TWI620264B - Positioning device for manufacturing process in clean room - Google Patents

Abstract

The workpiece positioning device (10A) of the present invention comprises: an intermediate portion (14) slidably disposed on a plane of the base portion (12); a platform portion (16) sliding relative to the intermediate portion (14); and a pressing portion (18) locking the platform portion (16); the platform portion (16) has a cover portion (92) disposed on the platform body (98) and extending to the outer side in the diameter direction of the intermediate portion (14) by means of the platform The main body (98) and the lid portion (92) form a movable space (S) for relatively displacing the pressing portion (18).

Description

Workpiece positioning device for dust-free process

The present invention relates to a workpiece positioning device for positioning and securing a workpiece to a predetermined position.

Conventionally, in a clean room such as a process of a liquid crystal display, a workpiece positioning device that positions a workpiece conveyed by a roller conveyor or the like at a predetermined position is widely used. For example, the workpiece positioning device disclosed in Japanese Laid-Open Patent Publication No. 2005-109443 has a configuration in which a lower plate, a holder, and an upper plate are housed in a casing, and the holder is disposed on the lower plate and formed There are a plurality of retaining holes that are rotatably provided with a plurality of balls, and the upper plate is disposed above the retainer. The upper plate is provided with a shaft portion that extends upward through the hole portion formed in the casing to the outside, and a top plate on which the workpiece is placed is fixed to the upper end portion of the shaft portion. In addition, a spring for returning the top plate to the reference position is interposed between the spring stop disposed on the upper plate and the housing.

In such a workpiece positioning device, when the workpiece placed on the top plate is pressed in a predetermined direction by the cylinder, since the upper plate is slid with respect to the lower plate through the plurality of balls, the workpiece is positioned. On the other hand, in the no-load state, the upper plate (top plate) is returned to the middle by the action of the spring. Heart position.

However, the workpiece positioning device must have a movable space for sliding the top plate and a space for arranging the spring in the casing, and a thickness dimension of the casing is required, so that the size of the sliding direction is increased.

Therefore, a workpiece positioning device disclosed in, for example, Japanese Patent No. 4797025 is proposed. The workpiece positioning device is provided with: a planar lower block; a plurality of retaining holes formed by rotatably arranging a plurality of balls in contact with the plane; and a plurality of balls disposed on the plurality of balls for mounting the workpiece Above block. A spring member is provided between the shaft portion and the upper block provided at the center of the cage. In each of the lower block and the upper block, a movable space is formed to limit the movable range of the shaft portion.

In the workpiece positioning device, the movable space of the lower block and the movable space of the upper block can be set to be substantially half compared with the workpiece positioning device of JP-A-2005-109443, so that the workpiece positioning device can be made When the maximum position adjustment range of the workpiece is small, miniaturization is required.

Furthermore, the workpiece positioning device adopts a configuration in which a flange of a lower end portion of the shaft portion is held by a piston to prevent rotation of a plurality of balls and to lock the cage and the upper block with respect to the lower block. Composition.

In the workpiece positioning device of the above-mentioned Japanese Laid-Open Patent Publication No. 2005-109443, it is necessary to provide a gap in which the top plate (upper plate) slides between the wall surface constituting the hole portion of the casing and the shaft portion. Therefore, when inside the casing When dust is generated, the dust may flow out to the outside of the casing through the hole portion to contaminate the use environment of the workpiece positioning device.

Further, in the workpiece positioning device of the above-mentioned Japanese Laid-Open Patent Publication No. 2005-109443, the shaft portion provided in the holder is held by the piston of the following block, and the plurality of balls are prevented from rotating, and the holder and the upper portion are not rotated. The block is locked relative to the lower block.

However, a predetermined gap is provided between the wall surface of each of the holding holes constituting the cage and each of the balls. If the gap is not provided, the balls cannot be smoothly slid and the intermediate body and the upper block cannot be slid.

Therefore, in actuality, in a state where the shaft portion (holder) is held, each of the balls moves to a degree of a gap with the wall surface constituting each of the holding holes. Therefore, the upper block is shaken relative to the intermediate to the extent of the aforementioned void.

Furthermore, in the workpiece positioning device, since the upper block can slide relative to each of the balls when the lock is released, the frictional resistance between the upper block and each of the balls may be relatively small. Therefore, even in a state where the workpiece is placed in the upper block, when a force acts on the workpiece or the like in the sliding direction, the upper block slides relative to the lower block.

That is, in the above-described workpiece positioning device, there is a possibility that the workpiece cannot be surely fixed to a predetermined position.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a workpiece positioning device which can be miniaturized without making the maximum position adjustment range of the workpiece small, and can securely fix the workpiece at a predetermined position. Location, appropriate in the environment where cleanliness is required use.

The workpiece positioning device of the present invention is a device for positioning and fixing a workpiece, comprising: a base portion having a plane; an intermediate portion slidably disposed on the plane; and a platform portion having a plane parallel to the plane and a plate-shaped portion that slides with respect to the intermediate portion and a workpiece is placed thereon; the shaft portion extends in a direction orthogonal to the plane; and the pressing portion faces the diameter of the shaft portion in a state of being provided on one end side of the shaft portion Extending the outside and pressing one of the plate-like portions on the intermediate portion side to lock the platform portion; the piston is disposed on the base portion in a state where the shaft portion can be pressed in the axial direction; and the biasing means is disposed in the pressing portion And a platform portion for returning the platform portion to a reference position; wherein the platform portion has a platform body disposed on one side of the pressing portion, and a diametrical outer side disposed on the platform body and extending to the intermediate portion The tubular lid portion forms a movable space in which the pressing portion can be relatively displaced by the platform body and the lid portion.

According to the workpiece positioning device described above, since the biasing means is interposed between the pressing portion and the platform portion, and the movable portion that can relatively displace the pressing portion is formed in the platform portion, the sliding portion of the platform portion can be prevented from being moved. In the case where the outer shape becomes large, the movable space of the platform portion is secured. Thereby, the workpiece positioning device can be downsized without adjusting the maximum position of the workpiece as compared with the configuration of the casing.

Further, by displacing the piston toward the opposite side of the intermediate portion, the pressing portion can be pressed against one surface of the plate portion. That is, by generating a frictional force between one side of the plate portion and the pressing portion, the platform portion can be relatively Directly locked at the base. Thereby, even when an external force acts on a workpiece or the like along the sliding direction of the land portion, the displacement of the land portion with respect to the base portion can be suppressed. Therefore, the workpiece can be surely fixed at a predetermined position.

Further, since the tubular cover portion provided in the platform body extends to the outer side in the radial direction of the intermediate portion, even when dust is generated in the platform portion (movable space), the dust can be prevented from flowing out to the outside of the workpiece positioning device. Therefore, the workpiece positioning device can be suitably used in an environment requiring cleanliness (clean room, etc.).

In the above-described workpiece positioning device, the intermediate portion may have a ball that is in contact with the other surface of the base portion and the plate-like portion, and a retainer that is formed with a holding hole that is disposed in a state where the ball is rotatable.

According to the above configuration, the sliding operation of the intermediate portion and the platform portion can be smoothly performed. At this time, a predetermined gap is formed between the wall surface constituting the holding hole and the ball. However, since the platform portion is directly locked with respect to the base portion, it is possible to suppress the shaking of the platform portion due to the aforementioned gap. Therefore, the workpiece can be more surely fixed at a predetermined position.

In the above-described workpiece positioning device, the piston is provided to be displaceable relative to the shaft portion along the axial direction of the shaft portion, and the first portion of the shaft portion to restrict displacement of the piston to one side with respect to the shaft portion may be formed in the shaft portion. a restriction portion; and a second restriction portion that restricts displacement of the piston toward the other side with respect to the shaft portion.

According to the above configuration, since the piston is relatively displaced in the axial direction along the axial direction in the range between the first restricting portion and the second restricting portion, the stroke length of the piston can be made relative to the shaft portion (pressing portion). The stroke length is large. Thereby, it is possible to suppress an increase in the size of the workpiece positioning device in the axial direction.

The workpiece positioning device may include an elastic member such as a coil spring interposed between the intermediate portion and the shaft portion to return the intermediate portion to the reference position.

According to the above configuration, the intermediate portion that slides with respect to the base portion can be surely returned to the reference position by the restoring force of the elastic member. When a coil spring is used as the elastic member, even if the intermediate portion slides in any direction of 360°, the intermediate portion can be efficiently returned to the predetermined reference position.

In the above-described workpiece positioning device, the shaft portion is movable in a direction orthogonal to the axis, and the intermediate portion is also slidable in parallel with the plane portion integrally with the shaft portion.

According to the above configuration, the movable space of the pressing portion required in the platform portion can be reduced to the extent that the intermediate portion slides relative to the base portion, and the outer shape of the platform portion can be reduced.

The workpiece positioning device may include an elastic member such as a coil spring that is interposed between the base portion and the shaft portion and that returns the intermediate portion to the reference position.

According to the above configuration, the intermediate portion that slides with respect to the base portion can be surely returned to the reference position by the restoring force of the elastic member. When a coil spring is used as the elastic member, the intermediate portion can be efficiently returned to the reference position even if the intermediate portion slides in any direction of 360°.

In the workpiece positioning device described above, a centering mechanism for returning the shaft portion to the reference position may be provided.

According to the above configuration, the shaft portion can be accurately returned to the reference position.

In the above-described workpiece positioning device, the intermediate portion has balls that are in contact with the plane of the base portion and the other surface of the plate portion; a retainer that is formed with a retaining hole that is disposed in a state in which the balls are rotatable; and An L-shaped cover portion on the outer circumference of the holder; and an S-shaped cover portion slidable in parallel with the plane is provided between the base portion and the L-shaped cover portion.

According to the above configuration, even when the platform portion is slid at the maximum extent, the plane of the base portion is not exposed by the presence of the L-shaped cover portion and the S-shaped cover portion, and dust can be prevented from entering the inside of the workpiece positioning device as much as possible.

In the above-described workpiece positioning device, the sliding of the intermediate portion with respect to the base portion can be restricted by the contact of the holder with the S-shaped cover portion and the contact of the S-shaped cover portion with the base portion.

According to the above configuration, by adjusting the shape of the S-shaped cover portion or the like, the sliding of the intermediate portion with respect to the base portion can be easily restricted to a predetermined amount.

The workpiece positioning device may include an elastic member such as a coil spring interposed between the L-shaped cover portion and the S-shaped cover portion to return the S-shaped cover portion to the reference position.

According to the above configuration, the S-shaped lid portion can be surely returned to the reference position by the restoring force of the elastic member. When the coil spring is used as the elastic member, the S-shaped cover portion can be efficiently returned to the predetermined reference position even if the S-shaped cover portion slides in any one of 360 degrees.

In the above workpiece positioning device, the biasing means may be an elastic member such as a coil spring.

According to the above configuration, the platform portion that slides with respect to the base portion can be surely returned to the reference position by the restoring force of the elastic member. When a coil spring is used as the elastic member, the intermediate portion can be efficiently returned to the reference position even if the intermediate portion slides in any direction of 360°.

In the above workpiece positioning device, the biasing means includes: a centering ball that rotates on the other side of the platform body; a ball supporting portion that supports the centering ball in a rotatable manner; and is disposed between the ball supporting portion and the pressing portion And an elastic member that presses the ball support portion toward the platform body side; and a concave portion for guiding the center of the platform body to the centering ball on the other surface of the platform body.

According to the above configuration, since the concave portion for guiding the center of the platform body to the centering ball is formed on the other side of the platform body, the centering accuracy of the platform portion can be improved.

The workpiece positioning device may further include detection means for detecting a locked state and a non-locked state of the platform portion caused by the pressing portion.

According to the above configuration, since the detecting means is provided, it is easy to know that the platform portion is in either the locked state or the non-locked state.

In the above-described workpiece positioning device, a cylinder chamber in which a piston is disposed is formed in the base portion, and the detecting means may have a magnet attached to the outer peripheral surface of the piston and a position in which the axis of the piston is detected according to the magnetic field of the magnet. Set the position detection sensor.

According to the configuration described above, by detecting the position of the piston in the axial direction of the cylinder chamber by the position detecting sensor, the position of the pressing portion provided on one end side of the shaft portion in the axial direction can be detected. Thereby, the locked state and the non-locked state of the platform portion due to the pressing portion can be detected with a simple configuration.

In the above workpiece positioning device, the detecting means may have a detecting body that is displaced together with the shaft portion, and a photo sensor for detecting the position of the detecting body.

According to the configuration described above, since the position of the detecting body displaced together with the shaft portion is detected by the photosensor, the position of the pressing portion provided on one end side of the shaft portion in the axial direction can be detected. Thereby, the locked state and the non-locked state of the platform portion due to the pressing portion can be detected with a simple configuration.

