TWI604073B - Mask structure capable of calibrating an image capturing module and adapted for a evaporation process of an organic light-emitting diode - Google Patents

Description

Suitable for organic light emitting diode evaporation process and can be used to correct image capture Photomask structure for positioning accuracy of module

The present invention relates to a reticle structure, and more particularly to a reticle structure suitable for use in an organic light-emitting diode process and for correcting the positioning accuracy of an image capturing module.

In the vapor deposition process of the organic light-emitting diode, a mask having an opening is mainly disposed in front of the substrate, so that the vaporized molecules after vaporization are attached to the substrate through the opening in the mask, so that the light-emitting molecules can be accurately Attached to the substrate, the alignment accuracy between the mask and the substrate needs to be 1 micrometer (μm). When the image capturing module is used to perform the alignment between the mask and the substrate, there is an assembly error between the image capturing module and the vapor deposition machine (that is, the setting positions of the image capturing devices of the image capturing module) As well as the azimuth and asymmetry, the alignment accuracy between the reticle and the substrate cannot be achieved, which leads to a decrease in the yield of the product and an increase in the manufacturing cost.

Accordingly, it is an object of the present invention to provide a reticle structure suitable for use in an organic light emitting diode evaporation process and for correcting the positioning accuracy of an image capture module to solve the above problems.

To achieve the above objective, the present invention discloses a reticle structure including a reticle body, a first alignment mark group, a second alignment mark group, a third alignment mark group, and a fourth alignment mark group. The first alignment mark group corresponds to a first image capturing device of an image capturing module and includes a first main symbol and a first auxiliary symbol. The first main symbol is disposed on the mask body. The first auxiliary mark is disposed on the reticle body and adjacent to the first main mark, the second align mark group includes a second main mark, and the second main mark is disposed on the reticle body, the third The align mark group includes a third main mark, the third main mark is disposed on the reticle body, the fourth align mark group includes a fourth main mark, and the fourth main mark is disposed on the reticle body a first side is defined between the first major symbol and the second major token, and a second side is defined between the second major token and the third major token, the third major token and the fourth major token Define a third side A fourth side is defined between the fourth main symbol and the first main symbol, and a first auxiliary line is defined between the first auxiliary symbol and the first main symbol, and the first auxiliary line and the fourth side are Forming a first angle, the tolerance of the length of the first auxiliary line is less than a length precision value, and the tolerance of the first angle is less than an angular precision value.

According to one embodiment of the present invention, the first main symbol and the first auxiliary symbol are respectively two circular symbols, the first main symbol has a first main center and a first main diameter, and the first auxiliary mark Having a first auxiliary center and a first auxiliary diameter, the first auxiliary line defining a tolerance of a length of the first main diameter and a length of the first auxiliary diameter defined by the first main center and the first auxiliary center The tolerances are all less than the length accuracy value.

According to one embodiment of the present invention, the first major symbol is a circular symbol, the first auxiliary symbol is a square symbol, and the first major symbol has a first main center and a first a main diameter, the first auxiliary mark has a first auxiliary center and a first auxiliary side length, the first auxiliary line is defined by the first main center and the first auxiliary center, the length of the first main diameter The tolerance of the tolerance of the first auxiliary side length is less than the length precision value.

According to one embodiment of the present invention, the second alignment mark group corresponds to a second image capturing module of the image capturing module and further includes a second auxiliary symbol, wherein the second auxiliary symbol is disposed on the light a second auxiliary line is defined on the cover body and adjacent to the second main mark, and a second auxiliary line is defined between the second auxiliary mark and the second main mark, and the second auxiliary line forms a second angle with the second side. The tolerance of the length of the second auxiliary line is less than the length precision value, and the tolerance of the second angle is smaller than the angle precision value.

