TWI575537B - Flash memory and method for improving reliability of the same - Google Patents

Flash memory and method for improving reliability of the same Download PDF

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TWI575537B
TWI575537B TW104134632A TW104134632A TWI575537B TW I575537 B TWI575537 B TW I575537B TW 104134632 A TW104134632 A TW 104134632A TW 104134632 A TW104134632 A TW 104134632A TW I575537 B TWI575537 B TW I575537B
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voltage
flash memory
source
drain
transistor
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TW201715520A (en
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顏定國
許增鉅
張尙文
陳建隆
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華邦電子股份有限公司
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快閃記憶體與增進快閃記憶體可靠性的方法 Flash memory and method for improving the reliability of flash memory

本發明係有關於快閃記憶體,特別係有關於增進快閃記憶體可靠性的方法。 The present invention relates to flash memory, and more particularly to methods for improving the reliability of flash memory.

快閃記憶體是一種允許在操作中被多次寫入或讀取的記憶體,可用於電子裝置之間傳輸或交換所儲存的資料,例如記憶卡與隨身硬碟的應用。而快閃記憶體亦為目前非揮發性固態儲存領域中相當重要且被廣為應用的技術,也由於快閃記憶體是非揮發性的記憶體,快閃記憶體在儲存資料的運用上不需要消耗電力,此為快閃記憶體之優勢。 Flash memory is a memory that allows multiple writes or reads during operation. It can be used to transfer or exchange stored data between electronic devices, such as memory cards and portable hard disk applications. Flash memory is also a very important and widely used technology in the field of non-volatile solid-state storage. Because flash memory is a non-volatile memory, flash memory does not need to store data. Power consumption, this is the advantage of flash memory.

快閃記憶體所使用之電晶體的閘極結構具備一控制閘(control gate)和一浮閘(floating gate),浮閘係介於控制閘與電晶體的通道之間,透過浮閘的使用,快閃記憶體可完成讀取、寫入以及抹除之三種基本操作模式。在一些應用中,當浮閘被注入電荷時,快閃記憶體所儲存之位元即為「0」,相對的,當上述電荷從浮閘中移除後,上述位元即為「1」,而快閃記憶體就是透過上述將電荷注入或移除於浮閘的原理,而使得本身具有重複讀寫的特性。 The gate structure of the transistor used in the flash memory has a control gate and a floating gate, and the floating gate is between the gate of the control gate and the transistor, and is used through the floating gate. The flash memory can perform three basic operation modes of reading, writing, and erasing. In some applications, when the floating gate is injected with charge, the bit stored in the flash memory is "0". In contrast, when the charge is removed from the floating gate, the bit is "1". The flash memory is the principle of repeatedly injecting and reading the charge by injecting or removing the charge onto the floating gate.

而在一些實際應用中,快閃記憶體寫入動作之測試過程,會受到測試溫度以及電荷捕獲(trapping)現象的影響, 使測試結果對於浮閘所儲存之電荷量產生誤判,而造成測試結果錯誤,進而導致快閃記憶體之製造良率下降。 In some practical applications, the test process of the flash memory write action is affected by the test temperature and the trapping phenomenon. The test result is misjudged by the amount of charge stored in the floating gate, which causes the test result to be wrong, which leads to a decrease in the manufacturing yield of the flash memory.

有鑑於此,本發明提供一種快閃記憶體以及增進快閃記憶體可靠性的方法,以克服前述問題。 In view of the above, the present invention provides a flash memory and a method of improving the reliability of a flash memory to overcome the aforementioned problems.

本發明提供一種增進快閃記憶體可靠性的方法,該快閃記憶體包括一字元線、一位元線、一參考位準線及一由電晶體構成的快閃記憶體單元,該電晶體具有一連接該字元線的閘極結構、一連接該位元線的第一源/汲極和一連接該參考位準線的第二源/汲極。而該方法包括於一寫入期間,透過該字元線、位元線及參考位準線,分別施加一第一開啟電壓、一第一電壓及一第二電壓至該閘極結構、第一源/汲極和第二源/汲極,以對該快閃記憶體單元執行一寫入動作;於該寫入期間之後的一測試期間,透過該字元線、位元線及參考位準線,分別施加一第二開啟電壓、一第三電壓及一第四電壓至該閘極結構、第一源/汲極和第二源/汲極,以執行一測試動作,該測試動作為測試該寫入期間寫入該快閃記憶體單元的資料;其中,該第一開啟電壓大於該第二開啟電壓、該第一電壓大於該第二電壓,且該第四電壓大於該第三電壓。 The invention provides a method for improving the reliability of a flash memory, the flash memory comprising a word line, a bit line, a reference level line and a flash memory unit composed of a transistor, the electric The crystal has a gate structure connected to the word line, a first source/drain connected to the bit line, and a second source/drain connected to the reference line. The method includes applying a first turn-on voltage, a first voltage, and a second voltage to the gate structure through the word line, the bit line, and the reference level line during a writing period, respectively. a source/drain and a second source/drain to perform a write operation on the flash memory cell; during the test period after the write period, the word line, the bit line, and the reference level are transmitted through the word line a second opening voltage, a third voltage and a fourth voltage are respectively applied to the gate structure, the first source/drain and the second source/drain to perform a test action, wherein the test action is a test Writing data of the flash memory unit during the writing; wherein the first turn-on voltage is greater than the second turn-on voltage, the first voltage is greater than the second voltage, and the fourth voltage is greater than the third voltage.

