TWI619883B - Pumping device - Google Patents
Pumping device Download PDFInfo
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- TWI619883B TWI619883B TW102109327A TW102109327A TWI619883B TW I619883 B TWI619883 B TW I619883B TW 102109327 A TW102109327 A TW 102109327A TW 102109327 A TW102109327 A TW 102109327A TW I619883 B TWI619883 B TW I619883B
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- Prior art keywords
- piston
- pump
- drive shaft
- vacuum
- phase difference
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B27/00—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
- F04B27/005—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders with two cylinders
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B1/00—Multi-cylinder machines or pumps characterised by number or arrangement of cylinders
- F04B1/02—Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having two cylinders
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
- F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/0094—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 crankshaft
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
- F04B2201/02011—Angular position of a piston rotating around its own axis
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/08—Cylinder or housing parameters
- F04B2201/0802—Vibration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0201—Current
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Details Of Reciprocating Pumps (AREA)
Abstract
本發明之課題在於提供能達到減低更多耗電量之幫浦裝置。 An object of the present invention is to provide a pump device capable of reducing more power consumption.
其解決手段為,本發明之一實施形態的幫浦裝置1,其具備驅動馬達M、具有第1幫浦室與第1活塞21v之真空排氣用第1幫浦部11及具有第2幫浦室與第2活塞21c之加壓用第2幫浦部12。第2活塞21c以大於0°未滿80°之旋轉相位差φ相位超前第1活塞21v。 The pump device 1 according to the embodiment of the present invention includes a drive motor M, a first pumping portion 11 for vacuum exhaust having a first pump chamber and a first piston 21v, and a second pump The second pumping portion 12 for pressurization of the chamber and the second piston 21c. The second piston 21c leads the first piston 21v in phase by a rotational phase difference φ greater than 0° and less than 80°.
Description
本發明係關於具備真空幫浦及加壓幫浦之幫浦裝置。 The present invention relates to a pump device having a vacuum pump and a pressurized pump.
眾所周知屬於真空幫浦之一種的搖動活塞型幫浦係作為藉由汽缸內活塞之往復運動而在幫浦室內交互進行吸氣及排氣之往復移動式幫浦,例如作為真空幫浦及加壓幫浦而被廣泛使用。 It is known that a rocking piston type pump which is a kind of vacuum pump is used as a reciprocating mobile pump for inhaling and exhausting in a pump chamber by reciprocating motion of a piston in a cylinder, for example, as a vacuum pump and pressurization. The pump is widely used.
另一方面,具備有以共同馬達同時驅動之真空排氣用及加壓用之兩個活塞之複合型幫浦裝置也廣為人知。以此種幫浦裝置之驅動方法而言,已知有使該兩活塞互以相反相位往復移動之方法、及使該兩活塞互以同相位往復移動之方法(例如參照下述專利文獻1)。 On the other hand, a composite pump device including two pistons for vacuum exhaust and pressurization that are simultaneously driven by a common motor is also widely known. In the method of driving such a pump device, a method of reciprocating the two pistons in opposite phases and a method of reciprocating the two pistons in the same phase are known (for example, refer to Patent Document 1 below). .
前者之方法,亦即,以兩活塞之旋轉相位以相差180°往復移動之驅動方法,具有良好地維持各幫浦之動平衡、降低幫浦裝置整體之振動的優點。而後者之方法,亦即,使兩活塞同時往上死點或下死點移動之驅動方法,其能降低驅動源之負載變化並能實現幫浦裝置穩定運轉。 The former method, that is, the driving method in which the rotational phases of the two pistons reciprocate by 180°, has the advantages of maintaining the dynamic balance of each pump well and reducing the vibration of the entire pump device. The latter method, that is, a driving method for moving the two pistons to the top dead center or the bottom dead center simultaneously, can reduce the load variation of the driving source and can realize stable operation of the pump device.
專利文獻1:日本特開平7-310651號公報 Patent Document 1: Japanese Patent Laid-Open No. Hei 7-310651
近來,幫浦裝置訴求降低耗電量,即使是上述複合型幫浦裝置也被期望能降低更多的耗電量。 Recently, the pump device has sought to reduce power consumption, and even the above-mentioned composite pump device is expected to reduce more power consumption.
鑑於如以上情事,本發明之目的在於提供能達到減低更多耗電量之幫浦裝置。 In view of the above circumstances, it is an object of the present invention to provide a pump device capable of reducing more power consumption.
為了達成上述目的,本發明之一形態的幫浦裝置具備有驅動馬達、真空排氣用第1幫浦部及加壓用第2幫浦部。 In order to achieve the above object, a pump device according to an aspect of the present invention includes a drive motor, a first pumping portion for vacuum evacuation, and a second pumping portion for pressurization.
上述驅動馬達具有第1驅動軸及第2驅動軸。上述驅動馬達,構成為能使上述第1驅動軸及上述第2驅動軸繞著第1軸同步旋轉。 The drive motor has a first drive shaft and a second drive shaft. The drive motor is configured to enable the first drive shaft and the second drive shaft to rotate synchronously around the first shaft.
上述第1幫浦部具有藉由上述第1驅動軸之旋轉而往與上述第1軸垂直之第2軸方向往復移動之第1活塞、及根據上述第1活塞之往復移動而改變內部壓力之第1幫浦室。 The first pumping portion has a first piston that reciprocates in a second axial direction perpendicular to the first axis by rotation of the first drive shaft, and a first piston that changes internal pressure by reciprocation of the first piston 1 pump room.
上述第2幫浦部具有藉由上述第2驅動軸之旋轉而往上述第2軸方向往復移動之第2活塞、及根據上述第2活塞之往復移動而改變內部壓力之第2幫浦室。上述第2活塞以大於0°未滿80°之旋轉相位差相位超前上述第1活塞。 The second pumping portion has a second piston that reciprocates in the second axial direction by the rotation of the second drive shaft, and a second pump chamber that changes internal pressure according to reciprocation of the second piston. The second piston advances the first piston by a phase difference of a rotational phase difference of more than 0° and less than 80°.
