TWI567046B - Method for producing carbon fiber reinforced silicon carbide molded body - Google Patents

Method for producing carbon fiber reinforced silicon carbide molded body Download PDF

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TWI567046B
TWI567046B TW104114872A TW104114872A TWI567046B TW I567046 B TWI567046 B TW I567046B TW 104114872 A TW104114872 A TW 104114872A TW 104114872 A TW104114872 A TW 104114872A TW I567046 B TWI567046 B TW I567046B
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carbon fiber
semi
reinforced
molded article
carbon
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TW201607915A (en
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小山昌志
久米将実
豊島利之
鉾館俊之
高橋尚弘
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三菱電機股份有限公司
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Description

碳纖維強化碳化矽成形體的製造方法 Method for producing carbon fiber-reinforced carbonized niobium formed body

本發明係關於一種由剛性、電阻值、導熱率高的碳纖維強化碳化矽(C/SiC)之複合材料所構成之成形體的製造方法。 The present invention relates to a method for producing a molded body comprising a composite material of carbon fiber-reinforced tantalum carbide (C/SiC) having high rigidity, electric resistance value and high thermal conductivity.

一般的機器零件等,都要求特性高、加工性佳、製造成本低,故大多使用金屬構件。 In general, machine parts and the like require high characteristics, good workability, and low manufacturing cost, so metal members are often used.

然而,金屬比重較高,而且在使用磁鐵等的機器中,會因為其電性特性的影響而產生問題。例如有因為磁場影響導致之渦電流所引起的發熱、及排熱性不佳的問題。 However, the metal has a high specific gravity, and in a machine using a magnet or the like, there is a problem due to the influence of its electrical characteristics. For example, there is a problem of heat generation due to an eddy current due to a magnetic field and poor heat dissipation.

因此,使用塑膠等作為輕量構件雖日益增加,但由於機械特性不佳,因此適用的範圍受到限制。 Therefore, the use of plastics or the like as a lightweight member is increasing, but the range of application is limited due to poor mechanical properties.

因此,對於機器零件乃期待應用一種具有與金屬同等程度的機械特性,且不具導電性因而不會受到磁鐵影響的陶瓷系的材料。其中,乃進行檢討應用一種在基材具有陶瓷的複合材料。 Therefore, it is expected that a machine-based material having a mechanical property equivalent to that of a metal and having no conductivity and thus not being affected by a magnet is expected. Among them, a review is made to apply a composite material having a ceramic on a substrate.

一種由碳纖維強化碳化矽(C/SiC)之複合材料所構成之成形品的零件作為陶瓷基複合材料之應用正在進行研 究。 The application of a part of a molded product composed of a carbon fiber-reinforced cerium carbide (C/SiC) composite material as a ceramic matrix composite material is under study Research.

由於此C/SiC之複合材料的剛性、電阻值、導熱率高,因此不會受到渦電流的影響,而且排熱特性亦高,因此適用作為解決前述問題的材料。 Since the composite material of C/SiC has high rigidity, electric resistance value, and high thermal conductivity, it is not affected by eddy current and has high heat rejection characteristics, and therefore is suitable as a material for solving the above problems.

以使用該C/SiC之複合材料之製造複雜形狀之零件的方法而言,例如,在專利文獻1所記載的製造方法中,首先在混合原料粉末之後,加壓成形為較目的形狀更大型的塊(block)狀之後,形成進行原料樹脂之碳化的碳纖維強化碳(C/C)塊體。 In the method of producing a component having a complicated shape using the C/SiC composite material, for example, in the production method described in Patent Document 1, first, after mixing the raw material powder, the pressure molding is performed to a larger shape than the intended shape. After the block shape, a carbon fiber-reinforced carbon (C/C) block in which carbonization of the raw material resin is performed is formed.

接著,將該C/S塊體藉由切削加工、研磨加工而形成接近最終形狀之形狀的半成形品,之後,再使矽(Si)熔融含浸於該半成形品,藉此製造由C/SiC之複合材料所構成之成為成形品的零件。 Next, the C/S block is formed into a semi-molded article having a shape close to the final shape by cutting and polishing, and then cerium (Si) is melt-impregnated into the semi-molded article, thereby producing C/S. A component made of a composite material of SiC is a molded article.

[先前技術文獻] [Previous Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利第5068218號公報 [Patent Document 1] Japanese Patent No. 5068218

在由上述之C/SiC之複合材料所構成之零件的製造中,於含浸Si時,由於在半成形品的上面及下面過度配置金屬Si而要加熱使Si熔融,因此會在表面附著許多Si的殘留物,而要在最終精加工步驟中藉由機械加工將殘留Si去除來完成零件。 In the production of the component composed of the composite material of C/SiC described above, when Si is impregnated, Si is melted by excessively disposing the metal Si on the upper surface and the lower surface of the semi-molded article, so that many Si are attached to the surface. The residue is removed by mechanical processing to remove the residual Si in the final finishing step.

然而,在經由機械加工去除殘留Si的步驟中,需要長時間,而會增加由C/SiC之複合材料所構成之成形體之零件的製造時間,尤其會有對於小型零件的大量生產造成極大阻礙的問題。 However, in the step of removing residual Si by machining, it takes a long time, and the manufacturing time of the parts of the formed body composed of the C/SiC composite material is increased, and in particular, the mass production of small parts is greatly hindered. The problem.

此外,除了表面附著物外,還有因為Si熔融時C/C與Si的比重差異,而會有C/C浮游在熔融Si內,而在零件內部產生Si的參差不齊的問題。 Further, in addition to the surface deposits, there is a difference in the specific gravity of C/C and Si when Si is melted, and C/C floats in the molten Si, which causes a problem of unevenness of Si inside the part.

有鑑於解決此種問題,本發明之目的為提供一種碳纖維強化碳化矽成形體的製造方法,其係在製造由碳纖維強化碳化矽之複合材料所構成的成形體時,抑制在表面之殘留Si的附著物、及在內部之Si的參差不齊。 In order to solve such a problem, an object of the present invention is to provide a method for producing a carbon fiber-reinforced tantalum carbide molded body, which is capable of suppressing residual Si on a surface when a molded body composed of a carbon fiber-reinforced tantalum carbide composite material is produced. The deposits and the Si inside are uneven.

