TWI623381B - Support carrier, system and method for leakage test - Google Patents

Abstract

A support carrier includes a base, two clamp discs, a rotating member and a fixing mechanism. The base has an accommodation space. The two clamp discs are located in the accommodating space for jointly clamping an abrasive workpiece therebetween. The rotating member is rotatably coupled to the base and detachably connects the two clamping discs. The fixing mechanism integrates the rotating member and the two clamping plates.

Description

Support vehicle, leak test system and method

The present disclosure relates to a vehicle, and more particularly to a support vehicle, a leak test system and method.

In the manufacturing process of a semiconductor element, the specific expression of the surface flattening of the semiconductor element will be more and more important. One of the planarization means for the semiconductor wafer substrate is Chemical-Mechanical Planarization (CMP). CMP is a mechanical polishing device that planarizes the surface of a semiconductor wafer substrate by chemical etching and physical polishing.

Grinding a workpiece on a mechanical grinding device requires unloading the ground workpiece for routine maintenance such as cleaning, repairing, or replacing parts. The workpiece is manually turned over and repeatedly to disassemble the multiple components of the ground workpiece. After routine maintenance work such as cleaning, repairing or replacing parts is completed, the workpiece is assembled by assembling a plurality of sub-assemblies of the grinding workpiece through a process of multiple turning.

The present disclosure relates to a support carrier. The support carrier includes a base, a first clamp disk, a second clamp disk, a rotating member and a fixing mechanism. The base has a capacity Set the space. The first clamping disc is located in the accommodating space, and the second clamping disc is opposite to the first clamping disc for clamping the workpiece with the first clamping disc. The rotating member is reversibly coupled to the base and detachably connects the second clamp disk to the first clamp disk. The fixing mechanism integrates the rotating member, the first clamping disc and the second clamping disc into one body.

The disclosure is more related to a leak test system. The leak test system includes a support carrier and a test device. The support carrier includes a base, a first clamp disk, a second clamp disk, a rotating member and a fixing mechanism. The base has an accommodation space. The first clamping disc is located in the accommodating space, and the second clamping disc is opposite to the first clamping disc for clamping the workpiece with the first clamping disc. The abrasive workpiece has an internal space and a nozzle. The nozzle is located on the surface of the grinding workpiece, exposed on one side of the second clamping disc, and is connected to the internal space. The rotating member is reversibly coupled to the base and detachably connects the second clamp disk to the first clamp disk. The fixing mechanism integrates the rotating member, the first clamping disc and the second clamping disc into one body. The test device turns on the internal space through the nozzle and tests whether the abrasive workpiece leaks.

This disclosure is more related to a leak test method. The leak test method includes the following steps. An abrasive workpiece is attached to a reversible support carrier. Test whether the abrasive workpiece on the support carrier leaks.

10‧‧‧Leak test system

100‧‧‧Testing device

110‧‧‧Device host

120‧‧‧ Vents

130‧‧‧pipe body

200, 201‧‧‧Support vehicle

210‧‧‧Base

211‧‧‧Base

212‧‧‧First housing

212T‧‧‧ top surface

212P‧‧‧ first breach

213‧‧‧ first inside

213P‧‧‧first opening

214‧‧‧Second housing

214T‧‧‧ top surface

214P‧‧‧second break

215‧‧‧ second inner face

215P‧‧‧ second opening

216‧‧‧first baffle

217‧‧‧second baffle

218‧‧‧ accommodating space

219‧‧‧Control panel

220‧‧‧First fixture disc

230‧‧‧ first board

231‧‧‧ first side

232‧‧‧ second side

233‧‧‧ first through opening

234‧‧‧First mat

235‧‧‧Second pad

236‧‧‧First body

237‧‧‧first hand

240‧‧‧first groove

241‧‧‧ first bottom surface

242‧‧‧First side wall

243‧‧‧Fifth positioning piece

244‧‧‧ sixth positioning piece

250‧‧‧Positioning holes

260‧‧‧First fixture disc

270‧‧‧ third plate

271‧‧‧ fifth side

272‧‧‧ sixth side

273‧‧‧through holes

274‧‧‧5th body

275‧‧‧ sixth cushion

276‧‧‧third body

277‧‧‧ third hand

280‧‧‧ third groove

281‧‧‧ third bottom

282‧‧‧ third side wall

283‧‧‧Support surface

284‧‧‧fourth side wall

285‧‧‧Ninth positioning piece

286‧‧‧10th positioning piece

300‧‧‧Second clamp disc

310‧‧‧Second plate

311‧‧‧ third side

312‧‧‧ fourth side

313‧‧‧Second opening

314‧‧‧ Third mat

315‧‧‧fourth body

316‧‧‧Second body

317‧‧‧ second hand

320‧‧‧second groove

321‧‧‧second bottom surface

322‧‧‧Second side wall

323‧‧‧ bearing surface

324‧‧‧ seventh positioning piece

325‧‧‧eight positioning parts

400‧‧‧First rotating part

410‧‧‧First connector

411‧‧‧first pin hole

420‧‧‧First extension

421‧‧‧First positioning piece

430‧‧‧First shaft part

500‧‧‧Second rotating parts

510‧‧‧Second connector

520‧‧‧Second extension

521‧‧‧third positioning piece

530‧‧‧Second shaft part

600‧‧‧Fixed institutions

610‧‧‧First compression parts

611‧‧‧ first body

612‧‧‧First cantilever

613‧‧‧ first joint

614‧‧‧First Operation Department

615‧‧‧First Department of Oppression

620‧‧‧Second compression parts

621‧‧‧Second body

622‧‧‧second cantilever

624‧‧‧Second Operations Department

625‧‧‧Second Oppression

630‧‧‧ Third compression parts

631‧‧‧ third body

632‧‧‧ third cantilever

634‧‧‧ Third Operations Department

635‧‧‧ Third Department of Oppression

640‧‧‧4th compression parts

641‧‧‧Fourth body

642‧‧‧four cantilever

644‧‧‧Fourth Operations Department

645‧‧‧The Fourth Department of Oppression

650‧‧‧First Clamping Joint

651‧‧‧Positioning bumps

660‧‧‧Second clamp joint

670‧‧‧First sensing element

680‧‧‧Second sensing element

700‧‧‧Powerplant

710‧‧‧ device body

711‧‧‧Rotating axis

720‧‧‧First limit module

721‧‧‧First limit pin

722‧‧‧First drive

730‧‧‧second limit module

731‧‧‧Second limit pin

732‧‧‧Second drive

810‧‧‧Status Monitoring Unit

820‧‧‧Warning unit

830‧‧‧Processing unit

900‧‧‧Abrasive workpiece

910‧‧‧ first main face

911‧‧‧ highlights

912‧‧‧ nozzle

920‧‧‧Second main face

921‧‧‧protective cover

930‧‧‧Week

940‧‧‧Internal space

950‧‧‧ components

1410~1420‧‧‧Steps

1411~1413, 1414~1415, 1421~1424‧‧‧ detailed steps

1421A, 1422A, 1423A, 1424A‧‧‧ Detailed steps

A-A, B-B, C-C, N‧‧‧ segments

F‧‧‧Frame

M‧‧‧ area

S‧‧‧ Space

T‧‧‧ superstructure

The disclosure is best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be emphasized that, depending on the standard practice in the industry, the various features are not drawn to scale and are for illustrative purposes only. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.

