TWI587546B - Illumination structure having multilayer lens and manufacturing method thereof - Google Patents

Illumination structure having multilayer lens and manufacturing method thereof Download PDF

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TWI587546B
TWI587546B TW104110486A TW104110486A TWI587546B TW I587546 B TWI587546 B TW I587546B TW 104110486 A TW104110486 A TW 104110486A TW 104110486 A TW104110486 A TW 104110486A TW I587546 B TWI587546 B TW I587546B
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lens
sub
light
lenses
lens structure
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TW104110486A
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TW201635598A (en
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陳永如
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點金石股份有限公司
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具有多層透鏡之發光結構及其製造方法 Light-emitting structure with multilayer lens and manufacturing method thereof

本發明為一種具有多層透鏡之發光結構及其製造方法,特別是一種利用多層透鏡有效分配並設計出光角度之發光結構及其製造方法。 The invention relates to a light-emitting structure with a multilayer lens and a manufacturing method thereof, in particular to a light-emitting structure for efficiently distributing and designing a light angle by using a multilayer lens and a manufacturing method thereof.

在半導體發光元件中,例如是發光二極體(Light Emitting Diode,LED)或有機發光二極體(Organic Light Emitting Diode,OLED)都可以再配置光學透鏡,藉此利用光學透鏡的二次光學原理調整其發射光的光路徑方向。 In the semiconductor light emitting device, for example, a light emitting diode (LED) or an organic light emitting diode (OLED), the optical lens can be reconfigured, thereby utilizing the secondary optical principle of the optical lens. Adjust the direction of the light path of the emitted light.

以發光二極體為例,發光二極體晶片的出光角度一般僅約為120度,其光照範圍受到相當的限制,並且因為發光二極體晶片的發射光主要都集中於其光軸處(即發光二極體的中心處),因此造成中心處與周邊處的光亮度不均勻,而在發光二極體晶片上裝設光學透鏡便可改善發光二極體光源的出光角度及其發射光的均勻度,並可以針對光形形狀加以設計。 Taking the light-emitting diode as an example, the light-emitting diode wafer generally has an exit angle of only about 120 degrees, and the illumination range thereof is considerably limited, and since the light emitted from the light-emitting diode wafer is mainly concentrated on the optical axis thereof ( That is, the center of the light-emitting diode), so that the brightness of the light at the center and the periphery is not uniform, and the optical lens on the light-emitting diode wafer can improve the light-emitting angle of the light-emitting diode light source and the emitted light thereof. Uniformity and can be designed for light shapes.

然而,現在大多是將發光二極體晶片裝設在機構載 體中,再將光學透鏡封裝結合於機構載體上,並安裝在發光二極體晶片的上方,以完成發光二極體晶片的封裝;又或是在已封裝完成的發光二極體發光結構的出光路徑上分別設置各式光學透鏡,以改變發光二極體發光結構的出光角度及光形形狀。 However, most of the current LED photonics are mounted on the mechanism. In the body, the optical lens package is bonded to the mechanism carrier and mounted on the LED chip to complete the package of the LED chip; or in the packaged LED structure Various optical lenses are respectively disposed on the light-emitting path to change the light-emitting angle and the light-shaped shape of the light-emitting diode light-emitting structure.

但是,以現有方式製造的發光結構因使用了多個獨立且分離的光學透鏡,造成發光結構的體積難以縮小,並不符合現有微型化發光結構的使用趨勢。另外,因為在發光二極體晶片發射光的光路徑上經過了具有不同折射率之介質,造成大量的光損失,也同樣也不符合實際的使用需求。對此,如何進一步縮小發光結構的體積,並降低光損失即為本領域相關從業者極欲改善之課題。 However, the light-emitting structure manufactured in the conventional manner uses a plurality of independent and separate optical lenses, which makes it difficult to reduce the volume of the light-emitting structure, and does not conform to the trend of use of the existing miniaturized light-emitting structure. In addition, since a medium having a different refractive index is passed through the light path of the light emitted from the LED chip, a large amount of light loss is caused, which also does not meet the actual use requirements. In this regard, how to further reduce the volume of the light-emitting structure and reduce the light loss is a subject that the practitioners in the field are eager to improve.

本發明為一種具有多層透鏡之發光結構及其製造方法,藉由將多層透鏡直接堆疊設置於發光元件上,將可避免發光元件的發射光經過空氣後再經過透鏡而造成的光損失,並利用每層透鏡中的子透鏡的結構設計並加以分配發光結構的出光角度,以符合各種使用需求。 The invention relates to a light-emitting structure with a multilayer lens and a manufacturing method thereof. By directly stacking a multilayer lens on a light-emitting element, light loss caused by the emitted light of the light-emitting element passing through the air and then passing through the lens can be avoided and utilized. The structure of the sub-lens in each layer of lens is designed and assigned to the light-emitting angle of the light-emitting structure to meet various application requirements.

本發明提供一種具有多層透鏡之發光結構,其包括:一發光元件;一層第一透鏡結構,其係直接覆蓋形成於發光元件表面,且第一透鏡結構具有排列成陣列之複數個第一子透鏡;以及一層第二透鏡結構,其係直接覆蓋形成於第一透鏡結構,第二透鏡結構具有排列成陣列之複數個第二子透鏡,並且每一第二子透鏡與對應之第一子透鏡具有相同之光軸。 The present invention provides a light emitting structure having a multilayer lens comprising: a light emitting element; a first lens structure directly overlying the surface of the light emitting element, and the first lens structure having a plurality of first sub-lenses arranged in an array And a second lens structure directly formed on the first lens structure, the second lens structure having a plurality of second sub-lenses arranged in an array, and each of the second sub-lenses and the corresponding first sub-lens has The same optical axis.

本發明又提供一種具有多層透鏡之發光結構製造方法,其包括下列步驟:提供一發光元件,發光元件上定義有至少一定位點;形成一層第一透鏡結構於發光元件表面,其係以定位點作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於發光元件上形成第一透鏡結構,且第一透鏡結構具有排列成陣列之複數個第一子透鏡;以及形成一層第二透鏡結構於第一透鏡結構表面,以定位點作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於第一透鏡結構表面上形成第二透鏡結構,第二透鏡結構具有排列成陣列之複數個第二子透鏡,且每一第二子透鏡與對應之第一子透鏡具有相同之光軸。 The invention further provides a method for fabricating a light-emitting structure having a multilayer lens, comprising the steps of: providing a light-emitting element having at least one positioning point defined thereon; forming a first lens structure on the surface of the light-emitting element, the positioning point being As a reference point, a first lens structure is formed on the light emitting element by a dicing method, a nanoimprint method, a mold forming method or a 3D printing method, and the first lens structure has a plurality of first sub-lenses arranged in an array; Forming a second lens structure on the surface of the first lens structure, using the positioning point as a reference point, forming a second lens structure on the surface of the first lens structure by a cutting method, a nanoimprint method, a mold forming method or a 3D printing method The second lens structure has a plurality of second sub-lenses arranged in an array, and each of the second sub-lenses has the same optical axis as the corresponding first sub-lens.

本發明再提供一種具有多層透鏡之發光結構,其包括:一發光元件,發光元件具有一中央軸;一層第一透鏡結構,其係直接覆蓋形成於發光元件表面,且第一透鏡結構具有至少一第一子透鏡,第一子透鏡之結構係以中央軸對稱分佈;以及一層第二透鏡結構,其係直接覆蓋形成於第一透鏡結構,第二透鏡結構具有至少二第二子透鏡,該些第二子透鏡之結構係以中央軸對稱分佈,且每一第二子透鏡之透鏡曲率半徑小於第一子透鏡之透鏡曲率半徑。 The present invention further provides a light emitting structure having a multilayer lens, comprising: a light emitting element having a central axis; a first lens structure directly covering the surface of the light emitting element, and the first lens structure having at least one a first sub-lens, a structure of the first sub-lens is symmetrically distributed along a central axis; and a second lens structure directly formed on the first lens structure, the second lens structure having at least two second sub-lenses, The structures of the second sub-lenses are symmetrically distributed along the central axis, and the lens curvature radius of each of the second sub-lenses is smaller than the lens curvature radius of the first sub-lens.

本發明更提供一種具有多層透鏡之發光結構,其包括:一發光元件,發光元件具有一中央軸;一層第一透鏡結構,其係直接覆蓋形成於發光元件表面,且第一透鏡結構具有至少二第一子透鏡,該些第一子透鏡之結構係以中央軸對稱分佈;以及一層第二透鏡結構,其係直接覆蓋形成於第一透鏡結構,第二透鏡結構具有至少一第二子透鏡,第二子透鏡之結構係以中央軸對 稱分佈,且第二子透鏡之透鏡曲率半徑大於每一第一子透鏡之透鏡曲率半徑。 The present invention further provides a light emitting structure having a multilayer lens, comprising: a light emitting element having a central axis; a first lens structure directly covering the surface of the light emitting element, and the first lens structure having at least two a first sub-lens, the structures of the first sub-lenses are symmetrically distributed along a central axis; and a second lens structure directly formed on the first lens structure, the second lens structure having at least one second sub-lens, The second sub-lens is constructed with a central axis The distribution is called, and the lens radius of curvature of the second sub-lens is greater than the radius of curvature of the lens of each of the first sub-lenses.

