TWI648098B - Gas-liquid mixing apparauts, process equipment and gas-liquid mixing method - Google Patents

Abstract

A gas-liquid mixing method comprises the steps of: inputting nitrogen gas into a chemical solution; refining nitrogen gas into a nitrogen gas bubble, and pressurizing the nitrogen gas bubble to mix the nitrogen gas bubble into the chemical liquid to be the first chemical liquid with nitrogen gas bubbles; and accumulating pressure The first chemical solution with nitrogen bubbles. In addition, a gas-liquid mixing mechanism and process equipment have also been proposed.

Description

Gas-liquid mixing mechanism, process equipment and gas-liquid mixing method

The invention relates to a gas-liquid mixing mechanism, a process equipment and a gas-liquid mixing method, and particularly relates to a gas-liquid mixing mechanism, a process equipment and a gas-liquid mixing method for reducing the deterioration of a chemical liquid.

In the manufacturing process of the modern high-tech industry, the substrate needs to go through multiple processing procedures, such as cleaning, etching, coating, developing, etc., and the specific chemical liquid is used to execute the corresponding manufacturing process.

Since the chemical solution cannot avoid contact with the atmosphere on the transport path, in the case of the developing device, the gas element (such as CO ₂ ) in the atmosphere reacts with the chemical solution to be carbonated water (H ₂ CO ₃ ) to deteriorate the chemical solution. In view of the problem of deterioration of the developer, an inert gas is generally poured into the chemical solution tank, and the reaction of the chemical liquid with the gas element in the atmosphere is prevented by the inert gas being less reactive. However, since the inert gas is not easily dissolved in the chemical liquid, the effect of preventing deterioration of the developing solution is not good.

Therefore, how to improve the life and yield of the liquid, and thus reduce the liquid replacement time and reduce the manufacturing cost is a very important issue.

One object of the present invention is to solve the problem of chemical liquid deterioration, prolong the service life of the chemical liquid, thereby reducing the liquid chemical replacement time and reducing the manufacturing cost, and increasing the manufacturing efficiency.

An embodiment of the invention provides a gas-liquid mixing mechanism comprising a first nitrogen dissolving device and a pressure reducing valve module. The first nitrogen dissolving device comprises a first manifold, a first refining tube and a first accumulator. The first thinning tube is connected to the first collecting tube, and the first thinning tube is provided with a first refining device. When a nitrogen gas and a chemical liquid flow from the first collecting tube to the first thinning tube, the first fine The chemical device refines the nitrogen gas into a nitrogen gas bubble. The first accumulator cylinder is connected to the first refinement tube, and the diameter of the first accumulator cylinder is larger than the diameter of the first refinement tube, so as to reduce the flow rate of the chemical solution and pressurize the nitrogen gas bubbles, so that the nitrogen gas bubbles are mixed into the liquid medicine. It is a first chemical solution with nitrogen bubbles. The pressure reducing valve module is connected to the first accumulator cylinder, and the pressure reducing valve module is used for regulating and accumulating the pressure of the first nitrogen gas bubble in the first accumulator.

An embodiment of the invention provides a process apparatus comprising a chemical tank, a processing device, and a gas-liquid mixing mechanism. The liquid tank stores a liquid medicine. The processing device processes a substrate with a chemical solution provided by the drug solution tank. The gas-liquid mixing mechanism receives the liquid medicine of the liquid medicine tank, and the gas-liquid mixing mechanism includes a first nitrogen gas dissolving device and a pressure reducing valve module. The first nitrogen dissolving device comprises a first manifold, a first refining tube and a first accumulator. The first thinning tube is connected to the first collecting tube, and the first thinning tube is provided with a first refining device. When a nitrogen gas and a chemical liquid flow from the first collecting tube to the first thinning tube, the first fine The chemical device refines the nitrogen gas into a nitrogen gas bubble. The first accumulator cylinder is connected to the first refinement tube, and the diameter of the first accumulator cylinder is larger than the diameter of the first refinement tube, so as to reduce the flow rate of the chemical solution and pressurize the nitrogen gas bubbles, so that the nitrogen gas bubbles are mixed into the liquid medicine. It is a first chemical solution with nitrogen bubbles. The pressure reducing valve module is connected to the first accumulator cylinder, and the pressure reducing valve module is used for regulating and accumulating the pressure of the first nitrogen gas bubble in the first accumulator.

An embodiment of the present invention provides a gas-liquid mixing method comprising the steps of: inputting a nitrogen gas to a chemical solution; refining the nitrogen gas into a nitrogen gas bubble, and pressurizing the nitrogen gas bubble to mix the nitrogen gas bubble into the chemical liquid to be a first a liquid medicine with nitrogen gas bubbles; and a liquid medicine for accumulating the first nitrogen gas bubble.

Based on the above, in the gas-liquid mixing mechanism, the process equipment, and the gas-liquid mixing method of the present invention, by dissolving nitrogen gas in the chemical liquid, the increase in the carbon dioxide content or the oxygen content in the chemical liquid can be effectively suppressed, thereby preventing The function of chemical liquid deterioration.

Furthermore, through the above-mentioned structural differences with different pipe diameters, in addition to increasing the pressure of the nitrogen gas bubbles, the pressure of the nitrogen gas bubbles can also increase the saturation of the overall gas pressure, increase the pressure of the nitrogen gas bubbles, and increase the nitrogen gas bubbles dissolved in the medicine. The content of the liquid can make the nitrogen bubbles more soluble in the liquid medicine, prolong the service life of the liquid, thereby reducing the liquid replacement time and reducing the manufacturing cost, and increasing the manufacturing efficiency.

Further, since the pressure accumulator and the pressure reducing valve module are disposed to store the pressure in the pressure accumulating cylinder, the content of the nitrogen gas bubbles dissolved in the chemical liquid can be maintained.

10, 20, 30‧ ‧ gas-liquid mixing mechanism

11‧‧‧First nitrogen dissolving device

111, 131‧‧‧ nitrogen inlet pipe

1112‧‧‧ nozzle

1114‧‧‧Nozzles

112, 132‧‧‧ drug liquid input tube

113‧‧‧First manifold

114‧‧‧First refinement tube

1142‧‧‧ Input section

1144‧‧‧Output segment

116, 216‧‧‧ first accumulator

1162‧‧‧ first part

1164‧‧‧ second part

1166‧‧‧ third part

118‧‧‧First refinement

1182‧‧ ‧ guide fins

1184‧‧‧Inlet

1186‧‧‧ Connecting ring

12‧‧‧Reducing valve module

121‧‧‧pipe

121A‧‧‧One side tube

121B‧‧‧Second side tube

122‧‧‧Reducing valve

123‧‧‧First side pressure regulating device

123A‧‧‧First pressure gauge

123B‧‧‧First pressure regulating element

124‧‧‧Second side pressure regulating device

124A‧‧‧Second pressure gauge

124B‧‧‧Second voltage regulator

13‧‧‧Second nitrogen dissolving device

133‧‧‧Second manifold

134‧‧‧Second thin tube

136, 236‧‧‧ second accumulator

138‧‧‧Second refinement device

50‧‧‧Processing equipment

51‧‧‧ drug tank

52‧‧‧Processing device

521‧‧‧Spray tube

522‧‧‧ nozzle

53‧‧‧Spray pump

54‧‧‧Circulating pump

55‧‧‧First Conductivity Meter

56‧‧‧Second Conductivity Meter

57‧‧‧Recycling tube

58‧‧‧Draining tube

D1, D2, D3, D4, D5, D6‧‧‧ pipe diameter

G‧‧‧Nitrogen

L‧‧‧ liquid

R1, R2‧‧‧ three-dimensional rotation

S10, S20‧‧‧ gas-liquid mixing method

S110~S130‧‧‧Steps

S210~S260‧‧‧Steps

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing a first embodiment of a gas-liquid mixing mechanism of the present invention.

