TWI589858B - Sphere surface inspection apparatus - Google Patents

Description

Spherical inspection device

The present invention relates to a spherical inspection apparatus, and more particularly to a spherical inspection apparatus which performs a wide range of high-precision analysis on a spherical surface or a material of a member to be inspected including an aspherical surface.

A device made of optical glass and resin, a surface of a spherical lens made of metal, and a surface of a spherical material such as a steel ball, or a corrugated surface on a spherical surface, a sharp mark, and dirt and small stains, etc., require a device. It is possible to perform high-precision and wide-range inspection on surface defects.

Up to today, the visual inspection of the spherical surface irradiates the surface of the spherical surface with various types of illumination light. While the spherical surface is oscillated, the naked eye is used with a magnifying glass for visual observation. However, this work requires a fairly skilled technique, which is not easily done by ordinary people. However, even if the flaw is confirmed by visual inspection, the width and width of the crucible cannot be measured; although the microscope can assist the spherical surface inspection, the position of the focal point of the sphere to be examined is different from that of the periphery, and the scope of the microscope can be covered at the same time. It is difficult to achieve an integrated inspection. In addition, such visual inspection methods have observable defects that are limited by the illumination method.

In order to solve the above problems, there are three published patent documents relating to a spherical inspection device, which are Patent Document 1: Japanese Patent Application Laid-Open No. 2010-156558, and Patent Document 2: Japanese Patent Application Laid-Open No. 2011-107092 No. Patent Document 3: Japanese Laid-Open Patent Publication No. SHO 56-157841.

In the spherical inspection apparatus disclosed in Patent Document 1, the basic optical system is a transmission illumination spherical inspection apparatus using a transmission microscope, and a small scattered circular light source (hereinafter referred to as a circular light source) is projected at a focus position of the to-be-detected lens. The illumination beam of the circular light source illuminates the spherical surface on both sides of the lens to be inspected, and the illumination beam on the object side and the imaging side passes through the lens to be inspected to form a non-focus beam, and is incident on the reduced telecentric imaging optical system at the imaging position of the imaging optical system. Place the camera to obtain the image to be inspected. This spherical inspection device can obtain a quasi-planar image even if the surface height is different near the apex of the surface to be inspected, that is, when the surface to be inspected has different focal lengths, different lens center thicknesses, different curvature radii or outer diameters, as long as it is The focus of the lens is widely used with a small circular light source using different projection focal lengths and different number of apertures. However, such transmission illumination is limited to the inspection of a lens through which light can penetrate, and cannot be applied to a mold core made of metal and a surface of a steel ball. Therefore, Patent Document 1 describes a basic optical technique in which a quasi-planar image can be obtained for a spherical surface, and A technical reference for a wide range of spheres to be examined with different radii of curvature can be used.

Patent Document 2 discloses an epi-illumination spherical inspection apparatus that projects a small circular light source onto a focus of a objective lens as a circular light source image, and illuminates the circular light source image on the surface to be inspected in accordance with the center of curvature of the surface to be inspected. The reflected light from the surface of the surface to be inspected is projected onto the image sensor through the objective lens and the imaging lens.

Patent Document 3 discloses an epi-illumination spherical surface inspection apparatus having a large radius of curvature spherical surface, and describes the following three techniques: the specific configuration of the patent document 3 claims is as described in the first and second drawings of Patent Document 3. The positional relationship between the objective lens and the imaging lens in the request item of Patent Document 3 and the objective lens The image side focus is the same as the object side focus of the imaging lens (hereinafter referred to as a telecentric optical configuration, but actually, the imaging of such a configuration is not necessarily a telecentric optical image), as in the technique shown in FIG. 3 of Patent Document 3. The optical position of the spherical surface to be inspected is formed by three techniques of the different techniques described in the fourth and fifth aspects of the embodiment of Patent Document 3, in addition to the third drawing of Patent Document 3.

The request item of Patent Document 3, as in the configurations of Figs. 1 and 2 of Patent Document 3, discloses that the light beam of the circular light source image of the epi-illumination spherical inspection device illuminates the surface to be inspected, and the light bulb illuminates the arrangement on the diffusion plate. A circular light source with a circular slit is projected at any position on the optical axis of the objective lens of the light projecting lens, so that the center of curvature of the detected spherical surface and the light beam from the circular light source image are uniformly illuminated on the surface to be inspected, from the detected The reflected light on the spherical surface follows the same optical path of the illumination light, and passes through the objective lens to return to the circular light source. The light splitting deflection mirror is disposed between the circular light source and the objective lens, and the optical axis and the objective lens are in an orthogonal direction. An imaging lens is disposed on the deflected optical axis to project a composite image of the imaging lens and the objective lens on the image sensor. In the first embodiment of the third embodiment of Patent Document 3, the illumination system configuration is as described in the first diagram of Patent Document 3. The configuration of the objective lens and the imaging lens is taken as an example, and the telecentric optical structure of the objective lens and the imaging lens is The spherical surface is placed at the focus of the objective lens, and the circular light source is projected onto the center of curvature of the surface to be inspected, and the light beam from the circular light source image is used to inspect the surface to be inspected.

The second embodiment of the patent document 3 is the same as the configuration example of the fourth and fifth figures of the patent document 3, and the telecentric optical system constituted by the objective lens and the imaging lens remains the same as the third image of the patent document 3, An additional light projecting lens is attached and a circular light source is disposed at the focus, and the non-focus beam is incident on the objective lens, and the circular light source image formed by the focus position of the objective lens and the curvature of the detected spherical surface are used. The heart is consistent to do a spherical inspection. In this case, the light that advances toward the center of curvature of the spherical surface to be inspected is parallel to the optical path reflected on the surface of the surface to be inspected. After passing through the objective lens, it also advances parallel to the optical axis of the objective lens as it is incident. The light is incident on the imaging lens through the semi-lens, and the objective lens and the imaging lens are combined to synthesize the image of the surface to be inspected.

The three types of devices described in Patent Document 3 are classified into one, that is, the circular light source image projected at an arbitrary position on the optical axis of the objective lens coincides with the center of curvature of the surface to be inspected, and the second is the implementation of Patent Document 3. In the first embodiment, the spherical surface to be inspected is placed at the focus position of the objective lens, and the circular light source image is projected on the center of curvature of the surface to be inspected. Third, the configuration of the second embodiment of Patent Document 3 is formed by using the focal position of the objective lens. The circular source image is consistent with the center of curvature of the surface being examined. However, in the first embodiment of Patent Document 3 in which the spherical surface to be inspected is placed at the focus position of the objective lens, the configuration of the request item in which the detected spherical surface is not at the focus position of the objective lens is different from the configuration of the second embodiment of Patent Document 3, The same is true for projecting a light source image at the center of curvature of the surface to be inspected.

Referring to the first and third drawings described in Patent Document 2, this is a modification of the second embodiment of Patent Document 3. The optical system proposed in the claim of Patent Document 3 has an optical position of the spherical surface to be inspected. It is described that, from the drawing of Patent Document 2, the focus position of the objective lens is identical to the center of curvature of the spherical surface to be inspected, and the device configuration of Patent Document 2 is based on the objective lens of Example 2 of Patent Document 3. The imaging lens does not have a fixed configuration of telecentric optics, so the spacing between the objective lens and the imaging lens is flexible, and the focus of the imaging lens is equipped with an aperture adjustment knob, which can reduce the number of imaging beam diameters (NA) to improve the image of the spherical surface to be inspected. The contrast and the depth of focus can increase the detectable width of the radius of curvature of the spherical surface to be inspected. In contrast, the light source of Patent Document 3 is a point light source of visible light and defines the size of the circular light source image.

However, the description of the patent document of the above-described epi-illumination spherical inspection apparatus still has the following problems. First, the common problem of all patent document technologies is the size of the light source; Patent Document 2 describes a point light source, and Patent Document 3 only describes a circular slit light source but no The size of the size. Although Patent Document 1 specifies a circular light source that illuminates the number of illumination apertures at a point on the surface to be inspected, in general, the imaging contrast produced by using a point light source is low, and even if the number of large illumination apertures can greatly improve the resolution, In practice, regardless of resolution or contrast, the lighting aperture value of the device should be configured according to the needs of each inspection. In the devices of Patent Document 2 and Patent Document 3, if the illumination aperture value is too large, the light beam reflected from the surface to be inspected is also large, and the entire number is passed through the objective lens and the imaging lens, thereby causing an additional aberration in the design of the imaging optical system. Correction, on the other hand, if the illumination aperture value is too small, there is a lack of light in the vicinity of the image, and a visual field defect occurs. It can be seen that the value of the illumination aperture depends on the size of the circular light source and the radius of curvature of the spherical surface to be inspected, especially in the case of a spherical surface inspection with a small radius of curvature and a large spherical angle. For the convenience of the following description, this specification refers to the observation of the outer diameter of the spherical surface to be inspected and the radius of curvature of the radius of curvature of the radius of curvature is called the angle of view, the circle of the outer diameter of the surface to be inspected and the radius of curvature The 1/2 of the vertebral angle is called the spherical angle.

Next, the shortcomings of the device in the patent document will be described. The transmissive illumination spherical inspection device described in Patent Document 1 cannot detect the spherical surface to be inspected when the object to be inspected is made of an opaque material such as metal. The epi-illumination spherical inspection device described in Patent Document 2 The configuration of the second embodiment of Patent Document 3 is the same as the configuration of the second embodiment, and the description of the imaging will be described later in the description of Patent Document 3. The epi-illumination spherical inspection device described in Patent Document 3 discloses the above three techniques, and the disadvantages thereof will be After that, it is explained that, in general, there is a problem of the observation range of the radius of curvature of the spherical surface to be inspected due to optical projection, and the quality of the image of the spherical surface to be inspected. defect.

