TWI568932B - Piezoelectric dispenser - Google Patents
Piezoelectric dispenser Download PDFInfo
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- TWI568932B TWI568932B TW104106328A TW104106328A TWI568932B TW I568932 B TWI568932 B TW I568932B TW 104106328 A TW104106328 A TW 104106328A TW 104106328 A TW104106328 A TW 104106328A TW I568932 B TWI568932 B TW I568932B
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- piezoelectric actuator
- displacement
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- 238000006073 displacement reaction Methods 0.000 claims description 100
- 230000007246 mechanism Effects 0.000 claims description 91
- 239000000523 sample Substances 0.000 claims description 43
- 238000003860 storage Methods 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 24
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000011084 recovery Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000009940 knitting Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/60—Fluid transfer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Reciprocating Pumps (AREA)
Description
本發明是有關於一種壓電分配器,更詳細而言是有關於一種具備將壓電元件用作致動器(actuator)而分配(dispensing)溶液的壓電泵(piezoelectric pump)的壓電分配器。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a piezoelectric dispenser, and more particularly to a piezoelectric distribution of a piezoelectric pump having a piezoelectric element used as an actuator to dispense a solution. Device.
按照固定量供給水、油、樹脂(resin)等液體狀態的溶液的分配器使用於半導體製程、醫療領域等多個領域。 A dispenser for supplying a liquid state solution such as water, oil, or resin in a fixed amount is used in various fields such as semiconductor manufacturing and medical fields.
特別是,於半導體製程中,在底填充(underfill)製程中較多地使用分配器,分配器亦較多地使用於以樹脂填充半導體元件的封裝體(package)內部的用途。於製造發光二極體(Light Emitting Diode,LED)元件的製程中,分配器使用於在LED元件中將螢光物質與樹脂混合而成的螢光液塗佈至LED晶片(chip)的製程。 In particular, in the semiconductor manufacturing process, the dispenser is used more in an underfill process, and the dispenser is also used more for the inside of a package in which a semiconductor element is filled with a resin. In the process of manufacturing a light-emitting diode (LED) device, the dispenser is used in a process of applying a phosphor mixed with a phosphor and a resin to an LED chip in an LED device.
於此種分配器中,接收溶液並按照定量分配至準確的位置的泵用作核心裝置。 In such a dispenser, a pump that receives the solution and is dispensed to an accurate position is used as a core device.
於泵的構造中,存在螺旋泵(screw pump)、線性泵(linear pump)等多個種類。最近,為了高速執行分配作業,於半導體製程等中,開發使用有將壓電元件用作致動器的壓電泵。 In the construction of the pump, there are many types such as a screw pump, a linear pump, and the like. Recently, in order to perform a dispensing operation at a high speed, a piezoelectric pump using a piezoelectric element as an actuator has been developed for use in a semiconductor process or the like.
於韓國註冊專利公報第1301107號(2013年8月27日)中,揭示有包含以可相互分離的方式結合的泵本體與閥(valve)本體的壓電泵。於泵本體設置鉸鏈軸(hinge shaft),以可相對於鉸鏈軸旋轉的方式設置橫向延長的桿(lever)。於閥本體,嵌合設置以沿垂直方向延長的方式形成的閥桿。桿與閥桿彼此連接,若桿相對於鉸鏈軸旋轉,則閥桿上下升降。於泵本體設置一對壓電致動器,使桿相對於鉸鏈軸旋轉。一對壓電致動器由如下構造的壓電元件構成:若施加電壓,則根據該施加電壓的電位而長度變長或縮短。 In the Korean Patent Registration Publication No. 1301107 (August 27, 2013), there is disclosed a piezoelectric pump including a pump body and a valve body that are coupled to each other in a separable manner. A hinge shaft is provided to the pump body to provide a laterally elongated lever in a rotatable manner relative to the hinge axis. A valve stem formed to extend in the vertical direction is fitted to the valve body. The rod and the valve stem are connected to each other, and if the rod rotates relative to the hinge shaft, the valve stem is raised and lowered. A pair of piezoelectric actuators are disposed on the pump body to rotate the rod relative to the hinge axis. The pair of piezoelectric actuators is composed of a piezoelectric element having a structure in which, when a voltage is applied, the length becomes longer or shorter depending on the potential of the applied voltage.
如上所述的先前壓電泵於為了零件的維護、修理、清洗等而於自泵本體分離閥本體後重新進行組裝使用的情形時,產生溶液噴出量表現地與初始噴出量不同的情形。即,於再組裝閥本體並使其作動的情形時,因組裝誤差等原因而泵的作動位移(free stroke)改變,從而溶液噴出量可能與初始噴出量產生差異。此種實際溶液噴出量與預先設定的初始溶液噴出量間的差異亦可因壓電致動器、桿、閥桿的零件的磨損等而誘發。 When the conventional piezoelectric pump as described above is reassembled and used after the valve body is separated from the pump body for maintenance, repair, cleaning, or the like of the parts, the amount of solution discharge is different from the initial discharge amount. That is, when the valve body is reassembled and actuated, the free stroke of the pump is changed due to an assembly error or the like, and the amount of the solution discharged may be different from the initial discharge amount. The difference between the actual solution ejection amount and the preset initial solution ejection amount can also be induced by the wear of the piezoelectric actuator, the rod, and the stem member.
又,上述先前壓電泵於製造時,在結合泵本體與閥本體,結合桿與閥桿進行組裝後,為了壓電致動器的施加電壓等各種動作參數的初始設定,需要檢測泵的作動位移。 Further, in the production of the above-described prior piezoelectric pump, after the pump body and the valve body are coupled to the valve body and the valve stem, the initial setting of various operating parameters such as the applied voltage of the piezoelectric actuator is required, and the operation of the pump needs to be detected. Displacement.
本發明是為了解決如上所述的需要而提出,目的在於提供一種壓電分配器,藉由準確地檢測按照固定量噴出所儲存的溶液的壓電泵的溶液噴出機構的作動位移,而可得知因組裝誤差或 零件的磨損引起的溶液噴出機構的作動位移變化。 The present invention has been made to solve the above needs, and an object thereof is to provide a piezoelectric distributor which can be obtained by accurately detecting an actuation displacement of a solution discharge mechanism of a piezoelectric pump that ejects a stored solution by a fixed amount. Know the assembly error or The displacement of the solution ejecting mechanism caused by the wear of the parts changes.
用以達成上述目的的本發明的壓電分配器的特徵在於包含:泵本體;溶液噴出機構,其具有桿及閥桿,所述桿以可相對於設置於所述泵本體的鉸鏈軸旋轉的方式設置,所述閥桿以伴隨所述桿的旋轉而進行升降運動的方式連接於所述桿;壓電致動器,其以其末端部可與所述桿接觸的方式設置於所述泵本體,以便於施加電壓時長度變長,並且對所述桿進行加壓而使所述桿以所述鉸鏈軸為中心旋轉;閥本體,其具備儲存部、流入口、及噴嘴(nozzle),所述儲存部供所述閥桿的末端部插入,且儲存溶液,所述流入口供所述溶液流入至所述儲存部,所述噴嘴伴隨所述閥桿於所述儲存部的進退運動而排出所述儲存部的溶液;位移檢測感測器(sensor),其設置於所述泵本體,用以檢測所述溶液噴出機構的作動位移;以及控制裝置,其電性連接於所述壓電致動器及所述位移檢測感測器,施加電壓以使所述壓電致動器作動,自所述位移檢測感測器接收關於所述溶液噴出機構的作動位移的檢測訊號。 A piezoelectric distributor of the present invention for achieving the above object is characterized by comprising: a pump body; a solution ejecting mechanism having a rod and a valve stem, the rod being rotatable relative to a hinge shaft provided to the pump body In a manner, the valve stem is connected to the rod in a manner of lifting movement accompanying rotation of the rod; the piezoelectric actuator is disposed on the pump in such a manner that a tip end portion thereof can be in contact with the rod a body, in order to lengthen a length when a voltage is applied, and pressurizing the rod to rotate the rod about the hinge axis; the valve body having a storage portion, an inflow port, and a nozzle, The storage portion is inserted into a distal end portion of the valve stem, and stores a solution for the solution to flow into the storage portion, the nozzle being discharged accompanying the advancement and retreat movement of the valve stem in the storage portion a solution of the storage portion; a displacement detecting sensor disposed on the pump body for detecting an actuation displacement of the solution ejecting mechanism; and a control device electrically connected to the piezoelectric And the bit The detection sensor is moved to apply a voltage to cause the piezoelectric actuator to actuate, and a detection signal for an actuation displacement of the solution ejection mechanism is received from the displacement detecting sensor.
