TWI626439B - Defect inspection system - Google Patents

Defect inspection system Download PDF

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Publication number
TWI626439B
TWI626439B TW103120087A TW103120087A TWI626439B TW I626439 B TWI626439 B TW I626439B TW 103120087 A TW103120087 A TW 103120087A TW 103120087 A TW103120087 A TW 103120087A TW I626439 B TWI626439 B TW I626439B
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TW
Taiwan
Prior art keywords
film
defect inspection
mask
defect
inspection system
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TW103120087A
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Chinese (zh)
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TW201502495A (en
Inventor
末松綾子
井村圭太
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日商住友化學股份有限公司
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Publication of TW201502495A publication Critical patent/TW201502495A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/02Mechanical

Abstract

一種缺陷檢查系統,係包括:搬送路線,搬送長條帶狀薄膜;缺陷檢查裝置,針對搬送路線所搬送的薄膜進行缺陷檢查;及記錄裝置(13),於搬送路線所搬送的薄膜(F105)上記錄缺陷檢查結果所得缺陷資訊;其中,記錄裝置(13)具備印刷頭(13a),於沿著薄膜(F105)端緣部的記錄區域(S)中藉由噴出墨水(i)來印刷缺陷資訊;及遮罩(30),防止墨水(i)附著於薄膜(F105)至少較記錄區域(S)靠內側區域上。 A defect inspection system includes: a conveying route for conveying a long strip-shaped film; a defect inspection device for performing defect inspection on the film conveyed on the conveying route; and a recording device (13) for the film conveying on the conveying route (F105) The defect information obtained from the result of the defect inspection is recorded thereon; wherein the recording device (13) is provided with a print head (13a), and the defect is printed by ejecting ink (i) in a recording area (S) along the edge of the film (F105). Information; and a mask (30) to prevent the ink (i) from adhering to the film (F105) at least on the inner area than the recording area (S).

Description

缺陷檢查系統 Defect inspection system

本發明係關於一種缺陷檢查系統。 The invention relates to a defect inspection system.

本申請案依據2013年6月12日提出申請之日本發明專利申請案2013-124040號主張優先權,並在此引用其內容。 This application claims priority based on Japanese Invention Patent Application No. 2013-124040 filed on June 12, 2013, and the contents are incorporated herein by reference.

舉例而言,偏光板等光學薄膜係於異物缺陷或凹凸缺陷等缺陷檢查後捲收於芯材外圍。而關於缺陷位置或種類的資訊(以下稱為缺陷資訊)係透過於光學薄膜端部印刷條碼或標明缺陷位置,藉此記錄於光學薄膜上。捲收於芯材之光學薄膜,當其捲收量達到一定程度時,係自上游側的光學薄膜切離並視為料捲滾筒出貨。舉例而言,專利文獻1中係揭露一種缺陷檢查系統,其於光學薄膜搬送路線上具備缺陷檢查裝置與將缺陷資訊記錄於薄膜上之記錄裝置。 For example, an optical film such as a polarizing plate is rolled up around the core material after a defect inspection such as a foreign object defect or a bump defect. The information about the position or type of the defect (hereinafter referred to as defect information) is recorded on the optical film by printing a barcode or marking the position of the defect on the end of the optical film. When the optical film rolled up in the core material reaches a certain level, it is cut off from the upstream optical film and treated as a roll for shipment. For example, Patent Document 1 discloses a defect inspection system including a defect inspection device and a recording device for recording defect information on a film on an optical film conveyance route.

【先行技術文獻】 [Advanced technical literature] 【專利文獻】 [Patent Literature]

【專利文獻1】日本發明專利特開2011-7779號公報 [Patent Document 1] Japanese Patent Publication No. 2011-7779

但在上述缺陷檢查系統中,當缺陷資訊記錄於光學薄膜上時, 會因印刷頭噴出之墨水飛濺至四周,導致光學薄膜產生污染。而此光學薄膜污染係造成光學薄膜良率下降的原因之一。 However, in the above defect inspection system, when defect information is recorded on an optical film, The ink from the print head will splash around, which will cause pollution of the optical film. And this optical film contamination is one of the reasons for the decline in the yield of the optical film.

缺陷檢查系統中,光學薄膜與印刷頭間的距離越遠,則墨水飛濺影響越大。但若縮小光學薄膜與印刷頭間的距離,則會影響印刷字體大小等,所以無法隨意調整該距離。 In a defect inspection system, the farther the distance between the optical film and the print head, the greater the ink splash effect. However, if the distance between the optical film and the print head is reduced, the size of the printed font will be affected, so the distance cannot be adjusted at will.

有鑑於此,本發明態樣係提供一種缺陷檢查系統,其目的在於防止缺陷資訊記錄於薄膜上時的墨水飛濺所產生之薄膜污染。 In view of this, the present invention provides a defect inspection system, the purpose of which is to prevent film contamination caused by ink splashing when defect information is recorded on the film.

為達成本發明之目的,本發明態樣之缺陷檢查系統係採用以下結構。 In order to achieve the purpose of the present invention, the defect inspection system of the present invention adopts the following structure.

(1)本發明一態樣之缺陷檢查系統,係包括:搬送路線,搬送長條帶狀薄膜;缺陷檢查裝置,針對該搬送路線所搬送的薄膜進行缺陷檢查;及記錄裝置,於該搬送路線所搬送的薄膜上記錄該缺陷檢查結果所得缺陷資訊;其中,該記錄裝置具備:印刷頭,於沿著該薄膜端緣部的記錄區域中藉由噴出墨水來印刷該缺陷資訊;及遮罩,防止墨水附著於該薄膜至少較該記錄區域靠內側區域上。 (1) A defect inspection system according to one aspect of the present invention includes: a conveying route for conveying a long strip film; a defect inspection device for performing defect inspection on the film conveyed by the conveying route; and a recording device for the conveying route The defect information obtained by the defect inspection result is recorded on the transported film; wherein the recording device includes: a print head that prints the defect information by ejecting ink in a recording area along the edge of the film; The ink is prevented from adhering to the film at least on the inner region from the recording region.

(2)上述(1)所述態樣中,其中,該遮罩於該薄膜與該印刷頭相對的空間中,具備第一側板部,包覆至少面向該薄膜之內側的一側。 (2) In the aspect described in (1) above, the mask is provided in a space of the film opposite to the print head, and includes a first side plate portion that covers at least a side facing the inside of the film.

(3)上述(2)所述態樣中,其中,該遮罩於該空間中具備第二側板部,包覆面向該薄膜之搬送方向上游側的一側;及第三側板部,包覆面向該薄膜之搬送方向下游側的一側。 (3) In the aspect described in (2) above, the mask includes a second side plate portion in the space to cover a side facing an upstream side of the film in the conveying direction; and a third side plate portion to cover The side facing the downstream side of the film in the conveying direction.

(4)上述(3)所述態樣中,其中,該遮罩於該空間中具備第四側板部,包覆面向該薄膜之外側的一側。 (4) In the aspect described in (3) above, the mask includes a fourth side plate portion in the space and covers a side facing the outer side of the film.

(5)上述(1)-(4)任一項所述態樣中,其中,該遮罩相對該薄膜的一面與該薄膜的表面之間的間隔係為1mm以下。 (5) In the aspect described in any one of (1) to (4) above, a distance between a side of the mask opposite the film and a surface of the film is 1 mm or less.

(6)上述(1)-(5)任一項所述態樣中,其中,該遮罩相對於該印刷頭自由拆裝。 (6) In the aspect described in any one of (1) to (5) above, the mask is freely attachable to and detachable from the print head.

(7)上述(1)所述態樣中,其中,該遮罩係於靠近該薄膜的狀態下與該薄膜相對地配置,並且該遮罩俯視該記錄區域的位置係具備窗口部。 (7) In the aspect described in (1) above, the mask is disposed opposite the film in a state close to the film, and the mask is provided with a window portion in a position overlooking the recording area.

(8)上述(1)-(7)任一項所述態樣中,其中,缺陷檢查系統於該薄膜的搬送方向上,較該記錄裝置更靠上游側的位置,係具備靜電去除裝置,去除該薄膜之表面的靜電。 (8) In the aspect described in any one of (1) to (7) above, the defect inspection system is provided with a static electricity removing device on the upstream side of the film in the conveying direction of the film, Remove static electricity from the surface of the film.

透過本發明態樣,係可提供一種缺陷檢查系統,於薄膜記錄缺陷資訊時防止墨水飛濺所產生的薄膜污染。 According to aspects of the present invention, a defect inspection system can be provided to prevent film contamination caused by ink splashes when the film records defect information.

