TWI545289B - Lamp position adjustment method, lamp position adjustment tool and irradiation device - Google Patents

Description

Lamp position adjustment method, lamp position adjustment tool and illumination device

The present invention relates to a lamp position adjusting method, a lamp position adjusting tool, and an illuminating device, and more particularly to a technique for easily adjusting a position of a lamp.

Conventionally, in an irradiation apparatus to which an illumination optical system is applied, in particular, in the maintenance of a lamp replacement or the like, in order to maintain the illuminance and illuminance distribution for the purpose of the irradiation surface, it is necessary to easily adjust the position of the lamp.

Therefore, for example, in the positioning of the lamp of the exposure device, the operator is a lamp position adjustment method, and the pin or the curved display panel is used to visually observe the image of the cathode or the anode of the lamp while adjusting the position of the lamp to make the cathode or the anode of the lamp. It is like a predetermined position on the curved display panel (for example, Patent Document 1).

[prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Publication No. 6-20036

However, in the conventional lamp position adjustment method, when the image on the visual curved display panel is adjusted, there is a problem in that it is difficult to grasp the direction of the lamp position, and the positioning of the lamp position is difficult.

The present invention has been made in view of the above circumstances, and provides a lamp position adjusting method and a lamp position adjusting tool which are easy to visually adjust the position of the lamp. The illumination device is for the purpose.

In the present specification, all contents of Japanese Patent Application No. 2011-063968 of the patent application of March 23, 2011 are incorporated.

In order to achieve the above object, the present invention provides a lamp position adjusting method for a illuminating device that condenses light of a lamp and condenses the light of the lamp, and illuminates the condensed light beam by the condensing mirror, and is characterized in that: the condensing image is diffused and penetrated by the condensing image. a diffusing plate at a focus position of the condensing mirror, a light reducing filter having a center portion having a higher transmittance than the peripheral portion is disposed inside the diffusing plate, and the center portion is aligned with an optical axis of the light beam, and the light reducing filter is disposed at the optical filter The inner side of the indicator board adjusts the position of the lamp based on the spot of the condensed image of the diffuser projected onto the indicator board.

Further, in the lamp position adjusting method of the present invention, the light beam of the condensing mirror is incident on the diffusing plate through an annular slit plate centered on the optical axis.

Further, in order to achieve the above object, a lamp position adjusting tool according to the present invention includes a lamp and a condensing mirror that condenses light of the lamp, and adjusts and outputs a lamp position of an irradiation device that emits a light beam condensed by the condensing mirror. a diffusing plate disposed at a focus position of the condensing mirror to diffuse the condensed image; a transmittance of the central portion is higher than a peripheral portion, and the central portion is aligned with an optical axis of the light beam to be disposed in the diffusion a dimming filter on the inner side of the plate; and an index plate disposed on the inner side of the dimming filter to project a condensed image of the diffusing plate and indicating the target position of the condensing image.

Moreover, in order to achieve the above object, the present invention includes a lamp and a condensing mirror that condenses the light of the lamp, and outputs an illuminating device that condenses the light beam by the condensing mirror, and is characterized in that the lamp position adjusting device for adjusting the position of the lamp is provided. The lamp position adjusting device includes: a diffusing plate disposed at a focus position of the condensing mirror to diffuse the condensed image; and a center portion having a higher transmittance than the peripheral portion, and aligning the center portion with the light beam a light reduction filter disposed inside the diffusion plate on the optical axis; and an index plate disposed on the inner side of the light reduction filter to project a concentrated image of the diffusion plate and marked on a target position of the light collection image.

According to the present invention, the light-reducing filter having the center portion having a higher transmittance than the peripheral portion is disposed so that the center portion is aligned on the optical axis of the concentrating mirror, and the index plate is disposed inside the light-reducing filter. When the spot where the condensed image of the diffuser is projected onto the index plate is located at the center portion and the luminance is maximized, the position of the condensed image and the change in luminance can be visually observed. Easy positioning of the lamp.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

Fig. 1 is a schematic configuration diagram of a lamp position adjustment system 1, and Fig. 2 is an enlarged view of a main portion of the arc display system 18.

