TWI627503B - Active energy ray-curable resin composition, spacer for display element and / or color filter protective film using the same - Google Patents
Active energy ray-curable resin composition, spacer for display element and / or color filter protective film using the same Download PDFInfo
- Publication number
- TWI627503B TWI627503B TW103141305A TW103141305A TWI627503B TW I627503 B TWI627503 B TW I627503B TW 103141305 A TW103141305 A TW 103141305A TW 103141305 A TW103141305 A TW 103141305A TW I627503 B TWI627503 B TW I627503B
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- Taiwan
- Prior art keywords
- compound
- meth
- acid
- acrylate
- resin composition
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 38
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 38
- 230000001681 protective effect Effects 0.000 title claims abstract description 24
- 150000001875 compounds Chemical class 0.000 claims abstract description 129
- 239000002253 acid Substances 0.000 claims abstract description 68
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract description 36
- 239000000376 reactant Substances 0.000 claims abstract description 35
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 24
- 239000003822 epoxy resin Substances 0.000 claims abstract description 17
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 17
- 150000007519 polyprotic acids Polymers 0.000 claims abstract description 17
- 239000003960 organic solvent Substances 0.000 claims abstract description 16
- 239000003999 initiator Substances 0.000 claims abstract description 12
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 28
- 125000005843 halogen group Chemical group 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 229920000573 polyethylene Polymers 0.000 claims 1
- 125000003700 epoxy group Chemical group 0.000 abstract description 18
- 229920000642 polymer Polymers 0.000 abstract description 11
- -1 primary amine compound Chemical class 0.000 description 87
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 75
- 239000000203 mixture Substances 0.000 description 41
- 239000004593 Epoxy Substances 0.000 description 38
- 239000011248 coating agent Substances 0.000 description 32
- 238000000576 coating method Methods 0.000 description 32
- 239000002904 solvent Substances 0.000 description 32
- 239000000178 monomer Substances 0.000 description 29
- 238000006243 chemical reaction Methods 0.000 description 26
- 229920005989 resin Polymers 0.000 description 25
- 239000011347 resin Substances 0.000 description 25
- 239000007787 solid Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 20
- 239000000758 substrate Substances 0.000 description 18
- 239000000243 solution Substances 0.000 description 17
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 15
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 15
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 14
- 239000003054 catalyst Substances 0.000 description 13
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 13
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 10
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 10
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 9
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 9
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 9
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000006116 polymerization reaction Methods 0.000 description 9
- 238000005886 esterification reaction Methods 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 7
- 238000007259 addition reaction Methods 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 239000003112 inhibitor Substances 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 7
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 6
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 6
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 6
- 229930003836 cresol Natural products 0.000 description 6
- 238000011161 development Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 235000013772 propylene glycol Nutrition 0.000 description 6
- 150000008064 anhydrides Chemical class 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000004843 novolac epoxy resin Substances 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical class O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 4
- 239000012948 isocyanate Substances 0.000 description 4
- 150000002513 isocyanates Chemical class 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 150000002989 phenols Chemical class 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 4
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 3
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 3
- ALVZNPYWJMLXKV-UHFFFAOYSA-N 1,9-Nonanediol Chemical compound OCCCCCCCCCO ALVZNPYWJMLXKV-UHFFFAOYSA-N 0.000 description 3
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000006181 4-methyl benzyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])C([H])([H])* 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229930016911 cinnamic acid Natural products 0.000 description 3
- 235000013985 cinnamic acid Nutrition 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000003759 ester based solvent Substances 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000004210 ether based solvent Substances 0.000 description 3
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 239000005453 ketone based solvent Substances 0.000 description 3
- PSGAAPLEWMOORI-PEINSRQWSA-N medroxyprogesterone acetate Chemical compound C([C@@]12C)CC(=O)C=C1[C@@H](C)C[C@@H]1[C@@H]2CC[C@]2(C)[C@@](OC(C)=O)(C(C)=O)CC[C@H]21 PSGAAPLEWMOORI-PEINSRQWSA-N 0.000 description 3
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 239000005056 polyisocyanate Substances 0.000 description 3
- 229920001228 polyisocyanate Polymers 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000007870 radical polymerization initiator Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 125000000542 sulfonic acid group Chemical group 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- PMBXCGGQNSVESQ-UHFFFAOYSA-N 1-Hexanethiol Chemical compound CCCCCCS PMBXCGGQNSVESQ-UHFFFAOYSA-N 0.000 description 2
- JVYDLYGCSIHCMR-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butanoic acid Chemical compound CCC(CO)(CO)C(O)=O JVYDLYGCSIHCMR-UHFFFAOYSA-N 0.000 description 2
- OJRJDENLRJHEJO-UHFFFAOYSA-N 2,4-diethylpentane-1,5-diol Chemical compound CCC(CO)CC(CC)CO OJRJDENLRJHEJO-UHFFFAOYSA-N 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- MHDULSOPQSUKBQ-UHFFFAOYSA-N 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MHDULSOPQSUKBQ-UHFFFAOYSA-N 0.000 description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 2
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 2
- HDDQXUDCEIMISH-UHFFFAOYSA-N 2-[[4-[1,2,2-tris[4-(oxiran-2-ylmethoxy)phenyl]ethyl]phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=C1)=CC=C1C(C=1C=CC(OCC2OC2)=CC=1)C(C=1C=CC(OCC2OC2)=CC=1)C(C=C1)=CC=C1OCC1CO1 HDDQXUDCEIMISH-UHFFFAOYSA-N 0.000 description 2
- DORYUYZNWCZQOL-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-phenylphenyl)butan-1-one Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 DORYUYZNWCZQOL-UHFFFAOYSA-N 0.000 description 2
- VUIWJRYTWUGOOF-UHFFFAOYSA-N 2-ethenoxyethanol Chemical compound OCCOC=C VUIWJRYTWUGOOF-UHFFFAOYSA-N 0.000 description 2
- JESXATFQYMPTNL-UHFFFAOYSA-N 2-ethenylphenol Chemical compound OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- 125000006179 2-methyl benzyl group Chemical group [H]C1=C([H])C(=C(C([H])=C1[H])C([H])([H])*)C([H])([H])[H] 0.000 description 2
- SDQROPCSKIYYAV-UHFFFAOYSA-N 2-methyloctane-1,8-diol Chemical compound OCC(C)CCCCCCO SDQROPCSKIYYAV-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- SXFJDZNJHVPHPH-UHFFFAOYSA-N 3-methylpentane-1,5-diol Chemical compound OCCC(C)CCO SXFJDZNJHVPHPH-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
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- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
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- 239000004793 Polystyrene Substances 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- YIMQCDZDWXUDCA-UHFFFAOYSA-N [4-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCC(CO)CC1 YIMQCDZDWXUDCA-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
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- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
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- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- IZRVEUZYBVGCFC-UHFFFAOYSA-N ethyl 2-hydroxyisovalerate Chemical compound CCOC(=O)C(O)C(C)C IZRVEUZYBVGCFC-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- LJUJMKJGPIXNAK-UHFFFAOYSA-N ethyl 4-[2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-bis(4-ethoxycarbonylphenyl)imidazol-2-yl]-5-(4-ethoxycarbonylphenyl)imidazol-4-yl]benzoate Chemical compound C1=CC(C(=O)OCC)=CC=C1C1=NC(N2C(=C(N=C2C=2C(=CC=CC=2)Cl)C=2C=CC(=CC=2)C(=O)OCC)C=2C=CC(=CC=2)C(=O)OCC)(C=2C(=CC=CC=2)Cl)N=C1C1=CC=C(C(=O)OCC)C=C1 LJUJMKJGPIXNAK-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Substances O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N glutaric acid Chemical compound OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-N heptanoic acid Chemical compound CCCCCCC(O)=O MNWFXJYAOYHMED-UHFFFAOYSA-N 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
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- 230000001678 irradiating effect Effects 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
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- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
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- 230000008018 melting Effects 0.000 description 1
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- 229940057867 methyl lactate Drugs 0.000 description 1
- KNRCVAANTQNTPT-UHFFFAOYSA-N methyl-5-norbornene-2,3-dicarboxylic anhydride Chemical compound O=C1OC(=O)C2C1C1(C)C=CC2C1 KNRCVAANTQNTPT-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- ZZSKMNCIAKKVRB-UHFFFAOYSA-N morpholin-4-yl-(2-nitrophenyl)methanone Chemical group [O-][N+](=O)C1=CC=CC=C1C(=O)N1CCOCC1 ZZSKMNCIAKKVRB-UHFFFAOYSA-N 0.000 description 1
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- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 229940017144 n-butyl lactate Drugs 0.000 description 1
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- LABVNFAVENLDHB-UHFFFAOYSA-N o-methyl methylsulfanylmethanethioate Chemical compound COC(=S)SC LABVNFAVENLDHB-UHFFFAOYSA-N 0.000 description 1
- HSNHLHNSJCYPNU-UHFFFAOYSA-N o-propan-2-yl propan-2-ylsulfanylmethanethioate Chemical compound CC(C)OC(=S)SC(C)C HSNHLHNSJCYPNU-UHFFFAOYSA-N 0.000 description 1
- OTLDLKLSNZMTTA-UHFFFAOYSA-N octahydro-1h-4,7-methanoindene-1,5-diyldimethanol Chemical compound C1C2C3C(CO)CCC3C1C(CO)C2 OTLDLKLSNZMTTA-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- GXOHBWLPQHTYPF-UHFFFAOYSA-N pentyl 2-hydroxypropanoate Chemical compound CCCCCOC(=O)C(C)O GXOHBWLPQHTYPF-UHFFFAOYSA-N 0.000 description 1
- XZUHEZIGAZNGJR-UHFFFAOYSA-N phenol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC1=CC=CC=C1.OC1=CC=CC=C1 XZUHEZIGAZNGJR-UHFFFAOYSA-N 0.000 description 1
- CCDXIADKBDSBJU-UHFFFAOYSA-N phenylmethanetriol Chemical compound OC(O)(O)C1=CC=CC=C1 CCDXIADKBDSBJU-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- UIIIBRHUICCMAI-UHFFFAOYSA-N prop-2-ene-1-sulfonic acid Chemical compound OS(=O)(=O)CC=C UIIIBRHUICCMAI-UHFFFAOYSA-N 0.000 description 1
- AXPUQAAUHKSVKR-UHFFFAOYSA-N prop-2-enimidamide Chemical class NC(=N)C=C AXPUQAAUHKSVKR-UHFFFAOYSA-N 0.000 description 1
- KIWATKANDHUUOB-UHFFFAOYSA-N propan-2-yl 2-hydroxypropanoate Chemical compound CC(C)OC(=O)C(C)O KIWATKANDHUUOB-UHFFFAOYSA-N 0.000 description 1
- FKRCODPIKNYEAC-UHFFFAOYSA-N propionic acid ethyl ester Natural products CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical class CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- IYLGZMTXKJYONK-UHFFFAOYSA-N ruwenine Natural products O1C(=O)C(CC)(O)CC(C)C(C)(OC(C)=O)C(=O)OCC2=CCN3C2C1CC3 IYLGZMTXKJYONK-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-L succinate(2-) Chemical compound [O-]C(=O)CCC([O-])=O KDYFGRWQOYBRFD-UHFFFAOYSA-L 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- ADXGNEYLLLSOAR-UHFFFAOYSA-N tasosartan Chemical compound C12=NC(C)=NC(C)=C2CCC(=O)N1CC(C=C1)=CC=C1C1=CC=CC=C1C=1N=NNN=1 ADXGNEYLLLSOAR-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- GZBUMTPCIKCWFW-UHFFFAOYSA-N triethylcholine Chemical compound CC[N+](CC)(CC)CCO GZBUMTPCIKCWFW-UHFFFAOYSA-N 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000012991 xanthate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133519—Overcoatings
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13398—Spacer materials; Spacer properties
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Liquid Crystal (AREA)
- Epoxy Resins (AREA)
Abstract
本發明提供一種可形成耐熱透明性、平坦性、柔軟性、強韌性優異之顯示元件用間隔物及彩色濾光片保護膜之活性能量線硬化型樹脂組成物、以及顯示元件用間隔物及彩色濾光片保護膜。本發明之樹脂組成物含有反應性多羧酸化合物(A)、該化合物(A)以外之反應性化合物(B)、光聚合起始劑(C)及有機溶劑(D),該化合物(A)係進而使多元酸酐(d)對反應物進行反應而獲得者,上述反應物至少係下述通式(1)所表示之環氧樹脂(a)、及化合物(b)的反應物,上述化合物(b)係一分子中具有1個以上可進行聚合之乙烯性不飽和基及1個以上羧基者。 The present invention provides an active energy ray-curable resin composition capable of forming spacers for display elements and color filter protective films that are excellent in heat resistance, transparency, flatness, flexibility, and toughness, and spacers for display elements and color. Filter protective film. The resin composition of the present invention contains a reactive polycarboxylic acid compound (A), a reactive compound (B) other than the compound (A), a photopolymerization initiator (C), and an organic solvent (D), and the compound (A ) Is obtained by further reacting a polybasic acid anhydride (d) with a reactant, which is at least a reactant of the epoxy resin (a) and the compound (b) represented by the following general formula (1), and The compound (b) is a polymer having one or more ethylenically unsaturated groups and one or more carboxyl groups that can be polymerized in one molecule.
(式中,R1~R8表示氫原子等,G表示環氧丙基) (Wherein R 1 to R 8 represent a hydrogen atom, etc., and G represents an epoxy group)
Description
本發明係關於一種活性能量線硬化型樹脂組成物、顯示元件用間隔物及/或彩色濾光片保護膜。 The present invention relates to an active energy ray-curable resin composition, a spacer for a display element, and / or a color filter protective film.
顯示器件用材料一直使用由黏合劑聚合物、光聚合性單體及光聚合起始劑等構成之樹脂組成物。近年來,顯示器件用材料作為「LCD、EL、PDP、FED(SED)、背面投影顯示器、電子紙、或數位相機等所利用之材料,尤其是顯示元件、顯示元件周邊材料」而迅速普及,例如彩色液晶顯示裝置(LCD)。通常,彩色液晶顯示裝置具有如下構造:使彩色濾光片與TFT基板等電極基板相對向並設置1~10μm左右之間隙部,向該間隙部內填充液晶化合物,並對其周圍以密封材進行密封。 As a material for a display device, a resin composition including a binder polymer, a photopolymerizable monomer, a photopolymerization initiator, and the like has been used. In recent years, materials for display devices have rapidly spread as "materials used in LCDs, ELs, PDPs, FEDs (SEDs), rear projection displays, electronic papers, or digital cameras, especially display elements and materials around display elements." For example, a color liquid crystal display (LCD). Generally, a color liquid crystal display device has a structure in which a color filter is opposed to an electrode substrate such as a TFT substrate, and a gap portion of about 1 to 10 μm is provided. A liquid crystal compound is filled in the gap portion, and the periphery is sealed with a sealing material. .
彩色濾光片具有如下構造:於透明基板上,自近透明基板一側依序積層有為了對像素間之邊界部遮光而形成為規定圖案的黑矩陣層、為了形成各像素而通常使紅(R)、綠(G)、藍(B)按規定順序排列而成的著色層、保護膜、及透明電極膜。又,於彩色濾光片及與其對向之電極基板之內面側設有定向膜。進而,於間隙部,為了將彩色濾光片與電極基 板間之單元間隙維持一定且均勻,而分散有作為間隔物之具有一定粒徑之球珠、或形成有具有與單元間隙對應之高度之柱狀或條狀之間隔物。進而,藉由對位於著色為各色之像素各自背後的液晶層之透光率進行控制而獲得彩色圖像。如上所述之彩色濾光片不僅用於彩色液晶顯示裝置,亦用於其他顯示器件、如EL、背面投影顯示器等。 The color filter has a structure in which a black matrix layer formed in a predetermined pattern in order to shield a boundary portion between pixels is sequentially laminated on a transparent substrate from a near transparent substrate side, and red ( R), green (G), blue (B), a colored layer, a protective film, and a transparent electrode film which are arranged in a predetermined order. An alignment film is provided on the inner surface side of the color filter and the electrode substrate facing the color filter. Furthermore, in the gap portion, in order to connect the color filter and the electrode base The cell gaps between the plates are kept constant and uniform, and ball beads having a certain particle diameter are dispersed as spacers, or columnar or strip-shaped spacers having a height corresponding to the cell gap are formed. Furthermore, a color image is obtained by controlling the light transmittance of the liquid crystal layer located behind each of the pixels colored in each color. The color filters described above are used not only in color liquid crystal display devices, but also in other display devices such as EL and rear projection displays.
上述之著色層、保護膜及間隔物可使用樹脂而形成。著色層需要對應各色之像素而形成為規定圖案。關於保護膜,考慮到密封部之密接性或密閉性,較佳為僅可覆蓋透明基板上形成有著色層之區域者。又,間隔物需要精確地設於黑矩陣層形成區域內即非顯示區域。因此,開始使用可利用光罩容易地限定欲使之硬化之區域的硬化性樹脂來形成著色層、保護膜及柱狀間隔物。 The coloring layer, the protective film, and the spacer may be formed using a resin. The colored layer needs to be formed into a predetermined pattern corresponding to pixels of each color. Regarding the protective film, in consideration of the sealability or airtightness of the sealing portion, it is preferable to cover only the area where the colored layer is formed on the transparent substrate. In addition, the spacer needs to be accurately positioned in the black matrix layer formation region, that is, the non-display region. Therefore, a coloring layer, a protective film, and a columnar spacer are formed using a curable resin that can be easily restricted by a photomask to a region to be cured.
