TWI603774B - Air filtration set and clean room using the same - Google Patents

Description

Air filter set and clean room system using this air filter set

This invention relates to an air filter set, and more particularly to an air filter set for filtering organic volatiles in a gas.

In the semiconductor, display panel or solar photovoltaic process, as the size of the semiconductor components in the process is shrinking, the tolerance of the micro-contamination of the clean room in which these processes are performed must also be reduced.

For the air circulation mechanism in the clean room, for example, because some processes use or produce harmful gases containing specific organic volatiles (such as fluorocarbons, etc.), if effective air purification means are not provided, these gases Suspended particulates are more or less likely to return to the clean room due to internal circulation, which in turn affects the yield of the process, or even these gases can be emitted into the ambient air, causing harm to the human body and the environment.

It can be seen that how to reduce the impact of semiconductor components in a clean room with specific gas pollution has become an important issue in pollution prevention and control technology, and has become an urgent target for improvement in related fields.

In view of the above, it is an object of the present invention to provide an air filter set for solving the inconveniences and drawbacks mentioned in the prior art.

In order to achieve the above object, according to an embodiment of the present invention, the air filter set is adapted to filter out organic volatiles in the gas, and the air filter set comprises a frame and at least one screen. The filter mesh is fixed on the frame, and the filter mesh comprises a first fiber cloth, a second fiber cloth and an activated carbon fiber cloth. The activated carbon fiber cloth is sandwiched between the first fiber cloth and the second fiber cloth. The activated carbon fiber cloth is interwoven by a plurality of activated carbon fiber bundles, each of which contains a plurality of micropores, and the micropores have a diameter ranging from 0.2 nm to 20 nm.

In one or more embodiments of the invention, the organic volatiles are fluorocarbons (CxF), isopropanol, acetone, carbon disulfide, ethyl acetate or toluene.

In one or more embodiments of the invention, the apertures of the microholes are substantially the same.

In one or more embodiments of the invention, the micropores have a mesh size of 300 mesh.

In one or more embodiments of the invention, the specific surface area of the screen ranges from 1000 square meters per gram (m ² /g) to 2000 square meters per gram (m ² /g).

In one or more embodiments of the invention, the thickness of the screen ranges from 1.98 millimeters (mm) to 2.02 millimeters (mm).

In one or more embodiments of the invention, the total pore volume of the micropores is 1.0 cubic centimeters per gram cubic centimeters per gram (cm ³ /g).

In one or more embodiments of the invention, the weight percent concentration (w/w%) of the benzene absorption of the screen is 26%.

In one or more embodiments of the present invention, the frame body has an opening, and the filter screen has a bag shape and has an air inlet slot, and the air inlet slot opens the opening.

In one or more embodiments of the present invention, the frame body has an opening, and the filter mesh has a V-shaped cross section, and has an air inlet slot, and the air inlet slot opens the opening. In one option, a windshield colloid is provided at one end of the V-shaped filter connecting frame and at one end away from the frame. In another option, the V-shaped screen does not have any windshield colloid.

In one or more embodiments of the present invention, the air filter set further comprises at least one filter cartridge. One end of the filter cartridge is sleeved on the frame. The filter cartridge includes an air inlet, an inner surface, an outer surface, and a compartment. The inner surface surrounds the air duct. The outer surface surrounds the wind tunnel and the inner surface. The compartment is interposed between the outer surface and the inner surface and surrounds the wind tunnel and the inner surface. The screen is located on the inner surface, the outer surface or the compartment.

In one or more embodiments of the invention, the air filter set further comprises a case. The cabinet cover is on the frame. The frame body has an opening, and the filter screen is folded into a zigzag shape and located in the box body. The filter screen folded into a zigzag shape forms a plurality of air inlet slots juxtaposed with each other, and the air inlet slot is connected to the opening.

In one or more embodiments of the invention, the air filter set further comprises a glue layer. The glue layer is located on the frame body for bonding the frame body to an air supply opening. One option is that the adhesive layer is a hot melt adhesive or an epoxy adhesive.

In one or more embodiments of the present invention, the air filter set further includes a mechanical connection structure. The mechanical connection structure is located on the frame body for mechanically connecting the frame body to a air supply opening.

In one or more embodiments of the invention, the mechanical attachment structure is a stud, rivet, card insert or clamp.

