TWI555941B - Fluid control valve - Google Patents

Description

Fluid control valve

The present invention relates to a fluid control valve for controlling a fluid.

The fluid control valve for controlling fluid has been used, for example, in a cleaning process of a semiconductor manufacturing apparatus. In the washing step, when the coating agent applied on the wafer is removed, the fluid control valve controls the supply amount of the cleaning liquid such as acid. The fluid control valve is formed in contact with the liquid surface as a corrosion resistant material so that even a highly corrosive fluid can be controlled.

Figure 7 is a cross-sectional view of the prior fluid control valve 101. Fig. 8 is a view showing a fixing structure of the fluid control valve 101 shown in Fig. 7. Figure 9 is a plan view of the fluid control valve 101 shown in Figure 7.

The previous fluid control valve 101, including the valve portion 102 and the drive portion 103, is mounted on the machine through the mounting plate 110. The valve portion 102 is formed in a valve body 120 made of resin, and the first port 121 and the second port 122 communicate with each other through the valve chamber 123. The valve chamber 123 is provided with a valve seat surface 124 around the opening that communicates with the first port 121. The diaphragm 125 is formed of a resin, and includes a valve body portion 125a that abuts or separates from the valve seat surface 124; a thin film portion 125b that is thinner to be elastically deformed; and an outer edge portion 125c that is clamped to the valve portion 102 is between the drive unit 103 and the drive unit 103.

The drive unit 103 is formed with a piston chamber 134 between the cylinder 131 and the lid 132. A piston 135 is housed in the piston chamber 134. A piston 135-series rubber sealing member 141 is assembled on the outer peripheral surface so as to be slid into the piston chamber 134 The wall divides the piston chamber 134 into a first chamber 134a and a second chamber 134b. The piston rod portion 136 protrudes from the driving portion 103 toward the valve portion 102 and is coupled to the valve body portion 125a of the diaphragm 125. A rubber sealing member 140 that is slidably attached to the cylinder 131 is assembled to the outer peripheral surface of the piston rod portion 136 so that the vaporized cleaning liquid that has passed through the thin film portion 125b does not leak from the valve portion 102 to the driving portion 103. A spring 139 is retracted in the first chamber 134a. An exhaust port 132a is communicated with the first chamber 134a, and an operation port 131a for supplying operating air is communicated with the second chamber 134b.

The fluid control valve 101 is balanced by the elastic force of the spring 139 and the pressure of the operating air supplied to the second chamber 134b, and the piston 135 is moved in the downward direction of the drawing so that the diaphragm 125 abuts or leaves the valve seat surface 124, and the control flow The washing liquid between the first port 121 and the second port 122 is passed.

This prior fluid control valve 101 is made of a resin in addition to the spring 139 or the sealing members 140, 141 in order to ensure corrosion resistance. In the washing step, the fluid control valve 101 controls, for example, a washing liquid of 160 °C. As shown in Fig. 8, the valve portion 102 and the driving portion 103 are inserted into the nut member 148 of the cylinder 131, and the fixing screws 146, 147 are screwed in the up-and-down direction, and are fixed by the creep of the parts so that the connection is not loose. Further, as shown in Figs. 8 and 9, the fixing screws 146 and 147 are blocked by the resin cover bodies 151 and 152 so as not to be exposed to corrosive atmospheres (see, for example, Patent Document 1 and Patent Document 2).

[First technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-242916

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-002442

However, in recent years, the temperature of the cleaning liquid controlled by the fluid control valve 101 is sometimes set at 200 ° C to 250 ° C. Because the washing liquid is at a high temperature, the time of the washing process can be shortened by about 1/3 to 1/2. In this case, the heat of the fluid control valve 101-based cleaning liquid is transmitted from the valve body 120 to the valve seat surface 124, the valve body portion 125a of the diaphragm 125, the piston rod portion 136, the piston 135, and the sealing members 140, 141. Further, the heat of the cleaning liquid is transmitted from the valve body 120 to the outer edge portion 125c of the diaphragm 125, the sealing member 145, the pressure cylinder 131, the lid body 132, and the sealing members 140, 141. Since the sealing members 140, 141 are made of rubber, the heat resistant temperature is low. Therefore, when the heat of the cleaning liquid is transferred and heated to around 200 ° C, there is a loss of sealing force due to deterioration such as deformation and melting. Further, the sealing member 141 is fixed to the inner wall of the cylinder 131 by heat fusion, and the piston 135 is prevented from operating. Since the piston 135 or the piston rod portion 136 and the sealing members 140 and 141 are housed in the pressure cylinder 131, it is difficult for the heat to escape to the outside, and the above problem easily occurs.

The present invention has been made in order to solve the above problems, and an object of the invention is to provide a fluid control valve capable of suppressing an increase in temperature of a driving portion and preventing deterioration of contents.

One aspect of the present invention has the following constitution.

(1) A fluid control valve comprising: a valve portion that controls a fluid; and a driving portion that imparts a driving force to the valve portion, characterized in that the valve portion The valve body includes a first port and a second port; a valve seat is disposed between the first port and the second port; and a diaphragm abuts or leaves the valve seat; the driving portion includes: a pressure cylinder a body that sandwiches the diaphragm between the valve body and the piston chamber, and a piston that is slidably loaded in the piston chamber to partition the piston chamber into a first chamber and a second chamber, and is coupled to the diaphragm; And a sealing member assembled on the sliding surface of the piston and the cylinder body, made of rubber; and a contraction of a reduced sectional area between the piston chamber of the cylinder body and a surface abutting the valve body In the cylinder body, an exhaust port that communicates with the first chamber, an operation port that communicates with the second chamber to supply operating air, and a cleaning port that communicates with the liquid chamber that does not contact the liquid chamber to supply the cleaning gas are formed. The piston forms a flow path that communicates with the first chamber that does not contact the liquid chamber.

