TWI575314B - Photosensitive black resin composition and resin black matrix substrate - Google Patents

Photosensitive black resin composition and resin black matrix substrate Download PDF

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TWI575314B
TWI575314B TW102110423A TW102110423A TWI575314B TW I575314 B TWI575314 B TW I575314B TW 102110423 A TW102110423 A TW 102110423A TW 102110423 A TW102110423 A TW 102110423A TW I575314 B TWI575314 B TW I575314B
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resin
resin composition
substrate
oxetane
photosensitive
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TW201348864A (en
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相原涼介
井上欣彥
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東麗股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0757Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0755Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/12Light sources with substantially two-dimensional radiating surfaces
    • H05B33/22Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Description

感光性黑色樹脂組成物及樹脂黑矩陣基板 Photosensitive black resin composition and resin black matrix substrate

本發明係關於一種感光性黑色樹脂組成物及樹脂黑矩陣基板。 The present invention relates to a photosensitive black resin composition and a resin black matrix substrate.

先前,作為黑矩陣材料,使用鉻系材料之金屬薄膜被使用,但近年,就成本或環境汙染的方面而言,由樹脂與遮光材所構成之樹脂黑矩陣被使用。樹脂黑矩陣係將含有樹脂與碳黑等遮光材的黑色樹脂組成物塗布於基板上且乾燥,而形成黑色被膜,並且利用光刻法將其經格子狀之細微圖案化而得。 Conventionally, a metal film using a chromium-based material has been used as a black matrix material. However, in recent years, a resin black matrix composed of a resin and a light-shielding material has been used in terms of cost or environmental pollution. In the resin black matrix, a black resin composition containing a light-shielding material such as a resin and carbon black is applied onto a substrate and dried to form a black film, and this is obtained by finely patterning the pattern by a photolithography method.

近年,由於液晶顯示裝置的小型化及顯示內容由文字至圖像的多樣化,因此要求有濾色器的高性能化、高精細化,對於樹脂黑矩陣係高遮光性(OD值)及薄膜化,並且提高細線加工之要求。雖然使遮光材的體積比率增加來達成高OD值化及薄膜化,但由於樹脂黑矩陣中之樹脂比例減少而導致樹脂黑矩陣與玻璃之接著性下降,且於鹼顯影時產生樹脂黑矩陣剝落等問題。因此,與玻璃基板的顯影接著性,且可高精細圖案加工之樹脂黑矩陣成為必要。 In recent years, due to the miniaturization of liquid crystal display devices and the diversification of display contents from characters to images, high performance and high definition of color filters are required, and high blackout resistance (OD value) and film are required for resin black matrix. And improve the requirements of fine line processing. Although the volume ratio of the light-shielding material is increased to achieve high OD value and thin film formation, the resin black matrix and the glass are decreased in adhesion due to a decrease in the proportion of the resin in the resin black matrix, and the resin black matrix is peeled off during alkali development. And other issues. Therefore, it is necessary to develop the resin black matrix which can be processed with a high-definition pattern with the development adhesion of the glass substrate.

又,於觸控面板用基板中,作為周邊部分之邊緣形成有遮光膜,與濾色器同樣地使遮光材的體積比例增加時,亦被要求高顯影接著性,與高精細圖案加工。 Further, in the substrate for a touch panel, a light-shielding film is formed as an edge of the peripheral portion, and when the volume ratio of the light-shielding material is increased similarly to the color filter, high development adhesiveness is required, and high-definition pattern processing is required.

然而,黑矩陣由於其自身遮光性,感光性的樹脂黑矩陣中,由曝光引起之光硬化係難以產生於與基板界面附近。因此,樹脂黑矩陣之遮光性越高則顯影時與玻璃基板之接著性越惡化,遮光性與顯影接著性係有著互償關係。 However, in the black matrix of the photosensitive black matrix due to its own light-shielding property, photohardening due to exposure is hard to occur in the vicinity of the interface with the substrate. Therefore, the higher the light-shielding property of the resin black matrix, the worse the adhesion to the glass substrate during development, and the light-shielding property and the development adhesive property have a mutual compensation relationship.

又,光學濃度高的黑色樹脂組成物由於包含有多量無機粒子作為顏料,因此與鹼顯影液之相容性惡化,於顯影時有細微圖案脫落等問題。 Further, since the black resin composition having a high optical density contains a large amount of inorganic particles as a pigment, the compatibility with the alkali developing solution is deteriorated, and there is a problem that the fine pattern falls off during development.

為了解決該等問題,提高樹脂黑矩陣之敏感度,而作為用以在與基板界面附近引起光聚合反應之添加劑,已知有第三級胺化合物、三價的磷化合物、環氧矽烷等(專利文獻1~3)。但是,得到高精細圖案化基板有其困難。 In order to solve such problems, the sensitivity of the resin black matrix is increased, and as an additive for causing a photopolymerization reaction in the vicinity of the interface with the substrate, a tertiary amine compound, a trivalent phosphorus compound, an epoxy decane or the like is known ( Patent Documents 1 to 3). However, it is difficult to obtain a high-definition patterned substrate.

另一方面,不含顏料系中,已知有加入氧雜環丁烷(oxetane)化合物作為添加劑之感光性樹脂組成物(專利文獻4及5)。又,包含顏料之感光性樹脂組成物中,由包含氧雜環丁烷基作為構造單元之共聚物的樹脂所構成之硬化膜,但是已知相對於與基板之物理性密合性有效(專利文獻6)。 On the other hand, among the pigment-free systems, a photosensitive resin composition containing an oxetane compound as an additive is known (Patent Documents 4 and 5). Further, in the photosensitive resin composition containing a pigment, a cured film composed of a resin containing a oxetane group as a copolymer of a structural unit is known to be effective in physical adhesion to a substrate (patent Document 6).

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開平10-282325公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 10-282325

[專利文獻2]日本特開平10-246955公報 [Patent Document 2] Japanese Patent Laid-Open No. Hei 10-246955

[專利文獻3]日本特開2004-347916公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2004-347916

[專利文獻4]日本特開2005-258460公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2005-258460

[專利文獻5]日本特開2001-228610公報 [Patent Document 5] Japanese Patent Laid-Open Publication No. 2001-228610

[專利文獻6]日本特開2007-316506公報 [Patent Document 6] Japanese Laid-Open Patent Publication No. 2007-316506

本發明人等,首先以顯影時之細微圖案不易剝落為指標,著重於顯影接著性,於專利文獻1~3,關於樹脂黑矩陣之高光學濃度的膜,在基板界面之硬化反應不充分,不影響顯影時之接著性,但是進一步顯影時之接著性容易受到基礎基板的影響,尤其是在觸控面板用途與一般所使用之鈉鈣玻璃(soda glass)的接著性惡化,因此考量得到高精細圖案化基板有其困難。 The inventors of the present invention firstly made it difficult to peel off the fine pattern during development as an index, and focused on development adhesiveness. In Patent Documents 1 to 3, the film having a high optical density of the resin black matrix has insufficient curing reaction at the substrate interface. It does not affect the adhesion at the time of development, but the adhesion in further development is easily affected by the base substrate, and in particular, the adhesion of the touch panel to the soda glass used in general is deteriorated, so that the consideration is high. Fine patterning of substrates has its difficulties.

又,於樹脂黑矩陣之高光學濃度,且含多量顏料粒子之黑色樹脂組成物中,與顯影液之相容性更不充分,而引起顯影時細微圖案的剝落。本發明人等亦著重於相容性者。 Further, in the black resin composition having a high optical density of the resin black matrix and containing a large amount of pigment particles, compatibility with the developer is less sufficient, and peeling of the fine pattern during development is caused. The present inventors also focused on compatibility.

本發明係鑑於先前技術的缺點而進行創新者,其目的在於提供一種將樹脂黑矩陣形成於玻璃基板上時,對其顯影時之基板接著性良好,與顯影液之相容性良好,且可高精細圖案加工之黑色樹脂組成物,同時提供一種使用該感光性黑色樹脂組成物之樹脂黑矩陣基板,進一步提供濾色器、觸控面板用遮光膜。 The present invention has been made in view of the disadvantages of the prior art, and an object of the invention is to provide a resin black matrix which is formed on a glass substrate, has good substrate adhesion during development, and has good compatibility with a developer. A black resin composition processed by high-definition patterning is provided with a resin black matrix substrate using the photosensitive black resin composition, and a color filter and a light shielding film for a touch panel are further provided.

專利文獻4及5,已知記載有氧雜環丁烷化合物,後烤後之硬化膜與基板之物理性密合性優異、解析性、敏感度亦優異,但是對於顯影時與基板之接著性則未知,又,未記載有適用於樹脂黑矩陣之高光學濃度,且含多量顏料粒子之黑色樹脂組成物。 In the patents 4 and 5, the oxetane compound is known, and the cured film after post-baking has excellent physical adhesion to the substrate, and is excellent in resolution and sensitivity, but adhesion to the substrate during development. It is not known, and a black resin composition containing a large amount of pigment particles suitable for a high optical density of a resin black matrix is not described.

另一方面,於專利文獻6,已知包含顏料之感光性樹脂組成物中,由包含氧雜環丁烷基作為構造單元之共聚物的樹脂所構成經後烤後的硬化膜,對於與基板之物理性密合性有效,但是對於作為共聚物使用,對顯影時之基板的接著性未知,又,於含多量顏料粒子之黑色樹脂組成物中,容易顯在化,且對於與顯影液之相容性仍未知。 On the other hand, Patent Document 6 discloses a post-baked cured film composed of a resin containing a copolymer of a oxetane group as a structural unit in a photosensitive resin composition containing a pigment, and a substrate. The physical adhesiveness is effective, but the use as a copolymer is not known for the adhesion of the substrate during development, and is easily manifested in a black resin composition containing a large amount of pigment particles, and is compatible with the developer. Compatibility is still unknown.

此處,本發明人等發現藉由適量添加特定之氧雜環丁烷化合物,來解決上述課題,進而完成本發明。 Here, the inventors of the present invention have found that the above problems can be solved by adding a specific amount of a specific oxetane compound, and the present invention has been completed.

本發明之目的係藉由以下之構成來達成。 The object of the present invention is achieved by the following constitution.

(1)一種感光性黑色樹脂組成物,其係至少包含遮光材、鹼可溶性樹脂、光聚合起始劑及溶劑的感光性黑色樹脂組成物,其特徵為至少包含具有下述通式(A)之構造的氧雜環丁烷化合物作為添加劑,且相對於遮光材與鹼可溶性樹脂之總和,包含上述氧雜環丁烷化合物1.5~10.0重量%;(2)上述(1)之感光性黑色樹脂組成物,其中上述氧雜環丁烷化合物具有矽基。 (1) A photosensitive black resin composition comprising at least a light-shielding material, an alkali-soluble resin, a photopolymerization initiator, and a solvent, and a photosensitive black resin composition characterized by having at least the following formula (A) The oxetane compound having the structure as an additive and comprising 1.5 to 10.0% by weight of the above oxetane compound with respect to the total of the light-shielding material and the alkali-soluble resin; (2) the photosensitive black resin of the above (1) A composition wherein the above oxetane compound has a mercapto group.

(3)上述(1)或(2)之感光性黑色樹脂組成物,其中上述氧雜環丁烷化合物以下述構造式(B)所示。 (3) The photosensitive black resin composition of the above (1) or (2), wherein the oxetane compound is represented by the following structural formula (B).

(4)一種樹脂黑矩陣基板,其係將上述(1)至(3)中任一項之感光黑色樹脂組成物塗布於透明基板上,且圖案形成而得。 (4) A resin black matrix substrate obtained by applying the photosensitive black resin composition according to any one of the above (1) to (3) to a transparent substrate and patterning the same.