In the first embodiment of Patent Document 3, the circular light source image is projected on the center of curvature of the spherical surface of the object at the focus position of the objective lens, and the light beam from the circular light source image is uniformly illuminated on the surface to be inspected. Regarding the imaging at this time, in order to make the drawing easy to understand, the focal length of the objective lens and the imaging lens and the radius of curvature of the detected spherical surface are set to be the same, and the imaging lens can be moved on the optical axis. Under the same considerations, the pattern described in Patent Document 3 is applied to the position of the light source of the drawing of the present invention, and the optical axis from the objective optical axis is deflected to the second lens (imaging lens) via the half lens, and the second lens (the second lens (the second lens) The imaging lens can perform optical equivalent movement on the optical axis of the objective lens. The solid line and the dotted line of FIG. 8 are schematics of the first embodiment of Patent Document 3. The broken line is the description of the claim of Patent Document 3.

The self-aligning objective lens L1 emits a light beam forming a circular light source image c, and the light beam of the illumination beam diameter of one point e1 on the detected spherical surface d1 is reflected at the point e1, and the illumination light is directed to the objective lens through the same path. L1 advances and becomes a parallel beam at the objective lens L1, and a pupil h is generated at the conjugate position of the light source. If the pupil h coincides with the object side focus of the imaging lens L2, the imaging lens L2 forms a spherical image on the image side focus. E1'. Since the pupil h is image-filled, it is bright, and even if the amount of peripheral light is insufficient, the telecentric optical image can be presented, and even if it is out of focus, the image is good and does not drift. However, if the position of the imaging lens L2 is moved to L2', e1' moves to e11' as indicated by the dotted line of the optical path. Although the size of the image does not change, because the imaging lens moves back and forth, the telecentric optical characteristics disappear, and the peripheral light amount is insufficient and the image is defective. Therefore, in order to obtain a telecentric optical image, the imaging lens L2 has to be moved with a circular light source formed by the radius of curvature of the detected spherical surface d1. In contrast, since the pupil h position must be moved, the imaging lens L2 also needs to be moved. As described, the telecentric optical system constituted by the objective lens L1 and the imaging lens L2 is not absolutely necessary. The configuration of the first embodiment of Patent Document 3 is still advantageous in that the distance between the imaging lens L2 and the detected spherical surface image e1' is fixed, so that the imaging lens L2 can be integrated with the camera design, and only when the inspection operation is performed, It is sufficient to move the detected spherical surface d1; also, considering the size of the inspection device, since the position of the detected spherical surface d1 is fixed, the detected spherical surface d1 does not need to move along the optical axis, and the device can be miniaturized.

For the spherical surface inspection of the small radius of curvature and the large spherical angle, first, in the spherical surface of the small curvature radius, the number of the beam diameters of the reflected light beam from the detected spherical surface d1 is obtained by dividing the radius of the light source image by the radius of curvature of the detected spherical surface d1. The number of illumination beam apertures causes an obstacle to the imaging performance (resolution and image defect) of the spherical surface to be inspected; and the spherical surface inspection of the large spherical angle, the total reflected beam of the spherical surface d1 (the collected beam of reflected light from a point) It will become larger as the spherical angle increases, so that the objective lens cannot obtain all the light beams, and the image defect and the peripheral light amount are insufficient. In addition, the objective lens L1 itself needs a large amount of aberration correction.

The telecentric optical characteristics of the objective lens L1 and the imaging lens L2 can maintain the condition of the telecentric optical reflected light required for the telecentric optical image even if the radius of curvature of the detected spherical surface d1 changes, which is shown by the solid line diagram of FIG. 9 of the present invention. The circular light source image c is projected at the focus of the spherical surface d to be 1/2 of the radius of curvature R. At this time, the distance between the objective lens L1 and the imaging lens L2 and the camera does not need to be adjusted, and the telecentric optical image can be maintained. . However, when the objective lens diameter is projected by the objective lens (projection lens) on the circular light source having the curvature radius R, an abnormality occurs in which the distance from the surface to be inspected and the curvature center i of the spherical surface d to be detected become smaller, and the dotted line of FIG. 9 The figure is a ray diagram when the light source image is projected on the center of curvature i of the spherical surface d to be inspected.

Fig. 8 is a view showing a possible curvature of the embodiment 1 of Patent Document 3. The range of the radius is described in the first embodiment of Patent Document 3. The configuration of the spherical surface d1 is set at the focus position of the objective lens L1, and the circular light source image must be projected rearward on the surface d1 to be inspected when the concave surface is inspected by the spherical surface d1. On the side of the objective lens L1, however, since the projection optical system has only one objective lens L1, and the objective lens L1 is in the focal length, the objective lens L1 cannot form a circular light source image c between the detected spherical surface d1 and the objective lens L1, and the result is concave. When the radius of curvature R of the surface to be inspected is smaller than the focal length f1 of the objective lens L1, it cannot be inspected. Outside the range, the concave-convex check surface d1 is inspected. If the light source is not interfered by the semi-transparent mirror and the objective lens L1 can be moved back and forth at the image side focus position, the light source image can be imaged on the object side (real image) of the objective lens L1. And the image side (virtual image) to complete the inspection of the sphere. If the concave-convex spherical surface having a small radius of curvature R is illuminated by the light source image as described above, the number of the illumination beam of the reflected beam becomes large, which affects the observation of the spherical surface to be inspected.

In the following description, the second embodiment of the patent document 3 is described with reference to FIG. 10, and the position of the light source and the imaging lens is replaced with the position of the patent document 3 in order to make the content easy to understand. In the second embodiment of Patent Document 3, the non-focus light beam from the light projecting lens L3 is projected to the objective lens L1, and the circular light source image c is generated at the focus of the objective lens L1. This circular light source image c and the detected spherical surface d1 The curvature center i is uniform, because the detected spherical surface d1 is not at the focus position, and the circular light source image c illuminates the light of the detected spherical surface d1 on the detected spherical surface d1, enters the same path as the incident light, and passes through the objective lens L1 again. At the object side focus, the objective lens L1 forms a telecentric optical real image of the same diameter or a primary image e1' of the virtual image regardless of the radius of curvature R of the detected spherical surface d1. If the imaging lens L2 cannot convert this primary image e1' into a real image e1", the detected spherical surface d1 will not be imaged on the camera. The best condition for making the secondary image e1 "real image" is to adjust the image once. On the optical axis with the movable imaging lens L2 At a position where the focal length is uniform, although the imaging at this time is not a telecentric optical image, the distance between the imaging lens L2 and e1" is fixed, and the imaging lens L2 and the camera are integrally moved, and it is easier to obtain a secondary image, including the objective lens L1. And the telecentric optical system constituted by the imaging lens L2, when the objective lens L1 and the imaging lens L2 are fixed, in the configuration shown in FIG. 10, the fixed objective lens L1 and the imaging lens L2 are inspected to check the spherical surface d1 When the concave surface having a small radius of curvature is detected by the spherical surface d2, the result is that the image e2' is imaged between the object side focus of the imaging lens L2 and the imaging lens L2 as indicated by a broken line, but at this time, the imaging lens L2 cannot be on the camera side. The real image is generated, so that the concave spherical surface d1 has a range that cannot be inspected due to the radius of curvature, and this phenomenon also occurs when the objective lens L1 and the imaging lens L2 are telecentric optical systems. The telecentricity of the objective lens L1 and the imaging lens L2 is formed. The optical effect of the optical effect is as follows: when the light from the telecentric optical characteristic of the object is incident on the pupil of the objective lens L1 with the parallel beam, the imaging lens L2 This light beam is imaged as a telecentric optical image. Similar to the above optical effect, in the first embodiment of Patent Document 3, the optical form of the present embodiment 2 is completely different, and even if the objective lens L1 and the imaging lens L2 constitute a telecentric optical system, there is no optical property. Effect.

The range of the inspectable radius of curvature of the second embodiment of Patent Document 3 will be described. Since the incident lens is a non-focus beam, the second embodiment of Patent Document 3 is such that the imaging position of the circular light source image is fixed at the focus position of the objective lens. Therefore, the center of curvature of the spherical surface to be inspected is consistent with the circular light source. When the surface to be inspected is concave, the circular light source is placed on the radius of curvature away from the direction of the objective lens, whereas the spherical surface of the convex surface is to be rounded. The shaped light source is placed at a radius of curvature close to the direction of the objective lens. In this case, a concave image of a wide range of curvature radius is imaged between the object side focus of the lens and the imaging lens; and for a super large radius of curvature spherical surface Inspection, spherical component mounting table and The distance to the objective lens must also be large, otherwise the examined surface will not be inspected. In the case of a convex aspherical surface, there is interference between the objective lens and the surface to be inspected. The radius of curvature that can be inspected is the distance between the circular light source and the objective lens, that is, within the focal length of the objective lens, and the spherical surface with a small radius of curvature The inspection, regardless of the uneven surface, has the same uncheckable obstacle as in the first embodiment.

In the following, the description of the imaging described in the patent document 3 is explained using the broken line diagram of FIG. 8. The objective lens L1 is imaged at different positions because of the different focus positions. For the sake of convenience, please refer to Patent Document 3. In the eighth diagram of the first embodiment, in 2R (R is the radius of curvature of the spherical surface to be inspected), the circular light source image c and the concave spherical surface d2 have the same curvature center, and the distance between the light source image c and the detected spherical surface is R (= f), the focal length of the objective lens L1 and the imaging lens L2 is the radius of curvature R of the detected spherical surface d2, and the objective lens L1 generates and determines the size of the primary image e2' of the detected spherical surface d1. Similarly, once When e2' and the focus of the imaging lens L2 set in equal magnification form the secondary image e2", as a result, each time the radius of curvature of the detected spherical surface d2 changes, a different image of the non-telecentric optically detected spherical surface is generated. The fixed objective lens and the imaging lens configuration are the same as those described in Embodiment 2 of Patent Document 3, and the primary image formation will be a range of curvature radii that cannot be imaged within the focal length of the lens object side.

