TWI597496B - Vertical sensor and manufacturing method thereof - Google Patents

Description

Vertical sensor and method of manufacturing same

The invention relates to a vertical sensor technology, and more particularly to a vertical sensor and a manufacturing method thereof, and a sensing system and a sensing method using the vertical sensor.

Most of the gases do not have a special color. The average person cannot analyze the type of gas and detailed concentration information contained in the olfaction. Therefore, if there is an odorless gas harmful to the human body in the gas, it may cause harm. Therefore, a precise gas sensor is required as a tool for sensing. With the evolution of technology, in addition to the sensitivity and accuracy of the sensor, there is a need for a multi-function sensor capable of simultaneously detecting a plurality of objects to be detected to provide a more convenient operation process and a lower time cost for the user.

At present, most common gas sensors are single-layer devices. When multiple gases are to be sensed, horizontal array elements are used, that is, multiple sensing materials are respectively patterned into different array positions to simultaneously detect multiple kinds of gases. The effect of the analyte, however, requires a more complicated process, which may result in an increase in the cost of preparation.

The invention provides a vertical sensor and a manufacturing method thereof, which can make a gas to be tested react with a sensing layer by using a penetrable electrode group structure, and achieve an accurate sensing purpose by measuring an electrical change generated by the reaction. .

An embodiment of the invention provides a vertical sensor comprising a substrate; a bottom electrode disposed on the substrate; and a penetrable electrode assembly structure. The permeable electrode assembly comprises an insulating layer, a permeable electrode layer and a sensing layer. The insulating layer forms a porous structure and is disposed on the bottom electrode. The permeable electrode layer includes an electrode layer having a hole disposed on the insulating layer. The sensing layer is configured to react with the gas to be tested and includes a sensing material, and is located in the hole of the electrode layer having the hole and connected to the electrode layer having the hole, and extends from the hole of the electrode layer having the hole The porous structure of the insulating layer is connected to the bottom electrode.

Another object of the present invention is to provide a method for manufacturing a vertical sensor, wherein the vertical sensor is configured to sense at least one gas to be tested, and the step includes: providing a substrate to form a bottom on the substrate And forming a penetrable electrode group structure on the bottom electrode, wherein the penetrable electrode group structure comprises an insulating layer, a penetrating electrode layer and a sensing layer; the insulating layer forms a porous structure And being disposed on the bottom electrode; the permeable electrode layer includes an electrode layer having a hole disposed on the insulating layer; the sensing layer is configured to react with the gas to be tested and includes a sensing material, where An electrode layer having a hole in the hole and connecting the electrode layer having the hole and extending from the hole of the electrode layer having the hole into the porous structure of the insulating layer to be connected to the bottom electrode; wherein the penetrating is formed The method of forming an electrode assembly includes: forming an insulating layer on the bottom electrode; forming an electrode layer having a hole on the insulating layer; removing a hole exposed to the electrode layer having the hole Minute An insulating layer is obtained to obtain an insulating layer forming a porous structure; and a sensing material is disposed in the hole of the electrode layer having the hole to form the sensing layer.

The purpose, technical contents, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims.

10‧‧‧Substrate

20‧‧‧ bottom electrode

31, 32, 33, 34, 310, 320, 330‧‧‧ penetrable electrode group structure

100, 200‧‧‧Multilayer vertical sensor

300‧‧‧Voltage supply device

301‧‧‧ seed layer

302‧‧‧ Columnar zinc oxide

303, 402‧‧‧Organic nanoparticles

304‧‧‧colloid precursor

305‧‧‧ Porous structure

306, 405‧‧‧ insulation

403, 406, 410‧‧‧ electrodes

307‧‧‧electrode layer with holes

309, 407‧‧‧Anti-reflective photoresist coating

310‧‧‧Sensing materials

400‧‧‧Electrical inspection device

H1, H2, H3, H4‧‧‧ holes

S1~S4, 401, 408, 409, 501, 601‧‧ ‧ sensing layer

P1~P4, 502, 602‧‧‧ penetrating electrode layer

S11~S15‧‧‧Steps

1 is a cross-sectional view of a multilayer vertical sensor in accordance with an embodiment of the present invention.

