TWI626214B - Purification method and purification system for carbonic acid gas - Google Patents

Purification method and purification system for carbonic acid gas Download PDF

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TWI626214B
TWI626214B TW103142492A TW103142492A TWI626214B TW I626214 B TWI626214 B TW I626214B TW 103142492 A TW103142492 A TW 103142492A TW 103142492 A TW103142492 A TW 103142492A TW I626214 B TWI626214 B TW I626214B
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adsorption
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adsorption towers
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福島真由美
岸井充
志摩康一
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住友精化股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
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    • B01D2253/106Silica or silicates
    • B01D2253/108Zeolites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01D2256/00Main component in the product gas stream after treatment
    • B01D2256/22Carbon dioxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
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    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/50Carbon oxides
    • B01D2257/502Carbon monoxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01D2257/00Components to be removed
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    • B01D2257/702Hydrocarbons
    • B01D2257/7022Aliphatic hydrocarbons
    • B01D2257/7025Methane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2258/00Sources of waste gases
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    • B01D2258/0275Other waste gases from food processing plants or kitchens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40071Nine
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/403Further details for adsorption processes and devices using three beds
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/20Capture or disposal of greenhouse gases of methane

Abstract

本發明提供一種可於不降低回收率之情況下提高藉由變壓式吸附法進行純化之二氧化碳之純度的二氧化碳之純化方法與純化系統。 The present invention provides a purification method and a purification system for carbon dioxide which can improve the purity of carbon dioxide purified by a pressure swing adsorption method without lowering the recovery rate.

於吸附塔2a、2b、2c各者中,依序實施吸附步驟、減壓步驟、解吸步驟、升壓步驟,使原料二氧化碳中所含之二氧化碳於加壓下吸附至吸附劑,並且將未被吸附劑吸附之雜質氣體作為逸氣排出。實施氣體壓出步驟,其係藉由向處於解吸步驟後且升壓步驟前之狀態之吸附塔之任一者中,導入處於減壓步驟之吸附塔之另外任一者之內部氣體,而將滯留於該處於解吸步驟後且升壓步驟前之狀態之吸附塔之任一者之內部之二氧化碳壓出至外部。將自各吸附塔於解吸步驟中排出之二氧化碳、與於氣體壓出步驟中壓出之二氧化碳作為純化氣體加以回收。 In each of the adsorption towers 2a, 2b, and 2c, the adsorption step, the depressurization step, the desorption step, and the pressure increasing step are sequentially performed to adsorb the carbon dioxide contained in the raw material carbon dioxide to the adsorbent under pressure, and will not be The impurity gas adsorbed by the adsorbent is discharged as a gas. Performing a gas extrusion step of introducing the internal gas of any one of the adsorption towers in the depressurization step into any one of the adsorption towers in a state after the desorption step and before the pressure increasing step, The carbon dioxide remaining inside the adsorption tower which is in the state after the desorption step and before the pressure increasing step is pushed out to the outside. The carbon dioxide discharged from each adsorption tower in the desorption step and the carbon dioxide extruded in the gas extrusion step are recovered as a purified gas.

Description

二氧化碳之純化方法及純化系統 Carbon dioxide purification method and purification system

本發明係關於一種藉由將包含雜質氣體之原料二氧化碳進行純化而以較高之回收率獲得高純度之二氧化碳之方法與系統。 The present invention relates to a method and system for obtaining high purity carbon dioxide at a high recovery rate by purifying a raw material carbon dioxide containing an impurity gas.

二氧化碳被用於廣泛之領域,例如用於食品等之低溫保存或低溫運輸、飲料之發泡、進行焊接之時,或用作滅火劑。於工業上,自石油純化設備、氨製造設備、製鐵設備、啤酒製造設備等中所排出之包含二氧化碳之氣體係用作二氧化碳之原料。此種原料二氧化碳由於包含氫氣、甲烷、氮氣、氧氣、一氧化碳等雜質氣體,故而進行純化以獲得高純度之二氧化碳。 Carbon dioxide is used in a wide range of applications, such as for cryopreservation or cryogenic transportation of foods, foaming of beverages, welding, or as a fire extinguishing agent. Industrially, a gas system containing carbon dioxide discharged from petroleum purification equipment, ammonia production equipment, iron making equipment, beer manufacturing equipment, and the like is used as a raw material of carbon dioxide. The carbon dioxide of such a raw material is purified by containing an impurity gas such as hydrogen, methane, nitrogen, oxygen, carbon monoxide or the like to obtain high-purity carbon dioxide.

作為原料二氧化碳之純化方法,已知有:藉由將二氧化碳進行壓縮冷卻使之液化而自雜質氣體中分離之低溫分離法、利用胺吸收液選擇性地吸收二氧化碳而自雜質氣體中分離之胺吸收法、使用分離膜將二氧化碳自雜質氣體中分離之方法、及變壓式吸附法(PSA,Pressure Swing Adsorption)等。於該等純化方法中,有考慮到原料二氧化碳之供給流量、成本、操作等方面,而使用變壓式吸附法之情形。 As a method for purifying a raw material carbon dioxide, a low-temperature separation method in which carbon dioxide is compressed and cooled to be separated from an impurity gas, and an amine absorption which is selectively separated from an impurity gas by an amine absorption liquid is known. The method uses a separation membrane to separate carbon dioxide from an impurity gas, and a pressure swing adsorption method (PSA, Pressure Swing Adsorption). Among these purification methods, a pressure swing adsorption method is used in consideration of the supply flow rate, cost, operation, and the like of the raw material carbon dioxide.

作為藉由變壓式吸附法而將原料二氧化碳進行純化之先前技術,已知有使用具有複數個吸附塔之變壓式吸附裝置的方法。於該純 化方法中,將相對於雜質氣體而優先吸附二氧化碳之吸附劑收納至各吸附塔中。於該各吸附塔中,實施如下步驟:吸附步驟,其係使所導入之原料二氧化碳中所含之二氧化碳於加壓下吸附至吸附劑,並且將未被吸附劑吸附之雜質氣體排出;及解吸步驟,其係於壓力減小時使二氧化碳自吸附劑解吸(參照專利文獻1)。將經該解吸步驟之二氧化碳作為純化氣體加以回收。 As a prior art for purifying a raw material carbon dioxide by a pressure swing adsorption method, a method using a pressure swing type adsorption device having a plurality of adsorption columns is known. In the pure In the method, the adsorbent which preferentially adsorbs carbon dioxide with respect to the impurity gas is accommodated in each adsorption tower. In each of the adsorption towers, a step of adsorbing carbon dioxide contained in the introduced raw material carbon dioxide to the adsorbent under pressure and discharging the impurity gas not adsorbed by the adsorbent; and desorbing The step of desorbing carbon dioxide from the adsorbent when the pressure is reduced (refer to Patent Document 1). The carbon dioxide subjected to the desorption step is recovered as a purified gas.

關於藉由在吸附塔之內部於大氣壓~數十kPa(錶壓)之加壓下進行吸附步驟,並使吸附塔之內部連通至常壓空間而進行解吸步驟之情形,與於真空處理後進行解吸步驟之情形相比,無需真空泵,因此可減輕電力成本及維護成本等。 The desorption step is carried out by performing an adsorption step under pressure of atmospheric pressure to several tens of kPa (gauge pressure) inside the adsorption tower, and connecting the inside of the adsorption tower to a normal pressure space, and performing the desorption step after the vacuum treatment Compared with the case of the desorption step, a vacuum pump is not required, so that power cost and maintenance cost can be reduced.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利第4839114號 [Patent Document 1] Japanese Patent No. 4839114

於上述專利文獻中記載之先前技術中,存在若提高所純化之二氧化碳之純度,則回收率降低、成本優勢小之問題。進而,存在所純化之二氧化碳之品質不穩定之問題。本發明之目的在於提供一種可解決使用變壓式吸附法之先前技術問題的二氧化碳之純化方法與純化系統。 In the prior art described in the above patent documents, there is a problem that the recovery rate is lowered and the cost advantage is small if the purity of the purified carbon dioxide is increased. Further, there is a problem that the quality of the purified carbon dioxide is unstable. It is an object of the present invention to provide a purification method and purification system for carbon dioxide which can solve the prior art problems of the pressure swing adsorption method.

本發明方法係使用具有複數個吸附塔之變壓式吸附裝置而將包含雜質氣體之原料二氧化碳進行純化時,將相對於雜質氣體而優先吸附二氧化碳之吸附劑收納至上述各吸附塔中,向上述各吸附塔中依序導入上述原料二氧化碳,於上述各吸附塔中,依序實施如下步驟而將於上述解吸步驟中自上述各吸附塔中排出之二氧化碳作為純化氣體加 以回收的二氧化碳之純化方法:吸附步驟,其係使所導入之上述原料二氧化碳中所含之二氧化碳於加壓下吸附至上述吸附劑,並且將未被上述吸附劑吸附之雜質氣體作為逸氣排出;減壓步驟,其係減少內部壓力;解吸步驟,其係將二氧化碳自上述吸附劑解吸並排出;及升壓步驟,其係使內部壓力上升;該方法之特徵在於:實施如下氣體壓出步驟,該氣體壓出步驟係藉由向處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中,導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體,而將滯留於處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部之二氧化碳壓出至外部;將於上述氣體壓出步驟中壓出之二氧化碳作為純化氣體加以回收。 In the method of the present invention, when the carbon dioxide containing the impurity gas is purified by using a pressure swing adsorption device having a plurality of adsorption columns, the adsorbent which preferentially adsorbs carbon dioxide with respect to the impurity gas is stored in each of the adsorption towers, The raw material carbon dioxide is sequentially introduced into each adsorption tower, and in each of the adsorption towers, the following steps are sequentially performed, and the carbon dioxide discharged from the adsorption towers in the desorption step is added as a purification gas. a method for purifying carbon dioxide recovered: an adsorption step of adsorbing carbon dioxide contained in the carbon dioxide of the raw material introduced into the adsorbent under pressure, and discharging the impurity gas not adsorbed by the adsorbent as an outgas a depressurization step for reducing internal pressure; a desorption step for desorbing and discharging carbon dioxide from the adsorbent; and a step of increasing the internal pressure; the method is characterized by: performing the following gas extrusion step The gas extrusion step is introduced into the other of the adsorption towers in the depressurization step by any one of the adsorption towers in a state after the desorption step and before the pressure increasing step. a gas which is desorbed to the outside of the inside of the adsorption tower which is in a state after the desorption step and before the step of the step of raising the pressure; the carbon dioxide which is extruded in the gas extrusion step is purified The gas is recovered.

本發明係基於以下之見解。 The present invention is based on the following findings.

於藉由變壓式吸附法將原料二氧化碳進行純化而獲得高純度之二氧化碳時,於解吸步驟後之吸附塔內部會滯留自吸附劑所解吸之高純度之二氧化碳。 When the raw material carbon dioxide is purified by the pressure swing adsorption method to obtain high-purity carbon dioxide, the high-purity carbon dioxide desorbed from the adsorbent is retained inside the adsorption tower after the desorption step.

於先前技術中,滯留於該吸附塔內部之高純度之二氧化碳雖然於其後之吸附步驟中一部分被吸附至吸附劑,但剩餘部分作為逸氣自吸附塔被排出,因而二氧化碳之回收率降低。 In the prior art, the high-purity carbon dioxide retained in the inside of the adsorption tower is partially adsorbed to the adsorbent in the subsequent adsorption step, but the remainder is discharged as an outgas from the adsorption tower, so that the recovery rate of carbon dioxide is lowered.

針對該情況,根據本發明,實施如下氣體壓出步驟,該氣體壓出步驟係藉由向處於解吸步驟後且升壓步驟前之狀態之吸附塔之任一者中,導入處於減壓步驟之吸附塔之另外任一者之內部氣體,而將該滯留之二氧化碳壓出至外部;將該壓出之二氧化碳作為純化氣體加以回收。即,可避免浪費而回收滯留於吸附塔內部之高純度之二氧化碳,從而提高二氧化碳之回收率。 In this case, according to the present invention, a gas pressing step is performed by introducing into the depressurizing step by any one of the adsorption columns in a state after the desorption step and before the pressure increasing step. The internal gas of any of the other columns is adsorbed, and the retained carbon dioxide is pushed out to the outside; and the extracted carbon dioxide is recovered as a purified gas. That is, it is possible to avoid waste and recover high-purity carbon dioxide remaining inside the adsorption tower, thereby increasing the recovery rate of carbon dioxide.

本發明系統具備用以將包含雜質氣體之原料二氧化碳進行純化之變壓式吸附裝置,上述變壓式吸附裝置具有收納有相對於雜質氣體 而優先吸附二氧化碳之吸附劑的複數個吸附塔,且具備:導入流路,其係用以向上述各吸附塔中導入上述原料二氧化碳;逸氣流路,其係用以將逸氣自上述各吸附塔中排出;純化氣體流路,其係用以將二氧化碳自上述各吸附塔中排出;連通流路,其係用以將上述吸附塔之任一者與另外任一者相互連通;導入路開關閥,其係將上述各吸附塔與上述導入流路之間個別地開啟及關閉;逸氣路開關閥,其係將上述各吸附塔與上述逸氣流路之間個別地開啟及關閉;純化氣體路開關閥,其係將上述各吸附塔與上述純化氣體流路之間個別地開啟及關閉;及連通路開關閥,其係將上述各吸附塔與上述連通流路之間個別地開啟及關閉;上述各開關閥係作為以可個別地進行開關動作之方式具有開關用致動器之自動閥並且連接於控制裝置,於上述各吸附塔中,以依序實施如下步驟之方式,利用上述控制裝置而控制上述各開關閥:吸附步驟,其係使所導入之上述原料二氧化碳中所含之二氧化碳於加壓下吸附至上述吸附劑,並且將未被上述吸附劑吸附之雜質氣體作為逸氣排出;減壓步驟,其係減少內部壓力;解吸步驟,其係將二氧化碳自上述吸附劑解吸並排出;及升壓步驟,其係使內部壓力上升;該系統之特徵在於:以實施如下氣體壓出步驟之方式利用上述控制裝置控制上述各開關閥,該氣體壓出步驟係藉由向處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中,導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體,而將滯留於處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部之二氧化碳壓出至外部。 The system of the present invention is provided with a pressure swing type adsorption device for purifying carbon dioxide containing a raw material containing an impurity gas, and the pressure swing type adsorption device has a gas relative to the impurity gas And a plurality of adsorption towers which preferentially adsorb the adsorbent of carbon dioxide, and have: an introduction flow path for introducing the carbon dioxide of the raw material into the adsorption towers; and an escape flow path for degassing from the respective adsorptions Discharged in the column; a purified gas flow path for discharging carbon dioxide from the respective adsorption towers; and a communication flow path for interconnecting any one of the adsorption towers with any one of the other; a valve for individually opening and closing between each of the adsorption towers and the introduction flow path; and an escape valve switching valve for individually opening and closing between the adsorption towers and the escape flow path; a switch valve for individually opening and closing between the adsorption towers and the purified gas flow path; and a communication path switching valve for individually opening and closing between the adsorption towers and the communication flow path Each of the above-described switching valves is an automatic valve having a switching actuator that can be individually switched and connected to the control device, and is sequentially implemented in each of the adsorption towers In the next step, the above-mentioned respective switching valves are controlled by the above-mentioned control device: an adsorption step of adsorbing carbon dioxide contained in the introduced raw material carbon dioxide to the adsorbent under pressure, and will not be adsorbed by the adsorbent The adsorbed impurity gas is discharged as an outgas; the depressurization step is to reduce the internal pressure; the desorption step is to desorb and discharge the carbon dioxide from the adsorbent; and the step of increasing the internal pressure; the characteristics of the system The control valve is configured to control the respective on-off valves by performing the gas pressing step, wherein the gas pressing step is performed by any one of the adsorption towers in a state after the desorption step and before the step of boosting The internal gas of any one of the adsorption towers in the depressurization step is introduced, and is retained in the inside of the adsorption tower in a state after the desorption step and before the pressure increasing step. The carbon dioxide is pushed out to the outside.