2 is a schematic view of a first nitrogen dissolving device of the present invention.

Figure 3 is a schematic illustration of a first refinement apparatus of the present invention.

4 is a plan view of the first refining device of FIG. 3.

Fig. 5A is a schematic view showing a second embodiment of the gas-liquid mixing mechanism of the present invention.

Fig. 5B is a schematic view showing a third embodiment of the gas-liquid mixing mechanism of the present invention.

Figure 6 is a schematic illustration of a process apparatus of the present invention.

Fig. 7 is a schematic view showing the first embodiment of the gas-liquid mixing method of the present invention.

Figure 8 is a schematic view showing a second embodiment of the gas-liquid mixing method of the present invention.

The specific embodiments of the present invention are further described below in conjunction with the drawings and embodiments. The following examples are only used to more clearly illustrate the technical solutions of the present invention, and are not intended to limit the scope of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing a first embodiment of a gas-liquid mixing mechanism of the present invention. 2 is a schematic view of a first nitrogen dissolving device of the present invention. Figure 3 is a schematic illustration of a first refinement apparatus of the present invention. 4 is a plan view of the first refining device of FIG. 3. Please refer to Figure 1 first. In the present embodiment, the gas-liquid mixing mechanism 10 includes a first nitrogen dissolving device 11 and a pressure reducing valve module 12. The first nitrogen dissolving device 11 includes a nitrogen gas input pipe 111, a chemical liquid input pipe 112, a first manifold pipe 113, a first thinning pipe 114, and a first pressure accumulating cylinder 116. The nitrogen inlet pipe 111 is in communication with the first manifold 113, the chemical inlet pipe 112 is in communication with the first manifold 113, the first manifold 113 is in communication with the first refining pipe 114, and the first refining pipe 114 is in communication with the first The accumulator 116 is configured to constitute the first nitrogen dissolving device 11. The first manifold 113 is a communication transfer position between the nitrogen inlet pipe 111 and the chemical input pipe 112. The chemical input pipe 112 is used to input the chemical liquid L to the first manifold 113, and the nitrogen inlet pipe 111 is used to input the nitrogen gas G to the first. A manifold 113 allows the nitrogen gas G to collide with the chemical solution L at the first manifold 113 and flows through the first thin tube 114 and the first pressure accumulating tube 116 to be output from the pressure reducing valve module 12.

In the present embodiment, as shown in FIG. 2, the nitrogen inlet pipe 111 includes a nozzle 1112 and a nozzle 1114. The nozzle 1112 communicates with the nozzle 1114, the nitrogen gas G is input into the nozzle 1112, and the nitrogen gas G is delivered by the nozzle 1112. To the nozzle 1114 to deliver the nitrogen gas G to the first confluence tube 113 L. Assuming that each gas has the same partial pressure at normal temperature, the nitrogen gas G can be dissolved in the liquid L more than a gas such as carbon dioxide or oxygen, and the nitrogen gas G is dissolved in the liquid L, which can effectively suppress the liquid L. The carbon dioxide content or the oxygen content is increased, and the electrical conductivity of the chemical liquid L is lowered to achieve the function of preventing the deterioration of the chemical liquid L.

In this embodiment, the two sides of the first refinement tube 114 are respectively connected to the first manifold tube 113 and the first accumulator tube 116. A first refining device 118 is disposed in the first refining tube 114. When the nitrogen gas G and the chemical liquid L flow from the first collecting pipe 113 to the first refining pipe 114, the first refining device 118 refines the nitrogen gas G. The nitrogen gas bubble is more rapidly and uniformly mixed with the chemical liquid L to increase the dissolution rate, and the diameter D3 of the first pressure accumulating cylinder 116 of the embodiment is larger than the diameter D2 of the first thin tube 114. When the chemical liquid L and the nitrogen gas bubble flow from the first thin tube 114 having a small diameter to the first pressure storage tube 116 having a large diameter, the flow rate of the liquid L is lowered according to the Bernoulli's principle. Thereby, the nitrogen gas bubble is pressurized, and the nitrogen gas bubble is mixed into the chemical liquid L to be a first chemical liquid having a nitrogen gas bubble. Thereby, the effect of pressurizing the nitrogen gas bubbles is achieved by the structural difference of the different pipe diameters. Under this configuration, according to Dalton's law of partial pressures, the total gas pressure generated by the mixed gas is equal to the partial pressure sum of the individual components in the mixed gas, and the saturation of the overall gas pressure is constant. For the value of the present embodiment, the total gas pressure is the sum of the partial pressure of carbon dioxide, the partial pressure of oxygen, and the partial pressure of nitrogen. Therefore, the pressure difference between the above-mentioned pipe diameters is used to pressurize the nitrogen gas bubbles. The partial pressure, in addition to increasing the partial pressure of the nitrogen gas bubbles, can also increase the saturation of the overall gas pressure, and the solubility of the gas in the solution is related to the partial pressure of the gas, and the volume of the gas dissolved in a solution The concentration is proportional to the partial pressure of the gas in which the solution is balanced. Accordingly, the greater the pressure at which the nitrogen gas bubbles are applied, the proportion of the first nitrogen gas bubble containing the nitrogen gas bubbles is increased, and the carbon dioxide or the like can be lowered. The ratio of oxygen gas and the like dissolved in the first chemical liquid having nitrogen gas bubbles makes the nitrogen gas bubbles more soluble in the liquid medicine L.

In the present embodiment, the diameter D2 of the first refinement tube 114 is smaller than the diameter D1 of the first rectification tube 113, and the diameter D3 of the first accumulator tube 116 is larger than the diameter D2 of the first refinement tube 114. That is, the diameter D2 of the first thin tube 114 is smaller than the diameter D1 of the first manifold 113 connected to both sides thereof and the diameter D3 of the first pressure accumulating tube 116, forming a Venturi tube structure. A thin tube 114 serves as a necking section of the venturi structure. The first refinement tube 114 includes an input section 1142 and an output section 1144. The input section 1142 is in communication with the output section 1144, and the first refining device 118 is disposed in the input section 1142. Under this configuration, the first refining device 118 occupies most of the space at the front end of the input section 1142 so that most of the nitrogen gas G can be thinned by the first refining device 118 when the nitrogen gas G and the chemical liquid L pass through the front end of the input section 1142. The formation of nitrogen gas bubbles increases the content of nitrogen gas bubbles, so that more nitrogen gas bubbles are rapidly and uniformly mixed with the chemical liquid L between the input section 1142 and the output section 1144 to increase the dissolution rate.

