TWI568932B - Piezoelectric dispenser - Google Patents

Description

Piezoelectric distributor

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a piezoelectric dispenser, and more particularly to a piezoelectric distribution of a piezoelectric pump having a piezoelectric element used as an actuator to dispense a solution. Device.

A dispenser for supplying a liquid state solution such as water, oil, or resin in a fixed amount is used in various fields such as semiconductor manufacturing and medical fields.

In particular, in the semiconductor manufacturing process, the dispenser is used more in an underfill process, and the dispenser is also used more for the inside of a package in which a semiconductor element is filled with a resin. In the process of manufacturing a light-emitting diode (LED) device, the dispenser is used in a process of applying a phosphor mixed with a phosphor and a resin to an LED chip in an LED device.

In such a dispenser, a pump that receives the solution and is dispensed to an accurate position is used as a core device.

In the construction of the pump, there are many types such as a screw pump, a linear pump, and the like. Recently, in order to perform a dispensing operation at a high speed, a piezoelectric pump using a piezoelectric element as an actuator has been developed for use in a semiconductor process or the like.

In the Korean Patent Registration Publication No. 1301107 (August 27, 2013), there is disclosed a piezoelectric pump including a pump body and a valve body that are coupled to each other in a separable manner. A hinge shaft is provided to the pump body to provide a laterally elongated lever in a rotatable manner relative to the hinge axis. A valve stem formed to extend in the vertical direction is fitted to the valve body. The rod and the valve stem are connected to each other, and if the rod rotates relative to the hinge shaft, the valve stem is raised and lowered. A pair of piezoelectric actuators are disposed on the pump body to rotate the rod relative to the hinge axis. The pair of piezoelectric actuators is composed of a piezoelectric element having a structure in which, when a voltage is applied, the length becomes longer or shorter depending on the potential of the applied voltage.

When the conventional piezoelectric pump as described above is reassembled and used after the valve body is separated from the pump body for maintenance, repair, cleaning, or the like of the parts, the amount of solution discharge is different from the initial discharge amount. That is, when the valve body is reassembled and actuated, the free stroke of the pump is changed due to an assembly error or the like, and the amount of the solution discharged may be different from the initial discharge amount. The difference between the actual solution ejection amount and the preset initial solution ejection amount can also be induced by the wear of the piezoelectric actuator, the rod, and the stem member.

Further, in the production of the above-described prior piezoelectric pump, after the pump body and the valve body are coupled to the valve body and the valve stem, the initial setting of various operating parameters such as the applied voltage of the piezoelectric actuator is required, and the operation of the pump needs to be detected. Displacement.

The present invention has been made to solve the above needs, and an object thereof is to provide a piezoelectric distributor which can be obtained by accurately detecting an actuation displacement of a solution discharge mechanism of a piezoelectric pump that ejects a stored solution by a fixed amount. Know the assembly error or The displacement of the solution ejecting mechanism caused by the wear of the parts changes.

A piezoelectric distributor of the present invention for achieving the above object is characterized by comprising: a pump body; a solution ejecting mechanism having a rod and a valve stem, the rod being rotatable relative to a hinge shaft provided to the pump body In a manner, the valve stem is connected to the rod in a manner of lifting movement accompanying rotation of the rod; the piezoelectric actuator is disposed on the pump in such a manner that a tip end portion thereof can be in contact with the rod a body, in order to lengthen a length when a voltage is applied, and pressurizing the rod to rotate the rod about the hinge axis; the valve body having a storage portion, an inflow port, and a nozzle, The storage portion is inserted into a distal end portion of the valve stem, and stores a solution for the solution to flow into the storage portion, the nozzle being discharged accompanying the advancement and retreat movement of the valve stem in the storage portion a solution of the storage portion; a displacement detecting sensor disposed on the pump body for detecting an actuation displacement of the solution ejecting mechanism; and a control device electrically connected to the piezoelectric And the bit The detection sensor is moved to apply a voltage to cause the piezoelectric actuator to actuate, and a detection signal for an actuation displacement of the solution ejection mechanism is received from the displacement detecting sensor.

In the piezoelectric dispenser of the present invention, when the solution ejecting mechanism of the ejecting solution is actuated to eject the solution, the displacement detecting sensor can be used to detect the displacement of the solution ejecting mechanism. Therefore, it is possible to know the change in the displacement of the solution discharge mechanism due to the assembly error or the wear of the parts. Moreover, the control device can receive the detection signal about the actuation displacement of the solution ejection mechanism from the displacement detecting sensor, and immediately display information about the detection signal on the display device. Therefore, the user can observe the information displayed on the display device and easily grasp whether or not the solution discharge mechanism ejects the solution in accordance with the reference set value. With this situation, there is an advantage in that after changing the nozzle or cleaning the nozzle In the case of reassembly, the displacement setting of the nozzle to the pump body can be performed efficiently, easily, and accurately.