本發明之碳纖維強化碳化矽成形體的製造方法係具有:碳纖維強化碳塊體形成步驟,係形成將樹脂及碳纖維燒結而成的碳纖維強化碳塊體;半成形品形成步驟,將該碳纖維強化碳塊體加工而形成複數個半成形品;半成形品固定步驟,藉由固定手段將各個前述半成形品固定於形成於矽配置輔助具的複數個各個凹陷部;矽配置步驟,將矽配置於前述凹陷部;矽熔融含浸步驟,藉由將前述矽加熱使之熔融,而使前述矽含浸於前述半成形品的內部;未加工成形品卸除步驟,將前述矽含浸於前述半成形 品並藉由化學反應而產生之碳纖維強化碳化矽所構成的未加工成形品,在前述固定手段的部位從前述矽配置輔助具卸除;及精加工步驟,將前述未加工成形品精加工而形成成形品。 The method for producing a carbon fiber-reinforced tantalum carbide molded body according to the present invention comprises: a carbon fiber-reinforced carbon block forming step of forming a carbon fiber-reinforced carbon block obtained by sintering a resin and carbon fibers; and a semi-molded product forming step of the carbon fiber-reinforced carbon Forming a plurality of semi-molded articles by block processing; fixing the semi-molded articles to a plurality of recessed portions formed in the cymbal arranging aid by fixing means; and arranging the cymbal The depressed portion; the enthalpy melt impregnation step, wherein the ruthenium is impregnated into the interior of the semi-molded article by heating the ruthenium, and the ruthenium is impregnated into the semi-formed product by a step of removing the unprocessed molded article An unprocessed product comprising carbon fiber-reinforced lanthanum carbide produced by a chemical reaction is removed from the arranging aid at a portion of the fixing means; and a finishing step is performed to finish the unprocessed product A molded article is formed.

依據本發明之碳纖維強化碳化矽成形體的製造方法,係在藉由固定手段將各個半成形品固定在配置有矽之矽配置輔助具的凹陷部之後,使加熱熔融後的矽含浸於前述半成形品的內部。結果可獲得在表面的殘留矽的附著物、及在內部之矽的參差不齊受到抑制的碳纖維強化碳化矽成形體。 According to the method for producing a carbon fiber-reinforced yttrium carbide formed article of the present invention, after the semi-molded article is fixed to the depressed portion of the arranging auxiliary device in which the enamel is disposed by the fixing means, the heat-melted ruthenium is impregnated into the half The inside of the molded product. As a result, a deposit of residual ruthenium on the surface and a carbon fiber-reinforced yttrium carbide formed body in which unevenness in the interior of the crucible is suppressed can be obtained.

1、20‧‧‧零件(成形品) 1, 20‧‧‧ parts (formed products)

2、21‧‧‧小徑部 2, 21‧‧‧ small diameter department

3、22‧‧‧大徑部 3, 22‧‧‧ Large Path Department

4‧‧‧PAN系碳纖維 4‧‧‧PAN carbon fiber

5‧‧‧瀝青系纖維 5‧‧‧Asphalt fiber

6‧‧‧酚樹脂粒子 6‧‧‧ phenol resin particles

7‧‧‧石墨粒子 7‧‧‧Graphite particles

8‧‧‧混合粉體 8‧‧‧ mixed powder

9‧‧‧金屬模具 9‧‧‧Metal mold

10‧‧‧碳纖維強化碳(C/C)塊體 10‧‧‧Carbon fiber-reinforced carbon (C/C) blocks

11、24‧‧‧半零件(半成形品) 11, 24‧‧‧Half parts (semi-finished products)

12、25‧‧‧矽配置輔助具 12, 25‧‧‧矽 configuration aids

13、26‧‧‧公螺紋部 13, 26‧‧ ‧ male thread department

14‧‧‧矽(Si) 14‧‧‧矽(Si)

15、23‧‧‧母螺紋部 15, 23‧‧‧ female thread

16‧‧‧BN塗覆 16‧‧‧BN coating

17、27‧‧‧凹陷部 17, 27‧‧‧Depression

18、28‧‧‧未加工零件 18, 28‧‧‧Unprocessed parts

19、29‧‧‧殘餘部 19, 29‧‧ ‧ remnants

30‧‧‧塊狀構造體 30‧‧‧Blocked structures

S1至S10‧‧‧步驟 S1 to S10‧‧‧ steps

第1圖係顯示本發明之實施形態1之碳纖維強化碳化矽零件之製造方法的流程圖。 Fig. 1 is a flow chart showing a method of producing a carbon fiber-reinforced tantalum carbide member according to Embodiment 1 of the present invention.

第2圖(a)係以第1圖之製造方法所製造之零件的前視圖,第2圖(b)係第2圖(a)的俯視圖。 Fig. 2(a) is a front view of a part manufactured by the manufacturing method of Fig. 1, and Fig. 2(b) is a plan view of Fig. 2(a).

第3圖(a)及(b)係顯示第2圖之零件之製造步驟之粉體加壓成形步驟的圖。 Fig. 3 (a) and (b) are views showing a powder press forming step of the manufacturing steps of the parts of Fig. 2.

第4圖係顯示酚(phenol)樹脂之重量變化的圖。 Figure 4 is a graph showing the change in weight of a phenol resin.

第5圖(a)及(b)係顯示第2圖之零件之製造中途之半零件的圖。 Fig. 5 (a) and (b) are views showing half of the parts in the middle of the manufacture of the parts of Fig. 2.

第6圖(a)係在第2圖之零件製造步驟之矽熔融含浸 步驟中所使用之碳製之矽配置輔助具的俯視圖,第6圖(b)係沿著第6圖(a)之A-A線之箭頭剖面圖。 Figure 6 (a) is a melt impregnation after the manufacturing steps of the parts in Figure 2. A plan view of the carbon-based arranging aid used in the step, and Fig. 6(b) is an arrow sectional view taken along line A-A of Fig. 6(a).

第7圖係顯示第2圖之零件之製造步驟之矽熔融含浸步驟的圖。 Fig. 7 is a view showing the enthalpy of the enthalpy of the manufacturing process of the parts of Fig. 2;

第8圖係顯示第2圖之零件製造步驟之未加工零件卸除步驟的圖。 Fig. 8 is a view showing the unprocessed part removing step of the part manufacturing step of Fig. 2.

第9圖係比較藉由本實施形態1所獲得之未加工零件與藉由習知法所獲得之未加工零件之良率的圖。 Fig. 9 is a graph comparing the yield of the unprocessed parts obtained by the first embodiment and the unprocessed parts obtained by the conventional method.

第10圖係比較藉由本實施形態1所獲得之未加工零件與藉由習知法所獲得之未加工零件之比重的圖。 Fig. 10 is a graph comparing the specific gravity of the unprocessed part obtained by the first embodiment and the unprocessed part obtained by the conventional method.

第11圖係顯示藉由本發明之實施形態2之碳纖維強化碳化矽零件之製造方法所製造之零件的部分剖面俯視圖。 Fig. 11 is a partial cross-sectional plan view showing a part produced by the method for producing a carbon fiber-reinforced tantalum carbide member according to the second embodiment of the present invention.

第12圖(a)係顯示第11圖之零件製造步驟之矽熔融含浸步驟中所使用之碳製之矽配置輔助具的正剖面圖,第12圖(b)係第11圖之零件製造步驟之矽熔融含浸步驟的圖。 Fig. 12(a) is a front sectional view showing a carbon-made arranging aid used in the enthalpy melting step of the part manufacturing step of Fig. 11, and Fig. 12(b) is a part manufacturing step of Fig. 11. The graph of the melt impregnation step is followed.

第13圖係顯示第11圖之零件製造步驟之未加工零件卸除步驟的圖。 Fig. 13 is a view showing the unprocessed part removing step of the part manufacturing step of Fig. 11.

