TWI647007B - Substrate processing apparatus and substrate processing method - Google Patents

Substrate processing apparatus and substrate processing method Download PDF

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TWI647007B
TWI647007B TW106123050A TW106123050A TWI647007B TW I647007 B TWI647007 B TW I647007B TW 106123050 A TW106123050 A TW 106123050A TW 106123050 A TW106123050 A TW 106123050A TW I647007 B TWI647007 B TW I647007B
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inert gas
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松井則政
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斯庫林集團股份有限公司
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
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Abstract

一種基板處理裝置及基板處理方法，係抑制基板之損傷並且改善基板之處理效率。 A substrate processing device and a substrate processing method, which suppress the damage of the substrate and improve the processing efficiency of the substrate.

基板處理裝置係具備：處理槽，用以收容磷酸水溶液，且對已浸漬於該磷酸水溶液中的基板施予蝕刻處理；水蒸氣供給機構，用以供給水蒸氣；惰性氣體供給機構，用以供給惰性氣體；混合機構，係從水蒸氣供給機構供給水蒸氣，並且從惰性氣體供給機構供給惰性氣體，且混合所供給來的水蒸氣和惰性氣體以生成混合氣體；氣泡產生器，係從混合機構供給混合氣體，並且將所供給來的混合氣體吹出至磷酸水溶液中以產生混合氣體之氣泡；以及流量調整機構，係調整水蒸氣供給機構所供給的水蒸氣之流量和惰性氣體供給機構所供給的惰性氣體之流量，以使混合氣體之濕度成為目標濕度。 The substrate processing apparatus includes: a processing tank for accommodating a phosphoric acid aqueous solution and performing etching treatment on the substrate immersed in the phosphoric acid aqueous solution; a steam supply mechanism for supplying steam; an inert gas supply mechanism for supply Inert gas; mixing mechanism, which supplies steam from the steam supply mechanism, and inert gas from the inert gas supply mechanism, and mixes the supplied steam and inert gas to generate a mixed gas; bubble generator, which is from the mixing mechanism Supply the mixed gas and blow the supplied mixed gas into the phosphoric acid aqueous solution to generate bubbles of the mixed gas; and the flow rate adjustment mechanism is to adjust the flow rate of the water vapor supplied by the water vapor supply mechanism and the inert gas supply mechanism The flow rate of the inert gas so that the humidity of the mixed gas becomes the target humidity.

Description

基板處理裝置及基板處理方法    Substrate processing device and substrate processing method   

本發明係關於一種藉由通氣攪拌(aeration-agitation)中的處理液來處理基板的基板處理技術。在處理對象之基板中係包含有半導體晶圓(wafer)、液晶顯示裝置用玻璃基板、FED(Field Emission Display；場發射顯示器)用基板、電漿顯示器面板(plasma display panel)用玻璃基板、光碟用基板、磁碟用基板、磁光碟用基板及光罩(photomask)用基板等的各種基板。 The present invention relates to a substrate processing technology for processing a substrate by a processing liquid in aeration-agitation. The substrate to be processed includes a semiconductor wafer (wafer), a glass substrate for a liquid crystal display device, a substrate for a field emission display (FED), a glass substrate for a plasma display panel, and an optical disc Various substrates such as substrates for magnetic discs, substrates for magneto-optical discs, substrates for photomasks, etc.

在專利文獻1中已有揭示一種基板處理裝置，該基板處理裝置係在保持蝕刻(etching)液的蝕刻槽配置擴散器(diffuser)，將濕潤過的氣體供給至擴散器內部之氣體供給管，且使濕潤過的氣體從與氣體供給管連通的多數個小孔吹出至蝕刻液中，藉此使氣泡產生於蝕刻液中並進行蝕刻液之通氣攪拌。該裝置係使藉由空氣壓縮機(compressor)所壓縮且除濕過的空氣通過加濕槽內之水中使其濕潤來生成 濕潤過的空氣且供給至擴散器。在專利文獻1中，作為濕潤過的氣體，還有揭示以下的其他手法：使用藉由對未加濕之氣體施加霧狀之水所生成的加濕氣體的手法；以及使用藉由蒸氣產生器所產生的水蒸氣的手法。依據該裝置，能藉由使濕潤過的氣體通過擴散器之小孔來防止小孔之內壁的乾燥。藉此，能防止藉由水垢(scale)之附著所致的小孔之閉塞。 Patent Document 1 has disclosed a substrate processing apparatus in which a diffuser is arranged in an etching tank holding an etching solution, and the wetted gas is supplied to a gas supply pipe inside the diffuser. In addition, the wetted gas is blown out into the etching solution through a plurality of small holes communicating with the gas supply tube, thereby generating bubbles in the etching solution and performing aeration and stirring of the etching solution. This device allows the air compressed and dehumidified by the compressor to be humidified by the water in the humidification tank to generate humidified air and supply it to the diffuser. In Patent Document 1, as a humidified gas, there are other methods disclosed: a method of using a humidified gas generated by applying mist water to an unhumidified gas; and a method of using a steam generator The technique of the generated water vapor. According to this device, the inner wall of the small hole can be prevented from drying by passing the humidified gas through the small hole of the diffuser. By this, it is possible to prevent the occlusion of small holes caused by the adhesion of scale.

(先前技術文獻) (Prior technical literature)

(專利文獻) (Patent Literature)

專利文獻1：日本特開2008-147637號公報。 Patent Document 1: Japanese Patent Laid-Open No. 2008-147637.

在將基板浸漬於已加熱至沸點附近之溫度(例如，160℃)的磷酸水溶液中以進行蝕刻處理的裝置中，當使乾燥過的氣體吹出至磷酸水溶液中以產生氣泡時，就會因氣泡之溫度上升和從磷酸水溶液中蒸發後的水蒸氣進入氣泡中而擴大氣泡直徑，使基板因氣泡而蒙受損傷(damage)。 In an apparatus in which a substrate is immersed in a phosphoric acid aqueous solution that has been heated to a temperature near the boiling point (for example, 160 ° C.) for etching treatment, when the dried gas is blown into the phosphoric acid aqueous solution to generate bubbles, the bubbles The temperature rises and the water vapor evaporated from the phosphoric acid aqueous solution enters the bubbles to expand the bubble diameter, causing damage to the substrate due to the bubbles.

可認為只要使濕潤過的氣體吹出至磷酸水溶液中以產生氣泡，就能抑制從磷酸水溶液蒸發後的水蒸氣進入氣泡內並抑制氣泡之擴大，且可以減輕基板所蒙受的損傷，另一方面，可認為當氣泡過小時就會使磷酸水溶液之攪拌性 能降低並使蝕刻之效率降低。 It is considered that as long as the humidified gas is blown out into the phosphoric acid aqueous solution to generate bubbles, the vapor evaporated from the phosphoric acid aqueous solution can be suppressed from entering the bubbles and the expansion of the bubbles can be suppressed, and the damage to the substrate can be reduced. It is considered that when the bubbles are too small, the stirring performance of the phosphoric acid aqueous solution is reduced and the etching efficiency is reduced.

因此，為了抑制攪拌性能之降低並且抑制基板蒙受氣泡所帶來之損傷，就有必要將所產生之氣泡在通過基板時的氣泡直徑控制在可以維持攪拌性能並且抑制基板之損傷的大小。因此，有必要將濕潤過的氣體之濕度控制在滿足該條件的適當之範圍。 Therefore, in order to suppress the decrease of the stirring performance and the damage of the substrate from the bubbles, it is necessary to control the bubble diameter of the generated bubbles when passing through the substrate to a size that can maintain the stirring performance and suppress the damage of the substrate. Therefore, it is necessary to control the humidity of the humidified gas within an appropriate range that satisfies this condition.

在將藉由專利文獻1所揭示之各手法所生成的濕潤過的氣體供給至磷酸水溶液中的情況下，並不容易將該濕潤過的氣體之濕度控制在所期望的溫度。因此，會有難以抑制基板之損傷並且改善基板之處理效率的問題。 When the humidified gas generated by each method disclosed in Patent Document 1 is supplied to a phosphoric acid aqueous solution, it is not easy to control the humidity of the humidified gas to a desired temperature. Therefore, there is a problem that it is difficult to suppress the damage of the substrate and improve the processing efficiency of the substrate.

本發明係為了解決如此的問題而開發完成，其目的在於提供一種在藉由通氣攪拌中的磷酸水溶液來處理基板的技術中，可以抑制基板之損傷並且可以改善基板之處理效率的技術。 The present invention was developed to solve such a problem, and an object of the present invention is to provide a technology capable of suppressing damage to the substrate and improving the processing efficiency of the substrate in the technology for processing the substrate by the phosphoric acid aqueous solution during aeration and stirring.

為了解決上述之課題，第一態樣的基板處理裝置係具備：處理槽，用以收容磷酸水溶液，且對已浸漬於該磷酸水溶液中的基板施予蝕刻處理；水蒸氣供給機構，用以供給水蒸氣；惰性氣體供給機構，用以供給惰性氣體；混合機構，係從前述水蒸氣供給機構供給前述水蒸氣，並且從 前述惰性氣體供給機構供給前述惰性氣體，且混合所供給來的前述水蒸氣和前述惰性氣體以生成混合氣體；氣泡產生器，係從前述混合機構供給前述混合氣體，並且將所供給來的前述混合氣體吹出至前述磷酸水溶液中以產生前述混合氣體之氣泡；以及流量調整機構，係調整前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為目標濕度。 In order to solve the above-mentioned problems, the substrate processing apparatus of the first aspect is provided with: a processing tank for accommodating an aqueous phosphoric acid solution and subjecting the substrate immersed in the aqueous phosphoric acid solution to etching treatment; a steam supply mechanism for supplying Water vapor; inert gas supply mechanism for supplying inert gas; mixing mechanism for supplying the water vapor from the water vapor supply mechanism and supplying the inert gas from the inert gas supply mechanism and mixing the supplied water vapor And the inert gas to generate a mixed gas; a bubble generator that supplies the mixed gas from the mixing mechanism and blows the supplied mixed gas into the phosphoric acid aqueous solution to generate bubbles of the mixed gas; and a flow rate adjustment mechanism The flow rate of the water vapor supplied by the water vapor supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism are adjusted so that the humidity of the mixed gas becomes the target humidity.

第二態樣的基板處理裝置係如第一態樣的基板處理裝置，其中前述流量調整機構係調整前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為前述目標濕度，並且使前述混合氣體之流量成為目標流量。 The substrate processing apparatus of the second aspect is the substrate processing apparatus of the first aspect, wherein the flow rate adjustment mechanism adjusts the flow rate of the water vapor supplied by the water vapor supply mechanism and the inertness supplied by the inert gas supply mechanism The flow rate of the gas is such that the humidity of the mixed gas becomes the target humidity, and the flow rate of the mixed gas becomes the target flow rate.

第三態樣的基板處理裝置係如第二態樣的基板處理裝置，其中更具備：流量取得部，係取得使前述混合氣體之濕度成為前述目標濕度並且使前述混合氣體之流量成為前述目標流量時的前述水蒸氣供給機構所供給的水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量；以及調整機構控制部，係基於前述流量取得部所取得的前述水蒸氣之流量和前述惰性氣體之流量來控制前述流量調整機構。 The substrate processing apparatus of the third aspect is the substrate processing apparatus of the second aspect, further comprising: a flow rate acquisition unit that acquires the humidity of the mixed gas to the target humidity and the flow rate of the mixed gas to the target flow rate The flow rate of the water vapor supplied by the water vapor supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism at the time; and the adjustment mechanism control unit is based on the flow rate of the water vapor obtained by the flow rate acquisition unit and The flow rate of the inert gas controls the flow adjustment mechanism.