This paragraph explains the range of the inspectable radius of curvature of the request item of Patent Document 3, because the device is configured such that the circular light source image c can be freely projected at an arbitrary position, and in optical calculation, the range of the concave-convex surface and the inspectable radius of curvature R is very large. Wide, but in practice, the position and magnification of the image like e2' will change with the change of the radius of curvature R of the detected spherical surface d1. When the imaging lens L2 moves, the focal length cannot be adjusted, and the image becomes too large or too small. It may even be impossible to image, and if the objective lens L1 and the imaging lens L2 are fixed, the same phenomenon as that of the embodiment 2 of Patent Document 3 occurs, and the inspection of the small curvature radius is performed. It still exists. Although the device can be used for both concave and convex inspections, it can be checked that the radius of curvature must be set within an appropriate range.

In addition, the optical structure of Patent Document 2 is such that the focus position light source image of the objective lens and the center of curvature of the surface to be inspected are aligned to observe the spherical surface to be inspected, and the configuration of Patent Document 2 is the second embodiment of Patent Document 3. In a simple configuration, an appropriately sized opening at the focus position of the imaging lens can reduce the beam aperture value on the imaging side to improve the sharpness of the image, and then move the camera to take the detected spherical image. This optical configuration was originally applied to the Fischer-type interferometer using a laser point source to observe the field of view diameter of the surface to be inspected, and was not intended for high resolution. Therefore, the resolution for surface appearance inspection was insufficient. The basic optical configuration is the same as that of the second embodiment of the literature 3. The non-imageable range and the telecentric optical problem have significant limitations. In addition, for a spherical surface inspection with a small radius of curvature, although the point source image can be projected, the point source is indeed At the time of photographing, the contrast of the observed image can be improved, but the resolution is low, and the resolution of the visual inspection mechanism to be a spherical surface is still insufficient.

Patent Document 2 and Patent Document 3 also have a common deficiency, which is a numerical problem of the optical aperture of illumination. When the numerical value of the illumination optical aperture is too large or too small, image defects or image sharpness are detected on the inspection of a small radius of curvature. The inspection cannot be performed, and the optical surface of the object to be inspected cannot be imaged. The size of the image and the change of the imaging position are also problems, and there are problems with the quality of the non-telecentric optical image. In addition, if necessary, the optical The construction of the inspection system cannot be changed to a viewing system for transmissive illumination by simple changes.

In view of the above-mentioned conventional disadvantages, the present invention is capable of observing a large-scale and high-precision observation of a part or a part of a detected spherical surface including a spherical surface or an aspherical surface. Spherical The radius of curvature has a wide range, and the radius of the spherical surface of the detected spherical surface to the outer diameter of the spherical surface to be inspected is large, and the spherical inspection device for providing the incident or transmission illumination can be provided for the component to be inspected.

In order to solve the above problem, the present invention described in Patent Application No. 1 is a spherical inspection device capable of performing epi-illumination of at least a part of the inspection member including a spherical surface or an aspherical surface, and the spherical inspection device may be One time to make nearly one telecentric optical real image or virtual image, and the required different focal lengths or different number of apertures; the first objective lens and the other objective lens selected in the middle of the above objective lens group can be coaxially loaded and unloaded and a support table for the objective lens; a test member placed on the inspection member along the optical axis of the inspection object; the secondary image after the first image is imaged, and the object side is a combination of a telecentric optical image relay lens and an imaging lens having a near telecentric optical relationship on the image side and the imaging side; a camera (camera) including a secondary imaging position of the imaging lens, and a display for displaying a video signal of the camera And an image observation unit that moves along the optical axis; between the first objective lens and the image relay lens, or in the image A light splitting deflection mirror is mounted between the lens and the imaging lens to generate an optical axis orthogonal to the inspection optical axis, that is, a circular light source and a first light projecting lens unit disposed on the light projecting axis, and the light splitting deflecting mirror And the light beam formed by the first light projecting lens unit is propagated to the first objective lens by the light splitting deflection mirror, and the epitaxial light projecting unit of the circular light source image imaged at the focus position of the first objective lens is characterized by the circle The size of the shape light source or the number of openings for illuminating the above-mentioned member to be inspected, that is, the number of apertures of the illumination beam can be changed.

The invention described in Patent Application No. 2 is directed to the spherical inspection apparatus of the patent scope 1 for epi-illumination, wherein the first epi-projection unit is disposed between the image relay lens and the objective lens, and includes the first The first light projecting lens unit of the epi-projection unit, the second light projecting lens unit conforming to the circular light source focus parallel light lens, and the non-focus light beam formed by the light projecting unit passes through the light splitting deflecting mirror to the first The objective lens propagation is characterized by it.

The invention described in Patent Application No. 3 is directed to the spherical inspection apparatus of the patent scope 1 for epi-illumination, wherein the first epi-projection unit is disposed between the image relay lens and the objective lens, and includes the first projection. The first light projecting lens unit of the light projecting unit, the parallel light lens disposed on the focal point of the circular light source, and the third light projecting lens unit that generates a circular light source, wherein the third light projecting lens unit generates the circular light source Projected at the conjugate focus position of the image relay lens, the non-focus beam is characterized by the light splitting deflection mirror and the relay lens propagating the first objective lens.

According to these inventions, the epi-spherical inspection device has a small circular surface light source, and the center of curvature of the detected spherical surface coincides with the center of the circular light source image of the objective lens at the object side focus during inspection, and illuminates with a small illumination beam aperture number. The entire inspection area of the spherical surface being inspected. At this time, if the focal length of the objective lens is approximately the same as the radius of curvature of the spherical surface to be inspected, if the spherical surface to be inspected is concave, the reflected light of the detected spherical surface and the illumination light follow the same path through the objective lens, and the image of the objective lens is connected. The position where the side focal length is about twice produces a real image that is approximately double the telecentric optics. If the detected spherical surface is convex, the virtual image of about one time of the telecentric optics is generated at the image side principal point of the objective lens.

Therefore, the telecentric optical image in the telecentric optical imaging optical system on the object side can obtain an image with a deep depth of focus when one image is observed; in addition, if the imaging optical system of telecentric optics can be used on both the object side and the imaging side , an image with a deeper depth of focus can be obtained, even if the surface defect is out of focus, the inspection will not be missed; the illumination using the matching beam aperture number can be observed during observation. Complementing each other, the contrast is higher than the traditional inspection method, and the spherical image can be observed almost as a plane image, especially for spherical inspection with a small radius of curvature and a large spherical angle.

The invention described in claim 4 is the size of the circular light source on the spherical inspection device for any of the projection illuminations of the items 1 to 3, characterized in that the first objective lens generates the circular light source image to the detected spherical surface. The illumination beam diameter is in the range of 0.005-0.05.

According to the present invention, the small illumination beam diameter value of the illumination beam aperture value in the range of 0.005-0.05 can illuminate the entire sphere of the detected spherical surface, the depth of the focus is deeper, and the contrast and resolution of the image are suitable, which can achieve the design purpose of the device. .

The invention described in claim 5 is directed to the epi-illumination spherical surface inspection apparatus according to the first to fourth embodiments, wherein an imaging position of the circular light source generated by the individual objective lens in the pair of objective lenses, that is, a focus position of the objective lens , about the same location is characterized.

According to the invention, when the detected spherical surface of the member to be inspected is placed on the subject support table toward the above-mentioned objective lens, the focus position of the objective lens can be adjusted to be checked regardless of which lens is selected in the middle of the objective lens group. The spherical surface, so the focus position of the detected spherical surface and the objective lens can be easily adjusted.

The invention of claim 6 is the projection illumination spherical inspection apparatus according to any one of claims 1 to 4, wherein the primary image position of the detected spherical surface generated by the individual objective lens in the objective lens is at the same position It is characterized by it. According to the present invention, it is easy to adjust the focus position of the primary image of any one of the objective lens and the relay lens in the middle of the objective lens group.

According to a seventh aspect of the invention, in the off-beam illumination spherical inspection apparatus according to any one of claims 1 to 4, the objective lens support table can be attached and detached together with the inspection optical axis. According to the invention, no When the objective lens is required, the objective lens support can be removed and can be installed when the support table is used.

The invention of claim 8 is the epi-illumination spherical inspection apparatus according to claim 7, wherein the second epi-illumination unit and the first epi-illumination unit are exchanging and detachable, and the epi-illumination spherical inspection apparatus includes the circle a light source, the second light projecting lens unit, the light splitting deflecting mirror, and the second objective lens; the second epi-illuminating unit is disposed between the relay lens and the component to be inspected, and the second epi-illuminating unit is The circular light source, the second light projecting lens unit, and the light splitting deflecting mirror are coaxially mounted on the object plate, and the light projecting unit is characterized in that the second objective lens is coaxially mounted on the inspection optical axis.

According to the invention of claim 9, the second epi-illumination unit is mounted on a one-axis stage movable along the projection axis, and the inspection optical axis Consistent, loading and unloading is characteristic.

According to the present invention, the second epi-illumination unit is a circular light source, the second projection lens unit, the light splitting mirror and the objective lens are integrally fixed on the object plate, and the spherical surface inspection with a small radius of curvature and a large spherical angle requires an objective lens The second light projecting lens unit can be integrally inserted and aligned with the inspection optical axis. When the transmission illumination inspection is performed, the second light projection lens unit can be detached from the inspection optical axis, and the operation only needs to move the one-axis stage to enable the projection inspection and the transmission inspection to be converted. use.

The invention according to claim 10, wherein the third epi-illumination unit and the first epi-illumination unit are interchangeably mounted, and the third epi-projection unit is disposed. The third epi-illumination unit is disposed on the projection axis and the circular light source between the image relay lens and the component to be inspected; The shape light source has a non-focus beam configuration generated by a collimating lens and a collimating lens which are coincident with the focus, and the fourth epi-illumination unit includes a replaceable projection lens with a number of openings or different focal lengths. a group and a replacement projection lens, wherein the third epi-projection unit is a combination of the circular light source and the fourth projection unit movable on the projection axis, and the operation guide rail is mounted coaxially with the optical split deflection mirror The third epi-illumination unit is a combination of the circular light source and the fourth light projecting unit, and moves on the optical splitting mirror projection axis along the operation guide rail, and the exchangeable projection lens The circular light source image is propagated to the inspection optical axis by the light splitting deflection mirror, and the circular light source image is movable on the inspection optical axis.