1 is a perspective view of a support carrier in accordance with an embodiment of the present disclosure; 2 is an exploded view of the support carrier of FIG. 1; FIG. 3 is a partial cross-sectional view of the support carrier of FIG. 1 along line AA; and FIG. 4 is a schematic view of the operation of the support carrier of FIG. FIG. 5 is a partial enlarged view of a region M of FIG. 1; FIG. 6 is a partial cross-sectional view of the support carrier of FIG. 1 along a line segment BB; FIG. 7 is a cross-sectional view of a support carrier according to an embodiment of the present disclosure; FIG. 8A is an enlarged perspective view of the first jig plate of FIG. 1; FIG. 8B is a perspective view of the first jig plate after FIG. 8A is inverted; FIG. 9A is a view of FIG. FIG. 9B is a perspective view of the second jig plate after the flipping of the second jig plate of FIG. 9A; FIG. 10A is a perspective view of the first jig plate according to an embodiment of the present disclosure; 10A is a perspective view of the first jig plate after being turned over; FIG. 11 is a perspective view of the support device according to an embodiment of the present disclosure; and FIG. 12 is a schematic view showing a leak test system according to an embodiment of the present disclosure; Figure 13 is a partial cross-sectional view of the leak test system along line CC of Figure 12; A flow chart of a leak test method according to an embodiment of the present invention; FIG. 15 is a detailed flow chart of step 1410 of FIG. 14 according to an embodiment; and FIG. 16 is a view of the steps of FIG. 14 according to an embodiment. Detail FIG. 17 is a detailed flow chart of step 1420 of FIG. 14 according to an embodiment; and FIG. 18 is a detailed flow chart of step 1410 of FIG. 14 according to an embodiment.

The following disclosure provides many different embodiments or examples for implementing different features of the subject matter provided. Specific examples of components and arrangements are described below to simplify the disclosure. Of course, these are merely examples and are not intended to be limiting. For example, forming the first feature over the second feature or the second feature in the following description may include forming the first feature and the second feature in direct contact, and may also include the first feature and the second feature Embodiments in which additional features are formed between features such that the first feature and the second feature may not be in direct contact. Additionally, the present disclosure may repeat element symbols and/or letters in various examples. This repetition is for the purpose of clarity and clarity, and is not intended to be a limitation of the various embodiments and/or configurations discussed.

In addition, for ease of description, spatially relative terms (such as "below", "below", "lower", "above", "upper", and the like) may be used herein to describe one element or The relationship of a feature to another component (or components) or features (or features). In addition to the orientation depicted in the drawings, spatially relative terms are intended to encompass different orientations of the device in use or operation. The device may be otherwise oriented (rotated 90 degrees or other orientation) and thus the spatially relative descriptors used herein may be interpreted equally.

The present disclosure generally relates to a support carrier, a leak test system including the support carrier, and a leak test method. In particular, the present disclosure is a leak test method for a support carrier for flipping a workpiece, a leak test system including the support carrier, and a leak test system. For example, the abrasive workpiece is a Chemical-Mechanical Planarization (CMP) for planarizing a semiconductor wafer substrate, however, the disclosure is not limited thereto.

FIG. 1 is a perspective view of a support carrier 200 in accordance with an embodiment of the present disclosure. FIG. 2 is an exploded view of the support carrier 200 of FIG. 1. 3 is a partial cross-sectional view of the support carrier 200 of FIG. 1 taken along line A-A. As shown in FIGS. 1 to 3, the present disclosure relates to a support carrier 200. The support carrier 200 includes at least a base 210, a first clamp disk 220, a second clamp disk 300, a first rotating member 400, a second rotating member 500, and a fixing mechanism 600. The susceptor 210 is provided with an accommodating space 218. The first clamp disc 220, the second clamp disc 300, the first rotating member 400 and the second rotating member 500 are located in the accommodating space 218. The first rotating member 400 is reversibly connected to one side of the base 210, and the first rotating member 400 detachably connects the second clamping disc 300 and the first clamping disc 220, and the second clamping disc 300 and the first clamping disc 220 Gearing. The second rotating member 500 is disposed opposite to the first rotating member 400, and the second rotating member 500 is reversibly coupled to the other side of the base 210. The second rotating member 500 detachably connects the second jig plate 300 and the first jig plate 220, and the second rotating member 500 is coupled with the second jig plate 300 and the first jig plate 220. The first jig plate 220 is disposed opposite to the second jig plate 300. The fixing mechanism 600 integrates the first rotating member 400, the second rotating member 500, the first clamping disc 220 and the second clamping disc 300 into one body.

FIG. 4 is a schematic view showing the operation of the support carrier 200 of FIG. 1. Such as 3 and 4, when a grinding workpiece 900 is sandwiched between the first clamping disc 220 and the second clamping disc 300, and the fixing mechanism 600 rotates the first rotating member 400, the second rotating member 500, When the first clamping disc 220 and the second clamping disc 300 are integrated, the grinding workpiece 900, the first clamping disc 220 and the second clamping disc 300 can be aligned with the base 120 with the first rotating member 400 and the second rotating member 500. Turn. In this way, the operator can easily and smoothly flip the abrasive workpiece 900 repeatedly to assemble or disassemble the abrasive workpiece 900 on the support carrier 200, thereby facilitating subsequent routine maintenance work.

Specifically, as shown in FIGS. 1 and 2 , the susceptor 210 includes a base 211 , a first housing 212 , and a second housing 214 . The first housing 212 and the second housing 214 are located on the base 211 opposite to each other. The base 211, the first housing 212 and the second housing 214 together define the accommodating space 218 described above. The base 210 further includes a first baffle 216 and a second baffle 217. The first baffle 216 is connected to the base 211, the first casing 212 and the second casing 214, and the second baffle 217 is connected to the base 211, the first casing 212 and the second casing 214, and the accommodating space 218 is interposed. Between the first baffle 216 and the second baffle 217, the first baffle 216 and the second baffle 217 protect the dropped object from falling out of the accommodating space 218.

In the present embodiment, as shown in FIGS. 2 and 3, the first rotating member 400 and the second rotating member 500 are both sandwiched between the second clamping plate 300 and the first clamping plate 220 for interlocking. The second jig plate 300 rotates correspondingly to the first jig plate 220. Specifically, the first rotating member 400 is disposed on the first inner surface 213 of the first housing 212 . The first inner surface 213 faces the accommodating space 218, and the first inner surface 213 has a first opening 213P. The first shaft portion 430 is pivotally located in the first opening 213P (Fig. 3). The first rotating member 400 is coaxial with the first rotating shaft portion 430. Therefore, The first rotating member 400 is rotated on the first housing 212 through the first rotating shaft portion 430, that is, the first rotating member 400 is rotated about the axial line of the first rotating shaft portion 430 (in the direction of the reference line segment N). The second rotating member 500 is disposed opposite to the first rotating member 400. The second rotating member 500 is disposed on the second inner surface 215 of the second housing 214, and the second inner surface 215 faces the first inner surface 213. The second inner face 215 has a second opening 215P. The second shaft portion 530 is pivotally located in the second opening 215P. The second rotating member 500 is coaxial with the second rotating shaft portion 530. Therefore, the second rotating member 500 is rotated on the second housing 214 through the second rotating shaft portion 530, that is, the second rotating member 500 is rotated about the axial line of the second housing 214 (in the direction of the reference line segment N).