第四態樣的基板處理裝置係如第三態樣的基板處理裝置，其中前述流量取得部係藉由進行所決定的運算來取得使前述混合氣體之濕度成為前述目標濕度並且使前述混合氣體之流量成為前述目標流量時的前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量。 The substrate processing apparatus of the fourth aspect is the substrate processing apparatus of the third aspect, wherein the flow rate acquisition unit acquires the humidity of the mixed gas to the target humidity by performing the determined operation and the value of the mixed gas When the flow rate becomes the target flow rate, the flow rate of the steam supplied by the steam supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism.

第五態樣的基板處理裝置係如第一態樣至第四態樣中任一態樣的基板處理裝置，其中具備：水蒸氣加熱用加熱器，係將前述水蒸氣供給機構所供給的前述水蒸氣在供給至前述混合機構之前加熱；以及惰性氣體加熱用加熱器，係將前述惰性氣體供給機構所供給的前述惰性氣體在供給至前述混合機構之前加熱。 The substrate processing apparatus of the fifth aspect is the substrate processing apparatus of any one of the first aspect to the fourth aspect, which includes: a heater for steam heating, which is the The steam is heated before being supplied to the mixing mechanism; and the heater for inert gas heating is to heat the inert gas supplied from the inert gas supply mechanism before being supplied to the mixing mechanism.

第六態樣的基板處理裝置係如第一至第五態樣中任一態樣的基板處理裝置，其中更具備：混合氣體加熱用加熱器，係將前述混合氣體在供給至前述氣泡產生器之前加熱。 The substrate processing apparatus of the sixth aspect is the substrate processing apparatus of any of the first to fifth aspects, further comprising: a heater for heating the mixed gas, which supplies the mixed gas to the bubble generator Before heating.

第七態樣的基板處理方法，係對已浸漬於磷酸水溶液中的基板施予蝕刻處理；前述基板處理方法係具備：水蒸氣供給步驟，用以供給水蒸氣；惰性氣體供給步驟，用以供給惰性氣體；混合步驟，係混合在前述水蒸氣供給步 驟中所供給的前述水蒸氣和在前述惰性氣體供給步驟中所供給的前述惰性氣體以生成混合氣體；氣泡產生步驟，係將前述混合氣體吹出至前述磷酸水溶液中以產生前述混合氣體之氣泡；以及流量調整步驟，係調整在前述水蒸氣供給步驟中所供給的前述水蒸氣之流量和在前述惰性氣體供給步驟中所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為目標濕度。 The seventh aspect of the substrate processing method is to apply an etching treatment to a substrate that has been immersed in a phosphoric acid aqueous solution; the foregoing substrate processing method includes: a steam supply step for supplying steam; an inert gas supply step for supply An inert gas; a mixing step that mixes the steam supplied in the steam supply step and the inert gas supplied in the inert gas supply step to generate a mixed gas; a bubble generation step that blows out the mixed gas Into the phosphoric acid aqueous solution to generate bubbles of the mixed gas; and the flow rate adjustment step is to adjust the flow rate of the water vapor supplied in the water vapor supply step and the inert gas supplied in the inert gas supply step Flow rate so that the humidity of the mixed gas becomes the target humidity.

依據第一態樣的發明，混合機構係混合水蒸氣和惰性氣體以生成混合氣體，氣泡產生器係將混合氣體吹出至磷酸水溶液中以產生混合氣體之氣泡。然後，流量調整機構係調整水蒸氣供給機構所供給的水蒸氣之流量和惰性氣體供給機構所供給的惰性氣體之流量，以使混合氣體之濕度成為目標濕度。從而，只要將與氣泡之氣泡直徑對應的濕度設定在目標濕度，該氣泡之氣泡直徑係指表現基板蒙受氣泡所帶來之損傷的指標值滿足預定之條件，且表現基板之處理效率的指標值滿足預定之條件時的氣泡直徑，就可以抑制基板之損傷，並且可以改善基板之處理效率。 According to the invention of the first aspect, the mixing mechanism mixes water vapor and inert gas to generate a mixed gas, and the bubble generator blows the mixed gas into the phosphoric acid aqueous solution to generate bubbles of the mixed gas. Then, the flow rate adjustment mechanism adjusts the flow rate of the steam supplied by the water vapor supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism so that the humidity of the mixed gas becomes the target humidity. Therefore, as long as the humidity corresponding to the bubble diameter of the bubble is set at the target humidity, the bubble diameter of the bubble refers to an index value that represents the damage caused by the bubble to the substrate and meets a predetermined condition, and an index value that represents the processing efficiency of the substrate The bubble diameter when the predetermined conditions are satisfied can suppress the damage of the substrate and improve the processing efficiency of the substrate.

依據第二態樣的發明，流量調整機構係可以調整水蒸氣供給機構所供給的水蒸氣之流量和惰性氣體供給機構所供給的惰性氣體之流量，一邊將混合氣體之流量設為目標流量，一邊將混合氣體之濕度設為目標濕度。從而，可以 使處理槽中之磷酸水溶液藉由氣泡所攪拌的範圍穩定並且謀求抑制基板之損傷和改善基板之處理效率。 According to the invention of the second aspect, the flow rate adjustment mechanism can adjust the flow rate of the steam supplied by the water vapor supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism, while setting the flow rate of the mixed gas as the target flow rate. Set the humidity of the mixed gas to the target humidity. Therefore, it is possible to stabilize the range in which the phosphoric acid aqueous solution in the processing tank is stirred by the bubbles, and to suppress the damage of the substrate and improve the processing efficiency of the substrate.

依據第三態樣的發明，流量取得部係取得混合氣體之濕度成為目標濕度，並且混合氣體之流量成為目標流量時的水蒸氣之流量和惰性氣體之流量。調整機構控制部係基於流量取得部所取得的水蒸氣之流量和惰性氣體之流量來控制流量調整機構。從而，即便是目標濕度和目標流量有變動的情況下，仍可以將混合氣體之流量設為目標流量，將混合氣體之濕度設為目標濕度。 According to the invention of the third aspect, the flow rate acquisition unit acquires the flow rate of the water vapor and the flow rate of the inert gas when the humidity of the mixed gas becomes the target humidity, and the flow rate of the mixed gas becomes the target flow rate. The adjustment mechanism control unit controls the flow adjustment mechanism based on the water vapor flow rate and the inert gas flow rate acquired by the flow rate acquisition unit. Therefore, even if there is a change in the target humidity and the target flow rate, the flow rate of the mixed gas can be set as the target flow rate, and the humidity of the mixed gas can be set as the target humidity.

依據第四態樣的發明，流量取得部係藉由進行所決定的運算來取得混合氣體之濕度成為目標濕度，並且混合氣體之流量成為目標流量時的水蒸氣供給機構所供給的水蒸氣之流量和惰性氣體供給機構所供給的惰性氣體之流量。從而，即便是在目標濕度和目標流量有變動的情況下仍可以取得相應於目標濕度和目標流量的水蒸氣之流量和惰性氣體之流量。 According to the invention of the fourth aspect, the flow rate acquisition unit obtains the humidity of the mixed gas as the target humidity by performing the determined calculation, and the flow rate of the steam supplied by the steam supply mechanism when the flow rate of the mixed gas becomes the target flow And the flow rate of the inert gas supplied by the inert gas supply mechanism. Therefore, even when the target humidity and the target flow rate change, the flow rate of the water vapor and the flow rate of the inert gas corresponding to the target humidity and the target flow rate can be obtained.

依據第五態樣的發明，水蒸氣加熱用加熱器係將水蒸氣供給機構所供給的水蒸氣在供給至混合機構之前加熱，惰性氣體加熱用加熱器係將惰性氣體供給機構所供給的惰性氣體在供給至混合機構之前加熱。從而，可以在供給至混合機構的水蒸氣和惰性氣體混合並生成混合氣體時，控 制混合氣體之溫度降低而發生凝結水。 According to the invention of the fifth aspect, the steam heating heater system heats the steam supplied by the steam supply mechanism before supplying it to the mixing mechanism, and the inert gas heating heater system supplies the inert gas supplied by the inert gas supply mechanism It is heated before being supplied to the mixing mechanism. Therefore, when the steam supplied to the mixing mechanism is mixed with the inert gas to generate a mixed gas, the temperature of the mixed gas can be controlled to decrease and condensed water can be generated.

依據第六態樣的發明，混合氣體加熱用加熱器係將混合氣體在供給至氣泡產生器之前加熱。從而，可以在供給至氣泡產生器之前，抑制混合氣體之溫度降低。 According to the invention of the sixth aspect, the heater for heating the mixed gas heats the mixed gas before being supplied to the bubble generator. Therefore, before being supplied to the bubble generator, the temperature decrease of the mixed gas can be suppressed.

依據第七態樣的發明，混合步驟係混合水蒸氣和惰性氣體以生成混合氣體，氣泡產生步驟係將混合氣體吹出至磷酸水溶液中以產生混合氣體之氣泡。然後，流量調整步驟係調整在水蒸氣供給步驟中所供給的水蒸氣之流量和在惰性氣體供給步驟中所供給的惰性氣體之流量，以使混合氣體之濕度成為目標濕度。從而，只要將與氣泡之氣泡直徑對應的濕度設定在目標濕度，該氣泡之氣泡直徑係指表現基板蒙受氣泡所帶來之損傷的指標值滿足預定之條件，且表現基板之處理效率的指標值滿足預定之條件時的氣泡直徑，就可以抑制基板之損傷，並且可以改善基板之處理效率。 According to the invention of the seventh aspect, the mixing step mixes water vapor and inert gas to generate a mixed gas, and the bubble generation step blows the mixed gas into the phosphoric acid aqueous solution to generate bubbles of the mixed gas. Then, the flow rate adjustment step adjusts the flow rate of the water vapor supplied in the water vapor supply step and the flow rate of the inert gas supplied in the inert gas supply step so that the humidity of the mixed gas becomes the target humidity. Therefore, as long as the humidity corresponding to the bubble diameter of the bubble is set at the target humidity, the bubble diameter of the bubble refers to an index value that represents the damage caused by the bubble to the substrate and meets a predetermined condition, and an index value that represents the processing efficiency of the substrate The bubble diameter when the predetermined conditions are satisfied can suppress the damage of the substrate and improve the processing efficiency of the substrate.