In accordance with an embodiment of the present invention, such a clean room system includes a chamber and the air filter set described above. The chamber includes an air inlet and an interior space. The internal space is connected to the air inlet. The frame of the above air filter group is mounted to the air inlet, the inner space or the inner space.

In one or more embodiments of the invention, the clean room system further includes an air treatment unit. The air handling unit is located outside the internal space, and the air inlet is interposed between the internal space and the air processing unit, and the air inlet and the internal space are connected. The frame of the air filter set is placed at one of the inlets of the air treatment unit.

In one or more embodiments of the present invention, the frame of the air filter set covers the air inlet to filter out organic volatiles of the gas entering the air inlet.

In one or more embodiments of the present invention, the internal space is divided into a return air zone, a work zone, and a collection zone. The working area is between the return air zone and the collecting zone, and is connected to the return air zone and the collecting zone, and the return air zone is connected to the air inlet and the working zone.

In one or more embodiments of the present invention, the clean room system further includes at least one fan screen unit. The fan filter unit is located in the return air zone or the working area for driving the gas toward the collecting area, wherein the frame of the air filter group is covered on the fan filter unit to filter out the gas entering the fan filter unit. Organic volatiles.

In one or more embodiments of the invention, the chamber further includes an air return duct. The return air duct is located outside the internal space, and the air inlet and the collection area are connected.

In one or more embodiments of the invention, the air filter set comprises a layer of glue. The glue layer adheres the frame to the chamber.

In one or more embodiments of the invention, the chamber further includes a first mechanical connection structure. The air filter set further includes a second mechanical connection structure. The second mechanical connection structure is located on the frame and detachably couples the first mechanical connection structure.

In summary, the technical solution of the present invention has obvious advantages and beneficial effects compared with the prior art. With the above technical solution, considerable technological progress can be achieved, and the industry has wide use value, which has at least the following advantages: 1. Provide a longer time for each use, thereby prolonging the time of replacing the filter material; 2. Producing a lower The pressure loss, in turn, saves the cost of the optional wind pressure equipment; 3. facilitates construction and maintenance, thereby reducing installation costs; and 4. can be reused for reuse, thereby saving the cost of the optional air filter unit.

The above description will be described in detail in the following embodiments, and further explanation of the technical solutions of the present invention will be provided.

100, 300~800, 961~963‧‧‧ air filter group

110, 310~610, 710~810‧‧‧ frame

120, 520, 620‧ ‧ filter

121‧‧‧First fiber cloth

122‧‧‧Second fiber cloth

123‧‧‧Active carbon fiber cloth

130‧‧‧Activated carbon fiber bundle

131‧‧‧micropores

131D‧‧‧ caliber

311, 411, 611‧‧‧ ontology

312, 612‧‧ ‧ openings

313‧‧‧ child opening

314‧‧‧Separate column

320‧‧‧ bag body

321, 421, 531, 621‧‧‧ into the wind trough

330, 430‧‧‧ wind-resistant colloid

420‧‧‧V type filter body

530‧‧‧Filter cartridge

532‧‧‧ inner surface

533‧‧‧ outer surface

534‧‧‧ compartment

620‧‧‧ filter

630‧‧‧ cabinet

900‧‧‧Clean room system

910‧‧ ‧ chamber

911‧‧‧ air inlet

920‧‧‧Internal space

921‧‧‧Return area

922‧‧‧Working area

923‧‧‧Collection area

930‧‧‧Back air duct

940‧‧‧Air handling unit

941‧‧‧ entrance

950‧‧‧Fan filter unit

B‧‧ stud

G‧‧‧ glue layer

H‧‧‧ venting holes

FIG. 1A is a schematic view showing an air filter set according to an embodiment of the present invention.

FIG. 1B is a cross-sectional view taken along line AA of FIG. 1A.

Fig. 2A is a partial schematic view showing the activated carbon fiber cloth of Fig. 1B.

FIG. 2B is an enlarged view of a portion M of FIG. 2A.

FIG. 3A is a schematic view showing an air filter set according to another embodiment of the present invention.

Figure 3B is a side elevational view of an air filter set in accordance with one variation of another embodiment of the present invention.

4A is a top view of an air filter set according to another embodiment of the present invention.

4B is a top view of an air filter set according to a variation of another embodiment of the present invention.