藉由使用本發明之黑色樹脂組成物,可得到顯影接著性、圖案加工精度優異之樹脂黑矩陣基板等效果。 By using the black resin composition of the present invention, effects such as a resin black matrix substrate excellent in development adhesion and pattern processing accuracy can be obtained.

[實施發明之形態] [Formation of the Invention]

本發明之感光性黑色樹脂組成物係必須至少包含遮光材與鹼可溶性樹脂、光聚合起始劑及溶劑,且於以下表示其所欲之特性。 The photosensitive black resin composition of the present invention must contain at least a light-shielding material, an alkali-soluble resin, a photopolymerization initiator, and a solvent, and the desired properties are shown below.

本發明之感光性黑色樹脂組成物係可使用於印刷油墨、噴墨油墨、光罩製作材料、印刷用校樣製作用材料、抗蝕刻、阻焊、電漿顯示器(PDP)之間隔壁、介電體圖案、電極(導體電路)圖案、電子零件的配線圖案、導電糊、導電薄膜或黑矩陣(以下「BM」)等遮光圖像等製作。較佳係為了提升用於彩色液晶顯示裝置等濾色器之顯示特性,故可設置著色圖案的間隔部、周邊部分及TFT的外光側等設置遮光圖像(包含BM),或適用於觸控面板基板之周邊部所使用的遮光膜。 The photosensitive black resin composition of the present invention can be used for printing inks, inkjet inks, mask manufacturing materials, materials for proofing production for printing, barriers for etching, solder resist, plasma display (PDP), dielectric It is produced by a body pattern, an electrode (conductor circuit) pattern, a wiring pattern of an electronic component, a conductive paste, a conductive film, or a black matrix (hereinafter referred to as "BM"). In order to improve the display characteristics of a color filter used for a color liquid crystal display device, it is preferable to provide a light-shielding image (including BM) such as a spacer portion, a peripheral portion, and an outer light side of the TFT, or to be suitable for touch A light shielding film used in the peripheral portion of the control panel substrate.

特佳為於液晶顯示裝置、電漿顯示器顯示裝置、具備無機EL之EL顯示裝置、CRT顯示裝置、具備觸控面板之顯示裝置的周邊部所設置之黑色的邊,或紅、藍、綠之著色圖像間之格子狀或線條狀的黑色部分,再更佳係適當地被使用作為用於TFT遮光的網點狀或線狀的黑色圖案等之BM。 It is particularly preferable that the liquid crystal display device, the plasma display device, the EL display device including the inorganic EL, the CRT display device, the black side of the peripheral portion of the display device having the touch panel, or the red, blue, and green colors A grid-like or linear black portion between the colored images is more preferably used as a BM for a dot-like or linear black pattern for light-shielding of the TFT.

作為本發明所使用遮光材,可舉出例如:碳黑、鈦黑、氧化鉻、氧化鐵、苯胺黑、苝系顏料或C.I.、溶劑黑(solvent black)123等黑色顏料、以樹脂所覆蓋之碳黑、鈦、錳、鐵、銅或鈷等複合氧化物等之無機系碳黑顏料,或組合有機顏料與黑色顏料,但就具有高遮光性方面而言,較佳為碳黑或氮化鈦。 The light-shielding material used in the present invention may, for example, be a black pigment such as carbon black, titanium black, chromium oxide, iron oxide, aniline black, an anthraquinone pigment or CI, solvent black 123, or the like. An inorganic carbon black pigment such as a composite oxide of carbon black, titanium, manganese, iron, copper or cobalt, or a combination of an organic pigment and a black pigment, but in terms of high light-shielding property, carbon black or nitriding is preferred. titanium.

作為本發明所使用之鹼可溶性樹脂,可舉出例如:環氧樹脂、丙烯酸樹脂、矽氧烷聚合物系樹脂或聚醯亞胺樹脂,但就組成物的儲藏安定性及塗膜的耐熱性優異的方面而言,較佳為丙烯酸樹脂或聚醯亞胺樹脂。 The alkali-soluble resin used in the present invention may, for example, be an epoxy resin, an acrylic resin, a decane polymer resin or a polyimide resin, but the storage stability of the composition and the heat resistance of the coating film. In an excellent aspect, an acrylic resin or a polyimide resin is preferred.

作為丙烯酸樹脂較佳為使用具有羧基之丙烯酸樹脂。作為具有羧基之丙烯酸樹脂較佳為不飽和羧酸與乙烯性不飽和化合物之共聚物。作為不飽和羧酸,可舉出例如:丙烯酸、甲基丙烯酸、伊康酸、巴豆酸、順丁烯二酸、反丁烯二酸或乙烯乙酸。該等可單獨使用,亦可組合其他可共聚之乙烯性不飽和化合物使用。 As the acrylic resin, an acrylic resin having a carboxyl group is preferably used. The acrylic resin having a carboxyl group is preferably a copolymer of an unsaturated carboxylic acid and an ethylenically unsaturated compound. The unsaturated carboxylic acid may, for example, be acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid or ethylene acetic acid. These may be used singly or in combination with other copolymerizable ethylenically unsaturated compounds.

作為可共聚之乙烯性不飽和化合物,可舉出例如:丙烯酸甲酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲 基丙烯酸乙酯、丙烯酸正丙酯、丙烯酸異丙酯、甲基丙烯酸正丙酯、甲基丙烯酸異丙酯、丙烯酸正丁酯、甲基丙烯酸正丁酯、丙烯酸二級丁酯、甲基丙烯酸二級丁酯、丙烯酸異丁酯、甲基丙烯酸異丁酯、丙烯酸三級丁酯、甲基丙烯酸三級丁酯、丙烯酸正戊酯、甲基丙烯酸正戊酯、2-丙烯酸羥乙酯、2-甲基丙烯酸羥乙酯、丙烯酸苄酯或甲基丙烯酸苄酯等不飽和羧酸烷基酯,苯乙烯、對-甲基苯乙烯、鄰-甲基苯乙烯、間-甲基苯乙烯或α-甲基苯乙烯等芳香族乙烯化合物,丙烯酸胺基乙酯等不飽和羧酸胺烷基酯,縮水甘油丙烯酸酯或縮水甘油甲基丙烯酸酯等不飽和羧酸縮水甘油酯、乙酸乙烯酯或丙酸乙烯酯等羧酸乙烯酯、丙烯腈、甲基丙烯腈或α-氯丙烯腈等氰化乙烯化合物,1,3-丁二烯或異戊二烯等脂肪族共軛二烯,分別於末端具有丙烯醯基或甲基丙烯醯基之聚苯乙烯、聚丙烯酸甲酯、聚甲基丙烯酸甲酯、聚丙烯酸丁酯或聚甲基丙烯酸丁酯,但就對於鹼顯影液之溶解性觀點而言,較佳為以選自甲基丙烯酸、丙烯酸、甲基丙烯酸甲酯、2-甲基丙烯酸羥乙酯、甲基丙烯酸苄酯或苯乙烯之2~4元共聚物,平均分子量(Mw)2千~10萬,酸值70~150(mgKOH/g)之聚合物。若在此範圍以外,則對於鹼顯影液之溶解速度下降或變得太過快速。 Examples of the copolymerizable ethylenically unsaturated compound include methyl acrylate, methyl methacrylate, ethyl acrylate, and A. Ethyl acrylate, n-propyl acrylate, isopropyl acrylate, n-propyl methacrylate, isopropyl methacrylate, n-butyl acrylate, n-butyl methacrylate, n-butyl acrylate, methacrylic acid Dibutyl acrylate, isobutyl acrylate, isobutyl methacrylate, butyl acrylate, butyl methacrylate, n-amyl acrylate, n-amyl methacrylate, 2-hydroxyethyl acrylate, An unsaturated carboxylic acid alkyl ester such as 2-hydroxyethyl methacrylate, benzyl acrylate or benzyl methacrylate, styrene, p-methylstyrene, o-methylstyrene, m-methylstyrene Or an aromatic vinyl compound such as α-methylstyrene, an amine alkyl ester of an unsaturated carboxylic acid such as aminoethyl acrylate, an unsaturated carboxylic acid glycidyl ester such as glycidyl acrylate or glycidyl methacrylate, or vinyl acetate. Ethyl vinyl carboxylate such as ester or vinyl propionate, vinyl cyanide compound such as acrylonitrile, methacrylonitrile or α-chloroacrylonitrile, or aliphatic conjugated diene such as 1,3-butadiene or isoprene , having a propylene fluorenyl group or a methacryl fluorenyl group at the terminal Polystyrene, polymethyl acrylate, polymethyl methacrylate, polybutyl acrylate or polybutyl methacrylate, but from the viewpoint of solubility in an alkali developer, it is preferably selected from methacrylic acid. 2,4 copolymer of acrylic acid, methyl methacrylate, 2-hydroxyethyl methacrylate, benzyl methacrylate or styrene, average molecular weight (Mw) 2,000 to 100,000, acid value 70~150 (mgKOH/g) polymer. If it is outside this range, the dissolution rate for the alkali developer is lowered or becomes too fast.

又,若使用於側鏈具有乙烯性不飽和基之丙烯酸樹脂,則由於曝光、顯影時之敏感度變得良好,故而更佳。作為乙烯性不飽和基較佳為丙烯酸基或甲基丙烯酸基。如此之丙烯酸樹脂係可將具有羧基之丙烯酸系 共聚物之羧基,使其與具有縮水甘油基或脂環式環氧基之乙烯性不飽和化合物進行加成反應而得。 Further, when an acrylic resin having an ethylenically unsaturated group in its side chain is used, the sensitivity at the time of exposure and development becomes good, which is more preferable. The ethylenically unsaturated group is preferably an acrylic group or a methacryl group. Such an acrylic resin can be an acrylic resin having a carboxyl group. The carboxyl group of the copolymer is obtained by addition reaction with an ethylenically unsaturated compound having a glycidyl group or an alicyclic epoxy group.

作為於側鏈具有乙烯性不飽和基之丙烯酸樹脂,可舉出例如:周知文獻(日本專利第3120476號公報及日本特開平8-262221號公報)所記載之丙烯酸樹脂,市售丙烯酸系樹脂之光硬化性樹脂“Cyclomer(註冊商標)P”(DAICEL化學工業(股))或鹼可溶性卡多樹脂(cardo resin)。其中,就感光特性、對酯系溶劑之溶解性及對鹼顯影液之溶解性的各觀點而言,較佳為於側鏈具有乙烯性不飽和基之丙烯酸樹脂,平均分子量(Mw)2千~10萬(將四氫呋喃作為載體,以凝膠滲透層析法測定,使用以標準聚苯乙烯之檢量線來進行換算者。)、酸值70~150(mgKOH/g)的丙烯酸樹脂。 For example, the acrylic resin described in the above-mentioned publication (Japanese Patent No. 3120476 and Japanese Patent Application Laid-Open No. Hei No. 8-262221), and a commercially available acrylic resin, are exemplified as the acrylic resin having an ethylenic unsaturated group in the side chain. Photocurable resin "Cyclomer (registered trademark) P" (DAICEL Chemical Industry Co., Ltd.) or alkali-soluble cardo resin. Among them, from the viewpoints of photosensitivity, solubility in an ester solvent, and solubility in an alkali developer, an acrylic resin having an ethylenically unsaturated group in a side chain is preferred, and an average molecular weight (Mw) is 2,000. ~100,000 (acrylic resin having an acid value of 70 to 150 (mgKOH/g) by using tetrahydrofuran as a carrier and measuring by gel permeation chromatography using a standard polystyrene calibration line).