In the present embodiment, as shown in FIGS. 2 and 3, the first rotating member 400 includes a first connecting body 410 and a first extending body 420. The first connecting body 410 is reversibly located on the first inner surface 213 of the first housing 212 and is fixed to the first rotating shaft portion 430. The first extension body 420 is fixed to one surface of the first connecting body 410 opposite to the first inner surface 213 and is sandwiched between the first clamp disc 220 and the second clamp disc 300. The second rotating member 500 includes a second connecting body 510 and a second extending body 520. The second connecting body 510 is reversibly located on the second inner surface 215 of the second housing 214 and is fixed to the second rotating shaft portion 530. The second extension body 520 is fixed to one surface of the second connecting body 510 opposite to the second inner surface 215 and is sandwiched between the first clamping disc 220 and the second clamping disc 300. Therefore, it can be understood that the abrasive workpiece 900 is located in the space S defined between the second rotating member 500, the first rotating member 400, the first chuck disk 220, and the second chuck disk 300.

As shown in FIG. 2, the fixing mechanism 600 includes a first pressing member 610, a second pressing member 620, a third pressing member 630, and a fourth pressing member 640. The first pressing member 610 and the second pressing member 620 are respectively connected to the second rotating member 400. side. The first pressing members 610 are spaced apart on the first jig plate 220. The second pressing members 620 are spaced apart on the second jig tray 300. The first pressing member 610 selectively presses the first clamping plate 220 against one side of the first rotating member 400 by pressing the first jig plate 220 against one side of the first rotating member 400. The second pressing member 620 selectively presses the second clamping plate 300 against the other side of the first rotating member 400 by pressing the second clamping plate 300 against one side of the first rotating member 400.

The third pressing member 630 and the fourth pressing member 640 are respectively connected to opposite sides of the second rotating member 500. The third pressing members 630 are spaced apart on the first jig plate 220. The fourth pressing members 640 are spaced apart from each other on the second jig plate 300. The third pressing member 630 selectively presses the first clamping disc 220 to one side of the second rotating member 500 by pressing the first jig plate 220 against one side of the first rotating member 400. The fourth pressing member 640 selectively presses the second clamping disc 300 to the other side of the second rotating member 500 by pressing the second jig plate 300 against one side of the second rotating member 500. Thus, when the first pressing member 610, the second pressing member 620, the third pressing member 630, and the fourth pressing member 640 are both pressed against the first clamping disc 220 and the second clamping disc 300, the grinding workpiece 900 is firmly positioned. A jig plate 220 is interposed between the jig plate 220 and the second jig plate 300.

Fig. 5 is a partially enlarged view showing a region M of Fig. 1. As shown in FIGS. 3 and 5, more specifically, each of the first pressing members 610 includes a first seat body 611, a first boom 612, a first operating portion 614, and a first pressing portion 615. The first body 611 is fixed to one side of the first connecting body 410. For example, but not limited to, the first seat body 611 is locked to one side of the first connecting body 410. The first cantilever 612 is pivotally connected to the first base 611. Specifically, one end of the first cantilever 612 is pivotally connected to the first seat body 611, and the other end is sleeved to the first pressing portion 615. The first operating portion 614 is pivotally connected to the first seat 611, and the first cantilever 612 is linked. Specifically, the first operating portion 614 is, for example, a lever, and the first operating portion 614 is coupled to the first cantilever 612 through the first joint portion 613. Therefore, when the first operating portion 614 is pulled and the first cantilever 612 is brought into proximity with the first clamping disc 220, the first cantilever 612 is rotated relative to the first base 611 such that the first pressing portion 615 touches the first clamping disc 220. The first pressing portion 615 presses the first clamping disc 220 to one side of the first extension body 420, or the first cantilever 612 when the first operating portion 614 is pulled and the first cantilever 612 is interlocked away from the first clamping disc 220 Rotation with respect to the first seat body 611 causes the first pressing portion 615 to disengage from the first jig plate 220 without pressing the first jig plate 220.

The second pressing member 620 includes a second seat body 621 , a second suspension arm 622 , a second operating portion 624 , and a second pressing portion 625 . The second base 621 is fixed to the other side of the first connecting body 410. One end of the second cantilever 622 is pivotally connected to the second seat body 621, and the other end is sleeved to the second pressing portion 625. The second operating portion 624 pivotally connects the second base 621 and interlocks the second cantilever 622. Referring to the principle of actuation of the first pressing member 610, after the second operating portion 624 is operated, the second pressing portion 625 is pressed or moved away from the second clamping disc 300 with respect to one side of the first rotating member 500. The third pressing member 630 includes a third seat body 631 , a third suspension arm 632 , a third operating portion 634 , and a third pressing portion 635 . The third seat body 631 is fixed to one side of the second connecting body 410. One end of the third cantilever 632 is pivotally connected to the third seat body 631, and the other end is sleeved to the third pressing portion 635. The third operating portion 634 pivotally connects the third base 631 and interlocks the third cantilever 632. Referring to the actuation principle of the first pressing member 610, after the third operating portion 634 is operated, the third pressing portion 635 is pressed or away from the first clamping disc 220 opposite to the surface of the second rotating member 500. The fourth pressing member 640 includes a fourth seat body 641 , a fourth suspension arm 642 , a fourth operating portion 644 , and a fourth pressing portion 645 . The fourth body 641 is fixed to the second company The other side of the body 410. One end of the fourth cantilever 642 is pivotally connected to the fourth seat body 641, and the other end is sleeved to the fourth pressing portion 645. The fourth operating portion 644 pivotally connects the fourth base 641 and interlocks the fourth cantilever 642. Referring to the principle of actuation of the first pressing member 610, after the fourth operating portion 644 is operated, the fourth pressing portion 645 is pressed or moved away from the second clamping plate 300 relative to one of the faces of the second rotating member 500.

However, the disclosure is not limited to the number and position of the first pressing member 610, the second pressing member 620, the third pressing member 630, and the fourth pressing member 640 described above. For example, the first pressing member 610, the second pressing member 620, the third pressing member 630 and the fourth pressing member 640 may be disposed on the first housing 212 and the second housing 214 of the base 210.

As shown in FIG. 1 and FIG. 3, in this embodiment, for the purpose of engineering safety, the support carrier 200 only allows the first pressing member 610 and the third pressing member 630 at the upper position to be separated from the corresponding clamping device. The disc (such as the first jig plate 220) is such that the upper jig plate (such as the first jig plate 220) does not fall easily. In other words, the second pressing member 620 and the fourth pressing member 640 located lower than the position are prohibited from being disengaged from the jig plate (such as the second jig plate 300). However, the disclosure is not limited thereto.

Specifically, when the second clamping disc 300 is located between the first clamping disc 220 and the base 211, the first pressing member 610 and the third pressing member 630 are respectively located on the top surface 212T of the first housing 212 and the second housing. The top surface 214T of the 214 is not obstructed by the first inner surface 213 of the first housing 212 and the second inner surface 215 of the second housing 214, so that the operator can pass through the first pressing member 610 and the third pressing member 630. The first jig plate 220 is detached from the support carrier 200.

In contrast, since the second pressing member 620 is located under the first rotating member 400 The second pressing member 640 is located below the second rotating member 500 because the second pressing member 620 and the fourth pressing member 640 are received by the first inner surface 213 of the first housing 212 and the second second housing 214. The inner surface 215 is obstructed, so the second pressing portion 625 of the second pressing member 620 and the fourth pressing portion 645 of the fourth pressing member 640 cannot be separated from the second clamping disc 300, so that the grinding of the workpiece 900 and the second clamping disc 300 is not easy. Dropped.

