TWI564584B - Highly analytical tactile sensing device - Google Patents

Highly analytical tactile sensing device Download PDF

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TWI564584B
TWI564584B TW104136341A TW104136341A TWI564584B TW I564584 B TWI564584 B TW I564584B TW 104136341 A TW104136341 A TW 104136341A TW 104136341 A TW104136341 A TW 104136341A TW I564584 B TWI564584 B TW I564584B
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sensing device
tactile sensing
surface roughness
layer
filling layer
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TW104136341A
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TW201638607A (en
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li-ting Zheng
yan-heng Huang
zong-kai Chen
shi-jie Huang
hong-jie Lu
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Interface Optoelectronics (Shenzhen) Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Manipulator (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

高解析觸覺感測裝置High resolution tactile sensing device

本發明係有關於一種觸覺感測裝置，特別是一種藉由改善接觸物體之表面粗糙度以提升解析能力之高解析觸覺感測裝置。The present invention relates to a tactile sensing device, and more particularly to a high resolution tactile sensing device for improving the resolution of a surface by improving the surface roughness of the contact object.

一般而言，觸覺感測量測系統與人類手指的功能相似，當與物體接觸時，可以知道所接觸的物體表面的特徵與其他物理性質資訊，例如：作用力或壓力的強度與空間分佈、物體形狀與位置、表面紋路質地、溫度、柔軟度或濕度等特徵資訊。隨著現今科技的日漸蓬勃與發展，目前現有的觸覺感測量測系統在工業領域中，已可大幅地應用於例如控制機器人動作（如抓取物體）、結合顯示器用來作為觸控輸入裝置、實現指紋辨識或虛擬實境（Virtual Reality）等用途。In general, the tactile sense measurement system is similar in function to a human finger. When in contact with an object, it can know the characteristics of the surface of the object being contacted and other physical properties, such as the strength and spatial distribution of the force or pressure, and the object. Information on shape and location, surface texture, temperature, softness or humidity. With the rapid development and development of today's technology, the existing tactile sensing measurement system has been widely used in the industrial field, for example, to control robot movements (such as grasping objects), combined with displays for use as touch input devices, Implement fingerprint recognition or virtual reality (Virtual Reality).

其中，就應用層面而言，惟有能夠提供精準且高解析度的觸覺感測，方能有助於準確地判斷所接觸物體的角度及方位，更俾利於提升觸覺感測技術（Tactile Sensing Technology）的流暢度。更進一步而言，一個可靠的觸覺感測器所講求的，即是必須能夠不受到外界環境變化的影響，使得感測功能可以在任何工作條件下皆保持精確的靈敏度水準。至於，環境中容易影響觸覺感測的因素很多，大抵而言包括有：環境中的溫度、濕度、接觸界面的平滑度與否等等因素。而為了維持觸覺感測器較佳的感測精度與解析能力，現有技術皆致力於降低環境中可能造成影響及干擾的因子。然而，這些改善通常效率不佳，或是提升的幅度相當有限，並無法有效地解決環境中造成觸覺感測干擾及雜訊的因素。Among them, at the application level, only the ability to provide accurate and high-resolution tactile sensing can help to accurately determine the angle and orientation of the object being touched, and is more conducive to the improvement of tactile sensing technology (Tactile Sensing Technology). The fluency. Furthermore, a reliable tactile sensor is required to be able to be protected from external environmental changes, so that the sensing function can maintain accurate sensitivity levels under any working conditions. As for the factors in the environment that easily affect the tactile sensing, it generally includes factors such as the temperature and humidity in the environment, the smoothness of the contact interface, and the like. In order to maintain the better sensing accuracy and resolution of the tactile sensor, the prior art is directed to reducing the factors that may cause influence and interference in the environment. However, these improvements are usually inefficient or have limited margins and do not effectively address the factors that cause tactile sensing interference and noise in the environment.

