TWI555057B - 藉填充氣之有機蒸氣噴射印刷 - Google Patents

藉填充氣之有機蒸氣噴射印刷 Download PDF

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Publication number
TWI555057B
TWI555057B TW100126051A TW100126051A TWI555057B TW I555057 B TWI555057 B TW I555057B TW 100126051 A TW100126051 A TW 100126051A TW 100126051 A TW100126051 A TW 100126051A TW I555057 B TWI555057 B TW I555057B
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TW
Taiwan
Prior art keywords
gas
chamber
organic
molecular weight
nozzle
Prior art date
Application number
TW100126051A
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English (en)
Chinese (zh)
Other versions
TW201212105A (en
Inventor
保羅Ｅ 柏洛斯
莫翰 斯德哈西 哈克斯納
Original Assignee
環球展覽公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 環球展覽公司 filed Critical 環球展覽公司
Publication of TW201212105A publication Critical patent/TW201212105A/zh
Application granted granted Critical
Publication of TWI555057B publication Critical patent/TWI555057B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
TW100126051A 2010-07-22 2011-07-22 藉填充氣之有機蒸氣噴射印刷 TWI555057B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2010/042923 WO2012011913A1 (fr) 2010-07-22 2010-07-22 Impression par jet de vapeur organique

Publications (2)

Publication Number Publication Date
TW201212105A TW201212105A (en) 2012-03-16
TWI555057B true TWI555057B (zh) 2016-10-21

Family

ID=43735886

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100126051A TWI555057B (zh) 2010-07-22 2011-07-22 藉填充氣之有機蒸氣噴射印刷

Country Status (4)

Country Link
KR (1) KR101626646B1 (fr)
CN (1) CN103003464B (fr)
TW (1) TWI555057B (fr)
WO (1) WO2012011913A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103972392A (zh) * 2013-02-01 2014-08-06 中国科学院苏州纳米技术与纳米仿生研究所 有机薄膜场效应晶体管的制备方法
CN105239038B (zh) * 2014-06-09 2017-12-05 华中科技大学 一种采用图形喷嘴的有机气相成膜装置及其成膜方法
US11201288B2 (en) * 2017-05-26 2021-12-14 Universal Display Corporation Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050087131A1 (en) * 2003-10-23 2005-04-28 Max Shtein Method and apparatus for depositing material

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US3468308A (en) 1966-01-17 1969-09-23 Howard R Bierman Pressure infusion device for ambulatory patients with pressure control means
GB8909011D0 (en) 1989-04-20 1989-06-07 Friend Richard H Electroluminescent devices
US5707745A (en) 1994-12-13 1998-01-13 The Trustees Of Princeton University Multicolor organic light emitting devices
US5703436A (en) 1994-12-13 1997-12-30 The Trustees Of Princeton University Transparent contacts for organic devices
US5844363A (en) 1997-01-23 1998-12-01 The Trustees Of Princeton Univ. Vacuum deposited, non-polymeric flexible organic light emitting devices
US6013982A (en) 1996-12-23 2000-01-11 The Trustees Of Princeton University Multicolor display devices
US6091195A (en) 1997-02-03 2000-07-18 The Trustees Of Princeton University Displays having mesa pixel configuration
US5834893A (en) 1996-12-23 1998-11-10 The Trustees Of Princeton University High efficiency organic light emitting devices with light directing structures
US6303238B1 (en) 1997-12-01 2001-10-16 The Trustees Of Princeton University OLEDs doped with phosphorescent compounds
US6337102B1 (en) 1997-11-17 2002-01-08 The Trustees Of Princeton University Low pressure vapor phase deposition of organic thin films
US6087196A (en) 1998-01-30 2000-07-11 The Trustees Of Princeton University Fabrication of organic semiconductor devices using ink jet printing
US6097147A (en) 1998-09-14 2000-08-01 The Trustees Of Princeton University Structure for high efficiency electroluminescent device
US6294398B1 (en) 1999-11-23 2001-09-25 The Trustees Of Princeton University Method for patterning devices
US7071615B2 (en) 2001-08-20 2006-07-04 Universal Display Corporation Transparent electrodes
US7404862B2 (en) 2001-09-04 2008-07-29 The Trustees Of Princeton University Device and method for organic vapor jet deposition
US7431968B1 (en) 2001-09-04 2008-10-07 The Trustees Of Princeton University Process and apparatus for organic vapor jet deposition
CN1287002C (zh) * 2001-09-04 2006-11-29 普林斯顿大学理事会 喷射沉积有机物蒸汽的方法和装置
US20030230980A1 (en) 2002-06-18 2003-12-18 Forrest Stephen R Very low voltage, high efficiency phosphorescent oled in a p-i-n structure
US7279704B2 (en) 2004-05-18 2007-10-09 The University Of Southern California Complexes with tridentate ligands
EP2064364B1 (fr) * 2006-09-21 2014-02-12 Fujirebio Inc. Procédé et appareil de production de petites structures
US20110097495A1 (en) * 2009-09-03 2011-04-28 Universal Display Corporation Organic vapor jet printing with chiller plate
US20130273239A1 (en) * 2012-03-13 2013-10-17 Universal Display Corporation Nozzle design for organic vapor jet printing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050087131A1 (en) * 2003-10-23 2005-04-28 Max Shtein Method and apparatus for depositing material

Also Published As

Publication number Publication date
TW201212105A (en) 2012-03-16
KR20130091735A (ko) 2013-08-19
CN103003464B (zh) 2015-03-25
WO2012011913A1 (fr) 2012-01-26
KR101626646B1 (ko) 2016-06-01
CN103003464A (zh) 2013-03-27

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