In the present embodiment, the first refining device 118 can be a biochemical ball as shown in FIG. 3 and FIG. 4, but the present invention does not limit the first refining device. In other embodiments, the first refining device can be It is a sieve, a fin set, a filter or a porous ceramic refining sheet. The first refining device 118 includes a plurality of guiding fins 1182, a plurality of diversion holes 1184, and a plurality of connecting rings 1186. The connecting ring 1186 is connected to the plurality of guiding fins 1182. The plurality of guiding fins 142 are arranged radially and form a three-dimensional geometric shape, for example, a vertical radial shape, a cis/counterclockwise swirling shape or a rotating radial shape. In the embodiment not shown, the flow guiding fins may also be horizontally radiated, and the present invention does not limit the shape of the first refining device. The flow guiding hole 1184 is formed between the two flow guiding fins 1182. However, the present invention is not limited thereto. In other embodiments not shown, the air guiding holes can be disposed on the flow guiding fins, for example, the guiding fins are opened to form the air guiding holes.

Under this configuration, when the nitrogen gas G and the chemical liquid L flow into the first thin tube 114, the first refining device 118 rotates R1, R2 (or universal rotation, three-dimensional rotation) in the liquid L, That is, the liquid L is subjected to a three-dimensional (or horizontal) rotation in the first refinement tube 114 in a straight (or reverse) clockwise rotation.

Further, when the first refinement tube 114 is three-dimensionally rotated R1 and R2 in the chemical liquid L, the flow guiding fin 1182 refines the nitrogen gas G into a nitrogen gas bubble, and the nitrogen gas bubble and the chemical liquid L pass through the respective flow guiding holes 1184. The flow hole 1184 disturbs the nitrogen gas bubble and the chemical liquid L, and can achieve the effect of the mixed spoiler, and increases the contact area between the nitrogen gas bubble and the chemical liquid L after the nitrogen gas G is refined, thereby improving the dissolution of the nitrogen gas bubble dissolved in the chemical liquid L. rate.

Referring to FIG. 1 and FIG. 2 , the first accumulator tube 116 includes a first component 1162 , a second component 1164 and a third component 1166 . The second component 1164 is disposed on the first component 1162 and the third component 1166 . between. One side of the first member 1162 is connected to the first thin tube 114, and the other side of the first member 1162 is connected to the second member 1164. The first member 1162 to the second member 1164 form a divergent structure, so that the first member 1162 is connected. The diameter of one side of the first thin tube 114 is small, and the diameter of the other side of the first part 1162 connected to the second part 1164 is large, so the first step of the chemical liquid L and the nitrogen gas bubble is small. The tube 114 flows into the second member 1164 having a large diameter to achieve the effect of compressing the nitrogen gas bubbles. On the other hand, one side of the second member 1164 is connected to the third member 1166, and the second member 1164 to the first member 1166 form a tapered structure. In order to prevent the above-mentioned tapered structure from reducing the partial pressure of the nitrogen gas bubbles, the embodiment includes a pressure reducing valve module 12, and the pressure reducing valve module 12 is connected to the first pressure accumulating cylinder 116, when the first chemical solution with nitrogen gas bubbles is When the first refinement tube 114 flows into the first accumulator tube 116, the pressure reducing valve module 12 is used to adjust and accumulate the pressure of the first nitrogen gas bubble in the first accumulator tube 116 to output the first A liquid with a nitrogen bubble. In addition, the first item is accumulated by the above configuration The pressure of the chemical solution of the nitrogen gas bubbles can increase the diameter D3 of the first pressure accumulating cylinder 116, and the effect of dissolving the nitrogen gas bubbles in the first chemical liquid with nitrogen gas bubbles is enhanced.

Specifically, the pressure reducing valve module 12 includes a pipeline 121, a pressure reducing valve 122, a first side pressure regulating device 123, and a second side pressure regulating device 124. The pipeline 121 is connected to the first pressure accumulating cylinder. The third member 1166 of 116, wherein the pipeline 121 can be divided into a primary side tube 121A and a secondary side tube 121B, the primary side tube 121A is in communication with the secondary side tube 121B, and the primary side tube 121A of the line 121 is disposed on the first side. The adjusting device 123, the secondary side tube 121B of the pipeline 121 is provided with a second side adjusting device 124, the pressure reducing valve 122 is disposed between the first side adjusting device 123 and the second side adjusting device 124, and the pressure reducing valve 122 is provided by the valve The change in the diameter of the tube changes the pressure of the fluid flow to the secondary side tube 121B. The first pressure regulating device 123 includes a first pressure gauge 123A and a first pressure regulating component 123B. The first pressure regulating component 123B is used to adjust the pressure in the primary side tube 121A, and is displayed by the first pressure gauge 123A. The pressure value in the primary side tube 121A. The second pressure regulating device 124 includes a second pressure gauge 124A and a second pressure regulating element 124B. The second pressure regulating component 124B is used to adjust the pressure in the secondary side tube 121B, and is used by the second pressure gauge 124A. The pressure value in the secondary side tube 121B is displayed. Under this configuration, the initial pressures of the primary side tube 121A and the secondary side tube 121B in the set line 121 are equal, in other words, adjusted by the pressure reducing valve 122 and the first pressure regulating element 123B, so that the primary side tube 121A is inside. The pressure is kept larger than the pressure in the secondary side tube 121B, and the first pressure accumulating cylinder 116 communicates with the primary side tube 121A of the pipeline 121, and is adjusted by the pressure reducing valve module 12 to accumulate the pressure to the first storage. The inside of the pressure cylinder 116 can maintain the content of the nitrogen gas bubbles dissolved in the chemical liquid L.

Fig. 5A is a schematic view showing a second embodiment of the gas-liquid mixing mechanism of the present invention. Referring to FIG. 5A, it should be noted that the gas-liquid mixing mechanism 20 of FIG. 5A is similar to the gas-liquid mixing mechanism 10 of FIG. 1, wherein the same components are denoted by the same reference numerals and have the same functions and will not be repeated. The following only explains the differences. The difference between FIG. 5A and FIG. 1 is that the gas-liquid mixing mechanism 20 further includes a second nitrogen dissolving device 13 that is in communication with the first accumulator tube 116 and the pressure reducing valve module 12. The second nitrogen dissolving device 13 includes a nitrogen gas input pipe 131, a chemical liquid input pipe 132, a second manifold pipe 133, a second thinning pipe 134, and a second pressure accumulating cylinder 136. The nitrogen inlet pipe 131 is in communication with the second manifold 133, the drug inlet pipe 132 is in communication with the second manifold 133, the second manifold 133 is in communication with the second capillary 134, and the second capillary 134 is in communication with the second The accumulator 136 is configured to constitute the second nitrogen dissolving device 12.

In the present embodiment, the chemical liquid input pipe 132 is connected to the first pressure accumulating cylinder 116, and the first pressure accumulating cylinder 116 is configured to output the first chemical liquid having nitrogen gas bubbles to the chemical liquid input pipe 132, and the chemical liquid input pipe 132 is used. The first chemical solution with nitrogen gas bubbles is output to the second manifold 133. The setting, operation and function of the nitrogen inlet pipe 131 are similar to the nitrogen inlet pipe 111 in FIG. 1 to FIG. 2, so the nitrogen inlet pipe 131 can be referred to the nitrogen inlet pipe 111 in the foregoing FIGS. 1 to 2, and the nitrogen inlet pipe 131 is used. The nitrogen gas G is supplied to the second manifold 133 so that the nitrogen gas G and the first nitrogen gas bubble are mixed at the second manifold 133. Therefore, in the present embodiment, the first nitrogen gas dissolving device 11 is used to effectively dissolve the nitrogen gas bubbles in the chemical liquid L, and the second nitrogen dissolving device 13 is further provided to increase the content of the nitrogen gas G in the chemical liquid L. Increase the amount of nitrogen in the gas G in the entire liquid L. In other embodiments, other quantities of nitrogen dissolving means may be added, which may be adjusted depending on the actual process.

