TWI582721B - Workpiece conductive feature inspecting method and workpiece conductive feature inspecting system - Google Patents
Workpiece conductive feature inspecting method and workpiece conductive feature inspecting system Download PDFInfo
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Description
本發明是有關於一種工件的導電特徵檢查方法及其檢查系統,特別是有關於應用在檢查產線上的工件導電特徵的檢查方法及工件導電特徵檢查系統。The invention relates to a method for inspecting a conductive characteristic of a workpiece and an inspection system thereof, in particular to an inspection method for a conductive characteristic of a workpiece applied on an inspection line and a system for inspecting a conductive characteristic of the workpiece.
傳統上,在電路板或其他電子產品上焊接電子元件時,需要大量的人力。除用以進行焊接的製程外,更肇因於焊接所形成的焊接點辨識較困難,因此,需要更多的品保人力檢查焊接後的電路板或其他電子產品上的焊接點是否具有瑕疵,以保證電路板或其他電子產品的品質。誠然,隨著自動化生□線的普及,多數的焊接製程已可透過機械進行自動製造。舉例來說,如透過波焊機(Wave-soldering machine)等。如此一來,既可節省人力,由機械所進行的自動製造也可肩負較複雜但重複的工作,且避免因疲累所造成的錯誤。然而,在製造過程中,難免會產生瑕疵,且仍需要人力進行檢查工作。但隨著電路板或其他電子產品的焊接越驅複雜,人力所能進行的檢查工作仍易有疏漏。此外,也無法應付更大量、更快速的生產流水線的裝配檢查工作。Traditionally, a large amount of manpower is required to solder electronic components on a circuit board or other electronic product. In addition to the process used for soldering, it is more difficult to identify the solder joints formed by soldering. Therefore, more quality assurance personnel are required to check whether the solder joints on the soldered circuit boards or other electronic products have flaws. To ensure the quality of the circuit board or other electronic products. It is true that with the popularity of automated production lines, most welding processes have been automated through machinery. For example, such as a wave-soldering machine. In this way, labor can be saved, and the automated manufacturing by the machine can also carry more complicated but repetitive work and avoid the mistakes caused by fatigue. However, in the manufacturing process, it is inevitable that flaws will occur, and manpower is still required for inspection work. However, as the welding of circuit boards or other electronic products becomes more complicated, the inspection work that humans can perform is still prone to omissions. In addition, it is not possible to cope with the assembly inspection of a larger number of faster production lines.
此外,目前亦有藉由自動光學檢測系統與方法來檢驗瑕疵的技術,其檢驗過程中最重要的第一件事就是尋找到檢查的標的物,但目前所採用的方式大多都是針對標的物撰寫特定的演算法,但此方式會造成每種特徵的檢測都需要耗費許多的時間,無法快速的增加各類雙列直插封裝(dual in-line package, DIP)檢查的類型。而且,每個托盤的品質不一,所拍出的影像也皆不相同,有些特徵會讓程式誤判成檢查點,造成不必要的人工複驗與檢查時間浪費。In addition, there are also techniques for testing flaws by automated optical inspection systems and methods. The most important first thing in the inspection process is to find the subject matter of the inspection, but most of the methods currently used are for the target. Write a specific algorithm, but this method will take a lot of time to detect each feature, and can not quickly increase the type of dual in-line package (DIP) inspection. Moreover, the quality of each tray is different, and the images taken are also different. Some features may cause the program to be mistakenly judged as a checkpoint, resulting in unnecessary manual re-inspection and wasted time.
由此可見,上述現有的架構,顯然仍存在不便與缺陷,而有待加以進一步改進。□了解□上述問題,相關領域莫不費盡心思來謀求解□之道,但長久以來一直未見適用的方式被發展完成。因此,如何能有效解□上述問題,實屬當前重要研發課題之一,亦成□當前相關領域亟需改進的目標。It can be seen that the above existing architecture obviously has inconveniences and defects, and needs to be further improved. □Understanding the above-mentioned problems, the relevant fields have not tried their best to solve the problem, but the method that has not been applied for a long time has been developed. Therefore, how to effectively solve the above problems is one of the current important research and development topics, and it is also an urgent need for improvement in the relevant fields.
本發明之一技術態樣是有關於一種工件導電特徵檢查方法,其利用將標準工件影像分割成複數個區域較小且特徵預設點較少的標準工件子影像,並與擷取工件部份影像且具有與導電特徵對應之特徵影像的工件子影像相比對,使得比對特徵影像與特徵預設點的計算量與計算時間降低,且可在後續的比對上利用已定位的部分作為錨點產生比對結果。如此一來,可降低計算裝置的負擔與計算時間的長度。甚或,可應用在較快速的生產線上。A technical aspect of the present invention relates to a method for inspecting a conductive characteristic of a workpiece, which utilizes dividing a standard workpiece image into a plurality of standard workpiece sub-images having a small area and fewer feature preset points, and extracting the workpiece portion The image has a comparison with the workpiece sub-image of the feature image corresponding to the conductive feature, so that the calculation amount and calculation time of the comparison feature image and the feature preset point are reduced, and the positioned portion can be used as a subsequent comparison. The anchor points produce a comparison result. In this way, the burden on the computing device and the length of the calculation time can be reduced. Or even, it can be applied to faster production lines.
本發明的一實施方法提供一種工件導電特徵檢查方法,其包含:攝錄設置有複數個導電特徵的一工件的第一部分,以擷取第一工件子影像,其中第一工件子影像具有一或多個第一特徵影像,分別對應導電特徵中一或多個;根據標準工件影像中的複數個特徵預設點,查找特徵預設點與至少部分的一或多個第一特徵影像相應者,以定位第一工件子影像對應標準工件影像的第一區域;以及比對標準工件影像的第一區域與第一工件子影像,若第一區域內的一或多個特徵預設點與一或多個第一特徵影像之間存在有相異處,則判定工件為瑕疵工件。An embodiment of the present invention provides a method for inspecting a conductive characteristic of a workpiece, comprising: recording a first portion of a workpiece provided with a plurality of conductive features to capture a first workpiece sub-image, wherein the first workpiece sub-image has one or The plurality of first feature images respectively correspond to one or more of the conductive features; and according to the plurality of feature preset points in the standard workpiece image, searching for the feature preset point and at least part of the one or more first feature images, Positioning the first workpiece sub-image corresponding to the first region of the standard workpiece image; and comparing the first region of the standard workpiece image with the first workpiece sub-image, if one or more feature preset points in the first region are associated with one or If there is a difference between the plurality of first feature images, it is determined that the workpiece is a workpiece.
在本發明一或多個實施方式中,上述之查找特徵預設點與至少部分的一或多個第一特徵影像相應者的步驟包含:分割標準工件影像成複數個標準工件子影像,其中每一標準工件子影像具有特徵預設點中一或多個;以及比對每一標準工件子影像與第一工件子影像,以定位第一工件子影像對應標準工件影像的第一區域。In one or more embodiments of the present invention, the step of searching for a feature preset point corresponding to at least a portion of the one or more first feature images comprises: dividing the standard workpiece image into a plurality of standard workpiece sub-images, wherein each A standard workpiece sub-image has one or more of feature preset points; and each standard workpiece sub-image and the first workpiece sub-image are compared to locate a first region of the first workpiece sub-image corresponding to the standard workpiece image.
在本發明一或多個實施方式中,上述之第一工件子影像具有複數個第一特徵影像,以及每一標準工件子影像具有複數個特徵預設點,其中查找特徵預設點與至少部分的一或多個第一特徵影像相應者的步驟包含:自第一工件子影像的第一定點,相對第一定點分別獲致第一特徵影像對應的複數個第一特徵影像座標;自每一標準工件子影像的第二定點,相對第二定點分別獲致每一標準工件子影像中的特徵預設點對應的複數個特徵預設點座標;以及根據第一特徵影像座標之間的相對關係與特徵預設點座標之間的相對關係,獲致標準工件子影像中與第一工件子影像重疊的至少一者。In one or more embodiments of the present invention, the first workpiece sub-image has a plurality of first feature images, and each standard workpiece sub-image has a plurality of feature preset points, wherein the feature preset points are at least partially The step of corresponding one or more first feature images includes: obtaining a plurality of first feature image coordinates corresponding to the first feature image from the first fixed point of the first workpiece sub-image; a second fixed point of a standard workpiece sub-image, respectively obtaining a plurality of feature preset point coordinates corresponding to the feature preset points in each standard workpiece sub-image relative to the second fixed point; and a relative relationship between the first feature image coordinates At least one of the standard workpiece sub-images overlapping the first workpiece sub-image is obtained in a relative relationship with the feature preset point coordinates.