In the present embodiment, as shown in FIGS. 1 and 3, the support carrier 200 further includes a sensing means. The sensing means is configured to sense whether the first to fourth pressing members 610, 620, 630, 640 press the first clamping disc 220 and the second clamping disc 300 on the first rotating member 400 and the second rotating member 500, Further, it is assisted in monitoring the combined state of the first jig plate 220 and the second jig plate 300 with the grinding workpiece 900.

In the present embodiment, as shown in FIGS. 1 and 3 , the support carrier 200 includes two first sensing elements 670 and two second sensing elements 680 . The first sensing element 670 and the second sensing element 680 are respectively located on the base 210 for respectively sensing the first pressing member 610 and the third pressing member 630 above the position, or the second pressing member 620 and the fourth. The operating state of the pressing member 640, and in response to the sensing result described above, respectively, a sensing signal matching the sensing result is issued. For example, the first sensing component 670 and the second sensing component 680 respectively sense two pressing members (such as the first pressing member 610 and the third pressing member 630) located at the uppermost portion of the base 210 according to the infrared transmitting and receiving sensing manner. Operational status. However, the disclosure is not limited to other sensing methods. As such, the support carrier can be automated by these corresponding sensing signals, as detailed below.

Specifically, as shown in FIG. 3 and FIG. 5 , the first sensing element 670 is located obliquely in the first housing 212 and faces the first opening 212P for transmitting The first breach 212P senses whether the corresponding first pressing member 610 presses the first clamp disk 220. As shown in FIG. 5, when the first operating portion 614 is pulled to interlock the first cantilever 612 to approach the first clamp disk 220, the first operating portion 614 is not at the position of the first breach 212P; In the figure, when the first operating portion 614 is pulled to interlock the first cantilever 612 away from the first clamp disk 220, the first operating portion 614 is located at the position of the first breach 212P. Therefore, for example, in one of the sensing methods, when the operator pulls the first operating portion 614 and interlocks the first pressing portion 615 to touch the first clamping disc 220, since the first operating portion 614 is not located at the first At the position of the breach 212P, the first sensing component 670 cannot sense the first operating portion 614 in the effective sensing range (eg, at about the first breach 212P), and the first sensing component 670 issues a matching sensing result. Sensing signal; vice versa. However, the disclosure is not limited to the sensing basis of the first sensing element 670.

Similarly, as shown in FIGS. 1 and 3, the second sensing element 680 is obliquely located in the second housing 214 and faces the second opening 214P (FIG. 1) for sensing through the second opening 214P. Corresponding to whether the third pressing member 630 presses the first jig plate 220. Similarly, when the third operating portion 634 is pulled away from the first clamp disk 220, the third operating portion 634 is located at the second break 214P. Therefore, in one of the sensing methods, when the operator pulls the third operating portion 634 and interlocks the third pressing portion 635 to touch the first clamping disc 220, since the third operating portion 634 is not located at the second opening 214P Position, the second sensing component 680 cannot sense the third operating portion 634 in the effective sensing range (eg, at about the second breach 214P), and the second sensing component 680 sends a sensing signal that matches the sensing result. ;vice versa. However, the disclosure is not limited to the sensing basis of the second sensing element 680. In addition, the disclosure is not limited to the position of the first sensing element and the second sensing element. Actuation principle.

As shown in Figures 2 and 3, the support carrier 200 further includes a power unit 700 and two control panels 219 (Fig. 2). The power unit 700 is fixed to the base 210 and aligned with the second shaft portion 530 of the second rotating member 500. For example, the power unit 700 is located within the second housing 214. The power unit 700 includes a device body 710 and a rotation axis 711. The rotating shaft center 711 protrudes from one end of the device body 710, and is fixed to the second rotating shaft portion 530 and coaxial with the second rotating shaft portion 530 and the second rotating member 500. Thus, when the rotating shaft center 711 of the power device 700 starts to rotate, the rotating shaft center 711 collectively drives the grinding workpiece 900, the first clamping disc 220 and the second clamping disc 300, the first rotating member 400 and the second rotating member 500 to rotate. The operator is selected to have the first clamp disc 220 or the second clamp disc 300 at the top of the base 210 to facilitate the operator to disassemble or assemble the abrasive workpiece 900 in a bird's eye view. The power unit 700 is, for example, an electric motor or a cylinder, however, the present disclosure is not limited to the type and position.

The control panels 219 are respectively located on the first housing 212 and the second housing 214 of the base 210. For example, the control panels 219 are respectively located on the top surface 212T of the first housing 212 and the top surface 214T of the second housing 214. The control panels 219 are electrically connected to the power unit 700 for the operator to control the operation of the power unit 700. However, the disclosure is not limited thereto. In other embodiments, the support carrier 200 may also have no power device 700 instead of manual flipping.

It should be understood that when the hands of the operator are respectively located on the control panels 219, the hands of the operator can be moved away from the first clamp disc 220 and the second clamp disc 300, thereby reducing the chance of their hands being hurt.

In addition, in this embodiment, the support carrier 200 further includes a limit hand. segment. The limiting means selectively blocks the rotation of the first jig plate 220 and the second jig plate 300, thereby reducing the chance of occurrence of a work safety event.

Figure 6 is a partial cross-sectional view of the support carrier 200 of Figure 1 taken along line B-B. As shown in FIG. 2 and FIG. 6 , the support carrier 200 further includes at least one first limiting module 720 and at least one second limiting module 730 ( FIG. 2 ). The first limiting module 720 is located in the first housing 212 for preventing the first rotating member 400 from rotating. The second limiting module is located in the second housing 214 for preventing the second rotating member 500 from rotating.

More specifically, the first limiting module 720 includes a first limiting pin 721 and a first driving device 722. The first driving device 722 is fixed in the first housing 212 through the frame F. One end of the first limiting pin 721 is axially coupled to the first driving device 722, and the other end of the first limiting pin 721 telescopically extends into the first pin hole 411 of the first rotating member 400. The second limit module 730 (Fig. 2) and the first limit module 720 have the same structure. Please refer to the above description of the first limit module 720 and the first limit module of Fig. 6. Therefore, it will not be repeated here.

Thus, when the workpiece 900 is not rotated, the first driving device 722 can drive the first limiting pin 721 into the first pin hole 411 of the first rotating member 400, thereby pressing and blocking the first rotating member 400. Simultaneously, the second driving device also protrudes into the second pin hole (not shown) of the second rotating member 500, thereby pressing and preventing the rotation of the second rotating member 500. On the contrary, the first driving device 722 can drive the first limiting pin 721 to extend into the first pin hole 411 to allow the first rotating member 400 to rotate, while the second driving device also extends out of the second pin hole. (not shown), so that the second rotating member 500 is allowed to rotate.