10‧‧‧缺陷檢查系統 10‧‧‧ Defect inspection system

11‧‧‧第一缺陷檢查裝置 11‧‧‧The first defect inspection device

12‧‧‧第二缺陷檢查裝置 12‧‧‧Second Defect Inspection Device

13‧‧‧記錄裝置 13‧‧‧Recording device

13a‧‧‧印刷頭 13a‧‧‧Print head

14‧‧‧第一測長器 14‧‧‧The first length measuring device

15‧‧‧第二測長器 15‧‧‧Second length measuring device

16‧‧‧控制裝置 16‧‧‧Control device

21a,22a‧‧‧照明部 21a, 22a‧‧‧Lighting Department

23a,24a,25a‧‧‧照明部 23a, 24a, 25a‧‧‧Lighting Department

21b,22b‧‧‧光檢測部 21b, 22b ‧‧‧Light detection department

23b,24b,25b‧‧‧光檢測部 23b, 24b, 25b ‧‧‧Light detection department

30‧‧‧遮罩 30‧‧‧Mask

30a‧‧‧第一側板部 30a‧‧‧First side plate

30b‧‧‧第二側板部 30b‧‧‧Second side plate section

30c‧‧‧第三側板部 30c‧‧‧The third side plate

30d‧‧‧第四側板部 30d‧‧‧Fourth side plate

31‧‧‧遮罩 31‧‧‧Mask

32‧‧‧遮罩 32‧‧‧Mask

32a‧‧‧窗口部 32a‧‧‧Window Department

40‧‧‧靜電去除裝置 40‧‧‧ static elimination device

41‧‧‧導輪 41‧‧‧Guide Wheel

100‧‧‧薄膜製造裝置 100‧‧‧ film manufacturing equipment

101‧‧‧第一搬送路線 101‧‧‧ the first transfer route

102‧‧‧第二搬送路線 102‧‧‧Second Transfer Route

103‧‧‧第三搬送路線 103‧‧‧ Third Transfer Route

104‧‧‧第四搬送路線 104‧‧‧Fourth transfer route

105‧‧‧第五搬送路線 105‧‧‧Fifth transfer route

106‧‧‧捲收部 106‧‧‧Receiving Department

111a,111b‧‧‧第一壓輪 111a, 111b‧‧‧The first pressure wheel

112‧‧‧第一儲料器 112‧‧‧The first stocker

112a,112b‧‧‧第一張力調節輪 112a, 112b‧‧‧The first tension adjustment wheel

113‧‧‧第一導輪 113‧‧‧first guide wheel

121a,121b‧‧‧第二壓輪 121a, 121b‧‧‧Second pressure wheel

122‧‧‧第二儲料器 122‧‧‧Second stocker

122a,122b‧‧‧第二張力調節輪 122a, 122b‧‧‧Second tension adjustment wheel

123a,123b‧‧‧第二導輪 123a, 123b‧‧‧Second guide wheel

131a,131b‧‧‧第三壓輪 131a, 131b

141a,141b‧‧‧第四壓輪 141a, 141b ‧‧‧ Fourth pressure wheel

142‧‧‧第三儲料器 142‧‧‧Third Stocker

142a,142b‧‧‧第三張力調節輪 142a, 142b‧‧‧Third tension adjusting wheel

143a,143b‧‧‧第四導輪 143a, 143b ‧‧‧ Fourth guide wheel

151a,151b‧‧‧第五壓輪 151a, 151b‧‧‧Fifth pressure wheel

151c,151d‧‧‧第六壓輪 151c, 151d‧ Sixth pressure wheel

152‧‧‧第四儲料器 152‧‧‧Fourth stocker

152a,152b‧‧‧第四張力調節輪 152a, 152b‧‧‧ Fourth tension adjusting wheel

153a‧‧‧第五導輪 153a‧‧‧Fifth guide wheel

153b‧‧‧第六導輪 153b‧‧‧Sixth guide wheel

F11‧‧‧第一光學薄膜 F11‧‧‧The first optical film

F12‧‧‧第二光學薄膜 F12‧‧‧Second Optical Film

F13‧‧‧第三光學薄膜 F13‧‧‧The third optical film

F4‧‧‧基材層片 F4‧‧‧ substrate ply

F4a‧‧‧偏光片 F4a‧‧‧Polarizer

F4b‧‧‧保護薄膜 F4b‧‧‧protective film

F4c‧‧‧保護薄膜 F4c‧‧‧protective film

F5‧‧‧黏著層 F5‧‧‧Adhesive layer

F6‧‧‧分隔層片 F6‧‧‧ separator layer

F7‧‧‧表面保護層片 F7‧‧‧Surface protective layer

F8‧‧‧貼合層片 F8‧‧‧ Laminated sheet

F1X‧‧‧光學薄膜 F1X‧‧‧Optical Film

F10X‧‧‧光學薄膜 F10X‧‧‧Optical Film

F101‧‧‧第一薄膜 F101‧‧‧First film

F102‧‧‧第二薄膜 F102‧‧‧Second film

F103‧‧‧第三薄膜 F103‧‧‧ Third film

F104‧‧‧單面貼合薄膜 F104‧‧‧Single-sided laminating film

F105‧‧‧雙面貼合薄膜 F105‧‧‧Double-sided laminating film

FX‧‧‧光學層片 FX‧‧‧Optical Layer

G‧‧‧邊框部 G‧‧‧Frame section

i‧‧‧墨水 i‧‧‧ ink

K‧‧‧空間 K‧‧‧ space

L‧‧‧搬送路線 L‧‧‧ transport route

P‧‧‧液晶顯示面板 P‧‧‧LCD panel

P1‧‧‧第一基板 P1‧‧‧First substrate

P2‧‧‧第二基板 P2‧‧‧Second substrate

P3‧‧‧液晶層 P3‧‧‧LCD layer

P4‧‧‧顯示區域 P4‧‧‧display area

R1‧‧‧第一料捲滾筒 R1‧‧‧The first roll

R2‧‧‧第二料捲滾筒 R2‧‧‧Second Roller

R3‧‧‧第三料捲滾筒 R3‧‧‧The third roll

S‧‧‧記錄區域 S‧‧‧Recording area

T‧‧‧間隔 T‧‧‧ interval

第1圖係液晶顯示面板的一實施例之俯視圖。 FIG. 1 is a plan view of an embodiment of a liquid crystal display panel.

第2圖係第1圖所示液晶顯示面板的剖面圖。 FIG. 2 is a cross-sectional view of the liquid crystal display panel shown in FIG. 1. FIG.

第3圖係光學薄膜的一實施例之剖面圖。 Fig. 3 is a cross-sectional view of an embodiment of an optical film.

第4圖係薄膜製造裝置與缺陷檢查系統的結構之側視圖。 Fig. 4 is a side view showing the structures of a thin film manufacturing apparatus and a defect inspection system.

第5A圖係自薄膜之上方側觀看遮罩的一實施例之俯視圖。 Fig. 5A is a plan view of an embodiment of the mask viewed from the upper side of the film.

第5B圖係自薄膜之上游側觀看遮罩的一實施例之側視圖。 Figure 5B is a side view of an embodiment of the mask viewed from the upstream side of the film.

第5C圖係自薄膜之外側觀看遮罩的一實施例之側視圖。 Figure 5C is a side view of an embodiment of the mask viewed from the outside of the film.

第6圖係遮罩之一變形例的俯視圖。 Fig. 6 is a plan view of a modification of the mask.

第7A圖係遮罩之一變形例的立體圖。 FIG. 7A is a perspective view of a modification of the mask.

第7B圖係遮罩之一變形例的側視圖。 Fig. 7B is a side view of a modification of the mask.

第8A圖係遮罩之另一實施形態的俯視圖。 Fig. 8A is a plan view of another embodiment of the mask.

第8B圖係遮罩之另一實施形態的側視圖。 Fig. 8B is a side view of another embodiment of the mask.

以下係參考圖式並詳細說明本發明實施形態。 The following is a detailed description of embodiments of the present invention with reference to the drawings.

本實施形態中,係說明組成光學顯示元件之生產系統的一部分之薄膜製造裝置。 In this embodiment, a thin film manufacturing apparatus constituting a part of a production system for an optical display element will be described.

薄膜製造裝置係製造如貼合在液晶顯示面板或有機電致發光(OEL,organic electro-luminescence)顯示面板等面板狀光學顯示部件(光學顯示面板)上之偏光薄膜、相位差薄膜或輝度增加薄膜等薄膜狀光學組件(光學薄膜)的裝置。薄膜製造裝置係組成包含此類型光學顯示部件或光學組件等光學顯示元件之生產系統的一部分。 The thin film manufacturing device manufactures a polarizing film, a retardation film, or a brightness-increasing film, such as a liquid crystal display panel or an organic electro-luminescence (OEL) display panel, which is an optical display panel (optical display panel). Such as thin-film optical components (optical films). The thin film manufacturing apparatus is a part of a production system including an optical display element such as an optical display component or an optical module of this type.

本實施形態中,係列舉出作為光學顯示元件的透射型液晶顯示裝置。透射型液晶顯示裝置係具備液晶顯示面板與背光源。該液晶顯示裝置中,背光源所射出之照明光係自液晶顯示面板背面側射入,然後,因液晶顯示面板調變之光會自液晶顯示面板表面側射出,藉此顯示影像。 In this embodiment, a series of transmissive liquid crystal display devices as an optical display element are cited. A transmissive liquid crystal display device includes a liquid crystal display panel and a backlight. In this liquid crystal display device, the illumination light emitted from the backlight is incident from the back side of the liquid crystal display panel, and then the light modulated by the liquid crystal display panel is emitted from the surface side of the liquid crystal display panel, thereby displaying an image.

(光學顯示元件) (Optical display element)

首先,係說明第1圖與第2圖所示之作為光學顯示元件的液晶顯示面板P之結構。第1圖係液晶顯示面板P的結構之俯視圖。第2圖係第1圖所示切割線A-A方向之液晶顯示面板P的剖面圖。再者,第2圖中係省略標示剖面之剖面線。 First, the structure of a liquid crystal display panel P as an optical display element shown in FIGS. 1 and 2 will be described. FIG. 1 is a plan view of the structure of the liquid crystal display panel P. FIG. 2 is a cross-sectional view of the liquid crystal display panel P in the direction of the cutting line A-A shown in FIG. 1. It should be noted that the hatching of the cross section in FIG. 2 is omitted.

如第1圖與第2圖所示,液晶顯示面板P係具備第一基板P1、與第一基板P1相對配置之第二基板P2及配置於第一基板P1與第二基板P2間之液晶層P3。 As shown in FIGS. 1 and 2, the liquid crystal display panel P includes a first substrate P1, a second substrate P2 disposed opposite to the first substrate P1, and a liquid crystal layer disposed between the first substrate P1 and the second substrate P2. P3.

第一基板P1係由俯視時呈長方形之透明基板所組成。第二基板 P2係由較第一基板P1小之長方形透明基板所組成。第一基板P1與第二基板P2間之液晶層P3周圍係以封膠材(圖略)密封。液晶層P3係配置於封膠材所框圍出之俯視呈長方形區域的內側。液晶顯示面板P中,其俯視時容納於液晶層P3外圍內側之區域作為顯示區域P4,而框圍住該顯示區域P4周圍之外側區域作為框緣部G。 The first substrate P1 is composed of a transparent substrate having a rectangular shape in a plan view. Second substrate P2 is composed of a rectangular transparent substrate smaller than the first substrate P1. The periphery of the liquid crystal layer P3 between the first substrate P1 and the second substrate P2 is sealed with a sealing material (not shown). The liquid crystal layer P3 is disposed on the inner side of the rectangular area in plan view surrounded by the frame of the sealing material. In the liquid crystal display panel P, a region accommodated inside the periphery of the liquid crystal layer P3 as a display region P4 in a plan view, and a frame surrounding a region outside the display region P4 as a frame edge portion G.

液晶顯示面板P之背面(背光側)係貼合有作為偏光薄膜的第一 光學薄膜F11。而液晶顯示面板P之正面(顯示面側)則貼合有作為偏光薄膜的第二光學薄膜F12、及重疊於該第二光學薄膜F12上之作為輝度增加薄膜的第三光學薄膜F13。以下將第一光學薄膜F11、第二光學薄膜F12與第三光學薄膜F13統稱為光學薄膜F1X。 The back side (backlight side) of the liquid crystal display panel P is bonded with the first polarizing film. Optical film F11. On the front side (display surface side) of the liquid crystal display panel P, a second optical film F12 as a polarizing film and a third optical film F13 as a brightness increasing film superposed on the second optical film F12 are bonded. Hereinafter, the first optical film F11, the second optical film F12, and the third optical film F13 are collectively referred to as an optical film F1X.

(光學薄膜) (Optical film)

接著,說明第3圖所示組成光學薄膜F1X之光學層片FX的一實施例。第3圖係光學層片FX的結構之剖面圖。再者,第3圖中係省略標示剖面之剖面線。 Next, an embodiment of the optical layer sheet FX constituting the optical film F1X shown in FIG. 3 will be described. Fig. 3 is a sectional view showing the structure of the optical layer sheet FX. It should be noted that the hatching of the cross section in FIG. 3 is omitted.