藉由本發明的實施,至少可達到下列進步功效:一、可以設計發光結構的出光角度,使其達成特定的發光光形,以符合各種使用需求;以及二、可減少光損失,以提高出光亮度及均勻度。 By the implementation of the present invention, at least the following advancements can be achieved: 1. The light-emitting angle of the light-emitting structure can be designed to achieve a specific light-emitting shape to meet various use requirements; and second, the light loss can be reduced to improve the light-emitting brightness. And uniformity.

為了使任何熟習相關技藝者了解本發明之技術內容並據以實施,且根據本說明書所揭露之內容、申請專利範圍及圖式,任何熟習相關技藝者可輕易地理解本發明相關之目的及優點,因此將在實施方式中詳細敘述本發明之詳細特徵以及優點。 In order to make those skilled in the art understand the technical content of the present invention and implement it, and according to the disclosure, the patent scope and the drawings, the related objects and advantages of the present invention can be easily understood by those skilled in the art. The detailed features and advantages of the present invention will be described in detail in the embodiments.

100‧‧‧發光結構 100‧‧‧Lighting structure

20‧‧‧發光元件 20‧‧‧Lighting elements

21‧‧‧透光基材 21‧‧‧Light transmissive substrate

211‧‧‧基礎子透鏡 211‧‧‧Basic sub-lens

22‧‧‧臨時基板 22‧‧‧Temporary substrate

22a‧‧‧散熱基板 22a‧‧‧heating substrate

23‧‧‧發光二極體晶粒 23‧‧‧Light Emitting Diode Grains

24‧‧‧中央軸 24‧‧‧Central axis

25‧‧‧定位點 25‧‧‧Location points

40‧‧‧第一透鏡結構 40‧‧‧First lens structure

41‧‧‧第一子透鏡 41‧‧‧First sub-lens

60‧‧‧第二透鏡結構 60‧‧‧second lens structure

61‧‧‧第二子透鏡 61‧‧‧Second sub-lens

80‧‧‧第三透鏡結構 80‧‧‧ third lens structure

81‧‧‧第三子透鏡 81‧‧‧ third sub-lens

L‧‧‧光軸 L‧‧‧ optical axis

90‧‧‧雷射裝置 90‧‧‧ Laser device

91‧‧‧母模模板 91‧‧‧Female template

92‧‧‧3D列印機台 92‧‧‧3D printing machine

第1圖為本發明實施例之一種使用半導體晶圓作為發光元件之示意圖;第2A圖為本發明實施例之一種具有多層透鏡發光結構之立體示意圖;第2B圖為沿第2A圖中A-A剖線之剖視示意圖;第3A圖為本發明實施例之另一種具有多層透鏡發光結構之立體示意圖;第3B圖為沿第3A圖中B-B剖線之剖視示意圖;第4圖為本發明實施例之一種使用臨時基板或散熱基板承載多個發光二極體晶粒作為發光元件之示意圖;第5A圖為本發明實施例之一種已移除臨時基板之具有多層透鏡發 光結構之立體示意圖;第5B圖為沿第5A圖中C-C剖線之剖視示意圖;第5C圖為本發明實施例之一種具有多層透鏡發光結構之剖視示意圖;第6圖為本發明實施例之再一種具有多層透鏡發光結構之剖視示意圖;第7A圖為本發明實施例之一種僅具有第一透鏡結構之發光元件示意圖;第7B圖為沿第7A圖中D-D剖線之剖視示意圖;第7C圖為第7A圖中之發光元件加上第二透鏡結構之示意圖;第7D圖為沿第7C圖中E-E剖線之剖視示意圖;第7E圖為第7D圖中之發光元件加上第三透鏡結構之第一實施態樣圖;第7F圖為第7D圖中之發光元件加上第三透鏡結構之第二實施態樣圖;第7G圖為第7D圖中之發光元件加上第三透鏡結構之第三實施態樣圖;第8A圖為本發明實施例之另一種僅具有第一透鏡結構之發光元件示意圖;第8B圖為沿第8A圖中F-F剖線之剖視示意圖;第8C圖為第8A圖中之發光元件加上第二透鏡結構之示意圖;第8D圖為沿第8C圖中G-G剖線之剖視示意圖;第8E圖為第8D圖中之發光元件加上第三透鏡結構之第一實施態樣圖; 第8F圖為第8D圖中之發光元件加上第三透鏡結構之第二實施態樣圖;第9圖為本發明實施例之又另一種具有多層透鏡發光結構之剖視示意圖;第10圖為本發明實施例之又再一種具有多層透鏡發光結構之剖視示意圖;第11圖為本發明實施例之再另一種具有多層透鏡發光結構之剖視示意圖;第12圖為本發明實施例之又再另一種具有多層透鏡發光結構之剖視示意圖;第13圖為本發明實施例之一種具有多層透鏡之發光結構製造方法流程圖;第14圖為本發明實施例之一種具有多個定位點之發光元件示意圖;第15圖為本發明實施例之一種使用雷射切割法製作透鏡結構之示意圖;第16A圖及第16B圖為本發明實施例之一種利用奈米壓印法製作透鏡結構之示意圖;以及第17圖為本發明實施例之一種使用3D列印法製作透鏡結構之示意圖。 1 is a schematic view showing a semiconductor wafer as a light-emitting element according to an embodiment of the present invention; FIG. 2A is a schematic perspective view showing a light-emitting structure having a multilayer lens according to an embodiment of the present invention; and FIG. 2B is a cross-sectional view taken along line AA of FIG. 2A. 3 is a schematic perspective view of another embodiment of the present invention having a multilayer lens light-emitting structure; FIG. 3B is a cross-sectional view taken along line BB of FIG. 3A; FIG. 4 is an embodiment of the present invention; A schematic diagram of using a temporary substrate or a heat dissipation substrate to carry a plurality of light emitting diode crystal grains as a light emitting element; FIG. 5A is a multilayer lens lens with a temporary substrate removed according to an embodiment of the present invention; 3B is a cross-sectional view taken along line CC of FIG. 5A; FIG. 5C is a cross-sectional view showing a multi-layer lens light-emitting structure according to an embodiment of the present invention; FIG. 6 is an embodiment of the present invention A further schematic cross-sectional view of a multi-layer lens light-emitting structure; FIG. 7A is a schematic view of a light-emitting element having only a first lens structure according to an embodiment of the present invention; and FIG. 7B is a cross-sectional view taken along line DD of FIG. 7A; Figure 7C is a schematic view of the light-emitting element of Figure 7A plus a second lens structure; Figure 7D is a cross-sectional view taken along line EE of Figure 7C; and Figure 7E is a light-emitting element of Figure 7D. A first embodiment of the third lens structure is added; FIG. 7F is a second embodiment of the illuminating element plus the third lens structure in FIG. 7D; and FIG. 7G is a illuminating element in the 7D A third embodiment of the third lens structure is added; FIG. 8A is a schematic view of another light-emitting element having only the first lens structure according to the embodiment of the present invention; and FIG. 8B is a cross-sectional view taken along line FF of FIG. 8A. Figure 8C is the light-emitting component of Figure 8A plus 2D is a schematic cross-sectional view taken along line G-G of FIG. 8C; FIG. 8E is a first embodiment of a light-emitting element plus a third lens structure in FIG. 8D; FIG. 8F is a second embodiment of the light-emitting element plus the third lens structure in FIG. 8D; FIG. 9 is a cross-sectional view showing another light-emitting structure having a multilayer lens according to an embodiment of the present invention; FIG. FIG. 11 is a cross-sectional view showing another embodiment of a light-emitting structure having a multilayer lens according to an embodiment of the present invention; FIG. 11 is a cross-sectional view showing another embodiment of a light-emitting structure having a multilayer lens according to an embodiment of the present invention; FIG. 13 is a cross-sectional view showing a method for fabricating a light-emitting structure having a multilayer lens according to an embodiment of the present invention; and FIG. 14 is a view showing a plurality of anchor points according to an embodiment of the present invention; FIG. 15 is a schematic view showing a lens structure using a laser cutting method according to an embodiment of the present invention; FIGS. 16A and 16B are diagrams showing a lens structure using a nanoimprint method according to an embodiment of the present invention; FIG. 17 is a schematic view showing a lens structure produced by using a 3D printing method according to an embodiment of the present invention.

如第1圖至第2B圖所示,本實施例為一種具有多層透鏡之發光結構100,其包括:一發光元件20;一層第一透鏡結構40; 以及一層第二透鏡結構60。 As shown in FIG. 1 to FIG. 2B, the embodiment is a light-emitting structure 100 having a multilayer lens, comprising: a light-emitting element 20; a first lens structure 40; And a second lens structure 60.