According to one embodiment of the present invention, the second main symbol and the second auxiliary symbol are respectively two circular symbols, the second main symbol has a second main center and a second main diameter, and the second auxiliary mark Having a second auxiliary center defined by the second major center and the second auxiliary center, the tolerance of the length of the second major diameter and the second auxiliary diameter The tolerance of the length is less than the length accuracy value.

According to one embodiment of the present invention, the second major symbol is a circular symbol, the second auxiliary symbol is a square symbol, and the second major symbol has a second major center and a second major diameter. The second auxiliary mark has a second auxiliary center defined by the second main center and the second auxiliary center, and the second auxiliary center is defined by the second main center and the second auxiliary center. The tolerance of the length of the two auxiliary side lengths is less than the length precision value.

According to one embodiment of the present invention, the third alignment mark group corresponds to one of the third image capturing modules of the image capturing module and further includes a third auxiliary symbol, and the second auxiliary symbol is set to A third auxiliary line is defined on the reticle body and adjacent to the third main mark, and a third auxiliary line is defined between the third auxiliary mark and the third main mark, and the third auxiliary line forms a third angle with the second side. The tolerance of the length of the third auxiliary line is less than the length accuracy value, and the tolerance of the third angle is less than the angular precision value.

According to one embodiment of the present invention, the third main symbol and the third auxiliary symbol are respectively two circular marks, the third main mark has a third main center and a third main diameter, and the third auxiliary mark Having a third auxiliary center defined by the third main center and the third auxiliary center, the third main center and the third auxiliary center are defined by a tolerance of a length of the third main diameter and the third auxiliary diameter The tolerance of the length is less than the length accuracy value.

According to one embodiment of the present invention, the third main symbol is a circular mark, the third auxiliary mark is a square mark, the third main mark has a third main center and a third main diameter, the first The third auxiliary mark has a third auxiliary center defined by the third main center and the third auxiliary center, and a third auxiliary line defined by the third main center and the third auxiliary diameter The tolerance of the length of the three auxiliary side lengths is less than the length precision value.

According to one embodiment of the present invention, the fourth alignment mark group corresponds to a fourth image capturing module of the image capturing module and further includes a fourth auxiliary symbol, wherein the fourth auxiliary symbol is disposed on the light. a fourth auxiliary line is defined on the cover body and adjacent to the fourth main mark, and a fourth auxiliary line is defined between the fourth auxiliary mark and the fourth main mark, and the fourth auxiliary line forms a fourth angle with the fourth side. The tolerance of the length of the four auxiliary lines is less than the length precision value, and the tolerance of the fourth angle is smaller than the angle precision value.

According to one embodiment of the present invention, the fourth main symbol and the fourth auxiliary symbol are respectively two circular symbols, and the fourth main symbol has a fourth main center and a fourth main diameter. The fourth auxiliary mark has a fourth auxiliary center defined by the fourth main center and the fourth auxiliary center, and a fourth auxiliary center defined by a length of the fourth main diameter and the fourth auxiliary diameter The tolerance of the length of the fourth auxiliary diameter is less than the length accuracy value.

According to one embodiment of the present invention, the fourth major symbol is a circular symbol, the fourth auxiliary symbol is a square symbol, the fourth major symbol has a fourth major center and a fourth major diameter, the first The fourth auxiliary mark has a fourth auxiliary center defined by the fourth main center and the fourth auxiliary center, and a fourth auxiliary center defined by the fourth main center and the fourth auxiliary diameter The tolerance of the length of the four auxiliary side lengths is less than the length precision value.

According to one embodiment of the present invention, the first major token, the second major token, the third major token, the fourth major token, the first auxiliary token, the second auxiliary token, the third auxiliary token and The fourth auxiliary mark is formed on the reticle body by etching.

According to an embodiment of the invention, the first angle, the second angle, the third angle and the fourth angle are both substantially 90 degrees.