在本發明一或多個實施方式中,上述之查找特徵預設點與至少部分的一或多個第一特徵影像相應者的步驟包含:識別一或多個第一特徵影像的輪廓,分別獲致一或多個第一特徵構形;根據每一標準工件子影像的一或多個特徵預設點的輪廓,分別產生一或多個第二特徵構形;以及根據一或多個第一特徵構形與一或多個第二特徵構形相比對,獲致標準工件子影像中與第一工件子影像重疊的至少一者。In one or more embodiments of the present invention, the step of searching for a feature preset point corresponding to at least part of the one or more first feature images comprises: identifying a contour of the one or more first feature images, respectively One or more first feature configurations; generating one or more second feature configurations respectively according to a contour of one or more feature preset points of each standard workpiece sub-image; and according to one or more first features The configuration is compared to the one or more second feature configurations to obtain at least one of the standard workpiece sub-images that overlaps the first workpiece sub-image.
在本發明一或多個實施方式中,上述之工件導電特徵檢查方法還包含:攝錄工件除第一部分以外的其餘者,以擷取至少一第二工件子影像,其中第二工件子影像具有一或多個第二特徵影像,分別對應導電特徵中位於第一部分以外的一或多個;根據第一工件子影像對應標準工件影像的第一區域,定位第二工件子影像對應標準工件影像的第二區域;以及比對標準工件影像的第二區域與第二工件子影像,若第二區域內的一或多個特徵預設點與一或多個第二特徵影像之間存在有相異處,則判定工件為瑕疵工件。In one or more embodiments of the present invention, the method for inspecting a conductive feature of the workpiece further includes: recording a workpiece other than the first portion to capture at least one second sub-image, wherein the second sub-image has One or more second feature images respectively corresponding to one or more of the conductive features other than the first portion; and the second workpiece sub-image corresponding to the standard workpiece image according to the first region of the first workpiece sub-image corresponding to the standard workpiece image a second region; and comparing the second region of the standard workpiece image with the second workpiece sub-image, if there is a difference between one or more feature preset points in the second region and one or more second feature images At the point, it is determined that the workpiece is a workpiece.
本發明的另一實施方法提供一種工件導電特徵檢查系統,其包含至少一工件、至少一攝像工具以及計算裝置。工件具有複數個導電特徵。攝像工具具有視野範圍。攝像工具配置以當工件進入視野範圍內時,擷取第一工件子影像。第一工件子影像具有一或多個第一特徵影像,分別對應導電特徵中一或多個。計算裝置根據標準工件影像中的複數個特徵預設點,查找特徵預設點與至少部分的一或多個第一特徵影像相應者,以定位第一工件子影像對應標準工件影像的第一區域。計算裝置進一步還比對標準工件影像的第一區域與第一工件子影像。若第一區域內的一或多個特徵預設點與一或多個第一特徵影像之間存在有相異處,則判定工件為瑕疵工件。Another embodiment of the present invention provides a workpiece conductive feature inspection system including at least one workpiece, at least one camera tool, and a computing device. The workpiece has a plurality of conductive features. The camera tool has a field of view. The camera tool is configured to capture the first workpiece sub-image when the workpiece enters the field of view. The first workpiece sub-image has one or more first feature images respectively corresponding to one or more of the conductive features. The computing device searches for a feature preset point corresponding to at least part of the one or more first feature images according to the plurality of feature preset points in the standard workpiece image, so as to locate the first region of the first workpiece sub-image corresponding to the standard workpiece image . The computing device further compares the first region of the standard workpiece image with the first workpiece sub-image. If there is a difference between one or more feature preset points in the first area and one or more first feature images, it is determined that the workpiece is a workpiece.
在本發明一或多個實施方式中,上述之工件導電特徵檢查系統更包含生產線。生產線具有產線方向。工件置放在生產線上,並沿產線方向前進。攝像工具依時序擷取工件在視野範圍內的至少一第二工件子影像,其中第二工件子影像具有一或多個第二特徵影像。第二工件子影像至少部分相異於第一工件子影像。計算裝置根據第一工件子影像對應標準工件影像的第一區域,定位第二工件子影像對應標準工件影像的第二區域,並比對標準工件影像的第二區域與第二工件子影像。若第二區域內的一或多個特徵預設點與一或多個第二特徵影像之間存在有相異處,則判定工件為瑕疵工件。In one or more embodiments of the present invention, the above-described workpiece conductive feature inspection system further includes a production line. The production line has a production line direction. The workpiece is placed on the production line and advanced along the production line. The camera tool captures at least one second workpiece sub-image of the workpiece in the field of view according to the timing, wherein the second workpiece sub-image has one or more second feature images. The second workpiece sub-image is at least partially different from the first workpiece sub-image. The computing device positions the second region of the second workpiece sub-image corresponding to the standard workpiece image according to the first region of the first workpiece sub-image corresponding to the standard workpiece image, and compares the second region of the standard workpiece image with the second workpiece sub-image. If there is a difference between one or more feature preset points in the second area and one or more second feature images, it is determined that the workpiece is a workpiece.
在本發明一或多個實施方式中,上述之計算裝置進一步還分割標準工件影像成複數個標準工件子影像。每一標準工件子影像具有特徵預設點中一或多個。接續地,計算裝置比對每一標準工件子影像與第一工件子影像,以定位第一工件子影像對應標準工件影像的第一區域。In one or more embodiments of the present invention, the computing device further divides the standard workpiece image into a plurality of standard workpiece sub-images. Each standard workpiece sub-image has one or more of the feature preset points. Successively, the computing device compares each of the standard workpiece sub-images with the first workpiece sub-image to locate the first region of the first workpiece sub-image corresponding to the standard workpiece image.
在本發明一或多個實施方式中,上述之第一工件子影像具有複數個第一特徵影像,以及每一標準工件子影像具有複數個特徵預設點。其中,計算裝置進一步還於第一工件子影像設定第一定點,且計算第一定點以分別獲致第一特徵影像對應的複數個特徵影像座標。計算裝置還於每一標準工件子影像設定一第二定點,且計算第二定點以分別獲致每一標準工件子影像中的特徵預設點對應的複數個特徵預設點座標。計算裝置還根據特徵影像座標之間的相對關係與特徵預設點座標之間的相對關係,獲致標準工件子影像中與第一工件子影像重疊的至少一者。In one or more embodiments of the present invention, the first workpiece sub-image has a plurality of first feature images, and each standard workpiece sub-image has a plurality of feature preset points. The computing device further sets a first fixed point on the first workpiece sub-image, and calculates a first fixed point to respectively obtain a plurality of feature image coordinates corresponding to the first feature image. The computing device further sets a second fixed point for each standard workpiece sub-image, and calculates a second fixed point to respectively obtain a plurality of feature preset point coordinates corresponding to the feature preset points in each standard workpiece sub-image. The computing device further obtains at least one of the standard workpiece sub-images overlapping the first workpiece sub-image according to the relative relationship between the feature image coordinates and the feature preset point coordinates.
在本發明一或多個實施方式中,上述之計算裝置進一步還識別一或多個第一特徵影像的輪廓,分別獲致一或多個第一特徵構形;根據每一標準工件子影像的一或多個特徵預設點的輪廓,分別產生一或多個第二特徵構形;以及根據一或多個第一特徵構形與一或多個第二特徵構形相比對,獲致標準工件子影像中與工件子影像重疊的至少一者。In one or more embodiments of the present invention, the computing device further identifies an outline of the one or more first feature images, respectively obtaining one or more first feature configurations; and one according to each standard workpiece sub-image Or contours of the plurality of feature preset points respectively generating one or more second feature configurations; and obtaining the standard workpiece according to the one or more first feature configurations compared to the one or more second feature configurations At least one of the images that overlaps the workpiece sub-image.
第1圖為依據本發明多個實施方式繪示之工件導電特徵檢查系統100的簡單示意圖。第2A圖為依據本發明多個實施方式繪示之工件120在工件導電特徵檢查系統100的下視圖。如第1圖所示,工件導電特徵檢查系統100可包含工件120、攝像工具140、計算裝置160以及生產線180。參照第2圖,在多個實施方式中,工件120可包含導電特徵122形成在工件120的表面上。在其他的多個實施方式中,工件120還可先形成圖樣化電路124,接續地才形成導電特徵122。在多個實施方式中,導電特徵122也可連接在圖樣化電路124之間。在多個實施方式中,導電特徵122的材料可為錫、錫合金、無錫焊料或其他合適的焊接材料。1 is a simplified schematic diagram of a workpiece conductive feature inspection system 100 in accordance with various embodiments of the present invention. 2A is a bottom view of the workpiece 120 in the workpiece conductive feature inspection system 100 in accordance with various embodiments of the present invention. As shown in FIG. 1, workpiece conductive feature inspection system 100 can include workpiece 120, imaging tool 140, computing device 160, and production line 180. Referring to FIG. 2, in various embodiments, workpiece 120 can include conductive features 122 formed on a surface of workpiece 120. In other various embodiments, the workpiece 120 may also first form a patterning circuit 124 to form the conductive features 122. In various embodiments, conductive features 122 can also be connected between patterning circuits 124. In various embodiments, the material of the conductive features 122 can be tin, tin alloy, tin-free solder, or other suitable solder material.