Further, the piezoelectric distributor of the present invention detects the displacement of the solution discharge mechanism of the discharge solution, so that the user can quickly respond to the situation when the actual solution discharge amount is different from the initial solution discharge amount. Therefore, it is possible to prevent the loss of the process and the generation of defective products, and to improve productivity.

10, 50, 60, 70‧‧‧ Piezoelectric distributor

12‧‧‧Piezoelectric pump

15‧‧‧ pump body

16‧‧‧Hinged shaft

20‧‧‧ valve body

21‧‧‧ Storage Department

22‧‧‧Inlet

23‧‧‧Nozzles

25‧‧‧Solution ejecting mechanism

26‧‧‧ pole

27‧‧‧ snap groove

28‧‧‧ valve stem

29‧‧‧Knitting rod

30‧‧‧First Piezoelectric Actuator

31‧‧‧Second Piezoelectric Actuator

33‧‧‧ pump controller

35‧‧‧First position adjuster

36‧‧‧Second position regulator

38‧‧‧First Recovery Agency

39‧‧‧Second recovery agency

40, 52, 62, 72‧‧‧ Displacement Detection Sensors

41, 53, 63, 73‧‧ ‧ probe

42, 55, 65, 75‧‧‧ sensor body

44‧‧‧Control device

45‧‧‧Display device

47, 48‧‧‧ cooling line

54‧‧‧ joint slot

57‧‧‧ pivot

64, 74‧‧‧Contact surface

77‧‧‧Protruding

Fig. 1 is a front view showing a piezoelectric distributor of a first embodiment of the present invention.

Fig. 2 is a perspective view showing a piezoelectric pump of the piezoelectric distributor shown in Fig. 1;

Figure 3 is a cross-sectional view showing a piezoelectric distributor of a first embodiment of the present invention.

Fig. 4 is a view showing a piezoelectric distributor of a second embodiment of the present invention.

Fig. 5 is a view showing a piezoelectric distributor of a third embodiment of the present invention.

Fig. 6 is a view showing a piezoelectric distributor of a fourth embodiment of the present invention.

Hereinafter, the piezoelectric distributor of the present invention will be described in detail with reference to the accompanying drawings.

1 is a front view showing a piezoelectric dispenser according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a piezoelectric pump of the piezoelectric distributor shown in FIG. 1, and FIG. 3 is a first embodiment of the present invention. A cross-sectional view of a piezoelectric dispenser of the example.

As shown in FIGS. 1 to 3, a piezoelectric distributor 10 according to a first embodiment of the present invention includes a piezoelectric pump 12, a displacement detecting sensor 40, and a control device 44. Piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a piezoelectric actuator 30, a piezoelectric actuator 31, and a pump controller 33. Although not shown in detail in the drawings, the pump body 15 and the valve body 20 are coupled to each other by a fixing member such as a bolt. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15 and a valve stem 28 coupled to the valve body 20 in a manner coupled to the rod 26.

The valve body 20 includes a reservoir 21, an inflow port 22, and a nozzle 23. The storage portion 21 is formed in a container form that is open toward the upper side, and the valve stem 28 is fitted to the storage portion 21 to seal the upper side of the storage portion 21. The inflow port 22 is connected to the storage portion 21. The solution supplied from the outside by the inflow port 22 is transmitted to the storage unit 21.

A hinge shaft 16 is provided to the pump body 15 to provide a laterally elongated rod 26 in a rotatable manner relative to the hinge shaft 16. The valve stem 28 is formed in such a manner that the valve body 20 is fitted in a manner extending in the vertical direction. The rod 26 and the valve stem 28 are connected to each other, and if the rod 26 is rotated relative to the hinge shaft 16, the valve stem 28 is raised and lowered.

The valve stem 28 connected to the rod 26 moves up and down with respect to the storage portion 21 in accordance with the rotation of the rod 26. When the valve stem 28 descends after rising and moves toward the nozzle 23 located at the lower portion thereof, the solution inside the reservoir portion 21 is pressurized to dispense the solution to the outside through the nozzle 23.

Rod 26 and valve stem 28 can be coupled by a variety of methods. In the present embodiment, the rod 26 and the valve stem 28 are simply connected in a matingly coupled configuration. An engagement groove 27 that is open in the horizontal direction is formed at a distal end portion of the rod 26. That is, the engagement groove 27 of the rod 26 is formed in a C-shape. An engagement lever 29 is provided at an upper end portion of the valve stem 28. The engagement lever 29 is coupled in such a manner as to be fitted to the engagement groove 27 of the lever 26 and rotatable relative to the lever 26. That is, it is configured such that the rotational motion of the rod 26 is converted into the lifting motion of the valve stem 28.