根據本發明系統,可實施本發明方法。 The method of the invention can be carried out in accordance with the system of the invention.

於本發明方法中,較佳為於上述氣體壓出步驟中,根據上述原料二氧化碳中之二氧化碳濃度之變化而變更向上述吸附塔之任一者中自處於上述減壓步驟之上述吸附塔另外任一者所導入之氣體量。 In the method of the present invention, in the gas extrusion step, it is preferable to change the adsorption tower from the adsorption tower to any one of the adsorption towers according to a change in the carbon dioxide concentration in the raw material carbon dioxide. The amount of gas introduced by one.

處於減壓步驟之吸附塔之內部氣體不僅包含雜質氣體亦包含未被吸附劑吸附之二氧化碳,且該內部氣體之二氧化碳濃度根據原料二氧化碳中之二氧化碳濃度之變化而發生變化。因此,若原料二氧化碳中之二氧化碳濃度升高,則增多向處於氣體壓出步驟之吸附塔之任一者中自另外任一者所導入之氣體量,若原料二氧化碳中之二氧化碳濃度降低,則減少所導入之氣體量,藉此可抑制氣體壓出步驟中壓出之二氧化碳之純度變動,將所回收之二氧化碳之純度與回收率維持為較高。 The internal gas of the adsorption tower in the depressurization step contains not only the impurity gas but also the carbon dioxide which is not adsorbed by the adsorbent, and the carbon dioxide concentration of the internal gas changes depending on the concentration of the carbon dioxide in the raw material carbon dioxide. Therefore, if the concentration of carbon dioxide in the raw material carbon dioxide is increased, the amount of gas introduced from any one of the adsorption towers in the gas extrusion step is increased, and if the concentration of carbon dioxide in the raw material carbon dioxide is decreased, the amount is decreased. The amount of the introduced gas can suppress the change in the purity of the carbon dioxide extruded in the gas extrusion step, and maintain the purity and recovery of the recovered carbon dioxide at a high level.

於該情形時,本發明系統較佳為具備調節於上述連通流路中流動之氣體流量之流量控制閥,上述流量控制閥係作為以可進行流量調節動作之方式具有流量調節用致動器之自動閥並且連接至上述控制裝置,且具備檢測上述原料二氧化碳之二氧化碳濃度並且連接於上述控制裝置之感測器,上述氣體壓出步驟之預先確定之一定之實施時間係記憶於上述控制裝置,於上述氣體壓出步驟中,向上述吸附塔之任一者中導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體時之於上述連通流路中流動之氣體流量、與上述原料二氧化碳中之二氧化碳濃度之間之預先確定之對應關係係記憶於上述控制裝置,以根據利用上述感測器所測得之二氧化碳濃度之變化而變更於上述氣體壓出步驟中向上述吸附塔之任一者中自處於上述減壓步驟之上述吸附塔之另外任一者所導入之氣體量之方式,為了以上述控制裝置所記憶之上述實施時間實施上述氣體壓出步驟,而控制上述開關閥,並且基於上述對應關係而變更上述流量控制閥之調節氣體流量。 In this case, the system of the present invention preferably includes a flow rate control valve that regulates the flow rate of the gas flowing through the communication passage, and the flow rate control valve has a flow rate adjustment actuator as a flow rate adjustment operation. And an automatic valve connected to the control device, and having a sensor for detecting a carbon dioxide concentration of the raw material carbon dioxide and connected to the control device, wherein a predetermined execution time of the gas pressing step is stored in the control device In the gas extrusion step, the flow rate of the gas flowing through the communication passage when the internal gas of the adsorption tower in the depressurization step is introduced into any one of the adsorption towers, and the raw material The predetermined correspondence relationship between the carbon dioxide concentrations in the carbon dioxide is stored in the control device, and is changed to the adsorption tower in the gas extrusion step according to the change in the carbon dioxide concentration measured by the sensor. Any one of the above adsorption towers in the above-described depressurization step The embodiment of the gas amount, the above-described embodiment in order to control time of said memory means of an embodiment of the gas pressure step, and controlling the switching valve, and the changes the flow control regulator of the gas flow valve based on the correspondence relationship.

或者,本發明系統較佳為具備檢測上述原料二氧化碳之二氧化碳濃度並且連接於上述控制裝置之感測器,上述氣體壓出步驟之實施時間、與上述原料二氧化碳中之二氧化碳濃度之間之預先確定之對應關係係記憶於上述控制裝置,以根據利用上述感測器所測得之二氧化 碳濃度之變化而變更於上述氣體壓出步驟中向上述吸附塔之任一者中自另外任一者所導入之氣體量之方式,利用上述控制裝置並基於上述對應關係而變更上述氣體壓出步驟之實施時間。 Alternatively, the system of the present invention preferably has a sensor for detecting the carbon dioxide concentration of the carbon dioxide of the raw material and connected to the control device, and a predetermined time between the execution time of the gas pressing step and the carbon dioxide concentration in the raw material carbon dioxide. Correspondence is stored in the above control device to determine the oxidization according to the sensor The change in the carbon concentration is changed to the amount of gas introduced from any one of the adsorption towers in the gas extrusion step, and the gas extraction is performed by the control device based on the correspondence relationship. The implementation time of the steps.

於本發明方法中,較佳為藉由使處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部、與處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者之內部以壓力相等之方式連通,而於處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中實施升壓用均壓步驟,並且於處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者中實施解吸用均壓步驟。 In the method of the present invention, it is preferred that the inside of the adsorption tower in a state after the gas extrusion step and before the pressure increasing step is after the pressure reduction step and before the desorption step In the other state, the inside of the adsorption tower is connected to the inside of the adsorption tower, and the pressure is increased in the adsorption tower after the gas extrusion step and the pressure increase step. The pressure equalization step is performed in any one of the adsorption towers after the pressure reduction step and before the desorption step.

藉此,處於升壓用均壓步驟之吸附塔係藉由送入處於解吸用均壓步驟之吸附塔之內部氣體而升壓,該送入之氣體中所含之二氧化碳於其後之吸附步驟中被吸附至吸附劑。因此,可提高二氧化碳之回收率。 Thereby, the adsorption tower in the pressure equalization step is pressurized by feeding the internal gas of the adsorption tower in the depressurization pressure equalization step, and the carbon dioxide contained in the supplied gas is followed by the adsorption step. It is adsorbed to the adsorbent. Therefore, the recovery rate of carbon dioxide can be improved.

於本發明方法中,較佳為使用壓縮氣體作為上述原料二氧化碳,藉由上述原料二氧化碳之壓力而將上述吸附塔內部加壓至上述吸附步驟中所需之吸附壓力,藉由使上述吸附塔內部連通至常壓空間,而減壓至上述解吸步驟中所需之壓力。 In the method of the present invention, it is preferred to use a compressed gas as the raw material carbon dioxide, and pressurize the inside of the adsorption tower to the adsorption pressure required in the adsorption step by the pressure of the raw material carbon dioxide, thereby making the inside of the adsorption tower Connect to the atmospheric space and depressurize to the pressure required in the desorption step described above.

因此,無需設置用以對吸附塔內部進行加壓或減壓之專用設備,而可降低電力成本或維護成本等,又,由於不進行真空操作,故而不會自外部混入空氣等,因此關係到品質之維持。 Therefore, it is not necessary to provide a dedicated device for pressurizing or depressurizing the inside of the adsorption tower, and it is possible to reduce power cost, maintenance cost, and the like, and since vacuum operation is not performed, air is not mixed from the outside, and thus it is related to Maintenance of quality.

根據本發明,可於不降低回收率之情況下提高藉由變壓式吸附法進行純化之二氧化碳之純度,可獲得品質穩定之二氧化碳。 According to the present invention, the purity of carbon dioxide purified by the pressure swing adsorption method can be improved without lowering the recovery rate, and carbon dioxide of stable quality can be obtained.

1‧‧‧變壓式吸附裝置 1‧‧‧Variable pressure adsorption device

2a、2b、2c‧‧‧吸附塔 2a, 2b, 2c‧‧‧ adsorption tower

2a'、2b'、2c'、2a"、2b"、2c"‧‧‧氣體通過口 2a', 2b', 2c', 2a", 2b", 2c"‧‧‧ gas passage

3‧‧‧導入配管(導入流路) 3‧‧‧Introduction piping (introduction flow path)

4‧‧‧逸氣配管(逸氣流路) 4‧‧‧Yi gas piping (Yi air flow)

5‧‧‧純化氣體配管(純化氣體流路) 5‧‧‧Purified gas piping (purified gas flow path)

6a、6b、6c‧‧‧第1~第3開關閥(導入路開關閥) 6a, 6b, 6c‧‧‧1st to 3rd on-off valves (introduction switch valves)

7a、7b、7c‧‧‧第4~第6開關閥(逸氣路開關閥) 7a, 7b, 7c‧‧‧4th to 6th on-off valves (airway switch valves)

8a、8b、8c‧‧‧第7~第9開關閥(純化氣體路開關閥) 8a, 8b, 8c‧‧‧7th to 9th on-off valves (purified gas circuit switching valves)

9‧‧‧連通配管(連通流路) 9‧‧‧Connected piping (connected flow path)

9a、9b、9c‧‧‧第1~第3連通部 9a, 9b, 9c‧‧‧1st to 3rd communication

10a、10b、10c、11a、11b、11c、12、14‧‧‧第10~第17開關閥(連通路開關閥) 10a, 10b, 10c, 11a, 11b, 11c, 12, 14‧ ‧ 10th to 17th on-off valves (communication switch valves)

13‧‧‧第1流量控制閥 13‧‧‧1st flow control valve

15‧‧‧第2流量控制閥 15‧‧‧2nd flow control valve

20‧‧‧控制裝置 20‧‧‧Control device

21‧‧‧流量感測器 21‧‧‧Flow Sensor

22‧‧‧緩衝箱 22‧‧‧Buffer box

23‧‧‧壓力感測器 23‧‧‧ Pressure Sensor

24‧‧‧濃度感測器 24‧‧‧ concentration sensor

25‧‧‧第3流量控制閥 25‧‧‧3rd flow control valve

26a‧‧‧第1壓力調節閥 26a‧‧‧1st pressure regulating valve

26b‧‧‧第2壓力調節閥 26b‧‧‧2nd pressure regulating valve

27a、27b、27c‧‧‧壓力感測器 27a, 27b, 27c‧‧‧ pressure sensors

28‧‧‧輸入裝置 28‧‧‧ Input device

29‧‧‧輸出裝置 29‧‧‧ Output device

100‧‧‧變壓式吸附裝置 100‧‧‧Variable pressure adsorption device

G1‧‧‧原料二氧化碳 G1‧‧‧ raw material carbon dioxide

G2‧‧‧逸氣 G2‧‧‧ 逸气

G3‧‧‧純化氣體 G3‧‧‧purified gas

G3'‧‧‧純化氣體 G3'‧‧‧purified gas

G4‧‧‧內部氣體 G4‧‧‧ internal gas

G5‧‧‧內部氣體 G5‧‧‧ internal gas

α‧‧‧二氧化碳之純化系統 α‧‧‧CO2 purification system

圖1係本發明之實施形態之變壓式吸附裝置之構成說明圖。 Fig. 1 is an explanatory view showing the configuration of a pressure swing type adsorption apparatus according to an embodiment of the present invention.

圖2係本發明之實施形態之純化系統之控制裝置之說明圖。 Fig. 2 is an explanatory view showing a control device of a purification system according to an embodiment of the present invention.

圖3係表示本發明之實施形態之變壓式吸附裝置之運轉狀態(a)~(i)的圖。 Fig. 3 is a view showing operational states (a) to (i) of the pressure swing adsorption apparatus according to the embodiment of the present invention.

圖4係表示本發明之實施形態之變壓式吸附裝置之運轉狀態、與各吸附塔中之純化處理步驟、與開關閥之狀態之對應關係的圖。 Fig. 4 is a view showing the operational state of the pressure swing adsorption apparatus according to the embodiment of the present invention, the purification processing procedure in each adsorption tower, and the correspondence relationship with the state of the on-off valve.

圖5係另一變壓式吸附裝置之構成說明圖。 Fig. 5 is an explanatory view showing the configuration of another pressure swing type adsorption device.

圖6係表示比較例之變壓式吸附裝置之運轉狀態(a)'~(f)'的圖。 Fig. 6 is a view showing an operational state (a) '~(f)' of the pressure swing adsorption apparatus of the comparative example.

圖7係表示比較例之變壓式吸附裝置之運轉狀態、與各吸附塔中之純化處理步驟、與開關閥之狀態之對應關係的圖。 Fig. 7 is a view showing the operational state of the pressure swing adsorption apparatus of the comparative example, the correspondence between the purification processing steps in each adsorption tower, and the state of the on-off valve.

圖1所示之本發明之實施形態之二氧化碳之純化系統α具備用以將包含雜質氣體之原料二氧化碳G1進行純化之變壓式吸附裝置1。 The carbon dioxide purification system α according to the embodiment of the present invention shown in Fig. 1 includes a pressure swing adsorption device 1 for purifying a raw material carbon dioxide G1 containing an impurity gas.

變壓式吸附裝置1具有複數個吸附塔2a、2b、2c,於各吸附塔2a、2b、2c中收納相對於雜質氣體而優先吸附二氧化碳之吸附劑。於本實施形態中,設置有第1~第3吸附塔2a、2b、2c,於各吸附塔2a、2b、2c之一端及另一端形成有氣體通過口2a'、2b'、2c'、2a"、2b"、2c"。 The pressure swing adsorption apparatus 1 has a plurality of adsorption towers 2a, 2b, and 2c, and accommodates adsorbents that preferentially adsorb carbon dioxide with respect to the impurity gas in each of the adsorption towers 2a, 2b, and 2c. In the present embodiment, the first to third adsorption towers 2a, 2b, and 2c are provided, and gas passage openings 2a', 2b', 2c', and 2a are formed at one end and the other end of each of the adsorption towers 2a, 2b, and 2c. ", 2b", 2c".