如第1圖所示,發光元件20可以是一半導體晶圓,例如是發光二極體晶圓、有機發光二極體晶圓或雷射晶圓等。於以下圖式中為了便於解說,可能僅繪製出半導體晶圓的一部份,熟知該項技術者應可瞭解並將以下各實施例或實施態樣中技術內容施作於未切割前的半導體晶圓的整體表面上。 As shown in FIG. 1, the light-emitting element 20 can be a semiconductor wafer, such as a light-emitting diode wafer, an organic light-emitting diode wafer, or a laser wafer. In the following figures, for convenience of explanation, only a part of the semiconductor wafer may be drawn, and those skilled in the art should understand and apply the technical contents of the following embodiments or embodiments to the semiconductor before uncutting. On the entire surface of the wafer.

如第2A圖及第2B圖所示,第一透鏡結構40直接覆蓋於發光元件20表面,可讓發光元件20的發射光直接入射至第一透鏡結構40中以減少光損失,其中第一透鏡結構40具有排列成陣列之複數個第一子透鏡41,並且該些第一子透鏡41彼此相鄰。每一第一子透鏡41的結構尺寸皆完全相同,並且其透鏡直徑可以是200微米以下,其透鏡厚度亦可為200微米以下。第一子透鏡41的形狀可以是凹透鏡結構、凸透鏡結構或立體幾何結構,以配合不同的使用需求進行搭配選用。 As shown in FIGS. 2A and 2B, the first lens structure 40 directly covers the surface of the light-emitting element 20, and the emitted light of the light-emitting element 20 can be directly incident into the first lens structure 40 to reduce light loss, wherein the first lens The structure 40 has a plurality of first sub-lenses 41 arranged in an array, and the first sub-lenses 41 are adjacent to each other. Each of the first sub-lens 41 has the same structural size, and its lens diameter may be 200 micrometers or less, and the lens thickness may be 200 micrometers or less. The shape of the first sub-lens 41 may be a concave lens structure, a convex lens structure or a three-dimensional geometric structure to match the different use requirements.

第二透鏡結構60,其係直接覆蓋並堆疊於第一透鏡結構40上。第二透鏡結構60同樣具有排列成陣列之複數個第二子透鏡61,並且每一第二子透鏡61係垂直堆疊於一第一子透鏡41上,以使得每一第二子透鏡61與對應之第一子透鏡41具有相同之光軸L。該些第二子透鏡61彼此相鄰,並且每一第二子透鏡61的結構尺寸完全相同,其透鏡直徑可以是200微米以下,其透鏡厚度亦可為200微米以下。第二子透鏡61的形狀可以是凹透鏡結構、凸透鏡結構或立體幾何結構,與第一子透鏡41的形狀相互搭配後,可以在發光元件20的發射光於離開發光元件20時,使其聚焦或發散,進而根據光學設計的原理,設計並分配發光結構100的出光角 度,使其達成特定的發光光形。此外,第二子透鏡61也可與第一子透鏡41具有相同或不同的透鏡曲率半徑。 The second lens structure 60 is directly covered and stacked on the first lens structure 40. The second lens structure 60 also has a plurality of second sub-lenses 61 arranged in an array, and each of the second sub-lenses 61 is vertically stacked on a first sub-lens 41 such that each second sub-lens 61 corresponds to The first sub-lens 41 has the same optical axis L. The second sub-lenses 61 are adjacent to each other, and each of the second sub-lenses 61 has the same structural size, and the lens diameter may be 200 micrometers or less, and the lens thickness may be 200 micrometers or less. The shape of the second sub-lens 61 may be a concave lens structure, a convex lens structure or a three-dimensional geometric structure. After the shape of the first sub-lens 41 is matched with each other, the emitted light of the light-emitting element 20 may be focused or emitted when leaving the light-emitting element 20 . Diverging, and then designing and distributing the exit angle of the light-emitting structure 100 according to the principle of optical design Degree to achieve a specific illuminating light shape. Further, the second sub-lens 61 may have the same or different lens curvature radius as the first sub-lens 41.

如第3A圖及第3B圖所示,於另一實施例中,發光元件20還可進一步包括一層第三透鏡結構80,其係直接覆蓋於第二透鏡結構60上。第三透鏡結構80亦具有排列成陣列之複數個第三子透鏡81,並且每一第三子透鏡81與對應之第二子透鏡61及第一子透鏡41具有相同之光軸L。該些第三子透鏡81彼此相鄰,並且每一第三子透鏡81的結構尺寸完全相同,其透鏡直徑可以是200微米以下,其透鏡厚度亦可為200微米以下。第三子透鏡81的形狀也可以是凹透鏡結構、凸透鏡結構或立體幾何結構。又於另一實施例中,當然也可繼續於第三透鏡結構80上連續堆疊多層透鏡結構,進而達成所需的光學設計。此外,每一第三子透鏡81也可以與第一子透鏡41及第二子透鏡61具有相同或不同的透鏡曲率半徑。 As shown in FIGS. 3A and 3B, in another embodiment, the light emitting element 20 may further include a third lens structure 80 that directly covers the second lens structure 60. The third lens structure 80 also has a plurality of third sub-lenses 81 arranged in an array, and each of the third sub-lenses 81 has the same optical axis L as the corresponding second sub-lens 61 and the first sub-lens 41. The third sub-lenses 81 are adjacent to each other, and each of the third sub-lens 81 has the same structural size, and the lens diameter may be 200 micrometers or less, and the lens thickness may be 200 micrometers or less. The shape of the third sub-lens 81 may also be a concave lens structure, a convex lens structure or a solid geometry. In yet another embodiment, it is of course also possible to continue to stack the multilayer lens structures on the third lens structure 80 to achieve the desired optical design. In addition, each of the third sub-lenses 81 may have the same or different lens curvature radius as the first sub-lens 41 and the second sub-lens 61.

前述立體幾何結構可以是三角錐結構,藉由在半導體晶圓上排列形成多個三角錐結構,可以達到類似光柵之光學效果。 The aforementioned three-dimensional geometric structure may be a triangular pyramid structure, and an optical effect similar to a grating can be achieved by arranging a plurality of triangular pyramid structures on a semiconductor wafer.

前述第一透鏡結構40、第二透鏡結構60及第三透鏡結構80的材質可以選用熱固化光學膠體、光固化光學膠體或光學玻璃膠,並且配合設置的位置,第一透鏡結構40可選用其折射率介於空氣與發光元件20之間的材質,而第二透鏡結構60可選用其折射率介於空氣與第一透鏡結構40之間的材質,第三透鏡結構80則可選用其折射率介於空氣與第二透鏡結構60之間的材質。也就是說,可以使用讓第一、第二及第三透鏡結構40、60、80之折射率逐漸遞減的材質,以破壞介面間的全反射進而提高發光結構100 的出光量。 The materials of the first lens structure 40, the second lens structure 60 and the third lens structure 80 may be selected from a heat curing optical colloid, a photocurable optical colloid or an optical glass adhesive, and the first lens structure 40 may be used in conjunction with the disposed position. The second lens structure 60 may be made of a material having a refractive index between the air and the light-emitting element 20, and the second lens structure 60 may be made of a material having a refractive index between the air and the first lens structure 40. A material between the air and the second lens structure 60. That is, a material that gradually decreases the refractive indices of the first, second, and third lens structures 40, 60, 80 can be used to break the total reflection between the interfaces and thereby improve the light-emitting structure 100. The amount of light emitted.

然而,若是相鄰的透鏡結構40、60、80使用了不同材質的膠體製成,其透鏡結構40、60、80之間的結合強度可能不足,因此可在相異材質的第一透鏡結構40、第二透鏡結構60及第三透鏡結構80之間再於相鄰表面塗佈接著劑,以提高其結合強度。 However, if the adjacent lens structures 40, 60, 80 are made of colloids of different materials, the bonding strength between the lens structures 40, 60, 80 may be insufficient, so that the first lens structure 40 of the dissimilar material may be used. An adhesive is applied between the second lens structure 60 and the third lens structure 80 on the adjacent surface to increase the bonding strength.

如第4圖所示,發光元件20除了可以使用半導體晶圓以外,也可以選擇使用包括有臨時基板22及設置於臨時基板22上的複數個發光二極體晶粒23的結構,其中該些發光二極體晶粒23彼此分立並且間隔地排列成一陣列。其中,臨時基板22也可以被置換成散熱基板22a,例如是陶瓷基板、印刷電路板或金屬印刷電路板(Metal Core PCB,MCPCB)。 As shown in FIG. 4, in addition to the semiconductor wafer, the light-emitting element 20 may optionally include a structure including a temporary substrate 22 and a plurality of light-emitting diode crystal grains 23 disposed on the temporary substrate 22, wherein the light-emitting elements 20 are used. The light emitting diode crystal grains 23 are separated from each other and arranged in an array at intervals. The temporary substrate 22 may also be replaced with a heat dissipation substrate 22a, such as a ceramic substrate, a printed circuit board, or a metal printed circuit board (MCPCB).

