JP2006063874A - Diaphragm type vacuum pump - Google Patents

Diaphragm type vacuum pump Download PDF

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Publication number
JP2006063874A
JP2006063874A JP2004246902A JP2004246902A JP2006063874A JP 2006063874 A JP2006063874 A JP 2006063874A JP 2004246902 A JP2004246902 A JP 2004246902A JP 2004246902 A JP2004246902 A JP 2004246902A JP 2006063874 A JP2006063874 A JP 2006063874A
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Japan
Prior art keywords
bearings
bearing
vacuum pump
motor shaft
type vacuum
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JP2004246902A
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Japanese (ja)
Inventor
Junichi Aikawa
純一 相川
Tsuneo Osaka
常男 大坂
Taisuke Osaka
泰介 大坂
Akihiro Yamanaka
秋広 山中
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Ulvac Kiko Inc
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Ulvac Kiko Inc
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Priority to JP2004246902A priority Critical patent/JP2006063874A/en
Priority to KR1020050078270A priority patent/KR20060050651A/en
Priority to CNA2005100916004A priority patent/CN1740566A/en
Publication of JP2006063874A publication Critical patent/JP2006063874A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/001—Noise damping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/14—Pistons, piston-rods or piston-rod connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00—Components
    • F05B2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/30—Retaining components in desired mutual position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/96—Preventing, counteracting or reducing vibration or noise

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diaphragm type vacuum pump for preventing occurrence of vibration or creep of bearings in operation, and reducing operation noise. <P>SOLUTION: Adhesives are respectively applied between outer rings of the bearings 6a, 6b of a motor shaft 5 and housings 7a, 7b in which the bearings 6a, 6b are to be fitted; between outer rings of the bearings 11a, 11b of connecting rods 13a, 13b and the connecting rods 13a, 13b; between inner rings of the bearings 6a, 6b of the motor shaft 5 and the motor shaft 5; and between inner rings of the bearings 11a, 11b of the connecting rods 13a, 13b and eccentric shafts 9a, 9b, to perform adhesion therebetween. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、ダイアフラム型真空ポンプに関する。   The present invention relates to a diaphragm type vacuum pump.

従来より、半導体製造プロセスなどの工程で使用される真空容器等の内部を減圧するための真空ポンプとして、例えばダイアフラム型真空ポンプが知られている（例えば、特許文献１参照。）。   2. Description of the Related Art Conventionally, for example, a diaphragm type vacuum pump is known as a vacuum pump for reducing the pressure inside a vacuum vessel or the like used in a process such as a semiconductor manufacturing process (see, for example, Patent Document 1).

また、近年、酸素富化膜と真空ポンプを組み合わせて、酸素濃度を３０％程度に高めた酸素富化空気を発生する装置を構成し、この装置をエアコン等に組み込んで、室内の酸素濃度を約２１％以上に保つことができるようにした商品が実用化されている。このようなエアコンでは、酸素富化膜と真空ポンプは室外機に組み込まれており、酸素を選択的に拡散透過させる能力を持った酸素富化膜の２次側を真空ポンプにより減圧させて、酸素濃度が高められた空気を生成し、これを真空ポンプで大気圧まで加圧し、配管を通して室内機まで導いて室内に放出させる。   In recent years, an oxygen-enriched membrane and a vacuum pump have been combined to generate a device that generates oxygen-enriched air whose oxygen concentration has been increased to about 30%. Products that can be maintained at about 21% or more have been put into practical use. In such an air conditioner, the oxygen-enriched membrane and the vacuum pump are incorporated in the outdoor unit, and the secondary side of the oxygen-enriched membrane having the ability to selectively diffuse and transmit oxygen is reduced by the vacuum pump, Air having an increased oxygen concentration is generated, and this is pressurized to atmospheric pressure with a vacuum pump, led to an indoor unit through a pipe, and released into the room.