The invention according to claim 10, wherein the third epi-illumination unit is mounted on a one-axis stage movable along the projection axis, and the inspection light The axes are consistent and can be loaded and unloaded.

According to the present invention, the third epi-illumination unit is integrally fixed to the object plate, and when the spherical surface of the large curvature spherical angle of the objective lens is not used and the transmissive illumination inspection is performed, the third epi-illumination unit is inserted and Check that the optical axis is the same, or when the transmission illumination inspection is performed, the light projecting unit is unloaded from the inspection optical axis. As long as the axis carrier is moved, it can be used for the projection inspection and the inspection.

In addition, when a circular light source is projected onto the surface to be inspected, the projection illumination system is an independent optical system and does not utilize an imaging optical system such as an objective lens or a relay lens, so that the illumination can be projected at any position on the optical axis, overcoming the pair. The disadvantage of the first embodiment of Patent Document 3 is that it solves the problem that the radius of curvature of the concave spherical surface is smaller than the focal length of the objective lens, and the spherical surface cannot be inspected.

In addition, according to these inventions, the diameter of the field of view of the spherical surface to be inspected It is determined by the angle of view, so the angle of the beam of the circular light source of the projecting lens (the field of view) should be as large as possible, and the light source illuminates the position of the surface to be inspected with a large opening angle. The light source and the light projecting unit move integrally, and the projected position is as long as the opening angle of the light beam is not changed.

Further, according to these inventions, the spherical surface to be inspected when the radius of curvature is large or the spherical angle is small to medium, and the epi-illumination spherical inspection device is rounded at a position of a curvature center or a radius of curvature of the spherical surface to be examined. When the light source is projected at the focus position of the above-mentioned detected spherical surface, it can be converted into a transmission illumination spherical surface inspection.

According to the invention of the invention, in the epi-illumination spherical inspection apparatus according to the first to eleventh aspect, the image observation unit includes the image-receiving lens and the imaging lens including a zoom lens optical system, wherein the image is The lens includes a different image-receiving lens having a focal length or a number of apertures, and the imaging lens includes a different image-forming lens having a focal length or a number of apertures, all of which are detachable.

According to the present invention, the outer diameter of the spherical surface to be inspected can be inspected from small to large, and the image relay lens of Patent Application No. 1 can expand the range of the observable lens diameter, and the small opening number can be used by 0.5 to 2 times the low power mirror, and the small diameter is The inspection of the inspection surface can be observed by expanding the image, and the large-diameter inspection of the spherical surface can project a reduced image on the camera.

According to the invention of claim 13 of the invention, in the epi-illumination spherical inspection apparatus including the epi-illumination spherical inspection apparatus according to the first to twelfth aspect, the inspection component is sandwiched between the first to third projections. The light unit is selected, and the opposite side includes the light-transmitting unit through the light-emitting lens, and the first to the third-stage projecting unit are also arranged. The epi-illumination spherical inspection device can select the falling illumination according to the inspection requirement of the detected spherical surface. Spherical inspection Check or transmit illumination spherical inspection.

According to the present invention, the epi-illumination spherical inspection device of the first epi-illumination unit is used to remove the above-mentioned objective lens support table, and the position of the inspected member of the epi-illumination spherical inspection device is mounted, and the light-emitting unit can be mounted on the opposite side. The inspection material is checked for transmission illumination.

Further, the member-mounted mobile station of the epi-illumination spherical surface inspection device using the second and third epi-projection units can also be mounted on the opposite side of the position to be inspected by the illumination spherical inspection device. Perform a transmission illumination check on the parts to be inspected.

In the present invention, when a spherical inspection is performed, a large inspection surface having a small spherical radius of curvature is used, and a configuration of Patent Applications 1 to 9 is suitable for use; when examining a surface to be inspected with a small spherical radius of a large radius of curvature, The composition of the patent application scope 10 and the patent application scope 11 can be inspected without using the objective lens; the configuration of the patent scope 13 can perform the transmission inspection of the spherical surface to be inspected. The patent application scope 12 is available for the combination of the epi-illumination inspection and the transmission illumination inspection, and the correlation between the magnification of the imaging optical system and the size of the camera.

The device described in Patent Document 1 can be used for transmission illumination inspection, and the content is from a large curvature radius to a spherical inspection for a small radius of curvature. On the other hand, in the first embodiment of Patent Document 3, the surface to be inspected is placed at the focus position of the objective lens, and the projection position of the circular light source is changed to the focus position of the spherical surface to be inspected (1/2 of the radius of curvature). When the circular light source is projected at the focus position, it is known from the observation that it is the same as the focus of the light source image of the transmission illumination inspection of the inspection principle of Patent Document 1.

The invention provides a suitable technique for the inspection of the spherical surface with a small radius of curvature and a large spherical angle, and at the same time, the prior art is simply integrated, and the inspection surface of various shapes can be examined in a wide range.

However, not only the spherical surface inspection with large spherical radius can be made for small radius of curvature, but also various shapes, such as outer diameter, radius of curvature, combination of different spherical angles, spherical or non-spherical epi-illumination inspections, are possible in the range of prior art. The scope is large, not only that, the integration makes it possible to co-conform with the inspection device for transmissive illumination, and it can be used for screening of lenses and lens forming. If the material to be inspected is aspherical lens with small non-sphericality, inspection can be feasible. .

In addition, the imaging of the telecentric optical image enables the spherical surface to be displayed in a flat image with high contrast and deep depth of focus. Even if the focal length is out of focus, the size of the image does not change, and the high contrast enables the flaw in the polished surface which looks like a defect without the defect. In addition, the device is telecentric optical imaging. In the case of using the same objective lens, since the viewing angle is fixed, even if the radius of curvature of the spherical surface to be inspected is different, the imaging size is constant, so it is very suitable for CCD. Camera.

Finally, the prior art is difficult to display a single image on a spherical surface of a large spherical angle. The image of the present invention is not only a near-plane image, but also has high image quality, and can detect spherical defects of 5 μm or less. In summary, the device of the present invention does not require special use of precise components, and has a simple structure and good operability, and can shorten the time required for inspection.

1‧‧‧Examined materials

1a‧‧‧Surveyed spherical curvature center

1b‧‧‧Checked sphere

1c‧‧‧Checked spherical center

3‧‧‧Contact objective

3a‧‧‧Circular light source image

3b‧‧‧Contact objective side focus

3c‧‧‧One image or one flat image

3d‧‧‧Contact lens mounting plate

3e‧‧‧Support materials

3f‧‧‧Adapter box

3g‧‧‧Contact lens frame

3h‧‧‧Selecting the main point of the object side

3i‧‧‧ receiving mirror side main point

3j‧‧‧ Mirror image side focus

4‧‧‧like relay lens

5‧‧‧ imaging lens

6‧‧‧Photographic unit

6a‧‧‧ secondary image

7‧‧‧Light splitting deflection mirror

8a‧‧‧ Collimating lens

8af‧‧‧Focus plane of the collimating lens

8b‧‧‧Projecting lens

8c‧‧‧like focus of relay lens

8d‧‧‧through collimating lens

8e‧‧‧Exchange projection lens

8f‧‧‧ exchange focus of the projection lens

8g‧‧‧Transmission illumination circular light source image

9‧‧‧Circular light source

9a‧‧‧Opening plate

9b‧‧‧Opening path

9c‧‧‧Disruption board

10‧‧‧ stay box

11‧‧‧Circular lighting unit

11a‧‧‧LED light source

11b‧‧‧LED light emitting surface

12‧‧‧Examined materials

20‧‧‧Check the optical axis

21‧‧‧Projection axis

30‧‧‧ zoom lens

31a‧‧‧Aperture Grating

31b‧‧‧ fixing screws

31c‧‧‧Opening and closing lever

32‧‧‧Eccentric moving frame

33‧‧‧ rotating frame

34‧‧‧ Ball plunger

35‧‧‧ Height adjustment frame

36‧‧‧Adjustment knob

37‧‧‧Eccentric frame

38‧‧‧ Through the inspection section

39‧‧‧Under the inspection of the material placement platform

40‧‧‧ loading plate

41‧‧‧ Single-axis stage

42‧‧‧ biased frame

43‧‧‧ pairs of boards

44‧‧‧through the projection lens

45‧‧‧through the projection lens frame

46‧‧‧Rotary handle

47‧‧‧ Spacer

48‧‧‧Basic board

49‧‧‧ deflection mirror

50‧‧‧moving rail

51‧‧‧Dust glass

52‧‧‧ biased stage

53‧‧‧ Single-axis stage

54‧‧‧Rotary handle

55‧‧‧Like the observation unit pillar

56a‧‧‧fixing screw a

56b‧‧‧ fixing screw b

57a‧‧‧Box a

58b‧‧‧Box b

59‧‧‧Light source frame

60‧‧‧Adjustment box

90‧‧‧Underward illumination spherical inspection device

90a‧‧‧Inspected materials placed on mobile stations

90b‧‧‧ Mirror support desk

90c‧‧‧ like observation unit

90d‧‧‧First epi-projection unit

90e‧‧‧ Sighting group

90f‧‧‧first epi-projection unit

91‧‧‧Ejection transmission illumination spherical inspection device

91aa‧‧‧second projection lens unit

91ab‧‧‧third projection lens unit

91b‧‧‧core adjustment unit

91c‧‧‧The projection is placed on the mobile station by the projection lens

91d‧‧‧Second epi-projection unit

91e‧‧‧through the projection lens unit

91f‧‧‧through the light projecting unit

92‧‧‧Ejection transmission illumination spherical inspection device

92a‧‧‧fourth projection lens unit

92b‧‧‧3rd epi-projection unit

92e‧‧‧ Through the projection lens group

92g‧‧‧ Focus on the materials being inspected

a‧‧‧Circular light source

b‧‧‧Light splitting deflection mirror

c‧‧‧Circular light source image

D‧‧‧Checked face

D1‧‧‧Checked face

D2‧‧‧Checked face

E‧‧‧ points on the face being examined

An image of e'‧‧‧e

Secondary image of e"‧‧‧e

E1‧‧‧ points on the face being examined

An image of e1'‧‧‧e1

One image of the assumed lens position of e11'‧‧‧e1

E2‧‧‧ points on the face being examined

An image of e2'‧‧‧e2

Secondary image of e2"‧‧‧e2

l ‧‧‧Focus distance

f‧‧‧Selecting lens focal length

F1‧‧‧Selecting lens focal length

F2‧‧‧ imaging lens focal length

H‧‧‧瞳孔

i‧‧‧Surface of the face to be examined

K‧‧‧ Telecentric optical composition

M‧‧‧Focus interval

L1‧‧‧ receiving objective

L2‧‧‧ imaging lens

L2'‧‧‧ assumed lens position

L3‧‧‧projection lens

L4‧‧‧like relay lens

R0‧‧‧ radius of curvature of the examined surface

R1‧‧‧ radius of curvature of the examined surface

WD‧‧‧Working distance

Fig. 1 is a schematic block diagram showing a schematic configuration of an epi-illumination spherical inspection apparatus according to a first embodiment of the present invention.