收納於各吸附塔2a、2b、2c中之吸附劑只要為可相對於雜質氣體而優先吸附二氧化碳者,則無特別限定,可使用碳分子篩或沸石。尤其於將二氧化碳於加壓下加以吸附,並於常壓附近進行解吸之情形時,較佳為將碳分子篩作為吸附劑而填充至各吸附塔2a、2b、2c中。於使用碳分子篩之情形時,較佳為平均孔徑為1.5~2.0nm、比表面積為1000m2/g以上。又,較佳為吸附容量分離型。 The adsorbent contained in each of the adsorption towers 2a, 2b, and 2c is not particularly limited as long as it can preferentially adsorb carbon dioxide with respect to the impurity gas, and a carbon molecular sieve or zeolite can be used. In particular, when carbon dioxide is adsorbed under pressure and desorbed in the vicinity of normal pressure, it is preferred to fill the adsorption columns 2a, 2b, and 2c with carbon molecular sieves as adsorbents. In the case of using a carbon molecular sieve, it is preferred that the average pore diameter is 1.5 to 2.0 nm and the specific surface area is 1000 m 2 /g or more. Further, it is preferably an adsorption capacity separation type.

於吸附塔2a、2b、2c各者上連接有導入配管3、逸氣配管4、及純化氣體配管5。 The introduction pipe 3, the escape pipe 4, and the purified gas pipe 5 are connected to each of the adsorption towers 2a, 2b, and 2c.

導入配管3之一端係連接於原料二氧化碳G1之供給源。導入配管 3之另一端係以朝向第1~第3吸附塔2a、2b、2c之方式分支為三條,且經由構成導入路開關閥之第1~第3開關閥6a、6b、6c而連接於吸附塔2a、2b、2c各者之一端之氣體通過口2a'、2b'、2c'。由此,導入配管3構成用以向吸附塔2a、2b、2c各者中導入原料二氧化碳G1之導入流路。又,藉由利用第1~第3開關閥6a、6b、6c,將吸附塔2a、2b、2c各者與導入流路之間個別地開啟及關閉,可將原料二氧化碳G1經由導入流路而個別地導入至吸附塔2a、2b、2c各者中。 One end of the introduction pipe 3 is connected to a supply source of the raw material carbon dioxide G1. Import piping The other end of the third branch is branched into three to the first to third adsorption towers 2a, 2b, and 2c, and is connected to the adsorption tower via the first to third on-off valves 6a, 6b, and 6c that constitute the inlet-side switching valve. The gas at one end of each of 2a, 2b, and 2c passes through the ports 2a', 2b', and 2c'. Thereby, the introduction pipe 3 constitutes an introduction flow path for introducing the raw material carbon dioxide G1 into each of the adsorption towers 2a, 2b, and 2c. In addition, by using the first to third on-off valves 6a, 6b, and 6c, the adsorption towers 2a, 2b, and 2c are individually opened and closed between the introduction channels 2a, 2b, and 2c, and the raw material carbon dioxide G1 can be introduced into the flow path. Individually introduced into each of the adsorption towers 2a, 2b, and 2c.

原料二氧化碳G1例如係自石油純化設備、氨製造設備、製鐵設備、啤酒製造設備等供給源所供給,且係氫氣、甲烷、氮氣、氧氣、一氧化碳等雜質氣體與二氧化碳之混合氣體。自本實施形態之供給源所供給之原料二氧化碳G1係設為壓力約2MPa(錶壓)之壓縮氣體。再者,於自供給源所供給之原料二氧化碳G1不為壓縮氣體之情形時,利用壓縮機等進行壓縮即可。 The raw material carbon dioxide G1 is supplied, for example, from a supply source such as a petroleum purification equipment, an ammonia production facility, a steelmaking facility, or a beer manufacturing facility, and is a mixed gas of an impurity gas such as hydrogen, methane, nitrogen, oxygen, carbon monoxide, or the like. The raw material carbon dioxide G1 supplied from the supply source of the present embodiment is a compressed gas having a pressure of about 2 MPa (gauge pressure). In addition, when the raw material carbon dioxide G1 supplied from the supply source is not a compressed gas, it may be compressed by a compressor or the like.

逸氣配管4之一端係以朝向第1~第3吸附塔2a、2b、2c之方式分支為三條,且經由構成逸氣路開關閥之第4~第6開關閥7a、7b、7c而連接於吸附塔2a、2b、2c各者之另一端之氣體通過口2a"、2b"、2c"。逸氣配管4之另一端係作為逸氣G2之出口,通向大氣壓下之常壓空間。因此,逸氣配管4係構成用以將逸氣G2自吸附塔2a、2b、2c各者中向常壓空間排出之逸氣流路。又,藉由利用第4~第6開關閥7a、7b、7c,將吸附塔2a、2b、2c各者與逸氣流路之間個別地開啟及關閉,可將逸氣G2自吸附塔2a、2b、2c各者中個別地排出。經由逸氣配管4所排出之逸氣G2係排出至吸附裝置1之外部。 One end of the escape pipe 4 is branched into three in the first to third adsorption towers 2a, 2b, and 2c, and is connected via the fourth to sixth on-off valves 7a, 7b, and 7c that constitute the escape valve. The gas at the other end of each of the adsorption towers 2a, 2b, and 2c passes through the ports 2a", 2b", and 2c". The other end of the escape pipe 4 serves as an outlet of the outgas G2 to the atmospheric pressure space under atmospheric pressure. Therefore, the escape pipe 4 constitutes an escape flow path for discharging the escape gas G2 from the adsorption towers 2a, 2b, 2c to the normal pressure space. Further, by using the fourth to sixth on-off valves 7a, 7b And 7c, the respective adsorption towers 2a, 2b, 2c and the escape flow path are individually opened and closed, and the outgas G2 can be individually discharged from each of the adsorption towers 2a, 2b, 2c. The discharged escape gas G2 is discharged to the outside of the adsorption device 1.

可於逸氣配管4設置背壓調節用之第1壓力調節閥26a,將吸附塔2a、2b、2c各者中之內部壓力調節至吸附步驟中預先確定之吸附壓力。吸附壓力只要設為原料二氧化碳G1之壓力以下且超過大氣壓之適合於吸附之值即可。 The first pressure regulating valve 26a for back pressure adjustment can be provided in the escape pipe 4, and the internal pressure in each of the adsorption towers 2a, 2b, and 2c can be adjusted to a predetermined adsorption pressure in the adsorption step. The adsorption pressure may be a value suitable for adsorption below the pressure of the raw material carbon dioxide G1 and exceeding atmospheric pressure.

純化氣體配管5之一端係以朝向第1~第3吸附塔2a、2b、2c之方式分支為三條,且經由構成純化氣體路開關閥之第7~第9開關閥8a、8b、8c而連接於吸附塔2a、2b、2c各者之一端之氣體通過口2a'、2b'、2c'。純化氣體配管5之另一端係作為純化氣體G3、G3'之出口,通向常壓空間。又,可於純化氣體配管5設置背壓調節用之第2壓力調節閥26b,以使解吸步驟中純化氣體G3、G3'具有預先確定之壓力之方式調節吸附塔2a、2b、2c各者中之內部壓力。由此,純化氣體配管5構成用以將純化氣體G3、G3'自吸附塔2a、2b、2c各者中排出之純化氣體流路。又,藉由利用第7~第9開關閥8a、8b、8c,將吸附塔2a、2b、2c各者與純化氣體流路之間個別地開啟及關閉,可將純化氣體G3、G3'自吸附塔2a、2b、2c各者中個別地排出並回收。所回收之純化氣體G3、G3'例如可貯存於特定容器中,亦可於液化裝置等後續步驟中自純化氣體流路直接供給,用途並無限定。 One end of the purified gas pipe 5 is branched into three to the first to third adsorption columns 2a, 2b, and 2c, and is connected via the seventh to ninth on-off valves 8a, 8b, and 8c constituting the purified gas passage switch valve. The gas passing through one of the adsorption towers 2a, 2b, 2c passes through the ports 2a', 2b', 2c'. The other end of the purified gas pipe 5 serves as an outlet for the purified gases G3 and G3' and leads to a normal pressure space. Further, the second pressure regulating valve 26b for adjusting the back pressure can be provided in the purification gas pipe 5 to adjust the adsorption gas G3, G3' in the desorption step so as to have a predetermined pressure. Internal pressure. Thereby, the purified gas pipe 5 constitutes a purified gas flow path for discharging the purified gases G3 and G3' from each of the adsorption columns 2a, 2b, and 2c. Further, by using the seventh to ninth on-off valves 8a, 8b, and 8c, the respective adsorption towers 2a, 2b, and 2c are individually opened and closed between the purification gas flow paths, and the purified gases G3 and G3' can be self-contained. Each of the adsorption towers 2a, 2b, and 2c is individually discharged and recovered. The recovered purified gases G3 and G3' can be stored, for example, in a specific container, or can be directly supplied from a purified gas flow path in a subsequent step such as a liquefaction apparatus, and the use is not limited.

設置有連通配管9,該連通配管9構成用以將吸附塔2a、2b、2c之任一者與另外任一者相互連通之連通流路。連通配管9具有:第1連通部9a、第2連通部9b、及第3連通部9c。第1連通部9a之一端係以朝向第1~第3吸附塔2a、2b、2c之方式分支為三條,且經由構成連通路開關閥之第10~第12開關閥10a、10b、10c而連接於吸附塔2a、2b、2c各者之另一端之氣體通過口2a"、2b"、2c"。第2連通部9b之一端係以朝向第1~第3吸附塔2a、2b、2c之方式分支為三條,且經由構成連通路開關閥之第13~第15開關閥11a、11b、11c而連接於吸附塔2a、2b、2c各者之另一端之氣體通過口2a"、2b"、2c"。第1連通部9a之另一端與第2連通部9b之另一端係經由構成連通路開關閥之第16開關閥12、與構成調節於連通流路中流動之氣體流量之流量控制閥的第1流量控制閥13而相互連接。第3連通部9c之一端係經由構成連通路開關閥之第17開關閥14、與構成調節於連通流路中流動之氣體流量之流量 控制閥的第2流量控制閥15而連接於第1連通部9a與第2連通部9b。第3連通部9c之另一端係連接於逸氣配管4。由此,藉由將吸附塔2a、2b、2c各者與連通流路之間個別地開啟及關閉,可將吸附塔2a、2b、2c之任一者與另外任一者切換至相互之間打開而相互連通之狀態、與相互之間封閉而不連通之狀態。 A communication pipe 9 is provided, and the communication pipe 9 constitutes a communication flow path for connecting any one of the adsorption towers 2a, 2b, and 2c to each other. The communication pipe 9 has a first communication portion 9a, a second communication portion 9b, and a third communication portion 9c. One end of the first communication portion 9a is branched into three in the first to third adsorption towers 2a, 2b, and 2c, and is connected via the tenth to twelfth switching valves 10a, 10b, and 10c that constitute the communication path switching valve. The gas passing through the ports 2a", 2b", and 2c" at the other end of each of the adsorption towers 2a, 2b, and 2c. The one end of the second communication portion 9b is oriented toward the first to third adsorption towers 2a, 2b, and 2c. Three branches are branched, and the gas passage ports 2a", 2b", and 2c are connected to the other ends of the adsorption towers 2a, 2b, and 2c via the 13th to 15th on-off valves 11a, 11b, and 11c constituting the communication path switching valve. ". The other end of the first communication portion 9a and the other end of the second communication portion 9b pass through the 16th on-off valve 12 constituting the communication passage opening and closing valve and the first flow control valve constituting the flow rate of the gas flowing through the communication passage. The flow control valves 13 are connected to each other. One end of the third communication portion 9c is configured to flow through the 17th on-off valve 14 constituting the communication path switching valve and the flow rate of the gas constituting the flow in the communication passage. The second flow rate control valve 15 of the control valve is connected to the first communication portion 9a and the second communication portion 9b. The other end of the third communication portion 9c is connected to the escape pipe 4. Thus, by individually opening and closing each of the adsorption towers 2a, 2b, 2c and the communication flow path, any one of the adsorption towers 2a, 2b, 2c can be switched to each other. A state in which they are opened and connected to each other, and are in a state of being closed and not connected to each other.

第1~第17開關閥6a、6b、6c、7a、7b、7c、8a、8b、8c、10a、10b、10c、11a、11b、11c、12、14各者藉由包含公知之自動閥,而具有用以使閥作動之螺線管、馬達等開關用致動器。如圖2所示,各開關閥可藉由連接於構成純化系統α之控制裝置20,並利用控制裝置20進行控制而個別地進行開關動作。控制裝置20可包含電腦。 Each of the first to seventeenth on-off valves 6a, 6b, 6c, 7a, 7b, 7c, 8a, 8b, 8c, 10a, 10b, 10c, 11a, 11b, 11c, 12, 14 includes a known automatic valve. Further, an actuator for a switch such as a solenoid or a motor for actuating the valve is provided. As shown in FIG. 2, each of the on-off valves can be individually switched by being connected to the control device 20 constituting the purification system α and controlled by the control device 20. Control device 20 can include a computer.

第1、第2流量控制閥13、15各者藉由包含公知之自動閥,而具有用以使閥作動之馬達等流量調節用致動器。如圖2所示,各流量控制閥可藉由連接於控制裝置20,並利用控制裝置20進行控制而個別地進行流量調節動作。第1、第2壓力調節閥26a、26b各者藉由包含公知之自動閥,而具有用以使閥作動之馬達等壓力調節用致動器。如圖2所示,各壓力調節閥26a、26b可藉由連接於控制裝置20,並利用控制裝置20進行控制而個別地進行壓力調節動作。 Each of the first and second flow rate control valves 13 and 15 includes a flow rate adjusting actuator such as a motor for actuating the valve by including a known automatic valve. As shown in FIG. 2, each flow control valve can be individually controlled in flow rate by being connected to the control device 20 and controlled by the control device 20. Each of the first and second pressure regulating valves 26a and 26b includes a pressure adjusting actuator such as a motor for actuating the valve by including a known automatic valve. As shown in FIG. 2, each of the pressure regulating valves 26a and 26b can be individually controlled in pressure by being connected to the control device 20 and controlled by the control device 20.