In the above-described workpiece positioning device, a convex portion that is in contact with the detecting body is formed in the shaft portion, and the detecting system is supported by the base portion in a state of extending in a direction intersecting the axial direction of the shaft portion, and in the extending direction of the detecting body, The interval between the fulcrum of the detecting body and the point of action of contact with the convex portion may be made smaller than the interval between the irradiation point and the fulcrum at which the light of the photodetector is irradiated.

According to the above configuration, since the interval between the fulcrum and the action point in the extending direction of the sample is smaller than the interval between the irradiation point and the fulcrum, the displacement amount of the irradiation spot can be made larger than the displacement amount of the action point (stroke of the shaft portion). Thereby, it is possible to suppress the enlargement of the workpiece positioning device in the axial direction, and it is possible to reliably detect the locked state and the non-locking state of the platform portion due to the pressing portion. state.

In the above-described workpiece positioning device, a suction opening for guiding the dust in the platform portion to the dust removing device may be formed in the base portion.

According to the above configuration, since the dust in the land portion is led to the dust removing device through the suction opening formed in the base portion, the dust can be further prevented from flowing out to the outside of the workpiece positioning device.

In the above-described workpiece positioning device, the intermediate portion may be composed of a first intermediate portion, a second intermediate portion, and a third intermediate portion, and the first intermediate portion has a first ball that is in contact with the plane of the base portion, and is formed in the middle portion. The first holder that holds the holding hole in the state in which the first ball is rotatable, the second intermediate portion has a contact plate that is in contact with the first ball and the second ball, and the third intermediate portion has a plate-like portion. The second ball that is in contact with the other surface and the second holder that is formed with the holding hole that is disposed in a state where the second ball is rotatable.

According to the above configuration, the sliding operation of the first intermediate portion, the second intermediate portion, and the third intermediate portion can be smoothly performed.

In the above-described workpiece positioning device, a cover cylinder that can abut against the outer circumferential surface of the first holder and the outer circumferential surface of the second holder is formed in the contact plate, and the base portion is provided to protrude from the plane and can be held by the first holder. The protruding portion that abuts the outer peripheral surface of the frame may be in contact with the outer peripheral surface of the second holder.

According to the above configuration, the sliding operation of the first intermediate portion with respect to the base portion, the sliding operation of the second intermediate portion with respect to the first intermediate portion, the sliding operation of the third intermediate portion with respect to the second intermediate portion, and the platform portion can be easily performed. The sliding motion of the third intermediate portion is limited to a predetermined amount.

In the above-described workpiece positioning device, a first L-shaped cover portion slidable parallel to a plane may be provided between the base portion and the first holder, and a second L-shaped cover portion may be provided between the second intermediate portion and the second holder. The second L-shaped cover portion that slides in parallel with the plate.

According to the above configuration, even if the second intermediate portion slides, the flat portion of the base portion is not exposed by the presence of the first L-shaped cover portion, and even if the platform portion slides, the second L-shaped cover portion does not exist. The touch plate is exposed. Therefore, it is possible to suppress the intrusion of dust into the inside of the workpiece positioning device as much as possible.

In the workpiece positioning device, the sliding of the first intermediate portion with respect to the base portion may be restricted by the first holder interposing the first L-shaped cover portion in contact with the base portion, and the third intermediate portion is for the second intermediate portion. The sliding can be restricted by the second holder being in contact with the second intermediate portion by the second holder.

According to the above configuration, by adjusting the shape of the first L-shaped cover portion and the second L-shaped cover portion, the sliding of the first intermediate portion with respect to the base portion and the sliding of the third intermediate portion with respect to the second intermediate portion can be easily restricted. At a predetermined amount.

In the above-described workpiece positioning device, the shaft portion is inserted into the contact plate with substantially no gap, and may be provided with a centering mechanism that returns the shaft portion to the reference position with respect to the base portion.

According to the above configuration, the shaft portion and the second intermediate portion can be accurately returned to the reference position.

The workpiece positioning device according to the present invention can not be made When the maximum position adjustment range of the workpiece is small, the size can be reduced, and the workpiece can be reliably fixed at a predetermined position, and can be suitably used in an environment requiring cleanliness.

The above objects, features, and advantages will be apparent from the description of the embodiments illustrated in the appended claims.

10A, 10B, 10C, 10D, 10E, 10F‧‧‧ workpiece positioning device

12, 130, 170, 212, 350‧‧‧ base

14, 352‧‧‧ middle part

16,220, 354‧‧‧ Platform Department

18, 222, 356‧‧ ‧ press

20, 224, 358‧‧‧ base flange

22, 138, 226, 360‧‧‧ Locking cylinder

24, 228, 362‧‧‧1st ball touch plate

25‧‧‧1st ball touches one side of the board

26‧‧‧Fixed holes

28‧‧‧ bolts

30, 182‧‧‧ inserted through hole

32, 366‧‧‧ circular recess

34, 66, 184 ‧ ‧ gasket

36, 68, 72, 82, 144, 186‧‧ ‧ annular groove

38‧‧‧Lock cylinder body

40, 178‧‧‧ highlights

42, 366‧‧‧ recess

44‧‧‧ rod holes

46, 142‧‧ ‧ cylinder room

48‧‧‧1st orifice

50‧‧‧2nd orifice

52, 148, 340, 374‧‧ ‧ Pistons

54,262,264,266‧‧‧ piston gasket

56, 150, 174‧‧ ‧ piston rod

58, 276‧‧‧through holes

60‧‧‧ piston rod

62‧‧‧Flange

64, 94, 154, 156, 280, 282, 294, 412‧‧ ‧ stop wheels

70‧‧‧ rod liner

74, 422‧‧‧ fitting holes

76, 240‧‧ ‧ suction orifice

78‧‧‧ transverse holes

80‧‧‧Vertical holes

84, 394‧‧‧ balls

86‧‧‧ Keeping holes

88, 399‧‧‧Cage

90, 100‧‧‧ elastic members

92, 290, 410‧‧ ‧ cover

96, 278, 414‧‧‧2nd ball touch plate

97, 99‧‧‧ 2nd ball touches the other side of the board

98‧‧‧ Platform Ontology

102, 288, 408‧‧‧ top board

104‧‧‧Installation Department

106‧‧‧Centering recess (concave)

108‧‧‧ screws

110‧‧‧ screw holes

112‧‧‧ Support shaft

114‧‧‧Locking

116‧‧‧Centering agency

118, 162, 164‧‧‧ with holes

120‧‧‧Centering Balls

122‧‧‧Ball Support

124‧‧‧Blasting members

126‧‧" Centering recess

132‧‧‧Base flange

134, 136, 158, 160‧‧ ‧ gap

140‧‧‧round hole

144‧‧‧ magnet

152‧‧‧stop (the first restriction)

166, 168‧‧‧ position detection sensor

176‧‧‧ insertion hole

180‧‧‧ convex

188‧‧‧Detection Department (detection means)

190‧‧‧Detector (test piece)

192‧‧‧Light sensor

194‧‧‧protective components

196, 204, 210‧‧‧ bolts

200‧‧‧Bend

202‧‧‧Lighting Department

206‧‧‧Lighting Department

208‧‧‧Receiving Department

213‧‧‧ bushings

214‧‧‧1st intermediate part

215‧‧‧1L type cover

216‧‧‧2nd intermediate part

218‧‧‧3rd intermediate part

219, 450‧‧‧3rd elastic member

221‧‧‧4th elastic member

230‧‧‧Ringy protrusions

232‧‧‧Circular recess

234‧‧‧Base liner

236, 368 ‧ ‧ center plate

238, 239, 370‧‧‧1st centering recess

242, 380‧‧‧ outer tube

244, 382‧‧‧ round plate

246, 384‧‧‧Inner tube

250‧‧‧Round-shaped recess

254, 388‧‧‧1st pressure chamber

256, 390‧‧‧ second pressure chamber

270‧‧‧1st ball

272‧‧‧1st cage

273, 275, 346, 348‧‧ ‧ level flange

274‧‧‧ Cover

284‧‧‧2nd ball

286‧‧‧2nd cage

296‧‧‧3rd ball touch plate

298, 372‧‧‧ openings

300, 416‧‧‧2nd centering recess

302, 418‧‧‧1st shaft

304, 420‧‧‧2nd shaft body

306‧‧‧ fitting holes

308‧‧‧1st locking flange

310, 426‧‧‧1st hole

312, 313‧‧‧1st Centering Agency

314‧‧‧2nd locking flange

316, 432‧‧‧2nd hole

318, 434‧‧‧2nd Centering Agency

320, 436‧‧ ‧ shaft

322‧‧‧Washers

438‧‧‧1st centering ball

326‧‧‧1st Ball Support

328, 440‧‧‧1st elastic member

330‧‧‧2nd centering ball

332‧‧‧2nd Ball Support

334, 444‧‧‧2nd elastic member

336, 446‧‧‧1st elastic member

448‧‧‧2nd elastic member

344, 378‧‧‧ compression spring

345, 347‧‧‧ vertical cylinder

364, 386‧‧‧ annular protrusions

376‧‧‧Sliding parts

392a, 392b, 392c, 392d‧‧‧ pads

398‧‧‧L type cover

402‧‧‧S type cover

404‧‧‧1st tubular

406‧‧‧2nd tubular

424‧‧‧1st locking flange

430‧‧‧2nd locking flange

S‧‧‧ movable space

Fig. 1 is a perspective view of a workpiece positioning device according to a first embodiment of the present invention.

Fig. 2 is a longitudinal sectional view of the workpiece positioning device shown in Fig. 1.

Fig. 3 is a partially cutaway perspective view showing a part of the workpiece positioning device of Fig. 1.

Fig. 4 is a detailed exploded perspective view of the workpiece positioning device of Fig. 1.

Fig. 5 is a vertical cross-sectional view showing a state in which an intermediate portion and a land portion of the workpiece positioning device constituting Fig. 2 are slid with respect to the base portion.

Figure 6 is a perspective view of a workpiece positioning device according to a second embodiment of the present invention.

Fig. 7 is a longitudinal sectional view of the workpiece positioning device shown in Fig. 6.

Fig. 8 is a partially cutaway perspective view, partly in section, of the workpiece positioning device of Fig. 6.

Fig. 9 is an exploded perspective view showing the base portion of the workpiece positioning device of Fig. 6.

Fig. 10 is a vertical cross-sectional view showing a state in which the intermediate portion and the platform portion constituting the workpiece positioning device of Fig. 7 are slid with respect to the base portion.

Figure 11 is a perspective view of a workpiece positioning device according to a third embodiment of the present invention.

Fig. 12 is a longitudinal sectional view of the workpiece positioning device shown in Fig. 11.

Figure 13 is a partially cutaway perspective view showing the workpiece positioning device of Figure 11;

Fig. 14 is an exploded perspective view showing the base portion of the workpiece positioning device of Fig. 11.

Fig. 15 is a vertical cross-sectional view showing a state in which the intermediate portion and the land portion constituting the workpiece positioning device shown in Fig. 12 are slid with respect to the base portion.

Figure 16 is a perspective view of a workpiece positioning device according to a fourth embodiment of the present invention.

Figure 17 is a longitudinal sectional view of the workpiece positioning device shown in Figure 16.

Figure 18 is a partially cutaway perspective view showing the workpiece positioning device of Figure 16;

Fig. 19 is a detailed exploded perspective view showing the base portion of the workpiece positioning device of Fig. 16.

Fig. 20 is a perspective view showing the workpiece positioning device when the first intermediate portion, the second intermediate portion, the third intermediate portion, and the land portion constituting the workpiece positioning device shown in Fig. 17 are slid with respect to the base portion.

Fig. 21 is a vertical cross-sectional view showing a state in which the first intermediate portion, the second intermediate portion, the third intermediate portion, and the land portion constituting the workpiece positioning device shown in Fig. 17 are slid with respect to the base portion.

Figure 22 is a longitudinal sectional view of a workpiece positioning device according to a fifth embodiment of the present invention.

Fig. 23 is a vertical cross-sectional view showing a state in which the first intermediate portion, the second intermediate portion, the third intermediate portion, and the land portion constituting the workpiece positioning device shown in Fig. 22 are slid with respect to the base portion.

Figure 24 is a longitudinal sectional view of a workpiece positioning device according to a sixth embodiment of the present invention.

Fig. 25 is a vertical cross-sectional view showing a state in which the intermediate portion and the land portion constituting the workpiece positioning device shown in Fig. 24 are slid with respect to the base portion.

Hereinafter, preferred embodiments of the workpiece positioning device of the present invention will be described with reference to the accompanying drawings.