(2) In the configuration of (1), it is preferable that the valve body and the material of the diaphragm are resin, and the material of the cylinder body is metal.

(3) In the configuration described in (1) or (2), preferably, the plurality of fixing screws are inserted into the cylinder body; and the fixing plate has an arc shape, and the lock has the female screw of the plurality of fixing screws. The fixing holes are disposed on the outer circumference of the valve body, and the plurality of fixing screws inserted into the cylinder body are locked to the female screw holes, thereby sandwiching the fixing plate and the fixing screws The valve body and the cylinder body are fixed.

(4) In the configuration of (3), preferably, the fixing plate has a pressing portion that protrudes toward the center portion, and the valve body forms a mounting groove in which the pressing portion is disposed, and the mounting groove is formed such that the pressing portion Configured Below the outer edge of the diaphragm.

(5) In the configuration described in (3) or (4), preferably, a check hole into which the tip end of the fixing screw is inserted is formed at a position corresponding to the female screw hole of the valve body.

(6) In the configuration of any one of (3) to (5), preferably, the cylinder body is sandwiched between the fixing plate and the fixing screw to form a cylindrical shape, and the valve body is formed. The portion of the fixing plate and the fixing screw is sandwiched to form a regular polygonal shape having a cylindrical shape or a regular hexagon or more.

(7) In the configuration of any one of (4) to (6), preferably, the area of the surface of the valve body system in contact with the cylinder body is larger than the projected area of the lower surface of the cylinder body. Smallly, the mounting groove is provided such that a gap is formed between the fixing plate and at least one of the cylinder body and the valve body in a state where the fixing plate contacts at least the valve body.

(8) In the configuration described in (7), it is preferable to have a heat insulating material disposed in the gap.

When the fluid control valve described above flows a fluid of, for example, 200 ° C through the valve portion, the valve body is heated by the temperature of the fluid. Although the heat is transmitted to the cylinder body, the cylinder body is provided with a retractor so that the sectional area between the piston chamber and the surface of the abutting valve body is reduced. Therefore, it is difficult to transfer the portion of the retractor having a small heat self-sectional area to the periphery of the piston chamber, and it is difficult to heat the rubber sealing member assembled on the sliding surface of the piston and the cylinder body. Again, for The cleaning gas supplied to the cleaning port is discharged from the exhaust port after flowing through the first chamber through the flow path in the piston from the non-contact liquid chamber. Therefore, even if the heat of the valve body is transmitted to the piston through the diaphragm, the cleaning air cools the piston from the inside to suppress the temperature rise of the rubber sealing member assembled on the sliding surface of the piston and the cylinder body. In this way, the fluid control valve can suppress the temperature rise of the driving portion, and the contents of the cylinder body are less likely to deteriorate.

The fluid control valve is made of a valve body and a diaphragm made of a resin. The material of the cylinder body is made of metal. Therefore, the heat resistance and strength can be improved as compared with the case where the material of the cylinder body is made of a resin.

The fluid control valve is disposed on the outer circumference of the valve body by the arc-shaped fixing plate, and the plurality of fixing screws inserted into the cylinder body are locked in the female screw hole, thereby clamping the fixed valve body and pressing with the fixing plate and the fixing screw. The cylinder body is so small that the valve body and the cylinder body are sandwiched by the fixing screws and the fixing plate. Therefore, even if the valve body is subjected to a latent change when controlling a high-temperature fluid of about 200 ° C, the fixing screw is less likely to be loose. Therefore, even if the valve body creeps, the fluid control valve has a low possibility that the holding force of the diaphragm is lowered and the fluid leaks to the outside.

The fluid control valve system fixing plate has a pressing portion that protrudes toward the center portion. The valve body forms a mounting groove in which the pressing portion is disposed. The aforementioned mounting groove is formed such that the pressing portion is disposed below the outer edge portion of the diaphragm. Therefore, when the fixed valve body and the fixed cylinder are clamped into the fixed valve body and the cylinder body, the pressing portion is pressed from the lower edge portion of the diaphragm, and the valve body is pressed against the cylinder body to crush the outer edge portion of the sealing diaphragm. Therefore, it is possible to prevent fluid from leaking to the outside.

The fluid control valve is formed by the position of the corresponding female screw hole of the valve body Insert the check hole of the fixing screw tip. Thereby, even if the cylinder body is to be rotated with respect to the valve body by vibration of the surrounding environment or the like, the rotation can be prevented. Therefore, the fluid control valve cylinder body does not rotate relative to the valve body, and the holding force of the diaphragm is not lowered.

The fluid control valve is configured such that the cylinder body is sandwiched between the fixing plate and the fixing screw to form a cylindrical shape, so that the valve body is sandwiched between the fixing plate and the fixing screw to form a cylindrical shape or a positive hexagon or more. Angled. Therefore, the wall thickness around the cylinder body and the valve body fixing screw is substantially the same. Therefore, even if the valve body is latently changed, the above-described fluid control valve does not concentrate around the fixing screw.

The area of the surface of the fluid control valve system in contact with the cylinder body is smaller than the projected area of the lower surface of the cylinder body. Further, the mounting groove of the valve body is disposed such that a gap is formed between the fixing plate and at least one of the cylinder body and the valve body in a state where at least the pressing portion contacts the valve body. The fluid control valve is disposed between the valve body and the cylinder body, and is provided with an air layer having poor heat transfer efficiency, and heat transfer from the valve body to the pressure is smaller than the projected area of the cylinder body. The cylinder body, therefore, the cylinder body is less likely to rise in temperature due to the heat of the valve body.

