能依據該承載力W得出軸向承載力(基於軸向上的壓力分佈)及徑向承載力(本實施例即為該承載力W)。除此前述靜態(穩態)特性,該控制單元40亦可進行時域分析而進一步得出該心軸59的運轉軌跡、顫振等動態特性。 In step S35, the control unit 40 performs on-line retrieval (via the internet, cloud, server, etc.) according to the pressure distribution and analyzes relevant data to obtain an operational performance of the hydrostatic spindle system 50. The operational performance is, for example, the bearing capacity W of the bearing 51, and the control unit 40 can integrate the pressure distribution in the corresponding axial pressure values (ie, calculate the area corresponding to each axial direction on the pressure distribution). The bearing capacity W is obtained. When the bearing force W corresponding to the specific angular interval is increased, the bearing force W of the relative angular interval is reduced, and the control unit 40 can monitor the change of the bearing force W to determine the stability of the rotation of the spindle 59. In addition, the operational performance may be the stiffness C L of the hydrostatic spindle system 50, and the control unit 40 may calculate the equation of motion of the hydrostatic spindle system 50 to derive the displacement e , and according to the displacement e And the bearing capacity W gives the stiffness C L (ie ) (spindle frequency domain characteristics). The control unit 40 can further derive an axial bearing capacity (based on the axial pressure distribution) and a radial bearing capacity (this is the bearing capacity W) according to the bearing force W. In addition to the static (steady state) characteristics described above, the control unit 40 can also perform time domain analysis to further derive dynamic characteristics such as the trajectory of the mandrel 59, flutter, and the like.

假設該液靜壓主軸系統50係應用於一工具機(圖未示),由於該等感測器10,20,30皆未影響該心軸59的運作,故該控制單元40可在該工具機正常運作的情況下即時監控該工具機的運作性能。此外,在該工具機運作的過程中,該控制單元40還可基於該壓力分佈得出該心軸59的徑向、軸向切削力、切削精度。另一方面,若該心軸59一端設有砂輪(圖未示),則該控制單元40可依據切削力即時監控該砂輪不同粗細程度的研磨狀態、磨損程度及研磨扭力,經過訊號分析、雲端資料庫建檔,進而提供研磨參數建議。端視不同工具機的加工類型,該控制單元40可得出不同作用力的特性。 It is assumed that the hydrostatic spindle system 50 is applied to a machine tool (not shown). Since the sensors 10, 20, 30 do not affect the operation of the spindle 59, the control unit 40 can be used in the tool. The operating performance of the machine tool is monitored immediately in the normal operation of the machine. In addition, during the operation of the machine tool, the control unit 40 can also derive the radial, axial cutting force and cutting accuracy of the mandrel 59 based on the pressure distribution. On the other hand, if one end of the mandrel 59 is provided with a grinding wheel (not shown), the control unit 40 can monitor the grinding state, the degree of wear and the grinding torque of the different thickness of the grinding wheel according to the cutting force, after signal analysis and cloud The database is documented to provide recommendations for grinding parameters. Depending on the type of machining of the different machine tools, the control unit 40 can derive the characteristics of the different forces.

除此之外,若該控制單元40耦接於提供液壓油給該液靜壓主軸系統50的供油裝置並可控制該供油裝置的運作,則該控制單元40即可依據該運作性能(例如,壓力分佈情形、位移量e、顫振情況、承載力W等)調整該供油情況(例如,對特定進油孔53的液壓油加壓),以改變該壓力分佈而調整該軸承51的承載力W,從而修正該液靜壓主軸系統50之運作(步驟S37),使該心軸59可穩定旋轉,進而提昇切削品質並抑制顫振。需說明的是,控制該液靜壓主軸 系統50之運作的方法還有很多種,例如透過制動裝置調整該心軸59的旋轉速度等。 In addition, if the control unit 40 is coupled to the oil supply device that supplies hydraulic oil to the hydrostatic spindle system 50 and can control the operation of the oil supply device, the control unit 40 can be based on the operational performance ( For example, the pressure distribution situation, the displacement amount e, the chattering condition, the bearing force W, and the like) adjust the oil supply condition (for example, pressurizing the hydraulic oil of the specific oil inlet hole 53) to adjust the pressure distribution to adjust the bearing 51. The bearing force W, thereby correcting the operation of the hydrostatic spindle system 50 (step S37), enables the spindle 59 to rotate stably, thereby improving the cutting quality and suppressing chatter vibration. It should be noted that the hydraulic hydrostatic spindle is controlled. There are many ways in which the system 50 can operate, such as adjusting the rotational speed of the mandrel 59 by a brake device, and the like.