FIG. 5A is a schematic view showing an air filter set according to another embodiment of the present invention.

FIG. 5B is a cross-sectional view showing the long axis of the filter cartridge of the air filter set according to another embodiment of the present invention.

FIG. 6 is a schematic view showing an air filter set according to another embodiment of the present invention.

FIG. 7 is a schematic view showing an air filter set according to another embodiment of the present invention.

FIG. 8 is a schematic view showing an air filter set according to another embodiment of the present invention.

Figure 9 is a schematic view of a clean room system in accordance with an embodiment of the present invention.

The embodiments of the present invention are disclosed in the following drawings, and the details of However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

As used herein, "about", "about" or "roughly" is generally the error or range of the index value within 20%, preferably within 10%, and more preferably Within five percent. In the text, unless otherwise stated, the numerical values mentioned are regarded as approximations, that is, they have an error or range as expressed by "about", "about" or "approximately".

In view of the specific organic volatiles in the gas, such as fluorocarbons (CXF, such as carbon fluoride, COF or cyanide), isopropanol (IPA), acetone (Acetone), carbon disulfide (CS2) ), ethyl acetate, total organic carbon (TOC) or toluene (Toluene) can damage the process yield of the semiconductor component, and the air filter set of the present invention can effectively filter out the above various gases. Organic volatiles, which provide longer time-to-use and reduce filter replacement costs before the filter is saturated.

FIG. 1A is a schematic view showing an air filter set 100 according to an embodiment of the present invention. FIG. 1B is a cross-sectional view taken along line AA of FIG. 1A. As shown in FIGS. 1A and 1B, the air filter set 100 includes a frame 110 and at least one screen 120. The filter screen 120 is fixed to the frame 110, and the filter screen 120 includes a first fiber cloth 121, a second fiber cloth 122, and an activated carbon fiber cloth 123. The activated carbon fiber cloth 123 is sandwiched between the first fiber cloth 121 and the second fiber cloth 122. In the present embodiment, the first fiber cloth 121 and the second fiber cloth 122 are, for example, non-woven fabrics for blocking a large volume of dust or dust. The non-woven fabric is interwoven by a plurality of non-woven fiber hairs, and forms a plurality of interlaced pores (not shown).

FIG. 2A is a partial schematic view showing the activated carbon fiber cloth 123 of FIG. 1B. FIG. 2B is an enlarged view of a portion M of FIG. 2A. As shown in FIGS. 2A and 2B, the activated carbon fiber cloth 123 is interwoven by a plurality of activated carbon fiber bundles 130. For example, the cross-sectional area of the activated carbon fiber bundle 130 ranges from about 15 micrometers (μm) to 29 micrometers (μm). ). Each of the activated carbon fiber bundles 130 includes a general hole (not shown) and a plurality of micropores 131 of a specific size. The micropores 131 are much smaller than the fine holes and the general holes. The diameter 131D of the micro holes 131 ranges from 0.2 nm. (nm) to 20 nanometers (nm), the micropores 131 are used to physically adsorb particles of the above various organic volatiles. Since the micropores 131 occupy 60% to 99.9% of the total pore area, the number of the micropores 131 is large.

Thus, when the gas passes through the activated carbon fiber cloth 123 through the first fiber cloth 121, since the diameter 131D of each of the micropores 131 matches the particle size of the above various organic volatiles, and the number of the micropores 131 is large, the gas is large. A portion of the particles of the above specific organic volatiles may be adsorbed (i.e., stuck) in the micropores 131 such that the specific organic volatiles of the gas are filtered by the screen 120, which greatly enhances the activated carbon fiber cloth 123. Adsorption and filtration benefits, thereby extending the time of use of the filter 120, Low filter replacement costs.

In the present embodiment, the diameters 131D of the micropores 131 are substantially the same. For example, the diameter 131D of the micropores 131 is 300 mesh. However, under actual conditions, the calibers 131D of the micropores 131 may also be different, but as long as the caliber 131D of the micropores 131 ranges from 0.2 nm to 20 nm, the organic substances in the filtered gas are still present. The ability of volatiles.

In the present embodiment, the specific surface area (BET) of the screen 120 ranges from 1000 square meters per gram (m ² /g) to 2000 square meters per gram (m ² /g), in more detail. The specific surface area (BET) of the screen 120 can be, for example, 1200 square meters per gram, 1500 square meters per gram, or even 1800 square meters per gram. It is thus stated that the screen 120 of the present invention can have considerable efficacy for filtering out the above specific organic volatiles in the gas.