光學薄膜F1X係自第3圖所示之長條帶狀光學層片FX切割出 指定長度之層片。具體而言,此光學層片FX係具備基材層片F4、設置於基材層片F4的一面(第3圖中的上面)之黏著層F5、透過黏著層F5設置在基材層片F4的一面之分隔層片F6、及設置於基材層片F4的另一面(第3圖中的下面)之表面保護層片F7。 The optical film F1X is cut from the long strip-shaped optical layer FX shown in FIG. 3 A slice of a specified length. Specifically, this optical layer sheet FX is provided with a base material sheet F4, an adhesive layer F5 provided on one side (upper side in FIG. 3) of the base material sheet F4, and a transparent adhesive layer F5 provided on the base material sheet F4. The separation layer sheet F6 on one side and the surface protection layer sheet F7 provided on the other side (lower side in FIG. 3) of the base material layer sheet F4.

基材層片F4若為偏光薄膜時,則具有由一對保護薄膜F4b,F4c 夾持偏光片F4a之結構。黏著層F5係為用以將基材層片F4黏貼於液晶顯示面板P上的層。分隔層片F6係用以保護黏著層F5。分隔層片F6係於光學層片FX切割出層片(光學薄膜F1X)時自黏著層F5剝離。以下,係將自光學薄膜F1X去除分隔層片F6後的部分(成為光學薄膜F1X的部分)稱為貼合層片F8。表面保護層片F7係用以保護基材層片F4的表面。表面保護層片F7係當基材層片F4黏 貼於液晶顯示面板P後,自基材層片F4的表面剝離。 When the base material layer F4 is a polarizing film, it has a pair of protective films F4b and F4c. Structure for holding polarizer F4a. The adhesive layer F5 is a layer for attaching the substrate layer sheet F4 to the liquid crystal display panel P. The separation layer sheet F6 is used to protect the adhesive layer F5. The separation layer sheet F6 is peeled from the adhesive layer F5 when the optical layer sheet FX is cut out of the layer sheet (optical film F1X). Hereinafter, a portion (a portion that becomes the optical film F1X) after the separation layer sheet F6 is removed from the optical film F1X is referred to as a bonding layer sheet F8. The surface protection layer sheet F7 is used to protect the surface of the base material layer sheet F4. Surface protective layer F7 is sticky when substrate layer F4 After sticking to the liquid crystal display panel P, it peeled from the surface of the base material layer sheet F4.

再者,基材層片F4係可為省略一對保護薄膜F4b,F4c中任一邊 之結構。舉例而言,若省略黏著層F5側之保護薄膜F4b,則可直接將黏著層F5設置於偏光層片F4a上。另外,於表面保護層片F7側之保護薄膜F4c,則可實施如保護液晶顯示面板P的最外面之硬化處理或具有防眩效果之防眩光處理等表面處理。另,基材層片F4並無侷限於上述堆疊結構,亦可為單層結構。另外,亦可省略表面保護層片F7。 In addition, the base layer sheet F4 may be omitted from either of the pair of protective films F4b and F4c. The structure. For example, if the protective film F4b on the side of the adhesive layer F5 is omitted, the adhesive layer F5 can be directly disposed on the polarizing layer sheet F4a. In addition, the protective film F4c on the surface protective layer sheet F7 side may be subjected to a surface treatment such as a hardening treatment for protecting the outermost surface of the liquid crystal display panel P or an anti-glare treatment having an anti-glare effect. In addition, the base material layer sheet F4 is not limited to the above-mentioned stacked structure, and may be a single-layer structure. The surface protective layer sheet F7 may be omitted.

(薄膜製造裝置) (Film production equipment)

接著,說明第4圖所示之薄膜製造裝置100。第4圖係薄膜製造裝置100的結構之側視圖。 Next, the thin film manufacturing apparatus 100 shown in FIG. 4 will be described. FIG. 4 is a side view showing the structure of the thin film manufacturing apparatus 100.

如第4圖所示,舉例而言,薄膜製造裝置100係為於形成偏光 薄膜之長條帶狀第一薄膜F101的一面貼合形成表面保護薄膜之長條帶狀第二薄膜F102後,再於第一薄膜F101的另一面貼合形成表面保護薄膜之長條帶狀第三薄膜F103,藉此製造出第一薄膜F101的兩面貼合有第二薄膜F102與第三薄膜F103之光學薄膜F10X的裝置。 As shown in FIG. 4, for example, the thin film manufacturing apparatus 100 is for forming polarized light. One side of the long strip-shaped first film F101 of the film is bonded to form a long strip-shaped second film F102 of a surface protection film, and then the other side of the first film F101 is bonded to form a long strip-shaped surface-protective film. Three films F103, thereby manufacturing an optical film F10X in which the second film F102 and the third film F103 are bonded to both sides of the first film F101.

具體而言,此薄膜製造裝置100係具備第一搬送路線101、第二 搬送路線102、第三搬送路線103、第四搬送路線104、第五搬送路線105及捲收部106。 Specifically, the thin film manufacturing apparatus 100 includes a first conveying path 101 and a second The transport route 102, the third transport route 103, the fourth transport route 104, the fifth transport route 105, and the winding unit 106.

第一搬送路線101係形成搬送第一薄膜F101之搬送路徑。第二 搬送路線102係形成搬送自第一料捲滾筒R1捲出的第二薄膜F102之搬送路徑。第三搬送路線103係形成搬送於第一薄膜F101的一面貼合有第二薄膜F102的單面貼合薄膜F104之搬送路徑。第四搬送路線104係形成搬送自第二料捲滾筒R2捲出的第三薄膜F103之搬送路徑。第五搬送路線105係形成搬送於單面貼合薄膜F104的第一薄膜F101側之一面(第一薄膜F101另一面)貼合有第三薄 膜F103的雙面貼合薄膜F105(光學薄膜F10X)之搬送路徑。所製成之光學薄膜F10X係於捲收部106捲收於作為第三料捲滾筒R3的芯材。 The first conveyance path 101 forms a conveyance path for conveying the first film F101. second The conveyance route 102 forms a conveyance route for conveying the second film F102 unrolled from the first roll roll R1. The third conveyance path 103 forms a conveyance path for conveying the single-sided laminated film F104 to which the second film F102 is adhered on one side of the first film F101. The fourth conveyance path 104 forms a conveyance path for conveying the third film F103 rolled out from the second roll roll R2. The fifth conveyance path 105 is formed on one side of the first film F101 side (the other side of the first film F101) to be conveyed on the single-sided bonding film F104, and a third thin film is bonded. The transport path of the double-sided laminated film F105 (optical film F10X) of the film F103. The manufactured optical film F10X is wound up in the winding section 106 and is wound up as the core material of the third roll R3.

第一搬送路線101係將如聚乙烯醇(PVA,polyvinyl alcohol)等以 偏光片作為基材之薄膜,將其實施染色處理、交聯處理或拉伸處理等之後,於薄膜兩面貼合三醋酸纖維素(TAC,triacetylcellulose)等保護薄膜後所取得之長條帶狀第一薄膜F101搬送至第三搬送路線103的路線。 The first transport route 101 will be based on polyvinyl alcohol (PVA, polyvinyl alcohol), etc. The polarizing film is used as a base film. After applying a dyeing treatment, a cross-linking treatment, or a stretching treatment, a protective film such as triacetylcellulose (TAC) is laminated on both sides of the film. A film F101 is transported to the route of the third transport route 103.

具體而言,該第一搬送路線101係自夾持第三搬送路線103之 上游側的一側朝著第三搬送路線103於水平方向上依序並列配置一對第一壓輪111a,111b、包含複數第一張力調節輪112a,112b之第一儲料器112及第一導輪113。 Specifically, the first conveying path 101 is a part of the third conveying path 103 On the upstream side, a pair of first pressure wheels 111a, 111b, a first stocker 112 including a plurality of first tension adjustment wheels 112a, 112b, and a first轮 轮 113。 The guide wheel 113.

一對第一壓輪111a,111b係為於中間夾持第一薄膜F101並相互 逆向旋轉,藉此如第4圖中所示箭頭方向(往右)拉出第一薄膜F101之滾輪。 A pair of first pressing wheels 111a, 111b are for holding the first film F101 in the middle and mutually Reverse rotation, thereby pulling out the roller of the first film F101 in the direction of the arrow (to the right) shown in FIG. 4.

第一儲料器112係為用以吸收第一薄膜F101的供給量變動差異 並同時降低施加於第一薄膜F101的張力變動之裝置。具體而言,第一儲料器112於第一壓輪111a,111b與第一導輪113間係交錯並列配置有位於上部側之複數第一張力調節輪112a與位於下部側之複數第一張力調節輪112b。 The first stocker 112 is used to absorb the variation in the supply amount of the first film F101 At the same time, a device for reducing the fluctuation of the tension applied to the first film F101 is also provided. Specifically, the first stocker 112 is arranged in parallel between the first pressure wheels 111a, 111b and the first guide wheel 113, and a plurality of first tension adjusting wheels 112a on the upper side and a plurality of first tensions on the lower side are arranged side by side. Adjusting wheel 112b.

第一儲料器112中,於上部側第一張力調節輪112a與下部側第 一張力調節輪112b間係呈交錯掛設的狀態下,來搬送第一薄膜F101的同時,上部側第一張力調節輪112a與下部側第一張力調節輪112b係相對地以上下方向做升降動作。如此,便可不停止第一搬送路線101並囤積第一薄膜F101。舉例而言,第一儲料器112中,因擴大上部側第一張力調節輪112a與下部側第一張力調節輪112b間的距離而可增加第一薄膜F101的囤積量。另一方面,第一儲料器112中,可因縮短上部側第一張力調節輪112a與下部側第一張力調節輪112b間的距離而減少第一薄膜F101的囤積量。舉例而言,第一儲料器112係於 交換料捲滾筒(第一料捲滾筒R1至第三料捲滾筒R3)的芯材後之接膜等作業時,進行作動。 In the first stocker 112, the upper first tension adjusting wheel 112a and the lower first A tension adjustment wheel 112b is arranged in a staggered state, and while the first film F101 is being conveyed, the first tension adjustment wheel 112a on the upper side and the first tension adjustment wheel 112b on the lower side are moved upwards and downwards relatively. . In this way, the first film F101 can be stored without stopping the first conveyance path 101. For example, in the first stocker 112, as the distance between the first tension adjusting wheel 112a on the upper side and the first tension adjusting wheel 112b on the lower side is increased, the hoarding amount of the first film F101 can be increased. On the other hand, in the first stocker 112, the distance between the first tension adjusting wheel 112a on the upper side and the first tension adjusting wheel 112b on the lower side can be shortened to reduce the amount of hoarding of the first film F101. For example, the first stocker 112 is When the core material of the reel drums (the first reel drum R1 to the third reel drum R3) is exchanged, and the film is connected, the operation is performed.

