TWI647345B - Copper strip, electroplated copper strip, lead frame and LED module - Google Patents

Copper strip, electroplated copper strip, lead frame and LED module Download PDF

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TWI647345B
TWI647345B TW103121959A TW103121959A TWI647345B TW I647345 B TWI647345 B TW I647345B TW 103121959 A TW103121959 A TW 103121959A TW 103121959 A TW103121959 A TW 103121959A TW I647345 B TWI647345 B TW I647345B
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plating layer
copper strip
growth
copper
underlying
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TW201506209A (en
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小平宗男
古德浩一
山本佳記
青柳幸司
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日商Sh銅業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B9/041Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/12Electroplating: Baths therefor from solutions of nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/46Electroplating: Baths therefor from solutions of silver
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/416Reflective
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/702Amorphous
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/206Organic displays, e.g. OLED

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Led Device Packages (AREA)

Abstract

本發明提供一種可形成反射率更高的表面電鍍層的銅帶、電鍍銅帶以及導線架。一種具有基底電鍍層生長面的銅帶,以基底電鍍層的生長速度在銅帶的基底電鍍層生長面形成為面內(in-plane)均一的方式,在基底電鍍層生長面,形成有非晶質的區域或由微細的晶粒形成的區域中的至少任一個。 The present invention provides a copper strip, a plated copper strip, and a lead frame that can form a surface plating layer having a higher reflectance. A copper strip having a growth surface of a base plating layer formed in an in-plane uniform manner in a growth rate of a base plating layer of a copper strip at a growth rate of a base plating layer, and a non-formed growth surface of the base plating layer At least any one of a crystalline region or a region formed of fine crystal grains.

Description

銅帶、電鍍銅帶、導線架及LED模組 Copper strip, electroplated copper strip, lead frame and LED module

本發明係有關較佳用於導線架的銅帶、電鍍銅帶及導線架。 The invention relates to copper strips, electroplated copper strips and lead frames which are preferably used for lead frames.

近年來,發光二極體(LED,Light Emitting Diode)藉由具備使用銅帶而形成的導線架、以及搭載於導線架上的LED晶片等發光元件而構成。在這樣的銅帶上形成有例如作為基底電鍍層的銅(Cu)電鍍層或鎳(Ni)電鍍層中的至少任一個、以及使來自發光元件的光反射的銀(Ag)電鍍層作為表面電鍍層。Ag電鍍層生長在銅帶之搭載發光元件的一側的面上。Ag電鍍層在整個可見光波長區域中的反射率優異。因而,當設置Ag電鍍層時,則從發光元件發出的光被Ag電鍍層反射,從而可將源自發光元件的光向外部高效地出射。其結果是可進一步提高LED(LED模組)的發光輸出(光度)、光束、亮度等光學性能。 In recent years, a light-emitting diode (LED) has a light-emitting element such as a lead frame formed using a copper strip and an LED chip mounted on a lead frame. On such a copper strip, for example, at least one of a copper (Cu) plating layer or a nickel (Ni) plating layer as a base plating layer, and a silver (Ag) plating layer that reflects light from the light-emitting element are formed as a surface. Plating. The Ag plating layer is grown on the surface of the copper ribbon on the side on which the light-emitting element is mounted. The Ag plating layer is excellent in reflectance in the entire visible light wavelength region. Therefore, when the Ag plating layer is provided, the light emitted from the light emitting element is reflected by the Ag plating layer, so that light originating from the light emitting element can be efficiently emitted to the outside. As a result, optical performances such as light output (luminance), light beam, and brightness of the LED (LED module) can be further improved.

關於LED的光學性能的評價,例如利用藉由使用積分光度計之積分球(或稱布利希球integrating sphere or ulbrichi sphere)測定出的總光通量來進行。即,關於LED的光學性能,藉由向積分球中施加樣品光源,以由感測器接受光的方式進行測定從而評價。因此,LED的光學性能較大地受到LED所具備的Ag電鍍層等表面電鍍層的表面狀態的影響。例如,Ag電鍍層等的表面的光澤度低、產生光澤不均一時,則藉由積分球法測定出的總光通量變低,評價為光學性能低。即,在Ag電鍍層等的表面產生光澤不均一時,則Ag電鍍層的反射率降低,LED的光學性能降低。 The evaluation of the optical performance of the LED is performed, for example, by using the total luminous flux measured by an integrating sphere (or an integrating sphere or ulbrichi sphere) using an integrating photometer. That is, regarding the optical performance of the LED, the sample light source is applied to the integrating sphere, and the light is received by the sensor to be evaluated. Therefore, the optical performance of the LED is largely affected by the surface state of the surface plating layer such as the Ag plating layer provided in the LED. For example, when the gloss of the surface of the Ag plating layer or the like is low and uneven gloss is generated, the total luminous flux measured by the integrating sphere method is lowered, and the optical performance is evaluated to be low. That is, when gloss unevenness occurs on the surface of the Ag plating layer or the like, the reflectance of the Ag plating layer is lowered, and the optical performance of the LED is lowered.

因此,例如提出如下的技術,即,以形成於金屬基材(例如銅帶)的表面的加工變質層的厚度為規定值以下的方式,去除加工變質層(例如參照專利文獻1)。由此,在對這樣的金屬基材上實施Ag電鍍時,抑制電 鍍的異常析出。因此,可抑制Ag電鍍層的反射率的降低。 For this reason, for example, a work-affected layer is removed so that the thickness of the work-affected layer formed on the surface of the metal substrate (for example, a copper tape) is equal to or less than a predetermined value (see, for example, Patent Document 1). Therefore, when Ag plating is performed on such a metal substrate, electricity is suppressed. Abnormal precipitation of plating. Therefore, the decrease in the reflectance of the Ag plating layer can be suppressed.

現有技術文獻 Prior art literature

專利文獻 Patent literature

專利文獻1:日本特開2007-39804號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-39804

近年來,LED的使用用途在擴大。由此,要求進一步提高LED的光學性能。即,要求使Ag電鍍層等表面電鍍層的反射率變得更高。但是,在習知那樣之提高Ag電鍍層的反射率的方法中,難以滿足所要求的Ag電鍍層的反射率。 In recent years, the use of LEDs has expanded. Therefore, it is required to further improve the optical performance of the LED. That is, it is required to make the reflectance of the surface plating layer such as the Ag plating layer higher. However, in the conventional method of increasing the reflectance of the Ag plating layer, it is difficult to satisfy the required reflectance of the Ag plating layer.

本發明的目的在於解決上述課題,提供可形成反射率更高的表面電鍍層的銅帶、電鍍銅帶以及導線架。 An object of the present invention is to solve the above problems and to provide a copper strip, a plated copper strip, and a lead frame which can form a surface plating layer having a higher reflectance.

為解決上述課題,因而本發明以以下所述來構成。 In order to solve the above problems, the present invention is constructed as follows.

本發明的第1實施方式提供一種銅帶,其為具有基底電鍍層生長面的銅帶,其中以前述基底電鍍層的生長速度在前述銅帶的基底電鍍層生長面形成為面內均一的方式,而在前述基底電鍍層生長面,形成有非晶質的區域或由微細的晶粒形成的區域中的至少任一個。 A first embodiment of the present invention provides a copper strip which is a copper strip having a growth layer of a base plating layer, wherein a growth rate of the underlying plating layer is formed in an in-plane uniform manner on a growth surface of a base plating layer of the copper strip. At least one of an amorphous region or a region formed of fine crystal grains is formed on the growth surface of the underlying plating layer.

本發明的第2實施方式提供一種第1實施方式的銅帶,其中,前述基底電鍍層生長面,為藉由利用EBSD法以測定區域為90μm×120μm並且以測定間隔為0.2μm進行測定而獲得的可靠性指數為0.1以下之測定點的比例為50%以上的面。 According to a second aspect of the present invention, in the copper strip according to the first aspect of the present invention, the base plating layer growth surface is obtained by measuring by using an EBSD method that the measurement region is 90 μm × 120 μm and the measurement interval is 0.2 μm. The reliability index is 0.1 or less, and the ratio of the measurement points is 50% or more.

本發明的第3實施方式提供一種銅帶,其為具有基底電鍍層生長面的銅帶,前述銅帶的基底電鍍層生長面是,藉由利用EBSD法以測定區域為90μm×120μm並且以測定間隔為0.2μm進行測定而獲得的可靠性指數為0.1以下之測定點的比例為50%以上的面。 A third embodiment of the present invention provides a copper strip which is a copper strip having a growth layer of a base plating layer, and a growth surface of the base plating layer of the copper strip is measured by using an EBSD method to have a measurement area of 90 μm × 120 μm and The ratio of the measurement points whose reliability index is 0.1 or less, which is measured by the interval of 0.2 μm, is 50% or more.

本發明的第4實施方式提供第2或第3實施方式的銅帶,其中,前述可靠性指數的測定是在利用化學蝕刻而去除50nm以上的前述基底 電鍍層生長面之後進行。 According to a fourth aspect of the present invention, in the copper strip of the second or third aspect, the reliability index is measured by removing the substrate having a thickness of 50 nm or more by chemical etching. The plating layer is grown after the growth surface.

本發明的第5實施方式提供一種電鍍銅帶,其中,在前述第1至第4中任一個實施方式的銅帶的基底電鍍層生長面,作為基底電鍍層,藉由生長而形成有Cu電鍍層或Ni電鍍層中的至少任一個。 According to a fifth aspect of the present invention, there is provided a plated copper strip, wherein the base plating layer growth surface of the copper strip according to any one of the first to fourth embodiments is formed as a base plating layer by Cu plating. At least one of a layer or a Ni plating layer.

本發明的第6實施方式提供第5實施方式的電鍍銅帶,其中,在前述基底電鍍層上,作為將光反射的表面電鍍層,藉由生長而形成有Ag電鍍層。 According to a sixth aspect of the present invention, there is provided a plated copper strip according to the fifth aspect of the present invention, wherein an Ag plating layer is formed on the underlying plating layer as a surface plating layer that reflects light.

本發明的第7實施方式提供一種導線架,其藉由使用第5或第6實施方式的電鍍銅帶而形成。 A seventh embodiment of the present invention provides a lead frame formed by using the electroplated copper strip of the fifth or sixth embodiment.

根據本發明的銅帶、電鍍銅帶以及導線架,可形成反射率更高的表面電鍍層。 According to the copper strip, the electroplated copper strip, and the lead frame of the present invention, a surface plating layer having a higher reflectance can be formed.

1‧‧‧電鍍銅帶 1‧‧‧Electroplated copper strip

2‧‧‧銅帶 2‧‧‧ copper strip

3‧‧‧基底電鍍層 3‧‧‧Base plating

4‧‧‧表面電鍍層 4‧‧‧Surface plating

附圖說明第1圖為本發明一實施方式之電鍍銅帶的示意剖面圖;第2圖所示為本發明一實施方式之銅帶和電鍍銅帶的製造步驟的流程圖;第3圖為本發明一實施例之銅帶的基底電鍍層生長面的IPF圖;第4圖所示為本發明一實施例之CI值與CI值的累計比例的關係的曲線圖;第5圖所示為本發明一實施例之形成於銅帶的Ag電鍍層的照射光的波長與反射率的關係的曲線圖;第6圖(a)為本發明一實施例之形成於銅帶的Ag電鍍層的表面的SEM圖像,(b)為本發明一比較例之形成於銅帶的Ag電鍍層的表面的SEM圖像;以及第7圖為習知形成於銅帶的Ag電鍍層的表面的SEM圖像。 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing an electroplated copper strip according to an embodiment of the present invention; and FIG. 2 is a flow chart showing a manufacturing step of a copper strip and an electroplated copper strip according to an embodiment of the present invention; An IPF diagram of a growth layer of a base plating layer of a copper strip according to an embodiment of the present invention; and FIG. 4 is a graph showing a relationship between a CI value and a cumulative ratio of CI values according to an embodiment of the present invention; A graph showing the relationship between the wavelength of the irradiation light of the Ag plating layer formed on the copper strip and the reflectance according to an embodiment of the present invention; and FIG. 6(a) is an Ag plating layer formed on the copper strip according to an embodiment of the present invention. SEM image of the surface, (b) an SEM image of the surface of the Ag plating layer formed on the copper strip of a comparative example of the present invention; and FIG. 7 is a SEM of the surface of the Ag plating layer conventionally formed on the copper strip image.

(發明人等所獲得的見解) (information gained by the inventor, etc.)

首先,在說明本發明的實施方式之前,對發明人等所獲得的見解進行說明。 First, the findings obtained by the inventors and the like will be described before explaining the embodiments of the present invention.

