TWI574429B - Substrate trench processing tools and substrate trench processing device - Google Patents

Description

Groove processing tool for substrate and groove processing device for substrate

The present invention relates to a groove processing tool, and more particularly to a groove processing tool which is held by a holder and used for reciprocating relative movement of a holder on a substrate as a processing object to form a groove on the substrate. A groove processing device having a groove processing tool.

The thin film solar cell is manufactured, for example, by the method as disclosed in Patent Document 1. In the manufacturing method described in Patent Document 1, a lower electrode film made of a Mo film is formed on a substrate such as glass, and then a groove is formed in the lower electrode film to be divided into short strips. Next, a compound semiconductor film containing a chalcopyrite structure compound semiconductor film such as a CIGS film is formed on the lower electrode film. Then, one of the semiconductor films is removed in a stripe shape by trench processing to be divided into strips, and the upper electrode film is formed to cover the film. Finally, one portion of the upper electrode film is peeled off in a stripe shape by groove processing to be divided into short strips.

As one of the groove processing techniques in the above steps, a mechanical scribing method using a mechanical tool such as diamond to remove a part of the film is used. In the mechanical scribing method, a groove processing device disclosed in Patent Document 2 has been proposed in order to efficiently perform groove processing.

In the device of Patent Document 2, a tool holder is attached to the head so as to be movable up and down, and further, the swing member is swingably attached to the tool holder within a predetermined angular range. The oscillating member holds a groove machining tool, and the oscillating member reverses the forward cutting posture and the backward cutting posture when moving in the forward direction. In the groove processing tool, on the moving side and The symmetrical front and rear tips are provided to the moving side. Further, when the swinging member is in the forward moving (advancing) cutting posture, the front cutting edge is in contact with the solar cell substrate, and the rear cutting edge is in contact with the solar cell substrate in the backward moving (backward) cutting posture.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Unexamined Gazette No. 63-16439

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2012-146954

When the groove processing is performed using the groove processing tool as described above, the groove processing can be efficiently performed. However, when the tip of the tool is gradually worn, the width of the moving direction of the knife becomes wider and the wear becomes wider, and the good processing quality cannot be maintained for a long period of time.

Therefore, the inventors of the present invention have developed a groove processing tool which has a small change in the width of the blade due to abrasion and which can achieve a long life, and has been filed (Japanese Patent Application No. 2011-212148). In the groove machining tool, the tip end portion of the tool is continuously formed as a first blade formed on the front end of the moving side and a second blade formed on the front side toward the moving side. Here, between the first blade and the second blade, there is no portion where the blade is not formed. Therefore, when the first blade is worn, the second blade is scraped off, and conversely, when the second blade is worn, the first blade is scraped off. Therefore, even if the first blade and the second blade are worn, the change in the width of each blade can be suppressed.

Here, the first blade and the second blade are inclined toward the tool body side at the same angle with respect to the moving direction. The tilt angle is equal to the swing angle of the tool. Therefore, the tool swings twice as much as the tilt angle when moving from the direction of movement to the moving direction when moving. Therefore, when the tilt angle is large, the time from one tilt angle to the other tilt angle (ie, when swinging) The length is long, and accurate groove processing cannot be performed during this time. Furthermore, during the tool swing, it is necessary to make the moving speed of the tool low, which results in processing time.

On the other hand, if the inclination angle is made small, the chips generated when machining with one blade cannot be smoothly discharged from the other blade side. Therefore, there is a case where the processing quality is lowered due to the chips.

An object of the present invention is to reduce the swing angle of the tool and to smoothly discharge the chips to stabilize the processing quality when the tool is reciprocated relative to the substrate to perform the groove processing.

The groove processing tool for a substrate according to the first aspect of the present invention is a tool for holding a groove on a substrate, and a tool for forming a groove on the substrate, which is held by a holder on a substrate to be processed and which is reciprocally opposed to the holder. The tool body that holds the tool holder and the tip end portion that is formed at the front end of the tool body are held. The tip end portion has a first blade, a second blade, and a retracting portion. The first blade is formed at a front end portion of the tool body, and is formed at a front end of the moving direction on the moving side. The second knife is formed at the front end of the coming side toward the moving side. The relief portion is formed between the first blade and the second blade, and is formed to be recessed toward the tool body side.