第一導輪113係為旋轉的同時,將第一壓輪111a,111b所拉出之 第一薄膜F101引導至第三搬送路線103之上游側的滾輪。再者,第一導輪113並無侷限於單一配置結構,亦可為複數配置結構。 The first guide wheel 113 is rotated while pulling out the first pressure wheels 111a, 111b. The first film F101 is guided to a roller on the upstream side of the third conveyance path 103. Furthermore, the first guide wheel 113 is not limited to a single arrangement structure, and may be a plurality of arrangement structures.

第二搬送路線102係為將如聚對苯二甲二乙酯(PET, polyethylene terephthalate)等形成表面保護薄膜之長條帶狀第二薄膜F102自第一料捲滾筒R1拉出並搬送至第三搬送路線103之路線。 The second conveying route 102 is a process such as polyethylene terephthalate (PET, A long strip-shaped second film F102, such as a polyethylene terephthalate, which forms a surface protection film, is pulled out from the first roll roll R1 and transported to a route of the third transport route 103.

具體而言,該第二搬送路線102係自夾持第三搬送路線103之 上游側的另一側朝著第三搬送路線103於水平方向上依序並列配置有一對第二壓輪121a,121b、包含複數第二張力調節輪122a,122b之第二儲料器122、及複數第二導輪123a,123b。 Specifically, the second transport route 102 is a portion of the third transport route 103 On the other side of the upstream side, a pair of second pressure rollers 121a, 121b, a second stocker 122 including a plurality of second tension adjustment wheels 122a, 122b, and a pair of second pressure rollers 121a, 121b are arranged side by side in a horizontal direction toward the third conveying path 103, and The plurality of second guide wheels 123a, 123b.

一對第二壓輪121a,121b係為於中間夾持第二薄膜F102並相互 逆向旋轉,藉此如第4圖中所示箭頭方向(往左)拉出第二薄膜F102之滾輪。 A pair of second pressing wheels 121a, 121b are for holding the second film F102 in the middle and mutually Reverse rotation, thereby pulling out the roller of the second film F102 in the direction of the arrow (to the left) shown in FIG. 4.

第二儲料器122係為用以吸收第二薄膜F102的供給量變動差異 並同時降低施加於第二薄膜F102的張力變動之裝置。具體而言,該第二儲料器122於第二壓輪121a,121b與第二導輪123a間係交錯並列配置有位於上部側之複數第二張力調節輪122a與位於下部側之複數第二張力調節輪122b。 The second stocker 122 is used to absorb the variation in the supply amount of the second film F102. At the same time, a device for reducing the fluctuation of the tension applied to the second film F102 is also provided. Specifically, the second stocker 122 is arranged alternately between the second pressing wheels 121a, 121b and the second guide wheel 123a, and a plurality of second tension adjusting wheels 122a on the upper side and a plurality of second on the lower side are arranged side by side. The tension adjustment wheel 122b.

第二儲料器122中,於上部側第二張力調節輪122a與下部側第 二張力調節輪122b間係呈交錯掛設的狀態下,來搬送第二薄膜F102的同時,上部側第二張力調節輪122a與下部側第二張力調節輪122b係相對地以上下方向做升降動作。如此,便可不停止第二搬送路線102並囤積第二薄膜F102。舉例而言,第二儲料器122中,因擴大上部側第二張力調節輪122a與下部側第二張力調節輪122b間的距離而可增加第二薄膜F102的囤積量。另一方面,第二 儲料器122中,可因縮短上部側第二張力調節輪122a與下部側第二張力調節輪122b間的距離而減少第二薄膜F102的囤積量。舉例而言,第二儲料器122係於交換料捲滾筒(第一料捲滾筒R1至第三料捲滾筒R3)的芯材後之接膜等作業時,進行作動。 In the second stocker 122, the second tension adjusting wheel 122a on the upper side and the second tension adjusting wheel 122a on the lower side When the two tension adjustment wheels 122b are hung in a staggered state, while the second film F102 is being transported, the upper second tension adjustment wheel 122a and the lower second tension adjustment wheel 122b are moved upward and downward relative to each other. . In this way, the second film F102 can be stored without stopping the second conveyance route 102. For example, in the second stocker 122, the distance between the upper second tension adjustment wheel 122a and the lower second tension adjustment wheel 122b can be increased to increase the hoarding amount of the second film F102. On the other hand, the second In the stocker 122, the distance between the upper second tension adjustment wheel 122a and the lower second tension adjustment wheel 122b can be shortened to reduce the amount of the second film F102 stored. For example, the second stocker 122 is operated when the core material of the reel drums (the first reel drum R1 to the third reel drum R3) is exchanged and the film is connected.

複數第二導輪123a,123b係為各自旋轉的同時,將第二壓輪121a, 121b所拉出之第二薄膜F102引導至第三搬送路線103之上游側的滾輪。再者,第二導輪123a,123b並無侷限於複數配置結構,亦可為單一配置結構。 The plurality of second guide wheels 123a, 123b are rotated at the same time, and the second pressure wheels 121a, The second film F102 pulled out by 121b is guided to a roller on the upstream side of the third conveyance path 103. Furthermore, the second guide wheels 123a, 123b are not limited to a plurality of configuration structures, and may be a single configuration structure.

第三搬送路線103係為將於第一薄膜F101的一面貼合有第二薄 膜F102之長條帶狀單面貼合薄膜F104搬送至第五搬送路線105之路線。 The third conveying route 103 is a process in which a second thin film is bonded to one side of the first thin film F101. The long-strip single-sided bonding film F104 of the film F102 is transported to the route of the fifth transport route 105.

具體而言,該第三搬送路線103係配置有一對第三壓輪131a, 131b。一對第三壓輪131a,131b係位於第一搬送路線101之下游側與第二搬送路線102之下游側的交會點。一對第三壓輪131a,131b係中間夾持第一薄膜F101與第二薄膜F102的同時,彼此相互逆向旋轉,藉此貼合第一薄膜F101與第二薄膜F102。一對第三壓輪131a,131b係將貼合有第一薄膜F101與第二薄膜F102之單面貼合薄膜F104朝第4圖中箭頭方向(往下)拉出。 Specifically, the third conveyance route 103 is provided with a pair of third pressure rollers 131a, 131b. The pair of third pressure rollers 131 a and 131 b are located at the intersection of the downstream side of the first transport path 101 and the downstream side of the second transport path 102. A pair of third pressing wheels 131a and 131b are sandwiched between the first film F101 and the second film F102 while rotating in the opposite directions to each other, thereby bonding the first film F101 and the second film F102. The pair of third pressing wheels 131a and 131b pull the single-sided bonding film F104 to which the first film F101 and the second film F102 are bonded in the direction of the arrow (downward) in FIG. 4.

第四搬送路線104係為將如PET(polyethylene terephthalate)等形 成表面保護薄膜之長條帶狀第三薄膜F103自第二料捲滾筒R2拉出並搬送至第五搬送路線105之路線。 The fourth transport route 104 is a shape such as PET (polyethylene terephthalate) The strip-shaped third film F103 forming a surface protection film is pulled out from the second roll drum R2 and is transported to the route of the fifth transport route 105.

具體而言,該第四搬送路線104係自夾持第三搬送路線103之 下游側的一側朝著第三搬送路線103於水平方向上依序並列配置有一對第四壓輪141a,141b、包含複數第三張力調節輪142a,142b之第三儲料器142、及複數第四導輪143a,143b。 Specifically, the fourth conveyance route 104 is a part of the third conveyance route 103. A pair of fourth pressure wheels 141a, 141b, a third stocker 142 including a plurality of third tension adjustment wheels 142a, 142b, and a plurality of the plurality Fourth guide wheels 143a, 143b.

一對第四壓輪141a,141b係為於中間夾持第三薄膜F103並相互 逆向旋轉,藉此如第4圖中所示箭頭方向(往右)拉出第三薄膜F103之滾輪。 A pair of fourth pressure rollers 141a, 141b is for holding the third film F103 in the middle and mutually Reverse rotation, thereby pulling out the roller of the third film F103 in the direction of the arrow (to the right) shown in FIG. 4.

第三儲料器142係為用以吸收第三薄膜F103的供給量變動差異 並同時降低施加於第三薄膜F103的張力變動之裝置。具體而言,該第三儲料器142於第四壓輪141a,141b與第四導輪143a間係交錯並列配置有位於上部側之複數第三張力調節輪142a與位於下部側之複數第三張力調節輪142b。 The third stocker 142 is used to absorb the difference in the supply amount of the third film F103. At the same time, a device for reducing the fluctuation of the tension applied to the third film F103. Specifically, the third stocker 142 is alternately arranged between the fourth pressure wheels 141a, 141b and the fourth guide wheel 143a, and a plurality of third tension adjusting wheels 142a on the upper side and a plurality of third on the lower side are arranged in parallel. Tension adjustment wheel 142b.

第三儲料器142中,於上部側第三張力調節輪142a與下部側第 三張力調節輪142b間係呈交錯掛設的狀態下,來搬送第三薄膜F103的同時,上部側第三張力調節輪142a與下部側第三張力調節輪142b係相對地以上下方向做升降動作。如此,便可不停止第四搬送路線104並囤積第三薄膜F103。舉例而言,第三儲料器142中,因擴大上部側第三張力調節輪142a與下部側第三張力調節輪142b間的距離而可增加第三薄膜F103的囤積量。另一方面,第三儲料器142中,可因縮短上部側第三張力調節輪142a與下部側第三張力調節輪142b間的距離而減少第三薄膜F103的囤積量。舉例而言,第三儲料器142係於交換料捲滾筒(第一料捲滾筒R1至第三料捲滾筒R3)的芯材後之接膜等作業時,進行作動。 In the third stocker 142, the upper third tension adjusting wheel 142a and the lower third The three tension adjustment wheels 142b are arranged in a staggered state, and while the third film F103 is being conveyed, the upper third tension adjustment wheel 142a and the lower third tension adjustment wheel 142b are moved upward and downward relative to each other. . In this way, the third film F103 can be stored without stopping the fourth conveyance route 104. For example, in the third stocker 142, the distance between the third tension adjustment wheel 142a on the upper side and the third tension adjustment wheel 142b on the lower side can be increased to increase the amount of storage of the third film F103. On the other hand, in the third stocker 142, the distance between the third tension adjusting wheel 142a on the upper side and the third tension adjusting wheel 142b on the lower side can be shortened, thereby reducing the accumulation amount of the third film F103. For example, the third stocker 142 is operated when the core material of the reel drums (the first reel drum R1 to the third reel drum R3) is exchanged, and the film is connected.

複數第四導輪143a,143b係為各自旋轉的同時,將第四壓輪141a, 141b所拉出之第三薄膜F103引導至第三搬送路線103之下游側(第五搬送路線105之上游側)的滾輪。再者,第四導輪143a,143b並無侷限於複數配置結構,亦可為單一配置結構。 The plurality of fourth guide wheels 143a and 143b rotate the fourth pressure wheels 141a while rotating respectively. The third film F103 pulled out by 141b is guided to a roller on the downstream side of the third transport path 103 (upstream of the fifth transport path 105). Furthermore, the fourth guide wheels 143a, 143b are not limited to a plurality of arrangement structures, and may be a single arrangement structure.