Further, the fluid control valve fixing plate forms a gap with at least one of the valve body and the cylinder body, and the heat insulating material is disposed in the gap, whereby it is more difficult to transfer heat from the valve body to the cylinder body.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

<Composition of fluid control valve>

Fig. 1 is a cross-sectional view showing a fluid control valve according to an embodiment of the present invention. Fig. 2 is a left side view of the fluid control valve 1 shown in Fig. 1. Fig. 3 is a right side view of the fluid control valve 1 shown in Fig. 1. Fig. 4 is a plan view of the fluid control valve 1 shown in Fig. 1. Fig. 5 is a plan view of the fixing plate 50 shown in Fig. 1. Fig. 6 is a view showing the flow of the cleaning air in the fluid control valve 1 shown in Fig. 1. Further, the wavy line in the vicinity of the fixing screw 43 shown in Figs. 1 and 6 indicates a cross section different from the other portions.

As shown in FIGS. 1 , 2 , and 3 , the fluid control valve 1 is connected to the integrated valve unit 2 and the drive unit 3 by using a pair of fixing plates 50 and 50 and a fixing screw 43 . This fixed structure is described in detail later.

The valve portion 2 shown in Fig. 1 includes a valve body 20 formed of a resin having high corrosion resistance and high heat resistance such as PTFE (polytetrafluoroethylene). The first port 21 and the second port 22 are formed in the valve body 20. The first port 21 and the second port 22 communicate with the valve chamber 23. On the inner wall of the valve chamber 23, a valve seat surface 24 (an example of a valve seat) is formed around the opening that communicates with the first port 21. Therefore, the first port 21 and the second port 22 communicate with each other through the valve seat surface 24.

The separator 25 shown in Fig. 1 is formed of a resin having high corrosion resistance and high heat resistance such as PTFE. The diaphragm 25 has a valve body portion 25a that is cylindrical and abuts or leaves the valve seat surface 24, and a thin film portion 25b that hangs outward from the outer peripheral surface of the valve body portion 25a to be thinned so as to be elastically deformable, and an outer edge portion 25c. The outer edge of the thin film portion 25b is provided on the wall surface. The diaphragm 25 is surrounded by the outer edge portion 25c between the valve portion 2 and the driving portion 3 so that the cleaning liquid does not leak to the outside.

The drive unit 3 shown in Fig. 1 is made of a heat-resistant metal such as stainless steel or aluminum, in addition to the sealing members 40, 41, and 42. The drive unit 3 moves the piston 35 in response to the pressure fluctuation of the operating air, which includes an aerodynamic configuration that imparts a driving force to the valve body portion 25a of the diaphragm 25.

Specifically, the drive unit 3 constitutes the cylinder body 48 by the cylinder 31 and the lid body 32. The cylinder 31 and the lid body 32 are screwed into the female screw hole 31e of the cylinder 31 by the fixing screw 33 inserted into the lid body 32, thereby being coupled thereto. The fixing screw 33 is covered with a rubber sealing cover 45 so as not to be exposed to corrosive ambient gases. A sealing member 40 made of rubber is disposed between the lid body 32 and the cylinder 31 to prevent air leakage.

A piston chamber 34 is formed between the lid body 32 and the pressure cylinder 31. The piston 35 is slidably loaded in the piston chamber 34 to partition the piston chamber 34 into the first chamber 34a and the second chamber 34b. The piston 35 is slidably attached to the outer peripheral surface of the inner wall of the piston chamber 34, and a rubber sealing member 41 is assembled. A piston rod portion 35c is integrally formed coaxially with the piston 35. The piston rod portion 35c protrudes from the pressure cylinder 31 toward the valve body 20, and is coupled to the valve body portion 25a of the diaphragm 25 through the support member 36. The support member 36 supports the thin film portion 25b even if the fluid pressure of the cleaning liquid acts on the thin film portion 25b, so that the thin film portion 25b is not concentrated on the base end portion connected to the valve body portion 25a. The support member 36 is held by the piston rod portion 35c through the locking pin 37.

The piston rod portion 35c is attached to the outer circumferential surface of the cylinder 31, and a sealing member 42 made of rubber is disposed. Therefore, the second chamber 34b is hermetically separated from the non-contact liquid chamber 44, and the vaporized cleaning liquid that has passed through the membrane portion 25b of the separator 25 does not leak toward the driving portion 3 side.

The spring 39 is contracted in the first chamber 34a, and the piston 35 is pressed against the valve body 20 side (lower side in the drawing) for a long time. The piston 35 inserts the guide pin 38 into the guide hole 31d of the cylinder 31 so as to be stably moved in the upper and lower directions in the drawing.

The cylinder 31 is provided with a retractor 31a. The retractor 31a has a thin wall thickness between the piston chamber 34 and the surface abutting on the valve body 20, and is disposed to reduce the sectional area. The cylinder 31 is formed with a retractor 31a such that the sectional area of the portion corresponding to the retractor 31a is reduced by 50% to 90% with respect to the sectional area of the portion corresponding to the piston chamber 34. The cylinder main body 48 is an operation port 31c and an air cleaning port 31b which are opened on the cylinder 31. The operation port 31c is formed to communicate to the second chamber 34b.