有鑑於此需求，同時為了提供一種具有較佳感測精度的觸覺感測器，本發明人係有感先前技藝之可改善，且依據多年來從事此方面之相關經驗，悉心觀察且研究之，並配合學理之運用，而提出一種設計新穎且能有效提升觸覺感測精度之本發明，其係揭露一種高解析之觸覺感測裝置，其具體之架構及實施方式將詳述於下。In view of this demand, and in order to provide a tactile sensor with better sensing accuracy, the present inventors have the ability to improve the prior art, and based on years of experience in this field, carefully observe and study, In conjunction with the application of the theory, the present invention proposes a novel design and can effectively improve the tactile sensing accuracy, and discloses a high-resolution tactile sensing device, the specific structure and implementation of which will be described in detail below.

為解決習知技術存在的問題，本發明之一目的係在於提供一種高解析觸覺感測裝置，其係針對現行的觸覺感測器作一改良，相較於習知技術，此種新穎的高解析觸覺感測裝置係有助於提供較佳的檢測效益與解析能力。In order to solve the problems of the prior art, it is an object of the present invention to provide a high-resolution tactile sensing device which is improved for the current tactile sensor, which is novel higher than the prior art. Analytical haptic sensing devices help to provide better detection and resolution capabilities.

本發明之又一目的係在於提供一種高解析觸覺感測裝置，其係藉由提供一填平層，並利用填平層之平滑表面來改善與接觸物體間的表面粗糙度，藉此降低因表面粗糙度所造成之干擾，進而提升觸覺感測裝置之感測精度與訊號解析能力。Another object of the present invention is to provide a high-resolution tactile sensing device which improves the surface roughness between a contact object by providing a filling layer and using a smooth surface of the filling layer. The interference caused by the surface roughness improves the sensing accuracy and signal resolution capability of the tactile sensing device.

本發明之再一目的係在於提供一種高解析觸覺感測裝置，此感測裝置不僅可針對現有的觸覺感測器進行改良與應用外，更可進一步地用於未來科技機械人手指觸覺的解析能力，皆可應用本發明，在無形中提高本發明所能應用之範疇，並增進其產業應用性。A further object of the present invention is to provide a high-resolution tactile sensing device that can be used not only for improvement and application of existing tactile sensors, but also for further analysis of finger touch of future technology robots. The invention can be applied to the invention, and the scope of application of the invention can be improved in an invisible manner and its industrial applicability can be enhanced.

是以，本發明係揭露一種高解析觸覺感測裝置，用於接觸一受測物體並感知其觸覺。此種高解析觸覺感測裝置包括有一超音波元件、一緩衝層、以及一填平層。其中，超音波元件具有多個使用於發送及接收訊號之感測單元，以對受測物體進行偵測並提供感測結果。緩衝層係設置於超音波元件之表面。填平層係具有一平滑表面，並設置於緩衝層之表面，以顯露出該平滑表面，並利用此平滑表面接觸於受測物體，藉此降低與受測物體間因表面粗糙度所造成之干擾。Therefore, the present invention discloses a high-resolution tactile sensing device for contacting an object to be measured and sensing its tactile sensation. The high resolution tactile sensing device includes an ultrasonic component, a buffer layer, and a fill level. The ultrasonic component has a plurality of sensing units for transmitting and receiving signals to detect the detected object and provide a sensing result. The buffer layer is disposed on the surface of the ultrasonic component. The filling layer has a smooth surface and is disposed on the surface of the buffer layer to expose the smooth surface, and the smooth surface is contacted with the object to be tested, thereby reducing the surface roughness caused by the object to be tested. interference.

其中，根據本發明之實施例，所述之緩衝層的材質例如可為有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料。According to an embodiment of the present invention, the material of the buffer layer may be, for example, an organic material, an inorganic material, or a mixed material made of an organic material and an inorganic material.

根據本發明之實施例，其中，所述之填平層的材質亦例如可為有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料。According to an embodiment of the present invention, the material of the filling layer may be, for example, an organic material, an inorganic material, or a mixed material prepared by mixing an organic material and an inorganic material.

根據本發明之實施例，其中，所述之填平層的聲抗值係大於1.2牛頓*秒/米 3。 According to an embodiment of the invention, the sound-resistance value of the filling layer is greater than 1.2 Newtons*second/ m3 .