In the embodiment, a second refining device 138 is disposed in the second refinement tube 134, so that the nitrogen gas G and the first chemical solution having nitrogen gas bubbles flow from the second manifold 133 to the second refinement tube 134. The second refining device 138 refines the nitrogen gas G into a nitrogen gas bubble, and the nitrogen gas bubble can be quickly and uniformly mixed with the chemical liquid with nitrogen gas bubbles to increase the dissolution rate. It should be noted that the arrangement, operation and function of the second refining device 138 are similar to the first refining device 118, so the second refining device 138 can See the first first refining device 118 described above.

In this embodiment, the second accumulator 136 is connected to the second refinement tube 134, and the diameter of the second accumulator 136 is larger than the diameter of the second refinement tube 134 to reduce the first nitrogen bubble. The flow rate of the liquid is pressurized with nitrogen gas bubbles. Therefore, when the first nitrogen gas bubble liquid and the nitrogen gas bubble flow from the second thin tube 134 having a small diameter to the second pressure storage tube 136 having a large diameter, the flow rate of the first nitrogen gas bubble is lowered. In this way, the nitrogen gas bubbles are pressurized, and the nitrogen gas bubbles are mixed into the first nitrogen gas bubble liquid to be a second nitrogen gas bubble liquid. When the second nitrogen gas bubble liquid flows from the second refinement tube 134 to the second accumulator tube 136, the pressure reducing valve module 12 is used to adjust and accumulate the second nitrogen gas bubble in the second accumulator tube 136. The pressure of the liquid medicine to output a second liquid solution with nitrogen gas bubbles. It should be noted that the second accumulator 136 is similar to the first accumulator 116, and can be referred to the first accumulator 116 as shown in FIG. 1 to FIG. The adjustment of the group 12 is to accumulate pressure within the second accumulator 136. In addition, the diameter D4 of the second accumulator 136 is larger than the diameter D3 of the first accumulator 16, and the effect of dissolving nitrogen bubbles in the second chemical solution of nitrogen bubbles can be enhanced.

Fig. 5B is a schematic view showing a third embodiment of the gas-liquid mixing mechanism of the present invention. Referring to FIG. 5B, it should be noted that the gas-liquid mixing mechanism 30 of FIG. 5B is similar to the gas-liquid mixing mechanism 10 of FIG. 1 and the gas-liquid mixing mechanism 20 of FIG. 5A, wherein the same components are denoted by the same reference numerals and have the same The function is not repeated, the following only explains the difference. The difference between FIG. 5A and FIG. 5B is that the diameter D5 of the first accumulator 216 in the first nitrogen dissolving device 13 in FIG. 5B is different from the first accumulator in the first nitrogen dissolving device 13 in FIG. 5A. The pipe diameter D3 of 116; the pipe diameter D6 of the second accumulator 236 in the second nitrogen dissolving device 13 in Fig. 5B is different from the second accumulator 136 in the second nitrogen dissolving device 13 in Fig. 5A, wherein The diameter D5 of the first accumulator 216 in FIG. 5B is greater than the second accumulator The diameter D6 of the barrel 236.

In the present embodiment, the pressure of the first chemical solution having nitrogen gas bubbles is accumulated by the above configuration, and the nitrogen gas bubbles are more dissolved in the chemical liquid L. Further, the diameter of the first pressure accumulating cylinder 216 in this embodiment is D5 is larger than the diameter D3 of the first pressure accumulating cylinder 116 of FIG. 5A. In other words, the present embodiment increases the diameter D5 of the first pressure accumulating cylinder 216, thereby enhancing the dissolution of the nitrogen gas bubble in the first chemical solution with nitrogen gas bubbles. As a result, the amount of nitrogen gas of the nitrogen gas G in the entire chemical liquid L is increased by providing the second nitrogen gas dissolving device 13 to increase the content of the nitrogen gas G in the chemical liquid L.

Figure 6 is a schematic illustration of a process apparatus of the present invention. Referring to FIG. 6, the process device 50 of the embodiment is a developing device. The process device 50 includes a chemical tank 51, a processing device 52, a spray pump 53, a circulating pump 54, and a first conductivity meter. 55, a second conductivity meter 56, a recovery tube 57, a drain tube 58 and a gas-liquid mixing mechanism 10, wherein the first conductivity meter 55 is connected to the gas-liquid mixing mechanism 10, the first conductivity meter 55 is used The electrical conductivity of the chemical liquid L outputted by the gas-liquid mixing mechanism 10 is monitored, and the second electrical conductivity meter 56 is connected to the chemical liquid tank 51, and the second electrical conductivity meter 56 is used to monitor the electrical conductivity of the chemical liquid L in the chemical liquid tank 51. . The chemical solution tank 51 stores the chemical liquid L, the processing device 52 treats a substrate with the chemical liquid L supplied from the chemical liquid tank 51, and the gas-liquid mixer 10 receives the chemical liquid L of the chemical liquid tank 51. One end of the spray pump 53 is connected to the chemical tank 51, and the other end of the spray pump 53 is connected to the processing device 52. The spray tank 53 is connected to the processing device 52, and one end of the recovery tube 57 is connected to the processing device 52. The other end of the recovery pipe 57 is connected to the chemical liquid tank 51. One end of the liquid discharge pipe 58 is connected to the chemical liquid tank 51, and the other end of the liquid discharge pipe 58 is connected to the outside. The liquid medicine tank 51 is used to supply the chemical liquid L to the spray pump 53, and the spray pump 53 transports the liquid medicine L to the spray pipe 521 in the processing device 52, and sprays the liquid medicine L through the spray head 522 to perform corresponding After the process, the liquid L can be recovered by the recovery pipe 57 to the liquid tank 51, and when the liquid level in the liquid tank 51 exceeds a certain preset value, it can be discharged to the outside by the drain pipe 58. unit.

In the present embodiment, one end of the circulation pump 54 is connected to the gas-liquid mixing mechanism 10, and the other end of the circulation pump 54 is connected to the liquid medicine tank 51, and the liquid medicine L is output from the circulation pump 54 to the gas-liquid mixing mechanism 10. The chemical liquid L is processed by the gas-liquid mixing mechanism 10, and the first conductivity meter 55 can measure the electrical conductivity of the chemical liquid L outputted by the gas-liquid mixing mechanism 10, and is returned to the liquid medicine tank 51 via the circulation pump 54. The second conductivity meter 56 can measure the electrical conductivity of the drug solution L in the drug solution tank 51. The gas-liquid mixing mechanism 10 can pass through the first nitrogen dissolving device 11 as described above with reference to FIGS. 1 to 4, so that the chemical liquid L and the nitrogen gas bubbles flow from the first thinning tube 114 having a small diameter to the first large diameter tube. The pressure cylinder 116, thereby pressurizing the nitrogen gas bubble, so that the nitrogen gas G is more soluble in the chemical liquid L, and is adjusted by the pressure reducing valve module 12 to accumulate the pressure into the first pressure accumulating cylinder 116. The content of the nitrogen gas bubble dissolved in the chemical liquid L is maintained, which can effectively suppress the increase of the carbon dioxide content or the oxygen content in the chemical liquid L, so that the electrical conductivity of the chemical liquid L measured by the second electrical conductivity meter 56 can be reduced. The function of preventing the deterioration of the liquid L is achieved to prolong the service life of the liquid, thereby reducing the time for replacing the liquid and reducing the manufacturing cost, and increasing the manufacturing efficiency. In addition, the second nitrogen dissolving device 13 may be provided through the gas-liquid mixing mechanism 10 shown in FIG. 5A or FIG. 5B to increase the content of the nitrogen gas G in the chemical liquid L, thereby increasing the nitrogen gas of the nitrogen gas G in the entire chemical liquid L. The amount is to strengthen the function of preventing the deterioration of the chemical liquid L. It should be noted that the gas-liquid mixing mechanism 10 and the first conductivity meter 55 of the present embodiment are disposed above the circulation pump 54, and in another embodiment, the gas-liquid mixing mechanism shown by the broken line in FIG. 10 and the first conductivity meter 55 may be disposed above the spray pump 53. Under this configuration, the spray pump 53 is input into the liquid medicine L in the liquid tank 51 to the gas-liquid mixing mechanism A, and the gas-liquid mixing The mechanism 10 processes the chemical liquid L to suppress the increase of the carbon dioxide content or the oxygen content in the chemical liquid L, thereby reducing the electrical conductivity value of the chemical liquid L, and the electrical conductivity of the chemical liquid L can be measured by the first electrical conductivity meter 55. Then, the chemical liquid L processed by the gas-liquid mixing mechanism 10 is transmitted to the processing device 52 by the spray pump 53 for Give to the substrate.