請同時參考第5A圖及第5B圖,臨時基板22僅在製程中用以乘載發光二極體晶粒23,於完成第一、第二及第三透鏡結構40、60、80之設置後便可移除,最後再沿著發光二極體晶粒23的周圍進行切割(如第5B圖中箭頭所示),又或者是可先進行切割後再移除臨時基板22,以使得於最終成品中每一發光二極體晶粒23上形成有多層透鏡結構,並且每層透鏡結構40、60中多個垂直對應的子透鏡41、61皆具有相同的光軸L。 Referring to FIG. 5A and FIG. 5B simultaneously, the temporary substrate 22 is used to carry the LED die 23 only during the process, after the setting of the first, second and third lens structures 40, 60, 80 is completed. It can be removed, and finally cut along the periphery of the LED die 23 (as indicated by the arrow in FIG. 5B), or the temporary substrate 22 can be removed after cutting, so that the final A multilayer lens structure is formed on each of the light-emitting diode dies 23 in the finished product, and a plurality of vertically corresponding sub-lenses 41, 61 of each of the lens structures 40, 60 have the same optical axis L.

如第5C圖所示,當使用散熱基板22a承載發光二極體晶粒23時,各發光二極體晶粒23則可先經過篩選再排列於散熱基板22a上,如此一來便能根據其發光強度設置於散熱基板22a上的不同位置,藉此可以依照光學設計的需要設計整個發光結構100的發光光形。 As shown in FIG. 5C, when the light-emitting diode 22 is carried by the heat-dissipating substrate 22a, the light-emitting diode dies 23 can be first screened and then arranged on the heat-dissipating substrate 22a, so that The illuminating intensity is set at different positions on the heat dissipation substrate 22a, whereby the illuminating light shape of the entire light emitting structure 100 can be designed in accordance with the needs of the optical design.

如第6圖所示,由於發光元件20是一種半導體發光結 構,而於半導體發光結構中常已具有一透光基材21,且此透光基材21具有良好的透光性,例如是藍寶石基材。對此,可在透光基材21的外表面利用切割法於透光基材21的表面先行製作多個排列成陣列的基礎子透鏡211,其中基礎子透鏡211的形狀可以是凹透鏡結構、凸透鏡結構或立體幾何結構,並且其透鏡直徑可以是200微米以下,其透鏡厚度亦可為200微米以下。前述切割法可例如是雷射切割法、黃光蝕刻曝光法或是任何現有已知之切割或是去除部分透光基材21的方法。 As shown in FIG. 6, since the light emitting element 20 is a semiconductor light emitting junction In the semiconductor light-emitting structure, a light-transmitting substrate 21 is often provided, and the light-transmitting substrate 21 has good light transmittance, such as a sapphire substrate. In this regard, a plurality of basic sub-lenses 211 arranged in an array may be formed on the outer surface of the transparent substrate 21 by a dicing method on the surface of the transparent substrate 21, wherein the shape of the basic sub-lens 211 may be a concave lens structure or a convex lens. The structure or the three-dimensional geometry, and the lens diameter thereof may be 200 micrometers or less, and the lens thickness thereof may be 200 micrometers or less. The foregoing cutting method may be, for example, a laser cutting method, a yellow etching exposure method, or any conventionally known method of cutting or removing a portion of the light-transmitting substrate 21.

具有複數個基礎子透鏡211的透光基材21是位於發光元件20的頂端,而第一、第二及第三透鏡結構40、60、80依序覆蓋於透光基材21表面,以使得每一基礎子透鏡211與對應的第一子透鏡41及第二子透鏡61具有相同的光軸L,或再進一步與對應的第三子透鏡81亦具有相同的光軸L。為了提高基礎子透鏡211與第一透鏡結構40之間的結合強度,基礎子透鏡211與第一透鏡結構40之間的相鄰表面也可以再塗佈有接著劑。 The light-transmitting substrate 21 having a plurality of basic sub-lenses 211 is located at the top end of the light-emitting element 20, and the first, second, and third lens structures 40, 60, 80 are sequentially covered on the surface of the light-transmitting substrate 21, so that Each of the basic sub-lenses 211 has the same optical axis L as the corresponding first sub-lens 41 and second sub-lens 61, or further has the same optical axis L as the corresponding third sub-lens 81. In order to increase the bonding strength between the basic sub-lens 211 and the first lens structure 40, the adjacent surface between the basic sub-lens 211 and the first lens structure 40 may also be coated with an adhesive.

除了使前述各垂直對應的子透鏡皆具有相同的光軸L以外,也可將各層的子透鏡設計為不彼此對應的形式。如第7A圖及第7B圖所示,發光元件20具有一中央軸24,而第一透鏡結構40中的第一子透鏡41則以中央軸24呈對稱分佈覆蓋於發光元件20的表面;如第7C圖及第7D圖所示,第二透鏡結構60則覆蓋於第一透鏡結構40上,並且以發光元件20的中央軸24呈對稱分佈。其中,第一透鏡結構40中可包括至少一個第一子透鏡41,第二透鏡結構60中則可包括至少二第二子透鏡61(例如是四個第二子透鏡61),且第二子透鏡61的透鏡曲率半徑小於第一子透鏡41的透鏡曲率半 徑,另外每一第二子透鏡61的斷面面積還可以小於每一第一子透鏡41的斷面面積。 In addition to the fact that each of the vertically corresponding sub-lenses has the same optical axis L, the sub-lenses of the respective layers may be designed in a form that does not correspond to each other. As shown in FIGS. 7A and 7B, the light-emitting element 20 has a central axis 24, and the first sub-lens 41 of the first lens structure 40 is symmetrically distributed on the surface of the light-emitting element 20 with the central axis 24; As shown in FIGS. 7C and 7D, the second lens structure 60 covers the first lens structure 40 and is symmetrically distributed with the central axis 24 of the light-emitting element 20. The first lens structure 40 may include at least one first sub-lens 41, and the second lens structure 60 may include at least two second sub-lenses 61 (for example, four second sub-lenses 61), and the second sub- The lens has a radius of curvature smaller than that of the first sub-lens 41 The diameter of each of the second sub-lenses 61 may be smaller than the cross-sectional area of each of the first sub-lenses 41.

請再進一步參考第7E圖至第7G圖,發光結構20還可以在第二透鏡結構60上進一步覆蓋一層第三透鏡結構80,第三透鏡結構80具有至少一第三子透鏡81,並且第三子透鏡80之結構同樣以中央軸對稱分佈,並且第三子透鏡81的透鏡曲率半徑大於第二子透鏡61的透鏡曲率半徑,而且第三子透鏡81的斷面面積可以大於第二子透鏡61的斷面面積(如第7E圖所示);或者,第三子透鏡81的透鏡曲率半徑小於第二子透鏡61的透鏡曲率半徑,而且第三子透鏡81的斷面面積還可以小於第二子透鏡61的斷面面積(如第7E圖所示);又或者第三子透鏡81的透鏡曲率半徑等於第二子透鏡61的透鏡曲率半徑,而且第三子透鏡81的斷面面積亦可以等於第二子透鏡61的斷面面積(如第7G圖所示)。 Referring to FIGS. 7E to 7G again, the light emitting structure 20 may further cover the second lens structure 60 with a third lens structure 80, the third lens structure 80 having at least a third sub-lens 81, and a third The structure of the sub-lens 80 is also symmetrically distributed along the central axis, and the lens curvature radius of the third sub-lens 81 is larger than the lens curvature radius of the second sub-lens 61, and the cross-sectional area of the third sub-lens 81 may be larger than the second sub-lens 61. The cross-sectional area of the third sub-lens 81 is smaller than the lens curvature radius of the second sub-lens 61, and the cross-sectional area of the third sub-lens 81 may be smaller than the second The cross-sectional area of the sub-lens 61 (as shown in FIG. 7E); or the lens curvature radius of the third sub-lens 81 is equal to the lens curvature radius of the second sub-lens 61, and the cross-sectional area of the third sub-lens 81 may also be It is equal to the sectional area of the second sub-lens 61 (as shown in Fig. 7G).

如第8A圖及第8B圖所示,第一透鏡結構40中可包括至少二第一子透鏡41(例如是四個第二子透鏡41),而如第8C圖及第8D圖所示,第二透鏡結構60中可包括至少一第二子透鏡61,且第二子透鏡61的透鏡曲率半徑大於第一子透鏡41的透鏡曲率半徑,此外第二子透鏡61的斷面面積還可以大於第一子透鏡41的斷面面積。 As shown in FIGS. 8A and 8B, at least two first sub-lenses 41 (for example, four second sub-lenses 41) may be included in the first lens structure 40, and as shown in FIGS. 8C and 8D, The second lens structure 60 may include at least one second sub-lens 61, and the lens radius of curvature of the second sub-lens 61 is larger than the lens curvature radius of the first sub-lens 41, and the cross-sectional area of the second sub-lens 61 may be greater than The cross-sectional area of the first sub-lens 41.