如上述增進快閃記憶體可靠性的方法,其中該快閃記憶體單元於該測試期間會產生一測試電流,且該方法更包括當該測試電流的電流量低於一第一預定電流量時,結束該測試動作;以及當該測試電流的電流量高於該第一預定電流量時,重新執行該寫入動作。 The method for improving the reliability of the flash memory, wherein the flash memory unit generates a test current during the test, and the method further comprises when the current amount of the test current is lower than a first predetermined current amount. Ending the test action; and re-executing the write action when the current amount of the test current is higher than the first predetermined current amount.

本發明提供一種快閃記憶體,包括至少一電壓控制電路;至少一字元線,耦接對應之一電壓控制電路;至少一位元線,耦接該電壓控制電路;至少一參考位準線,耦接該電壓控制電路;以及至少一快閃記憶體單元。該快閃記憶體單元包括一電晶體,該電晶體之閘極結構耦接該字元線,該電晶體之第一源/汲極耦接該位元線,且該電晶體之第二源/汲極耦接該參考位準線;其中,在一寫入期間,該電壓控制電路透過該字元線提供一第一開啟電壓於該閘極結構、透過該位元線提供一第一電壓於該第一源/汲極以及透過該參考位準線提供一第二電壓於該第二源/汲極,以對該快閃記憶體單元執行一寫入動作;其中,在該寫入動作執行之後的一測試期間,該電壓控制電路透過該字元線提供一第二開啟電壓於該閘極結構、透過該位元線提供一第三電壓於該第一源/汲極以及透過該參考位準線提供一第四電壓於該第二源/汲極,以執行一測試動作,該測試動作為測試該寫入期間寫入該快閃記憶體單元的資料;其中,該第一開啟電壓大於該第二開啟電壓、該第一電壓大於該第二電壓,且該第四電壓大於該第三電壓。 The present invention provides a flash memory comprising at least one voltage control circuit; at least one word line coupled to a voltage control circuit; at least one bit line coupled to the voltage control circuit; at least one reference level line And coupling the voltage control circuit; and at least one flash memory unit. The flash memory unit includes a transistor, a gate structure of the transistor is coupled to the word line, a first source/drain of the transistor is coupled to the bit line, and a second source of the transistor And the drain electrode is coupled to the reference level line; wherein, during a writing period, the voltage control circuit provides a first turn-on voltage through the word line to the gate structure, and provides a first voltage through the bit line Providing a second voltage to the second source/drain through the first source/drain and through the reference level to perform a write operation on the flash memory unit; wherein, the write operation During a test period after the execution, the voltage control circuit provides a second turn-on voltage to the gate structure through the word line, provides a third voltage to the first source/drain through the bit line, and transmits the reference through the bit line. The level line provides a fourth voltage to the second source/drain to perform a test action for testing data written to the flash memory cell during the writing; wherein the first turn-on voltage Greater than the second turn-on voltage, the first voltage is greater than the second , And the fourth voltage is greater than the third voltage.

如上述之快閃記憶體以及增進快閃記憶體可靠性的方法,其中該電晶體之閘極結構具備一控制閘以及一浮閘。 The flash memory as described above and the method for improving the reliability of the flash memory, wherein the gate structure of the transistor has a control gate and a floating gate.

100‧‧‧電晶體 100‧‧‧Optoelectronics

101‧‧‧閘極結構 101‧‧‧ gate structure

101a‧‧‧控制閘 101a‧‧‧Control gate

101b‧‧‧氧化層 101b‧‧‧Oxide layer

101c‧‧‧浮閘 101c‧‧‧Float

101d‧‧‧氧化層 101d‧‧‧Oxide layer

102‧‧‧第一源/汲極 102‧‧‧First source/bungee

103‧‧‧第二源/汲極 103‧‧‧Second source/bungee

104‧‧‧P型基板 104‧‧‧P type substrate

106、107‧‧‧複數負電荷 106, 107‧‧‧ plural negative charges

200‧‧‧快閃記憶體區塊 200‧‧‧Flash memory block

201‧‧‧電壓控制器 201‧‧‧Voltage controller

203‧‧‧控制閘 203‧‧‧Control gate

204‧‧‧第一源/汲極 204‧‧‧First source/bungee

205‧‧‧第二源/汲極 205‧‧‧Second source/bungee

M1‧‧‧快閃記憶體單元 M 1 ‧‧‧flash memory unit

B0、B1‧‧‧位元線 B 0 , B 1 ‧‧‧ bit line

W0‧‧‧字元線 W 0 ‧‧‧ character line

SL‧‧‧參考位準線 SL‧‧‧ reference level

300‧‧‧反或閘快閃記憶體區塊 300‧‧‧Anti-gate flash memory block

M11-M13、M21-M23‧‧‧開關元件 M 11 -M 13 , M 21 -M 23 ‧‧‧Switching elements

S11-S23‧‧‧閘極 S 11 -S 23 ‧‧‧ gate

M14、M24‧‧‧反或閘快閃記憶體單元 M 14 , M 24 ‧‧‧ reverse or gate flash memory unit

301‧‧‧電壓控制器 301‧‧‧Voltage controller

303‧‧‧控制閘 303‧‧‧Control gate

304‧‧‧第一源/汲極 304‧‧‧First source/bungee

305‧‧‧第二源/汲極 305‧‧‧Second source/bungee

Iw‧‧‧寫入電流 I w ‧‧‧write current

It‧‧‧測試電流 I t ‧‧‧Test current

400‧‧‧流程圖 400‧‧‧ Flowchart

401-404‧‧‧步驟 401-404‧‧‧Steps

第1A圖係依據本發明一實施例之快閃記憶體之一電晶體的示意圖。 1A is a schematic diagram of a transistor of a flash memory in accordance with an embodiment of the present invention.

