TWI562214B - Method of processing substrate - Google Patents

Method of processing substrate

Info

Publication number
TWI562214B
TWI562214B TW101117644A TW101117644A TWI562214B TW I562214 B TWI562214 B TW I562214B TW 101117644 A TW101117644 A TW 101117644A TW 101117644 A TW101117644 A TW 101117644A TW I562214 B TWI562214 B TW I562214B
Authority
TW
Taiwan
Prior art keywords
processing substrate
substrate
processing
Prior art date
Application number
TW101117644A
Other languages
Chinese (zh)
Other versions
TW201349313A (en
Inventor
Tsung Hsun Tsai
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW101117644A priority Critical patent/TWI562214B/en
Publication of TW201349313A publication Critical patent/TW201349313A/en
Application granted granted Critical
Publication of TWI562214B publication Critical patent/TWI562214B/en

Links

TW101117644A 2012-05-17 2012-05-17 Method of processing substrate TWI562214B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101117644A TWI562214B (en) 2012-05-17 2012-05-17 Method of processing substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101117644A TWI562214B (en) 2012-05-17 2012-05-17 Method of processing substrate

Publications (2)

Publication Number Publication Date
TW201349313A TW201349313A (en) 2013-12-01
TWI562214B true TWI562214B (en) 2016-12-11

Family

ID=50157512

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101117644A TWI562214B (en) 2012-05-17 2012-05-17 Method of processing substrate

Country Status (1)

Country Link
TW (1) TWI562214B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020035762A1 (en) * 2000-09-22 2002-03-28 Seiichiro Okuda Substrate processing apparatus
US20050215445A1 (en) * 2002-07-29 2005-09-29 Mohamed Boumerzoug Methods for residue removal and corrosion prevention in a post-metal etch process
US7364626B2 (en) * 2001-11-01 2008-04-29 Tokyo Electron Limited Substrate processing apparatus and substrate processing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020035762A1 (en) * 2000-09-22 2002-03-28 Seiichiro Okuda Substrate processing apparatus
US7364626B2 (en) * 2001-11-01 2008-04-29 Tokyo Electron Limited Substrate processing apparatus and substrate processing method
US20050215445A1 (en) * 2002-07-29 2005-09-29 Mohamed Boumerzoug Methods for residue removal and corrosion prevention in a post-metal etch process

Also Published As

Publication number Publication date
TW201349313A (en) 2013-12-01

Similar Documents

Publication Publication Date Title
GB2504593B (en) Method of forming silicon
EP2932540A4 (en) Methods for processing oled devices
PL2661477T5 (en) Processing of organic matter
PL2825719T3 (en) Method of well operation
EP2854160A4 (en) Substrate processing apparatus and substrate processing method
HK1224264A1 (en) Substrate processing device
HK1207203A1 (en) Substrate processing system and method
HK1210962A1 (en) Methods for treatment of atherosclerosis
SG11201505064YA (en) Substrate processing apparatus
EP2892536A4 (en) Method of treating leukemia
PL2901695T3 (en) Method for processing one or more videos of a 3d-scene
EP2800476A4 (en) Method of feeding
TWI560310B (en) Apparatus for processing substrate
EP2827363A4 (en) Etching solution composition and etching method
EP2916630A4 (en) Substrate and method for producing substrate
TWI560797B (en) Substrate processing apparatus
GB201220155D0 (en) Method of manufacture
SG11201503933RA (en) Substrate etching method
TWI560766B (en) Substrate processing method
SG2014013585A (en) Method for bonding of substrates
EP2873022B8 (en) Method of secure comparative processing
GB2486079B (en) Method of processing at least one designated item
GB201215942D0 (en) Method of treatent
TWI562214B (en) Method of processing substrate
ZA201503833B (en) Method of hemoglobin-f determination