TWI574005B - Vertical sensor having multiple layers and manufacturing method thereof, and sensing system and sensing method using the vertical sensor having multiple layers - Google Patents

Description

Multilayer vertical sensor and manufacturing method thereof, and sensing system and sensing method using multi-layer vertical sensor

The present invention relates to a vertical sensor technology, and more particularly to a multi-layer stacked vertical sensor and a method of fabricating the same, and a sensing system and a sensing method using the multi-layer vertical sensor.

Most of the gases do not have a special color. The average person cannot analyze the type of gas and detailed concentration information contained in the olfaction. Therefore, if there is an odorless gas harmful to the human body in the gas, it may cause harm. Therefore, a precise gas sensor is required as a tool for sensing. With the evolution of technology, in addition to the sensitivity and accuracy of the sensor, there is a need for a multi-function sensor capable of simultaneously detecting a plurality of objects to be detected to provide a more convenient operation process and a lower time cost for the user.

At present, most common gas sensors are single-layer devices. When multiple gases are to be sensed, horizontal array elements are used, that is, multiple sensing materials are respectively patterned into different array positions to simultaneously detect multiple kinds of gases. The effect of the analyte, however, requires a more complicated process, which may result in an increase in the cost of preparation.

The invention provides a multi-layer vertical sensor and a manufacturing method thereof, and a sensing system and a sensing method using the multi-layer vertical sensor, and the multi-layer penetrable electrode group structure is used to enable the gas to be tested to be in each sensing The layers move freely and react with the sensing layer and achieve accurate sensing by measuring the electrical changes produced by the reaction.

An embodiment of the present invention provides a multi-layer vertical sensor including a substrate; a bottom electrode disposed on the substrate; and a plurality of penetrable electrode assembly structures disposed on the bottom electrode in sequence, wherein Each of the plurality of penetrable electrode group structures includes: a sensing layer for reacting with the gas to be tested; and a penetrable electrode layer including a plurality of holes for the gas to be tested to penetrate, and at least a portion of which can be worn The through electrode layer and the sensing layer overlap each other. The sensing layer between the two layers of transmissive electrode layers comprises a gas permeable structure. The perforable electrode layer and the bottom electrode of each of the plurality of penetrable electrode group structures respectively constitute a group of electrode groups or any two of the penetrable electrode layers constitute a group of electrode groups. Among them, multiple sets of signals can be obtained simultaneously when sensing.

Another object of the present invention is to provide a method for manufacturing a multi-layer vertical sensor, wherein a multi-layer vertical sensor is used for sensing at least one gas to be tested, and the method includes the steps of: providing a substrate, forming a bottom electrode on the substrate Forming a permeable electrode group structure on the bottom electrode, wherein the permeable electrode group structure comprises: a sensing layer for reacting with the gas to be tested; and a penetrable electrode layer including a plurality of holes Providing a gas to be tested to penetrate, and at least a portion of the permeable electrode layer and the sensing layer overlap each other; and repeating the step of forming a permeable electrode group structure to form a plurality of stacked electrode group structures Wherein the sensing layer between the two layers of transmissive electrode layers comprises a gas permeable structure. The perforable electrode layer and the bottom electrode of each of the plurality of penetrable electrode group structures respectively constitute a group of electrode groups or any two of the penetrable electrode layers constitute a group of electrode groups. Among them, multiple sets of signals can be obtained simultaneously when sensing.

Still another object of the present invention is to provide a sensing method comprising: applying a bias voltage to the plurality of vertical sensors described above to generate between a plurality of electrode layers and a bottom electrode of a plurality of transparent electrode assembly structures Current; contacting the object to be tested with the multi-layer vertical sensor; and detecting electrical changes of the plurality of sensing layers in the plurality of permeable electrode group structures to simultaneously obtain the plurality of sets of signals.

A further object of the present invention is to provide a sensing system comprising: the above-mentioned multi-layer vertical sensor; a voltage supply device electrically connected to a bottom electrode of the multi-layer vertical sensor and a plurality of penetrable a plurality of electrode layers in the electrode assembly structure for providing a bias voltage to the multi-layer vertical sensor; and an electrical inspection device electrically connected to the multi-layer vertical sensor to determine the electrical change to simultaneously obtain Group signal.