FIG. 7 illustrates a support carrier 200 according to an embodiment of the present disclosure. Electronic block diagram. As shown in FIGS. 3 and 7, the support carrier 200 further includes a processing unit 830. The processing unit 830 is electrically connected to the power device 700, the first driving device 722, the second driving device 732, the first sensing component 670, and the second sensing component 680. Processing unit 830 is, for example, a central processing unit, a microprocessor, or a single wafer. As such, when the first sensing element 670 senses that the first pressing member 610 is disengaged from the first clamping disc 220, the second sensing element 680 senses that the third pressing member 630 is disengaged from the first clamping disc 220, or both In order to prevent the grinding workpiece 900 or the first clamping disc 220 from falling due to the flipping, the processing unit 830 respectively outputs a matching sensing signal according to the first sensing component 670 and/or the second sensing component 680 to control the first driving device. 722 drives the first limit pin 721 to prevent rotation of the first rotating member 400, the second driving device 732 drives the second limit pin 731 (Fig. 2) to prevent the rotation of the second rotating member 500, or both . Thus, by preventing the first rotating member 400 and the second rotating member 500 from rotating, the grinding workpiece 900 or the first clamping disc 220 is not dropped by being turned over.

In addition, the processing unit 830 is more electrically connected to the power device 700, the control panel 219, the first sensing component 670, and the second sensing component 680. As long as the processing unit 830 receives the sensing elements 610, 630 or 620, 640 above the sensing signals of the first sensing element 670 and the second sensing element 680, the clamping disk 220 or 300 is not pressed, although the power device 700 While rotating, the processing unit 830 turns off the power unit 700 in accordance with the sensing signal described above.

In addition, in other embodiments, the processing unit 830 blocks the starting of the power device 700 as long as the processing unit 830 senses that the first driving device 722 has driven the first limiting pin 721 to protrude into the first pin hole 411.

Thus, not only the abrasive workpiece 900 or the first clamp disc 220 is protected. When the cause is dropped, the power device 700, the first limit pin 721 or the second limit pin (refer to the first limit pin 721 of FIG. 6) is prevented from being damaged.

In this embodiment, the support carrier 200 further includes a state monitoring unit 810. The processing unit 830 is electrically connected to the state monitoring unit 810, the first sensing component 670, and the second sensing component 680. As such, when the first sensing element 670 senses that the first pressing member 610 is disengaged or pressed against the first clamping disc 220, the second sensing element 680 senses that the third pressing member 630 is disengaged or pressed against the first clamping disc 220, or In either case, the processing unit 830 controls the state monitoring unit 810 to indicate the pressing member 610, 630 or 620 above the position according to the sensing signals respectively sent by the first sensing component 670 and/or the second sensing component 680. , 640 current operating status for the operator to confirm. The status monitoring unit 810 is, for example, a screen or an indicator light or the like.

As shown in FIG. 7, the support carrier 200 further includes an alert unit 820. The processing unit 830 is electrically connected to the warning unit 820, the first sensing element 670 and the second sensing element 680. As such, when the first sensing component 670 and/or the second sensing component 680 respectively send matching sensing signals to the processing unit 830, the processing unit 830 causes the alerting unit 820 to emit sensory (eg, sound, light, vibration, etc.) A warning notice to alert the operator. The alert unit 820 is, for example, a screen, an indicator light, a buzzer, or a speaker.

Fig. 8A is an enlarged perspective view showing the first jig plate 220 of Fig. 1. FIG. 8B is a perspective view showing the first jig plate 220 of FIG. 8A after being turned over. As shown in FIG. 8A and FIG. 8B , the first jig plate 220 is a first jig and includes a first plate body 230 and a first through hole 233 . The first plate 230 has opposite first and second faces 231, 232. The first face 231 and the second face 232 are substantially parallel to each other. The first through hole 233 penetrates the first surface 231 of the first plate body 230 With the second side 232. In one embodiment of the present disclosure, the first through hole 233 is located at a central position of the first plate 230, the first through hole 233 is circular, and the first through hole 233 is only a single one. However, the disclosure is not limited to the position, shape and number of the first through openings 233. Thus, as shown in FIG. 1, since the first through hole 233 exposes a bolt (not shown) that polishes the surface of the workpiece 900, the operator can quickly remove or load the bolt through the first through hole 233, thereby smoothly The subassembly 950 of the abrasive workpiece 900 is sequentially disassembled or assembled.

The first clamp disk 220 further includes two first pad bodies 234 and two second pad bodies 235. The first pads 234 are spaced apart from the first surface 231 of the first plate 230 to receive the contact pressure of the first pressing portion 615 of the first pressing member 610 (FIG. 3). The second pads 235 are spaced apart from the first surface 231 of the first plate 230 to receive the contact pressure of the third pressing portion 635 of the third pressing member 630 (FIG. 3). The first pad body 234 is disposed opposite to the second pad body 235 , and the first through hole 233 is located between the first pad body 234 and the second pad body 235 .

In addition, the first jig plate 220 further includes a plurality of first rod bodies 236 and two first handles 237. The first rods 236 are fixed to the first surface 231 of the first plate body 230 at intervals to protect the first plate body 230 from deformation. The axial directions of the first rods 236 are parallel to each other. The first handle 237 is fixed to the first surface 231 of the first plate 230, and the first through hole 233 is located between the first handles 237 to facilitate the operator to move the first clamp disk 220.

As shown in FIGS. 3 and 8B, the first jig plate 220 further includes a first recess 240 for partially receiving the abrasive workpiece 900. The first groove 240 is formed on the second surface 232 of the first plate body 230 , and the first groove 240 is connected to the first through hole 233 . In other words, the first through hole 233 penetrates the second surface 232 of the first plate 230 The first groove 240. The first groove 240 includes a first bottom surface 241 and a first side wall surface 242. The first bottom surface 241 connects the first through hole 233 and the first side wall surface 242 and is surrounded by the first side wall surface 242. The first sidewall surface 242 is coupled to the second surface 232 of the first plate 230. The first bottom surface 241 and the second surface 232 of the first plate 230 belong to planes of different heights.

Referring back to FIG. 2, the first extension body 420 of the first rotating member 400 has a first positioning member 421 and a second positioning member for positioning the first clamping disc 220 and the second clamping disc 300 (refer to the first positioning member). 421 appearance). The first positioning member 421 and the second positioning member are respectively formed on opposite sides of the first extension body 420. The opposite sides of the first extension body 420 are respectively connected to one side of the first connecting body 410 facing away from the first rotating shaft portion 430. The second extension body 520 of the second rotating member 500 has a third positioning member 521 and a fourth positioning member for guiding the first clamping disc 220 and the second clamping disc 300 (refer to the appearance of the third positioning member 521). The third positioning member 521 and the fourth positioning member are respectively formed on opposite sides of the second extension body 520. The opposite faces of the second extension body 520 are respectively connected to one side of the second connecting body 510 facing away from the second rotating shaft portion 530.

The first clamp disc 220 further includes at least one fifth positioning member 243 and at least one sixth positioning member 244. The fifth positioning member 243 and the sixth positioning member 244 are formed on the second surface 232 of the first plate body 230 , and the first through hole 233 is located between the fifth positioning member 243 and the sixth positioning member 244 . The outer shape of the fifth positioning member 243 and the outer shape of the first positioning member 421 are complementary to each other. For example, but not limited to, the fifth positioning member 243 and the first positioning member 421 are respectively a protruding post and a concave hole. The outer shape of the sixth positioning member 244 and the outer shape of the third positioning member 521 are mutually complementary, for example, but not limited thereto, and the sixth positioning member 244 and the third positioning member 521 are respectively a protruding post and a concave hole. Thus, the fifth positioning member 243 is complementary to the first positioning member 421 (Fig. 2), and the first The six positioning members 244 are complementarily engaged with the third positioning member 521 (FIG. 2), and the first clamping plate 220 is assembled to the first rotating member 400 and the second rotating member 500.