根據本發明人等的深入研究可知,上述形成於銅帶之作為將光反射的表面電鍍層的Ag電鍍層的反射率降低的主要原因是,例如如第7圖所示,形成於Ag電鍍層的表面的山脈的凸部(山脈狀凸部)。第7圖為習知之形成於銅帶的Ag電鍍層表面的SEM圖像。第7圖所示的SEM圖像以如下所述方式拍攝:對於具備銅帶、作為基底電鍍層的Cu電鍍層或Ni電鍍層中的至少任一個、以及作為表面電鍍層的Ag電鍍層的樣品,即,對於電鍍銅帶,在紙面的上下方向上傾斜70度地從Ag電鍍層的一側拍攝。這是因為,從樣品的正上方拍攝時,則不易觀察到山脈狀凸部。在第7圖中,紙面的左右方向形成為銅帶的軋製方向。根據第7圖可確認,沿著銅帶的軋製方向而形成有山脈狀凸部。例如可確認,在軋製方向以10μm~30μm的長度而連續地形成有山脈狀凸部。另外可確認,在與銅帶的軋製方向正交的方向上以30μm~100μm間隔形成有多個山脈狀凸部。 According to intensive studies by the present inventors, the reason why the reflectance of the Ag plating layer formed as a surface plating layer for reflecting light on the copper strip is reduced is, for example, as shown in FIG. The surface of the mountain's convex part (mountain-like convex part). Figure 7 is a SEM image of a conventional Ag plating layer formed on a copper strip. The SEM image shown in Fig. 7 was taken as follows: Sample of at least one of a Cu plating layer or a Ni plating layer having a copper strip, a base plating layer, and an Ag plating layer as a surface plating layer That is, the electroplated copper strip was taken from one side of the Ag plating layer by tilting 70 degrees in the up and down direction of the paper surface. This is because it is difficult to observe the mountain-like convex portion when photographing from directly above the sample. In Fig. 7, the left-right direction of the paper surface is formed as the rolling direction of the copper strip. It can be confirmed from Fig. 7 that a mountain-like convex portion is formed along the rolling direction of the copper strip. For example, it has been confirmed that the mountain-like convex portion is continuously formed in the rolling direction with a length of 10 μm to 30 μm. Further, it was confirmed that a plurality of mountain-like convex portions were formed at intervals of 30 μm to 100 μm in the direction orthogonal to the rolling direction of the copper strip.

此一山脈狀凸部是起因於銅帶的生長基底電鍍層的面(基底電鍍層生長面)之結晶組織的結晶配向而形成。一般而言,銅帶藉由反覆進行規定次數的軋製加工和退火加工而形成。在該過程中,關於銅帶的軋製面的結晶組織,具有與軋製方向相同的配向的結晶配向及與軋製方向接近之配向的結晶配向之晶粒傾向於發生連接。作為基底電鍍層的Cu電鍍層或Ni電鍍層的生長依賴於銅帶的軋製面、即,基底電鍍層生長面的晶粒的結晶配向。由此,基底電鍍層的生長速度根據基底電鍍層生長面的晶粒的結晶配向而不同。這是因為,在銅帶中使用的銅(Cu)與基底電鍍層中使用的銅(Cu)、鎳(Ni)是相同的FCC金屬,並且,在基底電鍍層中使用的Cu、Ni的平均粒徑與在銅帶中使用的Cu的粒徑是大致同程度,因此基底電鍍層容易接受銅帶的基底電鍍層生長面的晶粒(Cu)的結晶配向而磊晶地生長。由此,在基底電鍍層生長面,基底電鍍層面內不均一地生長,從而在基底電鍍層生長面上生長(電沉積)的基底電鍍層的成膜量(生長量)的方面會產生差異。即,沿著銅帶的軋製方向,會生成基底電鍍層的厚度為厚的地方和薄的地方。由此,在基底電鍍層的表面會形成山脈狀凸部。其結果可知,在基底 電鍍層上生長而形成的Ag電鍍層的表面會形成山脈狀凸部,Ag電鍍層的反射率會降低。又,在基底電鍍層生長面,存在有在進行軋製加工時轉印自軋製輥的表面的筋等凹凸。但是,在軋製加工時藉由軋製輥而轉印於基底電鍍層生長面的凹凸與形成於Ag電鍍層的表面的山脈狀凸部沒有直接關係。 This mountain-like convex portion is formed by crystal alignment of the crystal structure of the surface of the base plating layer (base plating growth surface) of the copper strip. In general, a copper strip is formed by repeatedly performing a rolling process and an annealing process a predetermined number of times. In this process, the crystal structure of the rolled surface of the copper strip tends to be connected to the crystal orientation of the alignment in the same direction as the rolling direction and the crystal orientation of the alignment in the direction of the rolling direction. The growth of the Cu plating layer or the Ni plating layer as the underlying plating layer depends on the rolling plane of the copper strip, that is, the crystal orientation of the crystal grains of the growth layer of the underlying plating layer. Thereby, the growth rate of the underlying plating layer differs depending on the crystal alignment of the crystal grains of the growth layer of the underlying plating layer. This is because the copper (Cu) used in the copper strip is the same FCC metal as the copper (Cu) and nickel (Ni) used in the base plating layer, and the average of Cu and Ni used in the base plating layer. Since the particle diameter is substantially the same as the particle diameter of Cu used in the copper strip, the underlying plating layer easily receives the crystal orientation of the crystal grains (Cu) on the growth layer of the underlying plating layer of the copper strip and is epitaxially grown. Thereby, uneven growth occurs in the underlying plating layer on the growth surface of the underlying plating layer, so that a difference in film formation amount (growth amount) of the underlying plating layer grown (electrodeposited) on the growth layer of the underlying plating layer occurs. That is, along the rolling direction of the copper strip, a place where the thickness of the underlying plating layer is thick and a thin place are generated. Thereby, a mountain-like convex portion is formed on the surface of the underlying plating layer. The result is known to be on the substrate. The surface of the Ag plating layer formed by growing on the plating layer forms a mountain-like convex portion, and the reflectance of the Ag plating layer is lowered. Further, on the base plating layer growth surface, there are irregularities such as ribs transferred from the surface of the rolling roll during the rolling process. However, the unevenness transferred to the growth surface of the underlying plating layer by the rolling roll during the rolling process is not directly related to the mountain-like convex portion formed on the surface of the Ag plating layer.

因此,本發明人等認為,根據銅帶的基底電鍍層生長面的結晶組織的狀態,需要將Ag電鍍層的表面變得更平整。即認為,為形成反射率更高的Ag電鍍層,因而需要調整銅帶的基底電鍍層生長面的結晶組織(晶粒)的狀態。本發明是基於發明人等所發現的上述見解而提出。 Therefore, the present inventors thought that it is necessary to make the surface of the Ag plating layer flatter depending on the state of the crystal structure of the growth layer of the base plating layer of the copper strip. In other words, in order to form an Ag plating layer having a higher reflectance, it is necessary to adjust the state of the crystal structure (grain) of the growth layer of the underlying plating layer of the copper strip. The present invention has been made based on the above findings discovered by the inventors and the like.

(1)銅帶以及電鍍銅帶的構成 (1) Composition of copper strip and electroplated copper strip

首先,關於本發明一實施方式之銅帶以及電鍍銅帶的構成,主要使用第1圖進行說明。第1圖為本實施方式的電鍍銅帶1的示意剖面圖。 First, the configuration of the copper strip and the electroplated copper strip according to an embodiment of the present invention will be mainly described using FIG. Fig. 1 is a schematic cross-sectional view showing a plated copper strip 1 of the present embodiment.

如第1圖所示,電鍍銅帶1由具備銅帶2、基底電鍍層3、表面電鍍層4而構成。在銅帶2的至少任一個主表面上,藉由生長而形成基底電鍍層3。銅帶2兼具良好的機械強度和電傳導性。此銅帶2藉由對銅、銅合金等的鑄塊進行軋製處理、退火處理等而形成。 As shown in Fig. 1, the plated copper strip 1 is composed of a copper strip 2, a base plating layer 3, and a surface plating layer 4. On the at least one main surface of the copper strip 2, the underlying plating layer 3 is formed by growth. Copper strip 2 combines good mechanical strength and electrical conductivity. The copper strip 2 is formed by subjecting an ingot such as copper or a copper alloy to rolling treatment, annealing treatment, or the like.

作為銅帶2的形成材料,可使用含有鐵(Fe)、鎳(Ni)、鈷(Co)等的銅合金。例如,作為銅帶2的形成材料,使用含有Fe和磷(P)的Cu-Fe-P系的銅合金即可。作為Cu-Fe-P系的銅合金,例如廣泛地知曉含有0.05wt%~0.15wt%的Fe以及0.025wt%~0.04wt%的P的銅合金(C19210),含有2.1wt%~2.6wt%的Fe、0.015wt%~0.15wt%的P以及0.05wt%~0.20wt%的鋅(Zn)的銅合金(C19400)。此外,例如,作為銅帶2的形成材料,也可使用無氧銅(OFC,Oxyger Free Copper)、含有鋯(Zr)的Cu-Zr系的銅合金(例如C15150)、分別含有規定量的Zn和Ni和P以及矽(Si)的科森(Corson)系的銅合金等。因而,認為本實施方式中,使用銅合金而形成的銅合金條也包含於銅帶2中。 As a material for forming the copper strip 2, a copper alloy containing iron (Fe), nickel (Ni), cobalt (Co) or the like can be used. For example, as the material for forming the copper strip 2, a Cu-Fe-P-based copper alloy containing Fe and phosphorus (P) may be used. As the Cu-Fe-P-based copper alloy, for example, a copper alloy (C19210) containing 0.05% by weight to 0.15% by weight of Fe and 0.025% by weight to 0.04% by weight of P, which is 2.1% by weight to 2.6% by weight, is widely known. Fe, 0.015 wt% to 0.15 wt% of P and 0.05 wt% to 0.20 wt% of a zinc (Zn) copper alloy (C19400). Further, for example, as a material for forming the copper strip 2, an oxygen-free copper (OFC, Oxyger Free Copper) or a Cu-Zr-based copper alloy containing zirconium (Zr) (for example, C15150) may be used, and each of them may contain a predetermined amount of Zn. And copper alloys of Ni and P and Corson of bismuth (Si). Therefore, it is considered that the copper alloy strip formed using a copper alloy in the present embodiment is also included in the copper strip 2.

關於銅帶2的生長基底電鍍層的面(在以下,亦簡稱為“基底電鍍層生長面”)、即,銅帶2的軋製面,以基底電鍍層3的生長速度在基底電鍍層生長面形成為面內均一的方式形成。即,在基底電鍍層生長面,形成有非晶質的區域或由晶粒粒徑為非常小的(微細的)晶粒(例如以直徑換算為10nm左右以下的晶粒)形成的區域(以下,亦稱為“微細晶粒區域”)中的至少 任一個。另外,非晶質的區域或微細晶粒區域中的至少任一個在基底電鍍層生長面內均一地分佈即可。由此,作為基底電鍍層3的例如銅(Cu)電鍍層、鎳(Ni)電鍍層的生長速度在基底電鍍層生長面內(in-plane)形成為面內均一。因此,基底電鍍層3的厚度在基底電鍍層生長面形成為面內均一,基底電鍍層3的表面形成為平整。其結果是如後所述,基底電鍍層3上形成的作為表面電鍍層4的將光反射的銀(Ag)電鍍層的表面變為平整,因而可提高表面電鍍層4的反射率。 Regarding the surface of the base plating layer of the copper strip 2 (hereinafter, also simply referred to as "base plating growth surface"), that is, the rolled surface of the copper strip 2 is grown on the underlying plating layer at the growth rate of the underlying plating layer 3. The faces are formed in a uniform manner in the plane. In other words, in the base plating layer growth surface, an amorphous region or a region in which crystal grains having a very small crystal grain size (fine crystal grains of about 10 nm or less in terms of diameter) are formed (hereinafter, , also known as "fine grain area") Any one. Further, at least one of the amorphous region or the fine crystal grain region may be uniformly distributed in the growth surface of the underlying plating layer. Thereby, the growth rate of, for example, a copper (Cu) plating layer or a nickel (Ni) plating layer as the underlying plating layer 3 is formed in-plane uniformity in the in-plane growth of the underlying plating layer. Therefore, the thickness of the base plating layer 3 is formed to be in-plane uniform in the growth surface of the base plating layer, and the surface of the base plating layer 3 is formed to be flat. As a result, as will be described later, the surface of the silver (Ag) plating layer which is light-reflected as the surface plating layer 4 formed on the base plating layer 3 is flattened, so that the reflectance of the surface plating layer 4 can be improved.

關於基底電鍍成層生長面,藉由利用EBSD(Electron Back Scattering Diffracted Pattern,電子背散射圖案)法以測定區域(觀察區域)為90μm×120μm並且以測定間隔(步長)為0.2μm進行測定而獲得的可靠性指數(CI值,Confidence Index值)為0.1以下之測定點的比例為50%以上,較佳為68%以上的面即可。 The base plating plating growth surface was obtained by measuring with an EBSD (Electron Back Scattering Diffracted Pattern) method in which the measurement region (observation region) was 90 μm×120 μm and the measurement interval (step size) was 0.2 μm. The reliability index (CI value, Confidence Index value) is 0.1% or less, and the ratio of the measurement points is 50% or more, preferably 68% or more.

CI值為0.1以下的測定點的比例是指測定區域中的CI值為0.1以下的測定點相對於測定點總數的比例。例如,測定區域為90μm×120μm、步長為0.2μm的情況下,測定區域內的測定點的總數為270,000點。因此,在此情況下,CI值為0.1以下的測定點的比例為50%以上是指CI值為0.1以下的測定點的數量為135,000點以上。 The ratio of the measurement points having a CI value of 0.1 or less refers to the ratio of the measurement points having a CI value of 0.1 or less in the measurement region to the total number of measurement points. For example, when the measurement area is 90 μm × 120 μm and the step size is 0.2 μm, the total number of measurement points in the measurement area is 270,000 points. Therefore, in this case, the ratio of the measurement points having a CI value of 0.1 or less is 50% or more, and the number of measurement points having a CI value of 0.1 or less is 135,000 or more.