上記したエアコンの室外機に組み込まれる真空ポンプとして、ダイアフラム型真空ポンプが使用されている。この場合、エアコンの室外機に組み込まれた真空ポンプには、４０db（Ａ特性１ｍ）以下の静かな運転音が要求される。
特開２００１−３２９９６３号公報 A diaphragm type vacuum pump is used as a vacuum pump incorporated in the outdoor unit of the air conditioner described above. In this case, a quiet operation sound of 40 db (A characteristic 1 m) or less is required for the vacuum pump incorporated in the outdoor unit of the air conditioner.
JP 2001-329963 A

ところで、ダイアフラム型真空ポンプは、ダイアフラムを押し下げたり押し上げたりすることでポンプ室の容積を変化させ、吸引・圧縮を行うことから、ポンプの回転軸の一回転中におけるトルク変動が大きい。このため、モータ軸受け、コネクティングロッド軸受けには変動荷重がかかり、これらの軸受けの外輪とハウジング、又は、これらの軸受けの内輪と軸との嵌め合い部に僅かな隙間が存在すると、これらの軸受けが振動して騒音が発生して、運転音が大きくなり、更に、軸受けの外輪が回転する現象（クリープ現象）が発生し易くなって、軸精度が短時間で保てなくなる不具合も発生する。   By the way, the diaphragm type vacuum pump changes the volume of the pump chamber by pushing down or pushing up the diaphragm, and performs suction and compression. Therefore, the torque fluctuation during one rotation of the rotary shaft of the pump is large. For this reason, a variable load is applied to the motor bearing and the connecting rod bearing, and if there is a slight gap in the fitting part between the outer ring and the housing of these bearings or the inner ring and the shaft of these bearings, these bearings Vibration and noise are generated, driving noise increases, and a phenomenon in which the outer ring of the bearing rotates (creep phenomenon) is likely to occur, resulting in a problem that the shaft accuracy cannot be maintained in a short time.

そこで本発明は、運転時における軸受けの振動の発生やクリープの発生を防止して、運転騒音を低減することができるダイアフラム型真空ポンプを提供することを目的とする。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a diaphragm type vacuum pump that can prevent the occurrence of vibration and creep of a bearing during operation and reduce the operation noise.

上記目的を達成するために本発明は、電動モータの片側又は両側に第１の軸受けを介して回転支持したモータ軸を伸長させ、前記モータ軸上に偏芯軸と第２の軸受けを介してコネクティングロッドを配置して、前記コネクティングロッドの先端側にダイアフラムを取付け、前記モータ軸の回転による前記コネクティングロッドの往復運動により前記ダイアフラムを動作させて真空排気を行なうダイアフラム型真空ポンプにおいて、前記第１の軸受けの外輪と該第１の軸受けを嵌合するハウジングとの間、及び前記第２の軸受けの外輪と前記コネクティングロッドとの間、及び前記第１の軸受けの内輪と前記モータ軸との間、及び第２の軸受けの内輪と前記偏芯軸との間に、それぞれ接着剤を塗布して接着することを特徴としている。   In order to achieve the above object, the present invention extends a motor shaft that is rotatably supported on one side or both sides of an electric motor via a first bearing, and on the motor shaft via an eccentric shaft and a second bearing. In the diaphragm type vacuum pump, in which the connecting rod is disposed, a diaphragm is attached to a tip end side of the connecting rod, and the diaphragm is operated by reciprocating movement of the connecting rod by rotation of the motor shaft to perform evacuation. Between the outer ring of the first bearing and the housing that fits the first bearing, between the outer ring of the second bearing and the connecting rod, and between the inner ring of the first bearing and the motor shaft. In addition, an adhesive is applied and bonded between the inner ring of the second bearing and the eccentric shaft.

また、前記第１の軸受けの外輪と前記ハウジングとの間、及び前記第２の軸受けの外輪と前記コネクティングロッドとの間に、それぞれ軟鋼製のリングを挿入し、接着剤で接着することを特徴としている。   Further, a ring made of mild steel is inserted between the outer ring of the first bearing and the housing, and between the outer ring of the second bearing and the connecting rod, and is bonded with an adhesive. It is said.

本発明によれば、運転時におけるモータ軸及びコネクティングロッドの軸受けの振動の発生やクリープの発生を防止して、運転騒音を低減することができる。   ADVANTAGE OF THE INVENTION According to this invention, generation | occurrence | production of the vibration of a motor shaft and the bearing of a connecting rod at the time of a driving | operation and generation | occurrence | production of creep can be prevented, and driving | running noise can be reduced.

以下、本発明を図示の実施形態に基づいて説明する。図１は、本発明の実施形態に係るダイアフラム型真空ポンプを示す概略断面図、図２は、その上面図である。   Hereinafter, the present invention will be described based on the illustrated embodiments. FIG. 1 is a schematic sectional view showing a diaphragm type vacuum pump according to an embodiment of the present invention, and FIG. 2 is a top view thereof.