第1B圖係依據本發明一實施例之快閃記憶體之一電晶體 的示意圖。 1B is a transistor of a flash memory according to an embodiment of the invention Schematic diagram.

第2A圖係依據本發明一實施例之一快閃記憶體之寫入動作的示意圖。 2A is a schematic diagram of a write operation of a flash memory according to an embodiment of the present invention.

第2B圖係依據本發明一實施例之一快閃記憶體之測試動作的示意圖。 2B is a schematic diagram of a test operation of a flash memory according to an embodiment of the present invention.

第3A圖係依據本發明一實施例之一反或閘快閃記憶體之寫入動作的示意圖。 3A is a schematic diagram of a write operation of an anti-gate flash memory according to an embodiment of the present invention.

第3B圖係依據本發明一實施例之一反或閘快閃記憶體之測試動作的示意圖。 FIG. 3B is a schematic diagram showing the test action of the anti-gate flash memory according to an embodiment of the present invention.

第4圖係依據本發明一實施例之增進快閃記憶體可靠性的方法流程圖。 4 is a flow chart of a method for improving the reliability of a flash memory in accordance with an embodiment of the present invention.

為讓本發明之上述目的、特徵和優點能更明顯易懂,下文特舉出本發明之具體實施例,並配合所附圖式,作詳細說明如下。 The above described objects, features and advantages of the present invention will become more apparent from the description of the appended claims.

第1A圖係依據本發明一實施例之一快閃記憶體之一電晶體100的示意圖。電晶體100包括一閘極結構101,一第一源/汲極102,以及一第二源/汲極103。閘極結構101形成於該P型基板104上,具有一控制閘101a、一浮閘101c以及氧化層101b與101d。第一和第二源/汲極102、103,係由N型摻雜區所構成,並設置於該閘極結構101兩側的P型基板104中。於閘極結構101中,控制閘101a和浮閘101c之間以氧化層101b而電性隔離,浮閘101c和P型基板104間有氧化層101d。 1A is a schematic diagram of a transistor 100 of a flash memory in accordance with one embodiment of the present invention. The transistor 100 includes a gate structure 101, a first source/drain 102, and a second source/drain 103. The gate structure 101 is formed on the P-type substrate 104 and has a control gate 101a, a floating gate 101c, and oxide layers 101b and 101d. The first and second source/drain electrodes 102, 103 are formed of N-type doped regions and are disposed in the P-type substrate 104 on both sides of the gate structure 101. In the gate structure 101, the control gate 101a and the floating gate 101c are electrically isolated by an oxide layer 101b, and an oxide layer 101d is provided between the floating gate 101c and the P-type substrate 104.

在本實施例中,該快閃記憶體在一寫入期間執行 一寫入動作,電晶體100之控制閘101a連接一第一開啟電壓;第一源/汲極102連接一第一電壓;以及第二源/汲極103連接一第二電壓,在本實施例中,該第一電壓大於該第二電壓。在一些實施例中,該第一開啟電壓可為9伏特;該第一電壓可為4伏特;以及該第二電壓可為0伏特,但本發明並不以此為限制。 In this embodiment, the flash memory is executed during a write period. In a write operation, the control gate 101a of the transistor 100 is connected to a first turn-on voltage; the first source/drain 102 is connected to a first voltage; and the second source/drain 103 is connected to a second voltage, in this embodiment. The first voltage is greater than the second voltage. In some embodiments, the first turn-on voltage can be 9 volts; the first voltage can be 4 volts; and the second voltage can be 0 volts, although the invention is not limited thereto.

由於該第一電壓大於該第二電壓,該寫入動作施加至控制閘101a、第一源/汲極102與第二源/汲極103之電壓會造成熱電子注入到浮閘101c中,電晶體100將會具有對應於浮閘101c中電荷的一臨界電壓。在此同時,由於電荷捕獲現象的發生,氧化層101d亦具備複數負電荷107,複數負電荷107主要會屏蔽部分控制閘101a與第二源/汲極103之間的電場(亦即主要會屏蔽第一源/汲極102、第二源/汲極103中電壓較低者以及控制閘101a之間的電場),進而影響該臨界電壓。其中,氧化層101d中的複數負電荷107會受到環境溫度的影響,例如在一高溫測試之後,複數負電荷107會部分散逸或從氧化層101d中移除。 Since the first voltage is greater than the second voltage, the voltage applied to the control gate 101a, the first source/drain 102, and the second source/drain 103 may cause hot electrons to be injected into the floating gate 101c. Crystal 100 will have a threshold voltage corresponding to the charge in floating gate 101c. At the same time, due to the occurrence of the charge trapping phenomenon, the oxide layer 101d also has a complex negative charge 107, and the complex negative charge 107 mainly shields the electric field between the partial control gate 101a and the second source/drain 103 (ie, mainly shields The first source/drain 102, the lower voltage of the second source/drain 103, and the electric field between the control gates 101a, thereby affecting the threshold voltage. Wherein, the complex negative charge 107 in the oxide layer 101d is affected by the ambient temperature. For example, after a high temperature test, the plurality of negative charges 107 may partially escape or be removed from the oxide layer 101d.

