TWI618589B - Device and method for manufacturing material particles - Google Patents

Device and method for manufacturing material particles Download PDF

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TWI618589B
TWI618589B TW105143108A TW105143108A TWI618589B TW I618589 B TWI618589 B TW I618589B TW 105143108 A TW105143108 A TW 105143108A TW 105143108 A TW105143108 A TW 105143108A TW I618589 B TWI618589 B TW I618589B
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material powder
powder
droplets
droplet
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TW201822917A (en
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陳春夏
林東勝
詹仕名
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悅城科技股份有限公司
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Abstract

本發明揭示一種可以製造材料粉末的方法及裝置,包含提供一種製造材料粉末的裝置,其包含一餵料單元,用於連續提供一原料;及一霧化塔,在該霧化塔內設置有一高頻感應加熱單元,其加熱該原料之一端,並使其熔融成材料液滴;一電漿加熱噴流單元,其對該材料液滴提供高溫,並且對該材料液滴噴吹,使該材料液滴霧化;及一粉末收集單元,其用以收集經霧化的材料液滴經自然沈降後所形成的材料粉末。根據本發明可以使材料粉末粒徑分佈範圍縮小,提供尺寸均勻的材料粉末。The invention discloses a method and a device for manufacturing a material powder, comprising: providing a device for manufacturing a material powder, comprising: a feeding unit for continuously supplying a raw material; and an atomizing tower, wherein the atomizing tower is provided with a a high frequency induction heating unit that heats one end of the material and melts it into a droplet of material; a plasma heats the jet unit, which supplies a high temperature to the droplet of the material, and blows the droplet of the material to make the material Droplet atomization; and a powder collection unit for collecting the material powder formed by the natural sedimentation of the atomized material droplets. According to the present invention, the particle size distribution range of the material powder can be reduced to provide a material powder having a uniform size.

Description

製造材料粉末的方法及裝置Method and device for manufacturing material powder

本發明大體上係關於粉末材料的製造技術;具體而言,本發明係關於粒徑均勻化製造粉末材料的技術。The present invention relates generally to the fabrication of powder materials; in particular, the present invention relates to techniques for making powder materials with uniform particle size.

材料粉末在現今製造業是一種重要的製造原料,例如是在日漸廣泛應用的3D列印技術、平面的噴墨列印(ink-jet printing)、網印技術(screen printing)、壓印技術(imprinting)等等。 在各種列印技術使用含有所需印製材料粉末的墨水,其中待印製的材料粉末將關鍵性地影響列印品質,特別是在電子電路產品中。粗細不均的金屬粉末,將造成電子線路線徑控制困難,甚至於造成短路或斷路,進而造成元件失效。 傳用製造材料粉末的技術有:機械粉碎法、電漿旋轉電極法、電極感應熔煉氣霧化法、電漿火炬法。特別是電極感應熔煉氣霧化(EIGA)是金屬粉末材料廣泛使用的方法,是利用高速氣流噴吹熔融態的金屬液滴。圖1顯示習知的電極感應熔煉氣霧化裝置100,當感應線圈101加熱使金屬原料熔融後,利用高壓噴氣裝置102對熔融態金屬液滴噴吹,使其破碎成微小的液滴,微小金屬液滴經冷卻固化後沈降至收集皿。然而,習知EIGA裝置所產生的金屬粉末粒徑分佈廣泛,需進一步過篩所產出的金屬粉末始能應用於列印墨水中,甚至需進一步細化所產出的金屬粉末,生產通量效益低。此外高速氣流噴吹消耗大量的氣體,製造成本昂貴,不符合列印技術所需的降低生產成本之目的。 因此亟需一種可以生產細微並且粒徑均勻的材料粉末之裝置及方法,以解決生產通量低及製造成本高的問題。Material powder is an important manufacturing material in today's manufacturing industry, for example, in the increasingly popular 3D printing technology, flat inkjet printing, screen printing, and imprint technology. Imprinting) and so on. The use of inks containing the desired printed material powders in various printing techniques, wherein the material powder to be printed will critically affect print quality, particularly in electronic circuit products. The uneven thickness of the metal powder will cause difficulty in controlling the wire diameter of the electronic circuit, and even cause a short circuit or an open circuit, thereby causing component failure. Techniques for transferring powders for manufacturing materials include mechanical pulverization, plasma rotary electrode method, electrode induction smelting gas atomization method, and plasma torch method. In particular, electrode-induced smelting gas atomization (EIGA) is a widely used method for metal powder materials, which uses a high-speed gas stream to spray molten metal droplets. 1 shows a conventional electrode induction smelting gas atomization device 100. When the induction coil 101 is heated to melt the metal material, the molten metal droplets are blown by the high pressure gas jet device 102 to break into minute droplets. The metal droplets are solidified by cooling and settled to a collection dish. However, the metal powder produced by the conventional EIGA device has a wide particle size distribution, and the metal powder produced by further screening needs to be applied to the printing ink, and even the metal powder produced needs to be further refined, and the throughput is produced. Low efficiency. In addition, high-speed airflow blowing consumes a large amount of gas, which is expensive to manufacture and does not meet the production cost reduction required by the printing technology. Therefore, there is a need for an apparatus and method for producing a fine and uniform particle size material powder to solve the problems of low production throughput and high manufacturing cost.

