TWI585525B - Polyimide photosensitive resin composition for organic light emitting diodes - Google Patents

Polyimide photosensitive resin composition for organic light emitting diodes Download PDF

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TWI585525B
TWI585525B TW101136368A TW101136368A TWI585525B TW I585525 B TWI585525 B TW I585525B TW 101136368 A TW101136368 A TW 101136368A TW 101136368 A TW101136368 A TW 101136368A TW I585525 B TWI585525 B TW I585525B
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photosensitive resin
resin composition
organic light
emitting diode
weight
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TW201331707A (en
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金東明
金柄郁
尹赫敏
金鎮祐
黃致容
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東進世美肯股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Electroluminescent Light Sources (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Description

用於有機發光二極體之聚醯亞胺光敏性樹脂組成物 Polyimine photosensitive resin composition for organic light-emitting diode 發明領域 Field of invention

本發明係關於有機發光二極體之聚醯亞胺光敏性樹脂組成物,更詳言之,係關於頗適於使用容易調節分子量與溶解度之聚醯亞胺先質進行OLED之有機絕緣膜形成,特別係感度獲明顯改善的聚醯亞胺光敏性樹脂組成物。 The present invention relates to a polyfluorene imide photosensitive resin composition of an organic light-emitting diode, and more particularly to an organic insulating film formation of an OLED which is suitable for using a polyimine precursor which easily adjusts molecular weight and solubility. In particular, a polyimide-based photosensitive resin composition having a marked improvement in sensitivity.

發明背景 Background of the invention

最近市面的顯示機器中,就從多樣理由,環繞在有機發光二極體(Organic Light Emitting Diodes、OLED)、特別係AMOLED(Active matrix OLED,主動矩陣有機發光二極體)的光環中。 Recently, in the display devices of the market, there are various reasons for surrounding the optical rings of Organic Light Emitting Diodes (OLEDs) and, in particular, AMOLEDs (Active Matrix OLEDs, Active Matrix Organic Light Emitting Diodes).

通常OLED元件係含有有機絕緣膜,而在前述有機絕緣膜形成時,一般係使用聚醯亞胺光敏性樹脂組成物。 Usually, the OLED element contains an organic insulating film, and when the above-mentioned organic insulating film is formed, a polyimide polyimide photosensitive resin composition is generally used.

習知聚醯亞胺光敏性樹脂組成物所使用的聚醯亞胺先質係採取利用GMA進行保護的技術,經GMA保護的聚醯亞胺先質較難調節分子量與溶解度,會有因凝膠化(gelation)而導致產率降低的問題,因為感度較低,因而確實渴求針對此問題的改善策略。 The polyimine precursors used in the composition of the polyimine photosensitive resin are protected by GMA, and the GMA-protected polyimine precursors are difficult to adjust the molecular weight and solubility, and may be gelled. (gelation) leads to a problem of reduced yield, because the sensitivity is low, and therefore, an improvement strategy for this problem is indeed desired.

發明概要 Summary of invention

為解決如前述的習知技術問題,本發明目的在於 提供:適於使用較容易調節分子量與溶解度的聚醯亞胺先質,進行OLED之有機絕緣膜形成,特別係感度能獲明顯改善的聚醯亞胺光敏性樹脂組成物,以及使用其之OLED的圖案形成方法、及含有前述聚醯亞胺光敏性樹脂組成物之硬化體的OLED基板。 In order to solve the conventional technical problems as described above, the present invention aims to Provided: a polyimine precursor which is easy to adjust molecular weight and solubility, and an organic insulating film formation of an OLED, in particular, a polyimide polyimide photosensitive resin composition having a marked improvement in sensitivity, and an OLED using the same The pattern forming method and the OLED substrate containing the hardened body of the polyimine photosensitive resin composition.

為達成前述目的,本發明所提供的用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其特徵在於:OLED用光敏性樹脂組成物含有:a)含有i)下述化學式1所示聚醯亞胺先質、及ii)聚羥苯乙烯(poly hydroxy styrene)的樹脂;b)1,2-醌二疊氮化合物;c)交聯劑;以及d)溶劑。 In order to achieve the above object, a polyimide composition photosensitive resin composition for an organic light-emitting diode according to the present invention is characterized in that the photosensitive resin composition for OLED contains: a) containing i) the following chemical formula 1 a polyimine precursor, and ii) a polyhydroxy styrene resin; b) a 1,2-quinonediazide compound; c) a crosslinking agent; and d) a solvent.

前述化學式1中,X係4價有機基;Y係2價有機基;R係各自獨立的甲基丙烯酸環氧環己基甲酯(epoxy cyclohexyl methyl methacrylate、ECMMA)、或甲基丙烯酸甲基環氧丙酯(methylglycidyl methacrylate、MGMA);n係3~100000的 整數。 In the above Chemical Formula 1, X is a tetravalent organic group; Y is a divalent organic group; and R is an independent epoxy cyclohexyl methyl methacrylate (ECMMA) or methyl methacrylate Propyl ester (methylglycidyl methacrylate, MGMA); n series 3~100000 Integer.

較佳,本發明的用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其特徵在於含有:a)含有i)前述化學式1所示聚醯亞胺先質40~90重量%、及ii)聚羥苯乙烯(poly hydroxy styrene)10~60重量%的樹脂100重量份;b)1,2-醌二疊氮化合物5~50重量份;c)交聯劑1~30重量份;d)溶劑佔全體聚醯亞胺光敏性樹脂組成物之固形份含量的5~50重量%。 Preferably, the polyimine photosensitive resin composition for an organic light-emitting diode of the present invention comprises: a) comprising i) 40 to 90% by weight of the polyimine precursor of the above Chemical Formula 1 And ii) 100 parts by weight of polyhydroxy styrene 10 to 60% by weight of the resin; b) 5 to 50 parts by weight of the 1,2-quinonediazide compound; c) 1 to 30 parts by weight of the crosslinking agent And d) the solvent accounts for 5 to 50% by weight of the solid content of the entire polyimideimide photosensitive resin composition.

再者,本發明所提供的OLED基板係含有前述用於有機發光二極體之聚醯亞胺光敏性樹脂組成物的硬化體。 Furthermore, the OLED substrate provided by the present invention contains the above-mentioned hardened body of a polyimide polyimide photosensitive resin composition for an organic light-emitting diode.

再者,本發明所提供的OLED基板之圖案形成方法,係使用前述用於有機發光二極體之聚醯亞胺光敏性樹脂組成物。 Furthermore, the pattern forming method of the OLED substrate provided by the present invention uses the above-mentioned polyimide polyimide photosensitive resin composition for an organic light-emitting diode.

本發明的用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,係適用於使用較容易調節分子量與溶解度的聚醯亞胺先質進行OLED之有機絕緣膜形成,特別係感度獲明顯改善。 The polyamidimide photosensitive resin composition for an organic light-emitting diode of the present invention is suitable for forming an organic insulating film of an OLED by using a polyimine precursor which is easy to adjust molecular weight and solubility, in particular, the sensitivity is obtained. Significant improvement.

用以實施發明之形態 Form for implementing the invention

以下,針對本發明進行詳細說明。 Hereinafter, the present invention will be described in detail.

本發明的有機發光二極體之聚醯亞胺光敏性樹脂組成物特徵在於含有:a)含有i)下述化學式1所示聚醯亞胺先質、及ii)聚羥苯乙烯的樹脂;b)1,2-醌二疊氮化合物;c)交聯劑;以及d)溶劑。 The polyimine photosensitive resin composition of the organic light-emitting diode of the present invention is characterized by comprising: a) a resin containing i) a polyimide precursor of the following Chemical Formula 1, and ii) polyhydroxystyrene; b) 1,2-quinonediazide compound; c) crosslinker; and d) solvent.

前述化學式1中,X係4價有機基;Y係2價有機基;R係各自獨立的甲基丙烯酸環氧環己基甲酯(epoxy cyclohexyl methyl methacrylate、ECMMA)、或甲基丙烯酸甲基環氧丙酯(methylglycidyl methacrylate、MGMA);n係3~100000的整數。 In the above Chemical Formula 1, X is a tetravalent organic group; Y is a divalent organic group; and R is an independent epoxy cyclohexyl methyl methacrylate (ECMMA) or methyl methacrylate Methyl ester (methylglycidyl methacrylate, MGMA); n is an integer from 3 to 100,000.