又,若為了形成著色層、保護膜或柱狀間隔物而對硬化性樹脂之塗敷面進行曝光後使用有機溶劑進行顯影,則於操作及廢液處理方面較繁雜,欠缺經濟性、穩定性,因此開發出對硬化性樹脂導入酸性基而可於曝光後利用鹼性水溶液進行顯影的硬化性樹脂。該等用途中於形成定向膜、形成透明電極時施加較高溫度(200-260℃或以上),因此尋求耐熱性非常高者,進而尤其是彩色光阻、間隔物尋求耐熱著色性優異者。 In addition, if the coating surface of the curable resin is exposed to develop using an organic solvent in order to form a colored layer, a protective film, or a columnar spacer, it is complicated in terms of handling and waste liquid treatment, and lacks economy and stability. Therefore, a curable resin has been developed in which an acidic group is introduced into the curable resin and development can be performed using an alkaline aqueous solution after exposure. In these applications, a high temperature (200-260 ° C. or higher) is applied when forming an alignment film and forming a transparent electrode. Therefore, those who have very high heat resistance are sought, and especially those with excellent color heat resistance and color photoresist and spacers.
專利文獻1中,作為光阻間隔物用及彩色濾光片用感光性樹脂組成物之聚合物成分,使用將甲酚酚醛清漆環氧樹脂之酸改質環氧丙烯酸酯利用一級胺基化合物加以中和而獲得之感光性樹脂。然而,此種含有一級胺基化合物之鹽或水之組成物於塗佈性及平坦性方面較差,對狹縫式塗佈機等裝置之適配性不充分。 In Patent Document 1, as a polymer component of a photosensitive resin composition for a photoresist spacer and a color filter, an acid-modified epoxy acrylate of a cresol novolac epoxy resin is used with a primary amine compound. A photosensitive resin obtained by neutralization. However, such a composition containing a salt or water of a primary amine compound is inferior in coatability and flatness, and has insufficient adaptability to a device such as a slit coater.
又,專利文獻2中,作為光阻間隔物用感光性樹脂組成物之聚合物成分,使用甲酚酚醛清漆環氧樹脂或苯酚酚醛清漆環氧樹脂之酸改質環氧丙烯酸酯。然而,存在放射線感度及顯影性差而並非令人充分滿意之水準的課題。 In Patent Document 2, as a polymer component of the photosensitive resin composition for a photoresist spacer, a cresol novolac epoxy resin or an acid-modified epoxy acrylate of a phenol novolac epoxy resin is used. However, there is a problem that the radiation sensitivity and the developability are not satisfactory and are not satisfactory.
專利文獻3中,作為彩色濾光片之保護膜或可撓性印刷配線板用光阻油墨組成物之聚合物成分,使用藉由如下方式所獲得之活性能量線硬化性樹脂:對甲酚酚醛清漆環氧樹脂加成丙烯酸、二羥甲基丙酸而獲得反應物,對該反應物進行己內酯改質,進而進行四氫鄰苯二甲酸酐改質。組成物之主成分即聚合物成分於顯影性、可撓性方面優異,但存在作為光阻間隔物所要求之彈性恢復率差之課題。 In Patent Document 3, as a polymer component of a protective film of a color filter or a photoresist ink composition for a flexible printed wiring board, an active energy ray-curable resin obtained by the following method is used: p-cresol novolac The varnish epoxy resin was added with acrylic acid and dimethylolpropionic acid to obtain a reactant, and the reactant was subjected to caprolactone modification, and further to tetrahydrophthalic anhydride modification. The polymer component, which is the main component of the composition, is excellent in developability and flexibility, but has a problem that the elastic recovery rate required as a photoresist spacer is poor.
專利文獻4中揭示有將含有環氧羧酸酯化合物之樹脂組成物用於光學用材料之情況,但關於顯示元件用間隔物或彩色濾光片保護膜用則完全無記載。 Patent Document 4 discloses a case where a resin composition containing an epoxy carboxylic acid ester compound is used for an optical material, but there is no description about a spacer for a display element or a protective film for a color filter.
專利文獻1:日本特開2004-109752號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 2004-109752
專利文獻2:日本特開2007-010885號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 2007-010885
專利文獻3:日本特開2004-300266號公報 Patent Document 3: Japanese Patent Application Laid-Open No. 2004-300266
專利文獻4:國際公開第2008/004630號 Patent Document 4: International Publication No. 2008/004630
本發明之目的在於改善上述先前技術之問題,而提供一種顯影性、硬化性、高速塗佈性良好之活性能量線硬化型樹脂組成物,耐熱透明性、平坦性、柔軟性、強韌性優異之顯示元件用間隔物及彩色濾光片保護膜。 An object of the present invention is to improve the problems of the above-mentioned prior art, and to provide an active energy ray-curable resin composition with good developability, hardenability, and high-speed coating properties. A spacer for a display element and a color filter protective film.
本發明人等為了解決上述課題而進行努力研究,結果發現,具有特定之化合物及組成之樹脂組成物可解決上述課題,從而完成本發明。 The present inventors have conducted diligent research in order to solve the above-mentioned problems, and as a result, have found that a resin composition having a specific compound and composition can solve the above-mentioned problems and complete the present invention.
即,本發明係關於如下者: That is, the present invention relates to the following:
(1)一種顯示元件用間隔物或彩色濾光片保護膜用活性能量線硬化型樹脂組成物,其係含有反應性多羧酸化合物(A)、反應性多羧酸化合物(A)以外之反應性化合物(B)、光聚合起始劑(C)、及有機溶劑(D)者,並且反應性多羧酸化合物(A)係進而使多元酸酐(d)對反應物(E)進行反應而獲得者,上述反應物(E)係通式(1)所表示之環氧樹脂(a)、化合物(b)、及視需要之化合物(c)的反應物,上述化合物(b)係一分子中具有1個以上可進行聚合之乙烯性不飽和基及1個以上羧基者,上述化合物(c)係一分子中具有至少2個以上羥基及1個以上羧基者。 (1) A spacer for a display element or an active energy ray-curable resin composition for a color filter protective film, which contains a resin other than the reactive polycarboxylic acid compound (A) and the reactive polycarboxylic acid compound (A). Reactive compound (B), photopolymerization initiator (C), and organic solvent (D), and the reactive polycarboxylic acid compound (A) further reacts the polybasic acid anhydride (d) with the reactant (E) Whereas, the above-mentioned reactant (E) is a reactant of the epoxy resin (a), the compound (b), and optionally the compound (c) represented by the general formula (1), and the above-mentioned compound (b) is a Those having one or more ethylenically unsaturated groups and one or more carboxyl groups that can be polymerized in the molecule, and the compound (c) are those having at least two or more hydroxyl groups and one or more carboxyl groups in one molecule.
(式中R1~R8各自可相同或不同,表示氫原子、C1~C4之烷基、或鹵素原子;G表示環氧丙基) (Wherein R 1 to R 8 may be the same or different, and represent a hydrogen atom, an alkyl group of C1 to C4, or a halogen atom; G represents an epoxypropyl group)
(2)進而本發明係關於如(1)之顯示元件用間隔物或彩色濾光片保護膜用活性能量線硬化型樹脂組成物,其中反應性多羧酸化合物(A)係進而使多元酸酐(d)對反應物(E)進行反應而獲得者,上述反應物(E)係通式(1)所表示之環氧樹脂(a)、化合物(b)、及化合物(c)的反應物,上述化合物(b)係一分子中具有1個以上可進行聚合之乙烯性不飽和基及1個以上羧基者,上述化合物(c)係一分子中具有至少2個以上羥基及1個以上羧基者。 (2) Further, the present invention relates to an active energy ray-curable resin composition for a spacer for a display element or an active energy ray-curable resin composition for a color filter protective film according to (1), wherein the reactive polycarboxylic acid compound (A) is further a polybasic acid anhydride (d) a product obtained by reacting a reactant (E), the reactant (E) being a reactant of the epoxy resin (a), the compound (b), and the compound (c) represented by the general formula (1); The compound (b) is a polymer having one or more ethylenically unsaturated groups and one or more carboxyl groups in one molecule, and the compound (c) is a polymer having at least two hydroxyl groups and one or more carboxyl groups in one molecule. By.
(3)進而本發明係關於如(1)或(2)之顯示元件用間隔物或彩色濾光片保護膜用活性能量線硬化型樹脂組成物,其中,通式(1)之R1~R8為氫原子。 (3) Further, the present invention relates to an active energy ray-curable resin composition for a spacer for a display element or an active energy ray-curable resin for a color filter protective film, such as (1) or (2), wherein R 1 to R 8 is a hydrogen atom.
(4)進而本發明係關於一種顯示元件用間隔物,其係由上述(1)至(3)中任一項之活性能量線硬化型樹脂組成物所形成。 (4) The present invention further relates to a spacer for a display element, which is formed of the active energy ray-curable resin composition according to any one of (1) to (3) above.
(5)進而本發明係關於一種彩色濾光片保護膜,其係由上述(1)至(3)中任一項之活性能量線硬化型樹脂組成物所形成。 (5) The present invention further relates to a color filter protective film formed of the active energy ray-curable resin composition according to any one of (1) to (3) above.
本發明之含有反應性多羧酸化合物(A)之活性能量線硬化型樹脂組成物可提供顯影性優異、具有較高之放射線感度、且耐熱透明性、平坦性、柔軟性、強韌性優異的顯示元件用間隔物及彩色濾光片保護膜。 The active energy ray-curable resin composition containing the reactive polycarboxylic acid compound (A) of the present invention can provide an excellent developability, high radiation sensitivity, and excellent heat transparency, flatness, flexibility, and toughness. A spacer for a display element and a color filter protective film.
以下,對本發明詳細地進行說明。 Hereinafter, the present invention will be described in detail.
本發明之反應性多羧酸化合物(A)係進而使多元酸酐(d)對反應物進行反應而獲得者,上述反應物係通式(1)所表示之環氧樹脂(a)、化合物(b)、及視需要之化合物(c)的反應物,上述化合物(b)係一分子中具有1個以上可進行聚合之乙烯性不飽和基及1個以上羧基者,上述化合物(c)係一分子中具有至少2個以上羥基及1個以上羧基者。 The reactive polycarboxylic acid compound (A) of the present invention is obtained by further reacting a polybasic acid anhydride (d) with a reactant, and the reactant is an epoxy resin (a) and a compound ( b), and a reactant of the compound (c) as needed, the compound (b) is a polymer having one or more ethylenically unsaturated groups and one or more carboxyl groups in one molecule, and the compound (c) is One molecule has at least two hydroxyl groups and one or more carboxyl groups.
即,本發明之反應性多羧酸化合物(A)可藉由對於環氧樹脂(a)與化合物(b)的反應物(E)使多元酸酐(d)與之反應而獲得,或者對於環氧樹脂(a)、化合物(b)及化合物(c)的反應物(E)使多元酸酐(d)與之反應而獲得。 That is, the reactive polycarboxylic acid compound (A) of the present invention can be obtained by reacting a polybasic acid anhydride (d) with the reactant (E) of the epoxy resin (a) and the compound (b), or The reactant (E) of the oxyresin (a), the compound (b), and the compound (c) is obtained by reacting a polybasic acid anhydride (d) with it.
於本發明中,藉由環氧羧酸酯化反應向分子鏈中導入乙烯性不飽和基及羥基,藉此可發揮本發明之特徵。 In the present invention, the characteristics of the present invention can be exerted by introducing an ethylenically unsaturated group and a hydroxyl group into a molecular chain by an epoxycarboxylic acid esterification reaction.
作為環氧樹脂(a)之通式(1)中,R1~R8各自可相同或不同,係自氫原子、C1~C4之烷基、或鹵素原子中適當選擇者。作為C1~ C4之烷基,可列舉:甲基、乙基、正丙基、異丙基、正丁基、異丁基、三級丁基等;又,作為鹵素原子,可列舉:氯原子、溴原子、碘原子等。於本發明中R1~R8較佳為氫原子。 In the general formula (1) as the epoxy resin (a), each of R 1 to R 8 may be the same or different, and is appropriately selected from a hydrogen atom, an alkyl group of C1 to C4, or a halogen atom. Examples of the C1-C4 alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a tertiary butyl group. Examples of the halogen atom include a chlorine atom. , Bromine atom, iodine atom, etc. In the present invention, R 1 to R 8 are preferably hydrogen atoms.
用以製造本發明之反應性多羧酸化合物(A)的環氧化合物(a)係可使含有通式(2)
(式中,R1~R8各自可相同或不同,表示氫原子、C1~C4之烷基、或鹵素原子) (Wherein R 1 to R 8 may be the same or different and each represents a hydrogen atom, an alkyl group of C1 to C4, or a halogen atom)
所表示之化合物80莫耳%以上之酚化合物進行環氧丙基化而獲得。例如,日本特開2005-200527號中記載有該製造方法,可依據該方法進行製造。即,利用苯酚、經C1~C4烷基取代之苯酚、或經鹵素取代之苯酚等與乙二醛之縮合反應而合成通式(2)之酚樹脂,並使酚樹脂環氧化,藉此可獲得通式(1)之環氧樹脂(a)。 A phenolic compound of 80 mol% or more of the indicated compound is obtained by epoxidation. For example, Japanese Patent Application Laid-Open No. 2005-200527 describes this manufacturing method, and manufacturing can be performed according to this method. That is, a phenol resin of the general formula (2) is synthesized by a condensation reaction of phenol, C1-C4 alkyl-substituted phenol, or halogen-substituted phenol and glyoxal, and the phenol resin is epoxidized, thereby making it possible to epoxidize the phenol resin. An epoxy resin (a) of the general formula (1) is obtained.
進而,作為市售品,可獲得通式(1)之R1~R8均為氫原子之GTR-1800(日本化藥股份有限公司製造)或JER1031S(Japan Epoxy Resins製造)。 Furthermore, as a commercially available product, GTR-1800 (manufactured by Nippon Kayaku Co., Ltd.) or JER1031S (manufactured by Japan Epoxy Resins), each of which R 1 to R 8 in the general formula (1) are hydrogen atoms, can be obtained.
本發明中使用之環氧化合物(a)之熔點或軟化點為100℃以上。又, 其環氧當量為120~200g/eq.之範圍,更佳為155~180g/eq.之範圍。 The melting point or softening point of the epoxy compound (a) used in the present invention is 100 ° C or higher. also, Its epoxy equivalent is in the range of 120 to 200 g / eq., And more preferably in the range of 155 to 180 g / eq.
本發明中,一分子中具有1個以上可進行聚合之乙烯性不飽和基及1個以上羧基之化合物(b)係為了賦予對活性能量線之反應性而被加入反應者。只要乙烯性不飽和基及羧基分別於分子內存在1個以上則並無限制。作為該等,可列舉單羧酸化合物、多羧酸化合物。 In the present invention, the compound (b) having one or more ethylenically unsaturated groups and one or more carboxyl groups that can be polymerized in one molecule is added to the reactant in order to impart reactivity to active energy rays. There is no restriction as long as there are one or more ethylenically unsaturated groups and carboxyl groups in the molecule. Examples thereof include a monocarboxylic acid compound and a polycarboxylic acid compound.
作為一分子中具有一個羧基之單羧酸化合物,例如可列舉(甲基)丙烯酸類或丁烯酸、α-氰基桂皮酸、桂皮酸、或者飽和或不飽和二元酸與含不飽和基之單環氧丙基化合物之反應物。於上文中,作為(甲基)丙烯酸類,例如可列舉:(甲基)丙烯酸、β-苯乙烯基丙烯酸、β-糠基丙烯酸、(甲基)丙烯酸二聚物、作為飽和或不飽和二元酸酐與1分子中具有1個羥基之(甲基)丙烯酸酯衍生物之等莫耳反應物的半酯類、作為飽和或不飽和二元酸與單環氧丙基(甲基)丙烯酸酯衍生物類之等莫耳反應物的半酯類等。 Examples of the monocarboxylic acid compound having one carboxyl group in a molecule include (meth) acrylic or butenoic acid, α-cyanocinnamic acid, cinnamic acid, or a saturated or unsaturated dibasic acid and an unsaturated group Reactant of the monoglycidyl compound. In the above, examples of (meth) acrylics include (meth) acrylic acid, β-styryl acrylic acid, β-furfuryl acrylic acid, (meth) acrylic acid dimer, and saturated or unsaturated dimers. Half-esters of Molar reactants such as (a) acid anhydrides and (meth) acrylic acid ester derivatives having one hydroxyl group in one molecule, as saturated or unsaturated dibasic acids and monoglycidyl (meth) acrylates Derivatives and other semi-esters of Mol reactants.
進而作為一分子中具有兩個以上羧基之多羧酸化合物,可列舉:作為與一分子中具有複數個羥基之(甲基)丙烯酸酯衍生物之等莫耳反應物的半酯類、作為飽和或不飽和二元酸與具有複數個環氧基之環氧丙基(甲基)丙烯酸酯衍生物類等之莫耳反應物的半酯類等。 Further, as the polycarboxylic acid compound having two or more carboxyl groups in one molecule, half-esters such as a mole reactant with a (meth) acrylate derivative having a plurality of hydroxyl groups in one molecule, and saturation Or half-esters of Mole reactants such as unsaturated dibasic acids and epoxypropyl (meth) acrylate derivatives having a plurality of epoxy groups.
該等中,就製成活性能量線硬化型樹脂組成物時之感度方面而言,最佳可列舉(甲基)丙烯酸、(甲基)丙烯酸與ε-己內酯之反應生成物或桂皮酸。作為化合物(b),較佳為化合物中不具有羥基者。 Among these, in terms of sensitivity when making an active energy ray-curable resin composition, the best examples include (meth) acrylic acid, a reaction product of (meth) acrylic acid and ε-caprolactone, or cinnamic acid . The compound (b) is preferably one which does not have a hydroxyl group in the compound.
本發明中,一分子中具有至少2個以上羥基及1個以上羧基之化合物(c)係為了對羧酸酯化合物中導入羥基而被加入反應者。 In the present invention, the compound (c) having at least two hydroxyl groups and one or more carboxyl groups in one molecule is added to the reactant in order to introduce a hydroxyl group into a carboxylic acid ester compound.