Fig. 7 is a schematic view showing the first embodiment of the gas-liquid mixing method of the present invention. Referring to FIG. 7, the gas-liquid mixing method S10 of the present embodiment can be applied to the gas-liquid mixing mechanism 10 of FIG. The gas-liquid mixing method S10 includes the following steps S110 to S130. In step S110, a nitrogen gas G is input to a chemical liquid L. Taking FIG. 1 as an example, the nitrogen inlet pipe 111 is used to input the nitrogen gas G to the first manifold 113 so that the nitrogen gas G and the chemical liquid L meet at the first manifold 113. Accordingly, it is assumed that each gas has the same partial pressure at normal temperature, and nitrogen gas G can be dissolved in the liquid L more than a gas such as carbon dioxide or oxygen, and the nitrogen gas G is dissolved in the liquid L, which can effectively inhibit the drug. The liquid L contains an increase in the amount of carbon dioxide or oxygen, and causes the electrical conductivity of the chemical liquid L to decrease, thereby achieving a function of preventing deterioration of the chemical liquid L.

In step S120, the nitrogen gas G is refined into a nitrogen gas bubble, and the nitrogen gas bubble is pressurized, and the nitrogen gas bubble is mixed into the chemical liquid L to be a first chemical liquid having a nitrogen gas bubble. Specifically, taking FIG. 1 as an example, a first refining device 118 is disposed in the first refinement tube 114 to allow the nitrogen gas G and the chemical liquid L to flow from a first manifold 113 to a first refinement tube 114. The first refining device 118 refines the nitrogen gas G into a nitrogen gas bubble, and the nitrogen gas bubble can be quickly and uniformly mixed with the chemical liquid L to increase the dissolution rate. It should be noted that the first refinement device 118 can be, for example, as shown in FIG. 3 and FIG. 4, but the present invention does not limit the first refinement device. In other embodiments, the first refinement device can be a filter. A mesh, a fin set, a filter or a porous ceramic refining sheet.

On the other hand, the diameter D3 of the first accumulator tube 116 of the present embodiment is larger than the tube diameter D2 of the first refining tube 114 to lower the flow rate of the chemical liquid L and pressurize the nitrogen gas bubble. Therefore, when the chemical liquid L and the nitrogen gas bubble flow from the first thin tube 114 having a small diameter to the first pressure storage tube 116 having a large diameter, the flow rate of the chemical liquid L is lowered and thereby the nitrogen gas bubble is pressurized to make the nitrogen gas The air bubbles are mixed into the chemical liquid L to be a first chemical liquid having a nitrogen gas bubble. Thereby, the pressure is transmitted through the difference in the structure of the pipe diameter Nitrogen gas bubbles, in addition to increasing the partial pressure of nitrogen gas bubbles, can also increase the saturation of the overall gas pressure, and can also increase the content of nitrogen gas bubbles dissolved in the liquid L, so that the nitrogen gas bubbles can be more dissolved in the liquid L.

In step S130, the first chemical liquid having nitrogen gas bubbles is accumulated. Specifically, taking FIG. 1 as an example, the first chemical liquid having nitrogen gas bubbles flows from the first refinement tube 114 to a first accumulator tube 116, and the pressure reducing valve module 12 is used to adjust and accumulate the first The pressure of the first nitrogen gas bubble in the pressure accumulator 116 is output to output the first chemical liquid with nitrogen gas bubbles. It should be noted that, for example, the arrangement, the operation and the function of the first accumulator tube 116 can be referred to the aforementioned FIGS. 1 to 2, and the adjustment of the pressure reducing valve module 12 to accumulate the pressure to the first accumulator tube 116. See Figure 1 through Figure 2 for details.

Figure 8 is a schematic view showing a second embodiment of the gas-liquid mixing method of the present invention. Referring to FIG. 8, the gas-liquid mixing method S20 of the present embodiment can be applied to the gas-liquid mixing mechanism 20 of FIG. 5A or the gas-liquid mixing mechanism 30 of FIG. 5B. The gas-liquid mixing method 20 includes the following steps S210 to S260, wherein the step S210 of FIG. 8 is the same as the step S110 of FIG. 7, the step S220 of FIG. 8 is the same as the step S120 of FIG. 7, and the step S230 of FIG. 8 and the step of FIG. S130 is the same and has the same function and will not be repeatedly described. Only differences will be described below. In step S240, nitrogen gas G is input to the first chemical liquid having nitrogen gas bubbles. Taking FIG. 5A or FIG. 5B as an example, the chemical liquid input pipe 132 is configured to output the first chemical liquid with nitrogen gas bubbles to the second manifold 133, and the nitrogen gas input pipe 131 is used for inputting the nitrogen gas G to the second manifold 133 to make nitrogen gas. G and the first nitrogen gas bubble liquid meet at the second manifold 133. Therefore, in the present embodiment, the first nitrogen dissolving device 11 is used to effectively dissolve the nitrogen gas bubbles in the chemical liquid L, and the second nitrogen dissolving device 13 can be further provided to increase the content of the nitrogen gas G in the liquid L. To increase the amount of nitrogen in the whole liquid L in the liquid L. In addition, in step S240, in an embodiment, the amount of nitrogen input into the chemical liquid is greater than the amount of nitrogen input to the first nitrogen gas bubble, as shown in FIG. 5A or For example, in 5B, the amount of nitrogen gas input into the first bus bar 113 by the nitrogen gas G is larger than the amount of nitrogen gas input into the second bus bar 133 into the nitrogen gas G. In step S250, the nitrogen gas is refined into a nitrogen gas bubble, and the nitrogen gas bubble is pressurized, and the nitrogen gas bubble is mixed into the first nitrogen gas bubble liquid to be a second nitrogen gas bubble liquid. Specifically, taking FIG. 5A or FIG. 5B as an example, a second refining device 138 is disposed in the second refinement tube 134 to allow the nitrogen gas G and the first nitrogen gas bubble liquid to flow from the second manifold 133 to the second When the tube 134 is refined, the second refining device 138 in the second refinement tube 134 refines the nitrogen gas G into a nitrogen gas bubble, and the nitrogen gas bubble can be quickly and uniformly mixed with the first nitrogen gas bubble liquid to improve The dissolution rate, and since the diameter of the second accumulator 136 is larger than the diameter of the second refining tube 134, the nitrogen gas bubble and the first nitrogen gas bubble are made of a second thin tube 134 having a small diameter. Flowing into the second accumulator 136 having a large diameter to reduce the flow rate of the first nitrogen gas bubble and thereby pressurizing the nitrogen gas bubble to mix the nitrogen gas bubble into the first nitrogen gas bubble Two liquid medicines with nitrogen bubbles. Thereby, through the difference in the structure of the pipe diameter, the nitrogen gas bubble is pressurized, in addition to increasing the partial pressure of the nitrogen gas bubble, the saturation of the overall gas pressure can be increased, and the content of the nitrogen gas bubble dissolved in the liquid L can also be increased. , the nitrogen bubble can be more dissolved in the liquid L. In step S260, the second nitrogen gas bubble liquid is accumulated to output a second nitrogen gas bubble liquid. Specifically, the second nitrogen gas bubble is caused to flow from the second refinement tube 134 to the second accumulator 136, and the pressure reducing valve module 12 is used to adjust and accumulate the second pressure in the second accumulator 136. The pressure of the liquid medicine with nitrogen gas bubbles is used to output a liquid medicine with a second nitrogen bubble. In addition, the diameter D5 of the first accumulator 216 shown in FIG. 5B is larger than the diameter D3 of the first accumulator 116 shown in FIG. 5A or FIG. 1, in other words, the embodiment of FIG. 5B is increased by The tube diameter D5 of the accumulator tube 216 enhances the effect of dissolving the nitrogen gas bubbles in the first chemical solution having nitrogen gas bubbles. Further, as shown in FIG. 5A, the diameter D4 of the second accumulator tube 136 is larger than the tube diameter D3 of the first accumulator tube 116, and the effect of dissolving the nitrogen gas bubbles in the second chemical solution of the nitrogen gas bubbles can be enhanced.