1‧‧‧幫浦裝置 1‧‧‧ pumping device
11‧‧‧真空幫浦 11‧‧‧vacuum pump
12‧‧‧加壓幫浦 12‧‧‧Pressure pump
13‧‧‧驅動部 13‧‧‧ Drive Department
21,21v,21c‧‧‧活塞 21, 21v, 21c‧ ‧ piston
22‧‧‧連桿 22‧‧‧ Connecting rod
23‧‧‧偏心構件 23‧‧‧Eccentric components
24‧‧‧密封構件 24‧‧‧ Sealing members
25‧‧‧螺絲構件 25‧‧‧screw components
26‧‧‧幫浦室 26‧‧‧The Pufang Room
31,32‧‧‧軸承 31,32‧‧‧ Bearings
41‧‧‧螺絲 41‧‧‧ screws
42‧‧‧固定螺絲 42‧‧‧ fixing screws
51,52‧‧‧配重 51,52‧‧‧weight
101‧‧‧第1外殼 101‧‧‧1st outer casing
102‧‧‧第2外殼 102‧‧‧2nd outer casing
103‧‧‧第3外殼 103‧‧‧3rd outer casing
110‧‧‧外殼本體 110‧‧‧Shell body
110a‧‧‧固定部 110a‧‧‧Fixed Department
110b‧‧‧筒部 110b‧‧‧ Tube
110h‧‧‧貫通孔 110h‧‧‧through hole
111‧‧‧汽缸 111‧‧‧ cylinder
112‧‧‧幫浦頭 112‧‧‧Help Putou
112a‧‧‧吸氣閥 112a‧‧‧ Inhalation valve
112b‧‧‧排氣閥 112b‧‧‧Exhaust valve
113‧‧‧幫浦頭蓋 113‧‧‧Help Putou
113a‧‧‧吸氣室 113a‧‧‧Intake chamber
113b‧‧‧排氣室 113b‧‧‧Exhaust room
114a‧‧‧吸氣口 114a‧‧‧ suction port
114b‧‧‧排氣口 114b‧‧‧Exhaust port
131‧‧‧驅動軸 131‧‧‧Drive shaft
132‧‧‧線圈 132‧‧‧ coil
221‧‧‧第1端部 221‧‧‧1st end
222‧‧‧第2端部 222‧‧‧2nd end
222a‧‧‧嵌合孔 222a‧‧‧ fitting holes
230‧‧‧底座塊 230‧‧‧Base block
232,232v,232c‧‧‧偏心軸 232,232v, 232c‧‧‧Eccentric shaft
M‧‧‧馬達 M‧‧ motor
X,Y,Z‧‧‧方向 X, Y, Z‧‧ Direction
圖1係為本發明之一實施形態的幫浦裝置之正面立體圖。 Fig. 1 is a front perspective view of a pump device according to an embodiment of the present invention.
圖2係為上述幫浦裝置之背面立體圖。 Fig. 2 is a rear perspective view of the above pump device.
圖3係為上述幫浦裝置之右側視圖。 Figure 3 is a right side view of the above-described pump device.
圖4係為上述幫浦裝置之左側視圖。 Figure 4 is a left side view of the above-described pump device.
圖5係為表示上述幫浦裝置之真空幫浦部及驅動部之部分結構之縱剖視圖。 Fig. 5 is a vertical cross-sectional view showing a part of the vacuum pumping portion and the driving portion of the pumping device.
圖6係為說明上述幫浦裝置之真空幫浦部側之偏心軸與加壓幫浦部側之偏心軸間之關係之示意圖;(A)為前視圖,(B)為由真空幫浦部側觀看之側面圖。 Fig. 6 is a view for explaining the relationship between the eccentric shaft on the vacuum pumping portion side of the pumping device and the eccentric shaft on the side of the pressurized pumping portion; (A) is a front view, and (B) is viewed from the vacuum pumping portion side. side view.
圖7係為以使真空段之幫浦室內部壓力與加壓段之幫浦室內部壓力成為同相位之方式,驅動幫浦裝置之實驗結果;(A)為顯示真空段之幫浦室內部壓力與活塞位置的時間變化,(B)為顯示加壓段幫浦室內部壓力與活塞位置的時間變化,(C)為顯示真空段之幫浦室之壓力波形與加壓段之幫浦室之壓力波形之合成波形。 Figure 7 is an experimental result of driving the pump device in such a manner that the pressure inside the pump chamber of the vacuum section and the pressure inside the pump chamber of the pressurizing section are in phase; (A) is inside the pump chamber showing the vacuum section Time change of pressure and piston position, (B) is the time change of the pressure inside the pump chamber and the position of the piston, (C) is the pressure waveform of the pump chamber showing the vacuum section and the pressure of the pumping chamber of the pressurizing section The composite waveform of the waveform.
圖8係為以使真空段之幫浦室內部壓力與加壓段之幫浦室內部壓力成為相反相位之方式,驅動幫浦裝置之實驗結果;(A)為顯示真空段之幫浦室內部壓力與活塞位置的時間變化,(B)為顯示加壓段之幫浦室內部壓力與活塞位置的時間變化,(C)為顯示真空段之幫浦室之壓力波形與加壓段之幫浦室之壓力波形之合成波形。 Figure 8 is an experimental result of driving the pump device in such a manner that the pressure inside the pump chamber of the vacuum section is opposite to the pressure inside the pump chamber of the pressurizing section; (A) is the interior of the pump chamber showing the vacuum section Time change of pressure and piston position, (B) is the time change of the pressure inside the pump chamber and the position of the piston, and (C) is the pressure waveform of the pump chamber showing the vacuum section and the pump of the pressurizing section. The composite waveform of the pressure waveform of the chamber.
圖9係為表示加壓段之活塞相對於真空段之活塞之旋轉相位差與馬達消耗電流之關係的實驗結果。 Fig. 9 is an experimental result showing the relationship between the rotational phase difference of the piston of the pressurizing section with respect to the piston of the vacuum section and the motor current consumption.