第2B圖為依據本發明多個實施方式繪示之工件影像300的示意圖,其中工件影像300對應工件120,且第一工件子影像320為工件影像300中與視野範圍142對應的部分。同時參照第1圖、第2A圖以及第2B圖。攝像工具140可具有視野範圍142。攝像工具140配置以當工件120進入視野範圍142內時,在視野範圍142中擷取第一工件子影像320。在多個實施方式中,攝像工具140可自工件120的下方擷取第一工件子影像320,但不限於此。更具體地說,攝像工具140只要自可擷取工件120的第一工件子影像320的方向攝錄工件120即可。在多個實施方式中,第一工件子影像320可具有一或多個第一特徵影像322,分別與導電特徵122中一或多個相對應。在其他的多個實施方式中,第一工件子影像320可更具有一或多個第一圖樣化電路影像324,分別與圖樣化電路124中一或多個相對應。於一實施方式中,攝像工具140可為工業相機,但不限於此。FIG. 2B is a schematic diagram of a workpiece image 300 according to various embodiments of the present invention, wherein the workpiece image 300 corresponds to the workpiece 120, and the first workpiece sub-image 320 is a portion of the workpiece image 300 corresponding to the field of view 142. Reference is also made to Fig. 1, Fig. 2A, and Fig. 2B. Camera tool 140 can have a field of view 142. The camera tool 140 is configured to capture the first workpiece sub-image 320 in the field of view 142 as the workpiece 120 enters the field of view 142. In various embodiments, the camera tool 140 can extract the first workpiece sub-image 320 from below the workpiece 120, but is not limited thereto. More specifically, the imaging tool 140 only needs to record the workpiece 120 from the direction in which the first workpiece sub-image 320 of the workpiece 120 can be captured. In various embodiments, the first workpiece sub-image 320 can have one or more first feature images 322 corresponding to one or more of the conductive features 122, respectively. In other embodiments, the first workpiece sub-image 320 may have one or more first patterned circuit images 324 corresponding to one or more of the patterning circuits 124, respectively. In an embodiment, the camera tool 140 can be an industrial camera, but is not limited thereto.
第4圖為依據本發明多個實施方式繪示之標準工件影像400的簡單示意圖。同時參照第1圖、第2B圖以及第4圖。在多個實施方式中,計算裝置160可具有第一編程162以及第二編程164。在多個實施方式中,第一編程162可用以根據第4圖中的標準工件影像400中的複數個特徵預設點410,查找特徵預設點410與第2B圖中至少部分的一或多個第一特徵影像322對應者,藉此定位第一工件子影像320對應標準工件影像400的第一區域430。其中,查找與定位的方法可透過,舉例來說,像是參照第7圖的步驟S701~S703或第8圖的步驟S801~S802來達致,將如後詳述,但並不限於此。在多個實施方式中,第二編程164可用以比對標準工件影像400的第一區域430與第一工件子影像320。若第一區域430內的一或多個特徵預設點410與一或多個第一特徵影像322之間實質上完全對應,則可判定工件120為正常工件。4 is a simplified schematic diagram of a standard workpiece image 400 in accordance with various embodiments of the present invention. Reference is also made to Fig. 1, Fig. 2B, and Fig. 4. In various implementations, computing device 160 can have first programming 162 and second programming 164. In various embodiments, the first programming 162 can be used to find one or more of the feature preset point 410 and at least part of the 2B map according to the plurality of feature preset points 410 in the standard workpiece image 400 in FIG. The first feature image 322 corresponds to the first workpiece sub-image 320 corresponding to the first region 430 of the standard workpiece image 400. The method for searching and locating can be achieved, for example, by referring to steps S701 to S703 of FIG. 7 or steps S801 to S802 of FIG. 8, which will be described in detail later, but is not limited thereto. In various embodiments, the second programming 164 can be used to align the first region 430 of the standard workpiece image 400 with the first workpiece sub-image 320. If one or more feature preset points 410 in the first region 430 substantially correspond to one or more first feature images 322, the workpiece 120 can be determined to be a normal workpiece.
第3A圖為依據本發明另外多個實施方式繪示之工件120A在工件導電特徵檢查系統100的下視圖。第3B圖為依據本發明另外多個實施方式繪示之工件子影像320A的示意圖,其中工件影像300A對應工件120A,且第一工件子影像320A為工件影像300A中與視野範圍142對應的部分。同時參照第3A圖、3B圖與第4圖。如第3A圖所示,在多個實施方式中,工件120A可包含正常的導電特徵122A與具有瑕疵或缺漏的導電特徵122B。對應地,根據視野範圍142中的工件120A所產生的第一工件子影像320A可具有第一特徵影像322A以及第一特徵影像322B,分別與正常的導電特徵122A以及瑕疵或缺漏的導電特徵122B相對應。因此,當計算裝置160透過第二編程164比對標準工件影像400的第一區域430與第一工件子影像320A時,會判定第一區域430內的一或多個特徵預設點310與第一工件子影像320A中的一或多個第一特徵影像322A、322B之間有相異處,舉例來說,如第一特徵影像322B處。如此一來,計算裝置160可判定工件120A為瑕疵工件。FIG. 3A is a bottom view of the workpiece 120A in the workpiece conductive feature inspection system 100 in accordance with still other embodiments of the present invention. FIG. 3B is a schematic diagram of a workpiece sub-image 320A according to another embodiment of the present invention, wherein the workpiece image 300A corresponds to the workpiece 120A, and the first workpiece sub-image 320A is a portion of the workpiece image 300A corresponding to the visual field range 142. Reference is also made to Figures 3A, 3B and 4. As shown in FIG. 3A, in various embodiments, workpiece 120A can include normal conductive features 122A and conductive features 122B that have defects or omissions. Correspondingly, the first workpiece sub-image 320A generated according to the workpiece 120A in the field of view 142 may have a first feature image 322A and a first feature image 322B, respectively, corresponding to the normal conductive feature 122A and the missing or missing conductive feature 122B. correspond. Therefore, when the computing device 160 compares the first region 430 of the standard workpiece image 400 with the first workpiece sub-image 320A through the second programming 164, one or more feature preset points 310 and the first region 430 are determined. There is a difference between one or more of the first feature images 322A, 322B in a workpiece sub-image 320A, for example, as at the first feature image 322B. As such, computing device 160 can determine that workpiece 120A is a workpiece.
由於工件導電特徵檢查系統100可透過攝像工具140擷取工件120的第一工件子影像320或工件120A的第一工件子影像320A,並透過計算裝置160的第一編程162以及第二編程164處理第一工件子影像320、320A,以判斷第一工件子影像320、320A的第一特徵影像322、322A、322B與標準工件影像400的第一區域430的特徵預設點410間的差異。進一步地,可用以判定工件120或工件120A為正常工件或瑕疵工件。甚或,可提供作為瑕疵工件的工件120A中的瑕疵導電特徵122B的位置,以進一步地排除或修復瑕疵等。如此一來,可以自動化的流程提供較佳的瑕疵檢測率。於實際應用中,可利用CAD檔(即製造工件120的設計檔)中的座標值產生成所需的影像檔,與攝像工具140拍攝的影像做二值化,做影像差異統計比對,找出最佳值,以作為定位最佳解。The workpiece conductive feature inspection system 100 can capture the first workpiece sub-image 320 of the workpiece 120 or the first workpiece sub-image 320A of the workpiece 120A through the imaging tool 140, and is processed by the first programming 162 and the second programming 164 of the computing device 160. The first workpiece sub-image 320, 320A determines a difference between the first feature image 322, 322A, 322B of the first workpiece sub-image 320, 320A and the feature preset point 410 of the first region 430 of the standard workpiece image 400. Further, it can be used to determine that the workpiece 120 or the workpiece 120A is a normal workpiece or a workpiece. Or, the position of the tantalum conductive feature 122B in the workpiece 120A as a tantalum workpiece can be provided to further exclude or repair defects and the like. As a result, automated processes can provide better detection rates. In practical applications, the coordinates of the CAD file (ie, the design file of the workpiece 120) can be used to generate the desired image file, and the image captured by the camera tool 140 is binarized, and the image difference statistical comparison is performed. The best value is used as the best solution for positioning.