Fig. 9A is an enlarged perspective view showing the second jig plate 300 of Fig. 1. FIG. 9B is a perspective view showing the second jig plate 300 of FIG. 9A after being turned over. As shown in FIG. 9A and FIG. 9B, the second jig plate 300 is a second jig, and includes a second plate body 310 and a second through hole 313. The second plate body 310 has a third surface 311 and a fourth surface 312 opposite to each other. The third face 311 and the fourth face 312 are substantially parallel to each other. The second through hole 313 penetrates the third surface 311 and the fourth surface 312 of the second plate body 310 . As shown in FIG. 3, since the second through hole 313 exposes a bolt (not shown) that polishes the surface of the workpiece 900, the operator can quickly remove or load the bolt through the second through hole 313, thereby smoothly grinding the bolt. The subassembly 950 of the workpiece 900 is sequentially disassembled or assembled. In one embodiment of the present disclosure, the second through hole 313 is located at a central position of the second plate body 310, the second through hole 313 is circular, and the second through hole 313 is only a single one. However, the present disclosure is not limited to the position, shape, and number of the second through openings 313.

The second jig plate 300 further includes two third pad bodies 314 and two fourth pad bodies 315. The third pads 314 are spaced apart from the third surface 311 of the second plate 310 to receive the pressure of the pressing portion of the second pressing member 620 (Fig. 3). The third pads 314 are spaced apart from the third surface 311 of the second plate 310 to receive the contact pressure of the fourth pressing member 640 (FIG. 3). The third pad body 314 is disposed relative to the fourth pad body 315 , and the second through hole 313 is located between the third pad body 314 and the fourth pad body 315 .

In addition, the second clamp disc 300 further includes a plurality of second rods 316 and two second handles 317, and the second rods 316 are fixed to the second plate at intervals. The third side 311 of the 310 is to protect the second plate 310 from deformation. The axial directions of the second rods 316 are parallel to each other. The second handle 317 is fixed to the third surface 311 of the second plate 310, and the second through hole 313 is located between the second handles 317 to facilitate the operator to move the second clamp plate 300.

As shown in FIGS. 3 and 9B, the second jig tray 300 further includes a second recess 320 for receiving a portion of the abrasive workpiece 900. The second groove 320 is formed on the fourth surface 312 of the second plate body 310 , and the second groove 320 is connected to the second through hole 313 . In other words, the second through hole 313 penetrates the second groove 320 of the fourth surface 312 of the second plate body 310. The second recess 320 includes a second bottom surface 321 , a second sidewall surface 322 , and a bearing surface 323 . The second bottom surface 321 connects the second through hole 313 and the second side wall surface 322 . The second sidewall surface 322 connects the bearing surface 323 and the second bottom surface 321 . The second bottom surface 321 , the bearing surface 323 and the fourth surface 312 of the second plate body 310 belong to a plane of different heights.

In addition, as shown in FIG. 2 and FIG. 9B , the second jig plate 300 further includes at least one seventh positioning member 324 and at least one eighth positioning member 325 . The seventh positioning member 324 and the eighth positioning member 325 are formed on the fourth surface 312 of the second plate body 310 , and the second through hole 313 is located between the seventh positioning member 324 and the eighth positioning member 325 . The outer shape of the seventh positioning member 324 and the second positioning member (refer to the first positioning member 421) are mutually complementary, for example, but not limited thereto, the seventh positioning member 324 and the second positioning member (refer to the first positioning) Pieces 421) are protrusions and recesses, respectively. The outer shape of the eighth positioning member 325 and the fourth positioning member (refer to the third positioning member 521) are mutually complementary, for example, but not limited thereto, the eighth positioning member 325 and the fourth positioning member (refer to the third positioning) Pieces 521) are protrusions and recesses, respectively. Thus, the seventh positioning member 324 is complementary to the second positioning member (refer to the first positioning member 421), and the eighth fixing The position member 325 is complementarily engaged with the fourth positioning member (refer to the third positioning member 521), and the second clamping plate 300 is assembled to the first rotating member 400 and the second rotating member 500.

FIG. 10A is a perspective view of the first jig plate 260 according to an embodiment of the present disclosure. FIG. 10B is a perspective view showing the first jig plate 260 of FIG. 10A after being turned over. As shown in FIG. 10A and FIG. 10B, in the embodiment, the first jig plate 260 can be changed to the third jig instead of the first jig. The first clamp disk 260 includes a third plate body 270 and a plurality of through holes 273. The third plate 270 has opposite fifth and second faces 271, 272. The fifth side 271 and the sixth side 272 are substantially parallel to each other. The through holes 273 respectively penetrate the fifth surface 271 and the sixth surface 272 of the third plate body 270. In an embodiment of the present disclosure, the through hole 273 of the third plate body 270 has a smaller diameter than the second through hole 313. However, the present disclosure is not limited to the position, shape, and number of through holes 273.

The first jig plate 260 further includes two fifth pad bodies 274 and two sixth pad bodies 275. The fifth pads 274 are spaced apart from the fifth surface 271 of the third plate 270 to receive the contact pressure of the pressing portion 615 of the first pressing member 610. The fifth pads 274 are spaced apart from the fifth surface 271 of the third plate 270 to receive the contact pressure of the third pressing portion of the third pressing member 630. The fifth pad body 274 is disposed opposite to the sixth pad body 275 , and the through hole 273 is located between the third pad body 314 and the fourth pad body 315 .

In addition, the first clamping disc 260 further includes a plurality of third rods 276 and two third handles 277. The third rods 276 are fixed to the fifth surface 271 of the third plate 270 at intervals to protect the third. The plate body 270 is not deformed. The axial directions of each of the third rods 276 are parallel to each other. The third handles 277 are fixed to the fifth face 271 of the third plate body 270, and the through holes 273 are distributed between the third handles 277 to facilitate the operator to move the first clamp plate 260.

As shown in FIGS. 10A and 10B, the first jig plate 260 further includes a third groove 280. The third groove 280 is formed on the sixth surface 272 of the third plate body 270, and the third groove 280 connects all of the through holes 273. In other words, the through hole 273 penetrates the third groove 280 of the sixth surface 272 of the third plate body 270. The third recess 280 includes a third bottom surface 281 , a third sidewall surface 282 , a support surface 283 , and a fourth sidewall surface 284 . The through hole 273 is formed on the third bottom surface 281, connects the third side wall surface 282, and is surrounded by the third side wall surface 282. The third sidewall surface 282 connects the third bottom surface 281 and the support surface 283 and is surrounded by the support surface 283. The fourth side wall surface 284 connects the sixth surface 272 of the third plate body 270 with the support surface 283 and surrounds the support surface 283. The third bottom surface 281, the support surface 283, and the sixth surface 272 of the third plate body 270 belong to planes of different heights.

In addition, as shown in FIG. 2 and FIG. 10B , the first jig plate 260 further includes at least one ninth positioning member 285 and at least one tenth positioning member 286 . The ninth positioning member 285 and the tenth positioning member 286 are formed on the sixth surface 272 of the third plate body 270 , and the through holes 273 are distributed between the ninth positioning member 285 and the tenth positioning member 286 . The ninth positioning member 285 and the first positioning member 421 are respectively complementary to each other. For example, but not limited to, the ninth positioning member 285 and the first positioning member 421 are respectively a protrusion and a concave hole. The tenth positioning member 286 and the third positioning member 521 are complementary to each other. For example, but not limited to, the tenth positioning member 286 and the third positioning member 521 are respectively a protrusion and a concave hole. In this way, the ninth positioning member 285 is complementaryly engaged with the first positioning member 421, and the tenth positioning member 286 and the third positioning member 521 are complementarily engaged. The first clamping plate 260 is assembled to the first rotating member 400 and The second rotating member 500 is on.