本發明的壓電分配器於噴出溶液的溶液噴出機構作動而噴出溶液時,可利用位移檢測感測器檢測溶液噴出機構的作動位移。因此,可得知因組裝誤差或零件的磨損引起的溶液噴出機構的作動位移變化。而且,控制裝置可自位移檢測感測器接收關於溶液噴出機構的作動位移的檢測訊號,立即於顯示裝置顯示關於該檢測訊號的資訊。因此,使用者可觀察顯示於顯示裝置的資訊,容易地掌握溶液噴出機構是否與基準設定值一致地噴出溶液。利用該情形,具有如下優點:於在更換噴嘴或清洗噴嘴後進 行再組裝的情形時,可有效、容易且準確地進行將噴嘴結合至泵本體的位移設定。 In the piezoelectric dispenser of the present invention, when the solution ejecting mechanism of the ejecting solution is actuated to eject the solution, the displacement detecting sensor can be used to detect the displacement of the solution ejecting mechanism. Therefore, it is possible to know the change in the displacement of the solution discharge mechanism due to the assembly error or the wear of the parts. Moreover, the control device can receive the detection signal about the actuation displacement of the solution ejection mechanism from the displacement detecting sensor, and immediately display information about the detection signal on the display device. Therefore, the user can observe the information displayed on the display device and easily grasp whether or not the solution discharge mechanism ejects the solution in accordance with the reference set value. With this situation, there is an advantage in that after changing the nozzle or cleaning the nozzle In the case of reassembly, the displacement setting of the nozzle to the pump body can be performed efficiently, easily, and accurately.
又,本發明的壓電分配器檢測噴出溶液的溶液噴出機構的作動位移,藉此於實際溶液噴出量表現地與初始溶液噴出量不同時,使用者可迅速地對應該情形。因此,可防止製程的損失與不良品的產生,提高生產性。 Further, the piezoelectric distributor of the present invention detects the displacement of the solution discharge mechanism of the discharge solution, so that the user can quickly respond to the situation when the actual solution discharge amount is different from the initial solution discharge amount. Therefore, it is possible to prevent the loss of the process and the generation of defective products, and to improve productivity.
10、50、60、70‧‧‧壓電分配器 10, 50, 60, 70‧‧‧ Piezoelectric distributor
12‧‧‧壓電泵 12‧‧‧Piezoelectric pump
15‧‧‧泵本體 15‧‧‧ pump body
16‧‧‧鉸鏈軸 16‧‧‧Hinged shaft
20‧‧‧閥本體 20‧‧‧ valve body
21‧‧‧儲存部 21‧‧‧ Storage Department
22‧‧‧流入口 22‧‧‧Inlet
23‧‧‧噴嘴 23‧‧‧Nozzles
25‧‧‧溶液噴出機構 25‧‧‧Solution ejecting mechanism
26‧‧‧桿 26‧‧‧ pole
27‧‧‧卡合槽 27‧‧‧ snap groove
28‧‧‧閥桿 28‧‧‧ valve stem
29‧‧‧卡合桿 29‧‧‧Knitting rod
30‧‧‧第一壓電致動器 30‧‧‧First Piezoelectric Actuator
31‧‧‧第二壓電致動器 31‧‧‧Second Piezoelectric Actuator
33‧‧‧泵控制器 33‧‧‧ pump controller
35‧‧‧第一位置調節器 35‧‧‧First position adjuster
36‧‧‧第二位置調節器 36‧‧‧Second position regulator
38‧‧‧第一恢復機構 38‧‧‧First Recovery Agency
39‧‧‧第二恢復機構 39‧‧‧Second recovery agency
40、52、62、72‧‧‧位移檢測感測器 40, 52, 62, 72‧‧‧ Displacement Detection Sensors
41、53、63、73‧‧‧探針 41, 53, 63, 73‧‧ ‧ probe
42、55、65、75‧‧‧感測器本體 42, 55, 65, 75‧‧‧ sensor body
44‧‧‧控制裝置 44‧‧‧Control device
45‧‧‧顯示裝置 45‧‧‧Display device
47、48‧‧‧冷卻線 47, 48‧‧‧ cooling line
54‧‧‧結合槽 54‧‧‧ joint slot
57‧‧‧樞銷 57‧‧‧ pivot
64、74‧‧‧接觸曲面 64, 74‧‧‧Contact surface
77‧‧‧突出部 77‧‧‧Protruding
圖1是表示本發明的第一實施例的壓電分配器的前視圖。 Fig. 1 is a front view showing a piezoelectric distributor of a first embodiment of the present invention.
圖2是表示圖1所示的壓電分配器的壓電泵的立體圖。 Fig. 2 is a perspective view showing a piezoelectric pump of the piezoelectric distributor shown in Fig. 1;
圖3是表示本發明的第一實施例的壓電分配器的剖面圖。 Figure 3 is a cross-sectional view showing a piezoelectric distributor of a first embodiment of the present invention.
圖4是表示本發明的第二實施例的壓電分配器。 Fig. 4 is a view showing a piezoelectric distributor of a second embodiment of the present invention.
圖5是表示本發明的第三實施例的壓電分配器。 Fig. 5 is a view showing a piezoelectric distributor of a third embodiment of the present invention.
圖6是表示本發明的第四實施例的壓電分配器。 Fig. 6 is a view showing a piezoelectric distributor of a fourth embodiment of the present invention.
以下,參照隨附圖式,詳細地對本發明的壓電分配器進行說明。 Hereinafter, the piezoelectric distributor of the present invention will be described in detail with reference to the accompanying drawings.
圖1是表示本發明的第一實施例的壓電分配器的前視圖,圖2是表示圖1所示的壓電分配器的壓電泵的立體圖,圖3是表示本發明的第一實施例的壓電分配器的剖面圖。 1 is a front view showing a piezoelectric dispenser according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a piezoelectric pump of the piezoelectric distributor shown in FIG. 1, and FIG. 3 is a first embodiment of the present invention. A cross-sectional view of a piezoelectric dispenser of the example.
如圖1至圖3所示,本發明的第1實施例的壓電分配器10包含壓電泵12、位移檢測感測器40、及控制裝置44。壓電泵 12具有泵本體15、閥本體20、溶液噴出機構25、壓電致動器30、壓電致動器31、及泵控制器33。雖未於圖式中詳細表示,但泵本體15與閥本體20是藉由螺桿(bolt)等固定構件而以可相互分離的方式結合。溶液噴出機構25包含:桿26,其結合於泵本體15;及閥桿28,其以與桿26連接的方式結合於閥本體20。 As shown in FIGS. 1 to 3, a piezoelectric distributor 10 according to a first embodiment of the present invention includes a piezoelectric pump 12, a displacement detecting sensor 40, and a control device 44. Piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a piezoelectric actuator 30, a piezoelectric actuator 31, and a pump controller 33. Although not shown in detail in the drawings, the pump body 15 and the valve body 20 are coupled to each other by a fixing member such as a bolt. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15 and a valve stem 28 coupled to the valve body 20 in a manner coupled to the rod 26.
閥本體20具備儲存部21、流入口22、及噴嘴23。儲存部21形成為朝向上側開放的容器形態,閥桿28嵌合至該儲存部21而使儲存部21的上側密閉。流入口22與儲存部21連接。藉由流入口22而自外部供給的溶液向儲存部21傳達。 The valve body 20 includes a reservoir 21, an inflow port 22, and a nozzle 23. The storage portion 21 is formed in a container form that is open toward the upper side, and the valve stem 28 is fitted to the storage portion 21 to seal the upper side of the storage portion 21. The inflow port 22 is connected to the storage portion 21. The solution supplied from the outside by the inflow port 22 is transmitted to the storage unit 21.
