TWI562962B - Polysilicon receptacle - Google Patents
Polysilicon receptacleInfo
- Publication number
- TWI562962B TWI562962B TW101126663A TW101126663A TWI562962B TW I562962 B TWI562962 B TW I562962B TW 101126663 A TW101126663 A TW 101126663A TW 101126663 A TW101126663 A TW 101126663A TW I562962 B TWI562962 B TW I562962B
- Authority
- TW
- Taiwan
- Prior art keywords
- polysilicon
- receptacle
- polysilicon receptacle
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/984—Preparation from elemental silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0218—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of ceramic
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011162431A JP5653857B2 (ja) | 2011-07-25 | 2011-07-25 | ポリシリコン受け容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201311560A TW201311560A (zh) | 2013-03-16 |
TWI562962B true TWI562962B (en) | 2016-12-21 |
Family
ID=47600971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101126663A TWI562962B (en) | 2011-07-25 | 2012-07-24 | Polysilicon receptacle |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP2738141B1 (zh) |
JP (1) | JP5653857B2 (zh) |
KR (1) | KR20140039295A (zh) |
MY (1) | MY169815A (zh) |
TW (1) | TWI562962B (zh) |
WO (1) | WO2013015119A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9662628B2 (en) * | 2014-08-15 | 2017-05-30 | Rec Silicon Inc | Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1770062A1 (en) * | 2004-06-22 | 2007-04-04 | Tokuyama Corporation | Cylindrical container made of carbon and method for producing silicon |
CN101423422A (zh) * | 2008-11-12 | 2009-05-06 | 中国科学院山西煤炭化学研究所 | 一种对炭材料进行碳化硅涂层的方法 |
US20090311450A1 (en) * | 2004-06-23 | 2009-12-17 | Tokuyama Corporation | Tubular container made of carbon |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5045398A (en) * | 1982-06-22 | 1991-09-03 | Harry Levin | Silicon carbide product |
JPS62108515A (ja) * | 1985-11-06 | 1987-05-19 | Osaka Titanium Seizo Kk | 多結晶シリコン半導体の製造方法および鋳造用鋳型 |
NO881270L (no) * | 1987-05-14 | 1988-11-15 | Dow Corning | Framgangsmaate for aa redusere carboninnholdet i halvledere. |
JPH10182133A (ja) * | 1996-12-26 | 1998-07-07 | Kawasaki Steel Corp | シリコン精製方法 |
JPH10279376A (ja) * | 1997-03-31 | 1998-10-20 | Toyo Tanso Kk | 炭素−炭化ケイ素複合材料を用いた連続鋳造用部材 |
JP3958092B2 (ja) | 2001-06-05 | 2007-08-15 | 株式会社トクヤマ | シリコン生成用反応装置 |
JP4038110B2 (ja) * | 2001-10-19 | 2008-01-23 | 株式会社トクヤマ | シリコンの製造方法 |
JP5291282B2 (ja) * | 2003-08-13 | 2013-09-18 | 株式会社トクヤマ | 管型反応容器および該反応容器を用いたシリコンの製造方法 |
JP4471692B2 (ja) * | 2004-03-25 | 2010-06-02 | 東ソー・クォーツ株式会社 | 離型層を有するシリコン溶融用容器の製造方法 |
US7727483B2 (en) * | 2004-08-19 | 2010-06-01 | Tokuyama Corporation | Reactor for chlorosilane compound |
EP2223893A4 (en) * | 2007-12-28 | 2012-03-07 | Tokuyama Corp | DEVICE FOR PRODUCING SILICON |
JP5334490B2 (ja) * | 2008-08-06 | 2013-11-06 | 株式会社トクヤマ | シリコン製造装置 |
JP5553754B2 (ja) * | 2008-08-07 | 2014-07-16 | 電気化学工業株式会社 | カーボン製反応容器 |
JP5511795B2 (ja) * | 2009-04-01 | 2014-06-04 | 電気化学工業株式会社 | 気相反応装置 |
JP5455530B2 (ja) * | 2009-09-30 | 2014-03-26 | 株式会社トクヤマ | ポリシリコン金属汚染防止方法 |
-
2011
- 2011-07-25 JP JP2011162431A patent/JP5653857B2/ja active Active
-
2012
- 2012-07-11 KR KR1020147001095A patent/KR20140039295A/ko active Search and Examination
- 2012-07-11 WO PCT/JP2012/067739 patent/WO2013015119A1/ja unknown
- 2012-07-11 MY MYPI2014700103A patent/MY169815A/en unknown
- 2012-07-11 EP EP12818442.1A patent/EP2738141B1/en not_active Not-in-force
- 2012-07-24 TW TW101126663A patent/TWI562962B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1770062A1 (en) * | 2004-06-22 | 2007-04-04 | Tokuyama Corporation | Cylindrical container made of carbon and method for producing silicon |
US20090311450A1 (en) * | 2004-06-23 | 2009-12-17 | Tokuyama Corporation | Tubular container made of carbon |
CN101423422A (zh) * | 2008-11-12 | 2009-05-06 | 中国科学院山西煤炭化学研究所 | 一种对炭材料进行碳化硅涂层的方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5653857B2 (ja) | 2015-01-14 |
MY169815A (en) | 2019-05-16 |
KR20140039295A (ko) | 2014-04-01 |
TW201311560A (zh) | 2013-03-16 |
EP2738141B1 (en) | 2019-05-22 |
WO2013015119A1 (ja) | 2013-01-31 |
EP2738141A4 (en) | 2015-04-01 |
JP2013023426A (ja) | 2013-02-04 |
EP2738141A1 (en) | 2014-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |