TWI573170B - Coating module, coating system and fabricating method of anti-smudge film - Google Patents

Coating module, coating system and fabricating method of anti-smudge film Download PDF

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TWI573170B
TWI573170B TW104118805A TW104118805A TWI573170B TW I573170 B TWI573170 B TW I573170B TW 104118805 A TW104118805 A TW 104118805A TW 104118805 A TW104118805 A TW 104118805A TW I573170 B TWI573170 B TW I573170B
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substrate
coating
fouling
fouling film
film
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TW104118805A
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TW201643935A (en
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徐逸明
劉燕玲
黃智偉
詹明靜
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馗鼎奈米科技股份有限公司
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抗汙膜之鍍膜模組、鍍膜系統及製造方 法 Anti-fouling coating module, coating system and manufacturer law

本發明是有關於一種鍍膜技術,且特別是有關於一種抗汙膜(anti-smudge film,AS)之鍍膜模組、鍍膜系統及製造方法。 The invention relates to a coating technology, and in particular to an anti-smudge film (AS) coating module, a coating system and a manufacturing method.

隨著可攜式電子裝置的普及,對於這類可攜式電子裝置之表面的保護要求也日益提高,以維持其原有之外觀。目前,為了保護這些電子裝置的表面,通常會在電子裝置的表面上塗佈一層薄膜,例如抗指紋膜等抗汙膜。舉例而言,現在相當流行之觸控式電子裝置的觸控螢幕表面通常均設有一層抗指紋膜,以使螢幕表面在歷經使用者的多次碰觸摩擦後,仍可保有良好的顯示品質與操作敏感度。 With the popularity of portable electronic devices, the protection requirements for the surface of such portable electronic devices are also increasing to maintain their original appearance. At present, in order to protect the surface of these electronic devices, a film such as an anti-fouling film such as an anti-finger film is usually coated on the surface of the electronic device. For example, the touch screen surface of a currently popular touch-sensitive electronic device is usually provided with an anti-fingerprint film, so that the surface of the screen can maintain good display quality after repeated rubbing by the user. And operational sensitivity.

一般而言,抗汙膜的表面大都具有良好之抗汙性、可防止指紋沾黏、觸感平滑、可防水排油與透明等特性。此外,抗汙膜對其所覆蓋之裝置的表面需具有高附著力,以延長抗汙膜之使用壽命。 In general, the surface of the anti-fouling film has good anti-staining properties, prevents fingerprints from sticking, smooth touch, and is waterproof, oil-repellent and transparent. In addition, the anti-fouling film needs to have high adhesion to the surface of the device covered by it to prolong the service life of the anti-fouling film.

目前,大都採用真空蒸鍍方式來於基材之表面上形成抗汙膜。此種方式係在真空環境下,於基材之下方加熱抗汙膜塗料,使抗汙膜塗料氣化而上升附著在基材之表面上,進而在基材之表面上覆蓋一層抗汙膜。然而,此種塗布方式一次僅可塗布基材的單一表面,因而不適合用來塗布具複雜結構之基材。此外,在此種塗佈方式中,由於受熱後氣化之抗汙膜塗料具有由下而上的方向性,因此基材對於其上方之另一基材具有遮蔽性,故此塗布方式一次蒸鍍所能處理的基材有限。另一方面,此種加熱蒸鍍製程要求之真空度較高,因此需耗費較多的時間與成本來達到與維持反應所需之真空度。再者,此蒸鍍設備造價昂貴,使得製程成本大幅提高。 At present, vacuum evaporation is mostly used to form an anti-fouling film on the surface of a substrate. In this way, the anti-fouling film coating is heated under the substrate in a vacuum environment, the anti-fouling film coating is vaporized and adhered to the surface of the substrate, and the surface of the substrate is covered with a anti-fouling film. However, such a coating method can only coat a single surface of a substrate at a time, and thus is not suitable for coating a substrate having a complicated structure. In addition, in this coating method, since the anti-fouling film coating which is vaporized after being heated has a bottom-up directional property, the substrate has a shielding property to another substrate above it, so the coating method is once vapor-deposited. The substrates that can be processed are limited. On the other hand, such a heating and evaporation process requires a higher degree of vacuum, so that it takes a lot of time and cost to achieve the vacuum required to maintain the reaction. Moreover, this vapor deposition apparatus is expensive to manufacture, and the process cost is greatly increased.

有另一種抗汙膜之塗布技術,其主要係先以常壓電漿進行基材的表面處理,再於基材之表面上塗布抗汙膜塗料層,然後對基材上之抗汙膜塗料層進行熱處理,以完成抗汙膜之鍍膜作業。此熱處理可將抗汙膜塗料層中之多餘溶劑移除,並藉由熱來使抗汙膜塗料層鍵結、熟成、固化或結晶。 There is another anti-fouling coating technology, which mainly performs surface treatment of the substrate with a normal piezoelectric slurry, and then coats the surface of the substrate with an anti-fouling coating layer, and then applies an anti-fouling coating on the substrate. The layer is heat treated to complete the coating operation of the antifouling film. This heat treatment removes excess solvent from the anti-fouling coating layer and thermally bonds the anti-fouling coating layer to bond, ripen, solidify or crystallize.

雖然此種塗布技術可以取代傳統蒸鍍製程,達到產能提高,並可有效降低成本的目的,但此塗布技術仍需搭配噴塗後以烤箱進行三十分鐘以上的熱烘烤處理。此外,為了要自動化生產,工廠一般會使用隧道式烤箱,長度約十至數十米。因此,這樣的後烘烤處理不僅會嚴重影響整體產 能,造成製程的流暢度下降,且設備占地廣,更耗費大量的能源。 Although this coating technology can replace the traditional evaporation process, the productivity is increased, and the cost can be effectively reduced. However, the coating technology still needs to be combined with the hot baking process in the oven for more than 30 minutes after spraying. In addition, in order to automate production, the factory generally uses a tunnel oven with a length of about ten to several tens of meters. Therefore, such post-baking treatment will not only seriously affect the overall production. It can cause a gradual decrease in the process, and the equipment occupies a large area and consumes a lot of energy.

因此,本發明之一目的就是在提供一種抗汙膜之鍍膜模組、鍍膜系統及製造方法,其先對基材之表面進行電漿前處理,以提供基材表面能量並於基材表面上形成空懸鍵(dangling bond)及/或活性官能基,而後隨即形成抗汙膜塗料霧氣或氣體分子沉積於基材之表面上。如此一來,抗汙膜塗料霧氣或氣體分子可在基材表面仍保有足夠能量時,與基材表面之空懸鍵或活性官能基鍵結,而在基材表面上順利形成抗汙膜。故,可省略抗汙膜塗料沉積於基材表面後的後烘烤步驟。 Therefore, an object of the present invention is to provide a coating module, a coating system and a manufacturing method for the anti-fouling film, which firstly perform plasma pretreatment on the surface of the substrate to provide surface energy of the substrate and on the surface of the substrate. A dangling bond and/or a reactive functional group is formed, and then an anti-fouling film coating mist or gas molecules are deposited on the surface of the substrate. In this way, the anti-fouling film coating mist or gas molecules can bond with the dangling bonds or reactive functional groups on the surface of the substrate while maintaining sufficient energy on the surface of the substrate, and the anti-fouling film is smoothly formed on the surface of the substrate. Therefore, the post-baking step after the anti-fouling film coating is deposited on the surface of the substrate can be omitted.

本發明之另一目的是在提供一種抗汙膜之鍍膜模組、鍍膜系統及製造方法,可省略抗汙膜塗料沉積於基材表面後的後烘烤步驟,因此可縮小設備占地空間,節約能源,縮減製程時間,進而可降低製程成本與提升產能。 Another object of the present invention is to provide a coating module, a coating system and a manufacturing method for the anti-fouling film, which can omit the post-baking step after the anti-fouling film coating is deposited on the surface of the substrate, thereby reducing the space occupied by the device. Save energy and reduce process time, which in turn can reduce process costs and increase production capacity.

根據本發明之上述目的,提出一種抗汙膜之鍍膜模組,適用以在基材之表面上形成抗汙膜。抗汙膜之鍍膜模組包含至少一大氣式電漿裝置以及至少一噴霧元件。此大氣式電漿裝置適用以對基材之表面進行電漿前處理,以提供基材之表面一能量以及在基材之表面上形成複數個空懸鍵或複數個活性官能基(如-OH)。此噴霧元件適用以將抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗 汙膜塗料氣體分子,而沉積在經電漿前處理後之基材之表面上,並藉由電漿對基板處理時提供的能量與空懸鍵或活性官能基鍵結而在基材之表面上形成抗汙膜。大氣式電漿裝置之噴口與噴霧元件之噴口之間的距離小於20公分。 In accordance with the above objects of the present invention, a coating module for an anti-fouling film is proposed which is suitable for forming an anti-fouling film on the surface of a substrate. The anti-fouling coating module comprises at least one atmospheric plasma device and at least one spray element. The atmospheric plasma device is adapted to perform a plasma pretreatment on the surface of the substrate to provide a surface energy of the substrate and to form a plurality of free bonds or a plurality of reactive functional groups (such as -OH) on the surface of the substrate. ). The spray element is suitable for atomizing the anti-fouling coating solution into a plurality of anti-fouling coating materials or vaporizing into a plurality of anti-fouling coatings The film coating gas molecules are deposited on the surface of the pretreated plasma substrate, and the energy provided by the plasma treatment of the substrate is bonded to the dangling bonds or reactive functional groups on the surface of the substrate. An anti-fouling film is formed on the surface. The distance between the nozzle of the atmospheric plasma device and the orifice of the spray element is less than 20 cm.

依據本發明之一實施例,上述之抗汙膜之鍍膜模組更包含至少一承載治具,其中大氣式電漿裝置與噴霧元件裝設於此承載治具。 According to an embodiment of the invention, the anti-fouling film coating module further comprises at least one bearing fixture, wherein the atmospheric plasma device and the spray element are mounted on the bearing fixture.

根據本發明之上述目的,另提出一種抗汙膜之鍍膜系統,適用以在基材之表面上形成抗汙膜。此抗汙膜之鍍膜系統包含至少一鍍膜模組以及一移載系統。鍍膜模組包含至少一大氣式電漿裝置以及至少一噴霧元件。大氣式電漿裝置適用以對基材之表面進行電漿前處理,以提供基材之表面一能量以及在基材之表面上形成複數個空懸鍵或複數個活性官能基。噴霧元件適用以將抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗汙膜塗料氣體分子,而沉積在經電漿前處理後之基材之表面上,並藉由基材之表面上的能量與空懸鍵或活性官能基鍵結而在基材之表面上形成抗汙膜。大氣式電漿裝置之噴口與噴霧元件之噴口之間的距離小於20公分。移載系統適用以移動基材通過鍍膜模組下方。 According to the above object of the present invention, there is further provided a coating system for an anti-fouling film which is suitable for forming an anti-fouling film on the surface of a substrate. The anti-fouling film coating system comprises at least one coating module and a transfer system. The coating module comprises at least one atmospheric plasma device and at least one spray element. An atmospheric plasma device is suitable for plasma pretreatment of the surface of the substrate to provide surface energy to the substrate and to form a plurality of free bonds or a plurality of reactive functional groups on the surface of the substrate. The spray element is adapted to atomize the anti-fouling coating solution into a plurality of anti-fouling coating materials or vaporize into a plurality of anti-fouling coating gas molecules, and deposit them on the surface of the pre-treated plasma substrate, and The energy on the surface of the substrate is bonded to the dangling bonds or reactive functional groups to form an anti-fouling film on the surface of the substrate. The distance between the nozzle of the atmospheric plasma device and the orifice of the spray element is less than 20 cm. The transfer system is adapted to move the substrate through the underside of the coating module.

依據本發明之一實施例,上述之鍍膜模組更包含至少一承載治具,且大氣式電漿裝置與噴霧元件裝設於此承載治具。 According to an embodiment of the invention, the coating module further comprises at least one bearing fixture, and the atmospheric plasma device and the spray element are mounted on the bearing fixture.

依據本發明之另一實施例,上述抗汙膜之鍍膜系統更包含一滑動機構,其中鍍膜模組裝設於此滑動機構,且此滑動機構適用以帶動鍍膜模組該基材之表面之上方滑動。 According to another embodiment of the present invention, the anti-fouling film coating system further comprises a sliding mechanism, wherein the coating die is assembled on the sliding mechanism, and the sliding mechanism is adapted to drive the coating module above the surface of the substrate slide.

依據本發明之又一實施例,上述抗汙膜之鍍膜系統更包含一預熱系統,適用以在電漿前處理前,對基材進行預熱處理。 According to still another embodiment of the present invention, the anti-fouling film coating system further comprises a preheating system adapted to preheat the substrate prior to the pretreatment of the plasma.

依據本發明之再一實施例,上述抗汙膜之鍍膜系統更包含一上料(loading)系統以及一下料(unloading)系統。上料系統適用以將基材載於移載系統上。下料系統適用以將基材移出移載系統。 According to still another embodiment of the present invention, the anti-fouling film coating system further includes a loading system and an unloading system. The loading system is adapted to carry the substrate on the transfer system. The blanking system is adapted to move the substrate out of the transfer system.

根據本發明之上述目的,更提出一種抗汙膜之製造方法。在此抗汙膜之製造方法中,設置至少一鍍膜模組,其中此鍍膜模組包含至少一大氣式電漿裝置以及至少一噴霧元件。利用大氣式電漿裝置對基材之表面進行電漿前處理,以提供基材之表面一能量以及在基材之表面上形成複數個空懸鍵或複數個活性官能基。利用噴霧元件將一抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗汙膜塗料氣體分子,而沉積在經電漿前處理後之基材之表面上,其中電漿前處理與將抗汙膜塗料溶液霧化成抗汙膜塗料霧氣或氣化成抗汙膜塗料氣體分子之步驟之間之一時間間隔小於或等於30秒。抗汙膜塗料霧氣或抗汙膜塗料氣體分子利用基材之表面的能量與空懸鍵或活性官能基反應鍵結,而在基材之表面上形成抗汙膜。 According to the above object of the present invention, a method of producing an anti-fouling film is further proposed. In the method for manufacturing an antifouling film, at least one coating module is disposed, wherein the coating module comprises at least one atmospheric plasma device and at least one spray element. The surface of the substrate is subjected to a plasma pretreatment using an atmospheric plasma device to provide surface energy to the substrate and to form a plurality of free bonds or a plurality of reactive functional groups on the surface of the substrate. Using a spray element to atomize an anti-fouling coating solution into a plurality of anti-fouling coating materials or vaporize into a plurality of anti-fouling coating gas molecules, and deposit them on the surface of the pre-plasma substrate, wherein the plasma The time interval between the pretreatment and the step of atomizing the antifouling coating solution into a mist of the antifouling coating or vaporizing into the gas molecules of the antifouling coating is less than or equal to 30 seconds. Anti-fouling film coating mist or anti-fouling coating gas molecules utilize the energy of the surface of the substrate to bond with the dangling bonds or reactive functional groups to form an anti-fouling film on the surface of the substrate.

依據本發明之一實施例,上述之大氣式電漿裝置之噴口與噴霧元件之噴口之間的距離小於20公分。 According to an embodiment of the invention, the distance between the spout of the atmospheric plasma device and the spout of the spray element is less than 20 cm.

依據本發明之另一實施例,於電漿前處理前,上述抗汙膜之製造方法更包含利用一預熱系統對基材進行一預熱處理。 According to another embodiment of the present invention, before the pretreatment of the plasma, the method for manufacturing the antifouling film further comprises preheating the substrate by using a preheating system.