第五搬送路線105係為將單面貼合薄膜F104的第一薄膜F101 側之一面(第一薄膜F101之另一面)貼合有第三薄膜F103之長條帶狀雙面貼合薄膜F105(光學薄膜F10X)朝第三料捲滾筒R3搬送之路線。 The fifth conveyance route 105 is the first film F101 that is bonded to the film F104 on one side. The long strip-shaped double-sided laminating film F105 (optical film F10X) on which one side (the other side of the first film F101) is bonded to the third film F103 (the optical film F10X) is transported to the third roll R3.

具體而言,該第五搬送路線105係自夾持第三搬送路線103之 下游側的另一側朝著第三料捲滾筒R3於水平方向上依序並列配置有一對第五壓輪151a,151b、第五導輪153a、一對第六壓輪151c,151d、包含複數第四張力調 節輪152a,152b之第四儲料器152、及第六導輪153b。 Specifically, the fifth transport path 105 is a part of the third transport path 103 On the other side of the downstream side, a pair of fifth pressure rollers 151a, 151b, a fifth guide roller 153a, a pair of sixth pressure rollers 151c, 151d are arranged side by side in a horizontal direction toward the third roll drum R3 in a horizontal direction. Fourth tension tone The fourth stocker 152 and the sixth guide wheel 153b of the pitch wheels 152a, 152b.

一對第五壓輪151a,151b係位於第三搬送路線103之下游側與 第五搬送路線105之上游側的交會點。一對第五壓輪151a,151b係中間夾持單面貼合薄膜F104與第三薄膜F103的同時,彼此相互逆向旋轉,藉此貼合單面貼合薄膜F104與第三薄膜F103。一對第五壓輪151a,151b係將貼合有單面貼合薄膜F104與第三薄膜F103之雙面貼合薄膜F105朝第4圖所示箭頭方向(往下)拉出。 A pair of fifth pressure rollers 151a, 151b are located on the downstream side of the third conveying path 103 and The meeting point on the upstream side of the fifth transport route 105. The pair of fifth pressing wheels 151a and 151b are sandwiched between the single-sided bonding film F104 and the third film F103 while rotating in the opposite directions to each other, thereby bonding the single-sided bonding film F104 and the third film F103. The pair of fifth pressing wheels 151a and 151b pull out the double-sided bonding film F105 to which the single-sided bonding film F104 and the third film F103 are bonded in the arrow direction (downward) shown in FIG. 4.

第五導輪153a係為旋轉的同時,將第五壓輪151a,151b所拉出 之雙面貼合薄膜F105引導至第四儲料器152的滾輪。再者,第五導輪153a並無侷限於單一配置結構,亦可為複數配置結構。 The fifth guide wheel 153a is rotated while pulling out the fifth pressure wheels 151a, 151b. The double-sided bonding film F105 is guided to a roller of the fourth stocker 152. In addition, the fifth guide wheel 153a is not limited to a single arrangement structure, and may be a plural arrangement structure.

一對第六壓輪151c,151d係為於中間夾持雙面貼合薄膜F105, 並同時相互逆向旋轉,藉此朝第4圖中所示箭頭方向(往右)拉出雙面貼合薄膜F105之滾輪。 A pair of sixth pressure wheels 151c and 151d are used to sandwich the double-sided laminating film F105 in the middle. At the same time, they rotate in opposite directions to each other, thereby pulling out the roller of the double-sided laminating film F105 in the direction of the arrow shown in Fig. 4 (to the right).

第四儲料器152中,於上部側第四張力調節輪152a與下部側第 四張力調節輪152b間係呈交錯掛設的狀態下,來搬送雙面貼合薄膜F105的同時,上部側第四張力調節輪152a與下部側第四張力調節輪152b係相對地以上下方向做升降動作。如此,便可不停止第五搬送路線105並囤積雙面貼合薄膜F105。舉例而言,第四儲料器152中,因擴大上部側第四張力調節輪152a與下部側第四張力調節輪152b間的距離而可增加雙面貼合薄膜F105的囤積量。另一方面,第四儲料器152中,可因縮短上部側第四張力調節輪152a與下部側第四張力調節輪152b間的距離而減少雙面貼合薄膜F105的囤積量。舉例而言,第四儲料器152係於交換料捲滾筒(第一料捲滾筒R1至第三料捲滾筒R3)的芯材後之接膜等作業時,進行作動。 In the fourth stocker 152, the fourth tension adjusting wheel 152a on the upper side and the fourth tension adjusting wheel 152a on the lower side When the four tension adjustment wheels 152b are hung in a staggered state, while the double-sided laminating film F105 is being transported, the upper fourth tension adjustment wheel 152a and the lower fourth tension adjustment wheel 152b are relatively upward and downward. Lifting action. Thus, the double-sided bonding film F105 can be stored without stopping the fifth conveyance path 105. For example, in the fourth stocker 152, as the distance between the upper fourth tension adjustment wheel 152a and the lower fourth tension adjustment wheel 152b is increased, the amount of double-sided laminated film F105 can be increased. On the other hand, in the fourth stocker 152, the distance between the upper-side fourth tension adjusting wheel 152a and the lower-side fourth tension adjusting wheel 152b can be shortened to reduce the amount of double-sided laminated film F105. For example, the fourth stocker 152 is operated when the core material of the reel drums (the first reel drum R1 to the third reel drum R3) is exchanged, and the film is connected.

第六導輪153b係為將雙面貼合薄膜F105引導至第三料捲滾筒 R3的滾輪。再者,第六導輪153b並無侷限於單一配置結構,亦可為複數配置結構。 The sixth guide wheel 153b is used to guide the double-sided laminating film F105 to the third roll. Wheel of R3. In addition, the sixth guide wheel 153b is not limited to a single arrangement structure, and may be a plural arrangement structure.

雙面貼合薄膜F105於捲收部106中,捲收於作為光學薄膜F10X 的第三料捲滾筒R3的芯材後,輸送至下一個工程。 The double-sided bonding film F105 is rolled in the winding section 106, and is rolled up as the optical film F10X. After the core material of the third roll drum R3 is conveyed to the next project.

(缺陷檢查系統) (Defect inspection system)

接著,將說明具備該薄膜製造裝置100之缺陷檢查系統10。 Next, a defect inspection system 10 including the thin film manufacturing apparatus 100 will be described.

如第4圖所示,缺陷檢查系統10係由搬送路線L、第一缺陷檢查裝置11與第二缺陷檢查裝置12、記錄裝置13、第一測長器14與第二測長器15、控制裝置16所組成。 As shown in FIG. 4, the defect inspection system 10 is controlled by the transport route L, the first defect inspection device 11 and the second defect inspection device 12, the recording device 13, the first length measuring device 14 and the second length measuring device 15, and the control The device 16 is composed.

搬送路線L係形成搬送作為檢查對象的薄膜之搬送路徑,於本 實施形態中,係由該第一搬送路線101、第三搬送路線103及第五搬送路線105組成搬送路線L。 The conveying route L forms a conveying route for conveying a film to be inspected. In the embodiment, the transport path L is composed of the first transport path 101, the third transport path 103, and the fifth transport path 105.

第一缺陷檢查裝置11係於第一薄膜F101尚未貼合第二薄膜 F102與第三薄膜F103前進行缺陷檢查之裝置。具體而言,該第一缺陷檢查裝置11係用以檢查製造第一薄膜F101時或搬送第一薄膜F101時所產生之異物缺陷、凹凸缺陷、亮點缺陷等各種缺陷。第一缺陷檢查裝置11針對第一搬送路線101所搬送之第一薄膜F101,舉例而言,係實施反射檢查、透射檢查、斜射檢查、正交偏光透射檢查等檢查處理,藉此檢查出第一薄膜F101的缺陷。 The first defect inspection device 11 is based on the first film F101 and has not been bonded to the second film Defect inspection device before F102 and third film F103. Specifically, the first defect inspection device 11 is used to inspect various defects such as foreign object defects, uneven defects, and bright spot defects generated when the first film F101 is manufactured or transported. The first defect inspection device 11 performs, for example, inspection processing such as reflection inspection, transmission inspection, oblique inspection, and orthogonal polarization transmission inspection on the first film F101 transported on the first transportation route 101, thereby detecting the first Defects of the thin film F101.

第一缺陷檢查裝置11於第一搬送路線101中,較第一壓輪111a, 111b更靠上游側,係具備複數照明部21a,22a,23a,將照明光照射於第一薄膜F101;及複數光檢測部21b,22b,23b,檢查透過第一薄膜F101的光(透射光)或第一薄膜F101反射的光(反射光)。 The first defect inspection device 11 is located on the first conveying path 101, 111b is further upstream, and includes a plurality of illumination sections 21a, 22a, and 23a to irradiate illumination light to the first film F101; and a plurality of light detection sections 21b, 22b, and 23b to inspect light (transmitted light) transmitted through the first film F101. Or light reflected by the first film F101 (reflected light).

本實施形態因係為檢查透射光之結構,故並列於第一薄膜F101 的搬送方向上之複數照明部21a,22a,23a與光檢測部21b,22b,23b係各自夾持第 一薄膜F101並對向配置。另外,第一缺陷檢查裝置11並無侷限於檢查透射光之結構,亦可為檢查反射光之結構或檢查透射光與反射光之結構。 Since this embodiment is a structure for inspecting transmitted light, it is juxtaposed on the first film F101. The plural illumination sections 21a, 22a, 23a and the light detection sections 21b, 22b, 23b in the conveying direction of A thin film F101 is arranged oppositely. In addition, the first defect inspection device 11 is not limited to a structure for inspecting transmitted light, and may be a structure for inspecting reflected light or a structure for inspecting transmitted light and reflected light.

照明部21a,22a,23a係將配合缺陷檢查種類調整光強度、波長或 偏光狀態等之照明光照射於第一薄膜F101上。光檢測部21b,22b,23b係使用電耦合元件(CCD,charge-coupled device)等攝影元件拍攝第一薄膜F101的照明光所照射位置之影像。光檢測部21b,22b,23b所拍攝之影像(缺陷檢查結果)係輸出至控制裝置16。 The lighting sections 21a, 22a, 23a will adjust the light intensity, wavelength or Illumination light such as a polarized light state is irradiated on the first film F101. The light detecting sections 21b, 22b, and 23b use an imaging element such as a CCD (charge-coupled device) to take an image of the position where the illumination light of the first film F101 is irradiated. The images (defect inspection results) captured by the light detection sections 21 b, 22 b, and 23 b are output to the control device 16.