本發明之感光性黑色樹脂組成物,進一步可添加單體。作為單體,可舉出例如:多官能或單官能之丙烯酸系單體或寡聚物。作為多官能之丙烯酸系單體,可舉出例如:雙酚A二縮水甘油醚甲基丙烯酸酯、聚甲基丙烯酸胺甲酸酯、改質雙酚A環氧甲基丙烯酸酯、己二酸1,6-己二醇甲基丙烯酸酯、酞酸酐環氧丙烷基甲基丙烯酸酯、1,2,4-苯三甲酸基二乙二醇甲基丙烯酸酯、松香改質環氧二甲基丙烯酸酯、醇酸改質甲基丙烯酸酯、周知文獻(日本專利第3621533號公報及日本特開平8-278630號公報)所記載之茀二丙烯酸酯系寡聚物、或三丙二醇二甲基丙烯酸酯、1,6-己二醇二甲基丙烯酸酯、雙酚A二縮水甘油醚二甲基丙烯酸酯、三羥甲基丙烷三甲基丙烯酸 酯、新戊四醇三甲基丙烯酸酯、三丙烯甲醛(triacrylformal)、新戊四醇四甲基丙烯酸酯、二新戊四醇六甲基丙烯酸酯、二新戊四醇五甲基丙烯酸酯、2,2-雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]丙烷(2,2-bis[4-(3-acryloxy-2-hydroxypropoxy)phenyl]propane)、雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]甲烷、雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]碸、雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]醚、4,4’-雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]環己烷、9,9-雙[4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]茀、9,9-雙[3-甲基-4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]茀、9,9-雙[3-氯-4-(3-丙烯醯氧基-2-羥基丙氧基)苯基]茀、雙苯氧乙醇茀二丙烯酸酯(bis-phenoxyethanol fluorenediacrylate)、雙苯氧乙醇茀二甲基丙烯酸酯、雙甲酚茀二丙烯酸酯(bis-cresol fluorene diacrylate)或雙甲酚茀二甲基丙烯酸酯。該等可單獨或混合使用。 Further, a monomer of the photosensitive black resin composition of the present invention may be added. The monomer may, for example, be a polyfunctional or monofunctional acrylic monomer or oligomer. Examples of the polyfunctional acrylic monomer include bisphenol A diglycidyl ether methacrylate, polymethacrylic acid urethane, modified bisphenol A epoxy methacrylate, and adipic acid. 1,6-hexanediol methacrylate, phthalic anhydride propylene oxide methacrylate, 1,2,4-benzenetricarboxylic acid diethylene glycol methacrylate, rosin modified epoxy dimethyl An acrylate diacrylate oligoacrylate or a tripropylene glycol dimethacrylate described in the acryl-ester, the alkyd-modified methacrylate, and the known document (Japanese Patent No. 3621533 and JP-A No. 8-278630) Ester, 1,6-hexanediol dimethacrylate, bisphenol A diglycidyl ether dimethacrylate, trimethylolpropane trimethacrylate Ester, neopentyl alcohol trimethacrylate, triacrylformal, neopentyl alcohol tetramethacrylate, dipentaerythritol hexamethacrylate, dipentaerythritol penta methacrylate 2,2-bis[4-(3-acryloxy-2-hydroxypropoxy)phenyl]propane) , bis[4-(3-propenyloxy-2-hydroxypropoxy)phenyl]methane, bis[4-(3-propenyloxy-2-hydroxypropoxy)phenyl]indole, double [4-(3-Propyloxy-2-hydroxypropoxy)phenyl]ether, 4,4'-bis[4-(3-propenyloxy-2-hydroxypropoxy)phenyl] Cyclohexane, 9,9-bis[4-(3-propenyloxy-2-hydroxypropoxy)phenyl]anthracene, 9,9-bis[3-methyl-4-(3-propene oxime) Oxy-2-hydroxypropoxy)phenyl]anthracene, 9,9-bis[3-chloro-4-(3-propenyloxy-2-hydroxypropoxy)phenyl]anthracene, bisphenyloxy Bis-phenoxyethanol fluorenediacrylate, bisphenoxyethanol oxime dimethacrylate, bis-cresol fluorene diacrylate or biscresol oxime dimethacrylate. These may be used singly or in combination.

藉由選擇與組合該等之多官能或單官能之丙烯酸系單體或寡聚物,可控制抗蝕劑的敏感度或加工性的特性。尤其是為了提升敏感度,較佳為官能基為3以上之化合物,更佳為官能基為5以上之化合物,再更佳為二新戊四醇六甲基丙烯酸酯或二新戊四醇五甲基丙烯酸酯。 The properties of the resist's sensitivity or processability can be controlled by selecting and combining such polyfunctional or monofunctional acrylic monomers or oligomers. In particular, in order to increase the sensitivity, a compound having a functional group of 3 or more is preferred, a compound having a functional group of 5 or more is more preferred, and more preferably dipentaerythritol hexamethacrylate or dipentaerythritol. Methacrylate.

使用如黑色顏料於光交聯吸收有效之紫外線的顏料之情形時,加入二新戊四醇六甲基丙烯酸酯或二新戊四醇五甲基丙烯酸酯,且併用具有於分子中包含多 量芳香環之高撥水性茀環的甲基丙烯酸酯,而於顯影時可控制圖案為所欲的形狀,故而較佳。其中,較佳為將二新戊四醇六甲基丙烯酸酯及/或二新戊四醇五甲基丙烯酸酯10~60重量份與具有茀環之甲基丙烯酸酯90~40重量份的混合物作為單體來使用。 When using a pigment such as a black pigment for photocrosslinking to absorb an effective ultraviolet ray, dipentaerythritol hexamethacrylate or dipentaerythritol pentamethyl acrylate is added, and the combined use has a large amount in the molecule. It is preferred to use a high degree of water-repellent ring of methacrylate in the aromatic ring and control the pattern to a desired shape during development. Among them, a mixture of 10 to 60 parts by weight of dipentaerythritol hexamethacrylate and/or dipentaerythritol penta methacrylate and 90 to 40 parts by weight of a methacrylate having an anthracene ring is preferred. Used as a monomer.

作為光聚合起始劑,可舉出例如:二苯基酮系化合物、苯乙酮系化合物、酮(oxoxanthene)系化合物、咪唑系化合物、苯并噻唑系化合物、苯并唑系化合物、肟酯化合物、咔唑系化合物、三系化合物、磷系化合物或鈦酸鹽(titanate)等無機系光聚合起始劑。 The photopolymerization initiator may, for example, be a diphenylketone compound or an acetophenone compound. Oxoxanthene compound, imidazole compound, benzothiazole compound, benzo An azole compound, an oxime ester compound, an oxazole compound, and three An inorganic photopolymerization initiator such as a compound, a phosphorus compound or a titanate.

更具體而言,可舉出例如::二苯基酮、N,N’-四乙基-4,4’-二胺基二苯基酮、4-甲氧基-4’-二甲基胺基二苯基酮、2,2-二乙氧基苯乙酮、安息香、安息香甲醚、安息香異丁基醚、苯偶醯二甲基縮酮(benzoyl imethylketal)、α-羥基異丁基苯基酮(α-hydroxyisobutyl phenon)、9-氧硫(thioxanthone)、2-氯噻噸酮(2-chlorothioxanthone)、1-羥基環己基苯基甲酮(hydroxycyclohexyl phenyl ketone)、2-甲基-1-[4-(甲硫基)苯基]-2-啉基-1-丙酮、“IRGACURE(註冊商標)”369之2-苄基-2-二甲胺基-1-(4-啉基苯基)-丁酮(Ciba‧Specialty‧Chemicals(股)製)、“IRGACURE(註冊商標)”379之2-(二甲胺基)-2-[4-(甲苯基)甲基]-1-[4-(4-啉基)苯基]-1-丁酮(Ciba‧Specialty‧Chemicals(股)製)、CGI-113之2-[4-甲基苄基]-2-二甲胺基-1-(4-啉苯基)-丁酮(Ciba‧Specialty‧Chemicals(股)製)、三級丁基蒽醌 、1-氯蒽醌、2,3-二氯蒽醌、3-氯-2-甲基蒽醌、2-乙基蒽醌、1,4-萘醌、9,10-菲醌、1,2-苯并蒽(Benzanthraquinone)、1,4-二甲基蒽醌、2-苯基蒽醌、2-(o-氯苯基)-4,5-二苯基咪唑二聚物、2-巰基苯并噻唑、2-巰基苯并唑、“IRGACURE(註冊商標)”OXE01之1,2-辛烷二酮(octanedione),1-[4-(苯硫基)-2-((O-苯甲醯肟)](Ciba‧Specialty‧Chemicals(股))、“IRGACURE(註冊商標)”OXE02之乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)、CGI-242之乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)、4-(p-甲氧基苯基)-2,6-二-(三氯甲基)-s-三(Ciba‧Specialty‧Chemicals(股)製)或咔唑系化合物之“ADEKA(註冊商標)OPTMER”N-1818、N-1919或“ADEKA(註冊商標)CRUISE”NCI-831(以上,旭電化工業(股)製)。 More specifically, for example, diphenyl ketone, N, N'-tetraethyl-4,4'-diaminodiphenyl ketone, 4-methoxy-4'-dimethyl group Aminodiphenyl ketone, 2,2-diethoxyacetophenone, benzoin, benzoin methyl ether, benzoin isobutyl ether, benzoyl imethylketal, α-hydroxyisobutyl Alpha-hydroxyisobutyl phenon, 9-oxosulfur (thioxanthone), 2-chlorothioxanthone, hydroxycyclohexyl phenyl ketone, 2-methyl-1-[4-(methylthio)phenyl]- 2- Phenyl-1-propanone, "IRGACURE (registered trademark)" 369 2-benzyl-2-dimethylamino-1-(4- Phenylphenyl)-butanone (manufactured by Ciba‧Specialty‧Chemicals), "IRGACURE (registered trademark)" 379 2-(dimethylamino)-2-[4-(methylphenyl)methyl] -1-[4-(4- Phenyl)phenyl]-1-butanone (manufactured by Ciba‧Specialty‧Chemicals), 2-[4-methylbenzyl]-2-dimethylamino-1-(4-) of CGI-113 Phenanylphenyl)-butanone (manufactured by Ciba‧Specialty‧Chemicals), tertiary butyl hydrazine, 1-chloroindole, 2,3-dichloropurine, 3-chloro-2-methylindole Bismuth, 2-ethyl hydrazine, 1,4-naphthoquinone, 9,10-phenanthrenequinone, 1,2-benzopyrene (Benzanthraquinone), 1,4-dimethylhydrazine, 2-phenylindole , 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-mercaptobenzothiazole, 2-mercaptobenzoene Azole, "IRGACURE (registered trademark)" OXE01 1,2-octanedione, 1-[4-(phenylthio)-2-((O-benzamide)] (Ciba‧Specialty ‧Chemicals()), "IRGACURE(registered trademark)" ketone of OXE02, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl]- , 1-(O-acetamidine), ethyl ketone of CGI-242, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl]-, 1-(O-acetamidine), 4-(p-methoxyphenyl)-2,6-di-(trichloromethyl)-s-three ("Ciba‧Specialty ‧ Chemicals") or EZZ-based compound "ADEKA (registered trademark) OPTMER" N-1818, N-1919 or "ADEKA (registered trademark) CRUISE" NCI-831 (above, Asahi Chemical Industry (share) system).