另一方面,該液靜壓主軸系統50的運作通常會造成該軸承51內溫升,而該控制單元40可透過該溫度感測器30取得該軸承51內的溫度值,該控制單元40即可基於該溫度值調整該液靜壓主軸系統50的運作,以避免溫升影響整體運作。需說明的是,除了前述切削震顫、溫升等修正,其他靜態及動態運動特性對應的運作狀態,皆能依據該液靜壓主軸系統50的規格、元件及設定進行修正。 On the other hand, the operation of the hydrostatic spindle system 50 generally causes the temperature rise in the bearing 51, and the control unit 40 can obtain the temperature value in the bearing 51 through the temperature sensor 30, and the control unit 40 The operation of the hydrostatic spindle system 50 can be adjusted based on the temperature value to avoid temperature rise affecting overall operation. It should be noted that, in addition to the above-mentioned corrections such as cutting chattering and temperature rise, the operating states corresponding to other static and dynamic motion characteristics can be corrected according to the specifications, components and settings of the hydrostatic spindle system 50.

基於前述發明之精神,該液靜壓主軸系統50可替換成其他靜壓軸承,且原則上該等壓力感測器10置於該靜壓軸承的流體腔室內,才能進一步評估該些流體腔室55內的壓力分佈情形及該靜壓軸承的運作性能甚至是心軸(例如,導軌、旋轉平台等)的動態特性(例如,承載力動態特性等相關性能、精度等)。而針對不同類型的靜壓軸承,應用本發明者須對應調整該雷諾方程式、該流體方程式及其他計算運作性能的方程式以及可供運作修正的設定。藉此,可即時監控各類型的靜壓軸承並給予合適的修正,以維持最佳切削及運轉狀態、延長使用壽命並減少振動或溫升等問題,從而達成工業4.0所提出智慧感測、分析並自主修正的目標。 Based on the spirit of the foregoing invention, the hydrostatic spindle system 50 can be replaced with other hydrostatic bearings, and in principle the pressure sensors 10 are placed in the fluid chamber of the hydrostatic bearing to further evaluate the fluid chambers. The pressure distribution in the 55 and the operational performance of the hydrostatic bearing are even the dynamic characteristics of the mandrel (for example, the guide rail, the rotating platform, etc.) (for example, the relevant performance, accuracy, etc. of the bearing force dynamic characteristics). For different types of hydrostatic bearings, the inventors of the present invention are required to adjust the Reynolds equation, the fluid equation and other equations for calculating operational performance and settings for operational correction. In this way, it is possible to monitor various types of hydrostatic bearings in real time and give appropriate corrections to maintain optimal cutting and running conditions, prolong service life and reduce vibration or temperature rise, thus achieving the wisdom sensing and analysis proposed by Industry 4.0. And the goal of self-correction.

上述僅為本發明實施例的說明,不可用來限制本發明的專利範圍,舉凡未超脫本發明精神所作的簡易結構潤飾或變化,仍應屬於本發明申請專利範圍涵蓋的範疇。 The above is only the description of the embodiments of the present invention, and is not intended to limit the scope of the present invention. Any simple structural retouching or variation that does not depart from the spirit of the present invention is still within the scope of the patent application scope of the present invention.

Claims (8)