另外,CI值是表示藉由利用EBSD法、即,使用EBSD裝置將基底電鍍層生長面的晶粒的結晶配向進行測定並且解析得到的結果的可靠性(測定精度)的值。藉由使用EBSD法,可獲得銅帶2的僅僅頂面的資訊。例如,在將加速電壓設為20kV的情況下,可僅僅獲得從基底電鍍層生長面到30nm~50nm左右的深度為止的資訊。另外,可對每個測定點測定CI值。在EBSD法中,不易正確地測定以下區域的晶粒的結晶配向:非晶質的區域以及在1個測定點中包含具有不同結晶配向的多個微細的晶粒(例如以直徑換算為10nm左右以下的晶粒)的區域(即微細晶粒區域)。因此,在如此之測定點上,基於EBSD法的解析結果的可靠性降低,CI值變低。即,關於CI值為0.1以下的測定點,判定為存在有利用EBSD法而沒有正確地測定晶粒的結晶配向的可能性。因此,將CI值為0.1以下的測定點判定為非晶質的區域或微細晶粒區域。與此相對,關於CI值超過0.1的測定點,判定為利用EBSD法而正確地測定晶粒的結晶配向,進行解析。即,將CI值超過0.1的測定點 判定為結晶化進行、結晶性高的區域(不是非晶質的區域或微細晶粒區域的區域)。又,CI值的測定方法詳見後述。 In addition, the CI value is a value indicating the reliability (measurement accuracy) of the result of measurement and analysis of the crystal orientation of the crystal grains of the underlying plating layer growth surface by the EBSD method using the EBSD method. By using the EBSD method, information on only the top surface of the copper strip 2 can be obtained. For example, when the accelerating voltage is set to 20 kV, only information from the growth surface of the underlying plating layer to a depth of about 30 nm to 50 nm can be obtained. In addition, the CI value can be determined for each measurement point. In the EBSD method, it is difficult to accurately measure the crystal orientation of crystal grains in the following regions: an amorphous region and a plurality of fine crystal grains having different crystal orientations in one measurement point (for example, about 10 nm in diameter) The area of the following crystal grains (ie, the fine grain area). Therefore, at such a measurement point, the reliability of the analysis result based on the EBSD method is lowered, and the CI value is lowered. In other words, regarding the measurement point having a CI value of 0.1 or less, it is determined that there is a possibility that the crystal alignment of the crystal grains is not accurately measured by the EBSD method. Therefore, the measurement point having a CI value of 0.1 or less is determined to be an amorphous region or a fine crystal grain region. On the other hand, in the measurement point where the CI value exceeds 0.1, it is determined that the crystal orientation of the crystal grains is accurately measured by the EBSD method and analyzed. That is, the measurement point where the CI value exceeds 0.1 It is determined that the crystallization is progressing and the crystallinity is high (not the amorphous region or the fine crystal grain region). Further, the method of measuring the CI value will be described later.

如上所述,基底電鍍層生長面是在規定的測定區域內CI值為0.1以下的測定點的比例為50%以上、較佳為68%以上的面即可。如是為如此的基底電鍍層生長面,那麼實質性地,具有相同的結晶配向的晶粒不會沿著銅帶2的軋製方向以10μm~30μm的長度而連續地形成。因此,基底電鍍層3在銅帶2的基底電鍍層生長面上生長而形成時,可使基底電鍍層3的生長速度在基底電鍍層生長面為面內均一。由此,基底電鍍層3在基底電鍍層生長面上面內均一地生長,使基底電鍍層3的表面形成為平整。其結果是可將在基底電鍍層3上形成的表面電鍍層4的表面形成為平整,可提高表面電鍍層4的反射率。 As described above, the base plating layer growth surface may have a ratio of a measurement point having a CI value of 0.1 or less in a predetermined measurement region of 50% or more, preferably 68% or more. In the case of such a base plating layer growth surface, substantially, crystal grains having the same crystal orientation are not continuously formed along the rolling direction of the copper strip 2 by a length of 10 μm to 30 μm. Therefore, when the underlying plating layer 3 is grown on the growth surface of the underlying plating layer of the copper strip 2, the growth rate of the underlying plating layer 3 can be made uniform in the surface of the underlying plating layer growth surface. Thereby, the underlying plating layer 3 is uniformly grown on the growth surface of the underlying plating layer, so that the surface of the underlying plating layer 3 is formed to be flat. As a result, the surface of the surface plating layer 4 formed on the underlying plating layer 3 can be formed flat, and the reflectance of the surface plating layer 4 can be improved.

另外,CI值為0.1以下的測定點在測定區域內盡可能均勻地分佈即可。由此,可使基底電鍍層3的生長速度在基底電鍍層生長面進一步面內均一。 Further, the measurement points having a CI value of 0.1 or less may be distributed as uniformly as possible within the measurement region. Thereby, the growth rate of the underlying plating layer 3 can be made uniform in the surface of the growth layer of the underlying plating layer.

關於CI值的測定,例如在利用化學蝕刻而在基底電鍍層生長 面(即測定面)去除50nm以上之後進行、較佳為去除50nm以上100nm以下之後進行即可。由此,可去除在基底電鍍層生長面上形成的自然氧化膜、附著於基底電鍍層生長面的污染物質。因此,例如,可抑制將結晶性高的區域判定為非晶質的區域或微細晶粒區域的情況。其結果是可更準確地進行基底電鍍層生長面的CI值的測定。 For the determination of the CI value, for example, in the plating of the base layer by chemical etching After the surface (that is, the measurement surface) is removed by 50 nm or more, it is preferably carried out after removing 50 nm or more and 100 nm or less. Thereby, the natural oxide film formed on the growth surface of the underlying plating layer and the contaminant adhering to the growth surface of the underlying plating layer can be removed. Therefore, for example, it is possible to suppress the case where the region having high crystallinity is determined to be an amorphous region or a fine crystal grain region. As a result, the measurement of the CI value of the growth surface of the underlying plating layer can be performed more accurately.

(CI值的測定方法) (Method for measuring CI value)

以下,對藉由利用EBSD法測定銅帶2的基底電鍍層生長面從而獲得基底電鍍層生長面的CI值的方法進行說明。 Hereinafter, a method of obtaining the CI value of the underlying plating layer growth surface by measuring the growth surface of the underlying plating layer of the copper strip 2 by the EBSD method will be described.

首先,使用例如EBSD裝置,將電子射線照射於銅帶2的基底電鍍層生長面上的多個測定點(照射點),從而在各測定點獲得繞射圖案(電子背散射繞射像)。作為EBSD裝置,可使用例如安裝於日立High-Technologies股份有限公司製的掃描型電子顯微鏡(SU-70)之TSLSolutions股份有限公司製的結晶配向解析(OIM,Orientation Imaging Microscopy)裝置。將電子射線照射於銅帶2的基底電鍍層生長面時,銅帶2以例如70°的傾斜角度而保持。另外,將EBSD裝置的加速電壓設為例如 20kV。由此,可僅僅獲得從基底電鍍層生長面到30nm~50nm左右的深度為止的資訊。 First, an electron beam is irradiated onto a plurality of measurement points (irradiation points) on the growth surface of the base plating layer of the copper strip 2 using, for example, an EBSD apparatus, thereby obtaining a diffraction pattern (electron backscatter diffraction image) at each measurement point. As the EBSD device, for example, an OIM (Orientation Imaging Microscopy) device manufactured by TSLSolutions Co., Ltd., which is a scanning electron microscope (SU-70) manufactured by Hitachi High-Technologies Co., Ltd., can be used. When the electron beam is irradiated onto the base plating growth surface of the copper strip 2, the copper strip 2 is held at an inclination angle of, for example, 70°. In addition, the acceleration voltage of the EBSD device is set to, for example 20kV. Thereby, it is possible to obtain only information from the growth surface of the underlying plating layer to a depth of about 30 nm to 50 nm.

接著,基於所獲得的各測定點的繞射圖案,確定各測定點中的晶粒的結晶配向。即,例如藉由電腦而解析各測定點的繞射圖案,藉由電腦而選擇判斷為可靠性最高的結晶配向。而且,將該選擇出的結晶配向確定為各測定點中的結晶配向。此時,基底電鍍層生長面為非晶質的區域時則無法獲得繞射圖案。另外,基底電鍍層生長面為微細晶粒區域的情況下,即使是利用高分辨能力TEM而獲得晶格像的晶粒,有時也無法在EBSD裝置中獲得繞射圖案。即,基底電鍍層生長面為微細晶粒區域時,則在1個測定點中包含有結晶配向不同的多個微細的晶粒,因而與非晶質的區域同樣地無法獲得繞射圖案。由此,例如藉由電腦而解析繞射圖案時,在基底電鍍層生長面的非晶質的區域、微細晶粒區域,電腦在無法獲得繞射圖案的狀況下在每個測定點選擇隨機的結晶配向。 Next, based on the obtained diffraction pattern of each measurement point, the crystal alignment of the crystal grains in each measurement point was determined. That is, for example, the diffraction pattern of each measurement point is analyzed by a computer, and the crystal alignment which is judged to be the most reliable is selected by the computer. Further, the selected crystal alignment was determined as the crystal alignment in each measurement point. At this time, when the growth surface of the underlying plating layer is an amorphous region, a diffraction pattern cannot be obtained. Further, when the underlying plating layer growth surface is a fine crystal grain region, even if a crystal grain of a lattice image is obtained by high resolution TEM, a diffraction pattern may not be obtained in an EBSD device. In other words, when the underlying plating layer growth surface is a fine crystal grain region, a plurality of fine crystal grains having different crystal orientations are included in one measurement point, and thus a diffraction pattern cannot be obtained similarly to the amorphous region. Therefore, when the diffraction pattern is analyzed by a computer, for example, in an amorphous region or a fine crystal grain region on the growth surface of the underlying plating layer, the computer selects a random sampling point at each measurement point without obtaining a diffraction pattern. Crystallographic alignment.

具體而言,在各測定點的結晶配向的確定以以下記載的方式而進行。例如,利用EBSD法測定結晶配向而解析的面(即基底電鍍層生長面)是銅(Cu)等FCC金屬的情況下,EBSD裝置(EBSD裝置所具備的OIM解析軟體)通常從各測定點的繞射圖案分別檢測7頻帶(檢測線)。而且,從檢測出的7頻帶選擇3頻帶,根據角度關係而推定結晶配向。從7頻帶選擇3頻帶的組合為35種。因此,對於35種全部的組合中的每個組合推定結晶配向。並不限定為在各組合中推定的結晶配向全都形成為相同的配向。即,在各組合中推定的結晶配向不限定為1個,存在有推定多個結晶配向的情況。在對於35種全部的組合中的每個組合而推定出的結晶配向之中,將最多地推定出的結晶配向確定為測定點中的結晶配向。 Specifically, the determination of the crystal orientation at each measurement point is carried out as described below. For example, when the surface to be analyzed by the EBSD method for measuring the crystal orientation (that is, the underlying plating layer growth surface) is an FCC metal such as copper (Cu), the EBSD device (the OIM analysis software included in the EBSD device) is usually used from each measurement point. The diffraction pattern detects 7 bands (detection lines), respectively. Further, three bands are selected from the detected seven bands, and the crystal alignment is estimated based on the angular relationship. The combination of three bands selected from the seven bands is 35 types. Therefore, the crystal orientation is estimated for each of the 35 combinations. It is not limited to the fact that the crystal alignments estimated in each combination are all formed in the same alignment. In other words, the crystal alignment estimated in each combination is not limited to one, and there are cases where a plurality of crystal alignments are estimated. Among the crystal orientations estimated for each of the 35 combinations, the crystal orientation which is most estimated is determined as the crystal orientation in the measurement point.

接著,基於所獲得的各測定點中的結晶配向,算出相鄰的測定點中的結晶配向的配向差。如果該配向差小於容許角度(Tolerance Angle)(例如5°),那麼視為相同的晶粒,如果該配向差為容許角度(例如5°)以上,那麼視為不同的晶粒。 Next, based on the crystal orientation in each of the obtained measurement points, the alignment difference of the crystal orientation in the adjacent measurement points was calculated. If the alignment difference is less than the Tolerance Angle (for example, 5°), it is regarded as the same crystal grain, and if the alignment difference is an allowable angle (for example, 5°) or more, it is regarded as a different crystal grain.

根據所獲得的結晶配向進行晶粒的區分,獲得IPF(lnverse Pole Figure,反極圖)圖。此時,對於具有相同的結晶配向的晶粒,賦予相同的顏色。即,在IPF圖中,關於結晶化的區域,根據其晶粒的尺寸(粒徑) 而示出相同顏色的區域。 The crystal grains were classified according to the obtained crystal orientation, and an IPF (Inverse Pole Figure) map was obtained. At this time, the same color is imparted to the crystal grains having the same crystal alignment. That is, in the IPF diagram, regarding the crystallized region, according to the size (particle diameter) of the crystal grains thereof And show the area of the same color.

