TWI606880B - Optical modulation control method, control program, control device, and laser light irradiation device - Google Patents

Description

Light modulation control method, control program, control device, and laser light irradiation device

The present invention relates to a light modulation control method, a control program, a control device, and a control method for controlling light collection illumination of laser light for a light collection point according to a modulation pattern presented in a plurality of pixels of a spatial light modulator. And using the laser light irradiation device therewith.

In recent years, research on the three-dimensional production of an optical system such as a waveguide, a light splitter, or a directional coupler inside the glass has been popular. As one of the manufacturing methods of such an optical unit circuit, there is a method of using femtosecond laser light. In this method, for example, at the spot of the femtosecond laser light, the impact is induced by two-photon absorption or the like, whereby the processing for locally changing the refractive index of the glass can be performed. Further, in addition to the production of the optical integrated circuit, the collected light of the laser light of the object to be irradiated is also used in various laser processing apparatuses or laser microscopes for observing scattering and reflection of laser light. However, it is widely used (for example, refer to Patent Documents 1 to 3 and Non-Patent Documents 1 to 6).

In this case, when a laser beam emitted from a laser light source is used to perform laser irradiation such as processing of a complicated three-dimensional structure, it takes a very long time in the processing. The problem. As a method of shortening the processing time in this case, a method of simultaneous multi-point processing by a plurality of light collecting points is considered. The simplest configuration for implementing this method is the use of multiple laser sources. The composition of a number of laser beams. However, such a configuration can be known to be impractical in view of the cost and space required for preparing a plurality of laser light sources.

On the other hand, the multi-point simultaneous processing is realized by using a phase modulation type spatial light modulator (SLM: Spatial Light Modulator) and a numerically calculated total image (CGH: Computer Generated Hologram). The method has been reviewed. If the laser light is input to the spatial light modulator exhibiting CGH, the phase of the input light is modulated in response to the CGH modulation pattern. Then, if the wavefront of the modulated laser light output from the optical modulator is collected by the Fourier transform lens, the plurality of light collecting points can be made from one laser beam, and It is possible to simultaneously process, simultaneously observe, etc. due to simultaneous irradiation.

In the simultaneous processing of multiple points inside the object to be irradiated (object to be processed) using the spatial light modulator, it is possible to collect the laser light in one plane perpendicular to the optical axis. Any position. Further, in such multi-point simultaneous processing, it is also possible to collect the laser light in the direction including the optical axis by using a method of exhibiting a lens pattern having a lens effect in a spatial light modulator. Any position in 3D.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-058128

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2010-075997

[Patent Document 3] Japanese Patent No. 4300101

[Non-patent literature]

[Non-Patent Document 1] J. Bengtsson, "Kinoform design with an optimal-rotation-angle method", Appl. Opt. Vol. 33 No. 29 (1994) pp. 6879-6884

[Non-Patent Document 2] J. Bengtsson, "Design of fan-out kinoforms in the entire scalar diffraction regime with an optimal-rotation-angle method", Appl. Opt. Vol. 36 No. 32 (1997) pp. 8435- 8444

[Non-Patent Document 3] N. Yoshikawa et al., "Phase optimization of a kinoform by simulated annealing", Appl. Opt. Vol. 33 No. 5 (1994) pp. 863-868

[Non-Patent Document 4] N. Yoshikawa et al., "Quantized phase optimization of two-dimensional Fourier kinoforms by a genetic algorithm", Opt. Lett. Vol. 20 No. 7 (1995) pp. 752-754

[Non-Patent Document 5] C. Mauclair et al., "Ultrafast laser writing of homogeneous longitudinal waveguides in glasses using dynamic wave front correction", Opt. Exp. Vol. 16 No. 8 (2008) pp. 5481-5492

[Non-Patent Document 6] A. Jesacher et al., "Parallel direct laser writing in three dimensions with spatially dependent aberration correction", Opt. Exp. Vol. 18 No. 20 (2010) pp. 21090-21099

[Non-Patent Document 7] Kubota Hiroshi, "Optical", Iwanami Bookstore, 1967, pp. 128~131, pp. 300~301

[Non-Patent Document 8] Y. Ogura et al., "Wavelength-multiplexing diffractive phase elements: design, fabrication, and performance evaluation", J. Opt. Soc. Am. A Vol. 18 No. 5 (2001) pp. 1082-1092

In the case of the collected light irradiation of the laser light to the object to be irradiated, when there is an aberration object on the propagation path of the laser beam to the object to be irradiated from the spatial light modulator, the thunder is propagated. The light system is affected by aberrations. For example, when the inside of the glass is processed by laser irradiation, the convergence light emitted from the objective lens is caused by the air which is the atmosphere medium and the glass medium which is the object to be processed. The difference in refractive index produces an offset (aberration) of the focus position.

If such an aberration occurs, the shape of the light collecting spot of the laser light is elongated in the optical axis direction, and the collected optical density at the light collecting point is lowered. In this case, when the object is processed, the following problems occur: that is, in order to make the intensity of the laser light at the light collecting point reach the processing threshold, it is necessary to increase the intensity of the incident laser light. Or, it is impossible to perform fine processing due to the elongation of the collected shape. The problem of the influence of such aberrations is not limited to the case of simultaneous multi-point illumination, and it also occurs when the laser light is collected by a single collection spot.

The present invention has been made to solve the above-mentioned problems, and provides an optical modulation control method, a light modulation control program, and a light that can appropriately control the light collecting state of the laser light at the light collecting point. The modulation control device and the use of the laser light irradiation device therefor are for the purpose.

In order to achieve such a purpose, the optical modulation control method according to the present invention, (1) is a phase modulation type of laser light output using input laser light and modulating the phase of the laser light and then modulating the phase. a spatial light modulator for controlling a light modulation control of the collected light of the laser light for the set light collection point according to the modulation pattern presented in the spatial light modulator, wherein The method includes: (2) an irradiation condition obtaining step of obtaining an incident pattern of the laser light for the spatial light modulator and a position of the light collecting point from the spatial light modulator as the irradiation condition of the laser light. The first refractive index n ₁ of the first propagation medium on the propagation path of the laser light is different from the first refractive index of the second propagation medium located closer to the light collecting point than the first propagation medium The second refractive index n ₂ ; and (3) the concentrating condition setting step is used as a light collecting condition of the laser light, and the collecting point of the laser light from the spatial light modulator is collected. Number s _t , and individual collection positions and sets of s _t collection points s The light intensity is set, wherein s _t is an integer of 1 or more; and (4) the aberration condition deriving step is to be refracted by the propagation of the laser light from the spatial light modulator to the light collecting point s The aberration conditions generated by the first propagation medium and the second propagation medium are mutually derived; and (5) the modulation pattern design step is performed on the aberration condition derived by the aberration condition derivation step Considering, for the design of the modulation pattern presented in the spatial light modulator, (6) the modulation pattern design step, which is intended to be a multi-dimensional array of pixels in the spatial light modulator. And paying attention to the influence of the change of the phase value at one pixel of the modulation pattern presented in the plurality of pixels for the light collection state of the laser light at the collection point, so that the The state in which the light collecting state is close to the desired state, and the phase value is changed, and the phase value changing operation is performed on all the pixels of the modulation pattern, thereby designing the modulation pattern. And, in the light collecting state at the light collecting point When the price of the system for the wave propagation function of the propagation state free from the spatial light modulator of the modulator propagation pattern of variations in pixel j is the starting point s to the collector of the light, and the use in the propagation medium is homogeneous Add the propagation function transformed by the aberration condition .

Further, the optical modulation control program according to the present invention (1) is for causing a computer to perform a phase of the laser light output using the input laser light and modulating the phase of the laser light and then modulating the phase. A modulated spatial light modulator for controlling the light modulation control program for the collected light of the set light spot according to the modulation pattern presented in the spatial light modulator In order to perform the computer: (2) the irradiation condition acquisition processing is performed as the irradiation condition of the laser light, and the incident pattern of the laser light for the spatial light modulator is obtained, and the position is obtained from the spatial light modulator. The first refractive index n ₁ of the first propagation medium on the propagation path of the laser light of the light collecting point, and the first propagation medium of the first propagation medium located closer to the light collecting point side than the first propagation medium The second refractive index n _{2 having a} different refractive index; and (3) the concentrating condition setting process is used as a light collecting condition of the laser light, and is used for collecting light from the laser light from the spatial light modulator. The number of collection points s _t and the individual collections of the s _t collection points s The position and the collected light intensity are set, wherein s _t is an integer of 1 or more; and (4) the aberration condition derivation processing is performed in the propagation of the laser light from the spatial light modulator to the light collecting point s And the aberration conditions generated by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and (5) the modulation pattern design processing is performed on the image derived by the aberration condition derivation processing The difference condition is considered, and for the modulation pattern presented in the spatial light modulator, (6) the modulation pattern design processing is determined to be 2D-arranged in the spatial light modulator. a plurality of pixels, and pay attention to the influence of the change of the phase value at one pixel of the modulation pattern presented in the plurality of pixels for the light collection state of the laser light at the light collection point, The phase value is changed so that the light collecting state is close to the desired state, and the phase value changing operation is performed on all the pixels of the modulation pattern, thereby designing the adjustment Varying pattern, and, at the spotlighting point When the state is evaluated, based wave propagation function of the propagation for free under the state from the spatial light modulator propagation modulator pattern change device of the pixel j from the respect to the optical light collection point s of, and in the medium of propagation is homogeneous Add the propagation function transformed by the aberration condition .

Further, according to the optical modulation control device of the present invention, (1) is a phase modulation type spatial light modulation using a laser light that converts the phase of the laser light by inputting the laser light and modulating the phase of the laser light. The optical modulation control device for controlling the illumination of the collected light of the set light spot according to the modulation pattern presented in the spatial light modulator, characterized in that: 2) The irradiation condition obtaining means obtains the incident pattern of the laser light for the spatial light modulator and the propagation of the laser light at the light collecting point from the spatial light modulator as the irradiation condition of the laser light. The first refractive index n ₁ of the first propagation medium on the path and the second refractive index different from the first refractive index of the second propagation medium located closer to the light collecting point side than the first propagation medium of n _2; and the number of light (3) the condition setting means sets, as the light-collecting condition of the laser line of light, and for the spatial light modulator is changed from the laser light from the irradiation light collection for collecting light spot s _t And setting the individual collection position and collection intensity of the s _t collection points s, Wherein, s _t is an integer of 1 or more; and (4) a method for deriving aberration conditions, wherein the refractive indices are different from each other in the propagation of the laser light from the condensing point s of the spatial light modulator The aberration conditions generated by the first propagation medium and the second propagation medium are derived; and (5) the modulation pattern design means considers the aberration condition derived by the aberration condition derivation means, and The modulation pattern presented in the spatial light modulator is designed. (6) The modulation pattern design method is intended to be a multi-dimensional array of pixels in the spatial light modulator, and for the complex number The change of the phase value at one pixel of the modulation pattern presented in the pixel pays attention to the influence of the light collection state of the laser light at the light collection point, so that the light collection state is brought close to The phase value is changed in a desired state, and the phase value change operation is performed on all the pixels of the modulation pattern, thereby designing the modulation pattern, and in the set When the light collection state at the light spot is evaluated, it is directed to Spatial light modulator modulator propagation pattern of variations in pixel j is the starting point s to the collector of the light, and under the free state is used in a homogeneous propagation medium propagating wave propagation function Add the propagation function transformed by the aberration condition .

In the above-described optical modulation control method, control program, and control device, for collecting light of a laser beam using a spatial light modulator for a light collecting point Irradiation, obtaining the incident pattern of the laser light and the information on the first and second propagation mediums on the propagation path, and the number of the collection points including the laser light and the points at the respective collection points The light collecting conditions of the light collecting position and the collected light intensity are set. Then, the aberration conditions caused by the presence of the first and second propagation media having different refractive indices on the propagation path are derived and considered for the aberration condition, and for the spatial light modulator. The tone pattern presented is designed. Thereby, it is possible to reduce the influence of the aberration caused by the first and second propagation media in the concentrating state of the laser light at each of the concentrating spots for the set single or plural concentrating points. .