2 is a flow chart of manufacturing a multi-layer vertical sensor in accordance with an embodiment of the present invention.

3A-3B are schematic views of forming a sensing layer in accordance with an embodiment of the present invention.

4A through 4C are schematic views of forming a sensing layer in accordance with another embodiment of the present invention.

5A-5E are schematic views of forming a sensing layer according to still another embodiment of the present invention.

6A-6F are schematic views of forming a sensing layer according to still another embodiment of the present invention.

7A through 7I are schematic views of forming a multi-layer vertical sensor in accordance with an embodiment of the present invention.

8 is a schematic diagram of a sensing system in accordance with an embodiment of the present invention.

The invention will be further described in detail by the following preferred embodiments and the accompanying drawings. It should be noted that the experimental data disclosed in the following embodiments are for explaining the technical features of the present invention, and are not intended to limit the manner in which they can be implemented.

It should be understood that when an element or layer is "on" or "an" or "an" It is provided directly to another element or layer, or there may be intermediate elements or layers. In contrast, when an element is referred to as being "directly on" or "directly" or "an" The term "and/or" used throughout this document includes any and all combinations of one or more of the associated listed items.

It should be understood that although the words "first, second, third," etc. may be used herein to describe various elements, components, regions, layers, and/or drawings, however, the elements, components, regions, Layers, and/or drawings should not be limited to these words. The terms are used to distinguish one element, component, region, layer, and/or pattern, and another element, region, layer, and/or pattern. Thus, the first elements, components, regions, layers, and/or drawings discussed below may also be referred to as a second element, component, region, layer, and/or pattern, without departing from the embodiments of the invention. Teaching content.

For the sake of explanation, spatially relative terms such as "bottom", "below", "below", "above", "above", and similar words may be used in this article to illustrate the The relationship of one element or feature to another element or feature other element or feature pattern. It should be understood that in addition to the orientation shown in the figures, such spatially relative terms are also intended to encompass different orientations of the device in use or in operation. For example, elements that are described as "under" or "under" other elements or features may be "above" the other elements or features. Therefore, the exemplary word "below" may cover both the lower and upper directions. In addition to this, the device may have other alignments (rotated 90 degrees or other alignments) and spatially relative descriptive symbols as used herein to explain.

A multi-layer vertical sensor according to an embodiment of the invention comprises a substrate, a bottom electrode and a plurality of penetrable electrode group structures. The bottom electrode is disposed on the substrate; the permeable electrode group structure is sequentially disposed on the bottom electrode, wherein each of the plurality of permeable electrode group structures comprises: a sensing layer and a permeable electrode layer, and the sensing layer is To react with the gas to be tested. The permeable electrode layer includes a plurality of holes for the gas to be tested to penetrate, wherein at least a portion of the permeable electrode layer overlaps the sensing layer and is sensed between the two layers of the permeable electrode layer The layer contains a gas permeable structure. Referring to FIG. 1 , a multi-layer stacked vertical sensor 100 according to an embodiment of the present invention includes a substrate 10 , a bottom electrode 20 , and a plurality of penetrable electrode group structures stacked in sequence. FIG. 1 is a view schematically showing a first penetrable electrode group structure 31, a second penetrable electrode group structure 32, a third penetrable electrode group structure 33, and a fourth penetrable electrode group structure 34. The first sensing layer S1, the first penetrable electrode layer P1, the second sensing layer S2, the second penetrable electrode layer P2, the third sensing layer S3, and the third penetrable electrode layer P3 are respectively included a fourth sensing layer S4 and a fourth penetrable electrode layer P4. However, the number of the penetrable electrode group structures of the present invention is not limited thereto, and may include n penetrable electrode group structures including n sensing layers and n penetrable electrode layers, and n may be Any positive integer.