該等之光聚合起始劑亦可併用2種以上來使用,其中若併用選自由“IRGACURE(註冊商標)”379、“IRGACURE(註冊商標)”OXE02、“ADEKA(註冊商標)OPTMER”N-1919及“ADEKA(註冊商標)CRUISE”NCI-831構成之群組中之2種,則可得到具有於高敏感度圖案形狀良好之特性的感光性黑色樹脂組成物,故而較佳。 These photopolymerization initiators may be used in combination of two or more kinds, and if used in combination, are selected from "IRGACURE (registered trademark)" 379, "IRGACURE (registered trademark)" OXE02, "ADEKA (registered trademark) OPTMER" N- In the case of two types of groups of 1919 and "ADEKA (registered trademark) CRUISE" NCI-831, a photosensitive black resin composition having a high sensitivity pattern shape is obtained, which is preferable.

進而,以提升與玻璃板或矽晶圓等無機物之接著性為目的,可加入密合改良劑。作為密合改良劑,例如:可使用矽烷偶合劑或鈦偶合劑。密合改良劑之添加量係通常以聚醯亞胺樹脂或丙烯酸樹脂的重量作為基準0.2~20重量%左右。 Further, an adhesion improver may be added for the purpose of improving the adhesion to an inorganic material such as a glass plate or a tantalum wafer. As the adhesion improving agent, for example, a decane coupling agent or a titanium coupling agent can be used. The amount of the adhesion improver to be added is usually about 0.2 to 20% by weight based on the weight of the polyimide resin or the acrylic resin.

又,於本發明之感光性黑色樹脂組成物中,以提升遮光材之分散安定性為目的,可加入高分子分散劑。作為高分子分散劑,可舉出例如:聚乙亞胺系高分子分散劑、聚胺甲酸酯系高分子分散劑或聚丙烯胺系高分子分散劑。該等之高分子分散劑係於不使感光性或密合性下降之程度所欲地添加,作為其添加量,通常相對於遮光材1~40重量%左右。 Further, in the photosensitive black resin composition of the present invention, a polymer dispersant may be added for the purpose of improving the dispersion stability of the light shielding material. The polymer dispersant may, for example, be a polyethyleneimine polymer dispersant, a polyurethane polymer dispersant or a polyacrylamide polymer dispersant. These polymer dispersing agents are added so as not to reduce the photosensitivity or adhesion, and the amount thereof is usually about 1 to 40% by weight based on the light-shielding material.

於本發明之感光性黑色樹脂組成物中,遮光材/樹脂成分之重量組成比,較佳為80/20~40/60之範圍,就密合性、圖案加工性及OD值平衡的方面而言,更佳為75/25~50/50之範圍。此處,樹脂成分係指聚合物、單體、寡聚物及高分子分散劑之合計。若樹脂成分的量過少,則與黑色被膜的基板之密合性變得不良,反之,若遮光材之量過少,則有每一厚度之光學濃度(OD值/μm)變低的問題。 In the photosensitive black resin composition of the present invention, the weight composition ratio of the light shielding material/resin component is preferably in the range of 80/20 to 40/60, and the adhesion, pattern processability, and OD value balance are in terms of balance. More preferably, it is in the range of 75/25~50/50. Here, the resin component means a total of a polymer, a monomer, an oligomer, and a polymer dispersant. When the amount of the resin component is too small, the adhesion to the substrate of the black film is deteriorated. Conversely, when the amount of the light shielding material is too small, the optical density (OD value/μm) of each thickness becomes low.

作為本發明之黑色樹脂組成物所使用之溶劑,組合分散之顏料的分散安定性及添加之樹脂等溶解性,而可使用水或有機溶劑。作為有機溶劑,可舉出例如:酯類、脂肪族醇類、聚亞烷基醇醚系溶劑、酮類、醯胺系極性溶劑或內酯系極性溶劑,但混合該等之2種以上之混合溶劑亦佳。又,與該等以外之有機溶劑混合亦佳。 The solvent used for the black resin composition of the present invention may be water or an organic solvent by combining the dispersion stability of the dispersed pigment and the solubility of the added resin. The organic solvent may, for example, be an ester, an aliphatic alcohol, a polyalkylene ether ether solvent, a ketone, a guanamine-based polar solvent or a lactone-based polar solvent, but two or more of these may be mixed. Mixed solvents are also preferred. Moreover, it is also preferable to mix with an organic solvent other than these.

作為鹼可溶性樹脂,就較佳為使用丙烯酸樹脂而言,作為有機溶劑較佳為溶解丙烯酸樹脂之有機溶劑。更具體而言,可舉出例如:乙酸苄酯(沸點214℃)、 苯甲酸乙酯(沸點213℃)、苯甲酸甲酯(沸點200℃)、丙二酸二乙酯(沸點199℃)、2-乙基己基乙酸酯(沸點199℃)、2-丁氧基乙酸乙酯(2-butoxy ethyl acetate)(沸點192℃)、丙二醇單乙醚乙酸酯(propylene glycol monoethyl ether acetate)(沸點188℃)、草酸二乙酯(沸點185℃)、乙醯乙酸乙酯(沸點181℃)、乙酸環己酯(沸點174℃)、3-甲氧基-乙酸丁酯(沸點173℃)、乙醯乙酸甲酯(沸點172℃)、3-乙氧基丙酸乙酯(ethyl 3-ethoxy propionate)(沸點170℃)、2-乙基乙酸丁酯(沸點162℃)、丙酸異戊酯(沸點160℃)、丙二醇單甲醚丙酸酯(沸點160℃)、丙二醇單乙醚乙酸酯(沸點158℃)、乙酸戊酯(沸點150℃)或丙二醇單甲醚乙酸酯(沸點146℃)。 As the alkali-soluble resin, it is preferred to use an acrylic resin, and as the organic solvent, an organic solvent in which an acrylic resin is dissolved is preferable. More specifically, for example, benzyl acetate (boiling point: 214 ° C), Ethyl benzoate (boiling point 213 ° C), methyl benzoate (boiling point 200 ° C), diethyl malonate (boiling point 199 ° C), 2-ethylhexyl acetate (boiling point 199 ° C), 2-butoxy 2-butoxy ethyl acetate (boiling point 192 ° C), propylene glycol monoethyl ether acetate (boiling point 188 ° C), diethyl oxalate (boiling point 185 ° C), ethyl acetate Ester (boiling point 181 ° C), cyclohexyl acetate (boiling point 174 ° C), 3-methoxy-butyl acetate (boiling point 173 ° C), ethyl acetate methyl acetate (boiling point 172 ° C), 3-ethoxypropionic acid Ethyl 3-ethyl ester propionate (boiling point 170 ° C), 2-ethyl acetate butyl ester (boiling point 162 ° C), isoamyl propionate (boiling point 160 ° C), propylene glycol monomethyl ether propionate (boiling point 160 ° C ), propylene glycol monoethyl ether acetate (boiling point 158 ° C), amyl acetate (boiling point 150 ° C) or propylene glycol monomethyl ether acetate (boiling point 146 ° C).

又,作為上述以外之溶劑,可舉出例如:乙二醇單甲醚(沸點124℃)、乙二醇單乙醚(沸點135℃)、丙二醇單乙醚(沸點133℃)、二乙二醇單甲醚(沸點193℃)、單乙醚(沸點135℃)、甲基卡必醇(沸點194℃)、乙基卡必醇(沸點202℃)、丙二醇單甲醚(沸點120℃)、丙二醇單乙醚(沸點133℃)、丙二醇三級丁醚(沸點153℃)或二丙二醇單甲醚(沸點188℃)等聚亞烷基醇醚系溶劑,乙酸乙酯(沸點77℃)、乙酸丁酯(沸點126℃)或乙酸異戊酯(沸點142℃)等脂肪族酯類,丁醇(沸點118℃)、3-甲基-2-丁醇(沸點112℃)或3-甲基-3-甲氧基丁醇(沸點174℃)等脂肪族醇類、環戊酮或環己酮等酮類,二甲苯(沸點144℃)、乙苯(沸點136℃)或溶劑油(solvent naphtha)(石油餾分:沸點165~178℃)。 Further, examples of the solvent other than the above include ethylene glycol monomethyl ether (boiling point: 124 ° C), ethylene glycol monoethyl ether (boiling point: 135 ° C), propylene glycol monoethyl ether (boiling point: 133 ° C), and diethylene glycol alone. Methyl ether (boiling point 193 ° C), monoethyl ether (boiling point 135 ° C), methyl carbitol (boiling point 194 ° C), ethyl carbitol (boiling point 202 ° C), propylene glycol monomethyl ether (boiling point 120 ° C), propylene glycol single Polyalkylene ether ether solvent such as diethyl ether (boiling point 133 ° C), propylene glycol tertiary butyl ether (boiling point 153 ° C) or dipropylene glycol monomethyl ether (boiling point 188 ° C), ethyl acetate (boiling point 77 ° C), butyl acetate Aliphatic esters (boiling point 126 ° C) or isoamyl acetate (boiling point 142 ° C), butanol (boiling point 118 ° C), 3-methyl-2-butanol (boiling point 112 ° C) or 3-methyl-3 An aliphatic alcohol such as methoxybutanol (boiling point 174 ° C), a ketone such as cyclopentanone or cyclohexanone, xylene (boiling point 144 ° C), ethylbenzene (boiling point 136 ° C) or solvent oil (solvent naphtha) (Petroleum fraction: boiling point 165 ~ 178 ° C).

伴隨著基板的大型化,利用壓鑄模塗料裝置塗布成為主流,為了實現適度的揮發性及乾燥性,較佳為2成分以上之混合溶劑。構成該混合溶劑之總溶劑之沸點為150℃以下時,產生難以得到膜厚均一性,且塗布結束後之膜厚變厚,在自狹縫(slit)吐出塗液之噴嘴部生成顏料的凝集物,於塗膜產生條紋等許多問題。另一方面,包含多量該混合溶劑之沸點為200℃以上之溶劑時,塗膜表面成為黏著性,且產生黏著。因此,宜為含有30~75重量%沸點為150~200℃之溶劑的混合溶劑。 In order to increase the size of the substrate, it is preferably applied by a die-casting coating device, and in order to achieve appropriate volatility and drying properties, a mixed solvent of two or more components is preferable. When the boiling point of the total solvent constituting the mixed solvent is 150° C. or lower, it is difficult to obtain film thickness uniformity, and the film thickness after the application is completed is increased, and agglomeration of the pigment is generated in the nozzle portion from which the coating liquid is discharged from the slit. There are many problems such as streaks in the coating film. On the other hand, when a solvent having a boiling point of 200 ° C or more is contained in a large amount of the mixed solvent, the surface of the coating film becomes adhesive and adheres. Therefore, it is preferably a mixed solvent containing 30 to 75% by weight of a solvent having a boiling point of 150 to 200 °C.

於本發明中之添加劑即氧雜環丁烷化合物,具有下述通式(A)之構造。 The oxetane compound which is an additive in the present invention has a structure of the following formula (A).

(式中,R1、R2可分別為相同或相異,R1表示氫或碳數為1~10之烷基,且烷基進而可具有取代基;又,R2表示氫、矽基或碳數1~10之烷基,且矽基及烷基進而可具有取代基。) (wherein R 1 and R 2 may be the same or different, respectively, R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms, and the alkyl group may further have a substituent; further, R 2 represents hydrogen, fluorenyl group Or an alkyl group having 1 to 10 carbon atoms, and the mercapto group and the alkyl group may further have a substituent.)

