TWI554337B - Resin coating means - Google Patents

Description

Resin coating device Field of invention

The present invention relates to a resin coating apparatus for coating a surface of a workpiece (object to be processed) such as a semiconductor wafer with a resin.

Background of the invention

In order to remove the corrugation or warpage of the workpiece used in the manufacture of the semiconductor device, a processing method in which the resin is applied to one side of the workpiece and the workpiece is ground after the resin is cured is used to flatten the surface of the workpiece (see Patent Document 1 as an example).

The apparatus for coating a resin by the above method is to supply a liquid resin on a table and to place a workpiece on a resin, and then lower the pressing pad to press the workpiece against the resin, so that the resin is uniformly applied to the entire back surface of the workpiece (refer to the patent literature). 2 as an example).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-148866

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2010-155298

Summary of invention

However, the conventional resin coating device is lowered by pressing the pressing pad When the predetermined position is set first and the workpiece is pressed against the resin, when the thickness of the workpiece is uneven or the amount of the resin is increased or decreased, the resin is not properly spread, and the resin cannot be uniformly applied to the entire back surface of the workpiece.

The present invention has been made in view of the above, and it is an object of the invention to provide a resin coating apparatus which can appropriately spread a resin irrespective of uneven thickness of a workpiece or an increase or decrease in the amount of resin.

The resin coating device of the present invention includes a pressing portion having a pressing surface capable of adsorbing and holding the workpiece, a table portion facing the pressing surface, and a resin supply portion supplying the liquid resin to the foregoing a top portion of the table portion; a moving portion for bringing the pressing surface closer to and away from the table portion; and a control portion for controlling the actor of the moving portion; the resin coating device for holding the The workpiece on the pressing surface is pressed against the liquid resin supplied to the upper surface of the table portion to expand the liquid resin on the lower surface of the workpiece; the pressing portion has a pressure sensor for the aforementioned The moving portion causes the workpiece held by the pressing surface to approach the table portion, and when the liquid resin is pressed and spread over the lower surface of the workpiece, the pressure applied to the pressing surface is detected; and the control portion is based on the pressure feeling The pressure detected by the detector controls the action of the moving portion.

According to this configuration, when the workpiece held by the pressing surface presses the liquid resin supplied to the upper surface of the table portion, the pressing amount of the pressing portion can be adjusted according to the pressure applied to the pressing portion, so that the thickness of the workpiece is uneven or The amount of resin may be increased or decreased, and the resin may be appropriately dispersed.

Further, in the resin coating device, the control unit preferably stops the movement of the workpiece held by the pressing surface close to the table portion when the pressure sensor detects a pressure equal to or higher than a predetermined pressure.

Further, in the resin coating device, the control unit preferably stops the movement of the workpiece held by the pressing surface when the pressure sensor detects that the pressure is less than or equal to the previously detected pressure. .

According to the present invention, the resin can be appropriately dispersed regardless of the uneven thickness of the workpiece or the increase or decrease in the amount of the resin.

Simple illustration

Fig. 1 is a perspective view of a resin coating apparatus of the present embodiment.

Fig. 2 is a perspective view of the wafer housing portion of the embodiment.

Fig. 3 is a schematic cross-sectional view showing the wafer housing portion of the embodiment.

The fourth (a) to (c) drawings are explanatory diagrams of the opening and closing operations of the departments and internal departments other than the present embodiment.

Fig. 5 is a schematic cross-sectional view showing the adhering device of the embodiment.

6(a) to (d) are explanatory views of the adhesion operation of the adhering device of the present embodiment.

The figure shown in Fig. 7 is a general relationship between the measured value of the pressing sensor and the elapsed time after the moving portion starts moving in the present embodiment.

The figure shown in Fig. 8 is an example of the measurement result of the pressing sensor in the present embodiment.

The figure shown in Fig. 9 is an example of a map showing the measurement result of the change in the gap between the holding plate and the table portion by the pressure sensor in the present embodiment.

Fig. 10 (a) and (b) are explanatory views of the assembly work of the adhering device of the present embodiment.

Fig. 11 is a side view showing the sheet supply portion of the embodiment.

Fig. 12 is an enlarged view of the first and second air blowing portions of the embodiment.

Fig. 13 is a partial cross-sectional view showing the roll sheet supporting portion of the embodiment.

14A(a) to (c) are explanatory views of a sheet cutting operation performed by the sheet supply unit of the embodiment.

14B(d) to (f) are explanatory views of the sheet cutting operation performed by the sheet supply unit of the embodiment.

Fig. 15 (a) and (b) are explanatory views showing a locking operation and an unlocking operation of the roll sheet by the roll sheet supporting portion in the embodiment.

The figure shown in Fig. 16 is an example of a map showing the measurement result of the change of the roll sheet by the photo sensor in the present embodiment.

The seventeenth (a) and (b) drawings are schematic views of the table portion of the present embodiment.

Fig. 18 is a schematic cross-sectional view showing the sheet conveying portion of the embodiment.

19(a) to (d) are explanatory views of the attaching operation of the sheet conveying unit to the sheet in the embodiment.

20(a) to (d) are diagrams for explaining the operation of attaching a sheet using a sheet holding portion in a modification.

21(a) and (b) are schematic cross-sectional views of the table portion of the modification.

Form for implementing the invention

This embodiment will be described in detail below with reference to the drawings. Fig. 1 is a perspective view of a resin coating apparatus of the present embodiment. Further, the resin coating device of the present embodiment is not limited to the structure shown in Fig. 1 . The resin coating device may have any structure as long as it is a liquid resin adhered to one side of the workpiece. In addition, in the first drawing, for convenience of explanation, the outer frame of the resin coating device is indicated by a broken line.

As shown in Fig. 1, the resin coating apparatus 1 is disposed in a stage before the grinding process, and is configured to adhere the sheet S to the lower surface of the workpiece W with a liquid resin. In the resin coating apparatus 1, the liquid S is supplied to the sheet S which is adsorbed and held by the table portion 602, and the workpiece W held by the pressing portion 604 is pressed against the sheet S from above the table portion 602. In the resin coating apparatus 1, the liquid W is spread over the entire surface of the apparatus by pressing the workpiece W against the sheet S.

The workpiece W is not formed into a device pattern, and is formed by cutting a cylindrical ingot with a wire saw. A liquid resin is adhered to the lower surface of the workpiece W to absorb ripples or warpage generated when the wire saw is cut. The workpiece W is carried into the resin coating device 1 in a state of being housed in the wafer 4.

Further, the workpiece W is not limited to a wafer such as germanium wafer (Si), gallium arsenide (GaAs), or tantalum carbide (SiC). For example, a ceramic, glass, sapphire (Al ₂ O ₃ ) based substrate without a base material, a ductile material of a plate metal or a resin, and various types of TTV (Total Thickness Variation) may be used. The material is processed as a workpiece. Further, the term "flatness" as used herein refers to the difference between the maximum value and the minimum value among the heights of the workpiece W measured in the thickness direction with respect to the ground surface. Further, the sheet S may be any flexible material such as polyethylene terephthalate.

The resin coating device 1 has an outer frame 2 having a rectangular parallelepiped shape extending in the X-axis direction. The rear end portion of the outer casing 2 is provided with a wafer housing portion 100 having a wafer stage 103 having two stages of upper and lower sides (see FIG. 2). The wafer stage 103 of the upper stage is placed with the loading side wafer 4 for accommodating the workpiece W before processing. The wafer stage 103 of the lower stage is placed with the carry-out side wafer 5 for accommodating the workpiece W with the sheet S attached thereto. In the outer casing 2, a first workpiece transfer unit 200 is provided in front of the wafer housing unit 100 for carrying in and carrying out the workpiece W to the wafers 4 and 5.

The space in front of the first workpiece transfer unit 200 is divided into upper and lower sides by a table 3 supported by the back surface of the columnar portion 605. A workpiece detecting portion 400 is provided on the upper surface of the table 3 for detecting the position and orientation of the workpiece W before processing. The lower surface of the table 3 is provided with a sheet cutting portion 500 for cutting the sheet S adhered to the workpiece W along the outside of the workpiece W. The first workpiece transfer unit 200 conveys the workpiece W before machining from the upper wafer 4 to the workpiece detecting portion 400, and transports the workpiece W with the sheet S from the sheet cutting portion 500 to the wafer 5 of the lower stage.

An adhesion device 600 is disposed in front of the workpiece detecting unit 400 and the sheet cutting unit 500 for adhering the protective sheet S to the workpiece W by a liquid resin. The adhesion device 600 has a table portion 602 for adsorbing and holding the sheet S, and a pressing portion 604 located above the table portion 602 for sucking and holding the workpiece W. A resin supply unit 603 is provided in the vicinity of the table portion 602 to supply the photocurable liquid resin to the sheet S on the table portion 602. The adhesion device 600 performs an adhesion operation by bringing the pressing portion 604 holding the workpiece W toward the sheet S through which the liquid resin is supplied. Further, a light-emitting portion 636 (see FIG. 5) is provided in the base 601 of the adhesion device 600 for illuminating the liquid resin through the stage portion 602.

The workpiece detecting unit 400 and the sheet cutting unit 500 are provided with a second workpiece transfer unit 300 for transferring the workpiece W between the workpiece detecting unit 400 and the attaching device 600 and between the adhering device 600 and the sheet cutting unit 500. The second workpiece transfer unit 300 transports the workpiece W before the processing from the workpiece detecting unit 400 to the pressing unit 604, and transports the workpiece W with the sheet S to the sheet cutting unit 500 from the stage unit 602. A sheet supply portion 700 is provided in front of the adhesion device 600 for supplying the sheet S to the adhesion device 600. The sheet supply unit 700 cuts the sheet S discharged from the roll sheet R by a predetermined length.

A sheet conveying portion 800 is provided on the side of the sheet supply portion 700 for conveying the sheet S discharged from the sheet supply portion 700 to the adhering device 600. The sheet conveying unit 800 holds the sheet S cut by the predetermined length in the sheet supply unit 700 and conveys it to the table unit 602. Further, the outer casing 2 is provided with a control portion 6 for integrally controlling the respective portions of the resin coating device 1. The control unit 6 is constituted by a processor or a memory or the like for executing various processes of the resin coating device 1. The memory system is composed of one or a plurality of storage media such as a ROM (Read Only Memory) or a RAM (Random Access Memory) depending on the application.

In the resin coating apparatus 1 configured as described above, the workpiece W before processing is conveyed to the adhesion device 600 by the wafer 4 on the loading side, and the sheet S is conveyed by the sheet supply unit 700 to the adhesion device 600. Next, the workpiece W and the sheet S are bonded to the bonding apparatus 600, and the workpiece W to which the sheet S is attached is conveyed to the sheet cutting portion 500. The workpiece W with the sheet is cut by the sheet cutting portion 500 along the outside of the workpiece W, and is conveyed to the cassette 5 on the carry-out side.

The respective portions constituting the resin coating device will be individually described below. First, the entire structure will be described for the wafer housing unit. Figure 2 is the embodiment A perspective view of the crystal housing. In addition, in FIG. 2, for convenience of explanation, the frame portion of the wafer housing portion is indicated by a broken line.

As shown in Fig. 2, the operation of the wafer housing unit 100 serves as a loading port and a port for the resin coating apparatus 1 of the wafer 4. The wafer housing portion 100 has a housing portion body 101 for constituting a side wall portion on the rear end side of the outer housing 2. The accommodating portion main body 101 is formed with a accommodating chamber 102 for two rows of the upper and lower sides and the right and left pairs of wafers. In the two storage chambers of the upper stage, the wafers 4 on the loading side are respectively accommodated, and the two chambers in the lower stage respectively accommodate the wafers 5 on the loading and unloading side. Each of the storage chambers 102 is connected to the inside and the outside of the resin coating apparatus 1, and the workpiece W is introduced into and out of the wafers 4 and 5 through the open end of the inside of the apparatus, and the wafers 4 and 5 are carried in and out through the open end of the apparatus.