In this case, since the retracting portion is formed between the first blade and the second blade, even if the inclination angles of the first blade and the second blade are made small, the chips can be favorably discharged through the retracting portion. Therefore, when the tool is moved back and forth to perform the groove processing, the processing quality can be improved at the time of switching the moving direction, and the processing time can be shortened.

The groove processing tool for a substrate according to the second aspect of the present invention, wherein the first blade and the second blade are each a reference plane orthogonal to an axis of a longitudinal direction of the tool body, Tilting away from the reference plane in the direction of movement.

By tilting the first blade and the second blade, the entire surface of each blade is brought into contact with the substrate when the tool is swung. Therefore, the processing can be performed efficiently. Furthermore, plus the first knife and the second A relief portion is formed between the knives, so that even if the knives wear, the change in the state of the knives can be made small.

A groove processing tool for a substrate according to a third aspect of the invention is the groove machining tool of the second aspect, wherein the relief portion has a first retracting surface and a second retracting surface. The first evacuation surface is formed on the second blade side of the first blade, and is inclined with respect to the reference surface so as to be apart from the reference surface toward the second blade side. The second evacuation surface is formed on the first blade side of the second blade, and is inclined with respect to the reference surface so as to be apart from the reference surface toward the first blade side.

By making the angle of inclination of each of the retreating surfaces large, the chips can be discharged more smoothly.

A groove machining tool for a substrate according to a fourth aspect of the invention is the groove machining tool of the third aspect, wherein the inclination angle of the relief portion is larger than the inclination angle of each of the blades.

Here, the inclination angle of the blade, that is, the swing angle of the tool is made small, so that the processing quality at the time of switching the movement direction can be improved, and further, the inclination angle of the escape portion is made large, and the discharge of the chips can be smoothly performed.

The groove processing tool according to any one of the second to fourth aspect, wherein the length of the escape portion in the direction of the reference surface is longer than the first blade and the second The length of the knife along the reference plane is long.

Here, since the length of the moving direction of the retracting portion is formed to be relatively long, the discharge of the chips can be made smoother.

The groove processing tool according to any one of the second to fifth aspect, wherein the tool body is supported by the swinging member supported by the holder in a swingable manner, and The inclination angle of the 1 knife and the 2nd knife is equal to the swing angle of the swinging member.

Here, the width of each blade is entirely in contact with the substrate when moving in the forward direction and in the forward direction, so that the processing can be performed efficiently.

The groove processing tool for a substrate according to the seventh aspect of the present invention is the first to sixth The groove processing tool according to any one of the preceding claims, wherein the cutting edge portion is formed to have a side opposite to the moving side and a side to the moving side obliquely and symmetrically in such a manner that the width of the moving direction becomes narrower toward the front end. .

Here, it is preferable that the widths of the blade tips are all the same in the moving direction. In this case, even if the first blade and the second blade are worn, the change in the width of the moving direction is small.

However, in general, the width of the tip portion is extremely small, and if the tip portion having a small width is made long, the strength is lowered and the possibility of breakage during processing becomes high.

Therefore, in the tool of the seventh aspect, the tip end portion is formed such that the tip end is thinner and becomes thicker as it goes away from the tip end. Therefore, it is possible to suppress a decrease in strength, and it is possible to suppress a change in width due to abrasion and to achieve a long life.

The groove processing tool of the substrate according to any one of the first to seventh aspect, wherein the width of the blade tip portion orthogonal to the moving direction is larger than the tool body The width of this direction is narrow.

The width of the blade tip in the direction orthogonal to the direction of movement needs to be set according to the width dimension of the groove being machined. Moreover, the groove width is usually very narrow. On the other hand, since the tool body is attached to the holder, in addition, in order to secure strength, a certain width is required.

Therefore, in the groove processing tool, the width of the blade tip portion in the direction orthogonal to the moving direction is narrowed, and on the other hand, the width of the tool body in the direction is wide.

A groove processing device for a substrate according to a ninth aspect of the invention is the device for processing a groove on a substrate, and includes a stage on which the substrate is placed, a head, and a moving mechanism. The head is disposed above the stage, and has a holder to which the groove processing tool according to any one of the first to eighth aspects is attached, and a driving unit for moving the holder in the vertical direction. The moving mechanism relatively moves the head in a plane parallel to the mounting surface of the stage with respect to the stage.