此外,因為計算裝置160為同步地查找第一工件子影像320、320A內的一或多個第一特徵影像322、322A與一或多個特徵預設點410的差異,對比將每一第一特徵影像322、322A、322B分開與每一特徵預設點410比對的演算方式,可節省判斷正常工件或瑕疵工件的時間。舉例來說,在第一工件子影像320的範圍內,可將問題的計算複雜性從O(n n)降低到O(n!),或更低的計算複雜性。如此一來,工件導電特徵檢查系統100可利用在較快速的生產線180上。甚或,生產線180也可為全自動化的產線。 In addition, because the computing device 160 synchronously searches for differences between one or more first feature images 322, 322A and one or more feature preset points 410 within the first workpiece sub-image 320, 320A, the comparison will be each first The feature images 322, 322A, and 322B are separately compared with each feature preset point 410, and the time for judging the normal workpiece or the workpiece can be saved. For example, within the scope of the first workpiece sub-image 320, the computational complexity of the problem can be reduced from O( nn ) to O(n!), or lower computational complexity. As such, the workpiece conductive feature inspection system 100 can be utilized on a faster production line 180. Or, the production line 180 can also be a fully automated production line.
同時參照第1圖、第2A圖與第2B圖。在其他的多個實施方式中,工件導電特徵檢查系統100的生產線180可具有產線方向D。工件120可置放在生產線180上,生產線180推送工件120沿產線方向D前進。攝像工具140可更用以依時序擷取工件120在視野範圍142內的第二工件子影像340。第二工件子影像340至少部分相異於第一工件子影像320。在多個實施方式中,第二工件子影像340具有一或多個第二特徵影像342,對應導電特徵122中一或多個。在其他的多個實施方式中,第二工件子影像340可更具有一或多個第二圖樣化電路影像344,對應圖樣化電路124中一或多個。Reference is also made to Figs. 1, 2A and 2B. In other various embodiments, the production line 180 of the workpiece conductive feature inspection system 100 can have a line direction D. The workpiece 120 can be placed on the production line 180, and the production line 180 pushes the workpiece 120 forward along the line direction D. The camera tool 140 can be further used to capture the second workpiece sub-image 340 of the workpiece 120 in the field of view 142 according to the timing. The second workpiece sub-image 340 is at least partially distinct from the first workpiece sub-image 320. In various embodiments, the second workpiece sub-image 340 has one or more second feature images 342 corresponding to one or more of the conductive features 122. In other embodiments, the second workpiece sub-image 340 may have one or more second patterned circuit images 344 corresponding to one or more of the patterning circuits 124.
同時參照第1圖、第2B圖與第4圖。在其他的多個實施方式中,計算裝置160可更具有第三編程166,用以根據第2B圖的第一工件子影像320對應第4圖的標準工件影像400的第一區域430,定位第二工件子影像340對應標準工件影像400的第二區域440。舉例來說,可透過自第一區域430平移而獲得第二區域440,但不限於此。接續地,比對標準工件影像400的第二區域440與第二工件子影像340。與第二編程164相似地,若第二區域440內的特徵預設點410與第二特徵影像342之間不存在相異處,則判定工件120為正常工件。反之,若第二區域440內的特徵預設點410與第二特徵影像342之間存在相異處,則判定工件120為瑕疵工件。Reference is also made to Fig. 1, Fig. 2B and Fig. 4. In other embodiments, the computing device 160 may further have a third programming 166 for positioning the first region 430 of the standard workpiece image 400 of FIG. 4 according to the first workpiece sub-image 320 of FIG. 2B. The second workpiece sub-image 340 corresponds to the second region 440 of the standard workpiece image 400. For example, the second region 440 can be obtained by translating from the first region 430, but is not limited thereto. Successively, the second region 440 of the standard workpiece image 400 is compared to the second workpiece sub-image 340. Similar to the second programming 164, if there is no difference between the feature preset point 410 in the second region 440 and the second feature image 342, it is determined that the workpiece 120 is a normal workpiece. On the other hand, if there is a difference between the feature preset point 410 in the second region 440 and the second feature image 342, it is determined that the workpiece 120 is a workpiece.
回到第1圖,在其他的多個實施方式中,工件導電特徵檢查系統100還可以與導電特徵製造設備200相連接。工件120上的導電特徵122在導電特徵製造設備200中被製造後,透過生產線180進入攝像工具140的視野範圍142內。經過攝像工具140與計算裝置160的協作後,可判斷工件120為正常工件或瑕疵工件。Returning to FIG. 1, in other various embodiments, the workpiece conductive feature inspection system 100 can also be coupled to the conductive feature manufacturing apparatus 200. The conductive features 122 on the workpiece 120 are fabricated in the conductive feature manufacturing apparatus 200 and passed through the production line 180 into the field of view 142 of the imaging tool 140. After the cooperation of the camera tool 140 and the computing device 160, the workpiece 120 can be judged to be a normal workpiece or a workpiece.
第7圖繪示依據本發明多個實施方式之工件定位方法700的流程圖。同時參照第2A圖、第2B圖、第4圖與第7圖。工件定位方法700自步驟S701開始。於步驟S701中,攝錄如第2A圖中設置有複數個導電特徵122的工件120的至少一部分,像是在第2A圖的視野範圍142中擷取第2B圖的第一工件子影像320。在多個實施方式中,第一工件子影像320可具有第一特徵影像322與導電特徵122分別對應。在部分的實施方式中,第一工件子影像320可更具有圖樣化電路影像324與圖樣化電路124分別對應。在部分的實施方式中,導電特徵122也可為第3圖的瑕疵的導電特徵122B,則在所擷取的第一工件子影像320A中會對應產生瑕疵的第一特徵影像322B。FIG. 7 is a flow chart showing a workpiece positioning method 700 in accordance with various embodiments of the present invention. Reference is also made to FIGS. 2A, 2B, 4, and 7. The workpiece positioning method 700 begins in step S701. In step S701, at least a portion of the workpiece 120 having a plurality of conductive features 122 as shown in FIG. 2A is recorded, and the first workpiece sub-image 320 of FIG. 2B is captured in the field of view 142 of FIG. 2A. In various embodiments, the first workpiece sub-image 320 can have a first feature image 322 corresponding to the conductive feature 122, respectively. In some embodiments, the first workpiece sub-image 320 may further have a patterned circuit image 324 corresponding to the patterning circuit 124. In some embodiments, the conductive feature 122 can also be the conductive feature 122B of the third figure, and the first feature image 322B corresponding to the defect is generated in the captured first workpiece sub-image 320A.
值得注意的是,此處繪示之瑕疵的導電特徵122B與瑕疵的第一特徵影像322B,僅為示例,其並非用以限制本發明。舉例來說,瑕疵的導電特徵122B也可跨接到另一導電特徵122上,而瑕疵的第一特徵影像322B則可對應顯示出導電特徵122間的電性連接關係。應瞭解到,本領域具有通常知識者,當可視實際狀況,在不脫離本揭露之精神與範圍的情況下,做同等的更動或取代。只要第一工件子影像320的第一特徵影像322可真實的傳遞導電特徵122間的電性連接關係即可。甚或,在部分的實施方式中,只要第一工件子影像320的第一特徵影像322與圖樣化電路影像324可真實的傳遞導電特徵122與圖樣化電路124間的電性連接關係即可。It should be noted that the conductive features 122B and the first feature image 322B of the 此处 are only examples, which are not intended to limit the present invention. For example, the conductive feature 122B of the germanium may also be connected to the other conductive feature 122, and the first feature image 322B of the germanium may correspondingly display the electrical connection relationship between the conductive features 122. It should be understood that those of ordinary skill in the art, in the light of the actual conditions, may be changed or replaced without departing from the spirit and scope of the disclosure. As long as the first feature image 322 of the first workpiece sub-image 320 can truly transfer the electrical connection relationship between the conductive features 122. Or, in some embodiments, the first feature image 322 of the first workpiece sub-image 320 and the patterned circuit image 324 can truly transfer the electrical connection between the conductive feature 122 and the patterning circuit 124.