In summary, the reticle structure of the present invention determines the first image capturing device and the second image by using the first auxiliary symbol, the second auxiliary symbol, the third auxiliary symbol, and the fourth auxiliary symbol. Positioning and angle of the device, the third image capturing device and the fourth image capturing device relative to the reticle structure to quickly and accurately correct the first image capturing device and the second image capturing device The device, the third image capturing device, and the fourth image capturing device further enhance the use of the first image capturing device, the second image capturing device, the third image capturing device, and the fourth image file Take the device to align the accuracy of the reticle structure with the substrate. The foregoing and other technical contents, features and work related to the present invention The effects will be apparent from the following detailed description of embodiments with reference to the drawings.

1‧‧‧ machine

11‧‧‧Shell

12‧‧‧ chamber

13‧‧‧Image capture module

14‧‧‧Control Module

2, 2'‧‧‧ reticle structure

20‧‧‧mask body

200‧‧‧ openings

21‧‧‧First Registration Mark

211‧‧‧ first major mark

212, 212'‧‧‧ first auxiliary mark

22‧‧‧Second Match Mark Group

221‧‧‧ second major mark

222, 222’ ‧ ‧ second auxiliary mark

23‧‧‧ third alignment mark group

231‧‧‧ Third major mark

232, 232’‧‧‧ third auxiliary mark

24‧‧‧ fourth alignment mark group

241‧‧‧ fourth major mark

242, 242’ ‧ ‧ fourth auxiliary mark

3‧‧‧Substrate

4‧‧‧Lighting molecules

L1‧‧‧ first side

L2‧‧‧ second side

L3‧‧‧ third side

L4‧‧‧ fourth side

M1‧‧‧first auxiliary line

M2‧‧‧second auxiliary line

M3‧‧‧ third auxiliary line

M4‧‧‧ fourth auxiliary line

OM1‧‧‧ first major center

OM2‧‧‧ second major center

OM3‧‧‧ third major center

OM4‧‧‧ fourth major center

DM1‧‧‧first main diameter

DM2‧‧‧second main diameter

DM3‧‧‧ third major diameter

DM4‧‧‧ fourth main diameter

OA1‧‧‧First Auxiliary Center

OA2‧‧‧Second auxiliary center

OA3‧‧‧ third auxiliary center

OA4‧‧‧fourth auxiliary center

OA1’‧‧‧First Auxiliary Center

OA2’‧‧‧Second Auxiliary Center

OA3’‧‧‧ Third Auxiliary Center

OA4’‧‧‧4th Auxiliary Center

DA1‧‧‧First Auxiliary Diameter

DA2‧‧‧second auxiliary diameter

DA3‧‧‧ third auxiliary diameter

DA4‧‧‧4th auxiliary diameter

DA1’‧‧‧First auxiliary side length

DA2’‧‧‧Second auxiliary side length

DA3’‧‧‧ third auxiliary side length

DA4’‧‧‧fourth auxiliary side length

Θ1‧‧‧ first angle

Θ2‧‧‧second angle

Θ3‧‧‧ third angle

Θ4‧‧‧fourth angle

(M1x, M1y), (M2x, M2y), (M3x, M3y), (M4x, M4y), (A1x, A1y), (A2x, A2y), (A3x, A3y), (A4x, A4y) ‧‧ coordinate

Figure 1 is a schematic view of a machine table according to a first embodiment of the present invention.

Fig. 2 is a schematic view showing the structure of a photomask according to a first embodiment of the present invention.

FIG. 3 is a schematic diagram of the machine for correcting the image capturing module according to the first embodiment of the present invention.

FIG. 4 is a schematic diagram of an image captured by a first image capturing device according to a first embodiment of the present invention.

FIG. 5 is a schematic diagram of an image captured by a second image capturing device according to the first embodiment of the present invention.

FIG. 6 is a schematic diagram of an image captured by a third image capturing device according to the first embodiment of the present invention.

FIG. 7 is a schematic diagram of an image captured by a fourth image capturing device according to the first embodiment of the present invention.