本發明所使用前述a)中的i)前述化學式1所示聚醯亞胺先質,較佳能經由下述反應式1的過程進行製造。更佳係下述反應式1中,X係從2,2-雙(3,4-脫水二羧苯基)六氟丙烷(2,2-bis(3,4-anhydrodicarboxyphenyl)Hexafluoropropane、6FDA、化學式2)、5-(2,5-二氧四氫呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐(5-(2,5-Dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylicAnhydride、DOCDA、化 學式3)、或2,3,3',4'-聯苯四羧酸二酐(2,3,3',4'-Biphenyl tetra carboxylic dianhydride、a-BPDA、化學式4)所衍生的4價有機基;Y係從4,4'-二胺基-3,3'-二甲基-二苯基甲烷(4,4'-diamino-3,3'-dimethyl-diphenylmethane、DADM、化學式5)、2,2-雙(3-胺基-4-羥苯基)-六氟丙烷(2,2-Bis(3-amino-4-hydroxyphenyl)-hexafluoropropane、Bis-APAF、化學式6)、或1,3-雙(3-胺基丙基)四甲基二矽氧烷(1,3-Bis(3-aminopropyl)tetramethyldisiloxane、SiDA(PAM-E)、化學式7)所衍生的2價有機基;R係甲基丙烯酸環氧環己基甲酯(epoxy cyclohexyl methyl methacrylate、ECMMA)。 The i-imine precursor of the above formula (1) in the above a) used in the present invention is preferably produced by the following reaction scheme 1. More preferably, in the following Reaction Scheme 1, X is derived from 2,2-bis(3,4-anhydrodicarboxyphenyl) Hexafluoropropane, 6FDA, chemical formula 2) 5-(2,5-Dioxytetrahydrofuranyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride (5-(2,5-Dioxotetrahydrofuryl)-3-methyl-3 -cyclohexene-1,2-dicarboxylicAnhydride, DOCDA, chemical 4 derived from the formula 3), or 2,3,3',4'-biphenyltetracarboxylic dianhydride (2,3,3',4'-Biphenyl tetra carboxylichydride, a-BPDA, chemical formula 4) Valence organic group; Y series from 4,4'-diamino-3,3'-dimethyl-diphenyl-3 (3,4'-diamino-3,3'-dimethyl-diphenylmethane, DADM, chemical formula 5 , 2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane (Bis-APAF, Chemical Formula 6), or Divalent organic group derived from 1,3-bis(3-aminopropyl)tetramethyldisiloxane, SiDA(PAM-E), Chemical Formula 7 ; R is epoxy cyclohexyl methyl methacrylate (ECMMA).

前述聚醯亞胺先質係將保護部分從習知的GMA轉換為甲基丙烯酸環氧環己基甲酯(epoxy cyclohexyl methyl methacrylate、ECMMA)或甲基丙烯酸甲基環氧丙酯(methylglycidyl methacrylate、MGMA),而使分子量與溶解度的調節較為容易,而從源頭減輕因凝膠化造成的產率減 少情形,並促進聚醯亞胺光敏性樹脂組成物的感度。本發明中,前述聚醯亞胺先質的分子量較佳係3000~10000、更佳係3500~7000。若前述範圍內,便可更加增進溶解度調節、產率及感度。 The aforementioned polybendylene precursor system converts the protective moiety from the conventional GMA to epoxy cyclohexyl methyl methacrylate (ECMMA) or methylglycidyl methacrylate (MGMA). ), to make the adjustment of molecular weight and solubility easier, and reduce the yield reduction due to gelation from the source In rare cases, and promotes the sensitivity of the polyimide pigment photosensitive resin composition. In the present invention, the molecular weight of the polyimine precursor is preferably from 3,000 to 10,000, more preferably from 3,500 to 7,000. If within the above range, solubility adjustment, yield and sensitivity can be further enhanced.

前述聚醯亞胺先質的含量較佳係設定為本發明所使用a)樹脂的40~90重量%。若前述範圍內,便可更加增進顯影性、耐熱性及感度。 The content of the polyimine precursor is preferably set to 40 to 90% by weight of the resin used in the present invention. If it is within the above range, the developability, heat resistance and sensitivity can be further improved.

再者,本發明當作前述樹脂使用的ii)聚羥苯乙烯,較佳係使用分子量4000~20000者,含量係設定為本發明所使用樹脂的10~60重量%。若在前述範圍內,便可更加增進顯影性、耐熱性及感度。 Further, in the present invention, ii) polyhydroxystyrene used as the above resin is preferably used in a molecular weight of 4,000 to 20,000, and the content is set to 10 to 60% by weight based on the resin used in the present invention. If it is within the above range, the developability, heat resistance and sensitivity can be further improved.

再者,本發明的a)樹脂係除前述聚醯亞胺先質與聚羥苯乙烯之外,尚可更進一步含有酚醛樹脂。較佳係使用能經由前述階段聚合進行製造的酚醛樹脂。 Further, the resin of a) of the present invention may further contain a phenol resin in addition to the polybenzamine precursor and polyhydroxystyrene. It is preferred to use a phenol resin which can be produced by the above-mentioned stage polymerization.

經由前述階段聚合進行製造的酚醛樹脂,係由醛、與經取代的酚進行縮合便可製造。前述醛係可例如甲醛等;經取代的酚係可例如:鄰-、間-、對-甲酚、2,4-二甲酚、2,5-二甲酚、3,4-二甲酚、3,5-二甲酚、2,3,5-三甲酚、或該等的混合物等等。 The phenol resin produced by the above-described stage polymerization can be produced by condensing an aldehyde with a substituted phenol. The aldehyde may be, for example, formaldehyde or the like; the substituted phenol may be, for example, o-, m-, p-cresol, 2,4-xylenol, 2,5-xylenol, 3,4-xylenol. , 3,5-xylenol, 2,3,5-trimethyl phenol, or a mixture of these, and the like.

經由前述階段聚合所製造的酚醛樹脂之聚苯乙烯換算重量平均分子量,較佳係3,000~30,000、更佳係3,000~20,000。 The polystyrene-equivalent weight average molecular weight of the phenol resin produced by the above-described stage polymerization is preferably 3,000 to 30,000, more preferably 3,000 to 20,000.

當本發明的a)樹脂係含有酚醛樹脂時,前述a)樹脂較佳係含有:聚醯亞胺先質40~85重量%、聚羥苯乙烯 10~55重量%、及酚醛樹脂1~20重量%。 When the resin of a) of the present invention contains a phenol resin, the a) resin preferably contains: 40 to 85% by weight of polybenzazole precursor, polyhydroxystyrene 10 to 55% by weight, and 1 to 20% by weight of the phenolic resin.

本發明所使用前述b)的1,2-醌二疊氮化合物係當作光敏性化合物使用。前述b)1,2-醌二疊氮化合物係若適用為公知OLED的有機絕緣膜形成中所使用光敏性組成物,便均可使用,其中一例係使用由酚化合物與萘醌二疊氮磺酸鹵化合物進行反應而獲得者。 The 1,2-quinonediazide compound of the above b) used in the present invention is used as a photosensitive compound. The b) 1,2-quinonediazide compound can be used as the photosensitive composition used in the formation of an organic insulating film of a known OLED, and one of the examples is a phenol compound and naphthoquinonediazide. The acid halide compound is obtained by a reaction.

較佳,前述1,2-醌二疊氮化合物係可使用例如:1,2-醌二疊氮4-磺酸酯、1,2-醌二疊氮5-磺酸酯、或1,2-醌二疊氮6-磺酸酯等。 Preferably, the above-mentioned 1,2-quinonediazide compound may be, for example, 1,2-quinonediazide 4-sulfonate, 1,2-quinonediazide 5-sulfonate, or 1,2 - quinone diazide 6-sulfonate and the like.

前述b)1,2-醌二疊氮化合物係相對於a)的樹脂100重量份,較佳含有5~50重量份。若此含量未滿5重量份,則曝光部與非曝光部的溶解度差會縮小,導致圖案形成趨於困難;反之,若超過50重量份,則在短時間中照射光之時,會有大量殘存未反應1,2-醌二疊氮化合物,導致對屬於顯影液的鹼水溶液之溶解度過度降低,亦會造成顯影困難。 The b) 1,2-quinonediazide compound is preferably contained in an amount of 5 to 50 parts by weight based on 100 parts by weight of the resin of a). If the content is less than 5 parts by weight, the difference in solubility between the exposed portion and the non-exposed portion may be reduced, resulting in difficulty in pattern formation; on the other hand, if it exceeds 50 parts by weight, there will be a large amount of light when irradiated in a short time. The remaining unreacted 1,2-quinonediazide compound causes an excessive decrease in the solubility of the aqueous alkali solution belonging to the developer, which also causes difficulty in development.