(First embodiment)

A workpiece positioning device 10A according to a first embodiment of the present invention will be described with reference to Figs. 1 to 5 . The workpiece positioning device 10A of the present embodiment is placed in a clean environment in a clean room such as a process such as a liquid crystal display, and the workpiece conveyed by a conveying device such as a roller conveyor is positioned at a predetermined position and fixed. Therefore, the workpiece positioning device 10A is attached to the lifting device, and the lifting device is disposed between the adjacent rollers constituting the roller conveyor.

However, the workpiece positioning device 10A is not limited to a user attached to the lifting device but in the conveying device. That is, for example, the workpiece positioning device 10A may be a user who moves to the next step in order to transfer the workpiece W transferred by the robot to a predetermined position and fix it.

As shown in Figures 1 to 4, the workpiece positioning device 10A The base portion 12 is provided on the base portion 12 in a slidable manner, and the platform portion 16 is slidably disposed relative to the intermediate portion 14 and has a workpiece placed thereon (see FIG. 5); The pressing portion 18 locks the platform portion 16 to the base portion 12.

The base portion 12 has a base flange portion 20 belonging to a plate-like member having a substantially square shape in plan view, a locking cylinder (cylindrical portion) 22 provided at the base flange portion 20, and a locking cylinder disposed thereon The annular first ball of 22 touches the plate 24.

The base flange portion 20 is fixed to the lifting device by a bolt (not shown) that is inserted through a plurality of fixing holes 26. A plurality of (four in FIG. 4) insertion holes 30 through which the bolts 28 for mounting the lock cylinder 22 are inserted are formed in the base flange portion 20.

A circular recess 32 is formed substantially at the center of one surface of the base flange portion 20 (the surface directed toward the lock cylinder 22). An annular groove 36 for mounting the spacer 34 is formed at one end portion of the inner peripheral surface constituting the circular recess 32.

The lock cylinder 22 has a lock cylinder body 38 formed in a disk shape, and a projecting portion 40 projecting from the substantially center of the lock cylinder body 38 toward the base flange portion 20 side. The protruding portion 40 is inserted (embedded) in the circular recess 32. A recess 42 is formed inside the protruding portion 40, and a rod hole 44 opening toward one surface of the locking cylinder body 38 is formed on the bottom surface of the recess 42. The cylinder chamber 46 is formed by the wall surface of the circular recess 32 constituting the base flange portion 20 and the wall surface of the recess 42 constituting the lock cylinder 22.

The cylinder chamber 46 is in communication with: formed on the base flange portion 20 And a first orifice 48 for supplying/discharging the compressed fluid; and a second orifice 50 formed in the lock cylinder 22 for supplying/discharging the compressed fluid.

The cylinder chamber 46 is provided with a piston 52 so as to be slidable (displaceable) along the thickness direction of the base flange portion 20. A piston spacer 56 is attached to the annular groove 54 formed on the outer circumferential surface of the piston 52, and a piston rod (shaft portion) 60 is inserted into the through hole 58 formed in the central portion of the piston 52.

The piston 52 is fixed to the piston rod 60 by a flange portion 62 formed at the other end portion of the piston rod 60 and a stopper wheel 64. Further, an annular groove 68 for mounting the spacer 66 is formed on the surface of the piston rod 60 opposite to the wall surface of the through hole 58 constituting the piston 52. An annular groove 72 for mounting the rod spacer 70 is formed on the piston rod 60 opposite to the wall surface constituting the rod hole 44. A fitting hole 74 for fitting the other end portion of the pressing portion 18 is formed on one end surface of the piston rod 60.

Further, the lock cylinder 22 is formed with a suction port 76 for guiding the dust in the land portion 16 to a dust removing device (not shown). The suction port 76 is constituted by a lateral hole 78 that opens toward the outer peripheral surface of the lock cylinder 22, and a vertical hole 80 that opens toward the vicinity of the rod hole 44 in one of the faces of the lock cylinder 22. Further, the dust removing device also functions as a suction pump.

An annular groove 82 for arranging the first ball contact plate 24 is formed on one surface of the lock cylinder 22. A portion of one surface of the lock cylinder 22 that is closer to the inner side than the annular groove 82 is formed to be lower than one surface 25 of the first ball contact plate 24, and an opening of the vertical hole 80 is formed. Thereby, when the intermediate portion 14 slides relative to the base portion 12, the opening portion of the vertical hole 80 is not The intermediate portion 14 is closed.

The intermediate portion 14 has a plurality of balls 84 and an annular retainer 88 formed with a plurality of holding holes 86 disposed in a state in which the respective balls 84 are rotatable. Each of the balls 84 is made of a metal material, and the holder 88 is made of a resin material. The plurality of holding holes 86 are arranged at equal intervals in the circumferential direction. The holder 88 is disposed such that each of the balls 84 comes into contact with one surface 25 of the first ball contact plate 24. Thereby, the intermediate portion 14 is slidable relative to the one surface 25 of the first ball contact plate 24 of the intermediate portion 14.

An elastic member 90 is interposed between the retainer 88 and the piston rod 60. Specifically, the elastic member 90 is attached to the annular groove formed on the inner circumferential surface of the retainer 88 and the annular groove formed on the outer circumferential surface of the piston rod 60. By mounting the elastic member 90 in the annular groove in advance, the positional deviation of the elastic member 90 can be suppressed.

In the present embodiment, a coil spring is used as the elastic member 90. When the coil spring is used, even if the intermediate portion 14 slides in any direction of 360°, the intermediate portion 14 can be efficiently returned to a predetermined reference position (centering position), that is, the center line of the intermediate portion 14 can be made. It is preferably located on the axis of the piston rod 60. Further, since it is a coil spring, the size in the height direction can be made as small as possible. However, the elastic member 90 can be arbitrarily set as long as the intermediate portion 14 that can slide relative to the base portion 12 is returned to a predetermined reference position. That is, the elastic member 90 may also be an annular rubber member.

The platform portion 16 has a cylindrical lid portion 92 and a second annular ball contact supported by a stopper wheel 94 provided in the lid portion 92. a plate (plate portion) 96; and a platform body 98 disposed at one end of the cover portion 92. That is, the movable portion S in which the pressing portion 18 can be relatively displaced by the lid portion 92 and the platform body 98 is formed in the platform portion 16.

The other end portion of the lid portion 92 is located in the vicinity of the base portion 12 and is diametrically outward of the holder 88. That is, a small gap is formed between the lid portion 92 and the base portion 12 to such an extent that it does not interfere with the sliding operation of the platform portion 16. As described above, since the intermediate portion 14 and the pressing portion 18 are surrounded by the lid portion 92 and the platform body 98, even when dust is generated in the platform portion 16 (the movable space S), the dust can be prevented from flowing out to the outside of the platform portion 16.

The other surface 97 of the second ball contact plate 96 is in contact with each of the balls 84 in a state of being disposed substantially in parallel with respect to one surface 25 of the first ball contact plate 24. Thereby, the second ball contact plate 96 (the platform portion 16) can slide with respect to the intermediate portion 14.

An elastic member 100 as a biasing means is interposed between the lid portion 92 and the pressing portion 18. Specifically, the elastic member 100 is attached to the annular groove formed on the inner circumferential surface of the lid portion 92 and the annular groove formed on the outer circumferential surface of the pressing portion 18 . By mounting the elastic member 100 in the annular groove in advance, the positional deviation of the elastic member 100 can be suppressed.

In the present embodiment, a coil spring is used as the elastic member 100. When the coil spring is used, even if the platform portion 16 slides in any direction of 360°, the platform portion 16 can be efficiently returned to a predetermined reference position (centering position) (the center line of the platform portion 16 can be made The axis of the piston rod 60), and the size of the height direction can be made as small as possible, so More ideal. However, the elastic member 100 can be arbitrarily set as long as the platform portion 16 that slides relative to the base portion 12 is returned to a predetermined reference position. That is, the elastic member 100 may also be an annular rubber member.

The platform body 98 has a top plate portion 102 and a mounting portion 104 that protrudes from the edge portion of the top plate portion 102 toward the intermediate portion 14. A workpiece W is placed on one of the planes of the top plate portion 102. A center-shaped concave portion (concave portion) 106 having a circular shape is formed substantially at the center of the other surface of the top plate portion 102. The wall surface constituting the centering concave portion 106 is formed as a curved surface or a tapered surface which is gradually inclined toward the bottom surface of the top plate portion 102 from the outer edge portion toward the bottom of the center of the top plate portion 102. A plurality of screw holes 110 are formed in the mounting portion 104, and the screw holes 110 are inserted through the screws 108 for fixing the platform body 98 to the cover portion 92.

The pressing portion 18 includes a support shaft 112 that is fitted into the fitting hole 74 of the piston rod 60, and an annular lock portion 114 that extends from the center in the axial direction of the support shaft 112 toward the outer side in the radial direction. The support shaft 112 is disposed coaxially with the piston rod 60. The lock portion 114 has an outer diameter larger than the inner diameter of the second ball contact plate 96, and the other surface of the lock portion 114 is substantially parallel to the other surface 99 of the second ball touch plate 96.

An arrangement hole 118 is provided in one end surface of the support shaft 112 for arranging the center mechanism 116 for returning the platform body 98 to the reference position. The centering mechanism 116 has a centering ball 120 that rotates on the other surface (inner surface) of the top plate portion 102, and a ball supporting portion 122 that rotatably supports the centering ball 120; and the ball supporting portion 122 is a biasing member 124 that is biased toward the top plate portion 102 side.

The centering ball 120 has a diameter smaller than the outer diameter of the centering recess 106. That is, the centering ball 120 is positioned in the centering concave portion 106 formed in the top plate portion 102 in a state where the platform portion 16 is returned to the reference position. The elastic member 124 is interposed between the bottom surface constituting the arrangement hole 118 and the ball support portion 122. In the present embodiment, the elastic member 124 is composed of a compression coil spring (spring member), but may be composed of an elastic member such as rubber.

The workpiece positioning device 10A of the present embodiment basically consists of the above-described embodiments, and its operation and effects will be described below.

First, in the initial state, the workpiece positioning device 10A sets the platform portion 16 in an unlocked state in advance. In other words, the compressed fluid is supplied to the first orifice 48 while the second orifice 50 is open to the atmosphere, whereby the piston 52 is disposed on one end side of the cylinder chamber 46 and the lock portion 114 is moved from the second ball. The contact plate 96 is separated. At this time, the piston 52 is in contact with the bottom surface of the recess 42 of the lock cylinder 22. Further, the dust in the platform portion 16 is guided to the dust removing device by the suction port 76 and removed.

Then, when the workpiece W conveyed by the roller conveyor stops above the workpiece positioning device 10A, the lifting device rises to the workpiece positioning device 10A. Thereby, the workpiece W is separated from the roller conveyor and placed on the top plate portion 102 of the platform main body 98.

Next, as shown in Fig. 5, the workpiece W is pressed in a predetermined direction (the right side of Fig. 5) by a cylinder (not shown) to position the workpiece W. At this time, the plurality of balls 84 of the intermediate portion 14 are rotated by the first The ball touches one surface 25 of the plate 24, and the holder 88 slides while compressing the elastic member 90. Thereby, the intermediate portion 14 is slid relative to the base portion 12 by a predetermined distance.

Further, the other surface 97 of the second ball contact plate 96 is rotated by the plurality of balls 84, and the platform portion 16 slides while compressing the elastic member 100. Thereby, the platform portion 16 is slid relative to the intermediate portion 14 by a predetermined distance. Further, the pressing portion 18 is relatively displaced from the movable space S formed in the platform portion 16.

That is, in the present embodiment, the total amount of sliding of the intermediate portion 14 with respect to the base portion 12 and the amount of sliding of the platform portion 16 with respect to the intermediate portion 14 is the amount of displacement of the platform portion 16 with respect to the base portion 12. Further, in the present embodiment, the amount of sliding of the intermediate portion 14 with respect to the base portion 12 is approximately half of the amount of displacement of the platform portion 16 with respect to the base portion 12.

Further, when the workpiece W is displaced by the maximum position adjustment range, the inner circumferential surface of the second ball contact plate 96 abuts against the outer circumferential surface of the support shaft 112. Thereby, the platform portion 16 is prevented from being detached from the intermediate portion 14.

When the positioning of the workpiece W is completed, the compressed fluid is supplied to the second orifice 50 while the first orifice 48 is open to the atmosphere. In this manner, the piston 52 is displaced toward the other end side of the cylinder chamber 46 along the axial direction of the piston rod 60, so that the lock portion 114 is displaced toward the second ball contact plate 96 side to contact the second ball contact plate 96. One side 99 pushes the second ball contact plate 96 to the intermediate portion 14 side. Thereby, a frictional force is generated between the locking portion 114 and one of the faces 99 of the second ball contact plate 96, so that the platform portion 16 is directly locked with respect to the base portion 12 to fix the positioned workpiece W.

