TWI642631B - Fluorine-containing water treatment method and treatment device - Google Patents

Fluorine-containing water treatment method and treatment device Download PDF

Info

Publication number
TWI642631B
TWI642631B TW104116062A TW104116062A TWI642631B TW I642631 B TWI642631 B TW I642631B TW 104116062 A TW104116062 A TW 104116062A TW 104116062 A TW104116062 A TW 104116062A TW I642631 B TWI642631 B TW I642631B
Authority
TW
Taiwan
Prior art keywords
fluorine
water
packed column
particles
calcium carbonate
Prior art date
Application number
TW104116062A
Other languages
Chinese (zh)
Other versions
TW201609566A (en
Inventor
佐藤伸
田中倫明
Original Assignee
日商栗田工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商栗田工業股份有限公司 filed Critical 日商栗田工業股份有限公司
Publication of TW201609566A publication Critical patent/TW201609566A/en
Application granted granted Critical
Publication of TWI642631B publication Critical patent/TWI642631B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/58Treatment of water, waste water, or sewage by removing specified dissolved compounds

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Removal Of Specific Substances (AREA)

Abstract

對含氟水以粒狀碳酸鈣填充塔進行處理,及以採析晶法之處理實施處理時,相較於習知方法,可進一步提高各處理中的氟去除率,同時可將去除的氟作為更高純度的氟化鈣有效地回收。作為填充於粒狀碳酸鈣填充塔的碳酸鈣粒子,使用粒徑0.1mm以下的碳酸鈣粒子,同時,將粒狀碳酸鈣填充塔中所得之含氟化鈣的粒子作為藉由析晶去除氟的含氟種晶使用。 When the fluorine-containing water is treated with the granular calcium carbonate packed column and treated by the crystallization method, the fluorine removal rate in each treatment can be further improved compared with the conventional method, and the removed fluorine can be removed. It is efficiently recovered as calcium fluoride of higher purity. As the calcium carbonate particles filled in the granular calcium carbonate packed column, calcium carbonate particles having a particle diameter of 0.1 mm or less are used, and particles of calcium fluoride obtained in the granular calcium carbonate packed column are used to remove fluorine by crystallization. Fluoride seed crystals are used.

Description

含氟水之處理方法及處理裝置 Fluorine-containing water treatment method and treatment device

本發明係關於一種含氟水之處理方法及處理裝置。詳言之,本發明係有關於一種由氟系蝕刻廢水等含氟水將氟高程度地去除,同時將去除的氟以高純度的氟化鈣有效地回收的含氟水之處理方法及處理裝置。 The present invention relates to a method and a processing apparatus for treating fluorine-containing water. More specifically, the present invention relates to a method and treatment for fluorine-containing water which is highly removed by fluorine-containing water such as fluorine-based etching wastewater and high-purity calcium fluoride which is effectively removed by high-purity calcium fluoride. Device.

近年來,在半導體製造領域和其相關領域、或者各種金屬材料、單晶材料、光學系材料等的表面處理領域等中,大量使用以氟化氫、或氟化氫及氟化銨為主成分的蝕刻劑。以氟化氫為主成分的蝕刻劑、或含有氟化氫及氟化銨作為主成分的蝕刻劑(緩衝氫氟酸)由於以HF形式含有高濃度的氟,此等蝕刻劑在轉移至廢水系統時,會形成含有高濃度氟的廢水。在蝕刻中途或蝕刻結束時,由於係將經此等蝕刻劑處理的材料以大量的清洗水清洗,因此,由清洗步驟中,會排出大量的含有低濃度氟的廢水。此等含有高濃度氟的廢水及含有低濃度氟的廢水係經混合而一併加以處理。 In recent years, in the field of semiconductor manufacturing and related fields, or in the field of surface treatment of various metal materials, single crystal materials, and optical materials, an etchant containing hydrogen fluoride, hydrogen fluoride, and ammonium fluoride as a main component has been used in a large amount. An etchant containing hydrogen fluoride as a main component or an etchant containing hydrogen fluoride and ammonium fluoride as a main component (buffered hydrofluoric acid) contains a high concentration of fluorine in the form of HF, and these etchants are transferred to the wastewater system. A wastewater containing a high concentration of fluorine is formed. In the middle of the etching or at the end of the etching, since the material treated with the etchant is washed with a large amount of washing water, a large amount of waste water containing a low concentration of fluorine is discharged from the washing step. These wastewaters containing high concentrations of fluorine and wastewater containing low concentrations of fluorine are mixed and treated together.

作為含有氟的廢水之處理方法,已知有:藉 由將廢水通水至粒狀碳酸鈣(CaCO3)填充塔,而將廢水中的氟作為CaF2固定於CaCO3粒子來加以去除的方法(專利文獻1)、或藉由對含有氟的廢水添加氯化鈣等的水溶性鈣化合物並予以通水至填充有含氟的種晶的析晶塔,使廢水中的氟作為氟化鈣(CaF2)在種晶表面析出來加以去除的析晶法。 As a method of treating fluorine-containing wastewater, a method of removing fluorine in wastewater from CaF 2 as CaCO 3 particles by removing water into a granular calcium carbonate (CaCO 3 ) packed column is known. (Patent Document 1), or by adding a water-soluble calcium compound such as calcium chloride to a wastewater containing fluorine and passing water to a crystallizing column filled with a fluorine-containing seed crystal, the fluorine in the wastewater is used as calcium fluoride. (CaF 2 ) A crystallization method in which the surface of the seed crystal is precipitated and removed.

此等方法可回收CaF2純度97%以上的氟化鈣粒子,在資源的回收、再利用方面係屬有利。 These methods can recover calcium fluoride particles having a purity of 97% or more of CaF 2 and are advantageous in terms of recovery and reuse of resources.

在使用粒狀碳酸鈣填充塔的方法中,有根據廢水的成分而無法獲得較高的氟去除率的情形。舉例來說,當廢水中的NH4OH成分較多時,氟去除率低至90%左右。在使用粒狀碳酸鈣填充塔的方法中,無法充分降低處理水的氟濃度,通常有30~100mg/L左右的氟會殘留於處理水中,因此,對析晶法而言,處理水質呈現較差的結果。其原因在於,由於粒狀碳酸鈣填充塔之處理係以碳酸鈣粒子內的CO3 2-與F-的取代反應為基礎,因此,在廢水中需有一定程度的F濃度,而且,不易提升處理水中的Ca離子濃度所致。 In the method of using a granular calcium carbonate packed column, there is a case where a high fluorine removal rate cannot be obtained depending on the composition of the wastewater. For example, when the amount of NH 4 OH in the wastewater is large, the fluorine removal rate is as low as about 90%. In the method of using a granular calcium carbonate packed column, the fluorine concentration of the treated water cannot be sufficiently reduced, and usually, fluorine of about 30 to 100 mg/L remains in the treated water, and therefore, the treated water quality is poor for the crystallization method. the result of. The reason for this is that since the treatment of the granular calcium carbonate packed column is based on the substitution reaction of CO 3 2- and F - in the calcium carbonate particles, a certain degree of F concentration is required in the wastewater, and it is difficult to increase. It is caused by the concentration of Ca ions in the treated water.

在析晶法中,由於需要氯化鈣等的水溶性鈣化合物以及中和用的鹼劑,因此,除藥劑成本提高外,作為種晶之氟化鈣的取得亦成為成本增加的主因。 In the crystallization method, since a water-soluble calcium compound such as calcium chloride or an alkali agent for neutralization is required, in addition to an increase in the cost of the chemical, the acquisition of calcium fluoride as a seed crystal is also a major cause of cost increase.

另有一種組合粒狀碳酸鈣填充塔之處理、及採析晶法之處理,使含氟水接觸碳酸鈣粒狀物後,添加水溶性鈣化合物並使其與含氟種晶接觸的含氟水之處理方法 (專利文獻2)。 The invention further comprises the treatment of combining the granular calcium carbonate packed tower and the treatment by the crystallizing method, and the fluorine-containing water is contacted with the calcium carbonate particles, and the fluorine-containing calcium compound is added and the fluorine-containing seed crystal is contacted with the fluorine-containing seed crystal. Water treatment method (Patent Document 2).

專利文獻2中有以下之記載。 Patent Document 2 has the following description.

藉著使含氟水接觸碳酸鈣(CaCO3)粒狀物,含氟水中的氟便透過下述反應而作為CaF2固定於CaCO3粒狀物上。 By bringing the fluorine-containing water into contact with the calcium carbonate (CaCO 3 ) particles, the fluorine in the fluorine-containing water is fixed to the CaCO 3 particles as CaF 2 by the following reaction.

2HF+CaCO3→CaF2+HCO3 -+H+ 2HF+CaCO 3 →CaF 2 +HCO 3 - +H +

對含氟水添加水溶性鈣化合物並使其與含氟種晶接觸,則含氟水中的氟便透過下述反應而作為CaF2在種晶表面析出。 When a water-soluble calcium compound is added to the fluorine-containing water and brought into contact with the fluorine-containing seed crystal, the fluorine in the fluorine-containing water is precipitated as CaF 2 on the surface of the seed crystal by the following reaction.

Ca2++2F-→CaF2 Ca 2+ +2F - →CaF 2

使含氟水與CaCO3粒狀物接觸的方法係適用於含高濃度氟的水之處理。析晶法係適用於含低濃度氟的水之處理。使含氟水與CaCO3粒狀物接觸,將含氟水中的氟預先加以去除而形成含低濃度氟的水後,對其以析晶法施予處理,即可獲得氟濃度明顯較低的高水質處理水。 The method of bringing the fluorine-containing water into contact with the CaCO 3 pellet is suitable for the treatment of water containing a high concentration of fluorine. The crystallization method is suitable for the treatment of water containing low concentrations of fluorine. The fluorine-containing water is brought into contact with the CaCO 3 particles, and the fluorine in the fluorine-containing water is removed in advance to form water containing a low concentration of fluorine, and then treated by a crystallization method to obtain a fluorine having a significantly low fluorine concentration. High water treatment water.