The bottom surface of each of the storage chambers 102 is provided with a wafer stage 103 on which the wafers 4 and 5 are placed. The wafer stage 103 is attached to each of the storage chambers 102 so as to be slidable toward the outside of the apparatus by the slide plates 104 and 105 of the upper and lower stages. The accommodating portion main body 101 is provided with four sliding outer doors 106 for opening and closing the outer opening of the accommodating chambers 102, and four sliding inner portions 107 for opening and closing the inner openings of the accommodating chambers 102. Each of the external departments 106 is attached to the side of the housing portion 101 facing the outside of the resin coating device 1, and can be manually opened and closed by an operator. Each of the internal departments 107 is attached to the side surface of the accommodating portion main body 101 facing the inside of the resin coating device 1, and can be automatically opened and closed in accordance with the operation of the resin coating device 1.

When the department 106 and the inner door 107 outside the accommodating chamber 102 of the upper stage are slid upward, they are in an open state, and when they are slid downward, they are formed in a closed state. The department 106 and the inner door 107 outside the accommodating chamber 102 in the lower stage are closed when sliding upward, and are opened when sliding downward. Moreover, the housing portion 101 is provided to The outer door 106 and each inner door 107 lock the locking mechanism in the closed state. When the locking mechanism is in an open state in either of the corresponding external department 106 and the internal department 107, the other party is locked in the closed state.

The detailed structure of the wafer housing portion will be described with reference to Fig. 3 . Fig. 3 is a schematic cross-sectional view showing the wafer housing portion of the embodiment.

As shown in FIG. 3, the wafer table 103 has the slide plates 104 and 105 of the upper and lower stages, and is arranged in a state of being slidable with respect to the bottom surface of each of the storage chambers 102. The slide plate 104 of the lower stage is engaged with the slide plate 104 so as to be slidable toward the outside of the apparatus with respect to the bottom of each of the storage chambers 102. The slide plate 105 of the upper stage is engaged to form a state in which it can slide toward the outside of the apparatus with respect to the slide plate 104 of the lower stage. The wafer stage 103 is configured to be slidable between a position before the first workpiece transfer unit 200 can enter the wafer 4 and a position after leaving the inner door 107 from the front position.

More specifically, the sliding plate 104 of the lower stage is located on the bottom surface 111 of the inner door 107 side, and is attached to the bottom surface of the receiving chamber 102, the open end of the inside of the receiving chamber 102, and the sliding opening from the open end toward the outside of the device. Move between locations. Further, the upper sliding plate 105 is located at one end 112 of the inner door 107 side, and is attached to the sliding plate 104 of the lower stage, the one end portion 111 of the lower sliding plate 104, and the sliding position of the sliding portion 104 from the one end portion 111 toward the outside of the device. mobile. Therefore, the wafer table 103 can be largely pulled out toward the outside of the apparatus, thereby improving the workability of the operator to carry in and carry out the loading operation of the wafers 4 and 5.

The outer door 106 is attached in a state of being slidable in the vertical direction with respect to the outer side surface of the housing portion body 101. The external department 106 can be opened and closed by an operator's manual operation. The upper portion 106 can be positioned to close the closed position of the open end of the device for closing the receiving chamber 102, and to be retracted upward from the closed position. The open position of the open end of the outside of the device of the accommodating chamber 102 is opened. The lower portion 106 can be positioned at a closed position for closing the open end of the device outside the accommodating chamber 102, and an open position at which the open end of the device of the accommodating chamber 102 is opened downward by the closed position.

The inner door 107 is attached in a state of being slidable in the vertical direction with respect to the inner side surface of the housing portion body 101. The inner door 107 is automatically opened and closed in accordance with the operation of the resin coating device 1. The upper portion 107 can be positioned at a closed position for closing the open end of the inside of the device of the accommodating chamber 102, and an open position at which the open end of the device of the accommodating chamber 102 is opened upward by the closed position. The inner portion 107 of the lower stage can be positioned at a closed position for closing the open end of the inside of the apparatus of the containing chamber 102, and an open position for opening the inner open end of the apparatus of the containing chamber 102 from the closed position downward.

Further, the upper portion 106 and the inner portion 107 are formed with locking engagement holes 113 at the upper end portion. The lower portion 106 and the inner portion 107 are formed with locking engagement holes 113 at the lower end portion.

In the wafer storage unit 100 of the present embodiment, the inner door 107 and the outer door 106 of the upper and lower two rows are arranged in two rows, and can be opened and closed in the vertical direction. Therefore, the size of the wafer housing portion 100 in the left-right direction can be reduced, and the movement range of the factory or the like in which the plurality of processing apparatuses are arranged side by side in the lateral direction can be reduced, and the burden on the operator can be reduced.

The locking mechanism has a locking pin 114 and a door sensor 115, which are respectively disposed in the housing portion 101 corresponding to each of the external departments 106 and the internal departments 107. The locking pin 114 of the upper stage is disposed corresponding to the upper end of the department 106 and the inner door 107 outside the closed position. The upper door sensor 115 is configured as a locking pin in the upper stage Near the 114, the distance is higher than the upper end of the department 106 and the inner door 107 outside the open position. The locking pin 114 of the lower stage is disposed corresponding to the upper end of the department 106 and the inner door 107 outside the closed position. The lower door sensor 115 is disposed in the vicinity of the lock pin 114 of the lower stage, and is located below the lower end of the department 106 and the inner door 107 outside the open position.

The lock pin 114 is set so as to be incident on the outer side surface and the inner side surface of the accommodating portion main body 101 under the control of an electromagnetic coil (not shown) in response to the detection by the door sensor 115. The lock pin 114 is provided with a potential energy toward the inside of the accommodating portion body 101 by a return spring (not shown), and the electromagnetic coil is energized to protrude outside the accommodating portion body 101 against the potential energy imparted by the return spring. By engaging the lock pin 114 in the engagement hole 113 of the outer door 106 and the inner door 107, the outer door 106 and the inner door 107 are locked in the closed state.

Regarding the door sensor 115, taking the photo sensor as an example, it is detected by the external department 106 and the internal department 107 that the external department 106 and the internal department 107 are turned on. When the door sensor 115 for the outer door 106 detects that the outer door 106 is in the open state, the drive current is supplied to the lock pin 114 for the department 107 in the same receiving chamber. On the other hand, if the door sensor 115 for the internal door 107 detects that the inner door 107 is in the open state, the drive current is supplied to the lock pin 114 for the department 106 other than the storage room.

In this way, the locking mechanism detects the external department 106 by the door sensor 115 used by the external department 106, so that the department 107 corresponding to the same wafer stage 103 locks the inner door 107 with the locking pin 114. Further, the locking mechanism detects the inner door 107 by the door sensor 115 for the inner door 107, so that the department 106 corresponding to the same wafer table 103 locks the outer door 106 with the locking pin 114. therefore, When either of the outer door 106 and the inner door 107 slides away from the closed position, the other side does not slip off the closed position, thereby improving the operator's work safety.

Refer to Figure 4 to explain the opening and closing actions of the external department and the internal department. Fig. 4 is an explanatory view showing the opening and closing operations of the department and the internal department in the present embodiment. In addition, in Figure 4, the opening and closing actions of the departments and internal departments outside the upper section are explained, but the departments and internal departments outside the lower section are also the same.

As shown in Fig. 4(a), the initial state external department 106 and the internal department 107 are in the closed position. At this time, the locking pin 114 of the outer door 106 is aligned with the engaging hole 113 of the outer door 106, and the locking pin 114 of the inner door 107 is aligned with the engaging hole 113 of the inner door 107. Each of the locking pins 114 is placed in the housing portion 101 by the potential of the return spring and is located outside the corresponding engaging hole 113.

As shown in Fig. 4(b), the operator slides the outer door 106 upward (open position), and the door sensor 115 used by the outer door 106 is shielded by the outer door 106. Once the door sensor 115 is shielded by the outer door 106, the outer door 106 is detected to be in an open state, and the drive current is input to the inner door 107 by the electromagnetic coil of the lock pin 114. Accordingly, the driving inner portion 107 uses the locking pin 114 against the potential energy imparted by the return spring to cause the locking pin 114 to protrude into the engaging hole 113 of the inner door 107. Thereby, the inner door 107 can be locked in the closed state with the locking pin 114.

Next, the operator pulls the wafer table 103 outward, and places the front door open on the wafer table 103. At this time, the resin coating device 1 is divided into the inner side and the outer side via the inner door 107, so that the operator's work safety can be ensured. Then, if the operator slides the outer door 106 to the closed position, the outer door 106 exposes the door sensor 115 and stops the locking pin for the inner door 107. The electromagnetic coil of 114 inputs the drive current. In this way, the inner door 107 uses the locking pin 114 to push the potential energy given by the return spring to the side of the container body 101, so that the locking pin 114 is withdrawn from the engaging hole 113 of the inner door 107. Thereby, the department 107 in the closed state can be unlocked.

As shown in Fig. 4(c), when the first workpiece transfer unit 200 takes out the workpiece W, the inner door 107 slides upward (open position), and the door sensor 115 for the inner door 107 is shielded by the inner door 107. The inner door 107 is shielded by the door sensor 115, that is, the inner door 107 is detected to be in an open state, and the drive current is input to the outer door 106 by the electromagnetic coil of the lock pin 114. Accordingly, the drive outer door 106 uses the lock pin 114 against the potential energy imparted by the return spring to cause the lock pin 114 to protrude into the engagement hole 113 of the outer door 106. Thereby the outer door 106 can be locked in the closed state with the locking pin 114.

With this configuration, when the first workpiece transfer unit 200 takes out the workpiece W, the operator cannot open the outer door 106, so that the operator's work safety can be ensured. Next, once the first workpiece transfer unit 200 takes out all the workpieces W from the wafer 4, the inner door 107 slides to the closed position to expose the door sensor 115 for the inner door 107, and stops the locking pin 114 for the surrounding outer door 106. The electromagnetic coil inputs the drive current. In this way, the outer door 106 uses the locking pin 114 to push the potential energy given by the return spring to the side of the container body 101, so that the locking pin 114 is withdrawn from the engaging hole 113 of the outer door 106. Thereby, the department 106 outside the closed state can be unlocked.

In the present embodiment, the wafer 4 on the loading side is placed on the wafer stage 103 in the upper stage, and the wafer 5 on the carrying side is placed on the wafer stage 103 in the lower stage, but not limited thereto. Place the wafer 5 on the carry-out side in the upper stage 103. The wafer 4 on the loading side is placed on the wafer stage 103 of the lower stage. Further, the wafer 4 on the loading side and the wafer on the carry-out side may be placed on the wafer table 103 for about 5 minutes.

Further, in the present embodiment, four storage chambers for the wafers are formed in a pair of right and left and two upper and lower stages, but the number of the storage chambers can be appropriately changed. Only two storage chambers may be formed, or four or more may be formed.

Further, in the present embodiment, the external department 106 is provided in the storage room, but the external department 106 may not be provided. Moreover, the outer door 106 is not limited to a sliding door, and may also be a swing door. In addition, the external department 106 does not limit the structure of manual opening and closing, and may be a semi-automatic opening and closing structure.

Further, in the present embodiment, the slide plates 104 and 105 of the lower two stages are configured to pull out the wafer table 103. However, the structure may be pulled out by one slide plate. Further, it is also possible to adopt a structure in which only the lower stage wafer stage 103 is pulled out to the outside of the apparatus, and the upper stage wafer stage 13 is not pulled out to the outside of the apparatus. Alternatively, the wafer 4 can be pulled out toward the outside of the apparatus as the outer door 106 slides toward the open position.

Further, in the present embodiment, the lock mechanism locks the outer door 106 and the inner door 107 by the door sensor 115 and the lock pin 114, but is not limited thereto. When the locking mechanism is in the open state of either the department 106 or the internal department 107 other than the same storage chamber 102, the other one may be locked in the closed state.

Further, in the present embodiment, the accommodating portion main body 101 is provided with a locking mechanism, but a structure in which no locking mechanism is provided may be employed. Further, when the locking mechanism is provided, it is sufficient that the outer door 106 is locked in the closed state when the inner door 107 is in the open state.

Returning to Fig. 1, for the first workpiece transfer portion, the workpiece detecting portion, and the second The workpiece transfer unit and the sheet cutting unit will be described. As shown in Fig. 1, the first workpiece transfer unit 200 is supported by a pair of guide rails 201 disposed on the bottom wall portion of the outer casing 2 and parallel to the Y-axis direction, and can be moved along the Y-axis by a ball screw type moving mechanism. Move in direction. Further, the first workpiece transfer unit 200 has a support table 202 that is movable in the vertical direction, a multi-link mechanism 203 provided on the support table 202, and a workpiece holding unit 204 provided at the tip end of the multi-link mechanism 203.