Please refer to Tables 1 to 3 below. Tables 1 to 3 are the experimental data of the gas-liquid mixing mechanism of the present invention for the process equipment shown in FIG. Please refer to Table 1 first. Table 1 is taken as an example of the gas-liquid mixing mechanism 20 of FIG. 5A, and only the first accumulator tube 116 or the second accumulator tube 136 is opened for comparison, that is, the table 1 is a single accumulator. The conductivity value of the cylinder (such as the gas-liquid mixing mechanism 10 of Fig. 1) is implemented.

In the above Table 1, the circulating flow rate (LPM) and the pressure (Mpa) in the primary side pipe 121A can be adjusted by the pressure reducing valve 122 and the first pressure regulating element 123B to the pressure in the primary side pipe 121A, and are displayed by the first pressure gauge 123A. The pressure value in the primary side tube 121A, in the present embodiment, the primary side is increased The pressure in the tube 121A was 0.21 MPa while reducing the flow rate in the primary side tube 121A (about 80 LPM). First, please refer to the items A0~A3 in Table 1. The item A0 in Table 1 is to close the first accumulator tube 116 and close the second accumulator tube 136, and the items A1~A3 respectively represent the first accumulator pressure. The canister 116 injects nitrogen gas of different nitrogen amounts into the first accumulator cylinder 116, and closes the second accumulator cylinder 136, in contrast to the conditions of the same flow rate (pressure), by the items A0 and A3. The numerical trend shows that the amount of nitrogen gas injected can make the conductivity value of the liquid L in the liquid tank 51 decrease, that is, it is verified that the nitrogen gas G is dissolved in the liquid L, and the liquid L can be effectively suppressed. The amount of carbon dioxide or oxygen in the increase. Next, please refer to the items A0, A4~A6 in Table 1, and the items A4~A6 respectively represent the opening of the second accumulator 136 and injecting different amounts of nitrogen into the second accumulator 136, and closing the first accumulator 116, in contrast, under the same flow rate (pressure) setting conditions, it can be seen from the numerical trend of the items A0 and A6 that there is also a large amount of nitrogen injected to make the conductance of the liquid L in the liquid tank 51. The trend of decreasing the degree.

In addition, the items A1 to A3 are to open the first accumulator tube 116 and close the second accumulator tube 136, and the items A4 to A6 are to open the second accumulator tube 136 and close the first accumulator tube 116, because the second storage unit The diameter D4 of the pressure cylinder 136 is larger than the diameter D3 of the first pressure accumulation cylinder 116. As can be seen from Table 1, under the same flow rate (pressure) setting condition, the second pressure accumulation of the tube diameter is large in the case of A4~A6. The electrical conductivity value of the chemical liquid L in the chemical solution tank 51 of the cylinder 136 is smaller than the electrical conductivity value of the chemical liquid L in the chemical liquid tank 51 of the first pressure storage cylinder 116 having a small diameter in the items A1 to A3, in other words, The second accumulator 136 having a large diameter is more effective than the first accumulator 116 having a small diameter. Therefore, the diameter of the accumulator can be increased, and the liquid L in the sump 51 can be greatly reduced. The conductivity value. For example, as shown in FIG. 1, under the arrangement of the gas-liquid mixing mechanism 10 of only the first nitrogen dissolving device 11, the diameter D3 of the first accumulator tube 116 can be increased, so that the nitrogen gas bubbles are dissolved in the first The effect of the liquid with nitrogen bubbles is enhanced.

Please refer to Table 2 below. Table 2 is taken as an example of the gas-liquid mixing mechanism 20 of FIG. 5A, and the first accumulator tube 116 and the second accumulator tube 136 are opened together for comparison, that is, the table 2 is a plurality of The conductivity value after the cylinder is implemented.

In the above table 2, the circulation flow rate (LPM) and the pressure (Mpa) in the primary side pipe 121A can be adjusted by the pressure reducing valve 122 and the first pressure regulating element 123B to the pressure in the primary side pipe 121A, and are displayed by the first pressure gauge 123A. In the present embodiment, the pressure in the primary side tube 121A is increased to 0.21 MPa, and the flow rate in the primary side tube 121A (about 80 LPM) is decreased. First, the item B0 represents the closing of the first accumulator tube 116 and the closing of the second accumulator tube 136, and the items B1 to B3 respectively represent opening the first accumulator tube 116 and the second accumulator tube 136 together and injecting different amounts of nitrogen. Nitrogen gas is supplied to the first pressure accumulating cylinder 116 and the second pressure accumulating cylinder 136. The setting conditions of the same flow rate (pressure) are compared with the setting conditions in which only the first accumulator tube 116 is opened or the second accumulator tube 136 is opened in Table 1. Next, the items B1 to B3 in the second table show that the electrical conductivity value of the liquid medicine L in the liquid medicine tank 51 is decreased more. In other words, the present invention can increase the liquid medicine in the liquid medicine tank 51 by increasing the number of the pressure storage cylinders. The tendency of the conductivity value to decrease. Furthermore, as shown in Table 1 above, the numerical trend of the items B0 to B3 in Table 2 shows that under the same flow rate (pressure) setting conditions, the injection of more nitrogen can make the liquid tank 51 The more the conductivity value of the drug solution L drops.