請再進一步參考第8E圖至第8F圖,發光結構20還可以在第二透鏡結構60上進一步覆蓋一層第三透鏡結構80,第三透鏡結構80具有至少一第三子透鏡81,並且第三子透鏡80之結構同樣以中央軸對稱分佈,並且第三子透鏡81的透鏡曲率半徑可以小於第二子透鏡61的透鏡曲率半徑,而且第三子透鏡81的斷面面積 可以小於第二子透鏡61的斷面面積(如第8E圖所示),又或者第三子透鏡81的透鏡曲率半徑等於第二子透鏡61的透鏡曲率半徑,而且第三子透鏡81的斷面面積還可以等於第二子透鏡61的斷面面積(如第8F圖所示),更或者第三子透鏡81的透鏡曲率半徑亦可以大於第二子透鏡61的透鏡曲率半徑(圖未示)。 Referring to FIGS. 8E-8F, the light emitting structure 20 may further cover the second lens structure 60 with a third lens structure 80, the third lens structure 80 having at least a third sub-lens 81, and a third The structure of the sub-lens 80 is also symmetrically distributed along the central axis, and the lens curvature radius of the third sub-lens 81 may be smaller than the lens curvature radius of the second sub-lens 61, and the sectional area of the third sub-lens 81 It may be smaller than the sectional area of the second sub-lens 61 (as shown in FIG. 8E), or the lens curvature radius of the third sub-lens 81 is equal to the lens curvature radius of the second sub-lens 61, and the third sub-lens 81 is broken. The surface area may be equal to the cross-sectional area of the second sub-lens 61 (as shown in FIG. 8F ), or the lens curvature radius of the third sub-lens 81 may be greater than the lens curvature radius of the second sub-lens 61 (not shown) ).

前述圖式中僅為各種實施態樣的舉例說明,並非用以限制本發明欲實施的範圍,使用者可依其使用需求選用不同的層數的透鏡結構40、60、80以及每一透鏡結構中子透鏡41、61、81的尺寸及形狀,並且前述發光元件20可以是如第1圖所示的半導體晶圓形式的發光元件20,也可以是如第4圖所示的包括臨時基板22或散熱基板22a及排列於其上的發光二極體晶粒23的發光元件20,但為了便於瞭解子透鏡41、61的各種形式態樣,僅在圖式中以發光元件20代表上述各種態樣。另外,在各層子透鏡不彼此對應的情況下,各子透鏡的透鏡直徑及厚度將有可能大於200微米,尤其是在透鏡結構中僅包括一個子透鏡時,也就是說各子透鏡的透鏡直徑或厚度的尺寸將可依需求而有所調整。 The foregoing drawings are merely illustrative of various embodiments, and are not intended to limit the scope of the present invention. The user may select different number of lens structures 40, 60, 80 and each lens structure according to their needs. The size and shape of the neutron lenses 41, 61, 81, and the light-emitting element 20 may be the light-emitting element 20 in the form of a semiconductor wafer as shown in FIG. 1, or may include the temporary substrate 22 as shown in FIG. Or the heat-dissipating substrate 22a and the light-emitting elements 20 of the light-emitting diode dies 23 arranged thereon, but in order to facilitate understanding of various forms of the sub-lenses 41, 61, only the light-emitting elements 20 represent the above various states in the drawings. kind. In addition, in the case where the sub-layer lenses do not correspond to each other, the lens diameter and thickness of each sub-lens will be more than 200 micrometers, especially when only one sub-lens is included in the lens structure, that is, the lens diameter of each sub-lens. Or the size of the thickness will be adjusted according to the needs.

舉例來說,如第9圖所示,可以使用半導體晶圓作為發光元件20,並且設計第一透鏡結構40及第二透鏡結構60的形狀皆為凹透鏡;又如第10圖所示,可以使用臨時基板22或散熱基板22a承載多個發光二極體晶粒23作為發光元件20,並設計第一透鏡結構40的形狀為凸透鏡,第二透鏡結構60的形狀為凹透鏡,而第三透鏡結構80的形狀為立體幾何結構(如三角錐結構)。 For example, as shown in FIG. 9, a semiconductor wafer can be used as the light-emitting element 20, and the shapes of the first lens structure 40 and the second lens structure 60 are designed to be concave lenses; as shown in FIG. 10, it can be used. The temporary substrate 22 or the heat dissipation substrate 22a carries a plurality of light emitting diode crystal grains 23 as the light emitting elements 20, and the shape of the first lens structure 40 is designed as a convex lens, the shape of the second lens structure 60 is a concave lens, and the third lens structure 80 is 80. The shape is a three-dimensional geometry (such as a triangular pyramid structure).

又或者是如第11圖所示,其中第一透鏡結構40具有多個呈凸透鏡形狀的第一子透鏡41,並且依發光元件20的中央軸 呈對稱分佈;第二透鏡結構60僅具有一個呈凸透鏡形狀的第二子透鏡61,並同樣依中央軸呈對稱分佈,另外第二子透鏡61的透鏡曲面半徑可以大於第一子透鏡41的透鏡曲面半徑,而且第二子透鏡61的斷面面積還可以大於第一子透鏡41的斷面面積;第三透鏡結構80則具有多個呈凸透鏡形狀的第三子透鏡81並以中央軸對稱分佈,而且第三子透鏡81的透鏡曲面半徑可以小於第二子透鏡61的透鏡曲面半徑,而且第三子透鏡81的亦可以斷面面積還小於第二子透鏡61的斷面面積。 Or as shown in FIG. 11, wherein the first lens structure 40 has a plurality of first sub-lenses 41 in the shape of a convex lens, and the central axis of the light-emitting element 20 The second lens structure 60 has only one second sub-lens 61 in the shape of a convex lens, and is also symmetrically distributed according to the central axis. In addition, the lens surface radius of the second sub-lens 61 may be larger than that of the first sub-lens 41. The radius of the curved surface, and the sectional area of the second sub-lens 61 may be larger than the sectional area of the first sub-lens 41; the third lens structure 80 has a plurality of third sub-lenses 81 in the shape of a convex lens and is symmetrically distributed along the central axis. Moreover, the lens surface radius of the third sub-lens 81 may be smaller than the lens surface radius of the second sub-lens 61, and the third sub-lens 81 may also have a smaller cross-sectional area than the second sub-lens 61.

更可如第12圖所示,其中第一透鏡結構40具有多個呈凸透鏡形狀的第一子透鏡41,並且依發光元件20的中央軸呈對稱分佈;第二透鏡結構60具有多個呈凹透鏡形狀的第二子透鏡61,並同樣依中央軸呈對稱分佈,另外第二子透鏡61的透鏡曲面半徑可以大於第一子透鏡41的透鏡曲面半徑,而且第二子透鏡61的斷面面積還可以大於第一子透鏡41的斷面面積;第三透鏡結構80則可僅具有一個呈依中央軸呈對稱分佈且凸透鏡形狀的第三子透鏡81,並且第三子透鏡81的透鏡曲面半徑可以大於第二子透鏡61的透鏡曲面半徑,而且第三子透鏡81的斷面面積還可以大於第二子透鏡61的斷面面積。 More preferably, as shown in FIG. 12, wherein the first lens structure 40 has a plurality of first sub-lenses 41 in the shape of a convex lens, and is symmetrically distributed according to a central axis of the light-emitting element 20; the second lens structure 60 has a plurality of concave lenses. The second sub-lens 61 of the shape is also symmetrically distributed according to the central axis, and the radius of the lens surface of the second sub-lens 61 may be larger than the radius of the lens surface of the first sub-lens 41, and the cross-sectional area of the second sub-lens 61 is further The third lens structure 80 may have only a third sub-lens 81 that is symmetrically distributed along the central axis and has a convex lens shape, and the lens radius of the third sub-lens 81 may be The lens surface radius of the second sub-lens 61 is larger than the cross-sectional area of the second sub-lens 61.

雖然圖未示,但也可以選用如第6圖中具有透光基材21的發光元件20,使透光基材21位於發光元件20的頂端,並於透光基材21表面形成有排列成陣列之至少一基礎子透鏡211,第一透鏡結構便覆蓋於透光基材的表面,並且基礎子透鏡211係以中央軸呈對稱分佈,而且基礎子透鏡211的透鏡曲面半徑可以大於或小於第一子透鏡的透鏡曲面半徑,又或者是可以等於第一子透鏡的透 鏡曲面半徑。 Although not shown, a light-emitting element 20 having a light-transmitting substrate 21 as shown in FIG. 6 may be selected such that the light-transmitting substrate 21 is located at the top end of the light-emitting element 20 and is formed on the surface of the light-transmitting substrate 21. At least one basic sub-lens 211 of the array, the first lens structure covers the surface of the light-transmitting substrate, and the basic sub-lens 211 is symmetrically distributed on the central axis, and the lens surface radius of the basic sub-lens 211 may be larger or smaller than the first The radius of the lens surface of a sub-lens may be equal to the transparency of the first sub-lens Mirror surface radius.