In this manner, since the second ball contact plate 96 constituting the land portion 16 is pressed to the intermediate portion 14 side by the lock portion 114, even when an external force acts on the workpiece W along the sliding direction of the land portion 16, the platform can be suppressed. The portion 16 is displaced relative to the base portion 12. Further, even if a gap is formed between the wall surface of each of the holding holes 86 constituting the holder 88 and the balls 84, since the platform portion 16 is directly locked to the base portion 12, the platform portion 16 does not rattle relative to the intermediate portion 14. .

Then, the positioned workpiece W is transferred to a predetermined position by, for example, a robot or the like, and the platform portion 16 of the workpiece positioning device 10A is returned to the reference position. In other words, the compressed fluid is supplied to the first orifice 48 while the second orifice 50 is open to the atmosphere. In this manner, the piston 52 is displaced toward the one end side of the cylinder chamber 46 in the axial direction of the piston rod 60, so that the lock portion 114 is separated from the second ball contact plate 96 side. Thereby, the locking of the platform portion 16 caused by the locking portion 114 is released.

When the locking of the platform portion 16 is released, the intermediate portion 14 is returned to the reference position by the restoring force of the elastic member 90, and the platform portion 16 is returned to the reference position by the restoring force of the elastic member 100. At this time, since the land portion 16 is displaced, the centering ball 120 is rotated toward the bottom of the centering concave portion 106 (the center of the top plate portion 102) and is rotated to the wall surface constituting the centering concave portion 106, so that the platform portion 16 is accurately accurate. Go back to the base position.

According to the workpiece positioning device 10A of the present embodiment, since the elastic member 100 is interposed between the pressing portion 18 and the land portion 16, and the movable portion S in which the pressing portion 18 can be relatively displaced is formed in the land portion 16, it is not caused. The outer dimensions of the platform portion 16 along the sliding direction are changed. Large, and the movable space of the platform portion 16 can be ensured. Thereby, compared with the configuration in which the casing is provided, the maximum position adjustment range of the workpiece W is not reduced, and the workpiece positioning device 10A can be downsized.

Further, by displacing the piston toward the side opposite to the intermediate portion 14, the lock portion 114 can be pressed against the one surface 99 of the second ball contact plate 96. That is, the platform portion 16 can be directly locked to the base portion 12 by the frictional force generated between the surface 99 of the second ball contact plate 96 and the locking portion 114. Therefore, even when an external force acts on the workpiece W along the sliding direction of the land portion 16, the displacement of the platform portion 16 with respect to the base portion 12 can be suppressed. Therefore, the workpiece W can be surely fixed at a predetermined position.

Further, since the lid portion 92 of the holding platform body 98 is extended to the outer side in the diameter direction of the holder 88, dust can be suppressed from flowing outside the workpiece positioning device 10A even when dust is generated in the platform body 16 (movable space S). . Therefore, the workpiece positioning device 10A can be suitably used in an environment (clean room or the like) requiring cleanliness.

In the present embodiment, the balls 84 that are rotatably disposed in the respective holding holes 86 of the holder 88 are in contact with the other surface 25 of the first ball contact plate 24 and the other side of the second ball contact plate 96. 97, the sliding operation of the intermediate portion 14 and the platform portion 16 can be smoothly performed. At this time, a predetermined gap is formed between the wall surface constituting each of the holding holes 86 and each of the balls 84. However, since the platform portion 16 is directly locked to the base portion 12, the sway of the platform portion 16 due to the aforementioned gap can be suppressed. Therefore, the workpiece W can be more surely fixed at a predetermined position.

Due to the permeable opening formed in the locking cylinder 22 Since the dust in the platform portion 16 is guided to the dust removing device, it is possible to suppress the dust from flowing out to the outside of the workpiece positioning device 10A.

Further, since the centering concave portion 106 for guiding the center of the top plate portion 102 to the centering ball 120 is formed on the other surface of the top plate portion 102, the centering accuracy of the land portion 16 can be improved.

In the present embodiment, since the elastic member 90 is interposed between the holder 88 and the piston rod 60, the intermediate portion 14 that has slid with respect to the base portion 12 is surely returned to the reference position by the restoring force of the elastic member 90. .

Further, since each of the elastic member 90 and the elastic member 100 is configured by a coil spring, the intermediate portion 14 and the platform portion 16 that have been slid can be efficiently returned to the reference position.

(Second embodiment)

A workpiece positioning device 10B according to a second embodiment of the present invention will be described with reference to Figs. 6 to 10 . In the workpiece positioning device 10B of the present embodiment, the same components and functions as those of the above-described workpiece positioning device 10A are denoted by the same reference numerals, and detailed description thereof will be omitted. The same applies to the third embodiment to be described later.

As shown in FIGS. 6 to 10, the workpiece positioning device 10B is provided with a base portion 130 instead of the base portion 12. The outer peripheral surface of the base flange portion 132 constituting the base portion 130 is formed with notch portions 134 and 136 on both sides of the first opening 48.

A circular hole 140 communicating with the lock hole 44 is formed on the bottom surface of the recess 42 of the lock cylinder 138 constituting the base portion 130. Round hole The aperture system of 140 is formed to be larger than the aperture of the locking hole 44. That is, in the present embodiment, the cylinder chamber 142 is formed by the wall surface of the circular recess 32 constituting the base flange portion 132, the wall surface of the recess 42 constituting the lock cylinder 138, and the wall surface constituting the circular hole 140.

A piston 148 having an annular groove 146 formed on the outer peripheral surface thereof is disposed in the cylinder chamber 142, and the annular groove 146 is for mounting a ring-shaped magnet 144. The piston 148 is disposed to be slidable (displaceable) relative to the piston rod 150 in its axial direction. In the piston rod 150, an annular stopper (first restricting portion) 152 for restricting displacement of the piston 148 toward the one side of the piston rod 150 is fixed by a pair of stopper wheels 154 and 156. The thickness (the dimension in the axial direction) of the stopper portion 152 is formed to be larger than the depth of the circular hole 140.

Further, the displacement of the piston 148 with respect to the other side of the piston rod 150 is restricted by the flange portion (second restricting portion) 62 formed at the other end portion of the piston rod 150. That is, in the present embodiment, the piston 148 is displaceable relative to the piston rod 150 within a range between the flange portion 62 and the stopper portion 152.

Notches 158 and 160 are formed on the outer peripheral surface of the lock cylinder 138 and on both sides of the second opening 50 and the suction opening 76 which are provided in the axial direction of the piston rod 150. The notch portion 134 of the base flange portion 132 and the notch portion 158 of the locking cylinder 138 are in communication to form one arrangement hole 162, and the notch portion 136 of the base flange portion 132 and the notch portion 160 of the locking cylinder 138 are A plurality of distribution holes 164 are formed in communication. Position detecting sensors 166, 168 are disposed in the respective arrangement holes 162, 164, and the position detecting sensors 166, 168 are detected based on the magnetic field of the magnet 144 mounted on the piston 148. The position of the piston 148 in the axial direction (refer to Fig. 9).

In the present embodiment, the output signals of the position detecting sensors 166 and 168 are output to a control unit (not shown). When the piston 148 is located at one end side of the cylinder chamber 142, the control unit determines that the platform unit 16 is not. In the locked state, when the piston 148 is located on the other end side of the cylinder chamber 142, it is determined that the platform portion 16 is in the locked state.

In the workpiece positioning device 10B of the present embodiment, in the initial state, the compressed air is supplied to the first orifice 48 while the second orifice 50 is opened to the atmosphere, whereby the piston 148 is placed in the cylinder. One end side of the chamber 142 and the lock portion 114 are separated from the second ball contact plate 96. At this time, the piston 148 is in contact with the stopper portion 152, and the stopper portion 152 is in contact with the bottom surface constituting the circular hole 140.

In the present embodiment, when the platform portion 16 is switched from the non-locking state to the locked state, the compressed fluid is supplied to the second orifice 50 while the first orifice 48 is opened to the atmosphere. In this manner, the piston 148 is separated from the stopper portion 152 and displaced toward the other end side of the cylinder chamber 142 with respect to the piston rod 150. At this time, the piston rod 150 is not displaced in the axial direction.

Then, when the piston 148 is in contact with the flange portion 62, the piston 148, the piston rod 150 and the stopper portion 152 are displaced together toward the other end side of the cylinder chamber 142, and the locking portion 114 is in contact with the second ball contact plate 96. One surface 99 is pressed against the intermediate portion 14 side of the second ball contact plate 96. Thereby, since the frictional force is generated between the lock portion 114 and one surface 99 of the second ball contact plate 96, the platform portion 16 is directly locked with respect to the base portion 130 (see FIG. 10).

At this time, the pair of position detecting sensors 166 and 168 detect that the piston 148 is located at the other end side of the cylinder chamber 142 according to the magnetic field of the magnet 144 of the piston 148, and the control unit determines that the platform portion 16 is locked. . Therefore, it can be easily known that the platform portion 16 is in a locked state.

On the other hand, when the platform portion 16 is switched from the locked state to the non-locked state, the compressed fluid is supplied to the first orifice 48 while the second orifice 50 is opened to the atmosphere. Thus, the piston 148 is separated from the flange portion 62 and relatively displaced toward the one end side of the cylinder chamber 142 with respect to the piston rod 150. At this time, the piston rod 150 is not displaced in the axial direction.

Further, when the piston 148 is in contact with the stopper portion 152, the piston 148, the piston rod 150 and the stopper portion 152 are displaced together toward one end side of the cylinder chamber 142, and the lock portion 114 is separated from the second ball contact plate 96. The state in which the platform portion 16 is slidable relative to the base portion 130 is obtained.

At this time, the pair of position detecting sensors 166 and 168 detect that the piston 148 is located at one end of the cylinder chamber 142 according to the magnetic field of the magnet 144 attached to the piston 148, and the control unit determines that the platform portion 16 is not locked. . Therefore, it can be easily known that the platform portion 16 is in an unlocked state.

According to the present embodiment, the position of the lock portion 114 in the axial direction can be detected by detecting the position of the piston 148 of the cylinder chamber 142 in the axial direction by the pair of position detecting sensors 166 and 168. Thereby, the locked state and the non-locked state of the platform portion 16 by the lock portion 114 can be detected with a simple configuration.

Furthermore, since the piston 148 is relatively movable relative to the piston rod 150 in the axial direction between the stopper portion 152 and the flange portion 62 The stopper rod 150 is relatively displaced, so that the stroke length of the piston 148 can be made larger than the stroke length of the piston rod 150 (the pressing portion 18). Thereby, it is possible to suppress the enlargement of the workpiece positioning device 10B in the axial direction, and the pair of position detecting sensors 166 and 168 surely detect the change in the magnetic field of the magnet 144 caused by the displacement of the piston 148.

(Third embodiment)

Next, a workpiece positioning device 10C according to a third embodiment of the present invention will be described with reference to Figs. 11 to 15 . As shown in FIGS. 11 to 15, the workpiece positioning device 10C is provided with a base portion 170 instead of the base portion 12. The base flange portion 172 constituting the base portion 170 has its outer peripheral edge portion projecting toward the other side.

An annular projection 178 is formed on the bottom surface of the circular recess 32 of the base flange portion 172. The projection 178 has an insertion hole 176 in the center where the flange portion 62 of the piston rod 174 is inserted. An insertion hole 182 through which the convex portion 180 protruding from the other end surface of the piston rod 174 is inserted is formed on the bottom surface of the insertion hole 176, and a ring for mounting the spacer 184 is formed on the wall surface constituting the insertion hole 182. Groove 186.

Further, the workpiece positioning device 10C further includes a detecting portion (detecting means) 188 provided on the base flange portion 172 for detecting the locked state and the non-locked state of the platform portion 16. The detecting unit 188 has a detecting body (detecting piece) 190 extending in one direction intersecting the axial direction of the piston rod 174, a photo sensor 192 for detecting the position of the detecting body 190, and a protecting body 190 protective member 194.

The detecting body 190 is formed in a plate shape by a pair of bolts 196 is linearly extended to the front end portion from the base end portion fixed to the other surface of the base flange portion 172 via the curved portion 200 bent toward the side opposite to the piston rod 174. At the front end of the detecting body 190, a light blocking portion 202 for illuminating the light of the photo sensor 192 is formed. In the detecting body 190, a convex portion 180 formed on the piston rod 174 is abutted. In other words, since the detecting body 190 is fixed only to the base flange portion 172, the bending portion 200 is deflected in accordance with the displacement of the piston rod 174 in the axial direction, and the position of the light blocking portion 202 is displaced.