以下係根據圖式來說明本發明之各實施形態之碳纖維強化碳化矽(C/SiC)成形體之製造方法,惟在各圖中,對於相同或相等構件、部位,係賦予相同符號進行說明。 In the following, a method of producing a carbon fiber-reinforced cerium carbide (C/SiC) molded body according to each embodiment of the present invention will be described with reference to the drawings, and the same or equivalent members and portions will be denoted by the same reference numerals throughout the drawings.

另外,本發明不限定於以下各實施形態,只要在不脫 離本發明之要旨的範圍下,均可作適當變更。 Further, the present invention is not limited to the following embodiments, as long as it is not off Any change can be made within the scope of the gist of the invention.

(實施形態1) (Embodiment 1)

第1圖係顯示本發明之實施形態1之C/SiC零件之製造方法的流程圖,第2圖(a)係顯示藉由第1圖所示之製造方法所製造之成形體之零件1的前視圖,第2圖(b)係第2圖(a)的俯視圖。 Fig. 1 is a flow chart showing a method of manufacturing a C/SiC part according to the first embodiment of the present invention, and Fig. 2(a) is a view showing a part 1 of a molded body produced by the manufacturing method shown in Fig. 1. The front view, Fig. 2(b) is a plan view of Fig. 2(a).

該零件1係由附段差之圓柱形狀的小徑部2及中空的大徑部3所構成,該小徑部2長度為數十mm,而大徑部3則為較小徑部2更大徑,直徑為數十mm,且長度與小徑部2相同。 The part 1 is composed of a small-diameter portion 2 having a cylindrical shape and a hollow large-diameter portion 3, and the small-diameter portion 2 has a length of several tens of mm, and the large-diameter portion 3 has a smaller diameter portion 2 The diameter is tens of mm in diameter and the length is the same as that of the small diameter portion 2.

首先,根據第1圖的流程圖來說明製造該零件1的方法。 First, a method of manufacturing the component 1 will be described based on the flowchart of Fig. 1.

在製造該零件1時,首先,將PAN系碳纖維4、瀝青(pitch)系纖維5、酚樹脂粒子6、及石墨粒子7的各原料混合而作成混合粉體(S1:原料粉體混合步驟)。 When the component 1 is produced, first, each raw material of the PAN-based carbon fiber 4, the pitch-based fiber 5, the phenol resin particle 6, and the graphite particle 7 is mixed to prepare a mixed powder (S1: raw material powder mixing step) .

接著將混合粉體8加壓成形(S2:粉體加壓成形步驟)。 Next, the mixed powder 8 is press-formed (S2: powder press forming step).

之後,藉由加壓加熱成形將酚樹脂粒子6加熱硬化,形成碳纖維強化樹脂(CFRP)(S3:粉體中樹脂硬化步驟)。 Thereafter, the phenol resin particles 6 are heat-cured by pressure heat forming to form a carbon fiber reinforced resin (CFRP) (S3: resin hardening step in powder).

接下來,將CFRP內的酚樹脂碳化而形成碳纖維強化碳(C/C)塊體(S4:C/C塊體形成步驟)。 Next, the phenol resin in the CFRP is carbonized to form a carbon fiber-reinforced carbon (C/C) block (S4: C/C bulk forming step).

接著,將C/C塊體加工成目的形狀而形成半成形品的半零件(S5:半成形品形成步驟)。 Next, the C/C block is processed into a desired shape to form a half-piece of the semi-molded article (S5: semi-molded article forming step).

之後,藉由固定手段將該半零件固定在形成於矽配置 輔助具的各個凹陷部(S6:半成形品固定步驟)。 After that, the half part is fixed by the fixing means in the configuration Each recessed portion of the auxiliary tool (S6: semi-molded article fixing step).

之後,將矽配置在矽配置輔助具的凹陷部(S7:矽配置步驟)。 Thereafter, the crucible is placed in the recessed portion of the crucible configuration aid (S7: 矽 configuration step).

接著將Si加熱使之熔融,藉此使Si藉由毛細管現象含浸於半零件的內部且藉由化學反應使組成中的碳(C)進行碳化矽(SiC)化,而形成由C/SiC所構成之未加工成形品的未加工零件(S8:矽熔融含浸步驟)。 Then, Si is heated and melted, whereby Si is impregnated into the interior of the half part by capillary action, and carbon (C) in the composition is carbonized (SiC) by chemical reaction to form C/SiC. An unprocessed part of the unformed molded product (S8: 矽 melt impregnation step).

接著,以固定手段將未加工零件從矽配置輔助具折斷,且從矽配置輔助具卸除(S9:未加工成形品卸除步驟)。 Next, the unprocessed part is broken by the fixing means from the 矽 placement aid, and is removed from the 矽 placement aid (S9: Unprocessed product removal step).

最後,將未加工零件進行精加工,而形成成形品的零件1(S10:精加工步驟)。 Finally, the unprocessed part is finished to form the part 1 of the molded product (S10: finishing step).

接著根據第3圖至第10圖進一步詳細說明由本發明之實施形態1之C/SiC之複合材料所構成之成形體之零件1的製造方法。 Next, a method of manufacturing the component 1 of the molded body comprising the composite material of C/SiC according to the first embodiment of the present invention will be described in further detail with reference to Figs. 3 to 10 .

在上述原料粉體混合步驟S1中,係將PAN系碳纖維4、瀝青系纖維5、酚樹脂粒子6及石墨粒子7的各原料以特定重量比裝填於混合器(mixer)後使其均勻地混合而獲得混合粉體8。 In the raw material powder mixing step S1, each raw material of the PAN-based carbon fiber 4, the pitch-based fiber 5, the phenol resin particles 6, and the graphite particles 7 is loaded into a mixer at a specific weight ratio, and then uniformly mixed. The mixed powder 8 was obtained.

在上述粉體加壓成形步驟S2中,如第3圖(a)、(b)所示,將混合粉體8投入於金屬模具9內,且藉由酚樹脂粒子6之軟化溫度(70℃)以下溫度的加壓而形成塊狀構造體30。 In the powder press molding step S2, as shown in Fig. 3 (a) and (b), the mixed powder 8 is introduced into the mold 9 and the softening temperature by the phenol resin particles 6 (70 ° C) The bulk structure 30 is formed by pressurization at the following temperature.

該塊狀構造體30的成形,除了利用金屬模具9進行加壓成形的方法外,還可利用在FRP材料製造中所使用之一 般的射出成形法等。 The formation of the block structure 30 can be utilized in addition to the method of press forming by the metal mold 9, and can also be utilized in the manufacture of FRP materials. General injection molding method, etc.

將此暫時硬化狀態之塊狀構造體30的材料密度,以0.8至0.9g/cm3的條件進行加壓,藉此可製造出由符合Si含浸時之含浸效率、及作為附段差之圓柱構造之零件1之剛性要求的材料組成比例為SiC為70至80%、C未達10%、Si為15至20%之C/SiC之複合材料所構成的零件1。 The material density of the bulk structure 30 in the temporarily hardened state is pressurized at a condition of 0.8 to 0.9 g/cm 3 , whereby the impregnation efficiency in accordance with the Si impregnation and the cylindrical structure as the attachment difference can be produced. The material composition ratio of the rigidity of the part 1 is a component 1 composed of a composite material of SiC of 70 to 80%, C of less than 10%, and Si of 15 to 20% of C/SiC.