The engagement groove 27 is formed to be open in the horizontal direction, and thus can be The engagement lever 29 moves in the horizontal direction with respect to the engagement groove 27, and the engagement groove 27 and the engagement lever 29 are attached and detached. Further, since the engagement groove 27 is formed in the horizontal direction, even if the engagement groove 27 is moved up and down by the rotation of the lever 26, the engagement lever 29 does not fall off from the engagement groove 27 and rises or falls with respect to the valve body 20. When the separation lever 26 and the valve stem 28 are required, the engagement lever 29 can be easily separated by moving the engagement lever 29 in the horizontal direction with respect to the engagement groove 27.

As shown in FIG. 3, the piezoelectric actuator 30 and the piezoelectric actuator 31 are provided in the pump body 15. There are two piezoelectric actuators (the first piezoelectric actuator 30 and the second piezoelectric actuator 31) that rotate the rod 26 relative to the hinge shaft 16. The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are composed of piezoelectric elements. In other words, the piezoelectric element having the following structure constitutes the first piezoelectric actuator 30 and the second piezoelectric actuator 31: when a voltage is applied, the length becomes longer or shorter depending on the potential of the applied voltage. In the present embodiment, the following description will be made by taking an example in which a multi-stack type piezoelectric actuator configured by laminating a plurality of piezoelectric elements is used to constitute the first piezoelectric actuator 30 and the first A bimorph actuator 31.

The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are arranged side by side in the vertical direction and are provided in the pump body 15 . The first piezoelectric actuator 30 and the second piezoelectric actuator 31 have a hinge shaft 16 therebetween, and their lower ends are in contact with the upper surface of the rod 26, respectively. When a voltage is applied to the first piezoelectric actuator 30 and the length becomes long, the lever 26 is rotated counterclockwise with reference to FIG. When a voltage is applied to the second piezoelectric actuator 31 and the length becomes long, the lever 26 rotates clockwise with reference to FIG.

The first position adjuster 35 and the second position adjuster 36 are disposed at the upper ends of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. The first position adjuster 35 and the second position adjuster 36 are screwed to the pump body 15 in a state where the respective end portions are in contact with the end portions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31. . The first position adjuster 35 adjusts the position of the first piezoelectric actuator 30 with respect to the rod 26 and the pump body 15. The second position adjuster 36 adjusts the position of the second piezoelectric actuator 31 with respect to the rod 26 and the pump body 15. That is, when the first piezoelectric actuator 30 is pressed by tightening the first position adjuster 35, the first piezoelectric actuator 30 is lowered to approach the rod 26 or is in close contact with the rod 26. The second position adjuster 36 is also actuated by the same method as the first position adjuster 35.

A first recovery mechanism 38 and a second recovery mechanism 39 are provided in a lower portion of each of the first piezoelectric actuator 30 and the second piezoelectric actuator 31. The first restoring mechanism 38 is disposed inside the pump body 15 and applies a force to the first piezoelectric actuator 30 in a direction in which the first piezoelectric actuator 30 is contracted. Similarly, the second recovery mechanism 39 is disposed inside the pump body 15 and applies a force to the second piezoelectric actuator 31 in a direction in which the second piezoelectric actuator 31 contracts. The first recovery mechanism 38 and the second recovery mechanism 39 may respectively make the first piezoelectric actuator 30 and the second piezoelectric body in the lower portions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. The direction in which the actuator 31 contracts is a spring that provides an elastic force, and may also be a fluid duct.

In the present embodiment, the case of the first recovery mechanism 38 and the second recovery mechanism 39 in the form of a spring is exemplified as being respectively activated by the first piezoelectric actuator 30 and the second piezoelectric actuator, respectively. The lower portion of the position corresponding to the device 31 transmits an elastic force to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. When the air pressure or the hydraulic pressure is used differently from the present embodiment, the following first recovery mechanism 38 and second recovery mechanism 39 may be used: the air pressure or the hydraulic pressure is transmitted to the first piezoelectric actuator 30 through the fluid conduit. And the second piezoelectric actuator 31 transmits a force in a direction to return the first piezoelectric actuator 30 and the second piezoelectric actuator 31 to the home position.

Referring to FIG. 3, the displacement detecting sensor 40 is a detectable solution ejecting mechanism The actuation displacement of 25 is provided to the pump body 15 in such a manner that the detection signal is supplied to the control device 44. The displacement detecting sensor 40 includes a probe 41 and a sensor body 42 that is coupled to the probe 41 to be movable. The probe 41 has a one end portion that is coupled to the middle of the rod 26 so as to be movable up and down in conjunction with the rotation of the rod 26. The sensor body 42 detects the displacement of the probe 41 when the probe 41 moves up and down, thereby detecting the actuation displacement of the lever 26. That is, the sensor body 42 detects the actuation displacement of the rod 26 by the probe 41 and supplies the detection signal to the control device 44.