According to the above invention, the trench can be grooved for reciprocating movement The processing tool can make the tool have a small swing angle and can discharge the chips well, so that the processing quality can be stabilized.

2‧‧‧ Tools

3‧‧‧ head

17‧‧‧Holding

18‧‧‧Wobble member

36‧‧‧Tool body

37‧‧‧The tip of the knife

38a, 38b‧‧‧ knife

39‧‧‧Retreating Department

39a, 39b‧‧‧ retreating surface

Fig. 1 is an external perspective view of a groove processing apparatus to which a groove processing tool according to an embodiment of the present invention is attached.

Figure 2 is a front elevational view of the head of the groove processing apparatus.

Fig. 3 is a schematic view for explaining the action at the time of groove processing.

Figure 4 is a front view and a side view of the groove machining tool.

Fig. 5 is an enlarged view showing the posture of the blade during the groove processing.

An external perspective view of a groove processing apparatus for an integrated thin film solar cell to which a groove processing tool according to an embodiment of the present invention is attached is shown in Fig. 1.

[The overall composition of the groove processing device]

This apparatus includes a stage 1 on which a solar cell substrate W is placed, a head 3 to which a groove processing tool (hereinafter simply referred to as a tool) 2, and two cameras 4 and a monitor 5 are attached.

The stage 1 is movable in the horizontal direction of FIG. 1 in the horizontal direction. Furthermore, the stage 1 can be rotated at any angle in the horizontal plane. Further, in Fig. 1, the outline appearance of the head portion 3 is shown, and the details of the head portion 3 will be described later.

The head 3 is movable in the X and Y directions above the stage 1 by the moving mechanism 6. Further, as shown in FIG. 1, the X direction is a direction orthogonal to the Y direction in the horizontal plane. The moving mechanism 6 has a pair of support columns 7a and 7b, a guide rod 8 provided between the pair of support columns 7a and 7b, and a motor 10 for driving the guide 9 formed on the guide rod 8. The head 3 can be along the guide 9 as described above in the X Move in the direction.

The two cameras 4 are fixed to the pedestal 12, respectively. Each of the pedestals 12 is movable along a guide 14 that is disposed on the support table 13 and extends in the X direction. The two cameras 4 are movable up and down, and the images captured by the respective cameras 4 are displayed on the corresponding monitor 5.

[head]

The head 3 is taken out and shown in FIG. The head 3 has a plate-shaped base 16, a holder 17, a swinging member 18, and a cylinder 19.

The holder 17 is slidably supported in the vertical direction with respect to the susceptor 16 via a rail (not shown). The holder 17 has a holder body 22 and a support member 23 fixed to the surface of the holder body 22. The holder body 22 is formed in a plate shape and has an opening 22a at the upper portion. The support member 23 is a rectangular member that is long in the lateral direction, and has a through hole 23a through which the swinging member 18 is inserted.

The swinging member 18 is rotatably supported by the holder main body 22 and the support member 23. The swinging member 18 has a lower tool mounting portion 24 and an extended portion 25 formed to extend upward from the tool mounting portion 24.

A groove is formed in the tool mounting portion 24, and the tool 2 is inserted into the groove, and the tool 2 is fixed in the groove by the fixing plate 24a.

A hole 25a penetrating in a direction orthogonal to the groove forming direction is formed in the lower portion of the extension portion 25 in the horizontal direction. Further, the swinging member 18 is swingable about the pin 26 penetrating the hole 25a. The pin 26 is supported by the holder body 22 and the support member 23.

A pair of restriction members 27a and 27b are provided on the left and right sides of the upper end portion 25b of the extension portion 25. As shown in Fig. 3, each of the restricting members 27a and 27b has cylindrical members 28a and 28b fixed to the holder main body 22, and springs 29a and 29b inserted into the inside of the cylindrical members 28a and 28b. Further, by abutting the front ends of the springs 29a and 29b against the upper end portion 25b of the extension portion 25, the swinging member 18 is maintained at the neutral position as shown in Figs. 2 and 3(b). Furthermore, the swing member 18 swings and presses any of the springs 29a and 29b, and the upper end portion 25b of the extension portion 25 abuts against the tubular members 28a and 28b, thereby restricting the swing angle. In this embodiment, the swing angle of the swinging member 18 is set to be within an angle range of ±3°, but it is preferably limited to within ±7°.