第二缺陷檢查裝置12係為針對貼合第二薄膜F102與第三薄膜 F103後之第一薄膜F101,即針對雙面貼合薄膜F105,予以進行缺陷檢查之裝置。具體而言,該第二缺陷檢查裝置12係檢查於第一薄膜F101貼合第二薄膜F102與第三薄膜F103時或搬送單面貼合薄膜F104與雙面貼合薄膜F105時所產生之異物缺陷、凹凸缺陷、亮點缺陷等各種缺陷。第二缺陷檢查裝置12針對第五搬送路線105所搬送之雙面貼合薄膜F105,係實施例如反射檢查、透射檢查、斜射檢查、正交偏光透射檢查等檢查處理,藉此檢查出雙面貼合薄膜F105的缺陷。 The second defect inspection device 12 is for bonding the second film F102 and the third film. The first film F101 after F103 is a device for inspecting defects on the double-sided laminated film F105. Specifically, the second defect inspection device 12 inspects foreign materials generated when the first film F101 is bonded to the second film F102 and the third film F103 or when the single-sided bonded film F104 and the double-sided bonded film F105 are transported. Various defects such as defects, bump defects, and bright spot defects. The second defect inspection device 12 performs inspection processing such as reflection inspection, transmission inspection, oblique inspection, and orthogonal polarization transmission inspection on the double-sided bonding film F105 conveyed by the fifth conveyance path 105, thereby detecting the double-sided adhesive film. Defective film F105.

第二缺陷檢查裝置12於第五搬送路線105中,較第六壓輪 151c,151d更靠上游側,係具備複數照明部24a,25a,將照明光照射於雙面貼合薄膜F105;及複數光檢測部24b,25b,檢查透過雙面貼合薄膜F105的光(透射光)或雙面貼合薄膜F105反射的光(反射光)。 The second defect inspection device 12 is located on the fifth transport path 105, which is 151c and 151d are further upstream and are provided with a plurality of illuminating sections 24a and 25a to irradiate the illumination light to the double-sided adhesive film F105; and a plurality of light detecting sections 24b and 25b to inspect the light (transmission Light) or light reflected from the double-sided bonding film F105 (reflected light).

本實施形態因係為檢查透射光之結構,故並列於雙面貼合薄膜 F105的搬送方向上之複數照明部24a,25a與光檢測部24b,25b係各自夾持雙面貼合薄膜F105並對向配置。另外,第二缺陷檢查裝置12並無侷限於檢查透射光之結構,亦可為檢查反射光之結構或檢查透射光與反射光之結構。 Since this embodiment is a structure for inspecting transmitted light, it is juxtaposed on the double-sided laminated film. The plurality of illumination sections 24a, 25a and the light detection sections 24b, 25b in the conveying direction of F105 are arranged facing each other while sandwiching the double-sided bonding film F105. In addition, the second defect inspection device 12 is not limited to a structure for inspecting transmitted light, and may be a structure for inspecting reflected light or a structure for inspecting transmitted light and reflected light.

照明部24a,25a係將配合缺陷檢查種類調整光強度、波長或偏光 狀態等之照明光照射於雙面貼合薄膜F105上。光檢測部24b,25b係使用CCD等攝影元件拍攝雙面貼合薄膜F105的照明光所照射位置之影像。光檢測部24b,25b所拍攝之影像(缺陷檢查結果)係輸出至控制裝置16。 Illumination section 24a, 25a will adjust light intensity, wavelength or polarized light according to defect inspection type Illumination light such as a state is irradiated on the double-sided bonding film F105. The light detecting sections 24b and 25b are images of the positions irradiated with the illumination light of the double-sided bonding film F105 by using an imaging element such as a CCD. The images (defect inspection results) captured by the light detection units 24 b and 25 b are output to the control device 16.

記錄裝置13係為將第一缺陷檢查裝置11與第二缺陷檢查裝置 12的檢查結果所得缺陷資訊記錄於雙面貼合薄膜F105之裝置。具體而言,缺陷資訊係包含缺陷位置或種類等相關資訊,舉例而言,係記錄作為一次元碼、二次元碼、QR碼(註冊商標)等辨識碼。於辨識碼中,舉例而言,包含第一缺陷檢查裝置11與第二缺陷檢查裝置12所檢查出之缺陷,其係顯示辨識碼存在於從印刷位置沿著薄膜寬度方向相隔多遠的位置之資訊(缺陷位置相關資訊)。另外,辨識碼中亦可包含檢查出的缺陷種類相關資訊。 The recording device 13 is a combination of the first defect inspection device 11 and the second defect inspection device The defect information obtained in the inspection result of 12 is recorded in the device of double-sided laminating film F105. Specifically, the defect information includes related information such as the location or type of the defect. For example, the defect information is recorded as an identification code such as a primary code, a secondary code, and a QR code (registered trademark). The identification code includes, for example, the defects inspected by the first defect inspection device 11 and the second defect inspection device 12, which indicate how far apart the identification code exists from the printing position along the width of the film. Information (information about the location of the defect). In addition, the identification code can also contain information about the type of defect detected.

記錄裝置13於第5搬送路線105中,係設置於較第二缺陷檢查 裝置12更靠下游側。記錄裝置13具有如採用噴墨方式之印刷頭13a。該印刷頭13a係沿著雙面貼合薄膜F105之寬度方向的端緣部之位置(記錄區域)噴出墨水,進行該缺陷資訊之印刷。 The recording device 13 is installed on the fifth conveyance route 105 in comparison with the second defect inspection. The device 12 is further downstream. The recording device 13 includes, for example, a print head 13a using an inkjet method. The print head 13a ejects ink along the position (recording area) of the edge portion in the width direction of the double-sided bonding film F105 to print the defect information.

另外,記錄裝置13亦可於雙面貼合薄膜F105的缺陷位置,透 過印刷(標明)包含缺陷大小之點狀、線狀或框狀標誌,直接於缺陷位置上進行記錄。此時,除了標誌以外,亦可於缺陷位置印刷標示缺陷種類之記號或圖樣,藉此記錄缺陷種類相關資訊。 In addition, the recording device 13 may be transparent at the defect position of the double-sided bonding film F105. Overprinting (marking) includes dot-like, line-like, or frame-like marks of the size of the defect, and records directly at the defect location. At this time, in addition to the mark, a mark or pattern indicating the type of the defect may be printed at the defect position, thereby recording information about the type of the defect.

第一測長器14與第二測長器15係為測量第一薄膜F101的搬送 量之裝置。具體而言,本實施形態中,於第一搬送路線101中,係於較第一儲料器112更靠上游側之第一壓輪111a配置有組成第一測長器14之旋轉編碼器,而於較第一儲料器112更靠下游側之第三壓輪131a配置有組成第二測長器15之旋轉編碼器。 The first length measuring device 14 and the second length measuring device 15 measure the conveyance of the first film F101. 量 的 装置。 Measuring device. Specifically, in this embodiment, in the first conveying path 101, a rotary encoder constituting the first length measuring device 14 is arranged on the first pressing wheel 111a located upstream of the first stocker 112. The third pressure roller 131 a located further downstream than the first stocker 112 is provided with a rotary encoder constituting the second length measuring device 15.

第一測長器14與第二測長器15係配合接觸第一薄膜F101並旋 轉之第一壓輪111a與第三壓輪131a的旋轉變位量,透過旋轉編碼器測量第一薄膜F101的搬送量。第一測長器14與第二測長器15的測量結果係輸出至控制裝置16。 The first length measuring device 14 and the second length measuring device 15 cooperate to contact the first film F101 and rotate. The rotation displacements of the first pressure wheel 111a and the third pressure wheel 131a, and the conveyance amount of the first film F101 are measured by a rotary encoder. The measurement results of the first length measuring device 14 and the second length measuring device 15 are output to the control device 16.

再者,本實施形態中,第一缺陷檢查裝置11與記錄裝置13間 因僅存在一個儲料器,所以於此儲料器的上游側與下游側係各配置有一個測長器。另一方面,第一缺陷檢查裝置11與記錄裝置13間若存在複數個儲料器,則位在最上游側之儲料器的上游側與位在最下游側之儲料器的下游側可各配置一個測長器。 Furthermore, in this embodiment, the first defect inspection device 11 and the recording device 13 Since there is only one stocker, a length measuring device is arranged on each of the upstream side and the downstream side of the stocker. On the other hand, if there are a plurality of stockers between the first defect inspection device 11 and the recording device 13, the upstream side of the stocker located on the most upstream side and the downstream side of the stocker located on the most downstream side may Each is equipped with a length measuring device.

控制裝置16係為統籌控制薄膜製造裝置100各部位之裝置。具 體而言,該控制裝置16係具備作為電子控制裝置的電腦系統。電腦系統係具備中央處理器(CPU,central processing unit)等演算處理部與記憶體(或硬碟)等資訊記憶部。 The control device 16 is a device for overall control of each part of the thin film manufacturing apparatus 100. With Specifically, the control device 16 is provided with a computer system as an electronic control device. The computer system includes an arithmetic processing unit such as a central processing unit (CPU) and an information storage unit such as a memory (or hard disk).

控制裝置16的資訊記憶部係記錄有控制電腦系統之作業系統 (OS,operating system)或於演算處理部進行薄膜製造裝置100之各部位的各項處理程式等。另外,控制裝置16亦可包含控制薄膜製造裝置100之各部位時所需實行各種處理之特定應用積體電路(ASIC,application specific integrated circuit)等邏輯回路。另外,控制裝置16係包含與電腦系統的外部裝置進行輸出入之介面。此介面係可與鍵盤或滑鼠等輸入裝置、液晶顯示器等顯示裝置及通訊裝置等連接。 The information memory section of the control device 16 is an operating system in which the control computer system is recorded (OS, operating system) or each processing program of each part of the thin film manufacturing apparatus 100 in the calculation processing section. In addition, the control device 16 may include a logic circuit such as an application specific integrated circuit (ASIC) that needs to perform various processes when controlling each part of the thin film manufacturing device 100. In addition, the control device 16 includes an interface for performing input / output with an external device of the computer system. This interface can be connected with input devices such as keyboards or mice, display devices such as liquid crystal displays, and communication devices.

控制裝置16係解析光檢測部21b,22b,23b與光檢測部24b,25b 所拍攝之影像,並辨別缺陷有無(位置)或種類等。控制裝置16若判斷出第一薄膜F101或雙面貼合薄膜F105具有缺陷,則控制記錄裝置13於雙面貼合薄膜F105記錄缺陷資訊。 The control device 16 analyzes the light detection sections 21b, 22b, 23b and the light detection sections 24b, 25b. The captured image, and identify the presence (location) or type of defects. If the control device 16 determines that the first film F101 or the double-sided bonding film F105 has a defect, the control device 16 controls the recording device 13 to record the defect information on the double-sided bonding film F105.

於缺陷檢查系統10,為了避免雙面貼合薄膜F105的缺陷檢查位 置與缺陷資訊的資訊記錄位置之間產生偏移,係於缺陷檢查後的指定時間點記錄缺陷資訊。舉例而言,本實施形態中,當第一缺陷檢查裝置11或第二缺陷檢察裝置12結束缺陷檢查後,係計算出搬送路線L上所搬送的薄膜搬送量,並當計算出之搬送量與偏移距離一致時,透過記錄裝置13進行記錄。 In defect inspection system 10, in order to avoid the defect inspection position of double-sided laminating film F105 There is a deviation between the position and the information recording position of the defect information, and the defect information is recorded at a specified time point after the defect inspection. For example, in this embodiment, when the first defect inspection device 11 or the second defect inspection device 12 finishes the defect inspection, the film conveyance amount on the conveyance route L is calculated, and the calculated conveyance amount and the When the offset distances match, recording is performed through the recording device 13.

