TWI560023B - - Google Patents
Info
- Publication number
- TWI560023B TWI560023B TW101132172A TW101132172A TWI560023B TW I560023 B TWI560023 B TW I560023B TW 101132172 A TW101132172 A TW 101132172A TW 101132172 A TW101132172 A TW 101132172A TW I560023 B TWI560023 B TW I560023B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011207121A JP2013068508A (ja) | 2011-09-22 | 2011-09-22 | スケール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201313381A TW201313381A (zh) | 2013-04-01 |
| TWI560023B true TWI560023B (ja) | 2016-12-01 |
Family
ID=47914336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101132172A TW201313381A (zh) | 2011-09-22 | 2012-09-04 | 標度裝置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2013068508A (ja) |
| TW (1) | TW201313381A (ja) |
| WO (1) | WO2013042563A1 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6107390B2 (ja) * | 2013-04-30 | 2017-04-05 | 株式会社ニコン | 撮像装置 |
| KR102489221B1 (ko) * | 2020-12-21 | 2023-01-17 | 세메스 주식회사 | 위치 측정기 및 이를 포함하는 기판 처리 장치 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5270886A (en) * | 1989-08-07 | 1993-12-14 | Antek Peripherals, Inc. | Two motor servo system for a removable disk drive |
| JP2000097686A (ja) * | 1998-09-25 | 2000-04-07 | Nikon Corp | 測長装置 |
| JP2001021303A (ja) * | 1999-07-09 | 2001-01-26 | Mitsutoyo Corp | 変位測定方法及びシステム |
| JP2004058218A (ja) * | 2002-07-30 | 2004-02-26 | Ricoh Microelectronics Co Ltd | 位置決め装置、処理装置及び位置決め方法 |
| TW200732631A (en) * | 2005-10-28 | 2007-09-01 | Mitsubishi Electric Corp | Optical absolute value encoder |
| US20090188122A1 (en) * | 2008-01-29 | 2009-07-30 | Mitutoyo Corporation | Measuring apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3719409A1 (de) * | 1987-06-11 | 1988-12-22 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung |
| JP4154089B2 (ja) * | 1999-08-12 | 2008-09-24 | ソニーマニュファクチュアリングシステムズ株式会社 | スケールユニットの連結部材 |
-
2011
- 2011-09-22 JP JP2011207121A patent/JP2013068508A/ja not_active Withdrawn
-
2012
- 2012-09-04 TW TW101132172A patent/TW201313381A/zh unknown
- 2012-09-10 WO PCT/JP2012/073014 patent/WO2013042563A1/ja active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5270886A (en) * | 1989-08-07 | 1993-12-14 | Antek Peripherals, Inc. | Two motor servo system for a removable disk drive |
| JP2000097686A (ja) * | 1998-09-25 | 2000-04-07 | Nikon Corp | 測長装置 |
| JP2001021303A (ja) * | 1999-07-09 | 2001-01-26 | Mitsutoyo Corp | 変位測定方法及びシステム |
| JP2004058218A (ja) * | 2002-07-30 | 2004-02-26 | Ricoh Microelectronics Co Ltd | 位置決め装置、処理装置及び位置決め方法 |
| TW200732631A (en) * | 2005-10-28 | 2007-09-01 | Mitsubishi Electric Corp | Optical absolute value encoder |
| US20090188122A1 (en) * | 2008-01-29 | 2009-07-30 | Mitutoyo Corporation | Measuring apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013068508A (ja) | 2013-04-18 |
| TW201313381A (zh) | 2013-04-01 |
| WO2013042563A1 (ja) | 2013-03-28 |