本發明中,作為視需要所使用之一分子中具有至少2個以上羥基及1個以上羧基之化合物(c)之具體例,例如可列舉:二羥甲基丙酸、二羥甲基丁酸(butane acid)、二羥甲基乙酸、二羥甲基丁酸(butyric acid)、二羥甲基戊酸、二羥甲基己酸等含聚羥基之單羧酸類等。尤佳者例如可列舉二羥甲基丙酸等。 In the present invention, specific examples of the compound (c) having at least two or more hydroxyl groups and one or more carboxyl groups in one molecule used as necessary include, for example, dimethylolpropionic acid and dimethylolbutanoic acid. (butane acid), dimethylolacetic acid, dimethylolbutyric acid, butyric acid, dimethylolvaleric acid, dimethylolhexanoic acid, etc. Particularly preferred examples include dimethylolpropionic acid.
該等之中,若考慮上述環氧樹脂(a)與化合物(b)及化合物(c)之反應之穩定性,則化合物(b)及化合物(c)較佳為單羧酸,即便於將單羧酸與多羧酸併用之情形時,亦較佳為單羧酸之總計莫耳量/多羧酸之總計莫耳量所表示之值為15以上。 Among these, if the stability of the reaction of the epoxy resin (a) with the compound (b) and the compound (c) is considered, the compound (b) and the compound (c) are preferably monocarboxylic acids. When a monocarboxylic acid and a polycarboxylic acid are used in combination, the value indicated by the total molar amount of the monocarboxylic acid / the total molar amount of the polycarboxylic acid is preferably 15 or more.
該反應中,環氧樹脂(a)與化合物(b)及視需要所使用之化合物(c)之羧酸總計饋入比率應根據用途而適當變更。即,於已使所有環氧基進行羧酸酯化之情形時,由於不存在未反應之環氧基,故而反應性環氧羧酸酯化合物形式之保存穩定性較高。於該情形時,僅利用由所導入之雙鍵帶來之反應性。 In this reaction, the total feed ratio of the carboxylic acid of the epoxy resin (a) to the compound (b) and the compound (c) used as necessary should be appropriately changed depending on the application. That is, when all epoxy groups have been carboxylic acid-esterified, since there is no unreacted epoxy group, the storage stability in the form of a reactive epoxy carboxylate compound is high. In this case, only the reactivity brought by the introduced double bond is used.
另一方面,藉由故意地減少羧酸化合物之饋入量而使未反應之殘存環氧基殘存,可複合利用所導入之不飽和鍵之反應性、與利用殘存之環氧基之反應例如利用光陽離子觸媒之聚合反應或熱聚合反應。然而,於該情形時,應注意反應性環氧羧酸酯化合物(E)之保存及製造條件之研究。 On the other hand, by deliberately reducing the feed amount of the carboxylic acid compound so that the unreacted residual epoxy group remains, the reactivity of the introduced unsaturated bond can be used in combination with the reaction using the remaining epoxy group, for example Polymerization reaction or thermal polymerization reaction using photo-cation catalyst. However, in this case, attention should be paid to the study of storage and manufacturing conditions of the reactive epoxy carboxylic acid ester compound (E).
於製造不殘存環氧基之反應性環氧羧酸酯化合物(E)之情形時,化合物(b)及視需要所使用之化合物(c)之總計較佳為相對於上述環氧樹脂(a)1當量為90~120當量%。若為該範圍,則可於相對穩定之條 件下進行製造。於化合物(b)及視需要所使用之化合物(c)之總饋入量較上述多之情形時,會殘存多餘之化合物(b)及化合物(c),因此欠佳。 In the case of producing a reactive epoxy carboxylic acid ester compound (E) that does not have an epoxy group remaining, the total of the compound (b) and the compound (c) used as necessary is preferably relative to the above-mentioned epoxy resin (a ) 1 equivalent is 90 ~ 120 equivalent%. If it is within this range, then Manufacturing. When the total feeding amount of the compound (b) and the compound (c) used as necessary is larger than the above, excess compound (b) and compound (c) will remain, which is not preferable.
又,於故意使環氧基殘留之情形時,化合物(b)及化合物(c)之總計較佳為相對於上述環氧樹脂(a)1當量為20~90當量%。於偏離該範圍之情形時,進一步之環氧基之反應並不充分進行。於該情形時,需要十分注意反應中之凝膠化及反應性環氧羧酸酯化合物(E)之經時穩定性。 When the epoxy group is intentionally left, the total of the compound (b) and the compound (c) is preferably 20 to 90 equivalent% based on 1 equivalent of the epoxy resin (a). When it is out of this range, further epoxy group reaction does not proceed sufficiently. In this case, great attention needs to be paid to gelation during the reaction and the stability of the reactive epoxy carboxylic acid ester compound (E) over time.
於使用化合物(b)與化合物(c)之情形時,使用比率以相對於羧酸之莫耳比計化合物(b):化合物(c)較佳為95:5~5:95、進而較佳為95:5~40:60之範圍。若為該範圍,則對活性能量線之感度良好,又,為了使多元酸酐(d)與反應性環氧羧酸酯化合物(E)反應可導入足量之羥基。 When using the compound (b) and the compound (c), the molar ratio of the compound (b) to the carboxylic acid is used. The compound (b): the compound (c) is preferably 95: 5 to 5:95, and more preferably The range is from 95: 5 to 40:60. Within this range, the sensitivity to the active energy ray is good, and a sufficient amount of hydroxyl groups can be introduced in order to react the polybasic acid anhydride (d) with the reactive epoxy carboxylic acid ester compound (E).
羧酸酯化反應可無溶劑地進行反應,或者可利用溶劑進行稀釋並進行反應。作為此處可使用之溶劑,若為對羧酸酯化反應惰性之溶劑則並無特別限定。 The carboxylic acid esterification reaction may be performed without a solvent, or may be diluted and reacted with a solvent. The solvent that can be used here is not particularly limited as long as it is a solvent inert to the carboxylic acid esterification reaction.
較佳之溶劑使用量應根據所得之樹脂之黏度或用途而適當調整,以相對於固形物成分100重量份較佳為90~30重量份、更佳為80~50重量份之方式使用。 The preferred amount of the solvent to be used is appropriately adjusted according to the viscosity or use of the obtained resin, and it is used in a manner of preferably 90 to 30 parts by weight and more preferably 80 to 50 parts by weight relative to 100 parts by weight of the solid content.
若具體地例示,例如可列舉:甲苯、二甲苯、乙基苯、四甲基苯等芳香族系烴溶劑,己烷、辛烷、癸烷等脂肪族系烴溶劑,及其等之混合物即石油醚、白汽油(white gasoline)、溶劑石油腦等、酯系溶劑、醚系溶劑、酮系溶劑等。 Specific examples include aromatic hydrocarbon solvents such as toluene, xylene, ethylbenzene, and tetramethylbenzene; aliphatic hydrocarbon solvents such as hexane, octane, and decane; and mixtures thereof. Petroleum ether, white gasoline, solvent naphtha, etc., ester solvents, ether solvents, ketone solvents, and the like.
作為酯系溶劑,可列舉:乙酸乙酯、乙酸丙酯、乙酸丁酯等乙酸烷基酯類,γ-丁內酯等環狀酯類,乙二醇單甲醚乙酸酯、二乙二醇單甲醚單乙酸酯、二乙二醇單乙醚單乙酸酯、三乙二醇單乙醚單乙酸酯、二乙二醇單丁醚單乙酸酯、丙二醇單甲醚乙酸酯、丁二醇單甲醚乙酸酯等單或聚伸烷基二醇單烷基醚單乙酸酯類,戊二酸二烷基、丁二酸二烷基、己二酸二烷基酯等多羧酸烷基酯類等。 Examples of the ester-based solvent include alkyl acetates such as ethyl acetate, propyl acetate, and butyl acetate, cyclic esters such as γ-butyrolactone, ethylene glycol monomethyl ether acetate, and diethylene glycol. Alcohol monomethyl ether monoacetate, diethylene glycol monoethyl ether monoacetate, triethylene glycol monoethyl ether monoacetate, diethylene glycol monobutyl ether monoacetate, propylene glycol monomethyl ether acetate , Mono- or polyalkylene glycol monoalkyl ether monoacetates such as butanediol monomethyl ether acetate, dialkyl glutarate, dialkyl succinate, dialkyl adipate, etc. Polycarboxylic acid alkyl esters and the like.
作為醚系溶劑,可列舉:二乙基醚、乙基丁基醚等烷基醚類,乙二醇二甲基醚、乙二醇二乙基醚、二丙二醇二甲基醚、二丙二醇二乙基醚、三乙二醇二甲基醚、三乙二醇二乙基醚等二醇醚類,四氫呋喃等環狀醚類等。 Examples of the ether-based solvent include alkyl ethers such as diethyl ether and ethyl butyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, dipropylene glycol dimethyl ether, and dipropylene glycol di Glycol ethers such as ethyl ether, triethylene glycol dimethyl ether, and triethylene glycol diethyl ether; and cyclic ethers such as tetrahydrofuran.
作為酮系溶劑,可列舉:丙酮、甲基乙基酮、甲基丙基酮、甲基異丁基酮、環己酮、異佛爾酮等。 Examples of the ketone-based solvent include acetone, methyl ethyl ketone, methyl propyl ketone, methyl isobutyl ketone, cyclohexanone, and isophorone.
另外,可於後述之其他反應性化合物(B)等之單獨或混合有機溶劑中進行。於該情形時,於製成硬化性組成物而使用之情形時,可直接用作組成物,因此較佳。 In addition, it can be performed in the single or mixed organic solvent of other reactive compounds (B) etc. mentioned later. In this case, when it is used as a hardening composition, it can be used as a composition as it is, and it is preferable.
反應時,為了促進反應較佳為使用觸媒,該觸媒之使用量相對於反應物、即添加有環氧樹脂(a)、羧酸化合物(b)、視需要所使用之化合物(c)、及根據情形而添加之溶劑及其他之反應物之總量100重量份通常為0.1~10重量份。此時之反應溫度通常為60~150℃,又,反應時間較佳為5~60小時。作為可使用之觸媒之具體例,例如可列舉:三乙基胺、苄基二甲基胺、氯化三乙基銨、溴化苄基三甲基銨、碘化苄基三甲基銨、三苯基膦、三苯基銻、甲基三苯基銻、辛酸鉻、辛酸鋯等已知之一般鹼性觸 媒等。 During the reaction, it is preferable to use a catalyst in order to promote the reaction. The amount of the catalyst used is relative to the reactants, that is, the epoxy resin (a), the carboxylic acid compound (b), and the compound (c) used as required. The total amount of 100 parts by weight of the solvent and other reactants added according to circumstances is usually 0.1 to 10 parts by weight. The reaction temperature at this time is usually 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours. Specific examples of usable catalysts include triethylamine, benzyldimethylamine, triethylammonium chloride, benzyltrimethylammonium bromide, and benzyltrimethylammonium iodide. , Triphenylphosphine, triphenylantimony, methyltriphenylantimony, chromium octoate, zirconium octoate, etc. Media, etc.
又,作為熱聚合抑制劑,較佳為使用對苯二酚單甲醚、2-甲基對苯二酚、對苯二酚、二苯基苦味肼、二苯基胺、3,5-二-三級丁基-4-羥基甲苯等。 In addition, as the thermal polymerization inhibitor, hydroquinone monomethyl ether, 2-methylhydroquinone, hydroquinone, diphenylpicrin, diphenylamine, 3,5-di -Tertiary butyl-4-hydroxytoluene and the like.
本反應係進行適當取樣,並且將樣品之酸值成為5mgKOH/g以下、較佳成為3mgKOH/g以下之時間點設為終點。 In this reaction system, appropriate sampling is performed, and the time point at which the acid value of the sample becomes 5 mgKOH / g or less, preferably 3 mgKOH / g or less is set as the end point.
作為以上述方式獲得之反應性環氧羧酸酯化合物(E)之較佳分子量範圍,由GPC獲得之聚苯乙烯換算重量平均分子量為500至50,000之範圍,更佳為1,000至30,000。 As a preferable molecular weight range of the reactive epoxy carboxylic acid ester compound (E) obtained in the above manner, a polystyrene equivalent weight average molecular weight obtained from GPC is in a range of 500 to 50,000, more preferably 1,000 to 30,000.
於小於上述分子量之情形時,無法充分地發揮硬化物之強韌性,又,於過度大於上述值之情形時,黏度變高而塗敷等較為困難。 When the molecular weight is smaller than the above molecular weight, the toughness of the hardened material cannot be sufficiently exhibited, and when the molecular weight is excessively larger than the above value, the viscosity becomes high and application is difficult.
繼而,對酸加成步驟進行詳細敍述。酸加成步驟係出於對在上一步驟中所獲得之反應性環氧羧酸酯化合物(E)導入羧基而獲得反應性多羧酸化合物(A)之目的而進行。即,藉由使多元酸酐(d)對由羧酸酯化反應而生成之羥基進行加成反應而經由酯鍵導入羧基。 Next, the acid addition step will be described in detail. The acid addition step is performed for the purpose of obtaining a reactive polycarboxylic acid compound (A) by introducing a carboxyl group into the reactive epoxy carboxylic acid ester compound (E) obtained in the previous step. That is, the polybasic acid anhydride (d) is added to a carboxyl group via an ester bond by performing an addition reaction on a hydroxyl group generated by a carboxylic acid esterification reaction.
作為多元酸酐(d)之具體例,例如,只要為分子中具有酸酐構造之化合物則均可使用,尤佳為鹼性水溶液顯影性、耐熱性、耐水解性等優異之丁二酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、伊康酸酐、3-甲基-四氫鄰苯二甲酸酐、4-甲基-六氫鄰苯二甲酸酐、偏苯三甲酸酐或順丁烯二酸酐。 As specific examples of the polybasic acid anhydride (d), for example, any compound having an acid anhydride structure in the molecule can be used. Particularly preferred are succinic anhydride and orthobenzene which are excellent in alkali aqueous solution developability, heat resistance and hydrolysis resistance. Dicarboxylic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, itaconic anhydride, 3-methyl-tetrahydrophthalic anhydride, 4-methyl-hexahydrophthalic anhydride, Trimellitic anhydride or maleic anhydride.
使多元酸酐(d)加成之反應可藉由對上述羧酸酯化反應液添加多元酸酐(d)而進行。添加量應根據用途而適當變更。 The reaction for adding the polybasic acid anhydride (d) can be performed by adding the polybasic acid anhydride (d) to the carboxylic acid esterification reaction solution. The addition amount should be appropriately changed according to the application.
關於多元酸酐(d)之添加量,例如,於欲將本發明之反應性多羧酸化合物(A)用作鹼性顯影型之抗蝕劑之情形時,較佳為以最終所獲得之反應性多羧酸化合物(A)之固形物成分酸值(依據JISK 5601-2-1:1999)成為40~120mg‧KOH/g、更佳為60~120mg‧KOH/g的計算值饋入多元酸酐(d)。於此時之固形物成分酸值處於該範圍之情形時,本發明之感光性樹脂組成物之鹼性水溶液顯影性顯示良好顯影性。即,圖案化性良好且對過顯影之管理範圍亦較寬,又,亦不殘留過剩之酸酐。 Regarding the addition amount of the polybasic acid anhydride (d), for example, when the reactive polycarboxylic acid compound (A) of the present invention is to be used as an alkaline developing type resist, it is preferable to use the reaction obtained finally. The acid value (based on JISK 5601-2-1: 1999) of the solid content of the polycarboxylic acid compound (A) is 40 ~ 120mg‧KOH / g, more preferably 60 ~ 120mg‧KOH / g. Acid anhydride (d). In the case where the acid value of the solid component is in this range, the developability of the alkaline aqueous solution of the photosensitive resin composition of the present invention shows good developability. That is, the patterning property is good, and the management range for over-development is wide, and there is no excess acid anhydride remaining.
反應時,為了促進反應,較佳為使用觸媒,該觸媒之使用量相對於反應物即添加有由環氧化合物(a)、羧酸化合物(b)、視需要所使用之化合物(c)獲得之反應性環氧羧酸酯化合物(E)、及多元酸酐(d)、根據情形使用之溶劑及其他之反應物之總量100重量份,通常為0.1~10重量份。此時之反應溫度通常為60~150℃,又,反應時間較佳為5~60小時。作為可使用之觸媒之具體例,例如可列舉:三乙基胺、苄基二甲基胺、氯化三乙基銨、溴化苄基三甲基銨、碘化苄基三甲基銨、三苯基膦、三苯基銻、甲基三苯基銻、辛酸鉻、辛酸鋯等。 During the reaction, in order to promote the reaction, it is preferable to use a catalyst. The amount of the catalyst used is added to the reactant by an epoxy compound (a), a carboxylic acid compound (b), and a compound (c) used as necessary. The total amount of the obtained reactive epoxy carboxylic acid ester compound (E), the polybasic acid anhydride (d), the solvent used according to the situation, and other reactants is 100 parts by weight, usually 0.1 to 10 parts by weight. The reaction temperature at this time is usually 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours. Specific examples of usable catalysts include triethylamine, benzyldimethylamine, triethylammonium chloride, benzyltrimethylammonium bromide, and benzyltrimethylammonium iodide. , Triphenylphosphine, triphenylantimony, methyltriphenylantimony, chromium octoate, zirconium octoate, etc.