The lever 26 is rotated relative to the hinge shaft 16, so that the probe 41 coupled to the lever 26 also oscillates slightly in the left-right direction on the one hand, and moves up and down on the one hand without linear movement up and down. However, the rotational displacement angle of the rod 26 is very small, so the amplitude of the left and right oscillations of the probe 41 is also a minute level. Therefore, by appropriately designing the arrangement of the components inside the sensor body 42 and the probe 41, the probe 41 can be moved up and down without interfering with the components inside the sensor body 42. Moreover, problems can be caused by the proper configuration of the probe 41 without detecting the actuation displacement of the probe 41 by the sensor body 42.

The control device 44 applies a voltage in such a manner that the first piezoelectric actuator 30 is controlled by controlling the first piezoelectric actuator 30 and the pump controller 33 of the second piezoelectric actuator 31 in the piezoelectric pump 12. And the second piezoelectric actuator 31 is actuated. Further, the control device 44 receives a detection signal from the displacement detecting sensor 40 regarding the actuation displacement of the lever 26. The control device 44 can receive a detection signal regarding the actuation displacement of the lever 26 and display information about the detection signal on the display device 45. For example, the control device 44 can numerically display the actuation displacement of the lever 26 on the display device 45. Further, the control device 44 can compare the actuation displacement of the solution discharge mechanism 25 with a preset reference set value, and whether or not the actuation displacement of the solution discharge mechanism 25 is set to a predetermined reference. A message having the same set value or whether it is detached is displayed on the display device 45.

The user can observe the information displayed on the display device 45 and grasp whether or not the solution discharge mechanism 25 discharges the solution in accordance with the reference set value. Further, when the solution discharge amount of the solution discharge mechanism 25 is out of the reference set value, the tightening amount of the joint portion between the pump body 15 and the valve body 20 can be adjusted, or the pump body 15 and the valve body 20 can be reassembled after being separated. . Further, the solution ejecting mechanism 25 can be made by reassembling the separation rod 26 and the valve stem 28 or adjusting the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. The amount of solution sprayed is the same as the reference set value.

Adjusting the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can also be automatically performed by the control device 44. That is, if the actuation displacement of the solution discharge mechanism 25 differs from the preset reference setting value, the control device 44 can change the supply voltages to the first piezoelectric actuator 30 and the second piezoelectric actuator 31. Further, by this, the actuation displacement of the solution discharge mechanism 25 can be adjusted to match the preset reference setting value.

In addition to this, the pump body 15 is provided with a cooling line 47/48. The cooling fluid flows to the space around the first piezoelectric actuator 30 and the second piezoelectric actuator 31 through the cooling line 47/48, whereby the first piezoelectric actuator 30 and the second can be cooled by the cooling fluid Piezoelectric actuator 31.

Next, the operation of the piezoelectric distributor 10 of the first embodiment of the present invention as described above will be described.

First, the control device 44 applies the set voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 in a state where the pump body 15 and the valve body 20 and other components are assembled. In order to lower the valve stem 28, the solution is dispensed by the nozzle 23, A voltage of 50% with respect to the voltage applied to the second piezoelectric actuator 31 is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31, respectively. At this time, as shown in FIG. 3, the first piezoelectric actuator 30 and the second piezoelectric actuator 31 are lengthened by the same length, and the respective lower end portions are in contact with the rod 26.

In this state, the positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can be adjusted by the first position adjuster 35 and the second position adjuster 36. That is, the first piezoelectric actuator 30 or the second piezoelectric actuator 31 can be moved forward and backward by rotating the first position adjuster 35 or the second position adjuster 36, respectively, and the rod 26 is set horizontally. status. When the first piezoelectric actuator 30 or the second piezoelectric actuator 31 is retracted by the first position adjuster 35 or the second position adjuster 36, the first recovery mechanism 38 or the second recovery mechanism 39 is paired. The first piezoelectric actuator 30 or the second piezoelectric actuator 31 is pressurized to cause it to contract.

After the initial positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 for distributing are set as described above, the solution is supplied to the reservoir 21 by the inflow port 22 at a constant pressure. Next, the process of dispensing the solution supplied to the storage portion 21 is started.

If a voltage of 100% is applied to the first piezoelectric actuator 30 and a voltage of 0% is applied to the second piezoelectric actuator 31, the first piezoelectric actuator 30 expands, and the second piezoelectric actuator 31 expands. shrink. At this time, the lever 26 is rotated counterclockwise with reference to FIG. 3, and the valve stem 28 is raised, and the rotation of the lever 26 is more quickly achieved by the action of the second restoring mechanism 39.

