TWI575641B - Wet chemistry process apparatus - Google Patents

Description

Wet process equipment

The invention relates to a wet process equipment, in particular to a wet process equipment capable of reducing wear on a substrate and performing double-sided processing on a substrate in a process.

In general, the wet process is used in the industry to process the glass substrate of the touch panel. For example, the wet process is performed by etching the glass substrate through an etching process or by surface cleaning. When the glass substrate is subjected to the above-described wet process, the plate body of the glass substrate and the side portions extending from the plate body are simultaneously fixed and conveyed by the roller. Therefore, on the side where the glass substrate is in contact with the roller, the roller easily wears the glass substrate (including the plate body and the side portion extending from the plate body), and the side of the glass substrate in contact with the roller is also not effectively wetted by the arrangement of the roller. The process, that is, the conventional method of fixing and conveying the glass substrate by using a roller, can only perform single-sided processing on the glass substrate.

Therefore, the present invention provides a wet process apparatus capable of reducing wear on a substrate and performing a double-sided process on a substrate in a process to solve the above problems.

In order to achieve the above object, the present invention discloses a wet process apparatus for supporting a substrate having a plate body portion and a side edge portion extending from the plate body portion, the plate body portion having a The upper surface of the upper surface and the lower surface of the upper surface, the wet processing apparatus includes a tank body, a plurality of guide wheels, a plurality of liquid floating carrier plates, and a water channel module, wherein the tank body is used for accommodating the substrate, a plurality of guide wheels are disposed in the slot body, the plurality of guide wheels corresponding to the side portions and configured to support the side portions of the substrate, the plurality of liquid floating carriers are disposed below the lower surface, the plurality of liquids The floating carrier is configured to spray a processing liquid on the lower surface to form a laminar laminar flow between the lower surface and the plurality of liquid floating carriers, the laminar flow for liquid floating supporting the plate body portion, the water channel mode The group is coupled to the plurality of liquid floating carriers, the water circuit module controlling the plurality of liquid floating carriers to generate a laminar flow of the film that can flow in a conveying direction or to generate a flow in a direction opposite to a direction opposite to the conveying direction The film laminar flow.

According to one embodiment of the present invention, the waterway module includes a plurality of first oblique flow channels and a plurality of second oblique flow channels, and the plurality of first oblique flow channels are obliquely intersected in the conveying direction In the return direction, the plurality of first oblique water flow channels are used to spray the treatment liquid in a first water discharge direction, and the inner product value of the first water discharge direction and the transport direction is greater than zero, and the plurality of second oblique lines The direction of the water flow channel is oblique to the conveying direction and the returning direction, and the plurality of second oblique water flow channels are used for spraying the processing liquid in a second water discharge direction, and the inner product of the second water discharging direction and the returning direction The value is greater than zero.

According to one embodiment of the present invention, the waterway module further includes a water supply pump, a first waterway and a second waterway, wherein the water supply pump supplies the processing liquid, and the first waterway connects the plurality of first obliques a water flow channel and the water supply pump, the processing liquid supplied by the water supply pump enters the plurality of first oblique water flow channels via the first water path, and the second water path connects the plurality of second oblique water flow channels and the supply a water pump, the processing liquid supplied by the water supply pump enters the plurality of second oblique water flow channels via the second water path.

According to one embodiment of the present invention, the waterway module further includes a first water stop valve and a second water stop valve, the first water stop valve is coupled to the first waterway, and the first water stop valve is The second water stopping valve is coupled to the second water stopping channel, the second water stopping valve is configured to selectively block the processing liquid supplied by the water supply pump from entering the plurality of first oblique water flow passages through the first water passage And a method for selectively preventing the processing liquid supplied by the water supply pump from entering the plurality of second oblique water flow passages via the second water passage.

According to one embodiment of the present invention, the plurality of first oblique flow channels are formed on a portion of the plurality of liquid floating carriers, and the plurality of second oblique flow channels are formed in the other portion of the plurality of liquids Floating on the board.