Further, the detecting body 190 is in the extending direction thereof, and the interval between the fulcrum (curved portion 200) and the acting point (contact portion with the convex portion 180) is set to be smaller than the interval between the fulcrum and the irradiation point (light blocking portion 202). Thereby, the displacement amount of the light shielding portion 202 is larger than the displacement amount of the action point (stroke of the piston rod 174).

The photo sensor 192 is fixed to the other surface of the base flange portion 172 by a pair of bolts 204. The photo sensor 192 is provided separately in a state where the light-emitting portion 206 and the light-receiving portion 208 face each other. A light blocking portion 202 provided at a front end portion of the detecting body 190 can be disposed between the light emitting portion 206 and the light receiving portion 208.

In the present embodiment, the output signal of the light receiving unit 208 is output to a control unit (not shown), and the control unit is configured to shield the light from the light-emitting unit 206 by the light-shielding unit 202 and to receive light from the light-receiving unit 208. It is determined that the platform unit 16 is in the unlocked state, and when the light from the light-emitting unit 206 is received by the light-receiving unit 208, it is determined that the platform unit 16 is in the locked state.

The photo sensor 192 can be configured arbitrarily, for example, The reflected light that is reflected by the light shielding unit 202 by the light receiving unit 208 is detected by the light receiving unit 208. The protective member 194 is fixed to the base flange portion 172 by a plurality of (four in the fourteenth) bolts 210.

In the workpiece positioning device 10C of the present embodiment, in the initial state, the compressed fluid is supplied to the first orifice 48 while the second orifice 50 is opened to the atmosphere, so that the piston 52 is placed in the cylinder. One end side of the chamber 46 is such that the lock portion 114 is separated from the second ball contact plate 96. At this time, in a state where the convex portion 180 of the piston rod 174 is in contact with the detecting body 190, the light blocking portion 202 is positioned between the light emitting portion 206 and the light receiving portion 208, and the light from the light emitting portion 206 is shielded from light.

In the present embodiment, when the platform portion 16 is switched from the non-locking state to the locked state, the compressed fluid is supplied to the second orifice 50 while the first orifice 48 is opened to the atmosphere. In this manner, the piston 52 is displaced toward the other end side of the cylinder chamber 46, and the lock portion 114 comes into contact with the one surface 99 of the second ball contact plate 96, and pushes the second ball contact plate 96 to the intermediate portion 14 side. . Thereby, since the frictional force acts between the lock portion 114 and one surface 99 of the second ball contact plate 96, the platform portion 16 is directly locked to the base portion 170 (see Fig. 15).

At this time, the convex portion 180 of the piston rod 174 pushes the detecting body 190 down to the opposite side of the locking cylinder 22. Thus, the curved portion 200 of the detecting body 190 is elastically deformed, and the light blocking portion 202 is displaced toward the opposite side of the locking cylinder 22. Thereby, since the light from the light-emitting unit 206 is guided to the light-receiving unit 208, the control unit determines that the platform unit 16 is in the locked state. Therefore, it can be easily known that the platform portion 16 is changed from the non-locking state to the locked state.

On the other hand, when the platform portion 16 is switched from the locked state to the non-locked state, the compressed fluid is supplied to the first orifice 48 while the second orifice 50 is opened to the atmosphere. In this manner, the piston 52 is displaced to one end side of the cylinder chamber 46, and the lock portion 114 is separated from the second ball contact plate 96 to be in a state where the platform portion 16 is slidable relative to the base portion 170.

At this time, the convex portion 180 of the piston rod 174 is displaced toward the lock cylinder 22 in a state of being in contact with the detecting body 190. As described above, the elastically deformed bent portion 200 returns to the present state, and the light blocking portion 202 is displaced toward the lock cylinder 22 side and is positioned between the light emitting portion 206 and the light receiving portion 208. Thereby, since the light from the light-emitting portion 206 is blocked by the light-shielding portion 202, the control unit determines that the platform portion 16 is in the non-locking state. Therefore, it can be easily known that the platform portion 16 is changed from the locked state to the non-locked state.

According to the present embodiment, since the position of the light shielding portion 202 of the detecting body 190 displaced together with the piston rod 174 is detected by the photo sensor 192, the pressing portion 18 provided on one end side of the piston rod 174 can be detected (locking) The position of the portion 114) in the axial direction. Thereby, the locked state and the non-locked state of the platform portion 16 due to the lock portion 114 can be detected by a simple configuration.

Further, in the extending direction of the detecting body 190, the detecting body 190 is disposed such that the distance between the fulcrum and the acting point is smaller than the interval between the fulcrum and the irradiation point, so that the displacement amount of the irradiation point can be made larger than the displacement amount of the action point (piston) The stroke of the rod 174 is large. Thereby, it is possible to surely detect the locked state and the non-locked state of the platform portion 16 due to the lock portion 114 while suppressing the enlargement of the workpiece positioning device 10C in the axial direction.

(Fourth embodiment)

Next, a workpiece positioning device 10D according to a fourth embodiment of the present invention will be described with reference to Figs. 16 to 21 .

The workpiece positioning device 10D includes a base portion 212, a first intermediate portion 214 that is slidable relative to the base portion 212, and a second intermediate portion 216 that is slidable relative to the first intermediate portion 214. a third intermediate portion 218 that is slidable relative to the second intermediate portion 216; a platform portion 220 that is slidably disposed relative to the third intermediate portion 218 and on which the workpiece is placed; and a locking platform portion 220 The pressing portion 222.

The base portion 212 has a base flange portion 224 which is a plate-like member having a substantially quadrangular shape in plan view, a lock cylinder 226 provided in the base flange portion 224, and an annular portion provided in the lock cylinder 226 1 Ball touches the plate 228.

An annular projection 230 that protrudes toward the lock cylinder 226 is formed on one surface of the base flange portion 224, and a circular recess 232 is formed inside the base flange portion 224. An annular groove is formed on the outer circumferential surface of the annular projection 230, and a base spacer 234 is attached, and a centering plate 236 is provided at the center of the circular recess 232 of the base flange portion 224. A circular first fixed center concave portion 238 is formed in the center of the centering plate 236, and the first fixed center concave portion 238 is formed by a curved surface or a tapered surface that is inclined toward the center from the outer edge portion. Further, the base flange portion 224 is formed with a suction port 240 for guiding the dust in the platform portion 220 to a dust removing device (not shown).

The locking cylinder 226 is composed of the following members; the cylindrical outer tubular portion 242 has an inner circumferential surface having a large diameter and an inner circumferential surface of a small diameter; and the disc-shaped portion 244 is formed from the inner circumferential surface of the small diameter. The end portion in the axial direction protrudes inward in the radial direction, and the inner tubular portion 246 protrudes downward in the axial direction from the end portion on the inner diameter side of the disk-shaped portion 244. The first ball contact plate 228 has an opening 248 at the center thereof, and is fitted and fixed to the inner circumferential surface of the large diameter so as to abut against one surface (upper surface) of the disk-shaped portion 244, and the outer cylindrical portion 242 is attached. One of the first ball contact plates 228 protrudes upward by a predetermined distance. An annular recessed portion 250 is formed in the locking cylinder 226, and the annular recessed portion 250 faces the base portion by the inner peripheral surface of the small diameter and the other surface of the disc-shaped portion 244 and the outer peripheral surface of the inner cylindrical portion 246. 212.

The piston 340 having the opening portion 252 at the center and the stepped portion formed on the outer circumferential surface and the inner circumferential surface is fitted and disposed in the circular concave portion 250 of the locking cylinder 226 and the circular concave portion of the base flange portion 224 232. On the other hand, the annular projection 230 of the base flange portion 224 is fitted to the inner circumferential surface of the small diameter of the lock cylinder 226. Thereby, the first pressure chamber 254 which is partitioned by one surface of the piston 340 and the annular recess 250 of the lock cylinder 226 is formed, and the step of the outer peripheral side of the piston 340 and the small diameter of the lock cylinder 226 are formed. The inner circumferential surface and the second pressure chamber 256 in which the annular projections 230 of the base flange portion 224 are spaced apart. The first orifice 258 for supplying/discharging the compressed fluid to the first pressure chamber 254 and the second orifice 260 for supplying/discharging the compressed fluid to the second pressure chamber 256 are formed in the lock cylinder 226 (Refer to Figure 16).

The locking cylinder 226 is connected to the annular recess 250. The outer circumferential surface and the inner circumferential surface of the piston 340 and the outer circumferential surface of the piston 340 of the base flange portion 224 that is in contact with the circular recess 232 are formed with annular grooves and piston pads 262, 264, and 266 are attached thereto. The inner circumferential surface of the small diameter of the piston 340, the inner circumferential surface of the inner cylindrical portion 246 of the lock cylinder 226, and the inner circumferential surface of the opening portion 248 of the first ball contact plate 228 form substantially continuous identical cylinders. Opening portion 268.

The first intermediate portion 214 includes a plurality of first balls 270 and an annular first cage 272 in which a plurality of holding holes are formed in a state in which the respective first balls 270 are rotatable. The first holder 272 is disposed such that each of the first balls 270 is in surface contact with one of the first ball contact plates 228, whereby the first intermediate portion 214 is slidable relative to one surface of the first ball contact plate 228. .

The second intermediate portion 216 has a thin cylindrical cylindrical cover 274 and an annular second ball contact plate 278 having a through hole 276 formed in the center. The second ball contact plate 278 is fixed to the cover cylinder 274 by a pair of stopper wheels 280 and 282 provided on the inner circumferential surface of the cover cylinder 274, and is formed at the outer peripheral end of the second ball contact plate 278. The 274 line protrudes perpendicularly from the one surface (the surface opposite to the first intermediate portion 214) and the other surface by a predetermined distance. The other surface of the second ball contact plate 278 is in contact with each of the first balls 270 in a state of being disposed substantially parallel to one surface of the first ball contact plate 228. Thereby, the second intermediate portion 216 is slidable in parallel with the first ball contact plate 228.

The third intermediate portion 218 includes a plurality of second balls 284 and a plurality of second balls 284 that are rotatably formed. A plurality of second retainers 286 that hold the annular shape of the holes. The second holder 286 is disposed such that each of the second balls 284 is in surface contact with one of the second ball contact plates 278, whereby the third intermediate portion 218 is slidable relative to one of the second ball contact plates 278. . The outer diameter of the second holder 286 is substantially the same as the outer diameter of the first holder 272.

The platform portion 220 has a top plate portion 288 as a platform main body, a cylindrical cover portion 290 protruding from the edge portion of the top plate portion 288 toward the third intermediate portion 218, and a stopper provided on the inner circumference of the cover portion 290. The annular third ball supported by the wheel 294 touches the plate 296. The third ball contact plate 296 has an opening 298 at the center, and one surface of the third ball contact plate 296 faces the other surface of the top plate portion 288 with a phase gap therebetween, and the third ball touches the other side of the plate 296. The second balls 284 are in contact with each other in a state substantially parallel to one surface of the second ball contact plate 278. Thereby, the platform portion 220 can slide in parallel with the second ball contact plate 278.

The lid portion 290 is attached to the outer peripheral end portion of the third ball contact plate 296, and protrudes from the other surface of the third ball contact plate 296 toward the third intermediate portion 218 by a predetermined distance. A workpiece is placed on one of the planes of the top plate portion 288. A circular center-shaped second centering concave portion 300 is formed substantially at the center of the other surface of the top plate portion 288, and a wall surface forming the second centering concave portion 300 is formed from the outer edge portion toward the center bottom portion of the top plate portion 288. It is inclined to a curved surface or a tapered surface on one surface side of the top plate portion 288. The outer diameter of the lid portion 290 is substantially the same as the outer diameter of the cover cylinder 274 of the second intermediate portion 216.

The pressing portion 222 includes a first shaft body 302 disposed inside the cylindrical opening portion 268 and a second shaft that is inserted into the second roller substantially without a gap. The bead touches the second shaft 304 of the through hole 276 of the plate 278.

A fitting hole 306 is formed at one end of the first shaft body 302, and a circular recess 232 of the base flange portion 224 is provided at the other end of the first shaft body 302 and is movable to the piston. The first locking flange portion 308 abuts on the other surface of the 340, and the first fitting hole 310 is formed. The first centering mechanism 312 for returning the second intermediate portion 216 to the reference position is disposed by the first arrangement hole 310.

The second lock flange portion 314 is provided at one end of the second shaft body 304, and the second arrangement hole 316 is formed. The second lock flange portion 314 is disposed on the top plate portion 288 and The third balls come into contact with each other between the plates 296 and can abut against one of the surfaces of the third ball contact plates 296. The second centering mechanism 318 for returning the platform portion 220 to the reference position with respect to the second intermediate portion 216 is disposed by the second arrangement hole 316. A support shaft 320 that is fitted into the fitting hole 306 of the first shaft body 302 is provided at the other end of the second shaft body 304. The second shaft body 304 is fixed to the first shaft body 302 through the gasket 322 by fitting the support shaft 320 into the fitting hole 306.