100‧‧‧鍍膜模組 100‧‧‧ coating module

102‧‧‧基材 102‧‧‧Substrate

104‧‧‧表面 104‧‧‧ Surface

106‧‧‧大氣式電漿裝置 106‧‧‧ Atmospheric plasma device

108‧‧‧噴霧元件 108‧‧‧Spray components

110‧‧‧噴口 110‧‧‧ spout

112‧‧‧噴口 112‧‧‧ spout

114‧‧‧距離 114‧‧‧ distance

116‧‧‧移載系統 116‧‧‧Transport system

118‧‧‧承載治具 118‧‧‧bearing fixture

120‧‧‧移動方向 120‧‧‧ moving direction

200‧‧‧鍍膜系統 200‧‧‧ coating system

202‧‧‧基材 202‧‧‧Substrate

204‧‧‧表面 204‧‧‧ surface

206‧‧‧鍍膜模組 206‧‧‧ coating module

208‧‧‧移載系統 208‧‧‧Transfer system

210‧‧‧大氣式電漿裝置 210‧‧‧ Atmospheric plasma device

212‧‧‧噴霧元件 212‧‧‧Spray components

214‧‧‧噴口 214‧‧‧ spout

216‧‧‧噴口 216‧‧‧ spout

218‧‧‧距離 218‧‧‧ distance

220‧‧‧輸送帶 220‧‧‧ conveyor belt

222‧‧‧滾輪 222‧‧‧Roller

224‧‧‧滑動機構 224‧‧‧Sliding mechanism

226‧‧‧滑動機構 226‧‧‧Sliding mechanism

228‧‧‧治具 228‧‧‧ fixture

230‧‧‧治具 230‧‧‧ fixture

232‧‧‧移動方向 232‧‧‧ moving direction

234‧‧‧預熱系統 234‧‧‧Preheating system

236‧‧‧上料系統 236‧‧‧ loading system

238‧‧‧下料系統 238‧‧‧Unloading system

300‧‧‧步驟 300‧‧‧Steps

302‧‧‧步驟 302‧‧‧Steps

304‧‧‧步驟 304‧‧‧Steps

306‧‧‧步驟 306‧‧‧Steps

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下:〔圖1〕係繪示依照本發明之一實施方式的一種抗汙膜之鍍膜模組的裝置示意圖;〔圖2〕係繪示依照本發明之一實施方式的一種抗汙膜之鍍膜系統的裝置示意圖;以及〔圖3〕係繪示依照本發明之一實施方式的一種抗汙膜之製造方法的流程圖。 The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; FIG. 2 is a schematic view showing a device of a coating system for an anti-fouling film according to an embodiment of the present invention; and FIG. 3 is a view showing an embodiment of the present invention. A flow chart of a method of manufacturing an antifouling film.

有鑑於習知抗汙膜之製造技術於抗汙膜塗料層塗布於基材之表面上後,需對基材上之抗汙膜塗料層再進行熱處理,藉以使抗汙膜鍵結、熟成、固化或結晶。然而,多了這道熱處理會影響整體產能,降低製程的流暢度,增加設備所占之空間,也會耗費大量的能源。因此,本發明在此提出一種抗汙膜之鍍膜模組、鍍膜系統及製造方法,其藉由先 對基材之表面進行電漿前處理,來提供基材表面能量並於基材表面上形成空懸鍵或活性官能基,再於基板表面之能量未消失前,沉積抗汙膜塗料霧氣或氣體分子。藉此,抗汙膜塗料霧氣或氣體分子可利用基材表面之能量與基材上之空懸鍵或活性官能基反應鍵結,順利成長出抗汙膜。因此,本發明實施例的運用,可省略抗汙膜塗料沉積於基材表面後的後烘烤步驟,並可省掉後烘烤設備,而可縮小設備占地空間,節約能源,縮減製程時間,進而可降低製程成本、及提升產能。 In view of the conventional anti-fouling film manufacturing technology, after the anti-fouling film coating layer is coated on the surface of the substrate, the anti-fouling film coating layer on the substrate is further heat-treated, so that the anti-fouling film is bonded and matured. Cured or crystallized. However, this heat treatment will affect the overall production capacity, reduce the fluency of the process, increase the space occupied by the equipment, and consume a lot of energy. Therefore, the present invention proposes an anti-fouling film coating module, a coating system and a manufacturing method thereof, The surface of the substrate is subjected to a plasma pretreatment to provide surface energy of the substrate and form a dangling bond or a reactive functional group on the surface of the substrate, and then deposit a fog or gas of the antifouling film coating before the energy on the surface of the substrate does not disappear. molecule. Thereby, the anti-fouling film coating mist or gas molecules can use the energy of the surface of the substrate to react with the anchor or active functional groups on the substrate to smoothly grow the anti-fouling film. Therefore, the application of the embodiment of the present invention can omit the post-baking step after the anti-fouling film coating is deposited on the surface of the substrate, and can save the post-baking equipment, thereby reducing the space occupied by the device, saving energy, and reducing the processing time. In turn, it can reduce process costs and increase production capacity.

請參照圖1,其係繪示依照本發明之一實施方式的一種抗汙膜之鍍膜模組的裝置示意圖。在本實施方式中,抗汙膜之鍍膜模組100可適用以在基材102之表面104上形成抗汙膜。在一些例子中,鍍膜模組100主要包含至少一大氣式電漿裝置106與至少一噴霧元件108。如圖1所示,鍍膜模組100包含一個大氣式電漿裝置106、與一個與此大氣式電漿裝置106對應之噴霧元件108。在另一些示範例子中,鍍膜模組100包含多個大氣式電漿裝置106、以及分別與這些大氣式電漿裝置106對應之多個噴霧元件108。在基材102之鍍膜作業中,大氣式電漿裝置106係設置在對應之噴霧元件108的前端,以在噴霧元件108之前,先對基材102進行處理。 Please refer to FIG. 1 , which is a schematic diagram of an apparatus for coating a membrane module according to an embodiment of the present invention. In the present embodiment, the anti-fouling film coating module 100 can be applied to form an anti-fouling film on the surface 104 of the substrate 102. In some examples, the coating module 100 primarily includes at least one atmospheric plasma device 106 and at least one spray element 108. As shown in FIG. 1, the coating module 100 includes an atmospheric plasma device 106 and a spray element 108 corresponding to the atmospheric plasma device 106. In other exemplary embodiments, the coating module 100 includes a plurality of atmospheric plasma devices 106, and a plurality of spray elements 108 corresponding to the atmospheric plasma devices 106, respectively. In the coating operation of the substrate 102, the atmospheric plasma device 106 is disposed at the front end of the corresponding spray element 108 to treat the substrate 102 prior to the spray element 108.

大氣式電漿裝置106可適用以對基材102之表面104進行電漿前處理,藉以在鍍膜前先利用電漿來對基材102之欲鍍膜的表面104進行表面處理。大氣式電漿裝置 106所進行之電漿前處理將基材102之表面104上的微量油汙或髒汙去除。此外,大氣式電漿裝置106所進行之電漿前處理可提供基材102之表面104能量,例如熱能及/或位能。而且,大氣式電漿裝置106所進行之電漿前處理可對基材102之表面104進行表面改質處理,以活化此表面104,藉此在基材102之表面104上形成許多的空懸鍵,或活性官能基,例如羥基(-OH)。在一些示範例子中,大氣式電漿裝置106包含陣列噴射式電漿源、旋轉噴射式電漿源、絕緣障蔽式放電(dielectric barrier discharge,DBD)電漿源或高週波(RF)電漿源。 The atmospheric plasma device 106 can be adapted to pre-treat the surface 104 of the substrate 102 by surface treatment of the surface 104 of the substrate 102 to be coated with a plasma prior to coating. Atmospheric plasma device The plasma pretreatment performed by 106 removes traces of oil or dirt from the surface 104 of the substrate 102. In addition, the plasma pretreatment performed by the atmospheric plasma device 106 can provide surface 104 energy, such as thermal energy and/or potential energy, of the substrate 102. Moreover, the plasma pretreatment performed by the atmospheric plasma device 106 can surface modify the surface 104 of the substrate 102 to activate the surface 104, thereby forming a plurality of voids on the surface 104 of the substrate 102. A bond, or a reactive functional group, such as a hydroxyl group (-OH). In some exemplary examples, the atmospheric plasma device 106 includes an array jet plasma source, a rotary jet plasma source, a dielectric barrier discharge (DBD) plasma source, or a high frequency (RF) plasma source. .

噴霧元件108設於大氣式電漿裝置106之後方,可用以將抗汙膜塗料溶液霧化成許多抗汙膜塗料霧氣或氣化成許多的抗汙膜塗料氣體分子。這些抗汙膜塗料霧氣或抗汙膜塗料氣體分子可朝基材102之表面104飄落,而沉積在經電漿前處理後之基材102的表面104上。在一些示範例子中,抗汙膜塗料之材料可包含氟碳矽烴類化合物、全氟碳矽烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、或全氟矽烷烴醚類化合物。 The spray element 108 is disposed behind the atmospheric plasma device 106 and can be used to atomize the anti-fouling film coating solution into a plurality of anti-fouling film coating mists or to vaporize into a plurality of anti-fouling film coating gas molecules. These anti-fouling film coating mist or anti-fouling coating gas molecules can fall toward the surface 104 of the substrate 102 and deposit on the surface 104 of the plasma-treated substrate 102. In some exemplary embodiments, the antifouling coating material may comprise a fluorocarbon hydrocarbon compound, a perfluorocarbon hydrocarbon compound, a fluorocarbon hydride hydrocarbon compound, a perfluoro decane hydrocarbon compound, or a perfluoro decane hydrocarbon ether. Compound.