在CaCO3填充塔中,係藉由與含氟水中的氟的反應使CaCO3粒狀物經氟取代,而形成含CaF2的粒狀物。藉由氟取代可將含CaF2的粒狀物等填充粒子作為析晶塔的含氟種晶利用。藉由將CaCO3填充塔的填充粒子,作為析晶塔的含氟種晶利用,並進一步使CaF2析出,可謀求產生污泥量的降低、含CaF2的污泥之CaF2純度的提升,能夠回收可再利用的高純度CaF2In the CaCO 3 packed column, the CaCO 3 particles are substituted by fluorine by reaction with fluorine in the fluorine-containing water to form a CaF 2 -containing granule. Filled particles such as a granular material containing CaF 2 can be used as a fluorine-containing seed crystal of a crystallization column by fluorine substitution. By filling column filled with CaCO 3 particles, the use of fluorine-containing seed crystallization column, and further precipitation of CaF 2, can seek to reduce the amount of sludge produced, the sludge containing improve CaF 2-purity CaF 2 It is capable of recovering high-purity CaF 2 that can be reused.

專利文獻2中記載,對於填充於CaCO3填充塔之CaCO3粒狀物的粒徑,較佳使用0.1~0.5mm左右 者。在專利文獻2的實施例中係使用粒徑0.2~0.3mm的CaCO3粒狀物。專利文獻2中記載,較佳採用串聯配置複數個CaCO3填充塔,依序變換通水順序的轉塔(merry-go-round)方式。 Patent Document 2 discloses that the particle size of the CaCO 3 granular material filled in the CaCO 3 packed column is preferably about 0.1 to 0.5 mm. In the examples of Patent Document 2, a CaCO 3 granular material having a particle diameter of 0.2 to 0.3 mm is used. As described in Patent Document 2, it is preferable to adopt a merry-go-round method in which a plurality of CaCO 3 packed columns are arranged in series, and the water passing sequence is sequentially changed.

專利文獻3中記載,在粒狀碳酸鈣填充塔之處理中,透過使用平均粒徑30~150μm的粒狀碳酸鈣,能以較小型的設備實現氟去除率的提升、及回收氟化鈣的高純度化。 Patent Document 3 discloses that in the treatment of the granular calcium carbonate packed column, by using granular calcium carbonate having an average particle diameter of 30 to 150 μm, the fluorine removal rate can be improved and the calcium fluoride can be recovered by a smaller apparatus. High purity.

專利文獻1中記載,將含氟水通水至碳酸鈣填充層而實施處理時,藉由進行通水處理直到碳酸鈣填充層的入口液與出口液的氟濃度或pH成為略為相等後,可回收接近約100%的純度的氟化鈣。 Patent Document 1 discloses that when the fluorine-containing water is passed through the calcium carbonate-filled layer and treated, the water-passing treatment is performed until the fluorine concentration or pH of the inlet liquid and the outlet liquid of the calcium carbonate-filled layer are slightly equal. Calcium fluoride is recovered in a purity close to about 100%.

[專利文獻1]日本特開平5-253578號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 5-253578

[專利文獻2]日本特開2003-117565號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-117565

[專利文獻3]日本特開2011-88071號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2011-88071

專利文獻2中,並未對將CaCO3填充塔中所得之含有CaF2的粒狀物作為析晶法的含氟種晶使用時之填充於CaCO3填充塔之CaCO3粒狀物的粒徑的較佳值加以研究。 In Patent Document 2, the particle size of the CaCO 3 particles filled in the CaCO 3 packed column when the granular material containing CaF 2 obtained in the CaCO 3 packed column is used as the fluorine-containing seed crystal of the crystallization method is not used. The preferred value is studied.

專利文獻3中敘述,較佳使用平均粒徑30~150μm的粒狀碳酸鈣,惟此粒徑為僅以粒狀碳酸鈣填充塔進行處理時的較佳粒徑,無法將此粒徑直接應用於將粒狀碳酸鈣填充塔中所得之含CaF2的粒狀物作為析晶塔的含 氟種晶利用的方法。將粒狀碳酸鈣填充塔中所得之含氟化鈣之粒子作為含氟種晶使用時,為去除浸入至粒子內的高氟濃度的水而需進行清洗,其清洗效率、或藉由析晶的氟去除效率均需加以考量,惟專利文獻3中並未進行此種研究。 As described in Patent Document 3, it is preferred to use granular calcium carbonate having an average particle diameter of 30 to 150 μm, but the particle diameter is a preferable particle diameter when only a granular calcium carbonate packed column is used for treatment, and the particle diameter cannot be directly applied. The method of using a CaF 2 -containing granule obtained in a granular calcium carbonate packed column as a fluorine-containing seed crystal of a crystallization column. When the particles of the calcium fluoride-containing particles obtained in the granular calcium carbonate packed column are used as the fluorine-containing seed crystal, it is necessary to wash the water having a high fluorine concentration which is immersed in the particles, and the cleaning efficiency or the crystallization is performed. The fluorine removal efficiency needs to be considered, but such a study is not carried out in Patent Document 3.

專利文獻2及專利文獻3中雖有進行對填充塔之流路切換的轉塔方式之處理相關的記載,但無抽出填充塔內的粒子、移送至其他的填充塔並進行填充之記載。 In Patent Document 2 and Patent Document 3, there is a description of the processing of the turret method for switching the flow path of the packed column. However, the particles in the packed column are not extracted and transferred to another packed column and filled.

本發明係提供一種對含氟水以粒狀碳酸鈣填充塔之處理、及採析晶法之處理實施處理時,相較於習知方法,可進一步提高各處理中的氟去除率,並且可將去除的氟作為更高純度的氟化鈣有效地回收的含氟水之處理方法及處理裝置。 The present invention provides a treatment for treating a fluorine-containing water in a granular calcium carbonate packed column and a treatment by a crystallizing method, and the fluorine removal rate in each treatment can be further improved compared with the conventional method, and The fluorine-containing water treatment method and treatment apparatus for efficiently removing the removed fluorine as higher-purity calcium fluoride.

本案發明人發現,透過使用粒徑0.1mm以下的小粒徑之碳酸鈣粒子作為填充於碳酸鈣填充塔的碳酸鈣粒子,可提高碳酸鈣填充塔的氟去除率、及藉由析晶的氟去除率,能夠回收高純度氟化鈣。本案發明人發現,藉由對以複數段串聯設置的碳酸鈣填充塔依序通入含氟水,抽出第1段中所得之含氟化鈣之粒子並填充至最後段之填充塔,將第2段以後之填充塔內的粒子分別移送至正前方的填充塔而填充,從最後段起對前1個填充塔填充新的碳酸鈣粒子,即可利用同一類型的填充塔,使最後段之填充塔 發揮作為析晶塔之功能而進行有效的處理。 The inventors of the present invention have found that by using calcium carbonate particles having a small particle diameter of 0.1 mm or less as calcium carbonate particles filled in a calcium carbonate packed column, the fluorine removal rate of the calcium carbonate packed column and the fluorine by crystallization can be improved. The removal rate enables recovery of high purity calcium fluoride. The inventors of the present invention have found that the fluorine-containing water is sequentially introduced into the calcium carbonate packed column arranged in series in a plurality of stages, and the calcium fluoride-containing particles obtained in the first stage are extracted and filled into the final stage packed column. After the second stage, the particles in the packed tower are transferred to the filling tower directly in front and filled. From the last stage, the first filling tower is filled with new calcium carbonate particles, and the same type of packed tower can be used to make the last stage. Packed tower It functions as an crystallization tower and performs effective processing.

下述作為本發明的要旨。 The following is the gist of the present invention.

〔1〕一種含氟水之處理方法,其係具有:使含氟水與碳酸鈣粒子接觸,而藉由該含氟水中之氟與碳酸鈣的反應將該氟作為氟化鈣去除,同時獲得該碳酸鈣粒子中之碳酸鈣的至少一部分取代為該氟化鈣的含氟化鈣之粒子的第1氟去除步驟,與對該第1氟去除步驟的處理水添加水溶性鈣化合物並使其與含氟種晶接觸,而將殘留的氟藉由析晶去除的第2氟去除步驟之含氟水之處理方法中,其特徵為:作為前述碳酸鈣粒子,使用粒徑0.1mm以下的碳酸鈣粒子,同時,將前述第1氟去除步驟中所得之前述含氟化鈣之粒子,作為前述第2氟去除步驟中的前述含氟種晶使用。 [1] A method for treating fluorine-containing water, comprising: contacting fluorine-containing water with calcium carbonate particles, and removing fluorine as calcium fluoride by reacting fluorine and calcium carbonate in the fluorine-containing water; At least a part of the calcium carbonate in the calcium carbonate particles is substituted with a first fluorine removal step of the calcium fluoride-containing particles of the calcium fluoride, and a water-soluble calcium compound is added to the treated water of the first fluorine removal step. In the method for treating fluorine-containing water in the second fluorine removal step of contacting the fluorine-containing seed crystal with the fluorine-containing seed crystal, the carbon fluoride having a particle diameter of 0.1 mm or less is used as the calcium carbonate particle. In the calcium particles, the particles of the calcium fluoride-containing particles obtained in the first fluorine removal step are used as the fluorine-containing seed crystal in the second fluorine removal step.