The operation port 31c is connected to a line that supplies high-pressure operation air from the operating air supply source. In addition, the air cleaning port 31b is formed so as to be in communication with the liquid chamber 44. A line for depressurizing the high-pressure operation air from the operating air supply source with a pressure regulator is connected to the air cleaning port 31b. Hereinafter, the pressure is lower than the operation air supplied to the operation port 31c, and the operation air supplied to the air cleaning port 31b is referred to as "cleaning air". As a result, the operating air supplied to the operation port 31c and the cleaning air supplied to the air cleaning port 31b are different from each other in the same fluid from the operating air supply source. When the high-pressure operation air from the operating air supply source is depressurized by the pressure regulator, the reason why the cleaning air is supplied to the cleaning port 31b is that when the high-pressure operation air from the operating air supply source is directly supplied to the air cleaning port 31b, The high pressure acts on the thin film portion 25b of the diaphragm 25 to deform the thin film portion 25b of the diaphragm 25. Further, the pressure of the cleaning air supplied to the air cleaning port 31b is lower than the pressure supplied to the operation port 31c. The reason why the pressure of the gas is also low is that the cleaning air supplied to the air cleaning port 31b can be cooled by taking heat from the piston 35 or the like.

The piston rod portion 35c is formed with a communication flow path 35a and a main cleaning flow path 35b. The communication passage 35a is opened from the side surface of the piston rod portion 35c toward the center portion. Further, the main cleaning flow path 35b is formed so as to communicate with the communication flow path 35a from the upper end surface of the piston 35. Therefore, the non-contact liquid chamber 44 is communicated to the first chamber 34a through the communication flow path 35a and the main cleaning flow path 35b. The first chamber 34a communicates with the exhaust port 32a opened in the lid body 32. The exhaust port 32a may be connected to the outside atmosphere or may be connected to a circuit for exhaust gas recovery.

Next, the fixing structure of the valve portion 2 and the driving portion 3 will be described. The fixing plate 50 shown in Fig. 5 is a metal having heat resistance such as stainless steel or aluminum, and is formed into a semicircular shape. On the inner circumferential surface of the fixing plate 50, the pressing portion 50c is provided to protrude toward the center portion. As shown in Fig. 1, the fixing plate 50 is formed by the pressing surface 50a on the pressing portion 50c so as to be orthogonal to the axial direction of the fixing plate 50, and is formed in an L-shape in a longitudinal section. The fixing plate 50 is located at the outer side of the pressing surface 50a, and the plurality of female screw holes 50b are formed in the axial direction. The female screw hole 50b is formed on the fixed plate 50 when the pair of fixing plates 50 are attached to the fluid control valve 1, so that they are equally arranged in the circumferential direction.

As shown in Fig. 4, the drive unit 3 is formed into a cylindrical shape by the cylinder main body 48 (the lid body 32 and the pressure cylinder 31). As shown in Fig. 1, the cylinder 31 is in contact with the flange shape of the lower end portion of the valve body 20 to form a disk shape (hereinafter, the lower end portion is referred to as "flange portion 31f"). As shown in FIGS. 1 and 4, the flange portion 31f is formed in the circumferential direction at an insertion hole for inserting the fixing screw 43 at an equal distance. The projected area of the pressure cylinder 31 of the flange portion 31f is larger than that of the piston chamber The projected area of the portion of 34 is also large, so that the distance between the insertion of the fixing screw 43 and the cylinder 31 is short.

Further, as shown in Fig. 1, the valve body 20 is provided on the outer side of the groove of the outer edge portion 25c of the holding diaphragm 25, and the upper end portion 20b is annularly provided. The upper end portion 20b is formed smaller than the flange portion 31f, so that the fixing screw 43 inserted into the flange portion 31f can be locked to the female screw portion 50b of the fixing plate 50. The valve body 20 is configured such that the mounting recess 20a of the pressing portion 50c that can be inserted into the fixing plate 50 is formed in a ring shape. The mounting groove 20a has a pressure receiving surface 20c which is formed so as to be orthogonal with respect to the axial direction of the valve body 20. The mounting groove 20a is formed such that the pressing portion 50c of the fixing plate 50 is disposed below the outer edge portion 25c of the diaphragm 25. Further, the mounting recess 20a is a fixing plate 50, and only the pressing surface 50a contacts the pressure receiving surface 20c so as to be formed between the upper surface of the fixing plate 50 and the flange portion 31f, between the lower surface of the fixing plate 50 and the valve body 20, and fixed. A gap is provided between the inner circumferential surface of the plate 50 and the outer circumferential surface of the upper end portion 20b. A gap between the upper surface of the fixing plate 50 and the flange portion 31f and a gap formed between the lower surface of the fixing plate 50 and the valve body 20 are disposed, respectively, a heat insulating material 55, a fixing plate 50, a valve body 20, and a pressure cylinder. The bodies 48 are difficult to transfer heat to each other.

A female screw hole 50b corresponding to the fixing plate 50 is formed in the valve body 20 to insert a check hole 26 at the tip end of the fixing screw 43. As shown in Fig. 4, when the valve body 20 is made to have a positive polygonal shape, it is preferable to arrange the check hole 26 on the line connecting the center of the valve body 20 and the apex of the shape to make the wall of the valve body 20 around the fixing screw 43. Thick and uniform. In the present embodiment, since the valve body 20 has a regular octagonal shape, the eight check holes 26 are equidistant from the circumferential direction of the valve body 20.