在本實施方式中,大氣式電漿裝置106之噴口110與噴霧元件108之噴口112之間的距離114小於20公分。藉由將鍍膜模組100之大氣式電漿裝置106與噴霧元件108鄰接設置,且設計使大氣式電漿裝置106之噴口110與噴霧元件108之噴口112之間的距離114小於20公分,可使得抗汙膜塗料霧氣或抗汙膜塗料氣體分子沉積在基材102 之表面104上時,基材102之表面104上仍保有足夠之能量,而使得沉積在基材102之表面104上的抗汙膜塗料霧氣或抗汙膜塗料氣體分子可利用留在基材102之表面104上的能量來與表面104上之空懸鍵快速發生縮合反應而形成鍵結,或與表面104上的活性官能基反應鍵結,進而順利在基材102之表面104上形成抗汙膜。 In the present embodiment, the distance 114 between the spout 110 of the atmospheric plasma device 106 and the spout 112 of the spray element 108 is less than 20 cm. By setting the atmospheric plasma device 106 of the coating module 100 adjacent to the spray element 108, and designing the distance 114 between the nozzle 110 of the atmospheric plasma device 106 and the nozzle 112 of the spray element 108 to be less than 20 cm, The anti-fouling film coating mist or anti-fouling coating gas molecules are deposited on the substrate 102 On the surface 104, sufficient energy is retained on the surface 104 of the substrate 102 such that the anti-fouling film coating mist or anti-fouling coating gas molecules deposited on the surface 104 of the substrate 102 can be retained on the substrate 102. The energy on the surface 104 reacts rapidly with the vacant bonds on the surface 104 to form a bond or react with the reactive functional groups on the surface 104 to form a stain-resistant finish on the surface 104 of the substrate 102. membrane.

舉例而言,當基材102為玻璃時,玻璃之表面一般含有一層水膜及吸附在水膜上之汙染物,例如有機汙染物。利用大氣式電漿裝置106對玻璃表面進行電漿前處理時,不僅可去除玻璃表面上的有機汙染物,電漿多餘的能量也會移除吸附在玻璃表面上的水膜,而留下玻璃表面上的空懸鍵及活性官能基,例如矽氧烷鍵(Si-O-Si鍵)及矽醇鍵(Si-OH鍵,silanol bonding)。在一些特定例子中,當電漿能量夠高時,甚至也會移除玻璃表面上之矽醇鍵。 For example, when the substrate 102 is glass, the surface of the glass generally contains a water film and contaminants adsorbed on the water film, such as organic contaminants. When the surface of the glass is pretreated by the atmospheric plasma device 106, not only the organic pollutants on the surface of the glass can be removed, but the excess energy of the plasma also removes the water film adsorbed on the surface of the glass, leaving the glass. An empty dangling bond on the surface and a reactive functional group such as a siloxane chain (Si-O-Si bond) and a silane bond (Si-OH bond). In some specific examples, the sterol bond on the surface of the glass is even removed when the plasma energy is high enough.

由於乾淨的玻璃在空氣中很快就會再形成水膜,因此當表面含有水膜的玻璃欲進行抗汙膜的鍍膜製程時,要使抗汙塗料的分子與玻璃產生鍵結需先將介於抗汙塗料的分子與玻璃之間的水膜移除。因此,習知技術均需將噴塗有抗汙膜塗料的玻璃放到烤箱烘烤,方能使抗汙塗料分子順利在玻璃表面上鍵結。本實施方式利用控制鍍膜模組100之大氣式電漿裝置106之噴口110與噴霧元件108之噴口112之間的距離114,使得玻璃等基材可在電漿前處理後,玻璃吸附水膜前,且電漿提供予玻璃表面之能量尚存前,即使抗汙塗料分子與玻璃表面接觸。藉此設計,抗汙塗料分子 與玻璃便可利用留存在玻璃表面上的能量,在室溫環境下快速發生縮合反應而形成鍵結,進而順利在玻璃表面上鍍覆一層抗汙膜。 Since the clean glass will quickly form a water film in the air, when the glass containing the water film on the surface is to be subjected to the coating process of the anti-fouling film, it is necessary to first bond the molecules of the anti-fouling paint to the glass. The water film between the molecules of the antifouling coating and the glass is removed. Therefore, the prior art requires that the glass coated with the anti-fouling coating material be baked in the oven to enable the anti-fouling coating molecules to bond smoothly on the glass surface. In this embodiment, the distance 114 between the nozzle 110 of the atmospheric plasma device 106 of the coating module 100 and the nozzle 112 of the spray element 108 is controlled, so that the substrate such as glass can be pre-treated by the plasma, and the glass is adsorbed before the water film. And before the energy provided by the plasma to the glass surface remains, even if the antifouling coating molecules are in contact with the glass surface. Designed with antifouling coating molecules With the glass, the energy remaining on the surface of the glass can be utilized to rapidly form a bond at room temperature to form a bond, thereby smoothly plating a layer of anti-fouling film on the surface of the glass.

如圖1所示,基材102可為移載系統116所傳送,而依序通過大氣式電漿裝置106與噴霧元件108之下方。此外,在一些例子中,如圖1所示,鍍膜模組100更可選擇性地包含至少一承載治具118,且大氣式電漿裝置106與噴霧元件108均裝設在此承載治具118。藉由承載治具118,可將大氣式電漿裝置106與噴霧元件108整合成一組件,如此有利於控制與維持大氣式電漿裝置106之噴口110與噴霧元件108之噴口112之間的距離114,且可降低移動大氣式電漿裝置106之噴口110與噴霧元件108時的困難度。當然,在另一些例子中,鍍膜模組100可不具有結合大氣式電漿裝置106與噴霧元件108之承載治具,且大氣式電漿裝置106與噴霧元件108為彼此分開設置。 As shown in FIG. 1, the substrate 102 can be transported by the transfer system 116 and sequentially passed under the atmospheric plasma device 106 and the spray element 108. In addition, in some examples, as shown in FIG. 1 , the coating module 100 further selectively includes at least one bearing fixture 118 , and the atmospheric plasma device 106 and the spray element 108 are disposed on the bearing fixture 118 . . By carrying the jig 118, the atmospheric plasma device 106 and the spray element 108 can be integrated into a single assembly, which facilitates control and maintenance of the distance 114 between the spout 110 of the atmospheric plasma device 106 and the spout 112 of the spray element 108. Moreover, the difficulty in moving the nozzle 110 of the atmospheric plasma device 106 and the spray element 108 can be reduced. Of course, in other examples, the coating module 100 may not have a carrier fixture that incorporates the atmospheric plasma device 106 and the spray element 108, and the atmospheric plasma device 106 and the spray element 108 are disposed separately from one another.

在一些例子中,如圖1所示,鍍膜模組100可僅包含一大氣式電漿裝置106與一噴霧元件108。鍍膜模組100之大氣式電漿裝置106與噴霧元件108可設置在一滑動機構(未繪示)上。如此一來,可利用滑動機構來帶動大氣式電漿裝置106與噴霧元件108在基材102之表面104的上方順著基材102之橫向(垂直於移載系統116之移動方向120)來回移動。 In some examples, as shown in FIG. 1, the coating module 100 can include only an atmospheric plasma device 106 and a spray element 108. The atmospheric plasma device 106 and the spray element 108 of the coating module 100 can be disposed on a sliding mechanism (not shown). In this manner, the sliding mechanism can be used to drive the atmospheric plasma device 106 and the spray element 108 to move back and forth along the surface 104 of the substrate 102 along the lateral direction of the substrate 102 (perpendicular to the moving direction 120 of the transfer system 116). .