In this state, if a voltage of 0% is applied to the first piezoelectric actuator 30 and a voltage of 100% is applied to the second piezoelectric actuator 31, the first piezoelectric actuator 30 contracts, and the second The piezoelectric actuator 31 expands. At this time, the rod 26 is rotated clockwise Turn and the valve stem 28 is lowered. The valve stem 28 that has been lowered in the storage portion 21 pressurizes the solution inside the reservoir portion 21 and discharges the solution to the outside through the nozzle 23, thereby realizing the distribution of the solution. When the second piezoelectric actuator 31 pressurizes the rod 26, the first restoring mechanism 38 contracts the first piezoelectric actuator 30, thereby facilitating the rod 26 to rapidly rotate in the clockwise direction.

As described above, if a voltage is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 alternately, the valve stem 28 is repeatedly lifted and lowered, and the solution is continuously dispensed by the nozzle 23. The distance between the hinge shaft 16 and the valve stem 28 is much larger than the distance between the hinge shaft 16 and the first piezoelectric actuator 30 and the second piezoelectric actuator 31, so that the rod 26 can be sufficiently enlarged. The amount of deformation of the piezoelectric actuator 30 and the second piezoelectric actuator 31 causes the valve stem 28 to operate within a sufficient height range.

The control device 44 that controls the actuation of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 is applied to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 with the passage of time. The voltage of the pulse waveform of a plurality of modalities, whereby the dynamic characteristics of the valve stem 28 can be controlled. In particular, by having the hinge shaft 16 between the first piezoelectric actuator 30 and the second piezoelectric actuator 31, not only the downward movement of the valve stem 28 but also the downward movement of the valve stem 28 can be controlled. It can also control the ascending motion. Moreover, the solution can be dispensed more quickly, and the amount of the dispensed solution can be accurately controlled.

In particular, the first piezoelectric actuator 30 and the second pressure can be accurately controlled in the control device 44 by an electrical method using control parameters such as the magnitude of the applied voltage, the alternating frequency of the voltage, the amount of change in voltage with time, and the like. Mechanical actuation characteristics of the electric actuator 31. As a result of the improved control performance of the operation of the valve stem 28, the distribution characteristics of the dispensed solution can be easily and accurately controlled.

The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are characterized by their characteristics Relatively more heat is generated during use. If the temperatures of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 rise due to the heat generated by the first piezoelectric actuator 30 and the second piezoelectric actuator 31, the operational characteristics may be decline. In order to prevent such a problem from occurring, the pump body 15 is cooled by the cooling wires 47/48 via the installation spaces of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, whereby the first piezoelectricity can be prevented. The temperature of the actuator 30 and the second piezoelectric actuator 31 rises. The temperature rise of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 is prevented as described above, whereby the dynamic characteristics of the valve stem 28 can be fixedly maintained, and the distribution quality of the solution can be maintained.

The first piezoelectric actuator 30 and the second piezoelectric actuator 31 are usually formed of a ceramic material. If it is used for a long time, the expansion displacement due to the applied voltage may be different from the initial due to its material properties. In this case, the positions of the first piezoelectric actuator 30 and the second piezoelectric actuator 31 are adjusted by the first position adjuster 35 and the second position adjuster 36, whereby the rod 26 and the valve stem can be held 28 dynamic characteristics.

When the type of the dispensed solution is different, the other valve body 20 and the valve stem 28, which are designed in consideration of the viscosity or other characteristics of the solution, are replaced to constitute the piezoelectric pump 12, whereby the solution can be quickly and efficiently responded to the solution.

As described above, the piezoelectric distributor 10 of the present invention detachably configures the pump body 15 and the valve body 20, and also constitutes the rod 26 and the valve stem 28 in an easily connectable and detachable manner. Therefore, maintenance, repair, and cleaning are easy, and it is easy to configure the piezoelectric pump 12 in accordance with various characteristics of the solution. The screw that couples the pump body 15 and the valve body 20 is loosened, and the engagement lever 29 of the valve stem 28 is disengaged from the engagement groove 27 of the lever 26, whereby the valve body 20 and the valve stem 28 can be easily separated from the pump body 15. Further, when the valve body 20 is separated, it is easy to perform cleaning for the next use. When the valve body 20 or the valve stem 28 is damaged, it can also be separated by the above method. Easily replaced with a new valve body 20 or valve stem 28.

As described above, in the case where the pump body 15 or the valve body 20 is separated after the separation of the pump body 15 or the valve body 20 for maintenance, repair, cleaning, or the like, or when the separation lever 26 and the valve stem 28 are reassembled, assembly errors or the like may occur. The reason is that the actuation displacement of the pump is changed, so that the actual solution discharge amount may differ from the initial solution discharge amount of the preset reference set value. The difference between the actual solution ejection amount and the preset initial solution ejection amount may be caused by wear of the first piezoelectric actuator 30, the second piezoelectric actuator 31, the rod 26, the valve stem 28, and the like. And induced. Further, if there is a difference between the actual solution discharge amount of the solution discharge mechanism 25 and the initial solution discharge amount, there may be a problem that the product of the solution to be dispensed is defective; or the solution is excessively ejected to waste the solution.