參照第4圖與第7圖。接續地,工件定位方法700可進行步驟S702。在步驟S702中,將標準工件影像400分割成複數個標準工件子影像401~408。標準工件影像400具有複數個特徵預設點410,分別與導電特徵122相對應。更具體地說,在部分的實施方式中,標準工件影像400可為製造工件120的設計檔,如CAD檔等,藉由工件120預定設置導電特徵122的虛擬位置產生特徵預設點410。在部分的實施方式中,標準工件影像400也可為正常工件120的影像檔,藉由正常工件120的導電特徵122對應產生特徵預設點410。每一標準工件子影像401~408可具有特徵預設點410中一或多個。在部分的實施方式中,步驟S702也可優先於步驟S701實施。Refer to Figures 4 and 7. Successively, the workpiece positioning method 700 can proceed to step S702. In step S702, the standard workpiece image 400 is divided into a plurality of standard workpiece sub-images 401 to 408. The standard workpiece image 400 has a plurality of feature preset points 410 corresponding to the conductive features 122, respectively. More specifically, in some embodiments, the standard workpiece image 400 may be a design file for manufacturing the workpiece 120, such as a CAD file, etc., and the feature preset point 410 is generated by the virtual position of the workpiece 120 pre-set to the conductive feature 122. In some embodiments, the standard workpiece image 400 may also be an image file of the normal workpiece 120, and the feature preset point 410 is generated by the conductive feature 122 of the normal workpiece 120. Each of the standard workpiece sub-images 401-408 may have one or more of the feature preset points 410. In some embodiments, step S702 can also be implemented in preference to step S701.
參照第2B圖、第4圖與第7圖。接續地,工件定位方法700可進行步驟S703。在步驟S703中,比對標準工件子影像401~408與第一工件子影像320,以定位第一工件子影像320對應標準工件影像400的區域。舉例來說,經比對後,可知標準工件子影像401、402都與第一工件子影像320部份重疊,則第一工件子影像320對應標準工件影像400的區域橫跨在標準工件子影像401、402兩影像中。舉例來說,可與橫跨標準工件子影像401、402的第一區域430相對應。Refer to Figures 2B, 4 and 7. Successively, the workpiece positioning method 700 can proceed to step S703. In step S703, the standard workpiece sub-images 401-408 and the first workpiece sub-image 320 are compared to locate the region of the first workpiece sub-image 320 corresponding to the standard workpiece image 400. For example, after the comparison, it can be seen that the standard workpiece sub-images 401, 402 are partially overlapped with the first workpiece sub-image 320, and the first workpiece sub-image 320 corresponds to the standard workpiece image 400 region spanning the standard workpiece sub-image. 401, 402 two images. For example, it may correspond to a first region 430 that spans the standard workpiece sub-images 401, 402.
參照第2B圖與第4圖。在部分的實施方式中,第一工件子影像320可具有複數個第一特徵影像322。標準工件子影像401~408可分別具有複數個特徵預設點410。步驟S703可將第一特徵影像322與標準工件子影像401~408的特徵預設點410分別座標化;接續地,根據座標化後的第一特徵影像322間的相對關係與座標化後特徵預設點410間的相對關係,用以比對標準工件子影像401~408與第一工件子影像320。舉例來說,可在第一工件子影像320設定第一定點326,並相對第一定點326分別計算以獲致第一特徵影像322對應的複數個特徵影像座標。在每一標準工件子影像401~408設定第二定點401x~408x,並相對第二定點401x~408x分別獲致每一標準工件子影像401~408中的特徵預設點410對應的特徵預設點座標。接續地,計算特徵影像座標之間的相對關係與特徵預設點座標之間的相對關係,以獲致標準工件子影像401~408中與第一工件子影像320至少部份重疊者,舉例來說,像是標準工件子影像401、402。在部分的實施方式中,可透過將特徵影像座標矩陣化,計算與矩陣化後的特徵預設點座標在矩陣空間的關聯係數,用以尋找第一工件子影像320與標準工件子影像401~408重疊的部分。在部分的實施方式中,可透過分別將鄰近的特徵影像座標組成一或多個三角形,經過等比例伸縮或旋轉與由鄰近的特徵預設點座標所組成的一或多個三角形比對以產生對應的關聯係數,用以尋找第一工件子影像320與標準工件子影像401~408重疊的部分,但不限於此。舉例來說,也可透過卷積神經網路(Convolution Neural Network)或其他圖像運算的演算法來進行比對。Refer to Figures 2B and 4 for details. In some embodiments, the first workpiece sub-image 320 can have a plurality of first feature images 322. The standard workpiece sub-images 401-408 may each have a plurality of feature preset points 410. Step S703, the first feature image 322 and the feature preset points 410 of the standard workpiece sub-images 401-408 are respectively coordinated; and subsequently, according to the relative relationship between the coordinated first feature images 322 and the coordinated feature pre- A relative relationship between points 410 is set for comparing the standard workpiece sub-images 401-408 with the first workpiece sub-image 320. For example, the first fixed point 326 can be set in the first workpiece sub-image 320, and the plurality of feature image coordinates corresponding to the first feature image 322 can be respectively calculated relative to the first fixed point 326. The second fixed point 401x~408x is set in each of the standard workpiece sub-images 401~408, and the feature preset point corresponding to the feature preset point 410 in each of the standard workpiece sub-images 401-408 is obtained respectively from the second fixed point 401x~408x. coordinate. Successively, the relative relationship between the feature image coordinates and the feature preset point coordinates is calculated to obtain at least partial overlap with the first workpiece sub-image 320 in the standard workpiece sub-images 401-408, for example, , like standard workpiece sub-images 401, 402. In some implementations, the correlation coefficient between the matrix and the feature preset point coordinates in the matrix space is calculated by matrixing the feature image coordinates to find the first workpiece sub-image 320 and the standard workpiece sub-image 401~ 408 overlapping parts. In some embodiments, the adjacent feature image coordinates may be respectively formed into one or more triangles, and the one or more triangles formed by the adjacent feature preset point coordinates may be aligned by proportional scaling or rotation to generate The corresponding correlation coefficient is used to find a portion where the first workpiece sub-image 320 overlaps with the standard workpiece sub-images 401 to 408, but is not limited thereto. For example, the comparison can also be performed through a Convolution Neural Network or other algorithms for image manipulation.
在部分的實施方式中,步驟S703也可分別將一或多個第一特徵影像322分別以一輪廓涵括,並識別一或多個第一特徵影像322的輪廓構型,以分別獲致一或多個第一特徵構形328A、328B、328C、328D、328E;以及將一或多個特徵預設點410分別以一輪廓涵括,並識別一或多個特徵預設點410的輪廓構型,以分別產生一或多個第二特徵構形412A、412B、412C、412D、412E。接續地,根據第一特徵構形328A、328B、328C、328D、328E與第二特徵構形412A、412B、412C、412D、412E,比對標準工件子影像401~408中與第一工件子影像320至少部份重疊者。舉例來說,在部分的實施方式中,可透過將第一特徵構形328A、328B、328C的構型與相對關係,與第二特徵構形412A、412B、412C的構型與相對關係作比對,以及將第一特徵構形328D、328E與第二特徵構形412D、412E作比對,進而判斷第一工件子影像320至少部分與標準工件子影像401、402重疊。在部分的實施方式中,可進一步地將圖樣化電路影像324與預設圖樣化電路420分別加入輪廓構型中或作為比對的固定點,以比對第一特徵影像322與每一特徵預設點410的相對位置。In some embodiments, step S703 may also respectively include one or more first feature images 322 in a contour and identify the contour configuration of the one or more first feature images 322 to obtain one or a plurality of first feature configurations 328A, 328B, 328C, 328D, 328E; and one or more feature preset points 410 are respectively included in an outline and identifying contour configurations of one or more feature preset points 410 To generate one or more second feature configurations 412A, 412B, 412C, 412D, 412E, respectively. Subsequently, according to the first characteristic configuration 328A, 328B, 328C, 328D, 328E and the second characteristic configuration 412A, 412B, 412C, 412D, 412E, the first workpiece sub-image is compared with the standard workpiece sub-image 401~408 320 at least partially overlapped. For example, in some embodiments, the configuration and relative relationship of the first feature configurations 328A, 328B, and 328C can be compared with the configuration and relative relationship of the second feature configurations 412A, 412B, and 412C. And comparing the first feature configurations 328D, 328E with the second feature configurations 412D, 412E to determine that the first workpiece sub-image 320 at least partially overlaps the standard workpiece sub-images 401, 402. In some embodiments, the patterned circuit image 324 and the preset patterning circuit 420 may be respectively added into the contour configuration or as a fixed point of the comparison to compare the first feature image 322 with each feature. Set the relative position of point 410.