本發明所使用前述c)的交聯劑,係具有會與a)的樹脂形成交聯結構之作用,較佳前述交聯劑係三聚氰胺系交聯劑。 The crosslinking agent of the above c) used in the present invention has a function of forming a crosslinked structure with the resin of a), and the crosslinking agent is preferably a melamine-based crosslinking agent.

前述三聚氰胺系交聯劑係可使用例如:脲與甲醛的縮合生成物、三聚氰胺與甲醛的縮合生成物、或由醇所獲得的羥甲基脲烷基醚類、羥甲基三聚氰胺烷基醚類等。 As the melamine-based crosslinking agent, for example, a condensation product of urea and formaldehyde, a condensation product of melamine and formaldehyde, or a methylol urea alkyl ether obtained from an alcohol, or a methylol melamine alkyl ether can be used. Wait.

具體而言,前述脲與甲醛的縮合生成物係可使用單羥甲基脲、二羥甲基脲等。前述三聚氰胺與甲醛的縮合生成物係可使用六羥甲基三聚氰胺,其他尚可使用三聚氰 胺與甲醛的部分性縮合生成物。 Specifically, as the condensation product of urea and formaldehyde, monomethylol urea, dimethylol urea or the like can be used. The condensation product of melamine and formaldehyde may be hexamethylol melamine, and other melamine may be used. A partial condensation product of an amine and formaldehyde.

再者,前述羥甲基脲烷基醚類係脲與甲醛的縮合生成物中,使羥甲基其中一部分或全部與醇類進行反應而獲得者,具體例係可使用單甲基脲甲醚、二甲基脲甲醚等。前述羥甲基三聚氰胺烷基醚類係三聚氰胺與甲醛的縮合生成物中,使羥甲基其中一部分或全部與醇類進行反應而獲得者,具體例係可使用六羥甲基三聚氰胺六甲醚、六羥甲基三聚氰胺六丁醚等。又,亦可使用三聚氰胺的胺基之氫原子,被取代為羥甲基及甲氧基甲基之結構的化合物;三聚氰胺的胺基之氫原子,被取代為丁氧基甲基及甲氧基甲基之結構的化合物等,特佳係使用羥甲基三聚氰胺烷基醚類。 Further, the hydroxymethyl urea alkyl ether is a condensation product of urea and formaldehyde, and a part or all of the methylol group is reacted with an alcohol, and specific examples thereof may be monomethyl urea methyl ether. , dimethyl urea methyl ether and the like. The methylol melamine alkyl ether is a condensation product of melamine and formaldehyde, and a part or all of a methylol group is obtained by reacting an alcohol with an alcohol. Specific examples thereof may be hexamethylol melamine hexamethyl ether or six. Hydroxymethyl melamine hexabutyl ether and the like. Further, a hydrogen atom of an amine group of melamine may be used, and a compound having a structure of a methylol group and a methoxymethyl group; a hydrogen atom of an amine group of melamine may be substituted with a butoxymethyl group and a methoxy group. A compound having a methyl group structure or the like is particularly preferably a methylol melamine alkyl ether.

如前述的三聚氰胺系交聯劑,相對於a)的樹脂100重量份,較佳係含有1~30重量份、更佳係含有1~20重量份。若其含量未滿1重量,便會有光敏速度降低的問題;若超過30重量份,便會有保存安定性降低的問題。 The melamine-based crosslinking agent is preferably contained in an amount of 1 to 30 parts by weight, more preferably 1 to 20 parts by weight, based on 100 parts by weight of the resin of a). If the content is less than 1 by weight, there is a problem that the photosensitive speed is lowered; if it exceeds 30 parts by weight, there is a problem that the storage stability is lowered.

本發明所使用前述d)的溶劑,係具有能依聚醯亞胺光敏性樹脂組成物平坦性與不會發生塗佈滲透的方式,形成均勻圖案輪廓(pattern profile)之作用。 The solvent of the above-mentioned d) used in the present invention has a function of forming a uniform pattern profile in accordance with the flatness of the composition of the polyimideimide photosensitive resin and the infiltration of the coating.

前述溶劑係可使用:甲醇、乙醇、苄醇、己醇等醇類;乙二醇甲醚醋酸酯、乙二醇乙醚醋酸酯等乙二醇烷基醚醋酸酯類;乙二醇甲醚丙酸酯、乙二醇乙醚丙酸酯等乙二醇烷基醚丙酸酯類;乙二醇甲醚、乙二醇乙醚等乙二醇單烷基醚類;二乙二醇單甲醚、二乙二醇單乙醚、二乙 二醇二甲醚、二乙二醇甲乙醚等二乙二醇烷基醚類;丙二醇甲醚醋酸酯、丙二醇乙醚醋酸酯、丙二醇丙醚醋酸酯等丙二醇烷基醚醋酸酯類;丙二醇甲醚丙酸酯、丙二醇乙醚丙酸酯、丙二醇丙醚丙酸酯等丙二醇烷基醚丙酸酯類;丙二醇甲醚、丙二醇乙醚、丙二醇丙醚、丙二醇丁醚等丙二醇單烷基醚類;二丙二醇二甲醚、二丙二醇二乙醚等二丙二醇烷基醚類;丁二醇單甲醚、丁二醇單乙醚等丁二醇單甲醚類;或二丁二醇二甲醚、二丁二醇二乙醚等二丁二醇烷基醚類;γ-丁內酯等。較佳前述溶劑係使用由γ-丁內酯與丙二醇甲醚醋酸酯(PGMEA)分別依10~90:10~90的重量比進行混合之溶劑。此情況的樹脂溶解性、平坦性更佳。 As the solvent, an alcohol such as methanol, ethanol, benzyl alcohol or hexanol; an ethylene glycol alkyl ether acetate such as ethylene glycol methyl ether acetate or ethylene glycol ethyl ether acetate; and ethylene glycol methyl ether acetate can be used. Ethylene glycol alkyl ether propionates such as acid esters, ethylene glycol ether propionates; ethylene glycol monoalkyl ethers such as ethylene glycol methyl ether and ethylene glycol ether; diethylene glycol monomethyl ether; Diethylene glycol alkyl ethers such as diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol methyl ether; propylene glycol alkyl ether; propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, etc. Ethyl ether acetates; propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate and other propylene glycol alkyl ether propionates; propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol propyl ether, propylene glycol butyl ether, etc. Propylene glycol monoalkyl ethers; dipropylene glycol alkyl ethers such as dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether; butanediol monomethyl ether such as butanediol monomethyl ether, butanediol monoethyl ether; or dibutyl Dibutylene glycol alkyl ethers such as glyceryl ether, dibutyl glycol diethyl ether; γ -butyrolactone and the like. Preferably, the solvent is a solvent obtained by mixing γ -butyrolactone and propylene glycol methyl ether acetate (PGMEA) in a weight ratio of 10 to 90:10 to 90, respectively. In this case, the resin has better solubility and flatness.

前述溶劑係佔全體光敏性樹脂組成物的固形份含量,較佳含有5~50重量%、更佳含有15~40重量%。若未滿前述全體組成物的固形份含量之10重量%,塗佈厚度會變薄,導致塗佈平坦性降低的問題;若超過50重量%,則塗佈厚度會變厚,會有在塗佈時對塗佈裝備構成多餘負荷的問題。 The solvent is contained in the solid content of the entire photosensitive resin composition, and preferably contains 5 to 50% by weight, more preferably 15 to 40% by weight. If the content of the solid content of the entire composition is less than 10% by weight, the coating thickness may become thin, resulting in a problem of lowering the flatness of the coating; if it exceeds 50% by weight, the coating thickness may become thicker and may be coated. The problem of excessive load on the coating equipment during the cloth.