FIG. 11 illustrates a support carrier 201 according to an embodiment of the present disclosure. Stereogram. As shown in FIG. 11, the support carrier 201 of FIG. 11 is substantially the same as the support carrier 200 of FIG. 1, and one of the differences is that the support carrier 201 of FIG. 11 does not have the above-mentioned compression member, FIG. The securing mechanism includes a first pliers joint 650 and a second pliers joint 660. The first caliper joint 650 is independently present on one side of the first clamp disc 220 and the second clamp disc 300. The second clamp joint 660 is independently present on the other side of the first clamp disc 220 and the second clamp disc 300.

Specifically, when the first clamp disc 220 and the second clamp disc 300 are superposed on each other to form a stacked structure T, the first clamp joint 650 and the second clamp joint 660 are respectively removably coupled to the stack. The opposite sides of the structure T are combined such that the first rotating member 400, the second rotating member 500, the first clamping plate 220 and the second clamping plate 300 are integrated. For example, but not limited to, the first clamp joint 650 and the second clamp joint 660 are elastic, and are made of metal or plastic, and the first clamp joint 650 and the second clamp joint 660 are C. Type pliers.

In addition, the first clamp joint 650 and the second clamp joint 660 respectively have a plurality of positioning bumps 651. The first jig plate 220 and the second jig plate 300 respectively have a plurality of positioning holes 250. Therefore, the positioning tongs 651 and the second tongs 660 are respectively fixedly disposed on opposite sides of the overlapping structure T.

FIG. 12 is a schematic diagram of a leak test system 10 in accordance with an embodiment of the present disclosure. Figure 13 is a partial cross-sectional view of the leak test system 10 of Figure 12 taken along line C-C. As shown in Figures 12 through 13, the present disclosure is more related to a leak test system 10. The leak test system 10 includes a test device 100 and the support carrier 200 described above. The testing device 100 turns on the grinding workpiece 900 in the supporting carrier 200 to perform a suction process on the internal space 940 of the grinding workpiece 900. The abrasive workpiece 900 is tested for leaks.

Specifically, in the present embodiment, as shown in FIGS. 12 to 13 , the first jig plate 260 adopts the third jig described above, and the second jig plate 300 adopts the second jig described above, and the second The fixture is located above the third fixture, that is, the first clamp disc 260 is located between the second clamp disc 300 and the base 211. In addition, the abrasive workpiece 900 has opposing first and second major faces 910, 920. The first major face 910 of the abrasive workpiece 900 has a protrusion 911. A plurality of nozzles 912 are mounted on the protruding portion 911. The nozzles 912 respectively turn on the inner space 940 of the grinding workpiece 900. The second major surface 920 of the abrasive workpiece 900 is an abrasive surface that can be covered by a protective outer cover 921 when not in use. Further, the abrasive workpiece 900 includes, for example, a sub-assembly 950 of 6 to 8 layers. An internal space 940 is formed between these sub-assemblies 950. The test device 100 includes a device host 110 and a plurality of air outlets 120. The air outlet 120 is exposed on the surface of the apparatus main body 110 and is turned on inside the apparatus main body 110.

As such, when the abrasive workpiece 900 is sandwiched between the first clamp disc 260 and the second clamp disc 300, the first major surface 910 of the abrasive workpiece 900 contacts the bearing surface 323 of the second clamp disc 300 (Fig. 13). And the protrusion 911 of the grinding workpiece 900 protrudes from the second through hole 313 of the second jig tray 300 to the second jig tray 300. The protective cover 921 of the abrasive workpiece 900 hermetically covers the third recess 280 of the first clamp disc 260, and the protective cover 921 contacts the support surface 283 and the fourth sidewall surface 284 of the first clamp disc 260, and the first clamp disc 260 The third bottom surface 281 maintains a pitch. In addition, after the grinding workpiece 900 is sandwiched between the first clamping disc 260 and the second clamping disc 300, the air outlet 120 is connected to the nozzle 912 through the tubular body 130, respectively, so that the apparatus main body 110 turns on the internal space 940 of the grinding workpiece 900. . The device host 110 injects or evacuates gas out of the internal space 940, or through the tube 130 pairs of internal space 940 are evacuated to test whether the abrasive workpiece 900 is leaking.

FIG. 14 is a flow chart showing a leak test method according to an embodiment of the present disclosure. As shown in Figures 13 and 14, the disclosure is more related to a leak test method. The leak test method includes steps 1410 through 1420. In step 1410, the abrasive workpiece 900 is first secured to the support carrier 200 described above. In step 1420, the abrasive workpiece 900 on the support carrier 200 is tested for leaks.

More specifically, FIG. 15 is a detailed flow chart of step 1410 of FIG. 14 in accordance with an embodiment. As shown in Fig. 15, in step 1410, the present embodiment further includes a plurality of detail steps 1411 to 1413 as follows. Referring to FIG. 3, in the detail step 1411, the abrasive workpiece 900 is placed on the first jig plate 260 or the second jig plate 300. In the detail step 1412, the abrasive workpiece 900, the first rotating member 400, and the second rotating member 500 are sandwiched between the first clamp disk 260 and the second clamp disk 300. In the detail step 1413, the first rotating member 400, the second rotating member 500, the first jig disk 260, and the second jig plate 300 are integrated by the fixing mechanism 600.

Figure 16 is a detailed flow chart showing the steps between the steps of Figure 14 in accordance with an embodiment. As shown in FIG. 16, between steps 1410 and 1420, the embodiment further includes a detail step 1414 to a detail step 1415. In detail step 1414, referring to FIG. 12, the abrasive workpiece 900 is flipped over to interlock the top of the second clamp disc 300 at the nozzle 912 of the workpiece 900. In other words, the abrasive workpiece 900 on the support carrier 200 is flipped such that the projection 911 of the abrasive workpiece 900 and the nozzle 912 are all facing upwards to facilitate the operator to connect the nozzle 912 and the test device 100 in a bird's eye view. In the detail step 1415, the test apparatus 100 is turned on through the nozzle 912 to polish the internal space 940 of the workpiece 900 (13th Figure).

FIG. 17 is a detailed flow chart of step 1420 of FIG. 14 in accordance with an embodiment. As shown in FIG. 17, an embodiment of step 1420 further includes detail step 1421 through detail step 1424 as follows. In detail step 1421, as in Fig. 13, the inner space 940 of the abrasive workpiece 900 is evacuated for a period of time; then, in the detail step 1422, it is determined whether the inner space 940 of the abrasive workpiece 900 is in a vacuum state, and if so, jumps to the detail Step 1423, otherwise, jump to detail step 1424. In the detail step 1423, when it is judged that the internal space 940 of the abrasive workpiece 900 has reached the vacuum state, it is determined that the abrasive workpiece 900 has not leaked. In the detail step 1424, when it is determined that the internal space 940 of the abrasive workpiece 900 is not in a vacuum state, it is determined that the abrasive workpiece 900 is leaking.