As shown in FIG. 2, the cylinder 19 is fixed to the upper surface of the cylinder supporting member 30. The cylinder support member 30 is disposed on the upper portion of the holder 17 and is fixed to the base 16. A hole penetrating in the vertical direction is formed in the cylinder support member 30, and a piston rod (not shown) of the cylinder 19 penetrates through the through hole, and the rod tip is coupled to the holder 17.

Further, a spring supporting member 31 is provided on the upper portion of the susceptor 16. A spring 32 is provided between the spring support member 31 and the holder 17, and the holder 33 is biased upward by the spring 32. The self-weight of the holder 17 can be substantially offset by the spring 32.

A pair of air supply portions 34a and 34b are provided on the left and right sides of the holder 17. Each of the pair of air supply portions 34a and 34b has the same configuration, and has a joint 35 and an air nozzle 36, respectively.

[tool]

The details of the tool 2 are shown in FIG. Figure 4 (a) is a front view of the tool 2, and Figure (b) is a side view thereof. FIG. 5 is a partial enlarged view of the blade edge portion, wherein (a) shows the posture in the neutral direction, (b) shows the posture when moving in the right direction, and (c) shows the posture when moving in the left direction.

The tool 2 has a tool body 36 held by a holder 17 and a tip end portion 37 formed at a front end portion of the tool body 36.

As shown in Fig. 5, at the front end of the cutting edge portion 37, there are a first blade 38a and a second blade 38b formed on both sides in the moving direction, and a retracting portion 39 formed between the blades 38a and 38b. Here, the first blade 38a is a blade for performing groove processing when moving in the forward direction, and the second blade 38b is a blade for performing groove processing when moving in the forward direction.

As shown in FIGS. 4 and 5, the width of the blade edge portion 37 in the moving direction is narrower toward the tip end (in this example, the width of the front end of the blade is 0.1 mm). That is, the relative position of the tip portion 37 The side surface 37a to the moving side and the side surface 37b to the moving side are inclined and symmetrically formed. The inclination angle α1 (see FIG. 4( a )) of the both side faces 37 a and 37 b with respect to the reference plane S is 73 degrees as an example, and the angle α2 of the front end portion of the blade edge portion 37 is 34 degrees as an example. Further, the reference plane S is a plane orthogonal to the axis N of the tool 2 in the longitudinal direction.

As shown in FIG. 5( a ), both the first blade 38 a and the second blade 38 b are inclined with respect to the reference plane S so as to be apart from the reference plane S in the moving direction. The inclination angle β1 of the first blade 38a and the second blade 38b is, for example, 3 degrees. This inclination angle β1 is set to be equal to the swing angle β3 of the swinging member 18. Therefore, at the time of processing, both the first blade 38a and the second blade 38b are parallel to the mounting surface (substrate surface) of the stage 1 so that the entire surfaces of the respective blades 38a and 38b abut against the surface of the substrate. Further, in this example, the width W1 of the moving direction of each of the blades 38a and 38b is 0.01 mm.

The relief portion 39 is formed to be recessed toward the tool body 36 side (upward in FIGS. 4 and 5 ) between the first blade 38 a and the second blade 38 b in the moving direction. Specifically, the evacuation unit 39 has a first evacuation surface 39a and a second evacuation surface 39b. The first evacuation surface 39a is formed on the second blade 38b side of the first blade 38a, and is inclined with respect to the reference surface S so as to be apart from the reference surface S toward the second blade 38b side. In addition, the second evacuation surface 39b is formed on the side of the first blade 38a of the second blade 38b, and is inclined with respect to the reference plane S so as to be apart from the reference plane S toward the first blade 38a side. Further, the inclination angle β2 of each of the escape faces 39a and 39b is larger than the inclination angle β1 of each of the blades 38a and 38b, and is 14 degrees as an example. Further, in this example, the width W2 of the moving direction of the escape portion 39 is 0.08 mm.

Further, as shown in FIG. 4(b), the width W3 of the blade edge portion 37 in the direction orthogonal to the moving direction is formed to be narrower than the width of the tool body 36 in the direction. The width of the tip end portion 37 in this direction is the same throughout the entire length, and is 0.04 to 0.380 mm in this example.

Further, as shown in FIG. 4(b), the portion of the tool body 36 on the blade edge portion 37 is inclined such that the width in the direction orthogonal to the moving direction becomes narrower as the blade edge portion 37 becomes narrower.

In summary, the specifications of the tip end portion 37 as an embodiment are as follows.

11:73°

22:34°

11:3° (=swing angle β3 of the oscillating member)

22:14°

W1: 0.01mm

W2: 0.08mm

W3: 0.04~0.380mm

[groove processing action]

When the thin film solar cell substrate is grooved using the above apparatus, the moving mechanism 6 is used to move the head 3 and the stage 1 is moved, and the camera 4 and the monitor 5 are used to position the tool 2 to form a groove. The predetermined line of the tank.

After the alignment as described above, the cylinder 19 is driven to lower the holder 17 and the swinging member 18 so that the front end of the tool 2 contacts the film. At this time, the pressing force of the tool 2 for the film is adjusted by the air pressure supplied to the cylinder 19.

Next, the motor 10 is driven to scan the head 3 along the groove processing predetermined line. The postures of the swinging member 18 and the tool 2 at this time are schematically shown in FIGS. 3 and 5.

When moving in the forward direction (when moving to the right side in FIG. 3), as shown in FIGS. 3(a) and 5(b), the swinging member 18 is made by the contact resistance of the first blade 38a with the film on the substrate. The clock 26 is pivoted clockwise. This swing is restricted by the upper end portion 25b of the swinging member 18 abutting against the right cylindrical member 28a. Therefore, the tool 2 is held in the inclined posture as shown in FIGS. 3(a) and 5(b), and the first blade 38a abuts against the film on the substrate, and the second blade 38b does not abut against the surface of the substrate. Moves down in the +M direction to form a groove.

Thereafter, the head 3 is relatively moved relative to the substrate, and the tool 2 is moved to the groove processing planned line which should be lowered next. Then, in the same manner as described above, the tool 2 is pressed against the film on the substrate, and the head portion 3 is moved in the opposite direction to the above.

When the movement is moved (in the case of moving to the left in FIG. 3), as shown in FIGS. 3(c) and 5(c), the swinging member is made by the contact resistance of the second blade 38b with the film on the substrate. 18 swings counterclockwise around the pin 26. This swing is restricted by the upper end portion 25b of the swinging member 18 abutting against the left cylindrical member 28b. Therefore, the tool 2 is held in the inclined posture as shown in FIGS. 3(c) and 5(c), and the second blade 38b is in contact with the film on the substrate, and the first blade 38a is not in contact with the surface of the substrate. Moves downward in the -M direction to form a groove.

Further, during the groove processing or at the end of the groove processing, air is ejected from the air nozzles 36 of the air supply portions 34a and 34b to remove the film peeled off from the substrate.

When the groove is processed as above, the tool 2 is swung (2 × β3) = 6° when switching in the moving direction. Therefore, the distance traveled by the tool 2 in the swing becomes relatively short, so that the distance processed in the swing is short. Therefore, there is a possibility that the distance which is a possibility of processing failure is shortened, and the yield is improved. Furthermore, the distance at which the moving speed must be reduced becomes shorter, so that the overall processing time is shortened.

Further, at the time of the round-trip machining, the chips are discharged along the escape faces 39a and 39b of the escape portion 39. Here, a relatively wide space is secured between the evacuation surfaces 39a, 39b and the surface of the substrate, so that the chips can be smoothly discharged.

[feature]

(1) Since the relief portion 39 is provided between the first blade 38a and the second blade 38b, even if the inclination angle of each of the blades 38a and 38b, that is, the swing angle of the tool is small, each of the escape portions 39 can be retracted. The inclination angles of the faces 39a and 39b are large, so that the discharge of the chips can be made good. Therefore, the portion where the processing quality at the time of switching the moving direction of the tool is lowered can be shortened, and the chips can be discharged favorably, and the processing quality can be improved.

(2) By tilting the first blade 38a and the second blade 38b by the swing angle, the entire surface of each blade is brought into contact with the substrate when the tool is swung, so that the machining can be efficiently performed.

(3) Since the respective blades 38a and 38b are inclined, and the first blade 38a and the second blade 38b are Since the relief portion 39 is formed between them, even if the respective blades 38a and 38b are worn out, the change in the state of the blade can be made small.

(4) Since the length of the moving direction of the retracting portion 39 is longer than the length of each of the blades 38a and 38b, the discharge of the chips is more smoothly performed.