The support table 202 is moved up and down by a Z-axis motor (not shown) to adjust the workpiece holding portion 204 in the height direction. The multi-link mechanism 203 is composed of three links and adjusts the workpiece holding portion 204 in the horizontal direction. The first workpiece transfer unit 200 is driven between the wafer 4 on the carry-in side and the workpiece detecting unit 400, and on the sheet cutting unit 500 and the carry-out side by controlling the driving of the ball screw type moving mechanism, the support table 202, and the multi-link mechanism 203. The workpiece W is transferred between the wafers 5.

The workpiece detecting unit 400 has a temporary table 401 for temporarily placing the workpiece W conveyed by the first workpiece transfer unit 200, and a photographing unit 402 for photographing the workpiece W on the temporary table 401. The temporary table 401 is formed into a disk shape having a diameter smaller than that of the workpiece W. The photographing unit 402 is disposed such that the L-shaped arm portion 403 is supported above the temporary table 401, and the entire workpiece W on the temporary table 401 is placed in the imaging range. The photographing unit 402 reads the shape of the workpiece W and outputs the image data of the workpiece W to the control unit 6. The control unit 6 calculates the orientation or center position of the workpiece W in the horizontal direction.

The second workpiece transfer unit 300 is supported by a pair of guide rails 301 disposed on the bottom wall portion of the outer casing 2 and parallel to the X-axis direction, and is movable in the X-axis direction by the ball screw type moving mechanism. Further, the second workpiece transfer unit 300 has a support table 302, a multi-link mechanism 303, and the same as the first workpiece transfer unit 200. The workpiece holding portion 304. The second workpiece transfer unit 300 controls the driving of the ball screw type moving mechanism, the support table 302, and the multi-link mechanism 303 in response to the detection result of the workpiece detecting unit 400, whereby the workpiece detecting unit 400 and the pressing unit 604 and the table portion 602 are The workpiece W is positioned between the sheet cutting portions 500 at an appropriate transfer position.

The sheet cutting portion 500 has a rotary table 501 attached to the lower portion of the table 3, and a cutter 502 projecting outward from the outer circumferential surface of the rotary table 501. The rotary table 501 is in a state of being rotatable about the Z axis and movable in the Z-axis direction. The cutter 502 adjusts the position of the blade in accordance with the shape of the workpiece W. The sheet cutting unit 500 adjusts the depth of cut of the sheet S by the rotation of the rotary table 501 in the Z-axis direction with respect to the workpiece W disposed on the lower sheet S, and cuts the sheet S along the workpiece W by the rotation of the rotary table 501.

The adhesion device will be described in detail with reference to Figs. 1 and 5. Fig. 5 is a schematic cross-sectional view showing the adhering device of the embodiment.

As shown in FIGS. 1 and 5, the adhesion device 600 is a base 601 having a substantially rectangular parallelepiped shape. The front half of the upper surface of the base 601 is provided with a table portion 602 for adsorbing the protective sheet S. The stage portion 602 is formed in a disk shape by a light transmissive material such as quartz. A concave portion 651 having a circular shape in a top view is formed at the center of the upper surface of the table portion 602. The stage portion 602 stretches and adsorbs the sheet S by the step of the concave portion 651 to eliminate the wrinkles of the sheet S. A resin supply portion 603 for supplying a liquid resin to the upper surface of the sheet S is provided in the vicinity of the table portion 602.

The resin supply unit 603 is attached to the state in which the adhesion device 600 is attached, and the upper surface of the base 601 is rotated between the center position of the sheet S and the retracted position retreating from the center position. Liquid resin is UV curable A photocurable resin such as a resin, for example, a resin having a viscosity of about 50 to 30,000 [MPa] can be selected. The resin supply unit 603 is connected to a resin tank (not shown) provided in the base 601, and supplies the liquid resin picked up from the resin tank to the upper surface of the sheet S.

A slightly rear half of the upper surface of the base 601 is provided with a columnar portion 605 for supporting the pressing portion 604 above the table portion 602. A moving portion 606 for bringing the pressing portion 604 toward and away from the table portion 602 is provided in front of the columnar portion 605. The moving portion 606 has a pair of guide rails 611 that are parallel to the Z-axis direction, and a Z-axis table 612 that is slidable on the pair of guide rails 611. The Z-axis table 612 is configured to be movable in the Z-axis direction by the ball screw type moving mechanism. The pressing portion 604 is supported by the support portion 613 on the front of the Z-axis table 612.

The pressing portion 604 has a base member 621 attached to a lower portion of the support portion 613. A concave portion 622 having a circular shape in a top view is formed on the lower surface of the base member 621. In the recessed portion 622 of the base member 621, a pressing plate 623 that is in a pulled-out state is housed. A holding plate 624 for holding and holding the workpiece W is attached to the lower surface of the pressing plate 623. The retaining plate 624 is formed to attract a suction port that holds the workpiece W. The suction port is connected to the gas suction portion 632 by a passage 631 provided in the adhesion device 600. The gas suction portion 632 causes suction at the suction port of the holding plate 624 by the passage 631.

A pressure sensor 633 for measuring the pressure in the passage 631 is provided in the passage 631 between the suction port of the holding plate 624 and the gas suction portion 632. The pressure sensor 633 detects that the suction force of the holding plate 624 is lowered, or the workpiece W is detached (displaced) from the suction port, or the like. The pressing portion 604 performs an operation of pressing the workpiece W held by the holding plate 624 against the sheet S through which the liquid resin L is supplied. That is, the holding surface of the holding plate 624 for holding the workpiece W is a pressing surface 634 for pressing the workpiece W against the sheet S. With this configuration, the entire surface of the lower surface of the workpiece W can be uniformly filled with the liquid resin.

Further, between the bottom surface of the concave portion 622 of the base member 621 and the upper surface of the pressing plate 623, a pressing sensor 635 as a pressure sensor is provided. The pressing sensor 635 detects the pressure change of the liquid resin acting on the pressing surface 634 by the holding plate 624 and the pressing plate 623. The pressure acting on the pressing surface 634 increases as the liquid resin L is pressed against the outer edge of the workpiece W, and starts to decrease once the outer edge of the workpiece W overflows. The adhesive device 600 utilizes this characteristic to adjust the driving amount of the moving portion 606 in accordance with the change in pressure so that the liquid resin L and the outer edge of the workpiece W are formed.

In addition, for example, the adhesion device 600 may stop the driving of the pressing portion 604 by the moving portion 606 when the pressing sensor 635 detects a pressure equal to or greater than a predetermined threshold value. Further, for example, the adhesion device 600 may stop the driving of the pressing portion 604 by the moving portion 606 when the pressing sensor 635 detects a decrease in pressure. As a result, the adhesion device 600 of the present embodiment can adjust the amount of pressing of the pressing portion 604 in response to the pressure change of the liquid resin. Therefore, when the pressing amount of the pressing portion 604 is adjusted in accordance with the interval between the pressing surface 634 and the upper surface of the table portion 602, the coating range of the liquid resin is not caused by the dimensional error of the workpiece W or the sheet S, the coating amount error of the resin, or the like. Uneven. In short, when the resin is adhered, it is considered that if there is a portion where the resin is not adhered, the workpiece W may be broken during grinding, and if the amount of the resin overflowed is excessively wasteful of the resin, the overflow portion may not be sufficiently cured by ultraviolet rays due to the oxygen barrier. Causes problems during transfer and grinding. Furthermore, the resin which is excessively overflowing is involved in the grinding, The possibility of inducing grinding anomalies. In consideration of such factors, the resin is preferably in a state of being completely covered with the workpiece W or slightly overflowing from the workpiece W, and the pressing amount of the pressing portion 604 is adjusted according to the pressure to maintain the desired adhesion state.

A light-emitting portion 636 for irradiating the table portion 602 with light such as ultraviolet light is provided in the base 601. The light-emitting portion 636 cures the liquid resin L by the light irradiated through the stage portion 602, and forms a resin film between the workpiece W and the sheet S. The irradiation of the light-emitting portion 636 is performed after the pressing operation of the pressing portion 604 is completed, that is, after the pressing portion 604 is separated from the workpiece W. Thereby, the workpiece W can be left without internal stress and the resin W can be formed on the workpiece W.

Further, the adhesion device 600 is provided with an interval detecting device for detecting the interval between the holding plate 624 and the table portion 602. The interval detecting device causes the holding plate 624 to approach the table portion 602 in a state where the air is ejected from the suction port of the holding plate 624 to the table portion 602, and measures the pressure change in the path 631, thereby detecting the interval between the holding plate 624 and the table portion 602. . The structure of the interval detecting device includes a gas supply unit 637 provided in the adhesion device 600 and connected to the suction port via the passage 631, a processor and a memory of the control unit 6, and the like.

The pressure sensor 633 is used to measure the suction pressure in the passage 631 when the workpiece W is adsorbed, and constitutes a state in which the exhaust pressure in the passage 631 can also be measured at the detection interval. Moreover, the memory is stored to present a map of pressure changes in the path 631 that change the spacing between the holding plate 624 and the table portion 602. This map is generated by the pressure sensor 633 measuring the pressure in the passage 631 while the holding plate 624 is approaching the table portion 602 in a state where the air is previously ejected from the suction port. The processor is based on the map stored in the memory. The distance between the holding plate 624 and the table portion 602 is calculated from the measurement result of the pressure sensor 633.

The adhesion device 600 detects the interval between the holding plate 624 and the table portion 602 by the interval detecting device, and performs the assembling operation of the pressing portion 604 at the time of maintenance before the operation. The adhesion device 600 uses the pressure sensor 633 as a sensor for measuring the suction pressure in the passage 631, and is also used as a back pressure sensor. Therefore, the assembly mechanism can be constructed by using the existing passage 631 and the pressure sensor 633 for holding the workpiece W in the holding plate 624. In this way, the adhesion device 600 of the present embodiment can perform the assembly work by an inexpensive and simple structure without resetting the position sensor.

Referring to Figures 6 and 7, the adhesion of the adhesion device will be described. Fig. 6 is an explanatory view showing the adhesion operation of the adhering device of the present embodiment. The figure shown in Fig. 7 is a general relationship between the measured value of the pressing sensor and the elapsed time after the moving portion starts moving in the present embodiment. In addition, in Fig. 7, the measured value of the pressing sensor is indicated by the vertical axis, and the elapsed time after the moving portion starts moving is indicated by the horizontal axis.

As shown in Fig. 6(a), in the initial state, the sheet S is adsorbed and held on the table portion 602, and the pressing portion 604 holding the workpiece W is positioned above the table portion 602. The liquid of the liquid resin L supplied from the resin supply unit 603 is formed in the center of the sheet S. From this state, the moving portion 606 causes the pressing portion 604 to move downward, and the workpiece W is pressed against the liquid of the liquid resin L.

As shown in Fig. 6(b), when the pressing portion 604 is moved downward to bring the workpiece W into contact with the liquid resin L, the workpiece W is pressed against the liquid resin, and the liquid resin L is caused to spread along the lower surface of the workpiece W. At this time, the pressing is provided by the pressing portion 604 The 635 starts measuring the pressure change of the liquid resin L acting on the pressing surface 634 via the workpiece W. As shown in Fig. 7, the load (pressure) acting on the pressing surface 634 is stably increased by the contact of the workpiece W with the liquid resin L from the initial state to the time t1 corresponding to the sixth (b) figure.

As shown in Fig. 6(c), if the pressing portion 604 is moved downward by the state shown in Fig. 6(b), the workpiece W continues to disperse the liquid resin L, and the liquid resin L is dispersed to the workpiece. W before the outer edge. As shown in Fig. 7, between the time t1 corresponding to the sixth (b) figure and the time t2 corresponding to the sixth (c) figure, the liquid resin L is diffused toward the outer edge of the workpiece W, and acts on the pressing surface 634. The load is even more increased.

As shown in Fig. 6(d), if the pressing portion 604 is moved downward by the state shown in Fig. 6(c), the workpiece W continues to disperse the liquid resin L, causing the liquid resin L to slightly overflow. The outer edge of the workpiece W. At this time, the pressing force sensor 635 provided in the pressing portion 604 detects that the pressure of the liquid resin L acting on the pressing surface 634 via the workpiece W is reduced. As shown in Fig. 7, the load acting on the pressing surface 634 reaches the outer edge of the workpiece W with the liquid resin L from the time point t2 corresponding to the sixth (c) figure to the time t3 corresponding to the sixth (d) figure. When the liquid resin L overflows the outer edge of the workpiece W, the load acting on the pressing surface 634 is reduced.