図１において、１は中央部に設けたモータ２のステータで、モータケース３内に挿入されて固定されている。また、４はモータ２のロータで、モータ軸（シャフト）５が圧入固定されている。ロータ４の両側のモータ軸５にはベアリングを有する軸受け６ａ、６ｂがそれぞれ取付けられており、各軸受け６ａ、６ｂはアルミ合金製のハウジング７ａ、７ｂにそれぞれ嵌め込まれている。各ハウジング７ａ、７ｂは、ポンプケース８ａ、８ｂにそれぞれ挿入され、ねじ（不図示）で固定されている。   In FIG. 1, reference numeral 1 denotes a stator of a motor 2 provided at a central portion, which is inserted into a motor case 3 and fixed. Reference numeral 4 denotes a rotor of the motor 2, and a motor shaft (shaft) 5 is press-fitted and fixed. Bearings 6a and 6b having bearings are respectively attached to the motor shafts 5 on both sides of the rotor 4, and the bearings 6a and 6b are fitted into aluminum alloy housings 7a and 7b, respectively. The housings 7a and 7b are inserted into the pump cases 8a and 8b, respectively, and are fixed with screws (not shown).

モータ軸５上の各軸受け６ａ、６ｂの外側には、偏芯軸９ａ、９ｂと冷却ファン１０ａ、１０ｂがそれぞれ固定されており、各偏芯軸９ａ、９ｂにはベアリングを有する軸受け１１ａ、１１ｂがそれぞれ取付けられている。各偏芯軸９ａ、９ｂは、モータ軸５が挿入される穴と各軸受け１１ａ、１１ｂの内輪が挿入される穴が偏芯するように形成されており、各偏芯軸９ａ、９ｂの偏芯量が各ダイアフラム１２ａ、１２ｂの往復運動量（ストローク量）となる。各軸受け１１ａ、１１ｂには、アルミ合金製のコネクティングロッド１３ａ、１３ｂを介してダイアフラム１２ａ、１２ｂがそれぞれ接続されている。   Eccentric shafts 9a and 9b and cooling fans 10a and 10b are respectively fixed to the outer sides of the bearings 6a and 6b on the motor shaft 5, and the eccentric shafts 9a and 9b have bearings 11a and 11b having bearings. Are installed respectively. The eccentric shafts 9a and 9b are formed so that the hole into which the motor shaft 5 is inserted and the hole into which the inner ring of each bearing 11a and 11b is inserted are eccentric, and the eccentric shafts 9a and 9b are offset. The core amount is the reciprocating motion amount (stroke amount) of each diaphragm 12a, 12b. Diaphragms 12a and 12b are connected to the bearings 11a and 11b via connecting rods 13a and 13b made of an aluminum alloy, respectively.

各ダイアフラム１２ａ、１２ｂの中心側は固定金具１４ａ、１４ｂによりそれぞれ固定されており、各ダイアフラム１２ａ、１２ｂの外周部はポンプヘッド１５ａ、１５ｂによりそれぞれ固定されている。各ポンプヘッド１５ａ、１５ｂには、吸気弁１６ａ、１６ｂと排気弁１７ａ、１７ｂがそれぞれ取付けられており、ダイアフラム１２ａ、１２ｂとポンプヘッド１５ａ、１５ｂによりそれぞれ形成されるポンプ室内の圧力が大気圧より下回ると吸気弁１６ａ、１６ｂが開き、前記ポンプ室内の圧力が大気圧より高まると排気弁１７ａ、１７ｂが開くように構成されている。ポンプヘッド１５ａ、１５ｂの上部には、各吸気弁１６ａ、１６ｂと各排気弁１７ａ、１７ｂの上方に位置するようにしてポンプヘッドカバー１８ａ、１８ｂがそれぞれ取付けられている。   The center sides of the diaphragms 12a and 12b are fixed by fixing brackets 14a and 14b, respectively, and the outer peripheral portions of the diaphragms 12a and 12b are fixed by pump heads 15a and 15b, respectively. The pump heads 15a and 15b are respectively provided with intake valves 16a and 16b and exhaust valves 17a and 17b. The pressure in the pump chamber formed by the diaphragms 12a and 12b and the pump heads 15a and 15b is less than the atmospheric pressure. The intake valves 16a and 16b are opened when the pressure is lower, and the exhaust valves 17a and 17b are opened when the pressure in the pump chamber is increased from the atmospheric pressure. Pump head covers 18a and 18b are respectively attached to the upper portions of the pump heads 15a and 15b so as to be positioned above the intake valves 16a and 16b and the exhaust valves 17a and 17b.