藉由上述各實施例之實施,可以設計並分配發光結構100的出光角度。舉例來說,可以使發光結構100的出光角度集中於發光元件20的中央軸24上,以提高發光結構100的光線指向性,可應用於遠距離投射照明燈具等,又或者可以設計出光角度,以使得發光結構100的出光光形呈現左右不對稱的形狀,進而符合特殊的光形角度。更或是可以經過光學設計及各層透鏡結構形狀的選用,使得發光結構100各出光角度的光強度更佳均勻,如此一來便能省去各種均勻光線的元件的使用,可以降低製造成本。 With the implementation of the above embodiments, the light exit angle of the light emitting structure 100 can be designed and distributed. For example, the light-emitting angle of the light-emitting structure 100 can be concentrated on the central axis 24 of the light-emitting element 20 to improve the light directivity of the light-emitting structure 100, and can be applied to a long-distance projection lighting fixture or the like, or a light angle can be designed. In order to make the light-emitting shape of the light-emitting structure 100 appear a left-right asymmetric shape, and then conform to a special light-shaped angle. Alternatively, the optical design and the shape of each layer of the lens structure can be selected, so that the light intensity of the light-emitting structure 100 is better and uniform, so that the use of various uniform light components can be omitted, and the manufacturing cost can be reduced.

由於上述各實施例所述之發光結構100需要使用各層透鏡結構精確地彼此對準,因此如第13圖所示,在此提出一種具有多層透鏡之發光結構製造方法S100,其包括下列步驟:提供一發光元件(步驟S10);形成一層第一透鏡結構(步驟S20);形成一層第二透鏡結構(步驟S30);以及形成一層第三透鏡結構(步驟S40)。 Since the light-emitting structure 100 described in the above embodiments needs to be precisely aligned with each other using the lens structures of the respective layers, as shown in FIG. 13, a light-emitting structure manufacturing method S100 having a multilayer lens is provided, which includes the following steps: a light-emitting element (step S10); forming a first lens structure (step S20); forming a second lens structure (step S30); and forming a third lens structure (step S40).

提供一發光元件(步驟S10):如第14圖所示,所提供的發光元件20可以是臨時基板22或散熱基板22a上設置有排列成陣列的多個發光二極體晶粒23,也可以是半導體晶圓(如第1圖所示)。 Providing a light-emitting element (step S10): as shown in FIG. 14, the light-emitting element 20 may be provided on the temporary substrate 22 or the heat-dissipating substrate 22a, and a plurality of light-emitting diode crystal grains 23 arranged in an array may be disposed. It is a semiconductor wafer (as shown in Figure 1).

為了提供高準確度的對位結果,於發光元件20上可以定義有至少一個或是多個定位點25,其形式可以為一定位孔,再搭配定位插銷以利用機構固定之方式對發光元件20進行定位;也或者可以使用光學定位點25,並利用光學定位方式使用光學攝影機輔助校正以執行精確地對位程序,又或者在發光元件上設置 至少一個或是多個定位孔後,搭配對應數量及適當的光束直徑大小的發光源作為光源基準對位點,並在移動發光元件時,使得每一個發光源的光束直徑都完全穿透過定位孔後,便能精確對位。應用於定位發光元件20之技術已普遍地使用於各種發光元件20檢測或封裝技術中,在此不再一一舉例說明,熟知該項技術者應可瞭解如何將已知定位技術應用於本實施例中。 In order to provide a high-accuracy alignment result, at least one or more positioning points 25 may be defined on the light-emitting element 20, and may be in the form of a positioning hole, and then matched with the positioning pin to fix the light-emitting element 20 by means of mechanism fixing. Positioning; or optical positioning point 25 can be used and optical camera-assisted correction can be used to perform accurate alignment procedures using optical positioning, or on a light-emitting component After at least one or more positioning holes, the light source with the corresponding number and the appropriate beam diameter is used as the reference point of the light source, and when the light emitting element is moved, the beam diameter of each light source completely penetrates the positioning hole. After that, you can accurately match. The techniques applied to position the illuminating element 20 have been commonly used in various illuminating element 20 detection or packaging techniques, and will not be exemplified herein. Those skilled in the art should be able to understand how to apply known positioning techniques to the present implementation. In the example.

由於可將定位點25的數量設定為二個以上,藉此能夠利用多個定位點25的設置,以確保發光元件不會發生角度偏轉的問題。 Since the number of the positioning points 25 can be set to two or more, it is possible to utilize the arrangement of the plurality of positioning points 25 to ensure that the light-emitting elements do not have angular deflection.

接著請同時參考前述結構實施例中所附之圖式。 Next, please refer to the drawings attached to the foregoing structural embodiment.

形成一層第一透鏡結構(步驟S20):以定位點25作為基準點,利用切割法、奈米壓印法、模造成型法或3D列印法於發光元件20於發光元件20表面上形成第一透鏡結構40,且第一透鏡結構40具有排列成陣列之複數個第一子透鏡41。 Forming a first lens structure (step S20): forming a first light-emitting element 20 on the surface of the light-emitting element 20 by using a dicing method, a nano-imprint method, a mold-forming method, or a 3D printing method with the positioning point 25 as a reference point The lens structure 40 has a first lens structure 40 having a plurality of first sub-lenses 41 arranged in an array.

形成一層第二透鏡結構(步驟S30):於步驟S20後,再以同樣的定位點25作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於第一透鏡結構40表面上形成第二透鏡結構60,第二透鏡結構60具有排列成陣列之複數個第二子透鏡61,且每一第二子透鏡61與對應之第一子透鏡41具有相同之光軸L。 Forming a second lens structure (step S30): after step S20, using the same positioning point 25 as a reference point, using a cutting method, a nanoimprint method, a mold forming method or a 3D printing method on the first lens structure A second lens structure 60 is formed on the surface of the 40, the second lens structure 60 has a plurality of second sub-lenses 61 arranged in an array, and each of the second sub-lenses 61 has the same optical axis L as the corresponding first sub-lens 41. .

形成一層第三透鏡結構(步驟S40):於步驟S30後,可以再以相同的定位點25作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於第二透鏡結構60表面上形成第三透鏡結構80,第三透鏡結構80具有排列成陣列之複數個第三子透鏡81,且每一第三子透鏡81與對應之第二子透鏡61及第一子透鏡41具有相 同之光軸L。 Forming a third lens structure (step S40): after step S30, the same positioning point 25 can be used as a reference point, and the second lens is cut, nanoimprinted, molded, or 3D printed. A third lens structure 80 is formed on the surface of the structure 60. The third lens structure 80 has a plurality of third sub-lenses 81 arranged in an array, and each of the third sub-lenses 81 and the corresponding second sub-lens 61 and the first sub-lens 41 has phase The same optical axis L.

另外,如第6圖所示,當發光元件20具有透光基材21時,發光結構100製造方法可於步驟20之前進一步包括一預先切割步驟,同樣利用定位點25作為對位的基準點,先利用切割法切割透光基材21,令透光基材21表面形成排列成陣列之複數個基礎子透鏡211。由於透光基材21位於發光元件20的頂端,因此第一透鏡結構40便覆蓋於透光基材21表面,因第一及第二透鏡結構40、60也使用了相同的定位點25進行對位,所以可以讓基礎子透鏡211與對應的第一子透鏡41及第二子透鏡61具有相同之光軸L。其中,切割法可例如是雷射切割法、黃光蝕刻曝光法或是任何現有已知之切割或是去除部分透光基材21的方法。 In addition, as shown in FIG. 6, when the light-emitting element 20 has the light-transmitting substrate 21, the manufacturing method of the light-emitting structure 100 may further include a pre-cutting step before the step 20, and the positioning point 25 is also used as the reference point of the alignment. First, the light-transmitting substrate 21 is cut by a cutting method, and the surface of the light-transmitting substrate 21 is formed into a plurality of basic sub-lenses 211 arranged in an array. Since the light-transmitting substrate 21 is located at the top end of the light-emitting element 20, the first lens structure 40 covers the surface of the light-transmitting substrate 21, and the first and second lens structures 40, 60 are also used to perform the same positioning point 25. Therefore, the basic sub-lens 211 and the corresponding first sub-lens 41 and second sub-lens 61 have the same optical axis L. The cutting method may be, for example, a laser cutting method, a yellow etching exposure method, or any conventionally known method of cutting or removing a portion of the light-transmitting substrate 21.

如第15圖所示,前述之雷射切割法可先於發光元件20表面上設置熱固化光學膠體、光固化光學膠體或光學玻璃膠,使其固化後再利用雷射裝置90準確地切割出所需的第一子透鏡41的形狀。又或是於第一透鏡結構40或第二透鏡結構60上先設置並固化熱固化光學膠體、光固化光學膠體或光學玻璃膠,使其固化成型第二透鏡結構60或第三透鏡結構80的初步形狀後,再利用雷射切割法切割出所需的第二子透鏡61或第三子透鏡81的形狀。 As shown in FIG. 15, the laser cutting method described above may be provided with a heat curing optical colloid, a photocurable optical colloid or an optical glass paste on the surface of the light emitting element 20, and then solidified and then accurately cut out by the laser device 90. The shape of the first sub-lens 41 is required. Or a heat curing optical colloid, a photocurable optical colloid or an optical glass adhesive is first disposed on the first lens structure 40 or the second lens structure 60 to cure the second lens structure 60 or the third lens structure 80. After the preliminary shape, the shape of the desired second sub-lens 61 or third sub-lens 81 is cut by laser cutting.