搖動型活塞幫浦之幫浦室內部壓力會隨活塞之往復移 動而產生週期變化。例如,活塞自下死點朝上死點移動時,幫浦室之內部壓力因容積減少而往增加方向移動,活塞自上死點朝下死點移動時,幫浦室之內部壓力因容積增加而往減少方向移動。此時,在真空幫浦方面,幫浦室內部壓力在大氣壓以下之壓力範圍(負壓)內變化,在加壓幫浦方面,幫浦室內部壓力則在大氣壓以上之壓力範圍(正壓)內變化。 The pressure inside the pump of the rocking piston pump will move with the piston It produces a cyclical change. For example, when the piston moves from the bottom dead center to the top dead center, the internal pressure of the pump chamber moves in the increasing direction due to the decrease in volume. When the piston moves from the top dead center to the lower dead point, the internal pressure of the pump chamber increases due to the volume. And move in a decreasing direction. At this time, in the vacuum pump, the pressure inside the pump chamber changes within the pressure range (underpressure) below atmospheric pressure. In the case of the pressurized pump, the pressure inside the pump chamber is in the pressure range above atmospheric pressure (positive pressure). Change within.
然而,根據本發明人等之實驗確認,如上述般,即使真空幫浦用之活塞與加壓幫浦用之活塞以同相位往復移動,兩幫浦室之內部壓力也不會同步變化,而會因兩幫浦室間壓力變化產生相位差。此外,即使控制兩活塞之旋轉相位,使真空幫浦及加壓幫浦兩幫浦室之內部壓力變化為相同相位,馬達之載荷也不會是最低值。 However, according to experiments by the inventors of the present invention, as described above, even if the piston for the vacuum pump reciprocates in the same phase as the piston for the pressurized pump, the internal pressures of the two pump chambers do not change synchronously. There will be a phase difference due to pressure changes between the two chambers. In addition, even if the rotational phase of the two pistons is controlled, the internal pressures of the vacuum pump and the pressurized pump are changed to the same phase, and the load of the motor is not the lowest value.
因此,本發明為實現減低幫浦裝置之更多的耗電量,構成如下述之幫浦裝置。 Therefore, the present invention constitutes a pump device as described below in order to achieve more power consumption of the pumping device.
亦即,本發明之一實施形態的幫浦裝置,其具備驅動馬達、真空排氣用第1幫浦部及加壓用第2幫浦部。 In other words, the pump device according to the embodiment of the present invention includes a drive motor, a first pumping portion for vacuum evacuation, and a second pumping portion for pressurization.
上述驅動馬達,其具有第1驅動軸及第2驅動軸。上述驅動馬達之構成能使上述第1驅動軸及上述第2驅動軸繞著第1軸同步旋轉。 The drive motor has a first drive shaft and a second drive shaft. The drive motor has a configuration in which the first drive shaft and the second drive shaft are synchronously rotated about the first axis.
上述第1幫浦部具有藉由上述第1驅動軸之旋轉而往與上述第1軸垂直之第2軸方向往復移動之第1活塞、及根據上述第1活塞之往復移動而改變內部壓力之第1幫浦室。 The first pumping portion has a first piston that reciprocates in a second axial direction perpendicular to the first axis by rotation of the first drive shaft, and a first piston that changes internal pressure by reciprocation of the first piston 1 pump room.
上述第2幫浦部具有藉由上述第2驅動軸之旋轉而往上述第2軸方向往復移動之第2活塞、及根據上述第2活塞之往復移動而改變內部壓力之第2幫浦室。上述第2活塞以大於0°未滿80°之旋轉相位差相位超前上述第1活塞。 The second pumping portion has a second piston that reciprocates in the second axial direction by the rotation of the second drive shaft, and a second pump chamber that changes internal pressure according to reciprocation of the second piston. The second piston advances the first piston by a phase difference of a rotational phase difference of more than 0° and less than 80°.
依據發明人等之實驗確認,雖然真空排氣用第1幫浦部之活塞之上死點與幫浦室之壓力高峰位置大概一致,但加壓用第2幫浦部之活塞之上死點與幫浦室之壓力高峰位置不一致。特別是,於第2幫浦部,活塞移動至上死點前,幫浦室已達到壓力高峰。 According to experiments confirmed by the inventors, although the top dead center of the piston of the first pumping portion of the vacuum exhausting is approximately the same as the pressure peak position of the pumping chamber, the top dead center of the piston of the second pumping portion is pressed and helped. The pressure peak position of the Pu room is inconsistent. In particular, in the second pumping department, before the piston moved to the top dead center, the pump room had reached the peak of pressure.
上述旋轉相位差可適當設定在0°以上未滿80°之範圍內。例如,設定為40°±30°時可達到降低一定耗電量之效果,設定為40°±15°則能達到降低更多耗電量之效果。藉由此種旋轉相位差之最佳化,可達到以低耗電量穩定地運轉幫浦裝置。 The above-described rotational phase difference can be appropriately set within a range of 0° or more and less than 80°. For example, when set to 40°±30°, the effect of reducing the power consumption can be achieved. When set to 40°±15°, the effect of reducing the power consumption can be achieved. By optimizing the rotation phase difference, it is possible to stably operate the pump device with low power consumption.
以下,一邊參照圖式一邊說明本發明之實施形態。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
圖1至圖4係為表示本發明之一實施形態相關的幫浦裝置之外部視圖,圖1為正面立體圖,圖2為背面立體圖,圖3為右側視圖,圖4為左側視圖。 1 to 4 are external views showing a pumping device according to an embodiment of the present invention. Fig. 1 is a front perspective view, Fig. 2 is a rear perspective view, Fig. 3 is a right side view, and Fig. 4 is a left side view.
本實施形態之幫浦裝置1具有作為真空段之真空幫浦部11(第1幫浦部)、作為加壓段之加壓幫浦部12(第2幫浦部)及共同驅動真空幫浦部11和加壓幫浦部12之驅動部13。幫浦裝置1例如作為用於燃料電池系統中之氣體升壓鼓風機來使用、或作為用於醫療分析器之真空及加壓幫浦來使用。 The pump device 1 of the present embodiment has a vacuum pumping portion 11 (first pumping portion) as a vacuum section, a pressure pumping portion 12 (second pumping portion) as a pressurizing section, and a common driving vacuum pumping portion 11 and pressurizing The driving part 13 of the pumping department 12. The pump device 1 is used, for example, as a gas booster blower for use in a fuel cell system, or as a vacuum and pressurized pump for a medical analyzer.
真空幫浦部11及加壓幫浦部12具有典型之共同的構造,於本實施形態中構成為搖動活塞幫浦。 The vacuum pumping portion 11 and the pressurized pumping portion 12 have a typical structure in common, and in the present embodiment, they are configured as a rocking piston pump.