於泵本體15設置鉸鏈軸16,以可相對於鉸鏈軸16旋轉的方式設置橫向延長的桿26。於閥本體20嵌合沿垂直方向延長的方式以設置而形成的閥桿28。桿26與閥桿28彼此連接,若桿26相對於鉸鏈軸16旋轉,則閥桿28上下升降。 A hinge shaft 16 is provided to the pump body 15 to provide a laterally elongated rod 26 in a rotatable manner relative to the hinge shaft 16. The valve stem 28 is formed in such a manner that the valve body 20 is fitted in a manner extending in the vertical direction. The rod 26 and the valve stem 28 are connected to each other, and if the rod 26 is rotated relative to the hinge shaft 16, the valve stem 28 is raised and lowered.
連接於桿26的閥桿28伴隨桿26的旋轉而相對於儲存部21進行升降運動。若閥桿28於上升後下降,並且向接近位於其下部的噴嘴23的方向移動,則對儲存部21內部的溶液進行加壓而藉由噴嘴23向外部分配溶液。 The valve stem 28 connected to the rod 26 moves up and down with respect to the storage portion 21 in accordance with the rotation of the rod 26. When the valve stem 28 descends after rising and moves toward the nozzle 23 located at the lower portion thereof, the solution inside the reservoir portion 21 is pressurized to dispense the solution to the outside through the nozzle 23.
桿26與閥桿28可藉由多種方法連接。於本實施例中,桿26與閥桿28簡單地以嵌合結合的構造連接。於桿26的末端部形成向水平方向開放的卡合槽27。即,桿26的卡合槽27形成為C字形態。於閥桿28的上端部具備卡合桿29。卡合桿29以如下方式連接:嵌合至桿26的卡合槽27並可相對於該桿26旋轉。即,以桿26的旋轉運動轉換為閥桿28的升降運動的方式構成。 Rod 26 and valve stem 28 can be coupled by a variety of methods. In the present embodiment, the rod 26 and the valve stem 28 are simply connected in a matingly coupled configuration. An engagement groove 27 that is open in the horizontal direction is formed at a distal end portion of the rod 26. That is, the engagement groove 27 of the rod 26 is formed in a C-shape. An engagement lever 29 is provided at an upper end portion of the valve stem 28. The engagement lever 29 is coupled in such a manner as to be fitted to the engagement groove 27 of the lever 26 and rotatable relative to the lever 26. That is, it is configured such that the rotational motion of the rod 26 is converted into the lifting motion of the valve stem 28.
卡合槽27以朝向水平方向開放的方式形成,因此可使 卡合桿29於水平方向上相對於卡合槽27移動而使卡合槽27與卡合桿29裝卸。又,卡合槽27形成為水平方向,因此即便因桿26的旋轉而卡合槽27升降,卡合桿29亦不會自卡合槽27脫落而相對於閥本體20上升或下降。於需要分離桿26與閥桿28時,可藉由使卡合桿29相對於卡合槽27於水平方向上移動而容易地分離。 The engagement groove 27 is formed to be open in the horizontal direction, and thus can be The engagement lever 29 moves in the horizontal direction with respect to the engagement groove 27, and the engagement groove 27 and the engagement lever 29 are attached and detached. Further, since the engagement groove 27 is formed in the horizontal direction, even if the engagement groove 27 is moved up and down by the rotation of the lever 26, the engagement lever 29 does not fall off from the engagement groove 27 and rises or falls with respect to the valve body 20. When the separation lever 26 and the valve stem 28 are required, the engagement lever 29 can be easily separated by moving the engagement lever 29 in the horizontal direction with respect to the engagement groove 27.
如圖3所示,壓電致動器30以及壓電致動器31設置於泵本體15。具有兩個壓電致動器(第一壓電致動器30及第二壓電致動器31),使桿26相對於鉸鏈軸16旋轉。第一壓電致動器30及第二壓電致動器31由壓電元件構成。即,使用如下構造的壓電元件構成第一壓電致動器30及第二壓電致動器31:若施加電壓,則根據該施加電壓的電位而長度變長或縮短。於本實施例中,將如下情形列舉為例而進行說明:使用積層多個壓電元件而構成的多堆(Multi Stack)類型的壓電致動器構成第一壓電致動器30及第二壓電致動器31。 As shown in FIG. 3, the piezoelectric actuator 30 and the piezoelectric actuator 31 are provided in the pump body 15. There are two piezoelectric actuators (the first piezoelectric actuator 30 and the second piezoelectric actuator 31) that rotate the rod 26 relative to the hinge shaft 16. The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are composed of piezoelectric elements. In other words, the piezoelectric element having the following structure constitutes the first piezoelectric actuator 30 and the second piezoelectric actuator 31: when a voltage is applied, the length becomes longer or shorter depending on the potential of the applied voltage. In the present embodiment, the following description will be made by taking an example in which a multi-stack type piezoelectric actuator configured by laminating a plurality of piezoelectric elements is used to constitute the first piezoelectric actuator 30 and the first A bimorph actuator 31.
第一壓電致動器30及第二壓電致動器31於垂直方向上彼此並列配置並設置於泵本體15。第一壓電致動器30及第二壓電致動器31之間具有鉸鏈軸16,且其下端部分別與桿26的上表面接觸。若對第一壓電致動器30施加電壓而長度變長,則桿26以圖3為基準向逆時針方向旋轉。若對第二壓電致動器31施加電壓而長度變長,則桿26以圖3為基準向順時針方向旋轉。 The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are arranged side by side in the vertical direction and are provided in the pump body 15 . The first piezoelectric actuator 30 and the second piezoelectric actuator 31 have a hinge shaft 16 therebetween, and their lower ends are in contact with the upper surface of the rod 26, respectively. When a voltage is applied to the first piezoelectric actuator 30 and the length becomes long, the lever 26 is rotated counterclockwise with reference to FIG. When a voltage is applied to the second piezoelectric actuator 31 and the length becomes long, the lever 26 rotates clockwise with reference to FIG.
於第一壓電致動器30及第二壓電致動器31的上端,分別配置第一位置調節器35及第二位置調節器36。該等第一位置調節器35及第二位置調節器36以各自的末端部與第一壓電致動器30及第二壓電致動器31的末端部接觸的狀態螺合於泵本體15。 第一位置調節器35調節第一壓電致動器30相對於桿26及泵本體15的位置。第二位置調節器36調節第二壓電致動器31相對於桿26及泵本體15的位置。即,若擰緊第一位置調節器35而對第一壓電致動器30進行加壓,則第一壓電致動器30下降而接近桿26或與桿26密接。第二位置調節器36亦藉由與第一位置調節器35相同的方法而作動。 The first position adjuster 35 and the second position adjuster 36 are disposed at the upper ends of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. The first position adjuster 35 and the second position adjuster 36 are screwed to the pump body 15 in a state where the respective end portions are in contact with the end portions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31. . The first position adjuster 35 adjusts the position of the first piezoelectric actuator 30 with respect to the rod 26 and the pump body 15. The second position adjuster 36 adjusts the position of the second piezoelectric actuator 31 with respect to the rod 26 and the pump body 15. That is, when the first piezoelectric actuator 30 is pressed by tightening the first position adjuster 35, the first piezoelectric actuator 30 is lowered to approach the rod 26 or is in close contact with the rod 26. The second position adjuster 36 is also actuated by the same method as the first position adjuster 35.
於第一壓電致動器30及第二壓電致動器31各者的下部設置第一恢復機構38及第二恢復機構39。第一恢復機構38配置於泵本體15內部,向使第一壓電致動器30收縮的方向對第一壓電致動器30施加力。相同地,第二恢復機構39配置於泵本體15內部,向使第二壓電致動器31收縮的方向對第二壓電致動器31施加力。第一恢復機構38及第二恢復機構39可為在第一壓電致動器30及第二壓電致動器31的下部分別向使第一壓電致動器30及第二壓電致動器31收縮的方向提供彈力的彈簧(spring),亦可為流體管道(duct)。 A first recovery mechanism 38 and a second recovery mechanism 39 are provided in a lower portion of each of the first piezoelectric actuator 30 and the second piezoelectric actuator 31. The first restoring mechanism 38 is disposed inside the pump body 15 and applies a force to the first piezoelectric actuator 30 in a direction in which the first piezoelectric actuator 30 is contracted. Similarly, the second recovery mechanism 39 is disposed inside the pump body 15 and applies a force to the second piezoelectric actuator 31 in a direction in which the second piezoelectric actuator 31 contracts. The first recovery mechanism 38 and the second recovery mechanism 39 may respectively make the first piezoelectric actuator 30 and the second piezoelectric body in the lower portions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. The direction in which the actuator 31 contracts is a spring that provides an elastic force, and may also be a fluid duct.