According to one embodiment of the invention, the plurality of liquid floating carrier plates of the portion are interleaved with the plurality of liquid floating carrier plates of the other portion.

According to one embodiment of the present invention, the plurality of first oblique flow channels and the plurality of second oblique flow channels are formed on each of the liquid floating carriers.

According to one embodiment of the present invention, the waterway module includes a plurality of first circulating water flow channels and a plurality of second circulating water flow channels, and the plurality of first circulating water flow channels are configured to selectively spray or inhale the processing liquid The plurality of second circulating water flow channels are configured to selectively eject or inhale the processing liquid, and when the plurality of first circulating water flow channels eject the processing liquid, the plurality of second circulating water flow channels inhale the plurality of The treatment liquid sprayed from a circulating water flow passage causes the treatment liquid to generate the laminar flow of the film flowing in the conveying direction through the plurality of first circulating water flow channels and the plurality of second circulating water flow channels, when the plurality of When the two circulating water flow channels eject the processing liquid, the plurality of first circulating water flow channels suck the processing liquid sprayed by the plurality of second circulating water flow channels, so that the processing liquid passes through the plurality of second circulating water flow channels and the plural The first circulating water flow channels produce a laminar flow of the film flowing in the recovery direction.

According to one embodiment of the present invention, the waterway module further includes a first water supply pump, a first waterway, a second water supply pump, and a second waterway, the first water supply pump is configured to supply the processing liquid or The first water channel is connected to the plurality of first circulating water flow channels and the first water supply pump, and the processing liquid supplied by the first water supply pump enters the plurality of first circulating water flow channels via the first waterway Or the first water supply pump draws the treatment liquid through the first water to the plurality of first circulating water flow channels, and the second water supply pump supplies the treatment liquid or inhales the treatment liquid, and the second water connection The plurality of second circulating water flow channels and the second water supply pump, the processing liquid supplied by the second water supply pump enters the plurality of second circulating water flow channels via the second water path, or the second water supply pump processes the processing The liquid is routed through the plurality of second circulating water flow passages via the second water.

In summary, the guide wheel of the wet process apparatus of the present invention only corresponds to the side portion of the substrate, and the plate body portion of the substrate is supported by the laminar flow of the film generated by the liquid floating carrier plate, so that the wet type of the present invention The guide wheel of the process device does not contact the plate body portion of the substrate, thereby reducing the wear on the plate body portion of the substrate. In addition, the processing liquid sprayed by the liquid floating carrier of the wet processing apparatus of the present invention may be an etching liquid or a cleaning liquid, that is, the wet processing apparatus of the present invention can use a water jet nozzle (not shown). In the wet process of etching or cleaning the upper surface of the plate body portion of the substrate, the wet process apparatus of the present invention can also spray the treatment liquid onto the lower surface of the plate body portion of the substrate by using the liquid floating carrier plate. The wet process of etching or cleaning the lower surface of the plate body is also performed, so that the wet process equipment of the present invention achieves the purpose of performing a two-sided wet process on the substrate. The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the embodiments of the invention.

The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation. Please refer to FIG. 1 and FIG. 2 . FIG. 1 is a schematic plan view of a wet process equipment 1000 according to a first embodiment of the present invention, and FIG. 2 is a cross-sectional view XX of the wet process equipment 1000 shown in FIG. 1 . A schematic cross-sectional view of a first liquid float. As shown in FIG. 1 and FIG. 2, the wet process apparatus 1000 can be used to support a substrate 1 having a plate portion 10 and a side portion 11 extending from the plate portion 10, the plate The body 10 has an upper surface 101 and a lower surface 102 opposite the upper surface 101. In this embodiment, the substrate 1 can be a glass substrate of a touch panel, and the wet processing apparatus 1000 can be used to perform a wet process on the glass substrate, for example, the glass substrate can be subjected to an etching process. Perform pattern etching or surface cleaning after a clear process.