上述通式(A)中,作為烷基進而具有取代基時之取代基,可舉出例如:烷氧基、丙烯醯基、乙醯氧基或矽基,R2為碳數1~10之烷基時,較佳為R2包含氧雜環丁烷基。又,矽基進而具有取代基時,可舉出例如:烷基、烷氧基、丙烯醯基或乙醯氧基,但該等之中,較佳為包含氧雜環丁烷基。 In the above formula (A), examples of the substituent in the case where the alkyl group further has a substituent include an alkoxy group, an acryloyl group, an ethoxy group or a fluorenyl group, and R 2 is a carbon number of 1 to 10. In the case of an alkyl group, R 2 preferably contains an oxetanyl group. Further, when the thiol group further has a substituent, for example, an alkyl group, an alkoxy group, an acryloyl group or an ethoxy group is mentioned, but among these, an oxetane group is preferable.

又,為了充分地得到發明之效果,作為R2較佳為具有矽基,且更佳為以下述結構式(B)所示之氧雜環丁烷化合物。 Further, in order to sufficiently obtain the effects of the invention, it is preferable that R 2 has a mercapto group, and more preferably an oxetane compound represented by the following structural formula (B).

(式中,X表示下述氧雜環丁烯化合物,n表示10以下之自然數。) (wherein, X represents the following oxetene compound, and n represents a natural number of 10 or less.)

(式中,*表示連結部分,R1表示氫或碳數為1~10之烷基,且烷基進而可具有取代基。) (wherein * represents a linking moiety, and R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms, and the alkyl group may further have a substituent.)

上述結構式(B)所示之氧雜環丁烷化合物,其中較佳為n=3~6的範圍之氧雜環丁烷化合物。上述結構式(B)中,作為烷基進而具有取代基時之取代基,可舉出例如:烷氧基、丙烯醯基或乙醯氧基。 The oxetane compound represented by the above formula (B) is preferably an oxetane compound in the range of n = 3 to 6. In the above structural formula (B), examples of the substituent in the case where the alkyl group further has a substituent include an alkoxy group, an acryloyl group or an ethoxy group.

作為該等之氧雜環丁烷化合物之添加量,相對於遮光材與鹼可溶性樹脂之總和,較佳為1.5~10.0重量%,在對鹼顯影液之溶解性不會過高之範圍內使用,更佳為1.5~5.0重量%。 The amount of the oxetane compound to be added is preferably from 1.5 to 10.0% by weight based on the total of the light-shielding material and the alkali-soluble resin, and is used in a range in which the solubility in the alkali developer is not excessively high. More preferably, it is 1.5 to 5.0% by weight.

作為不具有矽原子之氧雜環丁烷化合物,可舉出:以下述通式(C)所示之“Aron Oxetane(註冊商標)” OXT-101(3-乙基-3-羥甲基氧雜環丁烷)、下述通式(D)所示之“Aron Oxetane(註冊商標)”OXT-221(3-乙基-3{[(3-乙基氧雜環丁烷-3-基)甲氧基]甲基}氧雜環丁烷)或“Aron Oxetane(註冊商標)”OXT-121(主成分1,4-雙[[(3-乙基-3-氧雜環丁烷)甲氧基]甲基]苯)(以上,東亞合成(股)製),“ETERNACOLL(註冊商標)”OXBP(雙[(3-乙基-3-氧雜環丁烷)甲基]聯苯基-4,4’-二羧酸酯)或“ETERNACOLL”OXTP(雙[(3-乙基-3-氧雜環丁烷)甲基]對酞酸酯)(以上,宇部興產(股)製)。 The oxetane compound which does not have a hydrazine atom is "Aron Oxetane (registered trademark)" represented by the following general formula (C). OXT-101 (3-ethyl-3-hydroxymethyloxetane), "Aron Oxetane (registered trademark)" OXT-221 (3-ethyl-3) represented by the following formula (D) [(3-Ethyloxetane-3-yl)methoxy]methyl}oxetane) or "Aron Oxetane (registered trademark)" OXT-121 (main component 1,4-double [ [(3-ethyl-3-oxetanyl)methoxy]methyl]benzene) (above, East Asia Synthetic Co., Ltd.), "ETERNACOLL (registered trademark)" OXBP (double [(3-B) 3-oxo-oxetane)methyl]biphenyl-4,4'-dicarboxylate) or "ETERNACOLL" OXTP (bis[(3-ethyl-3-oxetane)) Base] phthalate) (above, Ube Industries (stock) system).

作為具有矽基之氧雜環丁烷化合物,可舉出例如:上述結構式(B)中將n=5設為平均,以下述通式(E)所示之“Aron Oxetane(註冊商標)”OXT-191(3-乙基氧雜環丁烷-3-基甲醇與四乙酸矽(silanetetrol)縮聚物之縮合反應生成物;東亞合成(股)製),如下述結構式(F1)或(F2)所示之具有矽倍半氧烷結構的氧雜環丁烷化合物(例如:OX-SQ TX-100或同SI-20;以上,東亞合成(股)製),下述通式(G)所示之“Aron Oxetane(註冊商標)”TMSOX(3-乙基-3-((3-(三甲氧基矽基)丙氧基)甲基)氧雜環丁烷 )(東亞合成(股)製)、(氧雜環丁烷-3-基)甲基三甲氧基矽烷、(氧雜環丁烷-3-基)甲基三乙氧基矽烷、(氧雜環丁烷-3-基)甲基三乙醯氧基矽烷、[(氧雜環丁烷-3-基)甲基]甲基二甲氧基矽烷、[(氧雜環丁烷-3-基)甲基]甲基二乙氧基矽烷、[(氧雜環丁烷-3-基)甲基]甲基二乙醯氧基矽烷、[(氧雜環丁烷-3-基)甲基]乙基二甲氧基矽烷、[(氧雜環丁烷-3-基)甲基]乙基二乙氧基矽烷、[(氧雜環丁烷-3-基)甲基]乙基二乙醯氧基矽烷、[(氧雜環丁烷-3-基)甲基]苯基二甲氧基矽烷、[(氧雜環丁烷-3-基)甲基]苯基二乙氧基矽烷、[(氧雜環丁烷-3-基)甲基]苯基二乙醯氧基矽烷、二[(氧雜環丁烷-3-基)甲基]二甲氧基矽烷、二[氧雜環丁烷-3-基)甲基]二乙氧基矽烷、二[(氧雜環丁烷-3-基)甲基]二乙醯氧基矽烷、二[(氧雜環丁烷-3-基)甲基]甲基甲氧基矽烷、二[(氧雜環丁烷-3-基)甲基]甲基乙氧基矽烷、二[(氧雜環丁烷-3-基)甲基]甲基乙醯氧基矽烷、二[(氧雜環丁烷-3-基)甲基]乙基甲氧基矽烷、二[(氧雜環丁烷-3-基)甲基]乙基乙氧基矽烷、二[(氧雜環丁烷-3-基)甲基]乙基乙醯氧基矽烷、二[(氧雜環丁烷-3-基)甲基]苯基甲氧基矽烷、二[(氧雜環丁烷-3-基)甲基]苯基乙氧基矽烷、二[(氧雜環丁烷-3-基)甲基]苯基乙醯氧基矽烷、三[(氧雜環丁烷-3-基)甲基]甲氧基矽烷、三[(氧雜環丁烷-3-基)甲基]乙氧基矽烷或三[(氧雜環丁烷-3-基)甲基]乙醯氧基矽烷。於本發明係混合該等之氧雜環丁烷化合物2種以上來使用。 The oxetane compound having a mercapto group, for example, "Aron Oxetane (registered trademark)" having the average of n = 5 in the above structural formula (B) and having the following general formula (E) OXT-191 (a condensation reaction product of 3-ethyloxetane-3-ylmethanol with silanetetrol polycondensate; East Asian synthesis), as shown in the following structural formula (F1) or An oxetane compound having a sesquisesquioxane structure as shown in F2) (for example, OX-SQ TX-100 or the same as SI-20; above, manufactured by East Asia Synthetic Co., Ltd.), the following general formula (G) ) "Aron Oxetane (registered trademark)" TMSOX (3-ethyl-3-((3-(trimethoxymethyl)propyloxy)methyl) oxetane) (East Asia Synthetic Co., Ltd.), (oxetane-3-yl)methyltrimethoxydecane, (oxetane-3-yl)methyltriethoxydecane, (oxalate) Cyclobutane-3-yl)methyltriethoxypropane, [(oxetan-3-yl)methyl]methyldimethoxydecane, [(oxetane-3- Methyl]methyldiethoxydecane, [(oxetan-3-yl)methyl]methyldiethoxydecane, [(oxetan-3-yl) A Ethyldimethoxydecane, [(oxetan-3-yl)methyl]ethyldiethoxydecane, [(oxetan-3-yl)methyl]ethyl Diethoxydecane, [(oxetane-3-yl)methyl]phenyldimethoxydecane, [(oxetan-3-yl)methyl]phenyldiethoxylate Basearane, [(oxetan-3-yl)methyl]phenyldiethoxydecane, bis[(oxetane-3-yl)methyl]dimethoxydecane, two [oxetan-3-yl)methyl]diethoxydecane, bis[(oxetan-3-yl)methyl]diethoxypropane, bis[(oxetane) Alkyl-3-yl)methyl]methylmethoxydecane, bis[(oxetan-3-yl)methyl]methylethoxydecane, two [( Heterocyclobutane-3-yl)methyl]methylethoxydecane, bis[(oxetane-3-yl)methyl]ethylmethoxydecane, bis[(oxetane) Alkyl-3-yl)methyl]ethyl ethoxy decane, bis[(oxetan-3-yl)methyl]ethyl ethoxy decane, bis[(oxetane-3) -yl)methyl]phenylmethoxydecane, bis[(oxetan-3-yl)methyl]phenylethoxy decane, bis[(oxetane-3-yl)-methyl Phenyl ethoxy decane, tris[(oxetan-3-yl)methyl]methoxy decane, tris[(oxetane-3-yl)methyl]ethoxy Decane or tris[(oxetan-3-yl)methyl]ethoxypropane. In the present invention, two or more kinds of the oxetane compounds are mixed and used.

又,以一面提升塗布性及著色被膜之平滑性,一面防止貝納細胞(benard cell)為目的,於本發明之感光性黑色樹脂組成物中亦可添加界面活性劑。界面活性劑的添加量較佳為顏料的0.001~10重量%,更佳為0.01~1重量%。若添加量過少,則無提升塗布性及著色被膜之平滑性的效果或無防止貝納細胞的效果;若過多,則相反地有塗膜物性不良之情形。作為界面活性劑,可舉出例如:硫酸月桂酯銨或聚氧乙烯烷基醚硫酸三乙醇胺等 陰離子界面活性劑、十八烷胺乙酸酯或十二烷基三甲基氯化銨等陽離子界面活性劑、十二烷基氧化二甲胺(lauryl dimethylamine oxide)或十二烷基羧甲基羥乙基咪唑基甜菜鹼(laurylcarboxymethyl hydroxyethylimidazoliumbetaine)等兩性界面活性劑、聚氧乙烯月桂醚、聚氧乙烯硬脂醚或去水山梨醇單硬脂酸酯(sorbitan monostearate)等非離子界面活性劑、以聚二甲基矽氧烷等作為主骨架之聚矽氧系界面活性劑或氟系界面活性劑。本發明可使用該等之界面活性劑1種或2種以上。 In addition, a surfactant may be added to the photosensitive black resin composition of the present invention for the purpose of preventing the beard cells from improving the smoothness of the coating property and the coloring film. The amount of the surfactant added is preferably 0.001 to 10% by weight, more preferably 0.01 to 1% by weight based on the pigment. When the amount added is too small, there is no effect of improving the smoothness of the coating property and the coloring film, or the effect of preventing the Pena cells; if it is too large, the coating property may be adversely affected. Examples of the surfactant include ammonium lauryl sulfate or polyoxyethylene alkyl ether sulfate triethanolamine. Cationic surfactants such as anionic surfactants, octadecylamine acetate or dodecyltrimethylammonium chloride, lauryl dimethylamine oxide or dodecyl carboxymethyl An amphoteric surfactant such as laurylcarboxymethyl hydroxyethylimidazolium betaine, a polyoxyethylene lauryl ether, a polyoxyethylene stearyl ether or a nonionic surfactant such as sorbitan monostearate, A polyfluorene-based surfactant or a fluorine-based surfactant having a polydimethylsiloxane or the like as a main skeleton. One or two or more kinds of these surfactants can be used in the present invention.