接著,藉由算出而獲得各測定點的可靠性指數(CI值)。以下,以從上述的7頻帶選擇3頻帶並且確定各測定點中的結晶配向的情況為例子,對算出CI值的方法進行說明。即,在35種的各組合中推定出的結晶配向之中,將推定出的結晶配向的次數稱為例如Vote(判定)數。可以說,最大的Vote數與第二大的Vote數之差越大,則推定出的結晶配向的可靠性越高。關於CI值,基於這樣的見解,根據下述(式1)算出。 Next, the reliability index (CI value) of each measurement point was obtained by calculation. Hereinafter, a method of calculating the CI value will be described by taking a case where the three bands are selected from the above seven bands and the crystal alignment in each measurement point is determined as an example. In other words, among the crystal orientations estimated in each of the 35 combinations, the number of times of the estimated crystal alignment is referred to as, for example, a number of Votes. It can be said that the greater the difference between the maximum Vote number and the second largest Vote number, the higher the reliability of the estimated crystal alignment. The CI value is calculated based on the following (Formula 1) based on such findings.

(式1)CI值=(V1-V2)/Videal (Formula 1) CI value = (V1-V2) / V ideal

此處,V1為最大的Vote數,V2是第二大的Vote數,Videal是組合數。例如從7頻帶選擇3頻帶時,Videal為35。 Here, V1 is the maximum Vote number, V2 is the second largest Vote number, and V ideal is the combined number. For example, when three bands are selected from the seven bands, V ideal is 35.

CI值採用0.0到1.0的值。例如,具有35種的組合的情況下,在V1=35、V2=0時CI值=1.0,可靠性最高。與此相對,在V1=V2時CI值=0.0,可靠性最低。 The CI value is a value from 0.0 to 1.0. For example, in the case of a combination of 35 types, the CI value = 1.0 at V1 = 35 and V2 = 0, and the reliability is the highest. On the other hand, when V1 = V2, the CI value = 0.0, and the reliability is the lowest.

一般而言,在例如Cu等FCC金屬中,在CI值為0.2~0.3以上的測定點時,可以說是以90%以上的概率正確地測定結晶配向而選擇。與此相對,在CI值為0.1以下的測定點時,存在有最多地推定出的(Vote數為最大)結晶配向與第二多地推定出的(Vote數第二大)結晶配向是以相同的程度的概率選擇的可能性,因而選擇出的結晶配向的可靠性低。即,CI值為0.1以下的測定點是無法獲得繞射圖案的非晶質的區域或微細晶粒區域。以這樣的次序,在全部測定點分別算出CI值。 In general, in a FCC metal such as Cu, when the CI value is 0.2 to 0.3 or more, it can be said that the crystal alignment is accurately measured with a probability of 90% or more. On the other hand, in the measurement point where the CI value is 0.1 or less, the crystal alignment which is most estimated (the maximum number of Votes) is the same as the crystal orientation of the second most estimated (the second largest Vod number). The probability of the degree of selection is chosen, and thus the reliability of the selected crystal alignment is low. That is, a measurement point having a CI value of 0.1 or less is an amorphous region or a fine crystal grain region in which a diffraction pattern cannot be obtained. In this order, the CI values were calculated at all measurement points.

而且可知,將IPF圖與全部測定點的CI值的分佈進行比較來看時,則在測定區域內,越是CI值為0.1以下的測定點多的地方,越是非晶質的區域或微細晶粒區域多的地方。 In addition, when the IPF map is compared with the distribution of the CI values of all the measurement points, the more the measurement points are, the more the measurement points are 0.1 or less, the more amorphous regions or fine crystals. A place with many grain areas.

如上述那樣,在銅帶2的基底電鍍層生長面上,藉由生長而形成基底電鍍層3。作為基底電鍍層3,藉由生長而形成有例如銅(Cu)電鍍層或鎳(Ni)電鍍層中的至少任一個即可。如上述那樣,在形成基底電鍍層3的銅帶2的基底電鍍層生長面,形成有非晶質的區域或微細晶粒區域中的至少任一個。由此,基底電鍍層3的生長速度在銅帶2的基底電鍍層生長面上形成為面內均一。因此,基底電鍍層3在基底電鍍層生長面進行面內均一地生 長,使得基底電鍍層3的表面形成為平整。即,可提高基底電鍍層3的表面的平滑度。 As described above, the underlying plating layer 3 is formed by growth on the growth surface of the underlying plating layer of the copper ribbon 2. As the underlying plating layer 3, at least one of a copper (Cu) plating layer or a nickel (Ni) plating layer may be formed by growth. As described above, at least one of an amorphous region or a fine crystal grain region is formed on the base plating layer growth surface of the copper strip 2 on which the underlying plating layer 3 is formed. Thereby, the growth rate of the underlying plating layer 3 is formed to be in-plane uniform on the growth surface of the underlying plating layer of the copper ribbon 2. Therefore, the base plating layer 3 is uniformly produced in-plane on the growth surface of the base plating layer. The length is such that the surface of the base plating layer 3 is formed to be flat. That is, the smoothness of the surface of the underlying plating layer 3 can be improved.

在基底電鍍層3上,藉由生長而形成表面電鍍層4。作為表面電鍍層4,藉由生長而形成有反射率(光反射率)高的例如銀(Ag)電鍍層即可。關於表面電鍍層4,例如藉由電鍍進行生長而形成即可。因而,表面電鍍層4形成於表面是平整的(即平滑度高的)基底電鍍層3上。由此,表面電鍍層4在基底電鍍層3上面內均一地生長,因而使得表面電鍍層4的表面形成為平整。即,可提高表面電鍍層4的表面的平滑度。因此,可提高表面電鍍層4的光澤度,可提高反射率。 On the base plating layer 3, a surface plating layer 4 is formed by growth. As the surface plating layer 4, for example, a silver (Ag) plating layer having a high reflectance (light reflectance) may be formed by growth. The surface plating layer 4 may be formed by, for example, growth by electroplating. Thus, the surface plating layer 4 is formed on the base plating layer 3 whose surface is flat (i.e., highly smooth). Thereby, the surface plating layer 4 is uniformly grown in the upper surface of the base plating layer 3, thereby making the surface of the surface plating layer 4 flat. That is, the smoothness of the surface of the surface plating layer 4 can be improved. Therefore, the gloss of the surface plating layer 4 can be improved, and the reflectance can be improved.

這樣的電鍍銅帶1較佳用於例如導線架等。例如,使用模具等對電鍍銅帶1進行衝壓加工,從而形成例如導線架。 Such an electroplated copper strip 1 is preferably used for, for example, a lead frame or the like. For example, the plated copper strip 1 is subjected to press working using a mold or the like to form, for example, a lead frame.

(2)銅帶以及電鍍銅帶的製造方法 (2) Copper tape and method for manufacturing the same

接著,關於本實施方式的銅帶2以及電鍍銅帶1的製造方法的一實施方式,主要使用第2圖進行說明。第2圖是表示本實施方式的銅帶2以及電鍍銅帶1的製造步驟的流程圖。 Next, an embodiment of the copper strip 2 and the method of manufacturing the plated copper strip 1 of the present embodiment will be mainly described using FIG. 2 . Fig. 2 is a flow chart showing the steps of manufacturing the copper strip 2 and the plated copper strip 1 of the present embodiment.

(鑄造步驟(S10)) (casting step (S10))

如第2圖所示那樣,首先,使用例如坩堝式熔解爐、溝道式熔解爐等電爐,熔解作為母材的銅(Cu)而製造銅的熔液。又,在鑄造銅合金的鑄塊的情況下,向銅的熔液中添加規定量的規定元素,製造銅合金的熔液。然後,藉由將該銅的熔液或銅合金的熔液供給於鑄模,從而鑄造厚度為150mm~250mm左右、寬度為400mm~1000mm左右並且具有矩形剖面的銅或銅合金的鑄塊(塊體(cake))。 As shown in FIG. 2, first, a copper melt is produced by melting copper (Cu) as a base material using an electric furnace such as a kiln type melting furnace or a channel type melting furnace. Further, in the case of casting an ingot of a copper alloy, a predetermined amount of a predetermined element is added to the molten metal of copper to produce a molten metal of a copper alloy. Then, by supplying the molten metal of the copper or the molten alloy of the copper alloy to the mold, an ingot (block) of copper or copper alloy having a thickness of about 150 mm to 250 mm and a width of about 400 mm to 1000 mm and having a rectangular cross section is cast. (cake)).

(熱軋步驟(S20)) (hot rolling step (S20))

鑄造步驟(S10)結束後,將鑄造出的塊體加熱至規定溫度而進行熱軋處理,形成規定厚度的熱軋材料。即,將塊體搬入於加熱至規定溫度(例如800℃以上1000℃以下)的加熱爐中。然後,在加熱爐中以規定時間(例如30分鐘以上)保持塊體而將塊體加熱。經過規定時間後,將塊體從加熱爐搬出,使用熱軋機,例如在室溫下將塊體以形成為規定厚度(例如10mm~15mm)的方式軋製而形成熱軋材料。在熱軋處理結束後,盡可能迅速地將熱軋材料冷卻至例如室溫左右即可。 After the casting step (S10) is completed, the cast block is heated to a predetermined temperature and subjected to hot rolling treatment to form a hot rolled material having a predetermined thickness. That is, the block is carried in a heating furnace heated to a predetermined temperature (for example, 800 ° C or more and 1000 ° C or less). Then, the block is heated in a heating furnace for a predetermined time (for example, 30 minutes or longer) to heat the block. After the lapse of a predetermined period of time, the block is carried out from the heating furnace, and the hot-rolled material is rolled, for example, at a room temperature to form a block having a predetermined thickness (for example, 10 mm to 15 mm) to form a hot-rolled material. After the completion of the hot rolling treatment, the hot rolled material may be cooled as quickly as possible to, for example, room temperature.

熱軋處理的處理溫度、即,加熱爐的加熱溫度根據銅合金的化學組成而調整即可。例如,在析出添加於銅合金中的添加物的銅合金(析出型銅合金)中,使熱軋處理的處理溫度(特別是熱軋處理的開始溫度)為添加於銅合金中的元素發生固溶的溫度即可。由此,藉由熱軋處理從而可減低形成於熱軋材料表面的氧化膜(氧化皮)。即,熱軋處理的處理溫度過高時,則形成於熱軋材料表面的氧化皮有時會增大。 The treatment temperature of the hot rolling treatment, that is, the heating temperature of the heating furnace may be adjusted according to the chemical composition of the copper alloy. For example, in a copper alloy (precipitated copper alloy) in which an additive added to a copper alloy is precipitated, the treatment temperature of the hot rolling treatment (particularly, the starting temperature of the hot rolling treatment) is made to be an element added to the copper alloy. The temperature of the solution can be. Thereby, the oxide film (scale) formed on the surface of the hot-rolled material can be reduced by the hot rolling treatment. That is, when the treatment temperature of the hot rolling treatment is too high, the scale formed on the surface of the hot rolled material may increase.

(面削步驟(S30)) (face cutting step (S30))

熱軋步驟(S20)結束後,藉由進行面削,從而削去因熱軋處理而形成於熱軋材料表面的氧化膜(氧化皮),將氧化膜去除。 After the completion of the hot rolling step (S20), the surface film is subjected to surface cutting to remove the oxide film (scale) formed on the surface of the hot-rolled material by the hot rolling treatment, and the oxide film is removed.

(冷軋步驟、退火步驟(S40、S50)) (cold rolling step, annealing step (S40, S50))

面削步驟(S30)結束後,對於熱軋材料,反覆進行規定次數的規定的加工度的冷軋處理(冷軋步驟(S40))以及在規定溫度加熱規定時間的退火處理(退火步驟(S50)),形成規定厚度的被稱作胚料的冷軋材料。藉由賦予熱軋材料以由冷軋處理導致的加工應變,從而可提高銅帶2的強度。又,退火處理也可包含時效處理。 After the surface-cutting step (S30) is completed, the hot-rolled material is subjected to a cold rolling treatment (a cold rolling step (S40)) of a predetermined degree of processing for a predetermined number of times, and an annealing treatment for a predetermined time at a predetermined temperature (annealing step (S50) )), forming a cold-rolled material called a billet of a predetermined thickness. The strength of the copper strip 2 can be improved by imparting a processing strain caused by the cold rolling treatment to the hot rolled material. Further, the annealing treatment may also include an aging treatment.