在本實施例中,在該寫入動作執行之後的一測試期間,該快閃記憶體進而執行一測試動作,該測試動作用以測試該寫入動作是否已完成。透過施加電壓於控制閘101a、第一源/汲極102以及第二源/汲極103,以偵測於第一源/汲極102以及第二源/汲極103之間導通之一測試電流是否小於一預定電流量,若該測試電流小於該預定電流量則該寫入動作已完成。 In this embodiment, during a test after the execution of the write operation, the flash memory further performs a test action to test whether the write action has been completed. Applying a voltage to the control gate 101a, the first source/drain 102, and the second source/drain 103 to detect a test current between the first source/drain 102 and the second source/drain 103 Whether it is less than a predetermined current amount, if the test current is less than the predetermined current amount, the writing action is completed.

根據以往的操作方式,以往測試動作係將控制閘101a連接一第二開啟電壓;第一源/汲極102連接一第三電壓; 以及第二源/汲極103連接一第四電壓,其中該第三電壓大於該第四電壓且該第一開啟電壓大於該第二開啟電壓,也就是說,在以往測試動作中,第一源/汲極102以及第二源/汲極103之電壓大小關係與該寫入動作相同。上述習知操作方式使電晶體100之該臨界電壓會明顯受到複數負電荷107的影響(如前述之現象,複數負電荷107主要會屏蔽第一源/汲極102、第二源/汲極103中電壓較低者以及控制閘101a之間的電場),造成電晶體100在以往測試動作完成後,再進一步經過該高溫測試之狀況下,電晶體100之該臨界電壓可能還會發生明顯之變化,此現象可能導致該快取記憶體之讀取錯誤。舉例而言,當以往測試動作已偵測該測試電流小於該預定電流量時,亦即該寫入動作已完成,該快取記憶體之讀取值應為「0」,但在進一步經過該高溫測試後,電晶體100之該臨界電壓因為複數負電荷107的減少而下降,造成電晶體100於第一源/汲極102以及第二源/汲極103之間導通的電流大於預期之電流量,導致該快取記憶體之讀取值變為「1」,因此產生讀取錯誤。 According to the conventional operation mode, the conventional test operation connects the control gate 101a to a second turn-on voltage; the first source/drain 102 is connected to a third voltage; And the second source/drain 103 is connected to a fourth voltage, wherein the third voltage is greater than the fourth voltage and the first turn-on voltage is greater than the second turn-on voltage, that is, in a previous test operation, the first source The voltage magnitude relationship of the /drain 102 and the second source/drain 103 is the same as the write operation. The above conventional operation mode makes the threshold voltage of the transistor 100 significantly affected by the complex negative charge 107 (as in the foregoing phenomenon, the complex negative charge 107 mainly shields the first source/drain 102, the second source/drain 103 The lower intermediate voltage and the electric field between the control gates 101a cause the transistor 100 to undergo a significant change in the threshold voltage of the transistor 100 after the previous test operation is completed and further subjected to the high temperature test. This phenomenon may cause a read error in the cache memory. For example, when the previous test action has detected that the test current is less than the predetermined current amount, that is, the write operation has been completed, the read value of the cache memory should be “0”, but further After the high temperature test, the threshold voltage of the transistor 100 decreases due to the decrease of the complex negative charge 107, causing the current of the transistor 100 to conduct between the first source/drain 102 and the second source/drain 103 to be greater than the expected current. The amount causes the read value of the cache to become "1", thus causing a read error.

而在本實施例中,該測試動作係將電晶體100之控制閘101a連接一第二開啟電壓;第一源/汲極102連接一第三電壓;以及第二源/汲極103連接一第四電壓,且該第四電壓係大於該第三電壓、該第一開啟電壓係大於該第二開啟電壓。在一些實施例中,該第二開啟電壓可為6伏特;該第三電壓可為0伏特;以及該第四電壓可為1伏特,但本發明並不以此為限制。 In this embodiment, the test operation is to connect the control gate 101a of the transistor 100 to a second turn-on voltage; the first source/drain 102 is connected to a third voltage; and the second source/drain 103 is connected to the first The fourth voltage is greater than the third voltage, and the first turn-on voltage is greater than the second turn-on voltage. In some embodiments, the second turn-on voltage can be 6 volts; the third voltage can be 0 volts; and the fourth voltage can be 1 volt, but the invention is not limited thereto.