In an embodiment, the first penetrable electrode group structure 31, the second penetrable electrode group structure 32, the third penetrable electrode group structure 33, or the fourth penetrable electrode may be separately measured by separately The electrical signal between the permeable electrode and the bottom electrode 20 of the group structure 34 senses the object to be tested. In another embodiment of the present invention, the electrical changes between the penetrable electrodes of the different penetrable electrode group structures can be separately measured to obtain the sensing signals of the object to be tested. For example, an electrical change between the first penetrable electrode P1 of the first penetrable electrode group structure 31 and the fourth penetrable electrode P4 of the fourth penetrable electrode group structure 34 can be measured. Accordingly, by stacking a plurality of penetrable electrode group structures including the sensing layer and the electrode layer, electrical changes between different electrodes can be measured according to requirements, so that multiple objects to be tested can be sensed simultaneously and increased. Sensing sensitivity. In one embodiment, the gas permeable structure of the sensing layer comprises or consists of a sensing material; or alternatively, the dielectric layer and the sensing material overlying the dielectric layer. The sensing material includes, but is not limited to, an organic material or an inorganic material which may be electrically changed after contacting the gas, or a composite material mixed by an organic material or an inorganic material, which may be mixed with a plurality of organic materials, and mixed with a plurality of inorganic materials. A composite material blended with an organic material and an inorganic material. For example, the inorganic material may include ruthenium, carbon, zinc oxide (ZnO), tungsten oxide (WO ₃ ), titanium dioxide (TiO ₂ ), indium gallium oxide (IGZO), etc., and may be used in a liquid sol-gel process or a nanometer. Inorganic materials for the particle process. The organic material may comprise a conductive polymer and an organic semiconductor material, or other organic material capable of being transmitted as electrons or holes, for example, polythiophene such as poly(3-hexanethiophene) (P3HT), poly (3-octyl exemplification) (P3OT), polythiophene derivative (PQT-12), etc., fullerene such as fullerene derivative (PCBM), etc., phthalocyanine ring compound such as copper phthalocyanine (CuPC) And other polycyclic aromatic hydrocarbons such as pentacene, TCNQ (Tetracyanoquinodimethane) such as tetracyanotetrafluorobenzoquinone dimethane (F4TCNQ), etc., diamines such as 4,4'-double (N- (1-naphthyl)-N-phenylamino)biphenyl (NPB), etc., anilines such as 1,1-bis[(di-4-tolylamino)phenyl]cyclohexane (TAPC), etc. .

The permeable electrode layer comprises or consists of a conductive material, including but not limited to metals, metal compounds, transparent oxide electrodes, nanowires, carbon nanotubes, graphene and oxides thereof. Or a composite material blended with the aforementioned materials. In an embodiment, the gas permeable structure of the sensing layer may comprise a columnar structure or a porous structure for gas to flow in. The details of the structure and fabrication of the remaining embodiments are set forth below.

Referring to FIG. 2, a method of preparing a multi-layer vertical sensor according to an embodiment of the present invention includes: providing a substrate on which a bottom electrode is disposed (step S11). Then, formed on the bottom electrode The electrode assembly structure is penetrated (step S13), wherein forming the penetrable electrode group structure may include forming a sensing layer and a penetrable electrode layer, and a forming step thereof will be described in detail later.

According to an embodiment of the present invention, the step of forming the sensing layer may include coating a seed layer 301 on the bottom electrode 20, as shown in FIG. 3A, and then immersing it in zinc nitrate and hexamethylenetetramine ( In the HMT) uniformly mixed aqueous solution, the temperature is continuously increased for a period of time, and the nano-sized columnar zinc oxide 302 is grown on the seed layer 301 to form a gas-permeable structure. Alternatively, the gas sensing material may be applied to the columnar zinc oxide 302 by a spin coating method, a thermal evaporation method, a dip coating method or the like to form a gas-permeable sensing layer, as shown in FIG. 3B. Shown.

According to another embodiment of the present invention, referring to FIG. 4A, the step of forming the sensing layer may include applying the organic nanoparticle 303 to the bottom electrode 20 by spin coating to form a multi-spherical stack, stacked organic There is a gap between the nanoparticles. In one embodiment, the organic nanoparticle 303 can be a polystyrene sphere. Next, referring to FIG. 4B, a colloidal precursor 304 is formed on the organic nanoparticle 303, and the colloidal precursor 304 is infiltrated into the gap between the organic nanoparticles 303. Thereafter, the organic nanoparticles 303 are removed to form a porous structure 305. In the present embodiment, the organic nanoparticles 303 are burned by high-temperature heating, as shown in Fig. 4C. Finally, the sensing material is applied to the porous structure 305 by spin coating, dip coating, or the like to form a gas permeable sensing layer.