(拋光(buffing)步驟(S60)) (buffing step (S60))

反覆進行規定次數的冷軋步驟(S40)和退火步驟(S50)後,進行將冷軋材料的軋製面、即,形成為基底電鍍層生長面的面進行研磨的拋光處理。關於拋光處理,以在銅帶2的基底電鍍層生長面(即軋製面)形成非晶質的區域或微細晶粒區域中之至少任一個的方式進行。即,關於拋光處理,(step size)利用EBSD法以測定區域為90μm×120μm並且以步長為0.2μm進行測定而獲得的基底電鍍層生長面的CI值為0.1以下的測定點的比例為50%以上、較佳為68%以上的方式進行即可。關於拋光處理,例如藉由使用在表面附著有研磨磨料的圓筒狀的拋光輪(buff)而進行。而且,藉由將這樣的拋光輪在銅帶2的基底電鍍層生長面上旋轉規定方向(例如順時鐘方向),利用拋光輪的表面上的研磨磨料,研磨銅帶2的基底電鍍層生長面的表面,在基底電鍍層生長面形成非晶質的區域或微細晶粒區域中的至少任一個。此時,作為研磨磨料,可使用具有番號為# 600~# 3000相當的粒徑的研磨磨料。 After the predetermined number of cold rolling steps (S40) and annealing steps (S50) are repeated, a polishing process of polishing the rolled surface of the cold rolled material, that is, the surface formed as the underlying plating growth surface, is performed. The polishing treatment is performed in such a manner that at least one of an amorphous region or a fine crystal grain region is formed on the base plating layer growth surface (ie, the rolled surface) of the copper strip 2 . In other words, in the EBSD method, the ratio of the measurement points of the base plating layer growth surface obtained by measuring the measurement area to 90 μm × 120 μm and the step size of 0.2 μm is 0.1 or less is 50. It is sufficient to carry out the method of % or more, preferably 68% or more. The polishing treatment is performed, for example, by using a cylindrical buff which has a polishing abrasive attached to the surface. Further, by rotating such a polishing wheel on a growth surface of the base plating layer of the copper strip 2 in a predetermined direction (for example, clockwise direction), the base plating growth surface of the copper strip 2 is ground by using the abrasive on the surface of the polishing wheel. At least one of an amorphous region or a fine crystal grain region is formed on the growth surface of the base plating layer. At this time, as the abrasive, a abrasive having a particle size corresponding to #600 to #3000 can be used.

(精軋製步驟(S70)) (finishing step (S70))

拋光步驟(S60)結束後,對於冷軋材料,以規定的加工度進行精軋製處理,形成規定厚度(例如0.2mm)的銅帶2。又,在精軋製步驟(S70)結束後,不對銅帶2進行退火處理即可。在精軋製步驟(S70)結束之後進行退火處理時,則銅帶2的基底電鍍層生長面的結晶組織有時會變化。即,形成於基底電鍍層生長面的非晶質的區域或微細晶粒區域有時會變得不是非晶質的區域或微細晶粒區域。由此,製造本實施方式的銅帶2。 After the completion of the polishing step (S60), the cold-rolled material is subjected to a finish rolling treatment at a predetermined degree of work to form a copper strip 2 having a predetermined thickness (for example, 0.2 mm). Further, after the finish rolling step (S70) is completed, the copper strip 2 may not be annealed. When the annealing treatment is performed after the completion of the finish rolling step (S70), the crystal structure of the growth layer of the underlying plating layer of the copper strip 2 sometimes changes. In other words, the amorphous region or the fine crystal grain region formed on the growth surface of the underlying plating layer may not be an amorphous region or a fine crystal grain region. Thereby, the copper strip 2 of this embodiment is manufactured.

(基底電鍍層形成步驟(S80)) (Substrate plating layer forming step (S80))

精軋製步驟(S70)結束後,在銅帶2的基底電鍍層生長面(軋製面)上,形成規定厚度的基底電鍍層3。作為基底電鍍層3,形成例如Cu電鍍層或Ni電鍍層中的至少任一個。 After the finish rolling step (S70) is completed, the underlying plating layer 3 having a predetermined thickness is formed on the underlying plating growth surface (rolled surface) of the copper strip 2. As the base plating layer 3, at least one of, for example, a Cu plating layer or a Ni plating layer is formed.

(表面電鍍層形成步驟(S90)) (Surface plating layer forming step (S90))

基底電鍍層形成步驟(S80)結束的話,在基底電鍍層3上,作為將光反射的表面電鍍層4,形成例如Ag電鍍層。由此,藉由製造本實施方式的電鍍銅帶1,從而結束該製造步驟。 When the base plating layer forming step (S80) is completed, on the underlying plating layer 3, as the surface plating layer 4 for reflecting light, for example, an Ag plating layer is formed. Thus, the manufacturing step is completed by manufacturing the plated copper strip 1 of the present embodiment.

(3)本實施方式的效果 (3) Effects of the present embodiment

根據本實施方式,發揮以下所示的1個或者多個效果。 According to the present embodiment, one or a plurality of effects described below are exhibited.

(a)根據本實施方式,在具有基底電鍍層生長面3的銅帶2的基底電鍍層生長面,以基底電鍍層3的生長速度在基底電鍍層生長面形成為面內均一的方式,形成有非晶質的區域或微細晶粒區域中的至少任一個。由此,基底電鍍層3在基底電鍍層生長面上面內均一地生長,因而基底電鍍層3的表面形成為平整。其結果是在基底電鍍層3上生長而形成的表面電鍍層4(例如Ag電鍍層)的表面變為平整,表面電鍍層4的光反射率提高。 (a) According to the present embodiment, the base plating layer growth surface of the copper strip 2 having the underlying plating layer growth surface 3 is formed in such a manner that the growth rate of the underlying plating layer 3 is uniform in the surface of the underlying plating layer growth surface. There is at least one of an amorphous region or a fine crystal grain region. Thereby, the underlying plating layer 3 is uniformly grown on the growth surface of the underlying plating layer, and thus the surface of the underlying plating layer 3 is formed to be flat. As a result, the surface of the surface plating layer 4 (for example, an Ag plating layer) formed by growing on the underlying plating layer 3 becomes flat, and the light reflectance of the surface plating layer 4 is improved.

(b)根據本實施方式,基底電鍍層生長面,為藉由利用EBSD法以測定區域為90μm×120μm並且以測定間隔為0.2μm進行測定而獲得的可靠性指數(CI值)為0.1以下之測定點的比例為50%以上、較佳為68%以上的面。即,基底電鍍層生長面是非晶質的區域或微細晶粒區域的比例為50%以上、較佳為68%以上的面。由此,在銅帶2的基底電鍍層生長面上,可生長表面更平整的基底電鍍層3而形成。因此,可使在基底電鍍層3上生長而形成的表面電鍍層4的表面變得更平整,可進一步提高表面電鍍層4的光反射率。 (b) According to the present embodiment, the base plating layer growth surface is a reliability index (CI value) obtained by measuring the measurement region to be 90 μm × 120 μm by the EBSD method and measuring at a measurement interval of 0.2 μm. The ratio of the measurement points is 50% or more, preferably 68% or more. That is, the base plating layer growth surface is a surface having an amorphous region or a fine crystal grain region of 50% or more, preferably 68% or more. Thereby, on the base plating layer growth surface of the copper strip 2, a base plating layer 3 having a flat surface can be grown. Therefore, the surface of the surface plating layer 4 which is formed by growing on the base plating layer 3 can be made flatter, and the light reflectance of the surface plating layer 4 can be further improved.

(c)根據本實施方式,基底電鍍層生長面的CI值的測定是在利用化學蝕刻而基底電鍍層生長面去除50nm以上之後進行。由此,可獲得基底電鍍層生長面的更加準確的CI值。 (c) According to the present embodiment, the CI value of the growth surface of the underlying plating layer is measured after removing the underlying plating layer growth surface by chemical etching by 50 nm or more. Thereby, a more accurate CI value of the growth surface of the underlying plating layer can be obtained.

(d)根據本實施方式,電鍍銅帶1藉由具備銅帶2而構成,所述銅帶2具有形成非晶質的區域或微細晶粒區域中的至少任一個的基底電鍍層生長面。即,在銅帶2的基底電鍍層生長面上,從銅帶2的一側起依序地分別生長基底電鍍層3和表面電鍍層4,從而形成有電鍍銅帶1。因此,在電鍍銅帶1中,表面電鍍層4的表面變為平整,光反射率變高。 (d) According to the present embodiment, the plated copper strip 1 is configured by including a copper strip 2 having a base plating layer growth surface that forms at least one of an amorphous region or a fine crystal grain region. That is, on the growth surface of the base plating layer of the copper strip 2, the underlying plating layer 3 and the surface plating layer 4 are sequentially grown from one side of the copper strip 2, thereby forming the electroplated copper strip 1. Therefore, in the electroplated copper strip 1, the surface of the surface plating layer 4 becomes flat, and the light reflectance becomes high.

(e)根據本實施方式,使用電鍍銅帶1而形成導線架。由此,例如在導線架上搭載發光元件而形成發光二極體的情況下,可提高發光二極體的光取出效率。 (e) According to the present embodiment, the lead frame is formed using the plated copper strip 1. Thereby, for example, when a light-emitting element is mounted on a lead frame to form a light-emitting diode, the light extraction efficiency of the light-emitting diode can be improved.

(本發明的其他實施方式) (Other embodiments of the present invention)

以上,具體說明本發明的一個實施方式,但是本發明不受限於上述的實施方式,可在不脫離其要旨的範圍適當變更。 The embodiment of the present invention is specifically described above, but the present invention is not limited to the above-described embodiments, and can be appropriately modified without departing from the scope of the invention.

例如,使用形成基底電鍍層3以及表面電鍍層4的電鍍銅帶1而形成導線架,在導線架搭載發光元件而形成發光二極體(LED)的情況下,在銅帶2與外部配線的連接部,為提高電性連接的可靠性,因而也可進行電鍍處理。作為這樣的電鍍處理,使用例如銀(Ag)、鎳(Ni)、鈀(Pd)等進行即可。 For example, a lead frame is formed using the plated copper strip 1 forming the underlying plating layer 3 and the surface plating layer 4, and when a light-emitting element is mounted on the lead frame to form a light-emitting diode (LED), the copper strip 2 and the external wiring are formed. The connection portion can also be plated in order to improve the reliability of the electrical connection. As such a plating treatment, for example, silver (Ag), nickel (Ni), palladium (Pd) or the like may be used.

另外,銅帶2也可用於除導線架以外的用途。例如,在銅帶2的基底電鍍層生長面上,如果藉由生長而形成其他的含有FCC金屬的電鍍層,則也可不形成基底電鍍層3和表面電鍍層4。在此情況下,也可使電鍍層的表面平整,可提高光澤度。因此,可有效地應用於重視電鍍層的表面的外觀上的美觀、光澤度的所有用途中。 In addition, the copper strip 2 can also be used for applications other than the lead frame. For example, on the growth surface of the base plating layer of the copper strip 2, if another plating layer containing FCC metal is formed by growth, the underlying plating layer 3 and the surface plating layer 4 may not be formed. In this case, the surface of the plating layer can also be flattened to improve the gloss. Therefore, it can be effectively applied to all applications in which the appearance and the gloss of the surface of the plating layer are emphasized.

實施例 Example

下面,說明本發明的實施例,但本發明並不限定於此。 Hereinafter, embodiments of the invention will be described, but the invention is not limited thereto.

(實施例1) (Example 1)

在實施例1中使用合金(C194:CDA No.C19400),其包含2.1wt%~2.6wt%的鐵(Fe)、0.05wt%~0.2wt%的鋅(Zn)、0.015wt%~0.15wt%的磷(P),並且剩餘部分由97wt%以上的銅(Cu)以及不可避免的雜質形成。此 時,在銅合金中包含97wt%以上的Cu。而且,使用坩堝式熔解爐,在氮氣氣氛下將上述銅合金熔解而製作出熔液。然後,將熔液供給於鑄模,以規定厚度而鑄造規定寬度的塊體。 An alloy (C194: CDA No. C19400) containing 2.1 wt% to 2.6 wt% of iron (Fe), 0.05 wt% to 0.2 wt% of zinc (Zn), and 0.015 wt% to 0.15 wt was used in Example 1. % phosphorus (P), and the remainder is formed by more than 97% by weight of copper (Cu) and unavoidable impurities. this At the time, 97 wt% or more of Cu is contained in the copper alloy. Further, the copper alloy was melted in a krypton melting furnace under a nitrogen atmosphere to prepare a molten metal. Then, the melt is supplied to the mold, and a block having a predetermined width is cast at a predetermined thickness.

接著,將塊體加熱至規定溫度而進行熱軋處理,製作出規定厚度的熱軋材料。然後,對於熱軋材料,反覆進行規定次數的規定的加工度的冷軋處理以及退火處理,製作出規定厚度的冷軋材料。又,退火處理在還原氣氛下進行。 Next, the block is heated to a predetermined temperature and subjected to hot rolling treatment to produce a hot rolled material having a predetermined thickness. Then, the hot-rolled material is subjected to cold rolling treatment and annealing treatment of a predetermined degree of processing for a predetermined number of times to produce a cold-rolled material having a predetermined thickness. Further, the annealing treatment is carried out under a reducing atmosphere.

然後,對於冷軋材料的軋製面、即,對形成基底電鍍層生長面的面在規定條件下進行拋光處理。關於拋光處理,以在作為製作之樣品的銅帶的基底電鍍層生長面(即軋製面)形成非晶質的區域或微細晶粒區域的方式進行。然後,對於進行拋光處理的冷軋材料,以規定的加工度進行精軋製處理,製作出厚度為0.2mm的銅帶。將其製成實施例1的樣品。 Then, the rolled surface of the cold rolled material, that is, the surface on which the growth surface of the underlying plating layer is formed is subjected to a polishing treatment under a predetermined condition. The polishing treatment is performed in such a manner that an amorphous region or a fine crystal grain region is formed on the underlying plating growth surface (ie, the rolled surface) of the copper ribbon as the produced sample. Then, the cold-rolled material subjected to the buffing treatment was subjected to finish rolling treatment at a predetermined degree of work to produce a copper strip having a thickness of 0.2 mm. This was made into the sample of Example 1.