1‧‧‧基板處理裝置 1‧‧‧Substrate processing device

2‧‧‧水蒸氣供給機構 2‧‧‧Water vapor supply mechanism

3‧‧‧惰性氣體供給機構 3‧‧‧Inert gas supply mechanism

4‧‧‧流量調整機構 4‧‧‧Flow adjustment mechanism

5‧‧‧混合機構 5‧‧‧ Mixed institutions

6‧‧‧基板處理機構 6‧‧‧Substrate processing mechanism

11‧‧‧CPU 11‧‧‧CPU

14‧‧‧記憶裝置 14‧‧‧memory device

15‧‧‧流量取得部 15‧‧‧Flow Acquisition Department

16‧‧‧調整機構控制部 16‧‧‧Adjustment mechanism control department

21‧‧‧純水供給源 21‧‧‧Pure water supply source

22‧‧‧水蒸氣生成槽 22‧‧‧Water vapor generating tank

23、34‧‧‧配管 23, 34‧‧‧ Piping

24‧‧‧配管(水蒸氣供給配管) 24‧‧‧Piping (water vapor supply piping)

25‧‧‧加熱器(純水加熱用加熱器) 25‧‧‧ heater (heater for pure water heating)

26‧‧‧壓力調整閥 26‧‧‧Pressure adjustment valve

27‧‧‧水位感測器 27‧‧‧Water level sensor

28‧‧‧加熱器(水蒸氣加熱用加熱器) 28‧‧‧ Heater (heater for steam heating)

29‧‧‧空間 29‧‧‧Space

31‧‧‧惰性氣體供給源 31‧‧‧Inert gas supply source

32‧‧‧調節器 32‧‧‧ Regulator

33‧‧‧加熱器(惰性氣體加熱用加熱器) 33‧‧‧ heater (heater for inert gas heating)

41、42‧‧‧流量控制機器 41、42‧‧‧Flow control machine

51‧‧‧配管(混合配管) 51‧‧‧Piping (hybrid piping)

52‧‧‧加熱器(混合氣體加熱用加熱器) 52‧‧‧ Heater (heater for mixed gas heating)

61‧‧‧處理槽 61‧‧‧Treatment tank

62‧‧‧配管(磷酸供給配管) 62‧‧‧Piping (Phosphoric acid supply piping)

64‧‧‧氣泡產生器(擴散器) 64‧‧‧Bubble generator (diffuser)

65‧‧‧流路 65‧‧‧Flow

66‧‧‧吐出口 66‧‧‧spit

67‧‧‧保持板 67‧‧‧Retaining plate

68‧‧‧升降機 68‧‧‧Lift

68a‧‧‧升降機頭部 68a‧‧‧Lift head

68b‧‧‧基板支撐構件 68b‧‧‧Substrate support member

81‧‧‧純水 81‧‧‧pure water

82‧‧‧水蒸氣 82‧‧‧Water vapor

83‧‧‧惰性氣體 83‧‧‧Inert gas

84‧‧‧混合氣體 84‧‧‧ Mixed gas

85‧‧‧氣泡 85‧‧‧Bubble

87‧‧‧磷酸水溶液 87‧‧‧ phosphoric acid aqueous solution

91、93、95、97‧‧‧溫度感測器 91, 93, 95, 97 ‧‧‧ temperature sensor

92、98‧‧‧濕度感測器 92、98‧‧‧Humidity sensor

94、96、99‧‧‧流量計 94, 96, 99‧‧‧ flowmeter

130‧‧‧控制部 130‧‧‧Control Department

D1‧‧‧口徑 D1‧‧‧ caliber

H0‧‧‧濕度 H0‧‧‧Humidity

H2‧‧‧目標濕度 H2‧‧‧Target humidity

P0‧‧‧設定壓力 P0‧‧‧Set pressure

PG‧‧‧程式 PG‧‧‧Program

Q0‧‧‧水蒸氣之流量 Q0‧‧‧Water vapor flow

Q1‧‧‧惰性氣體之流量 Q1‧‧‧Flow of inert gas

Q2‧‧‧目標流量 Q2‧‧‧Target flow

T0‧‧‧水蒸氣之溫度 T0‧‧‧Temperature of water vapor

T1‧‧‧惰性氣體之溫度 T1‧‧‧Inert gas temperature

T2‧‧‧目標溫度 T2‧‧‧Target temperature

W‧‧‧基板 W‧‧‧Substrate

W1‧‧‧基板群 W1‧‧‧ substrate group

圖1係示意性地顯示實施形態的基板處理裝置之概略構成的側面示意圖。 FIG. 1 is a side view schematically showing the schematic configuration of the substrate processing apparatus of the embodiment.

圖2係示意性地顯示圖1的基板處理機構之概略構成的立體圖。 FIG. 2 is a perspective view schematically showing the schematic configuration of the substrate processing mechanism of FIG. 1.

圖3係示意性地顯示圖2的基板處理機構之概略構成 的立體圖。 Fig. 3 is a perspective view schematically showing a schematic configuration of the substrate processing mechanism of Fig. 2.

圖4係示意性地顯示圖2的基板處理機構之氣泡產生器的側面剖視圖。 4 is a side cross-sectional view schematically showing a bubble generator of the substrate processing mechanism of FIG. 2.

圖5係以曲線圖(graph)形式來顯示容積絕對濕度與氣泡體積之擴大率之關係的示意圖。 FIG. 5 is a schematic diagram showing the relationship between the volume absolute humidity and the expansion rate of the bubble volume in the form of a graph.

圖6係顯示實施形態的基板處理裝置之動作的流程圖。 6 is a flowchart showing the operation of the substrate processing apparatus of the embodiment.

以下，一邊參照圖式一邊針對實施形態加以說明。以下的實施形態係使本發明具體化的一例，而非限定本發明之技術範圍的事例。又，在以下所參照的各圖中，為了容易理解起見，有的情況是誇張或簡化各部的尺寸或數目所圖示。又，在各圖中係在具有同樣之構成及功能的部分附記相同的符號，在下述說明中係省略重複說明。上下方向為鉛直方向，且升降機相對於處理槽內的氣泡產生器是在上。 Hereinafter, the embodiment will be described with reference to the drawings. The following embodiments are examples of embodying the present invention, and do not limit the technical scope of the present invention. In addition, in the drawings referred to below, for ease of understanding, there are cases where the size or number of each part is exaggerated or simplified. In addition, in each figure, parts having the same configuration and function are denoted by the same symbols, and repeated description is omitted in the following description. The vertical direction is the vertical direction, and the elevator is above the bubble generator in the treatment tank.

<1.基板處理裝置之構成> <1. Structure of substrate processing apparatus>

圖1係示意性地顯示實施形態的基板處理裝置1之概略構成的側面示意圖。基板處理裝置1係指對批量組合的複數片基板W(基板群W1)一起施予使用磷酸水溶液的蝕刻處理的批式(batch type)之基板處理裝置。 FIG. 1 is a schematic side view schematically showing the schematic configuration of the substrate processing apparatus 1 of the embodiment. The substrate processing apparatus 1 refers to a batch type substrate processing apparatus in which a plurality of substrates W (substrate group W1) combined in batches are subjected to an etching process using a phosphoric acid aqueous solution.

基板處理裝置1係具備：處理槽61；水蒸氣供給機構2，用以供給水蒸氣82；以及惰性氣體供給機構3，用以供給惰性氣體83。處理槽61係收容磷酸水溶液87，且對已浸漬於磷酸水溶液87中的基板W(基板群W1)施予蝕刻處理。 The substrate processing apparatus 1 includes: a processing tank 61; a water vapor supply mechanism 2 for supplying water vapor 82; and an inert gas supply mechanism 3 for supplying inert gas 83. The processing tank 61 accommodates the phosphoric acid aqueous solution 87 and applies an etching process to the substrate W (substrate group W1) that has been immersed in the phosphoric acid aqueous solution 87.

基板處理裝置1係更具備：流量調整機構4，用以調整水蒸氣供給機構2所供給的水蒸氣82之流量Q0和惰性氣體供給機構3所供給的惰性氣體83之流量Q1；混合機構5；以及氣泡產生器64，係收容於處理槽61內。混合機構5係從水蒸氣供給機構2供給有水蒸氣82，並且從惰性氣體供給機構3供給有惰性氣體83，且混合所供給來的水蒸氣82和惰性氣體83以生成混合氣體84。氣泡產生器64係被從混合機構5供給有混合氣體84，並且將所供給來的混合氣體84吹出至磷酸水溶液87中以產生混合氣體84之氣泡85。 The substrate processing apparatus 1 further includes a flow rate adjusting mechanism 4 for adjusting the flow rate Q0 of the water vapor 82 supplied by the water vapor supply mechanism 2 and the flow rate Q1 of the inert gas 83 supplied by the inert gas supply mechanism 3; the mixing mechanism 5; And the bubble generator 64 is housed in the processing tank 61. The mixing mechanism 5 is supplied with water vapor 82 from the water vapor supply mechanism 2 and inert gas 83 is supplied from the inert gas supply mechanism 3, and mixes the supplied water vapor 82 and the inert gas 83 to generate a mixed gas 84. The bubble generator 64 is supplied with the mixed gas 84 from the mixing mechanism 5 and blows the supplied mixed gas 84 into the phosphoric acid aqueous solution 87 to generate bubbles 85 of the mixed gas 84.

<水蒸氣供給機構2> <Water vapor supply mechanism 2>

水蒸氣供給機構2係對混合機構5之配管51供給水蒸氣82。水蒸氣供給機構2係具備：呈密閉的水蒸氣生成槽22，用以生成水蒸氣82；純水供給源21，用以供給純水81；以及加熱器(heater)25，用以加熱已收容於水蒸氣生成槽22的純水81並使其沸騰，且生成水蒸氣82。 The steam supply mechanism 2 supplies steam 82 to the piping 51 of the mixing mechanism 5. The steam supply mechanism 2 is provided with: a closed steam generation tank 22 for generating steam 82; a pure water supply source 21 for supplying pure water 81; and a heater 25 for heating the housed The pure water 81 in the steam generating tank 22 is boiled, and steam 82 is generated.

水蒸氣生成槽22係包含：底壁；周壁，係包圍底壁並從底壁之周緣豎設；以及上壁，係抵接於周壁之前端並閉鎖周壁之前端。 The steam generating tank 22 includes: a bottom wall; a peripheral wall, which surrounds the bottom wall and is erected from the peripheral edge of the bottom wall; and an upper wall, which abuts against and locks the front end of the peripheral wall.

純水供給源21係連通於配管23之一端。純水供給源21係從貯存純水的未圖示之貯存槽藉由泵浦等將純水供給至配管23。配管23係貫通水蒸氣生成槽22之上壁而配設於水蒸氣生成槽22內，配管23之另一端係在水蒸氣生成槽22內開口。純水供給源21係具備用以切換純水81往配管23之供給/停止的未圖示之開閉閥，該開閉閥之動作係藉由控制部130所控制。純水供給源21係對水蒸氣生成槽22供給純水81，以使收容於水蒸氣生成槽22內的純水81之水位成為基準水位。 The pure water supply source 21 is connected to one end of the piping 23. The pure water supply source 21 supplies pure water to the piping 23 from a storage tank (not shown) storing pure water by a pump or the like. The piping 23 penetrates the upper wall of the steam generating tank 22 and is disposed in the steam generating tank 22. The other end of the piping 23 is opened in the steam generating tank 22. The pure water supply source 21 is provided with an on-off valve (not shown) for switching the supply / stop of the pure water 81 to the piping 23, and the operation of the on-off valve is controlled by the control unit 130. The pure water supply source 21 supplies pure water 81 to the steam generation tank 22 so that the water level of the pure water 81 contained in the steam generation tank 22 becomes the reference water level.

在純水81已到達基準水位的狀態下，會在純水81之水面、與水蒸氣生成槽22之上壁之間形成有空間29。水蒸氣供給機構2係具備貫通水蒸氣生成槽22之上壁的配管24。配管24之一端係在空間29開口。配管24之另一端係連通於混合機構5之配管51。在配管24之路徑途中係設置有流量調整機構4之流量控制機器41。 In the state where the pure water 81 has reached the reference water level, a space 29 is formed between the water surface of the pure water 81 and the upper wall of the water vapor generation tank 22. The steam supply mechanism 2 includes a pipe 24 that penetrates the upper wall of the steam generation tank 22. One end of the pipe 24 is opened in the space 29. The other end of the pipe 24 is connected to the pipe 51 of the mixing mechanism 5. A flow control device 41 of the flow adjustment mechanism 4 is provided on the way of the piping 24.