In addition, since the screen 120 of the present embodiment is relatively light and thin, for example, the thickness of the screen 120 ranges from 1.98 millimeters (mm) to 2.02 millimeters (mm), compared to other thicker conventional screens 120 (for example, 75 bar). , pa), the screen 120 of the present embodiment will have a lower pressure drop, such as 20 bar (pa) or less. Since the filter screen 120 of the present embodiment has low pressure loss performance, the wind pressure output device does not need to be separately purchased, thereby saving the cost of the separately purchased wind pressure equipment and reducing the chance of the wind contributing to the fire.

Moreover, in the present embodiment, since the weight of the screen 120 is not large, for example, the weight of the screen 120 is 105 grams per square meter (g/m ² ) to 115 grams per square meter (g/m ² ). In this way, not only is it convenient for the constructor to install the air filter set 100, but also the probability that the air filter set 100 is dropped due to excessive weight can be reduced.

In the present embodiment, the total pore volume of the micropores 131 is 0.6 to 1.0 cubic centimeters per gram cubic centimeters per gram (cm ³ /g). The micropores 131 have a micro pore volume of 0.45 to 0.75 cubic centimeters per gram of cubic centimeters per gram (cm ³ /g). The weight percentage concentration (w/w%) of the benzene absorption amount of the screen 120 was 26%.

The variations in the form of the various air filter media sets 100 will be described below to further understand the variations in the form of the air filter media set 100. However, the present invention is not limited thereto, and other variations that are not disclosed are not intended to be within the scope of the present invention.

FIG. 3A is a schematic view of an air filter set 300 according to another embodiment of the present invention. In this other embodiment, as shown in Fig. 3A, the air filter set 300 is presented in the form of a bag-shaped filter. The frame 310 has a body 311, an opening 312 and a plurality of partitioning columns 314. The body 311 completely surrounds the opening 312. The partitioning columns 314 are arranged side by side in the opening 312 and are connected to the frame 310 at intervals, so that the dividing columns 314 and the body are separated. 311 defines openings 312 as a plurality of sub-openings 313, respectively. The plurality of the above-mentioned filter screens are respectively formed into a bag body 320 containing the air inlet groove 321 . The bag bodies 320 are connected to one side of the body 311 and the partitioning column 314 in parallel, so that each of the air inlet grooves 321 are aligned one by one. One of the above sub-openings 313 is turned on. Thus, a gas stream (i.e., gas) can be separately introduced from each of the sub-openings 313 into the air inlet 321 of the corresponding bag body 320, so that the screen filters out the specific organic volatiles in the gas.

FIG. 3B is a side elevational view of the air filter set 300 in accordance with one variation of another embodiment of the present invention. As shown in Figure 3A, in order to The gas is passed through the activated carbon fiber cloth 123 of the filter body of the bag body 320 as far as possible, and the bag body 320 is connected to one end of the frame body 310 and one end of the frame body 310 is coated with the wind blocking colloid 330. In this manner, the airflow (i.e., the gas) is blocked by the wind resisting colloid 330, and the bag body 320 can flow out from the opening 312 through the opposite inner side surfaces of the air inlet groove 321 .

However, the present invention is not limited thereto, and the bag body 320 may also eliminate the use of a glue method to establish a wind blocking structure by a conventional mechanical connection method such as a rivet. In addition, the frame 310 is not limited to materials such as metal or other high temperature resistant non-metallic materials; or materials that are not resistant to high temperatures, such as plastics.

FIG. 4A is a schematic view of an air filter set 400 according to another embodiment of the present invention. In this other embodiment, as shown in FIG. 3A, the air filter set 400 is presented in a pleated V-shaped screen. The frame 410 has a body 411 that completely surrounds the opening 412. A plurality of the above-mentioned sieves are respectively formed into a V-shaped filter body 420 containing the air inlet groove 421. In other words, the V-shaped filter body 420 has a substantially V-shaped cross section. These V-shaped filter bodies 420 are juxtaposed to one side of the body 411 such that each of the inlet slots 421 faces and opens the opening 412. Thus, the gas stream (i.e., gas) can enter the inlet 420 of the corresponding V-shaped filter body 420 from the opening 412, so that the screen filters out the specific organic volatiles in the gas.