〔2〕如〔1〕之含氟水之處理方法,其係將前述含氟水依序通水至以複數段串聯設置的前述碳酸鈣粒子的填充塔、與最後段之前述含氟種晶的填充塔,對該最後段之填充塔的流入水添加前述水溶性鈣化合物,並將該最後段之填充塔的流出水作為處理水取出的方法,其中,進行前述含氟水之通水直到第1段之填充塔的流入水與流出水的氟濃度或pH成為略為相等後,停止通水,將最後段之填充塔內的粒子向系統外抽出,將第1段之填充塔內的粒子抽出後填充至該最後段之填充塔,將第2段以後之填充塔內的粒子抽出後分別填充至正前方的填充塔,從該最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始 前述含氟水之通水。 [2] The method for treating fluorine-containing water according to [1], wherein the fluorine-containing water is sequentially passed through water to a packed column of the calcium carbonate particles arranged in series at a plurality of stages, and the fluorine-containing seed crystal of the last stage a packed tower, the water-soluble calcium compound is added to the inflow water of the packed column of the last stage, and the effluent water of the packed column of the last stage is taken out as a treated water, wherein the water of the fluorine-containing water is passed until After the influent water of the packed column of the first stage and the fluorine concentration or pH of the effluent water are slightly equal, the water is stopped, and the particles in the packed column in the last stage are taken out of the system, and the particles in the packed column of the first stage are removed. After being withdrawn, the packed column is filled to the last stage, and the particles in the packed column after the second stage are extracted and filled into the packed column directly in front, and the first packed column is filled with new calcium carbonate particles from the last stage. After that, start again The above-mentioned fluorine-containing water is passed through water.

〔3〕一種含氟水之處理裝置,其具備下述手段:具備有填充有碳酸鈣粒子的填充塔,藉由含氟水中之氟與碳酸鈣的反應將該含氟水中之氟作為氟化鈣去除,同時將該碳酸鈣粒子中之碳酸鈣的至少一部分取代為氟化鈣而獲得含氟化鈣之粒子的第1氟去除手段,與具備有填充有含氟種晶的填充塔,將含氟水中的氟進行析晶去除的第2氟去除手段,與對該第1氟去除手段通入含氟水的手段,與對該第1氟去除手段的流出水添加水溶性鈣化合物的手段,與將添加有該水溶性鈣化合物之該第1氟去除手段的流出水通入該第2氟去除手段的手段之含氟水之處理裝置中,其特徵為:前述第1氟去除手段的前述碳酸鈣粒子為粒徑0.1mm以下的碳酸鈣粒子,前述第2氟去除手段的前述含氟種晶為前述第1氟去除手段中所得之前述含氟化鈣之粒子。 [3] A fluorine-containing water treatment apparatus comprising: a packed column filled with calcium carbonate particles, wherein fluorine in the fluorine-containing water is fluorinated by reaction of fluorine and calcium carbonate in the fluorine-containing water a first fluorine removing means for obtaining calcium fluoride particles by replacing at least a part of calcium carbonate in the calcium carbonate particles with calcium fluoride, and a packed column containing fluorine-containing seed crystals A second fluorine removing means for removing crystallization of fluorine in the fluorine-containing water, means for introducing fluorine-containing water to the first fluorine removing means, and means for adding a water-soluble calcium compound to the effluent water of the first fluorine removing means And a fluorine-containing water treatment device which is a means for introducing the effluent water of the first fluorine removal means to which the water-soluble calcium compound is added to the second fluorine removal means, wherein the first fluorine removal means The calcium carbonate particles are calcium carbonate particles having a particle diameter of 0.1 mm or less, and the fluorine-containing seed crystals of the second fluorine removal means are particles of the calcium fluoride-containing particles obtained by the first fluorine removal means.

〔4〕如〔3〕之含氟水之處理裝置,其中前述第1氟去除手段係具有以複數段串聯設置的碳酸鈣粒子的填充塔,前述第2氟去除手段的前述填充塔係在該第1氟去除手段之複數個填充塔群的後段作為最後段之填充塔設置,並具備下述手段:將該最後段之填充塔內的粒子向系統外抽出的手段,與將第1段之填充塔內的粒子抽出並填充至該最後段之填充塔的手段,與將第2段以後之填充塔內的粒子抽出並分別填充至正前方的填充塔的手段,與從最後段起對前1個填充塔填充新的碳酸鈣粒子的手段, 與對該最後段之填充塔的流入水添加前述水溶性鈣化合物的手段,與將該最後段之填充塔的流出水作為處理水取出的手段。 [4] The apparatus for treating fluorine-containing water according to [3], wherein the first fluorine removing means has a packed column of calcium carbonate particles arranged in series in a plurality of stages, and the packed column of the second fluorine removing means is The latter stage of the plurality of packed column groups of the first fluorine removing means is provided as a packed column of the last stage, and means for extracting particles in the packed column of the last stage out of the system, and the first stage a means for extracting and filling the particles in the packed column to the packed column of the last stage, and means for extracting the particles in the packed column after the second stage and filling the packed column directly in front, and from the last stage a means of filling the tower with new calcium carbonate particles, The means for adding the water-soluble calcium compound to the inflow water of the packed column of the last stage, and the means for taking out the effluent water of the packed column of the last stage as the treated water.

〔5〕一種含氟水之處理方法,其係將含氟水依序通入以複數段串聯設置的碳酸鈣粒子的填充塔,與進一步對其後段作為最後段之填充塔設置的含氟種晶的填充塔而實施處理,並在對該最後段之填充塔的流入水添加水溶性鈣化合物後予以通入至該最後段之填充塔的方法中,其特徵為:通入前述含氟水直到第1段之填充塔的流入水與流出水的氟濃度或pH成為略為相等後,停止通水,其後,將該最後段之填充塔內的粒子向系統外抽出,將第1段之填充塔內的粒子抽出並填充至該最後段之填充塔,將第2段以後之填充塔內的粒子抽出並分別填充至正前方的填充塔,從該最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始前述含氟水之通水。 [5] A method for treating fluorine-containing water, which comprises sequentially introducing fluorine-containing water into a packed column of calcium carbonate particles arranged in series in a plurality of stages, and a fluorine-containing species further provided as a packing column of the last stage in the latter stage. a crystal packed column is subjected to treatment, and after adding a water-soluble calcium compound to the inflow water of the last stage packed column, the method is introduced into the final stage packed column, characterized in that the fluorine-containing water is introduced After the influent water of the packed column of the first stage and the fluorine concentration or pH of the effluent water are slightly equal, the water is stopped, and then the particles in the packed column of the last stage are taken out of the system, and the first stage is The particles in the packed column are extracted and filled into the packed column of the last stage, and the particles in the packed column after the second stage are extracted and filled into the packed column directly in front, and the filling tower is filled from the last stage. After the new calcium carbonate particles, the water of the above-mentioned fluorine-containing water is started again.

〔6〕一種含氟水之處理裝置,其特徵為具備下述手段:以複數段串聯設置的碳酸鈣粒子的填充塔,進一步在其後段作為最後段之填充塔所設置的含氟種晶的填充塔,對該以複數段串聯設置的碳酸鈣粒子的填充塔與最後段之含氟種晶的填充塔依序通入含氟水的手段,與將該最後段之填充塔內的粒子向系統外抽出的手段,與將第1段之填充塔內的粒子抽出並填充至該最後段之填充塔的手段,與將第2段以後之填充塔內的粒子抽出並分別填充至正前方的填充塔的手段,與從最後段起對前1個填充塔填 充新的碳酸鈣粒子的手段,與對該最後段之填充塔的流入水添加水溶性鈣化合物的手段,與將該最後段之填充塔的流出水作為處理水取出的手段。 [6] A fluorine-containing water treatment apparatus comprising: a packed column of calcium carbonate particles arranged in series in a plurality of stages, and further comprising a fluorine-containing seed crystal provided in a packed column of the last stage in a subsequent stage thereof; a packed column, in which a packed column of calcium carbonate particles arranged in series in a plurality of stages and a packed column of a fluorine-containing seed crystal of a final stage are sequentially introduced with fluorine-containing water, and the particles in the packed column of the last stage are directed The means for extracting outside the system, the means for extracting and filling the particles in the packed column of the first stage into the packed column of the last stage, and extracting the particles in the packed column after the second stage and filling them directly to the front The means of filling the tower, and the first filling tower filling from the last paragraph The means for charging the new calcium carbonate particles, the means for adding the water-soluble calcium compound to the inflowing water of the packed column of the last stage, and the means for taking out the effluent water of the packed column of the last stage as the treated water.

根據本發明,藉由粒狀碳酸鈣填充塔的含氟水的處理,與藉由析晶法之處理而實施處理時,透過使用粒徑0.1mm以下的小粒徑之碳酸鈣粒子作為填充於碳酸鈣填充塔的碳酸鈣粒子,可提高碳酸鈣填充塔的氟去除率,與藉由析晶的氟去除率,能夠獲得高純度氟化鈣。根據本發明,透過使用小粒徑之碳酸鈣粒子,可大幅改善前段之粒狀碳酸鈣填充塔的氟去除率,其結果,對於後段之藉由析晶的氟去除而言,只要僅去除殘留之少量的氟即可,故可減少析晶所需之氯化鈣等水溶性鈣化合物或氫氧化鈉等pH調整劑的用量,而能夠壓低處理成本。 According to the present invention, when the treatment of the fluorine-containing water in the granular calcium carbonate packed column and the treatment by the crystallization method are carried out, the calcium carbonate particles having a small particle diameter of 0.1 mm or less are used as the filling. The calcium carbonate particles of the calcium carbonate packed column can increase the fluorine removal rate of the calcium carbonate packed column, and the high-purity calcium fluoride can be obtained by the fluorine removal rate by crystallization. According to the present invention, by using the calcium carbonate particles having a small particle diameter, the fluorine removal rate of the granular calcium carbonate packed column in the preceding stage can be greatly improved, and as a result, only the residual is removed for the fluorine removal by the crystallization in the latter stage. Since a small amount of fluorine can be used, the amount of the water-soluble calcium compound such as calcium chloride required for crystallization, or a pH adjuster such as sodium hydroxide can be reduced, and the treatment cost can be reduced.