當加熱器25加熱水蒸氣生成槽22內之純水81並生成水蒸氣82時，水蒸氣生成槽22內的純水81之水位就會降低。因此，水蒸氣供給機構2係更具備：水位感測器27， 係能夠檢測純水81之水位已降低為比基準水位更低。水位感測器27之輸出信號係供給至控制部130。控制部130係基於水位感測器27之輸出信號來控制純水供給源21之該開閉閥的開閉動作，以使水蒸氣生成槽22內的純水81之水位能保持於基準水位。 When the heater 25 heats the pure water 81 in the steam generating tank 22 and generates steam 82, the water level of the pure water 81 in the steam generating tank 22 decreases. Therefore, the water vapor supply mechanism 2 is further provided with a water level sensor 27, which can detect that the water level of the pure water 81 has been lowered to a lower level than the reference water level. The output signal of the water level sensor 27 is supplied to the control unit 130. The control unit 130 controls the opening and closing operation of the on-off valve of the pure water supply source 21 based on the output signal of the water level sensor 27 so that the water level of the pure water 81 in the steam generation tank 22 can be maintained at the reference water level.

水蒸氣供給機構2係更具備：配管，用以連通外部與水蒸氣生成槽22內部；以及壓力調整閥26，係設置於該配管之途中。壓力調整閥26係將水蒸氣生成槽22之濕度設為一定，且為了保護水蒸氣生成槽22而抑制水蒸氣生成槽22內之壓力的急遽變動。壓力調整閥26，例如是具備由控制部130所控制的電動致動器(actuator)。控制部130係控制電動致動器以於壓力調整閥26設定自如地設定壓力P0。壓力調整閥26係當空間29內的水蒸氣82之壓力成為比設定壓力P0更高時就被開放以降低水蒸氣82之壓力，若水蒸氣82之壓力為設定壓力P0以下則關閉。當加熱器25加熱純水81並使其沸騰時，就生成水蒸氣82並充滿於空間29。已充滿於空間29的水蒸氣82係透過配管24往配管51供給。往配管51供給的水蒸氣82之流量係由流量控制機器41所調整。 The steam supply mechanism 2 further includes: a pipe for communicating the outside with the inside of the steam generation tank 22; and a pressure regulating valve 26, which is provided on the way of the pipe. The pressure regulating valve 26 sets the humidity of the steam generating tank 22 to be constant, and suppresses the rapid change of the pressure in the steam generating tank 22 in order to protect the steam generating tank 22. The pressure adjustment valve 26 includes, for example, an electric actuator controlled by the control unit 130. The control unit 130 controls the electric actuator so that the pressure adjustment valve 26 can freely set the pressure P0. The pressure regulating valve 26 is opened when the pressure of the water vapor 82 in the space 29 becomes higher than the set pressure P0 to reduce the pressure of the water vapor 82, and is closed if the pressure of the water vapor 82 is below the set pressure P0. When the heater 25 heats the pure water 81 and makes it boil, water vapor 82 is generated and fills the space 29. The water vapor 82 filled in the space 29 is supplied to the piping 51 through the piping 24. The flow rate of the water vapor 82 supplied to the piping 51 is adjusted by the flow control device 41.

又，水蒸氣供給機構2係更具備加熱器(「水蒸氣加熱用加熱器」)28。加熱器28係以覆蓋配管24之周圍的方式所設置。加熱器28係按照控制部130之控制來加熱配管 24，藉此將水蒸氣供給機構2藉由配管24所供給的水蒸氣82在供給至混合機構5之配管51之前加熱以調整水蒸氣82之溫度。 In addition, the steam supply mechanism 2 further includes a heater (“heater for steam heating”) 28. The heater 28 is provided so as to cover the circumference of the pipe 24. The heater 28 heats the piping 24 according to the control of the control unit 130, thereby heating the steam 82 supplied by the steam supply mechanism 2 through the piping 24 before being supplied to the piping 51 of the mixing mechanism 5 to adjust the steam 82 temperature.

又，水蒸氣供給機構2係更具備：溫度感測器91，用以測定純水81之溫度；濕度感測器92，用以測定所生成的水蒸氣82之濕度；溫度感測器93，用以測定配管24之溫度；以及流量計94，用以測定流動於配管24的水蒸氣82之流量。溫度感測器91、濕度感測器92、溫度感測器93、流量計94之測定值係供給至控制部130。 In addition, the water vapor supply mechanism 2 further includes: a temperature sensor 91 for measuring the temperature of the pure water 81; a humidity sensor 92 for measuring the humidity of the generated water vapor 82; and a temperature sensor 93, It is used to measure the temperature of the pipe 24; and a flow meter 94 is used to measure the flow rate of the water vapor 82 flowing in the pipe 24. The measured values of the temperature sensor 91, the humidity sensor 92, the temperature sensor 93, and the flow meter 94 are supplied to the control unit 130.

<惰性氣體供給機構3> <Inert gas supply mechanism 3>

惰性氣體供給機構3係對混合機構5之配管51供給乾燥過的惰性氣體(圖示之例中為乾燥過的N2(氮)氣體)83。惰性氣體供給機構3係具備：惰性氣體供給源31；配管34；以及設置於配管34之途中的調節器(regulator)32、加熱器(「惰性氣體加熱用加熱器」)33。配管34係一端連通於惰性氣體供給源31，另一端連通於配管51。 The inert gas supply mechanism 3 supplies dried inert gas (dried N 2 (nitrogen) gas in the illustrated example) 83 to the piping 51 of the mixing mechanism 5. The inert gas supply mechanism 3 includes: an inert gas supply source 31; a pipe 34; and a regulator 32 and a heater ("inert gas heating heater") 33 provided on the way of the pipe 34. The piping 34 is connected to the inert gas supply source 31 at one end and to the piping 51 at the other end.

惰性氣體供給源31係貯存已被壓縮並且已乾燥的惰性氣體83。惰性氣體供給源31係將貯存的惰性氣體83供給至配管34。調節器32係將從惰性氣體供給源31所供給的惰性氣體83之壓力調整至所決定的值。加熱器33係按照控制部130之控制，在惰性氣體83供給至混合機構5之 前加熱惰性氣體83，藉此調整惰性氣體83之溫度。 The inert gas supply source 31 stores the inert gas 83 that has been compressed and dried. The inert gas supply source 31 supplies the stored inert gas 83 to the piping 34. The regulator 32 adjusts the pressure of the inert gas 83 supplied from the inert gas supply source 31 to the determined value. The heater 33 controls the temperature of the inert gas 83 by heating the inert gas 83 before the inert gas 83 is supplied to the mixing mechanism 5 according to the control of the control unit 130.

在配管34係更設有流量調整機構4之流量控制機器42。流量控制機器42係調整從惰性氣體供給源31供給至配管51的惰性氣體83之流量。 The piping 34 is further provided with a flow control device 42 of the flow adjustment mechanism 4. The flow control device 42 adjusts the flow rate of the inert gas 83 supplied from the inert gas supply source 31 to the piping 51.

又，惰性氣體供給機構3係更具備：溫度感測器95和流量計96，係分別測定流動於配管34的惰性氣體83之溫度和流量。溫度感測器95、流量計96之測定值係供給至控制部130。 In addition, the inert gas supply mechanism 3 further includes a temperature sensor 95 and a flow meter 96, which measure the temperature and flow rate of the inert gas 83 flowing in the pipe 34, respectively. The measured values of the temperature sensor 95 and the flow meter 96 are supplied to the control unit 130.

<流量調整機構4> <Flow adjustment mechanism 4>

流量調整機構4係調整水蒸氣供給機構2所供給的水蒸氣82之流量和惰性氣體供給機構3所供給的惰性氣體83之流量。流量調整機構4係具備：流量控制機器41，係設置於配管24之路徑途中；以及流量控制機器42，係設置於配管34之路徑途中。 The flow rate adjustment mechanism 4 adjusts the flow rate of the steam 82 supplied by the steam supply mechanism 2 and the flow rate of the inert gas 83 supplied by the inert gas supply mechanism 3. The flow adjustment mechanism 4 is provided with: a flow control device 41 installed in the middle of the path of the piping 24; and a flow control device 42 installed in the middle of the path of the piping 34.

流量控制機器41係控制流動於配管24的水蒸氣82之每一單位時間的供給量，亦即控制水蒸氣82之流量Q0。流量控制機器42係控制流動於配管34的惰性氣體83之每一單位時間的供給量，亦即控制惰性氣體83之流量Q1。流量控制機器41、42例如是構成為具備質量流量控制器(MFC；Mass Flow Controller)。控制部130係將水蒸氣82(惰 性氣體83)之每一單位時間的供給量設定於流量控制機器41(42)。藉此，水蒸氣82(惰性氣體83)之每一單位時間的供給量係能調整在所設定的供給量。作為流量控制機器41、42，例如亦可採用能夠藉由來自控制部130之控制來調節閥之開啟度的電動閥等。 The flow control device 41 controls the supply amount of the water vapor 82 flowing in the piping 24 per unit time, that is, controls the flow rate Q0 of the water vapor 82. The flow control device 42 controls the supply amount of the inert gas 83 flowing in the piping 34 per unit time, that is, controls the flow rate Q1 of the inert gas 83. The flow control devices 41 and 42 are configured to include a mass flow controller (MFC; Mass Flow Controller), for example. The control unit 130 sets the supply amount of water vapor 82 (inert gas 83) per unit time to the flow control device 41 (42). By this, the supply amount of water vapor 82 (inert gas 83) per unit time can be adjusted to the set supply amount. As the flow control devices 41 and 42, for example, an electric valve that can adjust the opening degree of the valve by control from the control unit 130 can also be used.

<混合機構5> <Mixed institution 5>

混合機構5係從水蒸氣供給機構2透過配管24來供給水蒸氣82，並且從惰性氣體供給機構3透過配管34來供給惰性氣體83。混合機構5係混合所供給來的水蒸氣82和惰性氣體83以生成混合氣體84。 The mixing mechanism 5 supplies the steam 82 from the steam supply mechanism 2 through the pipe 24 and supplies the inert gas 83 from the inert gas supply mechanism 3 through the pipe 34. The mixing mechanism 5 mixes the supplied water vapor 82 and the inert gas 83 to generate a mixed gas 84.

混合機構5係具備配管(「混合配管」)51、和加熱器(「混合氣體加熱用加熱器」)52。加熱器52係以覆蓋配管51之周圍的方式所設置。在配管51之一端係連接有配管24之另一端和配管34之另一端。配管51之另一端係連通於基板處理機構6之氣泡產生器64。 The mixing mechanism 5 includes a pipe (“mixing pipe”) 51 and a heater (“mixed gas heating heater”) 52. The heater 52 is provided so as to cover the circumference of the pipe 51. The other end of the pipe 24 and the other end of the pipe 34 are connected to one end of the pipe 51. The other end of the piping 51 communicates with the bubble generator 64 of the substrate processing mechanism 6.

在水蒸氣供給機構2之水蒸氣生成槽22所生成的水蒸氣82係在藉由流量控制機器41調整其流量Q0之後才供給至配管51。從惰性氣體供給機構3之惰性氣體供給源31所供給之乾燥過的惰性氣體83係在藉由流量控制機器42調整其流量Q1之後才供給至配管51。供給至配管51的水蒸氣82和惰性氣體83係在配管51相互地混合。藉此，就 能生成混合氣體84。加熱器52係按照控制部130之控制來加熱配管51，藉此在混合氣體84供給至氣泡產生器64之前加熱混合氣體84以調整混合氣體84之溫度。 The water vapor 82 generated in the water vapor generation tank 22 of the water vapor supply mechanism 2 is supplied to the piping 51 after the flow rate Q0 is adjusted by the flow control device 41. The dried inert gas 83 supplied from the inert gas supply source 31 of the inert gas supply mechanism 3 is supplied to the piping 51 after the flow rate Q1 is adjusted by the flow control device 42. The steam 82 and the inert gas 83 supplied to the piping 51 are mixed with each other in the piping 51. By this, the mixed gas 84 can be generated. The heater 52 heats the piping 51 according to the control of the control unit 130, thereby heating the mixed gas 84 to adjust the temperature of the mixed gas 84 before the mixed gas 84 is supplied to the bubble generator 64.