幫浦裝置1具有幫浦外殼100,該幫浦外殼100包含:構成真空幫浦部11的一部分之第1外殼101、構成加壓幫浦部12的一部分之第2外殼102及構成驅動部13的一部分之第3外殼103。 The pump device 1 has a pump casing 100 including a first casing 101 constituting a part of the vacuum pumping portion 11, a second casing 102 constituting a part of the pressure pumping portion 12, and a part constituting the driving portion 13. The third outer casing 103.
圖5為表示真空幫浦部11及驅動部13之部分結構之縱剖面圖。圖5之X軸、Y軸及Z軸分別表示相互正交之3軸方向。此外,加壓幫浦部12因具有與真空幫浦部11相同之構成,本處以真空幫浦部11為主進行說明。 Fig. 5 is a longitudinal sectional view showing a part of the structure of the vacuum pumping portion 11 and the driving portion 13. The X-axis, the Y-axis, and the Z-axis of Fig. 5 respectively indicate the three-axis directions orthogonal to each other. Further, the pressure pumping portion 12 has the same configuration as that of the vacuum pumping portion 11, and the vacuum pumping portion 11 will be mainly described.
真空幫浦部11具有第1外殼101、活塞21、連桿22(桿件)及偏心構件23。 The vacuum pump portion 11 has a first outer casing 101, a piston 21, a link 22 (rod), and an eccentric member 23.
第1外殼101具有外殼本體110、汽缸111、幫浦頭112及幫浦頭蓋113。外殼本體110、汽缸111、幫浦頭112及幫浦頭蓋113係於Z軸方向相互層疊而一體化。 The first outer casing 101 has a casing body 110, a cylinder 111, a pump head 112, and a head cover 113. The casing body 110, the cylinder 111, the pump head 112, and the pump head cover 113 are laminated and integrated with each other in the Z-axis direction.
外殼本體110係與用以收容馬達M之第3外殼103連接,並具有讓連桿22貫通之貫通孔110h。外殼本體110具有:固定部110a,其能固定用以可旋轉地支持馬達M之驅動軸131之軸承32;及筒部110b,其係用以收容馬達M之線圈132。驅動軸131係與Y軸方向(第1軸方向)平行配置,並藉由馬達M之驅動而繞著Y軸旋轉。軸承32係配置於馬達M的本體與偏心構件23之間。 The casing body 110 is connected to the third casing 103 for accommodating the motor M, and has a through hole 110h through which the connecting rod 22 passes. The housing body 110 has a fixing portion 110a that can fix a bearing 32 for rotatably supporting the driving shaft 131 of the motor M, and a cylindrical portion 110b for housing the coil 132 of the motor M. The drive shaft 131 is disposed in parallel with the Y-axis direction (the first axial direction), and is rotated about the Y-axis by the driving of the motor M. The bearing 32 is disposed between the body of the motor M and the eccentric member 23.
汽缸111係配置於外殼本體110與幫浦頭112之間,其內部容納可往Z軸方向自由滑動之活塞21。幫浦頭112 係配置於汽缸111與幫浦頭蓋113之間,且分別具有吸氣閥112a及排氣閥112b。幫浦頭蓋113係配置於幫浦頭112上方,且內部具有與吸氣口114a連通之吸氣室113a,及與排氣口114b連通之排氣室113b。如圖1及圖2所示,吸氣口114a及排氣口114b係分別設置於各幫浦部11、12彼此相對向之側面。 The cylinder 111 is disposed between the casing body 110 and the pump head 112, and houses a piston 21 that is slidable in the Z-axis direction. Bangtou 112 The system is disposed between the cylinder 111 and the pump head cover 113, and has an intake valve 112a and an exhaust valve 112b, respectively. The pump head cover 113 is disposed above the pump head 112, and has an intake chamber 113a communicating with the intake port 114a and an exhaust chamber 113b communicating with the exhaust port 114b. As shown in FIGS. 1 and 2, the intake port 114a and the exhaust port 114b are respectively provided on the side faces of the respective pump portions 11, 12 facing each other.
活塞21具有圓盤形狀,藉由螺絲構件25固定於連桿22之第1端部221。活塞21在該活塞21與幫浦頭112之間形成幫浦室26。活塞21於汽缸111之內部往與Z軸方向(第2軸方向)平行之方向往復移動而改變幫浦室26之內部壓力。此外,活塞21透過吸氣閥112a及排氣閥112b使幫浦室26交互地吸氣與排氣而進行預定之幫浦作用。 The piston 21 has a disk shape and is fixed to the first end portion 221 of the link 22 by a screw member 25. The piston 21 forms a pumping chamber 26 between the piston 21 and the pump head 112. The piston 21 reciprocates in a direction parallel to the Z-axis direction (second axis direction) inside the cylinder 111 to change the internal pressure of the pump chamber 26. Further, the piston 21 causes the pump chamber 26 to inhale and exhaust alternately through the intake valve 112a and the exhaust valve 112b to perform a predetermined pumping action.
連桿22係相互連結於活塞21與偏心構件23之間。連桿22具有與活塞21連接之第1端部221、及與偏心構件23連接之第2端部222。第1端部221形成為與活塞21大致同直徑之圓形。該等活塞21與第1端部221之間安裝有圓盤形之密封構件24。密封構件24之周緣部係在幫浦室26側以可與汽缸111的之內周面滑接之方式被彎折。 The links 22 are coupled to each other between the piston 21 and the eccentric member 23. The link 22 has a first end portion 221 connected to the piston 21 and a second end portion 222 connected to the eccentric member 23. The first end portion 221 is formed in a circular shape having a diameter substantially the same as that of the piston 21. A disc-shaped sealing member 24 is attached between the piston 21 and the first end portion 221. The peripheral portion of the sealing member 24 is bent on the side of the pump chamber 26 so as to be slidable to the inner circumferential surface of the cylinder 111.
此外,於加壓幫浦部12中,上述密封構件之周緣部與上述例子相反,被彎折於幫浦室側。 Further, in the pressurizing pump portion 12, the peripheral portion of the sealing member is bent on the side of the pump chamber as opposed to the above example.