The purpose, technical contents, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims.

10‧‧‧Substrate

20‧‧‧ bottom electrode

31, 32, 33, 34, 310, 320, 330‧‧‧ penetrable electrode group structure

100, 200‧‧‧Multilayer vertical sensor

300‧‧‧Voltage supply device

301‧‧‧ seed layer

302‧‧‧ Columnar zinc oxide

303, 402‧‧‧Organic nanoparticles

304‧‧‧colloid precursor

305‧‧‧ Porous structure

306, 405‧‧‧ insulation

307, 403, 406, 410‧‧‧ electrodes

309, 407‧‧‧Anti-reflective photoresist coating

310‧‧‧Sensing materials

400‧‧‧Electrical inspection device

H, H2, H3, H4‧‧‧ holes

S1~S4, 401, 408, 409, 501, 601‧‧ ‧ sensing layer

P1~P4, 502, 602‧‧‧ penetrating electrode layer

S11~S15‧‧‧Steps

1 is a cross-sectional view of a multilayer vertical sensor in accordance with an embodiment of the present invention.

2 is a flow chart of manufacturing a multi-layer vertical sensor in accordance with an embodiment of the present invention.

3A-3B are schematic views of forming a sensing layer in accordance with an embodiment of the present invention.

4A through 4C are schematic views of forming a sensing layer in accordance with another embodiment of the present invention.

5A-5E are schematic views of forming a sensing layer according to still another embodiment of the present invention.

6A-6F are schematic views of forming a sensing layer according to still another embodiment of the present invention.

7A through 7I are schematic views of forming a multi-layer vertical sensor in accordance with an embodiment of the present invention.

8 is a schematic diagram of a sensing system in accordance with an embodiment of the present invention.

The invention will be further described in detail by the following preferred embodiments and the accompanying drawings. It should be noted that the experimental data disclosed in the following embodiments are for explaining the technical features of the present invention, and are not intended to limit the manner in which they can be implemented.

It should be understood that when an element or layer is "on" or "an" or "an" It is provided directly to another element or layer, or there may be intermediate elements or layers. In contrast, when an element is referred to as being "directly on" or "directly" or "an" The term "and/or" used throughout this document includes any and all combinations of one or more of the associated listed items.

It should be understood that although the words "first, second, third," etc. may be used herein to describe various elements, components, regions, layers, and/or drawings, however, the elements, components, regions, Layers, and/or drawings should not be limited to these words. The terms are used to distinguish one element, component, region, layer, and/or pattern, and another element, region, layer, and/or pattern. Thus, the first elements, components, regions, layers, and/or drawings discussed below may also be referred to as a second element, component, region, layer, and/or pattern, without departing from the embodiments of the invention. Teaching content.

For the sake of explanation, spatially relative terms such as "bottom", "below", "below", "above", "above", and similar words may be used in this article to illustrate the The relationship of one element or feature to another element or feature other element or feature pattern. It should be understood that in addition to the orientation shown in the figures, such spatially relative terms are also intended to encompass different orientations of the device in use or in operation. For example, elements that are described as "under" or "under" other elements or features may be "above" the other elements or features. Therefore, the exemplary word "below" may cover both the lower and upper directions. In addition to this, the device may have other alignments (rotated 90 degrees or other alignments) and spatially relative descriptive symbols as used herein to explain.

A multi-layer vertical sensor according to an embodiment of the invention comprises a substrate, a bottom electrode and a plurality of penetrable electrode group structures. The bottom electrode is disposed on the substrate; the permeable electrode group structure is sequentially disposed on the bottom electrode, wherein each of the plurality of permeable electrode group structures comprises: a sensing layer and a permeable electrode layer, and the sensing layer is To react with the gas to be tested. The permeable electrode layer includes a plurality of holes for the gas to be tested to penetrate, wherein at least a portion of the permeable electrode layer overlaps the sensing layer and is sensed between the two layers of the permeable electrode layer The layer contains a gas permeable structure. Referring to FIG. 1 , a multi-layer stacked vertical sensor 100 according to an embodiment of the present invention includes a substrate 10 , a bottom electrode 20 , and a plurality of penetrable electrode group structures stacked in sequence. FIG. 1 is a view schematically showing a first penetrable electrode group structure 31, a second penetrable electrode group structure 32, a third penetrable electrode group structure 33, and a fourth penetrable electrode group structure 34. The first sensing layer S1, the first penetrable electrode layer P1, the second sensing layer S2, the second penetrable electrode layer P2, the third sensing layer S3, and the third penetrable electrode layer P3 are respectively included a fourth sensing layer S4 and a fourth penetrable electrode layer P4. However, the number of the perforable electrode group structures of the present invention is not limited thereto, and may include n A penetrable electrode group structure comprising n sensing layers and n penetrable electrode layers, and n can be any positive integer.