在另一些例子中,鍍膜模組100可包含多個大氣式電漿裝置106及多個分別與這些大氣式電漿裝置106對 應之噴霧元件108,其中大氣式電漿裝置106設置在對應之噴霧元件108前方。這些大氣式電漿裝置106及噴霧元件108可沿著垂直於移載系統116之移動方向120之基材102的橫向延伸或排列。藉此,鍍膜模組100可同時對基材102之表面104中的一橫向範圍進行鍍膜作業。 In other examples, the coating module 100 can include a plurality of atmospheric plasma devices 106 and a plurality of pairs of the atmospheric plasma devices 106, respectively. The spray element 108 should be disposed with the atmospheric plasma device 106 disposed in front of the corresponding spray element 108. These atmospheric plasma devices 106 and spray elements 108 can extend or align in a lateral direction of the substrate 102 that is perpendicular to the direction of movement 120 of the transfer system 116. Thereby, the coating module 100 can simultaneously perform a coating operation on a lateral extent of the surface 104 of the substrate 102.

請參照圖2,其係繪示依照本發明之一實施方式的一種抗汙膜之鍍膜系統的裝置示意圖。在本實施方式中,抗汙膜之鍍膜系統200可適用以在基材202之表面204上形成抗汙膜。在一些例子中,鍍膜系統200主要包含至少一鍍膜模組206以及移載系統208。在一些例子中,鍍膜系統200可包含多個鍍膜模組206。這些鍍膜模組206可沿著垂直於移載系統208之移動方向232之基材202的橫向延伸或排列。藉此,鍍膜系統200可同時對基材202之表面204中的一橫向範圍進行鍍膜作業。 Please refer to FIG. 2 , which is a schematic diagram of an apparatus for coating a stain-resistant film according to an embodiment of the present invention. In the present embodiment, the anti-fouling film coating system 200 can be adapted to form an anti-fouling film on the surface 204 of the substrate 202. In some examples, coating system 200 primarily includes at least one coating module 206 and a transfer system 208. In some examples, coating system 200 can include a plurality of coating modules 206. These coating modules 206 can extend or align in a lateral direction of the substrate 202 that is perpendicular to the direction of movement 232 of the transfer system 208. Thereby, the coating system 200 can simultaneously perform a coating operation on a lateral extent of the surface 204 of the substrate 202.

在鍍膜系統200包含一個鍍膜模組206的例子中,每個鍍膜模組206包含至少一大氣式電漿裝置210與至少一噴霧元件212。如圖2所示,鍍膜模組206包含一個大氣式電漿裝置210、與一個噴霧元件212與此大氣式電漿裝置210對應。在另一些示範例子中,鍍膜模組206包含多個大氣式電漿裝置210、以及多個噴霧元件212分別與這些大氣式電漿裝置210對應。在這樣的示範例子中,這些大氣式電漿裝置210及噴霧元件212可沿著垂直於移載系統208之移動方向232之基材202的橫向延伸或排列。藉此,鍍膜系統 200可同時對基材202之表面204中的一橫向範圍進行鍍膜作業。 In the example where the coating system 200 includes a coating module 206, each coating module 206 includes at least one atmospheric plasma device 210 and at least one spray element 212. As shown in FIG. 2, the coating module 206 includes an atmospheric plasma device 210, and a spray element 212 corresponding to the atmospheric plasma device 210. In other exemplary embodiments, the coating module 206 includes a plurality of atmospheric plasma devices 210, and a plurality of spray elements 212 corresponding to the atmospheric plasma devices 210, respectively. In such an exemplary embodiment, the atmospheric plasma devices 210 and spray elements 212 can extend or align in a lateral direction of the substrate 202 that is perpendicular to the direction of movement 232 of the transfer system 208. Thereby, the coating system 200 can simultaneously perform a coating operation on a lateral extent in the surface 204 of the substrate 202.

在鍍膜系統200包含多個鍍膜模組206的例子中,每個鍍膜模組206可僅包含一個大氣式電漿裝置210與一個噴霧元件212。在基材202之鍍膜作業中,大氣式電漿裝置210係設置在對應之噴霧元件212的上游,以在噴霧元件212之前,先對基材202進行處理。 In the example where the coating system 200 includes a plurality of coating modules 206, each coating module 206 can include only one atmospheric plasma device 210 and one spray element 212. In the coating operation of the substrate 202, the atmospheric plasma device 210 is disposed upstream of the corresponding spray element 212 to process the substrate 202 prior to the spray element 212.

大氣式電漿裝置210可用以對基材202之表面204進行電漿前處理,藉以在鍍膜前先利用電漿來對基材202之欲鍍膜的表面204進行表面處理。大氣式電漿裝置210所進行之電漿前處理不僅可去除基材202之表面204上的微量油汙或髒汙,更可提供基材202之表面204能量,例如熱能及/或位能。而且,大氣式電漿裝置210所進行之電漿前處理可對基材202之表面204進行表面改質處理,而可活化此表面204,藉此在基材202之表面204上形成許多的空懸鍵或活性官能基,例如羥基。在一些示範例子中,大氣式電漿裝置210包含陣列噴射式電漿源、旋轉噴射式電漿源、絕緣障蔽式放電電漿源或高週波電漿源。 The atmospheric plasma device 210 can be used to pre-treat the surface 204 of the substrate 202 by using a plasma to surface-treat the surface 204 of the substrate 202 to be coated prior to coating. The plasma pretreatment performed by the atmospheric plasma device 210 not only removes traces of oil or dirt on the surface 204 of the substrate 202, but also provides surface 204 energy, such as thermal energy and/or potential energy, of the substrate 202. Moreover, the plasma pretreatment performed by the atmospheric plasma device 210 can surface modify the surface 204 of the substrate 202 to activate the surface 204, thereby forming a plurality of voids on the surface 204 of the substrate 202. A dangling bond or a reactive functional group, such as a hydroxyl group. In some exemplary examples, the atmospheric plasma device 210 includes an array jet plasma source, a rotary jet plasma source, an insulated barrier discharge plasma source, or a high frequency plasma source.

噴霧元件212設於大氣式電漿裝置210之下游,可用以將抗汙膜塗料溶液霧化成許多抗汙膜塗料霧氣或氣化成許多的抗汙膜塗料氣體分子。這些抗汙膜塗料霧氣或抗汙膜塗料氣體分子可向下方之基材202飄落,而沉積在經電漿前處理後之基材202的表面204上。在一些示範例子中,抗汙膜塗料之材料可包含氟碳矽烴類化合物、全氟碳矽 烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、或全氟矽烷烴醚類化合物。 The spray element 212 is disposed downstream of the atmospheric plasma device 210 and can be used to atomize the anti-fouling film coating solution into a plurality of anti-fouling film coating mists or to vaporize into a plurality of anti-fouling film coating gas molecules. These anti-fouling film coating mist or anti-fouling coating gas molecules can fall below the substrate 202 and deposit on the surface 204 of the plasma-treated substrate 202. In some exemplary examples, the antifouling coating material may comprise a fluorocarbon hydrocarbon compound, a perfluorocarbon A hydrocarbon compound, a fluorocarbon hydride hydrocarbon compound, a perfluoro decane hydrocarbon compound, or a perfluoro decane hydrocarbon compound.

在本實施方式中,大氣式電漿裝置210之噴口214與噴霧元件212之噴口216之間的距離218小於20公分。藉由將大氣式電漿裝置210之噴口214與噴霧元件212之噴口216之間的距離218設置成小於20公分,可使得抗汙膜塗料霧氣或抗汙膜塗料氣體分子沉積在基材202之表面204上時,基材202之表面204上仍保有足夠之能量,而使得沉積在基材202之表面204上的抗汙膜塗料霧氣或抗汙膜塗料氣體分子可利用留在基材202之表面204上的能量來與表面204上之空懸鍵快速發生縮合反應而形成鍵結,或與表面204上之活性官能基反應鍵結,進而順利在基材202之表面204上形成抗汙膜。因此,鍍膜系統200並未包含任何烘烤裝置設置於噴霧元件212之下游來對基材202之表面204上的抗汙膜塗料霧氣或抗汙膜塗料氣體分子進行烘烤。故,運用鍍膜系統200來製作抗汙膜時,於噴霧元件212形成抗汙膜塗料霧氣或抗汙膜塗料氣體分子於基材202之表面204上後,即可在基材202之表面204上形成抗汙膜,無需再利用烤箱等烘烤裝置來對基材202上之抗汙膜塗料霧氣或抗汙膜塗料氣體分子進行烘烤處理。 In the present embodiment, the distance 218 between the spout 214 of the atmospheric plasma device 210 and the spout 216 of the spray element 212 is less than 20 cm. By setting the distance 218 between the nozzle 214 of the atmospheric plasma device 210 and the nozzle 216 of the spray element 212 to less than 20 cm, anti-fouling film coating mist or anti-fouling coating gas molecules can be deposited on the substrate 202. On the surface 204, sufficient energy is retained on the surface 204 of the substrate 202 such that the anti-fouling film coating mist or anti-fouling coating gas molecules deposited on the surface 204 of the substrate 202 can be utilized in the substrate 202. The energy on the surface 204 rapidly condenses with the vacant bonds on the surface 204 to form a bond, or reacts with the reactive functional groups on the surface 204 to form an anti-fouling film on the surface 204 of the substrate 202. . Thus, coating system 200 does not include any bake means disposed downstream of spray element 212 to bake antifouling coating mist or antifouling coating gas molecules on surface 204 of substrate 202. Therefore, when the anti-fouling film is formed by using the coating system 200, after the anti-fouling paint mist or anti-fouling coating gas molecules are formed on the surface 204 of the substrate 202 on the spray element 212, the surface 204 of the substrate 202 can be formed. The anti-fouling film is formed, and it is no longer necessary to use a baking device such as an oven to bake the anti-fouling film coating mist or the anti-fouling film coating gas molecules on the substrate 202.