本酸加成反應可無溶劑地進行反應,或者可利用溶劑進行稀釋而進行反應。作為此處可使用之溶劑,只要為對酸加成反應為惰性之溶劑則並無特別限定。又,於在上一步驟即羧酸酯化反應中使用溶劑進行製造之情形時,亦可以對該兩反應為惰性為條件,而不去除溶劑而直接提交至下一步驟即酸加成反應。可使用之溶劑可與羧酸酯化反應中可使用者相同。 The present acid addition reaction may be carried out without a solvent, or may be carried out by dilution with a solvent. The solvent that can be used here is not particularly limited as long as it is a solvent that is inert to the acid addition reaction. In the case where the solvent is used for the carboxylic acid esterification reaction in the previous step, the two reactions may be inert, and the solvent may be directly submitted to the next step, the acid addition reaction, without removing the solvent. The solvent that can be used can be the same as the user in the carboxylic acid esterification reaction.
較佳之溶劑之使用量應根據所得之樹脂之黏度或用途而適 當調整,但較佳為以相對於固形物成分100重量份為90~30重量份、更佳為80~50重量份之方式使用。 The amount of the preferred solvent should be appropriate according to the viscosity or use of the resin obtained. When adjusted, it is preferably used in a range of 90 to 30 parts by weight, more preferably 80 to 50 parts by weight, based on 100 parts by weight of the solid component.
此外,亦可於後述之反應性化合物(B)等之單獨或混合有機溶劑中進行。於該情形時,較佳為於製成硬化性組成物而使用之情形時可直接作為組成物而利用。 In addition, it can also be performed in the single or mixed organic solvent of the reactive compound (B) etc. mentioned later. In this case, it is preferable to use the composition as a composition when it is used as a curable composition.
又,熱聚合抑制劑等較佳為使用與上述羧酸酯化反應中之例示相同者。 The thermal polymerization inhibitor and the like are preferably the same as those exemplified in the carboxylic acid esterification reaction.
本反應係進行適當取樣,並且採用反應物之酸值成為設定酸值之正負10%範圍之時作為終點。 In this reaction, appropriate sampling is performed, and the end point is when the acid value of the reactant becomes a range of plus or minus 10% of the set acid value.
作為反應性多羧酸化合物(A)之較佳分子量範圍,由GPC獲得之聚苯乙烯換算重量平均分子量為500至50,000之範圍,更佳為1,000至30,000。 As a preferable molecular weight range of the reactive polycarboxylic acid compound (A), a polystyrene equivalent weight average molecular weight obtained from GPC is in a range of 500 to 50,000, and more preferably 1,000 to 30,000.
反應性多羧酸化合物(A)於該樹脂組成物中之使用比率通常為5~69重量%、較佳為8~59重量%左右。 The use ratio of the reactive polycarboxylic acid compound (A) in the resin composition is usually 5 to 69% by weight, and preferably about 8 to 59% by weight.
作為本發明中可使用之反應性化合物(B),可列舉自由基反應型之丙烯酸酯類、陽離子反應型之其他環氧化合物類、對兩者均有反應之乙烯系化合物類等所謂反應性低聚物類。 Examples of the reactive compound (B) that can be used in the present invention include so-called reactivity such as radical-reactive acrylates, cation-reactive other epoxy compounds, and ethylene-based compounds that react to both. Oligomers.
作為自由基反應型之丙烯酸酯類,例如可列舉:單官能(甲基)丙烯酸酯、2官能(甲基)丙烯酸酯、3官能以上(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、(甲基)丙烯酸胺酯低聚物、聚酯(甲基)丙烯酸酯低聚物、環氧(甲基)丙烯酸酯低聚物等。 Examples of the radically reactive acrylates include monofunctional (meth) acrylate, bifunctional (meth) acrylate, trifunctional or higher (meth) acrylate, and polyester (meth) acrylate , (Meth) acrylate oligomer, polyester (meth) acrylate oligomer, epoxy (meth) acrylate oligomer, and the like.
作為單官能(甲基)丙烯酸酯,例如可列舉:丙烯醯基 啉;(甲基)丙烯酸2-羥基乙基酯、(甲基)丙烯酸2-羥基丙基酯、(甲基)丙烯酸4-羥基丁基酯等含羥基之(甲基)丙烯酸酯;環己烷-1,4-二甲醇單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸異莰酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊烯氧基乙基酯等脂肪族(甲基)丙烯酸酯;(甲基)丙烯酸苯氧基乙酯、(甲基)丙烯酸苯基(聚)乙氧基酯、(甲基)丙烯酸對異丙苯基苯氧基乙基酯、(甲基)丙烯酸三溴苯氧基乙基酯、(甲基)丙烯酸苯基硫乙基酯、(甲基)丙烯酸2-羥基-3-苯氧基丙基酯、苯基苯酚(聚)乙氧基(甲基)丙烯酸酯、苯基苯酚環氧(甲基)丙烯酸酯等芳香族(甲基)丙烯酸酯。 Examples of the monofunctional (meth) acrylate include acrylfluorenyl Porphyrin; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate and other (meth) acrylates containing cyclohexyl; cyclohexyl Alkane-1,4-dimethanol mono (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, isoamyl (meth) acrylate, dicyclopentyl (meth) acrylate, (meth) acrylic acid Aliphatic (meth) acrylates such as dicyclopentenyl ester, dicyclopentenyloxyethyl (meth) acrylate; phenoxyethyl (meth) acrylate, phenyl (meth) acrylate (poly ) Ethoxyester, p-cumylphenoxyethyl (meth) acrylate, tribromophenoxyethyl (meth) acrylate, phenylthioethyl (meth) acrylate, ( Aromatic (meth) groups such as 2-hydroxy-3-phenoxypropyl methacrylate, phenylphenol (poly) ethoxy (meth) acrylate, phenylphenol epoxy (meth) acrylate, etc. )Acrylate.
作為2官能(甲基)丙烯酸酯,可列舉:1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,9-壬二醇二(甲基)丙烯酸酯、三環癸烷二甲醇(甲基)丙烯酸酯、雙酚A(聚)乙氧基二(甲基)丙烯酸酯、雙酚A(聚)丙氧基二(甲基)丙烯酸酯、雙酚F(聚)乙氧基二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、(聚)乙二醇二(甲基)丙烯酸酯、羥基三甲基乙酸新戊二醇酯之ε-己內酯加成物之二(甲基)丙烯酸酯(例如,日本化藥股份有限公司製造,KAYARAD HX-220、HX-620等)等。 Examples of the bifunctional (meth) acrylate include 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, and 1,9-nonanediol Di (meth) acrylate, tricyclodecanedimethanol (meth) acrylate, bisphenol A (poly) ethoxydi (meth) acrylate, bisphenol A (poly) propoxybis (methyl) Base) acrylate, bisphenol F (poly) ethoxy di (meth) acrylate, ethylene glycol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, hydroxytrimethyl Di (meth) acrylate of ε-caprolactone adduct of neopentyl glycol acetate (for example, manufactured by Nippon Kayaku Co., Ltd., KAYARAD HX-220, HX-620, etc.) and the like.
作為3官能以上之多官能(甲基)丙烯酸酯,可列舉:二(三羥甲基丙烷)四(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基辛烷三(甲基)丙烯酸酯、三羥甲基丙烷(聚)乙氧基三(甲基)丙烯酸酯、三羥甲基丙烷(聚)丙氧基三(甲基)丙烯酸酯、三羥甲基丙 烷(聚)乙氧基(聚)丙氧基三(甲基)丙烯酸酯等羥甲基類;新戊四醇三(甲基)丙烯酸酯、新戊四醇(聚)乙氧基四(甲基)丙烯酸酯、新戊四醇(聚)丙氧基四(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯等新戊四醇類;三[(甲基)丙烯醯氧基乙基]異氰尿酸酯、己內酯改質三[(甲基)丙烯醯氧基乙基]異氰尿酸酯等;丁二酸改質新戊四醇三丙烯酸酯、丁二酸改質二新戊四醇五丙烯酸酯類。 Examples of the trifunctional or higher polyfunctional (meth) acrylate include bis (trimethylolpropane) tetra (meth) acrylate, trimethylolpropane tri (meth) acrylate, and trimethylol Octane tri (meth) acrylate, trimethylolpropane (poly) ethoxytri (meth) acrylate, trimethylolpropane (poly) propoxytri (meth) acrylate, trihydroxy Methyl propyl Hydroxymethyls such as alkane (poly) ethoxy (poly) propoxytri (meth) acrylate; neopentaerythritol tri (meth) acrylate, neopentaerythritol (poly) ethoxytetra ( (Meth) acrylate, neopentaerythritol (poly) propoxytetra (meth) acrylate, neopentaerythritol tetra (meth) acrylate, dinepentaerythritol tetra (meth) acrylate, di Neopentaerythritol such as neopentaerythritol penta (meth) acrylate, dinepentaerythritol hexa (meth) acrylate; tris [(meth) acryloxyethyl] isocyanurate, Caprolactone modified tri [(meth) acryloxyethyl] isocyanurate, etc .; Succinic acid modified neopentaerythritol triacrylate, Succinic acid modified dipentaerythritol pentaacrylate Esters.
作為(聚)酯(甲基)丙烯酸酯低聚物,例如可列舉:乙二醇、二乙二醇、三乙二醇、丙二醇、二丙二醇、三丙二醇、新戊二醇、(聚)乙二醇、(聚)丙二醇、等二醇類、1,4-丁二醇、1,6-己二醇、1,8-辛二醇、1,9-壬二醇、2-甲基-1,8-辛二醇、3-甲基-1,5-戊二醇、2,4-二乙基-1,5-戊二醇、2-丁基-2-乙基-1,3-丙二醇等直鏈或支鏈烷基二醇類、環己烷-1,4-二甲醇等脂環式烷基二醇類、雙酚A(聚)乙氧基二醇或雙酚A(聚)丙氧基二醇等二醇化合物和上述二元酸或其酸酐之反應物即(聚)酯二醇與(甲基)丙烯酸之反應物等。 Examples of the (poly) ester (meth) acrylate oligomer include ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, tripropylene glycol, neopentyl glycol, and (poly) ethylene Glycols, (poly) propylene glycols, and other diols, 1,4-butanediol, 1,6-hexanediol, 1,8-octanediol, 1,9-nonanediol, 2-methyl- 1,8-octanediol, 3-methyl-1,5-pentanediol, 2,4-diethyl-1,5-pentanediol, 2-butyl-2-ethyl-1,3 -Linear or branched alkyl glycols such as propylene glycol, alicyclic alkyl glycols such as cyclohexane-1,4-dimethanol, bisphenol A (poly) ethoxydiol or bisphenol A ( A reactant of a diol compound such as poly) propoxydiol and the above-mentioned dibasic acid or its anhydride, that is, a reactant of (poly) ester diol and (meth) acrylic acid, and the like.
作為(甲基)丙烯酸胺酯低聚物,例如可列舉使二醇化合物(例如,乙二醇、二乙二醇、三乙二醇、丙二醇、二丙二醇、三丙二醇、1,4-丁二醇、新戊二醇、1,6-己二醇、1,8-辛二醇、1,9-壬二醇、2-甲基-1,8-辛二醇、3-甲基-1,5-戊二醇、2,4-二乙基-1,5-戊二醇、2-丁基-2-乙基-1,3-丙二醇、環己烷-1,4-二甲醇、聚乙二醇、聚丙二醇、雙酚A聚乙氧基二醇、雙酚A聚丙氧基二醇等)或該等二醇化合物與二元酸或者其酸酐(例如,丁二酸、己二酸、壬二酸、二體酸、間苯二甲酸、 對苯二甲酸、鄰苯二甲酸或者該等之酸酐)之反應物即聚酯二醇、與有機聚異氰酸酯(例如,四亞甲基二異氰酸酯、六亞甲基二異氰酸酯、2,2,4-三甲基六亞甲基二異氰酸酯、2,4,4-三甲基六亞甲基二異氰酸酯等鏈狀飽和烴異氰酸酯、異佛爾酮二異氰酸酯、降莰烷二異氰酸酯、二環己基甲烷二異氰酸酯、亞甲基雙(4-環己基異氰酸酯)、氫化二苯基甲烷二異氰酸酯、氫化二甲苯二異氰酸酯、氫化甲苯二異氰酸酯等環狀飽和烴異氰酸酯、2,4-甲苯二異氰酸酯、1,3-苯二甲基二異氰酸酯、對伸苯基二異氰酸酯、3,3'-二甲基-4,4'-二伸苯基二異氰酸酯、6-異丙基-1,3-苯基二異氰酸酯、1,5-萘二異氰酸酯等芳香族聚異氰酸酯)反應,繼而加成含羥基之(甲基)丙烯酸酯而得之反應物等。 Examples of the (meth) acrylate oligomer include a diol compound (for example, ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, tripropylene glycol, 1,4-butane Alcohol, neopentyl glycol, 1,6-hexanediol, 1,8-octanediol, 1,9-nonanediol, 2-methyl-1,8-octanediol, 3-methyl-1 , 5-pentanediol, 2,4-diethyl-1,5-pentanediol, 2-butyl-2-ethyl-1,3-propanediol, cyclohexane-1,4-dimethanol, Polyethylene glycol, polypropylene glycol, bisphenol A polyethoxydiol, bisphenol A polypropyleneoxy glycol, etc.) or these diol compounds and dibasic acids or their anhydrides (e.g., succinic acid, adipic acid Acid, azelaic acid, dimer acid, isophthalic acid, The reactants of terephthalic acid, phthalic acid, or their anhydrides are polyester diols, and organic polyisocyanates (e.g., tetramethylene diisocyanate, hexamethylene diisocyanate, 2,2,4 -Chain saturated hydrocarbon isocyanates such as trimethylhexamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, isophorone diisocyanate, norbornane diisocyanate, dicyclohexylmethane Cyclic saturated hydrocarbon isocyanates such as diisocyanate, methylenebis (4-cyclohexyl isocyanate), hydrogenated diphenylmethane diisocyanate, hydrogenated xylene diisocyanate, hydrogenated toluene diisocyanate, 2,4-toluene diisocyanate, 1, 3-Benzyldimethyl diisocyanate, p-phenylene diisocyanate, 3,3'-dimethyl-4,4'-diphenylene diisocyanate, 6-isopropyl-1,3-phenyldiisocyanate Isocyanates, aromatic polyisocyanates such as 1,5-naphthalene diisocyanate), and reactants obtained by adding a hydroxyl group-containing (meth) acrylate.
作為環氧(甲基)丙烯酸酯低聚物,為具有環氧基之化合物與(甲基)丙烯酸之羧酸酯化合物。例如,可列舉:苯酚酚醛清漆型環氧(甲基)丙烯酸酯、甲酚酚醛清漆型環氧(甲基)丙烯酸酯、三羥基苯基甲烷型環氧(甲基)丙烯酸酯、二環戊二烯苯酚型環氧(甲基)丙烯酸酯、雙酚A型環氧(甲基)丙烯酸酯、雙酚F型環氧(甲基)丙烯酸酯、聯苯酚型環氧(甲基)丙烯酸酯、雙酚A酚醛清漆型環氧(甲基)丙烯酸酯、含萘骨架之環氧(甲基)丙烯酸酯、乙二醛型環氧(甲基)丙烯酸酯、雜環式環氧(甲基)丙烯酸酯等。 The epoxy (meth) acrylate oligomer is a compound having an epoxy group and a carboxylic acid ester compound of (meth) acrylic acid. Examples include phenol novolac epoxy (meth) acrylate, cresol novolac epoxy (meth) acrylate, trihydroxyphenylmethane epoxy (meth) acrylate, dicyclopentyl Diene phenol epoxy (meth) acrylate, bisphenol A epoxy (meth) acrylate, bisphenol F epoxy (meth) acrylate, biphenol epoxy (meth) acrylate Bisphenol A novolac epoxy (meth) acrylate, naphthalene skeleton-containing epoxy (meth) acrylate, glyoxal epoxy (meth) acrylate, heterocyclic epoxy (meth) ) Acrylate, etc.
作為乙烯系化合物類,可列舉乙烯醚類、苯乙烯類、其他乙烯系化合物。作為乙烯醚類,可列舉:乙基乙烯醚、丙基乙烯醚、羥基乙基乙烯醚、乙二醇二乙烯醚等。作為苯乙烯類,可列舉:苯乙烯、甲基苯乙烯、乙基苯乙烯等。作為其他乙烯系化合物,可列舉:三烯丙基異氰脲 酸酯、三甲基烯丙基異氰尿酸酯等。 Examples of the vinyl compounds include vinyl ethers, styrenes, and other vinyl compounds. Examples of the vinyl ethers include ethyl vinyl ether, propyl vinyl ether, hydroxyethyl vinyl ether, and ethylene glycol divinyl ether. Examples of the styrenes include styrene, methylstyrene, and ethylstyrene. Examples of other vinyl compounds include triallyl isocyanurate Acid esters, trimethylallyl isocyanurate, and the like.