Further, in the design of the modulation pattern under such a configuration, specifically, in the spatial light modulator, a pixel structure by a plurality of pixels which are arranged in two dimensions is conceivable. Thereafter, a design method that pays attention to the influence imparted by the light collecting state of the laser light at the light collecting point by the change of the phase value at one pixel of the modulation pattern is used, and at the light collecting point In the evaluation of the collected state, the wave propagation function when the case of assuming free propagation is not used , but first transformed into a propagation function that takes into account the aberration conditions. And then evaluate the state of light collection. According to such a configuration, it is possible to appropriately and reliably evaluate and control the light collection state of the laser light at the light collecting point. Further, as a spatial light modulator, when a spatial light modulator having a plurality of pixels arranged in two dimensions is used, the pixel structure can be directly applied to the design of the modulation pattern.

A laser light irradiation device caused by the present invention is characterized in that it has (a) a laser source for supplying laser light; and (b) a phase modulation type spatial light modulator for inputting laser light and modulating the phase of the laser light, and then adjusting the phase after the thunder And (c) the optical modulation control device configured as described above controls the concentrating of the modulated laser light for the set concentrating point according to the modulation pattern presented in the spatial light modulator Irradiation.

According to such a configuration, the optical modulation control device can appropriately and surely control the light collecting state of the laser light at the light collecting point, and appropriately set the position of the object to be irradiated. The illumination of the single or multiple collection points of the laser light, and the operation of the object, such as processing, observation, and the like. Such a laser light irradiation device can be used, for example, as a laser processing device, a laser microscope, or the like. Further, as the spatial light modulator, it is preferable to use a spatial light having a plurality of pixels which are arranged in two dimensions, and to adjust the phase of the laser light at each of the plurality of pixels. Modulator.

According to the optical modulation control method, the control program, the control device, and the laser light irradiation device using the same according to the present invention, the illumination of the laser light using the spatial light modulator for the light collection point is Obtaining the incident pattern of the laser light and the refractive index of the first and second propagation mediums on the propagation path, and the number of the light collecting points of the laser light and the light collecting position and the light collecting at each of the collecting points The intensity is set, and the aberration conditions generated by the first and second propagation media are derived, and the modulation pattern presented in the spatial light modulator is designed in consideration of the aberration condition, and In the design of the variable pattern, a design method for paying attention to the influence imparted by the light collection state of the laser light at the light collecting point by the change of the phase value at one pixel of the modulation pattern is used, and In the evaluation of the concentrating state at the concentrating point, a propagation function that takes into consideration the aberration conditions is used, whereby the concentrating state of the laser light at the concentrating point can be appropriately and surely determined. Control.

Hereinafter, embodiments of the optical modulation control method, control program, control device, and laser light irradiation device according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same reference numerals are given to the same elements, and the description thereof will not be repeated. Moreover, the dimensional ratio of the drawings is not necessarily consistent with those described.

First, a basic configuration of a laser light irradiation device including a spatial light modulator which is an object of optical modulation control by the present invention will be described together with a configuration example thereof. Fig. 1 is a view showing a configuration of one embodiment of a laser beam irradiation device including a light modulation control device according to the present invention. The laser beam irradiation apparatus 1A according to the present embodiment is a device that collects laser light by irradiating the object 15 and includes a laser light source 10, a spatial light modulator 20, and a movable stage 18. .

In the configuration shown in Fig. 1, the object 15 to be irradiated is placed on the movable stage 18, and the movable stage 18 is configured to be in the X direction, the Y direction (horizontal direction), and the Z direction (vertical direction). ) Move on. again In the apparatus 1A, a light collecting point for performing processing, observation, or the like on the object 15 is set in the inside of the object 15 to be irradiated, and the collected light of the laser light is irradiated to the light collecting point. .

The laser light source 10 supplies laser light such as pulsed laser light for collecting light to the object 15 to be irradiated on the stage 18. The laser light output from the laser light source 10 is expanded by the beam expander 11, and then input to the spatial light modulator (SLM) 20 via the mirrors 12 and 13.

The spatial light modulator 20 is a phase-modulated spatial light modulator, for example, the phase of the laser light is modulated at each of the two-dimensional modulation planes thereof, and the phase modulation is output. laser. As the spatial light modulator 20, it is preferable to use a spatial light modulation in which a pixel having a complex two-dimensional array is provided, and the phase of the laser light is modulated at each of the plurality of pixels. Device. In such a configuration, in the spatial light modulator 20, for example, a modulation pattern of CGH or the like is present, by which the pattern is modulated, and the collected light of the laser light for the set concentrating point is made. control. Further, the spatial light modulator 20 is driven and controlled by the optical modulation control unit 30 through the optical modulator driving unit 28. The specific configuration and the like of the optical modulation control device 30 will be described later. Further, as the spatial light modulator 20, a pixel structure that does not include the above-described pixel structure may be used.

The spatial light modulator 20 can be either a reflective type or a transmissive type. In Fig. 1, as the spatial light modulator 20, a reflective type is shown. Further, as the spatial light modulator 20, a refractive index change material type SLM (for example, among those using liquid crystals, LCOS (Liquid) is used. Crystal on Silicon), LCD (Liquid Crystal Display), Segment Mirror SLM, Continuous Deformable Mirror SLM, DOE (Diffractive Optical Element), and the like. Further, in the DOE, a pattern in which a phase is discretely expressed or a pattern is designed by using a method described later, and is converted into a continuous pattern by smoothing or the like.

The laser light whose phase is modulated into a specific pattern by the spatial light modulator 20 is transmitted to the objective lens 25 by the 4f optical system constituted by the lenses 21 and 22. Thereafter, the object lens 25 is used to illuminate the laser light to a single or a plurality of light collecting points set on the surface or inside of the object 15 to be irradiated.

In addition, the configuration of the optical system in the laser beam irradiation device 1A is not specifically limited to the configuration shown in FIG. 1, and various configurations can be used. For example, in FIG. 1, although the configuration in which the laser beam is expanded by the beam expander 11 is used, a configuration in which a combination of a spatial filter and a collimator lens is used may be employed. Further, the drive device 28 may be configured to be integrally provided with the spatial light modulator 20. Further, as for the 4f optical system formed by the lenses 21 and 22, it is generally preferable to use a two-side telephoto optical system composed of a plurality of lenses.

Further, for the movable stage 18 to be irradiated with the object 15, for example, a fixed mechanism and a movable mechanism, a galvanometer mirror, or the like may be provided on the optical system side. Further, as the laser light source 10, for example, a Nd:YAG laser light source or a femtosecond laser is used. A pulsed laser light source that supplies pulsed laser light, such as a light source, is ideal.

In the laser light irradiation device 1A shown in FIG. 1, when there is an aberration object on the propagation path of the laser light from the spatial light modulator 20 toward the light collecting point in the object 15 to be irradiated, The light system is affected by aberrations during the propagation process. Here, FIG. 2 is a diagram showing the occurrence of aberrations during the propagation of laser light. For example, when a light collecting point is set inside the irradiation target 15 as described above, the convergent laser light output from the objective lens 25 is caused by the object lens 25 up to the light collecting point. as the atmosphere medium (first propagation medium) refractive index of air n ₁ and the illumination of the object glass media (second propagation medium) 15 of a refractive index difference n ₂ between the present until the propagation path, and In the paraxial ray and the outermost ray, a difference in refraction angle occurs at the boundary surface between the illuminating object 15 such as the ambience medium and the glass medium, and as a result, a focus shift (spherical aberration) occurs. ).

For example, as shown in FIG. 2, generally, the case where the focus O caused by the objective lens 25 is at the position of the depth d existing inside the illumination target 15 is considered. In this case, the focus O becomes a focus shift amount δ toward the focus O' due to the angle of refraction at the boundary surface between the air of the refractive index n ₁ and the object 15 of the refractive index n ₂ . Offset. Further, the focus shift amount δ changes depending on the incident height h of the light incident on the objective lens 25. Due to the spherical aberration caused by the focus shift δ depending on the incident height h, at the object 15, the shape of the collected spot of the laser light is elongated in the optical axis direction, and the optical density is set. The system is lowered.

Moreover, this kind of aberration caused by the propagation medium occurs when When a plurality of light collecting points are set inside the object 15 and a plurality of simultaneous irradiations (for example, simultaneous multi-point processing) are performed on the object 15, a problem also occurs. In other words, the spherical aberration described above differs depending on the light collecting position (optical axis depth) of the laser light in the optical axis direction, and the depth of the optical axis becomes deeper. Then the amount of spherical aberration tends to become larger. In this case, when three-dimensional multi-point simultaneous illumination is performed on the object 15, it is necessary to make a spherical image that is different from each other at each of the collection points, depending on the optical axis depth of each collection position. The difference is corrected.

Further, in the case of performing simultaneous multi-point illumination, there is a problem in adjusting the intensity of the collected light of the laser light for each of the concentrating spots. For example, in the internal processing of a glass using femtosecond laser light, depending on the intensity of the collected light of the laser light at the light collecting point, the amount of change in the refractive index generated at the object portion by processing may be Different, this matter is well known. Therefore, when a plurality of guided waveguides having equal refractive index distributions are simultaneously produced by simultaneous irradiation of multiple points of laser light, it is preferable to use a modulation pattern presented in a spatial light modulator. In order to reproduce the collected light intensity at the complex collection point with high uniformity. On the contrary, by setting the intensity of the collected light at the plurality of collection points to be mutually different, it is also possible to produce a waveguide having a plurality of different refractive index distributions. In the case of any of the above, when a plurality of light collecting points are set, it is desirable to be able to arbitrarily control the light collecting intensity of the laser light at each of the collecting points. .

In contrast, the laser light irradiation device 1A of FIG. 1 is driven by the drive. The CGH of the modulation pattern presented by the moving device 28 in the spatial light modulator 20 is appropriately designed in the optical modulation control device 30, thereby reducing the refractive index caused by the propagation path to be different. The influence of the aberration caused by the propagation medium and the appropriate control of the light collection state of the laser light at the collection point. Further, according to the laser light irradiation device 1A and the optical modulation control device 30 according to the present embodiment, it is possible to appropriately realize three-dimensional multi-point laser light irradiation when a plurality of light collecting points are set and The adjustment of the intensity of the collected light between the collection points.

Fig. 3 is a block diagram showing an example of the configuration of the optical modulation control device 30 applied to the laser light irradiation device 1A shown in Fig. 1. The optical modulation control device 30 according to the present configuration example includes an irradiation condition acquisition unit 31, a concentrating condition setting unit 32, an aberration condition deriving unit 33, a modulation pattern design unit 34, and a light modulation. The device drives the control unit 35 and is configured. Further, such a light modulation control device 30 can be constituted by, for example, a computer. Further, at the control device 30, an input device 37 for inputting information, instructions, and the like necessary for optical modulation control, and a display device 38 for displaying information to the operator are connected.

The irradiation condition acquisition unit 31 is an irradiation condition acquisition means that acquires information related to the irradiation conditions of the laser light of the irradiation target 15 . Specifically, the irradiation condition acquisition unit 31 acquires an incident pattern (for example, an intensity distribution and a phase distribution information) of the laser light to the spatial light modulator 20 as an irradiation condition of the laser light, and adjusts the light from the light. The first refractive index n ₁ of the first propagation medium (for example, an atmosphere medium) existing on the propagation path of the laser light toward the light collecting point, and the light collecting point side of the first propagation medium compared to the first propagation medium The second refractive index n ₂ of the second propagation medium that is different from the first refractive index (irradiation condition acquisition step).

The concentrating condition setting unit 32 is a concentrating condition setting means for setting a concentrating condition of the laser light to be irradiated on the object 15 . Specifically, the light condition setting section 32 sets, as the current laser-based optical light conditions, set the number of sets from the spatial light modulator 20 from the light spot of the laser beam for irradiating modulating light collection device becomes s _t And the respective collection positions and collection intensities (light collection condition setting steps) for the s _t collection points s (s=1 to s _t ). The number of collection points s _t is set to an integer of 1 or more, and when multiple points are simultaneously irradiated, it is set to an integer of 2 or more. In addition, the acquisition of the irradiation conditions by the acquisition unit 31 and the setting of the light collection conditions by the setting unit 32 are based on the information prepared in advance by the control device 30, the information input from the input device 37, Alternatively, the information supplied from the external device or the like is automatically performed or manually performed by the operator.