本發明提供一種製造材料粉末的裝置及方法,其用於製造粒徑均勻化材料粉末,使材料粉末粒徑分佈範圍縮小。 本發明之一實施例提供一種製造材料粉末的裝置,其包含一餵料單元,用於連續地提供一原料;及一霧化塔,在該霧化塔內設置有一高頻感應加熱單元,其加熱該原料之一端,並使其熔融成材料液滴;一電漿加熱噴流單元,其對該材料液滴提供高溫,並且對該材料液滴噴吹,使該材料液滴霧化;及一粉末收集單元,其用以收集經霧化的材料液滴經自然沈降後所形成的材料粉末。 本發明之另一實施例提供一種製造材料粉末的方法,其包含以一穩定速度連續地提供一原料進入一霧化塔;在該霧化塔內加熱該原料之一端,並使其熔融成材料液滴;對該材料液滴提供高溫,並且對該材料液滴噴吹,使該材料液滴霧化;及自然沈降經霧化的材料液滴,使其形成材料粉末。 根據本發明,可以使材料粉末粒徑分佈範圍縮小,提供尺寸均勻的材料粉末,進一步簡化製造程序,進而提供製造通量。The present invention provides an apparatus and method for producing a material powder for producing a particle size homogenizing material powder to reduce the particle size distribution range of the material powder. An embodiment of the present invention provides an apparatus for manufacturing a material powder, comprising: a feeding unit for continuously supplying a raw material; and an atomizing tower, wherein a high frequency induction heating unit is disposed in the atomizing tower, Heating one end of the raw material and melting it into a droplet of material; a plasma heating the jetting unit, which supplies a high temperature to the droplet of the material, and blowing the droplet of the material to atomize the droplet of the material; A powder collection unit for collecting material powder formed by natural sedimentation of the atomized material droplets. Another embodiment of the present invention provides a method of producing a material powder comprising continuously supplying a raw material to an atomization tower at a steady rate; heating one end of the raw material in the atomization tower and melting it into a material a droplet; providing a high temperature to the droplet of the material, and blowing the droplet of the material to atomize the droplet of the material; and naturally depositing the droplet of the atomized material to form a powder of the material. According to the present invention, the particle size distribution range of the material powder can be reduced, and a material powder having a uniform size can be provided, which further simplifies the manufacturing process and further provides a manufacturing flux.