The lamp position adjustment system 1 is a system for adjusting the position of the lamp 12 of the illumination device 10 having the lamp 12 and the condensing mirror 14, and includes an XYZ axis adjustment machine. Structure 16, through plane mirror 17 and curved display system 18.

The lamp 12 of the irradiation device 10 is a mercury lamp, a halogen lamp, a xenon lamp, a metal halide mercury lamp or the like. A condensing mirror 14 that condenses and outputs the emitted light of the lamp 12 is provided around the lamp 12. The condensing mirror 14 is, for example, an elliptical mirror. The lamp 12 is disposed at an arcuate position of the first focus f1 of the alignment lamp 12 located in the mirror surface, and the light beam H condensed by the second focus is output.

The XYZ axis adjustment mechanism 16 adjusts the position of the lamp 12 in the condensing mirror 14 independently of the position in the three-axis direction in which the X-axis, the Y-axis, and the Z-axis are orthogonal to each other, and stacks the X-axis table 16A that moves in the X-axis direction. The Y-axis stage 16B that moves in the Y-axis direction and the Z-axis stage 16C that moves in the Z-axis direction are formed. The end portions 12A of the lamps 12 are fixed to the uppermost layers 16D, and the respective stages 16A to 16C are operated to adjust the three axes of the lamps 12. Further, in the present embodiment, the Z axis is used as the optical axis of the condensing mirror 14.

The penetrating plane mirror 17 is a plane mirror disposed on the optical axis K of the illuminating device 10 (the condensing mirror 14) and disposed between the second focal point f2 from the illuminating device 10, and has a characteristic that a part of the incident light beam H penetrates. The light beam H1 for display of the curved display system 18 can be penetrated. The light beam H2 reflected by the through-plane mirror 17 is an irradiation target that is incident on the illumination device 10, or other optical components corresponding to the purpose of use of the illumination device 10 (in the illustrated example, the end face is aligned with the second focus f2) The rectangular column optical integrator 20) is configured.

Further, in Fig. 1, the reflection plane mirror 30 is a plane mirror that causes the light path of the light beam H2 penetrating through the plane mirror 17 to face the curved display system 18.

The curved display system 18 is a system for visually observing the position of the arc of the lamp 12 and the deviation of the first focus f1 of the condensing mirror 14, and has a ring slit 31. The curved display panel 32, the dimming filter 33, the indexing plate 34, the observation magnifying lens 35, the UV-IR shielding filter 36, and the visual dimming filter 37 are arranged in this order along the optical axis K.

The curved display plate 32 is a plate material having the same diffusion effect in the plane. As shown in Fig. 1, an incident surface (diffusion surface) is disposed at the second focus f2 of the condensing mirror 14. The curved display panel 32 converges the light beam to diffuse and penetrate the condensed image, and the condensed image of the incident surface can be visually observed from the inner surface side.

The index plate 34 is shown in FIG. 2 and FIG. 4, and has a plurality of concentric circles 50 and centers of concentric circles 50 on a surface (inner surface) opposite to the surface (surface) on the incident side. The cross-cord 51 centered on O2 serves as a plate for the alignment of the lamp. The center O2 is aligned with the optical axis K, and the condensed image of the penetrating curved display panel 32 can be projected as a spot. The index plate 34 has a permeability that can recognize the degree of the spot from the inside.

The observation magnifying lens 35 is a lens that can enlarge the spot position of the index plate 34 and is easy to see. When the lamp position is adjusted, the spot position of the index plate 34 and the cross line 51 and the concentric circle can be performed by the observation magnifier 35. The contrast of line 50 is adjusted. In other words, when the offset of the lamp 12 in the XY-axis direction is adjusted, the center of the spot is adjusted to the center O2 of the cross line 51 and the concentric circle 50, and the misalignment of the lamp 12 in the Z-axis direction is adjusted. In this case, the adjustment is such that the size of the spot is formed to a predetermined size (for example, the concentric circle 50 of the smallest diameter).

The UV-IR shielding filter 36 shields the eyes from ultraviolet rays and infrared rays. The UV-IR shielding filter 36 can be disposed at any position on the optical axis K of the curved display system 18.