於導入配管3設置有:檢測自供給源所供給之原料二氧化碳G1之流量的流量感測器21、暫時貯存原料二氧化碳G1之緩衝箱22、緩衝箱22之內壓測定用壓力感測器23、檢測原料二氧化碳G1之二氧化碳濃度的濃度感測器24、及自導入配管3導入至各吸附塔2a、2b、2c之原料二氧化碳G1之流量調節用之第3流量控制閥25。第3流量控制閥25藉由包含公知之自動閥,而具有用以使閥作動之馬達等流量調節用致動器。如圖2所示,流量感測器21、壓力感測器23、濃度感測器24、及第3流量控制閥25係連接於控制裝置20。又,控制裝置20上連接有:檢測吸附塔2a、2b、2c各者之內部壓力的壓力感測器27a、 27b、27c、鍵盤等輸入裝置28、及顯示器等輸出裝置29。 The introduction pipe 3 is provided with a flow rate sensor 21 that detects the flow rate of the raw material carbon dioxide G1 supplied from the supply source, a buffer tank 22 that temporarily stores the raw material carbon dioxide G1, and a pressure sensor 23 for measuring the internal pressure of the buffer tank 22, The concentration sensor 24 for detecting the carbon dioxide concentration of the raw material carbon dioxide G1 and the third flow rate control valve 25 for adjusting the flow rate of the raw material carbon dioxide G1 introduced into each of the adsorption columns 2a, 2b, and 2c from the introduction pipe 3 are provided. The third flow rate control valve 25 includes a flow rate adjusting actuator such as a motor for actuating the valve by including a known automatic valve. As shown in FIG. 2, the flow sensor 21, the pressure sensor 23, the concentration sensor 24, and the third flow control valve 25 are connected to the control device 20. Further, the control device 20 is connected to a pressure sensor 27a that detects the internal pressure of each of the adsorption towers 2a, 2b, and 2c, 27b, 27c, an input device 28 such as a keyboard, and an output device 29 such as a display.

藉由將原料二氧化碳G1暫時貯存於緩衝箱22,可緩和原料二氧化碳G1之組成變動。又,藉由利用來自控制裝置20之信號而控制第3流量控制閥25以進行流量調節動作,從而調節導入至各吸附塔2a、2b、2c之原料二氧化碳G1之流量。由此,導入至各吸附塔2a、2b、2c之原料二氧化碳G1之流量通常係以與流量感測器21之檢測流量一致之方式進行控制。於利用壓力感測器23所測得之緩衝箱22之內壓超過上限設定值時,為了使緩衝箱22之內壓降低,而將導入至各吸附塔2a、2b、2c之原料二氧化碳G1之流量設為多於流量感測器21之檢測流量。於利用壓力感測器23所測得之緩衝箱22之內壓未達下限設定值時,為了使緩衝箱22之內壓上升,將導入至各吸附塔2a、2b、2c之原料二氧化碳G1之流量設為少於流量感測器21之檢測流量。 By temporarily storing the raw material carbon dioxide G1 in the buffer tank 22, the composition fluctuation of the raw material carbon dioxide G1 can be alleviated. Further, by controlling the third flow rate control valve 25 by the signal from the control device 20 to perform the flow rate adjustment operation, the flow rate of the raw material carbon dioxide G1 introduced into each of the adsorption columns 2a, 2b, and 2c is adjusted. Thereby, the flow rate of the raw material carbon dioxide G1 introduced into each of the adsorption towers 2a, 2b, and 2c is normally controlled so as to match the detected flow rate of the flow rate sensor 21. When the internal pressure of the buffer tank 22 measured by the pressure sensor 23 exceeds the upper limit set value, the raw material carbon dioxide G1 introduced into each of the adsorption towers 2a, 2b, and 2c is lowered in order to lower the internal pressure of the buffer tank 22. The flow rate is set to be larger than the detected flow rate of the flow sensor 21. When the internal pressure of the buffer tank 22 measured by the pressure sensor 23 is less than the lower limit set value, in order to increase the internal pressure of the buffer tank 22, the raw material carbon dioxide G1 introduced into each of the adsorption towers 2a, 2b, and 2c is The flow rate is set to be less than the detected flow rate of the flow sensor 21.

為了利用上述純化系統α進行原料二氧化碳G1之純化,而向吸附塔2a、2b、2c各者中依序導入原料二氧化碳,於吸附塔2a、2b、2c各者中重複進行依序實施複數個純化處理步驟之純化處理循環。作為構成純化處理循環之一循環的複數個純化處理步驟,依序實施如下步驟:吸附步驟、減壓步驟、解吸用均壓步驟、解吸步驟、氣體壓出步驟、升壓用均壓步驟、及升壓步驟。各純化處理步驟之實施時間只要根據所需之純化氣體G3之純度或回收率預先藉由實驗求出並設定即可。吸附塔2a、2b、2c各者中之純化處理步驟之實施時序相互不同。由此,如圖3所示,於吸附裝置1中,依序實現吸附塔2a、2b、2c各者中之純化處理步驟相互不同之運轉狀態(a)~(i),連續地將二氧化碳純化。圖3中之箭頭表示氣體之流動方向。 In order to purify the raw material carbon dioxide G1 by the purification system α, the raw material carbon dioxide is sequentially introduced into each of the adsorption towers 2a, 2b, and 2c, and the plurality of purifications are sequentially performed in each of the adsorption towers 2a, 2b, and 2c. The purification treatment cycle of the treatment step. As a plurality of purification treatment steps constituting one cycle of the purification treatment cycle, the following steps are sequentially performed: an adsorption step, a depressurization step, a depressurization pressure equalization step, a desorption step, a gas extrusion step, a pressure increasing pressure equalization step, and Boost step. The execution time of each purification treatment step may be determined and set in advance based on the purity or recovery rate of the purified gas G3 required. The execution timings of the purification processing steps in each of the adsorption columns 2a, 2b, and 2c are different from each other. Thereby, as shown in FIG. 3, in the adsorption device 1, the operation states (a) to (i) in which the purification treatment steps in the adsorption columns 2a, 2b, and 2c are different from each other are sequentially performed, and the carbon dioxide is continuously purified. . The arrows in Figure 3 indicate the direction of flow of the gas.

為了依序實施上述純化處理步驟,利用控制裝置20而控制第1~第17開關閥6a、6b、6c、7a、7b、7c、8a、8b、8c、10a、10b、10c、11a、11b、11c、12、14各者、與第1、第2流量控制閥13、15各者。 圖4係表示運轉狀態(a)~(i)、與吸附塔2a、2b、2c各者中所實施之純化處理步驟、與第1~第17開關閥各者之狀態之對應關係,○符號係表示開關閥打開之狀態,×符號係表示開關閥關閉之狀態。 In order to sequentially perform the above-described purification processing step, the first to seventeenth on-off valves 6a, 6b, 6c, 7a, 7b, 7c, 8a, 8b, 8c, 10a, 10b, 10c, 11a, 11b, and the like are controlled by the control device 20. Each of 11c, 12, and 14 and each of the first and second flow control valves 13 and 15 are provided. Fig. 4 is a view showing the correspondence between the operation state (a) to (i), the purification processing steps performed in each of the adsorption towers 2a, 2b, and 2c, and the states of the first to the seventeenth on-off valves, and the symbol ○ Indicates the state in which the on-off valve is open, and the x symbol indicates the state in which the on-off valve is closed.

於運轉狀態(a)下,打開第1、第4、第8、第11、第15、第16開關閥6a、7a、8b、10b、11c、12,關閉其餘開關閥。藉由打開第1、第4開關閥6a、7a,而於第1吸附塔2a中實施吸附步驟。藉由打開第8、第11、第15、第16開關閥8b、10b、11c、12,而於第2吸附塔2b中實施氣體壓出步驟,於第3吸附塔2c中實施減壓步驟。 In the operating state (a), the first, fourth, eighth, eleventh, fifteenth, and sixteenth on-off valves 6a, 7a, 8b, 10b, 11c, and 12 are opened, and the remaining on-off valves are closed. The adsorption step is performed in the first adsorption tower 2a by opening the first and fourth on-off valves 6a and 7a. By opening the eighth, eleventh, fifteenth, and sixteenth on-off valves 8b, 10b, 11c, and 12, a gas extrusion step is performed in the second adsorption tower 2b, and a depressurization step is performed in the third adsorption tower 2c.

於運轉狀態(b)下,打開第1、第4、第11、第15、第16開關閥6a、7a、10b、11c、12,關閉其餘開關閥。藉由打開第1、第4開關閥6a、7a,而於第1吸附塔2a中繼運轉狀態(a)之後繼續實施吸附步驟。藉由打開第11、第15、第16開關閥10b、11c、12,而於第2吸附塔2b中實施升壓用均壓步驟,於第3吸附塔2c中實施解吸用均壓步驟。 In the operating state (b), the first, fourth, eleventh, fifteenth, and sixteenth on-off valves 6a, 7a, 10b, 11c, and 12 are opened, and the remaining on-off valves are closed. By opening the first and fourth on-off valves 6a and 7a, the adsorption step is continued after the first adsorption tower 2a is relayed to the operation state (a). By opening the eleventh, fifteenth, and sixteenth on-off valves 10b, 11c, and 12, a pressure equalization step is performed in the second adsorption tower 2b, and a desorption pressure equalization step is performed in the third adsorption tower 2c.

於運轉狀態(c)下,打開第1、第4、第9、第14、第17開關閥6a、7a、8c、11b、14,關閉其餘開關閥。藉由打開第1、第4、第14、第17開關閥6a、7a、11b、14,而於第1吸附塔2a中繼運轉狀態(b)之後繼續實施吸附步驟,於第2吸附塔2b中實施升壓步驟。藉由打開第9開關閥8c,而於第3吸附塔2c中實施解吸步驟。 In the operating state (c), the first, fourth, ninth, fourteenth, and seventeenth on-off valves 6a, 7a, 8c, 11b, and 14 are opened, and the remaining on-off valves are closed. By opening the first, fourth, fourteenth, and seventeenth on-off valves 6a, 7a, 11b, and 14, the adsorption step is continued after the first adsorption tower 2a is relayed to the operation state (b), and the second adsorption tower 2b is continued. The step of boosting is implemented. The desorption step is carried out in the third adsorption tower 2c by opening the ninth on-off valve 8c.

於運轉狀態(d)下,打開第2、第5、第9、第12、第13、第16開關閥6b、7b、8c、10c、11a、12,關閉其餘開關閥。藉由打開第2、第5開關閥6b、7b,而於第2吸附塔2b中實施吸附步驟。藉由打開第9、第12、第13、第16開關閥8c、10c、11a、12,而於第1吸附塔2a中實施減壓步驟,於第3吸附塔2c中實施氣體壓出步驟。 In the operating state (d), the second, fifth, ninth, twelfth, thirteenth, and sixteenth on-off valves 6b, 7b, 8c, 10c, 11a, and 12 are opened, and the remaining on-off valves are closed. The adsorption step is performed in the second adsorption tower 2b by opening the second and fifth on-off valves 6b and 7b. By opening the ninth, twelfth, thirteenth, and sixteenth on-off valves 8c, 10c, 11a, and 12, a pressure reduction step is performed in the first adsorption tower 2a, and a gas extrusion step is performed in the third adsorption tower 2c.

於運轉狀態(e)下,打開第2、第5、第12、第13、第16開關閥6b、7b、10c、11a、12,關閉其餘開關閥。藉由打開第2、第5開關閥6b、7b,而於第2吸附塔2b中繼運轉狀態(d)之後繼續實施吸附步驟。 藉由打開第12、第13、第16開關閥10c、11a、12,而於第1吸附塔2a中實施解吸用均壓步驟,於第3吸附塔2c中實施升壓用均壓步驟。 In the operating state (e), the second, fifth, twelfth, thirteenth, and sixteenth on-off valves 6b, 7b, 10c, 11a, and 12 are opened, and the remaining on-off valves are closed. By opening the second and fifth on-off valves 6b and 7b, the adsorption step is continued after the second adsorption tower 2b is in the relay operation state (d). By opening the 12th, 13th, and 16th on-off valves 10c, 11a, and 12, the desorption depressing step is performed in the first adsorption tower 2a, and the boosting pressure equalization step is performed in the third adsorption tower 2c.

於運轉狀態(f)下,打開第2、第5、第7、第15、第17開關閥6b、7b、8a、11c、14,關閉其餘開關閥。藉由打開第2、第5、第15、第17開關閥6b、7b、11c、14,而於第2吸附塔2b中繼運轉狀態(e)之後繼續實施吸附步驟,於第3吸附塔2c中實施升壓步驟。藉由打開第7開關閥8a,而於第1吸附塔2a中實施解吸步驟。 In the operating state (f), the second, fifth, seventh, fifteenth, and seventeenth on-off valves 6b, 7b, 8a, 11c, and 14 are opened, and the remaining on-off valves are closed. By opening the second, fifth, fifteenth, and seventeenth on-off valves 6b, 7b, 11c, and 14, the adsorption step is continued after the second adsorption tower 2b is in the relay operation state (e), and the third adsorption tower 2c is applied to the third adsorption tower 2c. The step of boosting is implemented. The desorption step is carried out in the first adsorption tower 2a by opening the seventh on-off valve 8a.

於運轉狀態(g)下,打開第3、第6、第7、第10、第14、第16開關閥6c、7c、8a、10a、11b、12,關閉其餘開關閥。藉由打開第3、第6開關閥6c、7c,而於第3吸附塔2c中實施吸附步驟。藉由打開第7、第10、第14、第16開關閥8a、10a、11b、12,而於第1吸附塔2a中實施氣體壓出步驟,於第2吸附塔2b中實施減壓步驟。 In the operating state (g), the third, sixth, seventh, tenth, fourteenth, and sixteenth on-off valves 6c, 7c, 8a, 10a, 11b, and 12 are opened, and the remaining on-off valves are closed. The adsorption step is performed in the third adsorption tower 2c by opening the third and sixth on-off valves 6c and 7c. By opening the seventh, tenth, fourteenth, and sixteenth on-off valves 8a, 10a, 11b, and 12, a gas extrusion step is performed in the first adsorption tower 2a, and a pressure reduction step is performed in the second adsorption tower 2b.

於運轉狀態(h)下,打開第3、第6、第10、第14、第16開關閥6c、7c、10a、11b、12,關閉其餘開關閥。藉由打開第3、第6開關閥6c、7c,而於第3吸附塔2c中繼運轉狀態(g)之後繼續實施吸附步驟。藉由打開第10、第14、第16開關閥10a、11b、12,而於第1吸附塔2a中實施升壓用均壓步驟,於第2吸附塔2b中實施解吸用均壓步驟。 In the operating state (h), the third, sixth, tenth, fourteenth, and sixteenth on-off valves 6c, 7c, 10a, 11b, and 12 are opened, and the remaining on-off valves are closed. By opening the third and sixth on-off valves 6c and 7c, the adsorption step is continued after the third adsorption tower 2c relays the operation state (g). By opening the tenth, fourteenth, and sixteenth on-off valves 10a, 11b, and 12, a pressure equalization step is performed in the first adsorption tower 2a, and a desorption pressure equalization step is performed in the second adsorption tower 2b.

於運轉狀態(i)下,打開第3、第6、第8、第13、第17開關閥6c、7c、8b、11a、14,關閉其餘開關閥。藉由打開第3、第6、第13、第17開關閥6c、7c、11a、14,而於第1吸附塔2a中實施升壓步驟,於第3吸附塔2c中繼運轉狀態(h)之後繼續實施吸附步驟。藉由打開第8開關閥8b,而於第2吸附塔2b中實施解吸步驟。 In the operating state (i), the third, sixth, eighth, thirteenth, and seventeenth on-off valves 6c, 7c, 8b, 11a, and 14 are opened, and the remaining on-off valves are closed. By opening the third, sixth, thirteenth, and seventeenth on-off valves 6c, 7c, 11a, and 14, the step of boosting is performed in the first adsorption tower 2a, and the operation is performed in the third adsorption tower 2c (h). The adsorption step is then continued. The desorption step is carried out in the second adsorption tower 2b by opening the eighth on-off valve 8b.