雖然已參考本發明之特定實施例描述並說明了本發明,但此等描述及說明並不限制本發明。熟習此項技術者應理解,在不脫離如由所附申請專利範圍界定之本發明之真實精神及範疇的情況下,可作出各種改變且可替代等效物。 為解決材料粉末製造過程繁複,以及所產出粒徑分佈不均的問題,本發明提供一種製造材料粉末的裝置及方法,其可以使材料粉末的粒徑分佈集中化,不需進一步篩選材料粉末,或精細化材料粉末,俾利簡化製造程序,並且進一步提高材料粉末市場使用率,提高產能通量。例如粒徑均勻的粉末材料適合用於列印技術的墨水,當其用於列印金屬線路時,有助於控制線寬及電路品質。 圖2顯示製造材料粉末的裝置200之示意圖,其中餵料系統201以一穩定速度連續地將原料202提供進入霧化塔203。高頻感應加熱單元204及電漿加熱噴流單元205設置於霧化塔203中,其中高頻感應加熱單元204對原料202之一端加熱,使其熔融為材料液滴,餵料系統201持續推進原料202,使經熔融的材料液滴進入電漿加熱噴流單元205,電漿加熱噴流單元205對材料液滴噴吹,使其霧化。最後經霧化的材料液滴再離開加熱噴流單元205後冷卻,藉由微小材料液滴的內聚力凝聚並固化形成粉末,自然沈降於粉末收集單元206。 根據本發明,在原料熔融為液滴狀後,在霧化過程中持續以電漿對材料液滴加熱,可以提高液滴的流動性,增加霧化過程中原子化程度,將有效減小粒子尺寸。 霧化塔中203中設置有冷卻系統(未顯示於圖式中),例如在霧化塔內側中環繞有冷卻水管線,使霧化塔中203中溫度穩定保持於30°C -50°C,以穩定冷卻經霧化的粒子。 上述原料可以係金屬線材或陶瓷線材,線徑為5mm-16.5mm,較佳為6mm以上,餵料系統201之進料速度範圍在5-15 mm/秒之間。原料201還可以為其他形式的固態材料,包含棒狀材料、不規則狀塊狀材料或粉狀材料等等。 在原料進入霧化塔203前,先使其腔室內抽真空,例如使其真空度達10 -4mbar。經由進氣口207輸入不會與待製成粉末的材料反應之惰性氣體,例如氬氣、氦氣和/或氮氣。通入惰性氣體,使維持霧化塔203腔室內壓力在約0.7 psi。 高頻感應加熱單元204藉由頻率範圍在150 kHz -1000 kHz,較佳地在150 kHz -400 kHz間,功率為27 kW-100 kW之感應線圈對原料102之一端加熱,在這樣的條件中,原料得以迅速熔融成液滴狀。 圖3顯示本發明之一電漿加熱噴流單元205示意圖。電漿加熱噴流單元205經組態環狀,包含有陰極2051、陽極2052與旋風系統2053,包圍經熔融的材料液滴。電漿加熱噴流單元205繼續對已形成熔融態的材料液滴加熱,陰極2051及陽極2052形成電漿環,功率為40 kW -100 kW,使惰性氣體形成惰性氣體電漿,旋風系統2053使惰性氣體電漿對經熔融的材料液滴噴吹,以高速撞擊材料液滴表面,以使材料液滴再次加熱,以降低材料本身黏滯係數,並且吹散成細小液滴,即霧化程序。在電漿噴流單元205中以流量為100L/m-500 L/m通入高壓惰性氣體,惰性氣體壓力為10 kg/m 2-20 kg/m 2。經吹散的細小材料液滴離開電漿加熱噴流單元205後經冷卻固化,自然沈降至粉末收集單元206。 環狀的電漿加熱噴流單元205可以使陰極2051、陽極2052所包圍的範圍內均勻加熱,對於已形成熔融態的材料液滴,由於黏滯係數低,容易在霧化過程中偏離中心軸線。相較於傳統電漿槍霧化技術中複數支電漿槍必須聚焦於材料液滴始能霧化材料,環狀的電漿加熱噴流單元205不會有聚焦困難的問題。 由於材料液滴是在持續加熱,並且以高速高壓惰性氣體噴吹的過程中霧化,溫度極高的材料液滴可以使霧化程序所產生的細小液滴粒徑更小,並且均勻,可以大幅提高粒徑63µm以下的粉末佔有率。 在一實施例中,旋風系統2053包含拉伐爾噴嘴(De Laval nozzle),高速吹入的氣體速度約為1馬赫-20馬赫,使金屬液滴形成更細小的粉末。 根據本發明所形成的材料粉末係成球形,尺寸細小並且粒徑均勻,例如所生產的金屬粉末平均粒徑為50µm -100µm,而粒徑大於150µm的粉末小於10%。 本發明之一實施例係藉由以下程序製造: (1)使霧化塔203抽真空達10 -4mbar; (2)經由進氣口207對霧化塔203通入氬氣,當使霧化塔203壓力達0.7psi; (3)經控制器控制高頻感應加熱單元204通入氬氣,並且調整電流及啟動高頻點火裝置,開啟高頻感應加熱單元204加熱,氬氣流量調至200L/m,電流調整至300A; (4)持續開啟高頻感應加熱單元204,所使用的感應線圈銅材為外徑約6.8mm,線圈上緣到下緣距離約61mm,線圈內圈徑約為22mm,電流調整為700A; (5)藉由餵料系統201將線徑6.5mm的鈦合金線材輸送進入霧化塔203; (6)當鈦合金線材穿過高頻感應加熱單元204後,線材顏色呈現亮紅色並形成合金金屬液滴; (7)合金金屬液滴經電漿加熱噴流單元205的電漿環加熱及高速旋風吹散後,變成更小的液滴形成霧化粉末,此時被吹落的合金金屬液滴可藉由氣流及重力沉降進行冷卻,由於電漿加熱噴流單元205有通入大量氬氣,氬氣的氣流會將沉降中的粉末帶到霧化塔203底部;及 (8)在粉末收集單元206收集產出球狀粒子,粒徑範圍為50µm -70µm。 在本發明中,增加高頻感應加熱單元204所使用的頻率、功率,將加速線材熔融的速度,表1為部分實驗數據: <TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> 頻率(kHz) </td><td> 功率(kW) </td><td> 線材熔融時間 </td></tr><tr><td> 75 </td><td> 7 </td><td> 5sec </td></tr><tr><td> 400 </td><td> 18 </td><td> 2.37sec </td></tr><tr><td> 400 </td><td> 27 </td><td> <1sec </td></tr></TBODY></TABLE>表1 提高電漿加熱噴流單元205中旋風系統2053吹入噴吹惰性氣體的進氣壓力,有助於提高小於63µm以下粉末的佔有率,表2為部分實驗數據: <TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> 進氣壓力 (psi) </td><td> 小於63µm粉末佔有率(%) </td></tr><tr><td> 140 </td><td> 28 </td></tr><tr><td> 180 </td><td> 36 </td></tr><tr><td> 220 </td><td> 60 </td></tr></TBODY></TABLE>表2 表三為比較本發明之粉末製造裝置與習知的電極感應熔煉氣霧化(EIGA)裝置與電漿火炬設備生產粒徑,在類似的操作條件下,本發明之粉末製造裝置及方法可以有效提高小於63µm以下粉末的佔有率: <TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> 裝置 </td><td> 小於63µm粉末佔有率(%) </td></tr><tr><td> EIGA設備 </td><td> 33 </td></tr><tr><td> 電漿火炬設備 </td><td> 50 </td></tr><tr><td> 本發明之裝置 </td><td> 64 </td></tr></TBODY></TABLE>表3 圖4顯示本發明另一製造材料粉末的裝置400示意圖。其中餵料系統401以一穩定速度連續地將原料402提供進入霧化塔403。高頻感應加熱單元404及電漿加熱噴流單元405設置於霧化塔403中,其中高頻感應加熱單元404對原料402之一端加熱,使其熔融為材料液滴,餵料系統401持續推進原料402。電漿加熱噴流單元405包含有複數個電漿加熱噴流槍,圍繞於經熔融的材料液滴周圍,每一電漿加熱噴流槍包含有陰極4051、陽極4052與旋風系統4053,旋風系統4053將形成電漿態的惰性氣體對材料液滴持續加熱,並且以高速撞擊材料液滴表面,以使材料液滴再次加熱,以降低材料本身黏滯係數,而使材料液滴霧化,並且吹散成細小液滴。最後經霧化的材料液滴離開加熱噴流單元405的加熱範圍後逐漸冷卻,藉由微小材料液滴的內聚力凝聚並固化形成粉末,自然沈降於粉末收集單元406。 如各種例示性實施例中所展示之結構及方法之建構及配置僅為說明性的。因此,所有此等修改意欲包括於本發明之範疇內。任何程序或方法步驟之次序或順序可根據替代實施例發生變化或重新定序。可在不脫離本發明之範疇的情況下在實例實施例之設計、操作條件及配置上進行其他替代、修改、改變及省略。 