根據本發明,藉由對以複數段串聯所設置的碳酸鈣填充塔依序通入含氟水,抽出第1段中所得之含氟化鈣之粒子並填充至最後段之填充塔,將第2段以後之填充塔內的粒子分別移送至正前方的填充塔而填充,從最後段起對前1個填充塔填充新的碳酸鈣粒子,即可使用同一類型的填充塔,使最後段之填充塔發揮作為析晶塔之功能而進行有效率的處理。 According to the present invention, the fluorine-containing water is sequentially introduced into the calcium carbonate packed column provided in series in a plurality of stages, and the calcium fluoride-containing particles obtained in the first stage are extracted and filled into the final packed column. After the 2nd stage, the particles in the packed tower are transferred to the filling tower in front of it and filled. From the last stage, the first filling tower is filled with new calcium carbonate particles, and the same type of packed tower can be used to make the last stage. The packed column functions as a crystallization column for efficient processing.

根據本發明,可將氟去除率提高至98~99%,或者更高,同時可回收CaF2純度98~100%左右的 高純度氟化鈣,能夠將其有效地再利用。 According to the present invention, the fluorine removal rate can be increased to 98 to 99% or higher, and high-purity calcium fluoride having a purity of about 98 to 100% of CaF 2 can be recovered, and it can be effectively reused.

1‧‧‧第1填充塔 1‧‧‧1st packed tower

2‧‧‧第2填充塔 2‧‧‧2nd packed tower

3‧‧‧第3填充塔 3‧‧‧3rd packed tower

1A,2A,3A‧‧‧循環槽 1A, 2A, 3A‧‧ cycle

第1圖為表示本發明之含氟水之處理裝置之實施形態的一例的系統圖。 Fig. 1 is a system diagram showing an example of an embodiment of a fluorine-containing water treatment apparatus according to the present invention.

以下對本發明之含氟水之處理方法及處理裝置的實施形態詳細加以說明。 Hereinafter, embodiments of the method and apparatus for treating fluorine-containing water of the present invention will be described in detail.

以下,有將使含氟水(以下有稱為「原水」的情形)與碳酸鈣粒子接觸,而藉由原水中的氟與碳酸鈣的反應將該氟作為氟化鈣去除,同時獲得該碳酸鈣粒子中之碳酸鈣的至少一部分取代為氟化鈣的含氟化鈣之粒子的第1氟去除步驟稱為「前段處理」的情形。有將對該前段處理的處理水添加水溶性鈣化合物並使其與含氟種晶接觸,而將殘留的氟藉由析晶去除的第2氟去除步驟稱為「後段處理」的情形。 Hereinafter, the fluorine-containing water (hereinafter referred to as "raw water") is brought into contact with the calcium carbonate particles, and the fluorine is removed as calcium fluoride by the reaction of fluorine and calcium carbonate in the raw water, and the carbonic acid is obtained. The first fluorine removal step in which at least a part of the calcium carbonate in the calcium particles is substituted with the calcium fluoride-containing particles of calcium fluoride is referred to as a "pre-stage treatment". In the case where the water-soluble calcium compound is added to the treated water treated in the preceding stage and brought into contact with the fluorine-containing seed crystal, the second fluorine removal step in which the residual fluorine is removed by crystallization is referred to as "post-stage treatment".

碳酸鈣粒子 Calcium carbonate particles

作為前段處理所使用的碳酸鈣粒子,係使用粒徑100μm以下,較佳為粒徑80μm以下,且體積平均粒徑(以下僅稱為「平均粒徑」)為20~80μm,更佳為30~60μm的碳酸鈣粒子。 The calcium carbonate particles used in the previous stage treatment have a particle diameter of 100 μm or less, preferably a particle diameter of 80 μm or less, and a volume average particle diameter (hereinafter simply referred to as "average particle diameter") of 20 to 80 μm, more preferably 30. ~60 μm calcium carbonate particles.

碳酸鈣粒子的粒徑,在獲得後述之作用效果方面而言愈小愈佳。碳酸鈣粒子的粒徑若過小,則因碳酸鈣與原水中的氟反應所生成的碳酸氣體,使微細的碳酸鈣粒子從填充塔中流出,導致處理不穩定,亦降低氟去除率,因此碳酸鈣粒子的粒徑取上述下限以上較佳。 The particle size of the calcium carbonate particles is preferably as small as possible in terms of obtaining the effects described later. When the particle size of the calcium carbonate particles is too small, the carbonic acid gas generated by the reaction of the calcium carbonate with the fluorine in the raw water causes the fine calcium carbonate particles to flow out of the packed column, resulting in unstable treatment and reduced fluorine removal rate. The particle size of the calcium particles is preferably at least the above lower limit.

本發明中,使用此種小粒徑之碳酸鈣粒子所產生的作用效果如下: In the present invention, the effects of using such small-diameter calcium carbonate particles are as follows:

(1)碳酸鈣粒子的比表面積較大,參與和氟的反應之面積亦較大,因此,可加快前段處理的反應速度。 (1) The specific surface area of the calcium carbonate particles is large, and the area of the reaction involving fluorine is also large, so that the reaction speed of the front stage treatment can be accelerated.

在前段處理中,碳酸鈣粒子的CaCO3縱使轉換成CaF2,粒子本身的大小也不會改變,惟因分子量100的CaCO3轉換成分子量78的CaF2,密度變小。如細孔般的微細通道在粒子內部形成,原水滲入該通道中,持續滲透至粒子內部,反應進一步深入粒子內部進行,與提高反應速度。 In the pretreatment, the CaCO 3 of the calcium carbonate particles is converted into CaF 2 and the size of the particles itself does not change. However, since the CaCO 3 having a molecular weight of 100 is converted into CaF 2 having a molecular weight of 78, the density becomes small. A fine channel such as a fine pore is formed inside the particle, and raw water permeates into the channel, continuously permeating into the interior of the particle, and the reaction proceeds further into the interior of the particle, and the reaction speed is increased.

此時,碳酸鈣粒子的粒徑較小,該細孔的長度與粒徑的平方成正比而變短,因此,原水容易向細孔內滲入,由此而言,亦可加速進行反應,能夠獲得深入粒子內部的碳酸鈣取代為氟化鈣的含氟化鈣之粒子。 In this case, the particle size of the calcium carbonate particles is small, and the length of the pores is proportional to the square of the particle diameter, so that the raw water easily permeates into the pores, whereby the reaction can be accelerated. Particles of calcium fluoride containing calcium carbonate in the interior of the particle are replaced by calcium fluoride.

(2)由(1)而言,反應深入粒子內部進行而能夠獲得高純度的含氟化鈣之粒子,並可將其作為後段處理的含氟種晶有效地使用。在後段處理中種晶粒子的粒徑亦較小,有助於析晶的面積較大,同時,細孔較短,被 處理水容易滲入至細孔內,因此可加速進行析晶反應,可更降低處理水氟濃度,同時可回收高純度含氟化鈣之粒子。 (2) According to (1), the reaction proceeds deep into the inside of the particles to obtain high-purity calcium fluoride-containing particles, and can be effectively used as a fluorine-containing seed crystal to be treated in the subsequent stage. In the latter stage of treatment, the particle size of the seed crystals is also small, which contributes to a large area of crystallization, and at the same time, the pores are short and are The treated water easily penetrates into the pores, so that the crystallization reaction can be accelerated, the fluorine concentration of the treated water can be further reduced, and the particles of the high-purity calcium fluoride can be recovered.

(3)將前段處理中所得之含氟化鈣之粒子作為後段處理的含氟種晶使用前,對該含氟化鈣之粒子進行清洗時尚有以下優點:在含氟化鈣之粒子的細孔內,由於滲透有與原水相同的含高濃度氟的水,因此,對其進行清洗處理時,清洗水量、清洗時間均需大量耗費。若為粒徑較小的含氟化鈣之粒子,由於粒子內之細孔的長度較短,可容易藉由清洗使細孔內的水排出。因此,可縮減清洗水量、清洗時間。 (3) Before the use of the fluoride-containing crystal particles obtained in the previous stage treatment as the fluorine-containing seed crystal to be treated in the latter stage, the cleaning of the calcium fluoride-containing particles has the following advantages: fine particles of the calcium fluoride-containing particles In the hole, since the water containing the high concentration of fluorine is infiltrated with the raw water, when the cleaning process is performed, the amount of washing water and the washing time are required to be largely consumed. In the case of particles containing calcium fluoride having a small particle diameter, since the length of the pores in the particles is short, the water in the pores can be easily discharged by washing. Therefore, the amount of washing water and the cleaning time can be reduced.

(4)碳酸鈣粒子的粒徑較大,所得含氟化鈣之粒子的粒徑亦較大,若高氟濃度的原水深入至粒子內部,則無法充分進行滲入水的析晶反應,將其作為含氟種晶使用時,由於會影響處理水氟濃度,因此,在粒子的交換前後,一般不會立即接受原水,而變成需要使後段處理所得的處理水在前段處理中循環等的煩雜的運作管理。若為由粒徑較小的碳酸鈣粒子所得之粒徑較小的含氟化鈣之粒子,則無如下述(5)所述之此種問題。 (4) The particle size of the calcium carbonate particles is large, and the particle size of the obtained calcium fluoride-containing particles is also large. If the raw water having a high fluorine concentration penetrates into the inside of the particles, the crystallization reaction of the infiltrated water cannot be sufficiently performed. When it is used as a fluorine-containing seed crystal, it affects the concentration of the fluorine in the treated water. Therefore, it is generally not necessary to immediately receive the raw water before and after the exchange of the particles, and it is necessary to circulate the treated water obtained in the subsequent stage of the treatment in the previous stage. Operation management. If the particles of calcium fluoride containing particles having a small particle diameter obtained from calcium carbonate particles having a small particle diameter are not as described in the following (5).