由於雷射切割的割縫窄、精準度高因此確實可形成透鏡直徑200微米以下且透鏡厚度亦可為200微米以下的子透鏡,再配合定位點25之使用可以使在垂直方向上彼此對應的子透鏡確實具有相同的光軸L。 Since the slit of the laser cutting is narrow and the precision is high, it is possible to form a sub-lens having a lens diameter of 200 μm or less and a lens thickness of 200 μm or less, and the use of the positioning point 25 can make the vertical direction correspond to each other. The sub-lenses do have the same optical axis L.

此外,如第16A圖及第16B圖所示,也可以利用奈米壓印法,先製作出母模模板91後,塗覆欲用來製作第一、第二或 第三透鏡結構40、60、80的材料於其下方元件上,再將母模模板91壓印於材料中,再使材料固化後進行脫模。更可以利用模造成型法,於製作模具後將第一、第二或第三透鏡結構40、60、80的材料注入模具與元件之間形成的模穴,於材料固化後再進行脫模。奈米壓印法與模造成型法常被應用於製作透鏡陣列結構中,因此在此不再多加說明。另外,如第17圖所示,也可以利用3D列印機台92使用3D列印法在發光元件20上直接依序形成第一、第二或第三透鏡結構40、60、80。 In addition, as shown in FIGS. 16A and 16B, it is also possible to use the nanoimprint method to form the master template 91 first, and then apply the first or second to be coated. The material of the third lens structure 40, 60, 80 is on the lower element, and the master template 91 is embossed in the material, and then the material is solidified and then demolded. Further, the mold forming method can be used to inject the material of the first, second or third lens structures 40, 60, 80 into the cavity formed between the mold and the component after the mold is formed, and then demold the mold after the material is solidified. Nanoimprinting and die-casting methods are often used in the fabrication of lens array structures, and therefore will not be described here. Further, as shown in Fig. 17, the first, second or third lens structures 40, 60, 80 may be directly formed on the light-emitting element 20 by the 3D printing machine 92 using the 3D printing method.

前述各種形成透鏡結構之方法,都需要使用相同的定位點25進行對位,以確保各層垂直對應的子透鏡皆具有相同重疊之光軸L。即便是各層的子透鏡並無垂直對應,其製造方法亦可使用定位點作為製造各層透鏡結構時進行對位的參考基點。 The various methods for forming the lens structure described above need to be aligned using the same positioning point 25 to ensure that the vertically corresponding sub-lenses of each layer have the same overlapping optical axis L. Even if the sub-lenses of the respective layers do not have a vertical correspondence, the manufacturing method can also use the positioning points as a reference base point for alignment when manufacturing the lens structures of the respective layers.

上述各實施例中,可以對半導體晶圓於切割前直接將多層透鏡結構施作於半導體晶圓表面上,並且每一層透鏡結構皆具有多個並列的子透鏡,每一子透鏡的透鏡直經已為微米或奈米尺寸,非常地精細;再使每一層透鏡結構中的子透鏡垂直對應並具有相同的光軸,將可以有效控制並加以分配發光結構的出光角度。 In the above embodiments, the multilayer wafer structure can be directly applied to the surface of the semiconductor wafer before cutting, and each layer of the lens structure has a plurality of juxtaposed sub-lenses, and the lens of each sub-lens is straight through. It has been micron or nanometer size, very fine; and the sub-lenses in each layer of lens structure are vertically corresponding and have the same optical axis, which can effectively control and distribute the light-emitting angle of the light-emitting structure.

惟上述各實施例係用以說明本發明之特點,其目的在使熟習該技術者能瞭解本發明之內容並據以實施,而非限定本發明之專利範圍,故凡其他未脫離本發明所揭示之精神而完成之等效修飾或修改,仍應包含在以下所述之申請專利範圍中。 The embodiments are described to illustrate the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the present invention and to implement the present invention without limiting the scope of the present invention. Equivalent modifications or modifications made by the spirit of the disclosure should still be included in the scope of the claims described below.

100‧‧‧具有多層透鏡之發光結構 100‧‧‧Light-emitting structure with multilayer lens

20‧‧‧發光元件 20‧‧‧Lighting elements

40‧‧‧第一透鏡結構 40‧‧‧First lens structure

41‧‧‧第一子透鏡 41‧‧‧First sub-lens

60‧‧‧第二透鏡結構 60‧‧‧second lens structure

61‧‧‧第二子透鏡 61‧‧‧Second sub-lens

L‧‧‧光軸 L‧‧‧ optical axis

Claims (19)