Figure 8 is a schematic view showing the structure of a photomask according to a second embodiment of the present invention.

The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation. Please refer to FIG. 1. FIG. 1 is a schematic view of a machine 1 according to a first embodiment of the present invention. The machine 1 uses a reticle structure 2 to evaporate a luminescent molecule 4 on a substrate 3. The machine 1 includes a housing 11, a chamber 12, an image capturing module 13 and a control module 14. The chamber 12 is formed in the housing 11 for receiving the reticle structure 2 and the substrate 3. The image capturing module 13 includes a first image capturing device 131, a second image capturing device 132, and a third The image capturing device 133 and a fourth image capturing device 134. The first image capturing device 131, the second image capturing device 132, the third image capturing device 133, and the fourth image capturing device 134 are respectively mounted on the housing 11 for performing the mask structure 2 and the substrate 3. The control module 14 is coupled to the first image capturing device 131, the second image capturing device 132, and the third image capturing device. The first image capturing device 131, the second image capturing device 132, the third image capturing device 133, and the fourth image capturing device 134 are corrected. In this embodiment, the machine 1 is used for vapor deposition of an Organic Light-Emitting Diode (OLED), and the first image capturing device 131, the second image capturing device 132, and the third image are configured. The taking device 133 and the fourth image capturing device 134 are respectively disposed at four corners of the casing 11, and the present invention is not limited thereto.

Please refer to FIG. 2, which is a schematic view of the reticle structure 2 of the first embodiment of the present invention. The reticle structure 2 includes a reticle body 20, a first alignment mark group 21, a second alignment mark group 22, a third alignment mark group 23, and a fourth alignment mark group 24, and the reticle body At least one opening 200 is formed on the second surface, so that the illuminating molecules 4 are attached to the substrate 3 through the opening 200. The first alignment mark group 21 includes a first main mark 211 and a first auxiliary mark 212, and the first main mark The second auxiliary mark 212 is disposed on the reticle body 20 and adjacent to the first main mark 211 . The second align mark set 22 includes a second main mark 221 and a second auxiliary mark 222 . The second main symbol 221 is disposed on the reticle body 20, the second auxiliary mark 222 is disposed on the reticle body 20 and adjacent to the second main mark 221, and the third align mark group 23 includes a third main mark 231 and a The third auxiliary mark 232 is disposed on the reticle body 20, the third auxiliary mark 232 is disposed on the reticle body 20 adjacent to the third main mark 231, and the fourth align mark set 24 includes a fourth Main symbol 241 and a fourth auxiliary symbol 242, Four primary marker 241 disposed on the mask body 20, the fourth auxiliary marker 242 is provided on the mask body 20 and adjacent to the fourth primary token 241. In this embodiment, the first major symbol 211, the second major symbol 221, the third major symbol 231, the fourth major symbol 241, the first auxiliary symbol 212, the second auxiliary symbol 222, the third auxiliary symbol 232, and the fourth The auxiliary marks 242 are respectively formed on the mask body 20 by etching.

A first side L1 is defined between the first main symbol 211 and the second main symbol 221, and the second main A second side L2 is defined between the mark 221 and the third main mark 231, and a third side L3 is defined between the third main mark 231 and the fourth main mark 241, and the fourth main mark 241 and the first main mark 211 are defined. A fourth side line L4 is defined. A first auxiliary line M1 is defined between the first auxiliary mark 212 and the first main mark 211, and a second auxiliary line M2 is defined between the second auxiliary mark 222 and the second main mark 221. A third auxiliary line M3 is defined between the auxiliary mark 232 and the third main mark 231, and a fourth auxiliary line M4 is defined between the fourth auxiliary mark 242 and the fourth main mark 241.