See Table 3 below. Table 3 is taken as an example of the gas-liquid mixing mechanism 30 of FIG. 5B, and the first pressure accumulating cylinder 216 and the second accumulator cylinder 236 are opened together as a comparison basis, that is, the table three is a plurality of The electrical conductivity values after the implementation of the pressure cylinder are different from those of the second embodiment in that the diameter D5 of the first pressure accumulating cylinder 216 in Table 3 is larger than the diameter D6 of the second pressure accumulating cylinder 236.

In the above table 3, the circulating flow rate (LPM) and the pressure (Mpa) in the primary side pipe 121A can be adjusted by the pressure reducing valve 122 and the first pressure regulating element 123B to the pressure in the primary side pipe 121A, and A pressure gauge 123A displays the pressure value in the primary side tube 121A. In the present embodiment, the pressure in the primary side tube 121A is increased to 0.21 MPa, and the flow rate in the primary side tube 121A (about 80 LPM) is lowered. Item C0 represents closing the first accumulator 216 and closing the second accumulator 236, and the items C1 C C3 respectively represent opening the first accumulator 216 and the second accumulating cylinder 236 together and injecting nitrogen gas of different nitrogen amounts to The first accumulator tube 216 and the second accumulator tube 236. First, compared with the setting conditions in which only the first accumulator tube 116 or only the second accumulator tube 136 is opened in Table 1, as in the above Table 2, under the same flow rate (pressure) setting conditions, Table 3 The items C1 to C3 all show that the conductivity value of the liquid L in the liquid solution tank 51 drops more. In other words, the present invention can increase the conductivity value of the liquid medicine L in the liquid medicine tank 51 by increasing the number of the pressure accumulating cylinders. the trend of. Furthermore, as shown in Table 1 above, the numerical trend of the items C0 and C3 in Table 3 shows that under the same flow rate (pressure) setting conditions, the injection of more nitrogen can make the liquid tank 51 The more the conductivity value of the drug solution L drops.

In addition, in Table 2, the pipe diameter D3 of the first accumulator cylinder 116 is smaller than the pipe diameter D4 of the second accumulator cylinder 136, and Table 3 shows that the pipe diameter D5 of the first accumulator cylinder 216 is larger than the pipe diameter of the second accumulator cylinder 236. D6, comparing Table 2 and Table 3, it can be seen that the conductivity value of the liquid L in the liquid tank 51 of Table 2 is better, and the pressure storage tube having a small diameter is used first, and the pressure storage tube having a large diameter is used. The effect is better than using an accumulator having a large diameter and a small accumulator having a small diameter. However, in any case, after the present invention is verified by the above experiment, the electric conductivity value of the chemical liquid L in the chemical solution tank 51 can be lowered by the arrangement of the pressure accumulating cylinder in the gas-liquid mixing mechanism.

As described above, in the gas-liquid mixing mechanism, the process equipment, and the gas-liquid mixing method of the present invention, the nitrogen gas is dissolved in the chemical liquid, and the increase in the carbon dioxide content or the oxygen content in the chemical liquid can be effectively suppressed. And the electrical conductivity of the chemical liquid is lowered to achieve the function of preventing the deterioration of the chemical liquid, and the invention proves through experiments that the amount of nitrogen gas injected can actually make the liquid medicine in the liquid medicine tank The more the conductivity value decreases.

Furthermore, by varying the structural differences of the above-mentioned pipe diameters, in order to pressurize the nitrogen gas bubbles, in addition to increasing the partial pressure of the nitrogen gas bubbles, the saturation of the overall gas pressure can be increased, and the partial pressure of the nitrogen gas bubbles can be increased. Increasing the content of nitrogen gas bubbles dissolved in the liquid medicine can make the nitrogen gas bubbles dissolve in the liquid medicine more, and can further reduce the electrical conductivity of the liquid medicine, prolong the service life of the liquid medicine, thereby reducing the liquid chemical replacement time and reducing the manufacturing cost. And increase production efficiency.

Further, since the pressure accumulator and the pressure reducing valve module are disposed to store the pressure in the pressure accumulating cylinder, the content of the nitrogen gas bubbles dissolved in the chemical liquid can be maintained. Further, the present invention proves through experiments that the present invention can increase the diameter of the accumulator tube and increase the effect of dissolving nitrogen in the chemical solution; or, the present invention can increase the number of nitrogen dissolving devices by using multiple accumulator tubes. To increase the tendency of the electrical conductivity value of the liquid medicine in the liquid medicine tank to decrease; or, the present invention can also design a pressure storage tube with different diameters to achieve a better tendency of the electrical conductivity value of the liquid medicine in the liquid medicine tank to decrease. .

The above description is only intended to describe the preferred embodiments or embodiments of the present invention, which are not intended to limit the scope of the present invention. That is, the equivalent changes and modifications made in accordance with the scope of the patent application of the present invention or the scope of the invention are covered by the scope of the invention.

Claims (26)