一種具有多層透鏡之發光結構,其包括:一發光元件;一層第一透鏡結構,其係直接覆蓋形成於該發光元件表面,且該第一透鏡結構具有排列成陣列之複數個第一子透鏡;以及一層第二透鏡結構,其係直接覆蓋形成於該第一透鏡結構,該第二透鏡結構具有排列成陣列之複數個第二子透鏡,並且每一該第二子透鏡與對應之該第一子透鏡具有相同之光軸。 A light-emitting structure having a multilayer lens, comprising: a light-emitting element; a first lens structure directly covering the surface of the light-emitting element, and the first lens structure having a plurality of first sub-lenses arranged in an array; And a second lens structure directly formed on the first lens structure, the second lens structure having a plurality of second sub-lenses arranged in an array, and each of the second sub-lenses corresponding to the first The sub-lenses have the same optical axis. 如申請專利範圍第1項所述之發光結構,其中該發光元件為一半導體晶圓。 The illuminating structure of claim 1, wherein the illuminating element is a semiconductor wafer. 如申請專利範圍第1項所述之發光結構,其中該發光元件包括一臨時基板及複數個發光二極體晶粒,該些發光二極體晶粒設置於該臨時基板上並排列成陣列。 The illuminating structure of claim 1, wherein the illuminating element comprises a temporary substrate and a plurality of illuminating diode dies, and the illuminating diode dies are disposed on the temporary substrate and arranged in an array. 如申請專利範圍第1項所述之發光結構,其中該發光元件包括一散熱基板及複數個發光二極體晶粒,該些發光二極體晶粒設置於該散熱基板上並排列成陣列。 The illuminating structure of claim 1, wherein the illuminating element comprises a heat dissipating substrate and a plurality of illuminating diode dies, and the illuminating diode dies are disposed on the heat dissipating substrate and arranged in an array. 如申請專利範圍第1項所述之發光結構,其中該發光元件具有一透光基材,該透光基材位於該發光元件之頂端,於該透光基材表面形成有排列成陣列之複數個基礎子透鏡,其中該第一透鏡結構係直接覆蓋形成於該透光基材表面,並且該基礎子透鏡與對應之該第一子透鏡及該第二子透鏡具有相同之光軸。 The light-emitting structure of claim 1, wherein the light-emitting element has a light-transmitting substrate, and the light-transmitting substrate is located at a top end of the light-emitting element, and a plurality of arrays are arranged on the surface of the light-transmitting substrate. The basic sub-lens, wherein the first lens structure is directly formed on the surface of the transparent substrate, and the basic sub-lens has the same optical axis as the corresponding first sub-lens and the second sub-lens. 如申請專利範圍第5項所述之發光結構,其中該透光基材為一藍寶石基材。 The light-emitting structure of claim 5, wherein the light-transmitting substrate is a sapphire substrate. 如申請專利範圍第1項至第5項中之任一項所述之發光結構,其 進一步包括一層第三透鏡結構,其係直接覆蓋形成於該第二透鏡結構,該第三透鏡結構具有排列成陣列之複數個第三子透鏡,並且每一該第三子透鏡與對應之該第二子透鏡及該第一子透鏡具有相同之光軸。 A light-emitting structure according to any one of claims 1 to 5, wherein Further comprising a third lens structure formed directly on the second lens structure, the third lens structure having a plurality of third sub-lenses arranged in an array, and each of the third sub-lenses and the corresponding The two sub-lenses and the first sub-lens have the same optical axis. 如申請專利範圍第7項所述之發光結構,其中每一基礎子透鏡、每一該第一子透鏡、每一該第二子透鏡及每一該第三子透鏡分別為凹透鏡結構、凸透鏡結構或立體幾何結構。 The illuminating structure of claim 7, wherein each of the basic sub-lenses, each of the first sub-lenses, each of the second sub-lenses and each of the third sub-lenses are respectively a concave lens structure and a convex lens structure. Or solid geometry. 如申請專利範圍第8項所述之發光結構,其中該基礎子透鏡係以切割法製作而成,該第一透鏡結構、該第二透鏡結構及該第三透鏡結構係以切割法、奈米壓印法、模造成型法或3D列印法製作而成。 The light-emitting structure of claim 8, wherein the basic sub-lens is fabricated by a cutting method, and the first lens structure, the second lens structure and the third lens structure are cut, nano Made by imprinting, die-casting or 3D printing. 如申請專利範圍第9項所述之發光結構,其中該第一透鏡結構、該第二透鏡結構及該第三透鏡結構之材質為熱固化光學膠體、光固化光學膠體或光學玻璃膠。 The light-emitting structure of claim 9, wherein the first lens structure, the second lens structure and the third lens structure are made of a heat-curable optical colloid, a photocurable optical colloid or an optical glass paste. 如申請專利範圍第10項所述之發光結構,其中該基礎子透鏡、該第一透鏡結構、該第二透鏡結構及該第三透鏡結構之每一相鄰表面塗佈有一接著劑。 The illuminating structure of claim 10, wherein each of the adjacent surfaces of the base sub-lens, the first lens structure, the second lens structure and the third lens structure is coated with an adhesive. 一種具有多層透鏡之發光結構製造方法,其包括下列步驟:提供一發光元件,該發光元件上定義有至少一定位點;形成一層第一透鏡結構於該發光元件表面,其係以該定位點作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於該發光元件上形成該第一透鏡結構,且該第一透鏡結構具有排列成陣列之複數個第一子透鏡;以及形成一層第二透鏡結構於該第一透鏡結構表面,以該定位 點作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於該第一透鏡結構表面上形成該第二透鏡結構,該第二透鏡結構具有排列成陣列之複數個第二子透鏡,且每一該第二子透鏡與對應之該第一子透鏡具有相同之光軸。 A method for fabricating a light emitting structure having a multilayer lens, comprising the steps of: providing a light emitting element having at least one positioning point defined thereon; forming a first lens structure on the surface of the light emitting element, the positioning point being used as the positioning point a first lens structure formed on the light-emitting element by a dicing method, a nano-imprint method, a mold-forming method or a 3D printing method, and the first lens structure has a plurality of first sub-lenses arranged in an array And forming a second lens structure on the surface of the first lens structure to be positioned a point as a reference point, the second lens structure is formed on the surface of the first lens structure by a dicing method, a nanoimprint method, a mold forming method or a 3D printing method, the second lens structure having a plurality of arrays arranged in an array a second sub-lens, and each of the second sub-lenses has the same optical axis as the corresponding first sub-lens. 如申請專利範圍第12項所述之發光結構製造方法,其進一步包括形成一層第三透鏡結構於該第二透鏡結構表面,其係以該定位點作為基準點,以切割法、奈米壓印法、模造成型法或3D列印法於該第二透鏡結構表面上形成該第三透鏡結構,該第三透鏡結構具有排列成陣列之複數個第三子透鏡,且每一該第三子透鏡與對應之該第二子透鏡及該第一子透鏡具有相同之光軸。 The method for fabricating a light-emitting structure according to claim 12, further comprising forming a third lens structure on the surface of the second lens structure, wherein the positioning point is used as a reference point, and the cutting method and the nanoprinting are performed. Forming, forming, or 3D printing the third lens structure on the surface of the second lens structure, the third lens structure having a plurality of third sub-lenses arranged in an array, and each of the third sub-lenses The second sub-lens and the corresponding first sub-lens have the same optical axis. 如申請專利範圍第12項所述之發光結構製造方法,其中該發光元件具有一透光基材,該透光基材位於該發光元件之頂端,其中該發光結構製造方法進一步包括一預先切割步驟,其係以該定位點作為基準點並使用切割法切割該透光基材,令該透光基材表面形成排列成陣列之複數個基礎子透鏡,其中該第一透鏡結構係覆蓋於該透光基材表面,並且該基礎子透鏡與對應之該第一子透鏡及該第二子透鏡具有相同之光軸。 The method of fabricating a light-emitting structure according to claim 12, wherein the light-emitting element has a light-transmitting substrate at a top end of the light-emitting element, wherein the light-emitting structure manufacturing method further comprises a pre-cutting step And using the locating point as a reference point and cutting the transparent substrate by using a dicing method, the surface of the transparent substrate is formed into a plurality of basic sub-lenses arranged in an array, wherein the first lens structure is covered by the transparent The surface of the light substrate, and the basic sub-lens has the same optical axis as the corresponding first sub-lens and the second sub-lens. 一種具有多層透鏡之發光結構,其包括:一發光元件,該發光元件具有一中央軸;一層第一透鏡結構,其係直接覆蓋形成於該發光元件表面,且該第一透鏡結構具有至少一第一子透鏡,該第一子透鏡之結構係以該中央軸對稱分佈;以及一層第二透鏡結構,其係直接覆蓋形成於該第一透鏡結構,該 第二透鏡結構具有至少二第二子透鏡,該些第二子透鏡之結構係以該中央軸對稱分佈,且每一該第二子透鏡之透鏡曲率半徑小於該第一子透鏡之透鏡曲率半徑。 A light emitting structure having a multilayer lens, comprising: a light emitting element having a central axis; a first lens structure directly covering the surface of the light emitting element, and the first lens structure having at least one a sub-lens, the structure of the first sub-lens is symmetrically distributed by the central axis; and a second lens structure directly formed on the first lens structure, The second lens structure has at least two second sub-lenses, and the structures of the second sub-lenses are symmetrically distributed on the central axis, and the lens curvature radius of each of the second sub-lenses is smaller than the lens curvature radius of the first sub-lens . 一種具有多層透鏡之發光結構,其包括:一發光元件,該發光元件具有一中央軸;一層第一透鏡結構,其係直接覆蓋形成於該發光元件表面,且該第一透鏡結構具有至少二第一子透鏡,該些第一子透鏡之結構係以該中央軸對稱分佈;以及一層第二透鏡結構,其係直接覆蓋形成於該第一透鏡結構,該第二透鏡結構具有至少一第二子透鏡,該第二子透鏡之結構係以該中央軸對稱分佈,且該第二子透鏡之透鏡曲率半徑大於每一該第一子透鏡之透鏡曲率半徑。 A light emitting structure having a multilayer lens, comprising: a light emitting element having a central axis; a first lens structure directly covering the surface of the light emitting element, and the first lens structure having at least two a sub-lens, the structures of the first sub-lenses are symmetrically distributed on the central axis; and a second lens structure directly formed on the first lens structure, the second lens structure having at least a second sub-structure The lens, the structure of the second sub-lens is symmetrically distributed on the central axis, and the lens radius of curvature of the second sub-lens is greater than the lens curvature radius of each of the first sub-lenses. 如申請專利範圍第15項或第16項所述之發光結構,其進一步包括一層第三透鏡結構,其係直接覆蓋形成於該第二透鏡結構,該第三透鏡結構具有至少一第三子透鏡,並且該第三子透鏡之結構係以該中央軸對稱分佈,該第三子透鏡之透鏡曲率半徑大於、小於或等於該第二子透鏡之透鏡曲率半徑。 The illuminating structure of claim 15 or 16, further comprising a third lens structure directly covering the second lens structure, the third lens structure having at least one third sub-lens And the structure of the third sub-lens is symmetrically distributed on the central axis, and the lens radius of curvature of the third sub-lens is greater than, less than or equal to the lens curvature radius of the second sub-lens. 如申請專利範圍第15項或第16項所述之發光結構,其中該發光元件具有一透光基材,該透光基材位於該發光元件之頂端,於該透光基材表面形成有排列成陣列之至少一基礎子透鏡,其中該第一透鏡結構係直接覆蓋形成於該透光基材表面,並且該基礎子透鏡係以該中央軸對稱分佈,該基礎子透鏡之透鏡曲率半徑大於、小於或等於該第一子透鏡之透鏡曲率半徑。 The light-emitting structure of claim 15 or claim 16, wherein the light-emitting element has a light-transmitting substrate, the light-transmitting substrate is located at a top end of the light-emitting element, and an array is formed on the surface of the light-transmitting substrate. Aligning at least one basic sub-lens, wherein the first lens structure is directly formed on the surface of the light-transmitting substrate, and the basic sub-lens is symmetrically distributed on the central axis, and the lens radius of curvature of the basic sub-lens is greater than Less than or equal to the lens curvature radius of the first sub-lens. 如申請專利範圍第17項所述之發光結構,其中該發光元件具有 一透光基材,該透光基材位於該發光元件之頂端,於該透光基材表面形成有排列成陣列之至少一基礎子透鏡,其中該第一透鏡結構係直接覆蓋形成於該透光基材表面,並且該基礎子透鏡係以該中央軸對稱分佈,該基礎子透鏡之透鏡曲率半徑大於、小於或等於該第一子透鏡之透鏡曲率半徑。 The illuminating structure of claim 17, wherein the illuminating element has a light-transmitting substrate, the light-transmitting substrate is located at a top end of the light-emitting element, and at least one basic sub-lens arranged in an array is formed on the surface of the light-transmitting substrate, wherein the first lens structure is directly covered and formed on the transparent substrate The surface of the light substrate, and the basic sub-lens is symmetrically distributed with the central axis, and the lens has a radius of curvature greater than, less than or equal to a lens radius of curvature of the first sub-lens.
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