Figure 4B is a top plan view of an air filter set 400 in accordance with one variation of another embodiment of the present invention. As shown in FIG. 4B, in order to allow the airflow (ie, gas) to pass through the activated carbon fiber cloth of the V-shaped filter body 420 as much as possible, the V-shaped filter body 420 is connected to one end of the frame 410 and away from one end of the frame 410. Colloid 430. So, the airflow (ie gas) is blocked by the windshield The obstruction of the body 430 allows the V-shaped filter body 420 to flow out from the opening 412 through the second inner side of the air inlet 421.

However, the present invention is not limited thereto, and the V-shaped filter body 420 can also eliminate the use of a glue method to establish a wind-resistant structure through a conventional mechanical connection method such as a rivet. In addition, the frame 410 is not limited to materials such as metal or other high temperature resistant non-metallic materials; or materials that are not resistant to high temperatures, such as plastics.

FIG. 5A is a schematic view of an air filter set 500 according to another embodiment of the present invention. FIG. 5B is a longitudinal cross-sectional view of the filter cartridge 530 of the air filter set 500 according to another embodiment of the present invention. The air filter set 500 is presented in the form of a cartridge screen. In this other embodiment, as shown in FIGS. 5A and 5B, the air filter set 500 further includes a plurality of filter cartridges 530. One end of each filter cartridge 530 is sleeved on the frame 510. The filter cartridge 530 includes an air inlet slot 531, an inner surface 532, an outer surface 533, and a compartment 534. The inner surface 532 surrounds the wind tunnel 531. The outer surface 533 surrounds the wind tunnel 531 and the inner surface 532. The compartment 534 is interposed between the outer surface 533 and the inner surface 532 and surrounds the wind tunnel 531 and the inner surface 532. A plurality of the above-mentioned filter screens 520 are respectively attached to the inner surface 532 of the filter cartridges 530 one by one. Thus, gas streams (i.e., gases) can enter the inlet slots 531, respectively, so that the screen 520 filters out the specific organic volatiles in the gas.

However, the present invention is not limited thereto, and the screen may also be attached to the outer surface 533 of the filter cartridge 530 or the inner wall surface of the compartment 534. In addition, the frame is not limited to its materials, such as metal or other high temperature resistant non-metallic materials; or materials that are not resistant to high temperatures, such as plastics.

6 is a view showing an air filter according to another embodiment of the present invention. Schematic diagram of group 600. In this other embodiment, as shown in Fig. 6, the air filter set 600 is presented in the form of a box-shaped filter. The air filter set 600 includes a case 630. The case 630 is covered on the frame 610. The filter screen 620 is folded into a zigzag shape and then placed in the casing 630. A plurality of air inlet slots 621 are formed on the screen 620, and the air inlet slots 621 are connected to the openings 612 of the frame body 610. Thus, airflow (i.e., gas) can enter the air inlet slots 621 from the openings 612 of the housing 610, respectively, so that the screen 620 filters out the specific organic volatiles in the gas.

However, the frame is not limited to its materials, such as metal or other high temperature resistant non-metallic materials; or materials that are not resistant to high temperatures, such as plastics.

FIG. 7 is a schematic view of an air filter set 700 according to another embodiment of the present invention. As shown in Fig. 7, when the air filter group 700 is installed to an air supply port, the frame 710 can be adhered to the air outlet by the glue layer G. For example, the glue layer G is applied to one side of the frame 710. The invention is not limited to the type of adhesive layer, such as a two-part Epoxy glue (or a commonly known AB glue).

However, the present invention is not limited thereto, and FIG. 8 is a schematic view showing an air filter set 800 according to another embodiment of the present invention. When the air filter group 800 is installed to an air supply port, the glue method can also be excluded. As shown in FIG. 8, the frame 810 of the air filter group 800 is combined to a load by a conventional mechanical connection method such as stud B. The air outlet of the object (not shown). Since the frame 710 of the air filter set 800 does not have a glue layer, the glue layer does not contaminate the screen in the air filter set 800 during the heating step of the repeat regeneration process.

However, the invention is not limited thereto, and the mechanical connection structure may also be riveted. Nail, card inserts, clamps or other traditional mechanical connection structures.