While the invention has been described and illustrated with reference to the embodiments of the invention It will be understood by those skilled in the art that various changes and alternatives may be made without departing from the true spirit and scope of the invention as defined by the appended claims. In order to solve the problem that the material powder manufacturing process is complicated and the particle size distribution is uneven, the present invention provides an apparatus and a method for manufacturing a material powder, which can concentrate the particle size distribution of the material powder without further screening of the material powder. , or refined material powder, to simplify the manufacturing process, and further increase the material powder market usage and increase throughput. For example, a powder material having a uniform particle size is suitable for use in printing inks, and when used for printing metal lines, it helps to control line width and circuit quality. 2 shows a schematic diagram of an apparatus 200 for making a material powder, wherein the feed system 201 continuously supplies the feedstock 202 into the atomization tower 203 at a steady rate. The high frequency induction heating unit 204 and the plasma heating jet unit 205 are disposed in the atomization tower 203, wherein the high frequency induction heating unit 204 heats one end of the raw material 202 to melt it into material droplets, and the feeding system 201 continuously advances the raw material. 202, the molten material droplets are introduced into the plasma heating jet flow unit 205, and the plasma heating jet flow unit 205 injects the material droplets to atomize them. Finally, the atomized material droplets are separated from the heating spray unit 205 and then cooled, and are coagulated by the cohesive force of the fine material droplets and solidified to form a powder, which naturally settles in the powder collecting unit 206. According to the present invention, after the raw material is melted into a droplet shape, the droplets of the material are continuously heated by the plasma during the atomization process, which can improve the fluidity of the droplets and increase the degree of atomization during the atomization process, thereby effectively reducing the particles. size. A cooling system (not shown in the drawings) is disposed in the atomization tower 203. For example, a cooling water line is surrounded in the inner side of the atomization tower, so that the temperature in the atomization tower 203 is stably maintained at 30 ° C -50 ° C. To stabilize the cooled atomized particles. The raw material may be a metal wire or a ceramic wire having a wire diameter of 5 mm to 16.5 mm, preferably 6 mm or more, and a feeding system 201 having a feed speed ranging from 5 to 15 mm/sec. The raw material 201 may also be other forms of solid materials, including rod-shaped materials, irregular block materials or powder materials, and the like. Before the feedstock enters the atomization tower 203, the chamber is evacuated, for example, to a vacuum of 10 -4 mbar. An inert gas which does not react with the material to be powdered, such as argon, helium and/or nitrogen, is supplied via the gas inlet 207. An inert gas is introduced to maintain a pressure of about 0.7 psi in the chamber of the atomization tower 203. The high frequency induction heating unit 204 heats one end of the raw material 102 by an induction coil having a frequency ranging from 150 kHz to 1000 kHz, preferably between 150 kHz and 400 kHz, and having a power of 27 kW to 100 kW, in such a condition. The raw material is rapidly melted into droplets. Figure 3 shows a schematic view of a plasma heated jet flow unit 205 of the present invention. The plasma heating jet unit 205 is configured in a ring shape and includes a cathode 2051, an anode 2052 and a cyclone system 2053 surrounding the molten material