In an embodiment, the first penetrable electrode group structure 31, the second penetrable electrode group structure 32, the third penetrable electrode group structure 33, or the fourth penetrable electrode may be separately measured by separately The electrical signal between the permeable electrode and the bottom electrode 20 of the group structure 34 senses the object to be tested. In another embodiment of the present invention, the electrical changes between the penetrable electrodes of the different penetrable electrode group structures can be separately measured to obtain the sensing signals of the object to be tested. For example, an electrical change between the first penetrable electrode P1 of the first penetrable electrode group structure 31 and the fourth penetrable electrode P4 of the fourth penetrable electrode group structure 34 can be measured. Accordingly, by stacking a plurality of penetrable electrode group structures including the sensing layer and the electrode layer, electrical changes between different electrodes can be measured according to requirements, so that multiple objects to be tested can be sensed simultaneously and increased. Sensing sensitivity. In one embodiment, the gas permeable structure of the sensing layer comprises or consists of a sensing material; or alternatively, the dielectric layer and the sensing material overlying the dielectric layer. The sensing material includes, but is not limited to, an organic material or an inorganic material which may be electrically changed after contacting the gas, or a composite material mixed by an organic material or an inorganic material, which may be mixed with a plurality of organic materials, and mixed with a plurality of inorganic materials. A composite material blended with an organic material and an inorganic material. For example, the inorganic material may include ruthenium, carbon, zinc oxide (ZnO), tungsten oxide (WO ₃ ), titanium dioxide (TiO ₂ ), indium gallium oxide (IGZO), etc., and may be used in a liquid sol-gel process or a nanometer. Inorganic materials for the particle process. The organic material may comprise a conductive polymer and an organic semiconductor material, or other organic material capable of being transmitted as electrons or holes, for example, polythiophene such as poly(3-hexanethiophene) (P3HT), poly (3-octyl exemplification) (P3OT), polythiophene derivative (PQT-12), etc., fullerene such as fullerene derivative (PCBM), etc., phthalocyanine ring compound such as copper phthalocyanine (CuPC) And other polycyclic aromatic hydrocarbons such as pentacene, TCNQ (Tetracyanoquinodimethane) such as tetracyanotetrafluorobenzoquinone dimethane (F4TCNQ), etc., diamines such as 4,4'-double (N- (1-naphthyl)-N-phenylamino)biphenyl (NPB), etc., anilines such as 1,1-bis[(di-4-tolylamino)phenyl]cyclohexane (TAPC), etc. .

The permeable electrode layer comprises or consists of a conductive material, including but not limited to metals, metal compounds, transparent oxide electrodes, nanowires, carbon nanotubes, graphene and oxides thereof. Or a composite material blended with the aforementioned materials. In an embodiment, the gas permeable structure of the sensing layer may comprise a columnar structure or a porous structure for gas to flow in. The details of the structure and fabrication of the remaining embodiments are set forth below.

Referring to FIG. 2, a method of preparing a multi-layer vertical sensor according to an embodiment of the present invention includes: providing a substrate on which a bottom electrode is disposed (step S11). Next, a permeable electrode group structure is formed on the bottom electrode (step S13), wherein forming the permeable electrode group structure may include forming a sensing layer and a permeable electrode layer, and the forming step thereof will be described in detail later description.

According to an embodiment of the present invention, the step of forming the sensing layer may include coating a seed layer 301 on the bottom electrode 20, as shown in FIG. 3A, and then immersing it in zinc nitrate and hexamethylenetetramine ( In the HMT) uniformly mixed aqueous solution, the temperature is continuously increased for a period of time, and the nano-sized columnar zinc oxide 302 is grown on the seed layer 301 to form a gas permeable structure. Alternatively, the gas sensing material may be applied to the columnar zinc oxide 302 by a spin coating method, a thermal evaporation method, a dip coating method or the like to form a gas-permeable sensing layer, as shown in FIG. 3B. Shown.