According to still another embodiment of the present invention, a method of forming a penetrable electrode layer includes: forming a patterned mask structure on the sensing layer to expose a portion of the sensing layer; forming a mask as a mask by patterning the mask structure Patterning the electrode layer on the exposed portion of the sensing layer; and removing the patterned mask structure to form a penetrable electrode layer having a plurality of holes to expose a portion of the sensing layer. The step of forming a patterned mask structure may include: setting a plurality of organic nano particles on the sensing layer, wherein a plurality of organic nano particles have a gap therebetween to expose a portion of the sensing layer. Please refer to Figure 5A~5E, first coating The insulating layer 306 is on the bottom electrode 20; then, the organic nanoparticles 303 are coated on the insulating layer 306, and the electrode 307 is plated by thermal evaporation. Then, after the organic nanoparticle 303 and the electrode formed thereon are peeled off by a tape, a hole H1 may be formed to expose a portion of the insulating layer 306, that is, an electrode 307 having a hole is formed. Next, plasma etching is performed using the electrode 307 having a hole as a mask to cause the insulating layer 306 and the bottom electrode 20 to have a columnar structure. Finally, the sensing material is applied to the surface of the columnar structure by spin coating, dip coating or the like to form a gas permeable sensing layer. The vertical sensor of this embodiment includes the substrate 10, the bottom electrode 20 disposed on the substrate, and the penetrable electrode group structure. The penetrable electrode set structure includes the insulating layer 306, the penetrable electrode layer, and the sensing layer. The insulating layer 306 is formed in a porous structure and is disposed on the bottom electrode 20. The penetrable electrode layer includes an electrode layer 307 disposed on the insulating layer 306 and having a hole H1. The sensing layer includes a sensing material and is located in the hole H1 of the electrode layer 307 having the hole H1 and connects the electrode layer 307 having the hole H1, and extends from the hole H1 of the electrode layer 307 having the hole H1 into the insulation. The porous structure of layer 306 is connected to the bottom electrode 20.

According to still another embodiment of the present invention, a method of forming a permeable electrode layer may include forming a dielectric layer on a bottom electrode or a permeable electrode layer; forming an electrode layer on the dielectric layer; and providing an anti-reflective photoresist coating Laying the layer on the electrode layer; forming a patterned mask structure on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and removing the exposed portion of the electrode layer to form a plurality of holes Through the electrode layer. Please refer to FIG. 6A to FIG. 6F, which are another aspect of forming a transmissive sensing layer. As shown in FIG. 6A, the insulating layer 306 may be applied to the bottom electrode 20, and then the electrode 307 is thermally evaporated on the insulating layer 306, and the anti-reflective photoresist coating layer 309 is applied to the electrode 307. Then, the anti-reflective photoresist coating layer 309 is formed into a hole H2 by a stamping method using a columnar mold (not shown) to expose the electrode 307 as shown in Fig. 6B. Next, the anti-reflective photoresist coating layer 309 having the holes H2 is used as a patterned mask to the lower side. The material is etched to form a columnar structure, wherein the exposed electrode 307 can be etched using wet etching, and then the insulating layer can be etched using a plasma etching method and the residual anti-reflective photoresist coating layer 309 can be removed. A columnar structure as shown in Fig. 6C was obtained. The step of forming the columnar structure is not limited thereto. In another embodiment of the present invention, after sequentially applying the insulating layer 30 and the anti-reflective photoresist coating layer 309, the columnar mold is directly used. The hole is pressed out, and the electrode 307 is vapor-deposited on the hole structure, and then the protruding electrode is peeled off with a tape, so that the mesh electrode can be left at the bottom. Finally, the residual anti-reflective photoresist coating layer 309 and the exposed insulating layer 30 are removed by plasma etching to obtain a columnar structure.

Finally, the sensing material 310 is applied to the surface of the columnar structure by spin coating, dip coating, or the like to form a transmissive sensing layer. Wherein, the sensing material 310 may be formed only by covering the surface of the columnar structure, as shown in FIG. 6D; the sensing material 310 may also be formed by filling only the structural holes, as shown in FIG. 6E; The test material 310 can also be filled and cover the entire surface of the columnar structure, as shown in FIG. 6F; however, the invention is not limited thereto, and the sensing material can be formed on the columnar structure in any form.