又,作為陽離子反應型單體,通常只要為具有環氧基之化合物則並無特別限定。例如,可列舉:(甲基)丙烯酸環氧丙酯、甲基環氧丙醚、乙基環氧丙醚、丁基環氧丙醚、雙酚A二環氧丙醚、3,4-環氧環己基甲基-3,4-環氧環己烷羧酸酯(Union Carbide公司製造「Cyracure UVR-6110」等)、3,4-環氧環己基乙基-3,4-環氧環己烷羧酸酯、二氧化乙烯基環己烯(Union Carbide公司製造「ELR-4206」等)、二氧化檸檬烯(Daicel化學工業公司製造「Celloxide 3000」等)、二氧化烯丙基環己烯、3,4-環氧-4-甲基環己基-2-環氧丙烷、2-(3,4-環氧環己基-5,5-螺-3,4-環氧)環己烷-間二烷、雙(3,4-環氧環己基)己二酸酯(Union Carbide公司製造「Cyracure UVR-6128」等)、雙(3,4-環氧環己基甲基)己二酸酯、雙(3,4-環氧環己基)醚、雙(3,4-環氧環己基甲基)醚、雙(3,4-環氧環己基)二乙基矽氧烷等。 The cation-reactive monomer is generally not particularly limited as long as it is a compound having an epoxy group. Examples include: glycidyl (meth) acrylate, methylglycidyl ether, ethylglycidyl ether, butylglycidyl ether, bisphenol A diglycidyl ether, 3,4-cyclo Oxycyclohexylmethyl-3,4-epoxycyclohexane carboxylate (Cyracure UVR-6110 manufactured by Union Carbide, etc.), 3,4-epoxycyclohexylethyl-3,4-epoxy ring Hexane carboxylate, vinyl cyclohexene dioxide ("ELR-4206" manufactured by Union Carbide, etc.), limonene dioxide ("Celloxide 3000" manufactured by Daicel Chemical Industries, etc.), allyl cyclohexene dioxide 3,4-epoxy-4-methylcyclohexyl-2-propylene oxide, 2- (3,4-epoxycyclohexyl-5,5-spiro-3,4-epoxy) cyclohexane- Kanji Alkane, bis (3,4-epoxycyclohexyl) adipate (Cyracure UVR-6128 manufactured by Union Carbide, etc.), bis (3,4-epoxycyclohexylmethyl) adipate, bis (3,4-epoxycyclohexyl) ether, bis (3,4-epoxycyclohexylmethyl) ether, bis (3,4-epoxycyclohexyl) diethylsiloxane, and the like.
該等之中,作為反應性化合物(B),就聚合性良好且所得之間隔物等之強度提高之觀點而言,最佳為單官能、2官能、3官能以上(甲基)丙烯酸酯等。 Among these, as the reactive compound (B), monofunctional, difunctional, trifunctional or higher (meth) acrylates, etc. are preferred from the viewpoint of good polymerizability and improvement in the strength of the obtained spacers and the like. .
本發明之反應性化合物(B)可單獨使用亦可將2種以上混合而使用。該組成物中,反應性化合物(B)之使用比率係相對於反應性多羧酸化合物(A)100重量份較佳為30重量份~250重量份,更佳為50重量份~200重量份。於反應性化合物(B)之使用量為30重量份~250重量份之情形時,該組成物之感度、所得之顯示元件用間隔物等之耐熱性以及彈性特性更佳。 The reactive compound (B) of the present invention may be used alone or as a mixture of two or more. In this composition, the use ratio of the reactive compound (B) is preferably 30 to 250 parts by weight, and more preferably 50 to 200 parts by weight relative to 100 parts by weight of the reactive polycarboxylic acid compound (A). . When the amount of the reactive compound (B) used is 30 parts by weight to 250 parts by weight, the sensitivity of the composition, the heat resistance of the obtained spacer for display elements, and the like are better.
作為本發明之光聚合起始劑(C),為對活性能量線有反應而產生可使反應性多羧酸化合物(A)與反應性多羧酸化合物(A)以外之反應性化合物(B)開始聚合之活性種的成分。作為上述光聚合起始劑(C),可列舉:O-醯基肟化合物、苯乙酮化合物、聯咪唑化合物等。 As the photopolymerization initiator (C) of the present invention, a reactive compound (B) other than the reactive polycarboxylic acid compound (A) can be produced in order to react with the active energy ray to react ) Ingredients of the active species to start polymerization. Examples of the photopolymerization initiator (C) include an O-fluorenyl oxime compound, an acetophenone compound, and a biimidazole compound.
作為O-醯基肟化合物,例如可列舉:乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、1-[9-乙基-6-苯甲醯基-9H-咔唑-3-基]-辛烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯、1-[9-正丁基-6-(2-乙基苯甲醯基)-9H-咔唑-3-基]-乙烷-1-酮肟-O-苯甲酸酯、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-4-四氫吡喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-5-四氫呋喃基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧戊環基)甲氧基苯甲醯基}-9H-咔唑-3-基]-1-(O-乙醯基肟)等。該等之中,較佳為:乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)或乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧戊環基)甲氧基苯甲醯基}-9H-咔唑-3-基]-1-(O-乙醯基肟)。該等O-醯基肟化合物可單獨使用,亦可將2種以上混合而使用。 Examples of the O-fluorenyl oxime compound include ethyl ketone-1- [9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -1- (O -Ethynyloxime), 1- [9-ethyl-6-benzylidene-9H-carbazol-3-yl] -octane-1-oneoxime-O-acetate, 1- [9 -Ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -ethane-1-oneoxime-O-benzoate, 1- [9-n-butyl -6- (2-ethylbenzyl) -9H-carbazol-3-yl] -ethane-1-one oxime-O-benzoate, ethyl ketone-1- [9-ethyl- 6- (2-methyl-4-tetrahydrofurylbenzyl) -9H-carbazol-3-yl] -1- (O-ethylamidoxime), ethyl ketone-1- [9-ethyl- 6- (2-methyl-4-tetrahydropyranylbenzyl) -9H-carbazol-3-yl] -1- (O-ethylamidoxime), ethyl ketone-1- [9- Ethyl-6- (2-methyl-5-tetrahydrofurylbenzyl) -9H-carbazol-3-yl] -1- (O-ethylamidoxime), ethyl ketone-1- [9- Ethyl-6- {2-methyl-4- (2,2-dimethyl-1,3-dioxolane) methoxybenzyl} -9H-carbazol-3-yl] -1- (O-acetylamoxime) and the like. Among these, ethyl ketone-1- [9-ethyl-6- (2-methylbenzyl) -9H-carbazol-3-yl] -1- (O-acetamidine Oxime), ethyl ketone-1- [9-ethyl-6- (2-methyl-4-tetrahydrofurylmethoxybenzyl) -9H-carbazol-3-yl] -1- (O -Ethynyloxime) or ethyl ketone-1- [9-ethyl-6- {2-methyl-4- (2,2-dimethyl-1,3-dioxolyl) methoxy Benzamidine} -9H-carbazol-3-yl] -1- (O-ethylamidoxime). These O-fluorenyl oxime compounds may be used alone or as a mixture of two or more.
作為苯乙酮化合物,例如可列舉:α-胺基酮化合物、α-羥基酮化合物。 Examples of the acetophenone compound include an α-amino ketone compound and an α-hydroxy ketone compound.
作為α-胺基酮化合物,例如可列舉:2-苄基-2-二甲基胺基-1-(4-啉基苯基)-丁烷-1-酮、2-二甲基胺基-2-(4-甲基苄基)-1-(4-啉-4-基-苯基)-丁烷-1-酮、2-甲基-1-(4-甲硫基苯基)-2-啉基丙烷-1-酮等。 Examples of the α-amino ketone compound include 2-benzyl-2-dimethylamino-1- (4- Phenylphenyl) -butane-1-one, 2-dimethylamino-2- (4-methylbenzyl) -1- (4- Phenyl-4-yl-phenyl) -butane-1-one, 2-methyl-1- (4-methylthiophenyl) -2- Phenylpropane-1-one and the like.
作為α-羥基酮化合物,例如可列舉:1-苯基-2-羥基-2-甲基丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、4-(2-羥基乙氧基)苯基-(2-羥基-2-丙基)酮、1-羥基環己基苯基酮等。 Examples of the α-hydroxyketone compound include 1-phenyl-2-hydroxy-2-methylpropane-1-one and 1- (4-isopropylphenyl) -2-hydroxy-2-methyl Propane-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) ketone, 1-hydroxycyclohexylphenylketone, and the like.
該等苯乙酮化合物中,較佳為α-胺基酮化合物,更佳為2-苄基-2-二甲基胺基-1-(4-啉基苯基)-丁烷-1-酮或2-二甲基胺基-2-(4-甲基苄基)-1-(4-啉-4-基-苯基)-丁烷-1-酮。 Among these acetophenone compounds, an α-amino ketone compound is preferable, and 2-benzyl-2-dimethylamino-1- (4- Phenylphenyl) -butane-1-one or 2-dimethylamino-2- (4-methylbenzyl) -1- (4- Phenolin-4-yl-phenyl) -butane-1-one.
作為聯咪唑化合物,例如可列舉:2,2'-雙(2-氯苯基)-4,4',5,5'-四(4-乙氧基羰基苯基)-1,2'-聯咪唑、2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑等。該等之中,較佳為2,2'-雙(2-氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑、2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑或2,2'-雙(2,4,6-三氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑,更佳為2,2'-雙(2,4-二氯苯基)-4,4',5,5'-四苯基-1,2'-聯咪唑。 Examples of the biimidazole compound include 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'- Biimidazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4- (Dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4,6-trichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole and the like. Among these, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole or 2,2'-bis (2,4,6-trichlorophenyl) ) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, more preferably 2,2'-bis (2,4-dichlorophenyl) -4,4', 5 5'-tetraphenyl-1,2'-biimidazole.
作為上述之光聚合起始劑(C),亦可使用市售品,例如可列舉:2-甲基-1-(4-甲硫基苯基)-2-啉基丙烷-1-酮(Irgacure 907)、2-(4-甲基苄基)-2-(二甲基胺基)-1-(4-啉基苯基)-丁烷-1-酮(Irgacure 379)、乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)(Irgacure OXE02)(以上,Ciba Specialty Chemicals公司)等。 As the photopolymerization initiator (C), a commercially available product may be used, and examples thereof include 2-methyl-1- (4-methylthiophenyl) -2- Isoline propane-1-one (Irgacure 907), 2- (4-methylbenzyl) -2- (dimethylamino) -1- (4- (Phenylphenyl) -butane-1-one (Irgacure 379), ethyl ketone-1- [9-ethyl-6- (2-methylbenzyl) -9H-carbazol-3-yl] -1- (O-acetylamoxime) (Irgacure OXE02) (above, Ciba Specialty Chemicals) and the like.
於本發明之感光性樹脂組成物中,關於上述(C)成分之使用量,於將本發明之樹脂組成物之固形物成分設為100重量%之情形時,通常為1重量%以上10重量%以下,較佳為1重量%以上7重量%以下。 In the photosensitive resin composition of the present invention, when the amount of the component (C) used is 100% by weight, the solid content of the resin composition of the present invention is usually 1% by weight or more and 10% by weight. % Or less, preferably 1% to 7% by weight.
又,上述之光聚合起始劑(C)亦可與硬化促進劑(F)併用。作為可併用之硬化促進劑,例如可列舉:三乙醇胺、二乙醇胺、N-甲基二乙醇胺、2-甲基胺基乙基苯甲酸酯、二甲基胺基苯乙酮、對二甲基胺基苯甲酸異戊基酯、EPA等胺類、2-巰基苯并噻唑等氫供與體。關於該等硬化促進劑之使用量,於將本發明之樹脂組成物之固形物成分設為100重量%之情形時,通常為0重量%以上5重量%以下。 The photopolymerization initiator (C) may be used in combination with a hardening accelerator (F). Examples of the curing accelerator that can be used in combination include triethanolamine, diethanolamine, N-methyldiethanolamine, 2-methylaminoethylbenzoate, dimethylaminoacetophenone, and p-dimethylamine. Hydrogen donors such as isoamyl benzoate, amines such as EPA, and 2-mercaptobenzothiazole. About the usage-amount of such a hardening accelerator, when the solid content of the resin composition of this invention is 100 weight%, it is 0 to 5 weight% normally.
作為有機溶劑(D),可較佳地使用使各構成成分均勻地溶解或分散、且不與各構成成分反應者。作為上述有機溶劑(D),除了上述芳香族系烴溶劑、脂肪族系烴溶劑、及其等之混合物即石油醚、白汽油、溶劑石油腦等、酯系溶劑、醚系溶劑、酮系溶劑等,例如亦可列舉:醇類、乙二醇單烷基醚類、丙二醇單烷基醚類、二乙二醇單烷基醚類、二乙二醇單烷基醚乙酸酯類、二丙二醇單烷基醚類、二丙二醇單烷基醚乙酸酯類、乳酸酯類、脂肪族羧酸酯類、醯胺類、酮類等。該等可單獨使用,亦可將2 種以上混合而使用。 As the organic solvent (D), those which dissolve or disperse each constituent component uniformly and do not react with each constituent component can be preferably used. As the organic solvent (D), in addition to the above-mentioned aromatic hydrocarbon solvents, aliphatic hydrocarbon solvents, and mixtures thereof, namely petroleum ether, white gasoline, solvent naphtha, etc., ester solvents, ether solvents, and ketone solvents Examples include alcohols, ethylene glycol monoalkyl ethers, propylene glycol monoalkyl ethers, diethylene glycol monoalkyl ethers, diethylene glycol monoalkyl ether acetates, and dipropylene glycol. Monoalkyl ethers, dipropylene glycol monoalkyl ether acetates, lactates, aliphatic carboxylic acid esters, amidines, ketones, and the like. These can be used alone or 2 More than one species is used.
具體而言,作為有機溶劑(D),例如可列舉:苄醇等醇類;乙二醇單甲醚、乙二醇單乙醚、乙二醇單丙醚、乙二醇單丁醚等乙二醇單烷基醚類;丙二醇單甲醚、丙二醇單乙醚、丙二醇單丙醚、丙二醇單丁醚等丙二醇單烷基醚類;二乙二醇單甲醚、二乙二醇單乙醚等二乙二醇單烷基醚類;二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、二乙二醇單丙醚乙酸酯、二乙二醇單丁醚乙酸酯等二乙二醇單烷基醚乙酸酯類;二丙二醇單甲醚、二丙二醇單乙醚、二丙二醇單丙醚、二丙二醇單丁醚等二丙二醇單烷基醚類;二丙二醇單甲醚乙酸酯、二丙二醇單乙醚乙酸酯、二丙二醇單丙醚乙酸酯、二丙二醇單丁醚乙酸酯等二丙二醇單烷基醚乙酸酯類;乳酸甲酯、乳酸乙酯、乳酸正丙酯、乳酸異丙酯、乳酸正丁酯、乳酸異丁酯、乳酸正戊酯、乳酸異戊酯等乳酸酯類;羥基乙酸乙酯、2-羥基-2-甲基丙酸乙酯、2-羥基-3-甲基丁酸乙酯、乙氧基乙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基丁基丙酸酯、3-甲基-3-甲氧基丁基丁酸酯、乙醯乙酸甲酯、乙醯乙酸乙酯、丙酮酸甲酯、丙酮酸乙酯等脂肪族羧酸酯類;N-甲基甲醯胺、N,N-二甲基甲醯胺、N-甲基乙醯胺、N,N-二甲基乙醯胺等醯胺類;N-甲基吡咯啶酮、γ-丁內酯等酮類等。該等可單獨使用,亦可將2種以上混合而使用。 Specifically, examples of the organic solvent (D) include alcohols such as benzyl alcohol; ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether. Alcohol monoalkyl ethers; propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, and other propylene glycol monoalkyl ethers; diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, and the like Glycol monoalkyl ethers; diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monopropyl ether acetate, diethylene glycol monobutyl ether acetate And other diethylene glycol monoalkyl ether acetates; dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether and other dipropylene glycol monoalkyl ethers; dipropylene glycol monomethyl ether ethyl Esters, dipropylene glycol monoethyl ether acetate, dipropylene glycol monopropyl ether acetate, dipropylene glycol monobutyl ether acetate and other dipropylene glycol monoalkyl ether acetates; methyl lactate, ethyl lactate, n-propyl lactate Esters, isopropyl lactate, n-butyl lactate, isobutyl lactate, n-amyl lactate, isoamyl lactate and other lactates; Ethyl acetate, ethyl 2-hydroxy-2-methylpropanoate, ethyl 2-hydroxy-3-methylbutanoate, ethyl ethoxyacetate, methyl 3-methoxypropionate, 3-methyl Ethyl propionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl Acetate, 3-methyl-3-methoxybutylpropionate, 3-methyl-3-methoxybutylbutyrate, methyl ethyl acetate, ethyl ethyl acetate, pyruvate Aliphatic carboxylic acid esters such as methyl ester and ethyl pyruvate; N-methylformamide, N, N-dimethylformamide, N-methylacetamide, N, N-dimethylethyl Ammonamines such as ammonium; ketones such as N-methylpyrrolidone and γ-butyrolactone. These can be used alone or in combination of two or more.
作為該組成物中之固形物成分濃度,通常為10重量%以上40重量%以下,較佳為15重量%以上35重量%以下。藉由使該組成物之固 形物成分濃度為上述範圍,可提高塗佈性、提高膜厚均勻性、有效地抑制塗佈不均之產生。 The solid content concentration in the composition is usually 10% by weight or more and 40% by weight or less, and preferably 15% by weight or more and 35% by weight or less. By solidifying the composition The shape component concentration is in the above range, which can improve coating properties, improve film thickness uniformity, and effectively suppress the occurrence of coating unevenness.
作為該組成物於25℃之黏度,通常為1.0mPa‧s以上1,000mPa‧s以下。較佳為2.0mPa‧s以上100mPa‧s以下。藉由使該組成物之黏度為上述範圍,可平衡地達成維持膜厚均勻性、並且即便發生塗佈不均亦可自己變均勻之程度之黏度。 The viscosity of the composition at 25 ° C is usually 1.0 mPa · s or more and 1,000 mPa · s or less. It is preferably 2.0 mPa · s or more and 100 mPa · s or less. By setting the viscosity of the composition to the above-mentioned range, it is possible to achieve a viscosity in such a manner that the uniformity of the film thickness is maintained, and the degree of uniformity by itself can be achieved even if coating unevenness occurs.
於本發明之感光性樹脂組成物中,作為視需要而使用之鹼性可溶性樹脂(G),例如可藉由使具有羥基之單體、具有乙烯性雙鍵之酸酐、具有羧基之單體、具有環氧基之單體等、具有酚性羥基之單體、具有磺酸基之單體、其他單體、及上述單官能(甲基)丙烯酸酯共聚合而製造。 In the photosensitive resin composition of the present invention, the alkali-soluble resin (G) used as needed may be, for example, a monomer having a hydroxyl group, an acid anhydride having an ethylenic double bond, a monomer having a carboxyl group, It is produced by copolymerizing a monomer having an epoxy group, a monomer having a phenolic hydroxyl group, a monomer having a sulfonic acid group, other monomers, and the above-mentioned monofunctional (meth) acrylate.