In addition, the wet process equipment 1000 includes a tank body 2, a plurality of guide wheels 3, a plurality of liquid floating carrier plates 4, and a waterway module 5, the tank body 2 is for accommodating the substrate 1, and the plurality of guide wheels 3 are disposed on In the tank body 2, a plurality of guide wheels 3 correspond to the side portions 11 of the substrate 1 and support the side portions 11, and a plurality of liquid floating carriers 4 are disposed below the lower surface 102 of the board portion 10, and a plurality of The liquid floating carrier 4 is configured to spray a processing liquid 6 on the lower surface 102 to form a thin film laminar flow 6' between the lower surface 102 and the plurality of liquid floating carrier plates 4, wherein the thin film laminar flow 6' can be used for liquid floating support. The plate body portion 10 of the substrate 1 is coupled to a plurality of liquid floating carrier plates 4, and the water channel module 5 controls a plurality of liquid floating carrier plates 4 to generate a laminar flow 6' which can flow in a conveying direction X1 or A thin film laminar flow 6' is produced which can flow in a recovery direction X2 opposite to the transport direction X1. In addition, the inlet body 20 and the outlet 21 are formed on the tank body 2, so that the guide wheel 3 can feed the substrate 1 into the tank body 2 via the inlet 20, or the guide wheel 3 can send the substrate 1 out of the tank body 2 via the outlet 21. .

In summary, the thin film laminar flow 6' produced by the liquid floating carrier 4 of the wet processing apparatus 1000 of the present invention can float the support body portion 10 of the substrate 1 and the guide wheel 3 of the wet process apparatus 1000 of the present invention. The side portion 11 of the substrate 1 can be supported, so that the substrate 1 can be stably wet-processed in the tank 2. In addition, the guide wheel 3 of the wet process apparatus 1000 of the present invention only corresponds to the side portion 11 of the substrate 1, and the plate body portion 10 of the substrate 1 is supported by the thin film laminar flow 6' generated by the liquid floating carrier 4. Therefore, the wet process apparatus 1000 of the present invention can reduce the contact with the board portion 10 of the substrate 1, thereby reducing the wear on the board portion 10 of the substrate 1. In addition, the processing liquid 6 sprayed by the liquid floating carrier 4 of the wet processing apparatus 1000 of the present invention may be an etching liquid or a cleaning liquid, that is, the wet processing apparatus 1000 of the present invention can utilize a water jet nozzle. (not shown in the drawing) The wet process apparatus 1000 of the present invention can also use the liquid floating carrier 4 to the substrate 1 in addition to the wet process of etching or cleaning the upper surface 101 of the board portion 10 of the substrate 1. The lower surface 102 of the plate body portion 10 ejects the processing liquid 6 to perform a wet process such as etching or cleaning the lower surface 102 of the plate body portion 10, thereby causing the wet process apparatus 1000 of the present invention to achieve double-sided substrate 1 The purpose of the wet process.

Please refer to FIG. 1 to FIG. 3 . FIG. 3 is a cross-sectional view showing the second liquid floating state of the wet process equipment 1000 according to the first embodiment of the present invention. As shown in FIG. 1 to FIG. 3, the waterway module 5 includes a plurality of first oblique flow channels 50, a plurality of second oblique flow channels 51, a water supply pump 52, a first water path 53, and a second. The water path 54, a first water stop valve 55 and a second water stop valve 56, the direction of each of the first oblique water flow passages 50 is oblique to the conveying direction X1 and the recovery direction X2, so that the first oblique water flow passage 50 can be used. The treatment liquid 6 is ejected in a first water discharge direction Y1, wherein the inner product value of the first water discharge direction Y1 and the transport direction X1 is greater than zero, that is, the projection component of the first water discharge direction Y1 in the transport direction X1 is in the same direction as the transport direction X1. The direction of each of the second oblique flow passages 51 is oblique to the conveying direction X1 and the recovery direction X2, so that the second oblique flow passage 51 can be used to spray the treatment liquid 6 in a second discharge direction Y2, wherein the second outlet direction Y2 The inner product value with the return direction X2 is greater than zero, that is, the projected component of the second water discharge direction Y2 in the return direction X2 is in the same direction as the return direction X2.