Referring back to FIG. 2, the steps of forming a penetrable electrode group structure may be repeated to obtain a multilayer vertical sensor (step S15). The method of forming a permeable electrode layer may include: forming a dielectric layer on the bottom electrode or the permeable electrode layer; forming a patterned electrode layer on the dielectric layer; removing the exposed portion of the dielectric layer to Forming a columnar structure; and forming a sensing material on a surface of the columnar structure. In an embodiment, the method of forming a patterned electrode layer may include: setting a plurality of organic nano particles on the dielectric layer, wherein a plurality of organic nano particles have a gap therebetween to expose a portion of the dielectric layer; A plurality of organic nanoparticles are masked to form a patterned electrode layer. In another embodiment, the method of forming a patterned electrode layer may include: forming an electrode layer on the dielectric layer; and providing an anti-reflective photoresist coating layer on the electrode Forming a patterned mask structure on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and removing the exposed portion of the electrode layer to form a patterned electrode layer.

In accordance with an embodiment of the present invention, and referring to Figures 7A-7I, a method of forming a multi-layer vertical sensor is illustrated. Referring to FIGS. 7A through 7C, a substrate 10 is provided having a bottom electrode 20 disposed thereon, and a first sensing material is coated on the bottom electrode 20 to form a first sensing layer 401. Next, in the same manner as in FIGS. 5B to 5D, the organic nanoparticles granules 402 are applied onto the first sensing layer 401, and the permeable electrode layer 403 is plated by thermal evaporation. Then, after the organic nanoparticle 402 and the electrode formed thereon are peeled off by a tape, the hole H3 may be formed to expose a portion of the first sensing layer 401, that is, a penetrable electrode layer 403 having a hole structure is formed. The penetrable electrode layer 403 may comprise or consist of a conductive material, and the conductive material comprises a metal selected from the group consisting of a metal, a metal compound, a transparent oxide electrode, a nanowire, a carbon nanotube, a graphene, and the like. One of a group of oxides or composite materials blended with the foregoing materials.

Next, in the same manner as the method of FIG. 6A to FIG. 6F, the insulating layer 405 may be first coated on the penetrable electrode layer 403, then the electrode 406 is thermally evaporated on the insulating layer 405, and then the anti-reflective photoresist coating layer is applied. 407 is applied to electrode 406 as shown in Figure 7D. Then, the anti-reflective photoresist coating layer 407 is formed into a hole H4 by a stamping method using a columnar mold (not shown) to expose the electrode 406 as shown in Fig. 7E. Next, the anti-reflective photoresist coating layer 407 having the holes H4 is etched as a mask to form a columnar structure as shown in FIG. 7F. Finally, the second sensing material is applied to the surface of the columnar structure by spin coating, dip coating or the like to form the second sensing layer 408, as shown in FIG. 7G.

The manner of forming the second sensing material may be as shown in FIG. 6D to FIG. 6F, and may be formed to cover only the surface of the columnar structure, or to form a hole filling the structure, or to fill and cover the entire column. Formed by any of the surfaces of the structure. It should be noted that the first sensing material and the second sensing material The materials may be the same or different. When the first sensing material is different from the second sensing material, different objects to be tested may be respectively sensed. However, when the first sensing material is the same as the second sensing material, the material may be increased. The reaction contact area, which in turn amplifies the reaction, increases the sensitivity of the sensor.

In addition, the sensing layer and the penetrable electrode in the penetrable electrode group structure can be disposed in various forms as needed. For example, in the first penetrable electrode group structure 310, the first sensing layer 401 The system is formed to be disposed under the penetrable electrode layer 403; however, in the second penetrable electrode group structure 320, the second sensing layer 408 is formed to be disposed around the electrode layer 406. That is, the present invention does not limit the shape and configuration of the sensing layer and the electrode layer, as long as at least a portion of the transmissive electrode layer and the sensing layer overlap each other such that the sensing layer can flow current between the electrodes. Therefore, the arrangement of the sensing layer and the electrode layer of the present invention can include various different aspects.