According to another embodiment of the present invention, referring to FIG. 4A, the step of forming the sensing layer may include applying the organic nanoparticle 303 to the bottom electrode 20 by spin coating to form a multi-spherical stack, stacked organic There is a gap between the nanoparticles. In one embodiment, the organic nanoparticle 303 can be a polystyrene sphere. Next, referring to FIG. 4B, a colloidal precursor 304 is formed on the organic nanoparticle 303, and the colloidal precursor 304 is infiltrated into the gap between the organic nanoparticles 303. Then, remove the organic nanoparticles 303, to form a porous structure 305. In the present embodiment, the organic nanoparticle 303 is burned by high temperature heating, as shown in Fig. 4C. Finally, the sensing material is applied to the porous structure 305 by spin coating, dip coating, or the like to form a gas permeable sensing layer.

According to still another embodiment of the present invention, a method of forming a penetrable electrode layer includes: forming a patterned mask structure on the sensing layer to expose a portion of the sensing layer; forming a mask as a mask by patterning the mask structure Patterning the electrode layer on the exposed portion of the sensing layer; and removing the patterned mask structure to form a penetrable electrode layer having a plurality of holes to expose a portion of the sensing layer. The step of forming a patterned mask structure may include: setting a plurality of organic nano particles on the sensing layer, wherein a plurality of organic nano particles have a gap therebetween to expose a portion of the sensing layer. In an embodiment, the sensing layer can be a dielectric layer. Referring to FIG. 5A to FIG. 5E, the step of forming the sensing layer may include first coating an insulating layer 306 on the bottom electrode 20; then, coating the organic nanoparticles 303 on the insulating layer 306, and plating by thermal evaporation. Upper electrode 307. Then, after the organic nanoparticle 303 and the electrode formed thereon are peeled off by a tape, a hole H1 may be formed to expose a portion of the insulating layer 306, that is, an electrode 307 having a hole is formed. Next, plasma etching is performed using the electrode 307 having a hole as a mask to cause the insulating layer 306 and the bottom electrode 20 to have a columnar structure. Finally, the sensing material is applied to the surface of the columnar structure by spin coating, dip coating or the like to form a gas permeable sensing layer.

According to still another embodiment of the present invention, a method of forming a permeable electrode layer may include forming a dielectric layer on a bottom electrode or a permeable electrode layer; forming an electrode layer on the dielectric layer; and providing an anti-reflective photoresist coating Laying the layer on the electrode layer; forming a patterned mask structure on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and removing the exposed portion of the electrode layer to form a plurality of holes Through the electrode layer. Please refer to FIG. 6A to FIG. 6F, which are another aspect of forming a transmissive sensing layer. Wherein, as shown in FIG. 6A, the insulating layer 306 may be first coated on the bottom electrode 20, and then the electrode 307 is thermally evaporated on the insulating layer. Further, an anti-reflective photoresist coating layer 309 is applied onto the electrode 307. Then, the anti-reflective photoresist coating layer 309 is formed into a hole H2 by a stamping method using a columnar mold (not shown) to expose the electrode 307 as shown in Fig. 6B. Next, the underlying material is etched by using the anti-reflective photoresist coating layer 309 having the holes H2 as a patterned mask to form a columnar structure, wherein the exposed electrode 307 can be etched using wet etching, and then used. The plasma etching method etches the insulating layer and removes the residual anti-reflective photoresist coating layer 309 to obtain a columnar structure as shown in Fig. 6C. The step of forming the columnar structure is not limited thereto. In another embodiment of the present invention, after the insulating layer 306 and the anti-reflective photoresist coating layer 309 are sequentially applied, the columnar mold is directly used. The hole is pressed out, and the electrode 307 is vapor-deposited on the hole structure, and then the protruding electrode is peeled off with a tape, so that the mesh electrode can be left at the bottom. Finally, the residual anti-reflective photoresist coating layer 309 and the exposed insulating layer 306 are removed by plasma etching to obtain a columnar structure.