Further, the water supply pump 52 supplies the treatment liquid 6, and the first water passage 53 connects the first oblique flow passage 50 and the water supply pump 52, so that the treatment liquid 6 supplied from the water supply pump 52 can enter the first oblique line via the first water passage 53. The water flow passage 50 and the second water passage 54 connect the second oblique flow passage 51 and the water supply pump 52, so that the treatment liquid 6 supplied from the water supply pump 52 can enter the second oblique flow passage 51 via the second water passage 54. The first water stop valve 55 is coupled to the first water passage 53 , and the first water stop valve 55 can be used to selectively prevent the processing liquid 6 supplied from the water supply pump 52 from entering the first oblique water flow passage 50 via the first water passage 53 . The second water stop valve 56 is coupled to the second water passage 54 , and the second water stop valve 56 can be used to selectively prevent the treatment liquid 6 supplied from the water supply pump 52 from entering the second oblique water flow passage 51 via the second water passage 54 .

As shown in FIG. 2, when the first water stop valve 55 is opened and the second water stop valve 56 is closed, the first water stop valve 55 does not prevent the treatment liquid 6 supplied from the water supply pump 52 from entering the first water passage 53. The water flow passage 50 is inclined, so that the first inclined water flow passage 50 can discharge the treatment liquid 6 in the first water discharge direction Y1, and the second water stop valve 56 prevents the treatment liquid 6 supplied from the water supply pump 52 from passing through the second water passage. 54 enters the second oblique flow passage 51, so that the second oblique flow passage 51 is supplied without the treatment liquid 6. At this time, the treatment liquid 6 ejected from the first oblique flow passage 50 in the first discharge direction Y1 can form a laminar flow of the film flowing in the conveying direction X1 between the lower surface 102 of the plate portion 10 and the liquid floating carrier 4. 6', the substrate 1 can be moved by the film laminar flow 6' to move in the transport direction X1.

On the other hand, as shown in FIG. 3, when the first water stop valve 55 is closed and the second water stop valve 56 is opened, the first water stop valve 55 prevents the treatment liquid 6 supplied from the water supply pump 52 from entering through the first water passage 53. The first oblique flow passage 50, so that the first oblique flow passage 50 is not supplied with the treatment liquid 6, and the second check valve 56 does not prevent the treatment liquid 6 supplied from the water supply pump 52 from entering the second oblique passage via the second water passage 54. Since the water flow passage 51 is provided, the second oblique flow passage 51 can discharge the treatment liquid 6 in the second discharge direction Y2. At this time, the treatment liquid 6 ejected by the second oblique flow passage 51 in the second discharge direction Y2 can form a laminar flow of the film flowing in the recovery direction X2 between the lower surface 102 of the plate portion 10 and the liquid floating carrier 4. 6', the substrate 1 can be driven by the film laminar flow 6' to move in the recovery direction X2. In this way, the wet process apparatus 1000 of the present invention facilitates moving the substrate 1 in the transport direction X1 in the tank body 2, or the wet process apparatus 1000 of the present invention can also move the substrate 1 along the transport direction X1 and the return direction in the tank body 2. X2 is reciprocated to increase the duration of the wet process, depending on actual needs.

In this embodiment, the first oblique flow passage 50 is formed on a portion of the liquid floating carrier 4, and the second oblique flow passage 51 is formed on the liquid floating carrier 4 of another portion, and the liquid of the portion The floating carrier 4 and the other portion of the liquid floating carrier 4 are staggered with each other, that is, the first oblique flow channel 50 and the second oblique flow channel 51 are formed on different liquid floating carrier plates 4, and are formed first. The liquid floating carrier 4 of the oblique flow passage 50 and the liquid floating carrier 4 formed with the second oblique flow passage 51 are alternately arranged with each other. The arrangement of the first oblique flow channel 50 and the second oblique flow channel 51 of the present invention may not be limited to the embodiment of the embodiment.

For example, referring to FIG. 4 and FIG. 5, FIG. 4 is a cross-sectional view showing a first liquid floating state of a wet processing apparatus 1000' according to a second embodiment of the present invention, and FIG. 5 is a view of the present invention. The second embodiment of the wet process apparatus 1000' is in a schematic cross-sectional view of a second liquid floating state. As shown in FIGS. 4 and 5, the main difference between the wet process apparatus 1000' and the wet process apparatus 1000 described above is that the first oblique flow passage 50 and the second oblique flow of the wet process apparatus 1000' The channels 51 are respectively formed on the respective liquid floating carriers 4, that is, the respective liquid floating carriers 4 of the wet processing apparatus 1000' are respectively formed with a first oblique water flow channel 50 and a second oblique water flow channel 51. The components of the embodiment having the same reference numerals as in the above embodiments have the same structural design and function principle, and are not described herein for brevity.

Please refer to FIG. 6 and FIG. 7 . FIG. 6 is a cross-sectional view showing a first liquid floating state of a wet processing apparatus 1000 ′′ according to a third embodiment of the present invention, and FIG. 7 is a third embodiment of the present invention. An example of a wet process apparatus 1000'' is in a schematic view of a second liquid float. As shown in FIG. 6 and FIG. 7, a waterway module 5' of the wet process equipment 1000'' includes a plurality of first circulating water flow channels 57, a plurality of second circulating water flow channels 58, and a first water supply pump 59. a first water passage 5A, a second water supply pump 5B, and a second water passage 5C for selectively discharging or sucking the treatment liquid 6, and the second circulation water flow passage 58 for selectively The treatment liquid 6 is sprayed or sucked, and the first water supply pump 59 and the second water supply pump 5B are used to supply the treatment liquid 6 or to suck the treatment liquid 6. The first water passage 5A connects the first circulation water flow passage 57 and the first water supply pump 59, The treatment liquid 6 supplied from the first water supply pump 59 can enter the first circulation water flow passage 57 via the first water passage 5A, or the first water supply pump 59 can pass the treatment liquid 6 from the first circulation water flow passage 57 via the first water passage 5A. Inhalation, the second water passage 5C connects the second circulating water flow passage 58 and the second water supply pump 5B, so that the processing liquid 6 supplied from the second water supply pump 5B can enter the second circulating water flow passage 58 via the second water passage 5C, or is the second The water supply pump 5B can process the treatment liquid 6 from the second circulating water via the second water passage 5C. Channel 58 inhalation. The components of the embodiment having the same reference numerals as in the above embodiments have the same structural design and function principle, and are not described herein for brevity.

In summary, when the first circulating water flow channel 57 ejects the processing liquid 6, the second circulating water flow channel 58 can be used to suck in the processing liquid 6 ejected from the first circulating water flow channel 57, so that the processing liquid 6 passes through the first circulating water flow channel. 57 and the second circulating water flow passage 58 generate a thin film laminar flow 6' flowing in the conveying direction X1, so that the substrate 1 can be moved by the thin film laminar flow 6' to move in the conveying direction X1. On the other hand, when the second circulating water flow path 58 ejects the processing liquid 6, the first circulating water flow path 57 can be used to suck the processing liquid 6 ejected from the second circulating water flow path 58 to cause the processing liquid 6 to pass through the second circulating water flow path 58. The first laminar water flow channel 57 generates a thin film laminar flow 6' flowing in the recovery direction X2, so that the substrate 1 can be moved by the thin film laminar flow 6' to move in the recovery direction X2. Compared with the prior art, the guide wheel of the wet process equipment of the present invention only corresponds to the side portion of the substrate, and the plate body portion of the substrate is supported by the laminar flow of the film generated by the liquid floating carrier, so that the present invention is wet. The guide wheel of the process equipment does not contact the plate body portion of the substrate, thereby reducing the wear on the plate body portion of the substrate. In addition, the processing liquid sprayed by the liquid floating carrier of the wet processing apparatus of the present invention may be an etching liquid or a cleaning liquid, that is, the wet processing apparatus of the present invention can use a water jet nozzle (not shown). In the wet process of etching or cleaning the upper surface of the plate body portion of the substrate, the wet process apparatus of the present invention can also spray the treatment liquid onto the lower surface of the plate body portion of the substrate by using the liquid floating carrier plate. The wet process of etching or cleaning the lower surface of the plate body is also performed, so that the wet process equipment of the present invention achieves the purpose of performing a two-sided wet process on the substrate. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