在一些例子中,如圖2所示,鍍膜模組206之大氣式電漿裝置210與噴霧元件212為彼此分開設置。在這樣的例子中,對於每個鍍膜模組206,鍍膜系統200可選擇性地包含二滑動機構224與226,且大氣式電漿裝置210及噴 霧元件212分別與此二滑動機構224及226連結。舉例而言,大氣式電漿裝置210及噴霧元件212可分別透過治具228及230,而裝設於滑動機構224及226下。滑動機構224及226可用以分別帶動大氣式電漿裝置210及噴霧元件212,使大氣式電漿裝置210及噴霧元件212在基材202之表面204的上方順著基材202之橫向(垂直於移載系統208之移動方向232)來回滑動。 In some examples, as shown in FIG. 2, the atmospheric plasma device 210 and the spray element 212 of the coating module 206 are disposed separately from one another. In such an example, for each coating module 206, the coating system 200 can optionally include two sliding mechanisms 224 and 226, and the atmospheric plasma device 210 and spray The fog element 212 is coupled to the two sliding mechanisms 224 and 226, respectively. For example, the atmospheric plasma device 210 and the spray element 212 can be installed under the sliding mechanisms 224 and 226 through the jigs 228 and 230, respectively. The sliding mechanisms 224 and 226 can be used to respectively drive the atmospheric plasma device 210 and the spray element 212 such that the atmospheric plasma device 210 and the spray element 212 are along the surface 204 of the substrate 202 along the lateral direction of the substrate 202 (perpendicular to The moving direction 232 of the transfer system 208 slides back and forth.

在另一些例子中,鍍膜模組206可如同圖1之鍍膜模組100般包含至少一承載治具,且大氣式電漿裝置210與噴霧元件212均裝設在此承載治具。在這樣的例子中,對於每個鍍膜模組206,鍍膜系統200可選擇性地包含一滑動機構,且鍍膜模組206裝設於此滑動機構。滑動機構可帶動此鍍膜模組206,使鍍膜模組206於基材202之表面204的上方滑動。 In other examples, the coating module 206 can include at least one bearing fixture as in the coating module 100 of FIG. 1, and the atmospheric plasma device 210 and the spray element 212 are both mounted on the carrier fixture. In such an example, for each coating module 206, the coating system 200 can optionally include a sliding mechanism, and the coating module 206 is mounted to the sliding mechanism. The sliding mechanism can drive the coating module 206 to slide the coating module 206 over the surface 204 of the substrate 202.

請再次參照圖2,鍍膜系統200之移載系統208通常設於鍍膜模組206之下方,且可用以移動基材202,使其依序通過鍍膜模組206之大氣式電漿裝置210與噴霧元件212的下方,來進行鍍膜作業。如圖2所示,移載系統208可由一輸送帶220與數個滾輪222所構成。在另一些例子中,移載系統208可僅包含一輸送帶220,或僅包含數個滾輪222。 Referring again to FIG. 2, the transfer system 208 of the coating system 200 is generally disposed below the coating module 206, and can be used to move the substrate 202 to sequentially pass the atmospheric plasma device 210 and spray of the coating module 206. The coating operation is performed below the element 212. As shown in FIG. 2, the transfer system 208 can be constructed from a conveyor belt 220 and a plurality of rollers 222. In other examples, the transfer system 208 can include only one conveyor belt 220, or only a few rollers 222.

鍍膜系統200可選擇性地包含預熱系統234。此預熱系統234設置在大氣式電漿裝置210之上游。預熱系統234可用以在大氣式電漿裝置210對基材202進行電漿前處 理前,先對基材202進行預熱處理,來加熱基材至處理所需之溫度。 Coating system 200 can optionally include a preheating system 234. This preheating system 234 is disposed upstream of the atmospheric plasma device 210. The preheating system 234 can be used to plasma the substrate 202 before the atmospheric plasma device 210 Prior to the conditioning, the substrate 202 is preheated to heat the substrate to the desired temperature for processing.

鍍膜系統200更可選擇性地包含上料系統236與下料系統238。上料系統236設置在移載系統208之前端,且位於大氣式電漿裝置210之上游。下料系統238則設置在移載系統208之末端,且位於噴霧元件212之下游。上料系統236可用以將基材202載於移載系統208上,而下料系統238則可用以將基材202移出移載系統208。藉由上料系統236與下料系統238的設置,可自動化地進行基材202的上料與下料,增加鍍膜製程的流暢性。 The coating system 200 more optionally includes a loading system 236 and a blanking system 238. The loading system 236 is disposed at the front end of the transfer system 208 and is located upstream of the atmospheric plasma device 210. The blanking system 238 is disposed at the end of the transfer system 208 and is located downstream of the spray element 212. The loading system 236 can be used to carry the substrate 202 onto the transfer system 208, while the blanking system 238 can be used to move the substrate 202 out of the transfer system 208. By the arrangement of the loading system 236 and the blanking system 238, the loading and unloading of the substrate 202 can be automated, and the smoothness of the coating process can be increased.

請同時參照圖3與圖2,其中圖3係繪示依照本發明之一實施方式的一種抗汙膜之製造方法的流程圖。在本實施方式中,製造抗汙膜時,可先進行圖3之步驟300,以設置至少一鍍膜模組206。鍍膜模組206可例如包含至少一大氣式電漿裝置210與至少一噴霧元件212。在一些例子中,如圖2所示,鍍膜模組206為鍍膜系統200之一部分,且進行步驟300時,可提供包含至少一鍍膜模組206之鍍膜系統200。鍍膜系統200之構件與裝置可如同上述根據圖2所描述之實施例,於此不再贅述。 Please refer to FIG. 3 and FIG. 2 simultaneously. FIG. 3 is a flow chart showing a method for manufacturing an anti-fouling film according to an embodiment of the present invention. In the present embodiment, when the anti-fouling film is manufactured, the step 300 of FIG. 3 may be performed first to provide at least one coating module 206. The coating module 206 can comprise, for example, at least one atmospheric plasma device 210 and at least one spray element 212. In some examples, as shown in FIG. 2, the coating module 206 is part of the coating system 200, and when step 300 is performed, a coating system 200 including at least one coating module 206 can be provided. The components and devices of the coating system 200 may be the same as those described above with reference to FIG. 2, and details are not described herein again.

在一些例子中,接下來可利用上料系統236將基材202載於移載系統208上,並利用移載系統208沿著移動方向232將基材202往鍍膜模組206之大氣式電漿裝置210下方傳送。在一些示範例子中,可在基材202尚未到達大氣式電漿裝置210下方時,先利用預熱系統234來對基材 202進行預熱處理,以在電漿前處理前,先加熱基材202至所需之溫度。 In some examples, the substrate 202 can be carried on the transfer system 208 by the loading system 236, and the substrate 202 can be moved to the atmospheric plasma of the coating module 206 along the moving direction 232 by the transfer system 208. The device 210 transmits below. In some exemplary examples, the preheating system 234 may be used to align the substrate when the substrate 202 has not reached the atmospheric plasma device 210. 202 is preheated to heat the substrate 202 to the desired temperature prior to pretreatment of the plasma.