於在吸附塔2a、2b、2c之任一者中實施吸附步驟時,於該吸附塔內部經由導入流路而導入原料二氧化碳G1。吸附塔內部係藉由原料二氧化碳G1之壓力而加壓至吸附步驟中所需之吸附壓力。因此,所導入之原料二氧化碳G1中所含之二氧化碳於加壓下被吸附至吸附 劑。又,未被吸附劑吸附之雜質氣體作為逸氣G2自吸附塔內部經由逸氣流路排出。 When the adsorption step is performed in any of the adsorption towers 2a, 2b, and 2c, the raw material carbon dioxide G1 is introduced into the adsorption tower through the introduction flow path. The inside of the adsorption column is pressurized to the adsorption pressure required in the adsorption step by the pressure of the raw material carbon dioxide G1. Therefore, the carbon dioxide contained in the introduced raw material carbon dioxide G1 is adsorbed to the adsorption under pressure. Agent. Further, the impurity gas which is not adsorbed by the adsorbent is discharged as the outgas G2 from the inside of the adsorption tower via the escape flow path.

於吸附塔2a、2b、2c之任一者中實施減壓步驟時,該吸附塔內部係經由連通流路、實施氣體壓出步驟之吸附塔2a、2b、2c之另外任一者之內部、純化氣體流路而通向常壓空間,壓力逐漸減小,成為吸附壓力與大氣壓間之第1中間壓力。此時,處於減壓步驟之吸附塔之內部氣體G4被導入至處於氣體壓出步驟之吸附塔中。減壓步驟中之吸附塔之內部壓力之減少幅度係與導入至處於氣體壓出步驟之吸附塔之氣體量對應。 When the pressure reduction step is performed in any of the adsorption towers 2a, 2b, and 2c, the inside of the adsorption tower is connected to the inside of the adsorption towers 2a, 2b, and 2c of the gas extrusion step via the communication passage. The purified gas flow path leads to the atmospheric pressure space, and the pressure gradually decreases to become the first intermediate pressure between the adsorption pressure and the atmospheric pressure. At this time, the internal gas G4 of the adsorption tower in the depressurization step is introduced into the adsorption tower in the gas extrusion step. The reduction in the internal pressure of the adsorption column in the depressurization step corresponds to the amount of gas introduced into the adsorption column in the gas extrusion step.

於吸附塔2a、2b、2c之任一者中實施解吸用均壓步驟時,該吸附塔內部係經由連通流路而通向實施升壓用均壓步驟之吸附塔2a、2b、2c之另外任一者之內部,藉此減小壓力,成為第1中間壓力與大氣壓間之第2中間壓力。此時,處於解吸用均壓步驟之吸附塔之內部氣體G5被導入至處於升壓用均壓步驟之吸附塔中。使處於解吸用均壓步驟之吸附塔內部與處於升壓用均壓步驟之吸附塔內部成為均壓,因此處於升壓用均壓步驟之吸附塔之內部壓力上升至與第2中間壓力相等。換言之,可藉由使處於氣體壓出步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者之內部、與處於減壓步驟後且解吸步驟前之狀態之吸附塔2a、2b、2c之另外任一者之內部以壓力相等之方式連通,而於處於氣體壓出步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者中實施升壓用均壓步驟,並且於處於減壓步驟後且解吸步驟前之狀態之吸附塔2a、2b、2c之另外任一者中實施解吸用均壓步驟。 When the desorption step of desorption is performed in any of the adsorption towers 2a, 2b, and 2c, the inside of the adsorption tower is connected to the adsorption towers 2a, 2b, and 2c for performing the pressure equalization step through the communication passage. In either case, the pressure is reduced to become the second intermediate pressure between the first intermediate pressure and the atmospheric pressure. At this time, the internal gas G5 of the adsorption tower in the depressurization pressure equalization step is introduced into the adsorption tower in the pressure equalization step. Since the inside of the adsorption tower in the depressurization pressure equalization step and the inside of the adsorption tower in the pressure equalization pressure increasing step are equalized, the internal pressure of the adsorption tower in the pressure equalization pressure increasing step is increased to be equal to the second intermediate pressure. In other words, the adsorption tower 2a in the state of any one of the adsorption towers 2a, 2b, 2c in a state after the gas extrusion step and before the pressure increase step, and after the pressure reduction step and before the desorption step can be used. The inside of any of 2b and 2c is connected to the same pressure, and is pressurized in any one of the adsorption towers 2a, 2b, and 2c in a state after the gas extrusion step and before the pressure increasing step. The pressure equalization step is carried out, and the pressure equalization step for desorption is carried out in any of the adsorption towers 2a, 2b, 2c in a state after the pressure reduction step and before the desorption step.

於吸附塔2a、2b、2c之任一者中實施解吸步驟時,該吸附塔內部係經由純化氣體流路而通向常壓空間,且利用第2壓力調節閥26b進行壓力調節,藉此與解吸用均壓步驟結束時相比壓力逐漸減小,減壓至 解吸步驟中所需之壓力,並將二氧化碳自吸附劑中解吸。所解吸之二氧化碳係作為純化氣體G3自吸附塔內部經由純化氣體流路被排出並回收。解吸步驟之末期之吸附塔內部之壓力係以於解吸步驟中純化氣體G3因自身之壓力而於純化氣體流路中流動並向常壓空間排出之方式,成為較大氣壓稍高之壓力。 When the desorption step is performed in any of the adsorption towers 2a, 2b, and 2c, the inside of the adsorption tower is led to the normal pressure space via the purification gas flow path, and the pressure is adjusted by the second pressure regulating valve 26b. At the end of the depressurization pressure equalization step, the pressure is gradually reduced, and the pressure is reduced to The pressure required in the desorption step is desorbed from the adsorbent. The desorbed carbon dioxide is discharged as a purified gas G3 from the inside of the adsorption tower through the purified gas flow path. The pressure inside the adsorption tower at the end of the desorption step is such that the purified gas G3 flows in the purification gas flow path due to its own pressure and is discharged to the normal pressure space in the desorption step, and becomes a pressure slightly higher than the atmospheric pressure.

於解吸步驟結束之時刻,即便吸附塔內部連通至常壓空間,亦存在純化氣體流路之流路阻力等,因而吸附塔之內部會滯留自吸附劑解吸之高純度之二氧化碳。 At the time when the desorption step is completed, even if the inside of the adsorption tower is connected to the atmospheric pressure space, the flow path resistance of the purified gas flow path or the like is present, and thus the inside of the adsorption tower is retained with high-purity carbon dioxide desorbed from the adsorbent.

於吸附塔2a、2b、2c之任一者中實施升壓步驟時,該吸附塔內部係經由連通流路而通向實施吸附步驟之吸附塔2a、2b、2c之另外任一者之內部。此時,藉由使自實施吸附步驟之吸附塔所排出之逸氣G2之一部分導入至處於升壓步驟之吸附塔中,使處於升壓步驟之吸附塔之內部加壓而使壓力上升至吸附壓力或吸附壓力附近。 When the pressure increasing step is performed in any of the adsorption towers 2a, 2b, and 2c, the inside of the adsorption tower leads to the inside of the adsorption towers 2a, 2b, and 2c in which the adsorption step is performed via the communication passage. At this time, by introducing a portion of the outgas G2 discharged from the adsorption column for performing the adsorption step into the adsorption column in the step of increasing pressure, the inside of the adsorption column in the step of increasing pressure is pressurized to raise the pressure to adsorption. Pressure or adsorption pressure nearby.

於吸附塔2a、2b、2c之任一者中實施氣體壓出步驟時,該任一吸附塔處於解吸步驟後且升壓步驟前之狀態。該處於解吸步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者之內部係經由連通流路而通向處於減壓步驟之吸附塔2a、2b、2c之另外任一者之內部,又,經由純化氣體流路而通向常壓空間。由此,可藉由向處於解吸步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者中,導入處於減壓步驟之吸附塔2a、2b、2c之另外任一者之內部氣體G4,而使滯留於處於該解吸步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者之內部之二氧化碳經由純化氣體流路而向外部壓出之氣體壓出步驟,。將該氣體壓出步驟中壓出之二氧化碳作為純化氣體G3'加以回收。又,於實施氣體壓出步驟之過程中存在自吸附劑解吸之二氧化碳之情形時,亦可將該二氧化碳壓出並回收。 When the gas extrusion step is performed in any one of the adsorption towers 2a, 2b, and 2c, the adsorption tower is in a state after the desorption step and before the pressure increase step. The inside of any one of the adsorption towers 2a, 2b, and 2c in a state after the desorption step and before the pressure-up step is passed to the adsorption towers 2a, 2b, and 2c in the depressurization step via the communication passage. The inside of the person, in turn, leads to the atmospheric space via the purified gas flow path. Thus, any one of the adsorption columns 2a, 2b, 2c in the depressurization step can be introduced into any of the adsorption columns 2a, 2b, 2c in a state after the desorption step and before the pressure increasing step. The internal gas G4 is a gas pressure which is externally extruded through the purified gas flow path by the carbon dioxide inside the adsorption towers 2a, 2b, and 2c which are in the state after the desorption step and before the pressure increasing step. Step out. The carbon dioxide extruded in the gas extrusion step is recovered as the purified gas G3'. Further, in the case where carbon dioxide desorbed from the adsorbent is present during the gas extrusion step, the carbon dioxide may be extruded and recovered.

於氣體壓出步驟中,向吸附塔2a、2b、2c之任一者中自處於減壓 步驟之吸附塔2a、2b、2c之另外任一者所導入之氣體量係根據原料二氧化碳G1中之二氧化碳濃度之變化而變更。即,若原料二氧化碳G1之二氧化碳濃度升高,則增加該氣體量,若二氧化碳濃度降低,則減少該氣體量,藉此實現最佳化。因此,如下所述,將氣體壓出步驟之實施時間設為一定,並且利用第1流量控制閥13而調節於連通流路中流動之氣體流量。 In the gas extrusion step, the pressure is reduced to any one of the adsorption towers 2a, 2b, and 2c. The amount of gas introduced by any of the adsorption columns 2a, 2b, and 2c in the step is changed in accordance with the change in the concentration of carbon dioxide in the raw material carbon dioxide G1. That is, when the carbon dioxide concentration of the raw material carbon dioxide G1 is increased, the amount of the gas is increased, and if the concentration of the carbon dioxide is lowered, the amount of the gas is decreased, thereby optimizing. Therefore, as described below, the execution time of the gas extrusion step is made constant, and the flow rate of the gas flowing through the communication passage is adjusted by the first flow rate control valve 13.

於氣體壓出步驟中,為了向吸附塔2a、2b、2c之任一者中導入處於減壓步驟之吸附塔2a、2b、2c之另外任一者之內部氣體,而打開逸氣流路之開關閥之任一者。因此,於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中導入之氣體量係與氣體壓出步驟之實施時間和於連通流路中流動之氣體流量之乘積對應。本實施形態之氣體壓出步驟之實施時間係設為預先確定之一定時間,且該一定之實施時間係記憶於控制裝置20。 In the gas extrusion step, in order to introduce the internal gas of any one of the adsorption towers 2a, 2b, and 2c in the depressurization step into any one of the adsorption towers 2a, 2b, and 2c, the switch of the flow path is opened. Any of the valves. Therefore, the amount of gas introduced into any one of the adsorption towers 2a, 2b, and 2c in the gas extrusion step corresponds to the product of the execution time of the gas extrusion step and the gas flow rate flowing through the communication passage. The execution time of the gas pressing step of the present embodiment is set to a predetermined predetermined time, and the constant execution time is stored in the control device 20.

又,於氣體壓出步驟中,導入至吸附塔2a、2b、2c之任一者中之氣體量可藉由利用第1流量控制閥13調節於連通流路中流動之氣體流量而變更。因此,於氣體壓出步驟中,向吸附塔2a、2b、2c之任一者中導入處於減壓步驟之吸附塔2a、2b、2c之另外任一者之內部氣體G4時之於連通流路中流動之氣體流量、與原料二氧化碳G1中之二氧化碳濃度之間之預先確定之對應關係係記憶於控制裝置20。 Further, in the gas extrusion step, the amount of gas introduced into any one of the adsorption towers 2a, 2b, and 2c can be changed by adjusting the flow rate of the gas flowing through the communication passage by the first flow rate control valve 13. Therefore, in the gas extrusion step, when the internal gas G4 of any one of the adsorption towers 2a, 2b, and 2c in the depressurization step is introduced into any one of the adsorption towers 2a, 2b, and 2c, the communication flow path is introduced. The predetermined correspondence between the flow rate of the gas flowing in the medium and the concentration of carbon dioxide in the raw material carbon dioxide G1 is stored in the control device 20.

以根據利用濃度感測器24所測得之原料二氧化碳G1之二氧化碳濃度之變化而變更於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自處於減壓步驟之吸附塔2a、2b、2c之另外任一者導入之氣體量之方式,為了以利用控制裝置20所記憶之實施時間實施氣體壓出步驟,而控制開關閥,並且基於所記憶之對應關係而變更利用第1流量控制閥13之調節氣體流量。 The adsorption tower 2a which is in the decompression step from any one of the adsorption towers 2a, 2b, 2c in the gas extrusion step is changed in accordance with the change in the carbon dioxide concentration of the raw material carbon dioxide G1 measured by the concentration sensor 24 In the method of introducing the amount of gas introduced by any of 2b and 2c, in order to perform the gas pressing step by the execution time stored in the control device 20, the on-off valve is controlled, and the first use is changed based on the stored correspondence relationship. The flow rate of the flow control valve 13 is adjusted.