(實施例2~9以及比較例1~8) (Examples 2 to 9 and Comparative Examples 1 to 8)

在實施例2~9以及比較例1~8中,使銅合金的種類如表1所示,並且變更拋光處理條件。關於其他,與上述的實施例1同樣地操作而製作出銅帶。將它們分別作為實施例2~9以及比較例1~8的樣品。 In Examples 2 to 9 and Comparative Examples 1 to 8, the types of copper alloys were as shown in Table 1, and the polishing treatment conditions were changed. Others, a copper tape was produced in the same manner as in the above-described Example 1. These were used as the samples of Examples 2 to 9 and Comparative Examples 1 to 8, respectively.

又,表1中的OFC是指,包含0.0010wt%以下的氧(O),並且剩餘部分由99.95wt%以上的Cu以及不可避免的雜質形成的銅(無氧銅)(CDA No.C10200)。另外,HCL02Z是指,包含0.015wt%~0.03wt%的鋯(Zr),並且Cu以及Zr的合計重量(Cu+Zr)為99.96wt%以上的銅合金(CDA No.C15150)。另外,HCL305被稱作科森系的銅合金,是指包含1.5wt%~2.0wt%的鋅锌(Zn)、2.2wt%~2.8wt%的鎳(Ni)、0.015wt%~0.06wt%的磷(P)、0.3wt%~0.7wt%的矽(Si),並且剩餘部分由Cu以及不可避免的雜質形成的銅合金。 Further, the OFC in Table 1 means copper (oxygen-free copper) containing less than 0.0010% by weight of oxygen (O) and the remainder being composed of 99.95 wt% or more of Cu and unavoidable impurities (CDA No. C10200) . In addition, HCL02Z is a copper alloy (CDA No. C15150) containing 0.015 wt% to 0.03 wt% of zirconium (Zr) and a total weight of Cu and Zr (Cu + Zr) of 99.96 wt% or more. In addition, HCL305 is called a Corson-based copper alloy, and includes 1.5 wt% to 2.0 wt% of zinc zinc (Zn), 2.2 wt% to 2.8 wt% of nickel (Ni), and 0.015 wt% to 0.06 wt%. Phosphorus (P), 0.3 wt% to 0.7 wt% of bismuth (Si), and the balance being a copper alloy formed of Cu and unavoidable impurities.

(前處理步驟) (pre-processing steps)

接著,對於實施例1~9以及比較例1~8的各樣品,在表2所示的條件下進行陰極電解脫脂步驟和酸洗步驟,進行將樣品的表面清潔化的前處理。即,藉由進行前處理,從而去除形成於各樣品表面的自然氧化膜、附著於各樣品表面的污染物質。又,關於本實施例中的酸洗步驟的處理條件,設想並決定在各樣品上藉由生長形成銀(Ag)電鍍層作為表面電鍍層時之量產Ag電鍍生產線中的酸洗處理的條件。另外,酸洗處理的條件設為,在量產Ag電鍍生產線中的酸洗處理的條件的範圍內蝕刻量變多的條件。具體而言,量產Ag電鍍生產線中的酸洗處理中被蝕刻的量(蝕刻量)一般為50nm~100nm。因此,在本實施例中,也設為使得酸洗步驟中的蝕刻量為50nm~100nm那樣的處理條件。 Next, with respect to each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8, a cathodic electrolytic degreasing step and a pickling step were carried out under the conditions shown in Table 2, and a pretreatment for cleaning the surface of the sample was performed. That is, by performing the pretreatment, the natural oxide film formed on the surface of each sample and the contaminant adhering to the surface of each sample are removed. Further, regarding the processing conditions of the pickling step in the present embodiment, conditions for the pickling treatment in the mass-producing Ag plating line in the case where a silver (Ag) plating layer is formed as a surface plating layer by growth on each sample is assumed and determined. . In addition, the conditions of the pickling treatment are conditions in which the amount of etching increases in the range of the conditions of the pickling treatment in the mass production Ag plating line. Specifically, the amount (etching amount) to be etched in the pickling treatment in the mass production Ag plating line is generally 50 nm to 100 nm. Therefore, in the present embodiment, the processing conditions such that the etching amount in the pickling step is 50 nm to 100 nm are also set.

表2 Table 2

如表2所示那樣,在陰極電解脫脂步驟中,使用SUS板作為陽極,在包含氫氧化鈉20g/L和碳酸鈉20g/L的水溶液中,將液溫設為40℃,將電流密度設為5A/dm2,將處理時間設為30秒,對各樣品進行電解脫脂處理。陰極電解脫脂步驟結束後,將各樣品進行水洗。然後,在酸洗步驟中,在包含硫酸5wt%和過硫酸鉀10g/L的水溶液中,將水溶液的液溫設為室溫,將各樣品浸漬於水溶液10秒,進行酸洗處理。在酸洗步驟中,因溫度條件、過硫酸鉀(氧化劑)的劣化等而使得蝕刻速度發生變動的情況下,以蝕刻量為50nm~100nm的方式,適當調整例如酸洗處理的處理時間(浸漬時間)即可。 As shown in Table 2, in the cathode electrolytic degreasing step, a SUS plate was used as an anode, and in an aqueous solution containing 20 g/L of sodium hydroxide and 20 g/L of sodium carbonate, the liquid temperature was set to 40 ° C, and the current density was set. For 5 A/dm 2 , the treatment time was set to 30 seconds, and each sample was subjected to electrolytic degreasing treatment. After the end of the cathodic electrolytic degreasing step, each sample was washed with water. Then, in the pickling step, the liquid temperature of the aqueous solution was set to room temperature in an aqueous solution containing 5 wt% of sulfuric acid and 10 g/L of potassium persulfate, and each sample was immersed in an aqueous solution for 10 seconds to carry out pickling treatment. In the pickling step, when the etching rate fluctuates due to temperature conditions, deterioration of potassium persulfate (oxidizing agent), etc., the processing time of the pickling treatment is appropriately adjusted so that the etching amount is 50 nm to 100 nm (impregnation) Time).

<基底電鍍層生長面的評價> <Evaluation of Growth Surface of Substrate Plating Layer>

對於結束前處理步驟的實施例1~9以及比較例1~8的各樣品,對各樣品的基底電鍍層生長面(即軋製面)進行評價。藉由在前處理步驟結束之後進行基底電鍍層生長面的評價,可更準確地進行評價。 The base plating layer growth surface (that is, the rolling surface) of each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 before the completion of the treatment step was evaluated. The evaluation of the underlying plating growth surface can be performed more accurately after the end of the pre-treatment step.

(CI值為0.1以下的測定點的比例的算出) (Calculation of the ratio of the measurement points with a CI value of 0.1 or less)

首先,在表3所示的條件下,算出實施例1~9以及比較例1~8的各樣品的基底電鍍層生長面的CI值為0.1以下的測定點的比例。將其結果示於表1。 First, under the conditions shown in Table 3, the ratio of the measurement points at which the CI value of the underlying plating layer growth surface of each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 was 0.1 or less was calculated. The results are shown in Table 1.

即,如表3所示,作為EBSD裝置,使用安裝於日立High-Technologies股份有限公司製的掃描型電子顯微鏡(SU-70)之TSL Solutions股份有限公司製的結晶配向解析(OIM,Orientation Imaging Microscopy)裝置。而且,將各樣品傾斜70°地保持,使用EBSD裝置,將電子射線照射於各樣品的基底電鍍層生長面(軋製面)上的多個測定點(照射點),從而在各測定點獲得繞射圖案(電子背散射繞射像)。此時,將掃描型電子顯微鏡的加速電壓設為20kV,將觀察倍率設為1000倍。另外,利用EBSD裝置照射電子射線時,將各樣品傾斜70°地保持。由此,因電子射線照射位置(測定點)而使焦點發生位移。在不對齊焦點的狀態下測定時,則IQ(圖像品質)值變低,不能進行恰當的測定、解析,因此進行傾斜焦點修正。另外,關於傾斜焦點修正,根據觀察倍率而準確地進行。而且,基於所獲得的結晶配向而製成IPF圖。另外,基於所獲得的各測定點的繞射圖案,測定各測定點中的晶粒的結晶配向而進行解析,藉由算出而獲得各測定點中的CI值。 In other words, as shown in Table 3, OIM, Orientation Imaging Microscopy, manufactured by TSL Solutions, Inc., a scanning electron microscope (SU-70) manufactured by Hitachi High-Technologies Co., Ltd., was used as the EBSD device. ) device. Further, each sample was held at an inclination of 70°, and an electron beam was irradiated onto a plurality of measurement points (irradiation points) on the growth layer (rolling surface) of the underlying plating layer of each sample using an EBSD apparatus, thereby obtaining at each measurement point. Diffraction pattern (electron backscatter diffraction image). At this time, the acceleration voltage of the scanning electron microscope was set to 20 kV, and the observation magnification was set to 1000 times. Further, when the electron beam was irradiated by the EBSD apparatus, each sample was held at an inclination of 70°. Thereby, the focus is displaced by the electron beam irradiation position (measurement point). When the measurement is performed in a state where the focus is not aligned, the IQ (image quality) value is lowered, and proper measurement and analysis cannot be performed, so that the tilt focus correction is performed. In addition, the tilt focus correction is accurately performed in accordance with the observation magnification. Further, an IPF pattern was prepared based on the obtained crystal alignment. Further, based on the obtained diffraction pattern of each measurement point, the crystal orientation of crystal grains in each measurement point was measured and analyzed, and the CI value at each measurement point was obtained by calculation.

接著,對於實施例1~9以及比較例1~8的各樣品中的每個樣品,根據針對全部的測定點而獲得的CI值,算出觀察區域中的CI值為0.1以下的測定點相對於測定點的總數的比例。在本實施例中,由於以觀察區域 為90μm×120μm,以測定間隔(步長step size)為0.2μm,因而觀察區域中的測定點的總數為270,000點。 Next, with respect to each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8, the CI values obtained for all the measurement points were calculated, and the measurement points in the observation region were calculated to be 0.1 or less with respect to The ratio of the total number of points measured. In this embodiment, due to the observation area It is 90 μm × 120 μm, and the measurement interval (step size) is 0.2 μm, so the total number of measurement points in the observation area is 270,000 points.

(銅帶的基底電鍍層生長面的解析結果) (analysis result of the growth surface of the base plating layer of the copper strip)

將所獲得的IPF圖的一個例子示於第3圖。第3圖是使用C194作為銅合金的實施例1、實施例2、實施例9、比較例1以及比較例2之各樣品的IPF圖。根據第3圖確認出,實施例1、實施例2以及實施例9之各樣品的基底電鍍層生長面較多形成有非晶質的區域或微細晶粒區域。即確認出,在實施例1、實施例2以及實施例9之各樣品的基底電鍍層生長面,由於連續的多個測定點顯示相同的結晶配向、或者配向差顯示為小於容許角度(Tolerance Angle,在本實施例中為5°)因而視為相同的晶粒,散佈著識別為形成有大粒徑的晶粒的地方,但是在觀察區域的大部分地方,在每個測定點,由顯示隨機的結晶配向的晶粒形成。另外確認出,在這些各樣品的基底電鍍層生長面,非晶質的區域或微細晶粒區域是在觀察區域內均勻地分佈,即,沒有偏在特定的地方。 An example of the obtained IPF map is shown in Fig. 3. Fig. 3 is an IPF chart of each of the samples of Example 1, Example 2, Example 9, Comparative Example 1, and Comparative Example 2 using C194 as a copper alloy. According to the third drawing, it was confirmed that each of the samples of Example 1, Example 2, and Example 9 had an amorphous region or a fine crystal grain region formed on the growth surface of the underlying plating layer. That is, it was confirmed that the base plating layer growth faces of the respective samples of Example 1, Example 2, and Example 9 showed that the same crystal alignment was exhibited by a plurality of consecutive measurement points, or the alignment difference was shown to be smaller than the allowable angle (Tolerance Angle). 5° in the present embodiment is thus regarded as the same crystal grain, where the crystal grains identified as having a large particle diameter are interspersed, but in most places of the observation area, at each measurement point, by the display Random crystallized grain formation. Further, it was confirmed that in the growth layer of the underlying plating layer of each of the samples, the amorphous region or the fine crystal grain region was uniformly distributed in the observation region, that is, it was not biased at a specific place.

與此相對,確認出在比較例1以及比較例之的各樣品的基底電鍍層生長面形成有大粒徑的晶粒。另外確認出,這些晶粒沿著軋製方向(紙面的上下方向)而規定長度地連續形成。即確認出,比較例1以及比較例2之各樣品的基底電鍍層生長面的結晶組織與具有與軋製方向相同的配向的結晶配向及接近軋製方向的配向的結晶配向的晶粒有關聯。 On the other hand, it was confirmed that crystal grains having a large particle diameter were formed on the growth surface of the underlying plating layer of each of the samples of Comparative Example 1 and Comparative Example. Further, it was confirmed that these crystal grains were continuously formed in a predetermined length along the rolling direction (the vertical direction of the paper surface). In other words, it was confirmed that the crystal structure of the underlying plating layer growth surface of each of the samples of Comparative Example 1 and Comparative Example 2 was associated with the crystal orientation of the alignment in the same direction as the rolling direction and the crystal orientation of the alignment in the direction of the rolling direction. .