由於本實施例之該第四電壓大於該第三電壓,亦即該測試動作之第一源/汲極102以及第二源/汲極103之電壓大 小關係與該寫入動作相反,因此電晶體100之該臨界電壓明顯較不受複數負電荷107所影響,因此,本實施例之該測試動作將較以往測試動作更能抵抗複數負電荷107所造成的影響,且明顯更能避免讀取錯誤。 Since the fourth voltage of the embodiment is greater than the third voltage, that is, the voltages of the first source/drain 102 and the second source/drain 103 of the test action are large. The small relationship is opposite to the write operation, so the threshold voltage of the transistor 100 is significantly less affected by the complex negative charge 107. Therefore, the test action of the embodiment is more resistant to the complex negative charge 107 than the previous test action. The impact is significantly more avoidable of reading errors.

第2A圖係依據本發明一實施例之一快閃記憶體區塊200中一快閃記憶體單元M1之一寫入動作的示意圖。一快閃記憶體可透過連接複數個快閃記憶體區塊200來組成。快閃記憶體區塊200包括一電壓控制器201、快閃記憶體單元M1、一位元線B0、一參考位準線SL以及一字元線W0,其中快閃記憶體單元M1為具有和前述電晶體100相同結構的電晶體。快閃記憶體區塊200之快閃記憶體單元M1於一寫入期間執行該寫入動作,快閃記憶體單元M1之一控制閘203透過字元線W0耦接電壓控制器201所提供之該第一開啟電壓;快閃記憶體單元M1之一第一源/汲極204透過位元線B0耦接電壓控制器201所提供之該第一電壓;以及快閃記憶體單元M1之一第二源/汲極205透過參考位準線SL耦接電壓控制器201所提供之該第二電壓,其中該第一電壓大於該第二電壓,且快閃記憶體單元M1產生一寫入電流Iw。當該寫入動作完成時,快閃記憶體單元M1內的電荷分佈如第1A圖所示,且快閃記憶體區塊200進而執行一測試動作,如第2B圖所示。 2A a schematic view showing a first embodiment of one of a flash memory block 200 flash memory unit M 1 one embodiment of a write operation of the present invention. A flash memory can be formed by connecting a plurality of flash memory blocks 200. Flash memory block 200 comprises a voltage controller 201, flash memory unit M 1, a bit line B 0, a reference level line SL and a word line W 0, wherein the flash memory cell M 1 is a transistor having the same structure as the aforementioned transistor 100. Flash memory block 200 of the flash memory unit M 1 performs the write operation during a write, one of the flash memory unit M 1 control gate word lines W 0 through 203 coupled to the voltage controller 201 provided by the first threshold voltage; the first one of a first voltage source flash memory unit M / drain bit line B 0 through 204 coupled to the voltage provided by the controller 201; and a flash memory one source unit 1 of the second M / drain 205 through the reference level line SL coupled to the voltage controller 201 provided by the second voltage, wherein the first voltage is greater than the second voltage, and the flash memory unit M 1 generates a write current I w . When the write operation is completed, the charge in the flash memory unit M 1 distribution as shown in FIG. 1A, and a flash memory block 200 further perform a test operation, as shown in Figure 2B.

第2B圖係依據本發明一實施例之一快閃記憶體區塊200中一快閃記憶體單元M1之該測試動作的示意圖。在該寫入期間之後的該測試期間,快閃記憶體區塊200之快閃記憶體單元M1執行該測試動作,快閃記憶體單元M1之控制閘203透過 字元線W0耦接電壓控制器201所提供之該第二開啟電壓;快閃記憶體單元M1之一第一源/汲極204透過位元線B0耦接電壓控制器201所提供之該第三電壓;以及快閃記憶體單元M1之一第二源/汲極205透過參考位準線SL耦接電壓控制器201所提供之該第四電壓,其中該第四電壓大於該第三電壓且該第一開啟電壓大於該第二開啟電壓。其中,快閃記憶體單元M1產生一測試電流It2B a schematic view showing in section one embodiment of a flash memory block 200 of the flash memory unit M 1 a test operation of the embodiment of the present invention. During the test period after the writing period, the flash memory cell M 1 of the flash memory block 200 performs the test operation, and the control gate 203 of the flash memory cell M 1 is coupled through the word line W 0 . voltage provided by the controller 201 a second threshold voltage; the third one of a first voltage source flash memory unit M / drain bit line B 0 through 204 coupled to the voltage provided by the controller 201; and a second one of the fourth voltage source flash memory unit M / drain 205 through the reference level line SL coupled to the voltage provided by the controller 201, wherein the fourth voltage is greater than the third voltage and the first The turn-on voltage is greater than the second turn-on voltage. The flash memory cell M 1 generates a test current I t .

在一些實施例中,快閃記憶體區塊200執行該測試動作時,快閃記憶體單元M1內的電荷分佈如第1A圖所示,且該測試動作所產生之控制閘203與第一源/汲極204之間的一臨界電壓不會受複數負電荷107所影響。 In some embodiments, when the flash memory block 200 performs the test action, the charge distribution in the flash memory cell M 1 is as shown in FIG. 1A, and the control gate 203 and the first generated by the test action A threshold voltage between source/drain 204 is not affected by the complex negative charge 107.

在一些實施例中,當測試電流It低於一預定電流時,快閃記憶體區塊200結束該測試動作,反之,當測試電流It高於該預定電流時,快閃記憶體區塊200重新執行該寫入動作。 In some embodiments, when the test current I t is lower than a predetermined current, the flash memory block 200 ends the test action, and when the test current I t is higher than the predetermined current, the flash memory block 200 re-executes the write action.