於該情形時,於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中 所導入之氣體量係與處於減壓步驟之吸附塔中之氣體壓出步驟開始時之內壓與氣體壓出步驟結束時之內壓之壓力差對應。只要藉由將該壓力差設為δ MPa,將原料二氧化碳G1之二氧化碳濃度設為ε vol%,將A及B設為常數,使處於減壓步驟之吸附塔之內壓減少根據δ=AεB所求出之壓力差δ,而使於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自另外任一者所導入之氣體量最佳化即可。此處,常數A與常數B各者之值較佳為設為3.115×10-5≧A≧7.115×10-6及1.97≦B≦2.249之範圍。即,以該壓力差於氣體壓出步驟之一定實施時間內成為δ MPa之方式,藉由實驗而預先確定利用第1流量控制閥13進行調節之於連通流路中流動之氣體流量與原料二氧化碳G1之二氧化碳濃度之間之關係即可。利用第1流量控制閥13所進行之氣體流量之調節於純化處理步驟之一循環中進行一次即可,但若原料二氧化碳G1之濃度變動較小,則亦可於複數次循環中進行一次。 In this case, the amount of gas introduced into any one of the adsorption columns 2a, 2b, 2c in the gas extrusion step and the internal pressure at the start of the gas extrusion step in the adsorption column in the depressurization step are The pressure difference of the internal pressure at the end of the gas extrusion step corresponds. When the pressure difference is δ MPa, the carbon dioxide concentration of the raw material carbon dioxide G1 is ε vol%, A and B are set to be constant, and the internal pressure of the adsorption tower in the depressurization step is decreased according to δ=A ε B . The obtained pressure difference δ may be optimized for the amount of gas introduced from any of the adsorption towers 2a, 2b, and 2c in the gas extrusion step. Here, the values of the constant A and the constant B are preferably set to be in the range of 3.115 × 10 -5 ≧A ≧ 7.15 × 10 -6 and 1.97 ≦ B ≦ 2.249. In other words, the gas flow rate and the raw material carbon dioxide which are adjusted in the communication flow path adjusted by the first flow rate control valve 13 are determined in advance by the experiment so that the pressure difference is δ MPa for a certain period of time during which the gas extrusion step is performed. The relationship between the carbon dioxide concentration of G1 is sufficient. The adjustment of the gas flow rate by the first flow rate control valve 13 may be performed once in one cycle of the purification treatment step. However, if the concentration variation of the raw material carbon dioxide G1 is small, it may be performed once in a plurality of cycles.

於根據原料二氧化碳G1中之二氧化碳濃度之變化而變更於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自處於減壓步驟之吸附塔2a、2b、2c之另外任一者所導入之氣體量之情形時,使處於升壓用均壓步驟之吸附塔內部與處於解吸用均壓步驟之吸附塔內部成為均壓之時點之壓力發生變化。因此,於將處於升壓步驟之吸附塔之內壓升壓至吸附壓力時,較佳為自處於吸附步驟之吸附塔導入至處於升壓步驟之吸附塔中之逸氣G2之量亦發生變化。於該情形時,於升壓步驟中,將升壓步驟之時間設為預先確定之一定值,利用第2流量控制閥15而調節於連通流路中流動之氣體流量即可。因此,藉由實驗預先確定利用第2流量控制閥15進行調節之於連通流路中流動之氣體流量與原料二氧化碳G1之二氧化碳濃度之間之關係即可。 Any one of the adsorption towers 2a, 2b, 2c which is in the depressurization step from any one of the adsorption towers 2a, 2b, 2c in the gas extrusion step in accordance with the change in the carbon dioxide concentration in the raw material carbon dioxide G1. In the case of the amount of gas to be introduced, the pressure at the point where the inside of the adsorption column in the pressure equalization step of pressure increase and the inside of the adsorption column in the pressure equalization step for desorption are equalized are changed. Therefore, when the internal pressure of the adsorption column in the step of increasing pressure is increased to the adsorption pressure, it is preferred that the amount of the outgas G2 introduced from the adsorption column in the adsorption step to the adsorption column in the pressure increasing step also changes. . In this case, in the step of boosting, the time of the step of increasing the pressure is set to a predetermined constant value, and the flow rate of the gas flowing through the communication channel may be adjusted by the second flow rate control valve 15. Therefore, the relationship between the flow rate of the gas flowing through the communication flow path and the carbon dioxide concentration of the raw material carbon dioxide G1 adjusted by the second flow rate control valve 15 can be determined in advance by experiments.

作為用以根據原料二氧化碳G1之二氧化碳濃度之變化而變更於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自處於減壓步驟之吸 附塔2a、2b、2c之另外任一者所導入之氣體量之變化例,亦可調節氣體壓出步驟之實施時間。於該情形時,無需利用第1流量控制閥13所進行之流量控制。 The change from the change in the carbon dioxide concentration of the raw material carbon dioxide G1 to the suction step 2a, 2b, 2c in the gas depressing step is carried out in the depressurization step. The variation of the amount of gas introduced by any of the additional towers 2a, 2b, and 2c may also adjust the implementation time of the gas extrusion step. In this case, it is not necessary to use the flow rate control by the first flow rate control valve 13.

即,於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自另外任一者所導入之氣體量係與氣體壓出步驟之實施時間和於連通流路中流動之氣體流量之積對應,因此可藉由調節氣體壓出步驟之實施時間而變更其氣體量。 That is, the amount of gas introduced into any one of the adsorption towers 2a, 2b, and 2c in the gas extrusion step and the execution time of the gas extrusion step and the gas flow rate in the communication flow path Since the product corresponds to each other, the amount of gas can be changed by adjusting the execution time of the gas pressing step.

因此,氣體壓出步驟之實施時間、與原料二氧化碳G1之二氧化碳濃度之間之預先確定之對應關係係記憶於控制裝置20。以根據利用濃度感測器24所測得之原料二氧化碳G1之二氧化碳濃度之變化而變更於氣體壓出步驟中向吸附塔2a、2b、2c之任一者中自另外任一者所導入之氣體量之方式,基於控制裝置20所記憶之對應關係而變更氣體壓出步驟之實施時間、即用於氣體壓出步驟之開關閥控制時間。再者,於變更氣體壓出步驟之實施時間之情形時,於不變更吸附步驟之時間時變更升壓、解吸步驟之實施時間。例如,於不變更運轉狀態(a)~(c)下之第1吸附塔2a中之吸附時間,而變更運轉狀態(a)下之氣體壓出步驟之實施時間之情形時,只要變更運轉狀態(c)下之升壓、解吸步驟之實施時間即可。其他只要與實施形態同樣地進行控制即可。 Therefore, the predetermined correspondence relationship between the execution time of the gas pressing step and the carbon dioxide concentration of the raw material carbon dioxide G1 is stored in the control device 20. The gas introduced from any one of the adsorption towers 2a, 2b, and 2c in the gas extrusion step is changed in accordance with the change in the carbon dioxide concentration of the raw material carbon dioxide G1 measured by the concentration sensor 24 In the manner of the amount, the execution time of the gas pressing step, that is, the switching valve control time for the gas pressing step, is changed based on the correspondence relationship stored in the control device 20. Further, when the execution time of the gas pressing step is changed, the time for implementing the pressure increasing and desorbing steps is changed without changing the time of the adsorption step. For example, when the adsorption time in the first adsorption tower 2a under the operation states (a) to (c) is not changed, and the execution time of the gas extrusion step in the operation state (a) is changed, the operation state is changed. (c) The implementation time of the step of boosting and desorbing can be performed. Others may be controlled in the same manner as in the embodiment.

根據上述實施形態及變化例,藉由實施氣體壓出步驟,而向處於解吸步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者中導入處於減壓步驟之吸附塔之另外任一者之內部氣體,藉此將解吸步驟後滯留於吸附塔內部之高純度之二氧化碳壓出至外部。因此,可避免浪費而回收該壓出之高純度之二氧化碳,而提高二氧化碳之回收率,從而變得可以90%以上之回收率獲得純度95vol%以上之二氧化碳。 According to the above-described embodiment and the modification, the adsorption tower which is in the depressurization step is introduced into any one of the adsorption towers 2a, 2b, and 2c in a state after the desorption step and before the pressure increasing step by performing the gas extrusion step. The internal gas of any of the other gases is used to press the high-purity carbon dioxide remaining in the inside of the adsorption tower after the desorption step to the outside. Therefore, it is possible to avoid the waste and recover the carbon dioxide of high purity which is extruded, and to increase the recovery rate of carbon dioxide, thereby obtaining carbon dioxide having a purity of 95 vol% or more at a recovery rate of 90% or more.

又,若原料二氧化碳G1之二氧化碳濃度升高,則增加向處於氣體壓出步驟之吸附塔2a、2b、2c之任一者中自另外任一者所導入之氣 體量,若原料二氧化碳G1中之二氧化碳濃度降低,則減少所導入之氣體量,藉此可抑制氣體壓出步驟中壓出之二氧化碳之純度變動,可穩定所回收之二氧化碳之純度,例如可以85%以上之較高之回收率獲得純度97vol%以上之品質穩定之二氧化碳。純度97vol%以上之二氧化碳可與向液化裝置供給之原料氣體混合而使用,而可減少對液化裝置之負載。 Further, when the carbon dioxide concentration of the raw material carbon dioxide G1 is increased, the gas introduced into any one of the adsorption towers 2a, 2b, and 2c in the gas extrusion step is added. When the carbon dioxide concentration in the raw material carbon dioxide G1 is decreased, the amount of the introduced gas is reduced, whereby the purity variation of the carbon dioxide extruded in the gas extrusion step can be suppressed, and the purity of the recovered carbon dioxide can be stabilized, for example, 85. A higher recovery ratio of more than % yields a quality-stable carbon dioxide having a purity of 97 vol% or more. The carbon dioxide having a purity of 97 vol% or more can be used by mixing with the raw material gas supplied to the liquefaction apparatus, and the load on the liquefaction apparatus can be reduced.

進而,處於升壓用均壓步驟之吸附塔係藉由送入處於解吸用均壓步驟之吸附塔之內部氣體而升壓,該被送入之氣體中所含之二氧化碳於其後之吸附步驟中被吸附至吸附劑。由此,可提高二氧化碳之回收率。 Further, the adsorption tower in the pressure equalization step is pressurized by feeding the internal gas of the adsorption tower in the depressurization pressure equalization step, and the carbon dioxide contained in the supplied gas is followed by the adsorption step. It is adsorbed to the adsorbent. Thereby, the recovery rate of carbon dioxide can be improved.

並且,由於藉由原料二氧化碳G1之壓力而將吸附塔內部加壓至吸附壓力,故而無需設置用於加壓或減壓之專用設備,可減輕電力成本或維護成本等,由於亦無真空操作,故而不會自外部混入空氣等,因此關係到品質之維持。即,利用原料二氧化碳之壓力具有實用性。 Further, since the inside of the adsorption tower is pressurized to the adsorption pressure by the pressure of the raw material carbon dioxide G1, it is not necessary to provide a dedicated device for pressurization or decompression, and the power cost, the maintenance cost, and the like can be reduced, and since there is no vacuum operation, Therefore, air or the like is not mixed from the outside, so it is related to the maintenance of quality. That is, it is practical to use the pressure of the raw material carbon dioxide.

圖5係表示上述變壓式吸附裝置1不同之另一變壓式吸附裝置100。吸附裝置100之與上述吸附裝置1不同之處在於不具備第3連通部9c、第16開關閥12、第1流量控制閥13、第2流量控制閥15、濃度感測器24。吸附裝置100之其他構成係與上述吸附裝置1相同,並且相同部分係以符號表示,並省略相同部分之說明。 Fig. 5 is a view showing another pressure swing type adsorption device 100 different from the above-described pressure swing type adsorption device 1. The adsorption device 100 is different from the adsorption device 1 in that the third communication portion 9c, the sixteenth on-off valve 12, the first flow rate control valve 13, the second flow rate control valve 15, and the concentration sensor 24 are not provided. The other components of the adsorption device 100 are the same as those of the above-described adsorption device 1, and the same portions are denoted by reference numerals, and the description of the same portions is omitted.

圖6、圖7係關於使用圖5所示之吸附裝置100的比較例之二氧化碳之純化方法,以下,說明與上述實施形態之不同點,省略相同部分之說明。 Fig. 6 and Fig. 7 show a method for purifying carbon dioxide in a comparative example using the adsorption device 100 shown in Fig. 5. Hereinafter, differences from the above-described embodiment will be described, and the description of the same portions will be omitted.

於比較例中,作為純化處理步驟,依序實施吸附步驟、解吸用均壓步驟、解吸步驟、升壓用均壓步驟、及升壓步驟,而不實施實施形態中之減壓步驟與氣體壓出步驟。因此,如圖6所示,依序實現吸 附塔2a、2b、2c各者中之純化處理步驟相互不同之運轉狀態(a)'~(f)'。 In the comparative example, as the purification treatment step, the adsorption step, the depressurization pressure equalization step, the desorption step, the pressure increasing pressure equalization step, and the pressure increasing step are sequentially performed without performing the pressure reduction step and the gas pressure in the embodiment. Step out. Therefore, as shown in FIG. 6, the suction is sequentially performed. The operation steps (a) '~(f)' in which the purification processing steps in each of the towers 2a, 2b, and 2c are different from each other.

於比較例中,為了依序實施純化處理步驟,利用控制裝置20而控制第1~第15、第17開關閥6a、6b、6c、7a、7b、7c、8a、8b、8c、10a、10b、10c、11a、11b、11c、14各者。圖7係表示運轉狀態(a)'~(f)'、與吸附塔2a、2b、2c各者中所實施之純化處理步驟、與第1~第15、第17開關閥各者之狀態之對應關係,○符號表示開關閥打開之狀態,×符號表示開關閥關閉之狀態。 In the comparative example, the first to fifteenth and seventeenth on-off valves 6a, 6b, 6c, 7a, 7b, 7c, 8a, 8b, 8c, 10a, 10b are controlled by the control device 20 in order to sequentially perform the purification treatment step. , 10c, 11a, 11b, 11c, 14 each. Fig. 7 shows the operation state (a) '~(f)', the purification processing steps performed in each of the adsorption towers 2a, 2b, and 2c, and the states of the first to the fifteenth and seventeenth on-off valves. Corresponding relationship, the symbol ○ indicates the state in which the on-off valve is open, and the symbol x indicates the state in which the on-off valve is closed.

於運轉狀態(a)'下,打開第1、第4、第11、第12、開關閥6a、7a、10b、10c,關閉其餘開關閥。藉由打開第1、第4開關閥6a、7a,而於第1吸附塔2a中實施吸附步驟。藉由打開第11、第12開關閥10b、10c,而於第2吸附塔2b中實施升壓用均壓步驟,於第3吸附塔2c中實施解吸用均壓步驟。 In the operating state (a)', the first, fourth, eleventh, and twelfth, on-off valves 6a, 7a, 10b, and 10c are opened, and the remaining on-off valves are closed. The adsorption step is performed in the first adsorption tower 2a by opening the first and fourth on-off valves 6a and 7a. By opening the eleventh and twelfth on-off valves 10b and 10c, a step of pressure equalization is performed in the second adsorption tower 2b, and a pressure equalization step for desorption is performed in the third adsorption tower 2c.

於運轉狀態(b)'下,打開第1、第4、第9、第14、第17開關閥6a、7a、8c、11b、14,關閉其餘開關閥。藉由打開第1、第4、第15、第17開關閥6a、7a、11b、14,而於第1吸附塔2a中繼運轉狀態(a)'之後繼續實施吸附步驟,於第2吸附塔2b中實施升壓步驟。藉由打開第9開關閥8c,而於第3吸附塔2c中實施解吸步驟。 In the operating state (b)', the first, fourth, ninth, fourteenth, and seventeenth on-off valves 6a, 7a, 8c, 11b, and 14 are opened, and the remaining on-off valves are closed. By opening the first, fourth, fifteenth, and seventeenth on-off valves 6a, 7a, 11b, and 14, the adsorption step is continued after the first adsorption tower 2a is relayed to the operation state (a)', and the second adsorption tower is operated. The boosting step is implemented in 2b. The desorption step is carried out in the third adsorption tower 2c by opening the ninth on-off valve 8c.