(5)若含氟化鈣之粒子的粒徑較小,細孔的長度較短,在後段處理中,含水溶性鈣化合物的被處理水容易滲入至含氟化鈣之粒子的細孔內,縱使在細孔內有原水殘留,對於該原水亦容易地使其進行析晶反應。 (5) If the particle size of the calcium fluoride-containing particles is small, the length of the pores is short, and in the subsequent treatment, the water to be treated containing the water-soluble calcium compound easily permeates into the pores of the particles containing calcium fluoride. Even if raw water remains in the pores, the raw water is easily subjected to a crystallization reaction.

(6)由上述(5),將含氟化鈣之粒子作為 含氟種晶利用時,亦可不進行清洗而直接利用。 (6) From the above (5), the particles of calcium fluoride are used as When the fluorine-containing seed crystal is used, it can be used as it is without washing.

含氟水之處理 Fluorine-containing water treatment

本發明係以使用如前述之小粒徑之碳酸鈣粒子,同時將前段處理中所得之含氟化鈣之粒子作為後段處理的含氟種晶使用為特徵。本發明較佳藉由下述步驟進行:將原水依序通水至以複數段串聯設置的碳酸鈣粒子的填充塔,與最後段之含氟種晶的填充塔,對最後段之填充塔的流入水添加水溶性鈣化合物,並將最後段之填充塔的流出水作為處理水取出的運作,並重複:進行原水之通水直到第1段之填充塔的流入水與流出水的氟濃度或pH成為略為相等後,停止通水,將最後段之填充塔內的粒子向系統外抽出,將第1段之填充塔內的粒子抽出後填充至最後段之填充塔,將第2段以後之填充塔內的粒子抽出後分別填充至正前方的填充塔,從最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始原水之通水的運作而實施。 In the present invention, the calcium carbonate particles having a small particle diameter as described above are used, and the particles of the calcium fluoride obtained in the previous stage treatment are used as the fluorine-containing seed crystals to be treated in the subsequent stage. The present invention is preferably carried out by sequentially passing the raw water to the packed column of calcium carbonate particles arranged in series in a plurality of stages, and the packed column of the fluorine-containing seed crystal in the last stage, and the packed column of the last stage Adding water-soluble calcium compound to the influent water, and taking out the effluent water of the last stage of the packed tower as the operation of taking out the treated water, and repeating: performing the water flow of the raw water until the fluorine concentration of the inflow water and the effluent water of the packed tower of the first stage or After the pH is slightly equal, the water is stopped, and the particles in the packed column in the last stage are taken out of the system, and the particles in the packed column of the first stage are taken out and filled into the packed column in the last stage, and the second stage is The particles in the packed column are taken out and filled into the packed column directly in front, and the new one of the calcium carbonate particles is filled in the first packed column from the last stage, and then the operation of the raw water is started.

第1圖為表示適用於進行此種運作的含氟水之處理方法的含氟水之處理裝置的一例的系統圖。 Fig. 1 is a system diagram showing an example of a fluorine-containing water treatment apparatus which is applied to a method for treating fluorine-containing water which performs such operation.

以下,就第1圖之處理裝置所進行的原水之處理進行說明。 Hereinafter, the processing of the raw water by the processing apparatus of Fig. 1 will be described.

原水係由配管11,經過循環槽1A,從具有泵P1的配管12導入至第1填充塔1,在第1填充塔1內以上向流流動,處理水係由配管13朝循環槽1A循環。循環槽1A內的一部分的水係由配管14經過循環槽2A,從具 有泵P2的配管15導入至第2填充塔2,在第2填充塔2內以上向流流動,處理水係由配管16朝循環槽2A循環。循環槽2A內的一部分的水係由配管17經過循環槽3A,從具有泵P3的配管18導入至第3填充塔3,此時,在第3填充塔3的入口側,由配管19添加CaCl2等的水溶性鈣化合物,同時由配管20添加pH調整劑。出自配管18的水,在第3填充塔3內以上向流流動,處理水由配管21朝循環槽3A循環,循環槽3A內的一部分的水則作為處理水由配管22向系統外排出。 Original aqueous from the pipe 11, through the circulation tank 1A, from a pump P pipe 1 12 is introduced into a first packed column 1, in the above first packed column 1 to the current flow, the process water system by a pipe 13 toward the circulation tank 1A cycle . A part of the water in the circulation tank 1A passes through the circulation tank 2A through the piping 14 and is introduced into the second packed column 2 from the pipe 15 having the pump P 2 , and flows upward and upward in the second packed column 2 to treat the water system by piping. 16 circulates toward the circulation tank 2A. A part of the water in the circulation tank 2A is introduced into the third packed column 3 from the pipe 18 having the pump P 3 through the pipe 17 through the circulation pipe 3A. At this time, the pipe 19 is added to the inlet side of the third packed column 3 A water-soluble calcium compound such as CaCl 2 is added to the pipe 20 to add a pH adjuster. The water from the pipe 18 flows upward and upward in the third packed column 3, and the treated water is circulated by the pipe 21 toward the circulation tank 3A, and a part of the water in the circulation tank 3A is discharged as the treated water from the pipe 22 to the outside of the system.

於此裝置中,第1,2填充塔1,2中填充有碳酸鈣粒子。第3填充塔3中填充有含氟種晶。第1填充塔1與第2填充塔2係發揮作為用以進行前段處理之粒狀碳酸鈣填充塔的功能。最後段之第3填充塔3則發揮作為用以進行後段處理之析晶塔的功能。 In this apparatus, the first and second packed columns 1, 2 are filled with calcium carbonate particles. The third packed column 3 is filled with a fluorine-containing seed crystal. The first packed column 1 and the second packed column 2 function as a granular calcium carbonate packed column for performing the front stage treatment. The third packed column 3 in the last stage functions as a crystallizing tower for performing the subsequent stage treatment.

成為析晶塔的最後段之第3填充塔3的流入水較佳為pH4~9。對第3填充塔3的流入水,視需求添加作為pH調整劑的氫氧化鈉(NaOH)等鹼、鹽酸(HCl)等酸。 The inflow water of the third packed column 3 which is the last stage of the crystallization column is preferably pH 4 to 9. To the inflow water of the third packed column 3, an alkali such as sodium hydroxide (NaOH) or an acid such as hydrochloric acid (HCl) as a pH adjuster is added as needed.

作為水溶性鈣化合物,可使用氯化鈣(CaCl2)、碳酸鈣(CaCO3)等鈣鹽或氫氧化鈣(Ca(OH)2)等。作為水溶性鈣化合物,若添加氫氧化鈣等鹼時,可將pH適當調整為添加後的pH成為適於析晶的pH。 As the water-soluble calcium compound, a calcium salt such as calcium chloride (CaCl 2 ) or calcium carbonate (CaCO 3 ) or calcium hydroxide (Ca(OH) 2 ) or the like can be used. When a base such as calcium hydroxide is added as the water-soluble calcium compound, the pH can be appropriately adjusted so that the pH after the addition becomes a pH suitable for crystallization.

鈣化合物的添加量較佳為待析晶處理的被處理水(第1圖中為第2填充塔2的處理水)中之氟濃度的 理論量,即被處理水的氟濃度的1/2莫耳倍以上。鈣化合物的添加量,相對於被處理水的氟濃度較佳取80~150重量%左右。 The amount of the calcium compound added is preferably the concentration of fluorine in the water to be treated (the treated water of the second packed column 2 in Fig. 1). The theoretical amount, that is, 1/2 moles of the fluorine concentration of the water to be treated. The amount of the calcium compound added is preferably about 80 to 150% by weight based on the fluorine concentration of the water to be treated.

對各填充塔之通水SV不特別限定。使對各填充塔之通水SV為0.5~5hr-1,並使所有填充塔之通水SV均相等,如此在運作管理的簡化方面係較佳。以各填充塔之通水LV為5~15m/hr、填充塔內粒子的展開率為20~40%左右的方式來設定循環水量,如此在不過度增加填充塔容積而提高氟去除率方面係較佳。使通水LV在所有填充塔中均相等,如此在運作管理的簡化方面亦較佳。 The water passing SV of each packed column is not particularly limited. The water passing SV for each packed column is 0.5 to 5 hr -1 , and the water passing SV of all the packed towers are equal, which is preferable in terms of simplification of operation management. The circulating water amount is set such that the water passing LV of each packed column is 5 to 15 m/hr, and the expansion ratio of the particles in the packed column is about 20 to 40%, so that the fluorine removal rate is increased without excessively increasing the volume of the packed column. Preferably. The water LV is made equal in all the packed towers, so that the simplification of the operation management is also preferable.

藉由進行原水之通水直到使第1填充塔1的流入水與流出水的氟濃度或pH略為相等後,停止原水之通水,進行填充塔內的粒子的交換。以下,有將流入水與流出水的氟濃度或pH略為相等者稱為「達到飽和」的情形。 By passing the raw water through the water until the fluorine concentration or pH of the inflow water of the first packed column 1 and the effluent water are slightly equal, the water passing through the raw water is stopped, and the particles in the packed column are exchanged. Hereinafter, a case where the fluorine concentration or the pH of the inflow water and the effluent water are slightly equal is referred to as "saturated".

所稱「第1填充塔1達到飽和」,係指第1填充塔1內的粒子成為接近約100%的高純度氟化鈣粒子,在第1填充塔1中,不會繼續發生CaF2的固定化反應之意。 The phrase "the first packed column 1 is saturated" means that the particles in the first packed column 1 become high-purity calcium fluoride particles of approximately 100%, and in the first packed column 1, CaF 2 does not continue to occur. The meaning of the immobilization reaction.

原水之通水停止後,將各填充塔1~3的粒子抽出,將由第1填充塔1抽出的粒子填充至第3填充塔3,將由第2填充塔2抽出的粒子填充至第1填充塔1,將由第3填充塔3抽出的粒子向系統外排出,並對第2填充塔2填充新的碳酸鈣粒子,其後,同樣地再開始原水之 通水。 After the passage of the raw water is stopped, the particles of the packed columns 1 to 3 are extracted, the particles extracted by the first packed column 1 are filled into the third packed column 3, and the particles extracted by the second packed column 2 are filled into the first packed column. 1. The particles extracted by the third packed column 3 are discharged to the outside of the system, and the second packed column 2 is filled with new calcium carbonate particles, and then the raw water is restarted in the same manner. Through the water.