The aberration condition deriving unit 33 is generated in the propagation of the laser light from the spatial light modulator 20 toward the light collecting point s set for the object 15 to be irradiated. The aberration condition of the aberration is derived by deriving the aberration condition. Here, the aberration condition deriving unit 33 is the first propagation medium and the light collection on the optical system side which are different in refractive index from each other and which are present on the propagation path of the laser light as described above with respect to FIG. 2 . The second propagation medium on the point side derives the aberration condition (aberration condition derivation step) due to the propagation medium. Moreover, when there are three or more propagation media on the propagation path, the aberration condition guide The output unit 33 derives aberration conditions for all of the propagation media.

The modulation pattern design unit 34 is a CGH that becomes a modulation pattern presented in the spatial light modulator 20 in consideration of aberration conditions on the propagation path derived by the aberration condition deriving unit 33. Design the modulation pattern design method. Specifically, the modulation pattern design unit 34 refers to the irradiation conditions acquired by the acquisition unit 31, the concentrating conditions set by the setting unit 32, and the aberration conditions derived by the deriving unit 33. According to these conditions, a modulation pattern (modulation pattern design step) for irradiating the laser light to the desired single or multiple collection points is designed.

In particular, in the modulation pattern design unit 34 of the present embodiment, in the design of the modulation pattern presented in the spatial light modulator 20, the spatial light modulator 20 is intended to be made 2 Dimensions of the complex number of pixels, and the use of the modulation pattern presented in the complex pixels for 1 pixel (1 pixel in the spatial light modulator 20, when the spatial light modulator 20 is a case where a pixel structure having a plurality of pixels arranged in two dimensions is provided, and the light collection state of the laser light at the light collecting point is changed corresponding to the phase value at one pixel) The impact of the design is an eye-catching design method. Then, the phase value of one pixel is changed so that the light collecting state is closer to the desired state, and the phase value is changed for all the pixels of the modulation pattern (at least This is done for all the pixels that the light is incident on, whereby the most appropriate modulation pattern is designed.

Further, in the modulation pattern designing unit 34, in the operation of changing the phase value at each of the above-described pixels, when the light collecting state of the laser light at the light collecting point is evaluated, the light is adjusted for the light in the space. The propagation of the light from the pixel j in the modulation pattern of the transformer 20 toward the light collecting point s is not directly using the wave propagation function when it is assumed to be a free propagation in a state where the propagation medium is homogeneous. Instead of using a wave propagation function The propagation function transformed by the aberration condition obtained by the aberration condition deriving unit 33 is added. . Thereby, the state of light collection of the laser light is controlled in consideration of the aberration conditions on the propagation path.

The optical modulator drive control unit 35 drives the control spatial light modulator 20 through the drive device 28, and presents the modulation pattern designed by the modulation pattern design unit 34 to the spatial light modulator 20. The drive control means at the plural pixels. When the optical modulation control device 30 is included in the laser light irradiation device 1A, the drive control unit 35 is provided as necessary.

The processing corresponding to the control method implemented in the optical modulation control device 30 shown in Fig. 3 can be realized by a light modulation control program for causing the computer to perform optical modulation control. For example, the optical modulation control device 30 can be operated by a CPU for operating various software programs required for processing in the optical modulation control, and a ROM in which the above-described software program is stored, and in the program execution. And temporarily store the RAM of the data to form it. In such a configuration, the above-described optical modulation control device 30 can be realized by executing a specific control program by the CPU.

Further, the above-described processing for performing the optical modulation control using the spatial light modulator 20 by the CPU, in particular, the processing for performing the design of the modulation pattern presented in the spatial light modulator 20 is performed. Program, recordable Released on a computer-readable recording medium. Such a recording medium includes, for example, a magnetic medium such as a hard disk or a floppy disk, an optical medium such as a CD-ROM or a DVD-ROM, a magnetic optical medium such as a floptical disk, or the like. A hardware device such as a RAM, a ROM, and a semiconductor non-volatile memory, which are specially configured to execute or store program commands.

The effects of the optical modulation control method, the optical modulation control program, the optical modulation control device 30, and the laser light irradiation device 1A according to the present embodiment will be described.

In the optical modulation control method, the control program, and the control device 30 shown in FIGS. 1 to 3, laser light is obtained by using the collected light of the laser light with the spatial light modulator 20 for the light collecting point. the incident pattern related to the first channel on the first and second propagation medium with a refractive index of the information, and, at the collector with respect to the light spot of the laser beam and the number of s _t at each of the focus point The light collecting conditions of the collected light position and the collected light intensity are set. Then, in the aberration condition deriving unit 33, the aberration condition generated by the first and second propagation media having different refractive indices on the propagation path of the laser light is derived, and the modulation pattern design unit is used in the modulation pattern design unit. In 34, the aberration condition is considered, and the modulation pattern presented in the spatial light modulator 20 is designed. In this way, it is possible to use the first or second plurality of light collecting points set in the light collecting condition setting unit 32, and the first and second propagation mediums in the light collecting state of the laser light at each of the light collecting points. The effect of the resulting aberration is reduced.

Further, in the design of the modulation pattern under such a configuration, specifically, in the spatial light modulator 20, a pixel structure by a plurality of pixels which are arranged in two dimensions is conceivable. Thereafter, a design method that pays attention to the influence imparted by the light collecting state of the laser light at the light collecting point by the change of the phase value at one pixel of the modulation pattern is used, and at the light collecting point In the evaluation of the state of the collected light, the wave propagation function in the case where the propagation medium is assumed to be free in the state of homogeneity is not used. , but first transformed into a propagation function that takes into account the aberration conditions. And then evaluate the state of light collection. According to such a configuration, it is possible to appropriately and reliably evaluate and control the light collection state of the laser light at the light collecting point.

Further, as a pixel structure which is assumed in the spatial light modulator 20, when the spatial light modulator 20 is used, a spatial light modulator including a plurality of pixels arranged in two dimensions is used. The pixel structure can be directly applied to the design of the modulation pattern. Further, in the case of free propagation, it is assumed that the propagation is not only in a vacuum or in the atmosphere, but also includes propagation in a state in which the propagation medium is homogeneous as in the general above, for example, There is no second propagation medium, and only the first propagation medium propagates in a homogeneous state.

Further, in the laser beam irradiation apparatus 1A shown in Fig. 1, a laser light source 10, a phase modulation type spatial light modulator 20, and the above-described light modulation control device 30 are used to constitute laser light irradiation. Device 1A. According to this configuration, the control device 30 can appropriately and surely control the light collecting state of the laser light at the light collecting point, and appropriately realize the single set for the object 15 to be irradiated. Or plural The illumination of the collected light of the spot light, and the processing of the object, such as processing, observation, and the like. Moreover, such a laser beam irradiation apparatus can be used, for example, as a laser processing apparatus, a laser microscope, or the like.

Here, for the derivation of the aberration condition at the deriving unit 33, it is preferable that the light is directed toward the set concentrating point s from the pixel j of the plurality of pixels from the spatial light modulator 20. When the propagation is considered, as the aberration condition related to the propagation of light, the phase Φ _j-OPD given to the optical path length difference OPD in the propagation is extracted. Further, in this case, it is preferable for the design of the modulation pattern at the design portion 34 to use the phase Φ _j-OPD of the aberration condition as generally derived above, and by using the conversion To find out the propagation function that takes into account the aberration conditions. . According to this configuration, it is possible to appropriately propagate the propagation function of free propagation. , transformed into a propagation function that takes into account the aberration conditions .

Further, for the design of the modulation pattern at the design portion 34, it is preferable that the incident amplitude of the laser light for the pixel j of the spatial light modulator 20 is set to A _j-in and will be at the pixel j. Phase value is set to By the following For the purpose of extracting the complex amplitude U _s representing the state of light collection at the light collecting point _s . Alternatively, the incident amplitude of the laser light for the pixel j of the spatial light modulator 20 may be further set to A _j-in and the incident phase may be set to And set the phase value at pixel j to By the following For the purpose of extracting the complex amplitude U _s representing the state of light collection at the light collecting point _s . Thereby, it is possible to appropriately evaluate the light collecting state of the laser light at the light collecting point.

Here, the incident amplitude A _j-in of the laser light of the pixel j is related to the incident intensity I _j-in , and there is a relationship of I _j-in =|A _j-in | ² . Also, in the complex amplitude U _s , A _s is the amplitude, Is the phase. Moreover, when the incident laser light is a plane wave, the incident phase can be ignored. .

For the specific configuration of the design of the modulation pattern, in the change of the phase value at the pixel j of the modulation pattern, the following configuration may be adopted: that is, according to the light collection based on the representative point s Phase of the complex amplitude of the state And propagation functions that are considered for aberration conditions And the phase value before the change at pixel j The value obtained by the resolution is used to change the phase value. As such a method of resolving the phase value analytically, for example, there is an ORA (Optimal Rotation Angle) method.

Alternatively, in the change of the phase value at the pixel j of the modulation pattern, the phase value may be extracted according to one of the methods using a mountaineering algorithm, a simulated cooling algorithm, or a genetic algorithm. The value is changed. Here, in the genetic algorithm, an operation of selecting a certain pixel and changing the value of the pixel is performed, or an operation of selecting two pixels and exchanging the pixel values thereof is performed, but The above-mentioned design method for the influence of the change of the phase value at one pixel of the modulation pattern on the light collecting state of the laser light is intended to include a method of performing such an operation. In addition, the specific design of the modulation pattern will be described later.

The first and second propagation media having different refractive indices existing on the propagation path of the laser light are exemplified by the following configuration: that is, the second propagation medium on the light collecting point side. The object to be irradiated 15 in which the light collecting point is set inside, and the first propagation medium on the optical system side exists between the spatial light modulator 20 and the object 15 to be irradiated (object lens 25 and object) Between 15) the atmosphere of the medium. In this case, the atmosphere medium may be an atmosphere medium such as water or oil in addition to air or the like.

Further, in the propagation path between the spatial light modulator and the light collecting point, there may be three or more mediums. As such a configuration, for example, it is conceivable that the laser light passes through a medium having a refractive index different from that of the atmosphere medium, and the laser light is collected after passing therethrough. Also, for example, Consider a configuration in which a plurality of types of glass having different refractive indices are bonded to each other, a structure in which glass is bonded to a crucible, or an observation of a living body sample or a cell inside by a microscope. There is a configuration of a cover glass on the propagation path, and various configurations are possible regarding the medium on the propagation path of the laser light. Further, it is also conceivable to have a configuration in which the collected light of the laser light is simultaneously applied to a plurality of media. In this case as well, the same as described above, the derivation of the aberration conditions and the design of the modulation pattern can be performed.

Further, in the optical modulation control device 30 shown in FIG. 3, in addition to the configuration for designing the modulation pattern, the spatial light modulator 20 is also provided with drive control and designed by the design portion 34. The resulting modulation pattern is presented to the optical modulator drive control unit 35 in the spatial light modulator 20. Such a configuration is effective in the case where the control device 30 is generally used in a form incorporated in the laser light irradiation device 1A as shown in FIG. Further, the drive control unit 35 may be configured to be provided as another device different from the optical modulation control device 30.

Further, for example, when the glass medium is processed by laser light irradiation to produce a photo-integrated circuit, it is also possible to perform a new one after performing one or more laser irradiations. Or a plurality of CGH designs, and switching the modulation patterns presented in the spatial light modulator 20. Alternatively, when the shape of the optical unit circuit to be fabricated is determined, it is also possible to pre-design a plurality of modulation patterns required for laser processing.

Also, when the DOE is used alone, since the DOE system is The static pattern, therefore, does not have a drive. Further, when a plurality of DOEs are used to dynamically switch the pattern, a switching device is used instead of the driving device.

The optical modulation control method and the modulation pattern design method implemented in the laser light irradiation device 1A and the optical modulation control device 30 shown in FIGS. 1 and 3 are further developed in conjunction with the specific examples. Description. Fig. 4 is a flow chart showing an example of the optical modulation control method carried out in the optical modulation control device 30 shown in Fig. 3.