In this embodiment, the first major symbol 211, the second major symbol 221, the third major symbol 231, the fourth major symbol 241, the first auxiliary symbol 212, the second auxiliary symbol 222, the third auxiliary symbol 232, and the fourth auxiliary The symbol 242 is a circular mark. Therefore, the first main mark 211 has a first main center OM1 and a first main diameter DM1, the first auxiliary mark 212 has a first auxiliary center OA1 and a first auxiliary diameter DA1, and the second main mark 221 has a first The second main center OM2 and the second main diameter DM2, the second auxiliary mark 222 has a second auxiliary center OA2 and a second auxiliary diameter DA2, the third main mark 231 has a third main center OM3 and a third main diameter DM3, the third auxiliary mark 232 has a third auxiliary center OA3 and a third auxiliary diameter DA3, the fourth main symbol 241 has a fourth main center OM4 and a fourth main diameter DM4, and the fourth auxiliary mark 242 has a first Four auxiliary center OA4 and a fourth auxiliary diameter DA4. A first auxiliary line M1 is defined between the first main center OM1 and the first auxiliary center OA1, and a first angle θ1 is formed between the first auxiliary line M1 and the fourth side L4. The first angle θ1 is substantially 90 degrees, and the second A second auxiliary line M2 is defined between the main center OM2 and the second auxiliary center OA2, and a second angle θ2 is formed between the second auxiliary line M2 and the second side L2. The second angle θ2 is substantially 90 degrees, and the third main center A third auxiliary line M3 is defined between the OM3 and the third auxiliary center OA3, and a third angle θ3 is formed between the third auxiliary line M3 and the second side edge L2. The third angle θ3 is substantially 90 degrees, and the fourth main center OM4 is A fourth auxiliary line M4 is defined between the fourth auxiliary center OA4, and a fourth angle θ4 is formed between the fourth auxiliary line M4 and the fourth side line L4, and the fourth angle θ4 is substantially 90 degrees. The invention is not limited to this embodiment.

It is worth noting that the first auxiliary line M1, the second auxiliary line M2, the third auxiliary line M3, the fourth auxiliary line M4, the first main diameter DM1, the second main diameter DM2, the third main diameter DM3, and the fourth main The tolerance of the lengths of the diameter DM4, the first auxiliary diameter DA1, the second auxiliary diameter DA2, the third auxiliary diameter DA3, and the fourth auxiliary diameter DA4 is less than a length precision value, and is sandwiched between the first auxiliary line M1 and the fourth side edge L4. The tolerance of the angle is less than an angular precision value, and in this embodiment, the precision of the length required to achieve the vapor deposition process of the organic light-emitting diode (for example, 1 micrometer) is ±0.0005 mm, and The angular accuracy value is ±0.00015 degrees.

Please refer to FIG. 3 , which is a schematic diagram of the machine 100 of the first embodiment of the present invention when the image capturing module 13 is corrected. As shown in FIG. 3, when the image capturing module 13 is to be corrected, the reticle structure 2 is first placed in the chamber 12, and the first aligning mark group 21, the second aligning mark group 22, and the first The third alignment mark group 23 and the fourth alignment mark group 24 respectively correspond to the first image capturing device 131, the second image capturing device 132, the third image capturing device 133, and the fourth image capturing device 134, and then, The control module 14 controls the first image capturing device 131, the second image capturing device 132, the third image capturing device 133, and the fourth image capturing device 134 to respectively capture corresponding images. In this embodiment, the distance between the first main symbol 211 of the first alignment mark group 21 and the first auxiliary symbol 212 (ie, the line length of the first auxiliary line M1) may preferably be located in the first image capturing device. Within a quarter of the field of view of 131, the distance between the second major symbol 221 of the second alignment mark group 22 and the second auxiliary symbol 222 (ie, the line length of the second auxiliary line M2) may preferably be located at The distance between the third main symbol 231 of the third alignment mark group 23 and the third auxiliary mark 232 (ie, the line length of the third auxiliary line M3) may be within one quarter of the field of view of the second image capturing device 132. Preferably, it is located within a quarter of the field of view of the third image capturing device 133, and the distance between the fourth major symbol 241 of the fourth alignment marker group 24 and the fourth auxiliary symbol 242 (ie, the fourth auxiliary line M4) Line length) is preferably located at the fourth The image capturing device 134 is within one quarter of the field of view, and the present invention is not limited thereto.