上記したダイアフラム型真空ポンプは、各ポンプケース８ａ、８ｂ内にダイアフラム１２ａ、１２ｂをそれぞれ有する２ヘッドポンプで、各ダイアフラム１２ａ、１２ｂの往復運動の位相が１８０度ずれており、各接続配管１９ａ、１９ｂによって並列に接続されている。また、一方のポンプヘッド１５ａの側面には、吸気口２０と排気口２１がそれぞれ接続されている。   The diaphragm type vacuum pump described above is a two-head pump having diaphragms 12a and 12b in the pump cases 8a and 8b, respectively, and the phase of the reciprocating motion of the diaphragms 12a and 12b is shifted by 180 degrees. 19b is connected in parallel. An intake port 20 and an exhaust port 21 are connected to the side surface of one pump head 15a.

かくして、モータ２を駆動させるとそのモータ軸５が回転することで、各偏芯軸９ａ、９ｂが回転することにより各コネクティングロッド１３ａ、１３ｂが往復運動する。各コネクティングロッド１３ａ、１３ｂの往復運動により、接続されている各コネクティングロッド１３ａ、１３ｂが、それぞれ１８０度位相がずれて上下動することによって吸気・排気が繰り返され、真空排気が行なわれる。   Thus, when the motor 2 is driven, the motor shaft 5 rotates, and the eccentric shafts 9a and 9b rotate, whereby the connecting rods 13a and 13b reciprocate. As the connecting rods 13a and 13b reciprocate, the connected connecting rods 13a and 13b move up and down 180 degrees out of phase, whereby intake and exhaust are repeated, and vacuum exhaust is performed.

ところで、上記したダイアフラム型真空ポンプを運転して真空排気を行なっているときには、可動部分等から振動音や動作音が発生し、これらの音が運転騒音となる。このうち、特に騒音レベルの高いのは、以下に挙げる（ａ）〜（ｄ）である。   By the way, when the above-described diaphragm type vacuum pump is operated to perform evacuation, vibration sound or operation sound is generated from a movable part or the like, and these sounds become operation noise. Among these, (a) to (d) listed below have particularly high noise levels.

（ａ）軸受け６ａ、６ｂの外輪とハウジング７ａ、７ｂ間の嵌合箇所におけるわずかな隙間部分で、軸受け６ａ、６ｂの外輪が振動することによる騒音。   (A) Noise caused by vibration of the outer ring of the bearings 6a and 6b in a slight gap portion at a fitting portion between the outer rings of the bearings 6a and 6b and the housings 7a and 7b.

（ｂ）軸受け１１ａ、１１ｂの外輪とコネクティングロッド１３ａ、１３ｂ間の嵌合箇所におけるわずかな隙間部分で、軸受け１１ａ、１１ｂの外輪が振動することによる騒音。   (B) Noise caused by vibration of the outer ring of the bearings 11a and 11b at a slight gap portion at a fitting portion between the outer ring of the bearings 11a and 11b and the connecting rods 13a and 13b.

（ｃ）軸受け６ａ、６ｂの内輪とモータ軸５間の嵌合箇所に隙間が生じた場合に軸受け６ａ、６ｂの内輪が振動することによる騒音。   (C) Noise caused by vibration of the inner rings of the bearings 6a and 6b when a gap is generated at a fitting portion between the inner rings of the bearings 6a and 6b and the motor shaft 5.

（ｄ）軸受け１１ａ、１１ｂの内輪と偏芯軸９ａ、９ｂ間の嵌合箇所に隙間が生じた場合に軸受け１１ａ、１１ｂの内輪が振動することによる騒音。   (D) Noise caused by vibration of the inner rings of the bearings 11a and 11b when a gap is generated at a fitting portion between the inner rings of the bearings 11a and 11b and the eccentric shafts 9a and 9b.

上記した本発明に係るダイアフラム型真空ポンプでは、アルミ合金製の各ハウジング７ａ、７ｂの鋼製の各軸受け６ａ、６ｂの外輪が挿入される部分に、軟鋼製のリング２２ａ、２２ｂをそれぞれ鋳込んでいる。このリング２２ａ、２２ｂを鋳込む理由は、このダイアフラム型真空ポンプが、−１０℃〜７０℃程度の雰囲気で使用されることによる。   In the diaphragm type vacuum pump according to the present invention described above, the rings 22a and 22b made of mild steel are respectively cast into the portions where the outer rings of the steel bearings 6a and 6b of the respective housings 7a and 7b made of aluminum alloy are inserted. It is out. The reason why the rings 22a and 22b are cast is that the diaphragm type vacuum pump is used in an atmosphere of about −10 ° C. to 70 ° C.