In the control method shown in FIG. 4, first, information on the irradiation conditions of the irradiation target 15 with respect to the laser light supplied from the laser light source 10 is acquired (step S101). Specifically, the first refractive index n of the first propagation medium (for example, an atmosphere medium) existing on the propagation path is obtained for the propagation path of the laser light from the spatial light modulator 20 toward the light collection point s. ₁ and a second refractive index n _{2 of} the second propagation medium (for example, an object to be irradiated) (S102). Moreover, if necessary, information other than the refractive indices of the first and second propagation media is obtained, and for example, information on the thickness, shape, position, and the like of the medium is obtained. Further, in addition to the propagation medium, for example, information necessary for the derivation of the aberration condition such as the NA of the objective lens 25 and the focal length f is obtained together with the information of the propagation medium.

Moreover, the incident pattern for the spatial light modulator 20 from the laser light supplied from the laser light source 10 is obtained (S103). The incident pattern of the laser light is incident laser light intensity I as a pixel j of a position (x _j , y _j ) in a plurality of pixels which are two-dimensionally arranged with respect to the spatial light modulator 20 _In (x _j , y _j )=I _j-in The resulting incident light intensity distribution is given. Alternatively, the incident light amplitude distribution due to the amplitude A _j-in may be obtained to obtain the incident pattern of the laser light. Also, when necessary, the phase of the incident light for the laser light can also be used. And the composition of the acquisition.

Next, the light collecting conditions for the laser light of the object 15 to be irradiated are set (S104). First, the number s _t of single or plural light collecting points that illuminate the object 15 to be irradiated by the laser light whose phase is modulated by the spatial light modulator 20 is set (S105). Here, in the laser light irradiation device 1A resulting from the above configuration, a plurality of light collecting points can be obtained in response to the necessary modulation pattern presented in the spatial light modulator 20.

Further, the collection position γ _s = (u _s , v _s , z _s ) of the laser light is set for each of the s _t collection points s=1 to s _t with respect to the object 15 The desired collected light intensity I _s-des (S106). Further, the intensity of the collected light of the laser light for each of the light collecting points is not limited to the setting due to the absolute value of the intensity, and may be set, for example, by the ratio of the relative strength.

Next, in the propagation of the laser light from the spatial light modulator 20 toward the light collecting point s, the aberration conditions due to the first and second propagation medium whose refractive indices are different from each other are derived (S107). . Thereafter, considering the aberration conditions derived in step S107, referring to the irradiation conditions of the laser light acquired and set in steps S101 and S104, and the light collecting conditions, the spatial light modulator 20 is obtained. Presented in the plural pixels The CGH of the modulation pattern is designed (S108).

The method of deriving the aberration condition executed in step S107 of the flowchart of FIG. 4 will be specifically described. If the spatial light modulator 20 in the configuration shown in FIG. 1 is replaced with a mirror, since phase modulation is not applied to the laser light supplied from the laser light source 10, ideally, The parallel light is incident on the objective lens 25, and is converted into a spherical wave via the objective lens 25. When there is no aberration object in the propagation path (light collecting path) of the laser light, the light from the object lens 25 is collected by the collecting depth equal to the focal length f. Point.

On the other hand, if there are first and second propagation media having different refractive indices in the propagation path, aberrations will occur due to changes in refraction, and the light system from the objective lens 25 will not be collected. Light at 1 o'clock. On the other hand, by appropriately designing the modulation pattern presented in the spatial light modulator 20, the wavefront deformation of the light propagating to the object lens 25 can be eliminated with respect to the set The effect of the aberration of the light collecting point s can be used to collect the laser light.

In the derivation of the wavefront used to concentrate the laser light to the desired spotlight point, for example, a derivation method resulting from inverse ray tracing from the desired spotlight position may be used. In the following, a method of deriving the wavefront performed at the light collecting point on the optical axis in which the light is collected in the parallel plane substrate in order to eliminate the influence of the aberration is described as an example (refer to Patent Document 2). Further, regarding the derivation of the wavefront and the derivation of the aberration condition (for example, Φ _j-OPD representing the aberration condition to be described later), in addition to the method performed by the inverse ray tracing, for example, the optimization correction may be used. The method (Non-Patent Document 5), the analysis method of the aberration in the paraxial ray (Non-Patent Document 7), and the like, specifically, various methods can be used.

Figure 5 is a diagram showing the derivation of aberration conditions generated in the propagation of laser light. First, the medium of refractive index n ₁ and the atmosphere of the irradiation of the object 15 are equal to n ₂ for consideration. When the position of the objective lens 25 is set at the position where the light is collected on the end surface P of the object 15 and the object lens is moved toward the object 15 by the distance d, the light system is collected. At a point O from the end face P away from the position of the distance d. The light incident as an ideal plane wave is converted into a spherical wave by the objective lens 25, and the light rays from the point R in the spherical wave are in FIG. Arrive at point O with the light path indicated by the solid line. At this time, the length of the optical path from the point R up to the point O is f, and the same optical path length is obtained regardless of the optical axis height.

On the other hand, when the refractive indices n ₁ and n ₂ are different, the light system from the objective lens 25 is not collected at the point O. Therefore, although the amount of movement of the objective lens 25 is the same distance d, the wavefront of the laser light is modulated by the spatial light modulator 20, and the light is collected from the end surface P. At the point O' of the position of z _s . In this case, the light rays from the point O' reach the point R through the point Q on the boundary surface between the object 15 and the atmosphere medium, and the total of O', Q, and QR becomes the optical path length. This optical path length (OPL: Optical Path Length) is derived at each optical axis height h.

First, as shown in FIG. 5, generally, the incident angle of the light beam before the wavefront correction is set to θ, and the incident angle of the light corrected by the wavefront to the object 15 is set to θ _{1 .} When the angle of refraction is θ ₂ , the optical axis heights h ₁ , h ₂ , and h are represented by the following equations (1), (2), and (3), respectively.

[Formula 1] h ₁ = ( f cos θ - d ) tan θ ₁ (1)

[Equation 2] h ₂ = z _s tan θ ₂ (2)

[Equation 3] h = n ₁ f sin θ (3)

Here, the incident angle θ ₁ and the refraction angle θ ₂ are affixed to each other in accordance with the Snell's law. Further, by the relation h = h ₁ + h ₂ , and the above equations (1) to (3), the angles θ, θ ₁ , and θ ₂ are implicitly added. For example, when given a certain θ ₁ or θ ₂ , the above equations (1) and (2) can be substituted into the relation h=h ₁ +h ₂ and solved. 3), and easily determine θ.

However, conversely, when a specific θ is given, it is difficult to analytically extract θ ₁ and θ ₂ . When the corresponding θ ₁ and θ ₂ are extracted for a specific angle θ, the search is performed. For example, the value of θ ₁ or θ ₂ is gradually changed, and the value of θ is taken out in each change. After that, by continuously so that θ _1, θ ₂ changes, [theta] will be [theta] until the desired value of _1, up to θ _2, to explore the export and the angle of the.

As described above, by the equations (1) to (3), θ ₁ and θ ₂ corresponding to the desired θ are extracted. Then, for each incident angle θ, the optical path length OPL of the propagation of the light generated by the irradiation target 15 is obtained by the following equation (4).

Further, "-f-(n _{2 -} n ₁ ) × d" in the equation (4) is a constant term, and is an item added to prevent the value of the OPL from becoming excessive.

This equation (4) represents the length of the optical path of each incident angle θ, but it can also be used as the optical path length of each optical axis height h by the equations (3) and (4), as in the lower The formula (5) is generally expressed.

Thereby, it is possible to extract the OPL corresponding to the optical axis height h.

The phase Φ _OPD which gives the difference of the OPL (that is, the optical path difference (OPD)) is given by the spatial light modulator (SLM) 20, and the laser light can be collected on the object. At the desired location in the interior of the object 15. The phase Φ _OPD is according to the formula (5), and can be obtained by [Equation 6] Φ _OPD ( h , d , z _s )={ OPL ( h , d , z _s )- OPL (0, d , z _s )}×2 π / λ (6) to find. This phase Φ _OPD is derived for each z _{s in} a state where the distance d is fixed for three-dimensional multi-point illumination. In addition, the range of the optical axis height h is 0 to h _max . Further, h _max is in the range of 0 to NA × f, that is, the opening of the objective lens 25 is the maximum value of h _max of the optical axis height.

Further, the above-described general relationship between the optical axis height h and the position (x _j , y _j ) of the pixel j of the SLM 20 exists. When the SLM 20 and the objective lens 25 are connected to each other by the 4f optical system as in the optical system shown in Fig. 1, the wavefront of the object lens is propagated to the SLM. At this time, if the focal length of the lens 21 of the 4f optical system is f1 and the focal length of the lens 22 is f2, the horizontal magnification M is M=f2/f1. Therefore, from the light emitted from the object lens, the optical axis height is h=0~h _max /M on the SLM.

Further, if the center position of the light emitted from the object lens 25 is located at the coordinates (x _c , y _c ) on the SLM, the following equation (7) is obtained. , the optical axis height h and the pixel coordinates (x _j , y _j ) of the SLM can be transformed. Thereby, it is possible to extract the phase Φ _j-OPD of the aberration condition of each pixel j which becomes the coordinate (x _j , y _j ).

Next, a specific description will be given of a design method of the modulation type which is executed in step S108 of the flowchart of FIG. In the following, an example of a design method that pays attention to the influence of the phase value at one pixel of the modulation pattern presented in the SLM 20 is described, and a design method using the ORA method is described (refer to Patent Document 3, Non-patent documents 1, 2).

Here, in general, there are a plurality of methods for designing the CGH used as the modulation pattern in the SLM, and examples thereof include a repeated Fourier method and the like. First, the inverse Fourier transform method prepares two faces of the SLM face and the refracting face, and propagates between the faces by Fourier transform and inverse Fourier transform. Then, in each propagation, the amplitude information of each face is replaced, and the final phase distribution is obtained.

On the other hand, as another CGH design method, there are two types of design methods that pay attention to the ray tracing method and the influence of one pixel. As a ray tracing method, there is a lens re-method (S method: Superposition of Lens). This method is effective when the overlap of the wavefronts from the light collecting point is small. However, if the overlapping of the wavefronts increases, the intensity of the laser light incident on the SLM will propagate to The intensity of the light at the spot is significantly reduced or becomes impossible to control. Therefore, there is a repeated S method for improving the S method.

On the other hand, attention is paid to the influence of 1 pixel of CGH. The calculation method is a method in which one pixel of CGH is appropriately selected, and a phase value is changed every one pixel to design a CGH, and a method of determining the phase of one pixel is used, and there is an exploration type. Methods and analytical methods.

In this design method, the phase value of a certain pixel of CGH is changed as a parameter, and the wave propagation function caused by Frei's diffraction or the like is used to propagate the modulated laser light, and The change in the value of the representative light collection state (for example, the value of amplitude, intensity, and complex amplitude) at the desired collection point is investigated. Then, a phase value is obtained which brings the light collecting state at the light collecting point close to the desired result. This operation is performed once for one pixel and at least for all pixels into which light is incident.

When the operation is completed at all the pixels, in the analytic method, what is the change of the phase of the desired position in the result of phase modulation of all the pixels? After confirming, the first pixel is returned to the first pixel, and the phase of the desired position is used to change the phase of each pixel individually. Further, in the search type method, the first pixel is returned to the first pixel without confirmation. As a method of the exploration type, for example, there are a mountaineering algorithm, a simulated cooling algorithm (SA: Simulated Annealing), a genetic algorithm (GA: Genetic Algorithm), and the like (refer to Non-Patent Documents 3 and 4).

The ORA (Optimal Rotation Angle) method described below is an optimization algorithm using an analytical method. In this method, the phase value at each pixel of the modulation pattern is changed and adjusted by the phase of the complex amplitude according to the concentrating state representative of the concentrating point s. Phase of the propagation function And the phase value before the change at pixel j The extracted value is obtained analytically. In particular, in the design method of the present embodiment, as a propagation function, it is replaced And use a propagation function that takes into account the aberration conditions caused by the first and second propagation media. .