此經暫時硬化之塊狀構造體30的材料密度,係配合成形品的特性、材料組成比例的要求來調整加壓量而進行控制。 The material density of the temporarily hardened bulk structure 30 is controlled by adjusting the amount of pressurization in accordance with the characteristics of the molded article and the material composition ratio.

在塊狀構造體30成形後的上述粉體中樹脂硬化步驟S3中,係將已進行了暫時硬化之塊狀構造體30在樹脂硬化條件下,例如酚樹脂情形下係以15℃、1小時進行硬化,藉此即可形成塊狀的CFRP構造體。在該酚樹脂的硬化步驟中,係不進行加壓而載置於爐(oven)內進行。 In the resin hardening step S3 in the above-described powder after the formation of the bulk structure 30, the bulk structure 30 which has been temporarily hardened is subjected to resin curing conditions, for example, phenol resin at 15 ° C for 1 hour. Hardening is performed, whereby a bulk CFRP structure can be formed. In the curing step of the phenol resin, it is carried out in an oven without being pressurized.

在CFRP構造體成形後的上述C/C塊體形成步驟S4中,係將CFRP構造體碳化而形成由C/C之複合材料所構成之第5圖(a)所示的C/C塊體10。 In the C/C bulk forming step S4 after the CFRP structure is formed, the CFRP structure is carbonized to form a C/C block shown in Fig. 5(a) composed of a C/C composite material. 10.

在本實施形態中,係在真空氛圍中於10℃/min的升溫速度下藉由800℃、1小時的條件實施碳化。 In the present embodiment, carbonization was carried out under the conditions of a temperature increase rate of 10 ° C / min in a vacuum atmosphere at 800 ° C for 1 hour.

第4圖係顯示酚樹脂藉由熱分析裝置(TGA)進行測量的結果。 Fig. 4 shows the results of measurement of the phenol resin by a thermal analysis device (TGA).

橫軸係溫度、左縱軸係顯示材料初期重量設為100%時各溫度下之材料的重量,右縱軸係顯示每單位溫度的重量 變化率。 The horizontal axis temperature and the left vertical axis show the weight of the material at each temperature when the initial weight of the material is 100%, and the right vertical axis shows the weight per unit temperature. Rate of change.

由此結果,可確認出在超過375℃的溫度區域下重量開始急遽變化,而至550℃為止,熱分解大致完成。 As a result, it was confirmed that the weight began to change rapidly in a temperature region exceeding 375 ° C, and the thermal decomposition was almost completed up to 550 ° C.

根據此結果,在使用了酚樹脂的CFRP構造體中,以碳化的條件而言,如第4圖所示之從酚樹脂之TGA測量結果所獲得的資料所示,係以在急遽的熱分解完成的600℃以上進行為理想。 According to the results, in the CFRP structure using the phenol resin, the carbonization conditions are as shown in the data of the TGA measurement of the phenol resin as shown in Fig. 4, which is based on the rapid thermal decomposition. It is ideal to carry out the above 600 °C.

此條件會因為所使用之樹脂的碳化條件而不同,因此於接著材料使用酚樹脂以外的樹脂材料時,必須要依使用的樹脂所得到的材料分析的結果來決定碳化溫度。 Since this condition differs depending on the carbonization conditions of the resin to be used, when a resin material other than the phenol resin is used as the material to be used, the carbonization temperature must be determined depending on the result of analysis of the material obtained by using the resin.

此外,碳化處理中的氛圍必須防止碳材料的氧化、反應,因此不限定於本實施形態所示的真空氛圍,亦包括在惰性氛圍,例如氬(argon)或氮氛圍下的實施。 Further, since the atmosphere in the carbonization treatment must prevent oxidation and reaction of the carbon material, it is not limited to the vacuum atmosphere shown in the present embodiment, and is also included in an inert atmosphere such as argon or a nitrogen atmosphere.

在C/C塊體10成形後之上述半成形品形成步驟S5中,如第5圖(b)所示,係將C/C塊體10藉由一般的機械加工,而形成為半成形品的半零件11。 In the semi-molded article forming step S5 after the C/C block 10 is formed, as shown in Fig. 5(b), the C/C block 10 is formed into a semi-molded article by general machining. Half part 11.

該半零件11係具有公螺紋(male thread)部13。 The half piece 11 has a male thread portion 13.

該公螺紋部13除了用來固定在下一個步驟之半成形品固定步驟S6中所使用的碳製的矽配置輔助具12外,還兼具在未加工成形品卸除步驟S9中在谷部折斷公螺紋部13的應力集中部。 In addition to the carbon arranging aid 12 used for fixing the semi-molded article fixing step S6 in the next step, the male screw portion 13 also has a break in the valley portion in the unprocessed molded article removing step S9. The stress concentration portion of the male screw portion 13.

半零件11的加工形狀,係考慮在之後的矽熔融含浸步驟S8中Si 14之含浸所導致的體積收縮,而在Si 14含浸後形成為最終目的形狀的形狀。 The processed shape of the half part 11 is a shape which is considered to be a final desired shape after impregnation of Si 14 in consideration of volume shrinkage caused by impregnation of Si 14 in the subsequent tantalum melt impregnation step S8.

在此例中,係預估在直徑方向有0.3至0.5%的收縮,來進行包含最終加工餘量之形狀的加工。 In this case, it is estimated that there is a shrinkage of 0.3 to 0.5% in the diameter direction to perform processing including the shape of the final machining allowance.

公螺紋部13的直徑雖必須依據必要零件形狀來變更,但當公螺紋部13之谷部分的直徑變大時,由於在未加工成形品卸除步驟S9中難以將公螺紋部13折斷,因此只要在未加工成形品卸除步驟S9時可將公螺紋部13折斷的範圍內決定公螺紋部13的直徑即可。 The diameter of the male screw portion 13 must be changed according to the shape of the necessary component. However, when the diameter of the valley portion of the male screw portion 13 is increased, it is difficult to break the male screw portion 13 in the unprocessed molded product removing step S9. The diameter of the male screw portion 13 may be determined within a range in which the male screw portion 13 can be broken in the unprocessed molded article removal step S9.

通常公螺紋部13的直徑係以M6以下為佳。 Usually, the diameter of the male thread portion 13 is preferably M6 or less.

此外,在本實施形態中,公螺紋部13係為與半零件11一體化的相同構件,例如與透過中繼構件而固定半零件在矽配置輔助具者進行比較,由於無中繼構件,因此確保Si含浸於各個未加工零件18(第8圖)之內部的均一性,而可極度減少大量製造零件1時之各個零件1之品質的參差不齊。 Further, in the present embodiment, the male screw portion 13 is the same member that is integrated with the half piece 11, and for example, the fixed half piece is fixed by the transmission relay member in comparison with the cymbal arrangement aid, and since there is no relay member, It is ensured that Si is immersed in the internal uniformity of each of the unprocessed parts 18 (Fig. 8), and the quality of each part 1 when a large number of parts 1 are manufactured can be extremely reduced.