於連桿22之第2端部222上形成有與偏心構件23之偏心軸232嵌合之嵌合孔222a。嵌合孔222a安裝有以旋轉自如之方式支持偏心軸232之軸承31。 A fitting hole 222a that is fitted to the eccentric shaft 232 of the eccentric member 23 is formed on the second end portion 222 of the link 22. The fitting hole 222a is mounted with a bearing 31 that rotatably supports the eccentric shaft 232.
偏心構件23係相互連結於使收容於第3外殼103之馬 達M之驅動軸131與連桿22之間。偏心構件23具有大致圓柱形狀的底座塊230。底座塊230之馬達M側之面係與驅動軸131連接,連桿22側之面形成有偏心軸232。偏心軸232之軸心,係以隨著驅動軸131之旋轉而偏移之方式對驅動軸131偏心。驅動軸131藉由鎖固於底座塊230側表面之螺絲41而與底座塊230連接。 The eccentric members 23 are coupled to each other so as to be housed in the third outer casing 103 Between the drive shaft 131 of the M and the connecting rod 22. The eccentric member 23 has a base block 230 of a substantially cylindrical shape. The surface of the base block 230 on the side of the motor M is connected to the drive shaft 131, and the surface on the side of the link 22 is formed with an eccentric shaft 232. The axis of the eccentric shaft 232 is eccentric to the drive shaft 131 so as to be offset with the rotation of the drive shaft 131. The drive shaft 131 is coupled to the base block 230 by screws 41 that are locked to the side surface of the base block 230.
偏心構件23安裝有配重(counter weight)51。配重51藉由鎖固於底座塊230側表面之固定螺絲42固定於偏心構件23之側表面。配重51係與活塞21一起旋轉,並具有消除隨著驅動軸131之旋轉而繞著連桿22之偏心軸232旋轉時產生的振動之作用。配重51係配置在驅動軸131中之朝與偏心軸232之偏心方向相反方向偏移之位置。 The eccentric member 23 is mounted with a counter weight 51. The weight 51 is fixed to the side surface of the eccentric member 23 by a fixing screw 42 that is fixed to the side surface of the base block 230. The weight 51 is rotated together with the piston 21 and has a function of eliminating vibration generated when the eccentric shaft 232 of the link 22 rotates in accordance with the rotation of the drive shaft 131. The weight 51 is disposed at a position in the drive shaft 131 that is offset from the eccentric direction of the eccentric shaft 232.
在如上述設計所構成的真空幫浦部11中,偏心構件23受馬達M的驅動而繞著驅動軸131旋轉,藉此偏心軸232沿著具有對應於來自驅動軸131之偏心量的半径之圓周而繞著驅動軸131公轉。連接於偏心軸232之連桿22係將驅動軸131之旋轉改變成在汽缸111內部之活塞21之往復移動。亦即,於汽缸111內部,活塞21一邊於圖5中之X軸方向搖動,一邊於Z軸方向往復移動。藉此,交互地進行幫浦室26之吸氣與排氣,而獲得真空幫浦部11所產生之預定之真空排氣作用。 In the vacuum pumping portion 11 constructed as described above, the eccentric member 23 is rotated about the drive shaft 131 by the drive of the motor M, whereby the eccentric shaft 232 is along a circumference having a radius corresponding to the amount of eccentricity from the drive shaft 131. And revolving around the drive shaft 131. The link 22 connected to the eccentric shaft 232 changes the rotation of the drive shaft 131 to the reciprocating movement of the piston 21 inside the cylinder 111. That is, inside the cylinder 111, the piston 21 reciprocates in the Z-axis direction while rocking in the X-axis direction in Fig. 5 . Thereby, the suction and exhaust of the pump chamber 26 are alternately performed, and the predetermined vacuum exhausting action generated by the vacuum pumping portion 11 is obtained.
另一方面,加壓幫浦部12係與真空幫浦部11採相同構成,驅動軸131亦朝加壓幫浦部12側突出,並與加壓幫浦部12之偏心軸(圖式省略)連接。藉此,加壓幫浦部12 能與真空幫浦部11同時被共同的馬達M驅動,並進行預定之加壓(升壓)作用。 On the other hand, the pressurizing pump portion 12 is configured similarly to the vacuum pumping portion 11, and the drive shaft 131 also protrudes toward the pressurizing pump portion 12, and is connected to the eccentric shaft (not shown) of the pressurizing pump portion 12. Thereby, the pressurized pump part 12 The vacuum pump unit 11 can be driven by the common motor M at the same time, and a predetermined pressurization (boost) action is performed.
本處,真空幫浦部11與加壓幫浦部12相互以不同相位驅動。亦即本實施形態中,加壓幫浦部12之活塞21(第2活塞)構成為以大於0°未滿80°之旋轉相位差相位超前真空幫浦部11之活塞21(第1活塞)。 Here, the vacuum pumping portion 11 and the pressure pumping portion 12 are driven at different phases from each other. In other words, in the present embodiment, the piston 21 (second piston) of the pressurizing pumping portion 12 is configured to advance the piston 21 (first piston) of the vacuum pumping portion 11 with a rotational phase difference of more than 0° and less than 80°.
為使上述各活塞保持上述之旋轉相位差,須令本實施形態中各幫浦11、12之偏心軸232處於相異位置。根據本實施形態,由於只靠螺絲41的鎖固將偏心構件23固定於驅動軸131,因此易於調整兩幫浦11、12之偏心軸232彼此之相對位置。 In order to maintain the above-described rotational phase difference between the pistons, the eccentric shafts 232 of the respective pumps 11 and 12 in the present embodiment are at different positions. According to the present embodiment, since the eccentric member 23 is fixed to the drive shaft 131 only by the locking of the screw 41, it is easy to adjust the relative positions of the eccentric shafts 232 of the two pumps 11, 12.
此外,由於固定於偏心構件23之配重的位置與偏心軸232之偏心方向相關,因此即使從幫浦裝置1外部亦可輕易確認兩活塞21之旋轉相位差。亦即,如圖1~圖4所示,加壓幫浦部12之配重52固定於驅動軸131之旋轉方向(於圖3係為以Y軸為中心之順時針方向,於圖4係為以Y軸為中心之逆時針方向)並以上述預定旋轉相位差(大於0°未滿80°)相位超前真空幫浦部11之配重51之位置。 Further, since the position of the weight fixed to the eccentric member 23 is related to the eccentric direction of the eccentric shaft 232, the rotational phase difference between the two pistons 21 can be easily confirmed even from the outside of the pump device 1. That is, as shown in FIGS. 1 to 4, the weight 52 of the pressurizing pump portion 12 is fixed to the rotational direction of the drive shaft 131 (in FIG. 3, it is a clockwise direction centered on the Y-axis, and FIG. 4 is The counter-clockwise direction centered on the Y-axis and the position of the counterweight 51 of the vacuum pumping portion 11 is advanced by the predetermined rotational phase difference (greater than 0° and less than 80°).