Finally, the sensing material 310 is applied to the surface of the columnar structure by spin coating, dip coating, or the like to form a transmissive sensing layer. Wherein, the sensing material 310 may be formed only by covering the surface of the columnar structure, as shown in FIG. 6D; the sensing material 310 may also be formed by filling only the structural holes, as shown in FIG. 6E; The test material 310 can also be filled and cover the entire surface of the columnar structure, as shown in FIG. 6F; however, the invention is not limited thereto, and the sensing material can be formed on the columnar structure in any form.

Referring back to FIG. 2, the steps of forming a penetrable electrode group structure may be repeated to obtain a multilayer vertical sensor (step S15). The method of forming a permeable electrode layer may include: forming a dielectric layer on the bottom electrode or the permeable electrode layer; forming a patterned electrode layer on the dielectric layer; removing the exposed portion of the dielectric layer to Forming a columnar structure; and forming a sensing material on a surface of the columnar structure. In an embodiment, the method of forming a patterned electrode layer may include: setting a plurality of organic nano particles on the dielectric layer, wherein a plurality of organic nano particles have a gap therebetween to expose a portion of the dielectric layer; Multiple The machine nanoparticle is a mask to form a patterned electrode layer. In another embodiment, the method of forming a patterned electrode layer may include: forming an electrode layer on the dielectric layer; providing an anti-reflective photoresist coating layer on the electrode layer; forming a pattern on the anti-reflective photoresist coating layer The mask structure is exposed to expose a portion of the electrode layer; and the exposed portion of the electrode layer is removed to form a patterned electrode layer.

In accordance with an embodiment of the present invention, and referring to Figures 7A-7I, a method of forming a multi-layer vertical sensor is illustrated. Referring to FIGS. 7A through 7C, a substrate 10 is provided having a bottom electrode 20 disposed thereon, and a first sensing material is coated on the bottom electrode 20 to form a first sensing layer 401. Next, in the same manner as in FIGS. 5B to 5D, the organic nanoparticles granules 402 are applied onto the first sensing layer 401, and the permeable electrode layer 403 is plated by thermal evaporation. Then, after the organic nanoparticle 402 and the electrode formed thereon are peeled off by a tape, the hole H3 may be formed to expose a portion of the first sensing layer 401, that is, a penetrable electrode layer 403 having a hole structure is formed. The penetrable electrode layer 403 may comprise or consist of a conductive material, and the conductive material comprises a metal selected from the group consisting of a metal, a metal compound, a transparent oxide electrode, a nanowire, a carbon nanotube, a graphene, and the like. One of a group of oxides or composite materials blended with the foregoing materials.

Next, in the same manner as the method of FIG. 6A to FIG. 6F, the insulating layer 405 may be first coated on the penetrable electrode layer 403, then the electrode 406 is thermally evaporated on the insulating layer 405, and then the anti-reflective photoresist coating layer is applied. 407 is applied to electrode 406 as shown in Figure 7D. Then, the anti-reflective photoresist coating layer 407 is formed into a hole H4 by a stamping method using a columnar mold (not shown) to expose the electrode 406 as shown in Fig. 7E. Next, the anti-reflective photoresist coating layer 407 having the holes H4 is etched as a mask to form a columnar structure as shown in FIG. 7F. Finally, the second sensing material is applied to the surface of the columnar structure by spin coating, dip coating or the like to form the second sensing layer 408, as shown in FIG. 7G.

The manner of forming the second sensing material may be as shown in FIG. 6D to FIG. 6F, and may be formed to cover only the surface of the columnar structure, or to form a hole filling the structure, or to fill and cover the entire column. Formed by any of the surfaces of the structure. It should be noted that the first sensing material and the second sensing material may be the same or different, and when the first sensing material is different from the second sensing material, different objects to be tested may be respectively sensed, however, when When a sensing material is the same as the second sensing material, the reaction contact area can be increased, thereby amplifying the reaction and improving the sensitivity of the sensor.