混合機構5係更具備：溫度感測器97、濕度感測器98及流量計99，係分別測定流動於配管51的混合氣體84之溫度、濕度及流量。溫度感測器97、濕度感測器98、流量計99之測定值係供給至控制部130。 The mixing mechanism 5 further includes a temperature sensor 97, a humidity sensor 98, and a flow meter 99, which measure the temperature, humidity, and flow rate of the mixed gas 84 flowing in the pipe 51, respectively. The measured values of the temperature sensor 97, the humidity sensor 98, and the flow meter 99 are supplied to the control unit 130.

<基板處理機構6> <Substrate processing mechanism 6>

圖2、圖3係示意性地顯示基板處理裝置1的基板處理機構6之概略構成的立體圖。圖2、圖3係顯示作為透視已收容於基板處理機構6之處理槽61內的氣泡產生器64、升降機(lifter)68等的示意圖。圖4係示意性地顯示基板處理機構6之氣泡產生器64的側面剖視圖。 2 and 3 are perspective views schematically showing the schematic structure of the substrate processing mechanism 6 of the substrate processing apparatus 1. 2 and 3 are schematic diagrams showing the bubble generator 64, the lifter 68, and the like that have been accommodated in the processing tank 61 of the substrate processing mechanism 6 as a perspective. FIG. 4 is a side sectional view schematically showing the bubble generator 64 of the substrate processing mechanism 6.

基板處理機構6係對批量組合的複數片基板W(基板群W1)一起施予使用磷酸水溶液87的蝕刻處理。基板處理機構6係具備：處理槽61；氣泡產生器64，係收容於處理槽61；以及能夠升降的升降機68，用以支撐基板群W1。 The substrate processing mechanism 6 applies an etching process using a phosphoric acid aqueous solution 87 to a plurality of substrates W (substrate group W1) combined in batches. The substrate processing mechanism 6 includes: a processing tank 61; a bubble generator 64, which is housed in the processing tank 61;

處理槽61係收容磷酸水溶液87，且對已浸漬於磷酸水溶液87的基板W(基板群W1)施予蝕刻處理。處理槽61係包含：底壁；以及周壁，係包圍底壁並從底壁之周緣豎 設。在處理槽61之上部係形成有開口部。該開口部係藉由處理槽61之周壁的前端包圍所形成。 The processing tank 61 accommodates the phosphoric acid aqueous solution 87 and applies an etching process to the substrate W (substrate group W1) that has been immersed in the phosphoric acid aqueous solution 87. The treatment tank 61 includes: a bottom wall; and a peripheral wall, which surrounds the bottom wall and is erected from the peripheral edge of the bottom wall. An opening is formed above the processing tank 61. The opening is formed by surrounding the front end of the peripheral wall of the treatment tank 61.

在處理槽61內係設置有配管(「磷酸水溶液供給配管」)62。在配管62係連通有已設置於處理槽61之外部的未圖示之磷酸水溶液供給源。磷酸水溶液供給源係將已藉由加熱器事先加熱至沸點附近之溫度(例如，160℃)的磷酸水溶液87供給至配管62。在配管62之周壁係形成有多數個吐出口(未圖示)。供給至配管62的磷酸水溶液87係從該吐出口朝向處理槽61內部吐出，並收容於處理槽61。 A piping ("phosphoric acid aqueous solution supply piping") 62 is provided in the processing tank 61. The piping 62 is connected to a phosphoric acid aqueous solution supply source (not shown) provided outside the processing tank 61. The phosphoric acid aqueous solution supply source supplies the piping 62 with the phosphoric acid aqueous solution 87 that has been previously heated to a temperature near the boiling point (for example, 160 ° C.) by the heater. A plurality of discharge ports (not shown) are formed on the peripheral wall of the pipe 62. The phosphoric acid aqueous solution 87 supplied to the piping 62 is discharged from the discharge port toward the inside of the processing tank 61 and is accommodated in the processing tank 61.

在處理槽61之底壁係與底板平行地設置有平板狀之保持板67。在保持板67之上表面係安裝有至少一個(圖示之例中為二個)筒狀之氣泡產生器64。 A flat holding plate 67 is provided on the bottom wall of the processing tank 61 parallel to the bottom plate. At least one (two in the illustrated example) cylindrical bubble generator 64 is mounted on the upper surface of the holding plate 67.

氣泡產生器64係被從混合機構5供給有混合氣體84，並且將所供給來的混合氣體84吹出至處理槽61內的磷酸水溶液87中以產生混合氣體84之氣泡85。因氣泡產生器64係暴露於高溫之磷酸水溶液87中，故而較佳是藉由例如石英形成為例如圓筒狀。 The bubble generator 64 is supplied with the mixed gas 84 from the mixing mechanism 5 and blows the supplied mixed gas 84 into the phosphoric acid aqueous solution 87 in the processing tank 61 to generate bubbles 85 of the mixed gas 84. Since the bubble generator 64 is exposed to the high-temperature phosphoric acid aqueous solution 87, it is preferably formed into a cylindrical shape by, for example, quartz.

在氣泡產生器64之一端係連接有配管51之另一端。氣泡產生器64之內周面係構成可供從配管51所供給之混合氣體84流動的流路65。氣泡產生器64之前端(另一端) 係藉由壁部所閉塞。在氣泡產生器64之周壁中的上側部分係形成有多數個吐出口66。各個吐出口66係連通於氣泡產生器64內之流路65，且在氣泡產生器64之外周面開口。各個吐出口66之口徑D1，例如是設定在0.1mm至0.5mm。氣泡產生器64較佳是沿著藉由升降機68所支撐的複數個基板W之排列方向延伸設置。 The other end of the piping 51 is connected to one end of the bubble generator 64. The inner circumferential surface of the bubble generator 64 constitutes a flow path 65 through which the mixed gas 84 supplied from the pipe 51 can flow. The front end (the other end) of the bubble generator 64 is closed by the wall. A plurality of discharge ports 66 are formed in the upper part of the peripheral wall of the bubble generator 64. Each discharge port 66 communicates with the flow path 65 in the bubble generator 64 and opens on the outer peripheral surface of the bubble generator 64. The diameter D1 of each discharge port 66 is set at, for example, 0.1 mm to 0.5 mm. The bubble generator 64 preferably extends along the arrangement direction of the plurality of substrates W supported by the elevator 68.

氣泡產生器64係將從配管51所供給來的混合氣體84經過流路65從各個吐出口66吹出至磷酸水溶液87中，藉此使混合氣體84之氣泡85產生於磷酸水溶液87中。在氣泡85在磷酸水溶液87內上升的過程中，從磷酸水溶液87所蒸發的水蒸氣將欲進入氣泡85內。但是，因形成氣泡85的混合氣體84並未乾燥，且其容積絕對濕度被設定在目標濕度，故而能抑制水蒸氣進入氣泡85內。藉此，能抑制因水蒸氣之進入所致的氣泡85之擴大。從而，可以抑制浸漬於磷酸水溶液87的基板W蒙受氣泡85所帶來之損傷。 The bubble generator 64 blows the mixed gas 84 supplied from the piping 51 through the flow path 65 from each discharge port 66 into the phosphoric acid aqueous solution 87, thereby generating bubbles 85 of the mixed gas 84 in the phosphoric acid aqueous solution 87. As the bubble 85 rises within the phosphoric acid aqueous solution 87, the water vapor evaporated from the phosphoric acid aqueous solution 87 will enter the bubble 85. However, since the mixed gas 84 forming the bubble 85 is not dried and its volumetric absolute humidity is set at the target humidity, it is possible to suppress water vapor from entering the bubble 85. With this, the expansion of the bubbles 85 due to the entry of water vapor can be suppressed. Therefore, the substrate W immersed in the phosphoric acid aqueous solution 87 can be prevented from being damaged by the bubbles 85.

升降機68係具備：立於鉛直方向之姿勢的板狀之升降機頭部(lifter head)68a；以及基板支撐構件68b。升降機頭部68a係藉由設置於處理槽61之外部的未圖示之升降機構而進行升降。 The lifter 68 includes: a plate-shaped lifter head 68a standing in a vertical posture; and a substrate support member 68b. The elevator head 68a is raised and lowered by a lifting mechanism (not shown) provided outside the processing tank 61.

基板支撐構件68b係設計成能夠從下方支撐以立於鉛 直方向之姿勢排列於水平方向的複數個基板W(基板群W1)。基板支撐構件68b係包含複數個(圖示之例中為三個)長條構件。該複數個長條構件係從升降機頭部68a之一主面的下端部分相互地沿著相同的方向(該一主面之法線方向)相對於升降機頭部68a分別延伸設置於相同之側。在互為相鄰的長條構件之間係設置有間隙。藉此，由升降機68所支撐的各個基板W之下端側的周緣係與設置於升降機68之下方的氣泡產生器64對向。 The substrate supporting member 68b is designed to be able to support a plurality of substrates W (substrate group W1) arranged in the horizontal direction in a posture standing in the vertical direction from below. The substrate support member 68b includes a plurality of (three in the illustrated example) elongate members. The plurality of elongated members extend from the lower end portion of one main surface of the elevator head 68a to each other along the same direction (the normal direction of the one main surface) relative to the elevator head 68a on the same side. A gap is provided between the long members adjacent to each other. Thereby, the periphery of the lower end side of each substrate W supported by the elevator 68 is opposed to the bubble generator 64 provided below the elevator 68.

各個基板W係以其主面與升降機頭部68a之一主面成為平行的方式由基板支撐構件68b所支撐。在基板支撐構件68b的各個長條構件之上端部分中之支撐複數個基板W的複數個部分係形成有未圖示之複數個溝槽部。各個溝槽部係以比基板W之厚度更寬若干的寬度沿著基板W之主面(升降機頭部68a之一主面)所形成。各個溝槽部之深度係設定成為大致等於基板W之周緣部的寬度。藉此，基板W係能在藉由各個長條構件中之對應的各個溝槽部包夾其周緣部的狀態下，藉由基板支撐構件68b從下方來支撐。 Each substrate W is supported by the substrate support member 68b so that its main surface is parallel to one of the main surfaces of the elevator head 68a. A plurality of grooves (not shown) are formed in the plurality of portions that support the plurality of substrates W in the upper end portions of the elongated members of the substrate support member 68b. Each groove portion is formed along a main surface of the substrate W (a main surface of the elevator head 68a) with a width wider than the thickness of the substrate W. The depth of each groove portion is set to be substantially equal to the width of the peripheral portion of the substrate W. Thereby, the substrate W can be supported from below by the substrate support member 68b in a state where the corresponding groove portion of each elongated member sandwiches its peripheral edge portion.

升降機68係在處理槽61之上方的遞送位置從未圖示之搬運機器人(robot)接收事先所批量組合過的基板群W1。升降機68係在接收基板群W1之後，從處理槽61之開口部下降至處理槽61內部，藉此將基板群W1一起收容於處理槽61內，且浸漬於磷酸水溶液87中。當相對於基板群 W1的處理結束時，升降機68就會上升至處理槽61之上方的遞送位置，並將處理過的基板群W1交付給搬運機器人。 The elevator 68 is a delivery position above the processing tank 61 that receives a substrate group W1 that has been batch-assembled in advance from a robot (not shown). After receiving the substrate group W1, the elevator 68 descends from the opening of the processing tank 61 to the inside of the processing tank 61, thereby accommodating the substrate group W1 in the processing tank 61 together, and immersing in the phosphoric acid aqueous solution 87. When the processing with respect to the substrate group W1 ends, the elevator 68 rises to the delivery position above the processing tank 61, and delivers the processed substrate group W1 to the transfer robot.