In FIG. 7G, only two layers of the penetrable electrode group structure, that is, the first penetrable electrode group structure 310 and the second penetrable electrode group structure 320 are exemplarily illustrated. However, the present invention does not This is a limitation, which may include an n-layer of penetrable electrode group structure. For example, as shown in FIG. 7H, the third sensing material 409 may be evaporated on the second penetrable electrode assembly 320 by thermal evaporation, and may also include columnar etching or the like. The step of removing the second sensing layer 408 on the top surface of the structure. Next, as shown in FIG. 7I, a metal nanowire (for example, a silver nanowire) is formed on the third sensing material 409 by means of trickle plating to form a penetrable electrode 410, thereby forming a third penetrable electrode group structure. 330.

By the above method, the sensing layer and the electrode layer can be repeatedly formed, thereby forming a multi-layer stacked vertical display sensor. It should be noted that the present invention is merely illustrative of the methods of FIGS. 5B-5D and FIGS. 6A-6C, but is not intended to limit the present invention, and may be selected from any of the above embodiments. A method of one or a combination thereof to form a plurality of sensing layers and electrode layers.

According to an embodiment of the present invention, referring to FIG. 8, a sensing system 1000 is provided, which includes a multi-layer vertical sensor 200 prepared as described above, wherein the multi-layer vertical sensor 200 is illustrated for convenience of description. The bottom electrode 20, the first sensing layer 501, the first penetrating electrode layer 502, the second sensing layer 601, and the second penetrable electrode layer 602 are sequentially stacked on the substrate 10, However, the present invention is not limited thereto, and may include n sensing layers and n electrode layers as needed. The sensing system 1000 can further include a voltage supply device 300 and an electrical inspection device 400, wherein the voltage supply device 300 is electrically connected to the bottom electrode 20 of the multi-layer vertical sensor 200, the first penetrable electrode layer 502, And a second penetrable electrode layer 602 to provide a bias voltage to the multi-layer vertical sensor 200, respectively. The electrical inspection device 400 is electrically connected to the multi-layer vertical sensor 200 to determine electrical changes of the sensing layers.

When a plurality of gases simultaneously contact the sensing layers, each of the objects to be tested reacts with the sensing material on the corresponding sensing layer, thereby causing a current change in the sensing layer, and the electrical conductivity of the electrical inspection device 400 is determined. Sexual changes can achieve the purpose of simultaneously sensing a variety of analytes. Wherein, the object to be tested can be sensed by separately measuring electrical signals between the single penetrable electrode group structure and the bottom electrode, or can be penetrated by separately measuring different penetrable electrode group structures A sensing signal of the object to be tested is obtained by electrical changes between the electrodes. In another embodiment of the present invention, when the sensing materials of the sensing layers are the same, the reaction contact area can be increased, thereby achieving the effect of amplifying the reaction to improve the sensitivity.

In summary, the multi-layer vertical sensor of the present invention, a manufacturing method thereof, and a sensing system and a sensing method using the multi-layer vertical sensor utilize a multi-layer transmissive electrode group structure to enable each gas to be tested to be Each sensing layer moves freely and reacts with the sensing layer, and achieves accurate sensing by measuring electrical changes generated by the reaction. In addition, the method of fabricating the structure of the penetrable electrode group is flexible, and the manufacturing methods of the plurality of sensing layers and the penetrable electrode layer can be mixed and used by the user, and the process can be selectively selected. And compared to horizontal array components, when used in a variety of gas sensing, A variety of sensing materials must be graphically mapped to different array locations using more complex processes. The vertical stacking process of the present invention will effectively simplify the manufacturing process and thereby reduce the process cost. In addition, in this case, a complex sensing layer is used. Therefore, after a plurality of types of molecules to be tested enter the sensing layers, the electrical signals can be read according to the sensing layers corresponding to the molecules to be tested, thereby achieving the purpose of simultaneous observation. Furthermore, when a specific molecule to be tested is targeted, the reaction contact area corresponding to the molecule to be tested can be repeatedly stacked to increase the reaction contact area, thereby amplifying the reaction to improve the sensitivity. Moreover, when targeting a specific molecule to be tested, a different material that reacts with the molecule to be tested can be selected as the sensing layer. According to each reaction layer, a database of molecules to be tested is established, and the accuracy of sensing is effectively improved by cross-matching or fingerprint comparison, and the influence of environmental molecules on sensing is excluded.