In addition, the sensing layer and the penetrable electrode in the penetrable electrode group structure can be disposed in various forms as needed. For example, in the first penetrable electrode group structure 310, the first sensing layer 401 The system is formed to be disposed under the penetrable electrode layer 403; however, in the second penetrable electrode group structure 320, the second sensing layer 408 is formed to be disposed around the electrode layer 406. That is, the present invention does not limit the shape and configuration of the sensing layer and the electrode layer, as long as at least a portion of the transmissive electrode layer and the sensing layer overlap each other such that the sensing layer can flow current between the electrodes. Therefore, the arrangement of the sensing layer and the electrode layer of the present invention can include various different aspects.

In FIG. 7G, only two layers of the penetrable electrode group structure, that is, the first penetrable electrode group structure 310 and the second penetrable electrode group structure 320 are exemplarily illustrated. However, the present invention does not This is a limitation, which may include an n-layer of penetrable electrode group structure. For example, as shown in FIG. 7H, the third sensing material 409 may be evaporated on the second penetrable electrode assembly 320 by thermal evaporation, and may also include columnar etching or the like. The step of removing the second sensing layer 408 on the top surface of the structure. Next, as shown in FIG. 7I, a metal nanowire (for example, a silver nanowire) is formed on the third sensing material 409 by means of trickle plating to form a penetrable electrode 410, thereby forming a third penetrable electrode group structure. 330.

By the above method, the sensing layer and the electrode layer can be repeatedly formed, thereby forming a multi-layer stacked vertical display sensor. It should be noted that the present invention is only in the form of FIG. 5B to FIG. 5D and FIG. 6A to FIG. 6C. The method is exemplified, but it is not intended to limit the invention, and a method selected from one or a combination of any of the above embodiments may be used to form a plurality of sensing layers and electrode layers.

According to an embodiment of the present invention, referring to FIG. 8, a sensing system 1000 is provided, which includes a multi-layer vertical sensor 200 prepared as described above, wherein the multi-layer vertical sensor 200 is illustrated for convenience of description. The bottom electrode 20, the first sensing layer 501, the first penetrating electrode layer 502, the second sensing layer 601, and the second penetrable electrode layer 602 are sequentially stacked on the substrate 10, However, the present invention is not limited thereto, and may include n sensing layers and n electrode layers as needed. The sensing system 1000 can further include a voltage supply device 300 and an electrical inspection device 400, wherein the voltage supply device 300 is electrically connected to the bottom electrode 20 of the multi-layer vertical sensor 200, the first penetrable electrode layer 502, And a second penetrable electrode layer 602 to provide a bias voltage to the multi-layer vertical sensor 200, respectively. The electrical inspection device 400 is electrically connected to the multi-layer vertical sensor 200 to determine electrical changes of the sensing layers.

When a plurality of gases simultaneously contact the sensing layers, each of the objects to be tested reacts with the sensing material on the corresponding sensing layer, thereby causing a current change in the sensing layer, and the electrical conductivity of the electrical inspection device 400 is determined. Sexual changes can achieve the purpose of simultaneously sensing a variety of analytes. Wherein, the object to be tested can be sensed by separately measuring electrical signals between the single penetrable electrode group structure and the bottom electrode, or can be penetrated by separately measuring different penetrable electrode group structures A sensing signal of the object to be tested is obtained by electrical changes between the electrodes. In another embodiment of the present invention, when the sensing materials of the sensing layers are the same, the reaction contact area can be increased, thereby achieving the effect of amplifying the reaction to improve the sensitivity.

In summary, the multi-layer vertical sensor of the present invention, a manufacturing method thereof, and a sensing system and a sensing method using the multi-layer vertical sensor utilize a multi-layer transmissive electrode group structure to enable each gas to be tested to be Each sensing layer moves freely and reacts with the sensing layer, and achieves accurate sensing by measuring electrical changes generated by the reaction. In addition, the way to make the structure of the penetrable electrode group is flexible, The sensing layer and the permeable electrode layer can be manufactured in a user-friendly manner, and can provide various options for the process. Compared with horizontal array components, in a variety of gas sensing, a more complex process is required to pattern multiple sensing materials into different array positions. The vertical stacking process of the present invention will effectively simplify the manufacturing process and thereby reduce the process cost. In addition, in this case, a complex sensing layer is used. Therefore, after a plurality of types of molecules to be tested enter the sensing layers, the electrical signals can be read according to the sensing layers corresponding to the molecules to be tested, thereby achieving the purpose of simultaneous observation. Furthermore, when a specific molecule to be tested is targeted, the reaction contact area corresponding to the molecule to be tested can be repeatedly stacked to increase the reaction contact area, thereby amplifying the reaction to improve the sensitivity. Moreover, when targeting a specific molecule to be tested, a different material that reacts with the molecule to be tested can be selected as the sensing layer. According to each reaction layer, a database of molecules to be tested is established, and the accuracy of sensing is effectively improved by cross-matching or fingerprint comparison, and the influence of environmental molecules on sensing is excluded.