在此,偏移距離係指第一缺陷檢查裝置11及第二缺陷檢查裝置 12與記錄裝置13間的薄膜搬送距離。嚴格來說,偏移距離係定義為自第一缺陷檢查裝置11與第二缺陷檢查裝置12進行缺陷檢查位置(缺陷檢查位置)至記錄裝置13記錄缺陷資訊位置(資訊記錄位置)間的薄膜搬送距離。另外,偏移距離係當第一儲料器112作動時產生變動。 Here, the offset distance refers to the first defect inspection device 11 and the second defect inspection device Film transport distance between 12 and recording device 13. Strictly speaking, the offset distance is defined as the film transfer from the defect inspection position (defect inspection position) performed by the first defect inspection device 11 and the second defect inspection device 12 to the position where the defect information (information recording position) is recorded by the recording device 13 distance. The offset distance varies when the first stocker 112 is activated.

第一儲料器112未作動時之偏移距離(以下稱為第一偏移距離), 係事先記憶於控制裝置16的資訊記憶部。具體而言,第一缺陷檢查裝置11與第二缺陷檢查裝置12中係存在有複數光檢測部21b,22b,23b與光檢測部24b,25b,且光檢測部21b,22b,23b,24b,25b係各別進行缺陷檢查。因此,控制裝置16的資訊記憶部中,光檢測部21b,22b,23b,24b,25b皆各自記憶第一偏移距離。 The offset distance when the first stocker 112 is not activated (hereinafter referred to as the first offset distance), It is stored in the information storage section of the control device 16 in advance. Specifically, the first defect inspection device 11 and the second defect inspection device 12 include a plurality of light detection sections 21b, 22b, 23b and 24b, 25b, and the light detection sections 21b, 22b, 23b, 24b, 25b is inspected separately. Therefore, in the information storage section of the control device 16, the light detection sections 21b, 22b, 23b, 24b, and 25b each memorize the first offset distance.

因第一儲料器112作動而使偏移距離產生變動時,則依據第一 儲料器112之上游側與下游側間的第一薄膜F101之搬送量差異計算出偏移距離的補正值。即,控制裝置16中,係可依據第一測長器14與第二測長器15的測量結果計算出第一儲料器112其第一薄膜F101的囤積量,再依據此第一薄膜F101的囤積量計算出偏移距離的補正值。 When the offset distance is changed due to the operation of the first stocker 112, The offset value of the offset amount of the first film F101 between the upstream side and the downstream side of the stocker 112 is calculated. That is, the control device 16 can calculate the hoarding amount of the first film F101 of the first stocker 112 according to the measurement results of the first length measuring device 14 and the second length measuring device 15, and then based on the first film F101 The amount of storage is calculated as the offset value.

缺陷檢查系統10中,當第一儲料器112作動時,係依據偏移距離的補正值,補正記錄裝置13記錄缺陷資訊之時間點。舉例而言,本實施形態係依據第一測長器14與第二測長器15的測量結果計算出偏移距離的補正值。而控制裝置16係依據該補正值與第一偏移距離計算出第一儲料器112作動時之偏移距離(以下稱為第二偏移距離)。 In the defect inspection system 10, when the first stocker 112 is actuated, the time at which the defect information is recorded by the correction recording device 13 is based on the correction value of the offset distance. For example, in this embodiment, a correction value of the offset distance is calculated based on the measurement results of the first length measuring device 14 and the second length measuring device 15. The control device 16 calculates an offset distance (hereinafter referred to as a second offset distance) when the first stocker 112 operates according to the correction value and the first offset distance.

本實施形態依據第一測長器14或第二測長器15的測量結果, 當第一缺陷檢查裝置11與第二缺陷檢查裝置12進行缺陷檢查後,係計算出搬送路線L所搬送之薄膜搬送量,且當計算出之搬送量與第二偏移距離一致時,透過記錄裝置13進行記錄。 This embodiment is based on the measurement result of the first length measuring device 14 or the second length measuring device 15, After the first defect inspection device 11 and the second defect inspection device 12 perform a defect inspection, the film conveyance amount of the conveyance route L is calculated, and when the calculated conveyance amount is consistent with the second offset distance, it is recorded through the record The device 13 performs recording.

另外,本實施形態中,當第一儲料器112作動時,除了缺陷資 訊外,亦可將第一儲料器112已作動之資訊(以下稱為儲料器作動資訊)記錄於雙面貼合薄膜F105。記錄儲料器作動資訊時,附有儲料器作動資訊部分之缺陷部位可經由操作員詳細檢查後,檢查出記錄位置的偏移等。藉此,可降低將良品部位誤判為缺陷部位的機率,用以提升良率。 In addition, in this embodiment, when the first stocker 112 is operated, In addition, information on the operation of the first stocker 112 (hereinafter referred to as stocker operation information) can also be recorded on the double-sided laminating film F105. When recording the operation information of the stocker, the defective part with the information information of the stocker operation can be checked by the operator in detail to check the deviation of the recording position. Thereby, the probability of erroneously judging a good part as a defective part can be reduced, and the yield can be improved.

此外,如第5A圖至第5C圖所示,本實施形態中的記錄裝置13, 係設置遮罩30,防止墨水i附著於雙面貼合薄膜F105至少較記錄區域S靠內側區域。第5A圖係自雙面貼合薄膜F105的上方側觀看遮罩30之俯視圖。第5B圖係自雙面貼合薄膜F105搬送方向的上游側觀看遮罩30之側視圖。第5C圖係自雙面貼合薄膜F105的外側觀看遮罩30之側視圖。 In addition, as shown in FIGS. 5A to 5C, the recording device 13 in this embodiment, A cover 30 is provided to prevent the ink i from adhering to the double-sided bonding film F105 at least inwardly of the recording area S. FIG. 5A is a plan view of the mask 30 viewed from the upper side of the double-sided bonding film F105. FIG. 5B is a side view of the mask 30 viewed from the upstream side in the conveying direction of the double-sided bonding film F105. FIG. 5C is a side view of the mask 30 viewed from the outside of the double-sided bonding film F105.

具體而言,該遮罩30於雙面貼合薄膜F105與印刷頭13a相對 的空間K中,具備有第一側板部30a,包覆面向雙面貼合薄膜F105之內側的一側;第二側板部30b,包覆面向雙面貼合薄膜F105之搬送方向的上游側之一側;及第三側板部30c,包覆面向雙面貼合薄膜F105之搬送方向的下游側之一側。 Specifically, the mask 30 faces the print head 13a on the double-sided bonding film F105. The space K includes a first side plate portion 30a covering the side facing the inside of the double-sided bonding film F105, and a second side plate portion 30b covering the upstream side facing the conveying direction of the double-sided bonding film F105. One side and the third side plate portion 30c cover one side of the downstream side facing the conveyance direction of the double-sided bonding film F105.

遮罩30係利用螺絲等方式相對於印刷頭13a,自由拆裝地被裝 設。遮罩30於空間K中,因其面向雙面貼合薄膜F105之外側的一側係開放,所以可輕易於印刷頭13a進行拆裝。 The mask 30 is detachably attached to the print head 13a by means of screws or the like. Assume. The mask 30 is open in the space K, and its side facing the outer side of the double-sided bonding film F105 is opened, so it can be easily removed and attached to the print head 13a.

遮罩30相對雙面貼合薄膜F105的一面與雙面貼合薄膜F105的 表面之間的間隔T可為1mm以下。該間隔T若設定為1mm以下,則當印刷頭13a噴出之墨水i飛濺至四周時,便可防止該墨水i的飛濺物飛濺至遮罩30的外 側。再者,該數值僅為一實施例,並無侷限於此。 The side of the mask 30 opposite to the double-sided bonding film F105 and the double-sided bonding film F105 The interval T between the surfaces may be 1 mm or less. If the interval T is set to 1 mm or less, when the ink i ejected from the print head 13a splashes around, the splash of the ink i can be prevented from splashing outside the mask 30. side. Moreover, the numerical value is only an example, and is not limited thereto.

再者,墨水i的飛濺物係指印刷頭13a噴出之墨水i中,如自資 訊記錄位置飛濺至周圍之墨水i或附著於雙面貼合薄膜F105後飛濺至周圍之墨水i等。 Moreover, the splash of ink i refers to the ink i ejected from the print head 13a, such as self-funded At the recording position, the ink i splashes onto the surrounding area, or the ink i splashes to the surrounding area after attaching to the double-sided laminating film F105.

記錄區域S係位在雙面貼合薄膜F105貼合於該液晶顯示面板P 時較疊合於液晶顯示面板P之顯示區域P4部分更靠外側。另外,記錄區域S係為貼合於該液晶顯示面板P前或貼合於該液晶顯示面板P後,遭切除之區域。 The recording area S is located on the double-sided bonding film F105 and is bonded to the liquid crystal display panel P. In this case, the display area P4 superimposed on the liquid crystal display panel P is further outside. In addition, the recording area S is an area cut off before being attached to the liquid crystal display panel P or after being attached to the liquid crystal display panel P.

組成遮罩30之三個側板部(第一側板部30a、第二側板部30b、 第三側板部30c)中,第一側板部30a係防止墨水i的飛濺物附著於疊合雙面貼合薄膜F105的顯示區域P4之部分。另一方面,第二側板部30b係防止墨水i的飛濺物附著於雙面貼合薄膜F105之搬送方向的上游側。另一方面,第三側板部30c係防止墨水i的飛濺物附著於雙面貼合薄膜F105之搬送方向的下游側。 The three side plate portions (first side plate portion 30a, second side plate portion 30b, In the third side plate portion 30c), the first side plate portion 30a is a portion that prevents splashes of the ink i from adhering to the display area P4 of the double-sided laminated film F105. On the other hand, the second side plate portion 30b prevents the splash of ink i from adhering to the upstream side in the conveying direction of the double-sided bonding film F105. On the other hand, the third side plate portion 30c prevents the splash of ink i from adhering to the downstream side in the conveying direction of the double-sided bonding film F105.

墨水i的飛濺物係附著於遮罩30的內側面。因此,遮罩30可定 期自印刷頭13a取下,待洗淨後再裝回印刷頭13a重複使用。 The splash of ink i is adhered to the inner surface of the mask 30. Therefore, the mask 30 can be fixed It is removed from the print head 13a at a later date, and after being washed, the print head 13a is replaced and reused.