droplets. The plasma heating jet unit 205 continues to heat the droplets of the molten material, and the cathode 2051 and the anode 2052 form a plasma ring with a power of 40 kW - 100 kW, so that the inert gas forms an inert gas plasma, and the cyclone system 2053 makes the inert gas The gas plasma blows the droplets of molten material to impact the surface of the material droplet at a high speed to heat the material droplets again to reduce the viscosity coefficient of the material itself and to blow into fine droplets, that is, an atomization process. A high pressure inert gas is introduced into the plasma jet unit 205 at a flow rate of 100 L/m to 500 L/m, and the inert gas pressure is 10 kg/m 2 -20 kg/m 2 . The blown fine material droplets leave the plasma heating jet unit 205, solidify by cooling, and naturally settle to the powder collecting unit 206. The annular plasma heating jet unit 205 can uniformly heat the range surrounded by the cathode 2051 and the anode 2052. For the droplets of the material which have been formed into a molten state, since the viscosity coefficient is low, it is easy to deviate from the central axis during the atomization process. Compared with the conventional plasma gun atomization technology, the plurality of plasma guns must be focused on the material droplets to atomize the material, and the annular plasma heating jet unit 205 does not have the problem of difficulty in focusing. Since the material droplets are continuously heated and atomized during the high-speed high-pressure inert gas injection, the extremely high temperature material droplets can make the fine droplets generated by the atomization process smaller and uniform. The powder occupancy of the particle size of 63 μm or less is greatly improved. In one embodiment, the cyclone system 2053 includes a De Laval nozzle with a gas velocity of about 1 Mach-20 Mach at high speed to cause the metal droplets to form a finer powder. The material powder formed according to the present invention is spherical, fine in size and uniform in particle size, for example, the metal powder produced has an average particle diameter of 50 μm - 100 μm, and the powder having a particle diameter of more than 150 μm is less than 10%. An embodiment of the present invention is manufactured by the following procedure: (1) evacuating the atomization tower 203 to 10 -4 mbar; (2) introducing argon gas into the atomization tower 203 via the air inlet 207, when fogging is performed The pressure of the tower 203 reaches 0.7 psi; (3) the high frequency induction heating unit 204 is controlled by the controller to pass argon gas, and the current is adjusted and the high frequency ignition device is activated, the high frequency induction heating unit 204 is turned on, and the argon flow rate is adjusted. 200L/m, current is adjusted to 300A; (4) Continuously turn on the high-frequency induction heating unit 204, the induction coil copper used is about 6.8mm in outer diameter, the distance from the upper edge of the coil to the lower edge is about 61mm, and the inner diameter of the coil is about 22mm, the current is adjusted to 700A; (5) the titanium alloy wire having a wire diameter of 6.5 mm is fed into the atomization tower 203 by the feeding system 201; (6) after the titanium alloy wire passes through the high frequency induction heating unit 204, The color of the wire is bright red and forms an alloy metal droplet; (7) the alloy metal droplet is heated by the plasma ring of the plasma heating jet unit 205 and blown away by the high-speed cyclone, and becomes a smaller droplet to form an atomized powder. The droplets of alloy metal that are blown off can be cooled by airflow and gravity settling due to The plasma heating jet unit 205 has a large amount of argon gas introduced, the