The first locking flange portion 308 has a larger outer diameter than the cylindrical opening portion 268, and one of the first locking flange portions 308 is substantially parallel to the other surface of the piston 340. The second locking flange portion 314 has a larger outer diameter than the opening portion 298 of the third ball contact plate 296, and the other surface of the second locking flange portion 314 is opposite to the third ball contacting plate 296. Roughly parallel.

The first centering mechanism 312 includes a first centering ball 324 that is rotated to form a first centering recess formed in the centering plate 236. 238; the first ball supporting portion 326 rotatably supports the first centering ball 324; and the first elastic member 328 is a coil spring that biases the first ball supporting portion 326 toward the base flange portion 224 side. Composition. The first centering ball 324 is positioned at the center of the first centering concave portion 238 in a state where the second intermediate portion 216 is returned to the reference position. The first elastic member 328 is interposed between the bottom surface of the first arrangement hole 310 and the first ball support portion 326 .

The second centering mechanism 318 includes a second centering ball 330 that is rotated by the second centering concave portion 300 formed in the top plate 288, and a second ball supporting portion 332 that rotatably supports the second centering ball. The second elastic member 334 is formed of a coil spring that biases the second ball supporting portion 330 toward the top plate portion 288 side. The second centering ball 330 is positioned at the center of the second centering concave portion 330 in a state where the platform portion 220 returns to the reference position with respect to the second intermediate portion 216. The second elastic member 334 is interposed between the bottom surface of the second arrangement hole 316 and the second ball support portion 332 .

A first elastic member 336 is interposed between the first holder 272 and the first shaft 302. Specifically, the first elastic member 336 composed of a coil spring is attached to the annular groove formed on the inner circumferential surface of the first holder 272 and the annular groove formed on the outer circumferential surface of the first shaft body 302. Therefore, even if the first intermediate portion 214 slides in any one of 360 degrees, the first intermediate portion 214 can be efficiently returned to the predetermined reference position. The second elastic member 338 is also interposed between the second holder 286 and the second shaft body 304, and even if the third intermediate portion 218 slides in any direction of 360°, The third intermediate portion 218 can be efficiently returned to a predetermined reference position.

The workpiece positioning device 10D of the present embodiment is configured as described above, and its operation and effects will be described below.

First, in the initial state, the workpiece positioning device 10D sets the platform portion 220 to the non-locking state. In other words, when the first orifice 258 is opened to the atmosphere, the compressed fluid is supplied to the second orifice 260, and the piston 340 is biased from the first locking flange portion 308 of the first shaft 302. Separation. Therefore, the first lock flange portion 308 does not receive the restraining force due to friction from either of the piston 340 and the base flange portion 224, and the second lock flange portion 314 of the second shaft body 304. It is also not possible to receive the restraining force due to friction from any of the third ball contact plate 296 and the top plate portion 288.

In the initial state, the first shaft body 302 is located at the center of the first centering concave portion 238 by the action of the first centering mechanism 312, and the second shaft body 304 functions by the second centering mechanism 318. Located in the center of the second centering recess 300. As a result, the base portion 212, the pressing portion 222, and the platform portion 220 are in a state in which the center is aligned as shown in FIG. 17, and the second ball contact plate 278 through which the second shaft body 304 is inserted substantially without a gap is provided. The second intermediate portion 216 is also in a state in which the base portion 212 and the platform portion 220 are aligned with the center. Therefore, as shown in FIGS. 16 and 17, the platform portion 220 and the second intermediate portion 216 are positioned at the base portion 212. At the center position, the outer peripheral surface of the lid portion 290 is substantially flush with the outer peripheral surface of the cover cylinder 274.

Further, as shown in FIG. 17, the first holder 272 is positioned by the first elastic member 336 and is positioned substantially the same as the first shaft 302. At the concentric position, the second holder 286 is located substantially concentric with the second shaft body 304 by the action of the second elastic member 338.

After the workpiece is placed on the top plate portion 288, the workpiece is pressed in a predetermined direction by a cylinder (not shown) to position the workpiece.

At this time, in the first intermediate portion 214, since the plurality of first balls 270 are rotated on one surface of the first ball contact plate 228, the first holder 272 slides while compressing the first elastic member 336. The sliding of the first intermediate portion 214 with respect to the base portion 212 is restricted by the outer circumferential surface of the first holder 272 abutting against the inner circumferential surface of the cylindrical portion 242 outside the lock cylinder 226.

In addition, the second intermediate portion 216 is rotated by the first ball contacting plate 228 while being integrated with the pressing portion 222 while rotating the plurality of first balls 270 by the second ball contacting plate 278. The sliding of the second intermediate portion 216 with respect to the first intermediate portion 214 is restricted by the contact of the cover tube 274 from the other surface of the second ball contact plate 278 against the outer circumference of the first holder 272.

Further, in the third intermediate portion 218, since the plurality of second balls 284 are rotated on one surface of the second ball contact plate 278, the second holder 286 slides while compressing the second elastic member 338. The sliding of the third intermediate portion 218 with respect to the second intermediate portion 216 is restricted by the contact of the outer circumference of the second holder 286 with the portion of the cover cylinder 274 that protrudes from the surface of the second ball contact plate 278.

Further, the platform portion 220 rotates the plurality of second balls 284 by the third ball contact plate 296, and the second ball touches the plate. 278 slides in parallel. The sliding of the platform portion 220 with respect to the third intermediate portion 218 is restricted by the contact of the portion of the lid portion 290 protruding from the other surface of the third ball contacting plate 296 with the outer circumference of the second holder 286.

Therefore, the amount of sliding of the first intermediate portion 214 with respect to the base portion 212, the amount of sliding of the second intermediate portion 216 with respect to the first intermediate portion 214, the amount of sliding of the third intermediate portion 218 with respect to the second intermediate portion 216, and the platform The amount of sliding of the portion 220 with respect to the third intermediate portion 218 is the amount of displacement of the platform portion 220 with respect to the base portion 212. In the present embodiment, the four types of sliding amounts are substantially the same.

Further, the outer circumference of the first holder 272 abuts against the inner circumferential surface of the cylindrical portion 242 outside the lock cylinder 226, and the portion of the cover cylinder 274 that protrudes from the other surface of the second ball contact plate 278 and the first portion When the outer periphery of the holder 272 is in contact with each other, the outer peripheral surface of the first shaft body 302 is in contact with the cylindrical opening portion 268.

When the positioning of the workpiece is completed, the compressed fluid is supplied to the first orifice 258 while the second orifice 260 is opened to the atmosphere. In this manner, the piston 340 presses the first locking flange portion 308 of the first shaft body 302 toward the bottom surface of the circular recess portion 232 of the base flange portion 224, and is also fixed to the second shaft body 304 of the first shaft body 302. Moving toward the base flange portion 224 side, the second lock flange portion 314 of the second shaft body 304 is pressed against the third ball contact plate 296 of the platform portion 220. Therefore, the platform portion 220 is frictionally engaged with the second lock flange portion 314 by the third ball contact plate 296 and the frictional engagement of the first lock flange portion 308 with the piston 340 or the base flange portion 224. The base portion 212 is fixed to fix the positioned workpiece.

According to the present embodiment, the movable space of the pressing portion 222 that slides integrally with the second intermediate portion 216 is formed inside the base portion 212 including the inside of the cylindrical opening portion 268, and the platform portion 220 is opposed to the second intermediate portion. Since the movable space of the portion 216 is formed inside the platform portion 220, the amount of sliding of the platform portion 220 with respect to the base portion 212 can be increased, and the movable space that expands in the sliding direction can be made smaller, and the workpiece positioning device can be realized. Further miniaturization.

Further, the first intermediate portion 214, the second intermediate portion 216, and the third intermediate portion 218 are provided, and the first intermediate portion 214 has the first ball 270 that is in contact with the first ball contact plate 228 of the base portion 212. And a first holder 272 that rotatably holds the first ball 270, and the second intermediate portion 216 has a second ball contact plate 278 that is in contact with the first ball 270 and the second ball 284, and the third The intermediate portion 218 has a second ball 284 that comes into contact with the third ball contact plate 296 of the platform portion 220 and a second holder 286 that rotatably holds the second ball 284. Therefore, the sliding operation of the first intermediate portion 214, the second intermediate portion 216, and the third intermediate portion 218 can be smoothly performed.

Further, the cover cylinder 274 that can abut against the outer circumferential surface of the first holder 272 and the outer circumferential surface of the second holder 286 is provided on the second ball contact plate 278 and protrudes from the first ball contact plate 228. The protruding portion that is in contact with the outer peripheral surface of the first holder 272 (one portion of the outer tubular portion 242) is provided on the base portion 212, and the lid portion 290 can abut against the outer peripheral surface of the second holder 286, so that the cover portion 290 can be easily The sliding operation of the first intermediate portion 214 with respect to the base portion 212 and the sliding of the second intermediate portion 216 with respect to the first intermediate portion 214 The moving operation, the sliding operation of the third intermediate portion 218 with respect to the second intermediate portion 216, and the sliding operation of the platform portion 220 with respect to the third intermediate portion 218 are respectively limited to a predetermined amount.

Further, since the first locking flange portion 308 for locking the first shaft body 302 to the base portion 212 is provided in the first shaft body 302, the platform portion 220 is supported by the second locking flange portion. The frictional engagement of the 314 (plate portion) and the frictional engagement of the first locking flange portion 308 are directly locked to the base portion 212.

Further, the second shaft body 304 is provided with the second centering mechanism 318 that is inserted into the second ball contact plate 278 with substantially no gap, and returns the first shaft body 302 to the reference position with respect to the base portion 212. The pressing portion 222 and the second intermediate portion 216 are returned to the reference position with high accuracy.

(Fifth Embodiment)

Next, the workpiece positioning device 10E according to the fifth embodiment of the present invention will be described with reference to Figs. 22 and 23. In the workpiece positioning device 10E of the present embodiment, the same or similar components as those of the above-described workpiece positioning device 10D are denoted by the same reference numerals, and detailed description thereof will be omitted.

A slider 342 that abuts against the piston 340 is slidably provided in the opening portion 241 of the base flange portion 224 including the suction orifice. A plurality of compression springs 344 are disposed between the bottom surface of the recess formed in the slider 342 and the base flange portion 224 to bias the slider 342 toward the piston 340.

The first holder 272 is attached to the inner peripheral surface of the cover cylinder 274. The facing region has a level flange portion 273 that protrudes outward. The cover cylinder 274 is provided with a level flange portion 275 that protrudes inward, and the second ball contact plate 278 is sandwiched between the stopper wheel 282 and the level flange portion 275 provided on the inner circumferential surface of the cover cylinder 274. And fixed to the cover cylinder 274. The second ball contact plate 278 is attached to the second shaft body 304 through the boss 213. The second holder 286 is provided with a level flange portion 287 that protrudes outward in a region facing the inner circumferential surface of the lid portion 290.

An annular first L-shaped cover portion 215 that is slidable in parallel with the first ball contact plate 228 is provided between the base portion 212 and the first holder 272. The first L-shaped cover portion 215 is composed of a vertical cylindrical portion 345 and a level flange portion 346, and the inner circumferential surface of the vertical cylindrical portion 345 is a portion where the horizontal flange portion 273 of the first holder 272 is not formed. The outer peripheral surface faces each other, and the outer peripheral surface of the vertical cylindrical portion 345 faces the inner peripheral surface of the outer cylindrical portion 242 of the lock cylinder 226 which protrudes from one surface of the first ball contact plate 228. The level flange portion 346 of the first L-shaped cover portion 215 is placed on the outer tubular portion 242, and the level flange portion 273 of the first holder 272 has a slight gap with the edge portion of the cover cylinder 274.

An annular second L-shaped cover portion 217 that is slidable in parallel with the second ball contact plate 278 is provided between the second intermediate portion 216 and the second holder 286. The second L-shaped cover portion 217 is composed of a vertical cylindrical portion 347 and a level flange portion 348, and the inner circumferential surface of the vertical cylindrical portion 347 is a portion where the horizontal flange portion 287 of the second holder 286 is not formed. The outer peripheral surface faces each other, and the outer peripheral surface of the vertical cylindrical portion 347 faces the inner peripheral surface of the level flange portion 275 of the cover cylinder 274. Level flange portion of the second L-shaped cover portion 217 The 348 is placed on the level flange portion 275 of the cover cylinder 274, and the edge portion of the level flange portion 287 and the lid portion 290 of the second holder 286 has a slight gap.