於運轉狀態(c)'下,打開第2、第5、第10、第12開關閥6b、7b、10a、10c,關閉其餘開關閥。藉由打開第2、第5開關閥6b、7b,而於第2吸附塔2b中實施吸附步驟。藉由打開第10、第12開關閥10a、10c,而於第1吸附塔2a中實施解吸用均壓步驟,於第3吸附塔2c中實施升壓用均壓步驟。 In the operating state (c)', the second, fifth, tenth, and twelfth switching valves 6b, 7b, 10a, and 10c are opened, and the remaining switching valves are closed. The adsorption step is performed in the second adsorption tower 2b by opening the second and fifth on-off valves 6b and 7b. By opening the tenth and twelfth on-off valves 10a and 10c, the desorption depressing step is performed in the first adsorption tower 2a, and the step-up pressure equalization step is performed in the third adsorption tower 2c.

於運轉狀態(d)'下,打開第2、第5、第7、第15、第17開關閥6b、7b、8a、11c、14,關閉其餘開關閥。藉由打開第2、第5、第15、第17開關閥6b、7b、11c、14,而於第2吸附塔2b中繼運轉狀態(c)'之後 繼續實施吸附步驟,於第3吸附塔2c中實施升壓步驟。藉由打開第7開關閥8a,而於第1吸附塔2a中實施解吸步驟。 In the operating state (d)', the second, fifth, seventh, fifteenth, and seventeenth on-off valves 6b, 7b, 8a, 11c, and 14 are opened, and the remaining on-off valves are closed. After the second, fifth, fifteenth, and seventeenth on-off valves 6b, 7b, 11c, and 14 are opened, the second adsorption tower 2b is relayed to the operation state (c)'. The adsorption step is continued, and a pressure increasing step is performed in the third adsorption column 2c. The desorption step is carried out in the first adsorption tower 2a by opening the seventh on-off valve 8a.

於運轉狀態(e)'下,打開第3、第6、第10、第11開關閥6c、7c、10a、10b,關閉其餘開關閥。藉由打開第3、第6開關閥6c、7c,而於第3吸附塔2c中實施吸附步驟。藉由打開第10、第11開關閥10a、10b,而於第1吸附塔2a中實施升壓用均壓步驟,於第2吸附塔2b中實施解吸用均壓步驟。 In the operating state (e)', the third, sixth, tenth, and eleventh on-off valves 6c, 7c, 10a, and 10b are opened, and the remaining on-off valves are closed. The adsorption step is performed in the third adsorption tower 2c by opening the third and sixth on-off valves 6c and 7c. By opening the tenth and eleventh on-off valves 10a and 10b, a pressure equalization step is performed in the first adsorption tower 2a, and a desorption pressure equalization step is performed in the second adsorption tower 2b.

於運轉狀態(f)'下,打開第3、第6、第8、第13、第17開關閥6c、7c、8b、11a、14,關閉其餘開關閥。藉由打開第3、第6、第13、第17開關閥6c、7c、11a、14,而於第1吸附塔2a中在升壓步驟中實施升壓步驟,於第3吸附塔2c中繼運轉狀態(e)'之後繼續實施吸附步驟。藉由打開第8開關閥8b,而於第2吸附塔2b中實施解吸步驟。 In the operating state (f)', the third, sixth, eighth, thirteenth, and seventeenth on-off valves 6c, 7c, 8b, 11a, and 14 are opened, and the remaining on-off valves are closed. By opening the third, sixth, thirteenth, and seventeenth on-off valves 6c, 7c, 11a, and 14 , a step of boosting is performed in the first adsorption tower 2a in the step of boosting, and relaying is performed in the third adsorption tower 2c. The adsorption step is continued after the operation state (e)'. The desorption step is carried out in the second adsorption tower 2b by opening the eighth on-off valve 8b.

於比較例中,吸附步驟、解吸用均壓步驟、解吸步驟、升壓用均壓步驟、升壓步驟係與上述實施形態同樣地進行。於吸附塔2a、2b、2c之任一者中實施解吸用均壓步驟時,該吸附塔內部係經由連通流路而通向實施升壓用均壓步驟之吸附塔2a、2b、2c之另外任一者之內部,藉此壓力減小,成為吸附壓力與大氣壓間之中間壓力。此時,將處於解吸用均壓步驟之吸附塔之內部氣體G5導入至處於升壓用均壓步驟之吸附塔中。由於使處於解吸用均壓步驟之吸附塔內部與處於升壓用均壓步驟之吸附塔內部成為均壓,故而處於升壓用均壓步驟之吸附塔之內部壓力上升至與中間壓力相等。 In the comparative example, the adsorption step, the depressurization pressure equalization step, the desorption step, the pressure increasing pressure equalization step, and the pressure increasing step were carried out in the same manner as in the above embodiment. When the desorption step of desorption is performed in any of the adsorption towers 2a, 2b, and 2c, the inside of the adsorption tower is connected to the adsorption towers 2a, 2b, and 2c for performing the pressure equalization step through the communication passage. In either case, the pressure is reduced to become an intermediate pressure between the adsorption pressure and the atmospheric pressure. At this time, the internal gas G5 of the adsorption tower in the depressurization pressure equalization step is introduced into the adsorption tower in the pressure equalization step. Since the inside of the adsorption tower in the depressurization pressure equalization step and the inside of the adsorption tower in the pressure increasing pressure equalization step are equalized, the internal pressure of the adsorption tower in the pressure increasing pressure equalization step rises to be equal to the intermediate pressure.

由於在上述比較例中未實施氣體壓出步驟,故而於處於解吸步驟後且升壓步驟前之狀態之吸附塔2a、2b、2c之任一者中,自吸附劑解吸之高純度之二氧化碳滯留於其內部。該滯留之高純度之二氧化碳於其後之吸附步驟中一部分被吸附至吸附劑,但其餘部分作為逸氣自吸附塔2a、2b、2c中被排出,因此二氧化碳之回收率降低。 Since the gas extrusion step is not carried out in the above comparative example, high-purity carbon dioxide retention from the adsorbent is desorbed in any of the adsorption towers 2a, 2b, and 2c in a state after the desorption step and before the pressure-up step. Inside it. The retained high-purity carbon dioxide is partially adsorbed to the adsorbent in the subsequent adsorption step, but the remainder is discharged as the outgas from the adsorption towers 2a, 2b, 2c, so that the recovery rate of carbon dioxide is lowered.

[實施例] [Examples] [實施例1] [Example 1]

使用圖1所示之吸附裝置1並依據上述實施形態將原料二氧化碳G1進行純化。 The raw material carbon dioxide G1 was purified by using the adsorption device 1 shown in Fig. 1 in accordance with the above embodiment.

原料二氧化碳G1包含二氧化碳75vol%,分別包含作為雜質氣體之氫氣18.3vol%、氮氣4.7vol%、氬氣1.6vol%、甲烷0.4vol%。 The raw material carbon dioxide G1 contained 75 vol% of carbon dioxide, and contained 18.3 vol% of hydrogen as an impurity gas, 4.7 vol% of nitrogen, 1.6 vol% of argon, and 0.4 vol% of methane.

原料二氧化碳G1向吸附裝置1中之供給流量係設為7.6NL/min。 The supply flow rate of the raw material carbon dioxide G1 to the adsorption device 1 was set to 7.6 NL/min.

各吸附塔2a、2b、2c具有內徑37.1mm、內部尺寸高度1000mm之圓筒形狀。 Each of the adsorption towers 2a, 2b, and 2c has a cylindrical shape having an inner diameter of 37.1 mm and an inner dimension of 1000 mm.

向各吸附塔2a、2b、2c中,填充碳分子篩1.08升作為吸附劑。 To each of the adsorption columns 2a, 2b, and 2c, 1.08 liter of a carbon molecular sieve was filled as an adsorbent.

作為純化處理步驟,依序實施:吸附步驟210秒、減壓步驟40秒、解吸用均壓步驟15秒、解吸步驟155秒、氣體壓出步驟40秒、升壓用均壓步驟15秒、升壓步驟155秒。 As a purification treatment step, the adsorption step was carried out in sequence: 210 seconds of adsorption, 40 seconds of depressurization, 15 seconds of desorption for desorption, 155 seconds of desorption, 40 seconds of gas extrusion, and 15 seconds of pressure equalization Press the step for 155 seconds.

處於吸附步驟之吸附塔2a、2b、2c之內部壓力(吸附壓力)係設為0.8MPa(錶壓)。處於減壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第1中間壓力)係設為0.68MPa(錶壓)。處於解吸用均壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第2中間壓力)係設為0.32MPa(錶壓)。處於解吸步驟之末期之吸附塔2a、2b、2c之內部壓力係設為0.05MPa(錶壓)。 The internal pressure (adsorption pressure) of the adsorption towers 2a, 2b, and 2c in the adsorption step was set to 0.8 MPa (gauge pressure). The internal pressure (first intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization step was set to 0.68 MPa (gauge pressure). The internal pressure (second intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization pressure equalization step was set to 0.32 MPa (gauge pressure). The internal pressure of the adsorption towers 2a, 2b, 2c at the end of the desorption step was set to 0.05 MPa (gauge pressure).

所獲得之純化氣體G3、G3'之二氧化碳濃度為95vol%,回收率為91%。 The purified gas G3 and G3' obtained had a carbon dioxide concentration of 95 vol%, and the recovery was 91%.

[實施例2] [Embodiment 2]

使用圖1所示之吸附裝置1並依據上述實施形態而將原料二氧化碳G1進行純化。 The raw material carbon dioxide G1 was purified by using the adsorption device 1 shown in Fig. 1 in accordance with the above embodiment.

原料二氧化碳G1包含二氧化碳82vol%,分別包含作為雜質氣體之氫氣11.3vol%、氮氣4.7vol%、氬氣1.6vol%、甲烷0.4vol%。 The raw material carbon dioxide G1 contained 82 vol% of carbon dioxide, and contained 11.3 vol% of hydrogen as an impurity gas, 4.7 vol% of nitrogen, 1.6 vol% of argon, and 0.4 vol% of methane.

為了進行純化,分別進行:吸附步驟180秒、減壓步驟40秒、解吸用均壓步驟15秒、解吸步驟125秒、氣體壓出步驟40秒、升壓用均壓步驟15秒、升壓步驟125秒。 For purification, the adsorption step was 180 seconds, the depressurization step was 40 seconds, the desorption depressing step was 15 seconds, the desorption step was 125 seconds, the gas extrusion step was 40 seconds, the pressure increasing step was 15 seconds, and the pressure increasing step was performed. 125 seconds.

處於吸附步驟之吸附塔2a、2b、2c之內部壓力(吸附壓力)係設為0.8MPa(錶壓)。處於減壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第1中間壓力)係設為0.65MPa(錶壓)。處於解吸用均壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第2中間壓力)係設為0.3MPa(錶壓)。處於解吸步驟之末期之吸附塔2a、2b、2c之內部壓力係設為0.05MPa(錶壓)。 The internal pressure (adsorption pressure) of the adsorption towers 2a, 2b, and 2c in the adsorption step was set to 0.8 MPa (gauge pressure). The internal pressure (first intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization step was set to 0.65 MPa (gauge pressure). The internal pressure (second intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization pressure equalization step was set to 0.3 MPa (gauge pressure). The internal pressure of the adsorption towers 2a, 2b, 2c at the end of the desorption step was set to 0.05 MPa (gauge pressure).

其他條件係與實施例1相同。 Other conditions are the same as in the first embodiment.

所獲得之純化氣體G3、G3'之二氧化碳濃度為97.0vol%,回收率為85%。 The obtained purified gas G3, G3' had a carbon dioxide concentration of 97.0 vol%, and the recovery was 85%.

[實施例3] [Example 3]

使用圖1所示之吸附裝置1並依據上述實施形態而將原料二氧化碳G1進行純化。 The raw material carbon dioxide G1 was purified by using the adsorption device 1 shown in Fig. 1 in accordance with the above embodiment.

為了進行純化,分別進行:吸附步驟180秒、減壓步驟40秒、解吸用均壓步驟15秒、解吸步驟125秒、氣體壓出步驟40秒、升壓用均壓步驟15秒、升壓步驟125秒。 For purification, the adsorption step was 180 seconds, the depressurization step was 40 seconds, the desorption depressing step was 15 seconds, the desorption step was 125 seconds, the gas extrusion step was 40 seconds, the pressure increasing step was 15 seconds, and the pressure increasing step was performed. 125 seconds.

處於吸附步驟之吸附塔2a、2b、2c之內部壓力(吸附壓力)係設為0.8MPa(錶壓)。處於減壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第1中間壓力)係設為0.5MPa(錶壓)。處於解吸用均壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第2中間壓力)係設為0.22MPa(錶壓)。處於解吸步驟之末期之吸附塔2a、2b、2c之內部壓力係設為0.05MPa(錶壓)。 The internal pressure (adsorption pressure) of the adsorption towers 2a, 2b, and 2c in the adsorption step was set to 0.8 MPa (gauge pressure). The internal pressure (first intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the pressure reduction step was set to 0.5 MPa (gauge pressure). The internal pressure (second intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization pressure equalization step was set to 0.22 MPa (gauge pressure). The internal pressure of the adsorption towers 2a, 2b, 2c at the end of the desorption step was set to 0.05 MPa (gauge pressure).

其他條件係與實施例1相同。 Other conditions are the same as in the first embodiment.

所獲得之純化氣體G3、G3'之二氧化碳濃度為92.0vol%,回收率 為91%。 The obtained purified gas G3, G3' has a carbon dioxide concentration of 92.0 vol%, and the recovery rate It is 91%.

[實施例4] [Example 4]

為了進行純化,分別進行:吸附步驟180秒、減壓步驟40秒、解吸用均壓步驟15秒、解吸步驟125秒、氣體壓出步驟40秒、升壓用均壓步驟15秒、升壓步驟125秒。 For purification, the adsorption step was 180 seconds, the depressurization step was 40 seconds, the desorption depressing step was 15 seconds, the desorption step was 125 seconds, the gas extrusion step was 40 seconds, the pressure increasing step was 15 seconds, and the pressure increasing step was performed. 125 seconds.

處於吸附步驟之吸附塔2a、2b、2c之內部壓力(吸附壓力)係設為0.8MPa(錶壓)。處於減壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第1中間壓力)係設為0.75MPa(錶壓)。處於解吸用均壓步驟之末期之吸附塔2a、2b、2c之內部壓力(第2中間壓力)係設為0.35MPa(錶壓)。處於解吸步驟之末期之吸附塔2a、2b、2c之內部壓力係設為0.05MPa(錶壓)。 The internal pressure (adsorption pressure) of the adsorption towers 2a, 2b, and 2c in the adsorption step was set to 0.8 MPa (gauge pressure). The internal pressure (first intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization step was set to 0.75 MPa (gauge pressure). The internal pressure (second intermediate pressure) of the adsorption towers 2a, 2b, and 2c at the end of the depressurization pressure equalization step was set to 0.35 MPa (gauge pressure). The internal pressure of the adsorption towers 2a, 2b, 2c at the end of the desorption step was set to 0.05 MPa (gauge pressure).