From this, it can be seen that the load acting on the pressing surface 634 starts to change when the liquid resin L reaches the outer edge of the workpiece W as a vertex. Therefore, the threshold value may be preset before the vertex, and when the pressing sensor 635 detects a load equal to or greater than the critical value, the moving portion 606 is stopped from moving the pressing portion 604. For example, the threshold value is set for the corresponding time point t2, and the pressing portion 604 is stopped at the time point t2. Thereby, the liquid resin L can be expanded to the vicinity of the outer edge of the workpiece W, so that the liquid W is almost completely filled with the liquid resin L.

Further, since the load acting on the pressing surface 634 starts to decrease with the apex as the boundary, the pressing portion 604 can be stopped when the pressing sensor 635 detects that the load is reduced with respect to the previous measured load. For example, the pressing portion 604 stops moving at a point t3 at which the load starts to decrease. Therefore, the liquid resin L can be expanded to a degree that slightly overflows the outer edge of the workpiece W, so that the entire surface of the lower surface of the workpiece W is filled with the liquid resin L. Further, the shape of the graph for displaying the pressure change is changed depending on the coating amount or viscosity of the resin and the resin scattering area.

An example of the measurement result of the pressing sensor will be specifically described with reference to Fig. 8. The figure shown in Fig. 8 is an example of the measurement result of the pressing sensor in the present embodiment. In addition, in Fig. 8, the measured value of the pressing sensor is indicated by the vertical axis, and the elapsed time after the moving portion starts moving is indicated by the horizontal axis.

Adhesive device 600 performs adhesion operation, and the total amount of the coating liquid on the wafer of about 2 to 4 Å reaches a film thickness of about 100 to 1000 [μm] (viscosity about 1500 [CPs]) for pressing sensing. When measuring the load acting on the pressing surface 634, the 635 measures the measurement result as shown in Fig. 8. In this case, the moving speed of the pressing unit 604 by the movement unit 606 is set to 0.1 [mm/sec], and the measurement frequency of the pressing sensor 635 is set to be 100 [msec] once. From 0 [sec] to 25 [sec], the load is steadily increased from 0 [kN] to 0.1 [kN]. Between 25 [sec] and 28 [sec], the load is increased from 0.1 [kN] to 1.3 [kN]. After 28 [sec], the load is reduced by 1.3 [kN].

From the measurement results, it was found that when the load 1.3 [kN] was measured, the liquid resin L reached the outer edge of the workpiece W. Further, when the load 1.2 [kN] is measured, when the load is 1.3 [kN], the moving position of the pressing portion 604 is slightly different. Therefore, the mobile department The stop condition of 606 can be set to 1.2 [kN] to stop the driving of the moving portion 606 when the liquid resin L reaches the outer edge of the workpiece W.

The assembly work of the adhesion device will be described with reference to Figs. 9 and 10. The figure shown in Fig. 9 is an example of a map showing the measurement result of the change in the gap between the holding plate and the table portion by the pressure sensor in the present embodiment. Fig. 10 is an explanatory view showing the assembly work of the adhering device of the present embodiment. In the ninth figure, the measured value of the pressure sensor is indicated by the vertical axis, and the gap between the holding portion and the land is indicated by the horizontal axis.

Before the assembly work, the air in the suction port is ejected, and the pressure in the passage 631 is measured while changing the interval between the holding plate 624 and the table portion 602, and then the map shown in Fig. 9 is generated. Further, the air supply flow rate of the gas supply unit 637 is set to 25 [L/min], and the gap between the holding plate 624 and the table portion 602 is narrowed at intervals of 10 [μm], and then applied by the pressure sensor 633. measuring. As shown in the map, the measured value of the pressure sensor 633 increases as the holding plate 624 approaches the table portion 602. Referring to the drawing, the bonding apparatus 600 sets the holding position of the holding plate 624 from the desired height of the table portion 602 as a reference position, and performs an assembly operation.

Specifically, as shown in Fig. 10(a), the holding plate 624 is positioned at a position completely away from the table portion 602, and air is ejected from the suction port by the gas supply portion 637. At this time, since the gap between the holding plate 624 and the table portion 602 is large, it is possible to ensure that the air blown by the suction port escapes the road and keep the inside of the passage 631 low. When the moving portion 606 is driven in this state and the holding plate 624 approaches the table portion 602, the gap between the holding plate 624 and the table portion 602 is gradually reduced. Therefore, the air escaped by the suction port is reduced, and the pressure in the passage 631 starts to increase.

As shown in Fig. 10(b), the pressure corresponding to the desired gap between the holding plate 624 and the table portion 602 on the map is detected by the pressure sensor 633, and the moving portion 606 stops driving. At this time, the height position of the holding plate 624 from the table portion 602 is set as the reference position in the pressing direction. For example, when the desired gap between the holding plate 624 and the table portion 602 is 10 [μm], the driving of the moving portion 606 is stopped when the pressure sensor 633 detects 96 [kPa], and the pressing portion 604 is pressed at this time. The height of the distance table portion 602 is set as a reference position (refer to Fig. 9).

Further, in the present embodiment, the holding plate 624 may be formed of a porous material or the like. That is, the suction port formed in the holding plate 624 may be formed by pores provided in the porous material.

Further, in the present embodiment, the pressing sensor 635 is provided between the pressing plate 623 and the base member 621, but is not limited thereto. The pressing sensor 635 can be provided at any position as long as it can measure the pressure of the liquid resin acting on the pressing surface 634.

Further, in the present embodiment, the pressure from the liquid resin which the pressing surface 634 receives is measured by the pressing sensor 635, but it is not limited thereto. The pressing sensor 635 may also be provided on the pressing surface 634 of the holding plate 624 to measure the pressure from the liquid resin which the workpiece W is subjected to.

Further, in the present embodiment, the liquid resin is set as a photocurable resin, but it is not limited thereto. The liquid resin may be a resin that can adhere the workpiece W to the sheet S. For example, a thermosetting resin can also be used. Further, the liquid resin is not limited to a completely liquid state, and further contains a gelatinous solid.

Further, in the present embodiment, the resin supply portion 603 is attached so as to be rotatable to the base 601, but it is not limited thereto. The resin supply unit 603 is only required Any liquid can be supplied to the sheet S, and any configuration is acceptable.

Further, in the present embodiment, the pressing member 623 and the holding plate 624 are provided on the base member 621 to constitute the pressing portion 604, but the present invention is not limited thereto. The pressing portion 604 only needs to have a pressing surface 634 for sucking and holding the workpiece W.

Further, in the present embodiment, the moving portion 606 is provided with a ball screw type moving mechanism, but it is not limited thereto. The moving portion 606 may be configured to allow the pressing surface 634 to move away from and approach the table portion 602.

Moreover, in the present embodiment, the suction pressure and the exhaust pressure in the passage 631 are measured by a single pressure sensor 633, but not limited thereto, and the pressure sensor for inhaling may be provided in the adhesion device 600 and Pressure sensor for exhaust. Moreover, the pressure sensor 633 can also be used with a sensor that can measure changes in fluid characteristics, such as a flow sensor.

Further, in the present embodiment, the relationship between the gap between the holding plate 624 and the table portion 602 and the pressure in the passage 631 is stored in the memory in a map form, but it is not limited thereto. The memory can be stored to present data relating to the relationship between the gap between the plate 624 and the table 602 and the pressure in the passage 631. For example, the table 624 can also be stored in a table form. The relationship between the gap and the pressure within the passage 631.

Further, in the present embodiment, air is blown to the table portion 602 by the gas supply portion 637 during the assembly work, but the gas supply portion 637 can blow any gas that can be blown toward the table portion 602.

The sheet supply unit will be described in detail with reference to Fig. 11 . Fig. 11 is a side view showing the sheet supply portion of the embodiment. Fig. 12 is an enlarged view of the first and second air blowing portions of the embodiment.

As shown in Fig. 11, the sheet supply unit 700 pulls the sheet S from the roll sheet R and cuts it to a predetermined length. The roll sheet R is formed by winding a sheet S around a drum 701. As the sheet S, for example, a film of polyethylene terephthalate having a thickness of about 50 [μm] is used. The sheet S is not limited to the above film, and may be appropriately changed depending on various uses. As for the drum 701, for example, a resin tube having a diameter of 3 inches formed of polyethylene is used. The drum 701 is not limited to the above-mentioned resin tube, and may be a resin tube formed of polypropylene, ABS resin or the like, or a paper tube.

The sheet supply unit 700 includes a roll sheet support portion 702 for mounting the roll sheet R, and a sheet pull-out portion 703 for pulling the sheet S from the roll sheet R. Between the roll sheet supporting portion 702 and the sheet drawing portion 703, the first and second passive rollers 704, 705 and the nip portion 706 form a transport path of the sheet S. The roll sheet support portion 702 is inserted into the roll 701 that passes through the roll sheet R, and supports the roll sheet R so that the stretch direction of the roll 701 can be rotated as a rotation axis. The roll sheet supporting portion 702 is configured to be able to fix the drum 701 from the inside, and is rotatable integrally with the roll sheet R.

Further, when the roll sheet supporting portion 702 is rotated in the forward rotation direction toward the conveying direction, the tension applying portion 707 applies the braking force (the rotational force in the reverse rotation direction). The tension applying unit 707 applies a braking force to the roll sheet supporting portion 702 to cause a tension action on the sheet S pulled by the roll sheet R. Even when the sheet S is pulled out with a certain force, the torque applied to the roll sheet supporting portion 702 will vary depending on the diameter of the roll sheet S. Therefore, the tension applying portion 707 adjusts the braking force in accordance with the diameter change of the roll sheet R in order to generate an appropriate tension of the sheet S.

The first and second passive rollers 704, 705 are disposed downstream of the transport path upper roll support portion 702. The first and second passive rollers 704, 705 are respectively in rotational contact with the surface of the sheet S pulled by the roll sheet R. In the transport path, first and second air blowing portions 708 and 709 are disposed between the first and second passive rollers 704 and 705. The first air blowing portion 708 faces the surface of the sheet S, and removes foreign matter on the surface side of the sheet S by blowing air. The second air blowing unit 709 faces the back surface of the sheet S, and removes foreign matter on the back side of the sheet S by blowing air.

As shown in Fig. 12, the first and second air blowing portions 708 and 709 have a block body 723 in which a blowing side passage 721 and a suction side passage 722 are formed. The vicinity of the blowing of the passage 721 is sharply narrowed, and the flow rate of the gas blown toward the sheet S is increased. The gap in the vicinity of the blowing of the passage 721 is preferably 50 to 500 [μm], and more preferably 50 to 200 [μm]. In the present embodiment, the gap in the vicinity of the blowing of the passage 721 is set to 100 [μm].

The block 723 is arranged close to the sheet S. The gap between the block 723 and the sheet S in the unheated state is preferably 0 to 100 [μm], and more preferably 0 to 50 [μm]. In the present embodiment, the gap between the block 723 and the sheet S in the non-supply state is set to 0 [μm]. Even if the gap between the block 723 and the sheet S is set to 0 [μm], a certain gap can be formed by the tension of the sheet S and the air volume of the air blow after the air blowing, and foreign matter of several tens [μm] can be removed.

The first and second air blowing portions 708 and 709 send air to the passage 721 on the blowing side, and the air is sucked by the passage 722 on the suction side, thereby generating an air flow as indicated by an arrow A1. The air blown by the passage 721 on the blowing side sweeps the foreign matter in the gap between the block 723 and the sheet S, and is discharged through the passage 722 on the suction side. In this way, the first and second air blowing portions 708 and 709 can be washed. The sheet S has two sides.

Returning to Fig. 11, a downstream portion of the second passive roller 705 is provided with a grip portion 706. The clamping portion 706 functions by sandwiching the sheet S from above and below by the upper flat plate 714 and the lower flat plate 715. The upper flat plate 714 is formed of a plate having a horizontal surface and is mounted on the rod 717 of the driving portion 716 positioned above the conveying path. The lower side plate 715 is formed of a plate having a horizontal surface and is mounted on the rod body 719 of the driving portion 718 located below the conveying path. The upper flat plate 714 and the lower flat plate 715 are vertically moved by the rods 717 and 719, respectively.