The first centering mechanism 313 includes a first centering ball 324 and a first biasing member 328 that biases the first centering ball 324 toward the base flange portion 224 side. In the center of the centering plate 236, a first centering concave portion 239 having a circular shape formed by a curved surface or a tapered surface inclined at a large angle toward the center is formed. The first centering ball 324 is located at the center of the first centering concave portion 239 in a state where the second intermediate portion 216 is returned to the reference position. The first elastic member 328 is interposed between the bottom surface of the first arrangement hole 310 and the first centering ball 324.

The second centering mechanism 319 includes a second centering ball 330 and a second biasing member 334 that biases the second centering ball 330 toward the top plate portion 288 side. In the center of the top plate portion 288, a circular second centering concave portion 301 which is formed by a tapered surface formed by a curved surface or a tapered surface which is inclined at a large angle toward the center is formed. The second centering ball 330 is positioned at the center of the second centering concave portion 301 in a state where the platform portion 220 returns to the reference position with respect to the second intermediate portion 216. The second elastic member 334 is interposed between the bottom surface of the second arrangement hole 316 and the second centering ball 330.

A third elastic member 219 composed of a coil spring is attached between the lock cylinder 226 and the first shaft body 302, and a coil spring is attached between the platform portion 220 and the second lock flange portion 314. The fourth elastic member 221 is constituted. Therefore, even the second intermediate portion 216 and the platform portion When the 220 slides in any direction of 360°, the second intermediate portion 216 and the platform portion 220 can be efficiently returned to the predetermined reference position.

In the workpiece positioning device 10E of the present embodiment, when the workpiece positioning is performed, the operation is performed as follows.

The first intermediate portion 214 slides as the first ball 270 rotates on the surface of the first ball contact plate 228. At this time, since the first holder 272 of the first intermediate portion 214 abuts against the vertical cylindrical portion 345 of the first L-shaped cover portion 215, the first L-shaped cover portion 215 also slides integrally. When the first intermediate portion 214 and the pressing portion 222 are relatively displaced, the first elastic member 336 is elastically deformed. The sliding of the first intermediate portion 214 with respect to the base portion 212 is such that the first holder 272 sandwiches the vertical cylindrical portion 345 of the first L-shaped cover portion 215 and abuts against the locking cylinder 226. And is limited.

As the first ball 270 rotates on the surface of the second ball contact plate 278, the second intermediate portion 216 is integrated with the pressing portion 222 and slides in parallel with the first ball contact plate 228. At this time, the third elastic member 219 is elastically deformed. The sliding of the second intermediate portion 216 with respect to the first intermediate portion 214 is restricted by the contact of the cover cylinder 274 with the level flange portion 273 of the first holder 272.

The third intermediate portion 218 slides as the second ball 284 rotates on the surface of the second ball contact plate 278. At this time, since the second holder 286 abuts against the vertical cylindrical portion 347 of the second L-shaped lid portion 217, the second L-shaped lid portion 217 also slides integrally. When the third intermediate portion 218 and the pressing portion 222 are relatively displaced, the second elastic member 338 is elastically deformed. The third intermediate portion 218 slides relative to the second intermediate portion 216 due to the second cage The 286 is restrained by sandwiching the vertical cylindrical portion 347 of the second L-shaped cover portion 217 therebetween and abutting against the level flange portion 275 of the cover cylinder 274.

The platform portion 220 slides in parallel with the second ball contact plate 278 as the second ball 284 rotates on the surface of the third ball contact plate 296. At this time, when the platform portion 220 and the pressing portion 222 are relatively displaced, the fourth elastic member 221 is elastically deformed. The sliding of the platform portion 220 with respect to the third intermediate portion 218 is restricted by the contact of the lid portion 290 with the level flange portion 287 of the second holder 286.

Even if the second intermediate portion 216 slides, the first L-shaped cover portion 215 is present, so that the upper surface of the first ball contact plate 228 is not exposed. Further, even if the platform portion 220 slides, the second L-shaped cover portion 217 is present, so that the upper surface of the second ball contact plate 278 is not exposed. Thereby, it is possible to suppress the intrusion of dust into the inside of the workpiece positioning device 10E as much as possible.

Further, even when the first intermediate portion 214 and the second intermediate portion 216 are slid at the maximum extent, the first locking flange portion 308 and the first shaft body 302 are not in contact with the base portion 212 or the piston 340 in the sliding direction. . Further, even when the first intermediate portion 214, the second intermediate portion 216, the third intermediate portion 218, and the platform portion 220 are respectively slid at the maximum extent, the second locking flange portion 314 and the second shaft body 304 are not opposed to each other. The platform portion 220 abuts in the sliding direction.

In the present embodiment, when the positioned platform portion 220 is returned to the non-locking state, the second intermediate portion 216 functions quickly and accurately by the third elastic member 219 and the first centering mechanism 313. Return to the initial position. Furthermore, the platform portion 220 is supported by the fourth elastic member 221 And the action of the second centering mechanism 319 returns to the initial position quickly and accurately.

(Sixth embodiment)

Next, a workpiece positioning device 10F according to a sixth embodiment of the present invention will be described with reference to Figs. 24 and 25.

The workpiece positioning device 10F includes a base portion 350, an intermediate portion 352 that is slidable relative to the base portion 350, a platform portion 354 that is slidable relative to the intermediate portion 352, and a locking portion of the platform portion 354. The pressing portion 356 of the base portion 350.

The base portion 350 has a base flange portion 358, a lock cylinder 360, and an annular first ball contact plate 362.

On one surface of the base flange portion 358, an annular projection 364 that protrudes toward the lock cylinder 360 side is formed, and a circular recess 366 is formed inside thereof. A centering plate 368 is disposed at the center of the circular recess 366. In the center of the centering plate 368, a first shape of a circular shape formed by a curved surface or a tapered surface inclined at a large angle toward the center is formed. Central recess 370. A suction port for guiding the dust in the land portion 354 to a dust removing device (not shown) is formed in the base flange portion 358, and an opening portion 372 of the base flange portion 358 including the suction port is formed. A slider 376 that abuts against the piston 374 is slidably provided. A plurality of compression springs 378 are disposed between the bottom surface of the recess formed in the sliding portion 376 and the base flange portion 358, and the slider 376 is pressed toward the piston 374.

The lock cylinder 360 is a disk-shaped outer tubular portion 380 and a disk-shaped portion that protrudes inward in the radial direction from the axial end portion of the outer tubular portion 380. 382 and an inner cylindrical portion 384 which protrudes downward in the axial direction from the inner diameter side end portion of the disk-shaped portion 382. An annular projection 386 that protrudes toward the intermediate portion 352 is formed on one surface of the outer tubular portion 380. The first ball contact plate 362 has an opening at the center, and is fitted and fixed to the inner circumferential surface of the annular projection 386 to abut against one surface of the disc-shaped portion 382. An annular recess is formed in the lock cylinder 360, and the annular recess is convex toward the base by the inner circumferential surface of the outer tubular portion 380 and the other surface of the disc-shaped portion 382 and the outer peripheral surface of the inner tubular portion 384. Edge 358.

The piston 374 has an opening at the center, and a stepped portion is formed on each of the outer circumferential surface and the inner circumferential surface. The piston 374 is fitted to the annular recessed portion of the lock cylinder 360 and the circular recessed portion 366 of the base flange portion 358, and the annular projection 364 of the base flange portion 358 is fitted. The inner circumferential surface of the cylindrical portion 380 is outside the locking cylinder 360. Thereby, the first pressure chamber 388 which is partitioned by one surface of the piston 374 and the annular recessed portion of the lock cylinder 360 is formed, and the outer peripheral side step portion of the piston 374 and the outer cylindrical portion of the lock cylinder 360 are formed. The inner circumferential surface of 380 and the second pressure chamber 390 partitioned by the annular projection 364 of the base flange portion 358.

An outer circumferential surface of the piston 374 that is in contact with the annular recessed portion of the locking cylinder 360 and an inner circumferential surface, and an outer circumferential surface of the piston 374 that is in contact with the circular concave portion 366 of the base flange portion 358 are formed, respectively. The annular groove is provided with spacers 392a, 392b, and 392c. A stepped groove is formed at an end portion of the cylindrical portion 380 outside the lock cylinder 360 adjacent to the annular projection 364 of the base flange portion 358, and a gasket 392d is attached.

The intermediate portion 352 has: a plurality of balls 394; a circular plate The retainer 396 is formed with a plurality of holding holes that are disposed in a state in which the respective balls 394 are rotatable, and has a through hole at the center; and the L-shaped cover portion 398 is fitted to the outer peripheral surface of the retainer 396. The L-shaped cover portion 398 is formed by forming a tubular portion 400 that protrudes toward the outer periphery of the annular disk with the base portion 350. The holder 396 is disposed such that each of the balls 394 is in surface contact with one of the first ball contact plates 362, whereby the intermediate portion 352 is slidable relative to the first ball contact plate 362.

An annular S-shaped cover portion 402 that is slidable in parallel with the first ball contact plate 362 is provided between the lock cylinder 360 and the L-shaped cover portion 398. The S-shaped cover portion 402 is formed with a first tubular portion 404 that protrudes toward the outer peripheral edge of the annular disk toward the base portion 350, and a second cylindrical portion 406 that protrudes toward the inner peripheral edge of the L-shaped cover portion 398 is formed. And the constituents. The S-shaped cover portion 402 can abut against the outer circumference of the annular projecting portion 386 of the lock cylinder 360 on the inner circumference of the first tubular portion 404, and can abut on the inner circumference of the second tubular portion 406. The outer circumference of the cage 396.

The platform portion 354 has a top plate portion 408, a cylindrical cover portion 410 that protrudes from the edge portion of the top plate portion 408 toward the intermediate portion 352, and a ring that supports the inner circumference of the cover portion 410 by the stopper wheel 412. The second ball of the shape touches the plate 414. The second ball contact plate 414 has an opening in the center, and one surface of the second ball contact plate 414 faces the other surface of the top plate portion 408 with a gap therebetween, and the other surface of the second ball contact plate 414 is coupled to the other surface. Each of the balls 394 is in contact with one of the first ball contact plates 362 in a substantially parallel state. Thereby, the platform portion 354 can slide in parallel with the first ball contact plate 362. The cover portion 410 is attached to the outer peripheral end portion of the second ball contact plate 414, The other side of the second ball contact plate 414 protrudes toward the intermediate portion 352 by a predetermined distance. A workpiece (not shown) is placed on one surface of the top plate portion 408. At a substantially center of the other surface of the top plate portion 408, a second centering concave portion 416 having a circular curved surface or a tapered surface that is inclined at a large angle toward the center is formed.

The pressing portion 356 includes a first shaft body 418 disposed inside the base portion 350 through an opening portion of the piston 374 and an opening portion of the first ball contact plate 362, and an opening through the second ball contact plate 414 The second shaft body 420 of the portion. A fitting hole 422 is formed at one end of the first shaft body 418, and a circular recess 366 of the base flange portion 358 is provided at the other end of the first shaft body 418 to be coupled to the piston. The first locking flange portion 424 abuts on the other surface of the 374, and the first fitting hole 426 is formed. The first centering mechanism 428 for returning the intermediate portion 352 to the reference position is disposed by the first arrangement hole 426. The second end of the second shaft body 420 is provided with a second lock that is disposed between the top plate portion 408 and the second ball contact plate 414 and that can abut against one of the second ball contact plates 414. The flange portion 430 is formed with a second arrangement hole 432. The second centering mechanism 434 for returning the platform portion 354 to the reference position with respect to the intermediate portion 352 is disposed by the second arrangement hole 432. A support shaft 436 is provided at an end of the other side of the second shaft body 420. The second shaft body 420 is inserted into the through hole of the holder 396 without a gap, and the support shaft 436 of the second shaft body 420 is fitted into the fitting hole 422 of the first shaft body 418.

The first centering mechanism 428 has the first centering ball 438 and the first centering ball 438 is biased toward the base flange portion 358 side. The first biasing member 440. The first centering ball 438 is positioned at the center of the first centering recess 370 in a state where the intermediate portion 352 is returned to the reference position. The second centering mechanism 434 has a second biasing member 444 that biases the second centering ball 442 and the second centering ball 442 toward the top plate portion 408 side. The second centering ball 442 is positioned at the center of the second centering recess 416 in a state where the land portion 354 is returned to the reference position with respect to the intermediate portion 352.

A first elastic member 446 composed of a coil spring is attached between the lock cylinder 360 and the first shaft body 418, and a spiral is attached between the platform portion 354 and the second lock flange portion 430. The second elastic member 448 formed by the spring. Further, a third elastic member 450 composed of a coil spring is attached to the annular space formed between the S-shaped cover portion 402 and the L-shaped cover portion 398.