argon gas stream brings the settled powder to the bottom of the atomizing tower 203; and (8) collects spherical particles in the powder collecting unit 206, and the particle size range It is 50 μm - 70 μm. In the present invention, increasing the frequency and power used by the high-frequency induction heating unit 204 will accelerate the melting speed of the wire, and Table 1 is part of the experimental data: <TABLE border="1"borderColor="#000000"width="85%"><TBODY><tr><td> Frequency (kHz) </td><td> Power (kW) </td><td> Wire melting time</td></tr><tr><td > 75 </td><td> 7 </td><td> 5sec </td></tr><tr><td> 400 </td><td> 18 </td><td> 2.37sec </td></tr><tr><td> 400 </td><td> 27 </td><td><1sec</td></tr></TBODY></TABLE> Table 1 Increasing the inlet pressure of the cyclone system 2053 blown into the inert gas by the plasma heating spray unit 205 helps to increase the occupancy of the powder below 63 μm. Table 2 shows some experimental data: <TABLE border="1" borderColor= "#000000"width="85%"><TBODY><tr><td> Inlet pressure (psi) </td><td> Less than 63μm powder occupancy (%) </td></tr><Tr><td> 140 </td><td> 28 </td></tr><tr><td> 180 </td><td> 36 </td></tr><tr><td > 220 </td><td> 60 </td></tr></TBODY></TABLE> Table 2 Table 3 compares the powder manufacturing apparatus of the present invention with the conventional electrode induction smelting gas atomization (EIGA) ) device and The plasma torch device produces particle size. Under similar operating conditions, the powder manufacturing apparatus and method of the present invention can effectively increase the occupancy of powders of less than 63 μm: <TABLE border="1"borderColor="#000000"width="85%"><TBODY><tr><td>device</td><td> less than 63μm powder occupancy (%) </td></tr><tr><td> EIGA device</td><Td> 33 </td></tr><tr><td> plasma torch device</td><td> 50 </td></tr><tr><td> device of the invention</td ><td> 64 </td></tr></TBODY></TABLE> Table 3 Figure 4 shows a schematic view of another apparatus 400 for making a powder material of the present invention. The feed system 401 continuously supplies the feedstock 402 to the atomization tower 403 at a steady rate. The high frequency induction heating unit 404 and the plasma heating jet unit 405 are disposed in the atomization tower 403, wherein the high frequency induction heating unit 404 heats one end of the raw material 402 to melt it into material droplets, and the feeding system 401 continuously advances the raw material. 402. The plasma heating spray unit 405 comprises a plurality of plasma heating spray guns surrounding the molten material droplets. Each of the plasma heating spray guns comprises a cathode 4051, an anode 4052 and a cyclone system 4053, and the cyclone system 4053 is formed. The plasma inert gas continuously heats the material droplets and strikes the surface of the material droplets at a high speed to heat the material droplets again to reduce the viscosity coefficient of the material itself, so that the material droplets are atomized and blown into Small droplets. Finally, the atomized droplets of material leave the heating range of the heating jet unit 405 and then gradually cool, and are coagulated and solidified by the cohesive force of the droplets of the fine material to form a powder, which naturally settles in the powder collecting unit 406. The construction and configuration of the structures and methods as shown in the various exemplary embodiments are merely illustrative. Accordingly, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any program or method steps may be changed or re-sequenced according to alternative embodiments. Other substitutions, modifications, changes and omissions may be made in the design, operation, and configuration of the example embodiments without departing from the scope of the invention.