從藉由原水之通水而達到飽和之第1填充塔1抽出的粒子為含高純度氟化鈣之粒子,可作為屬析晶塔之第3填充塔3的含氟種晶有效地使用。藉由對成為析晶塔的最後段之第3填充塔3的正前方的填充塔,即第2填充塔2填充新的碳酸鈣粒子,可從第2填充塔2中由前段之填充塔的處理水高程度地去除氟。 The particles extracted from the first packed column 1 saturated with water passing through the raw water are particles containing high-purity calcium fluoride, and can be effectively used as the fluorine-containing seed crystal of the third packed column 3 belonging to the crystallizing column. By filling the packed column in front of the third packed column 3 which is the last stage of the crystallization column, that is, the second packed column 2 is filled with new calcium carbonate particles, the packed column of the former stage can be used from the second packed column 2 The treated water removes fluorine to a high degree.

藉由原水之通水使第1填充塔1達到飽和後,停止通水,進行填充塔內的粒子的交換,重複進行原水之通水與粒子的交換,由此可對原水藉由粒狀碳酸鈣之處理與藉由析晶法之處理而高程度地實施處理。 After the first packed column 1 is saturated by the water passing through the raw water, the water is stopped, the particles in the packed column are exchanged, and the exchange of water and particles in the raw water is repeated, whereby the raw water can be made of granular carbonic acid. The treatment of calcium and the treatment by the crystallization method are carried out to a high degree.

藉由使所有的填充塔為同規格,並統一通水條件,可簡化裝置設備的設計與運作管理。相較於採用轉塔方式者,不需要原水的流路切換等,因此可大幅刪減配管或閥的數目,可包括析晶塔將填充塔予以統一,附加設備與運作管理之簡化的優點極大。 By making all the packed towers the same size and unifying the water supply conditions, the design and operation management of the equipment can be simplified. Compared with the turret method, the flow path switching of the raw water is not required, so the number of pipes or valves can be greatly reduced, which can include the crystallization tower to unify the packed tower, and the advantages of the additional equipment and operation management are greatly simplified. .

將由第1填充塔1內抽出的粒子填充至第3填充塔3時,亦可對粒子進行清洗。 When the particles extracted from the first packed column 1 are filled into the third packed column 3, the particles may be washed.

本發明中,根據使用小粒徑之碳酸鈣粒子所產生的前述作用效果,即使未對該粒子進行清洗即予以填充至第3填充塔3也不會使處理水質大幅降低,可穩定地進行處理。即使進行清洗時,亦可容易地進行清洗處理。在使用大粒徑之碳酸鈣粒子的轉塔方式中,清洗時間較長,且另外設有清洗設備。如本發明,透過採用使用小粒 徑粒子的粒子交換方式,清洗更為容易,且亦可省略清洗設備。 In the present invention, according to the above-described effects of the use of the calcium carbonate particles having a small particle diameter, even if the particles are not washed, the third packed column 3 is not filled, and the treated water quality is not greatly lowered, and the treatment can be stably performed. . Even when cleaning is performed, the cleaning process can be easily performed. In the turret mode using large-diameter calcium carbonate particles, the cleaning time is long, and a cleaning device is additionally provided. According to the present invention, by using small particles The particle exchange method of the radial particles makes cleaning easier, and the cleaning equipment can be omitted.

第1圖中,填充塔包括成為析晶塔的最後段之填充塔係以3段串聯設置,惟填充塔不限於3段,亦可為4段以上。填充塔數過多時會使裝置過於大型化,因此,通常較佳以3~6段左右連結填充塔。 In Fig. 1, the packed column includes a packed column which is the last stage of the crystallization column, and is arranged in series in three stages, but the packed column is not limited to three stages, and may be four or more stages. When the number of packed columns is too large, the apparatus is too large. Therefore, it is generally preferred to connect the packed columns in about 3 to 6 stages.

在任一種情況下,只要進行原水之通水至第1段之填充塔達到飽和,其後,將最後段之填充塔內的粒子向系統外抽出,將第1段之填充塔內的粒子抽出並填充至該最後段之填充塔,將第2段以後之填充塔內的粒子抽出並分別填充至正前方的填充塔,從該最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始原水之通水即可。 In either case, as long as the raw water is passed through to the first stage, the packed column is saturated, and then the particles in the last stage of the packed column are taken out of the system, and the particles in the packed column of the first stage are extracted. Filling the packed column in the last stage, extracting the particles in the packed column after the second stage and filling them into the packed column directly in front, and filling the first filling tower with new calcium carbonate particles from the last stage. Start the water supply of the original water.

在裝置的運作開始時,對所有的填充塔填充新的碳酸鈣粒子時,縱使第1段之填充塔達到飽和,最後段之填充塔內的粒子,其氟化鈣含量仍非常低。從而,亦可僅在該初次運作時,未對最後段之填充塔的流入水添加水溶性鈣化合物及pH調整劑而進行通水,於第1段之填充塔達到飽和的時點,將各填充塔內的粒子抽出,將第1段之填充塔內的粒子填充至最後段之填充塔,將由第2段以後之填充塔內抽出的粒子分別填充至正前方的填充塔(在初次運作時,未回收含氟化鈣之粒子),從其後之原水之通水再開始時,亦即,從第2次的運作以後,如前述,對各填充塔連續地通入原水,同時對最後段之填充塔添加水溶性鈣化合物與pH調整劑。此時,經初次運作, 由最後段之填充塔所得之處理水的氟濃度大多未經充分降低,因此,在初次運作時,亦可不採取由最後段之填充塔所得的處理水而使其朝第1段之填充塔循環。 At the beginning of the operation of the apparatus, when all of the packed columns are filled with new calcium carbonate particles, even if the packed column of the first stage is saturated, the calcium fluoride content of the particles in the last stage of the packed column is still very low. Therefore, in the initial operation, the water-insoluble calcium compound and the pH adjuster may not be added to the inflow water of the last stage packed column to pass water, and when the packed column of the first stage is saturated, each filling is performed. The particles in the column are extracted, and the particles in the packed column of the first stage are filled into the packed column in the last stage, and the particles extracted from the packed column after the second stage are respectively filled into the packed column directly in front (in the first operation, The particles of the calcium fluoride-containing particles are not recovered, and the water is continuously passed from the subsequent raw water, that is, after the second operation, as described above, the raw water is continuously supplied to each of the packed towers, and the last stage is The packed column is added with a water-soluble calcium compound and a pH adjuster. At this point, after the initial operation, The fluorine concentration of the treated water obtained from the packed column in the last stage is not sufficiently reduced. Therefore, in the initial operation, the treated water obtained from the packed column in the last stage may not be taken to the packed column of the first stage. .

設定為處理對象的含氟水為電子產業製程廢水、氫氟酸製造廢水等含氟水,其氟(F)濃度不特別限制。本發明尤其適用於1,000~10,000mg-F/L左右的含高濃度氟的水之處理。含氟水亦可含有銨離子(NH4 +)或磷酸離子(PO4 3-)等氟離子以外的成分。 The fluorine-containing water to be treated is a fluorine-containing water such as an electronic industrial process wastewater or a hydrofluoric acid production wastewater, and the fluorine (F) concentration thereof is not particularly limited. The present invention is particularly suitable for the treatment of water containing a high concentration of fluorine of about 1,000 to 10,000 mg-F/L. The fluorine-containing water may contain a component other than a fluoride ion such as an ammonium ion (NH 4 + ) or a phosphate ion (PO 4 3- ).

本發明中,藉由對含高濃度氟的水,使用小粒徑之碳酸鈣粒子,以粒狀碳酸鈣之處理與析晶法實施處理,可去除氟至低濃度。流入作為析晶塔的最後段之填充塔的被處理水的氟濃度偏高時,由於有發生微細的粒子流出的問題之虞,因此,較佳以前段之填充塔進行處理至最後段之填充塔的流入水的氟濃度成為50mg/L以下,例如20~40mg/L。 In the present invention, by using a calcium carbonate particle having a small particle diameter for water containing a high concentration of fluorine, treatment with a granular calcium carbonate and a crystallizing method can remove fluorine to a low concentration. When the fluorine concentration of the water to be treated which flows into the packed column which is the last stage of the crystallization column is high, since there is a problem that fine particles flow out, it is preferable that the packed column in the previous stage is processed to the last stage of filling. The fluorine concentration of the inflow water of the column is 50 mg/L or less, for example, 20 to 40 mg/L.

[實施例] [Examples]

以下舉出實施例及比較例對本發明更具體地加以說明。 The present invention will be more specifically described below by way of examples and comparative examples.

〔實施例1〕 [Example 1]

作為碳酸鈣粒子係使用粒徑80μm以下、平均粒徑50μm者,以第1圖所示裝置以氟濃度2000~3000mg/L之含氟水作為原水進行處理。對各填充塔1~3填充碳酸鈣 粒子,原水係以SV=2hr-1通入。在任一填充塔中均以通水LV=20m/hr的方式設定循環水量。對最後段之第3填充塔3的流入水添加100~200mg/L的CaCl2,同時添加pH調整劑(NaOH)而調整成pH7~8。 When the particle diameter of 80 μm or less and the average particle diameter of 50 μm are used as the calcium carbonate particles, the apparatus shown in Fig. 1 is treated with fluorine water having a fluorine concentration of 2000 to 3000 mg/L as raw water. Each of the packed columns 1 to 3 was filled with calcium carbonate particles, and the raw water system was introduced at SV = 2 hr -1 . The circulating water amount was set in any of the packed columns in such a manner that the water LV = 20 m/hr. 100 to 200 mg/L of CaCl 2 was added to the inflow water of the third packed column 3 in the last stage, and a pH adjuster (NaOH) was added thereto to adjust the pH to 7 to 8.