Fig. 6 is a flow chart showing an example of a method of designing a modulation pattern implemented in the optical modulation control device 30 shown in Fig. 3. First, the collected light conditions of the laser light to be irradiated by the spatial light modulator 20 are acquired, and the information of the set light collection conditions is acquired (step S201). As the concentrating conditions obtained here, there are the number of collection points s _t , the collection positions γ _s = (u _s , v _s , z _s ) of the respective collection points s, and the desired set. Light intensity I _s-des .

Next, a phase pattern which is an initial condition of the design of the CGH used as the modulation pattern presented in the SLM 20 is created (S202). This phase pattern, for example, is by the phase value at pixel j of CGH It is created by a method of setting a random phase pattern. This method is based on the CGH design performed by the ORA, and is used for the purpose of preventing a certain extremely small solution by random phase. Further, for example, when it is possible to ignore the possibility of sinking into a specific minimum solution, for example, a uniform phase pattern or the like can be set.

Then, when the number of light collecting points is set to a complex number (s _t ≧ 2), the light intensity ratio between the light collecting points s=1 and s _t is used. The weight w _s of the parameter to be adjusted is set to w _s =1 as the initial condition (S203). In addition, this weight w _s is a list of 1 × s _t . Moreover, when the collection point is single (s _t =1), it is not necessary to set the weight.

If the end of the CGH phase pattern And the setting of the weight w _s is to calculate the complex amplitude U _s representing the light collecting state of the laser light at the light collecting point _s (S204). Specifically, it is represented by the following formula (8) which represents light wave propagation. To find the complex amplitude U _s =A _s exp(i ). Here, A _j-in is the incident amplitude of the laser light for the pixel j of the SLM 20, Is the phase value at pixel j. also, It is the phase of the laser light incident on the pixel j.

Also, in the formula (8), Is a propagation function that takes into account the aberration conditions caused by the first and second propagation media (in the example shown in FIG. 5, the atmosphere medium and the object 15 to be irradiated), and To find out. In the formula (9), Φ _j-OPD is the phase of the aberration condition with respect to the pixel j shown in the formula (6).

In this way, by using propagation functions that are considered for aberration conditions Even at the collection point where any of z _s is different, it is possible to obtain CGH which can give a desired result. also, Is a propagation function in a finite distance region when assumed to be freely propagating. As this propagation function For example, it can be used by the following formula (10) The approximation of the approximation of the wave propagation function is given by the diffraction. Here, in the above formula (10), k is a wave number.

In addition, as a propagation function of free propagation For example, an approximation of the above-described Fresnel diffraction or an approximation of the Fraunhofer diffraction may be used, or a solution of the Helmholtz equation or the like may be used, and various derivatives may be used. Further, in the above equations (8) and (9), if the phase of the aberration condition is Φ _{j - OPD} =0, the propagation function becomes = And the calculation formula of the complex amplitude which is not used for the aberration used in the prior art ORA method is obtained.

Further, if the CGH design by the ORA method is performed using the propagation function of the equation (10), the CGH to which the lens effect of the focal length f of the objective lens is added is designed. However, in general, since the pixel size in the SLM is large, the lens effect of the object lens cannot be expressed. Therefore, in fact, instead of using the focal length f, the focal length L is used (for example) For example, if it is LCOS-SLM X10468 manufactured by Hamamatsu Photonics, it is a value of L = 1 m).

Next, it is determined whether or not a desired result is obtained in the design of the CGH performed by the above method (S205). As a method of determining the case, for example, a method of using the collected light intensity I _s =|A _s | ² obtained at each of the light collecting points s and the desired intensity I _{s can be used. -des} , by the following formula (11) For comparison, a method of determining whether or not the intensity ratio is equal to or less than a specific value ε is performed at all the collected light spots s. Further, instead of using the collected light intensity I _s , the determination may be performed by the amplitude A _s , the complex amplitude U _{s ,} or the like.

Alternatively, a method of determining whether or not the loop such as the change of the phase value and the calculation of the complex amplitude in the flowchart of FIG. 6 has been performed for a predetermined number of times or the like may be used. When it is determined that the designed CGH satisfies the necessary condition for the set concentrating condition, the design algorithm of the CGH by the ORA is ended. Moreover, when the condition is not satisfied, the process proceeds to the next step S206.

When it is determined that the condition necessary for ending the design is not satisfied, first, the value of the weight w _{s for} adjusting the intensity ratio of the collected light between the light collecting points s is used, according to the following formula (12) Make a change (S206). Here, in the equation (12), the parameter η used in the update of the weight w _s is used, in order to prevent the ORA algorithm from becoming unstable, it is customary to use a value of η = 0.25 to 0.35.

Next, the phase value changing operation is performed at each pixel of the CGH so that the light collecting state of the laser light at the light collecting point s is close to the desired state (S207). In the analytical ORA method, the phase value applied to the pixel j in order to bring the light collecting state close to the desired state The amount of change in phase △ Using the phase of the complex amplitude obtained by equation (8) Phase of the propagation function considered for the aberration condition Φ _j-OPD And the phase value before the update With the following formula (13) And the judgment is obtained analytically. Here, it is

[Equation 15]

. Analytically fetching phase values In the method, a method such as a mountaineering algorithm for extracting a phase value by searching has an advantage that the time required for calculation can be shortened.

In addition, for the amount of change in phase △ Φ _js used in the decision, in the usual ORA method, the following formula (17) is used. However, in the improved ORA method described herein, in addition to the above-described change of the propagation function, in the calculation of the Φ _js in the update of the phase value, the phase Φ _{j -} for the aberration condition is also used. _OPD considered the formula (16).

As in the above, if the amount of change in phase is taken out, , by the following formula (18) , for the phase value in the jth pixel of CGH Make changes and updates. Then, it is checked whether or not the phase value is changed for all the pixels (S208), and if the change operation is not completed, the phase value is changed for the next pixel as j=j+1. . On the other hand, if all the pixels for the change operation is ended, the system returned to step S204, and the calculated complex variable amplitude U _s and the evaluation of light therefrom due to the state of the current collector. By performing such an operation in reverse, a CGH of a modulation pattern corresponding to the set concentrating condition is created.

In the CGH designed by the above method, as described above, the lens effect with the focal length f of the objective lens is imparted. Therefore, when the objective lens of the focal length f is used, the phase value of CGH obtained as a result of the design by the ORA method is used. And proceed Just fine. However, here, . In addition, when used in place of L f _obj is the focal length of the above, for formula (20), the system is also changed to L. f _obj

Here, when there is a medium having a refractive index different in the propagation path In the correction of the aberration performed in the case, in the prior art, the following method is used: that is, the pattern for aberration correction is extracted, and on the modulation pattern of the designed CGH, A method of correcting the pattern is added (for example, refer to Non-Patent Document 5). As a method of deriving the correction pattern in this case, for example, there is an optimization correction method, an analysis method using a paraxial approximation, and an analysis method using reverse ray tracing. The phase of the inverse of the aberration condition derived by the above methods is a pattern for aberration correction. However, in such a method resulting from the superposition of the patterns, as described below, there is a case where the function cannot be properly performed.

In other words, in the design method of focusing on the influence of one pixel of CGH, such as the ORA method described above, it is possible to perform laser light caused by a plurality of light collecting points by one CGH. Vido point illumination. In the case where the correction pattern is superimposed as in the prior art for such CGH, the same aberration correction pattern is imparted to all the collection points reproduced by CGH. However, in actuality, the set number of collection points may be different in the position of the optical axis direction (optical axis depth). In this case, since the influence of the aberration depends on the optical axis depth and is different from each other, it is necessary to impart the effect of the different aberration correction pattern to each of the collected spots. In other words, in the method of superimposing the correction pattern on the CGH, only the aberration correction at a single optical axis depth can be applied, and the correction for making the aberration of the optical axis depth different is insufficient. After that.

On the other hand, Non-Patent Document 6 discloses a design method using a reverse Fourier method. In this method, in order to carry out 3D Multi-point irradiation is necessary for additional processing in the design of CGH. In order to regenerate the CGH designed by the conventional inverse Fourier method, a lens is required after the SLM. This is because, in the design stage, the propagation distance is infinity, and control for each optical axis depth (light collecting position in the optical axis direction) cannot be performed.

In this method, in order to change the optical axis depth, it is necessary to additionally add a Fresnel lens pattern to the CGH designed by the inverse Fourier method. Further, in order to realize three-dimensional multi-point irradiation, first, for each of the light collecting surfaces (diffraction surfaces) on which the light collecting points are set, CGH is extracted by the inverse Fourier method, and each CGH is added to each CGH. The depth direction is the phase of the control lens pattern. Thereafter, the CGH of the plurality of collecting surfaces is superimposed in the form of complex amplitude, and only the phase is taken out, thereby operating the CGH for performing three-dimensional multi-point irradiation.

In addition, when a Freyn lens pattern is added to the CGH for each concentrating surface, an aberration correction pattern for correcting the influence due to the medium on the propagation path is added, so that each episode can be performed. Spherical aberration correction of the smooth surface. However, in this method, since the phase is taken out after the complex amplitude calculation is performed, the amplitude distribution information is lacking, and there is a problem that it is extremely difficult to perform the distribution of the amplitudes of the respective collection points.

On the other hand, according to the above-described CGH design method, such aberration correction and distribution of amplitudes of the respective collection points can be appropriately realized. Moreover, in such a design method, for example, it is possible to design and realize at the same time that "the air is present as an atmosphere medium on the propagation path. The CGH of the gas (or water, oil, etc.) and the correction of the influence of the medium with different refractive index and the "three-dimensional multi-point illumination" and the "strength adjustment between the complex light collection points".

The effects of the aberration correction and the like obtained by the optical modulation control device 30 and the laser beam irradiation device 1A of the above-described embodiment will be described together with specific examples. FIG. 7 to FIG. 9 are diagrams each showing an example of an irradiation pattern of laser light by the laser light irradiation device 1A (an example of a reconstructed image of CGH). Here, the laser light is expanded by a spatial filter, and the phase-modulated light is made by the LCOS-SLM which is the spatial light modulator 20, and is made by a lens of f=800 mm. Collecting light. At this time, a lenticular lens of f = 200 mm was disposed at a position of 700 mm from the collecting lens. In this example, the lenticular lens is an aberration object that is inserted into the collecting optical system.

When a modulation pattern that does not perform correction for an aberration object is used, as shown in Fig. 7, generally, the CGH system is not correctly displayed due to the influence of the aberration of the lenticular lens. On the other hand, if the correction for the aberration object is performed by the above-described CGH design method, as shown in Fig. 8, generally, at the position of the distance collecting lens z _s = 850 mm, aberration is observed. It was corrected.

Further, for the aberration correction of the lenticular lens, the method of deriving the OPD is slightly different from the case of the parallel plane substrate described above. That is, in the case of a parallel planar substrate, since it is axisymmetric, a two-dimensional calculation can be used. On the other hand, in the case of a lenticular lens, or when there is a tilt at the object, etc., it becomes necessary The appropriate OPD derivation method corresponding to this is to be performed.

Further, in the above-described CGH design method, since the information including the light collecting position including the optical axis depth, the refractive index, and the pixel pitch at the spatial light modulator is accurately held, it is possible to The collected light of the laser light, the laser processing, and the like are performed at a desired position. Here, FIG. 9 is a CGH which reproduces the "HPK" pattern designed by the usual reverse Fourier method, and shows the result of regeneration when there is no object on the propagation path. . On the other hand, Fig. 8 is a CGH designed by the ORA method and a CGH of the "HPK" pattern in such a manner as to collect the position of (0, 0, z _s ) on the optical axis. The two are superimposed, and the superimposed objects are reproduced and displayed.

Comparing Fig. 8 and Fig. 9, it can be seen that the reproduction positions in the horizontal direction of the paper are different. Although the shape of the light collecting point is good, the CGH used as the modulation pattern in FIG. 8 is not corrected for the diffraction in the lateral direction refracted by the lenticular lens. On the other hand, in order to improve the diffraction in the lateral direction, there are two methods described below.

In other words, the first method is a method of deriving the OPD at a point of 1 o'clock at a point corresponding to the position of the plane perpendicular to the optical axis direction for each point of the reproduction point. In this case, since Φ _j-OPD contains position information of a bit s, therefore, It is common to all points, and Φ _j-OPD is different for each point.