作為具有羥基之單體之具體例,可列舉:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸3-羥基丙酯、(甲基)丙烯酸4-羥基丁酯、(甲基)丙烯酸5-羥基戊酯、(甲基)丙烯酸6-羥基己酯、(甲基)丙烯酸4-羥基環己酯、新戊二醇單(甲基)丙烯酸酯、3-氯-2-羥基丙基(甲基)丙烯酸酯、甘油單(甲基)丙烯酸酯、2-羥基乙基乙烯醚、4-羥基丁基乙烯醚、環己二醇單乙烯醚、2-羥基乙基烯丙基醚、N-羥基甲基(甲基)丙烯醯胺、N,N-雙(羥基甲基)(甲基)丙烯醯胺等。 Specific examples of the monomer having a hydroxyl group include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, and (meth) 4-hydroxybutyl acrylate, 5-hydroxypentyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 4-hydroxycyclohexyl (meth) acrylate, neopentyl glycol mono (methyl) Acrylate, 3-chloro-2-hydroxypropyl (meth) acrylate, glycerol mono (meth) acrylate, 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, cyclohexanediol monoethylene Ether, 2-hydroxyethylallyl ether, N-hydroxymethyl (meth) acrylamide, N, N-bis (hydroxymethyl) (meth) acrylamide, and the like.
作為具有乙烯性雙鍵之酸酐之具體例,可列舉:順丁烯二酸酐、伊康酸酐、檸康酸酐、鄰苯二甲酸酐、3-甲基鄰苯二甲酸酐、甲基-5-降莰烯-2,3-二羧酸酐、3,4,5,6-四氫鄰苯二甲酸酐、順-1,2,3,6-四氫鄰苯二甲酸酐、2-丁烯-1-基丁二酸酐等。 Specific examples of the acid anhydride having an ethylenic double bond include maleic anhydride, itaconic anhydride, citraconic anhydride, phthalic anhydride, 3-methylphthalic anhydride, and methyl-5- Norbornene-2,3-dicarboxylic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, cis-1,2,3,6-tetrahydrophthalic anhydride, 2-butene -1-ylsuccinic anhydride and the like.
作為具有羧基之單體之具體例,可列舉:丙烯酸、甲基丙烯酸、乙烯基乙酸、丁烯酸、伊康酸、順丁烯二酸、反丁烯二酸、桂皮酸、或其等之鹽。 Specific examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, vinylacetic acid, butenoic acid, itaconic acid, maleic acid, fumaric acid, cinnamic acid, or the like salt.
作為具有環氧基之單體之具體例,可列舉:(甲基)丙烯酸環氧丙酯、3,4-環氧環己基甲基丙烯酸酯。 Specific examples of the monomer having an epoxy group include propylene oxide (meth) acrylate and 3,4-epoxycyclohexyl methacrylate.
作為具有酚性羥基之單體,可列舉:鄰羥基苯乙烯、間羥基苯乙烯、對羥基苯乙烯等。又,可列舉該等之苯環之1個以上氫原子經甲基、乙基、正丁基等烷基;甲氧基、乙氧基、正丁氧基等烷氧基;鹵素原子;烷基之1個以上氫原子經鹵素原子取代之鹵烷基;硝基;氰基;醯胺基等取代的單體。 Examples of the monomer having a phenolic hydroxyl group include o-hydroxystyrene, m-hydroxystyrene, and p-hydroxystyrene. Examples of the benzene ring include one or more hydrogen atoms via alkyl groups such as methyl, ethyl, and n-butyl; alkoxy groups such as methoxy, ethoxy, and n-butoxy; halogen atoms; A halogenated alkyl group in which one or more hydrogen atoms are replaced by a halogen atom; a nitro group; a cyano group;
作為具有磺酸基之單體,可列舉:乙烯基磺酸、苯乙烯磺酸、(甲基)烯丙基磺酸、2-羥基-3-(甲基)烯丙氧基丙磺酸、(甲基)丙烯酸-2-磺乙酯、(甲基)丙烯酸-2-磺丙酯、2-羥基-3-(甲基)丙烯醯氧基丙磺酸、2-(甲基)丙烯醯胺-2-甲基丙磺酸等。 Examples of the monomer having a sulfonic acid group include vinylsulfonic acid, styrenesulfonic acid, (meth) allylsulfonic acid, 2-hydroxy-3- (methyl) allyloxypropanesulfonic acid, 2-sulfoethyl (meth) acrylate, 2-sulfopropyl (meth) acrylate, 2-hydroxy-3- (meth) propenyloxypropanesulfonic acid, 2- (meth) acrylic acid Amine-2-methylpropanesulfonic acid and the like.
作為其他單體,可列舉:烴系烯烴類、乙烯基醚類、異丙烯基醚類、烯丙基醚類、乙烯基酯類、烯丙基酯類、(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、芳香族乙烯系化合物、氯烯烴類、共軛二烯類。該等化合物亦可含有官能基,作為官能基例如可列舉羰基、烷氧基等。尤其是,由組成物形成之間隔壁之耐熱性優異,因此較佳為(甲基)丙烯酸酯類、(甲基)丙烯醯胺類。 Examples of other monomers include hydrocarbon-based olefins, vinyl ethers, isopropenyl ethers, allyl ethers, vinyl esters, allyl esters, (meth) acrylates, ( (Meth) acrylamidines, aromatic vinyl compounds, chloroolefins, and conjugated diene. These compounds may contain a functional group, and examples of the functional group include a carbonyl group and an alkoxy group. In particular, since the partition wall formed of the composition is excellent in heat resistance, (meth) acrylates and (meth) acrylamides are preferred.
於共聚合製造鹼性可溶性樹脂(G)時,可藉由在溶劑中於聚合起始劑存在下使不飽和化合物進行自由基聚合而製造。可使用上述溶 劑,可單獨使用,亦可將2種以上混合而使用。 When the basic soluble resin (G) is produced by copolymerization, it can be produced by radically polymerizing an unsaturated compound in the presence of a polymerization initiator in a solvent. You can use the above solvent Agents can be used alone or as a mixture of two or more.
作為被用於用以製造鹼性可溶性樹脂(G)之聚合反應的聚合起始劑,通常可使用已知為自由基聚合起始劑者。作為自由基聚合起始劑,例如可列舉:2,2'-偶氮雙異丁腈(AIBN)、2,2'-偶氮雙-(2,4-二甲基戊腈)、2,2'-偶氮雙-(4-甲氧基-2,4-二甲基戊腈)等偶氮化合物;過氧化苯甲醯、過氧化月桂醯、過氧化新戊酸三級丁酯、1,1'-雙-(過氧化三級丁基)環己烷等有機過氧化物及過氧化氫。於使用過氧化物作為自由基聚合起始劑之情形時,亦可與還原劑一併使用過氧化物而作為氧化還原型起始劑。 As a polymerization initiator used for the polymerization reaction for producing the alkali-soluble resin (G), generally known as a radical polymerization initiator. Examples of the radical polymerization initiator include 2,2'-azobisisobutyronitrile (AIBN), 2,2'-azobis- (2,4-dimethylvaleronitrile), 2, 2'-Azobis- (4-methoxy-2,4-dimethylvaleronitrile) and other azo compounds; benzamidine peroxide, lauryl peroxide, tert-butyl peroxypivalate, Organic peroxides such as 1,1'-bis- (tertiary butyl peroxide) cyclohexane and hydrogen peroxide. When a peroxide is used as a radical polymerization initiator, a peroxide may be used together with a reducing agent as a redox-type initiator.
於用以製造鹼性可溶性樹脂(G)之聚合反應中,為了調整分子量可使用分子量調整劑。作為分子量調整劑,例如可列舉:氯仿、四溴化碳等鹵化烴類;正己基硫醇、正辛基硫醇、正十二烷基硫醇、三級-十二烷基硫醇、硫乙醇酸等硫醇類;二硫化二甲基黃原酸酯、二硫化二異丙基黃原酸酯等黃原酸酯類;萜品油烯、α-甲基苯乙烯聚合物等。 In the polymerization reaction for producing the basic soluble resin (G), a molecular weight adjuster can be used in order to adjust the molecular weight. Examples of the molecular weight modifier include halogenated hydrocarbons such as chloroform and carbon tetrabromide; n-hexyl mercaptan, n-octyl mercaptan, n-dodecyl mercaptan, tertiary-dodecyl mercaptan, sulfur Thiols such as glycolic acid; xanthates such as dimethyl xanthate disulfide and diisopropyl xanthate disulfide; terpineolene, α-methylstyrene polymers, etc.
對於上述具有羥基之單體、具有乙烯性雙鍵之酸酐、具有羧基之單體、具有環氧基之單體等、具有酚性羥基之單體、具有磺酸基之單體等具有反應性基之單體(e),作為具有可與上述反應性基鍵結之官能基及乙烯性雙鍵之化合物(f),例如可列舉以下組合。 Reactive with the above-mentioned monomers having a hydroxyl group, anhydrides having an ethylenic double bond, monomers having a carboxyl group, monomers having an epoxy group, etc., monomers having a phenolic hydroxyl group, monomers having a sulfonic acid group, and the like As the monomer (e) of the group, as the compound (f) having a functional group and an ethylenic double bond which can be bonded to the reactive group, the following combinations are exemplified.
(1)具有乙烯性雙鍵之酸酐(f)對具有羥基之單體(e),(2)具有異氰酸酯基及乙烯性雙鍵之化合物(f)對具有羥基之單體(e),(3)具有氯化醯基及乙烯性雙鍵之化合物(f)對具有羥基之單體(e),(4)具有羥基及乙烯性雙鍵之化合物(f)對具有乙烯性雙鍵之酸酐(e), (5)具有環氧基及乙烯性雙鍵之化合物(f)對具有羧基之單體(e),(6)具有羧基及乙烯性雙鍵之化合物(f)對具有環氧基之單體(e)。 (1) an acid anhydride having an ethylenic double bond (f) to a monomer (e) having a hydroxyl group, (2) a compound having an isocyanate group and an ethylenic double bond (f) to a monomer (e) having a hydroxyl group, ( 3) A compound having a fluorenyl group and an ethylenic double bond (f) to a monomer (e) having a hydroxyl group, (4) A compound having a hydroxyl and an ethylenic double bond (f) to an acid anhydride having an ethylenic double bond (e), (5) Compound having epoxy group and ethylenic double bond (f) vs. monomer having carboxyl group (e), (6) Compound having carboxyl group and ethylenic double bond (f) vs. monomer having epoxy group (e).
作為具有乙烯性雙鍵之酸酐之具體例,可列舉上述之例。 Specific examples of the acid anhydride having an ethylenic double bond include the above-mentioned examples.
作為具有異氰酸酯基及乙烯性雙鍵之化合物之具體例,可列舉2-(甲基)丙烯醯氧基乙基異氰酸酯、1,1-(雙(甲基)丙烯醯氧基甲基)乙基異氰酸酯等。 Specific examples of the compound having an isocyanate group and an ethylenic double bond include 2- (meth) acryloxyethyl isocyanate and 1,1- (bis (meth) acryloxymethyl) ethyl. Isocyanate, etc.
作為具有氯化醯基及乙烯性雙鍵之化合物之具體例,可列舉(甲基)丙烯醯氯。 Specific examples of the compound having a fluorenyl chloride group and an ethylenic double bond include (meth) acrylic fluorenyl chloride.
作為具有羥基及乙烯性雙鍵之化合物之具體例,可列舉上述具有羥基之單體之例。 Specific examples of the compound having a hydroxyl group and an ethylenic double bond include the above-mentioned monomers having a hydroxyl group.
作為具有環氧基及乙烯性雙鍵之化合物之具體例,可列舉上述具有環氧基之單體之例。 Specific examples of the compound having an epoxy group and an ethylenic double bond include the above-mentioned monomers having an epoxy group.
作為具有羧基及乙烯性雙鍵之化合物之具體例,可列舉上述具有羧基之單體之例。 Specific examples of the compound having a carboxyl group and an ethylenic double bond include the above-mentioned examples of the monomer having a carboxyl group.
使共聚物、與具有可與反應性基鍵結之官能基及乙烯性雙鍵之化合物(f)反應時,作為用於反應之溶劑,可使用上述共聚物之合成中所例示之溶劑。 When reacting a copolymer with a compound (f) having a functional group capable of bonding with a reactive group and an ethylenic double bond, as the solvent used for the reaction, the solvents exemplified in the synthesis of the above copolymer can be used.
又,較佳為摻合聚合抑制劑。作為聚合抑制劑,可使用公知公用之聚合抑制劑,具體而言,可列舉2,6-二-三級丁基對甲酚。 Moreover, it is preferable to mix | blend a polymerization inhibitor. As a polymerization inhibitor, a well-known public polymerization inhibitor can be used, Specifically, 2,6-di-tert-butyl p-cresol is mentioned.
又,亦可添加觸媒或中和劑。例如,於使具有羥基之共聚物、與具有異氰酸酯基及乙烯性雙鍵之化合物反應之情形時,可使用錫化合物等。作為錫化合物,可列舉:二月桂酸二丁基錫、二丁基錫二(順丁烯二 酸單酯)、二月桂酸二辛基錫、二辛基錫二(順丁烯二酸單酯)、二乙酸二丁基錫等。 A catalyst or a neutralizing agent may be added. For example, when reacting a copolymer having a hydroxyl group with a compound having an isocyanate group and an ethylenic double bond, a tin compound or the like can be used. Examples of the tin compound include dibutyltin dilaurate, dibutyltindi (cis-butenedi) Acid monoesters), dioctyltin dilaurate, dioctyltin di (maleic acid monoester), dibutyltin diacetate, and the like.
例如,於使具有羥基之單體、與具有氯化醯基及乙烯性雙鍵之化合物反應的情形時,可使用鹼性觸媒。作為鹼性觸媒,可列舉:三乙基胺、吡啶、二甲基苯胺、四甲基脲等。 For example, when a monomer having a hydroxyl group is reacted with a compound having a fluorenyl chloride group and an ethylenic double bond, a basic catalyst can be used. Examples of the basic catalyst include triethylamine, pyridine, dimethylaniline, and tetramethylurea.
作為鹼性可溶性樹脂(G)之Mw,較佳為2×103~1×105,更佳為5×103~5×104。藉由使鹼性可溶性樹脂(G)之Mw為2×103~1×105,可提高該組成物之放射線感度及顯影性(正確地形成所需之圖案形狀之特性)。 The Mw of the basic soluble resin (G) is preferably 2 × 10 3 to 1 × 10 5 , and more preferably 5 × 10 3 to 5 × 10 4 . By setting the Mw of the alkaline soluble resin (G) to 2 × 10 3 to 1 × 10 5 , the radiation sensitivity and developability of the composition can be improved (characteristics of accurately forming a desired pattern shape).
進而,本發明之感光性樹脂組成物中視需要亦可添加界面活性劑、調平劑、消泡劑、填料、紫外線吸收劑、光穩定化劑、抗氧化劑、聚合抑制劑、交聯劑、密接助劑、顏料、染料等而賦予各個目標功能性。作為調平劑、消泡劑,可列舉:氟系化合物、聚矽氧系化合物、丙烯酸系化合物等;作為紫外線吸收劑,可列舉:苯并三唑系化合物、二苯甲酮系化合物、三系化合物等;作為光穩定化劑,可列舉:受阻胺系化合物、苯甲酸酯系化合物等;作為抗氧化劑,可列舉酚系化合物等;作為聚合抑制劑,可列舉:對甲氧基苯酚、甲基對苯二酚、對苯二酚等;作為交聯劑,可列舉上述聚異氰酸酯類、三聚氰胺化合物等。 Furthermore, a surfactant, a leveling agent, a defoaming agent, a filler, an ultraviolet absorber, a light stabilizer, an antioxidant, a polymerization inhibitor, a cross-linking agent, and an adhesion agent may be added to the photosensitive resin composition of the present invention as necessary. Additives, pigments, dyes, and the like to impart functionality to each target. Examples of the leveling agent and defoaming agent include fluorine-based compounds, polysiloxane-based compounds, and acrylic compounds. Examples of the ultraviolet absorber include benzotriazole-based compounds, benzophenone-based compounds, and three Examples of light stabilizers include hindered amine compounds and benzoate compounds. Examples of antioxidants include phenol compounds. Examples of polymerization inhibitors include p-methoxyphenol. , Methylhydroquinone, hydroquinone, and the like; examples of the crosslinking agent include the above-mentioned polyisocyanates and melamine compounds.
另外,作為對活性能量線不顯示反應性之樹脂類(所謂惰性聚合物),例如亦可使用:其他環氧樹脂、苯酚樹脂、胺酯樹脂、聚酯樹脂、酮甲醛樹脂、甲酚樹脂、二甲苯樹脂、鄰苯二甲酸二烯丙酯樹脂、苯乙烯樹脂、胍胺樹脂、天然及合成橡膠、丙烯酸樹脂、聚烯烴樹脂、及其等之 改質物。該等較佳為於樹脂組成物中於至多40重量份之範圍內使用。 In addition, as the resins (so-called inert polymers) that do not show reactivity to active energy rays, for example, other epoxy resins, phenol resins, amine ester resins, polyester resins, ketone-formaldehyde resins, cresol resins, Xylene resin, diallyl phthalate resin, styrene resin, guanamine resin, natural and synthetic rubber, acrylic resin, polyolefin resin, and others Modified matter. These are preferably used in the resin composition in a range of up to 40 parts by weight.