However, when the piezoelectric dispenser 10 of the present invention ejects the solution while the solution ejecting mechanism 25 is actuated, the displacement detecting sensor 40 of the probe 41 linked by the rod 26 coupled to the solution ejecting mechanism 25 detects the rod 26 Actuate the displacement to prevent this problem. That is, if the control device 44 receives the detection signal regarding the actuation displacement of the lever 26 and immediately displays the information about the detection signal on the display device 45, the user can observe the information displayed on the display device 45 and grasp whether the solution ejection mechanism 25 is The reference set value is ejected in a consistent manner. Further, when the solution discharge amount of the solution discharge mechanism 25 is out of the reference set value, the solution discharge amount of the solution discharge mechanism 25 can be made to coincide with the reference set value by the following operation: adjustment between the pump body 15 and the valve body 20 The tightening amount of the joint portion; reassembling after separating the pump body 15 and the valve body 20; reassembling after the separation rod 26 and the valve stem 28; or adjusting the first piezoelectric actuator 30 and the second piezoelectric element The supply voltage of the actuator 31.

If the assembly error, part wear or damage, the solution cannot be dispensed, or If the amount of the solution dispensed is not accurate, it may happen that the products to be dispensed are all defective and need to be discarded. In this case, it is also possible to generate an economic loss higher than the price of the parts of the piezoelectric distributor 10. However, when the actuation displacement of the solution discharge mechanism 25 of the discharge solution is detected as in the present invention, the user can quickly respond to the situation when the actual solution discharge amount is different from the initial solution discharge amount. Moreover, it is possible to prevent the loss of the process and the generation of defective products, and to improve productivity.

According to the situation, if the actuation displacement of the solution discharge mechanism 25 differs from the preset reference setting value, the control device 44 changes the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31, thereby The actuating displacement of the solution ejecting mechanism 25 can also be adjusted to match the preset reference set value. The operation displacement adjustment operation of the solution discharge mechanism 25 caused by the control device 44 changing the supply voltage to the first piezoelectric actuator 30 and the second piezoelectric actuator 31 can be performed once when the solution is redistributed. It can be carried out in a state where the solution is dispensed for a certain period of time, and the individual actuation displacement adjustment time is released to stop the solution from being ejected.

The actuation range detection of the solution ejection mechanism 25 by the displacement detecting sensor 40 can be performed after the piezoelectric pump 12 is assembled or reassembled, in order to set the first piezoelectric actuator 30 and the second piezoelectric actuator 31. It is executed once by applying various operating parameters such as voltage. Of course, the detection of the operating range of the solution ejecting mechanism 25 by the displacement detecting sensor 40 may be performed in a state where the solution is dispensed for a certain period of time, and a separate detecting time is left to stop the ejection of the solution.

As described above, it is necessary to detect the actuation displacement of the solution discharge mechanism 25 not only in the maintenance, repair, cleaning, etc. of the parts, but also to bond the pump body 15 and the valve body 20, and to bond the rod 26 and the valve stem 28 to manufacture the piezoelectric pump. At 12 o'clock, it is necessary to detect the actuation displacement of the solution ejecting mechanism 25. In this case, the piezoelectric distributor 10 of the present invention The displacement detecting sensor 40 can conveniently detect the displacement of the solution ejecting mechanism 25 for initial setting of various operating parameters such as the applied voltage of the first piezoelectric actuator 30 and the second piezoelectric actuator 31.

In the present invention, the specific configuration of the displacement detecting sensor for detecting the actuation displacement of the solution ejecting mechanism 25 or the connection structure with the solution ejecting mechanism 25 can be variously varied. For example, FIGS. 4 to 6 show other embodiments in which the specific configuration of the displacement detecting sensor or the connection structure with the solution ejecting mechanism 25 is changed.

First, Fig. 4 is a piezoelectric distributor showing a second embodiment of the present invention.

The piezoelectric distributor 50 of the second embodiment of the present invention shown in FIG. 4 includes a piezoelectric pump 12, a displacement detecting sensor 52, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 50 of the second embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 52 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 52 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.

The displacement detecting sensor 52 is provided to the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 52 includes: a probe 53; and a sensor body 55 that is coupled to the probe 53 to be movable. The probe 53 is rotatably coupled to a pivot pin 57 provided at the center of the rod 26 so as to be movable up and down in conjunction with the rotation of the lever 26. At the end of the probe 53, a knot for coupling with the pivot pin 57 is provided. The groove 54 and the pivot pin 57 are fitted and coupled to the coupling groove 54.