The embodiments described above are only intended to illustrate the technical idea and the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

10‧‧‧Substrate

20‧‧‧ bottom electrode

303‧‧‧Organic nanoparticles

306‧‧‧Insulation

307‧‧‧electrode layer with holes

H1‧‧‧ hole

Claims (11)

a vertical sensor for sensing at least one gas to be tested, comprising: a substrate; a bottom electrode disposed on the substrate; and a penetrable electrode group structure including an insulating layer to form a a porous structure, disposed on the bottom electrode, a permeable electrode layer, comprising an electrode layer having a hole disposed on the insulating layer, and a sensing layer for reacting with the gas to be tested Having a sensing material and located in the hole of the electrode layer having the hole and connecting the electrode layer having the hole, and extending from the hole of the electrode layer having the hole into the porous structure of the insulating layer, and the bottom electrode connection. The vertical sensor of claim 1, wherein the sensing layer is connected to the top surface of the electrode layer having the hole and extends from the top surface into the hole of the electrode layer having the hole. The vertical sensor of claim 1, wherein the sensing material comprises an organic material or an inorganic material that generates an electrical change after contacting the gas to be tested, or at least one of the organic material or the inorganic material A blend of composite materials. The vertical sensor of claim 3, wherein the inorganic material is selected from the group consisting of ruthenium, carbon, zinc oxide (ZnO), tungsten oxide (WO ₃ ), titanium dioxide (TiO ₂ ), indium gallium oxide (IGZO), or Any combination of the above. The vertical sensor of claim 3, wherein the organic material is selected from the group consisting of a conductive polymer, an organic semiconductor material, an organic material that can be transmitted as an electron or a hole, or any combination thereof. The vertical sensor of claim 3, wherein the organic material is selected from the group consisting of polythiophenes, fullerenes, phthalocyanine ring compounds, polycyclic aromatic hydrocarbons, TCNQ (Tetracyanoquinodimethane), and Amines, anilines, or any combination of the above. The vertical sensor of claim 1, wherein the electrode layer having the holes of the penetrable electrode layer comprises or consists of a conductive material. The vertical sensor of claim 7, wherein the conductive material comprises a metal selected from the group consisting of a metal, a metal compound, a transparent oxide, a nanowire, a carbon nanotube, a graphene and an oxide thereof, or a composite thereof One of the groups formed. A method for manufacturing a vertical sensor, wherein the vertical sensor is configured to sense at least one gas to be tested, the method comprising: providing a substrate, forming a bottom electrode on the substrate; and the bottom electrode Forming a permeable electrode group structure, wherein the permeable electrode group structure comprises: the insulating layer forming a porous structure, and disposed on the bottom electrode, a permeable electrode layer, including a An electrode layer having a hole above the bottom electrode, a sensing layer for reacting with the gas to be tested and containing a sensing material, located in the hole of the electrode layer having the hole and connecting the electrode layer having the hole, and The hole of the electrode layer having the hole extends into the porous structure of the insulating layer and is connected to the bottom electrode, wherein the method for forming the penetrable electrode group structure comprises: Forming an insulating layer on the bottom electrode; forming an electrode layer having a hole on the insulating layer; removing a portion of the insulating layer exposed to the hole of the electrode layer having the hole to obtain a dielectric forming the porous structure And forming a sensing material by disposing a sensing material in the hole of the electrode layer having the hole. The method of manufacturing the vertical sensor of claim 9, wherein the method of forming the electrode layer having the hole comprises: setting a plurality of organic nano particles on the insulating layer, wherein the plurality of organic nano particles have a gap to expose a portion of the insulating layer; and masking the plurality of organic nanoparticles to form an electrode layer on the exposed portion of the insulating layer; removing the plurality of organic nano particles, and insulating the insulating layer The electrode layer having holes is formed on the layer. The method of manufacturing the vertical sensor of claim 9, wherein the method of forming the electrode layer having the hole comprises: forming an electrode layer on the insulating layer; and providing an anti-reflective photoresist coating layer on the electrode layer Forming a patterned mask structure on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and removing the exposed portion of the electrode layer to form the electrode layer having the holes.