The cylinder body 48 and the valve body 20 abut the flange portion 31f of the cylinder body 48 against the valve body 20, and are mounted such that the pair of fixing plates 50, 50 are engaged with the mounting recess 20a. Further, the fixing screw 43 is inserted into the flange portion 31f to be locked to the female screw hole 50b of the fixing plate 50. In this manner, the pair of fixing plates 50, 50 press the pressing surface 50a against the pressure receiving surface 20c, and press the valve body 20 toward the cylinder body 48 from the lower edge portion 25c of the diaphragm 25. Thereby, the flange portion 31f and the valve body 20 are fixed while sandwiching the pair of fixing plates 50, 50, and the outer edge portion 25c of the diaphragm 25 is crushed to be sealed. At this time, each of the fixing screws 43 protrudes from the female screw hole 50b and is inserted into the check hole 26. Each of the fixing screws 43 is inserted into the check hole 26, whereby the cylinder body 48 can be prevented from rotating relative to the valve body 20.

Further, the number of the fixing screws 43 is equalized to generate a stress distribution on the cylinder 31 or the valve body 20, preferably 6 or more. Corresponding to this, the outer shape of the valve body 20 is preferably hexagonal or more. In the present embodiment, the valve body 20 is formed into a regular octagonal shape, and the cylinder body 48 and the valve body 20 are fixed by eight sets of fixing screws 43.

The operation of the fluid control valve 1 described above will be described. When the operating air is not supplied to the second chamber 34b, the fluid control valve 1 is pressed by the elastic force of the spring 39, and the valve body portion 25a of the diaphragm 25 abuts against the valve seat surface 24. In this case, the gap between the first port 21 and the second port 22 is blocked, and the washing liquid cannot flow.

When the operating air is supplied to the second chamber 34b, when the internal pressure of the second chamber 34b exceeds the elastic force of the spring 39, the piston 35 rises against the spring 39, and the valve body portion 25a of the diaphragm 25 is from the valve seat surface. 24 separation. borrow Here, the first port 21 and the second port 22 are in communication, and the cleaning liquid is outputted in accordance with the valve opening degree controlled flow rate.

Therefore, when the controlled cleaning liquid is heated to, for example, 200 ° C to 250 ° C, the valve body 20 is heated. This heat is transmitted from the valve body 20 to the pressure cylinder 31. However, the cylinder 31 is formed with the retractor 31a, and the volume between the piston chamber 34 and the flange portion 31f is reduced. Therefore, the heat transmitted from the valve body 20 to the cylinder 31 is transmitted to the piston chamber 34 side through the portion which reduces the sectional area by the retractor 31a. Therefore, the pressure cylinder 31 is such that the temperature around the piston chamber 34 does not rise to the extent of the flange portion 31f, and the sealing members 40, 41, 42 are not heated.

Further, as shown in Fig. 6, the fluid control valve 1 is supplied with the cleaning air having a lower pressure than the operation air supplied to the operation port 31c, and is supplied to the air cleaning port 31b for a long time. The cleaning air passes through the air cleaning port 31b, passes through the communication flow path 35a and the main cleaning flow path 35b that do not contact the liquid chamber 44 and the piston rod portion 35c, and flows to the first chamber 34a, and is discharged from the exhaust port 32a. The cleaning air is supplied at a normal temperature, which is lower than the temperature of the cleaning liquid. Therefore, the cleaning air flows while taking the heat of the cylinder 31, the piston rod portion 35c, the piston 35, and the liquid chamber 44, so as to cool the contents of the cylinder body 48 and suppress the temperature rise of the driving portion 3.

Further, the valve body 20 is connected to the cylinder body 48 in a state where the diameter is smaller than the flange portion 31f and the end portion 20b is in surface contact with the flange portion 31f. Further, the pair of fixing plates 50 only contact the pressing surface 50a to the pressure receiving surface 20c of the valve body 20, and fix the valve body 20 and the cylinder body in a state where the other portions are not in contact with the valve body 20 and the cylinder body 48. 48. Therefore, the heat of the valve body 20 is transmitted only from the upper end portion 20b to the flange of the cylinder body 48. In the portion 31f, the cylinder body 48 is hardly heated by the valve body 20.

Further, since the heat insulating material 55 makes it difficult for the valve body 20, the cylinder body 48, and the fixed plate 50 to transfer heat with each other, the cylinder body 48 is hardly heated by the heat of the valve body 20.

Therefore, the temperature rise of the fluid control valve 1 is suppressed by the cylinder body 48. Further, when the cleaning members 40, 41, and 42 are controlled to be cleaned or deformed by heat, the sealing members 40, 41, and 42 can maintain the sealing performance.

Here, the material of the valve body 20 is made of a resin. Therefore, when the fluid control valve 1 controls the high-temperature washing liquid of 200 ° C to 250 ° C, the valve body 20 generates a creep. The valve body 20 and the cylinder main body 48 are fixed by the fixing plates 50 and 50 and the fixing screws 43 while being sandwiched by the upper end portion 20b and the flange portion 31f. Therefore, the valve body 20 and the cylinder body 48 are sandwiched between the fixing plate 50 and the fixing screws 43 in a small amount. Therefore, even if the valve body 20 creeps, the locking force of the fixing screw 43 is less likely to be affected. As a result, the holding force of the fluid control valve 1 between the valve body 20 and the cylinder body 48 to maintain the outer edge portion 25c of the diaphragm 25 is not lowered, and the cleaning liquid flowing through the valve chamber 23 does not come from the valve body 20 and the pressure cylinder. The body 48 leaks to the outside.

Further, in addition to the sealing members 40, 41, and 42, the driving portion 3 is formed of a metal having a heat resistance temperature higher than that of the resin. Further, the fixing plates 50, 50 are also formed of a metal having a heat resistance temperature higher than that of the resin. Therefore, the cylinder 31, the lid body 32, and the fixing plates 50, 50 are not deformed even if heat is transferred from the valve body 20. Therefore, when the high-temperature washing liquid is controlled, the fixing screws 43, 33 are not loosened, and the pressure cylinder 31 and the lid body 32 are not decomposed by the elastic force of the spring 39.