於本實施例中,將為如下彈簧形態的第一恢復機構38及第二恢復機構39的情形列舉為例而進行說明:於分別與第一壓電致動器30及第二壓電致動器31對應的位置的下部,向第一壓電致動器30及第二壓電致動器31傳達彈力。於與本實施例不同地利用氣壓或液壓的情形時,亦可使用如下的第一恢復機構38及第二恢復機構39:使氣壓或液壓藉由流體管道傳達至第一壓電致動器30以及第二壓電致動器31,從而向使第一壓電致動器30以及第二壓電致動器31恢復至原位的方向傳達力。 In the present embodiment, the case of the first recovery mechanism 38 and the second recovery mechanism 39 in the form of a spring is exemplified as being respectively activated by the first piezoelectric actuator 30 and the second piezoelectric actuator, respectively. The lower portion of the position corresponding to the device 31 transmits an elastic force to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. When the air pressure or the hydraulic pressure is used differently from the present embodiment, the following first recovery mechanism 38 and second recovery mechanism 39 may be used: the air pressure or the hydraulic pressure is transmitted to the first piezoelectric actuator 30 through the fluid conduit. And the second piezoelectric actuator 31 transmits a force in a direction to return the first piezoelectric actuator 30 and the second piezoelectric actuator 31 to the home position.
參照圖3,位移檢測感測器40以可檢測溶液噴出機構 25的作動位移,並將該檢測訊號提供至控制裝置44的方式設置於泵本體15。位移檢測感測器40包含:探針(probe)41;及感測器本體42,其結合探針41使其可移動。探針41是一側末端部結合於桿26的中間,以便可與桿26的旋轉連動而升降。感測器本體42於探針41進行升降運動時,檢測探針41的移動位移,藉此檢測桿26的作動位移。即,感測器本體42藉由探針41而檢測桿26的作動位移,並將該檢測訊號提供至控制裝置44。 Referring to FIG. 3, the displacement detecting sensor 40 is a detectable solution ejecting mechanism The actuation displacement of 25 is provided to the pump body 15 in such a manner that the detection signal is supplied to the control device 44. The displacement detecting sensor 40 includes a probe 41 and a sensor body 42 that is coupled to the probe 41 to be movable. The probe 41 has a one end portion that is coupled to the middle of the rod 26 so as to be movable up and down in conjunction with the rotation of the rod 26. The sensor body 42 detects the displacement of the probe 41 when the probe 41 moves up and down, thereby detecting the actuation displacement of the lever 26. That is, the sensor body 42 detects the actuation displacement of the rod 26 by the probe 41 and supplies the detection signal to the control device 44.
桿26相對於鉸鏈軸16進行旋轉運動,因此結合於桿26的探針41亦一方面略微向左右方向振盪,一方面進行上下運動,而不會進行上下直線運動。然而,桿26的旋轉位移角非常微小,因此探針41的左右振盪幅度亦為微小位準。因此,藉由適當地設計感測器本體42內部的構成零件與探針41的配置構造,可不使探針41與感測器本體42內部的構成零件干涉,而進行上下移動。而且,可藉由探針41的適當的配置而不於感測器本體42檢測探針41的作動位移的方面產生問題。 The lever 26 is rotated relative to the hinge shaft 16, so that the probe 41 coupled to the lever 26 also oscillates slightly in the left-right direction on the one hand, and moves up and down on the one hand without linear movement up and down. However, the rotational displacement angle of the rod 26 is very small, so the amplitude of the left and right oscillations of the probe 41 is also a minute level. Therefore, by appropriately designing the arrangement of the components inside the sensor body 42 and the probe 41, the probe 41 can be moved up and down without interfering with the components inside the sensor body 42. Moreover, problems can be caused by the proper configuration of the probe 41 without detecting the actuation displacement of the probe 41 by the sensor body 42.
控制裝置44以如下方式施加電壓:藉由在壓電泵12中控制第一壓電致動器30以及第二壓電致動器31的泵控制器33而使第一壓電致動器30以及第二壓電致動器31作動。又,控制裝置44自位移檢測感測器40接收關於桿26的作動位移的檢測訊號。控制裝置44可接收關於桿26的作動位移的檢測訊號,並將關於該檢測訊號的資訊顯示於顯示裝置45。例如,控制裝置44可將桿26的作動位移數值化而顯示於顯示裝置45。又,控制裝置44可對溶液噴出機構25的作動位移與預先設定的基準設定值進行比較,將關於溶液噴出機構25的作動位移是否與預先設定的基準 設定值相同、或是否脫離的訊息(message)顯示於顯示裝置45。 The control device 44 applies a voltage in such a manner that the first piezoelectric actuator 30 is controlled by controlling the first piezoelectric actuator 30 and the pump controller 33 of the second piezoelectric actuator 31 in the piezoelectric pump 12. And the second piezoelectric actuator 31 is actuated. Further, the control device 44 receives a detection signal from the displacement detecting sensor 40 regarding the actuation displacement of the lever 26. The control device 44 can receive a detection signal regarding the actuation displacement of the lever 26 and display information about the detection signal on the display device 45. For example, the control device 44 can numerically display the actuation displacement of the lever 26 on the display device 45. Further, the control device 44 can compare the actuation displacement of the solution discharge mechanism 25 with a preset reference set value, and whether or not the actuation displacement of the solution discharge mechanism 25 is set to a predetermined reference. A message having the same set value or whether it is detached is displayed on the display device 45.
使用者可觀察顯示於顯示裝置45的資訊而掌握溶液噴出機構25是否與基準設定值一致地噴出溶液。而且,若溶液噴出機構25的溶液噴出量脫離基準設定值,則可調整對泵本體15與閥本體20之間的結合部的擰緊量、或於分離泵本體15與閥本體20後進行再組裝。而且,可藉由在分離桿26與閥桿28後進行再組裝、或調整對第一壓電致動器30以及第二壓電致動器31的供給電壓等方法,使溶液噴出機構25的溶液噴出量與基準設定值一致。 The user can observe the information displayed on the display device 45 and grasp whether or not the solution discharge mechanism 25 discharges the solution in accordance with the reference set value. Further, when the solution discharge amount of the solution discharge mechanism 25 is out of the reference set value, the tightening amount of the joint portion between the pump body 15 and the valve body 20 can be adjusted, or the pump body 15 and the valve body 20 can be reassembled after being separated. . Further, the solution ejecting mechanism 25 can be made by reassembling the separation rod 26 and the valve stem 28 or adjusting the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. The amount of solution sprayed is the same as the reference set value.
調整對第一壓電致動器30以及第二壓電致動器31的供給電壓亦可藉由控制裝置44而自動地執行。即,若溶液噴出機構25的作動位移與預先設定的基準設定值存在差異,則控制裝置44可改變對第一壓電致動器30以及第二壓電致動器31的供給電壓。而且,藉此可將溶液噴出機構25的作動位移調整為與預先設定的基準設定值一致。 Adjusting the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can also be automatically performed by the control device 44. That is, if the actuation displacement of the solution discharge mechanism 25 differs from the preset reference setting value, the control device 44 can change the supply voltages to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. Further, by this, the actuation displacement of the solution discharge mechanism 25 can be adjusted to match the preset reference setting value.
除此之外,於泵本體15具備冷卻線(cooling line)47/48。冷卻流體藉由冷卻線47/48流向第一壓電致動器30以及第二壓電致動器31周圍的空間,藉此可藉由冷卻流體冷卻第一壓電致動器30以及第二壓電致動器31。 In addition to this, the pump body 15 is provided with a cooling line 47/48. The cooling fluid flows to the space around the first piezoelectric actuator 30 and the second piezoelectric actuator 31 through the cooling line 47/48, whereby the first piezoelectric actuator 30 and the second can be cooled by the cooling fluid Piezoelectric actuator 31.
以下,對如上所述的本發明的第一實施例的壓電分配器10的作動進行說明。 Next, the operation of the piezoelectric distributor 10 of the first embodiment of the present invention as described above will be described.