在其他的多個實施方式中,也可不分割標準工件影像400,而進行定位第一工件子影像320對應標準工件影像400的區域的步驟。舉例來說,若導電特徵122的構型為簡單且相異的幾何圖樣,如長方形、圓形或行列的矩陣等,也可在不分割標準工件影像400下快速地比對與判斷導電特徵122的分布。甚或,在其他的多個實施方式中,視野範圍142也可實質上涵蓋整個工件120。In other embodiments, the step of positioning the first workpiece sub-image 320 corresponding to the area of the standard workpiece image 400 may be performed without dividing the standard workpiece image 400. For example, if the configuration of the conductive features 122 is a simple and distinct geometric pattern, such as a rectangle, a circle, or a matrix of rows and columns, the conductive features 122 can be quickly aligned and judged without dividing the standard workpiece image 400. Distribution. Or, in other various embodiments, the field of view 142 may also substantially cover the entire workpiece 120.
第8圖繪示依據本發明多個實施方式之工件導電特徵檢查方法800的流程圖。同時參照第3A圖、第3B圖、第4圖與第8圖。工件導電特徵檢查方法800自步驟S801開始。於步驟S801中,攝錄如第3A圖中設置有複數個導電特徵122A、122B的工件120A的第一部分,像是在第3A圖的視野範圍142中所擷取的第3B圖的第一工件子影像320A。在多個實施方式中,第一工件子影像320A可具有第一特徵影像322A、322B,分別與正常的導電特徵122A以及瑕疵的導電特徵122B對應。在部分的實施方式中,第一工件子影像320A可具有圖樣化電路影像324,與圖樣化電路124分別對應。FIG. 8 is a flow chart showing a method 800 for inspecting a workpiece conductive feature in accordance with various embodiments of the present invention. Reference is also made to Figs. 3A, 3B, 4 and 8. The workpiece conductive feature inspection method 800 begins in step S801. In step S801, a first portion of the workpiece 120A having a plurality of conductive features 122A, 122B as shown in FIG. 3A is recorded, such as the first workpiece of FIG. 3B captured in the field of view 142 of FIG. 3A. Sub-image 320A. In various embodiments, the first workpiece sub-image 320A can have first feature images 322A, 322B that correspond to the normal conductive features 122A and the conductive features 122B of the turns, respectively. In some embodiments, the first workpiece sub-image 320A may have a patterned circuit image 324 corresponding to the patterning circuit 124.
參照第3B圖、第4圖與第8圖。接續地,工件導電特徵檢查方法800可進行步驟S802。在步驟S802中,可根據標準工件影像400中的複數個特徵預設點410,查找特徵預設點410與至少部分的一或多個第一特徵影像322A、322B相應者,以定位第一工件子影像320A對應標準工件影像400的第一區域430。更具體地說,由於標準工件影像400的特徵預設點410可與工件120預定設置導電特徵122的虛擬位置或正常工件120的導電特徵122的實際位置相對應,也可與正常的導電特徵122A所產生的第一特徵影像322A相對應。舉例來說,在多個實施方式中,可將標準工件影像400分割成複數個標準工件子影像401~408。每一標準工件子影像401~408可具有特徵預設點410中一或多個,用以與第一工件子影像320A的第一特徵影像322A相比對,以定位第一工件子影像320對應標準工件影像400的第一區域430。Refer to Figures 3B, 4 and 8. Successively, the workpiece conductive feature inspection method 800 can proceed to step S802. In step S802, the feature preset point 410 and the at least part of the one or more first feature images 322A, 322B may be searched according to the plurality of feature preset points 410 in the standard workpiece image 400 to locate the first workpiece. Sub-image 320A corresponds to first region 430 of standard workpiece image 400. More specifically, since the feature preset point 410 of the standard workpiece image 400 may correspond to the virtual position at which the workpiece 120 is intended to set the conductive feature 122 or the actual position of the conductive feature 122 of the normal workpiece 120, it may also be associated with the normal conductive feature 122A. The generated first feature image 322A corresponds. For example, in various embodiments, the standard workpiece image 400 can be segmented into a plurality of standard workpiece sub-images 401-408. Each of the standard workpiece sub-images 401-408 may have one or more of the feature preset points 410 for comparing with the first feature image 322A of the first workpiece sub-image 320A to locate the first workpiece sub-image 320. The first region 430 of the standard workpiece image 400.
參照第3B圖與第4圖。在部分的實施方式中,第一工件子影像320A具有複數個第一特徵影像322A與至少一第一特徵影像322B。標準工件子影像401~408可分別具有複數個特徵預設點410。步驟S802可分別將第一特徵影像322A與每一標準工件子影像401~408的特徵預設點410座標化;接續地,根據座標化後的第一特徵影像322A間的相對關係與座標化後特徵預設點410間的相對關係,用以比對標準工件子影像401~408與第一工件子影像320。然而,特徵預設點410實際上也包含設置瑕疵的導電特徵122B的位置,故無法與第一特徵影像322A一對一的完全對應。因此,在部分的實施方式中,只能透過與特徵預設點410部分對應的第一特徵影像322A來定位。在部分的實施方式中,若部分的瑕疵的導電特徵122B外觀上並不妨礙判定,也可透過第一特徵影像322A與部分的第一特徵影像322B來定位。Refer to Figures 3B and 4 for details. In some embodiments, the first workpiece sub-image 320A has a plurality of first feature images 322A and at least one first feature image 322B. The standard workpiece sub-images 401-408 may each have a plurality of feature preset points 410. Step S802 can coordinate the first feature image 322A and the feature preset point 410 of each standard workpiece sub-image 401~408, respectively, and then, according to the relative relationship between the coordinated first feature image 322A and the coordinated The relative relationship between the feature preset points 410 is used to compare the standard workpiece sub-images 401-408 with the first workpiece sub-image 320. However, the feature preset point 410 actually includes the position of the conductive feature 122B where the 瑕疵 is disposed, so that it cannot be completely corresponding to the one-to-one correspondence of the first feature image 322A. Therefore, in some embodiments, only the first feature image 322A corresponding to the feature preset point 410 portion can be positioned. In some embodiments, if a portion of the conductive features 122B of the germanium does not interfere with the determination, the first feature image 322A and a portion of the first feature image 322B may be positioned.
舉例來說,可在第一工件子影像320A設定第一定點326A,並相對第一定點326A分別計算第一特徵影像322A與第一特徵影像322B對應的複數個特徵影像座標。在多個實施方式中,可透過與正常的導電特徵122所產生的第一特徵影象322比對並辨識第一特徵影像322A與第一特徵影像322B,並分開紀錄對應的特徵影像座標,以供後續尋找瑕疵的導電特徵122B。接著,可在每一標準工件子影像401~408設定第二定點401x~408x,並相對第二定點401x~408x分別獲致每一標準工件子影像401~408中的特徵預設點410對應的特徵預設點座標。接續地,根據由第一特徵影像322A所產生的特徵影像座標之間的相對關係與特徵預設點座標之間的相對關係,計算以獲致標準工件子影像401~408中與第一工件子影像320A至少部份重疊者,像是標準工件子影像401、402。For example, the first fixed point 326A may be set in the first workpiece sub-image 320A, and the plurality of feature image coordinates corresponding to the first feature image 322A and the first feature image 322B may be respectively calculated relative to the first fixed point 326A. In a plurality of embodiments, the first feature image 322A and the first feature image 322B are aligned and recognized by the first feature image 322 generated by the normal conductive feature 122, and the corresponding feature image coordinates are separately recorded. A conductive feature 122B for subsequent searching for germanium. Then, the second fixed point 401x~408x can be set in each of the standard workpiece sub-images 401~408, and the feature corresponding to the feature preset point 410 in each of the standard workpiece sub-images 401-408 can be obtained respectively from the second fixed point 401x~408x. Preset point coordinates. Then, according to the relative relationship between the feature image coordinates generated by the first feature image 322A and the feature preset point coordinates, the first workpiece sub-image is obtained by the standard workpiece sub-images 401-408. 320A is at least partially overlapped, such as standard workpiece sub-images 401, 402.