持續進行原水之通水,以此,在第1填充塔1達飽和的時點停止原水之通水,其後,將各填充塔內的粒子抽出,將由第1填充塔1抽出的粒子填充至第3填充塔3,將由第3填充塔3抽出的粒子向系統外排出,將由第2填充塔2抽出的粒子填充至第1填充塔1,並對第2填充塔2填充新的碳酸鈣粒子。其後,以與第1次通水運作相同的條件再開始原水之通水。 When the first packed column 1 is saturated, the water flowing through the raw water is stopped, and the particles in each packed column are extracted, and the particles extracted by the first packed column 1 are filled to the first stage. 3 The packed column 3 discharges the particles extracted by the third packed column 3 to the outside of the system, fills the particles packed by the second packed column 2 into the first packed column 1 , and fills the second packed column 2 with new calcium carbonate particles. Thereafter, the water passing through the raw water is restarted under the same conditions as the first water running operation.

以上述條件重複進行原水之通水、與填充塔內的粒子的交換之結果,以第2次以後之通水運作所得之處理水的氟濃度為10~50mg/L,可穩定地獲得高水質的處理水。由第3填充塔3回收的粒子的CaF2純度為99%,可得高純度氟化鈣。 By repeating the exchange of the raw water and the particles in the packed column under the above conditions, the fluorine concentration of the treated water obtained by the second and subsequent water-passing operations is 10 to 50 mg/L, and the high water quality can be stably obtained. Treatment of water. The particles recovered from the third packed column 3 have a CaF 2 purity of 99%, and high purity calcium fluoride can be obtained.

〔比較例1〕 [Comparative Example 1]

除在實施例1,作為碳酸鈣粒子使用粒徑100~500μm、平均粒徑300μm者以外係以同樣的方式進行處理。第2次以後之通水運作的處理水的氟濃度為50~80mg/L,較實施例1者為高。由第3填充塔3回收的粒子的CaF2純度為97%,較實施例1為差。 In the same manner as in the first embodiment, the calcium carbonate particles were treated in the same manner except that the particle diameter was 100 to 500 μm and the average particle diameter was 300 μm. The fluorine concentration of the treated water for the second and subsequent water-passing operations was 50 to 80 mg/L, which was higher than that of the first embodiment. The particles recovered from the third packed column 3 had a CaF 2 purity of 97%, which was inferior to that of Example 1.

〔比較例2〕 [Comparative Example 2]

除使用與實施例1所使用者相同粒徑的碳酸鈣粒子,並未對第3填充塔3的流入水添加CaCl2與pH調整劑以外,係以與實施例1者同一條件進行原水之通水,在第1填充塔1達飽和的時點停止原水之通水。 The raw water was passed through the same conditions as in Example 1 except that the calcium carbonate particles having the same particle diameter as those of the user of Example 1 were used, and CaCl 2 and the pH adjuster were not added to the inflow water of the third packed column 3 . The water stops the water passing through the raw water when the first packed column 1 reaches saturation.

其後,重複:由各填充塔1~3中抽出粒子,將由第2填充塔2抽出的粒子填充至第1填充塔1,將由第3填充塔3抽出的粒子填充至第2填充塔2,對第3填充塔3填充新的碳酸鈣粒子,再度以同一條件再開始原水之通水的運作。 Thereafter, the particles are extracted from the respective packed columns 1 to 3, the particles extracted by the second packed column 2 are filled into the first packed column 1, and the particles extracted by the third packed column 3 are filled into the second packed column 2, The third packed column 3 is filled with new calcium carbonate particles, and the operation of the raw water is again started under the same conditions.

本比較例係相當於習知方法的轉塔方式之處理。 This comparative example is equivalent to the processing of the turret mode of the conventional method.

如此進行運作時的處理水的氟濃度為100~300mg/L,無法充分降低氟濃度。由第1填充塔1回收粒子的CaF2純度為97%,較實施例1為差。 The fluorine concentration of the treated water at the time of operation is 100 to 300 mg/L, and the fluorine concentration cannot be sufficiently lowered. The CaF 2 purity of the particles recovered from the first packed column 1 was 97%, which was inferior to that of Example 1.

已對本發明利用特定之形態詳細加以說明,惟本領域具有通常知識者應理解,在不悖離本發明之意圖與範圍的情況下可實施種種變更。 The present invention has been described in detail with reference to the specific embodiments of the invention.

本申請案係基於2014年5月20日所申請之日本專利申請案2014-104396,援用其全體以供引用。 The present application is based on Japanese Patent Application No. 2014-104396, filed on May 20, 2014, which is incorporated herein by reference.

Claims (4)