就塗布性及乾燥性的觀點而言,作為本發明之感光性黑色樹脂組成物中,組合樹脂成分(亦包含單體或寡聚物及光聚合起始劑等添加物)與遮光材之固體成分濃度較佳為2~30%,更佳為5~20%。因此,本發明之感光性黑色樹脂組成物較佳為由溶劑、樹脂成分及遮光材成為本質,樹脂成分與遮光材的合計量更佳為2~30%,再更佳為5~20%。去除固體成分而殘留部分為溶劑,如上所述,亦可進而含有界面活性劑。 In the photosensitive black resin composition of the present invention, a combination of a resin component (including an additive such as a monomer or an oligomer and a photopolymerization initiator) and a solid of a light-shielding material is used as a coating property and a drying property. The concentration of the component is preferably from 2 to 30%, more preferably from 5 to 20%. Therefore, the photosensitive black resin composition of the present invention preferably has a solvent, a resin component, and a light-shielding material, and the total amount of the resin component and the light-shielding material is preferably 2 to 30%, more preferably 5 to 20%. The solid component is removed and the residual portion is a solvent, and as described above, a surfactant may be further contained.

作為本發明之感光性黑色樹脂組成物的製造方法,可舉出例如:使用分散機於樹脂溶液中直接地使顏料分散的方法,或使用分散機將顏料分散於水或有機溶劑中而製作顏料分散液後,與樹脂溶液混合之方法。 作為顏料之分散方法,可舉出例如:球磨機、沙磨機、3根輥磨機或高速度衝擊機,但就分散效率及微分散化之觀點而言,較佳為珠磨機。作為珠磨機,可舉出例如:共球磨機(Co-ball mill)、籃式研磨機、柱式研磨機(pin mill)或戴諾研磨機(dyno mill)。作為珠磨機之珠粒,可舉出例如:氧化鈦珠粒、二氧化鋯珠粒或鋯石珠粒。作為使用於分散之珠粒徑較佳為0.01~5.0mm,更佳為0.03~1.0mm。顏料之一次粒子徑及一次粒子凝集而成之二次粒子之粒徑小時,較佳為使用0.03~0.10mm等微小分散珠粒。此時,較佳為可利用遠心分離方式,使用具有隔片之珠磨機來分散微小的分散珠粒與分散液。另一方面,分散包含次微米左右粗大粒子的顏料時,可藉由使用0.10mm以上之分散珠粒來得到充分地粉碎力,而可細微地分散顏料,故而較佳。 The method for producing the photosensitive black resin composition of the present invention includes, for example, a method of directly dispersing a pigment in a resin solution using a disperser, or dispersing a pigment in water or an organic solvent using a disperser to prepare a pigment. After the dispersion, the method of mixing with the resin solution. Examples of the method of dispersing the pigment include a ball mill, a sand mill, a three-roll mill, and a high-speed impact machine. However, from the viewpoint of dispersion efficiency and micro-dispersion, a bead mill is preferred. As the bead mill, for example, a co-ball mill, a basket mill, and a column mill (pin) Mill) or dyno mill. Examples of the beads of the bead mill include titanium oxide beads, zirconium dioxide beads or zircon beads. The particle diameter used as the dispersion is preferably from 0.01 to 5.0 mm, more preferably from 0.03 to 1.0 mm. When the primary particle diameter of the pigment and the secondary particle obtained by aggregating the primary particle are small, it is preferable to use a minute dispersion bead such as 0.03 to 0.10 mm. At this time, it is preferred to use a bead mill to disperse minute dispersed beads and a dispersion using a telecentric separation method. On the other hand, when a pigment containing coarse particles of a size of about micrometers is dispersed, it is preferable to use a dispersion bead of 0.10 mm or more to obtain a sufficient pulverization force and to finely disperse the pigment.

本發明之樹脂BM基板的製造例表示如下。作為將感光性黑色樹脂組成物塗布於透明基板上之方法,可舉出例如:利用浸塗法、輥式塗布法、旋轉法、壓鑄模塗料法、線棒之方法,將透明基板浸漬於感光性黑色樹脂組成物之溶液中的方法,或將感光性黑色樹脂組成物之溶液噴霧於透明基板的方法。作為透明基板,可舉出例如:石英玻璃、硼矽酸玻璃、鋁矽酸鹽玻璃或將表面經二氧化矽塗布之鈉鈣玻璃等無機玻璃類,或有機塑膠薄膜或片。再者,塗布於基板上時,若預先以矽烷偶合劑、鋁螯合劑或鈦螯合劑等接著助劑處理基板表面,則可使BM被膜與基板之接著力提升。 A production example of the resin BM substrate of the present invention is shown below. As a method of applying a photosensitive black resin composition on a transparent substrate, for example, a transparent substrate is immersed in a photosensitive method by a dip coating method, a roll coating method, a spin method, a die-casting method, or a wire bar method. A method in a solution of a black resin composition or a method of spraying a solution of a photosensitive black resin composition on a transparent substrate. Examples of the transparent substrate include quartz glass, borosilicate glass, aluminosilicate glass, or inorganic glass such as soda lime glass coated with cerium oxide, or an organic plastic film or sheet. Further, when the substrate is coated on a substrate, the adhesion of the BM film to the substrate can be improved by previously treating the surface of the substrate with a bonding aid such as a decane coupling agent, an aluminum chelating agent or a titanium chelating agent.

將感光性黑色樹脂組成物塗布於透明基板上後,利用風乾、加熱乾燥或真空乾燥等加熱乾燥及進行硬化,來形成乾燥被膜。為了抑制形成被膜時之乾燥不均或搬送不均,較佳為將塗布有塗液之透明基板,利用 具備加熱裝置之減壓乾燥機進行減壓乾燥後,進行加熱乾燥及硬化。 After the photosensitive black resin composition is applied onto a transparent substrate, it is dried by heating, dried by air drying, heat drying or vacuum drying, and cured to form a dried film. In order to suppress uneven drying or uneven conveyance when forming a film, it is preferred to use a transparent substrate coated with a coating liquid. The vacuum dryer having a heating device is dried under reduced pressure, and then dried by heating and hardened.

以此所得之乾燥被膜通常使用光刻等方法來進行圖案加工。由感光性樹脂所得之乾燥被膜,如此或於其表面形成氧遮斷膜後,進行曝光顯影,而可形成所欲圖案。之後,可視需要,去除氧遮斷膜後,使其加熱硬化,藉此得到樹脂BM基板。加熱硬化條件係因樹脂而不同,但於使用丙烯酸樹脂時,通常一般為於200~250℃加熱1~60分鐘。 The dried film thus obtained is usually subjected to pattern processing using a method such as photolithography. The dried film obtained from the photosensitive resin, after forming an oxygen blocking film on the surface thereof, is subjected to exposure development to form a desired pattern. Thereafter, the oxygen barrier film may be removed as needed, and then heat-hardened to obtain a resin BM substrate. The heat curing conditions vary depending on the resin. However, when an acrylic resin is used, it is usually heated at 200 to 250 ° C for 1 to 60 minutes.

使用本發明之樹脂BM基板,可製造液晶顯示用濾色器基板或觸控面板遮光膜。即,本發明係可提供具備本發明之樹脂BM基板的液晶顯示用濾色器基板或觸控面板用遮光膜。該濾色器係至少具備於透明基板之一部分區域上形成樹脂BM之樹脂BM基板,及於透明基板上未形成樹脂BM區域形成有像素的濾色器,上述樹脂BM基板係本發明之樹脂BM基板。 By using the resin BM substrate of the present invention, a color filter substrate for a liquid crystal display or a light-shielding film for a touch panel can be manufactured. In other words, the present invention provides a color filter substrate for a liquid crystal display or a light-shielding film for a touch panel including the resin BM substrate of the present invention. The color filter is provided with at least a resin BM substrate on which a resin BM is formed in a partial region of a transparent substrate, and a color filter in which a pixel is formed on a transparent substrate without forming a resin BM region, and the resin BM substrate is a resin BM of the present invention. Substrate.

[實施例] [Examples]

以下舉出實施例及比較例,進一步詳細地說明本發明,但本發明並不限定於該等。其中,實施例5、6為參考例。 Hereinafter, the present invention will be described in further detail by way of examples and comparative examples, but the invention is not limited thereto. Among them, Examples 5 and 6 are reference examples.

實施例1 Example 1

作為利用熱電漿法所製造之氮化鈦粒子(日清Engineering(股)製;400g)丙烯酸樹脂,利用周知文獻(日本專利第3120476號公報)所記載之方法,合成甲基丙烯酸甲酯/甲基丙烯酸/苯乙烯共聚物(重量組成比30/40/30)後,使其與縮水甘油甲基丙烯酸酯40重量份加 成,利用純化水進行再沈、過濾及乾燥而得到平均分子量(Mw)15,000及酸值110(mgKOH/g)之丙烯酸樹脂(P-1)。將所得到之丙烯酸樹脂(P-1)的丙二醇單甲醚乙酸酯40重量%溶液(187.5g)、高分子分散劑(BYK21116;BYK公司製;62.5g)及丙二醇單乙醚乙酸酯(890g)加入槽中,利用均質機(特殊機化製)進行攪拌1小時而得到預備分散液1。其後,將預備分散液1供給至具備70%填充0.10mm 二氧化鋯珠粒(東麗製)之遠心分離隔片的奈米研磨機(ultra apex mill)(壽工業製),以回轉速度8m/s進行分散2小時,而得到固體成分濃度25重量%、顏料/樹脂(重量比)=80/20之鈦黑顏料分散液TB-1。 As a titanium nitride particle (manufactured by Nissin Engineering Co., Ltd.; 400 g), an acrylic resin produced by a thermo-plasma method, methyl methacrylate/methyl was synthesized by the method described in the Japanese Patent Publication No. 3120476. After the acrylic acid/styrene copolymer (weight composition ratio: 30/40/30), it is added to 40 parts by weight of glycidyl methacrylate, and re-precipitated with purified water, filtered and dried to obtain an average molecular weight (Mw). ) 15,000 and an acrylic resin (P-1) having an acid value of 110 (mgKOH/g). A 40% by weight solution of propylene glycol monomethyl ether acetate (187.5 g) of the obtained acrylic resin (P-1), a polymer dispersant (BYK21116; manufactured by BYK Co., Ltd.; 62.5 g), and propylene glycol monoethyl ether acetate ( 890 g) was placed in a tank, and stirred by a homogenizer (special machine) for 1 hour to obtain a preliminary dispersion 1. Thereafter, the preliminary dispersion 1 is supplied to have a 70% filling of 0.10 mm. An ultra-apex mill (manufactured by Shou Industrial Co., Ltd.) of a telecentric separation separator of zirconium dioxide beads (manufactured by Toray Industries, Inc.) was dispersed at a rotation speed of 8 m/s for 2 hours to obtain a solid content concentration of 25% by weight. Pigment/resin (weight ratio) = 80/20 titanium black pigment dispersion TB-1.