再者,本發明的光敏性樹脂組成物基本上係屬於正型光敏性樹脂組成物,藉由更進一步含有光酸產生劑,亦可使用負型光敏性樹脂組成物。前述光酸產生劑係在屬於習知光敏性樹脂組成物所使用光酸產生劑之前提下,其餘並並無特別的限制,較佳係可使用例如:鋶鹽、碘鎓鹽等離子性光酸產生劑、以及磺醯基重氮甲烷系、N-磺醯氧基醯亞胺系、苯偶姻磺酸酯系、硝化苄基磺酸酯系、磺系、 乙二肟(glyoxime)系、或三系等。 Further, the photosensitive resin composition of the present invention is basically a positive photosensitive resin composition, and a negative photosensitive resin composition can also be used by further containing a photoacid generator. The photoacid generator is added before the photoacid generator used in the conventional photosensitive resin composition, and the rest is not particularly limited. Preferably, an ionic photoacid such as a phosphonium salt or an iodonium salt can be used. a generator, a sulfonyldiazomethane, an N-sulfonyloxyimine, a benzoin sulfonate, a nitrated benzylsulfonate, a sulfonate, a glyoxime, Or three Department and so on.

具體而言,前述鋶鹽係鋶陽離子與磺酸酯(磺酸陰離子)的鹽;前述鋶陽離子係例如:三苯基鋶、(4-第三丁氧基苯基)二苯基鋶、雙(4-第三丁氧基苯基)苯基鋶、4-甲基苯基二苯基鋶、三(4-甲基苯基鋶)、4-第三丁基苯基二苯基鋶、三(4-第三丁基苯基)鋶、三(4-第三丁氧基苯基)鋶、(3-第三丁氧基苯基)二苯基鋶、雙(3-第三丁氧基苯基)苯基鋶、三(3-第三丁氧基苯基)鋶、(3,4-二第三丁氧基苯基)二苯基鋶、雙(3,4-二第三丁氧基苯基)苯基鋶、三(3,4-二第三丁氧基苯基)鋶、二苯基(4-硫苯氧基苯基)鋶、(4-第三丁氧基羰甲氧基苯基)二苯基鋶、三(4-第三丁氧基羰甲氧基苯基)鋶、(4-第三丁氧基苯基)雙(4-二甲胺基苯基)鋶、三(4-二甲胺基苯基)鋶、2-萘基二苯基鋶、二甲基-2-萘基鋶、4-羥苯基二甲基鋶、4-甲氧基苯基二甲基鋶、三甲基鋶、二苯基甲基鋶、甲基-2-氧基丙基苯基鋶、2-氧環己基環己基甲基鋶、三萘基鋶、或三苄基鋶等;前述磺酸酯係例如:三氟甲烷磺酸酯、九氟丁烷磺酸酯、十七氟辛烷磺酸酯、2,2,2-三氟乙烷磺酸酯、五氟苯磺酸酯、4-三氟甲基苯磺酸酯、4-氟苯磺酸酯、甲苯磺酸酯、苯磺酸酯、萘磺酸酯、莰磺酸酯、辛烷磺酸酯、十二烷基苯磺酸酯、丁烷磺酸酯、或甲烷磺酸酯等。 Specifically, the above-mentioned phosphonium salt is a salt of a phosphonium cation and a sulfonate (sulfonate anion); and the above phosphonium cation is, for example, triphenylsulfonium, (4-t-butoxyphenyl)diphenylphosphonium, or a double (4-tert-butoxyphenyl)phenylhydrazine, 4-methylphenyldiphenylphosphonium, tris(4-methylphenylphosphonium), 4-tert-butylphenyldiphenylphosphonium, Tris(4-t-butylphenyl)anthracene, tris(4-t-butoxyphenyl)anthracene, (3-t-butoxyphenyl)diphenylanthracene, bis(3-third-butyl) Oxyphenyl) phenyl hydrazine, tris(3-tert-butoxyphenyl) fluorene, (3,4-di-t-butoxyphenyl)diphenyl fluorene, bis(3,4-di Tributyloxyphenyl)phenylhydrazine, tris(3,4-di-t-butoxyphenyl)anthracene, diphenyl(4-thiophenoxyphenyl)anthracene, (4-tert-butoxy Carbomethoxymethoxyphenyl)diphenylphosphonium, tris(4-tert-butoxycarbonylmethoxyphenyl)anthracene, (4-tert-butoxyphenyl)bis(4-dimethylamino) Phenyl) anthracene, tris(4-dimethylaminophenyl)anthracene, 2-naphthyldiphenylanthracene, dimethyl-2-naphthyl anthracene, 4-hydroxyphenyldimethylhydrazine, 4-methyl Oxyphenyl dimethyl hydrazine, trimethyl hydrazine, diphenylmethyl hydrazine, methyl-2-oxypropyl phenyl hydrazine, 2- Oxycyclohexylcyclohexylmethyl hydrazine, trinaphthyl anthracene, or tribenzyl hydrazine, etc.; the aforementioned sulfonic acid esters are, for example, trifluoromethanesulfonate, nonafluorobutane sulfonate, heptafluorooctane sulfonate Ester, 2,2,2-trifluoroethane sulfonate, pentafluorobenzene sulfonate, 4-trifluoromethylbenzenesulfonate, 4-fluorobenzenesulfonate, tosylate, benzenesulfonic acid Ester, naphthalene sulfonate, oxime sulfonate, octane sulfonate, dodecylbenzene sulfonate, butane sulfonate, or methane sulfonate.

前述碘鎓鹽係碘鎓陽離子與磺酸酯(磺酸陰離子)的鹽,前述碘鎓陽離子係二苯基碘鎓、雙(4-第三丁基苯基)碘鎓、4-第三丁氧基苯基苯基碘鎓、或4-甲氧基苯基苯基碘 鎓等;前述磺酸酯係例如:三氟甲烷磺酸酯、九氟丁烷磺酸酯、十七氟辛烷磺酸酯、2,2,2-三氟乙烷磺酸酯、五氟苯磺酸酯、4-三氟甲基苯磺酸酯、4-氟苯磺酸酯、甲苯磺酸酯、苯磺酸酯、萘磺酸酯、莰磺酸酯、辛烷磺酸酯、十二烷基苯磺酸酯、丁烷磺酸酯、或甲烷磺酸酯等。 The iodonium salt is a salt of an iodonium cation and a sulfonate (sulfonate anion), and the iodonium cation is diphenyl iodonium, bis(4-t-butylphenyl) iodonium, and 4-third butyl. Oxyphenyl phenyl iodonium or 4-methoxyphenyl phenyl iodine The above sulfonic acid esters are, for example, trifluoromethanesulfonate, nonafluorobutanesulfonate, heptadecafluorooctanesulfonate, 2,2,2-trifluoroethanesulfonate, pentafluoro Benzene sulfonate, 4-trifluoromethylbenzenesulfonate, 4-fluorobenzenesulfonate, tosylate, benzenesulfonate, naphthalenesulfonate, oxime sulfonate, octane sulfonate, Dodecylbenzenesulfonate, butanesulfonate, or methanesulfonate.

前述磺醯基重氮甲烷系光酸產生劑係例如:雙(乙基磺醯基)10-2004-0029289重氮甲烷、雙(1-甲基丙磺醯基)重氮甲烷、雙(2-甲基丙磺醯基)重氮甲烷、雙(1,1-二甲基乙基磺醯基)重氮甲烷、雙(環己基磺醯基)重氮甲烷、雙(全氟異丙磺醯基)重氮甲烷、雙(苯磺醯基)重氮甲烷、雙(4-甲基苯磺醯基)重氮甲烷、雙(2,4-二甲基苯磺醯基)重氮甲烷、雙(2-萘磺醯基)重氮甲烷、4-甲基苯磺醯基苯甲醯基重氮甲烷、第三丁基羰基-4-甲基苯磺醯基重氮甲烷、2-萘磺醯基苯甲醯基重氮甲烷、4-甲基苯磺醯基-2-萘甲醯基重氮甲烷、甲基磺醯基苯甲醯基重氮甲烷、或第三丁氧基羰基-4-甲基苯磺醯基重氮甲烷等雙磺醯基重氮甲烷、與磺醯基羰基重氮甲烷。 The aforementioned sulfonyldiazomethane photoacid generator is, for example, bis(ethylsulfonyl) 10-2004-0029289 diazomethane, bis(1-methylpropanesulfonyl)diazomethane, double (2) -methylpropanesulfonyl)diazomethane, bis(1,1-dimethylethylsulfonyl)diazomethane, bis(cyclohexylsulfonyl)diazomethane, bis(perfluoroisopropylsulfonate) Dimethylmethane, bis(phenylsulfonyl)diazomethane, bis(4-methylphenylsulfonyl)diazomethane, bis(2,4-dimethylphenylsulfonyl)diazomethane , bis(2-naphthalenesulfonyl)diazomethane, 4-methylbenzenesulfonyl benzhydryl diazomethane, tert-butylcarbonyl-4-methylbenzenesulfonyldiazomethane, 2- Naphthosulfonyl benzhydryl diazomethane, 4-methylbenzenesulfonyl-2-naphthylcarbenyldiazomethane, methylsulfonyl benzhydryldiazomethane, or tert-butoxy A bis-sulfonyldiazomethane such as carbonyl-4-methylbenzenesulfonyldiazomethane or a sulfonylcarbonyldiazomethane.