The upper flat plate 714 and the lower flat plate 715 are moved to an appropriate height in response to the pulling and cutting of the sheet S. Specifically, the upper flat plate 714 and the lower flat plate 715 are held by the sheet drawing portion 703 at the upper end position 731 of the sheet S and the lower portion 732 of the sheet S by the cutting portion 711 which will be described later. Direction movement (refer to Figure 14). The operation of the upper flat plate 714 and the lower flat plate 715 is described in detail later.

A cutting portion 711 is disposed downstream of the clamping portion 706. The cutting portion 711 has a cutter 735 for cutting the sheet S in the width direction orthogonal to the conveying direction, and a holding portion 736 for sucking and holding the back surface of the sheet S. The cutter 735 and the holding portion 736 are disposed to sandwich the conveying path of the sheet S and are opposed to each other in the vertical direction. The cutter 735 is located above the sheet S, and is configured to be movable from one end side to the other end side in the width direction of the sheet S by the cutter moving portion 746. The holding portion 736 is located below the sheet S and has an elongated shape extending in the width direction of the sheet S.

The holding portion 736 has a holding surface 737 for adsorbing and holding the back surface of the sheet S. The retaining surface 737 is formed horizontally and is moved to the lower side of the lower position. The upper surface of the plate 715 is slightly flush. On the holding surface 737, a cutter groove 738 for sliding the blade of the cutter 502 is formed along the extending direction of the holding portion 736. Further, the holding surface 737 is sandwiched by both sides of the cutter groove 738, and a plurality of suction ports 739 are formed along the cutter groove 738. The plurality of suction ports 739 are connected to a suction source and a supply source of air by means of a passage (not shown).

When the cutting portion 711 cuts the sheet, the pulled sheet S is attracted to the holding surface 737 by suction of the plurality of suction ports 739, and the cutting edge of the cutter 735 is driven by the cutter moving portion 746. The groove 738 is slidably moved in the cutter groove 738 to cut the sheet S. Thereby, the sheet S can be cut in a state where the sheet S is held on the holding surface 737. Further, when the cut portion 711 pulls out the sheet, the air is blown by the plurality of suction ports 739 to prevent the sheet S from coming into contact with the holding surface 737. By the blowing of the air, it is possible to prevent the sheet S from rubbing against the holding surface 737 when the sheet is pulled out.

The sheet drawing portion 703 has a grip portion 741 for gripping the leading end of the sheet S, and a moving portion 742 for moving the grip portion 741 in a direction inclined with respect to the driving direction of the rods 717, 719. The moving portion 742 has a support table 743 which is inclined with respect to the horizontal plane P, a guide rail 744 which is parallel to the X-axis direction on the support table 743, and a slider 745 which is provided to be slidable on the guide rail 744. The slider 745 is configured to be movable in the oblique direction by a ball screw type moving mechanism. A bottom plate 751 is mounted on the upper surface of the slider 745.

The grip portion 741 has a fixing plate 752 that is erected on the bottom plate 751. The fixing plate 752 is erected from the rear end of the bottom plate 751 and bent toward the front side, and the front end portion 753 is bent downward again. Moreover, the grip portion 741 has a movable plate 754 that can approach and exit the front end portion 753 of the fixing plate 752. The movable plate 754 is bent into a side view It has an inverted L shape and has a flat plate portion 755 opposite to the front end portion 753 of the fixing plate 752. The movable plate 754 is attached to the rod 757 of the driving portion 756 provided on the rear end side of the bottom plate 751.

The grip portion 741 is such that the flat plate portion 755 of the movable plate 754 approaches the front end portion 753 of the fixed plate 752 to grip the front end of the sheet S, and the flat plate portion 755 of the movable plate 754 is separated from the front end portion 753 of the fixed plate 752 to release the front end of the sheet S. Further, the grip portion 741 is moved to the front position 761 in the obliquely upward direction, and the leading end of the sheet S is gripped, and the tip end of the sheet S is moved to the rearward position 762 in the obliquely downward direction, and the sheet S is pulled by the roll sheet R (see 14 picture).

At this time, the grip portion 741 grips the height of the sheet S, and corresponds to the upper portion position 731 above the cutting portion 711 at the front position 761, and cuts the lower portion S of the sheet S with the cutting portion 711 at the rear position 762. Consistent. In other words, when the grip portion 741 is at the front position 761, the sheet S is gripped without being hit by the holding portion 736, and is moved from the front position 761 to the rear position 762 so that the rear surface of the sheet S and the cutting portion 711 are held. The sheet S is pulled down in the state of the same plane.

Further, a diameter detecting portion 712 for detecting the diameter of the roll sheet R is disposed in the vicinity of the roll sheet supporting portion 702. The diameter detecting unit 712 includes, for example, a reflective photosensor 767 having a light receiving portion 766 around the light emitting portion 765, and a memory of the control portion 6. The photo sensor 767 is for detecting a change in the amount of light received as the diameter of the roll sheet R changes. A map for expressing the relationship between the amount of light received and the diameter of the roll sheet R is stored in the memory. This map is generated by previously changing the diameter of the roll sheet R while measuring the amount of light received by the light sensor 767.

The smaller the diameter of the roll sheet R, the larger the distance between the photo sensor 767 and the outer peripheral surface of the roll sheet R, and thus the amount of light received by the photo sensor 767 is lowered. Further, when all of the sheets are pulled out by the roll sheet R, since the reflectance of the drum 701 is different from the reflectance of the sheet S, the amount of light received by the photo sensor 767 is largely changed. The diameter detecting unit 712 uses these characteristics to detect the diameter of the roll sheet R and the presence or absence of the sheet S based on the map stored in the memory and the measurement result of the photo sensor 767.

The tension applying unit 707 is notified of the diameter of the roll sheet R detected by the diameter detecting unit 712. The tension applying portion 707 adjusts the braking force in accordance with the diameter of the roll sheet R so that the sheet S generates an appropriate tension. Further, the diameter detecting unit 712 notifies the monitoring unit 768 of the result of detecting the presence or absence of the sheet S. When the monitoring unit 768 detects that the sheet S is not pulled out from the roll sheet R, an alarm is issued.

The detailed configuration of the roll sheet support portion will be described with reference to Fig. 13. Fig. 13 is a partial cross-sectional view showing the roll sheet supporting portion of the embodiment.

As shown in Fig. 13, the roll sheet supporting portion 702 has a rod-shaped shaft portion 772 which is protruded from the plate surface of the disk-shaped stopper plate 771. The roll sheet R is supported by the roll sheet support portion 702, and the shaft portion 772 is inserted into the through roller 701 and blocked by the stopper plate 771. The shaft portion 772 is formed in a hollow shape, and is internally provided with a driving rod 773 that can advance and retreat in the axial direction. Further, the shaft portion 772 is provided with a pair of claw portions 774 for locking and unlocking the roll sheet R by the inside of the drum 701 by the advancement and retreat of the drive rod 773.

A receiving space 776 is formed in the shaft portion 772 for accommodating the driving lever 773 and allowing it to advance and retreat. The accommodating space 776 is connected to the long hole 781 by one of the insertion holes 777 formed in the front end portion of the shaft portion 772 and one of the outer peripheral portions of the shaft portion 772. unit. The shaft portion 772 can protrude the front end portion 778 of the driving rod 773 by the insertion hole 777 at the front end, and the pair of claw portions 774 can directly contact the inner surface of the drum 701 by the one of the outer peripheral surfaces facing the long hole 781. Further, a supply space 783 for connecting the air on the proximal end side of the accommodating space 776 is formed in the shaft portion 772.

The supply space 783 is sealed by accommodating the drive lever 773 in the accommodating space 776. The drive lever 773 moves air to the supply space 783 and moves toward the exit direction in which the distal end portion 778 protrudes outward from the shaft portion 772. Further, the drive lever 773 stops the supply of air to the supply space 783, and can be moved in the entering direction for accommodating the distal end portion 778 in the insertion hole 777 by the operator's manual operation. At this time, the entry position of the drive lever 773 is between the accommodating space 776 and the supply space 783, and is limited to directly contact the annular block 775 protruding from the inner peripheral surface of the shaft portion 772.

The drive rod 773 has a small diameter front end portion 778, a front portion 785 having a diameter larger than the front end portion 778, an intermediate portion 786, and a rear portion 787. When the drive lever 773 moves in the withdrawal direction, the distal end portion 778 protrudes from the distal end surface of the shaft portion 772 via the insertion hole 777. The protruding portion of the front end portion 778 serves as an unlocking operation portion for releasing the locking of the roll sheet R. The front portion 785 and the rear portion 787 have outer diameters that are approximately the same size as the inner diameters of the cylindrical support surfaces 788 and 789 formed in the shaft portion 772, and are supported to extend in the advancing and retracting direction by the support surfaces 788 and 789. The state of the slide.

The intermediate portion 786 is disposed between the pair of claw portions 774 that are attached to the shaft portion 772 in an openable and closable state. The intermediate portion 786 is formed on the side of the front portion 785, and has a tapered surface 791 whose diameter increases toward the entering direction of the driving rod 773. As the tapered surface 791 moves forward and backward together with the drive lever 773, the front end side of the pair of claw portions 774 is sandwiched and the interval between the tapered surface 791 and the inner surface of the drum 701 is changed.

The pair of claw portions 774 are disposed in the accommodating space 776 corresponding to the pair of long holes 781, and are supported in a state in which the shaft portion 772 is rocked after the pair of long holes 781. The pair of claw portions 774 have an arm portion 792 and a roller portion 793. The arm portion 792 is extended forward by a base end portion supported by the rocking fulcrum 796 in a swingable state, and the roller portion 793 is attached to the arm portion 792. Before the end. The arm portion 792 has a width in which the front end portion is narrowed toward the proximal end portion, and has a locking portion 794 extending from the proximal end portion toward the radially inner side of the shaft portion 772. The roller portion 793 is in a rotational contact with the tapered surface 791 of the intermediate portion 786.

When the drive lever 773 is moved in the retracting direction, the roller portion 793 is pushed outward through the tapered surface 791, and the arm portion 792 is swung by the long hole 781 toward the outer side of the drum 701 side. Therefore, the pair of claw portions 774 directly contact the inner surface of the drum 701 to lock the roll sheet R. Further, when the driving lever 773 moves in the entering direction, the rear end portion 795 of the intermediate portion 786 presses the locking portion 794 in the entering direction, and the arm portion 792 swings toward the inner side of the driving lever 773 side. Therefore, the pair of claw portions 774 are separated from the inner surface of the drum 701 to release the locking of the roll sheet R. Further, the locking and unlocking of the roll sheet R by the roll sheet supporting portion 702 will be described later in detail.

The sheet cutting operation by the sheet supply unit will be described with reference to Figs. 14A and 14B. 14A and 14B are explanatory views of a sheet cutting operation performed by the sheet supply unit of the embodiment.

As shown in Fig. 14A(a), the upper flat plate 714 and the lower flat plate 715 hold the sheet S at the lower stage position 732. At this time, the leading end of the sheet S is located on the holding surface 737 of the cutting portion 711 (holding portion 736). Moreover, the grip portion 741 stands by at the rear position 762 in a state where the front end portion 753 of the fixed plate 752 is separated from the flat plate portion 755 of the movable plate 754. At this time, the height of the grip portion 741 can be in the lower section. The position 732 holds the height of the front end of the sheet S in the same direction.

Next, as shown in Fig. 14A(b), the upper flat plate 714 and the lower flat plate 715 are moved to the upper position 731 in the direction of the arrow A2 in a state in which the sheet S is held. Thereby, the front end of the sheet S is moved over the holding surface 737 of the cutting portion 711. Next, as shown in Fig. 14A(c), the grip portion 741 is moved obliquely upward (in the direction of the arrow A3) toward the front position 761. After the grip portion 741 is positioned at the front position 761, the front end of the sheet S is positioned between the front end portion 753 of the fixing plate 752 and the flat plate portion 755 of the movable plate 754.

Next, as shown in Fig. 14B(d), the flat plate portion 755 of the movable plate 754 approaches the front end portion 753 of the fixed plate 752 (in the direction of the arrow A4), and the front end of the sheet S is held by the fixed plate 752 and the movable plate 754. As a result, at the front position 761, the height of the grip portion 741 matches the height of the grip sheet S at the upper position 731.