根據本發明之實施例，其中，所述之填平層的厚度係大於3微米。According to an embodiment of the invention, the thickness of the filling layer is greater than 3 microns.

根據本發明之實施例，其中，所述之填平層的表面鉛筆硬度係大於3H。According to an embodiment of the invention, the surface of the filling layer has a pencil hardness of more than 3H.

根據本發明之實施例，其中，所述之填平層的表面粗糙度應大於緩衝層之表面粗糙度。再者，填平層之表面粗糙度應小於或等於10微米，至於，緩衝層之表面粗糙度則大於或等於3微米。According to an embodiment of the invention, the surface roughness of the filling layer should be greater than the surface roughness of the buffer layer. Furthermore, the surface roughness of the filling layer should be less than or equal to 10 microns, and the surface roughness of the buffer layer is greater than or equal to 3 microns.

更進一步而言，為了完全去除與受測物體間因表面粗糙度所造成之干擾，本發明所使用之填平層之表面粗糙度更可進一步地透過一軟體進行補償，例如將表面粗糙度當成背景值扣除，則亦可用以實施本發明之發明目的。Furthermore, in order to completely remove the interference caused by the surface roughness between the object and the object to be tested, the surface roughness of the filling layer used in the present invention can be further compensated by a soft body, for example, the surface roughness is regarded as The background value subtraction can also be used to carry out the object of the invention.

底下藉由具體實施例配合所附的圖式詳加說明，當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。The purpose, technical contents, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments and the accompanying drawings.

以上有關於本發明的內容說明，與以下的實施方式係用以示範與解釋本發明的精神與原理，並且提供本發明的專利申請範圍更進一步的解釋。有關本發明的特徵、實作與功效，茲配合圖式作較佳實施例詳細說明如下。The above description of the present invention is intended to be illustrative and illustrative of the spirit and principles of the invention, and to provide further explanation of the scope of the invention. The features, implementations, and utilities of the present invention are described in detail with reference to the preferred embodiments.

為了有效提升現行觸覺感測器之訊號解析能力，本發明係針對此目標提出一種較佳的改良裝置，其係為一高解析觸覺感測裝置。其中，為了能更佳地理解本發明所述之技術內容，請一併參閱第1圖及第2圖所示結構之示意圖，本發明將據此進行詳細之說明如下。In order to effectively improve the signal analysis capability of the current tactile sensor, the present invention proposes a preferred improved device for this purpose, which is a high resolution tactile sensing device. In order to better understand the technical contents of the present invention, please refer to the schematic diagrams of the structures shown in FIG. 1 and FIG. 2, and the present invention will be described in detail below.

首先，如第1圖所示，其係為一習見觸覺感測器之結構示意圖。如圖所示，一超音波元件10係用以對受測物體20進行偵測，並提供感測結果，其中，超音波元件10中係具有多個使用於發送及接收訊號（如箭頭所示）之感測單元，以對受測物體20進行偵測。由於超音波元件10之操作原理主要係由一探頭發射出聲波，碰到受測物體20之界面21產生反彈波，再由探頭進行偵測，即可得知界面和探頭的相對位置及感知結果。此一部份之技術實為現今科技所熟知者，而並非本發明之發明重點，故就此超音波元件部分之細部技術內容，本發明並不進行贅述。First, as shown in Fig. 1, it is a schematic structural view of a tactile sensor. As shown, an ultrasonic component 10 is used to detect the object 20 and provide sensing results. The ultrasonic component 10 has a plurality of signals for transmitting and receiving (as indicated by the arrows). The sensing unit detects the object 20 to be tested. Since the operation principle of the ultrasonic component 10 is mainly to emit sound waves by a probe, a collision wave is generated at the interface 21 of the object 20 to be measured, and then the probe detects the relative position and the sensing result of the interface and the probe. . This part of the technology is well known to those skilled in the art, and is not the focus of the invention. Therefore, the details of the technical components of the ultrasonic component are not described herein.