上述快閃記憶體區塊200之寫入與測試動作,亦可擴展至一反或閘快閃記憶體(Nor Flash),如第3A圖與3B圖所示。第3A圖係依據本發明一實施例之一反或閘快閃記憶體區塊300中一反或閘快閃記憶體單元M14之一寫入動作的示意圖。一反或閘快閃記憶體可透過連接複數個反或閘快閃記憶體區塊300來組成。反或閘快閃記憶體區塊300包括一電壓控制器301、開關元件M11~M13以及M21~M23、反或閘快閃記憶體單元M14與M24、位元線B0與B1、一參考位準線SL以及一字元線W0,其中反或閘快閃記憶體單元M14以及M24各為具有和前述電晶 體100相同結構的電晶體。反或閘快閃記憶體區塊300於一寫入期間執行該寫入動作,開關元件M11~M13之閘極S11~S13耦接電壓控制器301所提供之一高電壓以導通開關元件M11~M13之電流路徑,而反或閘快閃記憶體單元M14之一控制閘303透過字元線W0耦接電壓控制器301所提供之該第一開啟電壓;反或閘快閃記憶體單元M14之一第一源/汲極304透過位元線B0耦接電壓控制器301所提供之該第一電壓;以及反或閘快閃記憶體單元M14之一第二源/汲極305透過參考位準線SL耦接電壓控制器301所提供之該第二電壓,其中該第一電壓大於該第二電壓,且反或閘快閃記憶體單元M14產生一寫入電流Iw。當該寫入動作完成時,反或閘快閃記憶體單元M14內的電荷分佈如第1A圖所示,且反或閘快閃記憶體區塊300進而執行一測試動作,如第3B圖所示。 The writing and testing operations of the flash memory block 200 can also be extended to a reverse flash memory (Nor Flash), as shown in FIGS. 3A and 3B. 3A is a diagram showing a write operation of one of the inverse or gate flash memory cells M 14 in the inverse gate flash memory block 300 in accordance with one embodiment of the present invention. A reverse or gate flash memory can be formed by connecting a plurality of inverse or gate flash memory blocks 300. The inverse or gate flash memory block 300 includes a voltage controller 301, switching elements M 11 M M 13 and M 21 ~ M 23 , inverse or gate flash memory cells M 14 and M 24 , bit line B 0 And B 1 , a reference bit line SL, and a word line W 0 , wherein the anti-gate flash memory cells M 14 and M 24 are each a transistor having the same structure as the transistor 100 described above. NOR flash memory block 300 performs the write operation in a write period, the switching element M 11 ~ M 13 gate electrode of S 11 ~ S 13 coupled to the voltage controller 301 provides a high voltage to turn on one of the a current path of the switching elements M 11 -M 13 , and one of the anti-gate flash memory cells M 14 controls the gate 303 coupled to the first turn-on voltage provided by the voltage controller 301 via the word line W 0 ; One of the first source/drain 304 of the gate flash memory cell M 14 is coupled to the first voltage provided by the voltage controller 301 through the bit line B 0 ; and one of the inverse or gate flash memory cells M 14 The second source/drain 305 is coupled to the second voltage provided by the voltage controller 301 through the reference level line SL, wherein the first voltage is greater than the second voltage, and the anti-gate flash memory unit M 14 is generated. A write current I w . When the write operation is completed, the charge distribution in the inverse or gate flash memory cell M 14 is as shown in FIG. 1A, and the inverse or gate flash memory block 300 in turn performs a test action, such as FIG. 3B. Shown.

在該寫入期間之後的該測試期間,反或閘快閃記憶體區塊300執行該測試動作,開關元件M11~M13之閘極S11~S13耦接電壓控制器301所提供之該高電壓以導通開關元件M11~M13之電流路徑,而反或閘快閃記憶體單元M14之控制閘303透過字元線W0耦接電壓控制器301所提供之該第二開啟電壓;反或閘快閃記憶體單元M14之第一源/汲極304透過位元線B0耦接電壓控制器301所提供之該第三電壓;以及反或閘快閃記憶體單元M14之第二源/汲極305透過參考位準線SL耦接電壓控制器301所提供之該第四電壓,其中該第四電壓大於該第三電壓且該第一開啟電壓大於該第二開啟電壓。其中,反或閘快閃記憶體單元M14產生一測試電流ItDuring the test after the writing period, the NOR flash memory block 300 to perform the test operation, the switching element M 11 ~ M 13 gate electrode of S 11 ~ S 13 coupled to the voltage provided by the controller 301 The high voltage is used to turn on the current path of the switching elements M 11 -M 13 , and the control gate 303 of the anti-gate flash memory unit M 14 is coupled to the second opening provided by the voltage controller 301 via the word line W 0 . Voltage; the first source/drain 304 of the anti-gate flash memory cell M 14 is coupled to the third voltage provided by the voltage controller 301 through the bit line B 0 ; and the inverse or gate flash memory cell M The second source/drain 305 of 14 is coupled to the fourth voltage provided by the voltage controller 301 through the reference level line SL, wherein the fourth voltage is greater than the third voltage and the first turn-on voltage is greater than the second turn-on Voltage. Wherein, the inverse or gate flash memory cell M 14 generates a test current I t .