一種靜壓軸承之智慧感測裝置,該靜壓軸承包含有至少一流體腔室,而該智慧感測裝置包含有:至少一壓力感測器,用以設於該流體腔室內並感測對應流體腔室內的壓力值;以及一控制單元,耦接該壓力感測器,該控制單元依據該壓力值得出該靜壓軸承內的一壓力分佈,該控制單元並依據該壓力分佈得出該靜壓軸承的一運作性能;其中,該靜壓軸承之智慧感測裝置更包含有至少一流量感測器耦接該控制單元並設於該流體腔室內,該流量感測器感測該流體腔室內的流量值,而該控制單元依據軸承的類型及該壓力值並透過一雷諾方程式得出該壓力分佈,該控制單元並依據該流量值及該壓力值確定該壓力分佈。 A smart sensing device for a hydrostatic bearing, the hydrostatic bearing comprising at least one fluid chamber, and the smart sensing device comprises: at least one pressure sensor for being disposed in the fluid chamber and sensing a corresponding fluid chamber a pressure value in the chamber; and a control unit coupled to the pressure sensor, the control unit deriving a pressure distribution in the hydrostatic bearing according to the pressure, and the control unit obtains the hydrostatic bearing according to the pressure distribution An operational performance of the hydrostatic bearing further includes at least one flow sensor coupled to the control unit and disposed in the fluid chamber, the flow sensor sensing the interior of the fluid chamber The flow rate value, and the control unit obtains the pressure distribution according to the type of the bearing and the pressure value and through a Reynolds equation, and the control unit determines the pressure distribution according to the flow value and the pressure value. 如請求項1所述靜壓軸承之智慧感測裝置,其中該靜壓軸承設有至少一節流器連通該流體腔室,而該壓力感測器設於該節流器出口旁。 The smart sensing device of the hydrostatic bearing according to claim 1, wherein the hydrostatic bearing is provided with at least a throttle connected to the fluid chamber, and the pressure sensor is disposed beside the restrictor outlet. 如請求項1所述靜壓軸承之智慧感測裝置,其中該運作性能包含有一承載力、以及一剛性、一軸向承載力及一徑向承載力其中至少一者,而該控制單元依據該壓力分佈得出該承載力,該控制單元並依據該承載力得出該剛性、該軸向承載力或該徑向承載力,進而得出該靜壓軸承的靜態或動態性能。 The smart sensing device of the hydrostatic bearing according to claim 1, wherein the operational performance comprises a bearing capacity, and at least one of a rigid, an axial bearing capacity and a radial bearing capacity, and the control unit is configured according to the The pressure distribution results in the bearing capacity, and the control unit derives the rigidity, the axial bearing capacity or the radial bearing capacity according to the bearing capacity, thereby obtaining the static or dynamic performance of the hydrostatic bearing. 如請求項1所述靜壓軸承之智慧感測裝置,其中該控制單元更耦接於該靜壓軸承,該控制單元並依據該運作性能控制該靜壓軸承之運作。 The smart sensing device of the hydrostatic bearing of claim 1, wherein the control unit is further coupled to the hydrostatic bearing, and the control unit controls the operation of the hydrostatic bearing according to the operational performance. 一種智慧感測方法,適用於一靜壓軸承,該靜壓軸承包含有至少一流體腔室,而該智慧感測方法包含有:感測該流體腔室內的壓力值; 依據該壓力值得出該靜壓軸承內的一壓力分佈;以及依據該壓力分佈得出該靜壓軸承的一運作性能;其中,依據該壓力分佈得出該靜壓軸承的該運作性能的步驟包含有:依據軸承的類型及該壓力值並透過一雷諾方程式得出該壓力分佈;感測該流體腔室內的流量值;以及依據該壓力值得出該靜壓軸承內的該壓力分佈的步驟包含有依據該流量值及該壓力值確定該壓力分佈。 A smart sensing method is applicable to a hydrostatic bearing, the static pressure bearing includes at least one fluid chamber, and the smart sensing method comprises: sensing a pressure value in the fluid chamber; Determining a pressure distribution in the hydrostatic bearing according to the pressure; and obtaining an operational performance of the hydrostatic bearing according to the pressure distribution; wherein the step of obtaining the operational performance of the hydrostatic bearing according to the pressure distribution comprises Having: obtaining the pressure distribution according to the type of the bearing and the pressure value and passing through a Reynolds equation; sensing the flow value in the fluid chamber; and the step of deriving the pressure distribution in the hydrostatic bearing according to the pressure includes The pressure distribution is determined based on the flow rate value and the pressure value. 如請求項5所述之智慧感測方法,其中該運作性能包含有一承載力,而依據該壓力分佈得出該靜壓軸承的該運作性能的步驟包含有:依據該壓力分佈得出該承載力。 The smart sensing method of claim 5, wherein the operational performance comprises a bearing capacity, and the step of obtaining the operational performance of the hydrostatic bearing according to the pressure distribution comprises: obtaining the bearing capacity according to the pressure distribution . 如請求項6所述之智慧感測方法,其中該運作性能包含有一剛性、一軸向承載力及一徑向承載力其中至少一者,而依據該壓力分佈得出該靜壓軸承的該運作性能的步驟包含有:依據該承載力得出該剛性、該軸向承載力或該徑向承載力;以及得出該靜壓軸承的靜態或動態性能。 The smart sensing method of claim 6, wherein the operational performance comprises at least one of a rigid, an axial bearing capacity and a radial bearing capacity, and the operation of the hydrostatic bearing is obtained according to the pressure distribution. The step of performance comprises: determining the stiffness, the axial bearing capacity or the radial bearing capacity according to the bearing capacity; and obtaining the static or dynamic performance of the hydrostatic bearing. 如請求項5所述之智慧感測方法,其中依據該壓力分佈得出該靜壓軸承的該運作性能之後,更包含有:依據該運作性能控制該靜壓軸承之運作。The smart sensing method according to claim 5, wherein after the operating performance of the hydrostatic bearing is obtained according to the pressure distribution, the method further comprises: controlling the operation of the hydrostatic bearing according to the operating performance.
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