1000, 1000', 1000''‧‧‧ Wet process equipment
1‧‧‧Substrate
10‧‧‧ Board Department
101‧‧‧ upper surface
102‧‧‧lower surface
11‧‧‧ Sideside
2‧‧‧Slot
20‧‧‧ entrance
21‧‧‧Export
3‧‧‧guide wheel
4‧‧‧Liquid floating board
5, 5'‧‧‧ Waterway Module
50‧‧‧First oblique flow channel
51‧‧‧Second oblique flow channel
52‧‧‧Water supply pump
53, 5A‧‧‧ First Waterway
54, 5C‧‧‧Second waterway
55‧‧‧First water stop valve
56‧‧‧Second stop valve
57‧‧‧First circulating water flow channel
58‧‧‧Second circulating water flow channel
5‧‧‧First water supply pump
5B‧‧‧Second water supply pump
6‧‧‧Processing fluid
6'‧‧‧Laminar laminar flow
X1‧‧‧ conveying direction
X2‧‧‧Responding direction
Y1‧‧‧First water direction
Y2‧‧‧Second water direction
XX‧‧‧ hatching

1 is a top plan view of a wet process apparatus according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing the wet process apparatus shown in Fig. 1 along the section line X-X and in the first liquid floating state. Fig. 3 is a cross-sectional view showing the second liquid floating state of the wet process apparatus according to the first embodiment of the present invention. Fig. 4 is a cross-sectional view showing the first liquid floating state of the wet process apparatus according to the second embodiment of the present invention. Fig. 5 is a cross-sectional view showing the second liquid floating state of the wet process apparatus according to the second embodiment of the present invention. Figure 6 is a cross-sectional view showing the first liquid floating state of the wet process equipment according to the third embodiment of the present invention. Figure 7 is a cross-sectional view showing the second liquid floating state of the wet process apparatus according to the third embodiment of the present invention.

1000‧‧‧wet process equipment

1‧‧‧Substrate

101‧‧‧ upper surface

102‧‧‧lower surface

2‧‧‧Slot

20‧‧‧ entrance

21‧‧‧Export

3‧‧‧guide wheel

4‧‧‧Liquid floating board

5, 5'‧‧‧ Waterway Module

50‧‧‧First oblique flow channel

51‧‧‧Second oblique flow channel

52‧‧‧Water supply pump

53‧‧‧First Waterway

54‧‧‧Second waterway

55‧‧‧First water stop valve

56‧‧‧Second stop valve

6‧‧‧Processing fluid

6'‧‧‧Laminar laminar flow

X1‧‧‧ conveying direction

Y1‧‧‧First water direction

Claims (9)