The visual dimming filter 37 is used to reduce the luminance of the spot on the index plate 34 for easy visual observation.

Here, the light beam H3 reflected by the reflecting mirror 30 is not directly passed through the annular slit 31, and is directly irradiated on the curved display panel 32 to form a spot of the collected image on the index plate 34, since the concentrated image is relatively high luminance. Therefore, it is difficult to grasp the size of the condensed image by visual observation, and it is difficult to adjust the eccentricity in the Z-axis direction. The above problem is that the larger the depth of focus of the condensing mirror 14, the smaller the change in the spot size when the lamp 12 is moved in the Z-axis direction, which is particularly remarkable.

Therefore, in the present embodiment, the above-described annular gap 31 is disposed on the light source side of the curved display panel 32 to solve the above problem.

The annular slit 31 is a slit plate having an annular through-window 38 as shown in Fig. 2, and a masking member 39 is provided on the surface of the transparent plate member 31A (Fig. 1) to form an annular through-hole window 38. Composition. The annular slit 31 is formed by arranging the annular center O1 of the annular through-window 38 to the optical axis K, and the central shielding portion 40 which is the inner diameter of the annular through-window 38 performs the central portion of the cross-section of the light beam H2. The shading is made into a hollow beam H4.

The diameter r2 of the peripheral side of the annular penetration window 38 is formed by aligning the sectional diameter of the light beam H3 when the lamp 12 is disposed at the correct position, and the diameter r1 of the center shielding portion 40 is from the annular penetration window 38. It is possible to form a sufficient amount of light to penetrate the size of the display in the latter stage.

When the light beam H3 passes through the circular slit 31, a hollow light beam H4 is outputted at a high cross section of the light beam H3 at a high center of the shielding center portion (that is, in the vicinity of the optical axis K). At this time, the position of the lamp 12 in the Z direction is more toward When the front and rear offsets, the cross-sectional diameter of the light beam H3 becomes large, so that the amount of light shielded outside the annular through window 38 increases, or the cross-sectional diameter of the light beam H3 becomes smaller, so that the amount of light penetrating the annular through-window 38 is reduced. Therefore, on the index plate 34, the range in the Z direction in which the light spot forms a high luminance can be contracted.

Thereby, the adjustment of the lamp 12 in the Z-axis direction can be easily performed based on the change in the luminance of the spot on the index plate 34. By limiting the amount of transmitted light, the brightness of the spot of the index plate 34 can be suppressed to protect the eyes during visual observation.

As described above, the light beam H3 reflected by the reflecting mirror 30 does not pass through the annular slit 31, and directly illuminates the curved display panel 32 to form a concentrated image on the index board 34. Since the concentrated image has a relatively high luminance, It is difficult to grasp the center of the condensed image by visual observation, and the eccentricity adjustment in the XY-axis direction is not easy.

In the present embodiment, the above-described dimming filter 33 is disposed between the curved display panel 32 and the index board 34 to solve the above problem.

Fig. 3 is a view showing the mode of the dimming filter 33.

The light reduction filter 33 is an ND filter in which the opening 43 is provided at the center O3. The transmittance Ta of the center portion 33A is made higher than the transmittance Tb of the peripheral portion 33B by the opening 43 of the center O3. The diameter r3 of the center portion 33A is formed by aligning the cross-sectional diameter of the light beam H3 when the lamp 12 is disposed at the correct position.

Further, as the light-reducing filter 33, any light-reducing filter may be used as long as the center portion 33A has a higher transmittance than the peripheral portion 33B, and for example, the penetration rate may be low as it is separated from the center O3. Stage variable speed ND filter.

The above-described dimming filter 33 is formed by arranging the center O3 on the optical axis K. Further, when the light beam H4 is passed through the light reduction filter 33, when the lamp 12 is displaced toward the XY-axis direction, the light is diffracted by the position of the opening 43 of the dimming filter 33, so that the concentrated image of the curved display panel 32 is dimmed. When the light spot is formed on the index plate 34, the luminance of the collected image at the time of visual observation is further lowered when there is no deviation from the XY-axis direction. It is possible to grasp the deviation in the XY-axis direction by the reduction in the presence or absence of the above-described luminance, and it is easy to adjust.