圖6(A),圖6(B)為說明真空幫浦部11側之偏心軸232v與加壓幫浦部12側之偏心軸232c間之關係示意圖:圖6(A)為前視圖,圖6(B)為由真空幫浦部11側觀看之側面圖。如圖6(B)所示,加壓幫浦部12側之偏心軸232c被設置為以預定旋轉相位差φ相位超前真空幫浦部11側之偏心軸232v。因此,真空幫浦部11側之活塞21v與加壓幫浦部 12側之活塞21c相互位移達至相位差φ而被驅動,活塞21c係以達至相當於相位差φ之時間比活塞21v還快到達上死點。 Fig. 6(A) and Fig. 6(B) are diagrams showing the relationship between the eccentric shaft 232v on the side of the vacuum pumping portion 11 and the eccentric shaft 232c on the side of the pressurized pumping portion 12: Fig. 6(A) is a front view, Fig. 6 (Fig. 6(A) B) is a side view viewed from the side of the vacuum pump portion 11. As shown in Fig. 6(B), the eccentric shaft 232c on the side of the pressurizing pump portion 12 is provided to eccentrically advance the eccentric shaft 232v on the side of the vacuum pump portion 11 with a predetermined rotational phase difference φ. Therefore, the piston 21v and the pressurized pump portion on the side of the vacuum pump portion 11 The pistons 21c on the 12 side are driven to each other by the phase difference φ, and the piston 21c reaches the top dead center faster than the piston 21v by the time corresponding to the phase difference φ.
旋轉相位差φ設定在大於0°未滿80°之適宜範圍內。藉此,與兩活塞21v,21c以同相位(φ=0)驅動相比,可達到降低馬達M之耗電量。此外,φ設定為40°±15°時,可穩定地維持上述馬達M的低耗電量運轉。 The rotational phase difference φ is set within a suitable range of more than 0° and less than 80°. Thereby, the power consumption of the motor M can be reduced as compared with the driving of the two pistons 21v, 21c in the same phase (φ = 0). Further, when φ is set to 40° ± 15°, the low power consumption operation of the motor M described above can be stably maintained.
圖7(A)係為表示真空幫浦中的幫浦室內部壓力與活塞位置的時間變化之實驗結果,圖7(B)係為表示加壓幫浦中的幫浦室內部壓力與活塞位置的時間變化之實驗結果。圖中,實線為50赫(Hz)、虛線為60赫時運轉之實驗結果。 Fig. 7(A) is an experimental result showing the time variation of the pressure inside the pump chamber and the piston position in the vacuum pump, and Fig. 7(B) shows the pressure inside the pump chamber and the piston position in the pressurized pump. The experimental results of the time changes. In the figure, the experimental results of the operation when the solid line is 50 Hz and the dotted line is 60 Hz.
另外,用於實驗之幫浦裝置的汲取高度,真空段(真空幫浦)為40kPa(絕對壓力)、加壓段(加壓幫浦)為220kPaG(測量壓力)。幫浦室之內部壓力係藉由將管子插入密閉之幫浦室測量得之。活塞位置則用於安裝在連桿下部之加速度計之輸出。各段幫浦之汽缸徑係為φ 37mm,偏心軸之偏心量係為3.3mm,馬達之旋轉數約為1400rpm/1700rpm(50赫/60赫)。圖8、圖9表示之實驗結果的條件亦同。 In addition, the pumping height of the pump apparatus used for the experiment was 40 kPa (absolute pressure) in the vacuum section (vacuum pump) and 220 kPaG (measured pressure) in the pressurizing section (pressurizing pump). The internal pressure of the pump room is measured by inserting the tube into a closed pump room. The piston position is used for the output of the accelerometer mounted on the lower part of the connecting rod. The cylinder diameter of each pump is φ 37mm, the eccentricity of the eccentric shaft is 3.3mm, and the number of rotations of the motor is about 1400rpm/1700rpm (50h/60h). The conditions of the experimental results shown in Figs. 8 and 9 are also the same.
於真空段中,幫浦室內部壓力係與活塞位置同步、同相位變化(圖7(A)),相對於此,加壓段中,幫浦室內部壓力係與活塞位置不同步而在兩者間產生相位差(圖7(B))。更具體來說,加壓段之活塞在達到上死點之前,幫浦室內出現壓力高峰。 In the vacuum section, the pressure system inside the pump chamber is synchronized with the piston position and in phase change (Fig. 7(A)). In contrast, in the pressurizing section, the pressure system inside the pump chamber is not synchronized with the piston position. A phase difference occurs between the two (Fig. 7(B)). More specifically, the piston of the pressurizing section experiences a pressure peak in the pump chamber before reaching the top dead center.
藉由以上實驗結果確定,即使真空段及加壓段各者之活塞相互以同相位驅動,真空段及加壓段各者之幫浦室內部壓力亦不會以同相位變化,加壓段之幫浦室較真空段幫浦室更快達到壓力最大值。 It is confirmed by the above experimental results that even if the pistons of the vacuum section and the pressurizing section are driven in the same phase, the pressure inside the pump chamber of each of the vacuum section and the pressurizing section does not change in the same phase, and the pressurizing section is The pump room reaches the maximum pressure faster than the vacuum chamber.
此外,經實驗確認,與將各幫浦部之活塞相互以同相位驅動之情況作比較,以使第1幫浦部及第2幫浦部之兩幫浦室的內部壓力變化為相反相位之方式所構成之幫浦裝置可達到降低驅動馬達之耗電量。 In addition, it has been experimentally confirmed that the pistons of the respective pumping portions are driven in the same phase, so that the internal pressures of the two pumping chambers of the first pumping portion and the second pumping portion are changed to opposite phases. The pump device can reduce the power consumption of the drive motor.