The second method is a method of deriving an OPD that differs depending on the depth of the optical axis, without including a position perpendicular to the optical axis direction. In this case, since the position information of the point s is not included in the Φ _j-OPD , Adjusting the position of the plane perpendicular to the optical axis direction, that is, It is at the position of each point and is different from each other.

Further, when the latter method is applied, and as in the case where the focal length f is not actually used as described above, it is necessary to change (u _s , v _s ). Further, in the case where f is used or when L is used, the lens effect is finally removed. Therefore, if the design of (u _s , v _s ) is correctly performed, there is no problem. Therefore, when the focal length L is used, the changed (u _s ', v _s ') is set to (u _s ', v _s ') = (βu _s , βv _s ). Further, the β system is a parameter for correcting the change in the focal length of the lens, and when the distance between the optical axis and (u _s , v _s ) is short, it is β=L/f.

Use these methods to design the CGH. By this, it is possible to reproduce the respective collection points at specific positions.

In this way, the correct derivation and design of CGH for the amount of aberration will have a significant impact on the accuracy of the position of the laser beam. Further, in the case of laser light irradiation or the like without knowing the refractive index of the medium, it is conceivable to perform the laser light irradiation first and confirm the light collecting position (for example, the processing position), and then change the refractive index and The method of feedback.

The design method of the modulation pattern implemented in step S108 of the flowchart of FIG. 4 will be further described. In the flowchart of FIG. 6, a design method that pays attention to the influence of one pixel of CGH is taken as an example, and a design method using an analytical ORA method is shown. . On the other hand, as a design method of a modulation pattern, as in the above-mentioned general, an exploration type design method such as a mountaineering algorithm, a simulated cooling algorithm, or a gene algorithm can be used.

Fig. 10 is a flow chart showing another example of the design method of the modulation pattern implemented in the optical modulation control device 30 shown in Fig. 3. In this flowchart, an example of a design method of an exploration type is shown for a design method using a case where a mountaineering algorithm is used. In this method, first, in the same manner as the ORA method, information on the set concentrating conditions is acquired for the illuminating of the laser light to be irradiated on the object 15 by the SLM 20 (step S301). Next, the phase pattern of the initial conditions of the CGH design presented in the SLM20 For example, it is created as a random phase pattern (S302).

Next, the phase value of one pixel of CGH is performed. Change operation (S303). Furthermore, the use of a propagation function containing considerations for aberration conditions is used. Equation (8), to calculate the complex amplitude U _s =A _s exp(i) representing the collected state of the laser light at the collection point s ) (S304). When the complex amplitude is calculated, the determination is made for the obtained light collecting state (S305).

Here, if the phase value is 1 pixel The switching is performed such that the amplitude A _s , the intensity I _s =|A _s | ² , or the complex amplitude U _s becomes close to the desired value, and the phase value at this time is used. In the mountaineering algorithm, for example, for individual phase values of each pixel of CGH, switching from 0π(rad) is performed once at 0.1π(rad) until it becomes a specific phase value, for example, becomes 2π. (rad), and in each switching, the equation (8) is used for propagation. Thereafter, the phase value which maximizes the intensity of the light collecting spot s is extracted by searching.

Next, it is determined whether the phase value for one pixel is under all conditions. The switching is confirmed (S306), and if it has not been completely completed, the process returns to step S303. Further, it is determined whether or not an operation such as changing the phase value of one pixel and the determination of the condensed state is performed for all the pixels (S307), and if it is not completely performed, the pixel number is set to j=j+1. And returning to step S303, the necessary operations are performed for the next pixel.

If the necessary operation is completed for all the pixels, it is determined whether or not a desired result is obtained in the design of the CGH (S308). The determination method in this case is the same as the case of the ORA method. For example, it is possible to use whether or not the values of the collected light intensity, the amplitude, the complex amplitude obtained at each of the light collecting points fall within the allowable range. The method of judgment. Alternatively, a method of determining whether or not the loop such as the change of the phase value and the determination of the condensed state in the flowchart of FIG. 10 has been performed for a predetermined number of times or the like may be used. When the necessary conditions are met, the design algorithm of CGH is terminated. When the condition is not satisfied, the process returns to step S303, and the search is repeated from the first pixel.

Here, in the example of the above-described design method of the modulation pattern, the case where the object 15 to be irradiated is a parallel plane substrate has been described. However, in actuality, the object 15 may be considered. The medium existing on the light propagation path is a case where the angle α is inclined with respect to the optical axis. When the inclination α is large, astigmatism occurs in addition to the spherical aberration. When such a case, in addition to NA objective lens system, the focal length f, the refractive index of the medium atmosphere n _1, the refractive index of the irradiated object 15 n _2, and with respect to the incident laser beam SLM of the light intensity distribution I _{j In addition to -in} , the inclination α of the object 15 is also taken out.

In the above-described design example, the aberration condition of the two-dimensional is derived by using an analytical method with inverse ray tracing, but this is because the spherical aberration is an aberration of the axis symmetry. Therefore. On the other hand, when astigmatism occurs due to the inclination α of the medium or the like and the aberration is not axisymmetric or the like, the aberration condition is performed by an appropriate method corresponding to the matter. Export and use the resulting aberration conditions Let's design the CGH.

Further, in order to collect the laser light at an arbitrary position as a light collecting point, it is also conceivable that the laser beam is collected at a position different from the optical axis. When the diffraction angle of the light beam is small, although no problem occurs, when the diffraction angle is large, astigmatism occurs in addition to the spherical aberration. In this case, it is only required to take out the inclination β of the beam, and the same as the above, the appropriate method for the matter is used to derive the aberration condition, and the obtained aberration condition is used. Let's design the CGH.

Regarding the desired collected light intensity I _s-des of the laser light at each of the light collecting points s, it is also possible to consider the light transmittance of the material of the object 15 to be irradiated, and the intensity according to the irradiation depth. I _s-des is adjusted, that is, the CGH is designed to change the intensity I _s-des in response to the illumination depth z _s .

Further, since the SLM system has a periodic pixel structure, the CGH displayed in the plurality of pixels differs in the intensity of the diffracted light depending on the spatial frequency. Therefore, it is also possible to consider the diffraction intensity and design the CGH in response to the irradiation position (u _s , v _s ) and the irradiation depth z _s to change the intensity I _s-des .

Further, it is also conceivable that even if the adjustment of the intensity I _s-des is performed as described above, the unevenness may occur in the intensity. In this case, it is also possible to observe the processing result of the laser light irradiation, for example, the amount of refractive index change occurring at the irradiation site, and change the intensity by referring to the feedback of the observation result. I _s-des , and the design of CGH.

Further, when the processing of the object 15 to be irradiated is performed at the light collecting point by the irradiation of the collected light of the laser light, in the above description, the optical integrated circuit is formed by the internal processing of the glass. The production of the object 15 is not limited to the glass medium, and the material of the inside of the crucible or various materials such as SiC may be processed. .

In addition, in the above-described embodiment, the laser processing inside the object 15 by the illuminating of the laser light of the object 15 is mainly described. However, the above-described optical modulation control is used. The laser light irradiation device of the device and the method for designing the modulation pattern can be applied to various devices such as a laser microscope such as a laser scanning microscope for cell observation, in addition to the laser processing device.

Fig. 11 is a view showing the configuration of another embodiment of a laser beam irradiation apparatus including the optical modulation control apparatus according to the present invention. The laser light irradiation device 1R according to the present embodiment is provided with FIG. 1 The configuration shown in the above includes the laser light source 10 and the movable stage 18, the spatial light modulator 20, the driving device 28, and the optical modulation control device 30. However, in addition to this, it is further provided with detection. The portion 40 and the lens 41 and the dichroic mirror 42.

The dichroic mirror 42 is disposed between the lens 22 constituting the 4f optical system and the objective lens 25 in the laser beam irradiation optical system. In addition, the light from the object 15 to be irradiated, which is reflected by the dichroic mirror 42, is transmitted through the lens 41 and is incident on the detecting unit 40.

In this way, the laser light irradiation device 1B of FIG. 11 irradiates the observation sample 15 as an object to be irradiated with the laser light, and the reflected light or the scattered light from the sample 15 is detected by the detecting unit 40. A laser scanning microscope for observation such as fluorescence is constructed. In addition, in the laser scanning for the sample 15, in FIG. 11, the sample 15 is moved by the movable platform 18, but a movable mechanism, a current mirror, etc. may be provided in the optical system side. The composition.

FIG. 12 is a view showing an example of the collected light irradiation of the laser light to the object to be irradiated (observation sample) 15 in the laser light irradiation device 1B shown in FIG. For example, in the case of observing cells as the sample 15 or the like, as shown in Fig. 12, it is also conceivable that the shape of the cells may be different depending on the observation position. In this case, it is necessary to take out the phase of the aberration condition corresponding to each shape. .

Moreover, in the laser scanning microscope, not only the refractive index mismatching occurs during the convergence of the laser light, but also the refractive index mismatch occurs during the diverging process during the observation. In this case, it is also possible to consider: considering the divergence process and deriving the aberration condition The design of the CGH is performed, and other SLMs are used to correct the reflected light, the scattered light, the fluorescent light, and the like. Thereby, for example, in a confocal microscope or the like, it is possible to improve the accuracy of observation of the sample.

Further, in the above-described embodiment, the embodiment has been described with respect to the phase modulation of the laser light of a single wavelength. However, a plurality of laser light beams may be emitted from a plurality of light sources having different wavelengths. Into the SLM, and at the SLM, a modulation pattern in which a plurality of light components having different wavelengths are modulated is displayed, and each phase is modulated. A method of designing a modulation pattern in which a plurality of light components having different wavelengths are modulated at the same time is described, for example, in Non-Patent Document 8.

The case where the control of the complex wavelength is performed using the configuration of the above embodiment will be specifically described. When the concentrating condition information is obtained, the collected light position of the point s and the information of the wavelength of the collected light are obtained. After that, just take the aberration condition at every point s And will depend on the wavelength and position and the propagation function is different from each other. , converted to And use it.

The optical modulation control method, the control program, the control device, and the laser light irradiation device according to the present invention are not limited to the above-described embodiments and configuration examples, and various modifications are possible. For example, the configuration of the optical system including the laser light source and the spatial light modulator is not limited to the configuration shown in FIGS. 1 and 11, and specifically, various configurations can be used.

Further, similarly, in addition to the above examples, various methods can be used for the design of the modulation pattern (CGH) presented in the spatial light modulator. In general, in the design of the modulation pattern, it is only necessary to adopt the following configuration: that is, for the change of the phase value at one pixel of the modulation pattern for the lightning at the light collecting point The influence of the light collecting state of the light is focused, and the phase value is changed so that the light collecting state is in a desired state, and the phase value is changed by all the pixels of the modulation pattern. To design a modulation pattern, and to evaluate the light toward the light collection point s from the pixel j in the modulation pattern of the spatial light modulator when evaluating the light collection state at the light collection point Wave propagation function used in free propagation Add the propagation function transformed by the aberration condition .

In the optical modulation control method according to the above embodiment, the configuration is such that: (1) the input laser light is used and the phase of the laser light is modulated, and the phase is adjusted. a spatially modulated spatial light modulator of the converted laser light output to control the illumination of the laser light for the set concentrating spot according to the modulation pattern presented in the spatial light modulator The optical modulation control method is characterized in that: (2) an irradiation condition acquisition step is performed, and an irradiation pattern of the laser light for the spatial light modulator is obtained as an irradiation condition of the laser light, and the position is in the space. The first refractive index n ₁ of the first propagation medium on the propagation path of the laser light at the light collecting point of the light modulator, and the second position at the side of the light collecting point on the side closer to the light collecting point than the first propagation medium The second refractive index n _{2 which is} different from the first refractive index of the propagation medium; and (3) the concentrating condition setting step is used as a light collecting condition of the laser light, and the lightning is obtained from the spatial light modulator The number s _{t of the} light collecting points illuminated by the collecting light, and the collecting point s of the s _t The individual light collecting position and the light collecting intensity are set, wherein s _t is an integer of 1 or more; and (4) the aberration condition deriving step is to be a lightning ray for the light collecting point s from the spatial light modulator In the propagation of the light, the aberration conditions generated by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and (5) the modulation pattern design step is performed by the aberration condition extraction step The derived aberration conditions are considered, and for the modulation pattern presented in the spatial light modulator, (6) the modulation pattern design step is intended to be made in the spatial light modulator. The effect of the two-dimensional arrangement of the plural pixels on the concentrating state of the laser light at the concentrating point for the change of the phase value at one pixel of the modulation pattern presented in the complex pixel Incidentally, the phase value is changed so that the light collecting state is close to the desired state, and the phase value changing operation is performed on all the pixels of the modulation pattern. This is to design a modulation pattern, and, in the case of collecting light When the light collecting state is evaluated, the light is transmitted to the light collecting point s from the pixel j in the modulation pattern of the spatial light modulator, and the free propagation is performed in a state where the propagation medium is homogeneous. Wave propagation function Add the propagation function transformed by the aberration condition .