本發明之活性能量線硬化型樹脂組成物係組成物中通常含有反應性多羧酸化合物(A)5~69重量%,較佳為8~59重量%,通常含有其他反應性化合物(B)3~64重量%,較佳為5~59重量%,通常含有光聚合起始劑(C)1~10重量%,較佳為1~7重量%,通常含有有機溶劑(D)60~90重量%,較佳為65~85重量%。視需要通常亦可含有其他成分0~80重量%。 The active energy ray-curable resin composition system composition of the present invention usually contains 5 to 69% by weight of the reactive polycarboxylic acid compound (A), preferably 8 to 59% by weight, and usually contains other reactive compounds (B). 3 to 64% by weight, preferably 5 to 59% by weight, usually containing 1 to 10% by weight of the photopolymerization initiator (C), preferably 1 to 7% by weight, usually containing 60 to 90% of the organic solvent (D) % By weight, preferably 65 to 85% by weight. If necessary, it may also contain 0 to 80% by weight of other ingredients.
由該組成物形成之顯示元件用間隔物較佳地包含於本發明。該顯示元件用間隔物之形成方法包括(1)將該組成物塗佈於基板上而形成塗膜之步驟,(2)對上述塗膜之至少一部分照射放射線之步驟,(3)將上述放射線所照射之塗膜進行顯影之步驟,及(4)對上述已顯影之塗膜進行加熱之步驟。 The spacer for a display element formed from this composition is preferably included in the present invention. The method for forming a spacer for a display element includes (1) a step of coating the composition on a substrate to form a coating film, (2) a step of irradiating at least a part of the coating film with radiation, and (3) applying the radiation A step of developing the irradiated coating film, and (4) a step of heating the developed coating film.
對使用本發明之活性能量線硬化型樹脂組成物以光微影法形成光阻間隔物及/或彩色濾光片保護膜的方法簡單地進行說明。將本發明之活性能量線硬化型樹脂組成物利用輥塗、旋轉塗佈、噴塗、狹縫式塗佈等公知之方法均勻地塗佈於基板上,使之乾燥而形成感光性樹脂組成物層。作為塗佈裝置,可使用公知之塗佈裝置,例如可列舉:旋轉塗佈機、氣刀塗佈機、輥塗機、棒式塗佈機、簾幕式塗佈機、凹版塗佈機及缺角輪塗佈機等。此處,對形成於在著色層上進而設置之透明共用電極上的例進行說明。 A method for forming a photoresist spacer and / or a color filter protective film by a photolithography method using the active energy ray-curable resin composition of the present invention will be briefly described. The active energy ray-curable resin composition of the present invention is uniformly coated on a substrate by a known method such as roll coating, spin coating, spray coating, and slit coating, and dried to form a photosensitive resin composition layer. . As the coating device, a known coating device can be used, and examples thereof include a spin coater, an air knife coater, a roll coater, a bar coater, a curtain coater, a gravure coater, and Notch wheel coater and so on. Here, an example formed on a transparent common electrode provided on the colored layer will be described.
視需要加熱使之乾燥(預烘烤)。作為乾燥溫度,較佳為50℃以上,進而較佳為70℃以上,又,較佳為未達150℃,進而較佳為120℃以下。乾燥時間較佳為30秒以上,進而較佳為1分鐘以上,又,較佳為20分鐘以下,進而較佳為10分鐘以下。 If necessary, heat to dry (pre-bake). The drying temperature is preferably 50 ° C or higher, more preferably 70 ° C or higher, and still preferably less than 150 ° C, and still more preferably 120 ° C or lower. The drying time is preferably 30 seconds or more, more preferably 1 minute or more, still more preferably 20 minutes or less, and still more preferably 10 minutes or less.
繼而,介隔規定之光罩利用活性能量線進行感光性樹脂組成物層之曝光。若為本發明之感光性樹脂組成物,則即便為直徑5~10μm左右(面積20~100μm2左右)之遮罩開口部,亦可精確地、即於直徑6~12μm(面積30~120μm2)之範圍形成。 Then, exposure of the photosensitive resin composition layer is performed using active energy rays through a predetermined photomask. According to the photosensitive resin composition of the present invention, even if it is a mask opening having a diameter of about 5 to 10 μm (area of about 20 to 100 μm 2 ), the diameter can be accurately set to 6 to 12 μm (area of 30 to 120 μm 2). ).
作為曝光所使用之活性能量線,只要可使本發明之感光性樹脂組成物硬化則並無特別限制。本發明之活性能量線硬化型樹脂組成物藉由活性能量線容易發生硬化。此處,作為活性能量線之具體例,可列舉:紫外線、可見光、紅外線、X射線、γ射線、雷射光線等電磁波、α射線、β射線、電子束等粒子束等。考慮到本發明之較佳用途,該等之中,較佳為紫外線、雷射光線、可見光、或電子束。作為曝光量,並無特別限定,較佳為20~1,000mJ/cm2。 The active energy ray used for exposure is not particularly limited as long as the photosensitive resin composition of the present invention can be cured. The active energy ray-curable resin composition of the present invention is easily hardened by the active energy ray. Specific examples of the active energy rays include electromagnetic waves such as ultraviolet rays, visible light, infrared rays, X-rays, γ-rays, and laser rays, and particle beams such as α-rays, β-rays, and electron beams. Considering the preferred use of the present invention, among them, ultraviolet rays, laser rays, visible rays, or electron beams are preferred. The exposure amount is not particularly limited, but is preferably 20 to 1,000 mJ / cm 2 .
繼而,利用顯影液去除未曝光部而進行顯影。此處,用於顯影之顯影液可使用有機溶劑,較佳為使用鹼性水溶液。作為可用作顯影液之鹼性水溶液,例如,可列舉:氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸鉀、碳酸氫鈉等無機鹼之水溶液;羥基四甲基銨、羥基四乙基銨等有機鹼之水溶液。可將該等單獨使用或將2種以上組合而使用,又,亦可添加陰離子界面活性劑、陽離子界面活性劑、兩性界面活性劑、非離子界面活性劑等界面活性劑或甲醇、乙醇等水溶性有機溶劑而使用。鹼性水溶液中鹼之濃 度就獲得適當之顯影性之觀點而言,較佳為0.1~5重量%。作為顯影方法,存在浸漬方式及噴淋方式、溢液方式、振動浸漬方式,較佳為噴淋方式。關於顯影液之溫度,較佳為以25~40℃使用。顯影時間根據膜厚或光阻之溶解性而適當決定。 Then, the unexposed part is removed by a developing solution, and development is performed. Here, an organic solvent may be used as a developing solution for development, and an alkaline aqueous solution is preferably used. Examples of the alkaline aqueous solution usable as a developing solution include aqueous solutions of inorganic bases such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, and sodium bicarbonate; hydroxytetramethylammonium, hydroxytetraethylammonium Other organic alkali aqueous solution. These can be used singly or in combination of two or more kinds, and an anionic surfactant, a cationic surfactant, an amphoteric surfactant, a nonionic surfactant, or a water-soluble agent such as methanol or ethanol can be added. Organic solvents. Concentration of alkali in alkaline aqueous solution From the viewpoint of obtaining a suitable developability, the degree is preferably 0.1 to 5% by weight. As the developing method, there are an immersion method and a spray method, an overflow method, and a vibration immersion method, and a spray method is preferable. Regarding the temperature of the developer, it is preferably used at 25 to 40 ° C. The development time is appropriately determined according to the film thickness or the solubility of the photoresist.
為了更確實地進行硬化,視需要亦可進行加熱(烘烤)。於進行烘烤之情形時,烘烤溫度較佳為120~250℃。烘烤時間因加熱機器之種類而異,例如,於在加熱板上進行加熱步驟之情形時,可設為5分鐘~30分鐘,於在烘箱中進行加熱步驟之情形時,可設為30分鐘~90分鐘。亦可使用進行2次以上加熱步驟之階段式烘烤法等。 In order to harden more reliably, you may heat (bake) as needed. In the case of baking, the baking temperature is preferably 120 to 250 ° C. The baking time varies depending on the type of heating machine. For example, when the heating step is performed on a hot plate, it can be set to 5 to 30 minutes. When the heating step is performed in an oven, it can be set to 30 minutes. ~ 90 minutes. A stepwise baking method in which the heating step is performed twice or more can also be used.
作為以上述方式形成之間隔物之膜厚,較佳為0.1μm~8μm,更佳為0.1μm~6μm,尤佳為0.1μm~4μm。 The film thickness of the spacer formed in the above manner is preferably from 0.1 μm to 8 μm, more preferably from 0.1 μm to 6 μm, and even more preferably from 0.1 μm to 4 μm.
該形成方法中所形成之間隔物係並無塗佈不均且具有高度之平坦性,柔軟且塑性變形較小。可較佳地用於液晶顯示元件、有機EL顯示元件等顯示元件。 The spacer system formed in this forming method has no uneven coating, has a high degree of flatness, is soft and has low plastic deformation. It can be preferably used for display elements such as a liquid crystal display element and an organic EL display element.
作為彩色濾光片保護膜,較佳為0.5μm~100μm,更佳為1μm~10μm。 The color filter protective film is preferably 0.5 μm to 100 μm, and more preferably 1 μm to 10 μm.
實施例 Examples
以下,利用實施例對本發明進而詳細地進行說明,但本發明並不受該等實施例限定。又,實施例中,只要並無事先說明,則「份」表示重量份,「%」表示重量%。 Hereinafter, the present invention will be described in more detail using examples, but the present invention is not limited to these examples. In the examples, "part" means parts by weight and "%" means% by weight unless otherwise specified.
軟化點、環氧當量、酸值係利用以下條件進行測定。 The softening point, epoxy equivalent, and acid value were measured under the following conditions.
1)環氧當量:利用依據JISK7236:2001之方法進行測定。 1) Epoxy equivalent: It was measured by the method based on JISK7236: 2001.
2)軟化點:利用依據JISK7234:1986之方法進行測定。 2) Softening point: Measured by a method according to JISK7234: 1986.
3)酸值:利用依據JISK0070:1992之方法進行測定。 3) Acid value: Measured by a method according to JISK0070: 1992.
添加作為環氧樹脂(a)之GTR-1800(日本化藥製造;環氧當量170g/eq)表1中記載量、作為化合物(b)之丙烯酸(略稱AA,Mw=72)表1中記載量、作為化合物(c)之二羥甲基丙酸(略稱DMPA,Mw=134)表1中記載量。添加作為觸媒之三苯基膦3g,並以固形物成分成為反應液之80重量%之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,於100℃反應24小時,獲得反應性環氧羧酸酯化合物(E)溶液。將固形物成分酸值(AV:mgKOH/g)5以下設為反應終點,而進行至下一反應。酸值測定係利用反應溶液進行測定,並換算為固形物成分形式之酸值。 GTR-1800 (manufactured by Nippon Kayaku Co., Ltd .; epoxy equivalent of 170 g / eq) was added as the epoxy resin (a) in the amount described in Table 1, and acrylic acid (abbreviated AA, Mw = 72) as the compound (b) The amount described is the amount described in Table 1 as dimethylolpropionic acid (abbreviated as DMPA, Mw = 134) as the compound (c). Add 3 g of triphenylphosphine as a catalyst, and add propylene glycol monomethyl ether monoacetate as a solvent so that the solid content becomes 80% by weight of the reaction solution, and react at 100 ° C for 24 hours to obtain a reactive epoxy. A solution of a carboxylic acid ester compound (E). The solid content component acid value (AV: mgKOH / g) 5 or less was set as the reaction end point, and it progressed to the next reaction. The acid value is measured using a reaction solution and converted into an acid value in the form of a solid component.
繼而,對反應性環氧羧酸酯化合物(E)溶液添加作為多元酸酐(d)之四氫鄰苯二甲酸酐(略稱THPA)表1記載量,並以相對於固形物成分100重量份成為65重量份之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,加熱至100℃後,進行酸加成反應,而獲得反應性多羧酸化合物(A)溶液。將固形物成分酸值(AV:mgKOH/g)記載於表1中。 Next, to the solution of the reactive epoxy carboxylic acid ester compound (E), tetrahydrophthalic anhydride (abbreviated as THPA) as the polybasic acid anhydride (d) was added in an amount as shown in Table 1, and 100 parts by weight relative to the solid content. Propylene glycol monomethyl ether monoacetate was added as a solvent in an amount of 65 parts by weight, and after heating to 100 ° C, an acid addition reaction was performed to obtain a reactive polycarboxylic acid compound (A) solution. The solid content component acid value (AV: mgKOH / g) is described in Table 1.
添加甲酚酚醛清漆型環氧樹脂EOCN-103S(日本化藥製造,環氧當量200g/eq)表1中記載量、作為化合物(b)之丙烯酸表1中記載量、作為化合物(c)之二羥甲基丙酸(略稱DMPA,Mw=134)表1中記載量。添 加作為觸媒之三苯基膦3g,並以固形物成分成為反應液之80重量%之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,於100℃反應24小時,獲得羧酸酯化合物溶液。將固形物成分酸值(AV:mgKOH/g)5mgKOH/g以下設為反應終點,而進行至下一反應。 Add the cresol novolac epoxy resin EOCN-103S (manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 200g / eq) as the amount shown in Table 1, the amount shown in Table 1 as the acrylic acid compound (b), and Dimethylolpropionic acid (abbreviated as DMPA, Mw = 134). add Add 3 g of triphenylphosphine as a catalyst, and add propylene glycol monomethyl ether monoacetate as a solvent so that the solid content becomes 80% by weight of the reaction solution, and react at 100 ° C for 24 hours to obtain a carboxylic acid ester compound. Solution. The solid component content acid value (AV: mgKOH / g) is 5 mgKOH / g or less as the end point of the reaction, and the process proceeds to the next reaction.
繼而,對反應性環氧羧酸酯化合物溶液添加作為多元酸酐之四氫鄰苯二甲酸酐(略稱THPA)表1記載量,並以相對於固形物成分100重量份成為65重量份之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,加熱至100℃後,進行酸加成反應,而獲得比較用反應性多羧酸化合物溶液。將固形物成分酸值(AV:mgKOH/g)記載於表1中。 Next, tetrahydrophthalic anhydride (abbreviated as THPA) as a polybasic acid anhydride was added to the reactive epoxy carboxylic acid ester compound solution in the amount described in Table 1, and it was set to 65 parts by weight based on 100 parts by weight of the solid component. As a solvent, propylene glycol monomethyl ether monoacetate was added, and after heating to 100 ° C, an acid addition reaction was performed to obtain a comparative reactive polycarboxylic acid compound solution. The solid content component acid value (AV: mgKOH / g) is described in Table 1.
添加甲酚酚醛清漆型環氧樹脂EOCN-103S(日本化藥製造,環氧當量200g/eq)200g、丙烯酸58g、二羥甲基丙酸40g、作為觸媒之三苯基膦3g,並以固形物成分成為反應液之80重量%之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,於100℃反應24小時。進而,添加ε-己內酯68g,反應8小時。繼而,添加作為多元酸酐之四氫鄰苯二甲酸酐(略稱THPA)91g,並以相對於固形物成分100重量份成為65重量份之方式添加作為溶劑之丙二醇單甲醚單乙酸酯,加熱至100℃後,進行酸加成反應,而獲得比較用反應性己內酯改質多羧酸化合物溶液。固形物成分酸值(AV:mgKOH/g)為70mgKOH/g。 Add 200g of cresol novolac epoxy resin EOCN-103S (manufactured by Nippon Kayaku, epoxy equivalent 200g / eq), 58g of acrylic acid, 40g of dimethylolpropionic acid, and 3g of triphenylphosphine as catalyst. Propylene glycol monomethyl ether monoacetate was added as a solvent so that the solid content became 80% by weight of the reaction solution, and the mixture was reacted at 100 ° C for 24 hours. Furthermore, 68 g of ε-caprolactone was added and reacted for 8 hours. Then, 91 g of tetrahydrophthalic anhydride (abbreviated as THPA) as a polybasic acid anhydride was added, and propylene glycol monomethyl ether monoacetate was added as a solvent so that 100 parts by weight of the solid content became 65 parts by weight. After heating to 100 ° C, an acid addition reaction was performed to obtain a comparative reactive caprolactone modified polycarboxylic acid compound solution. The acid value (AV: mgKOH / g) of the solid content was 70 mgKOH / g.
再者,表1中之數值之單位為g(克)。 The unit of the numerical values in Table 1 is g (gram).
又,將實施例及比較例中使用之各成分之詳細情況示於以下。 The details of each component used in the examples and comparative examples are shown below.
B-1:二新戊四醇六丙烯酸酯與二新戊四醇五丙烯酸酯之混合物(KAYARAD DPHA,日本化藥製造) B-1: A mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (KAYARAD DPHA, manufactured by Nippon Kayaku)
C-1:乙酮-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯基肟)(Irgacure OXE02,BASF公司製造) C-1: Ethyl ketone-1- [9-ethyl-6- (2-methylbenzylidene) -9H-carbazol-3-yl] -1- (O-acetamidooxime) (Irgacure (OXE02, manufactured by BASF)
PGMEA:丙二醇單甲醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate
DEGDM:二乙二醇二甲醚 DEGDM: Diethylene glycol dimethyl ether
H-1:聚矽氧系界面活性劑(Dow Corning Toray Silicones公司製造,SH8400FLUID) H-1: Polysiloxane surfactant (manufactured by Dow Corning Toray Silicones, SH8400FLUID)
對含有相當於作為反應性多羧酸化合物(A)之實施例1-1中所獲得之反應物100重量份(固形物成分)之量的溶液,添加作為反應性化合物(B)之(B-1)100重量份、作為光聚合起始劑(C)之(C-1)10重量份,並以成為所需之固形物成分濃度之方式添加作為有機溶劑之PGMEA、DEGDM,混合作為界面活性劑(H)之(H-1)0.3重量份,利用孔徑0.2μm之薄膜過濾器進行過濾,藉此製備該組成物(S-1)。再者,表2中之有機溶劑之數值為PGMEA與DEGDM之質量比。 To a solution containing an amount equivalent to 100 parts by weight (solid content) of the reactant obtained in Example 1-1 as a reactive polycarboxylic acid compound (A), (B) as a reactive compound (B) was added -1) 100 parts by weight, (C-1) 10 parts by weight as a photopolymerization initiator (C), PGMEA and DEGDM as organic solvents are added so as to have a desired solid content concentration, and mixed as an interface This composition (S-1) was prepared by filtering 0.3 parts by weight of (H-1) of the active agent (H) through a membrane filter having a pore size of 0.2 μm. In addition, the numerical value of the organic solvent in Table 2 is the mass ratio of PGMEA to DEGDM.