As described above, the fluid control valve 1 of the present embodiment, for example, makes 200 When the washing liquid of °C to 250 °C flows to the valve portion 2, the valve body 20 is heated by the temperature of the washing liquid. The heat is transmitted from the valve body 20 to the cylinder body 48, but the cylinder body 48 is provided with a retractor 31a such that the sectional area between the piston chamber 34 and the surface abutting against the valve body 20 is reduced. Therefore, it is difficult for the heat to be broken from the portion of the retractor 31a having a small area to the periphery of the piston chamber 34, and it is difficult to heat the sealing members 41, 42 assembled on the sliding surfaces of the piston 35 and the cylinder body 48. Further, the cleaning air supplied to the air cleaning port 31b is discharged from the air outlet 44, and flows through the flow passages 35a and 35b in the piston 35 to the first chamber 34a, and is then discharged from the exhaust port 32a. Therefore, even if the heat of the valve body 20 is transmitted to the piston 35 through the diaphragm 25, the cleaning air cools the piston 35 from the inside to suppress the temperature of the sealing members 41, 42 assembled on the sliding surfaces of the piston 35 and the cylinder body 48. rise. As a result, the fluid control valve 1 suppresses the temperature rise of the drive unit 3, and the contents of the piston 35 or the cylinder members 48 of the seal members 41, 42 and the like are less deteriorated.

Here, when the cylinder body 48, the piston 35, and the like are formed of a resin such as PP (polypropylene) or PFA (perfluoroalkyl vinyl ether copolymer of tetrafluoroethylene), the fluid control valve 1 is controlled at 200 ° C. When the high-temperature washing liquid is ~250 ° C, the driving portion 3 is deformed by heat. Further, when the cylinder body 48 and the piston 35 are formed of heat-resistant PTFE, the strength is insufficient. On the other hand, in the fluid control valve 1 of the present embodiment, the material of the valve body 20 and the diaphragm 25 is made of resin, and the cylinder body 48 is made of metal. Therefore, compared with the case where the material of the cylinder body 48 is made of resin, Improve heat resistance and strength.

For example, the previous fluid control valve 101 shown in FIG. 8 is a fixing screw. The wire 146 extends from the cover 132 through the pressure cylinder 131 to be locked to the nut member 148. Further, the fixing screw 147 is inserted from the mounting plate 110 through the valve body 120 to be locked to the nut member 148. Therefore, the fluid control valve 101, the cover body 132, the pressure cylinder 131, the valve body 120, and the mounting plate 110 are all clamped by the fixing screws 146, 147, and the clamping amount by the fixing screws 146, 147 is long. When the valve body 120 or the pressure cylinder 131 or the like is creeping, the fixing screw 146, 147 is easily loosened. When the fixing screws 146, 147 are loosened, the holding force of the diaphragm 125 shown in Fig. 7 is lowered, and the cleaning liquid leaks from between the valve body 120 and the pressure cylinder 131.

On the other hand, in the fluid control valve 1 of the present embodiment, the arc-shaped fixing plates 50 and 50 are disposed on the outer circumference of the valve body 20, and the plurality of fixing screws 43 that penetrate the cylinder main body 48 are locked to the female screw holes 50b. The fixed valve body 50 and the fixing screw 43 are sandwiched between the fixed valve body 20 and the cylinder body 48. Therefore, the amount of the valve body 20 and the cylinder body 48 sandwiched between the fixing plates 50, 50 and the fixing screw 43 is small. Therefore, even if the valve body 20 is latently changed while controlling the high-temperature washing liquid of 200 ° C to 250 ° C, the fixing screw 43 is less likely to be loose. Therefore, even if the valve body 20 creeps up, the fluid control valve 1 has a low possibility that the holding force of the outer edge portion 25c of the diaphragm 25 is lowered and the fluid leaks to the outside. Further, the cylinder 31 and the lid 32 are made of metal and are not thermally deformed at a temperature of 200 ° C to 250 ° C. Therefore, when the fluid control valve 1 controls the high temperature cleaning liquid, the fixing screw 33 does not loosen.

The fluid control valve 1 has a pressing portion 50c in which the fixing plate 50 protrudes toward the center portion. The valve body 20 is formed with a mounting recess 20a in which the pressing portion 50c is disposed. The aforementioned mounting groove 20a is formed such that the pressing portion 50c is disposed on the outer edge of the diaphragm 25. Below the part 25c. Therefore, when the fixed valve body 20 and the cylinder body 48 are sandwiched by the fixing plate 50 and the fixing screw 43, the pressing portion 50c presses the valve body 20 from the lower edge portion 25c of the diaphragm 25 to the cylinder body 48, and the sealing diaphragm 25 is crushed. Since the outer edge portion 25c is provided, it is possible to prevent the cleaning liquid from leaking to the outside.

In the fluid control valve type valve body 20 of the present embodiment, a check hole 26 into which the tip end of the fixing screw 43 is inserted is formed at a position corresponding to the female screw hole 50b of the fixing plate 50. Thereby, even if the cylinder body 48 is rotated with respect to the valve body 20 due to vibration of the surrounding environment or the like, the rotation can be prevented. Therefore, the fluid control valve 1 does not rotate with respect to the valve body 20, and the holding force of the holding diaphragm 25 does not decrease.