Next, as shown in Fig. 14B(e), the lower flat plate 715 is moved to the lower position 732 in the direction of the arrow A5 to release the grip of the sheet S, while the grip portion 741 is moved obliquely downward (in the direction of the arrow A6) to the rear position. The 762 moves to pull out the sheet S. At this time, the grip portion 741 changes the height of the position at which the sheet S is held, and moves from the upper position 731 to the lower position 732. Further, when the sheet S is pulled out, air is blown to the sheet S by the plurality of suction ports 739 formed on the holding surface 737. By the action of the blowing air, it is possible to prevent the sheet S from rubbing against the holding surface 737 when the sheet S is pulled out.

Next, as shown in Fig. 14B(f), after the pulling operation of the sheet S is completed, the sheet S is adsorbed to the holding surface 737 by the plurality of suction ports 739, and is held by the sheet conveying portion 800 from above. A sheet S between the 741 and the holding surface 737. Then, in a state where the sheet S is held by the sheet conveying portion 800, the cutter The 735 slides along the slit 738 formed in the holding surface 737, and cuts the sheet S in the width direction orthogonal to the conveying direction. Since the plurality of suction ports 739 are formed on both sides with the cutter groove 738 interposed therebetween, the sheet S is cut along the cutter groove 738 while the plurality of suction ports 739 hold the sheet S, and the cutting operation can be stably performed.

When the sheet S is cut, the holding of the sheet S by the grip portion 741 is released, and the sheet S is conveyed to the table portion 602 by the sheet conveying portion 800. At this time, the upper flat plate 714 moves to the lower stage position 732 to sandwich the sheet S, and returns to the state shown in Fig. 14A(a). As described above, in the present embodiment, the grip portion 741 is moved obliquely rearward from the front position 761 toward the rear position 762, whereby the height of the sheet S is changed and the sheet S is pulled out. Therefore, it is only necessary to move the grip portion 741 in the uniaxial direction in the oblique direction. Therefore, the sheet S can be pulled out by an inexpensive and simple structure as compared with the structure in which the grip portion 741 moves in the biaxial direction in the front-rear direction and the up-and-down direction. .

Referring to Fig. 15, the locking operation and the unlocking operation of the roll sheet by the roll sheet supporting portion will be described. Fig. 15 is an explanatory view showing a locking operation and an unlocking operation of the roll sheet by the roll sheet supporting portion in the embodiment.

As shown in Fig. 15(a), when the roll sheet R is unlocked, the drive lever 773 is pushed into the rearmost side of the housing space 776 of the shaft portion 772, and directly contacts the annular block 775 provided on the inner peripheral surface of the shaft portion 772. . The pair of claw portions 774 are in direct contact with the locking portion 794 by the end surface 795 of the intermediate portion 786, and the front end side of the arm portion 792 is pressed against the outer peripheral surface of the driving lever 773 as indicated by an arrow A7. At this time, the roller portion 793 provided at the front end portion of the arm portion 792 is rotated to contact the small diameter side of the tapered surface 791.

When the roll sheet R is unlocked, if the air is supplied to the supply space 783, the drive lever 773 starts moving in the exit direction. If the drive lever 773 starts moving in the exit direction, the roller portion 793 is on the tapered surface 791 by the small diameter side. Move to the large diameter side. Therefore, the arm portion 792 is rocked toward the drum 701 centering on the swing fulcrum 796 as indicated by an arrow A8. Then, as shown in Fig. 15(b), when the drive lever 773 is fully pushed out in the withdrawal direction, the front end side of the arm portion 792 is bitten between the inner surface of the drum 701 and the tapered surface 791 by the long hole 781.

With this configuration, the arm portion 792 can be pressed against the inner surface of the drum 701, and the roll sheet R can be locked by the inner side of the drum 701 by the arm portion 792. At this time, the arm portion 792 directly contacts the inner surface of the drum 701 in the oblique direction toward the stopper plate 771 as indicated by the rocking direction of the arrow A8. Therefore, in a state where the roll sheet R hits the stopper plate 771 and is thus stopped, it is locked by the pair of claw portions 774. In the state in which the roll sheet R is locked, the front end portion 778 of the drive lever 773 as the unlocking operation portion protrudes outward through the insertion hole 777 of the shaft portion 772.

In the locked state, after the supply of air to the supply space 783 is stopped, when the operator presses the front end portion 778 of the drive lever 773 protruding from the shaft portion 772, the drive lever 773 starts moving in the entering direction. When the driving lever 773 starts to move in the entering direction, the front end side of the arm portion 792 is separated from the state between the inner surface of the roller 701 of the roll sheet R and the tapered surface 791. Then, as shown in Fig. 15(a), if the drive lever 773 is fully pushed in the entering direction, the rear end portion 795 of the intermediate portion 786 directly contacts the locking portion 794 of the pair of claw portions 774. Due to the direct contact of the locking portion 794 with the rear end surface 795, the arm portion 792 will swing toward the drive lever 773 side centering on the rocking fulcrum 796 as indicated by an arrow A7.

With this configuration, the arm portion 792 is completely separated from the inner surface of the drum 701, and the locking of the roll sheet R is released. In this way, the operator is unlocked by manual operation, so that the lock is not automatically released by stopping the supply of air or the like. Therefore, when the roll sheet R is unlocked, the operation of the operator must be added, so that the operation can be stopped. The person accidentally unlocked the roll sheet R.

Referring to Fig. 16, the diameter detecting portion will be described for the diameter detecting process of the roll sheet. The figure shown in Fig. 16 is an example of a map showing the measurement result of the change of the roll sheet by the photo sensor in the present embodiment. In addition, in Fig. 16, the roll type sheet is a PET film, and the roll is made of polyethylene. Further, the vertical axis represents the measured voltage of the photosensor corresponding to the light receiving amount, and the horizontal axis represents the distance from the photo sensor to the measuring object.

As shown in Fig. 16, before the sheet supply unit 700 is driven, the distance from the measurement target is changed, and the measurement voltage of the photo sensor 767 is measured, and the measurement results of the solid line W1 and the broken line W2 are obtained. The solid line W1 is a measurement result when the roll sheet R is a measurement target, and the broken line W2 is a measurement result when only the drum 701 is a measurement target. As indicated by the solid line W1, as the distance between the light receiving surface of the photo sensor 767 and the peripheral surface of the roll sheet R increases, the photosensor 767 decreases in the measured voltage corresponding to the light receiving amount. In the drawing, the distance between the light receiving surface of the photo sensor 767 and the outer peripheral surface of the rolled sheet R is increased from 96 [mm] to 160 [mm], and the measured voltage is lowered from 5.0 [V] to 1.4 [V].

Further, as indicated by a broken line W2, the greater the distance between the light receiving surface of the photo sensor 767 and the outer peripheral surface of the drum 701, the lower the measured voltage of the light sensor 767 corresponding to the light receiving amount. In the drawing, the distance between the light receiving surface of the photo sensor 767 and the outer peripheral surface of the cylinder 701 is increased from 45 [mm] to 160 [mm], and the measured voltage is lowered from 2.4 [V] to 1.2 [V]. As a result, since the reflectance of the drum 701 is lower than that of the sheet S, the measurement voltage is lower than when the roll sheet R is used as the measurement target. The map is stored in the memory of the control unit 6.

When the sheet supply unit 700 is driven, the diameter detecting unit 712 refers to the memory. The stored map detects the diameter of the roll sheet R based on the light receiving amount of the light reflected by the roll sheet R. The diameter detecting unit 712 outputs the measured roll sheet R diameter to the tension applying unit 707. With this configuration, the tension applying portion 707 can adjust the braking force to cause the sheet S to generate an appropriate tension when the torque applied to the roll sheet supporting portion 702 is changed in accordance with the diameter of the roll sheet R. Therefore, it is possible to avoid the problem that the tension applied to the sheet S is excessively large so that the sheet S is elongated, or the grip portion 741 is pulled out of the sheet S, and the operation is unstable due to the influence of the load. Further, it is possible to prevent the sheet S from being loosened when the tension generated on the sheet S is too small, so that the problem of the operation of cutting the sheet S cannot be appropriately performed.

Further, the diameter detecting unit 712 detects the presence or absence of the sheet S by the difference in reflectance between the roll sheet R and the drum 701 with reference to the map stored in the memory. At this time, the diameter detecting portion 712 sets a critical value between the measured voltage of the roll sheet R and the current measured voltage of the drum 701 before the sheet is exhausted. Then, when the diameter detecting portion 712 measures the measured voltage below the critical value by the photo sensor 767, the detecting sheet S has been used up. In the example, since the sheet S is used up at 160 [mm], 1.3 [V] is set as a critical value to detect the presence or absence of the sheet S.

The diameter detecting unit 712 notifies the monitoring unit 768 of the presence or absence of the sheet S. The monitoring unit 768 detects that the sheet S has not been pulled out from the roll sheet R, and alerts the operator to perform the replacement operation of the roll sheet R.

Further, in the present embodiment, the relationship between the light receiving amount and the roll sheet R is stored in the memory in the form of a map, but it is not limited thereto. The memory can be stored to present data relating to the relationship between the amount of light received and the roll sheet R. For example, the relationship between the amount of light received and the roll sheet R can also be stored in a tabular form.

Further, in the present embodiment, the diameter detecting unit 712 detects the diameter of the roll sheet R based on the light receiving amount of the reflective photo sensor 767, but is not limited to the photo sensor. The diameter detector 712 only needs to have a sensor capable of measuring the physical quantity corresponding to the diameter of the roll sheet R. For example, a load cell can also be provided and the roll sheet R can be detected by the weight of the roll sheet R. diameter. At this time, the dynamometer is provided to the roll sheet support portion 702.

Further, in the present embodiment, the drum 701 is formed of a material having a lower reflectance than the rolled sheet, but it is not limited thereto. When the presence or absence of the sheet S is detected, the drum 701 may have a reflectance different from that of the roll sheet R. For example, it may be formed such that the reflectance is higher than that of the roll sheet R.

In the present embodiment, the tension applying portion 707 applies a rotational force in the reverse rotation direction to the roll sheet supporting portion 702 to apply tension to the sheet S, but is not limited thereto. The tension applying portion 707 may be configured to impart a moderate tension to the sheet S. For example, a structure in which the roll sheet supporting portion 702 generates a frictional force may be employed.

Further, in the present embodiment, the light receiving portion 766 is provided around the light emitting portion 636 to form the photo sensor 767, but the present invention is not limited thereto. The photo sensor 767 may be configured to have a light-emitting portion 636 provided around the light receiving portion 766.

In the present embodiment, the output of the photo sensor 767 is notified to the tension applying unit 707 and the monitoring unit 768, but not limited thereto. The output of the photo sensor 767 can be notified to the control unit 6, and the tension applying unit 707 and the monitoring unit 768 can be notified by the control unit 6.

Further, in the present embodiment, the roll sheet R is locked to the roll sheet support portion 702 by the pair of claw portions 774, but the present invention is not limited thereto. Roll sheet The holding portion 702 may have any configuration as long as it has a structure for locking the roll sheet R.

Further, in the present embodiment, the sheet S is ejected to the sheet S by the first and second air blowing portions 708 and 709, but the sheet S is not limited thereto. The first and second air blowing portions 708 and 709 may also eject a gas other than air to wash the sheet S.

Further, in the present embodiment, air is blown from the suction port 739 to prevent the sheet S from rubbing against the holding surface 737 when the sheet S is pulled out, but it is not limited thereto. If the sheet S is not rubbed against the holding surface 737 when the sheet S is pulled out, it is not necessary to blow air by the suction port 739.

Further, in the present embodiment, the sheet drawing portion 703 is in a state where the grip portion 741 grips the leading end of the sheet S, and the sliding grip portion 741 pulls the sheet S from the roll sheet R, but is not limited thereto. The sheet drawing portion 703 only needs to have a configuration in which the sheet S can be pulled out from the roll sheet R regardless of the form.

The table portion and the sheet conveying portion will be described in detail with reference to Figs. 1, 17 and 18. Fig. 17 is a schematic view showing the table portion of the embodiment. In addition, in Fig. 17, (a) is a schematic view of the upper surface of the table portion, and (b) is a B1-B1 cross-sectional view of the system (a). Fig. 18 is a schematic cross-sectional view showing the sheet conveying portion of the embodiment.