When the lever 26 is rotated relative to the hinge shaft 16 by the action of the first piezoelectric actuator 30 and the second piezoelectric actuator 31, the probe 53 is rotated in conjunction with the lever 26 to rotate relative to the pivot pin 57 while move up and down. Inside the sensor body 55, there is provided a guide mechanism (not shown) that guides the probe 53 so as not to oscillate to the left and right and to linearly move in the vertical direction.

The displacement detecting sensor 52 detects the actuation displacement of the rod 26 of the solution ejecting mechanism 25 by the probe 53, and supplies the detected displacement of the rod 26 to the control device 44.

On the other hand, Fig. 5 is a view showing a piezoelectric distributor of a third embodiment of the present invention.

The piezoelectric distributor 60 of the third embodiment of the present invention shown in FIG. 5 includes a piezoelectric pump 12, a displacement detecting sensor 62, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 60 of the third embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 62 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 62 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.

The displacement detecting sensor 62 is coupled to the outer surface of the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 62 includes: a probe 63; and a sensor body 65, It is combined with the probe 63 to make it movable. The probe 63 has a one end portion that is in contact with the outer surface of one end portion of the rod 26 so as to be movable up and down in conjunction with the rotation of the rod 26. A curved contact curved surface 64 that is in sliding contact with the surface of the rod 26 is provided at one end portion of the probe 63.

The displacement detecting sensor 62 detects the actuation displacement of the rod 26 of the solution ejecting mechanism 25 by the probe 63, and supplies the detected displacement of the rod 26 to the control device 44.

On the other hand, Fig. 6 is a view showing a piezoelectric distributor of a fourth embodiment of the present invention.

The piezoelectric distributor 70 of the fourth embodiment of the present invention shown in FIG. 6 includes a piezoelectric pump 12, a displacement detecting sensor 72, a control device 44, and a display device 45. The piezoelectric pump 12 has a pump body 15, a valve body 20, a solution discharge mechanism 25, a first piezoelectric actuator 30, a second piezoelectric actuator 31, and a pump controller 33. The solution ejecting mechanism 25 includes a rod 26 coupled to the pump body 15, and a valve stem 28 coupled to the valve body 20 in a manner to be coupled to the rod 26. The piezoelectric distributor 70 of the fourth embodiment of the present invention changes only the specific configuration of the displacement detecting sensor 72 and the displacement detecting as compared with the piezoelectric distributor 10 of the first embodiment of the present invention described above. The connection structure of the sensor 72 and the solution ejecting mechanism 25. The specific configuration or effect of the remaining components is the same as described above.

The displacement detecting sensor 72 is coupled to the outer surface of the pump body 15 in such a manner that the actuation displacement of the solution ejecting mechanism 25 is detected and the detection signal is supplied to the control device 44. The displacement detecting sensor 72 includes: a probe 73; and a sensor body 75 that is coupled to the probe 73 to be movable. The probe 73 is in contact with the outer surface of the protruding portion 77 provided on the valve stem 28 so as to be movable in conjunction with the movement of the valve stem 28. drop. A curved contact curved surface 74 that is in sliding contact with the surface of the rod 26 is provided at one end portion of the probe 73. When the valve stem 28 moves up and down, the probe 73 also moves up and down in conjunction with the valve stem 28, and the sensor body 75 detects the displacement of the movement of the probe 73, whereby the actuation displacement of the valve stem 28 can be detected.

Although a plurality of embodiments of the piezoelectric distributor of the present invention have been described above, the scope of the present invention is not limited to the embodiments described and illustrated.

For example, the case where the spring or the air pressure is used as the first recovery mechanism 38 and the second recovery mechanism 39 described above has been described as an example. However, depending on the situation, the pressure of the liquid may be used to constitute the first recovery mechanism and the second. Restore the institution. Further, a pump that does not include the first recovery mechanism 38 and the second recovery mechanism 39 or the cooling lines 47/48 may be configured.

Moreover, the control device 44 receives information about the actuation displacement of the solution discharge mechanism from the displacement detecting sensor 72. If the solution ejection amount of the actual solution ejection mechanism differs from the preset reference value, the display device 45 may be used in addition to the display device 45. The situation is reported to the user by an alarm device, or a warning lamp, or the like.

Further, the lever 26 and the valve stem 28 may be connected by a plurality of other methods in addition to the engagement groove 27 of the lever 26 and the engagement lever 29 of the valve stem 28. Further, the solution discharge mechanism 25 can be changed to a structure other than the structure including the rod 26 and the valve stem 28, and the pump body 15 and the valve body 20 can be formed integrally with each other without being detachably coupled.

Further, as the displacement detecting sensor for detecting the displacement of the solution ejecting mechanism, in addition to the so-called probe sensor as shown in the drawing, the movable displacement capable of detecting the solution ejecting mechanism by contact or non-contact type can be utilized. And provide the detection signal Various configurations to the control device 44.