在形成半零件11後的上述半成形品固定步驟S6中,係使用第6圖所示之在表面施行有BN塗覆16之碳製的矽配置輔助具12。 In the above-described semi-molded article fixing step S6 after the half-piece 11 is formed, the crucible-distributing aid 12 made of carbon having the BN-coated 16 on the surface shown in Fig. 6 is used.

在該碳製的矽配置輔助具12中,係等間隔地形成有複數個凹陷部17。在該凹陷部17之底面的中心部,係形成有母螺紋部(female thread)15。 In the carbon argon arrangement assisting device 12, a plurality of depressed portions 17 are formed at equal intervals. A female thread 15 is formed at a central portion of the bottom surface of the recessed portion 17.

藉由將半零件11的公螺紋部13螺接於該母螺紋部15,半零件11即得以如第7圖所示固定於矽配置輔助具12。 By screwing the male screw portion 13 of the half part 11 to the female screw portion 15, the half piece 11 is fixed to the cymbal placement aid 12 as shown in Fig. 7.

另外,藉由半零件11之公螺紋部13與矽配置輔助具 12的母螺紋部15,構成了將半零件11固定於矽配置輔助具12的固定手段。 In addition, the male threaded portion 13 and the cymbal configuration aid of the half part 11 The female screw portion 15 of 12 constitutes a fixing means for fixing the half piece 11 to the cymbal placement aid 12.

接著將熔融前之薄片狀的Si 14配置於凹陷部17(矽配置步驟S7),接下來將矽配置輔助具12加熱,將Si 14熔融。該熔融後的Si 14,會因為毛細管現象而上升,而含浸於半零件11的內部。 Next, the flaky Si 14 before melting is placed in the depressed portion 17 (矽 arrangement step S7), and then the 矽 arrangement assisting device 12 is heated to melt the Si 14 . The molten Si 14 is caused to rise due to capillary action and is impregnated into the interior of the half part 11.

另外,利用毛細管現象而從半零件11的下部含浸Si 14係為一例,亦可從上部、側面部將熔融後的Si 14供給至半零件11的內部。 Further, the Si 14 system is impregnated from the lower portion of the half part 11 by capillary action, and the molten Si 14 can be supplied to the inside of the half part 11 from the upper portion and the side surface portion.

所供給之Si 14的量,在本實施形態中,係設為每一個半零件11為9.0g。該Si 14的量係從最終成形品之零件1的形狀與密度計算所獲得。 In the present embodiment, the amount of Si 14 supplied is 9.0 g per half part 11. The amount of Si 14 is obtained from the shape and density calculation of the part 1 of the final molded article.

此外,關於Si 14,係以真空氛圍下以升溫速度7℃/min、150℃的條件施行熱處理,且進行熔融、含浸,而藉由半成形品之半零件11與C的化學反應而形成由C/SiC所構成的未加工零件18。 Further, Si 14 is subjected to heat treatment under the conditions of a temperature increase rate of 7 ° C/min and 150 ° C in a vacuum atmosphere, and is melted and impregnated, and is formed by chemical reaction of the semi-parts 11 and C of the semi-molded article. Unprocessed part 18 made of C/SiC.

關於該熱處理中之升溫速度、含浸溫度,係可變更各者的溫度,藉此使零件1的最終組成變化。 Regarding the temperature increase rate and the impregnation temperature in the heat treatment, the temperature of each can be changed, thereby changing the final composition of the component 1.

在碳製之矽配置輔助具12表面施行的BN塗覆16,係被用來防止與熔融Si 14的反應。 The BN coating 16 applied to the surface of the auxiliary device 12 in the carbon system is used to prevent the reaction with the molten Si 14.

關於矽配置輔助具的素材、塗覆材料,可使用可承受Si 14的熔融溫度,而且不具有與矽配置輔助具之素材之C及Si以及反應生產物之SiC之反應性的材料,例如BN等。 As for the material and coating material of the iridium distribution aid, a material which can withstand the melting temperature of Si 14 and which does not have reactivity with C and Si of the material of the ruthenium auxiliary aid and SiC of the reaction product, for example, BN can be used. Wait.

將碳製之矽配置輔助具12內之未加工成形 品之未加工零件18,如第8圖所示從公螺紋部13的谷部分折斷而從矽配置輔助具12卸除(未加工成形品卸除步驟S9)。 Unformed in the carbon raft configuration aid 12 The unprocessed part 18 of the product is broken from the valley portion of the male screw portion 13 as shown in Fig. 8 and is removed from the cymbal placement aid 12 (the unprocessed product removal step S9).

此時,公螺紋部13的谷部分成為應力集中部,而公螺紋部13以外可以不損傷地折斷。 At this time, the valley portion of the male screw portion 13 serves as a stress concentration portion, and the male screw portion 13 can be broken without being damaged.

第9圖係將不具有固定手段之構成要素的公螺紋部13之藉由習知法所獲得之未加工品的良率、與藉由本實施形態之方法所獲得之未加工零件18的良率進行比較的圖。 Fig. 9 is a graph showing the yield of the unprocessed product obtained by the conventional method of the male thread portion 13 having no constituent means of the fixing means, and the yield of the unprocessed part 18 obtained by the method of the present embodiment. A diagram to compare.

在習知方法中,雖將半成形品之半零件含浸於Si已熔融的矽配置輔助具內而含浸Si於半零件,但半零件會透過Si而固接於矽配置輔助具而在未加工零件產生碎片等。 In the conventional method, although half of the semi-molded article is impregnated into the Si-dissolved enamel-distributing aid and impregnated with Si in the half-piece, the half-piece is fixed to the 矽-configuration aid through the Si and is not processed. Parts are fragmented and so on.

此外,在本實施形態中,在未加工成形品卸除步驟S9中產生碎片等者被視為不良。 Further, in the present embodiment, it is considered that the chip or the like is generated in the unprocessed molded article removal step S9.

計算該良率的結果,以習知方法之情形而言,產生30%左右的不良率,但在本實施形態中成為0%,良率改善了30%。 As a result of calculating the yield, in the case of the conventional method, a defective ratio of about 30% was generated, but in the present embodiment, it was 0%, and the yield was improved by 30%.

此外,第10圖係顯示未加工零件18相對於目標重量之重量的比率。在C/SiC的狀態下,以比重而言,係設2.9g/cm3為目標比重。第10圖係顯示在從未加工零件18的形狀算出體積時,將設為目標比重之未加工零件18的重量設為100%時之未加工零件18整體的平均重量、及該誤差棒(error bar)。 In addition, Figure 10 shows the ratio of the weight of the unmachined part 18 to the target weight. In the state of C/SiC, in terms of specific gravity, 2.9 g/cm 3 was set as the target specific gravity. Fig. 10 is a view showing the average weight of the entire unprocessed part 18 when the weight of the unprocessed part 18 which is the target specific gravity is 100%, and the error bar (error) when the volume is calculated from the shape of the unmachined part 18. Bar).