100‧‧‧習知的電極感應熔煉氣霧化裝置100‧‧‧Preferred electrode induction smelting gas atomization device

101‧‧‧感應線圈101‧‧‧Induction coil

102‧‧‧高壓噴氣裝置102‧‧‧High pressure jet

200‧‧‧製造材料粉末的裝置200‧‧‧Device for the manufacture of material powders

201‧‧‧餵料系統201‧‧‧Feeding system

202‧‧‧原料202‧‧‧Materials

203‧‧‧霧化塔203‧‧‧Atomization Tower

204‧‧‧高頻感應加熱單元204‧‧‧High frequency induction heating unit

205‧‧‧電漿加熱噴流單元205‧‧‧Plastic heating jet unit

206‧‧‧粉末收集單元206‧‧‧Powder collection unit

207‧‧‧進氣口207‧‧‧air inlet

2051‧‧‧陰極2051‧‧‧ cathode

2052‧‧‧陽極2052‧‧‧Anode

2053‧‧‧旋風系統2053‧‧‧Cyclone system

圖1為一習知製造材料粉末的裝置示意圖; 圖2為本發明之一製造材料粉末的裝置示意圖; 圖3為本發明之一電漿加熱噴流系統之示意圖;及 圖4為本發明之另一製造材料粉末的裝置示意圖。1 is a schematic view of a device for manufacturing a material powder; FIG. 2 is a schematic view of a device for manufacturing a material powder according to the present invention; FIG. 3 is a schematic view of a plasma heating spray system according to the present invention; A schematic representation of a device for making a powder of material.

Claims (19)