Further, in the optical modulation control program according to the above embodiment, the configuration is such that: (1) is for causing a computer to use input laser light and to perform the laser light. a phase-modulated spatial light modulator that adjusts the phase of the laser light after the phase modulation, to control the set light spot according to the modulation pattern presented in the spatial light modulator The light modulation control program for the illumination of the laser light is characterized in that the computer is implemented: (2) the irradiation condition acquisition processing is performed as the irradiation condition of the laser light, and the laser light for the spatial light modulator is obtained. The incident pattern and the first refractive index n ₁ of the first propagation medium on the propagation path of the laser light from the concentrating point of the spatial light modulator, and the position of the first propagation medium compared to the first propagation medium Further, the second refractive index n _{2 which is} different from the first refractive index of the second propagation medium at the light collecting point side; and (3) the concentrating condition setting process is used as the light collecting condition of the laser light, and The number of light collecting points from the laser light from the spatial light modulator _t and the set light position and the light collection intensity of the s _t collection points s, wherein s _t is an integer of 1 or more; and (4) the aberration condition derivation processing is performed in the slave In the propagation of the laser light of the light collecting point s by the spatial light modulator, the aberration conditions generated by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and (5) modulation The pattern design process is for the aberration condition derived by the aberration condition derivation process, and is designed for the modulation pattern presented in the spatial light modulator, (6) modulation pattern design processing, I want to be a pixel that is multi-dimensionally arranged in a spatial light modulator, and for the change of the phase value at one pixel of the modulation pattern presented in the complex pixel. Attention is made to the influence of the light collecting state of the laser light at the point, and the phase value is changed so that the light collecting state is close to the desired state, and the phase value is changed. Designing all the pixels of the pattern to design Modulating the pattern, and, when evaluating the state of light collection at the light collecting point, for the propagation of light from the light collecting point s from the pixel j in the modulation pattern of the spatial light modulator, Free-propagating wave propagation function in a state where the propagation medium is homogeneous Add the propagation function transformed by the aberration condition .

Further, in the optical modulation control device according to the above embodiment, the configuration is such that: (1) the input laser light is used and the phase of the laser light is modulated. A phase-modulated spatial light modulator for phase-modulated laser light output to control the collection of laser light for the set concentrating spot based on the modulation pattern presented in the spatial light modulator The illumination modulation control device is characterized in that: (2) an irradiation condition acquisition means is provided, and an irradiation pattern of the laser light for the spatial light modulator is obtained as an irradiation condition of the laser light, and The first refractive index n ₁ of the first propagation medium on the propagation path of the laser light from the light collecting point of the spatial light modulator and the position of the first propagation medium on the side of the light collecting point compared with the first propagation medium The second refractive index n _{2 which is} different from the first refractive index of the second propagation medium; and (3) the concentrating condition setting means is used as the light collecting condition of the laser light, and is obtained from the spatial light modulator. the laser beam for irradiating light collecting point of the number of light collecting s _t, s _t, and the light collecting on th individual light collecting position s, the light intensity set for the set, wherein, _T s is an integer of 1 line; and (4) means for deriving an aberration condition, the line from the spatial light modulator to the light collecting point s In the propagation of the laser light, the aberration conditions caused by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and (5) the modulation pattern design means is based on the aberration condition The aberration conditions derived from the derivation means are considered, and for the modulation pattern presented in the spatial light modulator, (6) the modulation pattern design means is determined to be in the spatial light modulator. Making a complex number of pixels in a two-dimensional arrangement, and causing a change in the phase value at one pixel of the modulation pattern presented in the complex pixel for the light collection state of the laser light at the collection point The influence of the influence is such that the phase value is changed so that the light collecting state is close to the desired state, and the phase value changing operation is performed on all the pixels of the modulation pattern. By designing the modulation pattern, and When the light collecting state at the light spot is evaluated, the light for the light collecting point s is transmitted from the pixel j in the modulation pattern of the spatial light modulator, and the medium is used in a state where the propagation medium is homogeneous. Free-propagating wave propagation function Add the propagation function transformed by the aberration condition .

Here, the above-described optical modulation control method, control program, and control device are preferably used as aberration conditions for the propagation of light toward the light collecting point s from the pixel j in the derivation of the aberration condition. And extracting the phase Φ _j-OPD which gives the difference in optical path length in the propagation, and in the design of the modulation pattern, by transforming To find out the propagation function that takes into account the aberration conditions. . According to this configuration, it is possible to appropriately propagate the propagation function of free propagation. , transformed into a propagation function that takes into account the aberration conditions .

Further, the optical modulation control method, the control program, and the control device are preferably configured to set the amplitude of the incident light of the laser light to the pixel j of the spatial light modulator 20 to A _{j-in in} the design of the modulation pattern. And set the phase And set the phase value at pixel j to By the following For the purpose of extracting the complex amplitude U _s representing the state of light collection at the light collecting point _s . Thereby, it is possible to appropriately evaluate the light collecting state of the laser light at the light collecting point.

For the specific configuration of the design of the modulation pattern, in the change of the phase value at the pixel j of the modulation pattern, the following configuration may be adopted: that is, according to the light collection based on the representative point s Phase of the complex amplitude of the state And propagation functions that are considered for aberration conditions And the phase value before the change at pixel j The value obtained by the resolution is used to change the phase value. As such a method of resolving the phase value analytically, for example, there is an ORA (Optimal Rotation Angle) method. Alternatively, the value of the phase value at the pixel j of the modulation pattern may be used to search for the value obtained by using one of a mountaineering algorithm, a simulated cooling algorithm, or a genetic algorithm. The phase value is changed.

Further, regarding the first and second propagation media existing on the propagation path of the laser light, for example, a configuration may be adopted in which the second propagation medium is internally set with a light collecting point. The object to be irradiated, the first propagation medium, is an atmosphere medium existing between the spatial light modulator and the object to be irradiated. Further, the atmosphere medium may be water, oil, or the like in addition to air or the like. Also, between the spatial light modulator and the light collecting point, the system can also be saved. There are more than 3 media.

Further, the optical modulation control device may be configured to: drive and control the spatial light modulator, and display the modulation pattern designed by the modulation pattern design means in the light modulation of the spatial light modulator Drive control means. Further, such an optical modulator driving control means may be configured as another device that is different from the optical modulation control device that performs the design of the modulation pattern.

In the laser light irradiation device according to the above embodiment, the laser light source is provided with: (a) a laser light source for supplying laser light; and (b) a phase modulation type. a spatial light modulator that inputs laser light and modulates the phase of the laser light, and then outputs the laser light after the phase modulation; and (c) the above-mentioned optical modulation control device is based on space The modulation pattern presented in the light modulator controls the illumination of the modulated laser light for the set concentrating spot.

According to such a configuration, the optical modulation control device can appropriately and surely control the light collecting state of the laser light at the light collecting point, and appropriately set the position of the object to be irradiated. The illumination of the single or multiple collection points of the laser light, and the operation of the object, such as processing, observation, and the like. Such a laser light irradiation device can be used, for example, as a laser processing device, a laser microscope, or the like. Further, as the spatial light modulator, it is preferable to use a spatial light having a plurality of pixels which are arranged in two dimensions, and to adjust the phase of the laser light at each of the plurality of pixels. Modulator.

[Industry use possibility]

The present invention can be utilized as an optical modulation control method, a control program, a control device, and a laser beam irradiation device that can appropriately control the light collecting state of the laser light at the light collecting point.

1A, 1B‧‧‧Laser light irradiation device

10‧‧‧Laser light source

11‧‧‧beam expander

12‧‧‧Mirror

13‧‧‧Mirror

15‧‧‧Immediate objects

18‧‧‧ movable platform

20‧‧‧Space light modulator

21‧‧‧4f optical lens

22‧‧‧4f optical lens

25‧‧‧object lens

28‧‧‧Light modulator drive

40‧‧‧Detection Department

41‧‧‧ lens

42‧‧‧Dual color mirror

30‧‧‧Light modulation control device

31‧‧‧Enhanced Conditions Acquisition Department

32‧‧‧Lighting Condition Setting Department

33‧‧‧ aberration condition derivation unit

34‧‧‧Transformation Design Department

35‧‧‧Light Modulator Drive Control Department

37‧‧‧ Input device

38‧‧‧Display device

Fig. 1 is a view showing a configuration of one embodiment of a laser beam irradiation device.

FIG. 2 is a diagram showing the occurrence of aberrations during the propagation of laser light. FIG.

Fig. 3 is a block diagram showing an example of the configuration of the optical modulation control device.

FIG. 4 is a flow chart showing an example of a light modulation control method.

Fig. 5 is a diagram showing the derivation of aberration conditions generated in the propagation of laser light.

Fig. 6 is a flow chart showing an example of a design method of a modulation pattern.

Fig. 7 is a view showing an example of an irradiation pattern of laser light by a laser light irradiation device.

Fig. 8 is a view showing an example of an irradiation pattern of laser light by a laser light irradiation device.

Fig. 9 is a view showing an example of an irradiation pattern of laser light by a laser light irradiation device.

FIG. 10 is a flow chart showing another example of a design method of a modulation pattern.

Fig. 11 is a view showing the configuration of another embodiment of the laser beam irradiation apparatus.

FIG. 12 is a view showing an example of light-collecting illumination of laser light to an object to be irradiated. FIG.

Claims (52)