As shown in Fig. 9, the previous fluid control valve 101 cylinder (cylinder 131 and cover 132) and the valve body 120 are formed in a cubic shape. Therefore, as shown in Fig. 8, when the fixing screws 146, 147 are locked, the wall thickness around the fixing screws 146, 147 is not uniform. As a result, when the valve body 120 or the pressure cylinder 131 creeps, stress is concentrated around the fixing screws 146, 147, and the fixing screws 146, 147 are easily loosened. When the fixing screws 146, 147 are loosened, the holding force of the diaphragm 125 becomes uneven, and there is a possibility that the cleaning liquid leaks from between the valve body 120 and the pressure cylinder 131.

On the other hand, in the fluid control valve 1 of the present embodiment, the portion (the flange portion 31f) of the cylinder main body 48 that is sandwiched between the fixing plates 50 is formed in a cylindrical shape, and the valve body 20 is sandwiched between the fixing plates 50. A positive polygonal shape of a cylindrical shape or a regular hexagon is formed. Therefore, the cylinder body 48 and the valve body 20 are approximately uniform in thickness around the fixing screw 43. Therefore, even if the valve body 20 is latently changed, the fluid control valve 1 of the present embodiment does not concentrate on the solid. The circumference of the set screw 43. As a result, even when the high-temperature cleaning liquid is controlled, the fluid control valve 1 can maintain the outer edge portion 25c of the diaphragm 25 in a circumferential direction with a uniform force, and can prevent the cleaning liquid from leaking.

The fluid control valve 1 is an area of the valve body 20 that is in contact with the cylinder body 48, and is smaller than the projected area of the lower surface of the cylinder body 48. Further, the mounting groove 20a is provided such that a gap is formed between the fixed plate 50 and at least one of the cylinder body 48 and the valve body 20 in a state where at least the pressing portion 50c is brought into contact with the valve body 20. The fluid control valve 1 is provided with an air layer having a poor heat transfer efficiency between the valve body 20 and the cylinder body 48, and the heat is smaller than the projected area of the cylinder body 48 from the valve body 20 toward The cylinder body 48 is transmitted, so that the cylinder body 48 is less likely to rise in temperature due to the heat of the valve body 20.

Further, the fluid control valve 1 fixing plate 50 is provided with a heat insulating material 55 at a gap formed between the valve body 20 and the cylinder main body 48, whereby it is more difficult to transfer heat from the valve body 20 to the cylinder main body 48.

Further, the present invention is not limited to the above embodiment, and various applications are possible.

For example, in the above-described embodiment, the material of the components of the driving unit 3 is made of metal. However, the material of the components of the driving unit 3 may be made of resin to reduce the weight.

In the above embodiment, the valve body 20 is formed into a regular octagonal shape. However, the valve body 20 may be formed into a cylindrical shape, a regular hexagonal shape, a regular heptagon shape, or a regular polygonal shape of a pentagon shape or more. In this case, when the valve body 20 is thermally deformed, the stress generated on the valve body 20 is more likely to be generated. uniform.

In the above embodiment, the air cleaning port 31b and the operation port 31c are connected to the operating air supply source, and the same fluid as the operating air is used as the cleaning air. On the other hand, a fluid different from the operating air may be used as the cleaning air and supplied to the air cleaning port 31b. In this case, as long as the pressure of the cleaning air from the operating air supply source is lower than the high-pressure operating air from the operating air supply source, the pipe connected to the air cleaning port 31b can be omitted from the decompression regulator. The piping structure of the piping connected to the fluid control valve 1 is miniaturized.

In the above embodiment, the piston rod portion 35c is integrally formed on the piston 35. However, the piston and the piston rod may be connected to each other by different members.

In the above embodiment, the two semicircular fixing plates 50 are used to connect the cylinder main body 48 and the valve main body 20. However, the fixing plate may be crescent shaped to be connected by using three or more fixing plates. The cylinder body 48 and the valve body 20.

In the above embodiment, the fluid control valve 1 is used as a chemical liquid such as a cleaning liquid, but it may be used as a control for other high temperature fluids.

In the above embodiment, a gap is provided between the upper surface of the fixing plate 50 and the cylinder main body 48, and between the lower surface of the fixing plate 50 and the valve body 20, but any one of them may be in contact. Even in this case, heat is hard to be transmitted from the valve body 20 to the cylinder body 48 by the presence of the gap. Moreover, it is preferable to arrange the heat insulating material 55 in the gap to improve the heat insulating effect.

In the above-described embodiment, the heat insulating material 55 is disposed only in the gap formed in the horizontal direction between the fixed plate 50, the valve body 20, and the cylinder main body 48. However, the inner circumferential surface of the fixed plate 50 and the valve body 20 may be provided. The heat insulating material 55 is disposed between the gaps formed in the vertical direction.

Further, the heat insulating material 55 may be provided so as to be buried in a gap formed between the fixed plate 50, the valve body 20, and the cylinder body 48.

1‧‧‧ fluid control valve

2‧‧‧ Valve Department

3‧‧‧ Drive Department

20‧‧‧ valve body

20a‧‧‧Installation groove

21‧‧‧1st

22‧‧‧2nd

24‧‧‧ valve seat surface (one example of valve seat)

25‧‧‧Separator

25c‧‧‧Outside

26‧‧‧Return hole

31a‧‧ ‧ retractor

31b‧‧‧Air cleaning port

31c‧‧‧Operation port

32a‧‧‧Exhaust port

34‧‧‧Piston room

34a‧‧‧Room 1

34b‧‧‧Room 2

35‧‧‧Piston

35a‧‧‧Main cleaning flow path (one example of flow path)

35b‧‧‧Connected flow path (one example of flow path)

41‧‧‧ Sealing members

43‧‧‧ fixing screws

48‧‧‧Cylinder body

50‧‧‧ fixed board

50b‧‧‧ female screw hole

50c‧‧‧ Pressing Department

55‧‧‧Insulation

Fig. 1 is a cross-sectional view showing a fluid control valve according to an embodiment of the present invention.