即ち、７０℃程度の雰囲気では、運転中の軸受け６ａ、６ｂ付近の温度は１００℃程度となる。アルミ合金（ハウジング７ａ、７ｂ）の熱膨張率は、鋼（軸受け６ａ、６ｂ）の熱膨張率よりも約２．２倍大きい。そのため、鋼材からなる軸受け６ａ、６ｂとアルミ合金製のハウジング７ａ、７ｂの嵌合部分の隙間が０．０１３ｍｍ程度大きくなることによって、軸受け６ａ、６ｂの外輪が回転するクリープ現象が生じて回転精度が保てなくなり、かつ、軸受け６ａ、６ｂの外輪に振動が発生して騒音レベルが高くなる。   That is, in an atmosphere of about 70 ° C., the temperature near the bearings 6a and 6b during operation is about 100 ° C. The thermal expansion coefficient of the aluminum alloy (housings 7a and 7b) is about 2.2 times larger than that of steel (bearings 6a and 6b). Therefore, when the gap between the fitting portions of the steel bearings 6a and 6b and the aluminum alloy housings 7a and 7b is increased by about 0.013 mm, a creep phenomenon occurs in which the outer ring of the bearings 6a and 6b rotates, and the rotation accuracy. Cannot be maintained, and vibrations are generated in the outer rings of the bearings 6a and 6b to increase the noise level.

そこで本発明では、上記（ａ）に起因する騒音を抑えるために、上記したようにアルミ合金製の各ハウジング７ａ、７ｂの鋼製の各軸受け６ａ、６ｂの外輪が挿入される部分に、軟鋼製のリング２２ａ、２２ｂをそれぞれ鋳込んで、このリング２２ａ、２２ｂ内に接着剤を薄く塗布して軸受け６ａ、６ｂの外輪を挿入して接着する。このように、軸受け６ａ、６ｂのベアリング鋼と熱膨張係数の近い軟鋼製のリング２２ａ、２２ｂを設けることにより、熱膨張による軸受け６ａ、６ｂとハウジング７ａ、７ｂの嵌合部分の隙間が大きくなることが抑制され、高温時でも接着剤による軸受け６ａ、６ｂの外輪とハウジング７ａ、７ｂの接合強度を保つことができる。   Therefore, in the present invention, in order to suppress the noise caused by the above (a), as described above, the mild steel is provided in the portion where the outer ring of each steel bearing 6a, 6b of each aluminum alloy housing 7a, 7b is inserted. Rings 22a and 22b made by casting are respectively casted, an adhesive is thinly applied in the rings 22a and 22b, and outer rings of the bearings 6a and 6b are inserted and bonded. Thus, by providing the rings 22a and 22b made of mild steel having a thermal expansion coefficient close to that of the bearing steel of the bearings 6a and 6b, the gap between the fitting portions of the bearings 6a and 6b and the housings 7a and 7b due to thermal expansion becomes large. Therefore, the bonding strength between the outer rings of the bearings 6a and 6b and the housings 7a and 7b can be maintained even at high temperatures.

これにより、軸受け６ａ、６ｂの外輪の振動が抑えられて騒音が小さくなり、かつ、軸受け６ａ、６ｂの外輪が回転するクリープ現象を抑えることができる。   As a result, vibrations of the outer rings of the bearings 6a and 6b are suppressed, noise is reduced, and a creep phenomenon in which the outer rings of the bearings 6a and 6b rotate can be suppressed.

また、上記（ｂ）に起因する騒音を抑えるために、同様の理由で各コネクティングロッド１３ａ、１３ｂの各軸受け１１ａ、１１ｂの外輪が挿入される部分にも、軟鋼製のリング２３ａ、２３ｂをそれぞれ鋳込んで、このリング２３ａ、２３ｂ内に接着剤を薄く塗布して軸受け１１ａ、１１ｂの外輪を挿入して接着する。このように、軸受け１１ａ、１１ｂのベアリング鋼と熱膨張係数の近い軟鋼製のリング２３ａ、２３ｂを設けることにより、熱膨張による軸受け１１ａ、１１ｂとコネクティングロッド１３ａ、１３ｂの嵌合部分の隙間が大きくなることが抑制され、高温時でも接着剤による軸受け１１ａ、１１ｂの外輪とコネクティングロッド１３ａ、１３ｂの接合強度を保つことができる。   Further, in order to suppress the noise caused by the above (b), for the same reason, the rings 23a and 23b made of mild steel are respectively provided in the portions where the outer rings of the bearings 11a and 11b of the connecting rods 13a and 13b are inserted. After casting, an adhesive is thinly applied in the rings 23a and 23b, and the outer rings of the bearings 11a and 11b are inserted and bonded. Thus, by providing the bearing steel of the bearings 11a and 11b and the rings 23a and 23b made of mild steel having a thermal expansion coefficient close to that of the bearings 11a and 11b, a gap between the fitting portions of the bearings 11a and 11b and the connecting rods 13a and 13b due to thermal expansion is large. Therefore, the bonding strength between the outer rings of the bearings 11a and 11b and the connecting rods 13a and 13b can be maintained even at high temperatures.

これにより、軸受け１１ａ、１１ｂの外輪の振動が抑えられて騒音が小さくなり、かつ、軸受け１１ａ、１１ｂの外輪が回転するクリープ現象を抑えることができる。   As a result, vibrations of the outer rings of the bearings 11a and 11b are suppressed, noise is reduced, and a creep phenomenon in which the outer rings of the bearings 11a and 11b rotate can be suppressed.

なお、本発明者の実験によれば、高温時に軟鋼製のリング２２ａ、２２ｂ（及びリング２３ａ、２３ｂ）とアルミ合金製のハウジング７ａ、７ｂ（及びコネクティングロッド１３ａ、１３ｂ）は、高温時においても熱膨張率の違いによって分離することなく、強固に結合が保たれていた。   According to the inventor's experiment, the mild steel rings 22a and 22b (and the rings 23a and 23b) and the aluminum alloy housings 7a and 7b (and the connecting rods 13a and 13b) can be used at high temperatures. A strong bond was maintained without separation due to the difference in thermal expansion coefficient.

また、本発明では、上記（ｃ）に起因する騒音を抑えるために、モータ２のモータ軸５表面に接着剤溜まりの溝（不図示）を設けて、軸受け６ａ、６ｂの内輪内面とこの内輪が挿入されるモータ軸５に嫌気性接着剤を薄く塗布し、各軸受け６ａ、６ｂをモータ軸５に圧入固定している。更に、軸受け６ａ、６ｂの外輪が挿入されるハウジング７ａ、７ｂの内面とこの軸受け６ａ、６ｂの外輪外面に接着剤を塗布して、各ハウジング７ａ、７ｂの軸穴に各軸受け６ａ、６ｂをそれぞれ挿入し、各ハウジング７ａ、７ｂをモータケース３にボルト（不図示）で固定している。なお、この際、波ばね２４で軸受け６ａの外輪に予圧を与え、軸受け６ａの軸方向の遊びをなくしておいて接着固定する。   In the present invention, in order to suppress the noise caused by the above (c), an adhesive pool groove (not shown) is provided on the surface of the motor shaft 5 of the motor 2, and the inner ring inner surfaces of the bearings 6a and 6b and the inner ring are provided. An anaerobic adhesive is thinly applied to the motor shaft 5 into which is inserted, and the bearings 6 a and 6 b are press-fitted and fixed to the motor shaft 5. Further, an adhesive is applied to the inner surfaces of the housings 7a and 7b into which the outer rings of the bearings 6a and 6b are inserted and the outer surfaces of the outer rings of the bearings 6a and 6b, and the bearings 6a and 6b are attached to the shaft holes of the housings 7a and 7b. Each housing 7a and 7b is fixed to the motor case 3 with bolts (not shown). At this time, a preload is applied to the outer ring of the bearing 6a by the wave spring 24 to eliminate the play in the axial direction of the bearing 6a and fix them.

これにより、軸受け６ａ、６ｂの内輪とモータ軸５間に隙間が生じることが防止され、軸受け６ａ、６ｂの内輪の振動が抑えられて騒音が小さくなる。   This prevents a gap from being generated between the inner rings of the bearings 6a and 6b and the motor shaft 5, thereby suppressing the vibration of the inner rings of the bearings 6a and 6b and reducing noise.

また、本発明では、上記（ｄ）に起因する騒音を抑えるために、軸受け１１ａ、１１ｂの外輪とリング２３ａ、２３ｂ間、及び軸受け１１ａ、１１ｂの内輪と偏芯軸９ａ、９ｂ間に嫌気性接着剤を薄く塗布して接着固定している。この場合においても、モータ２のモータ軸５表面に接着剤溜まりの溝（不図示）を設けて、軸受け１１ａ、１１ｂの内輪内面とこの内輪が挿入されるモータ軸５に嫌気性接着剤を薄く塗布し、各軸受け１１ａ、１１ｂをモータ軸５に圧入固定している。また、リング２３ａ、２３ｂにも接着剤溜まりの溝（不図示）を設けている。   Further, in the present invention, in order to suppress the noise caused by the above (d), anaerobic is formed between the outer ring of the bearings 11a and 11b and the rings 23a and 23b, and between the inner ring of the bearings 11a and 11b and the eccentric shafts 9a and 9b. The adhesive is thinly applied and fixed. Even in this case, a groove (not shown) for storing an adhesive is provided on the surface of the motor shaft 5 of the motor 2, and an anaerobic adhesive is thinly formed on the inner ring inner surfaces of the bearings 11a and 11b and the motor shaft 5 into which the inner ring is inserted. The bearings 11 a and 11 b are press-fitted and fixed to the motor shaft 5. The rings 23a and 23b are also provided with grooves (not shown) for storing the adhesive.

これにより、軸受け１１ａ、１１ｂの内輪と偏芯軸９ａ、９ｂ間に隙間が生じることが防止され、軸受け１１ａ、１１ｂの内輪の振動が抑えられて騒音が小さくなる。   This prevents a gap from being generated between the inner rings of the bearings 11a and 11b and the eccentric shafts 9a and 9b, thereby suppressing vibrations of the inner rings of the bearings 11a and 11b and reducing noise.

上記のように騒音低減措置を施した本発明に係るダイアフラム型真空ポンプの騒音レベルを測定した結果、このダイアフラム型真空ポンプから１ｍ離れた距離での騒音レベルは３９db（Ａ特性）であった。一方、上記のように騒音低減措置を施していない従来のダイアフラム型真空ポンプで、同様に騒音レベルを測定した結果、このダイアフラム型真空ポンプから１ｍ離れた距離での騒音レベルは４７db（Ａ特性）であった。この結果から、上記のように騒音低減措置を施した本発明に係るダイアフラム型真空ポンプは、騒音レベルが大幅に低減されていることが裏付けられた。   As a result of measuring the noise level of the diaphragm type vacuum pump according to the present invention in which noise reduction measures were taken as described above, the noise level at a distance of 1 m from the diaphragm type vacuum pump was 39 db (A characteristic). On the other hand, as a result of measuring the noise level in the same manner with the conventional diaphragm type vacuum pump not taking noise reduction measures as described above, the noise level at a distance of 1 m from this diaphragm type vacuum pump is 47 db (A characteristic). Met. From this result, it was confirmed that the noise level of the diaphragm type vacuum pump according to the present invention in which noise reduction measures were taken as described above was greatly reduced.

本発明の実施形態に係るダイアフラム型真空ポンプを示す概略断面図。1 is a schematic cross-sectional view showing a diaphragm type vacuum pump according to an embodiment of the present invention. 本発明の実施形態に係るダイアフラム型真空ポンプを示す上面図。The top view which shows the diaphragm type | mold vacuum pump which concerns on embodiment of this invention.

符号の説明Explanation of symbols

２ モータ
４ ロータ
５ モータ軸
６ａ、６ｂ、１１ａ、１１ｂ 軸受け
７ａ、７ｂ ハウジング
９ａ、９ｂ 偏芯軸
１２ａ、１２ｂ ダイアフラム
１３ａ、１３ｂ コネクティングロッド
２２ａ、２２ｂ、２３ａ、２３ｂ リング 2 Motor 4 Rotor 5 Motor shaft 6a, 6b, 11a, 11b Bearing 7a, 7b Housing 9a, 9b Eccentric shaft 12a, 12b Diaphragm 13a, 13b Connecting rod 22a, 22b, 23a, 23b Ring

Claims (2)