A light modulation control method is a phase modulation type spatial light modulator that uses input laser light and modulates the phase of the laser light and then modulates the phase of the laser light, according to the spatial light in the foregoing The optical modulation control method for controlling the collected light of the laser light at the set concentrating point, and the irradiation condition obtaining step is provided as the aforementioned An irradiation pattern of the laser light, and an incident pattern of the laser light for the spatial light modulator and a propagation path of the laser light from the spatial light modulator to the light collecting point a first refractive index n ₁ of the propagation medium and a second refractive index different from the first refractive index of the second propagation medium on the side of the collection spot side than the first propagation medium n _2; the number of the light spot and the current collector condition setting step, an optical system as the set conditions of the laser beam, and for the spatial light modulator from the laser light for varying an irradiated from the light collection s _t , and on th s _t Individual light collection position of the light spot s, the light intensity set for the set, wherein, _T s is an integer of 1 line; and the aberration condition deriving step, the lines from the spatial light modulator is set for the light spot In the propagation of the aforementioned laser light, the aberration conditions generated by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and the modulation pattern design step is performed by the image Considering the aforementioned aberration conditions derived from the difference condition deriving step, and designing the modulation pattern presented in the spatial light modulator, the modulation pattern design step is determined to be in the aforementioned spatial light modulation. a plurality of pixels arranged in a two-dimensional arrangement, and a change in a phase value at the one pixel of the modulation pattern presented in the plurality of pixels for the aforementioned light collecting point The influence of the light collecting state of the laser light is focused on, and the phase value is changed so that the light collecting state is close to the desired state, and the phase value is changed. The modulation pattern is designed by using all the pixels of the modulation pattern, and the evaluation of the light collection state at the light collection point is performed for the spatial light modulator from the space light modulator. The pixel j in the aforementioned modulation pattern functions as a propagation of light for the aforementioned light collecting point s, and uses a wave propagation function of free propagation in a state in which the propagation medium is homogeneous. The propagation function transformed by the aforementioned aberration condition is added . The optical modulation control method according to claim 1, wherein the aberration condition deriving step is the aberration condition regarding the propagation of light from the pixel j to the light collection point s. Finding a phase Φ _j-OPD that gives a difference in optical path length during the propagation, and the step of designing the modulation pattern is based on a transformation To extract the aforementioned propagation function that takes into account the aforementioned aberration conditions. . The optical modulation control method according to the first or second aspect of the invention, wherein the modulation pattern designing step is an input amplitude of the laser light to the pixel j of the spatial light modulator. Set to A _j-in and set the phase to And setting the phase value at the aforementioned pixel j to With the following formula The complex amplitude U _s representing the aforementioned light collecting state at the aforementioned light collecting point s is extracted. The optical modulation control method according to the first or second aspect of the invention, wherein the modulation pattern designing step is based on the change of the phase value at the pixel j of the modulation pattern, based on Representing the phase of the complex amplitude of the aforementioned concentrating state at the aforementioned concentrating point s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control method according to the third aspect of the invention, wherein the modulation pattern designing step is based on the representative of the change in the phase value at the pixel j of the modulation pattern The phase of the complex amplitude of the aforementioned concentrating state at the spot s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control method according to the first or second aspect of the invention, wherein the modulation pattern designing step is based on the change of the phase value in the pixel j of the modulation pattern. The value of the mountaineering algorithm, the simulated cooling algorithm, or the gene algorithm is sought to be changed, and the phase value is changed. The optical modulation control method according to the third aspect of the invention, wherein the modulation pattern designing step is based on using a mountaineering algorithm in the change of the phase value in the pixel j of the modulation pattern. The value of the phase value is changed by the value of the simulated cooling algorithm or one of the gene algorithms. The optical modulation control method according to the first or second aspect of the invention, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is It is an atmosphere medium existing between the spatial light modulator and the object to be irradiated. The optical modulation control method according to the third aspect of the invention, wherein the second propagation medium is an irradiation target in which the collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control method according to the fourth aspect of the invention, wherein the second propagation medium is an irradiation target in which the collection point is set, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control party as described in item 5 of the patent application scope In the above method, the second propagation medium is an irradiation target in which the light collecting point is set inside, and the first propagation medium is present between the spatial light modulator and the irradiation target. Ambient media. The optical modulation control method according to claim 6, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control method according to the seventh aspect of the invention, wherein the second propagation medium is an irradiation target in which the collection point is set, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. A light modulation control program is a program for causing a computer to perform a light modulation control, which is a laser light output that uses input laser light and modulates the phase of the laser light and then modulates the phase. a phase modulation type spatial light modulator for controlling the collected light of the aforementioned laser light for the set concentrating spot according to the modulation pattern presented in the spatial light modulator, the light modulation The control program is characterized in that the computer performs an irradiation condition acquisition process, and obtains an incident pattern of the laser light for the spatial light modulator and a position from the space as the irradiation condition of the laser light. The first refractive index n ₁ of the first propagation medium on the propagation path of the laser light at the light collecting point, and the position of the light modulation device on the light collecting point side of the first propagation medium a second refractive index n ₂ different from the first refractive index of the second propagation medium; and a concentrating condition setting process as a light collecting condition of the laser light, and a spatial light modulator from the space And the aforementioned Emitting light for irradiating light collecting the number of the light collecting point of s _T, and individual light collecting position with respect to s _T a light collection point s, the set light intensity as a set, wherein, s _T based is an integer of 1; And the aberration condition derivation processing is performed by the first propagation medium having the refractive indices different from each other and the second propagation from the propagation of the laser light to the light collection point s by the spatial light modulator The aberration condition generated by the medium is derived; and the modulation pattern design process is considered for the aberration condition derived by the aberration condition derivation processing described above, and is presented in the spatial light modulator described above. The modulation pattern design is as described above, and the modulation pattern design process is determined to be a plurality of pixels that are two-dimensionally arranged in the spatial light modulator, and the aforementioned modulation is presented in the plurality of pixels. The change of the phase value at the one pixel of the variable pattern pays attention to the influence of the light collecting state of the laser light at the light collecting point, so that the light collecting state becomes close to the desired state. Way and right The phase value is changed, and the phase value change operation is performed on all the pixels of the modulation pattern, thereby designing the modulation pattern, and at the aforementioned light collecting point In the evaluation of the light collecting state, the propagation of light to the light collecting point s from the pixel j in the modulation pattern of the spatial light modulator is used, and the use of the medium in a state in which the propagation medium is homogeneous is used. Propagating wave propagation function The propagation function transformed by the aforementioned aberration condition is added . The optical modulation control program according to claim 14, wherein the aberration condition deriving process is the aberration condition regarding the propagation of light from the pixel j to the concentrating point s. Obtaining a phase Φ _j-OPD that gives a difference in optical path length during the propagation, and the modulation pattern design process is based on the transformation To extract the aforementioned propagation function that takes into account the aforementioned aberration conditions. . The optical modulation control program according to claim 14 or 15, wherein the modulation pattern design process is an input amplitude of the laser light to the pixel j of the spatial light modulator. Set to A _j-in and set the phase to And setting the phase value at the aforementioned pixel j to With the following formula The complex amplitude U _s representing the aforementioned light collecting state at the aforementioned light collecting point s is extracted. The optical modulation control program according to claim 14 or 15, wherein the modulation pattern designing process is based on the change of the phase value at the pixel j of the modulation pattern, based on Representing the phase of the complex amplitude of the aforementioned concentrating state at the aforementioned concentrating point s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control program according to claim 16, wherein the modulation pattern designing process is based on the representation of the phase value in the pixel j of the modulation pattern. The phase of the complex amplitude of the aforementioned concentrating state at the spot s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control program according to claim 14 or 15, wherein the modulation pattern design process is based on the change of the phase value at the pixel j of the modulation pattern. The value of the mountaineering algorithm, the simulated cooling algorithm, or the gene algorithm is sought to be changed, and the phase value is changed. The optical modulation control program according to claim 16, wherein the modulation pattern designing process is based on using a mountaineering algorithm in the change of the phase value in the pixel j of the modulation pattern. The value of the phase value is changed by the value of the simulated cooling algorithm or one of the gene algorithms. The optical modulation control program according to claim 14 or 15, wherein the second propagation medium is an irradiation target in which the light collecting point is set inside, and the first propagation medium is It is an atmosphere medium existing between the spatial light modulator and the object to be irradiated. The optical modulation control program according to claim 16, wherein the second propagation medium is an irradiation target in which the light collecting point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control program according to claim 17, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control program according to claim 18, wherein the second propagation medium is an irradiation target in which the light collecting point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control program according to claim 19, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control program according to claim 20, wherein the second propagation medium is an irradiation target in which the collection point is set inside, and the first propagation medium is present in the first propagation medium. before An ambient medium between the spatial light modulator and the object to be irradiated is described. A light modulation control device is a phase modulation type spatial light modulator that uses input laser light and modulates the phase of the laser light and then modulates the phase of the laser light, according to the spatial light in the foregoing The optical modulation control device for controlling the collected light of the laser light at the set concentrating point, and the irradiation condition obtaining means is provided as the aforementioned An irradiation pattern of the laser light, and an incident pattern of the laser light for the spatial light modulator and a propagation path of the laser light from the spatial light modulator to the light collecting point a first refractive index n ₁ of the propagation medium and a second refractive index different from the first refractive index of the second propagation medium at the side of the light collecting point compared to the first propagation medium a rate n ₂ ; and a concentrating condition setting means for the number of the above-mentioned light collecting points for concentrating the laser light from the spatial light modulator as the light collecting condition of the laser light _t, and on a s _t Individual light collecting position of the light collecting point s, as the light-intensity setting, wherein, _T s is an integer of 1 line; and the aberration condition derivation means, from the Department of the spatial light modulator is set for the light In the propagation of the laser light of the point s, the aberration conditions generated by the first propagation medium and the second propagation medium having mutually different refractive indices are derived; and the modulation pattern design means is Considering the aforementioned aberration conditions derived by the aberration condition deriving means, and designing the modulation pattern presented in the spatial light modulator, the modulation pattern design means is determined to be in the aforementioned spatial light tone. a plurality of pixels arranged in two dimensions in the transformer, and a change in the phase value at the one pixel of the modulation pattern presented in the plurality of pixels is for the aforementioned light collecting point The influence of the light collecting state of the laser light is focused on, and the phase value is changed so that the light collecting state is close to the desired state, and the phase value is changed. The modulation pattern is designed by using all the pixels of the modulation pattern, and the evaluation of the light collection state at the light collection point is performed for the spatial light modulator from the space light modulator. The pixel j in the aforementioned modulation pattern functions as a propagation of light for the aforementioned light collecting point s, and uses a wave propagation function of free propagation in a state in which the propagation medium is homogeneous. The propagation function transformed by the aforementioned aberration condition is added . The optical modulation control device according to claim 27, wherein the aberration condition deriving means is the aberration condition regarding the propagation of light from the pixel j to the light collecting point s. Obtaining a phase Φ _j-OPD that gives a difference in optical path length during the propagation, and the modulation pattern design means is based on a transformation To extract the aforementioned propagation function that takes into account the aforementioned aberration conditions. . The optical modulation control device according to claim 27, wherein the modulation pattern designing means is an input amplitude of the laser light to the pixel j of the spatial light modulator. Set to A _j-in and set the phase to And setting the phase value at the aforementioned pixel j to With the following formula The complex amplitude U _s representing the aforementioned light collecting state at the aforementioned light collecting point s is extracted. The optical modulation control device according to claim 27, wherein the modulation pattern design means is based on the change of the phase value at the pixel j of the modulation pattern, based on Representing the phase of the complex amplitude of the aforementioned concentrating state at the aforementioned concentrating point s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control device according to claim 29, wherein the modulation pattern designing means is based on the representative of the change in the phase value of the pixel j of the modulation pattern The phase of the complex amplitude of the aforementioned concentrating state at the spot s And the aforementioned propagation function that takes into account the aforementioned aberration conditions And the phase value before the change at the aforementioned pixel j The value obtained by the resolution is obtained, and the phase value is changed. The optical modulation control device according to claim 27, wherein the modulation pattern designing means is based on the change of the phase value in the pixel j of the modulation pattern. The value of the mountaineering algorithm, the simulated cooling algorithm, or the gene algorithm is sought to be changed, and the phase value is changed. The optical modulation control device according to claim 29, wherein the modulation pattern designing means is based on using a mountaineering algorithm in the change of the phase value in the pixel j of the modulation pattern. The value of the phase value is changed by the value of the simulated cooling algorithm or one of the gene algorithms. The optical modulation control device according to claim 27, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is It is an atmosphere medium existing between the spatial light modulator and the object to be irradiated. The optical modulation control device according to claim 29, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control device according to claim 30, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. before An ambient medium between the spatial light modulator and the object to be irradiated is described. The optical modulation control device according to claim 31, wherein the second propagation medium is an irradiation target in which the light collecting point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control device according to claim 32, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control device according to claim 33, wherein the second propagation medium is an irradiation target in which the light collection point is set inside, and the first propagation medium is present in the first propagation medium. An atmosphere medium between the spatial light modulator and the object to be irradiated. The optical modulation control device according to claim 27, wherein the optical modulation control device is provided with driving control means for the spatial light modulator, and The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the spatial light modulator. The optical modulation control device according to claim 29, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 30, wherein the optical modulator control means is provided The spatial light modulator is driven and controlled, and the aforementioned modulation pattern designed by the modulation pattern design means is presented in the spatial light modulator. The optical modulation control device according to claim 31, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 32, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 33, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 34, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 35, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 36, wherein the optical modulator control means is provided The spatial light modulator is driven and controlled, and the aforementioned modulation pattern designed by the modulation pattern design means is presented in the spatial light modulator. The optical modulation control device according to claim 37, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 38, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. The optical modulation control device according to claim 39, further comprising: an optical modulator driving control means for driving control of the spatial light modulator and modulating the spatial light in the space The aforementioned modulation pattern designed by the aforementioned modulation pattern design means is presented in the device. A laser light irradiation device comprising: a laser light source for supplying laser light; and a phase modulation type spatial light modulator for inputting the laser light and modulating a phase of the laser light, And the optical modulation control device according to any one of claims 27 to 51, which is based on the tone presented in the spatial light modulator described above. The pattern is changed to control the collected illumination of the aforementioned laser light for the set concentrating spot.