The embodiments described above are only intended to illustrate the technical idea and the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

10‧‧‧Substrate

20‧‧‧ bottom electrode

31, 32, 33, 34‧‧‧ penetrable electrode group structure

100‧‧‧Multilayer vertical sensor

S1~S4‧‧‧Sensor layer

P1~P4‧‧‧ penetrated electrode layer

Claims (24)

A multi-layer vertical sensor for sensing at least one gas to be tested, comprising: a substrate; a bottom electrode disposed on the substrate; and a plurality of penetrable electrode group structures arranged in sequence Each of the plurality of penetrable electrode group structures includes: a sensing layer for reacting with the gas to be tested; and a penetrable electrode layer including a plurality of holes for the bottom electrode The gas to be tested penetrates, and at least a portion of the permeable electrode layer and the sensing layer overlap each other; wherein the sensing layer between the two permeable electrode layers comprises a gas permeable structure; The perforable electrode layer and the bottom electrode of each of the plurality of penetrable electrode group structures respectively constitute a group of electrode groups or any two of the penetrating electrode layers constitute a group of electrode groups; Multiple sets of signals can be obtained simultaneously during sensing. The multi-layer vertical sensor of claim 1, wherein the gas permeable structure of the sensing layer comprises or consists of a sensing material. The multi-layer vertical sensor of claim 2, wherein the sensing material comprises an organic material or an inorganic material that generates an electrical change after contacting the gas to be tested, or at least one of the organic material or the inorganic material A blend of composite materials. The multilayer vertical sensor of claim 3, wherein the inorganic material comprises bismuth, carbon, zinc oxide (ZnO), tungsten oxide (WO ₃ ), titanium dioxide (TiO ₂ ), indium gallium oxide (IGZO). The multi-layer vertical sensor of claim 3, wherein the organic material comprises a conductive polymer, an organic semiconductor material, or other electrical property that can be used as an organic material for electron or hole transport. The multi-layer vertical sensor of claim 5, wherein the organic material comprises polythiophene, fullerene, phthalocyanine ring compound, polycyclic aromatic hydrocarbon, TCNQ (Tetracyanoquinodimethane), diamine Or aniline. The multilayer vertical sensor of claim 2, wherein the gas permeable structure of the sensing layer is comprised of a dielectric layer and the sensing material overlying the dielectric layer. The multi-layer vertical sensor of claim 1, wherein the gas permeable structure of the sensing layer comprises a columnar structure or a porous structure. The multilayer vertical sensor of claim 1, wherein the permeable electrode layer comprises or consists of a conductive material. The multi-layer vertical sensor of claim 9, wherein the conductive material comprises a metal selected from the group consisting of a metal, a metal compound, a transparent oxide, a nanowire, a carbon nanotube, a graphene and an oxide thereof, or a composite thereof One of the groups formed. A method for manufacturing a multi-layer vertical sensor, wherein the multi-layer vertical sensor is configured to sense at least one gas to be tested, the method comprising: providing a substrate, forming a bottom electrode on the substrate; Forming a permeable electrode group structure on the electrode, wherein the permeable electrode group structure comprises: a sensing layer for reacting with the gas to be tested; and a permeable electrode layer comprising a plurality of holes for The gas to be tested is penetrated, wherein at least a portion of the penetrable electrode layer and the sensing layer overlap each other; and the step of forming the penetrable electrode group structure is repeated to form a plurality of the penetrable electrode groups of the stack a structure wherein the sensing layer between the two permeable electrode layers comprises a gas permeable structure; The perforable electrode layer and the bottom electrode of each of the plurality of penetrable electrode group structures respectively constitute a group of electrode groups or any two of the penetrating electrode layers constitute a group of electrode groups; Multiple sets of signals can be obtained simultaneously during sensing. The method of manufacturing the multi-layer vertical sensor of claim 11, wherein the method of forming the gas permeable structure of the sensing layer comprises: forming a seed layer on the bottom electrode or the permeable electrode layer; And forming a random irregular columnar structure on the seed layer. A method of fabricating a multilayer