一種製造材料粉末的裝置,其包含:一餵料單元,用於連續提供一原料;及一霧化塔,在該霧化塔內設置有:一高頻感應加熱單元,其加熱該原料之一端,並使其熔融成材料液滴;一電漿加熱噴流單元,其對該材料液滴提供高溫,並且對該材料液滴噴吹,使該材料液滴霧化,其中該電漿加熱噴流單元經組態為環狀,並且包圍經熔融的該材料液滴;及一粉末收集單元,其用以收集經霧化的材料液滴經自然沈降後所形成的材料粉末。 An apparatus for manufacturing a material powder, comprising: a feeding unit for continuously supplying a raw material; and an atomizing tower, wherein the atomizing tower is provided with: a high frequency induction heating unit that heats one end of the raw material And melting it into droplets of material; a plasma heating jet unit that provides a high temperature to the droplet of material and blowing the droplet of material to atomize the droplet of material, wherein the plasma heats the jet unit It is configured to be annular and surrounds the molten droplets of the material; and a powder collection unit for collecting the material powder formed by the natural sedimentation of the atomized material droplets. 如請求項1之製造材料粉末的裝置,其中該原料係金屬或陶瓷。 A device for producing a material powder according to claim 1, wherein the raw material is a metal or a ceramic. 如請求項1之製造材料粉末的裝置,其中該霧化塔進一步包含一進氣口以輸入惰性氣體。 A device for producing a material powder according to claim 1, wherein the atomization tower further comprises an air inlet to input an inert gas. 如請求項3之製造材料粉末的裝置,其中該惰性氣體包含下列群組中至少之一者:氬氣、氦氣和氮氣。 The apparatus of claim 3, wherein the inert gas comprises at least one of the group consisting of argon, helium, and nitrogen. 如請求項3之製造材料粉末的裝置,其中該電漿加熱噴流單元包含一旋風系統使該惰性氣體以高速撞擊該材料液滴。 The apparatus for producing a material powder according to claim 3, wherein the plasma heating jet flow unit comprises a cyclone system to cause the inert gas to strike the material droplet at a high speed. 如請求項1之製造材料粉末的裝置,其中該電漿加熱噴流單元以高壓通入惰性氣體並形成電漿。 A device for producing a material powder according to claim 1, wherein the plasma heating jet flow unit is introduced into the inert gas at a high pressure and forms a plasma. 如請求項1之製造材料粉末的裝置,其中該電漿加熱噴流單元包含有一陰極、一陽極與至少一旋風系統,其中該旋風系統用以高速提供電漿態的惰性氣體。 The apparatus for producing a material powder according to claim 1, wherein the plasma heating jet flow unit comprises a cathode, an anode and at least one cyclone system, wherein the cyclone system is configured to supply a plasma inert gas at a high speed. 如請求項3之製造材料粉末的裝置,其中在高頻感應加熱單元中,該惰性氣體之流量為100L/m-500L/m,及壓力為10kg/m2-20kg/m2The apparatus for producing the material powder 3, wherein the high-frequency induction heating unit, the flow rate of the inert gas to 100L / m-500L / m, and a pressure of 10kg / m 2 -20kg / m 2 request entries. 如請求項7之製造材料粉末的裝置,其中該電漿加熱噴流單元中該陰極及該陽極形成一電漿環,其功率範圍在40kW-100kW之間。 The apparatus of claim 7, wherein the cathode and the anode form a plasma ring having a power ranging from 40 kW to 100 kW. 一種製造材料粉末的方法,其包含:以一穩定速度連續地提供一原料進入一霧化塔;在該霧化塔內,加熱該原料之一端,並使其熔融成材料液滴;對該材料液滴環狀包圍地提供高溫,並且對該材料液滴噴吹,使該材料液滴霧化;及自然沈降經霧化的材料液滴,使其形成材料粉末。 A method for producing a material powder, comprising: continuously supplying a raw material to an atomization tower at a steady rate; in the atomization tower, heating one end of the raw material and melting it into a material droplet; The droplets are surrounded by a high temperature, and the droplets of the material are sprayed to atomize the droplets of the material; and the droplets of the atomized material are naturally settled to form a powder of material. 如請求項10之製造材料粉末的方法,其中該材料液滴係金屬或陶瓷。 A method of producing a material powder according to claim 10, wherein the material droplet is a metal or a ceramic. 如請求項10之製造材料粉末的方法,進一步包含經由一進氣口使惰性氣體輸入該霧化塔內。 The method of producing a material powder of claim 10, further comprising introducing an inert gas into the atomization tower via an air inlet. 如請求項12之製造材料粉末的方法,其中該惰性氣體包含下列群組中至少之一者:氬氣、氦氣和氮氣。 A method of making a material powder of claim 12, wherein the inert gas comprises at least one of the group consisting of argon, helium, and nitrogen. 如請求項10之製造材料粉末的方法,其中以頻率為150kHz-1000kHz,高頻感應方式加熱該原料。 A method of producing a material powder according to claim 10, wherein the raw material is heated by a high frequency induction at a frequency of 150 kHz to 1000 kHz. 如請求項10之製造材料粉末的方法,其中以功率為27kW-100kW之感應線圈加熱該原料。 A method of producing a material powder according to claim 10, wherein the raw material is heated by an induction coil having a power of 27 kW to 100 kW. 如請求項12之製造材料粉末的方法,其中該原料係在該惰性氣體之流量為100L/m-500L/m,及壓力為10kg/m2-20kg/m2之條件中加熱。 The method of producing the material powder requested item 12, wherein the feed flow rate of the inert gas in the system is the 100L / m-500L / m, and a pressure of 10kg / m 2 -20kg / m 2 of the heating conditions. 如請求項10之製造材料粉末的方法,其中該材料液滴係在功率為40kW-100kW中霧化。 A method of producing a material powder according to claim 10, wherein the material droplets are atomized in a power of 40 kW to 100 kW. 如請求項10之製造材料粉末的方法,其中所得到的粉末平均粒 徑為50μm-100μm。 A method of producing a material powder according to claim 10, wherein the obtained powder has an average particle size The diameter is from 50 μm to 100 μm. 如請求項10之製造材料粉末的方法,其中所得到的粉末粒徑大於150μm的粉末佔有率小於10%。 A method of producing a material powder according to claim 10, wherein the powder having a particle diameter of more than 150 μm has a powder occupation ratio of less than 10%.
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