Please refer to FIG. 4 to FIG. 7 , FIG. 4 is a schematic diagram of an image captured by the first image capturing device 131 according to the first embodiment of the present invention, and FIG. 5 is a second image capturing method according to the first embodiment of the present invention. FIG. 6 is a schematic diagram of an image captured by a third image capturing device 133 according to the first embodiment of the present invention, and FIG. 7 is a fourth image capturing method according to the first embodiment of the present invention. A schematic representation of the image captured by device 134. As shown in FIG. 4 to FIG. 7 , the coordinates of the first main center OM1 of the first main symbol 211 and the first auxiliary center OA1 of the first auxiliary symbol 212 relative to the image captured by the first image capturing device 131 (M1x, M1y) and (A1x, A1y), the second main center OM2 of the second main symbol 221 and the second auxiliary center OA2 of the second auxiliary mark 222 are extracted with respect to the second image capturing device 132. The coordinates of the image are (M2x, M2y) and (A2x, A2y), and the third main center OM3 of the third main symbol 231 and the third auxiliary center OA3 of the third auxiliary symbol 232 are opposite to the third image capturing device 133. The coordinates of the captured image are (M3x, M3y) and (A3x, A3y), and the fourth main center OM4 of the fourth main symbol 241 and the fourth auxiliary center OA4 of the fourth auxiliary symbol 242 are captured relative to the fourth image. The coordinates of the image captured by the device 134 are respectively (M4x, M4y) and (A4x, A4y), and the control module 14 respectively adjusts the first image capturing device 131, the second image capturing device 132, and the third according to the coordinates. Position and angle of the image capturing device 133 and the fourth image capturing device 134 to complete the image capturing device phase Correction for the reticle structure 2.

Referring to Figure 8, Figure 8 is a schematic view of a photomask structure 2' according to a second embodiment of the present invention. Different from the reticle structure 2 of the foregoing embodiment, one of the reticle structure 2', the first auxiliary mark 212', the second auxiliary mark 222', the third auxiliary mark 232' and the fourth auxiliary mark 242' are Square notation, not a circular mark. The first auxiliary mark 212' has a first auxiliary center OA1' and a first auxiliary side length DA1', and the second auxiliary mark 222' has a second auxiliary center OA2' and a second auxiliary side length DA2'. The third auxiliary mark 232' has a third auxiliary center OA3' and a third auxiliary side length DA3'. The fourth auxiliary mark 242' has a fourth auxiliary center OA4' and a fourth auxiliary side length DA4'. A first auxiliary line M1 is defined between the main center OM1 and the first auxiliary center OA1', and a second auxiliary line M2 is defined between the second main center OM2 and the second auxiliary center OA2'. The third main center OM3 and the third auxiliary center OA3' A third auxiliary line M3 is defined, and a fourth auxiliary line M4, a first auxiliary side length DA1', a second auxiliary side length DA2', and a third auxiliary side length DA3 are defined between the fourth main center OM4 and the fourth auxiliary center OA4'. The tolerance of the length of the fourth auxiliary side length DA4' is ±0.0005 mm. The components having the same reference numerals in the embodiment and the foregoing embodiments have the same structures and functions, and are not described herein again.