Fig. 2 is a cross-sectional view showing a module of a circular illumination device of an epi-illumination device according to a first embodiment of the present invention.

Fig. 3 is a schematic block diagram showing a schematic configuration in which the position of the epi-illumination device is changed and placed in the image observation unit according to the first embodiment of the present invention.

Figure 4 is a spherical angle, field of view, used in connection with the present invention, A diagram of the illumination NA.

Fig. 5 is a conceptual diagram of an illumination method and an optical property regarding imaging according to a first embodiment of the present invention.

Fig. 6 is a schematic block diagram showing a schematic configuration of an epi-illumination spherical inspection apparatus according to a second embodiment of the present invention, wherein the right side of the optical axis is an epi-illumination optical configuration diagram at the time of epi-illumination, and the left is a transmission illumination optics at the time of transmission illumination. Make up the picture.

Fig. 7 is a view showing the position of the surface to be inspected and the light path of the reflected light and the transmitted light of the surface to be inspected according to the third embodiment of the present invention. The right side of the optical axis is the optical configuration of the epi-illumination when the illumination is epi-illuminated, and the left is the transmission illumination. The transmission illumination optical composition diagram.

Fig. 8 is a conceptual diagram of the optical property of Patent Document 3.

Fig. 9 is a conceptual diagram of the optical property of Patent Document 3.

Fig. 10 is a conceptual diagram of the optical property of Patent Document 3.

Figure 11 is a schematic block diagram of an optical system of the first embodiment of the present patent application.

The embodiments of the present invention are described below with reference to the drawings, and the same or equivalent reference numerals are used for the same or equivalent materials in the drawings. Further, the first epi-illumination unit using the second projection lens unit is named as the epi-projection unit A, and the first epi-projection unit using the third projection unit is named as the epi-projection unit B, however, the first Projection lens unit It is limited to use only for the second and third light projecting lens units.

Fig. 1 is a general view showing a schematic configuration of an epi-illumination spherical surface inspection device 90 according to a first embodiment of the present invention, wherein the radius of curvature is 1 to 30 mm, and the spherical angle shown in Fig. 4 is a spherical surface 1b suitable for about 65 to 17 degrees. The configuration of the inspection; Fig. 1 is a view showing the first epi-illumination unit A90d disposed between the observation unit 90c and the objective lens support 90b. The first epi-projection unit A90d, as shown in FIG. 2, is a circular illumination device 11 having a circular light source 9, comprising a circular light source 9 focusing on the collimator lens 8a, and a second projection lens unit 91aa and a light splitting deflection mirror 7 The non-focus light beam generated by the collimator lens 8a is transmitted through the light splitting deflection mirror 7 to the objective lens 3, and the description of the present embodiment is mainly described by taking the inspection of the concave spherical surface 1b as an example.

In the present embodiment, the pair of objective lenses 3 are selected in the objective lens group 90e, and the circular light source image 3a of the small circular light source 9 of the circular illumination unit 11 is formed at the object side focus position 3b. When the objective lens 3 selects an observation point in the vicinity of the focal length of the curvature radius of the to-be-detected spherical surface 1b of the to-be-detected material 1, the curvature surface center 1a of the to-be-detected surface 1b of the to-be-detected material 1 and the circular light source image 3 At about twice the focal length of the object 1b and the object side of the objective lens 3, when the illumination light of the arranged circular light source image 3a illuminates the spherical surface 1b, the position of the image focal length is about twice, and the concave surface is once examined. A 3D real image like 3c. Further, when the convex inspection spherical surface is placed on the object side main point 3h of the objective lens, a virtual virtual image of about twice as large as the convex detection spherical surface is generated on the image side main point 3i.

In order to make a good quality image under the above conditions, the objective lens must be corrected for aberration or appropriately selected. In the experiment, the infinite distance correction of the objective lens used in the microscope is selected, that is, the long working distance objective lens for the projection observation is suitable for use. The microscope objective group generally has a lineup of 100 times, 50 times, 20 times, 10 times, and selects the appropriate focus distance and opening according to the inspection required magnification. The port beam diameter value (NA) is used in this device.

Experimentally, the focal length of the objective lens and the radius of curvature of the possible spherical surface 1b to be inspected, the appropriate magnification is 0.5 to 1.5 times, and the possible spherical angle (field of view) and the aperture beam diameter of the objective lens are checked (NA). ) Equal amount. Specifically, the microscope uses a 100-fold objective lens with a focal length of 2 mm and an NA of about 0.9. The radius of curvature of the face 1b to be examined is 1-3 mm, and the angle of view is ≦65 degrees (NA=0.9). Similarly, 50 times. The radius of curvature of the lens is 2-6mm, the angle of view is ≦45 degrees (NA=0.7); the radius of curvature of 20 times lens is 5-15mm, the angle of view is ≦30 degrees (NA=0.5); the radius of curvature of 10 times lens is 10-30mm, The angle of view is 17 degrees (NA = 0.3), and spherical inspection in this range is possible.

For the inspection of the convex spherical surface 1b, the main point 3h of the object side of the objective lens is the objective lens WD, that is, within the working distance of the objective lens, the WD has a focus of 1.5 times the objective lens, and if not, the objective lens 3 and the The inspection of the spherical surface 1b interferes with each other, and the inspection of the spherical surface 1b to be inspected cannot be completed.

When the object to be inspected 1b having a different radius of curvature is observed using one of the objective lenses, Fig. 5 shows a first-order image of the spherical surface 1b to be examined having the same angle of view, and an image having the same diameter of the pupil of the objective lens is formed. In other words, the size of the image does not change, and the imaging position and the magnification of the image are different.

Further, when the individual objective lenses 3 of the objective lens group 90e are fitted into the objective lens frame 3g of the objective lens support 90b, the adapter for the concave inspection surface 1b and the convex inspection surface 1b is used to make the primary image at the same position. 3f provides two types of preparation for each of the two types of objective lenses, and the adapter 3f is designed such that the respective focus positions become the same. The reason is that from the viewpoint of operability, no matter which one of the objective lenses is selected, since the position of the spherical surface to be inspected is at the same position, it is easy to find the surface of the spherical surface to be inspected, and also, the image position is set to the image relay lens. The focal length position is conducive to the adjustment of the focus.

In the member to be inspected of the present embodiment, the mobile station 90a is placed, and the member to be inspected 1 is placed on the member to be inspected 1 regardless of whether light is transmitted or not. In the core adjusting unit not shown in the figure, after the optical axis of the detected spherical surface 1b and the inspection optical axis 20 are adjusted, the optical axis is moved up and down along the inspection optical axis on a 1-axis stage (not shown) to allow the surface 1b to be inspected. The center 1c of the detected spherical surface coincides with the circular light source image 3a, and the position of the spherical surface 1b to be inspected can be checked. Based on this position, if the distance of curvature of the objective lens from the concave surface 1b is adjusted, the surface of the spherical surface 1b is examined. The curvature center 1a and the circular light source image 3a are aligned, and the display can obtain the secondary image 6a of the detected spherical surface 1b. When the position of the detected spherical surface 1b is detected by moving the image observation unit 90c to the focal length position of the relay lens 4, and the objective lens moves up and down the spherical surface 1b substantially in the vicinity of the image side focus 3j, the display can be bright. The diameter of the circular portion changes, and when the outer diameter of the circular portion becomes maximum, when the circular light source image 3a and the center of curvature of the detected spherical surface 1b coincide.

The configuration of the objective lens support table 90b of the present embodiment is determined by the position of the stage plate 40 of the epi-illumination spherical inspection device 90, and the objective lens 3 is mounted on the mirror frame 3g which can be coaxially connected with the inspection optical axis 20, and is fixed to The adapter frame 3f is positioned on the inspection optical axis, and the microscope frame is mounted on the inspection optical axis, and the microscope objective lens and other objective lenses can be mounted. The reason why the objective lens support table needs to be designed to be detachable is to use At the time of general microscopic examination, there is also a spherical inspection of a large radius of curvature to be described later, and an objective lens and an objective lens support stand are not required for the transmission illumination inspection.

The image observation unit 90c of the present embodiment includes the objective lens 3 for obtaining the primary image 3c of the detected spherical surface for telecentric optical use, the relay lens 4 for relaying the image to the imaging lens 5, the relay lens 4 and the telecentric lens for both sides. The optical configuration, the telecentric optical secondary image 6a of the detected spherical surface 1b by the imaging lens 5, and the image signal picked up by the imaging unit 6 display an image on the display. The signal of the photography unit is Transferred to the computer, the image processor and the measuring device perform analysis and measurement of defect extraction or defect classification.