(CI值的累計分佈的解析結果) (analysis result of cumulative distribution of CI values)

另外,將實施例1、實施例2、實施例9、比較例1以及比較例2之各樣品的CI值的累計分佈的解析結果示於第4圖。第4圖所示為CI值與CI值的累計比例的關係的曲線圖。即,在第4圖所示的曲線圖中,例如CI值為0.3的地方的CI值的累計比例表示的是CI值為0.3以下的全部的測定點(也包括例如CI值為0.1、0.2的測定點)的比例。根據第4圖以及表1確認出,在規定的觀察區域,關於CI值為0.1以下的測定點的比例,在實施例1的樣品中為85%,在實施例2的樣品中為68%,在實施例9的樣品中為52%,在比較例1的樣品中為37%,在比較例2的樣品中為16%。另外,根據第4圖確認出,在實施例1、實施例2以及實施例9的各樣品中,CI值超過0.1的測定點少,因而CI值超過0.1時,則累計曲線圖的梯度變為平緩。另外確認出,在比較例1 以及比較例2的各樣品中,由於CI值超過0.1的測定點多,因而與實施例1、實施例2以及實施例9之各樣品的累計曲線圖相比,CI值超過0.1的地方的曲線的梯度變大。 Further, the analysis results of the cumulative distribution of the CI values of the respective samples of Example 1, Example 2, Example 9, Comparative Example 1, and Comparative Example 2 are shown in Fig. 4 . Figure 4 is a graph showing the relationship between the CI value and the cumulative ratio of CI values. That is, in the graph shown in Fig. 4, for example, the cumulative ratio of the CI values in the place where the CI value is 0.3 indicates all the measurement points having a CI value of 0.3 or less (including, for example, a CI value of 0.1 or 0.2). The ratio of the measurement point). According to Fig. 4 and Table 1, it was confirmed that the ratio of the measurement points having a CI value of 0.1 or less in the predetermined observation region was 85% in the sample of Example 1, and 68% in the sample of Example 2, It was 52% in the sample of Example 9, 37% in the sample of Comparative Example 1, and 16% in the sample of Comparative Example 2. Further, it was confirmed from Fig. 4 that in each of the samples of Example 1, Example 2, and Example 9, the number of measurement points having a CI value exceeding 0.1 was small, and thus when the CI value exceeded 0.1, the gradient of the cumulative graph became gentle. Also confirmed that in Comparative Example 1 In each of the samples of Comparative Example 2, since the CI value exceeded 0.1, the curve of the CI value exceeded 0.1 as compared with the cumulative graph of each of the samples of Example 1, Example 2, and Example 9. The gradient becomes larger.

(銅帶的基底電鍍層生長面的評價結果) (Evaluation results of the growth surface of the base plating layer of the copper strip)

根據第3圖和第4圖確認出,在銅帶的基底電鍍層生長面,CI值為0.1以下的測定點越多,則在觀察區域內越多地形成有非晶質的區域或微細晶粒區域。即確認出,CI值為0.1以下的測定點是非晶質的區域或微細晶粒區域,因而是無法正確地測定結晶配向的地方。 According to Fig. 3 and Fig. 4, it was confirmed that the more the measurement points having a CI value of 0.1 or less on the growth surface of the base plating layer of the copper strip, the more amorphous regions or fine crystal grains are formed in the observation region. Grain area. In other words, it was confirmed that the measurement point having a CI value of 0.1 or less is an amorphous region or a fine crystal grain region, and thus the crystal alignment cannot be accurately measured.

<反射率的評價> <Evaluation of reflectance>

接著,在實施例1~9以及比較例1~8之各樣品的基底電鍍層生長面上,在表4所示的條件下藉由生長而形成基底電鍍層,在基底電鍍層上藉由生長而形成表面電鍍層,從而分別製作出電鍍銅帶。然後,測定表面電鍍層的反射率來評價。 Next, on the underlying plating growth faces of the samples of Examples 1 to 9 and Comparative Examples 1 to 8, under the conditions shown in Table 4, a base plating layer was formed by growth, and growth was performed on the underlying plating layer. A surface plating layer is formed to separately produce an electroplated copper strip. Then, the reflectance of the surface plating layer was measured and evaluated.

(前處理步驟) (pre-processing steps)

即,首先,對於實施例1~9以及比較例1~8的各樣品,在表4所示的條件下,進行陰極電解脫脂步驟和酸洗步驟,進行將樣品的表面清潔化的前處理。即,在陰極電解脫脂步驟中,使用SUS板作為陽極,在包含氫氧化鈉20g/L和碳酸鈉20g/L的水溶液中,將液溫設為40℃,將電流密度設為5A/dm2,將處理時間設為30秒,對各樣品進行電解脫脂處理。陰極電解脫脂步驟結束後,將各樣品進行水洗。然後,在酸洗步驟中,在包含硫酸5wt%和過硫酸鉀120g/L的水溶液中,將水溶液的液溫設為室溫,將各樣品浸漬於水溶液10秒,進行酸洗處理。在酸洗步驟中,因溫度條件、過硫酸鉀(氧化劑)的劣化等而使蝕刻速度發生變動的情況下,以蝕刻量為50nm~100nm的 方式,適當調整例如酸洗處理的處理時間(浸漬時間)即可。由此,去除形成於各樣品的表面的自然氧化膜、附著於各樣品的表面的污染物質。 Specifically, first, each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 was subjected to a cathodic electrolytic degreasing step and a pickling step under the conditions shown in Table 4, and a pretreatment for cleaning the surface of the sample was performed. That is, in the cathode electrolytic degreasing step, a SUS plate was used as an anode, and in an aqueous solution containing 20 g/L of sodium hydroxide and 20 g/L of sodium carbonate, the liquid temperature was set to 40 ° C, and the current density was set to 5 A/dm 2 . The treatment time was set to 30 seconds, and each sample was subjected to electrolytic degreasing treatment. After the end of the cathodic electrolytic degreasing step, each sample was washed with water. Then, in the pickling step, the liquid temperature of the aqueous solution was set to room temperature in an aqueous solution containing 5 wt% of sulfuric acid and 120 g/L of potassium persulfate, and each sample was immersed in an aqueous solution for 10 seconds to carry out pickling treatment. In the pickling step, when the etching rate is changed by temperature conditions, deterioration of potassium persulfate (oxidizing agent), etc., the processing time of the pickling treatment is appropriately adjusted so that the etching amount is 50 nm to 100 nm (impregnation) Time). Thereby, the natural oxide film formed on the surface of each sample and the contaminant adhering to the surface of each sample were removed.

(基底電鍍層形成步驟) (Substrate plating step forming step)

接著,在結束上述的前處理步驟的實施例1~9以及比較例1~8之各樣品的基底電鍍層生長面,在表4所示的條件下,藉由生長而形成規定厚度的基底電鍍層。作為基底電鍍層,生長銅(Cu)電鍍層或鎳(Ni)電鍍層中的任一個。又,基底電鍍層的目標電鍍厚度(目標成膜量)形成為1μm。 Next, the base plating layer growth surface of each of the samples 1 to 9 and the comparative examples 1 to 8 of the above pretreatment step was completed, and under the conditions shown in Table 4, a base plating of a predetermined thickness was formed by growth. Floor. As the underlying plating layer, any one of a copper (Cu) plating layer or a nickel (Ni) plating layer is grown. Further, the target plating thickness (target filming amount) of the underlying plating layer was formed to be 1 μm.

即,形成Cu電鍍層作為基底電鍍層的情況下,在基底電鍍層形成步驟中,使用Cu板作為陽極,在包含硫酸銅五水合物200g/L和硫酸100g/L的水溶液中,將液溫設為40℃,將電流密度設為5A/dm2,將處理時間設為55秒,藉由生長而形成基底電鍍層。 That is, in the case where a Cu plating layer is formed as the underlying plating layer, in the base plating layer forming step, a Cu plate is used as an anode, and in a solution containing copper sulfate pentahydrate 200 g/L and sulfuric acid 100 g/L, the liquid temperature is used. The substrate plating layer was formed by growth at 40 ° C, a current density of 5 A/dm 2 , and a treatment time of 55 seconds.

另外,形成Ni電鍍層作為基底電鍍層的情況下,在基底電鍍層形成步驟中,使用Ni板作為陽極,在包含硫酸鎳六水合物280g/L和氯化鎳六水合物45g/L以及硼酸45g/L的水溶液中,將液溫設為40℃,將電流密度設為5A/dm2,將處理時間設為55秒,藉由生長而形成基底電鍍層。 Further, in the case where a Ni plating layer is formed as the underlying plating layer, in the base plating layer forming step, a Ni plate is used as an anode, and nickel sulfate hexahydrate 280 g/L and nickel chloride hexahydrate 45 g/L and boric acid are contained. In the 45 g/L aqueous solution, the liquid temperature was set to 40 ° C, the current density was set to 5 A/dm 2 , and the treatment time was set to 55 seconds, and the underlying plating layer was formed by growth.

(表面電鍍層形成步驟) (surface plating layer forming step)

接著,對於形成有基底電鍍層的實施例1~9以及比較例1~8的各樣品,在表4所示的條件下,藉由生長而形成表面電鍍層。即,在各樣品的基底電鍍層上,藉由生長而形成作為表面電鍍層的銀(Ag)電鍍層。又,表面電鍍層的目標電鍍厚(目標成膜量)形成為3μm。 Next, each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 in which the underlying plating layer was formed was subjected to growth under the conditions shown in Table 4 to form a surface plating layer. That is, a silver (Ag) plating layer as a surface plating layer was formed by growth on the underlying plating layer of each sample. Further, the target plating thickness (target filming amount) of the surface plating layer was formed to be 3 μm.

即,在表面電鍍層形成步驟中,在包含氰化銀36g/L、氰化鉀60g/L、碳酸鉀15g/L、硒氰酸鉀70mg/L的水溶液中,將液溫設為室溫,將電流密度設為4A/dm2,將處理時間設為210秒,藉由生長而形成作為表面電鍍層的Ag電鍍層。 That is, in the surface plating layer forming step, the liquid temperature is set to room temperature in an aqueous solution containing 36 g/L of silver cyanide, 60 g/L of potassium cyanide, 15 g/L of potassium carbonate, and 70 mg/L of potassium selenocyanate. The current density was set to 4 A/dm 2 , and the treatment time was set to 210 seconds, and an Ag plating layer as a surface plating layer was formed by growth.

(反射率的測定) (Measurement of reflectance)

接著,對藉由使用實施例1~9以及比較例1~8之各樣品而製作出的電鍍銅帶的反射率進行測定。對表面電鍍層形成步驟結束後的各樣品進行反射率的測定。即,對形成有基底電鍍層以及表面電鍍層的各樣品進行反射率的測定。關於各樣品的反射率的測定,在表5所示的條件下,如以下所示那樣進行。 Next, the reflectance of the electroplated copper strip produced by using each of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 was measured. The reflectance of each sample after the completion of the surface plating layer formation step was measured. That is, the reflectance of each sample in which the underlying plating layer and the surface plating layer were formed was measured. The measurement of the reflectance of each sample was performed as follows, under the conditions shown in Table 5.

如表5所示那樣,作為測定反射率的裝置,使用組合有Ocean Photonics股份有限公司製的裝置的裝置。而且,使照射光的波長在350nm~850nm的範圍變化,分別測定各波長下的反射率。首先,將350nm~850nm的波長分別照射於作為標準板的鏡面板的表面,分別測定各波長下的反射光量。接著,向實施例1~9以及比較例1~8之各樣品的表面電鍍層的表面,分別照射350nm~850nm的波長,分別測定各波長下的反射光量。然後,算出各波長處的各樣品的反射光量相對於標準板的反射光量的比率,將其設為各樣品的反射率(%)。即,各樣品的反射率(%)由將標準板的反射率設為100%時的相對反射率進行表示。因此,反射率超過100%的情況下,表示反射光量比標準板多,並非比入射光多的光被反射。又,在本實施例中,為簡便,以人眼中的感光度高的波長550nm處的反射率進行比較。將其結果示於表1。 As shown in Table 5, as a device for measuring the reflectance, a device in which a device manufactured by Ocean Photonics Co., Ltd. was combined was used. Further, the wavelength of the irradiation light was changed in the range of 350 nm to 850 nm, and the reflectance at each wavelength was measured. First, wavelengths of 350 nm to 850 nm were respectively irradiated onto the surface of a mirror panel as a standard plate, and the amount of reflected light at each wavelength was measured. Next, the surfaces of the surface plating layers of the samples of Examples 1 to 9 and Comparative Examples 1 to 8 were each irradiated with wavelengths of 350 nm to 850 nm, and the amounts of reflected light at respective wavelengths were measured. Then, the ratio of the amount of reflected light of each sample at each wavelength to the amount of reflected light of the standard plate was calculated, and this was set as the reflectance (%) of each sample. That is, the reflectance (%) of each sample is represented by the relative reflectance when the reflectance of the standard plate is 100%. Therefore, when the reflectance exceeds 100%, the amount of reflected light is larger than that of the standard plate, and more light than the incident light is reflected. Further, in the present embodiment, for the sake of simplicity, the reflectance at a wavelength of 550 nm having a high sensitivity in the human eye is compared. The results are shown in Table 1.