<控制部130> <Control section 130>

基板處理裝置1係為了其各部的控制而具備控制部130。作為控制部130之硬體的構成，例如可以採用與一般的電腦(computer)同樣的構成。亦即，控制部130例如是將進行各種運算處理的CPU(Central Processing Unit；中央處理單元)11、作為記憶基本程式的讀出專用之記憶體的ROM(Read Only Memory；唯讀記憶體)(未圖示)、作為記憶各種資訊的讀寫自如之記憶體的RAM(Random Access Memory；隨機存取記憶體)(未圖示)、受理操作者之輸入的輸入部(未圖示)、以及事先記憶有對應各種處理之程式PG或資料等的記憶裝置14連接於未圖示之匯流排線(bus line)所構成。在記憶裝置14亦記憶有透過輸入部等所設定的混合氣體84之目標溫度T2、目標流量Q2、目標濕度H2等。 The substrate processing apparatus 1 includes a control unit 130 for the control of each unit. As the hardware configuration of the control unit 130, for example, the same configuration as that of a general computer can be adopted. That is, the control unit 130 is, for example, a CPU (Central Processing Unit) 11 that performs various arithmetic processes, and a ROM (Read Only Memory; read-only memory) as a dedicated memory for reading basic programs. (Not shown), RAM (Random Access Memory) (not shown) as a memory that can read and write all kinds of information (not shown), an input unit (not shown) that accepts input from the operator, and A memory device 14 that stores programs PG or data corresponding to various processes in advance is connected to a bus line (not shown). The memory device 14 also stores the target temperature T2, the target flow rate Q2, the target humidity H2, etc. of the mixed gas 84 set by the input unit or the like.

在控制部130中，能藉由作為主控制部的CPU11按照程式PG所描述的順序進行運算處理，來實現控制基板處理裝置1之各部的各種功能部。具體而言，CPU11例如是發揮作為流量取得部15、及調整機構控制部16等的各個功能部來動作。 In the control unit 130, the CPU 11 as the main control unit can perform arithmetic processing in the order described by the program PG, thereby realizing various functional units that control the various units of the substrate processing apparatus 1. Specifically, the CPU 11 operates, for example, by functioning as the flow rate acquisition unit 15, the adjustment mechanism control unit 16, and the like.

流量取得部15係藉由進行所決定的運算來取得混合氣體84之濕度成為目標濕度H2並且混合氣體84之流量成為目標流量Q2時的水蒸氣供給機構2所供給的水蒸氣82之流量Q0和惰性氣體供給機構3所供給的惰性氣體83之流量Q1。流量取得部15亦可以取得混合氣體84之濕度成為目標濕度H2並且混合氣體84之流量成為目標流量Q2時的水蒸氣供給機構2所供給的水蒸氣82之流量Q0和惰性氣體供給機構3所供給的惰性氣體83之流量Q1。調整機構控制部16係基於流量取得部15所取得的水蒸氣82之流量Q0和惰性氣體83之流量Q1來控制流量調整機構4。 The flow rate obtaining unit 15 obtains the flow rate Q0 and the flow rate Q0 of the water vapor 82 supplied by the water vapor supply mechanism 2 when the humidity of the mixed gas 84 becomes the target humidity H2 and the flow rate of the mixed gas 84 becomes the target flow rate Q2 by performing the determined calculation. The flow rate Q1 of the inert gas 83 supplied by the inert gas supply mechanism 3. The flow rate acquisition unit 15 may also obtain the flow rate Q0 of the water vapor 82 supplied by the water vapor supply mechanism 2 and the inert gas supply mechanism 3 when the humidity of the mixed gas 84 becomes the target humidity H2 and the flow rate of the mixed gas 84 becomes the target flow rate Q2. The flow rate of inert gas 83 is Q1. The adjustment mechanism control unit 16 controls the flow adjustment mechanism 4 based on the flow rate Q0 of the water vapor 82 acquired by the flow rate acquisition unit 15 and the flow rate Q1 of the inert gas 83.

水蒸氣供給機構2、惰性氣體供給機構3、流量調整機構4及基板處理機構6等的基板處理裝置1之各部係按照控制部130之控制來進行動作。 The various parts of the substrate processing apparatus 1 such as the water vapor supply mechanism 2, the inert gas supply mechanism 3, the flow rate adjustment mechanism 4, the substrate processing mechanism 6, and the like operate under the control of the control unit 130.

<2.有關容積絕對濕度與氣泡體積之擴大率的關係> <2. The relationship between the volume absolute humidity and the expansion rate of the bubble volume>

圖5係根據理論公式算出吹出至磷酸水溶液87中的混合氣體84之容積絕對濕度、與磷酸水溶液87中所生成的混合氣體84之氣泡85之體積擴大率的關係，並以曲線圖形式來顯示的示意圖。氣泡85之擴大率係指擴大後的氣泡85之體積對擴大前(剛從氣泡產生器64之吐出口64a所吐出之後)的氣泡85之體積的比率。如圖5所示，當混合氣體84之容積絕對濕度增加時，氣泡之體積的擴大率就會減 少。具體而言，例如，當容積絕對濕度從100g/m3增加至500g/m3時，氣泡85之體積的擴大率就會從約14倍減少至約4倍。 Fig. 5 calculates the relationship between the volume absolute humidity of the mixed gas 84 blown into the phosphoric acid aqueous solution 87 and the volume expansion rate of the bubble 85 of the mixed gas 84 generated in the phosphoric acid aqueous solution 87 according to a theoretical formula, and displays it in the form of a graph Schematic. The expansion ratio of the bubble 85 refers to the ratio of the volume of the expanded bubble 85 to the volume of the bubble 85 before expansion (immediately after being discharged from the discharge port 64a of the bubble generator 64). As shown in FIG. 5, when the absolute humidity of the volume of the mixed gas 84 increases, the expansion rate of the volume of the bubbles decreases. Specifically, for example, when the volume absolute humidity is increased from 100 g / m 3 to 500 g / m 3 , the expansion rate of the volume of the bubble 85 is reduced from about 14 times to about 4 times.

<3.基板處理裝置之動作> <3. Operation of substrate processing apparatus>

圖6係顯示基板處理裝置1之動作之一例的流程圖。基於圖6來針對基板處理裝置1之動作之一例說明如下。 6 is a flowchart showing an example of the operation of the substrate processing apparatus 1. An example of the operation of the substrate processing apparatus 1 will be described based on FIG. 6 as follows.

在開始藉由基板處理裝置1所為的圖6所記載之動作前，作業者係先行操作控制部130之輸入部來設定供給至處理槽61的混合氣體84之目標流量Q2[m3/s]、目標濕度H2[kg/m3]、目標溫度T2[℃]以及水蒸氣生成槽22的壓力調整閥26之設定壓力P0。此等的設定值係記憶於記憶裝置14並藉由CPU11所讀出，且使用於藉由控制部130所為的控制中。為了預防凝結水，目標溫度T2較佳是設定為比後面所述的溫度T0更高。 Before starting the operation described in FIG. 6 by the substrate processing apparatus 1, the operator first operates the input section of the control section 130 to set the target flow rate Q2 [m 3 / s] of the mixed gas 84 supplied to the processing tank 61 , The target humidity H2 [kg / m 3 ], the target temperature T2 [° C], and the set pressure P0 of the pressure regulating valve 26 of the steam generation tank 22. These set values are memorized in the memory device 14 and read out by the CPU 11 and used in the control by the control unit 130. In order to prevent condensed water, the target temperature T2 is preferably set higher than the temperature T0 described later.

基板處理裝置1係開始水蒸氣82之供給(圖6之步驟S10)。更詳言之，當壓力調整閥26之設定壓力P0亦即水蒸氣82之壓力P0被設定時，控制部130就會將飽和蒸氣壓設為壓力P0並根據蒸氣壓曲線算出水蒸氣82之溫度T0。 The substrate processing apparatus 1 starts the supply of water vapor 82 (step S10 in FIG. 6). More specifically, when the set pressure P0 of the pressure regulating valve 26, that is, the pressure P0 of the water vapor 82 is set, the control unit 130 sets the saturated vapor pressure to the pressure P0 and calculates the temperature of the water vapor 82 according to the vapor pressure curve T0.

控制部130係控制加熱器25並進行純水81之加熱，以使藉由溫度感測器91所測定的純水81之溫度成為所算出的溫度T0。藉此，就能生成水蒸氣82且開始其供給。又，控制部130係基於溫度感測器93所測定的配管24之溫度來控制加熱器28並以使配管24之溫度成為溫度T0的方式來加熱配管24，亦即以使流動於配管24的水蒸氣82之溫度成為溫度T0的方式來加熱配管24。藉此，能抑制配管24之凝結水。 The control unit 130 controls the heater 25 and heats the pure water 81 so that the temperature of the pure water 81 measured by the temperature sensor 91 becomes the calculated temperature T0. With this, water vapor 82 can be generated and its supply can be started. Furthermore, the control unit 130 controls the heater 28 based on the temperature of the piping 24 measured by the temperature sensor 93 and heats the piping 24 so that the temperature of the piping 24 becomes the temperature T0, that is, the The pipe 24 is heated so that the temperature of the steam 82 becomes the temperature T0. By this, the condensed water of the piping 24 can be suppressed.

控制部130之流量取得部15係將混合氣體84所設定的目標流量Q2、目標濕度H2、和藉由濕度感測器92所測定到的水蒸氣82之濕度H0代入數式(1)中，並算出從水蒸氣生成槽22供給至配管24的水蒸氣82之流量Q0。又，流量取得部15係以使水蒸氣82之流量Q0與惰性氣體83之流量Q1的和成為混合氣體84之目標流量Q2的方式來算出流量Q1。 The flow rate acquisition unit 15 of the control unit 130 substitutes the target flow rate Q2 set by the mixed gas 84, the target humidity H2, and the humidity H0 of the water vapor 82 measured by the humidity sensor 92 into equation (1), The flow rate Q0 of the steam 82 supplied from the steam generation tank 22 to the pipe 24 is calculated. In addition, the flow rate acquisition unit 15 calculates the flow rate Q1 so that the sum of the flow rate Q0 of the water vapor 82 and the flow rate Q1 of the inert gas 83 becomes the target flow rate Q2 of the mixed gas 84.

Q0=Q2×H2/H0…(1) Q0 = Q2 × H2 / H0… (1)

控制部130之調整機構控制部16係控制流量控制機器41來供給水蒸氣82，以使水蒸氣82之流量成為所算出的流量Q0。 The adjustment mechanism control unit 16 of the control unit 130 controls the flow rate control device 41 to supply the water vapor 82 so that the flow rate of the water vapor 82 becomes the calculated flow rate Q0.

控制部130係回授(feedback)在配管51藉由濕度感測器91所測定的混合氣體84之濕度。控制部130係進行水 蒸氣82之流量Q0的微調整，以便混合氣體84之濕度成為目標濕度H2。水蒸氣82之流量Q0係藉由流量計94所測定。 The control unit 130 feeds back the humidity of the mixed gas 84 measured by the humidity sensor 91 in the piping 51. The control unit 130 carries out water The flow rate Q0 of the steam 82 is finely adjusted so that the humidity of the mixed gas 84 becomes the target humidity H2. The flow rate Q0 of the water vapor 82 is measured by the flow meter 94.