本處,內部壓力之時間變化為相反相位時,典型上,兩幫浦室內之壓力波形具有180°之相位,但不限於此,只要具有實質意義能解釋相反相位的關係之相位關係即可。本處,實質意義的相反相位係例如可定義為比起兩活塞以同相位驅動之情況更能減低耗電量之相位關係。 Here, when the time of the internal pressure changes to the opposite phase, the pressure waveform of the two puddle chambers typically has a phase of 180°, but is not limited thereto, as long as it has a substantial meaning to explain the phase relationship of the relationship of the opposite phases. Here, the opposite phase of the substantial meaning can be defined, for example, as a phase relationship that can reduce the power consumption more than when the two pistons are driven in the same phase.
以使真空段之幫浦室內部壓力之壓力波形與加壓段幫浦室內部壓力之壓力波形成為同相位之方式構成加壓段之活塞與真空段之活塞間維持預定之相位差之幫浦裝置時,將加壓段之活塞相對真空段之活塞設定在達至18大於0°未滿260°之旋轉相位差。該旋轉相位差為220°時之實驗結果由圖7(A)至圖7(C)表示。圖7(C)係表示真空段之幫浦室之壓力波形與加壓段之幫浦室之壓力波形的合成波形。 When the pressure waveform of the pressure inside the pump chamber of the vacuum section and the pressure waveform of the pressure inside the pressurization section are in phase, the pump device for maintaining a predetermined phase difference between the piston of the pressurizing section and the piston of the vacuum section is formed. The piston of the pressurizing section is set to a rotational phase difference of up to 18 and less than 0° and less than 260° with respect to the piston of the vacuum section. The experimental results when the rotational phase difference is 220° are shown in Fig. 7(A) to Fig. 7(C). Fig. 7(C) shows a composite waveform of the pressure waveform of the pump chamber of the vacuum section and the pressure waveform of the pumping chamber of the pressurizing section.
另一方面,以使真空段之幫浦室內部壓力之壓力波形與加壓段之幫浦室內部壓力之壓力波形成為相反相位之方式構成加壓段之活塞與真空段之活塞間維持預定之相位差之幫浦裝置時,將加壓段之活塞相對於真空段之活塞設定 在達至大於0°未滿80°之旋轉相位差。該旋轉相位差為40°時之實驗結果由圖8(A)至圖8(C)表示。圖8(A)係表示真空段之幫浦室內部壓力與活塞位置之時間變化,圖8(B)係表示加壓段之幫浦室內部壓力與活塞位置之時間變化,圖8(C)係表示真空段之幫浦室之壓力波形與加壓段之幫浦室之壓力波形的合成波形。 On the other hand, the piston between the piston of the pressurizing section and the piston of the vacuum section is maintained in such a manner that the pressure waveform of the pressure inside the pump chamber of the vacuum section and the pressure waveform of the pressure inside the pumping chamber of the pressurizing section are opposite phases. In the case of a phase difference pump, the piston of the pressurizing section is set relative to the piston of the vacuum section. A rotational phase difference of up to greater than 0° and less than 80°. The experimental results when the rotational phase difference is 40° are shown in Fig. 8(A) to Fig. 8(C). Fig. 8(A) shows the time variation of the pressure inside the pump chamber and the piston position in the vacuum section, and Fig. 8(B) shows the time variation of the pressure inside the pump chamber and the piston position in the pressurizing section, Fig. 8(C) It is a composite waveform showing the pressure waveform of the pump chamber of the vacuum section and the pressure waveform of the pumping chamber of the pressurizing section.
接著圖9係為表示加壓段之活塞相對於真空段之活塞之旋轉相位差與馬達消耗電流之關係之實驗結果。橫軸之旋轉相位差係表示加壓段之活塞相對於真空段之活塞之相位超前角度(於驅動軸之旋轉方向,加壓側活塞相位角度超前真空側活塞)。 Next, Fig. 9 is an experimental result showing the relationship between the rotational phase difference of the piston of the pressurizing section with respect to the piston of the vacuum section and the motor current consumption. The rotational phase difference of the horizontal axis represents the phase lead angle of the piston of the pressurizing section with respect to the piston of the vacuum section (in the direction of rotation of the drive shaft, the phase angle of the pressurizing side piston leads the piston of the vacuum side).
如圖9所示,可瞭解馬達電流值係根據加壓段之活塞相對於真空段之活塞之旋轉相位差φ而變化。其被認為與各段之幫浦室間壓力變化之均衡性有關。 As shown in Fig. 9, it can be understood that the motor current value varies depending on the rotational phase difference φ of the piston of the pressurizing section with respect to the piston of the vacuum section. It is believed to be related to the balance of pressure changes between the chambers of each segment.
本實驗例中最低電流值的旋轉相位差φ為40°,此時各段之幫浦室之壓力波形如圖8(A)、(B)所示互為相反相位之關係。此時各段之幫浦室內部壓力之合成波形如圖8(C)所示,各段之幫浦室之內部壓力互相抵消的結果,使馬達之消耗電流達到最低。 In this experimental example, the rotational phase difference φ of the lowest current value is 40°, and the pressure waveforms of the pump chambers of the respective stages are in opposite phase relationship as shown in Figs. 8(A) and (B). At this time, the composite waveform of the pressure inside the pump chamber of each section is as shown in Fig. 8(C), and the internal pressure of the pump chamber of each section cancels each other, so that the consumption current of the motor is minimized.
相對於此,於各段之幫浦室之內部壓力互為同相位之驅動條件(加壓段之活塞相對於真空段之活塞之旋轉相位差為+220°),如圖7(C)所示,各段之幫浦室之內部壓力相互重疊對馬達造成周期性地負載變動,此被認為是增加消耗電流之原因。 In contrast, the internal pressures of the pump chambers of the respective sections are in phase with each other (the rotational phase difference of the piston of the pressurizing section with respect to the piston of the vacuum section is +220°), as shown in Fig. 7(C). It is shown that the internal pressures of the pump chambers of each segment overlap each other and cause periodic load changes to the motor, which is considered to be the reason for increasing the current consumption.