Figure 2 is a left side view of the fluid control valve shown in Figure 1.

Figure 3 is a right side view of the fluid control valve shown in Figure 1.

Figure 4 is a plan view of the fluid control valve shown in Figure 1.

Fig. 5 is a plan view of the fixing plate shown in Fig. 1.

Fig. 6 is a view showing the flow of the cleaning air in the fluid control valve shown in Fig. 1.

Figure 7 is a cross-sectional view of a prior fluid control valve.

Fig. 8 is a view showing a fixing structure of the fluid control valve shown in Fig. 7.

Figure 9 is a plan view of the fluid control valve shown in Figure 7.

1‧‧‧ fluid control valve

2‧‧‧ Valve Department

3‧‧‧ Drive Department

20‧‧‧ valve body

20a‧‧‧Installation groove

20b‧‧‧Upper

20c‧‧‧The outer edge

21‧‧‧1st

22‧‧‧2nd

23‧‧‧ valve room

24‧‧‧ valve seat surface

25‧‧‧Separator

25a‧‧‧ Body Department

25b‧‧‧The Department of Film

25c‧‧‧Outside

26‧‧‧Return hole

31‧‧‧Cylinder

31a‧‧ ‧ retractor

31b‧‧‧Air cleaning port

31c‧‧‧Operation port

31d‧‧‧ Guide hole

31e‧‧‧ female screw hole

31f‧‧‧Flange

32‧‧‧ Cover

32a‧‧‧Exhaust port

33‧‧‧ fixing screws

34‧‧‧Piston room

34a‧‧‧Room 1

34b‧‧‧Room 2

35‧‧‧Piston

35a‧‧‧Main cleaning flow path

35b‧‧‧Connected flow path

35c‧‧‧Piston rod

36‧‧‧Support members

37‧‧‧ card stop

38‧‧‧ Guide pin

39‧‧‧ Spring

40‧‧‧ Sealing members

41‧‧‧ Sealing members

42‧‧‧ Sealing members

43‧‧‧ fixing screws

44‧‧‧Do not touch the liquid chamber

45‧‧‧ Sealing cover

48‧‧‧Cylinder body

50‧‧‧ fixed board

50a‧‧‧ pressing surface

50b‧‧‧ female screw hole

50c‧‧‧ Pressing Department

55‧‧‧Insulation

Claims (10)

A fluid control valve includes: a valve portion, a control fluid; and a driving portion that imparts a driving force to the valve portion, wherein the valve portion includes: a valve body having a first port and a second port; and a valve seat; a diaphragm is provided between the first port and the second port; and the diaphragm abuts or leaves the valve seat. The driving unit includes a cylinder body, and the diaphragm is sandwiched between the valve body and the piston chamber. a piston slidably loaded in the piston chamber to partition the piston chamber into a first chamber and a second chamber, and coupled to the diaphragm; and a sealing member assembled on a sliding surface of the piston and the cylinder body a retractor having a reduced cross-sectional area between the piston chamber of the cylinder main body and a surface abutting against the valve main body, and the exhaust cylinder body is configured to communicate with the exhaust port of the first chamber, An operation port for supplying the operation air to the second chamber and a cleaning port for supplying the cleaning gas to the non-contact liquid chamber that communicates with the diaphragm, and the piston is configured to communicate with the flow path of the non-contact liquid chamber and the first chamber The fluid control valve of claim 1, wherein The valve body and the material of the diaphragm are resin, and the material of the cylinder body is metal. The fluid control valve according to claim 1, wherein: the plurality of fixing screws are inserted into the cylinder body; and the fixing plate has an arc shape, and the main screw holes of the plurality of fixing screws are uniformly disposed on the lock. Locating the fixing plate on the outer circumference of the valve body in the circumferential direction, and locking the plurality of fixing screws inserted into the cylinder body to the female screw hole, thereby clamping and fixing the valve body with the fixing plate and the fixing screw And the aforementioned cylinder body. The fluid control valve according to claim 3, wherein the fixing plate has a pressing portion that protrudes toward the center portion, and the valve body forms a mounting groove in which the pressing portion is disposed, and the mounting groove is formed such that the pressing The portion is disposed below the outer edge portion of the diaphragm. The fluid control valve according to claim 3, wherein a check hole for inserting the tip end of the fixing screw is formed at a position corresponding to the female screw hole of the valve body. The fluid control valve according to claim 3, wherein the cylinder body is sandwiched between the fixing plate and the fixing screw to form a cylindrical shape, and the valve body is clamped into the fixing plate. And a portion of the aforementioned fixing screw forms a positive polygonal shape of a cylindrical shape or a regular hexagon or more. The fluid control valve of claim 4, wherein the area of the surface of the valve body system in contact with the cylinder body is smaller than the projected area of the lower surface of the cylinder body, and the mounting recess is The groove is provided such that a gap is formed between the fixed plate and at least one of the cylinder body and the valve body in a state where at least the pressing portion contacts the valve body. The fluid control valve according to claim 7, wherein the fluid control valve has a heat insulating material disposed in the gap. The fluid control valve according to claim 4, wherein a check hole for inserting the tip end of the fixing screw is formed at a position corresponding to the female screw hole of the valve body. The fluid control valve according to claim 4, wherein the cylinder body is sandwiched between the fixing plate and the fixing screw to form a cylindrical shape, and the valve body is sandwiched by the aforementioned The fixing plate and the part of the aforementioned fixing screw form a positive polygonal shape of a cylindrical shape or a regular hexagon shape or more.