在上述習知方法中,會因為Si含浸時的零件移動等, 而產生Si的含浸不均(uneven),由此而確認出相對於目標比重有5至10%左右的重量不足,而且,確認出誤差棒較大,且比重參差不齊較大。 In the above conventional method, the parts move due to Si impregnation, etc. On the other hand, the impregnation unevenness of Si was generated, and it was confirmed that the weight was about 5 to 10% with respect to the target specific gravity, and it was confirmed that the error bar was large and the specific gravity was uneven.

另一方面,在本實施形態中,由於以平均值達成目標重量,而且Si的含浸參差不齊為10%以內,因此確認出零件1之內部的Si的參差不齊獲得改善。 On the other hand, in the present embodiment, since the target weight is obtained by the average value and the impregnation unevenness of Si is within 10%, it is confirmed that the unevenness of Si inside the component 1 is improved.

經由上述各步驟S1至S9所獲得的未加工零件18,係去除公螺紋部13的殘餘部19,且施行切削表面等的精加工以成為預定尺寸,而形成最終製品的零件1(精加工步驟S10)。 The unprocessed part 18 obtained through each of the above steps S1 to S9 removes the residual portion 19 of the male thread portion 13, and performs finishing of the cutting surface or the like to become a predetermined size to form the part 1 of the final product (finishing step) S10).

未加工零件18係在從CFRP成為C/SiC的步驟中,確認出尺寸上有0.5%左右的形狀變化。此形狀變化的程度係為與在粉體加壓成形步驟S2中所設定之最終形狀的餘裕(margin)(0.7至1.0%)以下。 The unprocessed part 18 was confirmed to have a shape change of about 0.5% in size in the step of changing from CFRP to C/SiC. The degree of this shape change is equal to or less than the margin (0.7 to 1.0%) of the final shape set in the powder press forming step S2.

亦即,可製作具有0.5%以下之切削餘量之尺寸的形狀,而確認出可藉由精加工步驟S10形成具有精密形狀的構造。 That is, a shape having a size of a cutting allowance of 0.5% or less can be produced, and it is confirmed that a structure having a precise shape can be formed by the finishing step S10.

同時,在上述習知方法中,雖必須於表面產生Si殘留物的附著,且於含浸Si後將表面長時間加工而作出形狀的精確度,但在本實施形態中,亦已確認出殘留附著Si只會在對零件1的形狀不會造成影響之作為折斷餘量之公螺紋部13的殘餘部19附近產生(在殘餘部19之所以產生殘留附著Si,係由於要將較對於半零件11所必須的Si 14量更多餘的Si 14配置於凹陷部17之故)。因此,相較於上述 習知方法,可大幅縮短藉由機械加工實施於精加工步驟S10的時間。 Meanwhile, in the above-described conventional method, it is necessary to cause the adhesion of the Si residue on the surface, and the surface is processed for a long time after the Si is impregnated to obtain the shape accuracy. However, in the present embodiment, the residual adhesion has also been confirmed. Si is generated only in the vicinity of the residual portion 19 of the male screw portion 13 which does not affect the shape of the part 1 as a breaking allowance (the residual adhesion Si is generated in the residual portion 19 because it is to be compared with the half part 11 The Si 14 having a larger amount of Si 14 is disposed in the depressed portion 17). Therefore, compared to the above The conventional method can greatly shorten the time for performing the finishing step S10 by machining.

另外,亦確認出在零件1中沒有矽配置輔助具12等的固接,也沒有零件1的破損、龜裂(crack)等。 In addition, it has been confirmed that there is no fixing of the auxiliary arrangement 12 or the like in the component 1, and there is no damage, crack, or the like of the component 1.

此外,由於在各個凹陷部17進行Si 14對於半零件11的含浸,因此在一次進行處理的所有零件1中,可確認出Si 14充分的含浸,亦確認出無Si的參差不齊、含浸不均等。 Further, since the Si 14 was impregnated into the half part 11 in each of the depressed portions 17, it was confirmed that all of the parts 1 processed at one time were sufficiently impregnated with Si 14, and it was confirmed that the Si was not jagged or impregnated. equal.

藉由抑制零件1的破損、碎片、Si參差不齊,亦確認出可大幅改善零件1之製造時的良率。 It has also been confirmed that the yield of the component 1 can be greatly improved by suppressing the damage, the debris, and the unevenness of the Si of the component 1.

綜上所述,依據本實施形態之由C/SiC所構成之零件1的製造方法,可大幅減低習知之C/SiC零件製造時所產生之表面殘留Si,因此可大幅縮短精加工所需要的時間,而且可達成良率良好,尤其是小型零件1的量產化。 As described above, according to the method for manufacturing the component 1 composed of C/SiC according to the present embodiment, the surface residual Si generated during the manufacture of the conventional C/SiC component can be greatly reduced, so that the need for finishing can be greatly shortened. Time, and good yield can be achieved, especially the mass production of small parts 1.

(實施形態2) (Embodiment 2)

第11圖係顯示藉由本發明之實施形態2之方法所獲得之成形品之零件20的部分剖面圖,第12圖(a)係顯示第11圖之零件20之製造步驟之矽熔融含浸步驟S8中所使用之碳製之矽配置輔助具25的正剖面圖,第12圖(b)係顯示第11圖之零件20之製造步驟之矽熔融含浸步驟S8的圖,第13圖係顯示第11圖之零件20之製造步驟之未加工成形品卸除步驟S9的圖。 Fig. 11 is a partial cross-sectional view showing the part 20 of the molded article obtained by the method of the second embodiment of the present invention, and Fig. 12(a) is a view showing the manufacturing step of the part 20 of Fig. 11 and the molten impregnation step S8. FIG. 12(b) is a view showing a manufacturing step of the part 20 of FIG. 11 and a molten impregnation step S8, and FIG. 13 is a view showing the eleventh. The unprocessed molded article in the manufacturing step of the component 20 of the figure is removed from the diagram of the step S9.

該零件20係為由具有M6之母螺紋部23之小徑部21及直徑數10mm之中空的大徑部22所構成的附段差之圓柱形狀。 The part 20 is a cylindrical shape having a stepped portion formed by a small diameter portion 21 having a female screw portion 23 of M6 and a hollow large diameter portion 22 having a diameter of 10 mm.

該零件20雖具有母螺紋部23,但從藉由實施形態1的方法所獲得的零件1欲形成母螺紋部23時,零件1係以高硬度的C/SiC所形成,故母螺紋部23的加工困難。 Although the component 20 has the female screw portion 23, when the component 1 obtained by the method of the first embodiment is to form the female screw portion 23, the component 1 is formed of C/SiC having high hardness, so the female screw portion 23 is formed. Processing difficulties.

在本實施形態中,係在碳纖維強化碳(C/C)的階段形成母螺紋部23,因此可製造具有M6之母螺紋部23的零件20。 In the present embodiment, since the female screw portion 23 is formed at the stage of carbon fiber-reinforced carbon (C/C), the component 20 having the female screw portion 23 of M6 can be manufactured.