在一些實施例中,反或閘快閃記憶體區塊300執行該測試動作時,反或閘快閃記憶體單元M14內的電荷分佈如第1A圖所示,且該測試動作所產生之控制閘303與第一源/汲極304之間的一臨界電壓不會受複數負電荷107所影響。 In some embodiments, when the inverse or gate flash memory block 300 performs the test action, the charge distribution in the inverse or gate flash memory cell M 14 is as shown in FIG. 1A, and the test action is generated. A threshold voltage between the control gate 303 and the first source/drain 304 is not affected by the complex negative charge 107.

當測試電流It低於一預定電流時,反或閘快閃記憶體區塊300結束該測試動作,反之,當測試電流It高於該預定電流時,反或閘快閃記憶體區塊300重新執行該寫入動作。 When the test current I t is lower than a predetermined current, the inverse or gate flash memory block 300 ends the test operation, and conversely, when the test current I t is higher than the predetermined current, the inverse or gate flash memory block 300 re-executes the write action.

在一些實施例中,透過複數快閃記憶體區塊200所構成之快閃記憶體,或透過複數反或閘快閃記憶體區塊300所構成之反或閘快閃記憶體,該反或閘快閃記憶體或快閃記憶體之複數參考位準線皆連接至一相同電壓位準。 In some embodiments, the anti-flash memory formed by the plurality of flash memory blocks 200 or the anti-gate flash memory formed by the complex inverse or flash memory block 300 The complex reference bit lines of the gate flash memory or the flash memory are all connected to the same voltage level.

第4圖係依據本發明一實施例之增進快閃記憶體可靠性的方法流程圖400。在步驟401中,一快閃記憶體單元之一電晶體的一控制閘耦接一第一開啟電壓;該電晶體之一第一源/汲極耦接一第一電壓;以及該電晶體之一第二源/汲極耦接一第二電壓,藉此執行一寫入動作,其中該第一電壓大於該第二電壓。在步驟402中,該控制閘耦接一第二開啟電壓;該第一源/汲極耦接一第三電壓;以及該第二源/汲極耦接一第四電壓,藉此執行一測試動作並產生一測試電流,其中該第四電壓大於該第三電壓且該第一開啟電壓大於該第二開啟電壓。在步驟403中,若該測試電流大於一預定電流量,回到步驟401;若該測試電流小於該預定電流量,進入到步驟404。流程圖400結束於步驟404。 4 is a flow chart 400 of a method for improving the reliability of a flash memory in accordance with an embodiment of the present invention. In step 401, a control gate of a transistor of a flash memory cell is coupled to a first turn-on voltage; a first source/drain of the transistor is coupled to a first voltage; and the transistor is A second source/drain is coupled to a second voltage, thereby performing a write operation, wherein the first voltage is greater than the second voltage. In step 402, the control gate is coupled to a second turn-on voltage; the first source/drain is coupled to a third voltage; and the second source/drain is coupled to a fourth voltage, thereby performing a test The action generates a test current, wherein the fourth voltage is greater than the third voltage and the first turn-on voltage is greater than the second turn-on voltage. In step 403, if the test current is greater than a predetermined current amount, return to step 401; if the test current is less than the predetermined current amount, proceed to step 404. Flowchart 400 ends at step 404.

本發明雖以較佳實施例揭露如上,然其並非用以 限定本發明的範圍,任何熟習此項技藝者,在不脫離本發明之精神和範圍內,當可做些許的更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed above in the preferred embodiment, it is not The scope of the present invention is defined by those skilled in the art, and modifications and modifications may be made without departing from the spirit and scope of the invention, and the scope of the invention is defined by the scope of the appended claims. Prevail.

200‧‧‧快閃記憶體區塊 200‧‧‧Flash memory block

201‧‧‧電壓控制器 201‧‧‧Voltage controller

203‧‧‧控制閘 203‧‧‧Control gate

204‧‧‧第一源/汲極 204‧‧‧First source/bungee

205‧‧‧第二源/汲極 205‧‧‧Second source/bungee

M1‧‧‧快閃記憶體單元 M 1 ‧‧‧flash memory unit

B0‧‧‧位元線 B 0 ‧‧‧ bit line

W0‧‧‧字元線 W 0 ‧‧‧ character line

SL‧‧‧參考位準線 SL‧‧‧ reference level

It‧‧‧測試電流 I t ‧‧‧Test current

Claims (8)