在部分的實施方式中,可透過將特徵影像座標矩陣化,計算與矩陣化後的特徵預設點座標在矩陣空間的關聯係數,用以尋找第一工件子影像320A與標準工件子影像401~ 408重疊的部分。在部分的實施方式中,可透過分別將鄰近的特徵影像座標組成一或多個三角形,經過等比例伸縮或旋轉與由鄰近的特徵預設點座標所組成的一或多個三角形比對以產生對應的關聯係數,用以尋找第一工件子影像320A與標準工件子影像401~408重疊的部分,但不限於此。舉例來說,也可透過卷積神經網路(Convolution Neural Network)或其他圖像運算的演算法來進行比對。但應瞭解到,由於特徵影像座標中可能落失至少部分的第一特徵影像322B所對應者,因此與特徵預設點座標並無法一對一的對應,故需要透過調整關聯係數的容許範圍,或部分地尋找仍符合關聯係數限制的多個對應點,以定位第一工件子影像320A。In some implementation manners, the correlation coefficient between the matrix and the feature preset point coordinates in the matrix space may be calculated by matrixing the feature image coordinates to find the first workpiece sub-image 320A and the standard workpiece sub-image 401~ 408 overlapping parts. In some embodiments, the adjacent feature image coordinates may be respectively formed into one or more triangles, and the one or more triangles formed by the adjacent feature preset point coordinates may be aligned by proportional scaling or rotation to generate Corresponding correlation coefficient is used to find a portion where the first workpiece sub-image 320A overlaps with the standard workpiece sub-images 401 to 408, but is not limited thereto. For example, the comparison can also be performed through a Convolution Neural Network or other algorithms for image manipulation. However, it should be understood that since at least part of the first feature image 322B may be lost in the feature image coordinates, the feature preset point coordinates cannot be one-to-one correspondence, so it is necessary to adjust the allowable range of the correlation coefficient. Or partially searching for a plurality of corresponding points that still meet the constraint of the correlation coefficient to locate the first workpiece sub-image 320A.
在部分的實施方式中,步驟S802也可分別將一或多個第一特徵影像322A分別以一輪廓涵括,並識別一或多個第一特徵影像322A的輪廓構型,以分別獲致一或多個第一特徵構形328A、328B、328C、328D、328E、328F;以及將一或多個特徵預設點410分別以一輪廓涵括,並識別一或多個特徵預設點410的輪廓構型,以分別產生一或多個第二特徵構形412A、412B、412C、412D、412E、412F。接續地,排除具有第一特徵影像322B在內的第一特徵構形328F、328D,並根據第一特徵構形328A、328B、328C、328E與第二特徵構形412A、412B、412C、412E,比對標準工件子影像401~408中與第一工件子影像320至少部份重疊者。舉例來說,在部分的實施方式中,可透過將第一特徵構形328A、328B、328C的構型與相對關係,與第二特徵構形412A、412B、412C的構型與相對關係作比對,以及將第一特徵構形328E與第二特徵構形412E作比對,進而判斷第一工件子影像320至少部分與標準工件子影像401、402重疊。由於此種方式中,包含第一特徵影像322B的輪廓構型可能會與特徵預設點410的輪廓構型不同,故在對應時,可部分地尋找仍符合構型與相對關係者來進行比對即可。In some embodiments, step S802 may also respectively include one or more first feature images 322A in a contour and identify the contour configuration of the one or more first feature images 322A to obtain one or A plurality of first feature configurations 328A, 328B, 328C, 328D, 328E, 328F; and one or more feature preset points 410 are respectively included in an outline and identify contours of one or more feature preset points 410 The configuration is to generate one or more second feature configurations 412A, 412B, 412C, 412D, 412E, 412F, respectively. Successively, the first feature configuration 328F, 328D having the first feature image 322B is excluded, and according to the first feature configuration 328A, 328B, 328C, 328E and the second feature configuration 412A, 412B, 412C, 412E, The first workpiece sub-image 320 is at least partially overlapped with the standard workpiece sub-images 401-408. For example, in some embodiments, the configuration and relative relationship of the first feature configurations 328A, 328B, and 328C can be compared with the configuration and relative relationship of the second feature configurations 412A, 412B, and 412C. And comparing the first feature configuration 328E with the second feature configuration 412E, thereby determining that the first workpiece sub-image 320 at least partially overlaps the standard workpiece sub-images 401, 402. In this manner, the contour configuration including the first feature image 322B may be different from the contour configuration of the feature preset point 410. Therefore, when corresponding, the portion that still conforms to the configuration and the relative relationship may be partially searched for. Yes.
參照第3A圖、第3B圖與第8圖。接續地,工件導電特徵檢查方法800可進行步驟S803。在步驟S803中,比對第一區域430與第一工件子影像320A,若第一區域430a內的特徵預設點410與第一特徵影像322A、322B之間存在有相異處,則判定工件120A為瑕疵工件。舉例來說,第一特徵影像322B實質上無法與特徵預設點410相對應,因此,工件120A即為瑕疵工件。相對地,若以工件120進行步驟S801~803,由於第一特徵影像322皆可與特徵預設點410相對應。是故,可判定工件120為正常工件。Refer to Figures 3A, 3B, and 8. Successively, the workpiece conductive feature inspection method 800 can proceed to step S803. In step S803, comparing the first region 430 with the first workpiece sub-image 320A, if there is a difference between the feature preset point 410 in the first region 430a and the first feature image 322A, 322B, determining the workpiece 120A is the workpiece. For example, the first feature image 322B is substantially incapable of corresponding to the feature preset point 410. Therefore, the workpiece 120A is a 瑕疵 workpiece. In contrast, if steps S801 to 803 are performed by the workpiece 120, the first feature image 322 can correspond to the feature preset point 410. Therefore, it can be determined that the workpiece 120 is a normal workpiece.
參照第2圖、第5圖與第8圖。接續地,工件導電特徵檢查方法800可進行步驟S804。在步驟S804中,攝錄工件120除第一部分以外的其餘者,舉例來說,如視野範圍142以外的部分,以擷取至少一第二工件子影像340。在多個實施方式中,第二工件子影像340具有第二特徵影像342,分別對應導電特徵122中位於第一部分以外的一或多個。在其他的多個實施方式中,第二工件子影像340還可具有第二圖樣化電路影像344,分別對應圖樣化電路124中位於第一部分以外的一或多個。在多個實施方式中,可移動視野範圍142以擷取第二工件子影像340。在其他的多個實施方式中,視野範圍142也可橫切工件120,當工件120沿著生產線180的產線方向D前進時,再依序擷取工件120進入視野範圍142內的部分,但不限於此。Refer to Figures 2, 5 and 8. Successively, the workpiece conductive feature inspection method 800 can proceed to step S804. In step S804, the workpiece 120 is recorded in addition to the first portion, for example, a portion other than the field of view 142, to capture at least one second workpiece sub-image 340. In various embodiments, the second workpiece sub-image 340 has a second feature image 342 corresponding to one or more of the conductive features 122 that are outside of the first portion. In other embodiments, the second workpiece sub-image 340 may further have a second patterning circuit image 344 corresponding to one or more of the patterning circuits 124 that are located outside of the first portion. In various embodiments, the field of view 142 can be moved to capture the second workpiece sub-image 340. In other embodiments, the field of view 142 may also traverse the workpiece 120. When the workpiece 120 advances along the line direction D of the production line 180, the workpiece 120 is sequentially drawn into the portion of the field of view 142, but Not limited to this.
參照第5圖、第6圖與第8圖。接續地,工件導電特徵檢查方法800可進行步驟S805。在步驟S805中,根據第一工件子影像320對應標準工件影像500的第一區域430,用以定位第二工件子影像340對應標準工件影像500的第二區域440。在部分的實施方式中,由於第一區域430與標準工件影像500的位置關係已知,可透過如水平平移或垂直平移等幾何運算,獲得第二工件子影像340與標準工件影像500對應的第二區域440。如此一來,可省略大量的比對運算,進一步地節省計算資源與爭取更短的計算時間,使得生產線180的效率可進一步地提升。Refer to Figures 5, 6, and 8. Successively, the workpiece conductive feature inspection method 800 can proceed to step S805. In step S805, the first workpiece sub-image 320 corresponds to the first region 430 of the standard workpiece image 500, and is used to position the second workpiece sub-image 340 corresponding to the second region 440 of the standard workpiece image 500. In some embodiments, since the positional relationship between the first region 430 and the standard workpiece image 500 is known, the second workpiece sub-image 340 corresponding to the standard workpiece image 500 can be obtained by geometric operations such as horizontal translation or vertical translation. Two areas 440. In this way, a large number of comparison operations can be omitted, further saving computing resources and striving for shorter calculation time, so that the efficiency of the production line 180 can be further improved.
接續地,工件導電特徵檢查方法800可進行步驟S806。在步驟S806中,與步驟803相似地,對標準工件影像500的第二區域440與第二工件子影像340進行比對。若第二區域440內的特徵預設點410與第二特徵影像342之間存在有相異處,則判定工件120為瑕疵工件。相對地,若第二區域440內的特徵預設點410與第二特徵影像342相同,則判定工件120為正常工件。Successively, the workpiece conductive feature inspection method 800 can proceed to step S806. In step S806, similarly to step 803, the second region 440 of the standard workpiece image 500 is compared with the second workpiece sub-image 340. If there is a difference between the feature preset point 410 in the second region 440 and the second feature image 342, it is determined that the workpiece 120 is a workpiece. In contrast, if the feature preset point 410 in the second region 440 is the same as the second feature image 342, it is determined that the workpiece 120 is a normal workpiece.