再者，在水蒸氣生成槽22所生成的水蒸氣82之容積絕對濕度H0係當將水蒸氣82假定為理想氣體時，就能藉由數式(2)來概算。 In addition, the volume absolute humidity H0 of the water vapor 82 generated in the water vapor generation tank 22 can be estimated by equation (2) when the water vapor 82 is assumed to be an ideal gas.

H0=P0/{R×(273.15+T0)}×M_DIW…(2) H0 = P0 / {R × (273.15 + T0)} × M_DIW… (2)

其中，氣體常數R=8314[m2g/s2 K mol] Among them, the gas constant R = 8314 [m 2 g / s 2 K mol]

水蒸氣之物質量M_DIW=18[g/mol]。 The mass of water vapor M_DIW = 18 [g / mol].

基板處理裝置1係開始惰性氣體83之供給(步驟S20)。更詳言之，控制部130係基於溫度感測器95所測定的惰性氣體(乾燥過的N2氣體)83之溫度來控制加熱器33並加熱惰性氣體83，以使惰性氣體83成為溫度T1。控制部130之調整機構控制部16係控制流量控制機器42並供給惰性氣體83以使惰性氣體83之流量成為所算出的流量Q1。藉此，惰性氣體供給機構3係開始對配管51供給已加熱至溫度T1的惰性氣體83。 The substrate processing apparatus 1 starts the supply of the inert gas 83 (step S20). More specifically, the control unit 130 controls the heater 33 based on the temperature of the inert gas (dried N 2 gas) 83 measured by the temperature sensor 95 and heats the inert gas 83 so that the inert gas 83 becomes the temperature T1 . The adjustment mechanism control unit 16 of the control unit 130 controls the flow control device 42 and supplies the inert gas 83 so that the flow rate of the inert gas 83 becomes the calculated flow rate Q1. With this, the inert gas supply mechanism 3 starts to supply the inert gas 83 heated to the temperature T1 to the pipe 51.

基板處理裝置1係將水蒸氣供給機構2透過配管24所供給的水蒸氣82和惰性氣體供給機構3透過配管34所供給的惰性氣體83在混合機構5之配管51中混合以生成混合氣體84(步驟S30)。 The substrate processing apparatus 1 mixes the steam 82 supplied by the steam supply mechanism 2 through the pipe 24 and the inert gas 83 supplied by the inert gas supply mechanism 3 through the pipe 34 in the pipe 51 of the mixing mechanism 5 to generate a mixed gas 84 ( Step S30).

基板處理裝置1係調整水蒸氣82之流量和惰性氣體83之流量(步驟S40)。更具體而言，流量調整機構4係調整水蒸氣供給機構2所供給的水蒸氣82之流量Q0和惰性氣體供給機構3所供給的惰性氣體83之流量Q1以使混合氣體84之濕度成為目標濕度H2並且混合氣體84之流量成為目標流量Q2。流量調整機構4亦可以在調整機構控制部16之控制下，調整水蒸氣供給機構2所供給的水蒸氣82之流量Q0和惰性氣體供給機構3所供給的惰性氣體83之流量Q1以使混合氣體84之濕度成為目標濕度H2。 The substrate processing apparatus 1 adjusts the flow rate of water vapor 82 and the flow rate of inert gas 83 (step S40). More specifically, the flow rate adjustment mechanism 4 adjusts the flow rate Q0 of the water vapor 82 supplied by the water vapor supply mechanism 2 and the flow rate Q1 of the inert gas 83 supplied by the inert gas supply mechanism 3 so that the humidity of the mixed gas 84 becomes the target humidity H2 and the flow rate of the mixed gas 84 become the target flow rate Q2. The flow rate adjustment mechanism 4 may also adjust the flow rate Q0 of the water vapor 82 supplied by the water vapor supply mechanism 2 and the flow rate Q1 of the inert gas 83 supplied by the inert gas supply mechanism 3 under the control of the adjustment mechanism control unit 16 to make the mixed gas The humidity of 84 becomes the target humidity H2.

更詳言之，流動於配管51的混合氣體84之流量係藉由流量計99所測定。所測定到的流量係回授至控制部130。控制部130之調整機構控制部16係控制流量控制機器42並調整惰性氣體83之流量Q1以使混合氣體84之流量成為目標流量Q2。惰性氣體83之流量Q1係藉由流量計96所測定。 More specifically, the flow rate of the mixed gas 84 flowing in the piping 51 is measured by the flow meter 99. The measured flow rate is fed back to the control unit 130. The adjustment mechanism of the control unit 130 controls the flow control device 42 and adjusts the flow rate Q1 of the inert gas 83 so that the flow rate of the mixed gas 84 becomes the target flow rate Q2. The flow rate Q1 of the inert gas 83 is measured by the flow meter 96.

控制部130係基於溫度感測器97所測定的混合氣體84之溫度，藉由加熱器52來加熱配管51且將流動於配管51的混合氣體84之溫度調整至目標溫度T2。已調整至目標溫度T2的混合氣體84係經過配管51供給至處理槽61。 The control unit 130 heats the piping 51 by the heater 52 based on the temperature of the mixed gas 84 measured by the temperature sensor 97 and adjusts the temperature of the mixed gas 84 flowing in the piping 51 to the target temperature T2. The mixed gas 84 adjusted to the target temperature T2 is supplied to the processing tank 61 through the piping 51.

流動於配管51的混合氣體84之濕度係藉由濕度感測器98所測定。所測定到的濕度係回授至控制部130。調整機構控制部16係控制流量控制機器41來調整從水蒸氣生成槽22供給至配管24的水蒸氣82之流量Q0以使混合氣體84之濕度成為目標濕度H2。 The humidity of the mixed gas 84 flowing in the piping 51 is measured by the humidity sensor 98. The measured humidity is fed back to the control unit 130. The adjustment mechanism control unit 16 controls the flow control device 41 to adjust the flow rate Q0 of the water vapor 82 supplied from the water vapor generation tank 22 to the pipe 24 so that the humidity of the mixed gas 84 becomes the target humidity H2.

流動於配管51的混合氣體84之流量係藉由流量計99所測定。所測定到的流量係回授至控制部130。控制部130係控制流量控制機器41之設定值並調整從水蒸氣生成槽22供給至配管24的水蒸氣82之流量Q0以使混合氣體84之流量成為目標流量Q2。 The flow rate of the mixed gas 84 flowing in the piping 51 is measured by the flow meter 99. The measured flow rate is fed back to the control unit 130. The control unit 130 controls the set value of the flow control device 41 and adjusts the flow rate Q0 of the water vapor 82 supplied from the steam generation tank 22 to the pipe 24 so that the flow rate of the mixed gas 84 becomes the target flow rate Q2.

基板處理機構6係將透過配管51所供給的混合氣體84從氣泡產生器64之吐出口66吹出至磷酸水溶液87中，以在磷酸水溶液87中產生混合氣體84之氣泡85(步驟S50)。 The substrate processing mechanism 6 blows the mixed gas 84 supplied through the piping 51 from the discharge port 66 of the bubble generator 64 into the phosphoric acid aqueous solution 87 to generate bubbles 85 of the mixed gas 84 in the phosphoric acid aqueous solution 87 (step S50).

基板處理裝置1亦可不具備用以控制流量調整機構4的調整機構控制部16。在此情況下，例如是設置能夠手動調整開啟度的各個調整閥來作為流量控制機器41、42，並能藉由作業者手動調整各個調整閥之開啟度來調整水蒸氣82之流量Q0和惰性氣體83之流量Q1。 The substrate processing apparatus 1 may not include the adjustment mechanism control unit 16 for controlling the flow adjustment mechanism 4. In this case, for example, each adjustment valve capable of manually adjusting the opening degree is set as the flow control devices 41, 42 and the flow rate Q0 and inertness of the water vapor 82 can be adjusted by the operator manually adjusting the opening degree of each adjustment valve The flow rate of gas 83 is Q1.

混合機構5既可設置於處理槽61之外部，又可設置於處理槽61之內部。亦可使用設置有基板處理裝置1的工場之蒸氣供給設備來作為水蒸氣供給機構2。 The mixing mechanism 5 may be installed outside the processing tank 61 or inside the processing tank 61. As the steam supply mechanism 2, a steam supply facility of a factory where the substrate processing apparatus 1 is installed may be used.

依據如以上所構成之本實施形態的基板處理裝置，混合機構5係混合水蒸氣82和惰性氣體83以生成混合氣體84；氣泡產生器64係將混合氣體84吹出至磷酸水溶液87中以產生混合氣體84之氣泡85。然後，流量調整機構4係調整水蒸氣供給機構2所供給的水蒸氣82之流量和惰性氣體供給機構3所供給的惰性氣體83之流量以使混合氣體84之濕度成為目標濕度。從而，只要在目標濕度設定與氣泡85之氣泡直徑對應的濕度，就可以抑制基板W之損傷並且可以改善基板W之處理效率，在此，該氣泡85之氣泡直徑係指表現基板W蒙受氣泡85所帶來之損傷的指標值滿足預定之條件且表現基板W之處理效率的指標值滿足預定之條件時的氣泡直徑。 According to the substrate processing apparatus of the present embodiment configured as above, the mixing mechanism 5 mixes the steam 82 and the inert gas 83 to generate the mixed gas 84; the bubble generator 64 blows the mixed gas 84 into the phosphoric acid aqueous solution 87 to generate mixing Bubble 84 of gas 84. Then, the flow rate adjustment mechanism 4 adjusts the flow rate of the water vapor 82 supplied by the water vapor supply mechanism 2 and the flow rate of the inert gas 83 supplied by the inert gas supply mechanism 3 so that the humidity of the mixed gas 84 becomes the target humidity. Therefore, as long as the humidity corresponding to the bubble diameter of the bubble 85 is set at the target humidity, the damage of the substrate W can be suppressed and the processing efficiency of the substrate W can be improved. Here, the bubble diameter of the bubble 85 means that the substrate W is exposed to the bubble 85 The bubble diameter when the index value of the damage caused satisfies the predetermined condition and the index value expressing the processing efficiency of the substrate W satisfies the predetermined condition.

又，依據如以上所構成之本實施形態的基板處理裝置，流量調整機構4係可以調整水蒸氣供給機構2所供給的水蒸氣82之流量和惰性氣體供給機構3所供給的惰性氣體83之流量，而將混合氣體84之流量設為目標流量並且將混合氣體84之濕度設為目標濕度。從而，可以使處理槽61中之磷酸水溶液87藉由氣泡85所攪拌的範圍穩定並且謀求抑制基板W之損傷和改善基板W之處理效率。 Further, according to the substrate processing apparatus of the present embodiment configured as above, the flow rate adjustment mechanism 4 can adjust the flow rate of the water vapor 82 supplied by the water vapor supply mechanism 2 and the flow rate of the inert gas 83 supplied by the inert gas supply mechanism 3 , And the flow rate of the mixed gas 84 is set as the target flow rate and the humidity of the mixed gas 84 is set as the target humidity. Therefore, it is possible to stabilize the range in which the phosphoric acid aqueous solution 87 in the processing tank 61 is stirred by the bubbles 85 and to suppress the damage of the substrate W and improve the processing efficiency of the substrate W.