Like the choice of relay lens, suitable lenses are long working distance (LWD) and large aperture and infinity designs. In the following description, how the relay lens and the imaging lens are designed as infinity lenses will be explained. The reason for selecting the long working distance is to ensure the inspection space and good operability. When the first epi-projection unit A90d is disposed between the relay lens 4 and the objective lens 3, the mounting becomes easy; the reason for the large aperture is telecentricity. The diameter of the optical lens determines the viewing field and can correspond to the observation of the large-diameter spherical surface 1b. Although the imaging NA of the primary image is small, the NA of the relay lens 4 can be small, but a low-power lens having a large aperture is most suitable.

The optical system of the observation unit 90c has a wide field of view, telecentric optical imaging, and an image with a deep depth of focus and good contrast. Since the optical system of the apparatus has a low magnification, there is a zoom lens 30 between the relay lens 4 and the imaging lens 5. For the inspection, the relay lens 4 has a focal length and a number of apertures to be replaced.

Regarding the illumination light beam of the epi-projection unit, the first epi-projection unit A90d of the present embodiment is disposed between the relay lens 4 and the objective lens 3, and transmits a non-focus beam to the objective lens. However, as shown in FIG. 5, It is shown that the light propagating from the circular light source 9 in the same direction is emitted by the collimator lens 8a and intersects on the focal plane 8af of the collimator lens 8a. This is the so-called telecentric optical illumination illuminating focal plane.

The focal plane is coincident with the primary image plane 3c formed by the objective lens 3, and light from a point of the focal plane passes through the objective lens 3 to make a pupil image (circular light source image 3a) at the focus of the objective lens, and then illuminates the surface of the surface 1b to be inspected. After 1 point of reflection, the light reflected by the surface of the surface 1b of the inspection is the same as the way of going, and back To the exit point in the focus plane. If the optical path diagram is corrected by the aberration of the objective lens 3, the spherical surface can be made into a planar image.

When the detected spherical surface 1b is convex, since the detected spherical surface 1b on the object side main point 3h of the objective lens side generates a virtual image at the object mirror side main point 3i, the focal plane of the collimating lens 8a and the mirror mirror side main The point 3i is uniform, that is, the focal plane of the relay lens and the primary image plane formed by the objective lens 3 are identical.

In the above description, the most excellent lighting conditions have been described. In the actual device, even if the accuracy of the coincidence of the focal plane and the primary image position of the collimator lens 8a is lowered, the effect is not lowered. Since the circular light source image 3a formed by the objective lens 3 does not impair the shape of the circular light source even if it is not adjusted as described above, the circular light source image 3a can completely illuminate the detected spherical surface 1b.

When the light splitting deflecting mirror 7 is disposed between the relay lens 4 and the imaging lens 5, the first epitaxial projecting unit B90f is indicated by 91ab in FIG. 3, and the circular opening 9b of the circular light source unit 11 includes adjustment. The collimator lens 8a and the light projecting lens 8b having the same focus, the circular light source image formed by the light projecting lens 8b and the image side focus position of the image relay lens 4 coincide with the conjugate position 8c. Therefore, the relay lens 4 is split by the light splitting mirror 7 to emit a focusless light beam toward the objective lens 3.

In order to suppress the aberration caused by the thickness of the light splitting deflecting mirror 7, when the epi-illuminating unit is disposed between the relay lens 4 and the objective lens 3 of FIG. 1 and the relay lens 4 and the member to be inspected in FIG. When it is between 1, the thickness of the light splitting deflection mirror 7 is preferably less than 0.3 mm.

Next, the spherical angle and the angle of view and the illumination NA will be described by FIG. The number of openings (NA) of the circular light source image 3a generated by the respective lenses of the objective lens group is equal to the opening angle of the examined surface 1b to which the device is illuminated, and the possible range of inspection is the outer diameter of the examined surface 1b and the detected The center of curvature of face 1b is the circle formed by the apex The 1/2 of the vertebra angle is referred to as the angle of view. The larger the NA of the objective lens 3, the larger the angle of view can be observed, so the objective lens of the large NA is suitable for the device. The outer diameter and the center of curvature of the spherical surface 1b to be inspected are regarded as the angle of view of the circular angle formed by the apex. The 1/2 of the circular vertebral angle that illuminates one point on the spherical surface 1b from the circular light source image 3a is called illumination NA. If this illumination NA, the diameter of the circular light source image is φ d, and the radius of curvature of the detected spherical surface 1b is r, the calculation formula: illumination NA = d / (2r) appropriate illumination NA value, according to the experiment is suitable for 0.005-0.05. The diameter φ d of the circular light source image formed by the objective lens is calculated as: φ d = diameter of the circular light source × (focal length of the objective lens / focal length of the collimating lens). The change of the illumination NA is as shown in Fig. 2, and the opening diameter 9b of the circular light source 11 may be replaced by a different opening plate 9a, and the light source is preferably an LED that emits visible light.

The difference between the optical system of the first embodiment of the present application and the optical system of the second embodiment of Patent Document 3 will be described below. 11 is a schematic block diagram of an optical system according to a first embodiment of the present application. When compared with FIG. 10 of the second embodiment of Patent Document 3, the eleventh embodiment of the first embodiment of the present application is configured to receive an objective lens. A relay lens L4 with a convex lens between L1 and the imaging lens L2, a relay lens L4 and an imaging lens L2 as a telecentric optical relationship, and a primary image of the telecentric optical lens L1 is relayed by the image relay lens L4, an imaging lens L2 is a secondary image of telecentric optics. In contrast, the configuration of Fig. 10 cannot be made into a telecentric optical image.

In Fig. 11, even if the focal length is not fully focused, the size of the image does not change, and an image with high contrast can be obtained. Further, depending on the radius of curvature of the spherical surface 1b to be inspected, the device has the most suitable focal length of the objective lens group 90e, which is fully considered. Optical performance limitations to each objective.

The configuration and inspection principle of the first embodiment have been described above, and the present invention has any one of the spherical surface 1b to be inspected, the objective lens 3, and the relay lens 4. As a reference, the other two units can be fully moved independently along the inspection optical axis; for example, the objective lens 3 and the image observation unit 90c can move relative to each other based on the detected spherical surface 1b, and the present invention includes three types. May be composed.

The present embodiment is applied to a spherical surface inspection having a small radius of curvature and a large spherical angle. The reason is that the spherical surface having a large radius of curvature becomes too large, and an appropriate objective lens is not easily obtained. However, basically, for an optical surface 1b having a large radius of curvature, if an optical system having a radius of curvature can be provided, an equal amount of inspection effect can be obtained, so the present invention does not have a limitation of the radius of curvature.

The second embodiment will be described. Fig. 6 is a plan view of the incident spherical surface 1b having a small spherical curvature angle and a small spherical curvature angle as in the first embodiment, as in the first embodiment, which can be converted to visible light. Check the transmission illumination check of the material. The difference in the first embodiment is that the one-axis stage 41 is placed in place of the objective lens support 90b, the first epi-illumination unit A90d or the first light-projecting unit B90f is replaced with the light-emitting unit 91d, and the core of the inspection surface 1b is additionally mounted. The adjustment unit 91b and the light projecting unit 91f are transmitted. Further, the object plate 43 is fixed to the spacer 47 by the one-axis stage 41, and the second epi-illumination unit 91d is biased toward the optical axis of the inspection optical axis 20 and the optical axis of the deflection mirror 7, and is deflected by illumination. The mirror 42 is moved to a position that does not affect the position of the inspection beam when the inspection is not blocked.

The second epi-illumination unit 91d is a circular illumination unit 11 disposed on the projection axis 21, a circular light source 9 disposed in the circular illumination unit 11, and a collimator lens 8a (91aa) placed at a focus position, and a light splitting bias. The deflecting mirror frame 42 to which the mirror 7 is mounted, and the objective lens 3 and the fixed pairing plate 43 of the objective lens 3 are formed. The deflecting lens frame 42 fixes the optical axis of the light splitting deflection mirror 7 to the objective lens 43 In the upper case, the object plate 43 is used for coaxiality such as a screw and a fitting portion. The light from the circular light source 9 forms a light beam having no focus light in the collimator lens 8a, passes through the light splitting deflection mirror 7, and enters the objective lens 3, and the circular light source image 3a is illuminated at the focus 3b of the objective lens 3 to be inspected. Face 1b. The reflected light of the surface to be inspected 1b traces the same optical path at the time of incidence, and after passing through the objective lens 3, the detected spherical surface 1b is imaged as a primary image 3c which is approximately doubled. When the focal length of the relay lens 4 of the image observation unit 90c is adjusted once, the secondary image of the surface 1b to be inspected is displayed on the display.

Next, in the second embodiment shown in FIG. 6, an explanation will be given of the transmission illumination inspection by the epi-illumination spherical inspection apparatus 91. First, the outline of the transmission illumination, the transmission light-emitting unit 91f for the transmission illumination inspection, and the first implementation of the present application will be described. The configuration of the epitaxial illumination spherical inspection device 91d is basically the same, and the circular illumination unit 11 of the small circular light source 9 is disposed at the focal position of the collimator lens 8d, and the circular light source 9 forms a beam of non-focus light. After the light splitting deflection mirror 49 is uniformly turned to the inspection optical axis 20, the light beam having no focus light is shown in FIG. 7, and the light-transmitting lens group interchangeable with the falling objective lens group 90e is required according to the focal length or the number of openings. A lens is selected in 92e, and a circular light source image 8g is formed at a focus position passing through the light projecting lens 44. This circular light source image 8g is placed on the one-axis stage 53 that is projected onto the inspection-substance placement moving table 91c, for example, the optical lens is a focus point 92g that passes through the inspection member 12, and the telecentric optical light that is transmitted through the inspection member 12 is emitted. When the light beam is aligned on the detected spherical surface 1b of the member to be inspected by the observation unit 90c, the detected spherical image on the surface or the back surface of the member 12 to be inspected can be imaged on the camera.