Compared with the prior art, the reticle structure of the present invention uses the first auxiliary symbol, the second auxiliary symbol, the third auxiliary symbol and the fourth auxiliary symbol to determine the first image capturing device and the second image. The first image capturing device and the second image are quickly and accurately corrected by the capturing device, the third image capturing device, and the position and angle of the fourth image capturing device relative to the reticle structure The first image capturing device, the second image capturing device, the third image capturing device, and the fourth image are further improved by the device, the third image capturing device, and the fourth image capturing device. The pick-up device is used to align the accuracy of the reticle structure with the substrate. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

2‧‧‧Photomask structure

20‧‧‧mask body

200‧‧‧ openings

21‧‧‧First Registration Mark

211‧‧‧ first major mark

212‧‧‧First auxiliary mark

22‧‧‧Second Match Mark Group

221‧‧‧ second major mark

222‧‧‧second auxiliary mark

23‧‧‧ third alignment mark group

231‧‧‧ Third major mark

232‧‧‧ third auxiliary mark

24‧‧‧ fourth alignment mark group

241‧‧‧ fourth major mark

242‧‧‧ Fourth auxiliary mark

OM1‧‧‧ first major center

OM2‧‧‧ second major center

OM3‧‧‧ third major center

OM4‧‧‧ fourth major center

DM1‧‧‧first main diameter

DM2‧‧‧second main diameter

DM3‧‧‧ third major diameter

DM4‧‧‧ fourth main diameter

OA1‧‧‧First Auxiliary Center

OA2‧‧‧Second auxiliary center

OA3‧‧‧ third auxiliary center

OA4‧‧‧fourth auxiliary center

DA1‧‧‧First Auxiliary Diameter

DA2‧‧‧second auxiliary diameter

DA3‧‧‧ third auxiliary diameter

DA4‧‧‧4th auxiliary diameter

θ 1‧‧‧ first angle

θ 2‧‧‧second angle

θ 3‧‧‧ third angle

θ 4‧‧‧fourth angle

Claims (14)