電動モータの片側又は両側に第１の軸受けを介して回転支持したモータ軸を伸長させ、前記モータ軸上に偏芯軸と第２の軸受けを介してコネクティングロッドを配置して、前記コネクティングロッドの先端側にダイアフラムを取付け、前記モータ軸の回転による前記コネクティングロッドの往復運動により前記ダイアフラムを動作させて真空排気を行なうダイアフラム型真空ポンプにおいて、
前記第１の軸受けの外輪と該第１の軸受けを嵌合するハウジングとの間、及び前記第２の軸受けの外輪と前記コネクティングロッドとの間、及び前記第１の軸受けの内輪と前記モータ軸との間、及び第２の軸受けの内輪と前記偏芯軸との間に、それぞれ接着剤を塗布して接着する、
ことを特徴とするダイアフラム型真空ポンプ。 A motor shaft that is rotatably supported via a first bearing on one or both sides of the electric motor is extended, a connecting rod is disposed on the motor shaft via an eccentric shaft and a second bearing, and the connecting rod In a diaphragm type vacuum pump that attaches a diaphragm on the front end side and operates the diaphragm by reciprocating movement of the connecting rod by rotation of the motor shaft to evacuate,
Between the outer ring of the first bearing and the housing fitting the first bearing, between the outer ring of the second bearing and the connecting rod, and the inner ring of the first bearing and the motor shaft And between the inner ring of the second bearing and the eccentric shaft, respectively, by applying an adhesive and bonding,
A diaphragm type vacuum pump characterized by this. 前記第１の軸受けの外輪と前記ハウジングとの間、及び前記第２の軸受けの外輪と前記コネクティングロッドとの間に、それぞれ軟鋼製のリングを挿入し、接着剤で接着する、
ことを特徴とする請求項１に記載のダイアフラム型真空ポンプ。

Inserting a ring made of mild steel between the outer ring of the first bearing and the housing and between the outer ring of the second bearing and the connecting rod, respectively, and bonding with an adhesive,
The diaphragm type vacuum pump according to claim 1.

JP2004246902A 2004-08-26 2004-08-26 Diaphragm type vacuum pump Pending JP2006063874A (en)

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JP2004246902A JP2006063874A (en) 2004-08-26 2004-08-26 Diaphragm type vacuum pump
KR1020050078270A KR20060050651A (en) 2004-08-26 2005-08-25 The diaphragm-shaped vacuum pump
CNA2005100916004A CN1740566A (en) 2004-08-26 2005-08-26 Diaphragm vacuum pump

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010096244A (en) * 2008-10-15 2010-04-30 Amadera Kuatsu Kogyo Kk Mounting method of crank to bearing and bearing mechanism
JP2010523870A (en) * 2007-04-03 2010-07-15 カー エヌ エフ ノイベルガー ゲゼルシャフト ミット ベシュレンクテル ハフツング Pump stand
CN102536754A (en) * 2010-11-30 2012-07-04 Ulvac机工株式会社 Pump device and pump system
CN105134567A (en) * 2015-07-21 2015-12-09 石家庄佳信汽车制动系统有限公司 Horizontally-opposite diaphragm type electric vacuum pump
CN114623378A (en) * 2022-01-21 2022-06-14 北京国科环宇科技股份有限公司 Method for vacuumizing vacuum container

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888012U (en) * 1981-12-11 1983-06-15 株式会社日立製作所 bearing
JPS6179069A (en) * 1984-09-21 1986-04-22 Aisin Warner Ltd Bearing support sleeve for transmission of vehicle
JPH0650347A (en) * 1992-07-31 1994-02-22 Mitsubishi Heavy Ind Ltd Outside drive type compressor
JP2003161328A (en) * 2001-11-27 2003-06-06 Matsushita Electric Ind Co Ltd Motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888012U (en) * 1981-12-11 1983-06-15 株式会社日立製作所 bearing
JPS6179069A (en) * 1984-09-21 1986-04-22 Aisin Warner Ltd Bearing support sleeve for transmission of vehicle
JPH0650347A (en) * 1992-07-31 1994-02-22 Mitsubishi Heavy Ind Ltd Outside drive type compressor
JP2003161328A (en) * 2001-11-27 2003-06-06 Matsushita Electric Ind Co Ltd Motor

Cited By (5)

* Cited by examiner, † Cited by third party
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JP2010523870A (en) * 2007-04-03 2010-07-15 カー エヌ エフ ノイベルガー ゲゼルシャフト ミット ベシュレンクテル ハフツング Pump stand
JP2010096244A (en) * 2008-10-15 2010-04-30 Amadera Kuatsu Kogyo Kk Mounting method of crank to bearing and bearing mechanism
CN102536754A (en) * 2010-11-30 2012-07-04 Ulvac机工株式会社 Pump device and pump system
CN105134567A (en) * 2015-07-21 2015-12-09 石家庄佳信汽车制动系统有限公司 Horizontally-opposite diaphragm type electric vacuum pump
CN114623378A (en) * 2022-01-21 2022-06-14 北京国科环宇科技股份有限公司 Method for vacuumizing vacuum container

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