其他條件係與實施例1相同。 Other conditions are the same as in the first embodiment.

所獲得之純化氣體G3、G3'之二氧化碳濃度為95.0vol%,回收率為87%。 The obtained purified gas G3 and G3' had a carbon dioxide concentration of 95.0 vol%, and the recovery was 87%.

[比較例1] [Comparative Example 1]

使用圖5所示之吸附裝置100而將原料二氧化碳G1進行純化。 The raw material carbon dioxide G1 was purified using the adsorption device 100 shown in Fig. 5 .

作為純化處理步驟,依序實施:吸附步驟、解吸用均壓步驟、解吸步驟、升壓用均壓步驟、及升壓步驟,不實施減壓步驟與氣體壓出步驟。 As the purification treatment step, the adsorption step, the depressurization pressure equalization step, the desorption step, the pressure increase pressure equalization step, and the pressure increase step are carried out in sequence, and the pressure reduction step and the gas pressure extraction step are not performed.

分別實施:吸附步驟170秒、解吸用均壓步驟15秒、解吸步驟155秒、升壓用均壓步驟15秒、升壓步驟155秒。 The adsorption step was 170 seconds, the desorption depressurization step was 15 seconds, the desorption step was 155 seconds, the boosting pressure equalization step was 15 seconds, and the pressure increasing step was 155 seconds.

其他條件係與實施例1相同。 Other conditions are the same as in the first embodiment.

所獲得之純化氣體G3之二氧化碳濃度為89vol%,回收率為84%。 The purified gas G3 obtained had a carbon dioxide concentration of 89 vol% and a recovery of 84%.

如以下之表1所示,可確認與比較例相比,根據實施例可不降低回收率而獲得高純度之二氧化碳。 As shown in the following Table 1, it was confirmed that high-purity carbon dioxide can be obtained without lowering the recovery rate according to the examples as compared with the comparative examples.

本發明並不限定於上述實施形態、實施例、變化例。例如,作為純化處理步驟,解吸用均壓步驟與升壓用均壓步驟並非必須,亦可於減壓步驟後實施解吸步驟,於氣體壓出步驟後實施升壓步驟。又,吸附裝置中之吸附塔之數量並不限定於3個,只要為複數個即可。 The present invention is not limited to the above embodiments, examples, and modifications. For example, as the purification treatment step, the depressurization pressure equalization step and the pressure increase pressure equalization step are not essential, and the desorption step may be performed after the depressurization step, and the pressure increasing step may be performed after the gas extrusion step. Further, the number of adsorption columns in the adsorption device is not limited to three, and may be plural.

Claims (8)

一種二氧化碳之純化方法,其係於使用具有複數個吸附塔之變壓式吸附裝置而將包含雜質氣體之原料二氧化碳進行純化時,將優先於雜質氣體吸附二氧化碳之吸附劑收納至上述各吸附塔中,向上述各吸附塔中依序導入上述原料二氧化碳,於上述各吸附塔中,依序實施如下步驟:吸附步驟,其係使所導入之上述原料二氧化碳中所含之二氧化碳於加壓下吸附至上述吸附劑,並且將未被上述吸附劑吸附之雜質氣體作為逸氣排出;減壓步驟,其係減少內部壓力;解吸步驟,其係將二氧化碳自上述吸附劑上解吸並排出;及升壓步驟,其係使內部壓力上升;將於上述解吸步驟中自上述各吸附塔中排出之二氧化碳作為純化氣體加以回收之方法,該二氧化碳之純化方法之特徵在於:實施氣體壓出步驟,其係藉由向處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中,導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體,而將滯留於處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部之二氧化碳壓出至外部,並且將於上述氣體壓出步驟中壓出之二氧化碳作為純化氣體加以回收。A method for purifying carbon dioxide by using a pressure swing type adsorption device having a plurality of adsorption columns to purify a raw material carbon dioxide containing an impurity gas, and absorbing an adsorbent which adsorbs carbon dioxide preferentially with an impurity gas into each of the adsorption towers The raw material carbon dioxide is sequentially introduced into each of the adsorption towers, and in each of the adsorption towers, a step of adsorbing carbon dioxide contained in the introduced raw material carbon dioxide under pressure is sequentially performed. The adsorbent, and the impurity gas not adsorbed by the adsorbent is discharged as an outgas; the depressurization step is to reduce the internal pressure; the desorption step is to desorb and discharge the carbon dioxide from the adsorbent; and the step of pressurizing And the method of recovering the internal pressure by the carbon dioxide discharged from the adsorption towers in the desorption step, wherein the carbon dioxide purification method is characterized in that the gas extrusion step is performed by Said to the state after the desorption step and before the step of boosting In any one of the towers, the internal gas of any one of the adsorption towers in the depressurization step is introduced, and the adsorption tower is retained in the state after the desorption step and before the pressure increasing step. The carbon dioxide inside is pressurized to the outside, and the carbon dioxide extruded in the above gas extrusion step is recovered as a purified gas. 如請求項1之二氧化碳之純化方法,其中根據上述原料二氧化碳中之二氧化碳濃度之變化,而變更於上述氣體壓出步驟中向上述吸附塔之任一者中自處於上述減壓步驟之上述吸附塔之另外任一者所導入之氣體量。The method for purifying carbon dioxide according to claim 1, wherein the adsorption tower is changed from the gas extraction step to the adsorption column in any one of the adsorption columns from the pressure reduction step. The amount of gas introduced by either of them. 如請求項1之二氧化碳之純化方法,其中藉由使處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部、與處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者之內部以壓力相等之方式連通,而於處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中實施升壓用均壓步驟,並且於處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者中實施解吸用均壓步驟。The method for purifying carbon dioxide according to claim 1, wherein the inside of the adsorption tower in a state after the gas extrusion step and before the pressure increasing step is desorbed after the decompression step and the desorption step The inside of any one of the adsorption towers in the state before the step is connected in an equal pressure manner, and is carried out in any of the adsorption towers in a state after the gas pressing step and before the pressure increasing step. The pressure equalization step is carried out, and the desorption step for desorption is carried out in any of the adsorption towers in the state after the above-mentioned decompression step and before the desorption step. 如請求項2之二氧化碳之純化方法,其中藉由使處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部、與處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者之內部以壓力相等之方式連通,而於處於上述氣體壓出步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中實施升壓用均壓步驟,並且於處於上述減壓步驟後且上述解吸步驟前之狀態之上述吸附塔之另外任一者中實施解吸用均壓步驟。The method for purifying carbon dioxide according to claim 2, wherein the inside of the adsorption tower in a state after the gas extrusion step and before the pressure increasing step is desorbed after the decompression step and the desorption step The inside of any one of the adsorption towers in the state before the step is connected in an equal pressure manner, and is carried out in any of the adsorption towers in a state after the gas pressing step and before the pressure increasing step. The pressure equalization step is carried out, and the desorption step for desorption is carried out in any of the adsorption towers in the state after the above-mentioned decompression step and before the desorption step. 如請求項1至4中任一項之二氧化碳之純化方法,其中使用壓縮氣體作為上述原料二氧化碳,藉由上述原料二氧化碳之壓力而將上述吸附塔內部加壓至上述吸附步驟中所需之吸附壓力,藉由使上述吸附塔內部連通至常壓空間而減壓至上述解吸步驟中所需之壓力。The method for purifying carbon dioxide according to any one of claims 1 to 4, wherein a compressed gas is used as the raw material carbon dioxide, and the inside of the adsorption tower is pressurized to the adsorption pressure required in the adsorption step by the pressure of the raw material carbon dioxide. The pressure required to be decompressed in the desorption step is reduced by connecting the inside of the adsorption tower to the atmospheric pressure space. 一種二氧化碳之純化系統,其具備用以將包含雜質氣體之原料二氧化碳進行純化之變壓式吸附裝置,上述變壓式吸附裝置具有收納有優先於雜質氣體吸附二氧化碳之吸附劑的複數個吸附塔,且具備:導入流路,其係用以向上述各吸附塔中導入上述原料二氧化碳;逸氣流路,其係用以將逸氣自上述各吸附塔中排出;純化氣體流路,其係用以將二氧化碳自上述各吸附塔中排出;連通流路,其係用以使上述吸附塔之任一者與另外任一者相互連通;導入路開關閥,其係將上述各吸附塔與上述導入流路之間個別地開啟及關閉;逸氣路開關閥,其係將上述各吸附塔與上述逸氣流路之間個別地開啟及關閉;純化氣體路開關閥,其係將上述各吸附塔與上述純化氣體流路之間個別地開啟及關閉;及連通路開關閥,其係將上述各吸附塔與上述連通流路之間個別地開啟及關閉;上述各開關閥係作為以可個別地進行開關動作之方式具有開關用致動器之自動閥並且連接於控制裝置,於上述各吸附塔中,以依序實施如下步驟之方式利用上述控制裝置而控制上述各開關閥:吸附步驟,其係使所導入之上述原料二氧化碳中所含之二氧化碳於加壓下吸附至上述吸附劑,並且將未被上述吸附劑吸附之雜質氣體作為逸氣排出;減壓步驟,其係減少內部壓力;解吸步驟,其係將二氧化碳自上述吸附劑上解吸並排出;及升壓步驟,其係使內部壓力上升;該二氧化碳之純化系統之特徵在於:以實施如下氣體壓出步驟之方式利用上述控制裝置而控制上述各開關閥,該實施氣體壓出步驟係藉由向處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者中,導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體,而將滯留於處於上述解吸步驟後且上述升壓步驟前之狀態之上述吸附塔之任一者之內部之二氧化碳壓出至外部。A carbon dioxide purification system comprising a pressure swing adsorption device for purifying a raw material carbon dioxide containing an impurity gas, wherein the pressure swing adsorption device has a plurality of adsorption towers that store an adsorbent that adsorbs carbon dioxide in preference to an impurity gas. And an introduction flow path for introducing the raw material carbon dioxide into each of the adsorption towers; an escape flow path for discharging the outgas from the adsorption towers; and a purification gas flow path, which is used for Discharging carbon dioxide from each of the adsorption towers; communicating a flow path for communicating any one of the adsorption towers with any one of the other; introducing an on-off valve that connects the adsorption towers to the introduction flow Each of the roads is opened and closed individually; the gas circuit switching valve is separately opened and closed between the adsorption towers and the air flow passage; the purified gas circuit switching valve is configured by the above adsorption towers and the above Individually opening and closing the purified gas flow paths; and connecting the on-off valves, which open the respective adsorption towers and the communication flow paths individually Each of the above-described switching valves is an automatic valve having a switching actuator that can be individually switched, and is connected to a control device, and the above-described control is performed in each of the adsorption towers in the following steps. The apparatus controls the above-mentioned respective on-off valves: an adsorption step of adsorbing carbon dioxide contained in the introduced raw material carbon dioxide to the adsorbent under pressure, and discharging the impurity gas not adsorbed by the adsorbent as an outgas a depressurization step for reducing internal pressure; a desorption step for desorbing and discharging carbon dioxide from the adsorbent; and a step of increasing the internal pressure; the carbon dioxide purification system is characterized by: The above-described switching valves are controlled by the above-described control device in such a manner that the gas is pushed out by any one of the adsorption towers in a state after the desorption step and before the pressure increasing step. Introducing the internal gas of any of the above adsorption towers in the above-mentioned decompression step, and staying in Following the above and the carbon dioxide inside the desorption step of the adsorption tower according to any of the above-described state before the step of boosting the pressure of the one to the outside. 如請求項6之二氧化碳之純化系統,其具備調節於上述連通流路中流動之氣體流量之流量控制閥,上述流量控制閥係作為以可進行流量調節動作之方式具有流量調節用致動器之自動閥並且連接於上述控制裝置,具備檢測上述原料二氧化碳中之二氧化碳濃度並且連接於上述控制裝置之感測器,上述氣體壓出步驟之預先確定之一定之實施時間係記憶於上述控制裝置,於上述氣體壓出步驟中,向上述吸附塔之任一者中導入處於上述減壓步驟之上述吸附塔之另外任一者之內部氣體時之於上述連通流路中流動之氣體流量、與上述原料二氧化碳中之二氧化碳濃度之間之預先確定之對應關係係記憶於上述控制裝置,以根據利用上述感測器所檢測出之二氧化碳濃度之變化而變更於上述氣體壓出步驟中向上述吸附塔之任一者中自處於上述減壓步驟之上述吸附塔之另外任一者所導入之氣體量之方式,為了以上述控制裝置所記憶之上述實施時間實施上述氣體壓出步驟,而控制上述開關閥,並且基於上述對應關係而變更上述流量控制閥之調節氣體流量。A purification system for carbon dioxide according to claim 6, further comprising: a flow rate control valve that regulates a flow rate of the gas flowing through the communication passage; the flow rate control valve has a flow rate adjustment actuator so as to perform a flow rate adjustment operation The automatic valve is connected to the control device, and includes a sensor for detecting a concentration of carbon dioxide in the raw material carbon dioxide and connected to the control device, and a predetermined execution time of the gas pressing step is stored in the control device. In the gas extrusion step, the flow rate of the gas flowing through the communication passage when the internal gas of the adsorption tower in the depressurization step is introduced into any one of the adsorption towers, and the raw material The predetermined correspondence relationship between the carbon dioxide concentrations in the carbon dioxide is stored in the control device, and is changed to the adsorption tower according to the change in the carbon dioxide concentration detected by the sensor. One of the above adsorption towers in the above-mentioned decompression step In order to perform the gas pressing step by performing the gas pressing step by the execution time stored in the control device, the switching valve is controlled to change the flow rate of the regulating gas of the flow rate control valve based on the correspondence relationship. 如請求項6之二氧化碳之純化系統,其具備檢測上述原料二氧化碳之二氧化碳濃度並且連接於上述控制裝置之感測器,上述氣體壓出步驟之實施時間、與上述原料二氧化碳中之二氧化碳濃度之間之預先確定之對應關係係記憶於上述控制裝置,以根據利用上述感測器所檢測出之二氧化碳濃度之變化而變更於上述氣體壓出步驟中向上述吸附塔之任一者中自另外任一者導入之氣體量之方式,利用上述控制裝置並基於上述對應關係而變更上述氣體壓出步驟之實施時間。A purification system for carbon dioxide according to claim 6, comprising: a sensor for detecting a carbon dioxide concentration of the carbon dioxide of the raw material and connected to the control device, wherein an execution time of the gas pressing step and a carbon dioxide concentration in the raw material carbon dioxide The predetermined correspondence relationship is stored in the control device, and is changed to any one of the adsorption towers in the gas extrusion step according to a change in the carbon dioxide concentration detected by the sensor. In the method of introducing the amount of gas, the execution time of the gas pressing step is changed based on the correspondence relationship by the control device.
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