A wet process apparatus for supporting a substrate having a plate body portion and a side edge portion extending from the plate body portion, the plate body portion having an upper surface and opposite the upper surface a lower surface surface, the wet process apparatus includes: a tank body for accommodating the substrate; a plurality of guide wheels disposed in the tank body, the plurality of guide wheels corresponding to the side edges and supporting the substrate The plurality of liquid floating carrier plates are disposed under the lower surface, and the plurality of liquid floating carrier plates are configured to spray a processing liquid on the lower surface to the lower surface and the plurality of liquid floating carrier plates Forming a thin film laminar flow for liquid floating support of the plate body portion; and a water circuit module coupled to the plurality of liquid floating carrier plates, the water circuit module controlling the plurality of liquid floating carrier plates to generate The laminar flow of the film that can flow in a transport direction or the laminar flow of the film that can flow in a direction opposite to one of the transport directions. The wet process apparatus of claim 1, wherein the waterway module comprises: a plurality of first oblique water flow channels, the strike direction is oblique to the transport direction and the return direction, and the plurality of first oblique water flow channels The process liquid is sprayed in a first water discharge direction, the inner product value of the first water discharge direction and the transport direction is greater than zero; and the plurality of second oblique water flow channels are obliquely intersected in the transport direction and the In the recovery direction, the plurality of second oblique water flow channels are used to spray the treatment liquid in a second water discharge direction, and the inner product value of the second water discharge direction and the recovery direction is greater than zero. The wet process apparatus of claim 2, wherein the waterway module further comprises: a water supply pump for supplying the processing liquid; a first waterway connecting the plurality of first oblique water flow channels and the water supply pump The processing liquid supplied by the water supply pump enters the plurality of first oblique water flow passages through the first water passage; and a second water passage connecting the plurality of second oblique water flow passages with the water supply pump, the water supply pump The supplied treatment liquid enters the plurality of second oblique water flow passages via the second water passage. The wet process apparatus of claim 3, wherein the waterway module further comprises: a first water stop valve coupled to the first waterway, the first water stop valve for selectively blocking the water supply pump The supplied treatment liquid enters the plurality of first oblique water flow passages via the first water passage; and a second water stop valve coupled to the second water passage, the second water stop valve is configured to selectively block The treatment liquid supplied by the water supply pump enters the plurality of second oblique water flow passages via the second water passage. The wet process apparatus of claim 2, wherein the plurality of first oblique flow channels are formed on a portion of the plurality of liquid floating carriers, and the plurality of second oblique flow channels are formed in another portion The plurality of liquid floating carriers. The wet process apparatus of claim 5, wherein the plurality of liquid floating carriers of the portion are interleaved with the plurality of liquid floating carriers of the other portion. The wet process apparatus of claim 2, wherein the plurality of first oblique flow channels and the plurality of second oblique flow channels are formed on each of the liquid floating carriers. The wet process apparatus of claim 1, wherein the waterway module comprises: a plurality of first circulating water flow channels for selectively discharging or inhaling the treatment liquid; and a plurality of second circulating water flow channels, Selectively ejecting or inhaling the treatment liquid, and when the plurality of first circulating water flow channels eject the treatment liquid, the plurality of second circulating water flow channels suck the liquid discharged from the plurality of first circulating water flow channels And causing the treatment liquid to generate the laminar flow of the film flowing in the conveying direction through the plurality of first circulating water flow channels and the plurality of second circulating water flow channels, when the plurality of second circulating water flow channels eject the processing liquid, The plurality of first circulating water flow channels suck the processing liquid sprayed by the plurality of second circulating water flow channels, so that the processing liquid is generated along the plurality of first circulating water flow channels and the plurality of first circulating water flow channels The laminar flow of the film in the direction of flow. The wet process apparatus of claim 8, wherein the waterway module further comprises: a first water supply pump for supplying the treatment liquid or sucking the treatment liquid; and a first water passage connecting the plurality of first a circulating water flow channel and the first water supply pump, the processing liquid supplied by the first water supply pump enters the plurality of first circulating water flow channels via the first water path, or the first water supply pump passes the processing liquid through the first Water is routed through the plurality of first circulating water flow passages; a second water supply pump for supplying the treatment liquid or sucking the treatment liquid; and a second water passage connecting the plurality of second circulating water flow passages and the second a water supply pump, the processing liquid supplied by the second water supply pump enters the plurality of second circulating water flow passages via the second water passage, or the second water supply pump routes the processing liquid to the plurality of second waters via the second water The circulating water flow channel is inhaled.