於實際應用中,本發明的工件導電特徵檢查方法與工件導電特徵檢查系統可以有以下功效:(1) 可導入產品CAD檔(即製造工件120的設計檔)分析並分析資料,將未來可能檢查的DIP資料先處理過,轉換成檢查程式的可用資料,減少程式載入時不必要的時間浪費;(2) 可利用CAD檔中所抽取的相對座標值(即特徵預設點座標)和直接與攝像工具所拍攝的影像(即工件影像),做比對將DIP元件快速在影像中定位,做後續的檢查;(3) 可以快速針對不同的模型和不同的DIP元件做立即導入檢查;(4) 參考CAD檔資訊,可以降低產線維護人員的維護成本,只需在第一次導入時,做一次性的調整即可;以及(4) 從軟體實作中,以定位解析度為3856x2764的影像為例,可以在1秒內定位所有影像上需檢察的座標點,非常適於產線流線中快速檢查。In practical applications, the workpiece conductive characteristic inspection method and the workpiece conductive characteristic inspection system of the present invention can have the following effects: (1) The product CAD file (ie, the design file for manufacturing the workpiece 120) can be imported to analyze and analyze the data, and the future inspection may be performed. The DIP data is processed first, converted into the available data of the inspection program, reducing the unnecessary time waste when the program is loaded; (2) the relative coordinate values extracted in the CAD file (ie, the feature preset point coordinates) and the direct The image taken by the camera tool (ie, the workpiece image) is compared and the DIP component is quickly positioned in the image for subsequent inspection; (3) the immediate import inspection can be quickly performed for different models and different DIP components; 4) Referring to the CAD file information, the maintenance cost of the maintenance personnel of the production line can be reduced, and only one-time adjustment can be made at the first import; and (4) from the software implementation, the positioning resolution is 3856x2764. For example, you can locate the coordinate points on all images that need to be inspected within 1 second, which is very suitable for quick inspection in the production line streamline.
綜上所述,本發明提供工件導電特徵檢查方法包含攝錄設置有複數個導電特徵的一工件的至少一部分,以擷取工件子影像,其中工件子影像具有一或多個特徵影像,分別對應導電特徵中一或多個;分割標準工件影像成複數個標準工件子影像,其中標準工件影像具有複數個特徵預設點,分別與導電特徵相對應,且每一標準工件子影像具有特徵預設點中一或多個;以及比對每一標準工件子影像與工件子影像,以定位工件子影像對應標準工件影像的區域。藉由將標準工件影像分割成複數個區域較小且特徵預設點較少的標準工件子影像,並與擷取工件部份影像且具有與導電特徵對應之特徵影像的工件子影像相比對,使得比對特徵影像與特徵預設點的計算量與計算時間降低,且可在後續的比對上利用已定位的部分作為錨點產生比對結果。如此一來,可降低計算裝置的負擔與計算時間的長度。In summary, the present invention provides a method for inspecting a conductive characteristic of a workpiece, comprising: recording at least a portion of a workpiece provided with a plurality of conductive features to capture a sub-image of the workpiece, wherein the sub-image of the workpiece has one or more feature images, respectively corresponding to One or more of the conductive features; the standard workpiece image is divided into a plurality of standard workpiece sub-images, wherein the standard workpiece image has a plurality of feature preset points, respectively corresponding to the conductive features, and each standard workpiece sub-image has a feature preset One or more points; and aligning each standard workpiece sub-image with the workpiece sub-image to locate the area of the workpiece sub-image corresponding to the standard workpiece image. By dividing the standard workpiece image into a plurality of standard workpiece sub-images with smaller regions and fewer feature preset points, and comparing with the workpiece sub-images that capture the partial image of the workpiece and have the feature images corresponding to the conductive features The calculation amount and calculation time of the comparison feature image and the feature preset point are reduced, and the aligned portion can be used as an anchor point on the subsequent comparison to generate the comparison result. In this way, the burden on the computing device and the length of the calculation time can be reduced.
雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.
100‧‧‧工件導電特徵檢查系統
120‧‧‧工件
122/122A/122B‧‧‧導電特徵
124‧‧‧圖樣化電路
140‧‧‧攝像工具
142‧‧‧視野範圍
160‧‧‧計算裝置
162‧‧‧第一編程
164‧‧‧第二編程
166‧‧‧第三編程
180‧‧‧生產線
200‧‧‧導電特徵製造設備
300/300A‧‧‧工件影像
320‧‧‧第一工件子影像
322‧‧‧第一特徵影像
324‧‧‧第一圖樣化電路影像
326‧‧‧第一定點
328A/328B/328C/328D/328E/328F‧‧‧第一特徵構形
340‧‧‧第二工件子影像
342‧‧‧第二特徵影像
344‧‧‧第二圖樣化電路影像
400‧‧‧標準工件影像
401~408‧‧‧標準工件子影像
401x~408x‧‧‧第二定點
412A/412B/412C/412D/412E/412F‧‧‧第二特徵構形
430‧‧‧第一區域
440‧‧‧第二區域
500‧‧‧標準工件影像
700‧‧‧工件定位方法
800‧‧‧工件導電特徵檢查方法
D‧‧‧產線方向
S701~S703‧‧‧步驟
S801~S806‧‧‧步驟100‧‧‧Workpiece Conductivity Feature Inspection System
120‧‧‧Workpiece
122/122A/122B‧‧‧ Conductive features
124‧‧‧patterned circuit
140‧‧‧ camera tools
142‧‧‧ Field of view
160‧‧‧ Computing device
162‧‧‧First programming
164‧‧‧second programming
166‧‧‧ Third programming
180‧‧‧Production line
200‧‧‧ Conductive feature manufacturing equipment
300/300A‧‧‧ workpiece image
320‧‧‧First workpiece sub-image
322‧‧‧First feature image
324‧‧‧First patterned circuit image
326‧‧‧ first fixed point
328A/328B/328C/328D/328E/328F‧‧‧ first feature configuration
340‧‧‧Second workpiece sub-image
342‧‧‧Second feature image
344‧‧‧Second patterned circuit image
400‧‧‧Standard workpiece image
401~408‧‧‧Standard workpiece sub-image
401x~408x‧‧‧second fixed point
412A/412B/412C/412D/412E/412F‧‧‧Second feature configuration
430‧‧‧ first area
440‧‧‧Second area
500‧‧‧ standard workpiece image
700‧‧‧Work positioning method
800‧‧‧Working method for workpiece conductive characteristics
D‧‧‧Product line direction
S701~S703‧‧‧Steps
S801~S806‧‧‧Steps
為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下: 第1圖繪示依據本發明多個實施方式之工件導電特徵檢查系統的簡單示意圖。 第2A圖繪示依據本發明多個實施方式之工件在工件導電特徵檢查系統的下視圖。 第2B圖繪示依據本發明多個實施方式之工件影像的示意圖。 第3A圖繪示依據本發明另外多個實施方式之工件在工件導電特徵檢查系統的下視圖。 第3B圖繪示依據本發明另外多個實施方式之工件影像的示意圖。 第4圖至第6圖繪示依據本發明多個不同實施方式之標準工件影像的簡單示意圖。 第7圖繪示依據本發明多個實施方式之工件定位方法的流程圖。 第8圖繪示依據本發明多個實施方式之工件導電特徵的瑕疵檢查方法的流程圖。The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood. schematic diagram. 2A is a bottom view of the workpiece in the workpiece conductive feature inspection system in accordance with various embodiments of the present invention. FIG. 2B is a schematic diagram showing a workpiece image according to various embodiments of the present invention. 3A is a bottom view of the workpiece in the workpiece conductive feature inspection system in accordance with still other embodiments of the present invention. FIG. 3B is a schematic diagram showing a workpiece image according to still another embodiment of the present invention. 4 through 6 illustrate simplified schematic views of standard workpiece images in accordance with various embodiments of the present invention. FIG. 7 is a flow chart showing a method of positioning a workpiece according to various embodiments of the present invention. FIG. 8 is a flow chart showing a method of inspecting a conductive feature of a workpiece according to various embodiments of the present invention.
700‧‧‧工件定位方法 700‧‧‧Work positioning method
S701~S703‧‧‧步驟 S701~S703‧‧‧Steps
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US10964004B2 (en) | 2017-12-25 | 2021-03-30 | Utechzone Co., Ltd. | Automated optical inspection method using deep learning and apparatus, computer program for performing the method, computer-readable storage medium storing the computer program, and deep learning system thereof |
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