於碳黑(TPX1291;CABOT製;400g)加入丙烯酸樹脂(P-1)之丙二醇單甲醚乙酸酯40重量%(187.5g)、高分子分散劑(BYK21116;62.5g)及丙二醇單乙醚乙酸酯(890g)至槽中,利用均質機進行攪拌1小時,得到預備分散液2。其後,將預備分散液2供給至具備70%填充0.10mm 二氧化鋯珠粒之遠心分離隔片的奈米研磨機,以回轉速度8m/s進行分散2小時,而得到固體成分濃度20重量%、顏料/樹脂(重量比)=80/20之碳黑顏料分散液CB-1。 40% by weight (187.5 g) of propylene glycol monomethyl ether acetate of acrylic resin (P-1), polymer dispersant (BYK21116; 62.5 g) and propylene glycol monoethyl ether B were added to carbon black (TPX1291; CABOT; 400 g) The acid ester (890 g) was placed in a tank, and stirred by a homogenizer for 1 hour to obtain a preliminary dispersion 2. Thereafter, the preliminary dispersion 2 is supplied to have a 70% filling of 0.10 mm. A nanomill of a telecentric separation separator of zirconium dioxide beads was dispersed at a rotation speed of 8 m/s for 2 hours to obtain a carbon black having a solid content concentration of 20% by weight and a pigment/resin (weight ratio) = 80/20. Pigment dispersion CB-1.

於丙二醇單乙醚乙酸酯(14.31g)添加作為光聚合起始劑之“ADEKA(註冊商標)CRUISE”NCI-831(1.69g),且攪拌至固體成分溶解為止。 "ADEKA (registered trademark) CRUISE" NCI-831 (1.69 g) as a photopolymerization initiator was added to propylene glycol monoethyl ether acetate (14.31 g), and stirred until the solid component was dissolved.

進而,添加丙烯酸聚合物(P-1)之丙二醇單甲醚乙酸酯40重量%溶液(5.50g)、作為多官能單體二新戊 四醇六丙烯酸酯(日本化藥(股)製)之丙二醇單乙醚乙酸酯50重量%溶液(3.61g)、作為密合改良劑氧雜環丁烷化合物之“Aron Oxetane”OXT-191(以下,「氧雜環丁烷化合物1」;東亞合成股份有限公司製)之丙二醇單乙醚乙酸酯50重量%溶液(0.41g)、KBM5103(信越化學(股)製;0.41g)及作為界面活性劑聚矽氧系界面活性劑BYK333之丙二醇單乙醚乙酸酯10重量%溶液(0.24g),於室溫進行攪拌1小時,藉此得到感光性抗蝕劑。於該感光性抗蝕劑添加13.93g上述顏料分散液1、19.90g顏料分散液2,藉此製備總固體成分濃度23%、顏料/樹脂(重量比)=46/54之感光性黑色樹脂組成物1。 Further, a 40% by weight solution of propylene glycol monomethyl ether acetate (5.50 g) of an acrylic polymer (P-1) was added as a polyfunctional monomer dipentane A propylene glycol monoethyl ether acetate 50% by weight solution (3.61 g) of tetraol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.) and "Aron Oxetane" OXT-191 as an adhesion modifier oxetane compound ( In the following, "oxyxetane compound 1"; propylene glycol monoethyl ether acetate 50% by weight solution (0.41 g), KBM5103 (manufactured by Shin-Etsu Chemical Co., Ltd.; 0.41 g) and interface A 10 wt% solution of propylene glycol monoethyl ether acetate (0.24 g) of the active agent polyfluorene surfactant BYK333 was stirred at room temperature for 1 hour to obtain a photosensitive resist. To the photosensitive resist, 13.93 g of the above pigment dispersion liquid 1 and 19.90 g of the pigment dispersion liquid 2 were added, whereby a photosensitive black resin having a total solid content concentration of 23% and a pigment/resin (weight ratio) = 46/54 was prepared. Matter 1.

將經製備之感光性黑色樹脂組成物1利用2μm之Teflon(註冊商標)製過濾器過濾後,以膜厚成為1μm(後烤(post-bake)後)於鈉鈣玻璃基板上利用旋轉塗布裝置(1H-DS;Mikasa(股)製)進行塗布,經塗布之基板於90℃之加熱板上的柱狀突起物進行加熱處理2分鐘,進而2分鐘間於加熱板上直接靜置基板來進行預烤。於該塗布膜使用光罩對準曝光機(PEM-6M;UNION光學(股)製),介由解析度測試用光罩,以紫外線200mJ/cm2之曝光量來進行曝光。 The prepared photosensitive black resin composition 1 was filtered through a 2 μm Teflon (registered trademark) filter, and then a spin coating apparatus was used on a soda lime glass substrate at a film thickness of 1 μm (post-bake). (1H-DS; manufactured by Mikasa Co., Ltd.) was applied, and the coated substrate was subjected to heat treatment for 2 minutes on a hot plate at 90 ° C for 2 minutes, and further, the substrate was directly placed on a hot plate for 2 minutes. Pre-baked. The coating film was exposed using an illuminating exposure machine (PEM-6M; manufactured by UNION Optics Co., Ltd.) through a spectroscopic test reticle with an exposure amount of ultraviolet rays of 200 mJ/cm 2 .

接著,利用0.1重量%TMAH水溶液之鹼顯影液進行顯影,持續利用純水清洗來得到圖案化基板。所得之圖案化基板於熱風烘箱中230℃保持30分鐘來進行後烤,藉此得到樹脂BM基板1。 Next, development was carried out using an alkali developing solution of a 0.1% by weight aqueous solution of TMAH, and washing with pure water was continued to obtain a patterned substrate. The obtained patterned substrate was post-baked in a hot air oven at 230 ° C for 30 minutes to obtain a resin BM substrate 1.

實施例2 Example 2

作為使用之密合改良劑,除了使用具有矽倍半氧烷結構之氧雜環丁烷化合物之OX-SQ TX-100(以下,「氧雜環丁烷化合物2」;東亞合成股份有限公司製)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物2。又,使用感光性黑色樹脂組成物2,以與實施例1相同地得到樹脂BM基板2。 As the adhesion improving agent to be used, OX-SQ TX-100 (hereinafter, "oxetane compound 2") having an oxetane compound having a sesquisesquioxane structure is used, and manufactured by Toagosei Co., Ltd. The photosensitive black resin composition 2 was obtained in the same manner as in Example 1 except that the oxetane compound 1 was replaced. Moreover, the resin BM substrate 2 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 2.

實施例3 Example 3

作為使用之密合改良劑,除了使用具有矽倍半氧烷結構之氧雜環丁烷化合物之OX-SQ SI-20(以下,「氧雜環丁烷化合物3」;東亞合成股份有限公司製)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物3。又,使用感光性黑色樹脂組成物3,與實施例1相同地得到樹脂BM基板3。 As the adhesion improving agent to be used, OX-SQ SI-20 (hereinafter, "oxetane compound 3") which is an oxetane compound having a sesquiterpene oxide structure (manufactured by Toagosei Co., Ltd.) is used. The photosensitive black resin composition 3 was obtained in the same manner as in Example 1 except that the oxetane compound 1 was replaced. Moreover, the resin BM substrate 3 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 3.

實施例4 Example 4

作為使用之密合改良劑,除了使用“Aron Oxetane(註冊商標)”TMSOX(以下,「氧雜環丁烷化合物4」;東亞合成股份有限公司製)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物4。又,使用感光性黑色樹脂組成物4,與實施例1相同地得到樹脂BM基板4。 In addition to the oxetane compound 1 except "Aron Oxetane (registered trademark)" TMSOX (hereinafter, "oxetane compound 4"; manufactured by Toagosei Co., Ltd.) is used as the adhesion improving agent to be used. The photosensitive black resin composition 4 was obtained in the same manner as in Example 1. Moreover, the resin BM substrate 4 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 4.

實施例5 Example 5

作為使用之密合改良劑,除了使用“Aron Oxetane(註冊商標)”OXT-101(以下,「氧雜環丁烷化合物5」;東亞合成股份有限公司製)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物 5。又,使用感光性黑色樹脂組成物5,與實施例1相同地得到樹脂BM基板5。 In place of the oxetane compound 1, "Aron Oxetane (registered trademark)" OXT-101 (hereinafter, "oxetane compound 5"; manufactured by Toagosei Co., Ltd.) is used as the adhesion improving agent to be used. A photosensitive black resin composition was obtained in the same manner as in Example 1 except that the photosensitive black resin composition was obtained. 5. Moreover, the resin BM substrate 5 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 5.

實施例6 Example 6

作為使用之密合改良劑,除了使用“Aron Oxetane(註冊商標)”OXT-221(以下,「氧雜環丁烷化合物6」;東亞合成股份有限公司製)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物6。又,使用感光性黑色樹脂組成物6,與實施例1相同地得到樹脂BM基板6。 In place of the oxetane compound 1, "Aron Oxetane (registered trademark)" OXT-221 (hereinafter, "oxetane compound 6"; manufactured by Toagosei Co., Ltd.) is used as the adhesion improving agent to be used. The photosensitive black resin composition 6 was obtained in the same manner as in Example 1. Moreover, the resin BM substrate 6 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 6.

實施例7 Example 7

作為使用之密合改良劑,除了將氧雜環丁烷化合物1之添加量設為3.0%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物7。又,使用感光性黑色樹脂組成物7,與實施例1相同地得到樹脂BM基板7。 The photosensitive black resin composition 7 was obtained in the same manner as in Example 1 except that the amount of the oxetane compound 1 added was 3.0%. Moreover, the resin BM substrate 7 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 7.

實施例8 Example 8

作為使用之密合改良劑,除了將氧雜環丁烷化合物1之添加量設為5.0%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物8。又,使用感光性黑色樹脂組成物8,與實施例1相同地得到樹脂BM基板8。 The photosensitive black resin composition 8 was obtained in the same manner as in Example 1 except that the amount of the oxetane compound 1 added was 5.0%. Moreover, the resin BM substrate 8 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 8.

實施例9 Example 9

作為使用之密合改良劑,除了將氧雜環丁烷化合物1之添加量設為7.0%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物9。又,使用感光性黑色樹脂組成物9,與實施例1相同地得到樹脂BM基板9。 The photosensitive black resin composition 9 was obtained in the same manner as in Example 1 except that the amount of the oxetane compound 1 added was 7.0%. Moreover, the resin BM substrate 9 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 9.

實施例10 Example 10

作為使用之密合改良劑,除了將氧雜環丁烷化合物1之添加量設為10.0%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物10。又,使用感光性黑色樹脂組成物10,與實施例1相同地得到樹脂BM基板10。 The photosensitive black resin composition 10 was obtained in the same manner as in Example 1 except that the amount of the oxetane compound 1 added was changed to 10.0%. Moreover, the resin BM substrate 10 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 10.

實施例11 Example 11

於丙二醇單乙醚乙酸酯(19.05g)添加作為光聚合起始劑“ADEKA(註冊商標)CRUISE”NCI-831(1.69g)、且攪拌至固體成分溶解為止。進而,添加丙烯酸聚合物(P-1)之丙二醇單甲醚乙酸酯40重量%溶液(6.73g)、作為多官能單體二新戊四醇六丙烯酸酯(日本化藥(股)製)之丙二醇單乙醚乙酸酯50重量%溶液(3.62g)、作為密合改良劑氧雜環丁烷化合物之OXT-191(東亞合成股份有限公司製)之丙二醇單乙醚乙酸酯50重量%溶液(0.41g)及信越化學(股)製KBM5103(0.41g)、作為界面活性劑聚矽氧系界面活性劑BYK333之丙二醇單乙醚乙酸酯10重量%溶液(0.24g),於室溫進行攪拌1小時,藉此得到感光性抗蝕劑。於該感光性抗蝕劑添加27.84g上述鈦黑顏料分散液TB-1,藉此製備總固體成分濃度23%、顏料/樹脂(重量比)=46/54之感光性黑色樹脂組成物11。又,使用感光性黑色樹脂組成物11,與實施例1相同地得到樹脂BM基板11。 Propylene glycol monoethyl ether acetate (19.05 g) was added as a photopolymerization initiator "ADEKA (registered trademark) CRUISE" NCI-831 (1.69 g), and stirred until the solid component was dissolved. Further, a 40% by weight solution of propylene glycol monomethyl ether acetate (6.73 g) of the acrylic polymer (P-1) was added, and the polyfunctional monomer, dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.) was added. 50% by weight solution of propylene glycol monoethyl ether acetate (3.62 g), propylene glycol monoethyl ether acetate 50% by weight solution of OXT-191 (manufactured by Toagosei Co., Ltd.) as an adhesion modifier oxetane compound (0.41g) and KBM5103 (0.41g) manufactured by Shin-Etsu Chemical Co., Ltd., a 10% by weight solution (0.24 g) of propylene glycol monoethyl ether acetate as a surfactant polyfluorene surfactant BYK333, stirred at room temperature One hour, thereby obtaining a photosensitive resist. To the photosensitive resist, 27.84 g of the above titanium black pigment dispersion TB-1 was added, whereby a photosensitive black resin composition 11 having a total solid content concentration of 23% and a pigment/resin (weight ratio) = 46/54 was prepared. Moreover, the resin BM substrate 11 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 11.

實施例12 Example 12

於丙二醇單乙醚乙酸酯(9.57g)添加作為光聚合起始劑“ADEKA(註冊商標)CRUISE”NCI-831(1.69g)、且攪拌至固體成分溶解為止。進而,添加丙烯酸樹脂(P-1)之丙 二醇單甲醚乙酸酯40重量%溶液(4.28g)、作為多官能單體二新戊四醇六丙烯酸酯(日本化藥(股)製)之丙二醇單乙醚乙酸酯50重量%溶液(3.60g)、作為密合改良劑氧雜環丁烷化合物之OXT-191(東亞合成股份有限公司製)之丙二醇單乙醚乙酸酯50重量%溶液(0.41g)、KBM5103(0.41g),及作為界面活性劑聚矽氧系界面活性劑BYK333之丙二醇單乙醚乙酸酯10重量%溶液(0.24g),於室溫進行攪拌1小時,藉此得到感光性抗蝕劑。於該感光性抗蝕劑添加19.9g碳黑顏料分散液CB-1,藉此製備總固體成分濃度23%、顏料/樹脂(重量比)=46/54之感光性黑色樹脂組成物12。又,使用感光性黑色樹脂組成物12,與實施例1相同地得到樹脂BM基板12。 Propylene glycol monoethyl ether acetate (9.57 g) was added as a photopolymerization initiator "ADEKA (registered trademark) CRUISE" NCI-831 (1.69 g), and stirred until the solid component was dissolved. Further, adding acrylic resin (P-1) to C a 40% by weight solution of diol monomethyl ether acetate (4.28 g) and a 50% by weight solution of propylene glycol monoethyl ether acetate as a polyfunctional monomer, dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.) (3.60 g), a propylene glycol monoethyl ether acetate 50% by weight solution (0.41 g) and KBM 5103 (0.41 g) as OXT-191 (manufactured by Toagosei Co., Ltd.) as an adhesion modifier oxetane compound. And a 10 wt% solution of propylene glycol monoethyl ether acetate (0.24 g) as a surfactant polyfluorinated surfactant BYK333, and stirred at room temperature for 1 hour, thereby obtaining a photosensitive resist. To the photosensitive resist, 19.9 g of a carbon black pigment dispersion liquid CB-1 was added, whereby a photosensitive black resin composition 12 having a total solid content concentration of 23% and a pigment/resin (weight ratio) = 46/54 was prepared. Moreover, the resin BM substrate 12 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 12.

比較例1 Comparative example 1

作為使用之密合改良劑,除了使用四甲基矽酸鹽(Tetramethyl orthosilicate)來取代氧雜環丁烷化合物1之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物13。又,使用感光性黑色樹脂組成物13,與實施例1相同地得到樹脂BM基板13。 The photosensitive black resin composition 13 was obtained in the same manner as in Example 1 except that the oxetane compound 1 was replaced with Tetramethyl orthosilicate. Moreover, the resin BM substrate 13 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 13.

比較例2 Comparative example 2

作為使用之密合改良劑,除了不添加氧雜環丁烷化合物之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物14。又,使用感光性黑色樹脂組成物14,與實施例1相同地得到樹脂BM基板14。 The photosensitive black resin composition 14 was obtained in the same manner as in Example 1 except that the oxetane compound was not added. Moreover, the resin BM substrate 14 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 14.

比較例3 Comparative example 3

作為使用之密合改良劑,除了將氧雜環丁烷化合物1 之添加量設為0.5%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物15。又,使用感光性黑色樹脂組成物15,與實施例1相同地得到樹脂BM基板15。 As the adhesion modifier used, in addition to the oxetane compound 1 The photosensitive black resin composition 15 was obtained in the same manner as in Example 1 except that the amount of addition was 0.5%. Moreover, the resin BM substrate 15 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 15.

比較例4 Comparative example 4

作為使用之密合改良劑,除了將氧雜環丁烷化合物1之添加量設為13.0%之外,以與實施例1相同地進行而得到感光性黑色樹脂組成物16。又,使用感光性黑色樹脂組成物16,與實施例1相同地得到樹脂BM基板16。對於所得之樹脂BM基板16,關於圖案形狀、顯影接著性及OD值利用下述方法進行評價。結果示於表1。 The photosensitive black resin composition 16 was obtained in the same manner as in Example 1 except that the amount of the oxetane compound 1 added was changed to 13.0%. Moreover, the resin BM substrate 16 was obtained in the same manner as in Example 1 using the photosensitive black resin composition 16. The obtained resin BM substrate 16 was evaluated by the following method regarding the pattern shape, development adhesion, and OD value. The results are shown in Table 1.

[顯影接著性] [developing adhesion]

與上述方法相同地,形成線寬不同之樹脂BM,且以目視判定各線寬中有無發生圖案之剝落或缺損來進行判定。又,判定為○:無缺損、剝落,×:有缺損剝落。 In the same manner as the above method, the resin BM having a different line width was formed, and the presence or absence of occurrence of peeling or chipping of the pattern in each line width was visually determined. Further, it was judged as ○: no defect or peeling, and ×: there was a defect peeling.

[圖案直線性] [pattern linearity]

對於圖案加工部分的直線性,使用BH-C1410(OLYMPUS(股)製)來進行評價。對於判定係,直線性良好者為○,可看見蛇行或形狀端部缺損者視程度為△、×。 The linearity of the pattern-worked portion was evaluated using BH-C1410 (manufactured by OLYMPUS Co., Ltd.). For the judgment system, the linearity is good, and the degree of visibility of the snake or the shape end defect is Δ, ×.

[OD值] [OD value]

使用X-rite 361T(visual)densitometer,利用下述關係式求得者。 Using the X-rite 361T (visual) densitometer, the following relationship was obtained.

OD值=log10(I0/I) OD value = log10 (I 0 /I)

此處,I0為入射光強度,I為透射光強度。再者,由於OD值係由膜厚比例,遮光性的大小係由膜厚比例,因 此於本發明表示為每1.0μm之OD值。 Here, I 0 is the incident light intensity, and I is the transmitted light intensity. Further, since the OD value is a film thickness ratio, and the light shielding property is a film thickness ratio, it is expressed as an OD value per 1.0 μm in the present invention.

對於表1所示之結果,藉由添加作為密合改良劑之氧雜環丁烷化合物,根據側鏈之取代基種類,可發現於圖案直線性之改善。又,藉由添加含有矽基之氧雜環丁烷,其結果可得到顯影接著性、圖案直線性均優異的感光性黑色樹脂組成物。 As a result shown in Table 1, by adding an oxetane compound as an adhesion improver, it was found that the linearity of the pattern was improved depending on the type of the substituent of the side chain. In addition, by adding an oxetane group containing a mercapto group, a photosensitive black resin composition excellent in development adhesiveness and pattern linearity can be obtained.

氧雜環丁烷化合物之添加量,相對於糊固體成分為1.5%以下,或10.0%以上時有顯影接著性劣化之結果,適當地添加量為1.5~10.0%。 When the amount of the oxetane compound added is 1.5% or less or 10.0% or more with respect to the paste solid content, the development adhesiveness is deteriorated, and the amount is appropriately added in an amount of 1.5 to 10.0%.

作為比較例1,添加未具有氧雜環丁烷環,僅具有矽基之四甲基矽酸鹽,其顯影接著性、圖案直線性均無法被改善,其結果為本發明之要件即具有矽基的氧雜環丁烷化合物可使感光性黑色樹脂組成物之顯影性、圖案直線性提升。 As Comparative Example 1, tetramethyl decanoate having no oxetane ring and having only a mercapto group was added, and development developability and pattern linearity were not improved, and as a result, it was found to be a component of the present invention. The base oxetane compound can improve the developability and pattern linearity of the photosensitive black resin composition.

Claims (3)

一種感光性黑色樹脂組成物,其係至少包含遮光材、鹼可溶性樹脂、光聚合起始劑及溶劑的感光性黑色樹脂組成物,其特徵為至少包含具有下述通式(A)之構造的氧雜環丁烷(oxetane)化合物作為添加劑,相對於遮光材與鹼可溶性樹脂之總和,包含該氧雜環丁烷化合物1.5~10.0重量%,且該氧雜環丁烷化合物具有矽基; (式中,R1、R2可分別為相同或相異,R1表示氫或碳數為1~10之烷基,且烷基進而可具有取代基;又,R2表示氫原子、矽基或碳數1~10之烷基,且矽基及烷基進而可具有取代基)。 A photosensitive black resin composition comprising at least a light-shielding material, an alkali-soluble resin, a photopolymerization initiator, and a solvent, and a photosensitive black resin composition characterized by comprising at least a structure having the following formula (A) An oxetane compound as an additive, comprising 1.5 to 10.0% by weight of the oxetane compound, based on the total of the light-shielding material and the alkali-soluble resin, and the oxetane compound has a mercapto group; (wherein R 1 and R 2 may be the same or different, respectively, and R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms, and the alkyl group may further have a substituent; further, R 2 represents a hydrogen atom, ruthenium A group or an alkyl group having 1 to 10 carbon atoms, and the fluorenyl group and the alkyl group may further have a substituent). 如申請專利範圍第1項之感光性黑色樹脂組成物,其中該氧雜環丁烷化合物以下述結構式(B)所示, (式中,X表示下述氧雜環丁烷基,n表示10以下之正整數); (式中,*表示連結部分,又,R1表示氫或碳數為1~10之烷基,且烷基進而可具有取代基)。 The photosensitive black resin composition of claim 1, wherein the oxetane compound is represented by the following structural formula (B), (wherein, X represents the following oxetane group, and n represents a positive integer of 10 or less); (wherein * represents a linking moiety, and R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms, and the alkyl group may further have a substituent). 一種樹脂黑矩陣基板,其係將如申請專利範圍第1或2項之感光性黑色樹脂組成物塗布於透明基板上,且形成圖案而得。 A resin black matrix substrate obtained by applying a photosensitive black resin composition according to claim 1 or 2 to a transparent substrate and forming a pattern.
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