首先,控制裝置44於已組裝泵本體15與閥本體20及其他構成零件的狀態下,對第一壓電致動器30及第二壓電致動器31施加所設定的電壓。為了使閥桿28下降而藉由噴嘴23分配溶液, 將以施加至第二壓電致動器31的電壓為基準而為50%的電壓分別施加至第一壓電致動器30及第二壓電致動器31。此時,如圖3所示,第一壓電致動器30及第二壓電致動器31按照相同的長度變長,並且各自的下端部與桿26接觸。 First, the control device 44 applies the set voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 in a state where the pump body 15 and the valve body 20 and other components are assembled. In order to lower the valve stem 28, the solution is dispensed by the nozzle 23, A voltage of 50% with respect to the voltage applied to the second piezoelectric actuator 31 is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. At this time, as shown in FIG. 3, the first piezoelectric actuator 30 and the second piezoelectric actuator 31 are lengthened by the same length, and the respective lower end portions are in contact with the rod 26.
於此種狀態下,可利用第一位置調節器35及第二位置調節器36來調整第一壓電致動器30及第二壓電致動器31的位置。即,可藉由使第一位置調節器35或第二位置調節器36旋轉而使第一壓電致動器30或第二壓電致動器31分別前進後退,而將桿26設為水平狀態。於利用第一位置調節器35或第二位置調節器36使第一壓電致動器30或第二壓電致動器31後退的情形時,第一恢復機構38或第二恢復機構39對第一壓電致動器30或第二壓電致動器31進行加壓而使其等收縮。 In this state, the positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can be adjusted by the first position adjuster 35 and the second position adjuster 36. That is, the first piezoelectric actuator 30 or the second piezoelectric actuator 31 can be moved forward and backward by rotating the first position adjuster 35 or the second position adjuster 36, respectively, and the rod 26 is set horizontally. status. When the first piezoelectric actuator 30 or the second piezoelectric actuator 31 is retracted by the first position adjuster 35 or the second position adjuster 36, the first recovery mechanism 38 or the second recovery mechanism 39 is paired. The first piezoelectric actuator 30 or the second piezoelectric actuator 31 is pressurized to cause it to contract.
於經過如上的過程設定用以進行分配的第一壓電致動器30及第二壓電致動器31的初始位置後,按照固定的壓力藉由流入口22而向儲存部21供給溶液。接著,開始分配供給於儲存部21的溶液的製程。 After the initial positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 for distributing are set as described above, the solution is supplied to the reservoir 21 by the inflow port 22 at a constant pressure. Next, the process of dispensing the solution supplied to the storage portion 21 is started.
若對第一壓電致動器30施加100%的電壓,對第二壓電致動器31施加0%的電壓,則第一壓電致動器30膨脹,第二壓電致動器31收縮。此時,桿26以圖3為基準向逆時針方向旋轉,並且閥桿28上升,藉由第二恢復機構39的作用而更迅速地實現桿26的旋轉。 If a voltage of 100% is applied to the first piezoelectric actuator 30 and a voltage of 0% is applied to the second piezoelectric actuator 31, the first piezoelectric actuator 30 expands, and the second piezoelectric actuator 31 expands. shrink. At this time, the lever 26 is rotated counterclockwise with reference to FIG. 3, and the valve stem 28 is raised, and the rotation of the lever 26 is more quickly achieved by the action of the second restoring mechanism 39.
於此種狀態下,若對第一壓電致動器30施加0%的電壓,對第二壓電致動器31施加100%的電壓,則第一壓電致動器30收縮,第二壓電致動器31膨脹。此時,桿26向順時針方向旋 轉,並且閥桿28下降。於儲存部21下降的閥桿28對儲存部21內部的溶液進行加壓而藉由噴嘴23向外部排出溶液,藉此實現溶液的分配。於第二壓電致動器31對桿26進行加壓時,第一恢復機構38使第一壓電致動器30收縮,藉此有助於桿26迅速地向順時針方向旋轉。 In this state, if a voltage of 0% is applied to the first piezoelectric actuator 30 and a voltage of 100% is applied to the second piezoelectric actuator 31, the first piezoelectric actuator 30 contracts, and the second The piezoelectric actuator 31 expands. At this time, the rod 26 is rotated clockwise Turn and the valve stem 28 is lowered. The valve stem 28 that has been lowered in the storage portion 21 pressurizes the solution inside the reservoir portion 21 and discharges the solution to the outside through the nozzle 23, thereby realizing the distribution of the solution. When the second piezoelectric actuator 31 pressurizes the rod 26, the first restoring mechanism 38 contracts the first piezoelectric actuator 30, thereby facilitating the rod 26 to rapidly rotate in the clockwise direction.
如上所述,若交替地對第一壓電致動器30與第二壓電致動器31施加電壓,則閥桿28重複升降,並且連續地藉由噴嘴23分配溶液。鉸鏈軸16與閥桿28之間的距離遠遠大於鉸鏈軸16與第一壓電致動器30及第二壓電致動器31之間的距離,故可藉由桿26充分地放大第一壓電致動器30以及第二壓電致動器31的變形量而使閥桿28於充分的高度範圍內作動。 As described above, if a voltage is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 alternately, the valve stem 28 is repeatedly lifted and lowered, and the solution is continuously dispensed by the nozzle 23. The distance between the hinge shaft 16 and the valve stem 28 is much larger than the distance between the hinge shaft 16 and the first piezoelectric actuator 30 and the second piezoelectric actuator 31, so that the rod 26 can be sufficiently enlarged. The amount of deformation of the piezoelectric actuator 30 and the second piezoelectric actuator 31 causes the valve stem 28 to operate within a sufficient height range.
控制第一壓電致動器30及第二壓電致動器31的作動的控制裝置44是伴隨時間的經過,對第一壓電致動器30及第二壓電致動器31施加具有多個形態的脈衝(pulse)波形的電壓,藉此可控制閥桿28的動態特性。特別是,藉由使鉸鏈軸16位於第一壓電致動器30以及第二壓電致動器31之間,以分別使桿26作動的方式,不僅可控制閥桿28的下降運動,而且亦可控制上升運動。而且,可更迅速地分配溶液,亦可準確地控制分配的溶液的量。 The control device 44 that controls the actuation of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 with the passage of time. The voltage of the pulse waveform of a plurality of modalities, whereby the dynamic characteristics of the valve stem 28 can be controlled. In particular, by having the hinge shaft 16 between the first piezoelectric actuator 30 and the second piezoelectric actuator 31, not only the downward movement of the valve stem 28 but also the downward movement of the valve stem 28 can be controlled. It can also control the ascending motion. Moreover, the solution can be dispensed more quickly, and the amount of the dispensed solution can be accurately controlled.
特別是,可利用施加電壓的大小、電壓的交替頻率、電壓隨時間的變化量等控制參數,於控制裝置44中藉由電性方法準確地控制第一壓電致動器30及第二壓電致動器31的機械作動特性。對此種閥桿28的動作的控制性能提高就結果而言,可容易且準確地控制分配的溶液的分配特性。 In particular, the first piezoelectric actuator 30 and the second pressure can be accurately controlled in the control device 44 by an electrical method using control parameters such as the magnitude of the applied voltage, the alternating frequency of the voltage, the amount of change in voltage with time, and the like. Mechanical actuation characteristics of the electric actuator 31. As a result of the improved control performance of the operation of the valve stem 28, the distribution characteristics of the dispensed solution can be easily and accurately controlled.
第一壓電致動器30以及第二壓電致動器31因其特性而 於使用中相對較多地產生熱。若因第一壓電致動器30以及第二壓電致動器31產生的熱而使第一壓電致動器30以及第二壓電致動器31的溫度上升,則其動作特性可能下降。為了阻止產生此種問題,藉由冷卻線47/48經由第一壓電致動器30以及第二壓電致動器31的設置空間而冷卻泵本體15,藉此可防止第一壓電致動器30以及第二壓電致動器31的溫度上升。如上所述般防止第一壓電致動器30以及第二壓電致動器31的溫度上升,藉此亦可固定地保持閥桿28的動態特性,保持溶液的分配品質。 The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are characterized by their characteristics Relatively more heat is generated during use. If the temperatures of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 rise due to the heat generated by the first piezoelectric actuator 30 and the second piezoelectric actuator 31, the operational characteristics may be decline. In order to prevent such a problem from occurring, the pump body 15 is cooled by the cooling wires 47/48 via the installation spaces of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, whereby the first piezoelectricity can be prevented. The temperature of the actuator 30 and the second piezoelectric actuator 31 rises. The temperature rise of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 is prevented as described above, whereby the dynamic characteristics of the valve stem 28 can be fixedly maintained, and the distribution quality of the solution can be maintained.