之後，一緩衝層（buffer）30係設置於超音波元件10之表面，在一實施例中，緩衝層30之材質例如可為有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料（例如：聚二甲基矽氧烷，Polydimethylsiloxane，PDMS）。如第1圖所示，由於緩衝層30並非完全平滑（smooth）的材料，故在與受測物體20之界面21上可能具有表面粗糙度（roughness）的問題，因此，本發明係在此界面21上提供有一填平層40，其結構請參閱第2圖所示。Then, a buffer 30 is disposed on the surface of the ultrasonic component 10. In an embodiment, the material of the buffer layer 30 can be, for example, an organic material, an inorganic material, or a mixture of an organic material and an inorganic material. Mixed material (for example: polydimethylsiloxane, Polydimethylsiloxane, PDMS). As shown in Fig. 1, since the buffer layer 30 is not a completely smooth material, there may be a problem of surface roughness at the interface 21 with the object 20 to be measured, and therefore, the present invention is at this interface. A filling layer 40 is provided on the 21, and its structure is shown in Fig. 2.

如第2圖所示，填平層40之一側係具有一平滑表面41，並且，填平層40係設置於緩衝層30之表面上，以同時顯露出該平滑表面41。是以，根據本發明之實施例，填平層40係可利用此平滑表面41接觸於受測物體20，以利用平滑表面41降低與受測物體20之界面21間之表面粗糙度。一般而言，當改善接觸界面的表面粗糙度之後，則習見因表面粗糙度所造成之干擾及雜訊即可有效地被消弭，則本發明即可藉此進一步地提升感測器之感測精度。值得說明的是，由於本發明主要係利用提供此具有平滑表面41之填平層40來提升觸覺感測裝置之訊號解析能力，故有關此填平層40之材質、厚度、及表面粗糙度等數值，則皆為本發明必須善加考量的設計重點。As shown in Fig. 2, one side of the leveling layer 40 has a smooth surface 41, and the filling layer 40 is disposed on the surface of the buffer layer 30 to simultaneously expose the smooth surface 41. Therefore, according to the embodiment of the present invention, the flattening layer 40 can contact the object 20 to be measured by the smooth surface 41 to reduce the surface roughness between the interface 21 with the object 20 to be measured by the smooth surface 41. In general, after improving the surface roughness of the contact interface, it is understood that the interference caused by the surface roughness and the noise can be effectively eliminated, and the present invention can further improve the sensing of the sensor. Precision. It should be noted that since the present invention mainly utilizes the filling layer 40 having the smooth surface 41 to improve the signal analysis capability of the tactile sensing device, the material, thickness, surface roughness, etc. of the filling layer 40 are related. The numerical values are the design priorities that must be considered in the invention.

詳細而言，根據本發明之實施例，填平層40之材質選用例如可為：有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料（例如：聚二甲基矽氧烷，Polydimethylsiloxane，PDMS），如第2圖所示，其厚度T必須大於3微米（μm）。至於，填平層40之聲抗值（acoustic impedance）則應大於1.2牛頓*秒/米 3，表面鉛筆硬度（surface pencil hardness）需大於3H。除此之外，根據本發明之實施例，填平層40之表面粗糙度更應大於緩衝層30之表面粗糙度，例如，填平層40之表面粗糙度需小於或等於10微米，至於，緩衝層30之表面粗糙度則係大於或等於3微米。 In detail, according to the embodiment of the present invention, the material of the filling layer 40 may be, for example, an organic material, an inorganic material, or a mixed material prepared by mixing an organic material and an inorganic material (for example, polydimethyl oxime). Alkene, Polydimethylsiloxane (PDMS), as shown in Figure 2, must have a thickness T greater than 3 microns (μm). As for the acoustic impedance of the filling layer 40, it should be greater than 1.2 Newtons*second/ m3 , and the surface pencil hardness should be greater than 3H. In addition, according to the embodiment of the present invention, the surface roughness of the filling layer 40 should be greater than the surface roughness of the buffer layer 30. For example, the surface roughness of the filling layer 40 needs to be less than or equal to 10 micrometers. The surface roughness of the buffer layer 30 is greater than or equal to 3 microns.