接著,進行步驟302,以利用鍍膜模組206之大氣式電漿裝置210對基材202之表面204進行電漿前處理,藉以利用電漿來對基材202之欲鍍膜的表面204進行表面處理。電漿前處理可去除基材202之表面204上的微量油汙或髒汙,同時可提供基材202之表面204能量,例如熱能及/或位能。而且,電漿前處理可對基材202之表面204進行表面改質處理,而可活化此表面204,藉此在基材202之表面204上形成許多的空懸鍵或活性官能基,例如羥基。 Next, step 302 is performed to pre-treat the surface 204 of the substrate 202 by the atmospheric plasma device 210 of the coating module 206, thereby using the plasma to surface-treat the surface 204 of the substrate 202 to be coated. . The plasma pretreatment removes traces of oil or dirt on the surface 204 of the substrate 202 while providing surface 204 energy, such as thermal energy and/or potential energy, of the substrate 202. Moreover, the plasma pretreatment can surface modify the surface 204 of the substrate 202 to activate the surface 204, thereby forming a plurality of open bonds or reactive functional groups, such as hydroxyl groups, on the surface 204 of the substrate 202. .

完成電漿前處理後,可進行步驟304,以利用鍍膜模組206之噴霧元件212將抗汙膜塗料溶液霧化成許多抗汙膜塗料霧氣或氣化成許多的抗汙膜塗料氣體分子,而沉積在經電漿前處理後之基材202之表面204上。在一些示範例子中,抗汙膜塗料之材料可包含氟碳矽烴類化合物、全氟碳矽烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、或全氟矽烷烴醚類化合物。 After the pre-plasma processing is completed, step 304 may be performed to atomize the anti-fouling film coating solution into a plurality of anti-fouling coating material mists or vaporized into a plurality of anti-fouling coating coating gas molecules by using the spraying element 212 of the coating module 206, and depositing On the surface 204 of the substrate 202 after pre-plasma treatment. In some exemplary embodiments, the antifouling coating material may comprise a fluorocarbon hydrocarbon compound, a perfluorocarbon hydrocarbon compound, a fluorocarbon hydride hydrocarbon compound, a perfluoro decane hydrocarbon compound, or a perfluoro decane hydrocarbon ether. Compound.

在本實施方式中,電漿前處理之步驟302與將抗汙膜塗料溶液霧化成抗汙膜塗料霧氣或氣化成抗汙膜塗料氣體分子之步驟304之間的時間間隔控制在小於或等於30秒。在一些例子中,將大氣式電漿裝置210之噴口214與噴霧元件212之噴口216之間的距離218設置成小於20公分。 In the present embodiment, the time interval between the step 302 of plasma pretreatment and the step 304 of atomizing the antifouling coating solution into the antifouling coating mist or vaporizing into the antifouling coating gas molecules is controlled to be less than or equal to 30. second. In some examples, the distance 218 between the spout 214 of the atmospheric plasma device 210 and the spout 216 of the spray element 212 is set to be less than 20 cm.

接著,進行步驟306,沉積在基材202之表面204上的這些抗汙膜塗料霧氣或抗汙膜塗料氣體分子,利用電漿前處理所提供予基材202之表面204且留存在表面204上之能量與表面204上的空懸鍵或活性官能基鍵結,如此可在基材202之表面204上順利形成抗汙膜。 Next, in step 306, the antifouling film coating mist or antifouling coating gas molecules deposited on the surface 204 of the substrate 202 are provided to the surface 204 of the substrate 202 by plasma pretreatment and remain on the surface 204. The energy is bonded to the dangling bonds or reactive functional groups on the surface 204 such that a soil resistant film can be formed smoothly on the surface 204 of the substrate 202.

藉由將電漿前處理與將抗汙膜塗料溶液霧化成抗汙膜塗料霧氣或氣化成抗汙膜塗料氣體分子之間的時間間隔控制在小於或等於30秒,可使得抗汙膜塗料霧氣或抗汙膜塗料氣體分子沉積在基材202之表面204上時,基材202之表面204上仍保有足夠之能量,而使得沉積在基材202之表面204上的抗汙膜塗料霧氣或抗汙膜塗料氣體分子可利用留在基材202之表面204上的能量來與表面204上之空懸鍵快速發生縮合反應而形成鍵結,或與表面204上之活性官能基反應鍵結,進而順利在基材202之表面204上形成抗汙膜。因此,運用本實施方式之方法來製作抗汙膜時,於噴霧元件212形成抗汙膜塗料霧氣或抗汙膜塗料氣體分子於基材202之表面204上後,即可在基材202之表面204上形成抗汙膜,直接進入下一製程進行貼合或網印等作業,無需再利用烤箱等烘烤裝置來對基材202上之抗汙膜塗料霧氣或抗汙膜塗料氣體分子進行烘烤處理。 The anti-fouling film coating mist can be controlled by controlling the plasma pretreatment with the atomization of the anti-fouling film coating solution into the anti-fouling coating material mist or vaporizing into the anti-fouling coating coating gas molecules at a time interval of less than or equal to 30 seconds. When the anti-fouling coating gas molecules are deposited on the surface 204 of the substrate 202, sufficient energy is retained on the surface 204 of the substrate 202 to render the anti-fouling coating deposited on the surface 204 of the substrate 202 fog or resistant. The fouling coating gas molecules can utilize the energy remaining on the surface 204 of the substrate 202 to rapidly undergo a condensation reaction with the vacant bonds on the surface 204 to form a bond or react with the reactive functional groups on the surface 204 to further bond An anti-fouling film is formed smoothly on the surface 204 of the substrate 202. Therefore, when the anti-fouling film is formed by the method of the present embodiment, after the anti-fouling film coating mist or the anti-fouling film coating gas molecules are formed on the surface 204 of the substrate 202 on the surface of the substrate 202, the surface of the substrate 202 can be formed. The anti-fouling film is formed on the 204, and directly enters the next process for bonding or screen printing, and the baking agent of the anti-fouling film coating on the substrate 202 is not required to be baked. Baked.

由上述之實施方式可知,本發明之一優點就是因為本發明之抗汙膜之鍍膜模組、鍍膜系統及製造方法係先對基材之表面進行電漿前處理,以提供基材表面能量並於基材表面上形成空懸鍵或活性官能基,而後隨即形成抗汙膜塗 料霧氣或氣體分子沉積於基材之表面上。因此,抗汙膜塗料霧氣或氣體分子可在基材表面仍保有足夠能量時,與基材表面之空懸鍵或活性官能基鍵結,而在基材表面上順利形成抗汙膜。故,可省略抗汙膜塗料沉積於基材表面後的後烘烤步驟。 According to the above embodiments, one of the advantages of the present invention is that the coating module, the coating system and the manufacturing method of the anti-fouling film of the present invention firstly perform plasma pretreatment on the surface of the substrate to provide surface energy of the substrate. Forming a dangling bond or a reactive functional group on the surface of the substrate, and then forming an anti-fouling film coating A mist or gas molecule is deposited on the surface of the substrate. Therefore, the anti-fouling film coating mist or gas molecules can bond with the dangling bonds or active functional groups on the surface of the substrate while maintaining sufficient energy on the surface of the substrate, and the anti-fouling film is smoothly formed on the surface of the substrate. Therefore, the post-baking step after the anti-fouling film coating is deposited on the surface of the substrate can be omitted.