第一壓電致動器30以及第二壓電致動器31通常由陶瓷(ceramic)材質形成。若長時間使用,則因其材料特性而因施加電壓引起的膨脹位移亦可能與初始不同。於此種情形時,利用第一位置調節器35及第二位置調節器36調整第一壓電致動器30及第二壓電致動器31的位置,藉此可保持桿26及閥桿28的動態特性。 The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are usually formed of a ceramic material. If it is used for a long time, the expansion displacement due to the applied voltage may be different from the initial due to its material properties. In this case, the positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 are adjusted by the first position adjuster 35 and the second position adjuster 36, whereby the rod 26 and the valve stem can be held 28 dynamic characteristics.
於分配的溶液的種類不同的情形時,更換成考慮該溶液的黏度或其他特性設計的其他閥本體20及閥桿28而構成壓電泵12,藉此可根據溶液迅速且有效地對應。 When the type of the dispensed solution is different, the other valve body 20 and the valve stem 28, which are designed in consideration of the viscosity or other characteristics of the solution, are replaced to constitute the piezoelectric pump 12, whereby the solution can be quickly and efficiently responded to the solution.
如上所述,本發明的壓電分配器10以可裝卸的方式構成泵本體15與閥本體20,亦以容易連接及分離的方式構成桿26與閥桿28。因此,維護、修理、清洗容易,且根據溶液的多種特性而構成壓電泵12的情形較為容易。鬆弛結合泵本體15與閥本體20的螺絲,使閥桿28的卡合桿29自桿26的卡合槽27脫離,藉此可容易地自泵本體15分離閥本體20與閥桿28。而且,若分離閥本體20,則為了下次使用而進行清洗的情形較為容易。於閥本體20或閥桿28損壞的情形時,亦可藉由如上的方法分離,容 易地更換成嶄新的閥本體20或閥桿28。 As described above, the piezoelectric distributor 10 of the present invention detachably configures the pump body 15 and the valve body 20, and also constitutes the rod 26 and the valve stem 28 in an easily connectable and detachable manner. Therefore, maintenance, repair, and cleaning are easy, and it is easy to configure the piezoelectric pump 12 in accordance with various characteristics of the solution. The screw that couples the pump body 15 and the valve body 20 is loosened, and the engagement lever 29 of the valve stem 28 is disengaged from the engagement groove 27 of the lever 26, whereby the valve body 20 and the valve stem 28 can be easily separated from the pump body 15. Further, when the valve body 20 is separated, it is easy to perform cleaning for the next use. When the valve body 20 or the valve stem 28 is damaged, it can also be separated by the above method. Easily replaced with a new valve body 20 or valve stem 28.
如上所述,於為了零件的維護、修理、清洗等而於分離泵本體15或閥本體20後進行再組裝、或於分離桿26與閥桿28後進行再組裝的情形時,因組裝誤差等原因而泵的作動位移改變,從而實際溶液噴出量可能與預先設定的基準設定值的初始溶液噴出量產生差異。此種實際溶液噴出量與預先設定的初始溶液噴出量間的差異亦可藉由第一壓電致動器30、第二壓電致動器31、桿26、閥桿28等零件的磨損等而誘發。而且,若溶液噴出機構25的實際溶液噴出量與初始溶液噴出量存在差異,則可產生如下問題:導致被分配溶液的製品的不良;或過多地噴出溶液而浪費溶液。 As described above, in the case where the pump body 15 or the valve body 20 is separated after the separation of the pump body 15 or the valve body 20 for maintenance, repair, cleaning, or the like, or when the separation lever 26 and the valve stem 28 are reassembled, assembly errors or the like may occur. The reason is that the actuation displacement of the pump is changed, so that the actual solution discharge amount may differ from the initial solution discharge amount of the preset reference set value. The difference between the actual solution ejection amount and the preset initial solution ejection amount may be caused by wear of the first piezoelectric actuator 30, the second piezoelectric actuator 31, the rod 26, the valve stem 28, and the like. And induced. Further, if there is a difference between the actual solution discharge amount of the solution discharge mechanism 25 and the initial solution discharge amount, there may be a problem that the product of the solution to be dispensed is defective; or the solution is excessively ejected to waste the solution.
然而,本發明的壓電分配器10於溶液噴出機構25作動而噴出溶液時,藉由具有結合於溶液噴出機構25的桿26而連動的探針41的位移檢測感測器40檢測桿26的作動位移,藉此可防止此種問題。即,若控制裝置44接收關於桿26的作動位移的檢測訊號並立即將關於該檢測訊號的資訊顯示於顯示裝置45,則使用者可觀察顯示於顯示裝置45的資訊,掌握溶液噴出機構25是否與基準設定值一致地噴出溶液。而且,若溶液噴出機構25的溶液噴出量脫離基準設定值,則可藉由如下等作業,使溶液噴出機構25的溶液噴出量與基準設定值一致:調整對泵本體15與閥本體20之間的結合部的擰緊量;於分離泵本體15與閥本體20後進行再組裝;於分離桿26與閥桿28後進行再組裝;或調整對第一壓電致動器30以及第二壓電致動器31的供給電壓。 However, when the piezoelectric dispenser 10 of the present invention ejects the solution while the solution ejecting mechanism 25 is actuated, the displacement detecting sensor 40 of the probe 41 linked by the rod 26 coupled to the solution ejecting mechanism 25 detects the rod 26 Actuate the displacement to prevent this problem. That is, if the control device 44 receives the detection signal regarding the actuation displacement of the lever 26 and immediately displays the information about the detection signal on the display device 45, the user can observe the information displayed on the display device 45 and grasp whether the solution ejection mechanism 25 is The reference set value is ejected in a consistent manner. Further, when the solution discharge amount of the solution discharge mechanism 25 is out of the reference set value, the solution discharge amount of the solution discharge mechanism 25 can be made to coincide with the reference set value by the following operation: adjustment between the pump body 15 and the valve body 20 The tightening amount of the joint portion; reassembling after separating the pump body 15 and the valve body 20; reassembling after the separation rod 26 and the valve stem 28; or adjusting the first piezoelectric actuator 30 and the second piezoelectric element The supply voltage of the actuator 31.
若因組裝誤差、零件的磨損或損壞而無法分配溶液、或 溶液的分配量不準確,則亦可能產生被分配溶液的製品全部成為不良而需要廢棄的情形。於該情形時,亦可能產生高於壓電分配器10的零件價格的經濟損失。然而,若如本發明般檢測噴出溶液的溶液噴出機構25的作動位移,則於實際溶液噴出量表現地與初始溶液噴出量不同時,使用者可迅速地對應該情形。而且,可防止製程的損失及不良品的產生,提高生產性。 If the assembly error, part wear or damage, the solution cannot be dispensed, or If the amount of the solution dispensed is not accurate, it may happen that the products to be dispensed are all defective and need to be discarded. In this case, it is also possible to generate an economic loss higher than the price of the parts of the piezoelectric distributor 10. However, when the actuation displacement of the solution discharge mechanism 25 of the discharge solution is detected as in the present invention, the user can quickly respond to the situation when the actual solution discharge amount is different from the initial solution discharge amount. Moreover, it is possible to prevent the loss of the process and the generation of defective products, and to improve productivity.
根據情形,若溶液噴出機構25的作動位移與預先設定的基準設定值存在差異,則控制裝置44改變對第一壓電致動器30以及第二壓電致動器31的供給電壓,藉此亦可將溶液噴出機構25的作動位移調整成與預先設定的基準設定值一致。此種因控制裝置44改變對第一壓電致動器30以及第二壓電致動器31的供給電壓引起的溶液噴出機構25的作動位移調整動作可於重新分配溶液的時點執行一次,亦可於在將溶液分配一定時間後,空開單獨的作動位移調整時間而停止溶液噴出的狀態下執行。 According to the situation, if the actuation displacement of the solution discharge mechanism 25 differs from the preset reference setting value, the control device 44 changes the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31, thereby The actuating displacement of the solution ejecting mechanism 25 can also be adjusted to match the preset reference set value. The operation displacement adjustment operation of the solution discharge mechanism 25 caused by the control device 44 changing the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can be performed once when the solution is redistributed. It can be carried out in a state where the solution is dispensed for a certain period of time, and the individual actuation displacement adjustment time is released to stop the solution from being ejected.
利用位移檢測感測器40進行的溶液噴出機構25的作動範圍檢測可於組裝或再組裝壓電泵12後,為了設定對第一壓電致動器30以及第二壓電致動器31的施加電壓等各種動作參數而執行一次。當然,利用位移檢測感測器40進行的溶液噴出機構25的作動範圍檢測亦可於在將溶液分配一定時間後,空開單獨的檢測時間而停止溶液噴出的狀態下執行。 The actuation range detection of the solution ejection mechanism 25 by the displacement detecting sensor 40 can be performed after the piezoelectric pump 12 is assembled or reassembled, in order to set the first piezoelectric actuator 30 and the second piezoelectric actuator 31. It is executed once by applying various operating parameters such as voltage. Of course, the detection of the operating range of the solution ejecting mechanism 25 by the displacement detecting sensor 40 may be performed in a state where the solution is dispensed for a certain period of time, and a separate detecting time is left to stop the ejection of the solution.
如上所述,不僅於零件的維護、修理、清洗等作業中需要檢測溶液噴出機構25的作動位移,而且亦於結合泵本體15與閥本體20,結合桿26與閥桿28而製造壓電泵12時,需要檢測溶液噴出機構25的作動位移。於該情形時,本發明的壓電分配器10 可利用位移檢測感測器40便利地檢測用以對第一壓電致動器30以及第二壓電致動器31的施加電壓等各種動作參數的初始設定的溶液噴出機構25的作動位移。 As described above, it is necessary to detect the actuation displacement of the solution discharge mechanism 25 not only in the maintenance, repair, cleaning, etc. of the parts, but also to bond the pump body 15 and the valve body 20, and to bond the rod 26 and the valve stem 28 to manufacture the piezoelectric pump. At 12 o'clock, it is necessary to detect the actuation displacement of the solution ejecting mechanism 25. In this case, the piezoelectric distributor 10 of the present invention The displacement detecting sensor 40 can conveniently detect the displacement of the solution ejecting mechanism 25 for initial setting of various operating parameters such as the applied voltage of the first piezoelectric actuator 30 and the second piezoelectric actuator 31.
於本發明中,用以檢測溶液噴出機構25的作動位移的位移檢測感測器的具體構造、或與溶液噴出機構25的連接構造可變更為多種。例如,圖4至圖6是表示位移檢測感測器的具體構造、或與溶液噴出機構25的連接構造經變更的其他實施例。 In the present invention, the specific configuration of the displacement detecting sensor for detecting the actuation displacement of the solution ejecting mechanism 25 or the connection structure with the solution ejecting mechanism 25 can be variously varied. For example, FIGS. 4 to 6 show other embodiments in which the specific configuration of the displacement detecting sensor or the connection structure with the solution ejecting mechanism 25 is changed.
首先,圖4是表示本發明的第二實施例的壓電分配器。 First, Fig. 4 is a piezoelectric distributor showing a second embodiment of the present invention.
圖4所示的本發明的第二實施例的壓電分配器50包含壓電泵12、位移檢測感測器52、控制裝置44、及顯示裝置45。壓電泵12具有泵本體15、閥本體20、溶液噴出機構25、第一壓電致動器30、第二壓電致動器31、及泵控制器33。溶液噴出機構25包含結合於泵本體15的桿26、及以與桿26連接的方式結合於閥本體20的閥桿28。此種本發明的第二實施例的壓電分配器50與之前說明的本發明的第一實施例的壓電分配器10相比,僅變更位移檢測感測器52的具體構造、及位移檢測感測器52與溶液噴出機構25的連接構造。剩餘構成的具體構造或作用與上述內容相同。 The piezoelectric distributor 50 of the second embodiment of the present invention shown in FIG. 4 includes a piezoelectric pump 12, a displacement detecting sensor 52, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 50 of the second embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 52 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 52 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.
位移檢測感測器52以可檢測溶液噴出機構25的作動位移,並將該檢測訊號提供至控制裝置44的方式設置於泵本體15。位移檢測感測器52包含:探針53;及感測器本體55,其結合探針53使其可移動。探針53是一側末端部以可旋轉的方式結合於具備於桿26的中間的樞銷(pivot pin)57,以便可與桿26的旋轉連動而升降。於探針53的末端部,具備用以與樞銷57結合的結 合槽54,樞銷57嵌合結合於結合槽54。 The displacement detecting sensor 52 is provided to the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 52 includes: a probe 53; and a sensor body 55 that is coupled to the probe 53 to be movable. The probe 53 is rotatably coupled to a pivot pin 57 provided at the center of the rod 26 so as to be movable up and down in conjunction with the rotation of the lever 26. At the end of the probe 53, a knot for coupling with the pivot pin 57 is provided. The groove 54 and the pivot pin 57 are fitted and coupled to the coupling groove 54.
於因第一壓電致動器30以及第二壓電致動器31的作用而桿26相對於鉸鏈軸16進行旋轉運動時,探針53與桿26連動而相對於樞銷57旋轉,同時上下移動。於感測器本體55的內部,具備導引(guide)機構(未圖示),該導引機構以可不向左右振盪,而於上下方向上進行直線移動的方式導引探針53。 When the lever 26 is rotated relative to the hinge shaft 16 by the action of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, the probe 53 is rotated in conjunction with the lever 26 to rotate relative to the pivot pin 57 while move up and down. Inside the sensor body 55, there is provided a guide mechanism (not shown) that guides the probe 53 so as not to oscillate to the left and right and to linearly move in the vertical direction.
此種位移檢測感測器52藉由探針53檢測溶液噴出機構25的桿26的作動位移,將檢測到的桿26的作動位移提供至控制裝置44。 The displacement detecting sensor 52 detects the actuation displacement of the rod 26 of the solution ejecting mechanism 25 by the probe 53, and supplies the detected displacement of the rod 26 to the control device 44.
另一方面,圖5是表示本發明的第三實施例的壓電分配器。 On the other hand, Fig. 5 is a view showing a piezoelectric distributor of a third embodiment of the present invention.
圖5所示的本發明的第三實施例的壓電分配器60包含壓電泵12、位移檢測感測器62、控制裝置44、及顯示裝置45。壓電泵12具有泵本體15、閥本體20、溶液噴出機構25、第一壓電致動器30、第二壓電致動器31、及泵控制器33。溶液噴出機構25包含結合於泵本體15的桿26、及以與桿26連接的方式結合於閥本體20的閥桿28。此種本發明的第三實施例的壓電分配器60與之前說明的本發明的第一實施例的壓電分配器10相比,僅變更位移檢測感測器62的具體構造、及位移檢測感測器62與溶液噴出機構25的連接構造。剩餘構成的具體構造或作用與上述內容相同。 The piezoelectric distributor 60 of the third embodiment of the present invention shown in FIG. 5 includes a piezoelectric pump 12, a displacement detecting sensor 62, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 60 of the third embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 62 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 62 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.
位移檢測感測器62以可檢測溶液噴出機構25的作動位移,並將該檢測訊號提供至控制裝置44的方式結合於泵本體15的外表面。位移檢測感測器62包含:探針63;及感測器本體65, 其結合探針63使其可移動。探針63是一側末端部與桿26的一側末端部的外表面接觸,以便可與桿26的旋轉連動而升降。於探針63的一側末端部,具備與桿26的表面滑動接觸的曲面形的接觸曲面64。 The displacement detecting sensor 62 is coupled to the outer surface of the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 62 includes: a probe 63; and a sensor body 65, It is combined with the probe 63 to make it movable. The probe 63 has a one end portion that is in contact with the outer surface of one end portion of the rod 26 so as to be movable up and down in conjunction with the rotation of the rod 26. A curved contact curved surface 64 that is in sliding contact with the surface of the rod 26 is provided at one end portion of the probe 63.