Figure 18 is a detailed flow chart showing the step 1410 of Figure 14 in accordance with an embodiment. As shown in Fig. 18, an embodiment of step 1420 further includes detail step 1421A through detail step 1424A as follows. As shown in Fig. 13, in detail step 1421A, the gas is continuously inflated into the inner space 940 of the abrasive workpiece 900; then, in detail step 1422A, it is determined whether the inner space 940 is continuously inflated at a certain pressure, and if so, jumps to Detail step 1423A, otherwise, jumps to detail step 1424A. In detail step 1423A, it is determined that the abrasive workpiece 900 is leaking when it is determined that the interior space 940 is still continuously inflated at a particular air pressure. In detail step 1424A, when it is determined that the interior space 940 is unable to continue to receive inflation at a particular air pressure, it is determined that the abrasive workpiece 900 has not leaked.

The present disclosure relates to a support carrier. The support carrier includes a base, a first clamp disk, a second clamp disk, a rotating member and a fixing mechanism. The base has an accommodation space. The first clamp disc is located in the accommodating space, and the second clamp disc is opposite to the first clamp A disc is provided for cooperating with the first jig plate to grind a workpiece therebetween. The rotating member is reversibly coupled to the base and detachably connects the second clamp disk to the first clamp disk. The fixing mechanism integrates the rotating member, the first clamping disc and the second clamping disc into one body. In an exemplary aspect, the securing mechanism includes a first compression member and a second compression member. The first pressing member is coupled to the rotating member for selectively pressing the first clamping disc to one side of the rotating member. The second pressing member is opposite to the first pressing member and is connected to the rotating member for selectively pressing the second clamping plate to the other side of the rotating member. In an exemplary aspect, the support carrier further includes at least one sensing element. The sensing element is located on the base for sensing whether the first pressing member presses the first clamping disc to the side of the rotating member, and whether the second pressing member presses the second clamping disc to the other side of the rotating member. In an exemplary aspect, the securing mechanism includes at least one caliper coupling. The caliper coupling is removably located on the same side of the first clamping disc and the second clamping disc. In an exemplary aspect, the support carrier further includes a limit pin and a driving device. The limit pin is telescopically located on the base for stopping the rotation of the rotating member. The driving device is located on the base and is connected with a limit pin for moving the limit pin.

The disclosure is more related to a leak test system. The leak test system includes a support carrier and a test device. The support carrier includes a base, a first clamp disk, a second clamp disk, a rotating member and a fixing mechanism. The base has an accommodation space. The first clamping disc is located in the accommodating space, and the second clamping disc is opposite to the first clamping disc for clamping the workpiece with the first clamping disc. The abrasive workpiece has an internal space and a nozzle. The nozzle is located on the surface of the grinding workpiece, exposed on one side of the second clamping disc, and is connected to the internal space. The rotating member is reversibly coupled to the base and detachably connects the second clamp disk to the first clamp disk. The fixing mechanism integrates the rotating member, the first clamping disc and the second clamping disc into one body. Test device connected through nozzle Pass the internal space and test if the abrasive workpiece leaks.

This disclosure is more related to a leak test method. The leak test method includes the following steps. An abrasive workpiece is attached to a reversible support carrier. Test whether the abrasive workpiece on the support carrier leaks. In an exemplary aspect, the following steps are included before testing whether the abrasive workpiece on the support carrier leaks. Inverting the abrasive workpiece on the support carrier to interlock one of the nozzle surfaces of the workpiece; and passing a test device through the nozzle to open an inner space of the workpiece. In an exemplary aspect, testing whether the abrasive workpiece on the support carrier leaks further includes the following steps. The inner space of one of the grinding workpieces is evacuated for a period of time; the inner space of the grinding workpiece is judged to be in a vacuum state; and when it is judged that the inner space of the grinding workpiece is not in a vacuum state, the grinding workpiece is determined to leak. In an exemplary aspect, testing whether the abrasive workpiece on the support carrier leaks further includes the following steps. Continuously inflating to the inner space of one of the grinding workpieces; determining whether the internal space is continuously inflated at a certain pressure; and determining that the internal space is continuously inflated at a certain pressure to determine the leakage of the abrasive workpiece.

The foregoing summary is a summary of the features of the embodiments of the invention It will be appreciated by those skilled in the art that the present disclosure may be used as a basis for designing or modifying other processes and structures for the same purpose of the embodiments described herein and/or to achieve the same advantages. It is also to be understood by those skilled in the art that the present invention is not limited to the spirit and scope of the disclosure, and various changes, substitutions and modifications may be made herein without departing from the spirit and scope of the disclosure.

Claims (10)

A support carrier includes: a base having an accommodating space; a first clamp disc located in the accommodating space; and a second clamp disc for clamping the workpiece with the first clamp disc a rotating member, reversibly connecting the base, and detachably connecting the second clamping disc and the first clamping disc; and a fixing mechanism, the rotating member, the first clamping disc and the first The two clamp discs are integrated into one. The support carrier of claim 1, wherein the fixing mechanism comprises: a first pressing member coupled to the rotating member for selectively pressing the first clamping disc to one side of the rotating member; and a a second pressing member opposite to the first pressing member and coupled to the rotating member for selectively pressing the second clamping disc to the other side of the rotating member. The support vehicle of claim 2, further comprising: at least one sensing component located on the base for sensing whether the first crimping member presses the first clamping disc to the side of the rotating member And whether the second pressing member presses the second clamp disc to the other side of the rotating member. The support vehicle of claim 1, wherein the fixing mechanism comprises: at least one clamp coupling, removably located on the same side of the first clamp disc and the second clamp disc that are overlapped. The support vehicle of claim 1, further comprising: a limit pin removably located on the base for stopping rotation of the rotating member; and a driving device located on the base to connect the A limit pin for moving the limit pin. A leak test system includes: a support carrier, comprising: a base having an accommodation space; a first fixture disk located in the accommodation space; and a second fixture disk for the first fixture The disc is co-molded with a grinding workpiece therebetween, wherein the grinding workpiece has an internal space and a nozzle, the nozzle is located on the surface of the grinding workpiece, is exposed on one side of the second clamping disc, and is connected to the internal space; Coupling, reversibly connecting the base, and detachably connecting the second clamp disc and the first clamp disc; and a fixing mechanism, combining the rotating member, the first clamp disc and the second clamp disc And a test device for turning on the internal space through the nozzle and testing whether the abrasive workpiece leaks. A leak test method includes: fixing an abrasive workpiece to a reversible support carrier; and testing whether the abrasive workpiece on the support carrier leaks by pumping or inflating the abrasive workpiece. The leak test method of claim 7, wherein before testing whether the abrasive workpiece on the support carrier leaks, the method further comprises: flipping the abrasive workpiece on the support carrier to interlock one nozzle of the abrasive workpiece surface; And passing a test device through the nozzle to open an inner space of the abrasive workpiece. The leak test method of claim 7, wherein testing the abrasive workpiece on the support carrier for leaking further comprises: vacuuming an internal space of the abrasive workpiece for a period of time; determining whether the internal space of the abrasive workpiece is It is in a vacuum state; and when it is judged that the internal space of the abrasive workpiece is not in a vacuum state, it is determined that the abrasive workpiece leaks. The leakage test method of claim 7, wherein testing whether the abrasive workpiece on the support carrier leaks further comprises: continuously inflating into an inner space of the abrasive workpiece; determining whether the internal space is at a specific pressure Being able to continue to receive inflation; and When it is judged that the internal space is continuously inflated at the specific air pressure, it is determined that the abrasive workpiece leaks.