15‧‧‧ pump body

16‧‧‧Hinged shaft

20‧‧‧ valve body

21‧‧‧ Storage Department

22‧‧‧Inlet

23‧‧‧Nozzles

25‧‧‧Solution ejecting mechanism

26‧‧‧ pole

27‧‧‧ snap groove

28‧‧‧ valve stem

29‧‧‧Knitting rod

30‧‧‧First Piezoelectric Actuator

31‧‧‧Second Piezoelectric Actuator

33‧‧‧ pump controller

35‧‧‧First position adjuster

36‧‧‧Second position regulator

38‧‧‧First Recovery Agency

39‧‧‧Second recovery agency

40‧‧‧ Displacement detection sensor

41‧‧‧Probe

42‧‧‧Sensor body

44‧‧‧Control device

45‧‧‧Display device

Claims (8)

A piezoelectric dispenser comprising: a pump body; a solution ejecting mechanism having a rod and a valve stem, the rod being disposed in a rotatable manner relative to a hinge shaft disposed on the pump body, the valve stem being accompanied by a rod is connected to the rod in a manner of lifting movement; a piezoelectric actuator is disposed on the pump body in such a manner that a tip end portion thereof can be in contact with the rod, so that the length becomes long when a voltage is applied. And pressing the rod to rotate the rod about the hinge shaft; the valve body having a storage portion, an inflow port, and a nozzle, the storage portion being inserted into a distal end portion of the valve stem And storing a solution, the inflow port for the solution to flow into the storage portion, the nozzle discharging the solution of the storage portion accompanying movement of the valve stem in the storage portion; displacement detection sensing The device is disposed on the pump body for detecting an actuation displacement of the solution ejecting mechanism, and a control device electrically connected to the piezoelectric actuator and the displacement detecting sensor, and applying a voltage to Making the piezoelectric Actuating, receiving, from the displacement detecting sensor, a detection signal about an actuation displacement of the solution ejecting mechanism, wherein the displacement detecting sensor comprises: a probe having a side end portion connected to the rod, So that it can be raised and lowered in conjunction with the rotation of the rod; and a sensor body that can be raised and lowered in conjunction with the probe, the actuator is detected to be displaced by the probe, and the detection signal is provided To the control device. The piezoelectric distributor according to claim 1, which further comprises A display device electrically connected to the control device, wherein the control device displays information about an actuation displacement of the solution discharge mechanism on the display device. The piezoelectric distributor according to claim 2, wherein if the actuating displacement of the solution ejecting mechanism is different from a preset reference set value, the control device reports the actuation of the solution ejecting mechanism. There is an abnormal message and displayed on the display device. The piezoelectric distributor according to claim 1, wherein the control device changes the piezoelectric actuator if the actuation displacement of the solution ejection mechanism is different from a preset reference setting value. The operating displacement of the solution discharge mechanism is adjusted to a predetermined set value by a supply voltage. The piezoelectric dispenser of claim 1, wherein one end portion of the probe is coupled to the rod. The piezoelectric distributor according to claim 1, wherein the probe is a pivot pin that is rotatably coupled to the rod at one end portion. The piezoelectric distributor according to claim 1, wherein a distal end portion of the probe is provided with a curved contact curved surface that is in sliding contact with the surface of the rod. A piezoelectric dispenser comprising: a pump body; a solution ejecting mechanism having a rod and a valve stem, the rod being disposed in a rotatable manner relative to a hinge shaft disposed on the pump body, the valve stem being accompanied by Connected to the rod in such a manner that the rod is rotated to perform a lifting movement; the piezoelectric actuator is disposed at a position where the end portion thereof is in contact with the rod The pump body is configured to lengthen a length when a voltage is applied, and pressurize the rod to rotate the rod around the hinge shaft; the valve body has a storage portion, an inflow port, and a nozzle. a storage portion for inserting a distal end portion of the valve stem, and storing a solution for the solution to flow into the storage portion, the nozzle being discharged along with the advancement and retreat movement of the valve stem in the storage portion a solution of the storage portion; a displacement detecting sensor disposed in the pump body for detecting an actuation displacement of the solution ejecting mechanism; and a control device electrically connected to the piezoelectric actuator And the displacement detecting sensor, applying a voltage to actuate the piezoelectric actuator, and receiving, from the displacement detecting sensor, a detection signal about an actuation displacement of the solution ejecting mechanism, wherein the displacement detecting sense The detector comprises: a probe, one end portion of which is in contact with the valve stem so as to be movable up and down in conjunction with the lifting movement of the valve stem; and a sensor body that is coupled to the probe to be lifted and lowered With the probe Detecting a displacement of the actuating stem, and provides the detection signal to the control device.