前述N-磺醯氧基醯亞胺系光酸產生劑係可例如:琥珀酸醯亞胺、萘二羧酸醯亞胺、酞酸醯亞胺、環己基二羧酸醯亞胺、5-降烯-2,3-二羧酸醯亞胺、或7-雙環[2,2,1]-5-庚烯-2,3-二羧酸醯亞胺等醯亞胺骨架,與例如:三氟甲烷磺酸酯、九氟丁烷磺酸酯、十七氟辛烷磺酸酯、2,2,2-三氟乙烷磺酸酯、五氟苯磺酸酯、4-三氟甲基苯磺酸酯、4-氟苯磺酸酯、甲苯磺酸酯、苯磺酸酯、萘磺酸酯、 莰磺酸酯、辛烷磺酸酯、十二烷基苯磺酸酯、丁烷磺酸酯、或甲烷磺酸酯等的化合物。 The above-mentioned N-sulfodeoxyquinone imine photoacid generator may be, for example, succinimide succinate, quinone dialkyl naphthalate, ruthenium ruthenate, ruthenium cycline dicarboxylate, 5- drop Alkene-2,3-dicarboxylic acid quinone imine, or 7- a quinone imine skeleton such as a bicyclo[2,2,1]-5-heptene-2,3-dicarboxylate imine, and for example: trifluoromethanesulfonate, nonafluorobutane sulfonate, seventeen Fluorane sulfonate, 2,2,2-trifluoroethane sulfonate, pentafluorobenzene sulfonate, 4-trifluoromethylbenzenesulfonate, 4-fluorobenzenesulfonate, toluenesulfonic acid A compound such as an ester, a besylate, a naphthalenesulfonate, an oxime sulfonate, an octane sulfonate, a dodecylbenzenesulfonate, a butane sulfonate, or a methanesulfonate.

前述苯偶姻磺酸酯系光酸產生劑係可例如:苯偶姻甲苯磺酸酯、苯偶姻甲磺酸酯、或苯偶姻丁烷磺酸酯等。 The benzoin sulfonate-based photoacid generator may be, for example, benzoin tosylate, benzoin mesylate, or benzoin butanesulfonate.

前述硝化苄基磺酸酯系光酸產生劑係可例如:磺酸-2,4-二硝化苄酯、磺酸-2-硝化苄酯、或磺酸-2,6-二硝化苄酯等;前述磺酸酯係可例如:三氟甲烷磺酸酯、九氟丁烷磺酸酯、十七氟辛烷磺酸酯、2,2,2-三氟乙烷磺酸酯、五氟苯磺酸酯、4-三氟甲基苯磺酸酯、4-氟苯磺酸酯、甲苯磺酸酯、苯磺酸酯、萘磺酸酯、莰磺酸酯、辛烷磺酸酯、十二烷基苯磺酸酯、丁烷磺酸酯、或甲烷磺酸酯等。又,亦可使用將苄基側的硝基取代為三氟甲基的化合物。 The nitration benzyl sulfonate-based photoacid generator may be, for example, sulfonic acid-2,4-dinitrated benzyl ester, sulfonic acid-2-nitrated benzyl ester, or sulfonic acid-2,6-dinitrated benzyl ester. The aforementioned sulfonate may be, for example, trifluoromethanesulfonate, nonafluorobutanesulfonate, heptadecafluorooctanesulfonate, 2,2,2-trifluoroethanesulfonate, pentafluorobenzene. Sulfonate, 4-trifluoromethylbenzenesulfonate, 4-fluorobenzenesulfonate, tosylate, benzenesulfonate, naphthalenesulfonate, oxime sulfonate, octane sulfonate, ten Dialkylbenzenesulfonate, butanesulfonate, or methanesulfonate, and the like. Further, a compound in which a nitro group on the benzyl group is substituted with a trifluoromethyl group can also be used.

前述磺系光酸產生劑係可例如:雙(苯磺醯基)甲烷、雙(4-甲基苯磺醯基)甲烷、雙(2-萘磺醯基)甲烷、2,2-雙(苯磺醯基)丙烷、2,2-雙(4-甲基苯磺醯基)丙烷、2,2-雙(2-萘磺醯基)丙烷、2-甲基-2-(對甲苯磺醯基)丙酸酮、2-(環己羰基)-2-(對甲苯磺醯基)丙烷、或2,4-二甲基-2-(對甲苯磺醯基)戊烷-3-酮等。 The sulfonic acid photoacid generator may be, for example, bis(phenylsulfonyl)methane, bis(4-methylphenylsulfonyl)methane, bis(2-naphthalenesulfonyl)methane, 2,2-dual ( Phenylsulfonyl)propane, 2,2-bis(4-methylphenylsulfonyl)propane, 2,2-bis(2-naphthalenesulfonyl)propane, 2-methyl-2-(p-toluene) Mercaptopropionate, 2-(cyclohexylcarbonyl)-2-(p-toluenesulfonyl)propane, or 2,4-dimethyl-2-(p-toluenesulfonyl)pentan-3-one Wait.

前述乙二肟系光酸產生劑係可例如:雙-o-(對甲苯磺醯基)-α-雙乙酮肟、雙-o-(對甲苯磺醯基)-α-雙乙酮肟、雙-o-(對甲苯磺醯基)-α-二環己基乙二肟、雙-o-(對甲苯磺醯基)-2,3-戊二酮乙二肟、雙-o-(對甲苯磺醯基)-2-甲基-3,4-戊二酮乙二肟、雙-o-(正丁烷磺醯基)-α-雙乙酮肟、雙-o-(正丁烷磺醯基)-α-雙乙酮肟、雙-o-(正丁烷磺醯基)-α- 二環己基乙二肟、雙-o-(正丁烷磺醯基)-2,3-戊二酮乙二肟、雙-o-(正丁烷磺醯基)-2-甲基-3,4-戊二酮乙二肟、雙-o-(甲烷磺醯基)-α-雙乙酮肟、雙-o-(三氟甲烷磺醯基)-α-雙乙酮肟、雙-o-(1,1,1-三氟乙烷磺醯基)-α-雙乙酮肟、雙-o-(第三丁烷磺醯基)-α-雙乙酮肟、雙-o-(全氟辛烷磺醯基)-α-雙乙酮肟、雙-o-(環己基磺醯基)-α-雙乙酮肟、雙-o-(苯磺醯基)-α-雙乙酮肟、雙-o-(對氟苯磺醯基)-α-雙乙酮肟、雙-o-(對第三丁基苯磺醯基)-α-雙乙酮肟、雙-o-(二甲苯磺醯基)-α-雙乙酮肟、或雙-o-(莰磺醯基)-α-雙乙酮肟等。 The above-mentioned ethylenediamine photoacid generator may be, for example, bis-o-(p-toluenesulfonyl)-α-diketoxime, bis-o-(p-toluenesulfonyl)-α-diketidoxime , bis-o-(p-toluenesulfonyl)-α-dicyclohexylethylenediazine, bis-o-(p-toluenesulfonyl)-2,3-pentanedione ethanedioxime, bis-o-( p-Toluenesulfonyl)-2-methyl-3,4-pentanedione ethanedioxane, bis-o-(n-butanesulfonyl)-α-diethanol oxime, bis-o-(n-butyl) Alkylsulfonyl)-α-diethanol oxime, bis-o-(n-butanesulfonyl)-α- Dicyclohexylethylenediazine, bis-o-(n-butanesulfonyl)-2,3-pentanedione ethanedioxime, bis-o-(n-butanesulfonyl)-2-methyl-3 , 4-pentanedione, ethylenedioxime, bis-o-(methanesulfonyl)-α-diacetone oxime, bis-o-(trifluoromethanesulfonyl)-α-diacetone oxime, double- O-(1,1,1-trifluoroethanesulfonyl)-α-diacetone oxime, bis-o-(t-butanesulfonyl)-α-diacetone oxime, double-o- (Perfluorooctanesulfonyl)-α-diacetone oxime, bis-o-(cyclohexylsulfonyl)-α-diacetone oxime, bis-o-(phenylsulfonyl)-α-double Ethyl ketone oxime, bis-o-(p-fluorophenylsulfonyl)-α-diacetone oxime, bis-o-(p-tert-butylphenylsulfonyl)-α-diacetone oxime, double-o - (xylsulfonyl)-α-diacetone oxime, or bis-o-(nonylsulfonyl)-α-diketoloxime or the like.