As shown in Fig. 17, the table portion 602 is formed into a disk shape by a light transmissive material, and the upper surface is provided with a concave portion 651 except for the peripheral region. The upper surface of the base portion 602 is stepped by the recessed portion 651, and the first retaining surface 652 is formed in the outer peripheral region, the second retaining surface 653 is formed on the inner bottom surface of the recessed portion 651, and the first retaining surface 652 is formed on the inner peripheral surface of the recessed portion 651. To the side 654 of the second holding surface 653. Forming two concentric first suction ports on the first holding surface 652 655 for attracting the peripheral area of the holding sheet S. An annular second suction port 656 (suction port) is formed at a corner of the second holding surface 653 and the side surface 654 for attracting the central portion of the sheet S.

The first suction port 655 is connected to a suction source (not shown) via a passage formed inside the table portion 602. The second suction port 656 is connected to the suction source by a passage formed inside the table portion 602. Further, an air safety valve is provided in the passage connecting the second suction port 656. The table portion 602 sucks and holds the outer peripheral region of the sheet S on the first holding surface 652 by suction of the first suction port 655. At this time, a closed space 657 is formed by the sheet S, the second holding surface 653, and the side surface 654 (see FIG. 17(b)). The table portion 602 draws air from the closed space 657 by the second suction port 656 to cause the sheet S to stick to the second holding surface 653.

If the air is sucked out of the closed space 657, the sheet S is pulled down by the step of the first holding surface 652 and the second holding surface 653 and is closely attached along the second holding surface 653. The second holding surface 653 is flat except for the periphery of the second suction opening 656. Therefore, the adhesion to the sheet S can be improved, and the light irradiated by the non-light-emitting portion 636 (see FIG. 5) is scattered. problem. Therefore, the flat sheet S can be properly attached to the workpiece W.

Further, by opening the atmospheric safety valve and flowing air between the sheet S and the second holding surface 653 by the second suction port 656, the sheet S can be made of the second holding surface by the tension (restoring force) acting on the sheet S. 653 starts. As a result, the table portion 602 of the present embodiment allows the sheet S to be hermetically attached to the second holding surface 653, and the sheet S attached to the second holding surface 653 can be easily picked up.

As shown in Fig. 1, the sheet conveying unit 800 has a conveying arm portion 802 which is protruded from the base 801 disposed on the bottom wall portion of the outer casing 2, and The sheet holding portion 803 at the tip end of the arm portion 802 is sent. The transfer arm portion 802 is configured to be movable in the X-axis direction and the Z-axis direction under the control of a moving mechanism (not shown) provided in the base 801. The sheet holding portion 803 has a rectangular shape in plan view and has a holding surface for holding the sheet S. The sheet conveying unit 800 conveys the sheet S between the sheet supply unit 700 and the stage unit 602 by a moving mechanism in the base 801.

As shown in Fig. 18, the sheet holding portion 803 has a concave portion 811 formed in the central portion except for the outer peripheral region except the lower surface. The outer peripheral region of the lower surface of the sheet holding portion 803 forms a holding surface 812, and a suction port 813 for attracting the peripheral region of the holding sheet S is formed. The suction port 813 is connected to a suction source (not shown) via a passage formed inside the sheet holding portion 803. The concave portion 811 is attached with an expansion film (expansion portion) 814 formed of a stretchable material. The mounting of the expansion film 814 is spaced apart from the bottom surface of the recess 811 by a slight gap.

A bottom surface of the recess 811 is formed with a supply port 816 for supplying air to the central portion of the expansion membrane 814. The supply port 816 is connected to a supply source (not shown) via a passage formed inside the sheet holding portion 803. When the air is supplied through the supply port 816, the expanded film 814 is bulged from the central portion and expanded into a dome shape. In a state where the sheet S is held on the first holding surface 652 of the table portion 602, the sheet holding portion 803 is pressed into the dome portion by the expansion film 814, and the central portion of the sheet S is pressed against the table portion 602. Two holding faces 653.

Then, the sheet S pressed against the second holding surface 653 is attracted to the second holding surface 653 by the suction of the second suction opening 656 as described above. At this time, since the central portion of the sheet is pressed against the second holding surface 653, the bubble can be pushed outward from the center of the sheet S to closely adhere the sheet S to the second holding surface 653. With this, The bubble can be prevented from running between the sheet S and the land portion 602, and the adhesion of the second holding surface 653 to the sheet S can be improved.

Referring to Fig. 19, the attachment operation of the sheet will be described. Fig. 19 is an explanatory view showing an operation of attaching a sheet to a sheet conveying unit in the embodiment.

As shown in Fig. 19 (a), the sheet holding portion 803 takes the sheet S from the sheet supply portion 700 and positions the sheet S above the table portion 602. At this time, the sheet S is conveyed while holding the outer peripheral region on the holding surface 812 by the suction port 813. The sheet holding portion 803 moves downward in a state in which the sheet S is held, and the sheet S is placed on the first holding surface 652 of the table portion 602. The sheet S is placed on the table portion 602, that is, the outer peripheral portion of the sheet S is adsorbed to the first holding surface 652 by the first suction port 655. At this time, the sheet S and the second holding surface 653 and the side surface 654 form a closed space 657.

Next, as shown in Fig. 19(b), when the first holding surface 652 of the table portion 602 adsorbs the outer peripheral region of the sheet S, the sheet holding portion 803 releases the operation of holding the sheet S by the suction port 813. Then, the sheet holding portion 803 supplies air to the expansion film 814 from the supply port 816, and expands the expansion film 814 into a dome shape. Thereby, the central portion of the sheet S is pressed and adhered to the second holding surface 653 of the table portion 602.

Next, as shown in Fig. 19(c), the table portion 602 attracts air from the closed space 657 by the second suction port 656, and the sheet S is attached to the second holding surface 653. At this time, the sheet S is wrinkled by the step of the concave portion 651, and is flattened by the expansion film 814 so that the bubble is pushed outward from the central portion. The bubble that has been pushed out is sucked and discharged by the second suction port 656, and the sheet S is gradually adhered to the second holding surface 653 from the inside to the outside. Therefore, the bubble can be prevented from running between the sheet S and the land portion 602. After the sheet S is attached to the table portion 602, the sheet holding portion 803 is made up of the table portion The 602 is left and the above-described workpiece W adhesion operation is performed on the sheet S.

Next, as shown in Fig. 19(d), after the sticking operation of the workpiece W is completed, the table portion 602 stops sucking air from the second suction port 656, and opens an atmospheric safety valve for opening the atmosphere in the closed space 657. By opening the atmospheric safety valve, air is caused to flow between the sheet S and the second holding surface 653 from the second suction port 656, and the sheet S is lifted by the second holding surface 653 by the tension (restoring force) acting on the sheet S. As a result, even if the sheet S is airtightly attached to the second holding surface 653, the sheet S can be easily picked up by the second holding surface 653.

In the present embodiment, the expansion film 814 is provided in the sheet holding portion 803, but it is not limited thereto. The sheet holding portion 803 only needs to be configured to hold the sheet S. For example, as shown in Fig. 20, the holding surface 812 may be formed on the entire lower surface without the expansion film 814.

Hereinafter, a attaching operation of the sheet using the sheet holding portion in the modification will be described with reference to Fig. 20. Fig. 20 is an explanatory view showing an operation of attaching a sheet using a sheet holding portion in a modification. In addition, the same component symbol is denoted by the same name herein.

As shown in FIG. 20( a ), the sheet holding unit 803 obtains the sheet S by the sheet supply unit 700 and positions the sheet S above the table portion 602 . At this time, the sheet S is held by the suction port 813 while being held by the holding surface 812. The sheet holding portion 803 moves downward in a state in which the sheet S is held, and the sheet S is placed on the first holding surface 652 of the table portion 602. The sheet S is placed on the table portion 602, that is, the outer peripheral portion of the sheet S is adsorbed to the first holding surface 652 by the first suction port 655.

Next, as shown in FIG. 20(b), the first holding surface 652 of the table portion 602 is When the outer peripheral region of the sheet S is adsorbed, the sheet holding portion 803 releases the operation of holding the sheet S by the suction port 813. Then, as shown in FIG. 20(c), the table portion 602 attracts air by the second suction port 656 from the closed space 657 formed by the sheet S and the second holding surface 653 and the side surface 654, so that the sheet S is attached thereto. The second holding surface 653. At this time, the sheet S is wrinkled by the step of the concave portion 651 and closely adheres to the second holding surface 653. After the sheet S is attached to the table portion 602, the sheet holding portion 803 is separated from the table portion 602, and the above-described workpiece W adhesion operation is performed on the sheet S.

Next, as shown in Fig. 20(d), after the adhesion of the workpiece W is completed, the table portion 602 stops the suction of the air by the second suction port 656, and opens the atmospheric safety valve for opening the atmosphere in the closed space 657. By opening the atmospheric safety valve, air is caused to flow between the sheet S and the second holding surface 653 from the second suction port 656, and the sheet S is lifted by the second holding surface 653 by the tension (restoring force) acting on the sheet S. As a result, even if the sheet S is airtightly attached to the second holding surface 653, the sheet S can be easily picked up by the second holding surface 653.

Further, in the present embodiment, the second holding surface 653 of the table portion 602 is formed in a flat shape, but is not limited thereto. The second holding surface 653 may also be formed with a groove connected to the second suction opening 656. For example, as shown in FIG. 21, a groove 901 passing through the center of the second holding surface 653 may be formed in the table portion 602. In Fig. 21, (a) is a schematic view of the upper surface of the table portion, and (b) is a cross-sectional view taken along line B2-B2 of (a). With this configuration, in a state where the irradiation light of the light-emitting portion 636 (see FIG. 5) is reduced, the bubble can be prevented from entering between the second holding surface 653 and the sheet S, and the adsorption force of the sheet S can be increased. In this case, the groove 901 may be formed in any form and only needs to be formed on the second holding surface 653 and connected to the second suction port 656.

In the present embodiment, the atmosphere safety valve is provided in the passage connecting the second suction port 656, but it is not limited thereto. As long as the sheet S can be attracted to the second holding surface 653 by the suction of the second suction port 656, a structure in which no atmospheric safety valve is provided can be used.

Further, in the present embodiment, the sheet S is adsorbed and held by the first holding surface 652 by the first suction port 655, but it is not limited thereto. It is only necessary to hold the outer peripheral region of the sheet S on the first holding surface 652. For example, the outer peripheral region of the sheet S may be mechanically held by the first holding surface 652 by a clamping mechanism or the like.

Further, in the present embodiment, the sheet S is adsorbed and held by the second holding port 656 by the second suction port 656, but it is not limited thereto. The second holding surface 653 may be a structure for adsorbing and holding the central portion of the sheet S. For example, it may be formed by a plurality of cavities formed at the corners of the second holding surface 653 and the side surface 654.

Further, in the present embodiment, the second suction port 656 is formed at the corner portion of the second holding surface 653 and the side surface 654, but the present invention is not limited thereto. The second suction port 656 may also be formed at least on one of the second holding surface 653 and the side surface 654.

Here, the entire operation flow of the resin coating apparatus 1 will be described with reference to Fig. 1 . First, the assembly work of the adhesion device 600 is performed at the time of maintenance before the operation. Thereby, the reference position when the pressing unit 604 performs the pressing operation is set. When the operator holds the wafer 4 on the loading side in the wafer housing unit 100, the first workpiece transfer unit 200 removes the workpiece W before the processing from the wafer 4 on the loading side, and temporarily places it. Temporary table 401. At this time, if either of the external department 106 and the internal department 107 is turned on, the other party is Locked in the closed state ensures operator safety.

The photographing unit 402 photographs the workpiece W on the temporary table 401, and calculates the orientation or the center position in the horizontal direction in the control unit 6. The photographed workpiece W is transported to the pressing portion 604 by the second workpiece transport unit 300 in accordance with the calculated orientation or center position, and is held above the table portion 602 by the pressing surface 634 of the pressing portion 604. Further, while the workpiece W is being conveyed to the pressing portion 604, the sheet S is pulled out from the roll sheet R by the sheet supply portion 700. When the sheet S is pulled out, it is adjusted in accordance with the change in the diameter of the roll sheet R, so that the sheet S generates moderate tension.