vertical sensor according to claim 12, wherein the columnar structure is composed of a sensing material. The method of manufacturing the multilayer vertical sensor of claim 12, further comprising applying a sensing material to the surface of the columnar structure. The method of manufacturing the multi-layer vertical sensor of claim 11, wherein the method of forming the gas-permeable structure of the sensing layer comprises: providing a plurality of stacked organic layers on the bottom electrode or the penetrable electrode layer a nanoparticle having a gap between the plurality of stacked organic nanoparticles; coating a colloid on the plurality of nanoparticles to cause the colloid to infiltrate between the gaps; removing the plurality of organic nanoparticles Forming a porous structure; and forming a sensing material on the surface of the porous structure. The method of manufacturing the multilayer vertical sensor of claim 11, wherein the forming the transparent electrode layer comprises: forming a patterned mask structure on the sensing layer to expose a portion of the sensing layer; Forming a patterned electrode layer on the exposed portion of the sensing layer with the patterned mask structure as a mask; The patterned mask structure is removed to form the penetrable electrode layer having the plurality of holes to expose a portion of the sensing layer. The method of manufacturing the multilayer vertical sensor of claim 16, wherein the step of forming the patterned mask structure comprises: setting a plurality of organic nanoparticles on the sensing layer, wherein the plurality of organic nanoparticles There is a gap between them to expose a portion of the sensing layer. A method of fabricating a multilayer vertical sensor according to claim 17, wherein the sensing layer is a dielectric layer. The method of manufacturing the multi-layer vertical sensor of claim 16, wherein the method of penetrating the electrode layer comprises: forming a dielectric layer on the bottom electrode or the penetrable electrode layer; forming an electrode layer thereon An anti-reflective photoresist coating layer is disposed on the electrode layer; a patterned mask structure is formed on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and the exposed portion is removed Part of the electrode layer to form the penetrable electrode layer having the plurality of holes. The method of manufacturing the multilayer vertical sensor of claim 11, wherein the forming the transparent electrode layer comprises: forming a dielectric layer on the bottom electrode or the penetrable electrode layer; forming a patterned electrode Laminating on the dielectric layer; removing the exposed portion of the dielectric layer to form a columnar structure; and forming a sensing material on the surface of the columnar structure. The method of manufacturing the multilayer vertical sensor of claim 20, wherein the method of forming the patterned electrode layer comprises: setting a plurality of organic nanoparticles on the dielectric layer, wherein the plurality of organic nanoparticles are between Having a gap to expose a portion of the dielectric layer; and forming the patterned electrode layer with the plurality of organic nanoparticles as a mask. The method of manufacturing the multilayer vertical sensor of claim 20, wherein the method of forming the patterned electrode layer comprises: forming an electrode layer on the dielectric layer; and providing an anti-reflective photoresist coating layer on the electrode layer Forming a patterned mask structure on the anti-reflective photoresist coating layer to expose a portion of the electrode layer; and removing the exposed portion of the electrode layer to form the patterned electrode layer. A sensing method comprising: applying a bias voltage to a multi-layer vertical sensor as claimed in claim 1 to generate a current between the plurality of electrode layers and the bottom electrode of the plurality of penetrable electrode group structures And contacting the test object with the multi-layer vertical sensor; and detecting electrical changes of the plurality of sensing layers in the plurality of penetrable electrode group structures to simultaneously obtain the plurality of sets of signals. A sensing system comprising: the multi-layer vertical sensor of claim 1; a voltage supply device electrically connected to the bottom electrode of the multi-layer vertical sensor and the plurality of electrode layers in the plurality of penetrable electrode group structures for providing a bias voltage to the multi-layer vertical type a sensor; and an electrical inspection device electrically connected to the multi-layer vertical sensor to determine an electrical change to simultaneously obtain the plurality of sets of signals.