(5) The tip end portion 37 is formed such that the tip end is thinner and becomes thicker as it goes away from the tip end. Therefore, it is possible to suppress a decrease in strength, and it is possible to suppress a change in width due to abrasion and to achieve a long life.

[Other Embodiments]

The present invention is not limited to the above embodiments, and various modifications and changes can be made without departing from the scope of the invention.

An example of the specification of the tip end portion will be described by way of example, but this is merely an example and various modifications are possible. For example, tools can be formed according to the specifications below. Further, when the value of α2 is negative, it means that the blade edge 37 is widened toward the tip end.

11: 50~120°.

A2: -60~80°

1:11:1~7°

22:10~20°

W1: 0.005~0.1mm

W2: 0.09~0.5mm

W3: 0.03~0.5mm

In the above-described embodiment, the first blade 38a and the second blade 38b are the corners formed by the side surface 37a and the retracting surface 39a on the side of the outward movement, and the angle formed by the side surface 37b and the retracting surface 39b on the moving side. Instead of this, the corner portion formed by the side surface 37a and the retracting surface 39a on the moving side and the corner portion formed by the side surface 37b and the retracting surface 39b on the moving side are directly used as the first blade. 38a and second knife 38b. In this case, there is no angle β1, swing The swing angle of the member can be set to an arbitrary value within a range of about 1 to 7 degrees.

Further, the groove processing tool of the present invention may be used in a fixed posture without swinging the groove processing tool of the present invention. It is economical to use two knives to change the posture of the tool.

37‧‧‧The tip of the knife

37a, 37b‧‧‧ side

38a, 38b‧‧‧ knife

39‧‧‧Retreating Department

39a, 39b‧‧‧ retreating surface

1、1, β2‧‧‧ tilt angle

33‧‧‧ swing angle

Claims (9)

A groove processing tool for a substrate, which is held by a holder in a swingable manner, and is used for groove processing of a film formed on a substrate by reciprocating relative to the holder on a substrate to be processed. And a tool body: the tool body is held by the holder; and the blade tip portion has: a first blade formed at a front end portion of the tool body and formed at a front end of the moving direction on the moving side; 2nd a knife formed on the moving side front end; and a retracting portion formed between the first blade and the second blade and recessed toward the tool body side; and in the outward movement, the first blade abuts The film is moved in an inclined posture on the substrate; when moving in the downward direction, the film is moved in an inclined posture in which the film is abutted on the substrate. The groove processing tool for a substrate according to claim 1, wherein the first blade and the second blade are separated from each other with respect to a reference plane orthogonal to an axis of a longitudinal direction of the tool body. The way the datum is tilted. The groove processing tool for a substrate according to the second aspect of the invention, wherein the retracting portion has a first retracting surface formed on the second blade side of the first blade, and facing the reference surface The second blade side is inclined away from the reference surface; and the second relief surface is formed on the first blade side of the second blade, and is separated from the reference surface toward the first blade side with respect to the reference surface The way is tilted. The groove processing tool for a substrate according to the third aspect of the invention, wherein the angle of inclination of the retracting portion is greater than an inclination angle of the respective blades. The groove processing tool for a substrate according to any one of claims 2 to 4, wherein a length of the relief portion in a direction along the reference surface is longer than a distance between the first blade and the second blade The length is long. The groove processing tool for a substrate according to any one of claims 2 to 4, wherein the tool body is supported by a swinging member supported by the holder in a swingable manner; The inclination angle of the first blade and the second blade is equal to the swing angle of the swinging member. The groove processing tool for a substrate according to any one of claims 1 to 4, wherein the blade tip portion is formed obliquely and symmetrically in such a manner that the width of the blade edge portion becomes narrower toward the front end in the moving direction. Go to the side of the moving side and the side of the moving side. The groove processing tool for a substrate according to any one of claims 1 to 4, wherein a width of the blade tip portion orthogonal to the moving direction is narrower than a width of the tool body in the direction of the tool body. A groove processing apparatus for a substrate for processing a groove on a substrate, comprising: a stage on which a substrate is placed; and a head portion disposed above the stage and having a patent application scope a holder for a groove processing tool according to any one of items 1 to 8, and a driving unit for moving the holder in an up-and-down direction; and a moving mechanism for placing the head on a mounting surface of the stage In the parallel plane, it moves relative to the stage.