又，依據如以上所構成之本實施形態的基板處理裝置，流量取得部15係取得使混合氣體84之濕度成為目標濕度並且使混合氣體84之流量成為目標流量時的水蒸氣82之流量和惰性氣體83之流量。調整機構控制部16係基於流量取得部15所取得的水蒸氣82之流量和惰性氣體83之流量來控制流量調整機構4。從而，即便是目標濕度和目標流量有變動的情況下，仍可以使混合氣體84之流量成為目標流量，使混合氣體84之濕度成為目標濕度。 In addition, according to the substrate processing apparatus of the present embodiment configured as above, the flow rate acquisition unit 15 acquires the flow rate and inertness of the water vapor 82 when the humidity of the mixed gas 84 becomes the target humidity and the flow rate of the mixed gas 84 becomes the target flow rate The flow rate of gas 83. The adjustment mechanism control unit 16 controls the flow adjustment mechanism 4 based on the flow rate of the water vapor 82 and the flow rate of the inert gas 83 acquired by the flow rate acquisition unit 15. Therefore, even if the target humidity and the target flow rate change, the flow rate of the mixed gas 84 can be set to the target flow rate, and the humidity of the mixed gas 84 can be set to the target humidity.

又，依據如以上所構成之本實施形態的基板處理裝置，流量取得部15係藉由進行所決定的運算來取得使混合氣體84之濕度成為目標濕度並且使混合氣體84之流量成為目標流量時的水蒸氣供給機構2所供給的水蒸氣82之流量和惰性氣體供給機構3所供給的惰性氣體83之流量。從而，即便是在目標濕度和目標流量有變動的情況下仍可以取得相應於目標濕度和目標流量的水蒸氣82之流量和惰性氣體83之流量。 In addition, according to the substrate processing apparatus of the present embodiment configured as described above, the flow rate acquisition unit 15 obtains when the humidity of the mixed gas 84 becomes the target humidity and the flow rate of the mixed gas 84 becomes the target flow rate by performing the determined calculation The flow rate of the steam 82 supplied by the steam supply mechanism 2 and the flow rate of the inert gas 83 supplied by the inert gas supply mechanism 3. Therefore, even when the target humidity and the target flow rate are changed, the flow rate of the water vapor 82 and the flow rate of the inert gas 83 corresponding to the target humidity and the target flow rate can be obtained.

又，依據如以上所構成之本實施形態的基板處理裝置，加熱器28係將水蒸氣供給機構2所供給的水蒸氣82在供給至混合機構5之前加熱，加熱器33係將惰性氣體供給機構3所供給的惰性氣體83在供給至混合機構5之前加熱。從而，可以在供給至混合機構5的水蒸氣82和惰性氣體 83混合並生成混合氣體84時抑制混合氣體84之溫度降低而發生凝結水。 Further, according to the substrate processing apparatus of the present embodiment configured as above, the heater 28 is to heat the steam 82 supplied by the steam supply mechanism 2 before being supplied to the mixing mechanism 5, and the heater 33 is to supply the inert gas supply mechanism 3 The inert gas 83 supplied is heated before being supplied to the mixing mechanism 5. Therefore, when the water vapor 82 and the inert gas 83 supplied to the mixing mechanism 5 are mixed to generate the mixed gas 84, it is possible to suppress the temperature of the mixed gas 84 from lowering and to generate condensed water.

又，依據如以上所構成之本實施形態的基板處理裝置，加熱器52係將混合氣體84在供給至氣泡產生器64之前加熱。從而，可以抑制混合氣體84在供給至氣泡產生器64之前之溫度降低。 In addition, according to the substrate processing apparatus of the present embodiment configured as above, the heater 52 heats the mixed gas 84 before being supplied to the bubble generator 64. Therefore, the temperature decrease of the mixed gas 84 before being supplied to the bubble generator 64 can be suppressed.

又，依據如以上所構成之本實施形態的基板處理方法，混合步驟係混合水蒸氣82和惰性氣體83以生成混合氣體84，氣泡產生步驟係將混合氣體84吹出至磷酸水溶液87中以產生混合氣體84之氣泡85。然後，流量調整步驟係調整在水蒸氣供給步驟中所供給的水蒸氣82之流量和在惰性氣體供給步驟中所供給的惰性氣體83之流量，以使混合氣體84之濕度成為目標濕度。從而，只要將與氣泡85之氣泡直徑對應的濕度設定在目標濕度，就可以抑制基板W之損傷並且可以改善基板W之處理效率，在此，該氣泡85之氣泡直徑係指表現基板W蒙受氣泡85所帶來之損傷的指標值滿足預定之條件且表現基板W之處理效率的指標值滿足預定之條件時的氣泡直徑。 Further, according to the substrate processing method of the present embodiment configured as above, the mixing step is to mix steam 82 and inert gas 83 to generate mixed gas 84, and the bubble generation step is to blow out mixed gas 84 into phosphoric acid aqueous solution 87 to generate mixing Bubble 84 of gas 84. Then, the flow rate adjustment step adjusts the flow rate of the water vapor 82 supplied in the water vapor supply step and the flow rate of the inert gas 83 supplied in the inert gas supply step so that the humidity of the mixed gas 84 becomes the target humidity. Therefore, as long as the humidity corresponding to the bubble diameter of the bubble 85 is set to the target humidity, the damage of the substrate W can be suppressed and the processing efficiency of the substrate W can be improved. Here, the bubble diameter of the bubble 85 means that the substrate W is exposed to bubbles The bubble diameter when the index value of the damage caused by 85 satisfies the predetermined condition and the index value expressing the processing efficiency of the substrate W satisfies the predetermined condition.

雖然本發明係已被詳細顯示且描述，但是上述之描述在全部之態樣中皆為例示而非為限定。從而，本發明係能夠在其發明之範圍內適當變化、省略實施形態。 Although the present invention has been shown and described in detail, the above description is illustrative and not limitative in all aspects. Therefore, the present invention can be appropriately changed within the scope of the invention, and the embodiments can be omitted.

Claims (7)

一種基板處理裝置，係具備：處理槽，用以收容磷酸水溶液，且對已浸漬於該磷酸水溶液中的基板施予蝕刻處理；水蒸氣供給機構，用以供給水蒸氣；惰性氣體供給機構，用以供給惰性氣體；混合機構，係從前述水蒸氣供給機構供給前述水蒸氣，並且從前述惰性氣體供給機構供給前述惰性氣體，且混合所供給來的前述水蒸氣和前述惰性氣體以生成混合氣體；氣泡產生器，係從前述混合機構供給前述混合氣體，並且將所供給來的前述混合氣體吹出至前述磷酸水溶液中以產生前述混合氣體之氣泡；以及流量調整機構，係調整前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為目標濕度。A substrate processing apparatus is provided with: a processing tank for containing a phosphoric acid aqueous solution, and performing etching treatment on a substrate immersed in the phosphoric acid aqueous solution; a steam supply mechanism for supplying steam; an inert gas supply mechanism for Supplying an inert gas; a mixing mechanism that supplies the water vapor from the water vapor supply mechanism and the inert gas from the inert gas supply mechanism, and mixes the supplied water vapor and the inert gas to generate a mixed gas; The bubble generator supplies the mixed gas from the mixing mechanism and blows the supplied mixed gas into the phosphoric acid aqueous solution to generate bubbles of the mixed gas; and the flow rate adjustment mechanism adjusts the water vapor supply mechanism The flow rate of the supplied water vapor and the flow rate of the inert gas supplied by the inert gas supply mechanism are such that the humidity of the mixed gas becomes the target humidity. 如請求項1所記載之基板處理裝置，其中前述流量調整機構係調整前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為前述目標濕度，並且使前述混合氣體之流量成為目標流量。The substrate processing apparatus according to claim 1, wherein the flow rate adjustment mechanism adjusts the flow rate of the water vapor supplied by the water vapor supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism to mix The humidity of the gas becomes the target humidity, and the flow rate of the mixed gas becomes the target flow rate. 如請求項2所記載之基板處理裝置，其中更具備：流量取得部，係取得使前述混合氣體之濕度成為前述目標濕度並且使前述混合氣體之流量成為前述目標流量時的前述水蒸氣供給機構所供給的水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量；以及調整機構控制部，係基於前述流量取得部所取得的前述水蒸氣之流量和前述惰性氣體之流量來控制前述流量調整機構。The substrate processing apparatus according to claim 2, further comprising: a flow rate acquisition unit that acquires the water vapor supply mechanism when the humidity of the mixed gas becomes the target humidity and the flow rate of the mixed gas becomes the target flow rate The flow rate of the supplied water vapor and the flow rate of the inert gas supplied by the inert gas supply mechanism; and the adjustment mechanism control unit that controls the flow rate based on the flow rate of the steam and the flow rate of the inert gas acquired by the flow rate acquisition unit Flow adjustment mechanism. 如請求項3所記載之基板處理裝置，其中前述流量取得部係藉由進行所決定的運算來取得使前述混合氣體之濕度成為前述目標濕度並且使前述混合氣體之流量成為前述目標流量時的前述水蒸氣供給機構所供給的前述水蒸氣之流量和前述惰性氣體供給機構所供給的前述惰性氣體之流量。The substrate processing apparatus according to claim 3, wherein the flow rate acquisition unit acquires the flow rate when the humidity of the mixed gas becomes the target humidity and the flow rate of the mixed gas becomes the target flow rate by performing the determined calculation The flow rate of the steam supplied by the steam supply mechanism and the flow rate of the inert gas supplied by the inert gas supply mechanism. 如請求項1至4中任一項所記載之基板處理裝置，其中具備：水蒸氣加熱用加熱器，係將前述水蒸氣供給機構所供給的前述水蒸氣在供給至前述混合機構之前加熱；以及惰性氣體加熱用加熱器，係將前述惰性氣體供給機構所供給的前述惰性氣體在供給至前述混合機構之前加熱。The substrate processing apparatus according to any one of claims 1 to 4, comprising: a heater for steam heating, which heats the steam supplied by the steam supply mechanism before being supplied to the mixing mechanism; and The heater for inert gas heating heats the inert gas supplied by the inert gas supply mechanism before being supplied to the mixing mechanism. 如請求項1至4中任一項所記載之基板處理裝置，其中更具備：混合氣體加熱用加熱器，係將前述混合氣體在供給至前述氣泡產生器之前加熱。The substrate processing apparatus according to any one of claims 1 to 4, further comprising: a heater for heating a mixed gas, which heats the mixed gas before being supplied to the bubble generator. 一種基板處理方法，係對已浸漬於磷酸水溶液中的基板施予蝕刻處理；前述基板處理方法係具備：水蒸氣供給步驟，用以供給水蒸氣；惰性氣體供給步驟，用以供給惰性氣體；混合步驟，係混合在前述水蒸氣供給步驟中所供給的前述水蒸氣和在前述惰性氣體供給步驟中所供給的前述惰性氣體以生成混合氣體；氣泡產生步驟，係將前述混合氣體吹出至前述磷酸水溶液中以產生前述混合氣體之氣泡；以及流量調整步驟，係調整在前述水蒸氣供給步驟中所供給的前述水蒸氣之流量和在前述惰性氣體供給步驟中所供給的前述惰性氣體之流量，以使前述混合氣體之濕度成為目標濕度。A substrate processing method that applies etching treatment to a substrate that has been immersed in an aqueous phosphoric acid solution; the foregoing substrate processing method includes: a steam supply step for supplying steam; an inert gas supply step for supplying inert gas; mixing The step is to mix the water vapor supplied in the water vapor supply step and the inert gas supplied in the inert gas supply step to generate a mixed gas; the bubble generation step is to blow the mixed gas to the phosphoric acid aqueous solution To generate bubbles of the mixed gas; and the flow rate adjustment step is to adjust the flow rate of the water vapor supplied in the water vapor supply step and the flow rate of the inert gas supplied in the inert gas supply step so that The humidity of the aforementioned mixed gas becomes the target humidity.
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