前述三系光酸產生劑係可例如:PDM-三、WS-三、PDM-三、二甲氧基-三(Dimethoxy-Triazine)、MP-三、TFE-三、或TME-三(三和化學)等。 The aforementioned three The photoacid generator can be, for example, PDM-three WS-three , PDM-three Dimethoxy-three (Dimethoxy-Triazine), MP-three , TFE-three Or TME-three (Sanhe Chemical) and so on.

前述光酸產生劑係相對於a)的樹脂100重量份,較佳係含有1~20重量份、更佳係含有1~10重量份。若該含量未滿1重量份,則會有光敏速度(photospeed)降低的問題;若超過20重量份,便會有使脫氣(outgassing)與保存安定性降低的問題。 The photoacid generator is preferably contained in an amount of 1 to 20 parts by weight, more preferably 1 to 10 parts by weight, per 100 parts by weight of the resin of a). If the content is less than 1 part by weight, there is a problem that the photospeed is lowered. When it exceeds 20 parts by weight, there is a problem that the outgassing and the storage stability are lowered.

由如前述成分所構成的本發明光敏性樹脂組成物係視需要可追加含有界面活性劑。 The photosensitive resin composition of the present invention comprising the above-mentioned components may optionally contain a surfactant.

前述界面活性劑係具有提升本發明聚醯亞胺光敏性組成物之密接性、塗佈性、顯影性的作用。 The above surfactant has an effect of improving the adhesion, coatability, and developability of the polyimideimide photosensitive composition of the present invention.

前述界面活性劑係可使用例如:聚氧乙烯辛基苯 醚、聚氧乙烯壬基苯醚、F171、F172、F173(商品名:大日本油墨公司);FC430、FC431(商品名:住友3M公司);或KP341(商品名:信越化學工業公司)等。 For the aforementioned surfactant, for example, polyoxyethylene octylbenzene can be used. Ether, polyoxyethylene nonylphenyl ether, F171, F172, F173 (trade name: Dainippon Ink Co., Ltd.); FC430, FC431 (trade name: Sumitomo 3M); or KP341 (trade name: Shin-Etsu Chemical Co., Ltd.).

前述界面活性劑係相對於前述a)的樹脂100重量份,較佳含有0.0001~2重量份,若此含量在前述範圍內,便可更加提升光敏性組成物的塗佈性與顯影性。 The surfactant is preferably contained in an amount of 0.0001 to 2 parts by weight based on 100 parts by weight of the resin of the above a). When the content is within the above range, the coating property and developability of the photosensitive composition can be further improved.

由如前述成分所構成的本發明有機發光二極體之聚醯亞胺光敏性樹脂組成物,其固形份濃度較佳係10~50重量份,具有前述範圍之固形份的組成物係可經利用0.1~0.2μm精密過濾器等施行過濾後才使用。 The polyamidimide photosensitive resin composition of the organic light-emitting diode of the present invention comprising the above-mentioned components preferably has a solid content concentration of 10 to 50 parts by weight, and a composition having a solid content of the above range can be It is used only after filtering with a 0.1~0.2μm precision filter.

再者,本發明所提供的OLED基板之圖案形成方法,係使用:含有前述有機發光二極體之聚醯亞胺光敏性樹脂組成物硬化體的OLED基板、及前述有機發光二極體之聚醯亞胺光敏性樹脂組成物。 Furthermore, the pattern forming method of the OLED substrate provided by the present invention uses an OLED substrate containing a hardened body of the polyimine photosensitive resin composition of the organic light-emitting diode, and the above-mentioned organic light-emitting diode. A quinone imine photosensitive resin composition.

本發明的OLED基板之圖案形成方法,係使用光敏性樹脂組成物形成OLED基板之圖案的方法,其特徵在於:使用前述有機發光二極體之聚醯亞胺光敏性樹脂組成物。較佳前述基板係AMOLED基板。 The pattern forming method of the OLED substrate of the present invention is a method of forming a pattern of an OLED substrate using a photosensitive resin composition, characterized in that a polyimide polyimide photosensitive resin composition of the above organic light-emitting diode is used. Preferably, the substrate is an AMOLED substrate.

具體例,使用前述有機發光二極體之聚醯亞胺光敏性樹脂組成物形成OLED基板之圖案的方法,係如下所述。 Specifically, a method of forming a pattern of an OLED substrate using the polyimine photosensitive resin composition of the above organic light-emitting diode is as follows.

首先,將本發明的有機發光二極體之聚醯亞胺光敏性樹脂組成物,利用噴塗法、輥塗法、旋塗法等塗佈於基板表面上,經預烘烤而去除溶劑,便形成塗佈膜。此時, 前述預烘烤較佳係依80~120℃的溫度實施1~15分鐘。 First, the polyimine photosensitive resin composition of the organic light-emitting diode of the present invention is applied onto the surface of the substrate by a spray coating method, a roll coating method, a spin coating method, or the like, and the solvent is removed by prebaking. A coating film is formed. at this time, The prebaking is preferably carried out at a temperature of 80 to 120 ° C for 1 to 15 minutes.

然後,利用預先準備的圖案,將可見光線、紫外線、遠紫外線、電子束、X射線等照射於前述所形成的塗佈膜上,視需要實施曝光後烘烤(PEB)與全面曝光(Flood Exposure)後,再利用顯影液施行顯影而去除不需要的部分便形成既定圖案。 Then, visible light rays, ultraviolet rays, far ultraviolet rays, electron beams, X-rays, and the like are irradiated onto the formed coating film by using a pattern prepared in advance, and post-exposure bake (PEB) and full exposure (Flood Exposure) are performed as needed. After that, development is performed by the developer to remove unnecessary portions to form a predetermined pattern.

前述顯影液最好使用鹼水溶液,具體係可使用例如:氫氧化鈉、氫氧化鉀、碳酸鈉等無機鹼類;乙胺、正丙胺等一級胺類;二乙胺、正丙胺等二級胺類;三甲胺、甲基二乙胺、二甲基乙胺、三乙胺等三級胺類;二甲基乙醇胺、甲基二乙醇胺、三乙醇胺等醇胺類;或氫氧化四甲銨、氫氧化四乙銨等四級銨鹽的水溶液等等。此時,前述顯影液係將鹼性化合物溶解成0.1~10重量%濃度之後才使用,亦可適當量添加例如甲醇、乙醇等之類的水溶性有機溶劑及界面活性劑。 The developing solution is preferably an aqueous alkali solution, and specific examples thereof include inorganic bases such as sodium hydroxide, potassium hydroxide, and sodium carbonate; primary amines such as ethylamine and n-propylamine; and secondary amines such as diethylamine and n-propylamine. a tertiary amine such as trimethylamine, methyldiethylamine, dimethylethylamine or triethylamine; an alcohol amine such as dimethylethanolamine, methyldiethanolamine or triethanolamine; or tetramethylammonium hydroxide; An aqueous solution of a quaternary ammonium salt such as tetraethylammonium hydroxide or the like. In this case, the developing solution is used after dissolving the basic compound in a concentration of 0.1 to 10% by weight, and a water-soluble organic solvent such as methanol or ethanol or the like may be added in an appropriate amount.

再者,利用如前述的顯影液施行顯影後,再利用超純水施行30~90秒鐘洗淨而去除不必要的部分,經乾燥便形成圖案,對圖案利用烤箱等加熱裝置依130~250℃溫度施行30~90分鐘加熱處理,便可獲得最終圖案。 Furthermore, after performing development by the developer as described above, it is washed with ultrapure water for 30 to 90 seconds to remove unnecessary portions, and after drying, a pattern is formed, and the pattern is heated by a heating device such as an oven. The final pattern can be obtained by heating at °C for 30 to 90 minutes.