Table 1 shows the filter effect of the three groups of air filter groups described in this case for the gas containing ethyl acetate, toluene, isopropanol and carbon disulfide, respectively. Among them, the specific surface area (BET) of the air filter set filter of the first to third groups is 1200, 1500 and 1800 square meters per gram.

** Per 100 grams of activated carbon fiber cloth 123 can adsorb the percentage corresponding to a particular organic volatile.

Thus, as can be seen from Table 1, the filtration effect of ethyl acetate, toluene, isopropanol and carbon disulfide is best when the specific surface area (BET) of the sieve is 1200, 1500 or 1800 m ^ 2 per gram. Almost 50%, the air filter set described in this case can be used as an air filter set to effectively filter out the above specific organic volatiles.

In addition, although the filter screen of the air filter set has reached a saturated state, the air filter set of the present invention can be repeatedly used for regeneration after removing the specific organic volatiles by heating, and can be repeatedly used for reproduction for 4 to 6 times, for example, up to 6-9. Months, in turn, save the cost of the optional air filter unit.

Therefore, it should be understood that if the air filter group is to be repeatedly used for regeneration, the frame of the air filter group may be coupled to the air supply port of the carrier by a mechanical connection structure to prevent the glue layer from contaminating the filter.

Table 2 shows the adsorption data measured after six consecutive adsorptions of carbon disulfide in the air filter set described in the present case.

Table 3 shows the adsorption data measured after the adsorption of isopropyl alcohol in the air filter group of the present case for six consecutive times in the laboratory.

Thus, as shown in Tables 2 and 3, after repeated use of the regeneration for 6 times, the filter of the air filter set of the present embodiment can still adsorb the specific organic volatiles per gram of activated carbon fiber cloth 123 for carbon disulfide and isopropyl alcohol, respectively. At least 20% adsorption capacity.

FIG. 9 is a schematic diagram of a clean room system 900 in accordance with an embodiment of the present invention. When the air filter set described above is applied to a clean room system 900, according to the present embodiment, as shown in FIG. 9, the clean room system 900 forms a closed loop environment by the air flow concept, and is constituted by a chamber 910. The air inlet 911 and an inner space 920 are included. The internal space 920 is connected to the air inlet 911. The frame of the above-described air filter groups 961 to 963 (refer to FIG. 1A) is attached to the air inlet 911, the inner space 920, or the inner space 920.

In the present embodiment, the internal space 920 is divided into one from top to bottom. Wind zone 921, a work area 922 and a collection area 923. The working area 922 is between the return air area 921 and the collecting area 923, and the return air area 921 and the collecting area 923 are connected, and the return air area 921 is connected to the air inlet 911 and the working area 922. The chamber 910 further includes an return air duct 930. The return air duct 930 is located outside the inner space 920, and opens the air inlet 911 and the collecting area 923. The work area 922 is connected to the collection area 923 by a plurality of vent holes H.

The clean room system 900 further includes an air conditioning unit 940 (makeup air handling unit). The air treatment unit 940 is located outside the internal space 920 of the chamber 910, and is connected to the return air area 921 of the internal space 920 through the air inlet 911 to regulate the air sent into the internal space 920 by controlling the temperature and humidity of the air. In other words, the air inlet 911 is interposed between the return air zone 921 of the internal space 920 and the air processing unit 940, and the air inlet 911 and the return air zone 921 of the internal space 920 are connected.

In the present embodiment, one of the air filter sets 961 can be applied to the air treatment unit 940 to filter out organic volatiles of the gas entering the air treatment unit 940. Specifically, the frame of the air filter set 961 (refer to FIG. 1A) is covered by an inlet 941 of the air treatment unit 940.

In the present embodiment, another air filter group 962 can be covered in the air inlet 911 of the chamber 910 for filtering out organic volatiles of the gas entering the air inlet 911. Specifically, the frame of the air filter set 962 (refer to FIG. 1A) is capped on the cover air inlet 911.

In the present embodiment, the clean room system 900 further includes a plurality of Fan Filter Units (FFUs) 950. These fan screen units 950 are located in the return air zone 921 or the work area 922 to drive the gas toward the collection area. 923 is advanced, wherein a plurality of additional air filter sets 963 can be individually covered by the fan filter unit 950 to filter out organic volatiles of the gas entering the fan filter unit 950. Specifically, the frame of the air filter set 963 (refer to FIG. 1A) is overlaid on the fan filter unit 950.