另外,薄膜製造裝置100可具備靜電去除裝置40,去除雙面貼 合薄膜F105之表面的靜電。靜電去除裝置40係稱為負離子發生器,其配置於雙面貼合薄膜F105之搬送方向中較記錄裝置13(印刷頭13a)更靠上游側。接著,該靜電去除裝置40係藉由吹出橫跨雙面貼合薄膜F105的寬度方向之負離子化氣體,以去除雙面貼合薄膜F105的表面所產生之靜電。 In addition, the thin film manufacturing apparatus 100 may include a static elimination device 40 to remove double-sided stickers. The static electricity on the surface of the film F105 is combined. The static electricity removing device 40 is called a negative ion generator, and is disposed on the upstream side of the recording device 13 (print head 13a) in the conveying direction of the double-sided bonding film F105. Next, the static electricity removing device 40 blows out a negative ionizing gas across the width direction of the double-sided bonding film F105 to remove static electricity generated on the surface of the double-sided bonding film F105.

如此,薄膜製造裝置100係可防止墨水i的飛濺物因靜電而靠近 雙面貼合薄膜F105的表面。因此,薄膜製造裝置100透過該遮罩30與靜電去除裝置40之組合,更可抑制墨水i的飛濺物附著於雙面貼合薄膜F105的表面。 In this way, the thin film manufacturing apparatus 100 can prevent the splash of ink i from approaching due to static electricity. The surface of the film F105 is laminated on both sides. Therefore, the film manufacturing apparatus 100 can further prevent the spatter of the ink i from adhering to the surface of the double-sided bonding film F105 through the combination of the mask 30 and the static elimination device 40.

如上所述,本實施形態中之缺陷檢查系統10,係可防止當將缺 陷資訊記錄於雙面貼合薄膜F105時墨水i飛濺所造成之雙面貼合薄膜F105的污 染。 As described above, the defect inspection system 10 in this embodiment prevents Sink information recorded on the double-sided laminated film F105 caused by ink i splashing dye.

再者,本發明並無侷限於上述實施形態中,在無脫離本發明之精神與範圍內係可做各種變動。 In addition, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit and scope of the present invention.

具體而言,該遮罩30的三個側板部(第一側板部30a、第二側板部30b、第三側板部30c)中,至少需配置有第一側板部30a。如此,便可防止墨水i的飛濺物附著於疊合雙面貼合薄膜F105的顯示區域P4之部位。 Specifically, at least one of the three side plate portions (the first side plate portion 30a, the second side plate portion 30b, and the third side plate portion 30c) of the cover 30 must be provided with the first side plate portion 30a. In this way, the splash of the ink i can be prevented from adhering to the portion of the display area P4 of the double-sided laminated film F105.

另外,如第6圖所示,該遮罩30除了該三個側板部(第一側板部30a、第二側板部30b、第三側板部30c)外,亦可配置有第四側板部30d,包覆面向雙面貼合薄膜F105之外側的一側。 In addition, as shown in FIG. 6, in addition to the three side plate portions (the first side plate portion 30a, the second side plate portion 30b, and the third side plate portion 30c), the mask 30 may be provided with a fourth side plate portion 30d. The cover faces the outer side of the double-sided bonding film F105.

另外,如第7A,7B圖所示,關於該記錄裝置13該印刷頭13a亦可相對於導輪41加以配置。此時,安裝於印刷頭13a之遮罩31下端部,其形狀係沿著導輪41外形設置。如此,其與雙面貼合薄膜F105之表面間的間隔T係可為1mm以下。 In addition, as shown in FIGS. 7A and 7B, the recording device 13 and the print head 13 a may be disposed with respect to the guide wheel 41. At this time, the shape of the lower end of the mask 31 attached to the print head 13 a is provided along the outer shape of the guide wheel 41. In this way, the interval T between the surface and the surface of the double-sided bonding film F105 can be 1 mm or less.

另外,本發明另一實施形態中,舉例而言,亦可使用如第8A,8B圖所示之遮罩32。此遮罩32係由平行平板狀的板材所組成,其於靠近雙面貼合薄膜F105的狀態下相對雙面貼合薄膜F105配置。另外,俯視遮罩32的記錄區域S之位置,係設置有窗口部32a(開口部)。此結構下,因記錄區域S以外的區域包覆有遮罩32,所以可防止於雙面貼合薄膜F105記錄缺陷資訊時墨水i飛濺所造成之雙面貼合薄膜F105的污染。另外,遮罩32亦可設置有該側板部(第一側板部30a、第二側板部30b、第三側板部30c、第四側板部30d)。即,該遮罩32亦可為包覆該遮罩30的底面之底板部結構。 In addition, in another embodiment of the present invention, for example, a mask 32 as shown in FIGS. 8A and 8B may be used. The mask 32 is composed of a parallel flat plate material, and is arranged relative to the double-sided bonding film F105 in a state close to the double-sided bonding film F105. In addition, a window portion 32a (opening portion) is provided at a position of the recording area S of the mask 32 in a plan view. In this structure, since the mask 32 is covered in the area other than the recording area S, it is possible to prevent contamination of the double-sided bonding film F105 caused by ink i splashing when the double-sided bonding film F105 records defect information. The cover 32 may be provided with the side plate portion (the first side plate portion 30a, the second side plate portion 30b, the third side plate portion 30c, and the fourth side plate portion 30d). That is, the cover 32 may have a bottom plate structure that covers the bottom surface of the cover 30.

另外,該記錄裝置13雖配置於第二缺陷檢查裝置12之下游側,但亦可配置於第一缺陷檢查裝置11之下游側。此時,當第一缺陷檢查裝置11進行缺陷檢查後,可透過記錄裝置13進行缺陷資訊記錄。 Although the recording device 13 is disposed on the downstream side of the second defect inspection device 12, it may be disposed on the downstream side of the first defect inspection device 11. At this time, after the first defect inspection device 11 performs the defect inspection, the defect information can be recorded through the recording device 13.

另外,該記錄裝置13並無侷限於該缺陷檢查後記錄缺陷資訊。 舉例而言,於長距離搬送路線中,可複數配置記錄裝置,其間隔一定距離便記錄距離資訊,並依據記錄之距離資訊進行距離之補正。進行此距離資訊記錄之記錄裝置,舉例而言,係可配置於第一缺陷檢查裝置11之上游側等。本發明一實施形態中,進行此距離資訊記錄之記錄裝置,其於記錄裝置所具備之印刷頭上亦設置與該遮罩30,31,32相同之遮罩,以防止記錄時墨水飛濺所造成之薄膜污染。 In addition, the recording device 13 is not limited to record defect information after the defect inspection. For example, in the long-distance transportation route, a plurality of recording devices may be arranged, and the distance information is recorded at a certain distance, and the distance is corrected according to the recorded distance information. The recording device that records this distance information is, for example, disposed on the upstream side of the first defect inspection device 11 or the like. In an embodiment of the present invention, the recording device for recording the distance information is also provided on the printing head of the recording device with the same mask as the masks 30, 31, 32 to prevent ink splashing during recording. Film contamination.

再者,本發明實施形態所適用之薄膜,並無侷限於該偏光薄膜、相位差薄膜或輝度增加薄膜等光學薄膜,若可透過記錄裝置13進行記錄之薄膜,則可廣泛運用本發明實施形態。 Furthermore, the film to which the embodiment of the present invention is applied is not limited to the optical film such as a polarizing film, a retardation film, or a brightness increasing film. If the film can be recorded through the recording device 13, the embodiment of the present invention can be widely used. .

Claims (8)

一種缺陷檢查系統,係具備:一搬送路線,係搬送一長條帶狀薄膜;一缺陷檢查裝置,係針對該搬送路線所搬送的薄膜進行缺陷檢查;及一記錄裝置,係於該搬送路線所搬送的薄膜上記錄該缺陷檢查結果所得之一缺陷資訊;其中,該記錄裝置具備:一印刷頭,係於沿著該薄膜端緣部的一記錄區域中藉由噴出一墨水來印刷該缺陷資訊;及一遮罩,係防止該墨水附著於該薄膜至少較該記錄區域靠內側區域上,且該遮罩相對該薄膜的一面與該薄膜的表面之間的間隔係為1mm以下。A defect inspection system includes: a conveying route for conveying a long strip-shaped film; a defect inspection device for performing defect inspection on a film conveyed by the conveying route; and a recording device for the conveying route Defect information obtained from the defect inspection result is recorded on the transported film; wherein, the recording device is provided with a printing head that prints the defect information by ejecting an ink in a recording area along the edge of the film And a mask to prevent the ink from adhering to the film at least on the inner region than the recording area, and the interval between the side of the mask opposite the film and the surface of the film is 1 mm or less. 如申請專利範圍第1項所述之缺陷檢查系統,其中,該遮罩於該薄膜與該印刷頭相對的一空間中,具備一第一側板部,包覆至少面向該薄膜之內側的一側。The defect inspection system according to item 1 of the patent application scope, wherein the mask is provided in a space opposite to the print head of the film, and has a first side plate portion covering at least a side facing the inside of the film . 如申請專利範圍第2項所述之缺陷檢查系統,其中,該遮罩於該空間中具備一第二側板部,包覆面向該薄膜之搬送方向上游側的一側;及一第三側板部,包覆面向該薄膜之搬送方向下游側的一側。The defect inspection system according to item 2 of the scope of patent application, wherein the mask includes a second side plate portion in the space, covering the side facing the upstream side of the film in the transport direction; and a third side plate portion , Covering the side facing the downstream side in the transport direction of the film. 如申請專利範圍第3項所述之缺陷檢查系統,其中,該遮罩於該空間中具備一第四側板部,包覆面向該薄膜之外側的一側。The defect inspection system according to item 3 of the scope of patent application, wherein the mask is provided with a fourth side plate portion in the space to cover a side facing the outer side of the film. 如申請專利範圍第1-4項中任一項所述之缺陷檢查系統,其中,該遮罩相對於該印刷頭自由拆裝地被裝設。The defect inspection system according to any one of claims 1 to 4, wherein the mask is detachably mounted with respect to the print head. 如申請專利範圍第1項所述之缺陷檢查系統,其中,該遮罩係於靠近該薄膜的狀態下與該薄膜相對地配置,並且該遮罩俯視該記錄區域的位置係具備一窗口部。The defect inspection system according to item 1 of the scope of patent application, wherein the mask is disposed opposite the film in a state close to the film, and the mask is provided with a window portion in a position overlooking the recording area. 如申請專利範圍第1-4、6項中任一項所述之缺陷檢查系統,其中,於該薄膜的搬送方向上,較該記錄裝置更上游側的位置,係具備一靜電去除裝置,去除該薄膜之表面的靜電。The defect inspection system according to any one of claims 1 to 4 and 6, wherein the film is transported in a direction more upstream than the recording device by a static electricity removing device to The surface of the film is static. 如申請專利範圍第5項所述之缺陷檢查系統,其中,於該薄膜的搬送方向上,較該記錄裝置更上游側的位置,係具備一靜電去除裝置,去除該薄膜之表面的靜電。The defect inspection system according to item 5 of the scope of patent application, wherein, in the conveying direction of the film, a position more upstream than the recording device is provided with a static electricity removing device to remove static electricity from the surface of the film.
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CN105247351B (en) 2019-12-24
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