使各成分之種類及摻合量如表2中記載般,除此以外,與實施例2-1同樣地進行操作,製備實施例2-2~2-3及比較例2-1~2-3之組成物。再者,表2中之有機溶劑之數值為PGMEA與DEGDM之質量比。 Except that the types and blending amounts of each component were as described in Table 2, the same operations as in Example 2-1 were performed to prepare Examples 2-2 to 2-3 and Comparative Examples 2-1 to 2- Composition of 3. In addition, the numerical value of the organic solvent in Table 2 is the mass ratio of PGMEA to DEGDM.
對實施例2-1~2-3及比較例2-1~2-3之組成物、及由該等之塗膜形成之間隔物進行下述之評價。將評價結果一併示於表3。 The compositions of Examples 2-1 to 2-3 and Comparative Examples 2-1 to 2-3 and the spacers formed from these coating films were evaluated as described below. The evaluation results are shown in Table 3.
使用E型黏度計(東機產業股份有限公司製造,TV-200),測定25℃各組成物之黏度(mPa‧s)。 Using an E-type viscosity meter (manufactured by Toki Sangyo Co., Ltd., TV-200), the viscosity (mPa‧s) of each composition at 25 ° C was measured.
精確稱量該組成物0.3g置於氧化鋁皿中,添加二乙二醇二甲醚約1g,此後於加熱板上以175℃乾燥60分鐘,根據乾燥前後之重量求該組成物中之固形物成分濃度(質量%)。 Accurately weigh 0.3g of the composition and put it in an alumina dish, add about 1g of diethylene glycol dimethyl ether, and then dry it on a hot plate at 175 ° C for 60 minutes. Determine the solid form of the composition according to the weight before and after drying Concentration (mass%) of the substance.
將該組成物使用狹縫式模具塗佈機(Technomachine股份有限公司製造,理化模具)塗佈於100×100mm之鉻成膜玻璃上,減壓至0.5Torr進行乾燥,此後於加熱板上以100℃預烘烤2分鐘形成塗膜,進而以200mJ/cm2之曝光量進行曝光,藉此形成自鉻成膜玻璃之上表面起膜厚為4μm之膜。於鈉燈下,利用肉眼對該塗膜進行外觀觀察。此時,研究塗膜整體之條狀斑(塗佈方向或與塗佈方向交叉之方向上形成之一條或複數條直線狀斑)、霧狀斑(雲狀之斑)、梢跡斑(基板支持梢上形成之點狀斑)之出現狀況。將該等斑均幾乎不可見之情形判斷為「○(良好)」,將一部分稍許可見之情形判斷為「△(稍微不良)」,將清晰可見之情形判斷為「×(不良)」。 This composition was applied to a 100 × 100 mm chromium film-forming glass using a slit die coater (manufactured by Technomachine Co., Ltd., and a physical and chemical mold), and the pressure was reduced to 0.5 Torr to dry. Pre-bake at 2 ° C for 2 minutes to form a coating film, and then perform exposure at an exposure amount of 200 mJ / cm 2 to form a film having a thickness of 4 μm from the upper surface of the chromium film-forming glass. The appearance of the coating film was observed with the naked eye under a sodium lamp. At this time, the stripe spots (one or a plurality of linear spots formed in the coating direction or the direction intersecting the coating direction), haze spots (cloud-like spots), and trail spots (substrate) Support the appearance of punctate spots on the tip). A case where these spots are hardly visible is judged as "○ (good)", a part of which is slightly permissible is judged as "△ (slightly bad)", and a case where it is clearly visible is judged as "x (bad)".
使用針接觸式測定機(東京精密股份有限公司製造,Surfcom)測定以 上述方式製造而成之鉻成膜玻璃上之塗膜之膜厚。膜厚均勻性係測定9個測定點處之膜厚並根據下述式進行計算而獲得。9個測定點係於將基板之短軸方向設為X、將長軸方向設為Y時,(X[mm]、Y[mm])為(50,10)、(50,20)、(50,30)、(50,40)、(50,50)、(50,60)、(50,70)、(50,80)、(50,90)。於膜厚均勻性為2%以下之情形時,膜厚均勻性可判斷為良好。 Using a pin contact measuring machine (manufactured by Tokyo Precision Co., Ltd., Surfcom), The film thickness of the coating film on the chromium film-forming glass manufactured in the above manner. The film thickness uniformity was obtained by measuring the film thickness at 9 measurement points and calculating it according to the following formula. The nine measurement points are when the short axis direction of the substrate is set to X and the long axis direction is set to Y. (X [mm], Y [mm]) is (50, 10), (50, 20), ( 50, 30), (50, 40), (50, 50), (50, 60), (50, 70), (50, 80), (50, 90). When the film thickness uniformity is 2% or less, the film thickness uniformity can be judged to be good.
膜厚均勻性(%)={FT(X,Y)max-FT(X,Y)min}×100/{2×FT(X,Y)avg.} Film thickness uniformity (%) = {FT (X, Y) max-FT (X, Y) min} × 100 / {2 × FT (X, Y) avg.}
上述式中,FT(X,Y)max為9個測定點處之膜厚中之最大值,FT(X,Y)min為9個測定點處之膜厚中之最小值,FT(X,Y)avg.為9個測定點處之膜厚中之平均值。 In the above formula, FT (X, Y) max is the maximum value of the film thickness at 9 measurement points, FT (X, Y) min is the minimum value of the film thickness at 9 measurement points, and FT (X, Y, Y) avg. Is the average of the film thicknesses at 9 measurement points.
使用狹縫式塗佈機塗佈於100mm×100mm之無鹼玻璃基板上,作為塗佈條件,以基底與噴嘴之距離150μm、曝光後之膜厚成為2.5μm之方式自噴嘴噴出塗佈液,將噴嘴之移動速度於120mm/sec.~200mm/sec.之範圍內變動,求出不產生因斷液形成之條狀斑之最大速度。此時,於即便為180mm/sec.以上之速度亦不產生條狀斑之情形時,可判斷為可因應高速塗佈。 Use a slit coater to apply on a 100mm × 100mm alkali-free glass substrate. As a coating condition, spray the coating solution from the nozzle so that the distance between the substrate and the nozzle is 150 μm and the film thickness after exposure becomes 2.5 μm. The moving speed of the nozzle was varied within a range of 120 mm / sec. To 200 mm / sec., And the maximum speed at which no streaks caused by the liquid cutoff were generated was obtained. At this time, when no streaks are generated even at a speed of 180 mm / sec. Or more, it can be determined that high-speed coating can be applied.
使用旋轉塗佈法將該組成物塗佈於100mm×100mm之經ITO濺鍍之玻璃基板上,此後,於90℃之加熱板上預烘烤3分鐘,藉此形成膜厚3.5μm之塗膜。繼而,使用紫外線曝光裝置(Oak製作所股份有限公司,型號HMW-680GW)對所獲得之塗膜介隔形成有直徑12μm之圓形圖案作為開口部 之光罩進行曝光。此後,利用0.05質量%氫氧化鉀水溶液於25℃顯影60秒鐘,此後利用純水洗淨1分鐘,進而於230℃之烘箱中後烘烤30分鐘,藉此形成由圖案狀被膜形成之間隔物。此時,研究後烘烤後之殘膜率(後烘烤後之被膜之膜厚×100/曝光後(後烘烤前)膜厚)為90%以上之最小曝光量,將該值作為感度。於該值為55mJ/cm2以下之情形時,可謂感度良好。 This composition was coated on a 100 mm × 100 mm ITO sputtered glass substrate by a spin coating method, and thereafter, pre-baked on a hot plate at 90 ° C. for 3 minutes, thereby forming a coating film having a thickness of 3.5 μm. . Next, a UV mask (Oak Manufacturing Co., Ltd., model HMW-680GW) was used to expose the obtained coating film through a mask formed with a circular pattern having a diameter of 12 μm as an opening. Thereafter, it was developed with a 0.05% by mass potassium hydroxide aqueous solution at 25 ° C for 60 seconds, and then washed with pure water for 1 minute, and then baked in an oven at 230 ° C for 30 minutes, thereby forming a space formed by a patterned film. Thing. At this time, the minimum exposure amount after the post-bake residual film rate (film thickness of the post-bake film × 100 / film thickness after exposure (before-bake)) was 90% or more, and this value was used as the sensitivity. . When the value is 55 mJ / cm 2 or less, the sensitivity is good.
又,藉由目視對基板上表面進行觀察,確認有無殘留物。評價基準如下。 In addition, the upper surface of the substrate was visually observed to confirm the presence or absence of residues. The evaluation criteria are as follows.
○…無殘留物。 ○ ... No residue.
△…稍有殘留物。 △ ... Slight residue.
×…殘留物較多。 × ... There are many residues.
將曝光量設為相當於上述放射線感度之評價中決定之感度的曝光量,除此以外,與放射線感度之評價同樣地進行操作,而於基板上形成由圓柱狀圖案形成之間隔物。此時,以後烘烤後之圖案底部之直徑成為20μm之方式變更曝光時所介隔之光罩之直徑。對該間隔物,使用微小壓縮試驗機(Fischerscope H100C,Fischer Instruments股份有限公司製造),使用50μm見方之平面壓頭以50mN之荷重進行壓縮試驗,測定對應荷重之壓縮位移量之變化,並由50mN荷重時之位移量與撤去50mN荷重時之位移量算出恢復率(%)。此時,於恢復率為70%以上、且50mN荷重時之位移為0.15μm以上之情形時,該間隔物可謂具有具備較高恢復率及柔軟性兩者的壓縮性能。 Except that the exposure amount was equivalent to the sensitivity determined in the above-mentioned evaluation of the radiation sensitivity, a spacer formed by a cylindrical pattern was formed on the substrate in the same manner as in the evaluation of the radiation sensitivity. At this time, the diameter of the bottom of the pattern after the baking is changed to 20 μm so that the diameter of the photomask interposed during exposure is changed. The spacer was subjected to a compression test using a micro compression tester (Fischerscope H100C, manufactured by Fischer Instruments Co., Ltd.) using a 50 μm square flat indenter at a load of 50 mN, and the change in the amount of compression displacement corresponding to the load was measured, and the change was made from 50 mN The amount of displacement at the load and the amount of displacement when the 50mN load is removed are used to calculate the recovery rate (%). At this time, when the recovery rate is 70% or more and the displacement at a load of 50 mN is 0.15 μm or more, the spacer can be said to have compressive properties having both a high recovery rate and flexibility.
使用旋轉塗佈機塗佈於50mm×50mm之無鹼玻璃基板上,減壓至0.5Torr進行乾燥後,於加熱板上以100℃預烘烤2分鐘而形成塗膜,進而以200mJ/cm2之曝光量進行曝光,藉此形成膜厚4μm之膜。使用霧度計(日本電色工業股份有限公司製造,TC-H3DPK)對具有上述硬化塗膜之評價基板進行測定。 It was coated on a 50mm × 50mm alkali-free glass substrate using a spin coater, reduced to 0.5 Torr, and dried, and then pre-baked on a hot plate at 100 ° C for 2 minutes to form a coating film, and then 200 mJ / cm 2 The film was exposed at an exposure amount to form a film having a thickness of 4 μm. The evaluation substrate having the cured coating film was measured using a haze meter (manufactured by Nippon Denshoku Industries Co., Ltd., TC-H3DPK).
對具有上述硬化塗膜之評價基板進行250℃×1hr熱處理,使用分光光度計(日立製作所股份有限公司製造,U-3310)測定400nm、540nm之波長光之透過率。 The evaluation substrate having the above-mentioned cured coating film was subjected to a heat treatment at 250 ° C. for 1 hour, and the transmittance of light having a wavelength of 400 nm and 540 nm was measured using a spectrophotometer (manufactured by Hitachi, Ltd., U-3310).
根據上述結果可明確:實施例2-1~2-3之本發明之含有反應性多羧酸化合物(A)之活性能量線硬化型組成物與比較例2-1~2-3之組成物相比,顯影性、硬化性良好,耐熱透明性、平坦性、柔軟性、強韌性優異。又,反應性多羧酸(A)之製備中亦使用DMPA(c)之實施例2-1與實施例2-2與實施例2-3相比,可見具有更優異之壓縮性能。 From the above results, it is clear that the active energy ray-curable composition containing the reactive polycarboxylic acid compound (A) of the present invention of Examples 2-1 to 2-3 and the composition of Comparative Examples 2-1 to 2-3 In contrast, it has good developability and hardenability, and is excellent in heat-resistant transparency, flatness, flexibility, and toughness. In addition, Example 2-1 and Example 2-2 and Example 2-3 in which DMPA (c) was also used in the preparation of the reactive polycarboxylic acid (A) showed that it had more excellent compression performance.
參照特定態樣對本發明詳細地進行說明,但對從業者而言很明確,可不偏離本發明之精神及範圍而進行各種變更及修正。 The present invention is described in detail with reference to specific aspects, but it is clear to practitioners that various changes and modifications can be made without departing from the spirit and scope of the present invention.
再者,本申請案係基於2013年11月28日提出申請之日本專利申請案(日本特願2013-246535),並藉由引用而援用其整體。又,此處所引用之所有參照係以整體之形式併入。 Furthermore, this application is based on a Japanese patent application filed on November 28, 2013 (Japanese Patent Application No. 2013-246535), and the entirety thereof is incorporated by reference. Also, all references cited herein are incorporated as a whole.
本發明之活性能量線硬化型組成物係顯影性、硬化性、高速塗佈性良好,可形成耐熱透明性、平坦性、柔軟性、強韌性優異之顯示元件用間隔物及彩色濾光片保護膜。因此,該組成物適合作為用以形成液晶顯示元件、有機EL等顯示元件用之間隔物、彩色濾光片保護膜的材料。 The active energy ray-curable composition of the present invention has good developability, hardenability, and high-speed coating properties, and can form a spacer for a display element and color filter protection which are excellent in heat resistance transparency, flatness, flexibility, and toughness. membrane. Therefore, this composition is suitable as a material for forming a spacer for a display element such as a liquid crystal display element, an organic EL, and a color filter protective film.
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JP2582883B2 (en) * | 1988-12-27 | 1997-02-19 | タムラ化研株式会社 | Photosensitive resin composition |
JP2582884B2 (en) * | 1988-12-27 | 1997-02-19 | タムラ化研株式会社 | Photosensitive resin composition |
JPH02209912A (en) * | 1989-02-10 | 1990-08-21 | Nippon Kayaku Co Ltd | Unsaturated group-containing polycarboxylic resin, resin composition containing same and solder resist resin composition |
JP2676422B2 (en) * | 1990-06-19 | 1997-11-17 | 富士写真フイルム株式会社 | Photocurable resin composition |
JP4150236B2 (en) | 2002-09-20 | 2008-09-17 | 太陽インキ製造株式会社 | Photosensitive resin composition and method for forming spacer or color filter using the same |
JP4276923B2 (en) * | 2003-02-27 | 2009-06-10 | 富士フイルム株式会社 | Photocurable colored resin composition and color filter using the same |
JP3901658B2 (en) | 2003-03-31 | 2007-04-04 | 太陽インキ製造株式会社 | Active energy ray-curable resin, composition using the same, and cured product |
JP4837315B2 (en) | 2005-06-29 | 2011-12-14 | 凸版印刷株式会社 | Photosensitive resin composition for photospacer and color filter for liquid crystal display device using the same |
JPWO2008004630A1 (en) * | 2006-07-06 | 2009-12-03 | 日本化薬株式会社 | Active energy ray-curable optical composition and high refractive index resin |
CN101548203B (en) * | 2007-06-11 | 2012-03-07 | 三菱化学株式会社 | Photosensitive color resin composition for color filter, color filter, liquid crystal display, and organic el display |
JP5264691B2 (en) * | 2009-12-14 | 2013-08-14 | 日本化薬株式会社 | Photosensitive resin and photosensitive resin composition containing the same |
JP6184087B2 (en) * | 2012-12-07 | 2017-08-23 | 日本化薬株式会社 | Active energy ray curable resin composition, and display element spacer and / or color filter protective film using the same |
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2014
- 2014-11-26 JP JP2015550956A patent/JP6506175B2/en active Active
- 2014-11-26 KR KR1020167007118A patent/KR102255619B1/en active IP Right Grant
- 2014-11-26 WO PCT/JP2014/081221 patent/WO2015080146A1/en active Application Filing
- 2014-11-26 CN CN201480063612.3A patent/CN105745576B/en active Active
- 2014-11-28 TW TW103141305A patent/TWI627503B/en not_active IP Right Cessation
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TW201227173A (en) * | 2010-12-24 | 2012-07-01 | Cheil Ind Inc | Photosensitive resin composition and color filter using the same |
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Publication number | Publication date |
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CN105745576A (en) | 2016-07-06 |
TW201527884A (en) | 2015-07-16 |
WO2015080146A1 (en) | 2015-06-04 |
JP6506175B2 (en) | 2019-04-24 |
KR102255619B1 (en) | 2021-05-25 |
JPWO2015080146A1 (en) | 2017-03-16 |
KR20160090282A (en) | 2016-07-29 |
CN105745576B (en) | 2019-12-17 |
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