It should be understood that when the frame of the air filter set is covered by the fan filter unit 950, the inlet 941 of the air treatment unit 940 or the air inlet 911, the above-mentioned glue layer or mechanical connection structure may be used to be combined with the fan filter unit. 950, the inlet 941 of the air treatment unit 940 or the air inlet 911.

For example, the chamber 910, the fan screen assembly 950 or the air treatment unit 940 further includes a first mechanical connection structure (not shown). The second mechanical connection structure of the air filter group (refer to FIG. 8) is located on the frame 810 of the air filter set 800, and detachably couples the first mechanical connection structure. As such, when the air filter set 800 is to be removed, the air filter set 800 can be removed from the chamber 910, the fan screen unit 950, or the air handling unit 940.

While the invention has been described above in terms of its embodiments, it is not intended to limit the invention, and various modifications and changes can be made without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧Air filter group

110‧‧‧ frame

120‧‧‧Filter

121‧‧‧First fiber cloth

122‧‧‧Second fiber cloth

123‧‧‧Active carbon fiber cloth

Claims (31)

An air filter set suitable for filtering organic volatiles in a gas, the air filter set comprising: a frame; and at least one filter fixed to the frame, the filter comprising: a first fiber cloth; a second fiber cloth; and an activated carbon fiber cloth sandwiched between the first fiber cloth and the second fiber cloth, the activated carbon fiber cloth is interwoven by a plurality of activated carbon fiber bundles, each of the activated carbon fibers The cross-sectional area of the beam ranges from 15 micrometers (μm) to 29 micrometers (μm), and each of the activated carbon fiber bundles comprises a plurality of general pores and a plurality of micro-holes, each of the micro-holes being smaller than each of the plurality of micro-holes The apertures of the micropores are substantially the same, and the number of the micropores is greater than the number of the general pores, and the micropores account for 60% to 99.9% of the total pore area of each of the activated carbon fiber bundles, and the diameter ranges of the micropores From 0.2 nm to 20 nm, the total pore volume of the micropores is 0.6 to 1.0 cubic centimeters per gram, wherein the concentration of the benzene absorption of the sieve is 26%, and the specific surface area of the sieve ranges from 1000 square meters From gram to 2,000 square meters per gram, the filter has a pressure loss of no more than 20 bar (pa). The air filter set according to claim 1, wherein the micropores have a mesh size of 300 mesh. The air filter set of claim 1, wherein the filter has a thickness ranging from 1.98 mm to 2.02 mm. The air filter set according to claim 1, wherein the frame has an opening; the screen has a bag shape and has an air inlet groove, and the air inlet groove opens the opening. The air filter set according to claim 1, wherein the frame has an opening, the screen has a V-shaped cross section, and has an air inlet groove, and the air inlet slot opens the opening. The air filter set according to claim 5, wherein the filter is connected to one end of the frame and one end away from the frame is provided with a wind-proof colloid. The air filter set of claim 5, wherein the screen does not have any windshield colloid. The air filter set according to claim 1, further comprising: at least one filter cartridge, one end of the filter cartridge is sleeved on the frame, the filter cartridge comprises: an air inlet trough; an inner surface surrounding the air inlet a groove surrounding an air inlet and the inner surface; and a compartment interposed between the outer surface and the inner surface and surrounding the air inlet and the inner surface, wherein the screen is located Inner surface With one of the compartments on it. The air filter set according to claim 1, further comprising: a box covering the frame, wherein the frame has an opening, the screen is folded into a zigzag shape, and is located in the box, wherein the box is folded in half The zigzag-shaped screen forms a plurality of air inlet slots juxtaposed to each other, and the air inlet slots open the openings. The air filter set according to claim 1, further comprising: a glue layer disposed on the frame for bonding the frame to a air supply opening. The air filter set of claim 10, wherein the glue layer is a hot melt adhesive or an epoxy adhesive. The air filter set according to claim 1, further comprising: a mechanical connection structure on the frame for mechanically connecting the frame to an air supply opening, wherein the frame has no glue layer. The air filter set of claim 12, wherein the mechanical connection structure is a stud, a rivet, a card insert or a clamp. The air filter set according to claim 1, wherein the organic volatiles are selected from the group consisting of fluorocarbons, isopropanol, acetone, carbon disulfide, ethyl acetate and toluene. A clean room system comprising: a chamber comprising an air inlet and an inner space, the inner space connecting