更進一步而言，為了完全去除與受測物體20間因表面粗糙度所造成之干擾，本發明所選用之填平層40，其表面粗糙度更可進一步地透過一軟體進行補償，例如：直接將表面粗糙度當成背景值扣除，則利用此方法，亦可有效地將習知因表面粗糙度而造成之干擾與雜訊完全去除。舉例來說，觸覺感測裝置所接收到的信號強度可由扣除粗糙度（即背景值）之積分面積表示，當進行定量分析時，即可有效地將原來因表面粗糙度而形成的干擾及雜訊完全去除，進一步較佳地實現本發明之發明目的。Further, in order to completely remove the interference between the object and the object 20 due to the surface roughness, the surface roughness of the filling layer 40 selected by the present invention can be further compensated by a software body, for example: direct When the surface roughness is subtracted as the background value, the interference caused by the surface roughness and the noise can be effectively removed by this method. For example, the signal strength received by the tactile sensing device can be represented by the integrated area minus the roughness (ie, the background value). When performing the quantitative analysis, the interference and the original interference due to the surface roughness can be effectively effectively The invention is completely removed, and the object of the invention is further preferably achieved.

是以，綜上所述，本發明所揭露之高解析觸覺感測裝置係為一種新穎且前所未見之設計，其係利用一具有平滑表面之填平層，以利用此特定之填平層與受測物體進行接觸，藉此改善接觸界面上之表面粗糙度。其中，由於因表面粗糙度所造成之干擾及雜訊可以有效地被消弭，故本發明所揭露之觸覺感測裝置自然具有較佳之訊號解析能力與感知效益。Therefore, in summary, the high-resolution tactile sensing device disclosed in the present invention is a novel and unprecedented design that utilizes a flattening layer having a smooth surface to fill the flat with this particular The layer is in contact with the object to be tested, thereby improving the surface roughness at the contact interface. The haptic sensing device disclosed in the present invention naturally has better signal resolution and sensing benefits because the interference caused by the surface roughness and the noise can be effectively eliminated.

另一方面而言，根據本發明所揭露之高解析觸覺感測裝置，此感測裝置不僅可針對現有的觸覺感測器進行改良與應用外，更可進一步地用於未來科技機械人手指觸覺的解析能力，皆可應用本發明，故相較於習知技術，本發明所揭露之觸覺感測裝置，顯然具有較佳之感測效益與解析能力，實具有極佳之產業發展性與廣於發展之潛力，不僅在無形中提高本發明所能應用之範疇，更進一步地增進其產業應用性。In another aspect, according to the high-resolution tactile sensing device disclosed in the present invention, the sensing device can be further improved and applied to existing tactile sensors, and can be further used for future technology robot finger touch. The present invention can be applied to the analytic ability of the present invention. Therefore, compared with the prior art, the tactile sensing device disclosed by the present invention obviously has better sensing efficiency and analytical capability, and has excellent industrial development and widening. The potential of development not only enhances the scope of application of the present invention in an intangible manner, but further enhances its industrial applicability.

由此觀之，顯見本發明之目的及功效係明顯優於先前技術，且本發明所揭露之技術特徵、方法手段與達成之功效係顯著地不同於現行方案，實非為熟悉該項技術者能輕易完成者，故具備有專利要件。From this point of view, it is apparent that the object and function of the present invention are significantly superior to the prior art, and the technical features, method means and achievement achieved by the present invention are significantly different from the current scheme, and are not familiar to the skilled person. Can be easily completed, so there are patents.

以上所述之諸多實施例僅係為說明本發明之技術思想及特點，其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施，當不能以之限定本發明之專利範圍，即大凡依本發明所揭示之精神所作之均等變化或修飾，仍應涵蓋在本發明之專利範圍內。The embodiments described above are merely illustrative of the technical spirit and characteristics of the present invention, and the objects of the present invention can be understood by those skilled in the art and are not limited thereto. Equivalent changes or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

10          超音波元件 20          受測物體 21          界面 30          緩衝層 40          填平層     41          平滑表面10 Ultrasonic components 20 Objects to be measured 21 Interface 30 Buffer layer 40 Filling layer 41 Smooth surface

第1圖係為一習見觸覺感測器之結構示意圖。 第2圖係為根據本發明實施例之高解析觸覺感測裝置之結構示意圖。Figure 1 is a schematic view of the structure of a tactile sensor. 2 is a schematic structural view of a high-resolution tactile sensing device according to an embodiment of the present invention.