由上述之實施方式可知,本發明之另一優點就是因為本發明之抗汙膜之製造方法可省略抗汙膜塗料沉積於基材表面後的後烘烤步驟,因此可縮小設備占地空間,節約能源,縮減製程時間,進而可降低製程成本與提升產能。 It can be seen from the above embodiments that another advantage of the present invention is that the method for manufacturing the anti-fouling film of the present invention can omit the post-baking step after the anti-fouling film coating is deposited on the surface of the substrate, thereby reducing the space occupied by the device. Save energy and reduce process time, which in turn can reduce process costs and increase production capacity.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何在此技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 While the present invention has been described above by way of example, it is not intended to be construed as a limitation of the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧鍍膜模組 100‧‧‧ coating module

102‧‧‧基材 102‧‧‧Substrate

104‧‧‧表面 104‧‧‧ Surface

106‧‧‧大氣式電漿裝置 106‧‧‧ Atmospheric plasma device

108‧‧‧噴霧元件 108‧‧‧Spray components

110‧‧‧噴口 110‧‧‧ spout

112‧‧‧噴口 112‧‧‧ spout

114‧‧‧距離 114‧‧‧ distance

116‧‧‧移載系統 116‧‧‧Transport system

118‧‧‧承載治具 118‧‧‧bearing fixture

120‧‧‧移動方向 120‧‧‧ moving direction

Claims (10)

一種抗汙膜之鍍膜模組,適用以在一基材之一表面上形成一抗汙膜,該抗汙膜之鍍膜模組包含:至少一大氣式電漿裝置,適用以對該基材之該表面進行一電漿前處理,以提供該基材之該表面一能量以及在該基材之該表面上形成複數個空懸鍵或複數個活性官能基;以及至少一噴霧元件,適用以將一抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗汙膜塗料氣體分子,而沉積在經該電漿前處理後之該基材之該表面上,並藉由該能量與該些空懸鍵或該些活性官能基鍵結而在該基材之該表面上形成該抗汙膜,其中,該至少一大氣式電漿裝置之噴口與該至少一噴霧元件之噴口之間的距離小於20公分。 The anti-fouling film coating module is adapted to form a anti-fouling film on a surface of a substrate, the anti-fouling film coating module comprises: at least one atmospheric plasma device, suitable for the substrate The surface is subjected to a plasma pretreatment to provide the surface energy of the substrate and to form a plurality of vacancies or a plurality of reactive functional groups on the surface of the substrate; and at least one spray element adapted to An anti-fouling coating solution is atomized into a plurality of anti-fouling coating materials to be misted or vaporized into a plurality of anti-fouling coating coating gas molecules, and deposited on the surface of the substrate pretreated by the plasma, and by the The anti-fouling film is formed on the surface of the substrate by bonding the energy to the floating bonds or the reactive functional groups, wherein the nozzle of the at least one atmospheric plasma device and the nozzle of the at least one spray element The distance between them is less than 20 cm. 如申請專利範圍第1項之抗汙膜之鍍膜模組,更包含至少一承載治具,其中該至少一大氣式電漿裝置與該至少一噴霧元件裝設於該至少一承載治具。 The coating module of the anti-fouling film of claim 1, further comprising at least one bearing fixture, wherein the at least one atmospheric plasma device and the at least one spray component are mounted on the at least one bearing fixture. 一種抗汙膜之鍍膜系統,適用以在一基材之一表面上形成一抗汙膜,該抗汙膜之鍍膜系統包含:至少一鍍膜模組,其中該至少一鍍膜模組包含:至少一大氣式電漿裝置,適用以對該基材之該表面進行一電漿前處理,以提供該基材之該表面一能量 以及在該基材之該表面上形成複數個空懸鍵或複數個活性官能基;以及至少一噴霧元件,適用以將一抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗汙膜塗料氣體分子,而沉積在經該電漿前處理後之該基材之該表面上,並藉由該能量與該些空懸鍵或該些活性官能基鍵結而在該基材之該表面上形成該抗汙膜,該至少一大氣式電漿裝置之噴口與該至少一噴霧元件之噴口之間的距離小於20公分;以及一移載系統,適用以移動該基材通過該至少一鍍膜模組下方。 The anti-fouling film coating system is configured to form an anti-fouling film on a surface of a substrate, the anti-fouling film coating system comprises: at least one coating module, wherein the at least one coating module comprises: at least one An atmospheric plasma device adapted to perform a plasma pretreatment on the surface of the substrate to provide an energy of the surface of the substrate And forming a plurality of vacant bonds or a plurality of reactive functional groups on the surface of the substrate; and at least one spray element adapted to atomize an anti-fouling coating solution into a plurality of anti-fouling coating materials or to vaporize into a plurality An anti-fouling film coating gas molecule deposited on the surface of the substrate pretreated by the plasma and bonded to the air by the energy or the active functional groups Forming the anti-fouling film on the surface of the material, the distance between the spout of the at least one atmospheric plasma device and the spout of the at least one spray element is less than 20 cm; and a transfer system adapted to move the substrate through The at least one coating module is below. 如申請專利範圍第3項之抗汙膜之鍍膜系統,其中該至少一鍍膜模組更包含至少一承載治具,且該至少一大氣式電漿裝置與該至少一噴霧元件裝設於該至少一承載治具。 The coating system of the anti-fouling film of claim 3, wherein the at least one coating module further comprises at least one bearing fixture, and the at least one atmospheric plasma device and the at least one spraying component are installed on the at least one spray component A bearing fixture. 如申請專利範圍第3項之抗汙膜之鍍膜系統,更包含一滑動機構,其中該至少一鍍膜模組裝設於該滑動機構,且該滑動機構適用以帶動該至少一鍍膜模組於該基材之該表面之上方滑動。 The anti-fouling film coating system of claim 3, further comprising a sliding mechanism, wherein the at least one coating die is assembled on the sliding mechanism, and the sliding mechanism is adapted to drive the at least one coating module Sliding over the surface of the substrate. 如申請專利範圍第3項之抗汙膜之鍍膜系統,更包含一預熱系統,適用以在該電漿前處理前,對該基材進行一預熱處理。 The anti-fouling coating system of claim 3, further comprising a preheating system adapted to preheat the substrate prior to the pretreatment of the plasma. 如申請專利範圍第3項之抗汙膜之鍍膜系統,更包含:一上料系統,適用以將該基材載於該移載系統上;以及一下料系統,適用以將該基材移出該移載系統。 The anti-fouling coating system of claim 3, further comprising: a loading system adapted to carry the substrate on the transfer system; and a blanking system adapted to remove the substrate from the substrate Transfer system. 一種抗汙膜之製造方法,包含:設置至少一鍍膜模組,其中該至少一鍍膜模組包含:至少一大氣式電漿裝置;以及至少一噴霧元件;以及利用該至少一大氣式電漿裝置對一基材之一表面進行一電漿前處理,以提供該基材之該表面一能量以及在該基材之該表面上形成複數個空懸鍵或複數個活性官能基;利用該至少一噴霧元件將一抗汙膜塗料溶液霧化成複數個抗汙膜塗料霧氣或氣化成複數個抗汙膜塗料氣體分子,而沉積在經該電漿前處理後之該基材之該表面上,其中該電漿前處理與將該抗汙膜塗料溶液霧化成該些抗汙膜塗料霧氣或氣化成該些抗汙膜塗料氣體分子之步驟之間之一時間間隔小於或等於30秒;以及該些抗汙膜塗料霧氣或該些抗汙膜塗料氣體分子利用該能量與該些空懸鍵或該些活性官能基鍵結,而在該基材之該表面上形成該抗汙膜。 A method for manufacturing an anti-staining film, comprising: providing at least one coating module, wherein the at least one coating module comprises: at least one atmospheric plasma device; and at least one spray element; and utilizing the at least one atmospheric plasma device Performing a plasma pretreatment on a surface of a substrate to provide the surface energy of the substrate and forming a plurality of vacancies or a plurality of reactive functional groups on the surface of the substrate; using the at least one The spray element atomizes an anti-fouling coating solution into a plurality of anti-fouling coating materials or vaporizes into a plurality of anti-fouling coating gas molecules, and deposits on the surface of the substrate after pre-treatment of the plasma, wherein The time interval between the pretreatment of the plasma and the step of atomizing the antifouling coating solution into the mist of the antifouling coating or vaporizing into the gas molecules of the antifouling coating is less than or equal to 30 seconds; and The anti-fouling film coating mist or the anti-fouling film coating gas molecules utilize the energy to bond with the air dangling bonds or the reactive functional groups to form the anti-fouling film on the surface of the substrate. 如申請專利範圍第8項之抗汙膜之製造方法,其中該至少一大氣式電漿裝置之噴口與該至少一噴霧元件之噴口之間的距離小於20公分。 The method for producing an anti-fouling film according to claim 8, wherein a distance between the spout of the at least one atmospheric plasma device and the spout of the at least one spray element is less than 20 cm. 如申請專利範圍第8項之抗汙膜之製造方法,於該電漿前處理前,更包含利用一預熱系統對該基材進行一預熱處理。 The method for manufacturing an anti-fouling film according to Item 8 of the patent application, before the pre-treatment of the plasma, further comprises pre-heating the substrate by using a preheating system.
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