在本實施形態2之零件20的製造方法中,原料粉體混合步驟S1至C/C塊體形成步驟S4係設為與實施形態1相同。 In the method of manufacturing the component 20 of the second embodiment, the raw material powder mixing step S1 to the C/C bulk forming step S4 are the same as those of the first embodiment.

在本實施形態中,於半成形品形成步驟S5中,係將C/C塊體10藉由機械加工而形成第12圖(b)之半成品體的半零件24。 In the present embodiment, in the semi-molded article forming step S5, the C/C block 10 is machined to form the half-piece 24 of the semi-finished product of Fig. 12(b).

在矽熔融含浸步驟S8中,係在表面施行有BN塗覆16的碳製之矽配置輔助具25的公螺紋部26,螺接半零件24的母螺紋部23,且將半零件24固定於矽配置輔助具25。 In the crucible melt impregnation step S8, the male screw portion 26 of the carbon assisting device 25 having the BN coating 16 is applied to the surface, the female screw portion 23 of the half member 24 is screwed, and the half member 24 is fixed to矽 Configure the aid 25.

之後,如第12圖(b)所示,將熔融前的薄片狀Si 14配置於公螺紋部25之周圍的凹陷部27(矽配置步驟S7),接下來將矽配置輔助具24加熱,使Si 14熔融。該熔融後的Si 14,係因為毛細管現象而上升而含浸於半零件24的內部(矽熔融含浸步驟S8)。 Thereafter, as shown in Fig. 12(b), the flaky Si 14 before melting is placed in the recessed portion 27 around the male screw portion 25 (矽 arrangement step S7), and then the cymbal placement aid 24 is heated. Si 14 melts. The molten Si 14 is impregnated by the capillary phenomenon and impregnated into the interior of the half part 24 (矽 molten impregnation step S8).

之後,在未加工成形品卸除步驟S9中,係折斷矽配置輔助具24的公螺紋部26,而將未加工成形品的未加工零件28從矽配置輔助具24卸除。 Thereafter, in the unprocessed molded article removal step S9, the male screw portion 26 of the arranging assisting device 24 is broken, and the unprocessed component 28 of the unprocessed molded article is removed from the cymbal arranging aid 24.

此時,公螺紋部26的谷部分成為應力集中部,公螺紋部26以外可以不會損傷地折斷。 At this time, the valley portion of the male screw portion 26 serves as a stress concentration portion, and the male screw portion 26 can be broken without being damaged.

在藉此所獲得的未加工零件28中,不會有附著物、損傷,而且也不會有Si的含浸不均。 In the unprocessed part 28 obtained thereby, there is no deposit or damage, and there is no unevenness of Si impregnation.

之後,藉由機械加工,將螺接於未加工零件28之狀態下之公螺紋部26的殘餘部29去除,進行切削以成為預定的尺寸,可簡單製造出具有母螺紋部23的零件20(精加工步驟S10)。 After that, the residual portion 29 of the male screw portion 26 that is screwed to the unmachined part 28 is removed by machining, and the cutting is performed to a predetermined size, and the part 20 having the female screw portion 23 can be easily manufactured ( Finishing step S10).

另外,在上述實施形態1及2中,雖已說明了附段差之圓柱構造的零件1作為成形體,但當然不限定於該形狀、大小,亦不限定於零件。 Further, in the above-described first and second embodiments, the component 1 having the cylindrical structure with a stepped difference has been described as a molded body, but it is of course not limited to the shape and size, and is not limited to the component.

此外,作為固定手段,雖已說明了以公螺紋部13、26、母螺紋部15、23作為構成要件的固定手段,但亦可例如在半零件或矽配置輔助具之一方形成具有朝周方向延伸之溝的柱部,且在矽配置輔助具或半零件之另一方形成嵌接於柱部的凹部,而為以柱部及凹部為構成要素的固定手段。 Further, although the male screw portions 13 and 26 and the female screw portions 15 and 23 are used as the fixing means as the fixing means, for example, one of the half parts or the cymbal arrangement assisting device may be formed to have a circumferential direction. The column portion of the groove is formed, and the other portion of the cymbal arrangement aid or the half piece is formed as a concave portion that is engaged with the column portion, and is a fixing means having the column portion and the concave portion as constituent elements.

4‧‧‧PAN系碳纖維 4‧‧‧PAN carbon fiber

5‧‧‧瀝青系纖維 5‧‧‧Asphalt fiber

6‧‧‧酚樹脂粒子 6‧‧‧ phenol resin particles

7‧‧‧石墨粒子 7‧‧‧Graphite particles

8‧‧‧混合粉體 8‧‧‧ mixed powder

S1至S10‧‧‧步驟 S1 to S10‧‧‧ steps

Claims (9)