the air inlet; and at least one air filter group comprising: a frame mounted to the air inlet, And the inside of the inner space; and at least one filter fixed to the frame, comprising: a first fiber cloth; a second fiber cloth; and an activated carbon fiber cloth, sandwiched between the first Between the fiber cloth and the second fiber cloth, the activated carbon fiber cloth is interwoven by a plurality of activated carbon fiber bundles, and each of the activated carbon fiber bundles has a cross-sectional area ranging from 15 micrometers (μm) to 29 micrometers (μm). Each of the activated carbon fiber bundles comprises a plurality of general pores and a plurality of micropores, the micropores having substantially the same diameter, each of the micropores being smaller than each of the general pores, the number of the micropores being larger than the plurality of micropores Generally, the number of the pores accounts for 60% to 99.9% of the total pore area of each of the activated carbon fiber bundles, and the pores range from 0.2 nm to 20 nm, and the total pore volume of the micropores is 0.6. ~1.0 Gram per square centimeter, for filtering gas of volatile organic compounds, the percentage by weight of benzene wherein the concentration of the absorption filter is 26%, a specific surface area in the range from the sieve to 1000 square meters per gram At 2000 square meters per gram, the filter has a pressure loss of no more than 20 bar (pa). The clean room system of claim 15, further comprising: an air handling unit located outside the inner space, the air inlet being interposed between the inner space and the air processing unit, and the air inlet is connected to the air inlet An interior space, wherein the frame of the air filter set covers an inlet of the air treatment unit. The clean room system of claim 15, wherein the frame of the air filter set covers the air inlet for filtering the organic volatiles of the gas entering the air inlet. The clean room system of claim 15, wherein the internal space is divided into a return air zone, a work zone and a collection zone, the work zone is between the return air zone and the collection zone, and is connected The return air zone and the collection zone, and the return air zone connects the air inlet and the working zone. The clean room system of claim 18, further comprising: at least one fan filter unit located in the return air zone or the work area for driving the gas toward the collection area, wherein the air filter group The frame is covered on the fan screen unit for filtering the organic volatiles of the gas entering the fan screen unit. The clean room system of claim 19, wherein the chamber further comprises an air return duct, the return air duct being located outside the inner space, the air inlet and the collection area being connected. The clean room system of claim 15, wherein the air filter set comprises: a glue layer to adhere the frame to the chamber. The clean room system of claim 15, wherein the chamber further comprises a first mechanical connection structure, the air filter material set further comprising a second mechanical connection structure, the second mechanical connection structure is located on the frame body, The first mechanical connection structure is detachably coupled. The clean room system of claim 15, wherein the micropores have a mesh size of 300 mesh. The clean room system of claim 15 wherein the screen has a thickness ranging from 1.98 mm to 2.02 mm. The clean room system of claim 15, wherein the frame has an opening, the filter screen is in the shape of a bag, and has an air inlet groove, and the air inlet slot opens the opening. The clean room system of claim 15 wherein the frame has a The opening has a V-shaped cross section and has an air inlet groove, and the air inlet slot opens the opening. The clean room system of claim 26, wherein the filter is connected to one end of the frame and one end of the frame is provided with a wind blocking colloid. The clean room system of claim 26, wherein the screen does not have any windshield colloid. The clean room system of claim 15, wherein the air filter set further comprises at least one filter cartridge, one end of the filter cartridge is sleeved on the frame, the filter cartridge comprises: an air inlet groove; an inner surface Surrounding the air inlet trough; an outer surface surrounding the air inlet trough and the inner surface; and a compartment interposed between the outer surface and the inner surface and surrounding the air inlet trough and the inner surface, wherein The screen is located on the inner surface, the outer surface or the compartment. The clean room system of claim 15, wherein the air filter set further comprises: a box covering the frame, wherein the frame has an opening, the screen is folded into a zigzag shape, and is located In the box body, wherein the filter mesh folded into a zigzag shape forms a plurality of mutual The air inlet slots are juxtaposed, and the air inlet slots open the opening. The clean room system of claim 15 wherein the organic volatiles are selected from the group consisting of fluorocarbons, isopropanol, acetone, carbon disulfide, ethyl acetate and toluene.