A gas-liquid mixing mechanism, comprising: a first nitrogen dissolving device, comprising: a first collecting pipe; a first thinning pipe connected to the first collecting pipe, wherein the first thinning pipe is provided with a first fine pipe The first refining device refines the nitrogen gas into a nitrogen gas bubble; and a first accumulator tube, wherein a nitrogen gas and a chemical liquid flow from the first manifold to the first refining tube, Connected to the first refinement tube, wherein a diameter of the first accumulator tube is larger than a diameter of the first refinement tube to reduce a flow rate of the chemical solution and pressurize the nitrogen gas bubble to mix the nitrogen gas bubble into The liquid medicine is a first liquid medicine with nitrogen gas bubbles, wherein the first pressure accumulating cylinder comprises a first component, a second component and a third component connected in sequence, one side of the first component is connected The first thinning tube, the first component to the second component form a diverging structure, the second component to the third component form a tapered structure; and a pressure reducing valve module is connected to the first An accumulator valve for regulating and accumulating the first nitrogen gas bubble in the first accumulator The pressure of the liquid. The gas-liquid mixing mechanism of claim 1, further comprising: a second nitrogen dissolving device connected between the first accumulator and the pressure reducing valve module, the second nitrogen dissolving device comprising a second manifold; a second thinning tube connected to the second manifold; a second refining device disposed in the second refining tube, wherein the nitrogen and the first nitrogen gas bubble When flowing from the second manifold to the second refinement tube, the second refining device refines the nitrogen gas into the nitrogen gas bubble; a second accumulator tube is connected to the second refining tube, wherein a diameter of the second accumulator tube is larger than a diameter of the second refining tube to reduce the liquid of the first nitrogen gas bubble Flow rate and pressurize the nitrogen gas bubble, so that the nitrogen gas bubble is mixed into the first nitrogen gas bubble liquid to be a second nitrogen gas bubble liquid, and the pressure reducing valve module is used for adjusting and accumulating the second gas. The pressure of the second nitrogen gas bubble in the pressure accumulator. The gas-liquid mixing mechanism of claim 2, wherein the amount of nitrogen gas input to the first manifold is greater than the amount of nitrogen input to the second manifold. The gas-liquid mixing mechanism of claim 2, wherein the diameter of the second accumulator is larger than the diameter of the first accumulator. The gas-liquid mixing mechanism according to claim 2, wherein the diameter of the second accumulator is smaller than the diameter of the first accumulator. The gas-liquid mixing mechanism of claim 2, wherein the diameter of the second thinning tube is smaller than the diameter of the second collecting tube. The gas-liquid mixing mechanism of claim 1, wherein the first refining device comprises a plurality of guiding fins and a plurality of guiding holes, each of the guiding fins refining the nitrogen as the nitrogen Bubbles, the nitrogen gas bubbles and the liquid medicine pass through the respective flow guiding holes. The gas-liquid mixing mechanism of claim 1, wherein the diameter of the first thin tube is smaller than the diameter of the first manifold. A process equipment comprising: a liquid medicine tank for storing a chemical liquid; a processing device for treating a substrate by the liquid medicine provided by the liquid medicine tank; and a gas-liquid mixing mechanism for receiving the medicine liquid tank The liquid-liquid mixing mechanism comprises: a first nitrogen dissolving device comprising: a first collecting pipe; a first thinning tube is connected to the first collecting tube, and a first refining device is disposed in the first refining tube, wherein a nitrogen gas and the liquid medicine flow from the first collecting tube to the first refining tube In the tube, the first refining device refines the nitrogen gas into a nitrogen gas bubble; and a first accumulator tube is connected to the first refining tube, wherein the first accumulator tube has a larger diameter than the first tube Refining the diameter of the tube to reduce the flow rate of the chemical solution and pressurizing the nitrogen gas bubble, so that the nitrogen gas bubble is mixed into the chemical liquid to be a first chemical solution with nitrogen gas bubbles, wherein the first pressure accumulator comprises Connecting one of the first component, the second component and the third component in sequence, one side of the first component is connected to the first thinning tube, and the first component to the second component form a diverging structure, The second component to the third component form a tapered structure; and a pressure reducing valve module is connected to the first pressure accumulating cylinder, wherein the pressure reducing valve module is used for adjusting and accumulating the first pressure accumulating cylinder The pressure of the first chemical solution with nitrogen gas bubbles. The process apparatus of claim 9, wherein the process equipment is a developing machine. The process apparatus of claim 9, further comprising: a second nitrogen dissolving device connected between the first accumulator and the pressure reducing valve module, the second nitrogen dissolving device comprising: a second collecting tube; a second refining tube connected to the second collecting tube, wherein the second refining tube is provided with a second refining device, wherein the nitrogen gas and the first nitrogen gas bubble are When the second manifold flows into the second thinning tube, the second refining device refines the nitrogen gas into the nitrogen gas bubble; and a second accumulator tube is connected to the second refining tube, wherein the second reducting tube The diameter of the second accumulator is larger than the diameter of the second refinement tube to reduce the liquid of the first nitrogen bubble Flow rate and pressurize the nitrogen gas bubble, so that the nitrogen gas bubble is mixed into the first nitrogen gas bubble liquid to be a second nitrogen gas bubble liquid, and the pressure reducing valve module is used for adjusting and accumulating the second gas. The pressure of the second nitrogen gas bubble in the pressure accumulator. The process apparatus of claim 11, wherein the first manifold has a nitrogen amount input to the nitrogen gas greater than a nitrogen amount of the nitrogen gas input to the second manifold. The process equipment of claim 11, wherein the diameter of the second accumulator is larger than the diameter of the first accumulator. The process equipment of claim 11, wherein the diameter of the second accumulator is smaller than the diameter of the first accumulator. The process equipment of claim 11, wherein the diameter of the second thin tube is smaller than the diameter of the second manifold. The process apparatus of claim 9, wherein the first refining device comprises a plurality of flow guiding fins and a plurality of flow guiding holes, each of the guiding fins refining the nitrogen gas into the nitrogen gas bubbles. The nitrogen gas bubbles and the chemical liquid pass through the respective flow guiding holes. The process equipment of claim 9, wherein the diameter of the first thin tube is smaller than the diameter of the first manifold. The process equipment of claim 9, further comprising: a first conductivity meter connected to the gas-liquid mixing mechanism; and a second conductivity meter connected to the liquid tank. A gas-liquid mixing method comprises the steps of: inputting a nitrogen gas to a chemical liquid; refining the nitrogen gas into a nitrogen gas bubble, and pressurizing the nitrogen gas bubble to mix the nitrogen gas bubble into the chemical liquid to be a first nitrogen gas a liquid medicine for bubbling; and a liquid medicine for accumulating the first nitrogen gas bubble, wherein the first chemical liquid having a nitrogen gas bubble is a first thin tube flows into a first pressure accumulating tube, wherein the first pressure accumulating tube comprises a first component, a second component and a third component connected in sequence, one side of the first component being connected The first thinning tube, the first component to the second component form a diverging structure, and the first nitrogen gas bubble liquid flows from the first component to the second component to pressurize the nitrogen gas bubble. The second component to the third component form a tapered structure, and a pressure reducing valve module is used for adjusting and accumulating the pressure of the first nitrogen gas bubble in the first pressure accumulating cylinder. The gas-liquid mixing method of claim 19, wherein the step of mixing the nitrogen gas bubble into the chemical liquid is the first chemical liquid having a nitrogen gas bubble, comprising the steps of: The chemical liquid flows into the first thinning tube, and a first refining device in the first thinning tube refines the nitrogen gas into the nitrogen gas bubbles. The gas-liquid mixing method according to claim 20, wherein the step of mixing the nitrogen gas bubble into the chemical liquid to be the first chemical liquid having nitrogen gas bubbles comprises the following steps: the first pressure accumulation The diameter of the tube is larger than the diameter of the first thin tube, so as to reduce the flow rate of the chemical solution and pressurize the nitrogen gas bubble, so that the nitrogen gas bubble is mixed into the chemical liquid to be the first chemical liquid with nitrogen gas bubbles. The gas-liquid mixing method of claim 19, further comprising: inputting the nitrogen gas to the first chemical solution having a nitrogen gas bubble; refining the nitrogen gas into the nitrogen gas bubble, and pressurizing the nitrogen gas bubble to make the A nitrogen gas bubble is mixed into the first nitrogen gas bubble liquid to be a second nitrogen gas bubble liquid; and the second nitrogen gas bubble liquid is accumulated. The gas-liquid mixing method of claim 22, wherein the step of mixing the nitrogen gas bubble into the first chemical liquid having a nitrogen gas bubble is the liquid chemical solution of the second nitrogen gas bubble, comprising the following steps : when the nitrogen gas and the first chemical solution having nitrogen gas bubbles flow into a second thinning tube, the first A second refining device in the two refinement tubes refines the nitrogen gas into the nitrogen gas bubbles. The gas-liquid mixing method according to claim 23, wherein the step of mixing the nitrogen gas bubble into the first chemical liquid having a nitrogen gas bubble is the liquid chemical solution of the second nitrogen gas bubble, comprising the following steps Dissolving the nitrogen gas bubble and the first nitrogen gas bubble from the second thin tube into a second pressure accumulator, wherein the diameter of the second pressure tube is larger than the diameter of the second thin tube In order to reduce the flow rate of the first nitrogen gas bubble liquid and pressurize the nitrogen gas bubble, the nitrogen gas bubble is mixed into the first nitrogen gas bubble liquid to be the second nitrogen gas bubble liquid. The gas-liquid mixing method according to claim 22, wherein the amount of nitrogen gas input to the chemical liquid is greater than the amount of nitrogen gas input to the first nitrogen gas bubble. The gas-liquid mixing method according to claim 24, wherein the step of accumulating the second chemical liquid having a nitrogen gas bubble comprises the step of: making the second chemical liquid having a nitrogen gas bubble from the second The refining tube flows into the second accumulator tube, and the pressure reducing valve module is configured to adjust and accumulate the pressure of the second nitrogen gas bubble in the second accumulator.