The sheet S pulled out by the sheet supply portion 700 is cut to a predetermined length and then conveyed to the table portion 602 by the sheet conveying portion 800. At this time, the sheet S is hermetically attached to the land portion 602 by the expansion of the expansion film 814 provided in the sheet conveying portion 800 and the concave portion 651 of the table portion 602. The sheet S on the table portion 602 is supplied with a liquid resin from the resin supply portion 603 at the center portion. Then, after the sheet S and the workpiece W are conveyed to the adhering device 600, the workpiece W held on the pressing surface 634 is pressed against the sheet S through which the liquid resin is supplied. At this time, the amount of pressure under the pressing portion 604 is adjusted in response to the change in the pressure of the liquid resin against the pressing surface 634. Thereby, the liquid resin is spread over the outer edge of the workpiece W.

After the workpiece W is pressed against the sheet S, the liquid resin is cured by the light-emitting portion 636, and a resin film is formed between the workpiece W and the sheet S. At this time, since the liquid resin is cured in a state where the workpiece W is pressed against the sheet S, the internal stress does not remain in the workpiece W. The workpiece W to which the sheet S is attached is taken out from the table portion 602 by the second workpiece transfer portion 300 and disposed under the sheet cutting portion 500. Then, the workpiece W with the sheet S is cut by the sheet cutting portion 500 along the outer shape of the workpiece W by the first workpiece. The conveying unit 200 is pushed by the sheet cutting unit 500 into the wafer 5 on the carry-out side.

In the resin coating apparatus 1 of the present embodiment, when the workpiece W held on the pressing surface 634 is pressed against the liquid resin L supplied to the upper surface of the table portion 602, the pressure applied to the pressing portion 604 can be applied. Since the amount of pressing of the pressing portion 604 is changed, the liquid resin L can be appropriately dispersed regardless of the thickness unevenness of the workpiece W or the amount of the liquid resin L.

Further, the embodiments disclosed herein are illustrative of all points and are not intended to limit the scope of the embodiments. The scope of the present invention is defined by the scope of the present invention, and all modifications within the scope and scope of the invention are intended to be within the scope of the invention.

As described above, the present invention has an effect that the resin can be appropriately dispersed regardless of the thickness of the workpiece or the amount of the resin is increased or decreased, and the resin coating device for coating the surface of the workpiece (the workpiece) such as a semiconductor wafer with a resin is coated. Especially useful.

1‧‧‧Resin coating device

2‧‧‧External frame

3‧‧‧Seat

4‧‧‧ Moving into the side of the crystal

5‧‧‧ Moving out of the side of the crystal

6‧‧‧Control Department

100‧‧‧Crystal Refuge Department

101‧‧‧The body of the housing department

102‧‧‧ Containment room

103‧‧‧crystal table

104‧‧‧Sliding plate in the lower section

105‧‧‧Sliding plate of the upper section

106‧‧‧Outside department

107‧‧‧Internal department

111‧‧‧ One end of the sliding plate in the lower section

112‧‧‧One end of the sliding plate of the upper section

113‧‧‧Snap holes

114‧‧‧Lock pin

115‧‧‧ Door Sensor

200‧‧‧First workpiece transfer unit

201‧‧‧rails

202‧‧‧Support Desk

203‧‧‧Multi-bar linkage

204‧‧‧Workpiece holding department

300‧‧‧Second workpiece transfer unit

301‧‧‧rail

302‧‧‧Support Desk

303‧‧‧Multi-bar linkage

304‧‧‧Working Holder

400‧‧‧Workpiece Inspection Department

401‧‧‧ temporary table

402‧‧‧Photography Department

403‧‧‧ Arms

500‧‧‧Sheet cutting department

501‧‧‧Rotating table

502‧‧‧Cutter

600‧‧‧Adhesive device

601‧‧‧Abutment

602‧‧

603‧‧‧Resin Supply Department

604‧‧‧ Pressing Department

605‧‧‧ Column

606‧‧‧Mobile Department

611‧‧‧rail

612‧‧‧Z-axis table

613‧‧‧Support Department

621‧‧‧Base member

622‧‧‧ recess

623‧‧‧ Press plate

624‧‧‧Maintenance board

631‧‧‧ pathway

632‧‧‧Gas suction department

633‧‧‧pressure sensor

634‧‧‧ Pressing surface

635‧‧‧Press sensor

636‧‧‧Lighting Department

637‧‧‧Gas Supply Department

651‧‧‧ recess

652‧‧‧First holding surface

653‧‧‧second holding surface

654‧‧‧ side

655‧‧‧ first attraction

656‧‧‧second suction port

657‧‧‧closed space

700‧‧‧Sheet Supply Department

701‧‧‧Roller

702‧‧‧Rolled sheet support

703‧‧‧Sheet pull-out

704‧‧‧First passive roller

705‧‧‧Second passive roller

706‧‧‧ gripping department

707‧‧‧Training Department

708‧‧‧First air supply department

709‧‧‧Second air supply department

711‧‧‧cutting department

712‧‧‧Diameter Testing Department

714‧‧‧Upper flat panel

715‧‧‧Lower slab

716‧‧‧ Drive Department

717‧‧‧ rod body

718‧‧‧ Drive Department

719‧‧‧ rod body

721‧‧‧Blowing side access

722‧‧‧Attraction side access

723‧‧‧ Block

731‧‧‧The last position

732‧‧‧The next position

735‧‧‧Cutter

736‧‧‧ Keeping Department

737‧‧‧ Keep face

738‧‧‧cutting slot

739‧‧‧ attracting mouth

741‧‧‧ Holding Department

742‧‧‧Mobile Department

743‧‧‧Support desk

744‧‧‧rails

745‧‧‧Sliding parts

746‧‧‧Cutter movement department

751‧‧‧floor

752‧‧‧ fixed plate

753‧‧‧ front end

754‧‧‧ movable plate

755‧‧‧ Flat section

756‧‧‧Drive Department

757‧‧‧ rod body

761‧‧‧ front position

762‧‧‧ rear position

765‧‧‧Lighting Department

766‧‧‧Light Receiving Department

767‧‧‧reflective light sensor

768‧‧‧Monitor

771‧‧‧stop plate

772‧‧‧Axis

773‧‧‧ drive rod

774‧‧‧ claws

775‧‧‧ annular block

776‧‧‧ accommodating space

777‧‧‧ inserted through hole

778‧‧‧ front end

781‧‧‧ long hole

783‧‧‧Supply space

785‧‧‧ front part

786‧‧‧Intermediate

787‧‧‧ Rear

788, 789‧‧‧ support surface

791‧‧‧Conical surface

792‧‧‧ Arms

793‧‧‧Roller

794‧‧‧ card stop

795‧‧‧ rear end face

796‧‧‧Shake fulcrum

800‧‧‧Sheet Transfer Department

801‧‧‧Abutment

802‧‧‧Transport arm

803‧‧‧Sheet holding department

811‧‧‧ recess

812‧‧‧ Keep face

813‧‧‧ attracting mouth

814‧‧‧Expanded film

816‧‧‧ supply port

901‧‧‧ Groove

L‧‧‧Liquid resin

P‧‧‧ water level

R‧‧‧ roll sheet

S‧‧‧Sheet

W‧‧‧Workpiece

Fig. 1 is a perspective view of a resin coating apparatus of the present embodiment.

Fig. 2 is a perspective view of the wafer housing portion of the embodiment.

Fig. 3 is a schematic cross-sectional view showing the wafer housing portion of the embodiment.

The fourth (a) to (c) drawings are explanatory diagrams of the opening and closing operations of the departments and internal departments other than the present embodiment.

Fig. 5 is a schematic cross-sectional view showing the adhering device of the embodiment.

6(a) to (d) are explanatory views of the adhesion operation of the adhering device of the present embodiment.

The figure shown in Fig. 7 is the measured value of the pressing sensor in the present embodiment. The general relationship of the elapsed time after the mobile part starts moving.

The figure shown in Fig. 8 is an example of the measurement result of the pressing sensor in the present embodiment.

The figure shown in Fig. 9 is an example of a map showing the measurement result of the change in the gap between the holding plate and the table portion by the pressure sensor in the present embodiment.

Fig. 10 (a) and (b) are explanatory views of the assembly work of the adhering device of the present embodiment.

Fig. 11 is a side view showing the sheet supply portion of the embodiment.

Fig. 12 is an enlarged view of the first and second air blowing portions of the embodiment.

Fig. 13 is a partial cross-sectional view showing the roll sheet supporting portion of the embodiment.

14A(a) to (c) are explanatory views of a sheet cutting operation performed by the sheet supply unit of the embodiment.

14B(d) to (f) are explanatory views of the sheet cutting operation performed by the sheet supply unit of the embodiment.

Fig. 15 (a) and (b) are explanatory views showing a locking operation and an unlocking operation of the roll sheet by the roll sheet supporting portion in the embodiment.

The figure shown in Fig. 16 is an example of a map showing the measurement result of the change of the roll sheet by the photo sensor in the present embodiment.

The seventeenth (a) and (b) drawings are schematic views of the table portion of the present embodiment.

Fig. 18 is a schematic cross-sectional view showing the sheet conveying portion of the embodiment.

19(a) to (d) are explanatory views of the attaching operation of the sheet conveying unit to the sheet in the embodiment.

In the 20th (a) to (d) modification, the sheet holding portion is attached to the sheet. Action description chart.

21(a) and (b) are schematic cross-sectional views of the table portion of the modification.

6‧‧‧Control Department

600‧‧‧Adhesive

601‧‧‧Abutment

602‧‧

603‧‧‧Resin Supply Department

604‧‧‧ Pressing Department

605‧‧‧ Column

606‧‧‧Mobile Department

612‧‧‧Z-axis table

613‧‧‧Support Department

621‧‧‧Base member

622‧‧‧ recess

623‧‧‧ Press plate

624‧‧‧Maintenance board

631‧‧‧ pathway

632‧‧‧Gas suction department

633‧‧‧pressure sensor

634‧‧‧ Pressing surface

635‧‧‧Press sensor

636‧‧‧Lighting Department

637‧‧‧Gas Supply Department

651‧‧‧ recess

L‧‧‧Liquid resin

S‧‧‧Sheet

W‧‧‧Workpiece

Claims (2)

A resin coating device comprising: a pressing portion having a pressing surface capable of adsorbing and holding a workpiece; a table portion disposed to face the pressing surface; and a resin supply portion supplying a liquid resin to the upper surface of the table portion a moving portion for bringing the pressing surface closer to and away from the table portion; and a control portion for controlling an operation of the moving portion; the resin coating device for holding the workpiece on the pressing surface Pressing the liquid resin supplied to the upper surface of the table portion to expand the liquid resin on the lower surface of the workpiece; the pressing portion has a pressure sensor for holding the pressing surface in the moving portion The workpiece is close to the table portion, and when the liquid resin is pressed and spread over the lower surface of the workpiece, the pressure applied to the pressing surface is detected; and the control unit controls the movement based on the pressure detected by the pressure sensor. The operation of the portion, and when the pressure sensor detects that the pressure is below the pressure detected before, stopping the moving portion to cause the pressing surface The operation of the workpiece holding closest portion of the table. A resin coating device comprising: a pressing portion having a pressing surface and a suction opening capable of adsorbing and holding a workpiece; and a table portion disposed to face the pressing surface; The resin supply unit supplies the liquid resin to the upper surface of the table portion; the moving portion is configured to bring the pressing surface closer to and away from the table portion; and the control portion controls the operation of the moving portion; In the resin coating apparatus, the liquid resin supplied to the upper surface of the table portion is pressed by the workpiece held on the pressing surface, and the liquid resin is expanded on the lower surface of the workpiece; and the gas suction portion is provided. An attraction force is generated in the suction port; a pressure sensor is disposed between the gas suction portion and the suction port; and an interval detecting device detects an interval between the pressing portion and the table portion; and the pressing portion has a pressing The sensor is configured to detect that the workpiece held by the pressing surface approaches the table portion, and when the liquid resin is pressed and spread over the lower surface of the workpiece, the pressure applied to the pressing surface is detected. The control unit controls the operation of the moving unit according to the pressure detected by the pressing sensor, and the interval detecting device has a gas supply , The gas is supplied to the suction port; when the memory unit, based on the discharge side of the gas from the suction port side of the distance between the pressing portion and the table portion changes, the pressure sensing memory The pressure change detected by the detector; and the calculation unit calculates the distance between the pressing portion and the table portion based on the pressure value detected by the pressure sensor and the pressure change.