本發明的有機發光二極體之聚醯亞胺光敏性樹脂組成物,係適用於藉由使用容易調節溶解度的聚醯亞胺先質而進行OLED的有機絕緣膜形成,特別係藉由明顯提升感度而適用於OLED製造步驟。 The polyimine photosensitive resin composition of the organic light-emitting diode of the present invention is suitable for forming an organic insulating film of an OLED by using a polyimide precursor which is easy to adjust solubility, in particular, by significantly improving Sensitivity is suitable for OLED manufacturing steps.

以下,為求本發明的理解而提示較佳實施例,惟 下述實施例僅止於例示本發明而已,本發明範圍並不僅侷限於下述實施例。 In the following, preferred embodiments are presented for the understanding of the present invention, but The following examples are merely illustrative of the invention, and the scope of the invention is not limited to the following examples.

[實施例] [Examples] 實施例1 Example 1 (聚醯亞胺先質之製造) (Manufacture of poly-imine precursors)

在300ml的四口反應容器中,利用γ-丁內酯70g溶解屬於二胺(Diamine)的DADM(化學式5)4g、Bis-APAF(化學式6)7g、SiDA(化學式7)1g。又,將屬於二酐(Dianhydride)的6-FDA(化學式2)5g、DOCDA(化學式3)3g、及a-BPDA(化學式4)3g投入反應容器中,一邊攪拌1小時一邊進行反應。為終結末端的反應而投入PA2g後,依20℃進行1小時的追加反應,便製得固形份含量30%的聚醯亞胺先質。在其中分別投入屬於保護物質的ECMMA與MGMA各5g合計10g後,升溫至70℃後,添加屬於觸媒的TEA,進行24小時反應而製得新穎聚醯亞胺先質。 In a four-neck reaction vessel of 300 ml, 70 g of DADM (chemical formula 5), 7 g of Bis-APAF (chemical formula 6), and 1 g of SiDA (chemical formula 7) belonging to a diamine were dissolved by 70 g of γ -butyrolactone. Further, 6-FDA (Chemical Formula 2) 5 g, DOCDA (Chemical Formula 3) 3 g, and a-BPDA (Chemical Formula 4) 3 g, which are dianhydrides, were put into a reaction container, and the reaction was carried out while stirring for 1 hour. After PA2g was added to the reaction at the terminal end, an additional reaction was carried out at 20 ° C for 1 hour to obtain a polyimide intermediate having a solid content of 30%. After adding 10 g of 5 g of each of ECMMA and MGMA belonging to the protective substance, the temperature was raised to 70° C., and TEA belonging to the catalyst was added, and the reaction was carried out for 24 hours to obtain a novel polyimine precursor.

(有機發光二極體之聚醯亞胺光敏性樹脂組成物之製造) (Manufacture of polyfluorene imamine photosensitive resin composition of organic light-emitting diode)

將前述所製得聚醯亞胺先質30重量份、聚羥苯乙烯20重量份、1,2-醌二疊氮化合物20重量份、及當作三聚氰胺交聯劑用的六羥甲基三聚氰胺5重量份進行混合。然後,利用由γ-丁內酯與PGMEA依50:50重量比進行混合的溶劑,溶解成前述混合物的固形份含量成為20重量%之後,利用0.2μm精密過濾器進行過濾,便製得有機發光二極體之聚醯亞胺光敏性樹脂組成物。 30 parts by weight of the obtained polyimine precursor, 20 parts by weight of polyhydroxystyrene, 20 parts by weight of 1,2-quinonediazide compound, and hexamethylol melamine used as a melamine crosslinking agent 5 parts by weight were mixed. Then, using a solvent in which γ -butyrolactone and PGMEA were mixed at a weight ratio of 50:50, the solid content of the mixture was 20% by weight, and then filtered by a 0.2 μm precision filter to obtain an organic light-emitting layer. A polypolarimide photosensitive resin composition of a diode.

實施例2 Example 2

前述實施例1中,除在聚醯亞胺先質製造時係使 用ECMMA(10g)之外,其餘均實施與前述實施例1同樣的方法,製造有機發光二極體之聚醯亞胺光敏性樹脂組成物。 In the foregoing Embodiment 1, except for the production of the polyimide precursor The polyimine photosensitive resin composition of the organic light-emitting diode was produced in the same manner as in the above Example 1 except for using ECMMA (10 g).

實施例3 Example 3

前述實施例1中,除取代ECMMA改為使用MGMA10g之外,其餘均實施與前述實施例1同樣的方法,製造有機發光二極體之聚醯亞胺光敏性樹脂組成物。 In the first embodiment, the same procedure as in the above-mentioned Example 1 was carried out except that the substituted ECMMA was changed to MGMA10g, and a polyfluorene imamine photosensitive resin composition of an organic light-emitting diode was produced.

實施例4 Example 4

前述實施例1中,除光酸產生劑係更進一步使用三系TME-三3重量份之外,其餘均實施與前述實施例1同樣的方法,製造有機發光二極體之聚醯亞胺光敏性樹脂組成物。 In the foregoing Embodiment 1, the photoacid generator is further used in the third TME-three The polyimine photosensitive resin composition of the organic light-emitting diode was produced in the same manner as in the above Example 1 except for 3 parts by weight.

比較例1 Comparative example 1

前述實施例1中,除取代ECMMA改為使用GMA8g之外,其餘均實施與前述實施例1同樣的方法,製造有機發光二極體之聚醯亞胺光敏性樹脂組成物。 In the above-mentioned Example 1, except that the substituted ECMMA was replaced with GMA8g, the same method as in the above Example 1 was carried out to produce a polyfluorene imamine photosensitive resin composition of an organic light-emitting diode.

比較例2 Comparative example 2

前述實施例1中,除取代ECMMA改為使用GMA10g之外,其餘均實施與前述實施例1同樣的方法,製造有機發光二極體之聚醯亞胺光敏性樹脂組成物。 In the above-mentioned Example 1, except that the substituted ECMMA was changed to GMA10g, the same method as in the above Example 1 was carried out to produce a polyfluorene imamine photosensitive resin composition of an organic light-emitting diode.

使用依前述實施例1至4、及比較例1至2所製造的有機發光二極體之聚醯亞胺光敏性樹脂組成物,依照如下述方法評價物性後,再將結果記於下述表1。 Using the polyimine photosensitive resin composition of the organic light-emitting diodes manufactured in the above Examples 1 to 4 and Comparative Examples 1 to 2, the physical properties were evaluated according to the following method, and the results were recorded in the following table. 1.

1)感度:在已蒸鍍ITO的10mm×10mm玻璃(glass)基板 上,使用旋塗機塗佈由前述實施例1至4、及比較例1至2所製造的有機發光二極體之聚醯亞胺光敏性樹脂組成物後,依110℃ 2分鐘在加熱板上施行預烘烤,便形成厚度3.0μm的膜。對所形成的膜,使用既定圖案遮罩(pattern mask),利用365nm下的強度為10mW/cm2之紫外線,照射20μm絕緣圖案(Isolate Pattern)CD基準劑量(Dose)量後,利用氫氧化四甲銨2.38重量%水溶液,於23℃下施行100秒鐘顯影後,利用超純水施行1分鐘洗淨。依前述而顯影的圖案在烤箱中,依230℃施行60分鐘加熱而使硬化,便獲得厚度2.5μm的圖案膜。 1) Sensitivity: On the 10 mm × 10 mm glass substrate on which ITO was vapor-deposited, the polymerization of the organic light-emitting diodes manufactured by the foregoing Examples 1 to 4 and Comparative Examples 1 to 2 was applied using a spin coater. After the composition of the quinoneimide photosensitive resin, prebaking was performed on a hot plate at 110 ° C for 2 minutes to form a film having a thickness of 3.0 μm. Using a predetermined pattern mask, using a predetermined pattern mask, using an ultraviolet ray having a intensity of 10 mW/cm 2 at 365 nm, and irradiating a 20 μm insulating pattern CD dose amount (Dose), A 2.3% by weight aqueous solution of methylammonium was developed at 23 ° C for 100 seconds, and then washed with ultrapure water for 1 minute. The pattern developed as described above was hardened by heating in an oven at 230 ° C for 60 minutes to obtain a pattern film having a thickness of 2.5 μm.