According to the second embodiment, the second epi-illumination spherical surface inspection device 91d fixed to the one-axis stage 41 when the incident illumination spherical inspection device 91 performs the transmission illumination inspection, the light is applied by the rotary handle 46 of the one-axis stage 41. Inspection of the transmitted inspection beam emitted from the inspection member 12 by the optical axis of the division deflecting mirror The optical axis 20 is moved to a position where there is no occlusion, and the image observation unit 90c is moved closer to the inspection target member 12, and the focal length of the detected spherical surface 1b of the inspection member 12 is aligned, and the rotation of the 1-axis stage 53 is transmitted through the projection lens. The handle 54 adjusts the circular light source image 8g to coincide with the focus 92g of the optical lens to be inspected. In this case, the same transmission illumination inspection can be performed as in the transmissive illumination inspection apparatus of Patent Document 1, and a part of the left side of the inspection optical axis of Fig. 6 is a schematic block diagram of the transmission illumination inspection.

Figure 7 is a plan view of an epi-illumination illumination spherical inspection device 92 according to a third embodiment of the present invention. In comparison with the first and second embodiments, an inspection apparatus for convertible epi-illumination inspection and transmission illumination inspection is performed on the inspection surface 1b having a large radius of curvature and a small spherical angle. The difference from the second embodiment is that the objective lens 3 and the spacer 47 are removed, and the second epi-illumination unit 91d is converted into the third epi-illumination unit 92b. Fig. 7 includes an embodiment in which a portion is derived from transmissive illumination, with the right side of the optical axis being the epi-illumination illumination and the left side being the illumination optical configuration of the transillumination illumination.

This paragraph explains that the third epi-illumination unit 92b is regarded as a method of moving the light source image on the inspection axis and a converted transmission illumination inspection, on the movement of the circular light source, the circular illumination unit 11 and the fourth projection lens unit 92a The collimator lens 8a, the exchange light projecting lens 8e, and the like can move together along the inner diameter of the moving rail 50, and the outer diameter portion and the outer frame can be integrally connected to each other by a frame by a fastener. The circular illumination unit 11 and the fourth projection lens unit module are inserted into the inner diameter of the control portion of the guide rail 50, and the circular light source image 3a made by the light-emitting lens 8e is deflected by the light splitting direction according to the movement of the light splitting deflection mirror. The mirror projects and moves on the inspection optical axis 20. When the circular light source is positioned, the module of the circular light source and the fourth light projecting lens unit is fixed by a fixing screw a56a. The conversion mode of the transmission illumination inspection is because the object plate 43 is fixed to the one-axis stage 41, and the position of the third epi-projection unit 91b on the inspection optical axis 20 and the optical axis of the deflection mirror 7 are identical. When the illumination is observed, the light splitting bias lens frame body shall not block the inspection beam from passing through, and the rotating handle 46 shall be used to move and position.

The epi-illumination inspection of the transmissive illumination spherical inspection apparatus according to the third embodiment will be described. The member to be inspected 1 is placed on the falling target portion mounting table 39 shown in Fig. 6 . In the core adjustment unit 91b, the inspection optical axis 20 and the detected spherical surface 1b coincide with each other, and when the inspection member 1 is moved at the focal length position of the image relay lens 4 of the image observation unit 90c moving along the inspection optical axis 20, it can be observed. The outer diameter end surface of the member 1 to be inspected. Next, a paper sheet or the like is placed on the surface 1b to be inspected, and the circular light source and the fourth light projecting lens unit 92a are moved forward and backward along the control portion of the moving rail 50 to the light splitting deflection mirror 7, and the paper sheet can be seen. The circular light source image 3a is a concave surface, and the circular light source image 3a is aligned with a position 1/2 of the radius of curvature of the spherical surface on the side of the relay lens 4, that is, the detected surface 1b. At the focus position, the fourth projection lens unit 92a is moved. At this time, if the circular light source image 3a and the detected surface 1b have the same focal point, the image of the detected spherical surface 1b is displayed on the display; if the detected surface 1b is convex, The circular light source moves in the opposite direction of the concave surface.

In the optical system according to the third embodiment of the present invention, when the light source image is projected on the focus of the detected spherical surface 1b at the focal length of the relay lens 4, the light at one point on the detected spherical surface is along the inspection optical axis. 20 is reflected to the image observation unit 90c to be imaged at the photographing unit 6. The configuration of the first embodiment of Patent Document 3 is shown by a broken line in Fig. 9. The spherical surface to be inspected is placed at the focus of the objective lens, and the circular light source image 3a is projected on the center of curvature c2 of the surface to be inspected. However, the present invention is as shown in Fig. 9 The solid line shows that since the light source is at the focus position c1 of the detected spherical surface 1b, the reflected beam is telecentric. The present invention includes both the relay lens 4 and the imaging lens 5 on both sides for telecentric optical characteristics suitable for use in the present inspection method. This optical system is in the spherical transmissive illumination observation method described in Patent Document 1, and the circular surface light source is imaged. The surface of the lens to be inspected is illuminated at the focus position of the lens to be inspected, and the telecentric optical beam reflected by the surface of the lens to be inspected has the same configuration in which the surface image of the lens to be inspected is imaged by the telecentric optical lens on both sides. Accordingly, the spherical observation method of the spherical surface described in Patent Document 1 can be directly applied to the transmissive illumination inspection apparatus of the third embodiment.

In this case, the radius of curvature and the diameter of the field of view of the surface to be inspected are slightly described. The diameter of the field of view of the convex surface 1b is a circular light source projected at the center of curvature, as in the configuration of the first embodiment of Patent Document 3 (see FIG. 9). ), the diameter of the field of view is smaller when compared with the circular light source image projected at the center of curvature, but in the case of the surface 1b with a large radius of curvature, the difference in the diameter of the large field of view does not occur; the reason for this is due to When the inspection spherical surface 1b having a large radius of curvature is inspected, the distance relationship between the projection lens 8e and the detected spherical surface is exchanged, that is, the distance between the projected light source image and the detected spherical surface is relatively short, so that the exchange projection lens 8e is formed. When a circular light source like 3a is projected onto the center of curvature or projected on the focus, its beam path will not change.

However, the observation of the convex spherical surface having a radius of curvature of 30 to 100 mm has the following problem. In the case of the convex spherical surface 1b, the circular light source image 3a is imaged at a focal length (focus) position of the image relay lens 4. In the far side of the detected spherical surface 1b, in order to match the projection position of the circular light source image 3a with the focal position of the detected spherical surface 1b, the fourth projection lens device 92a must be brought close to the inspection optical axis 20, causing the light splitting deflection mirror 7 to interfere with the light. The circular light source image becomes unable to be projected at the center of curvature of the surface to be inspected. If the exchange projection lens 8e is a long focal length lens, the circular light source image can be projected at the center of curvature of the lens to be inspected, but the angle of view becomes small. In response to this problem, in the first embodiment of Patent Document 3, the objective lens and the imaging lens constitute telecentric optics, and the spherical surface to be inspected is placed at the focus position of the objective lens, and the circular light source is projected on the center of curvature of the surface to be inspected, and Patent Document 3 is also used. The principle of Embodiment 1 does not place a circular light source image on the ball to be inspected The focal point c1 of the face is set at the center of curvature c2, and although the image generated by the observation unit 90c has no telecentric optical characteristics, the image can be observed. In the third projection light projecting unit 92b, as shown in FIG. 7, the inner radial adjustment frame 60 of the light source frame 59 is slightly changed, and the circular illumination unit 11 can be aligned with the straight lens 8b to perform a slight movement. The position of the circular light source image 3a generated by the exchange of the light projecting lens 8e can be shifted a little from the focus position of the exchange light projecting lens 8e. Through this operation, even if lenses of different focal lengths are not individually prepared in the interchangeable lens group, the circular light source image 3a may be slightly blurred, and the field of view angle may change, but there is no problem in the use of the substantial observation.

Next, a state in which the epi-illumination illumination inspection device 92 of the third embodiment is converted into a transmission illumination spherical inspection will be described with reference to FIG. The optical axis of the light splitting deflection mirror is moved from the coincident position of the inspection optical axis 20 by the rotary knob 46 of the one-axis stage 41 to the third epi-illumination spherical surface inspection device 92b to the non-masking inspection light beam emitted from the inspection member 12. The position is only required to be the same as the principle of the transmissive illumination inspection device of Patent Document 1, and the focus of the member to be inspected is matched with the circular light source image to perform the transmission illumination inspection, and the portion of the left side of the inspection optical axis 20 of Fig. 7 is examined. It is a schematic block diagram of a transmission illumination check.

The common specification of the epi-illumination illumination spherical inspection device 91 and the epi-illumination illumination spherical inspection device 92 is shown in Fig. 6, which is a second embodiment of the present invention, and has a small radius of curvature and a large spherical angle as in the first embodiment of the present invention. When the inspection spherical surface 1b is inspected, the epi-illumination illumination spherical inspection device 91 of the second epi-illumination unit 91d is used. FIG. 7 is a third embodiment of the present invention, in which the large spherical curvature small spherical surface is inspected by the spherical surface 1b. The epi-illumination illumination spherical inspection device 92 of the third epi-illumination unit 92b of the present invention uses both the transmission and light-emitting unit 91f and the core adjustment device 91b described in Fig. 6.

The configuration of the epi-illumination inspection indicates that the two-group epi-illumination unit can be attached to and detached from the counter plate 43 of the uni-axis stage 41, and the second epi-projection unit 91d uses the objective lens 3, but the third epi-projection unit 92b is not used. The objective lens, the two sets of epi-projection units can be fixed to the same shape of the counter plate 43 for conversion, and the position of the member to be inspected 1 after the conversion is the same; therefore, the second epi-projection unit using the objective lens 3 is required. The spacer 47 is attached, and the third epi-illumination unit that does not use the objective lens 3 needs to unload the spacer 47.