一種碳纖維強化碳化矽成形體的製造方法,係具有:碳纖維強化碳塊體形成步驟,係形成將樹脂及碳纖維燒結而成的碳纖維強化碳塊體;半成形品形成步驟,將該碳纖維強化碳塊體加工而形成複數個半成形品;半成形品固定步驟,藉由固定手段將各個前述半成形品固定於形成於矽配置輔助具的複數個各個凹陷部;矽配置步驟,將矽配置於前述凹陷部;矽熔融含浸步驟,藉由將前述矽加熱使之熔融,而使前述矽含浸於前述半成形品的內部;未加工成形品卸除步驟,將前述矽含浸於前述半成形品並藉由化學反應而產生之碳纖維強化碳化矽所構成的未加工成形品,在前述固定手段的部位從前述矽配置輔助具卸除;及精加工步驟,將前述未加工成形品精加工而形成成形品,其中,前述固定手段係由形成於前述半成形品的公螺紋部、及形成於前述矽配置輔助具且螺接前述公螺紋部的母螺紋部所構成,而前述半成形品係在前述公螺紋部的谷部折斷而從前述矽配置輔助具卸除。 A method for producing a carbon fiber-reinforced carbonized niobium formed body, comprising: a carbon fiber-reinforced carbon block forming step, forming a carbon fiber-reinforced carbon block obtained by sintering a resin and carbon fibers; and a semi-molded product forming step, the carbon fiber-reinforced carbon block Forming a plurality of semi-molded articles by a body process; and fixing the semi-molded articles to a plurality of recessed portions formed in the argon-arrangement aid by a fixing means; and arranging the rafts in the foregoing a depressed portion; a crucible melt impregnation step, wherein the crucible is impregnated into the interior of the semi-molded article by heating the crucible, and the unprocessed product is removed, and the crucible is impregnated into the semi-molded article and borrowed An unprocessed product comprising carbon fiber-reinforced lanthanum carbide produced by a chemical reaction is removed from the arranging aid at a portion of the fixing means; and a finishing step is performed to finish the unprocessed product to form a molded article The fixing means is formed by a male screw portion formed in the semi-molded article and formed on the cymbal arrangement And screwing the female threaded portion of the male screw portion formed, and the half-line shaped auxiliary tool arranged to break the silicon removed from the valley portion of the male threaded portion. 一種碳纖維強化碳化矽成形體的製造方法,係具有:碳纖維強化碳塊體形成步驟,係形成將樹脂及碳 纖維燒結而成的碳纖維強化碳塊體;半成形品形成步驟,將該碳纖維強化碳塊體加工而形成複數個半成形品;半成形品固定步驟,藉由固定手段將各個前述半成形品固定於形成於矽配置輔助具的複數個各個凹陷部;矽配置步驟,將矽配置於前述凹陷部;矽熔融含浸步驟,藉由將前述矽加熱使之熔融,而使前述矽含浸於前述半成形品的內部;未加工成形品卸除步驟,將前述矽含浸於前述半成形品並藉由化學反應而產生之碳纖維強化碳化矽所構成的未加工成形品,在前述固定手段的部位從前述矽配置輔助具卸除;及精加工步驟,將前述未加工成形品精加工而形成成形品,其中,前述固定手段係由形成於前述矽配置輔助具的公螺紋部、及形成於前述半成形品且螺接前述公螺紋部的母螺紋部所構成,而前述半成形品係在前述公螺紋部的谷部折斷而從前述矽配置輔助具卸除。 A method for producing a carbon fiber-reinforced carbonized niobium formed body, comprising: a carbon fiber-reinforced carbon block forming step, forming a resin and carbon a carbon fiber-reinforced carbon block obtained by sintering a fiber; a semi-molded product forming step of forming the carbon fiber-reinforced carbon block to form a plurality of semi-molded articles; and a semi-molded article fixing step of fixing each of the semi-molded articles by a fixing means a plurality of recessed portions formed in the argon-arrangement aid; a 矽 arrangement step of arranging the ruthenium in the recessed portion; and a 矽melt-impregnation step of melting the ruthenium to melt the ruthenium to impregnate the ruthenium In the inside of the product; the unprocessed molded article removing step, the unprocessed product comprising the carbon fiber-reinforced tantalum carbide which is obtained by chemical reaction by impregnating the above-mentioned tantalum, and the portion of the fixing means is from the foregoing And a finishing step of finishing the unprocessed molded article to form a molded article, wherein the fixing means is formed by a male screw portion formed in the cymbal arranging aid and formed in the semi-molded article And the female thread portion of the male screw portion is screwed, and the semi-molded product is broken at the valley portion of the male screw portion from the foregoing Set assisting removed. 一種碳纖維強化碳化矽成形體的製造方法,係具有:碳纖維強化碳塊體形成步驟,係形成將樹脂及碳纖維燒結而成的碳纖維強化碳塊體;半成形品形成步驟,將該碳纖維強化碳塊體加工而形成複數個半成形品; 半成形品固定步驟,藉由固定手段將各個前述半成形品固定於形成於矽配置輔助具的複數個各個凹陷部;矽配置步驟,將矽配置於前述凹陷部;矽熔融含浸步驟,藉由將前述矽加熱使之熔融,而使前述矽含浸於前述半成形品的內部;未加工成形品卸除步驟,將前述矽含浸於前述半成形品並藉由化學反應而產生之碳纖維強化碳化矽所構成的未加工成形品,在前述固定手段的部位從前述矽配置輔助具卸除;及精加工步驟,將前述未加工成形品精加工而形成成形品,其中,前述固定手段係由形成於前述矽配置輔助具及前述半成形品之一方的柱部、及形成於前述半成形品及前述矽配置輔助具之另一方且嵌接前述柱部的凹部所構成,而前述半成形品係在前述柱部折斷而從前述矽配置輔助具卸除。 A method for producing a carbon fiber-reinforced carbonized niobium formed body, comprising: a carbon fiber-reinforced carbon block forming step, forming a carbon fiber-reinforced carbon block obtained by sintering a resin and carbon fibers; and a semi-molded product forming step, the carbon fiber-reinforced carbon block Forming a plurality of semi-molded articles by body processing; a semi-molded article fixing step of fixing each of the semi-molded articles to a plurality of respective recessed portions formed in the cymbal placement aid by a fixing means; and arranging the ruthenium in the recessed portion; and melting the impregnation step by The ruthenium is heated and melted to impregnate the ruthenium into the interior of the semi-molded article; the unprocessed molded article is removed, and the ruthenium is impregnated into the semi-molded article and carbon fiber-reinforced lanthanum carbide is produced by a chemical reaction. The unformed molded article is removed from the arranging aid at a portion of the fixing means, and the finishing step is performed by finishing the unformed product to form a molded article, wherein the fixing means is formed by a column portion of the arranging aid and one of the semi-molded articles, and a concave portion formed in the other of the semi-molded article and the cymbal arranging device and engaging the column portion, wherein the semi-molded article is The column portion is broken and is removed from the cymbal arrangement aid. 如申請專利範圍第1至3項中任一項所述之碳纖維強化碳化矽成形體的製造方法,其中,在前述碳纖維強化碳塊體形成步驟中,係在惰性氛圍下進行碳化。 The method for producing a carbon fiber-reinforced cerium carbide formed article according to any one of the first aspect, wherein the carbon fiber-reinforced carbon block forming step is carbonized in an inert atmosphere. 如申請專利範圍第1至3項中任一項所述之碳纖維強化碳化矽成形體的製造方法,其中,在前述矽熔融含浸步驟中,係在真空氛圍下形成由前述碳纖維強化碳化矽所構成的前述未加工成形品。 The method for producing a carbon fiber-reinforced cerium carbide formed article according to any one of the first aspect of the present invention, wherein, in the enthalpy melt impregnation step, the carbon fiber-reinforced lanthanum carbide is formed in a vacuum atmosphere. The aforementioned unprocessed molded article. 如申請專利範圍第1至3項中任一項所述之碳纖維強化碳化矽成形體的製造方法,其中,在前述矽熔融含浸步驟中,前述矽係因為毛細管現象而上升並含浸於前述半成形品的前述內部。 The method for producing a carbon fiber-reinforced cerium carbide formed article according to any one of the first aspect, wherein the lanthanum melt impregnation step is increased by a capillary phenomenon and impregnated into the semi-formed shape. The aforementioned interior of the product. 如申請專利範圍第3項所述之碳纖維強化碳化矽成形體的製造方法,其中,前述柱部係具有朝周方向延伸的溝部。 The method for producing a carbon fiber-reinforced tantalum carbide molded body according to the third aspect of the invention, wherein the column portion has a groove portion extending in a circumferential direction. 如申請專利範圍第1至3項中任一項所述之碳纖維強化碳化矽成形體的製造方法,其中,前述矽配置輔助具係為碳製的矽配置輔助具。 The method for producing a carbon fiber-reinforced cerium carbide formed article according to any one of the first aspect, wherein the arranging aid is a carbon arranging aid. 如申請專利範圍第8項所述之碳纖維強化碳化矽成形體的製造方法,其中,前述碳製的前述矽配置輔助具係在表面施行有BN塗覆。 The method for producing a carbon fiber-reinforced tantalum carbide molded article according to the above aspect of the invention, wherein the carbon-based tantalum-dispensing auxiliary device is coated with BN on the surface.
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