一種含氟水之處理方法,其特徵為具有:第1氟去除步驟,與第2氟去除步驟;第1氟去除步驟:使含氟水與碳酸鈣粒子接觸,藉由該含氟水中之氟與碳酸鈣的反應而將該氟作為氟化鈣去除,並同時獲得包括含氟化鈣之粒子的處理水,該含氟化鈣之粒子係該碳酸鈣粒子中之碳酸鈣的至少一部分經該氟化鈣取代者;第2氟去除步驟:對該第1氟去除步驟的處理水添加水溶性鈣化合物並使已添加水溶性鈣化合物之處理水與含氟種晶接觸,而將殘留的氟藉由析晶去除;其中,作為前述碳酸鈣粒子,使用粒徑0.1mm以下的碳酸鈣粒子,同時,將前述第1氟去除步驟中所得之前述含氟化鈣之粒子,使用作為前述第2氟去除步驟中的前述含氟種晶;並且係將前述含氟水依序通水至以複數段串聯設置的前述碳酸鈣粒子的填充塔,與最後段之前述含氟種晶的填充塔,對該最後段之填充塔的流入水添加前述水溶性鈣化合物,並將該最後段之填充塔的流出水作為處理水取出,其中,進行前述含氟水之通水直到第1段之填充塔的流入水與流出水的氟濃度或pH成為略為相等後,停止通水,將最後段之填充塔內的氟化鈣粒子向系統外抽出, 將第1段之填充塔內的含氟化鈣之粒子抽出後填充至該最後段之填充塔,將第2段以後之填充塔內的混合粒子抽出後分別填充至正前方的填充塔,該混合粒子係碳酸鈣粒子與含氟化鈣之粒子的混合粒子,從該最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始前述含氟水之通水。 A method for treating fluorine-containing water, comprising: a first fluorine removal step and a second fluorine removal step; and a first fluorine removal step: contacting the fluorine-containing water with the calcium carbonate particles, and the fluorine in the fluorine-containing water Removing the fluorine as calcium fluoride with calcium carbonate, and simultaneously obtaining treated water comprising particles of calcium fluoride, the calcium fluoride particles being at least a portion of the calcium carbonate in the calcium carbonate particles Calcium fluoride substitute; second fluorine removal step: adding a water-soluble calcium compound to the treated water of the first fluorine removal step, and contacting the treated water to which the water-soluble calcium compound has been added with the fluorine-containing seed crystal, and leaving the residual fluorine The calcium carbonate particles having a particle diameter of 0.1 mm or less are used as the calcium carbonate particles, and the calcium fluoride-containing particles obtained in the first fluorine removal step are used as the second a fluorine-containing seed crystal in the fluorine removal step; and the water-containing water is sequentially passed to the packed column of the calcium carbonate particles arranged in series in a plurality of stages, and the packed column of the fluorine-containing seed crystal in the last stage, The last paragraph The influent water of the packed column is added with the water-soluble calcium compound, and the effluent water of the last stage packed column is taken out as treated water, wherein the water of the fluorine-containing water is passed until the inflow water and the outflow of the packed column of the first stage After the fluorine concentration or pH of the water is slightly equal, the water is stopped, and the calcium fluoride particles in the packed column in the last stage are taken out of the system. The calcium fluoride-containing particles in the packed column of the first stage are taken out and filled into the packed column of the last stage, and the mixed particles in the packed column after the second stage are extracted and filled into the packed column directly in front of the column. The mixed particles of the particles of the calcium carbonate particles and the particles of the calcium fluoride-containing particles are filled with the new calcium carbonate particles from the last stage, and then the water of the fluorine-containing water is started. 一種含氟水之處理裝置,其特徵為具備下述手段:具備填充有碳酸鈣粒子的填充塔,藉由含氟水中之氟與碳酸鈣的反應而將該含氟水中之氟作為氟化鈣去除,同時將該碳酸鈣粒子中之碳酸鈣的至少一部分取代為氟化鈣而獲得含氟化鈣之粒子的第1氟去除手段;具備填充有含氟種晶的填充塔,將含氟水中的氟進行析晶去除的第2氟去除手段;對該第1氟去除手段通入含氟水的手段;對該第1氟去除手段的流出水添加水溶性鈣化合物的手段;及,將添加有該水溶性鈣化合物之該第1氟去除手段的流出水通入至該第2氟去除手段之手段;其中,前述第1氟去除手段的前述碳酸鈣粒子為粒徑0.1mm以下的碳酸鈣粒子,前述第2氟去除手段的前述含氟種晶為前述第1氟去除手段中所得之前述含氟化鈣之粒子; 並且,前述第1氟去除手段係具有以複數段串聯設置的碳酸鈣粒子的填充塔,前述第2氟去除手段的前述填充塔係在該第1氟去除手段之複數個填充塔群的後段設置作為最後段之填充塔,並具備下述手段:將該最後段之填充塔內的氟化鈣粒子向系統外抽出的手段,與將第1段之填充塔內的含氟化鈣之粒子抽出並填充至該最後段之填充塔的手段;將第2段以後之填充塔內的混合粒子抽出並分別填充至正前方的填充塔的手段,該混合粒子係碳酸鈣粒子與含氟化鈣之粒子的混合粒子;從最後段起對前1個填充塔填充新的碳酸鈣粒子的手段;對該最後段之填充塔的流入水添加前述水溶性鈣化合物的手段;及,將該最後段之填充塔的流出水作為處理水取出的手段。 A fluorine-containing water treatment apparatus comprising: a packed tower filled with calcium carbonate particles, wherein fluorine in the fluorine-containing water is used as calcium fluoride by reaction of fluorine and calcium carbonate in fluorine-containing water a first fluorine removing means for removing particles of calcium fluoride by replacing at least a part of calcium carbonate in the calcium carbonate particles with calcium fluoride; and comprising a packed column filled with a fluorine-containing seed crystal, and containing fluorine-containing water a second fluorine removing means for removing crystallization by fluorine; means for introducing fluorine-containing water to the first fluorine removing means; means for adding a water-soluble calcium compound to the effluent water of the first fluorine removing means; and adding The means for the effluent water of the first fluorine removal means of the water-soluble calcium compound to be introduced into the second fluorine removal means, wherein the calcium carbonate particles of the first fluorine removal means are calcium carbonate having a particle diameter of 0.1 mm or less The particles of the fluorine-containing seed crystal of the second fluorine removing means are particles of the calcium fluoride-containing particles obtained by the first fluorine removing means; Further, the first fluorine removing means includes a packed column of calcium carbonate particles arranged in series in a plurality of stages, and the packed column of the second fluorine removing means is disposed in a subsequent stage of the plurality of packed column groups of the first fluorine removing means. As a packed column of the last stage, the means for extracting the calcium fluoride particles in the packed column of the last stage from the outside of the system and extracting the particles of the calcium fluoride containing in the packed column of the first stage And means for filling the packed column in the last stage; means for extracting the mixed particles in the packed column after the second stage and filling them into the packed column directly in front, the mixed particles being calcium carbonate particles and calcium fluoride containing a mixed particle of particles; a means for filling a new calcium carbonate particle with the former packed column from the last stage; a means for adding the water-soluble calcium compound to the inflowing water of the packed column of the last stage; and, the last paragraph The effluent water of the packed tower serves as a means of treating the water to be taken out. 一種含氟水之處理方法,其係使含氟水依序通入至以複數段串聯設置的碳酸鈣粒子的填充塔,及進一步於其後段作為最後段之填充塔所設置的含氟種晶的填充塔而進行處理,並對該最後段之填充塔的流入水添加水溶性鈣化合物後予以通入至該最後段之填充塔的方法,其特徵為:使前述含氟水進行通水直到第1段之填充塔的流入水與流出水的氟濃度或pH成為略為相等後,停止通水,其 後,將該最後段之填充塔內的氟化鈣粒子向系統外抽出,將第1段之填充塔內的含氟化鈣之粒子抽出並填充至該最後段之填充塔,將第2段以後之填充塔內的混合粒子抽出並分別填充至正前方的填充塔,該混合粒子係碳酸鈣粒子與含氟化鈣之粒子的混合粒子,從該最後段起對前1個填充塔填充新的碳酸鈣粒子後,再開始前述含氟水之通水。 A method for treating fluorine-containing water, wherein a fluorine-containing water is sequentially introduced into a packed column of calcium carbonate particles arranged in series in a plurality of stages, and a fluorine-containing seed crystal further provided in a packed column of the last stage as a final stage a method of processing the packed column and adding a water-soluble calcium compound to the inflowing water of the packed column of the last stage, and then introducing the water-soluble calcium compound to the packed column of the last stage, characterized in that the fluorine-containing water is passed through water until When the influent water of the packed column of the first stage and the fluorine concentration or pH of the effluent water become slightly equal, the water is stopped, and Thereafter, the calcium fluoride particles in the packed column of the last stage are taken out of the system, and the calcium fluoride-containing particles in the packed column of the first stage are extracted and filled into the packed column of the last stage, and the second stage is The mixed particles in the subsequent packed column are taken out and filled to the packed column directly in front, and the mixed particles are mixed particles of calcium carbonate particles and calcium fluoride-containing particles, and the first packed column is filled with new from the last stage. After the calcium carbonate particles, the water of the fluorine-containing water is started again. 一種含氟水之處理裝置,其特徵為具備:以複數段串聯設置的碳酸鈣粒子的填充塔,與進一步在其後段作為最後段之填充塔所設置的含氟種晶的填充塔;以及,對該以複數段串聯設置的碳酸鈣粒子的填充塔與最後段之含氟種晶的填充塔依序通入含氟水的手段;將該最後段之填充塔內的氟化鈣粒子向系統外抽出的手段;將第1段之填充塔內的含氟化鈣之粒子抽出並填充至該最後段之填充塔的手段;將第2段以後之填充塔內的混合粒子抽出並分別填充至正前方的填充塔的手段,該混合粒子係碳酸鈣粒子與含氟化鈣之粒子的混合粒子;從最後段起對前1個填充塔填充新的碳酸鈣粒子的手 段;對該最後段之填充塔的流入水添加水溶性鈣化合物的手段;及,將該最後段之填充塔的流出水作為處理水取出的手段。 A fluorine-containing water treatment apparatus comprising: a packed column of calcium carbonate particles arranged in series in a plurality of stages; and a packed column of fluorine-containing seed crystals provided as a packed column of the last stage in a subsequent stage; a method of sequentially introducing fluorine-containing water into the packed column of the calcium carbonate particles arranged in series in the plurality of stages and the packed column of the fluorine-containing seed crystal in the last stage; and the calcium fluoride particles in the packed column of the last stage are directed to the system a means for extracting the mixture; extracting and filling the particles of the calcium fluoride-containing particles in the packed column of the first stage into the packed column of the last stage; and extracting the mixed particles in the packed column after the second stage and filling them separately to a means for filling the column in front of the mixture, the mixed particles are mixed particles of calcium carbonate particles and particles of calcium fluoride; and the hand of filling the first packed column with new calcium carbonate particles from the last stage a means for adding a water-soluble calcium compound to the inflowing water of the packed column of the last stage; and, the effluent water of the packed column of the last stage is used as a means for taking out the treated water.
TW104116062A 2014-05-20 2015-05-20 Fluorine-containing water treatment method and treatment device TWI642631B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-104396 2014-05-20
JP2014104396A JP6299421B2 (en) 2014-05-20 2014-05-20 Method and apparatus for treating fluorine-containing water

Publications (2)

Publication Number Publication Date
TW201609566A TW201609566A (en) 2016-03-16
TWI642631B true TWI642631B (en) 2018-12-01

Family

ID=54554030

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104116062A TWI642631B (en) 2014-05-20 2015-05-20 Fluorine-containing water treatment method and treatment device

Country Status (4)

Country Link
JP (1) JP6299421B2 (en)
SG (1) SG11201609157WA (en)
TW (1) TWI642631B (en)
WO (1) WO2015178361A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003117565A (en) * 2001-10-16 2003-04-22 Kurita Water Ind Ltd Method for treating fluorine-containing water and equipment therefor
TW201130745A (en) * 2009-10-22 2011-09-16 Kurita Water Ind Ltd Method and apparatus for treating fluorine-containing water

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147694A (en) * 1983-02-15 1984-08-24 Mitsubishi Heavy Ind Ltd Treatment of waste water from stack gas desulfurization
JP2000070962A (en) * 1998-08-27 2000-03-07 Japan Organo Co Ltd Treatment of waste water containing fluorine
JP4766457B2 (en) * 2008-03-13 2011-09-07 株式会社日立プラントテクノロジー Method and apparatus for treating fluorine-containing wastewater
JP2013188673A (en) * 2012-03-13 2013-09-26 Toshiba Corp Fluorine recovery device, fluorine recovery system, and fluorine recovery method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003117565A (en) * 2001-10-16 2003-04-22 Kurita Water Ind Ltd Method for treating fluorine-containing water and equipment therefor
TW201130745A (en) * 2009-10-22 2011-09-16 Kurita Water Ind Ltd Method and apparatus for treating fluorine-containing water

Also Published As

Publication number Publication date
JP6299421B2 (en) 2018-03-28
JP2015217368A (en) 2015-12-07
SG11201609157WA (en) 2016-12-29
WO2015178361A1 (en) 2015-11-26
TW201609566A (en) 2016-03-16

Similar Documents

Publication Publication Date Title
TWI591022B (en) Fluorine-containing water treatment method and treatment device
JP2009260020A (en) Cleaning water for electronic material, method of cleaning electronic material, and system for supplying water containing dissolved gas
JP5441714B2 (en) Pure water production method and apparatus, ozone water production method and apparatus, and cleaning method and apparatus
TWI381999B (en) Silica removing device and silica removing method
JP2001149950A (en) Water treating method and water treating device
TWI642631B (en) Fluorine-containing water treatment method and treatment device
WO2016063581A1 (en) Treatment method and treatment apparatus for ammonia-containing wastewater
US20060201882A1 (en) Method and system for treating wastewater containing hydrogen peroxide
JP3238745B2 (en) Method of treating ammonium fluoride-containing water
JP2005144209A (en) Fluorine-containing waste water treatment method
JP4826777B2 (en) Pure water production method
JP3555732B2 (en) Pure water production method
JP6968682B2 (en) Manufacturing method of permeated water, water treatment device and operation method of the water treatment device
JPH0975925A (en) Treatment of flue gas desulfurization waste water
JP4169996B2 (en) Method and apparatus for treating fluorine-containing wastewater
JP3266309B2 (en) Treatment method for acidic fluorine-containing water
US20140326674A1 (en) Zero Liquid Discharge Method for High Silica Solutions
JP2003071470A (en) Method and apparatus for treating fluorine-containing water
JPH10151456A (en) Wastewater treatment method
JPH10202249A (en) Deionizing method
JP2828020B2 (en) Exhaust gas treatment method
TWI568682B (en) Treatment of fluorine - containing water
JP2002143639A (en) Method for treating ammonia gas
JP3653921B2 (en) Fluorine-containing water treatment method
JP3429018B2 (en) Treatment of acidic fluorine-containing water