10         超音波元件 20          受測物體 21          界面 30          緩衝層 40          填平層              41          平滑表面10 Ultrasonic components 20 Objects to be measured 21 Interface 30 Buffer layer 40 Filling layer 41 Smooth surface

Claims (10)

一種高解析觸覺感測裝置，用於接觸一受測物體並感知其觸覺，該高解析觸覺感測裝置包括：         一超音波元件，具有多個使用於發送及接收訊號之感測單元，以對該受測物體進行偵測並提供感測結果；                        一緩衝層，係設置於該超音波元件之表面；以及        一填平層，係具有一平滑表面，其中，該填平層係設置於該緩衝層之表面，並露出該平滑表面，以利用該平滑表面接觸該受測物體，降低與該受測物體間因表面粗糙度所造成之干擾。A high-resolution tactile sensing device for contacting an object to be measured and sensing its tactile sensation, the high-resolution tactile sensing device comprising: an ultrasonic component having a plurality of sensing units for transmitting and receiving signals, to The object to be tested is detected and provides a sensing result; a buffer layer is disposed on a surface of the ultrasonic component; and a filling layer has a smooth surface, wherein the filling layer is disposed in the buffer The surface of the layer exposes the smooth surface to contact the object to be measured by the smooth surface, thereby reducing interference with the object due to surface roughness. 如請求項1所述之高解析觸覺感測裝置，其中該緩衝層之材質係為有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料。The high-resolution tactile sensing device according to claim 1, wherein the material of the buffer layer is an organic material, an inorganic material, or a mixed material prepared by mixing an organic material and an inorganic material. 如請求項1所述之高解析觸覺感測裝置，其中該填平層之材質係為有機材料、無機材料、或以有機材料與無機材料混合製成之混成材料。The high-resolution tactile sensing device according to claim 1, wherein the material of the filling layer is an organic material, an inorganic material, or a mixed material prepared by mixing an organic material and an inorganic material. 如請求項1所述之高解析觸覺感測裝置，其中該填平層之聲抗值係大於1.2牛頓*秒/米 3。 The high-resolution tactile sensing device of claim 1, wherein the leveling layer has a acoustic impedance value greater than 1.2 Newtons*second/ m3 . 如請求項1所述之高解析觸覺感測裝置，其中該填平層之厚度係大於3微米。The high resolution tactile sensing device of claim 1, wherein the fill level has a thickness greater than 3 microns. 如請求項1所述之高解析觸覺感測裝置，其中該填平層之表面鉛筆硬度係大於3H。The high resolution tactile sensing device of claim 1, wherein the surface layer of the filling layer has a pencil hardness greater than 3H. 如請求項1所述之高解析觸覺感測裝置，其中該填平層之表面粗糙度係大於該緩衝層之表面粗糙度。The high resolution tactile sensing device of claim 1, wherein the surface roughness of the filling layer is greater than the surface roughness of the buffer layer. 如請求項7所述之高解析觸覺感測裝置，其中該填平層之表面粗糙度係小於或等於10微米。The high resolution tactile sensing device of claim 7, wherein the fill level has a surface roughness of less than or equal to 10 microns. 如請求項7所述之高解析觸覺感測裝置，其中該緩衝層之表面粗糙度係大於或等於3微米。The high resolution tactile sensing device of claim 7, wherein the buffer layer has a surface roughness greater than or equal to 3 microns. 如請求項1所述之高解析觸覺感測裝置，其中該填平層之表面粗糙度更可透過一軟體進行補償，以完全去除與該受測物體間因表面粗糙度所造成之干擾。The high-resolution tactile sensing device of claim 1, wherein the surface roughness of the filling layer is more compensated by a software body to completely remove the interference caused by the surface roughness between the object and the object to be tested.
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