When the operator replaces the lamp 12 of the irradiation device 10, after the lamp 12 is replaced, the operator adjusts the deviation of the lamp 12 by visual observation by the curved display system 18.

That is, when the position of the lamp 12 is not biased in any of the XYZ axes, as shown in FIG. 4(A), the spot L of the condensed image is positioned at the center O2 of the index plate 34, so that the spot L is made. The brightness becomes the highest.

On the other hand, when the position of the lamp 12 is only displaced in the Z-axis direction, as shown in the fourth (B) diagram, the spot L of the condensed image is formed by the annular slit 31 at the center O2 of the index plate 34. The hollowness reduces the overall luminance, and the size of the light spot L becomes larger than that of the unbiased position (Fig. 4(A)). Further, as the spot L becomes larger, a portion exposed from the opening 43 of the light-reducing filter 33 is generated so that a part of the dimming reduces the luminance of the spot L.

Further, when the position of the lamp 12 is displaced in the XY-axis direction but there is no deviation in the Z-axis direction, as shown in Fig. 4(C), the spot L of the condensed image is located at the center O2 of the index plate 34. In the case of the deviation, the luminance of the light spot L is also lowered by the dimming of the light reduction filter 33. That is, for the offset in the XY-axis direction, the offset and luminance from the center O2 of the light spot L can be visually observed. Reduce the two elements to master.

The operator visually confirms that the light spot L of the light-converging point corresponds to one of the fourth (A) to the fourth (C), and the direction of the deviation of the specific XYZ axis is as shown in FIG. 4(A). The adjustment is made such that the light spot L having no high luminance of the hollow is positioned at the center O of the index plate 34 to adjust the position of the lamp.

As described above, according to the present embodiment, the curved display panel 32 as a diffusing plate that diffuses the concentrated image through the second focus f2 of the condensing mirror 14 is disposed, and the central portion 33A is aligned with the optical axis K of the light beam to the central portion 33A. The dimming filter 33 having a transmittance Ta higher than the transmittance Tb of the peripheral portion 33B is disposed inside the curved display panel 32, and an index plate 34 is disposed inside the dimming filter 33, according to the projection on the index board The spot L of the concentrated image of the curved display panel 32 of 34 adjusts the position of the lamp.

In this case, when the lamp is displaced in the XY-axis direction, the dimming filter 33 is dimmed to reduce the luminance, and the center O2 is displaced. Therefore, it is easy to grasp the misalignment in the XY-axis direction from both sides. On the other hand, when the lamp is displaced in the Z-axis direction, since the light is dimmed from the opening 43 of the center portion 33A, it is easy to grasp the misalignment in the Z-axis direction by the decrease in the luminance of the center portion 33A.

Therefore, when the lamp position is adjusted, the spot L of the condensed image is positioned so as to be at the center O2 of the index plate 34 to form the highest luminance, and the eccentricity of the lamp can be adjusted.

In the curved display panel 32, the light beam H4 is incident through the annular slit 31, and the Z-direction of the high-intensity Z-direction is contracted on the index plate 34, so that the Z-axis direction can be easily positioned.

Further, the above-described embodiments are merely illustrative of the present invention, and can be arbitrarily modified and applied without departing from the spirit and scope of the invention.

For example, a device (lamp position adjusting tool) that integrates the above-described curved display system 18 may be configured.

In particular, the illumination device 10 may be provided with a curved display system 18 in advance in the device housing, and the positional adjustment of the lamp 12 may be performed using the curved display system 18 when the lamp 12 is replaced.

Alternatively, for example, various tests such as evaluation of characteristics of an apparatus such as an irradiation apparatus of a semiconductor exposure apparatus or a solar cell of the present invention can be suitably applied to an appropriate irradiation apparatus (for example, Japanese Patent Application Laid-Open No. 2010-166726). The position of the lamp of the illumination device of the lamp is adjusted.