此外如圖9所示,當電源頻率為50赫或60赫時在旋轉相位差φ於大於0°未滿80°之範圍內,相較於當旋轉相位差φ=0°(360°)時,確認可減少馬達的驅動電流。特別是,不論電源頻率是否不同,在旋轉相位差φ=40°±30°的範圍內,相較於旋轉相位差φ=0°時可常時性地減少電流值。更進一步,在φ=40°±15°之範圍內,可更有效降低耗電量,在50赫時約可減少4.1%之電流值,在60赫時約可減少2.2%之電流值。 Further, as shown in FIG. 9, when the power supply frequency is 50 Hz or 60 Hz, when the rotational phase difference φ is greater than 0° and less than 80°, compared to when the rotational phase difference is φ=0° (360°). Confirm that the drive current of the motor can be reduced. In particular, regardless of whether the power supply frequency is different or not, the current value can be constantly reduced in comparison with the rotational phase difference φ = 0° in the range of the rotational phase difference φ = 40° ± 30°. Furthermore, in the range of φ=40°±15°, the power consumption can be more effectively reduced, and the current value can be reduced by about 4.1% at 50 Hz, and the current value can be reduced by about 2.2% at 60 Hz.
更進一步,藉由將上述相位差φ設定在40°±15°,不僅可降低電流消耗量,也可降低驅動幫浦裝置1時產生之振動。依據本發明人之實驗確定,例如當φ=40°時,真空段及加壓段之各活塞比起同相位(φ=0°)時,都能降低X、Y及Z軸方向(參照圖1)之振動加速度。此降低振動之效果,無論電源頻率在50赫或60赫皆確認可達到。 Further, by setting the phase difference φ to 40°±15°, not only the current consumption but also the vibration generated when the pump device 1 is driven can be reduced. According to the experiment of the present inventors, for example, when φ=40°, the pistons of the vacuum section and the pressurizing section can reduce the X, Y and Z axis directions when compared with the same phase (φ=0°) (refer to the figure). 1) Vibration acceleration. This vibration reduction effect is confirmed regardless of the power frequency at 50 Hz or 60 Hz.
以上已說明本發明之實施形態,但本發明非用以限定於只有上述實施形態,凡未脫離本發明主旨的範圍內所作之任何變更,均應包含於本案之專利範圍中。 The embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and any modifications made without departing from the spirit of the invention are intended to be included in the scope of the invention.
例如於以上實施形態,構成幫浦裝置之真空幫浦部11及加壓幫浦部12雖分別由搖動型活塞幫浦所構成,但不限於此,亦可例如由隔膜(diaphragm)式幫浦等其他往復移動型活塞幫浦所構成。 For example, in the above embodiment, the vacuum pumping portion 11 and the pressure pumping portion 12 constituting the pumping device are each constituted by a rocking type piston pump. However, the present invention is not limited thereto, and may be, for example, a diaphragm type pump or the like. Reciprocating piston pump.
又,以上實施形態,係以具有單一驅動馬達及兩個幫浦部之幫浦裝置為例予以說明,但本發明亦可適用於具複數組(例如兩組)由上述驅動馬達及兩個幫浦部構成幫浦單 元之幫浦裝置。 Moreover, the above embodiment is described by taking a pump device having a single drive motor and two pump portions as an example, but the present invention is also applicable to a plurality of arrays (for example, two groups) by the above-described drive motor and two pump portions. Forming a pump Yuan Zhipu device.
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EP (1) | EP2832998B1 (en) |
JP (1) | JP5878625B2 (en) |
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US20150147202A1 (en) * | 2013-11-27 | 2015-05-28 | Gardner Denver Thomas, Inc. | Pump having interchangeable heads |
BR112017004768A2 (en) * | 2014-09-11 | 2017-12-12 | Hermetik Hydraulik Ab | displacement device |
CN104612937B (en) * | 2015-03-06 | 2017-08-04 | 宁波捷美进出口有限公司 | Automobile inflator pump |
CN111255666B (en) * | 2018-12-03 | 2023-11-28 | 广东美的白色家电技术创新中心有限公司 | Booster pump and water purification equipment |
CN112032022B (en) * | 2020-09-10 | 2024-04-26 | 北京通嘉宏瑞科技有限公司 | Dry vacuum pump without dead angle purge gas and use method thereof |
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JPH07310651A (en) * | 1994-05-17 | 1995-11-28 | Toshiba Seiki Kk | Reciprocating pump unit |
JP2008190517A (en) * | 2007-02-05 | 2008-08-21 | Kazumori Otogao | Portable air compressor |
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US3190233A (en) * | 1963-03-05 | 1965-06-22 | Welch Harold George | Pumps |
US5564908A (en) * | 1994-02-14 | 1996-10-15 | Phillips Engineering Company | Fluid pump having magnetic drive |
US5584675A (en) * | 1995-09-15 | 1996-12-17 | Devilbiss Air Power Company | Cylinder sleeve for an air compressor |
GB2314593B (en) * | 1996-06-28 | 1999-11-10 | Thomas Industries Inc | Two-cylinder air compressor |
US6126410A (en) * | 1998-02-12 | 2000-10-03 | Gast Manufacturing Corporation | Head cover assembly for reciprocating compressor |
JP2006063874A (en) * | 2004-08-26 | 2006-03-09 | Ulvac Kiko Inc | Diaphragm type vacuum pump |
GB2463822B (en) * | 2005-05-17 | 2010-06-09 | Thomas Industries Inc | Pump improvements |
US8128382B2 (en) * | 2007-07-11 | 2012-03-06 | Gast Manufacturing, Inc. | Compact dual rocking piston pump with reduced number of parts |
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- 2013-03-07 WO PCT/JP2013/001436 patent/WO2013145576A1/en active Application Filing
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- 2013-03-07 EP EP13768264.7A patent/EP2832998B1/en active Active
- 2013-03-07 KR KR1020147026361A patent/KR101602089B1/en active IP Right Grant
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH07310651A (en) * | 1994-05-17 | 1995-11-28 | Toshiba Seiki Kk | Reciprocating pump unit |
JP2008190517A (en) * | 2007-02-05 | 2008-08-21 | Kazumori Otogao | Portable air compressor |
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US20150086402A1 (en) | 2015-03-26 |
JPWO2013145576A1 (en) | 2015-12-10 |
TW201400702A (en) | 2014-01-01 |
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KR101602089B1 (en) | 2016-03-09 |
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CN104204522A (en) | 2014-12-10 |
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