一種增進快閃記憶體可靠性的方法,該快閃記憶體包括一字元線、一位元線、一參考位準線及一由電晶體構成的快閃記憶體單元,該電晶體具有一連接該字元線的閘極結構、一連接該位元線的第一源/汲極和一連接該參考位準線的第二源/汲極,該方法包括:於一寫入期間,透過該字元線、位元線及參考位準線,分別施加一第一開啟電壓、一第一電壓及一第二電壓至該閘極結構、第一源/汲極和第二源/汲極,以對該快閃記憶體單元執行一寫入動作;於該寫入期間之後的一測試期間,透過該字元線、位元線及參考位準線,分別施加一第二開啟電壓、一第三電壓及一第四電壓至該閘極結構、第一源/汲極和第二源/汲極,以執行一測試動作,該測試動作為測試該寫入期間寫入該快閃記憶體單元的資料;其中,該第一開啟電壓大於該第二開啟電壓、該第一電壓大於該第二電壓,且該第四電壓大於該第三電壓。 A method for improving the reliability of a flash memory, the flash memory comprising a word line, a bit line, a reference level line, and a flash memory unit composed of a transistor, the transistor having a a gate structure connecting the word line, a first source/drain connected to the bit line, and a second source/drain connected to the reference line, the method comprising: transmitting during a writing period The word line, the bit line and the reference level line respectively apply a first turn-on voltage, a first voltage and a second voltage to the gate structure, the first source/drain and the second source/drain Performing a write operation on the flash memory unit; applying a second turn-on voltage, one through the word line, the bit line, and the reference level line during a test period after the writing period a third voltage and a fourth voltage to the gate structure, the first source/drain and the second source/drain to perform a test action for writing the flash memory during the test of the write Information of the unit; wherein the first turn-on voltage is greater than the second turn-on voltage, the first voltage To the second voltage and the fourth voltage is greater than the third voltage. 如申請專利範圍第1項所述之方法,其中該快閃記憶體單元於該測試期間會產生一測試電流,該方法更包括:當該測試電流的電流量低於一第一預定電流量時,結束該測試動作;以及當該測試電流的電流量高於該第一預定電流量時,重新執 行該寫入動作。 The method of claim 1, wherein the flash memory unit generates a test current during the test, the method further comprising: when the current of the test current is lower than a first predetermined current amount Ending the test action; and re-executing when the current amount of the test current is higher than the first predetermined current amount This write action is performed. 如申請專利範圍第1項所述之方法,其中該電晶體之該閘極結構包括一控制閘和一浮閘(floating gate)。 The method of claim 1, wherein the gate structure of the transistor comprises a control gate and a floating gate. 一種快閃記憶體,包括:至少一電壓控制電路;至少一字元線,耦接對應之一電壓控制電路;至少一位元線,耦接該電壓控制電路;至少一參考位準線,耦接該電壓控制電路;以及至少一快閃記憶體單元,包括一電晶體,該電晶體之閘極結構耦接該字元線,該電晶體之第一源/汲極耦接該位元線,且該電晶體之第二源/汲極耦接該參考位準線;其中,在一寫入期間,該電壓控制電路透過該字元線提供一第一開啟電壓於該閘極結構、透過該位元線提供一第一電壓於該第一源/汲極以及透過該參考位準線提供一第二電壓於該第二源/汲極,以對該快閃記憶體單元執行一寫入動作;其中,在該寫入動作執行之後的一測試期間,該電壓控制電路透過該字元線提供一第二開啟電壓於該閘極結構、透過該位元線提供一第三電壓於該第一源/汲極以及透過該參考位準線提供一第四電壓於該第二源/汲極,以執行一測試動作,該測試動作為測試該寫入期間寫入該快閃記憶體單元的資料;其中,該第一開啟電壓大於該第二開啟電壓、該第一電壓大於該第二電壓,且該第四電壓大於該第三電壓。 A flash memory comprising: at least one voltage control circuit; at least one word line coupled to one of the voltage control circuits; at least one bit line coupled to the voltage control circuit; at least one reference level line, coupled Connected to the voltage control circuit; and at least one flash memory unit, including a transistor, the gate structure of the transistor is coupled to the word line, and the first source/drain of the transistor is coupled to the bit line And the second source/drain of the transistor is coupled to the reference level line; wherein, during a writing period, the voltage control circuit provides a first turn-on voltage to the gate structure through the word line The bit line provides a first voltage to the first source/drain and a second voltage to the second source/drain through the reference level to perform a write to the flash memory cell The voltage control circuit provides a second turn-on voltage to the gate structure through the word line, and provides a third voltage through the bit line during the test period after the writing operation is performed. a source/drain and through the reference level Supplying a fourth voltage to the second source/drain to perform a test action for testing data written to the flash memory unit during the writing; wherein the first turn-on voltage is greater than the first The second voltage is turned on, the first voltage is greater than the second voltage, and the fourth voltage is greater than the third voltage. 如申請專利範圍第4項所述之快閃記憶體,該快閃記憶體單元更包括:一第二電晶體,該第二電晶體之閘極結構連接該字元線,該第二電晶體之第一源/汲極耦接一第二位元線,且該電晶體之第二源/汲極耦接該參考位準線;其中,該第二位元線,耦接對應之該電壓控制電路或對應的一第二電壓控制電路。 The flash memory unit of claim 4, wherein the flash memory unit further comprises: a second transistor, the gate structure of the second transistor is connected to the word line, the second transistor The first source/drain is coupled to a second bit line, and the second source/drain of the transistor is coupled to the reference level line; wherein the second bit line is coupled to the corresponding voltage A control circuit or a corresponding second voltage control circuit. 如申請專利範圍第4項或第5項所述之快閃記憶體,其中該等參考位準線係耦接於同一電壓。 The flash memory of claim 4 or 5, wherein the reference levels are coupled to the same voltage. 如申請專利範圍第4項所述之快閃記憶體,其中該電晶體之閘極結構具備一控制閘以及一浮閘。 The flash memory of claim 4, wherein the gate structure of the transistor has a control gate and a floating gate. 如申請專利範圍第5項所述之快閃記憶體是NOR型快閃記憶體。 The flash memory as described in claim 5 is a NOR type flash memory.
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