此種位移檢測感測器62藉由探針63檢測溶液噴出機構25的桿26的作動位移,將檢測到的桿26的作動位移提供至控制裝置44。 The displacement detecting sensor 62 detects the actuation displacement of the rod 26 of the solution ejecting mechanism 25 by the probe 63, and supplies the detected displacement of the rod 26 to the control device 44.
另一方面,圖6是表示本發明的第四實施例的壓電分配器。 On the other hand, Fig. 6 is a view showing a piezoelectric distributor of a fourth embodiment of the present invention.
圖6所示的本發明的第四實施例的壓電分配器70包含壓電泵12、位移檢測感測器72、控制裝置44、及顯示裝置45。壓電泵12具有泵本體15、閥本體20、溶液噴出機構25、第一壓電致動器30、第二壓電致動器31、及泵控制器33。溶液噴出機構25包含結合於泵本體15的桿26、及以與桿26連接的方式結合於閥本體20的閥桿28。此種本發明的第四實施例的壓電分配器70與之前說明的本發明的第一實施例的壓電分配器10相比,僅變更位移檢測感測器72的具體構造、及位移檢測感測器72與溶液噴出機構25的連接構造。剩餘構成的具體構造或作用與上述內容相同。 The piezoelectric distributor 70 of the fourth embodiment of the present invention shown in FIG. 6 includes a piezoelectric pump 12, a displacement detecting sensor 72, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 70 of the fourth embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 72 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 72 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.
位移檢測感測器72以可檢測溶液噴出機構25的作動位移,並將該檢測訊號提供至控制裝置44的方式結合於泵本體15的外表面。位移檢測感測器72包含:探針73;及感測器本體75,其結合探針73使其可移動。探針73是一側末端部與閥桿28所具備的突出部77的外表面接觸,以便可與閥桿28的運動連動而升 降。於探針73的一側末端部,具備與桿26的表面滑動接觸的曲面形的接觸曲面74。於閥桿28上下移動時,探針73亦與閥桿28連動而升降,此時感測器本體75檢測探針73的運動位移,藉此可檢測出閥桿28的作動位移。 The displacement detecting sensor 72 is coupled to the outer surface of the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 72 includes: a probe 73; and a sensor body 75 that is coupled to the probe 73 to be movable. The probe 73 is in contact with the outer surface of the protruding portion 77 provided on the valve stem 28 so as to be movable in conjunction with the movement of the valve stem 28. drop. A curved contact curved surface 74 that is in sliding contact with the surface of the rod 26 is provided at one end portion of the probe 73. When the valve stem 28 moves up and down, the probe 73 also moves up and down in conjunction with the valve stem 28, and the sensor body 75 detects the displacement of the movement of the probe 73, whereby the actuation displacement of the valve stem 28 can be detected.
以上,對本發明的壓電分配器的多個實施例進行了說明,但本發明的範圍並不限定於之前說明且圖示的形態。 Although a plurality of embodiments of the piezoelectric distributor of the present invention have been described above, the scope of the present invention is not limited to the embodiments described and illustrated.
例如,將利用彈簧或氣壓作為之前說明的第一恢復機構38及第二恢復機構39的情形列舉為例而進行了說明,但根據情形,亦可利用液體的壓力構成第一恢復機構及第二恢復機構。又,亦可構成不具備第一恢復機構38及第二恢復機構39、或冷卻線47/48的泵。 For example, the case where the spring or the air pressure is used as the first recovery mechanism 38 and the second recovery mechanism 39 described above has been described as an example. However, depending on the situation, the pressure of the liquid may be used to constitute the first recovery mechanism and the second. Restore the institution. Further, a pump that does not include the first recovery mechanism 38 and the second recovery mechanism 39 or the cooling lines 47/48 may be configured.
又,控制裝置44自位移檢測感測器72接收關於溶液噴出機構的作動位移的資訊,若實際溶液噴出機構的溶液噴出量與預先設定的基準值存在差異,則除顯示裝置45外,亦可藉由警報(alarm)裝置、或警告燈(warning lamp)等將該情形報告給使用者。 Moreover, the control device 44 receives information about the actuation displacement of the solution discharge mechanism from the displacement detecting sensor 72. If the solution ejection amount of the actual solution ejection mechanism differs from the preset reference value, the display device 45 may be used in addition to the display device 45. The situation is reported to the user by an alarm device, or a warning lamp, or the like.
又,桿26與閥桿28除利用桿26的卡合槽27與閥桿28的卡合桿29的方法外,亦可藉由其他多種方法而連接。而且,溶液噴出機構25可變更為除包含桿26及閥桿28的構造外的其他構造,泵本體15與閥本體20亦能夠以彼此成為一體的方式形成,而並非以可裝卸的方式結合。 Further, the lever 26 and the valve stem 28 may be connected by a plurality of other methods in addition to the engagement groove 27 of the lever 26 and the engagement lever 29 of the valve stem 28. Further, the solution discharge mechanism 25 can be changed to a structure other than the structure including the rod 26 and the valve stem 28, and the pump body 15 and the valve body 20 can be formed integrally with each other without being detachably coupled.
又,作為用以檢測溶液噴出機構的作動位移的位移檢測感測器,除如圖所示的所謂探針感測器外,可利用能夠以接觸式或非接觸式檢測溶液噴出機構的作動位移,並將該檢測訊號提供 至控制裝置44的多種構造。 Further, as the displacement detecting sensor for detecting the displacement of the solution ejecting mechanism, in addition to the so-called probe sensor as shown in the drawing, the movable displacement capable of detecting the solution ejecting mechanism by contact or non-contact type can be utilized. And provide the detection signal Various configurations to the control device 44.
15‧‧‧泵本體 15‧‧‧ pump body
16‧‧‧鉸鏈軸 16‧‧‧Hinged shaft
20‧‧‧閥本體 20‧‧‧ valve body
21‧‧‧儲存部 21‧‧‧ Storage Department
22‧‧‧流入口 22‧‧‧Inlet
23‧‧‧噴嘴 23‧‧‧Nozzles
25‧‧‧溶液噴出機構 25‧‧‧Solution ejecting mechanism
26‧‧‧桿 26‧‧‧ pole
27‧‧‧卡合槽 27‧‧‧ snap groove
28‧‧‧閥桿 28‧‧‧ valve stem
29‧‧‧卡合桿 29‧‧‧Knitting rod
30‧‧‧第一壓電致動器 30‧‧‧First Piezoelectric Actuator
31‧‧‧第二壓電致動器 31‧‧‧Second Piezoelectric Actuator
33‧‧‧泵控制器 33‧‧‧ pump controller
35‧‧‧第一位置調節器 35‧‧‧First position adjuster
36‧‧‧第二位置調節器 36‧‧‧Second position regulator
38‧‧‧第一恢復機構 38‧‧‧First Recovery Agency
39‧‧‧第二恢復機構 39‧‧‧Second recovery agency
40‧‧‧位移檢測感測器 40‧‧‧ Displacement detection sensor
41‧‧‧探針 41‧‧‧Probe
42‧‧‧感測器本體 42‧‧‧Sensor body
44‧‧‧控制裝置 44‧‧‧Control device
45‧‧‧顯示裝置 45‧‧‧Display device
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EP3403727A4 (en) | 2016-01-16 | 2019-09-11 | Musashi Engineering, Inc. | Liquid material ejection device |
KR101819077B1 (en) * | 2016-05-25 | 2018-01-16 | 한국기계연구원 | Jet Dispensing Device Using Hinge Lever Type Displacement Amplification Mechanism |
CN107051777A (en) * | 2017-05-08 | 2017-08-18 | 常州铭赛机器人科技股份有限公司 | Fluid micro injection apparatus |
KR102446597B1 (en) * | 2020-11-17 | 2022-09-23 | 주식회사 엠아이티 | A high-precision soldering device and A control method thereof |
CN112756213A (en) * | 2021-01-26 | 2021-05-07 | 深圳市博明机械设备科技有限公司 | Injection valve mechanism for dispenser |
KR102596959B1 (en) | 2022-03-23 | 2023-10-31 | 엘에스일렉트릭(주) | Fluid collecting system and method of collecting fluid using the same |
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JPH0315674A (en) * | 1989-06-12 | 1991-01-24 | Nippon Keiki Seisakusho:Kk | Control device of piezoelectric pump |
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