1‧‧‧Light position adjustment system

10‧‧‧Irrigation device

12‧‧‧ lights

14‧‧‧Condenser

16‧‧‧XYZ axis adjustment mechanism

17‧‧‧ penetrating plane mirror

18‧‧‧ Curved display system

30‧‧‧Reflecting mirror

31‧‧‧ ring gap

32‧‧‧ curved display panel (diffusion plate)

33‧‧‧Light reduction filter

33A‧‧‧ Central Department

33B‧‧‧ peripherals

34‧‧‧ indicator board

38‧‧‧Rough-shaped penetrating window

43‧‧‧ openings

50‧‧‧Concentric Circle

51‧‧‧ crosshairs

L‧‧‧ spot of spotlight

F1‧‧‧1st focus

F2‧‧‧2nd focus

K‧‧‧ optical axis

Ta, Tb‧‧‧ penetration rate

Fig. 1 is a schematic configuration diagram of a lamp position adjustment system.

Figure 2 is an enlarged view of the main part of the curved display system.

Figure 3 is a diagram showing the mode of the dimming filter.

Fig. 4 is a schematic view showing a spot of a condensed image on the index board, wherein (A) is a case where the lamp is not biased, and (B) is a case where the position of the lamp is biased only in the Z-axis direction (C) ) is a case where the position of the lamp is offset in the XY axis direction.

10‧‧‧Irrigation device

12‧‧‧ lights

12A‧‧‧End

14‧‧‧Condenser

16‧‧‧XYZ axis adjustment mechanism

16A‧‧‧X-axis table

16B‧‧‧Y-axis table

16C‧‧‧Z-axis table

17‧‧‧ penetrating plane mirror

18‧‧‧ Curved display system

20‧‧‧Rear-type column optical integrator

30‧‧‧Reflecting mirror

31‧‧‧ ring gap

31A‧‧‧Transparent sheet

32‧‧‧ curved display panel (diffusion plate)

33‧‧‧Light reduction filter

34‧‧‧ indicator board

35‧‧‧ Observation magnifying lens

36‧‧‧UV-IR shielding filter

37‧‧‧Visual dimming filter

H‧‧‧beam

H1-H4‧‧‧ Beam

F1‧‧‧1st focus

F2‧‧‧2nd focus

K‧‧‧ optical axis

Claims (4)

A lamp position adjusting method, comprising: a lamp and a condensing mirror that condenses light of the lamp; and a lamp position adjusting method of the illuminating device that outputs the condensed beam by the condensing mirror, wherein the concentrating image is diffused and penetrated by the concentrating image a diffusing plate at a focus position of the condensing mirror, wherein a light-reducing filter having a center portion having a higher transmittance than a peripheral portion is disposed inside the diffusing plate, and the center portion is aligned with an optical axis of the light beam, and is inside the light-reducing filter The indicator board is configured to adjust the position of the lamp according to the spot of the concentrated image of the diffuser projected onto the indicator board. The lamp position adjusting method according to claim 1, wherein the light beam of the condensing mirror is passed through the annular slit plate centered on the optical axis, and is incident on the diffusing plate. A lamp position adjusting device comprising: a lamp and a condensing mirror that condenses light of the lamp; and a lamp position adjusting tool for adjusting a lamp position of an irradiation device that emits a light beam condensed by the condensing mirror, characterized in that: a diffusing plate that diffuses the condensed image at a focus position of the condensing mirror; a transmittance of the center portion is higher than a peripheral portion, and the center portion is aligned with an optical axis of the light beam to be disposed inside the diffusing plate And a dimming filter disposed on the inner side of the dimming filter to project a condensed image of the diffusing plate and indicating the target position of the condensing image. An illuminating device comprising a lamp and a condensing mirror that condenses light of the lamp, and outputs an illuminating device that condenses the light beam by the condensing mirror, and is characterized by The lamp position adjusting tool for adjusting the position of the lamp, wherein the lamp position adjusting tool includes: a diffusing plate disposed at a focus position of the condensing mirror to diffuse and diffuse the condensed image; and a penetration ratio of the center portion to the periphery a light-reducing filter having a portion height aligned with an optical axis of the light beam and disposed inside the diffusing plate; and a light collecting image disposed on the inner side of the light-reducing filter and projected on the diffusing plate The indicator board of the target position of the concentrated image.