The workpiece positioning device 10F of the present embodiment is configured as described above, and its operation and effects will be described below.

First, in the initial state, the workpiece positioning device 10F sets the platform portion 354 in an unlocked state in advance. That is, when the first pressure chamber 388 is placed in the open state of the atmosphere and the compressed fluid is supplied to the second pressure chamber 390, the fluid pressure is caused by the compression spring 378 together with the pressing force from the slider 376. Acting, and the piston 374 is surely separated from the first locking flange portion 424.

At this time, the first shaft body 418 is positioned at the center of the first centering concave portion 370 by the action of the first elastic member 446 and the first centering mechanism 428, and the second shaft body 420 is provided by the second elastic member 448. And 2nd The centering mechanism 434 functions as a center of the second centering recess 416. Thereby, as shown in Fig. 24, the platform portion 354 and the intermediate portion 352 are positioned at the center of the base portion 350. Further, the S-shaped cover portion 402 holds the L-shaped cover portion 398 and the concentric position by the action of the third elastic member 450, and the outer peripheral surfaces of the L-shaped cover portion 398, the S-shaped cover portion 402, and the lock cylinder 360 The system is roughly flush.

After the workpiece is placed on the top plate portion 408, the workpiece is pressed in a predetermined direction by a cylinder (not shown) to position the workpiece.

At this time, as each of the balls 394 is rotated on the surface of the first ball contact plate 362, the intermediate portion 352 also slides together with the pressing portion 356, and the first elastic member 446 is elastically deformed. The intermediate portion 352 slides with respect to the base portion 350, and the forward end of the retainer 396 in the sliding direction abuts against the second tubular portion 406 of the S-shaped cover portion 402, and the first tubular portion 404 of the S-shaped cover portion 402 It will be restricted on the opposite side from the annular projection 386 of the locking cylinder 360.

Further, as each of the balls 394 is rotated on the surface of the second ball contact plate 414, the land portion 354 slides in parallel with the first ball contact plate 362. When the platform portion 354 and the pressing portion 356 are relatively displaced, the second elastic member 448 is elastically deformed. The sliding of the platform portion 354 with respect to the intermediate portion 352 is restricted by the contact of the lid portion 410 with the retainer 396.

As shown in Fig. 25, when the intermediate portion 352 and the platform portion 354 slide at the maximum extent, the third elastic member 450 is elastically deformed by a predetermined amount, and the L-shaped cover portion 398 is eccentric with respect to the S-shaped cover portion 402 in the sliding direction. Even if the platform portion 354 slides at the maximum amplitude, there is an L-shaped cover portion 398 Since the upper surface of the first ball contact plate 362 is not exposed, the upper surface of the first ball contact plate 362 is not exposed, and dust can be prevented from entering the inside of the workpiece positioning device 10F as much as possible.

Further, in the present embodiment, even when the intermediate portion 352 slides at the maximum extent, the first lock flange portion 424 and the first shaft body 418 do not abut against the base portion 350 or the piston 374 in the sliding direction. Further, even when the intermediate portion 352 and the platform portion 354 are slid at the maximum extent, the second locking flange portion 430 and the second shaft body 420 do not abut against the platform portion 354 in the sliding direction.

After the positioning of the workpiece is completed, when the second pressure chamber 390 is placed in the open air state and the compressed fluid is supplied to the first pressure chamber 388, the piston 374 faces the first locking flange portion 424 toward the base flange portion. When the 358 is pressed, the second locking flange portion 430 is pressed toward the second ball contact plate 414. Therefore, the platform portion 354 is frictionally engaged with the second lock flange portion 430 by the second ball contact plate 414 and the frictional engagement of the first lock flange portion 424 with the piston 374 or the base flange portion 358. And fixed to the base portion 350.

Then, when the workpiece is transferred from the top plate portion 408 and the platform portion 354 is returned to the non-locking state, the intermediate portion 352 is fast and accurate by the action of the first elastic member 446 and the first centering mechanism 428. Return to the initial position. Further, the platform portion 354 is quickly and accurately returned to the initial position by the action of the second elastic member 448 and the second centering mechanism 434.

The workpiece positioning device of the present invention is not limited to the above In the embodiment, it is of course possible to adopt various configurations without departing from the gist of the invention.

Claims (22)

A workpiece positioning device for a dust-free process, which is a device for positioning and fixing a workpiece, comprising: a base portion (12, 130, 170, 212, 350) having a flat surface; and an intermediate portion (14, 214, 216) , 218, 352), slidably disposed on the plane; the platform portion (16, 220, 354) has a parallel to the plane and is opposite to the intermediate portion (14, 214, 216, 218, 352) a sliding plate portion (96, 296, 414) on which the workpiece is placed; a shaft portion extending in a direction orthogonal to the plane; and a pressing portion (18, 222, 356) provided on the shaft portion One end side of the shaft portion extends outward in the diameter direction of the shaft portion, and one of the plate-like portions (96, 296, 414) is pressed against the side of the intermediate portion (14, 214, 216, 218, 352) to Locking the platform portion (16, 220, 354); the pistons (52, 148, 340, 374) are disposed on the base portion (12, 130, 170, 212, in a state in which the shaft portion can be pressed in the axial direction) And a biasing means interposed between the pressing portion (18, 222, 356) and the platform portion (16, 220, 354), and The platform portion (16, 220, 354) is returned to the reference position; wherein the platform portion (16, 220, 354) has a platform body (98, disposed on one side of the pressing portion (18, 222, 356) 288, 408), and disposed on the platform body (98, 288, 408) and extended to The tubular portion (92, 290, 410) on the outer side in the radial direction of the intermediate portion (14, 214, 216, 218, 352) is provided by the platform body (98, 288, 408) and the cover portion (92). 290, 410) to form a movable space in which the pressing portions (18, 222, 356) are relatively displaced. The workpiece positioning device for a dust-free process according to claim 1, wherein the intermediate portion (14, 352) has the aforementioned plane and the aforementioned base portion (12, 130, 170, 350) Balls (84, 394) that are in contact with the other surface of the plate-like portion (96, 414); and retainers (88, 396) formed with holding holes that are disposed in a state in which the balls (84, 394) are rotatable. The workpiece positioning device for a dust-free process according to claim 1, wherein the piston (148) is disposed to be displaceable relative to the shaft portion along an axial direction of the shaft portion, and the shaft is a first restricting portion (152) that restricts displacement of the piston (148) toward the one side of the shaft portion is formed, and a second restricting portion that restricts displacement of the piston (148) toward the other side of the shaft portion ( 62). The workpiece positioning device for a dust-free process according to the first aspect of the invention is provided between the intermediate portion (14, 214, 218) and the shaft portion and configured to make the intermediate portion (14, 214, 218) returning to the elastic member (90, 336, 338) such as a coil spring at the reference position. The workpiece positioning device for a dust-free process according to the first aspect of the invention, wherein the shaft portion is movable in a direction orthogonal to an axis, and the intermediate portion (216, 352) is integral with the shaft portion. Ground and the above The faces slide in parallel. A workpiece positioning device for a dust-free process according to claim 5, further comprising: interposed between the base portion (212, 350) and the shaft portion for making the intermediate portion (216, 352) Returning to the elastic members (219, 446) such as coil springs at the reference position. A workpiece positioning device for a dust-free process according to claim 5, comprising a centering mechanism (312, 313, 428) for returning the shaft portion to a reference position with respect to the base portion (212, 350). . The workpiece positioning device for a dust-free process according to claim 5, wherein the intermediate portion (352) has a plane opposite to the base portion (350) and the plate portion (414) a ball (394) that is in contact with one side; a retainer (396) having a retaining hole disposed in a state in which the ball (394) is rotatable; and an L-shaped cap that is fitted to the outer periphery of the retainer (396) (398); and an S-shaped cover portion (402) slidable parallel to the plane is provided between the base portion (350) and the L-shaped cover portion (398). The workpiece positioning device for a dust-free process according to claim 8, wherein the intermediate portion (352) slides relative to the base portion (350) by the cage (396) and the aforementioned S The cover portion (402) abuts and the S-shaped cover portion (402) is in contact with the base portion (350) to be restricted. The workpiece positioning device for a dust-free process according to claim 9 is provided between the L-shaped cover portion (398) and the S-shaped cover portion (402) and configured to make the S-type The cover portion (402) returns to the reference position An elastic member (450) such as a coil spring. The workpiece positioning device for a dust-free process according to any one of claims 1 to 10, wherein the biasing means is an elastic member (100, 221, 448) such as a coil spring. The workpiece positioning device for a dust-free process according to any one of claims 1 to 10, wherein the biasing means comprises: rotating on the other side of the platform body (98, 288) a center ball (120, 330); a ball support portion (122, 332) that supports the centering ball (120, 330) in a rotatable manner; and a ball support portion (122, 332) and the pressing portion (18, 222) between the ball supporting portions (122, 332) biasing toward the platform body (98, 288) side of the elastic members (124, 334); on the other side of the platform body (98, 288) A recess (106, 300) is formed to guide the center of the aforementioned platform body (98, 288) to the centering ball (120, 330). The workpiece positioning device for a dust-free process according to any one of claims 1 to 10, further comprising a lock for detecting the platform portion (16) caused by the pressing portion (18) Detection means for solid state and non-locking state. The workpiece positioning device for a dust-free process according to claim 13, wherein the base portion (130) is formed with a cylinder chamber in which the piston (148) is disposed, and the detecting means has: Outside the aforementioned piston (148) a circumferential surface magnet (144); and a position detecting sensor (166, 168) that detects the position of the piston (148) in the axial direction based on the magnetic field of the magnet (144). The workpiece positioning device for a dust-free process according to claim 13, wherein the detecting means has: a detecting body (190) displaced together with the shaft portion; and detecting the detecting body (190) ) The position of the light sensor (192). The workpiece positioning device for a dust-free process according to claim 15, wherein the shaft portion is formed with a convex portion (180) that is in contact with the detecting body (190), and the detecting body (190) is attached thereto. The base portion (170) is supported in a state of extending in a direction intersecting the axial direction of the shaft portion, and a fulcrum of the detecting body (190) and the convex portion are formed in a direction in which the detecting body (190) extends. (180) The interval between the point of action of the contact is set to be smaller than the interval between the irradiation point where the light of the photosensor (192) is irradiated and the fulcrum. The workpiece positioning device for a dust-free process according to any one of claims 1 to 10, wherein the base portion (12, 130, 170, 212) is formed to use the platform portion ( The dust in 16, 220) is led to the suction orifices (76, 240) of the dust removal device. The workpiece positioning device for a dust-free process according to the first aspect of the invention, wherein the intermediate portion includes a first intermediate portion (214), a third intermediate portion (218), and a second intermediate portion (216) , the first intermediate part (214) The first ball (270) having contact with the plane of the base portion (212) and the first holder (272) having a holding hole disposed in a state in which the first ball (270) is rotatable The third intermediate portion (218) has a second ball (284) that is in contact with the other surface of the plate-like portion (296), and a second ball (284) that is rotatably formed in the second ball (284). The second holder (286) holding the hole, the second intermediate portion (216) having a contact plate (278) that is in contact with the first ball (270) and the second ball (284). The workpiece positioning device for a dust-free process according to claim 18, wherein the contact plate (278) is provided with an outer peripheral surface of the first holder (272) and the second holder (286) a cover cylinder (274) that abuts on the outer circumferential surface, and the base portion (212) is provided with a protruding portion that protrudes from the plane and is abuttable against an outer circumferential surface of the first holder (272), and the cover The portion (290) is in contact with the outer peripheral surface of the second holder (286). The workpiece positioning device for a dust-free process according to claim 18, wherein a slidable portion parallel to the plane is provided between the base portion (212) and the first holder (272) The 1L type cover portion (215) is provided with a second L-shaped cover portion (217) that is slidable in parallel with the contact plate (278) between the second intermediate portion (216) and the second holder (286). ). The workpiece positioning device for a dust-free process according to claim 20, wherein the sliding of the first intermediate portion (214) with respect to the base portion (212) is performed by the first holder (272) The first L-shaped cover portion (215) is restricted from abutting against the base portion (212), and the sliding of the third intermediate portion (218) with respect to the second intermediate portion (216) is performed by the second The holder (286) is restricted from being in contact with the second intermediate portion (216) via the second L-shaped cover portion (217). The workpiece positioning device for a dust-free process according to any one of claims 18 to 21, wherein the shaft portion is inserted into the abutting plate (278) substantially without a gap, and the aforementioned The workpiece positioning device includes a centering mechanism (312, 313) that returns the shaft portion to the reference position with respect to the base portion (212).