(反射率的評價) (evaluation of reflectance)

第5圖中以曲線圖來表示在各波長使用實施例1以及比較例2之各樣品而形成的電鍍銅帶的反射率的測定結果。根據第5圖確認出,藉由使用實施例1的樣品而形成的電鍍銅帶與藉由使用比較例2的樣品而形成的電鍍銅帶相比,在整個可見光波長區域中(即,即使在任一個波長下)反射率變高。例如,照射人眼中的感光度最高的550nm的波長的光時,藉由使用實施例1的樣品而形成的電鍍銅帶的反射率為113%,相對於此,藉由使用比較例2的樣品而形成的電鍍銅帶的反射率為98%。又,如上述那樣,反射率是將標準板的反射光量設為100%時的相對反射率。因此,反射率為113%是指相比於標準板多反射13%。 In Fig. 5, the measurement results of the reflectance of the electroplated copper strip formed by using each of the samples of Example 1 and Comparative Example 2 at respective wavelengths are shown in a graph. It was confirmed from Fig. 5 that the electroplated copper strip formed by using the sample of Example 1 was in the entire visible light wavelength region as compared with the electroplated copper strip formed by using the sample of Comparative Example 2 (i.e., even in any At one wavelength, the reflectance becomes high. For example, when light having a wavelength of 550 nm having the highest sensitivity in the human eye is irradiated, the reflectance of the plated copper strip formed by using the sample of Example 1 is 113%, whereas the sample of Comparative Example 2 is used. The resulting electroplated copper strip had a reflectance of 98%. Moreover, as described above, the reflectance is a relative reflectance when the amount of reflected light of the standard plate is 100%. Therefore, a reflectance of 113% means 13% more reflection than a standard plate.

另外,第6圖(a)表示藉由使用實施例1的樣品而形成的電鍍銅帶 的表面電鍍層的表面的SEM圖像的一個例子,第6圖(b)表示藉由使用比較例2的樣品而形成的電鍍銅帶的表面電鍍層的表面的SEM圖像的一個例子。根據第6圖確認出,藉由使用實施例1的樣品而形成的電鍍銅帶的表面電鍍層的表面與藉由使用比較例2的樣品而形成的電鍍銅帶相比,是平整且均勻,平滑度高。與此相對,確認出,在藉由使用比較例2的樣品而形成的電鍍銅帶的表面電鍍層的表面,沿著軋製方向(紙面的左右方向)形成山脈狀的凸部,平滑度低。 In addition, Fig. 6(a) shows a plated copper strip formed by using the sample of Example 1. An example of an SEM image of the surface of the surface plating layer, and FIG. 6(b) shows an example of an SEM image of the surface of the surface plating layer of the plated copper strip formed by using the sample of Comparative Example 2. According to FIG. 6, it was confirmed that the surface of the surface plating layer of the electroplated copper strip formed by using the sample of Example 1 was flat and uniform as compared with the electroplated copper strip formed by using the sample of Comparative Example 2. Smoothness is high. On the other hand, it was confirmed that a mountain-like convex portion was formed along the rolling direction (the horizontal direction of the paper surface) on the surface of the surface plating layer of the plated copper strip formed by using the sample of Comparative Example 2, and the smoothness was low. .

另外確認出,藉由將第5圖與第6圖進行比較,在銅帶的基底電鍍層生長面形成有非晶質的區域或微細晶粒區域時,則基底電鍍層的生長速度在基底電鍍層生長面形成為面內均一。由此確認出,由於基底電鍍層在基底電鍍層生長面上面內均一地生長,因而基底電鍍層的表面形成為平整。其結果確認出,在基底電鍍層上,可形成表面平整的表面電鍍層(Ag電鍍的層),可提高表面電鍍層的反射率。 Further, it was confirmed that when the amorphous region or the fine crystal grain region was formed on the growth surface of the underlying plating layer of the copper strip by comparing FIG. 5 with FIG. 6, the growth rate of the underlying plating layer was in the substrate plating. The layer growth surface is formed to be in-plane uniform. From this, it was confirmed that since the underlying plating layer was uniformly grown on the growth surface of the underlying plating layer, the surface of the underlying plating layer was formed to be flat. As a result, it was confirmed that a surface plating layer (Ag plating layer) having a flat surface can be formed on the underlying plating layer, and the reflectance of the surface plating layer can be improved.

<綜合評價> <Comprehensive evaluation>

根據表1確認出,藉由使用實施例1~9的樣品而形成的電鍍銅帶與標準板相比較而言,反射率變高。即確認出,關於CI值為0.1以下的測定點的比例為50%以上的樣品,與銅帶的形成材料無關,反射率形成為108%~116%。由此確認出,如實施例1~9的樣品那樣,在基底電鍍層生長面形成有非晶質的區域或微細晶粒區域時,則基底電鍍層的生長速度在基底電鍍層生長面形成為面內均一,基底電鍍層的表面形成為平整。其結果確認出,基底電鍍層上形成的表面電鍍層(Ag電鍍層)的表面變為平整,反射率變高。 According to Table 1, it was confirmed that the electroplated copper strip formed by using the samples of Examples 1 to 9 had a higher reflectance than the standard plate. In other words, it was confirmed that the sample having a CI value of 0.1 or less at a measurement point of 50% or more has a reflectance of 108% to 116% irrespective of the material for forming the copper strip. From this, it was confirmed that, as in the samples of Examples 1 to 9, when an amorphous region or a fine crystal grain region was formed on the growth surface of the underlying plating layer, the growth rate of the underlying plating layer was formed on the growth surface of the underlying plating layer. The surface is uniform and the surface of the base plating layer is formed to be flat. As a result, it was confirmed that the surface of the surface plating layer (Ag plating layer) formed on the underlying plating layer was flat and the reflectance was high.

將這樣的實施例1~9的各樣品用於例如LED(LED模組)時,則LED的光學性能的評價變高。即,例如,利用藉由使用積分球測定出的總光通量進行LED的光學性能的評價的情況下,可獲得高的總光通量。又,表面電鍍層的反射率越高,則LED的光學性能的評價越變高、即,總光通量越變大。 When each of the samples of Examples 1 to 9 is used for, for example, an LED (LED module), the evaluation of the optical performance of the LED is high. That is, for example, when the optical performance of the LED is evaluated by the total luminous flux measured by using the integrating sphere, a high total luminous flux can be obtained. Further, the higher the reflectance of the surface plating layer, the higher the evaluation of the optical performance of the LED, that is, the larger the total luminous flux.

與此相對確認出,藉由使用比較例1~8的樣品形成的電鍍銅帶,與標準板相比較而言,反射率變低。即確認出,CI值為0.1以下的測定點的比例小於50%的樣品的反射率形成為95%~99%。由此確認出,銅 帶的基底電鍍層生長面是結晶性高的區域(不是非晶質的區域或微細晶粒區域的區域)多的面時,則基底電鍍層起因於基底電鍍層生長面的晶粒(結晶組織)的結晶配向而磊晶地生長,在基底電鍍層生長面,在基底電鍍層的成膜量的方面產生差異。即確認出,在比較例1~8的樣品中,在基底電鍍層生長面基底電鍍層的生長速度沒有形成為面內均一。因此確認出,基底電鍍層在基底電鍍層生長面上不是面內均一地生長,使得基底電鍍層的表面變得不平整。其結果確認出,在比較例1~8的樣品中,在基底電鍍層上形成的表面電鍍層的表面形成山脈狀的凸部,平滑度變低。由此確認出,在比較例1~8的樣品中,表面電鍍層的反射率變低。 On the other hand, it was confirmed that the electroplated copper strip formed using the samples of Comparative Examples 1 to 8 had a lower reflectance than the standard plate. That is, it was confirmed that the reflectance of the sample having a CI value of 0.1 or less at a measurement point of less than 50% was 95% to 99%. This confirms that copper When the growth surface of the base plating layer of the belt is a surface having a high crystallinity (not a region of an amorphous region or a fine crystal grain region), the base plating layer is caused by crystal grains (crystal structure) of the growth surface of the base plating layer. The crystal orientation is epitaxially grown, and a difference occurs in the amount of film formation of the underlying plating layer on the growth surface of the underlying plating layer. That is, it was confirmed that in the samples of Comparative Examples 1 to 8, the growth rate of the underlying plating layer on the underlying plating layer growth surface was not formed to be in-plane uniform. Therefore, it was confirmed that the underlying plating layer was not uniformly grown in-plane on the growth surface of the underlying plating layer, so that the surface of the underlying plating layer became uneven. As a result, it was confirmed that in the samples of Comparative Examples 1 to 8, a mountain-like convex portion was formed on the surface of the surface plating layer formed on the underlying plating layer, and the smoothness was lowered. From this, it was confirmed that in the samples of Comparative Examples 1 to 8, the reflectance of the surface plating layer was lowered.

Claims (7)

一種銅帶,其特徵在於,其為具有基底電鍍層生長面的銅帶,以所述基底電鍍層的生長速度在所述銅帶的基底電鍍層生長面形成為面內均一的方式,在所述基底電鍍層生長面,形成有非晶質的區域或由具有以直徑換算為10nm以下的晶粒粒徑的晶粒形成的區域中的至少任一個,其中,所述基底電鍍層生長面,為藉由利用EBSD法以測定區域為90μm×120μm並且以測定間隔為0.2μm進行測定而獲得的可靠性指數為0.1以下之測定點的比例為50%以上的面。 A copper strip characterized in that it is a copper strip having a growth layer of a base plating layer, and the growth surface of the base plating layer of the copper strip is formed into an in-plane uniform manner at a growth rate of the base plating layer. The underlying plating layer growth surface is formed with at least one of an amorphous region or a region formed of crystal grains having a grain size of 10 nm or less in terms of a diameter, wherein the underlying plating layer growth surface, In the EBSD method, the ratio of the measurement points having a reliability index of 0.1 or less obtained by measurement in a measurement region of 90 μm × 120 μm and a measurement interval of 0.2 μm is 50% or more. 如申請專利範圍第1項所述的銅帶,其中,所述可靠性指數的測定是利用化學蝕刻在所述基底電鍍層生長面去除50nm以上之後進行。 The copper tape according to claim 1, wherein the reliability index is measured by chemical etching after removing the growth surface of the underlying plating layer by 50 nm or more. 一種如申請專利範圍第1項或第2項所述之銅帶,其特徵在於,所述銅帶是由以下的任一者所組成:包含2.1wt%~2.6wt%的鐵、0.05wt%~0.2wt%的鋅、0.015wt%~0.15wt%的磷,並且剩餘部分由97wt%以上的銅以及不可避免的雜質形成的銅合金;包含0.0010wt%以下的氧,並且剩餘部分由99.95wt%以上的Cu以及不可避免的雜質形成的銅;包含0.015wt%~0.03wt%的鋯,並且Cu以及Zr的合計重量為99.96wt%以上的銅合金;或包含1.5wt%~2.0wt%的鋅、2.2wt%~2.8wt%的鎳、0.015wt%~0.06wt%的磷、0.3wt%~0.7wt%的矽,並且剩餘部分由Cu以及不可避免的雜質形成的銅合金。 A copper strip according to claim 1 or 2, wherein the copper strip is composed of any one of the following: comprising 2.1 wt% to 2.6 wt% of iron, 0.05 wt% ~0.2wt% zinc, 0.015wt%~0.15wt% phosphorus, and the balance is more than 97wt% copper and copper alloy formed by unavoidable impurities; contains 0.0010wt% or less of oxygen, and the remaining part is 99.95wt More than % of Cu and copper formed by unavoidable impurities; a copper alloy containing 0.015 wt% to 0.03 wt% of zirconium and a total weight of Cu and Zr of 99.96 wt% or more; or 1.5 wt% to 2.0 wt% Zinc, 2.2 wt% to 2.8 wt% of nickel, 0.015 wt% to 0.06 wt% of phosphorus, 0.3 wt% to 0.7 wt% of rhodium, and the balance being a copper alloy formed of Cu and unavoidable impurities. 一種電鍍銅帶,其特徵在於,係在申請專利範圍第1項至第3項中任一項所述之銅帶的基底電鍍層生長面,藉由生長而形成有Cu電鍍層或Ni電鍍層中的至少任一個,以作為基底電鍍層。 An electroplated copper strip, characterized in that the base plating layer growth surface of the copper strip according to any one of claims 1 to 3 is formed by growing a Cu plating layer or a Ni plating layer. At least one of them is used as a base plating layer. 如申請專利範圍第4項所述的電鍍銅帶,其中,在所述基底電鍍層上,藉由生長而形成有Ag電鍍層作為將光反射的表面電鍍層。 The electroplated copper strip according to claim 4, wherein an Ag plating layer is formed as a surface plating layer for reflecting light on the underlying plating layer by growth. 一種導線架,其特徵在於,其係藉由使用申請專利範圍第4項或第5項所述的電鍍銅帶而形成者。 A lead frame characterized in that it is formed by using an electroplated copper strip as described in claim 4 or 5. 一種LED模組,其特徵在於,於申請專利範圍第6項所述的導線架上搭載有LED晶片。 An LED module characterized in that an LED chip is mounted on a lead frame as described in claim 6 of the patent application.
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