2)溶解度:確認先質製造後有無析出、及確認光敏性樹脂組成物製造後經3小時攪拌後有無析出物及未溶解物,經追加3小時攪拌後才確認。經3小時攪拌後無析出物與未溶解物(◎);經3小時攪拌後雖有析出物與未溶解物,但經追加3小時攪拌後卻沒有(○);即便經6小時攪拌後仍有析出物與未溶解物(×)。 2) Solubility: It was confirmed whether or not the precipitate was precipitated after the production of the precursor, and it was confirmed that the precipitated product and the undissolved product were stirred after the photosensitive resin composition was produced for 3 hours, and it was confirmed after stirring for 3 hours. After stirring for 3 hours, there was no precipitated or undissolved material (?); after stirring for 3 hours, there were precipitates and undissolved matter, but after stirring for 3 hours, there was no (○); even after stirring for 6 hours There are precipitates and undissolved matter (x).

如前述表1所示,依照本發明所製造的實施例1 至4的有機發光二極體之聚醯亞胺光敏性樹脂組成物,係溶解度與感度同時均優異,由此種結果得知,依照本發明的有機發光二極體之聚醯亞胺光敏性樹脂組成物,係當適用於OLED製造步驟(特別係AMOLED製造步驟)時,能獲得更優異的結果。 As shown in Table 1 above, Example 1 manufactured in accordance with the present invention The polyimine photosensitive resin composition of the organic light-emitting diode of 4 is excellent in solubility and sensitivity at the same time. From the results, the photosensitive polyimide of the organic light-emitting diode according to the present invention is photosensitive. The resin composition is more suitable when it is applied to an OLED manufacturing step (particularly, an AMOLED manufacturing step).

相反的,比較例1的情況,因為溶解度較低、感度較低,因而較難適用於OLED步驟;比較例2的情況,在先質製造時會因凝膠化(Gelation)而出現析出物,即便光敏性樹脂組成物製造後仍然會有析出物殘存,導致無法進行感度評價,得知頗難適用。 On the contrary, in the case of Comparative Example 1, since the solubility was low and the sensitivity was low, it was difficult to apply to the OLED step; in the case of Comparative Example 2, precipitates appeared due to gelation during the production of the precursor. Even after the photosensitive resin composition was produced, precipitates remained, which made it impossible to evaluate the sensitivity, and it was found to be difficult to apply.

Claims (10)

一種用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其特徵在於:OLED用光敏性樹脂組成物含有:a)含有i)下述化學式1所示聚醯亞胺先質、及ii)聚羥苯乙烯(poly hydroxy styrene)的樹脂100重量份;b)1,2-醌二疊氮化合物5~50重量份;c)交聯劑1~30重量份;及d)溶劑佔全體聚醯亞胺光敏性樹脂組成物之固形份含量的5~50重量%; 前述化學式1中,X係4價有機基;Y係2價有機基;R係各自獨立的由甲基丙烯酸環氧環己基甲酯(epoxy cyclohexyl methyl methacrylate、ECMMA)所衍生之1價有機基、或由甲基丙烯酸甲基環氧丙酯(methylglycidyl methacrylate、MGMA)所衍生之1價有機基;n係3~100000的整數。 A composition of a polyimide resin photosensitive resin for an organic light-emitting diode, characterized in that the photosensitive resin composition for OLED contains: a) a polyimide-containing precursor of the following formula 1; And ii) 100 parts by weight of a polyhydroxy styrene resin; b) 5 to 50 parts by weight of a 1,2-quinonediazide compound; c) 1 to 30 parts by weight of a crosslinking agent; and d) a solvent 5 to 50% by weight of the solid content of the entire polyimine photosensitive resin composition; In the above Chemical Formula 1, the X-based tetravalent organic group; the Y-based divalent organic group; and the R-series are each independently a monovalent organic group derived from epoxy cyclohexyl methyl methacrylate (ECMMA), Or a monovalent organic group derived from methylglycidyl methacrylate (MGMA); n is an integer of 3 to 100,000. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中該樹脂係:a)含有i)前述化學式1所示聚醯亞胺先質40~90重量%、及ii)聚羥苯乙烯(poly hydroxy styrene)10~60重量% 的樹脂。 The polyimine photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the resin: a) contains i) the polyimine precursor 40 to 90 of the above Chemical Formula 1 % by weight, and ii) polyhydroxy styrene 10~60% by weight Resin. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述化學式1的X係從2,2-雙(3,4-脫水二羧苯基)六氟丙烷(2,2-bis(3,4-anhydrodicarboxyphenyl)Hexafluoropropane、6FDA)、5-(2,5-二氧四氫呋喃基)-3-甲基-3-環己烯-1,2-二羧酸酐(5-(2,5-Dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylicAnhydride、DOCDA)、或2,3,3',4'-聯苯四羧酸二酐(2,3,3',4'-Biphenyl tetra carboxylic dianhydride、a-BPDA)所衍生的4價有機基。 The polyamidimide photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the X system of the above Chemical Formula 1 is derived from 2,2-bis(3,4-anhydrodicarboxyphenyl) Hexafluoropropane, 6FDA, 5-(2,5-dioxotetrahydrofuranyl)-3-methyl-3-cyclohexene-1,2-di Carboxylic anhydride (5-(2,5-Dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylicAnhydride, DOCDA), or 2,3,3',4'-biphenyltetracarboxylic dianhydride (2 , 4,3', 4'-Biphenyl tetra carboxylic dianhydride, a-BPDA) derived tetravalent organic group. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述化學式1的Y係從4,4'-二胺基-3,3'-二甲基-二苯基甲烷(4,4'-diamino-3,3'-dimethyl-diphenylmethane、DADM)、2,2-雙(3-胺基-4-羥苯基)-六氟丙烷(2,2-Bis(3-amino-4-hydroxyphenyl)-hexafluoropropane、Bis-APAF)、或1,3-雙(3-胺基丙基)四甲基二矽氧烷(1,3-Bis(3-aminopropyl)tetramethyldisiloxane、SiDA(PAM-E))所衍生的2價有機基。 The polyamidimide photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the Y system of the above Chemical Formula 1 is from 4,4'-diamino-3,3'-dimethyl 2,4'-diamino-3,3'-dimethyl-diphenylmethane, DADM, 2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane (2, 2-Bis(3-amino-4-hydroxyphenyl)-hexafluoropropane, Bis-APAF), or 1,3-bis(3-aminopropyl)tetramethyldioxane (1,3-Bis(3- Aminopropyl) a tetravalent organic group derived from tetramethyldisiloxane or SiDA (PAM-E). 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述a)的樹脂係更進一步含有酚醛樹脂。 The polyimine photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the resin of the above a) further contains a phenol resin. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述c)的交聯劑係選自於 由:脲與甲醛的縮合生成物、三聚氰胺與甲醛的縮合生成物、羥甲基脲烷基醚類、及羥甲基三聚氰胺烷基醚類所構成群組之1種以上。 The polyamidimide photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the crosslinking agent of the above c) is selected from the group consisting of One or more groups of the group consisting of a condensation product of urea and formaldehyde, a condensation product of melamine and formaldehyde, a methylol urea alkyl ether, and a methylol melamine alkyl ether. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述d)的溶劑係γ-丁內酯與丙二醇甲基醚醋酸酯(PGMEA)分別依10~90:10~90重量比混合的溶劑。 The polyamidimide photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the solvent of the above d) is γ-butyrolactone and propylene glycol methyl ether acetate (PGMEA) respectively 10~90: 10~90 by weight of mixed solvent. 如申請專利範圍第1項之用於有機發光二極體之聚醯亞胺光敏性樹脂組成物,其中前述光敏性樹脂組成物係更進一步含有光酸產生劑。 The polyamidimide photosensitive resin composition for an organic light-emitting diode according to the first aspect of the invention, wherein the photosensitive resin composition further contains a photoacid generator. 一種有機發光二極體基板,係含有如申請專利範圍第1至8項中任一項之光敏性樹脂組成物的硬化體。 An organic light-emitting diode substrate is a hardened body containing the photosensitive resin composition according to any one of claims 1 to 8. 一種有機發光二極體基板之圖案形成方法,係使用如申請專利範圍第1至8項中任一項之光敏性樹脂組成物。 A method of forming a pattern of an organic light-emitting diode substrate using the photosensitive resin composition according to any one of claims 1 to 8.
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