It is explained that the epi-projection unit is inspecting the loading and unloading of the optical axis. At the time of the epi-illumination observation, the light splitting deflection mirror 7 of the epi-projection unit moves at a position coincident with the inspection optical axis 20. When observing, since it is not necessary to use the objective lens and the epi-illumination unit, the epi-projection unit must be removed to the inspection beam that does not block the inspection member 1, so that the position of the image observation unit 90c close to the inspection material is not interfered.

In the present paragraph, when the epi-illumination illumination inspection device 92 is switched from the epi-illumination inspection to the illumination spherical inspection, the projection-receiving member mounting table 39 is replaced with the transmission projection lens frame 45 of the transmissive illumination unit through the projection lens 45, and the transmission projection lens frame 45 is used. The design of the optical lens frame 45 is not limited to transmission observation, and can be easily attached and detached by the transmission of the objective lens group 90e at the time of episode observation. In addition, since the placement position of the member to be inspected at the time of the transmission illumination inspection is the same as that at the time of the entrance illumination inspection, the core adjustment of the member 12 to be inspected is the same as the member 1 to be inspected during the observation of the projection, and the inner edge of the opening is used. The aperture winch 31a adjusts the core thickness.

The core adjusting unit 91b is concentric with the inspection optical axis 20, and includes an opening and closing lever 31c, a diaphragm skein 31a with a fixing screw 31b, a rotation frame 33 for rotating the member 1 to be inspected, and a rotating frame 33 which can be adjusted by screws. Therefore, the outer diameter end surface of the member to be inspected 1 and the position of the aperture piece 31a are aligned, and the above module is placed in the height adjustment frame 35 for adjusting the height of the member to be inspected, and the others include The member-mounted table 38 having a slightly smaller inner diameter than the outer diameter of the member to be inspected is used to mount the member to be inspected, and the eccentric movement frame 32 for eccentric fine adjustment can adjust the ball plunger 34 of the eccentric movement frame 32. An eccentric frame 37 of the adjustment knob 36 is attached. The core of the member to be inspected is adjusted to be coarsely eccentrically adjusted at the inner edge of the opening of the apertured piece 31a, and then finely adjusted by the knob 36, so that the optical axis of the member to be inspected can be finely adjusted to the inspection optical axis, and the rotation function is to discriminate the image. Defects and optical ghosts are used when similar.

The device of the present invention can perform the transmission illumination inspection and the epi-illumination inspection, and is suitable for the surface of a spherical or aspherical lens having a large diameter, a radius of curvature and a spherical angle, and a surface of a lens, a steel ball, or the like for forming a lens. Spherical inspection of the parts to be inspected such as dirt and corrugation, and overcomes the shortcomings of the prior art documents.

The detailed description of the preferred embodiments of the present invention is intended to be construed as the invention The patent scope of this case.

In summary, the case is innovative in terms of technical ideas, and also has multiple functions that are not in the prior art. It has fully complied with the statutory invention patent requirements of novelty and progressiveness, and has filed a patent application according to law. You are requested to approve the invention patent. The application is to invent the invention, and it is a matter of feeling.

1‧‧‧Examined materials

1a‧‧‧Surveyed spherical curvature center

1b‧‧‧Checked sphere

1c‧‧‧Checked spherical center

3‧‧‧Contact objective

3a‧‧‧Circular light source image

3b‧‧‧Contact objective side focus

3c‧‧‧One image or one flat image

3d‧‧‧Contact lens mounting plate

3e‧‧‧Support materials

3f‧‧‧Adapter box

3g‧‧‧Contact lens frame

3h‧‧‧Selecting the main point of the object side

3i‧‧‧ receiving mirror side main point

3j‧‧‧ Mirror image side focus

4‧‧‧like relay lens

5‧‧‧ imaging lens

6‧‧‧Photographic unit

6a‧‧‧ secondary image

7‧‧‧Light splitting deflection mirror

8a‧‧‧ Collimating lens

11‧‧‧Circular lighting unit

20‧‧‧Check the optical axis

21‧‧‧Projection axis

30‧‧‧ zoom lens

39‧‧‧Under the inspection of the material placement platform

40‧‧‧ loading plate

90‧‧‧Underward illumination spherical inspection device

90a‧‧‧Inspected materials placed on mobile stations

90b‧‧‧ Mirror support desk

90c‧‧‧ like observation unit

90d‧‧‧First epi-projection unit

90e‧‧‧ Sighting Group A

91aa‧‧‧second projection lens unit

Claims (16)

A spherical inspection device capable of performing epi-illumination inspection on a part of the object to be inspected, including a spherical surface or an aspherical spherical surface, which is required for the image of the above-mentioned spherical surface to be nearly doubled as a telecentric optical real image or virtual image. The objective lens group with different focal lengths or different numbers of openings; the first objective lens and the remaining objective lens selected in the middle of the above objective lens group can be coaxially mounted on the support table of the objective lens; the detected component is placed on the mobile station, and can be placed for inspection The member moves along the objective lens to check the optical axis; the secondary image after the image relay is imaged by the first objective lens, whether the object side is the image side or the imaging side, and both the relay lens and the imaging lens are a combination having a near telecentric optical relationship, a camera disposed at a secondary imaging position of the imaging lens, a display displaying a camera video signal, and an image observation unit movable along the inspection optical axis; Between the objective lens and the image relay lens, or between the image relay lens and the imaging lens, a light splitting deflection mirror is mounted to generate the inspection An optical axis orthogonal to the axis, that is, a circular light source, a first light projecting lens unit, and the above-described light splitting deflection mirror are disposed on the light projecting axis, and the light beam formed by the first light projecting lens unit is propagated through the light splitting deflecting mirror to The first objective lens, and a first epi-projection unit capable of generating a circular light source image at a focus position of the first objective lens, such that the circular light source size and the number of openings for illuminating the detected component, that is, the illumination beam diameter The value is changed. The spherical inspection device according to claim 1, wherein the first epi-projection unit is disposed between the image relay lens and the first objective lens, the first of the first epi-projection unit Projection lens unit, package a second light projecting lens unit including a collimating lens that is confocal with the circular light source, and the non-focus beam formed by the second light projecting lens unit propagates through the light splitting deflecting mirror to the first objective lens. The spherical inspection apparatus according to claim 1, wherein the first epi-projection unit is disposed between the image relay lens and the imaging lens, the first of the first epi-projection unit a light projecting lens unit including a collimating lens that is confocal with the circular light source and a light projecting lens that generates a circular light source image, and a third light projecting lens unit that generates the circular light source projected thereon The confocal position of the image relay lens, the non-focus beam propagates through the light splitting deflecting mirror and the image relay lens to the first objective lens. The spherical inspection device according to any one of the preceding claims, wherein the first objective lens generates the circular light source image to illuminate the size of the circular light source illumination beam of the material to be inspected In the range of 0.005-0.05. The spherical inspection device according to any one of claims 1 to 3, wherein the imaging position of the circular light source generated by each of the objective lens groups is the same as the focus position of the objective lens. The spherical inspection device according to any one of claims 1 to 3, wherein each of the objects to be inspected in the pair of objective lenses has the same image position. The spherical inspection device according to any one of claims 1 to 3, wherein the objective lens support is aligned with the inspection optical axis and is detachable. The spherical inspection device of claim 2, wherein the second epi-projection unit and the first epi-projection unit are exchangeable for loading and unloading The spherical inspection device includes the circular light source, the second light projecting lens unit, the light splitting deflecting mirror, and a second objective lens; and the second epi-illuminating unit is disposed between the image relay lens and the component to be inspected The second epi-illumination unit, the circular light source, the second projection lens unit and the optical splitting deflection mirror are coaxially mounted on the objective lens mounting plate, that is, the second objective lens is coaxially mounted with the inspection optical axis. of. The spherical inspection device according to claim 8, wherein the second epi-illumination unit is detachably mountable on a shaft stage and movable along the projection axis to coincide with the inspection optical axis. The spherical inspection device of claim 7, wherein: the third epi-projection unit and the first epi-projection unit are interchangeably mounted; the third epi-projection unit is disposed in the image relay lens and When the components are in contact with each other, the third epi-illumination unit is disposed in the focusless light beam generated by the collimator lens and the collimator lens in accordance with the focal position of the circular light source disposed on the projection axis, and includes The number of openings for loading or unloading or the fourth projecting light projecting unit of the alternative light projecting lens in the alternative light projecting lens group is formed integrally; the third epi-illuminating unit is the circular light source and the fourth light projecting The combination of the unit and the optical splitting deflection mirror are coaxially mounted on the objective lens mounting plate of the auxiliary rail, and can be operated to move on the optical projection axis; the third epi-illumination unit is the circular light source and the fourth light projecting unit Combining, the light splitting deflection mirror moves along the guide rail on the light projecting axis, and the circular light source image of the exchangeable light projecting lens is propagated to the inspection optical axis through the light splitting deflection mirror and can be The above inspection optical axis moves. The spherical inspection device according to claim 10, wherein the above The third epi-illumination unit is detachably attached to a shaft stage that moves along the projection axis and coincides with the inspection optical axis. The spherical inspection device according to claim 11, wherein the image observation unit includes the image relay lens and the imaging lens disposed with a zoom lens optical system, and the image relay lens includes a focal length or a number of openings Different image-receiving lenses, including different focal lengths or apertures, are detachable. The spherical inspection device according to claim 12, wherein the first to third epi-illumination units are alternatively arranged, and the opposite side of the transmissive unit including the light-emitting lens is coupled to the first to the first The three-spoke projection unit is configured to be placed between the inspection components, and the epi-illumination spherical inspection device can be selected as an epi-illumination spherical inspection or a transmissive illumination spherical inspection according to the requirements of the inspection surface. The spherical inspection device according to claim 4, wherein the imaging position of the circular light source generated by each of the objective lens groups is the same as the focus position of the objective lens. The spherical inspection device according to the fourth aspect of the invention, wherein the image-detecting part generated by each of the objective lenses in the pair of objective lenses has the same image position. The spherical inspection device according to claim 4, wherein the objective lens support is aligned with the inspection optical axis and is detachable.