A photomask structure suitable for an organic light emitting diode evaporation process and capable of correcting the positioning accuracy of an image capturing module comprises: a mask body; a first alignment mark group corresponding to the image capturing The first image capturing device of the module includes: a first main symbol disposed on the reticle body; and a first auxiliary symbol disposed on the reticle body adjacent to the first main symbol; The second alignment mark group includes a second main mark, the second main mark is disposed on the mask body; a third alignment mark group includes a third main mark, and the third main mark is disposed on the a fourth alignment mark group, and a fourth main mark, wherein the fourth main mark is disposed on the reticle body; wherein the first main mark and the second main mark define a a first side, a second side is defined between the second major symbol and the third major symbol, and a third side is defined between the third major symbol and the fourth major symbol, the fourth major symbol and the Definition of the first major token a fourth auxiliary line defines a first auxiliary line between the first auxiliary mark and the first main mark, and the first auxiliary line forms a first angle with the fourth side, the length of the first auxiliary line The tolerance is less than a length accuracy value, and the tolerance of the first angle is less than an angular precision value. The reticle structure of claim 1, wherein the first major symbol and the first auxiliary symbol are respectively two circular symbols, the first major symbol having a first major center and a first major diameter, the first An auxiliary mark has a first auxiliary center defined by the first main center and the first auxiliary center, and a first auxiliary line defined by the first auxiliary center The tolerance of the length tolerance and the length of the first auxiliary diameter are both less than the length accuracy value. The reticle structure of claim 1, wherein the first major symbol is a circular symbol, the first auxiliary symbol is a square symbol, the first major symbol has a first major center and a first major diameter The first auxiliary symbol has a first auxiliary center defined by the first main center and the first auxiliary center, and the first auxiliary line is defined by the first main center and the first auxiliary center. The tolerance of the length of the first auxiliary side length is less than the length accuracy value. The reticle structure of claim 1, wherein the second alignment mark group corresponds to a second image capturing module of the image capturing module and further includes a second auxiliary symbol, the second auxiliary mark setting A second auxiliary line is defined between the second auxiliary mark and the second main mark, and a second angle is formed between the second auxiliary line and the second side mark on the reticle body and adjacent to the second main mark The tolerance of the length of the second auxiliary line is less than the length precision value, and the tolerance of the second angle is smaller than the angle precision value. The reticle structure of claim 4, wherein the second major symbol and the second auxiliary symbol are respectively two circular symbols, the second major symbol having a second major center and a second major diameter, the first The second auxiliary mark has a second auxiliary center defined by the second main center and the second auxiliary center, the second main center is defined by the second auxiliary center, and the second main diameter has a tolerance of the length and the second The tolerance of the length of the auxiliary diameter is less than the length accuracy value. The reticle structure of claim 4, wherein the second major symbol is a circular symbol, the second auxiliary symbol is a square symbol, and the second major symbol has a second major center and a second main diameter, the second auxiliary mark has a second auxiliary center and a second auxiliary side length, the second auxiliary line is defined by the second main center and the second auxiliary center, the second main The tolerance of the length of the diameter and the length of the length of the second auxiliary side are both smaller than the length accuracy value. The reticle structure of claim 4, wherein the third alignment mark group corresponds to one of the image capturing modules, the third image capturing module, and further includes a third auxiliary mark, the third auxiliary mark setting A third auxiliary line is defined between the third auxiliary mark and the third main mark, and a third angle is formed between the third auxiliary line and the second side mark. The tolerance of the length of the third auxiliary line is less than the length precision value, and the tolerance of the third angle is smaller than the angle precision value. The reticle structure of claim 7, wherein the third major symbol and the third auxiliary symbol are respectively two circular symbols, the third major symbol having a third major center and a third major diameter, the first The third auxiliary mark has a third auxiliary center defined by the third main center and the third auxiliary center, and the third auxiliary line has a tolerance of a length of the third main diameter and the third The tolerance of the length of the auxiliary diameter is less than the length accuracy value. The reticle structure of claim 7, wherein the third major symbol is a circular symbol, the third auxiliary symbol is a square symbol, the third major symbol has a third major center and a third major diameter The third auxiliary mark has a third auxiliary center defined by the third main center and the third auxiliary center, and a tolerance of the length of the third main diameter The tolerance of the length of the third auxiliary side length is less than the length accuracy value. The reticle structure of claim 7, wherein the fourth alignment mark group corresponds to a fourth image capturing module of the image capturing module and further includes a fourth auxiliary symbol, the fourth auxiliary symbol setting A fourth auxiliary line is defined between the fourth auxiliary mark and the fourth main mark, and a fourth angle is formed between the fourth auxiliary line and the fourth side mark. The tolerance of the length of the fourth auxiliary line is less than the length precision value, and the tolerance of the fourth angle is smaller than the angle precision value. The reticle structure of claim 10, wherein the fourth major symbol and the fourth auxiliary symbol are respectively two circular symbols, the fourth major symbol having a fourth major center and a fourth major diameter, the first The fourth auxiliary mark has a fourth auxiliary center defined by the fourth main center and the fourth auxiliary center, and the fourth auxiliary center defines a length tolerance of the fourth main diameter and the fourth auxiliary line The tolerance of the length of the auxiliary diameter is less than the length accuracy value. The reticle structure of claim 10, wherein the fourth major symbol is a circular symbol, the fourth auxiliary symbol is a square symbol, the fourth major symbol has a fourth major center and a fourth major diameter The fourth auxiliary mark has a fourth auxiliary center defined by the fourth main center and the fourth auxiliary center, and a tolerance of the length of the fourth main diameter The tolerance of the length of the fourth auxiliary side length is less than the length precision value. The reticle structure of claim 10, wherein the first major token, the second major token, the third major token, the fourth major token, the first auxiliary token, the second auxiliary token, the third The auxiliary mark and the fourth auxiliary mark are respectively formed on the mask body by etching on. The reticle structure of claim 10, wherein the first angle, the second angle, the third angle, and the fourth angle are each substantially 90 degrees.